Bonding device and heating system

Abstract

The stage that applies ultrasonic vibrations to the workpiece is heated efficiently and without contact. [Solution] The stage 30 of the joining device has a support surface that supports at least the first member of the first and second members that constitute the workpiece, and a side surface 38 that is connected to the support surface and extends in a direction different from the support surface. The preheating device 40 preheats at least the first member of the workpiece by non-contact heating the stage 30 before joining the first member and the second member. The preheating device 40 includes a light source 41 that faces the side surface 38 of the stage 30 and emits heating light to heat the stage 30, and a hood-shaped reflective surface 42A that covers the light source 41 from the opposite side of the side surface 38. This reflective surface 42A is configured to reflect the reflected light from the heating light that has been reflected by the side surface 38 back towards the side surface 38.

Description

Technical Field

[0001] The present invention relates to a bonding device and a heating system.

Background Art

[0002] Patent Document 1 discloses a bonding device that applies ultrasonic vibration to a workpiece when bonding a first member and a second member of the workpiece.

Prior Art Document

Patent Document

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the bonding device described in Patent Document 1, a heater for bonding is attached to the ultrasonic horn. In this configuration, for example, since the heater becomes a foreign object with respect to the ultrasonic horn, the ultrasonic vibration may become unstable. Therefore, the inventor of the present application conceived of ultrasonically vibrating a stage that supports at least one of the first member and the second member of the workpiece. However, even in such a case, heating of the stage may be required for preheating the workpiece before bonding. Here, when a heater is brought into contact with the stage for heating the stage, the ultrasonic vibration may become unstable as in the bonding device described in Patent Document 1. It is also conceivable to heat the stage non-contact, but the conventional non-contact heating has poor heating efficiency. The problem of heating efficiency during non-contact heating is generally applicable to non-contact heating.

[0005] A first object of the present invention is to efficiently heat a stage that applies ultrasonic vibration to a workpiece in a non-contact manner. Further, a second object of the present invention is to efficiently heat a heating target in a non-contact manner.

Means for Solving the Problems

[0006] The joining apparatus according to this invention comprises a stage having a support surface for supporting at least the first member among the first and second members constituting a workpiece, and a first side surface connected to the support surface and extending in a direction different from the support surface, a heater tool that joins the first member and the second member by heating the workpiece from the side of the second member with the second member placed on the first member supported by the support surface, a vibration output device having an ultrasonic vibrating transducer that ultrasonically vibrates the stage during joining, and a first preheating device that preheats at least the first member of the workpiece by non-contact heating the stage before joining, wherein the first preheating device comprises a light source facing the first side surface of the stage and emitting heating light to heat the stage, and a hood-shaped reflective surface that covers the light source from the opposite side of the first side surface and reflects the reflected light from the heating light reflected by the first side surface toward the first side surface.

[0007] According to the above configuration, the stage that applies ultrasonic vibrations to the workpiece can be heated efficiently and without contact.

[0008] The heating system according to this invention comprises a heating device that heats the object to be heated without contact, comprising: a light source that faces the object to be heated and emits heating light to heat the object; a hood-shaped reflective surface that covers the light source from the opposite side of the object to be heated; and a support member that supports the heating device at a position in which the reflective surface can reflect the reflected light from the heating light that has been reflected by the object to be heated toward the object to be heated.

[0009] According to the above configuration, the object to be heated can be heated efficiently without contact. [Brief explanation of the drawing]

[0010] [Figure 1] This figure shows a perspective view of the main part of a joining device and the configuration of the control system of the joining device according to one embodiment of the present invention. [Figure 2]This figure shows a perspective view of the main part of a joining device and the configuration of the control system of the joining device according to one embodiment of the present invention. [Figure 3] This is a perspective view of a part of a joining device according to one embodiment of the present invention, and a perspective view showing a cross-section of some elements. [Figure 4] This is a perspective view of a part of a joining device according to one embodiment of the present invention, and a perspective view showing a cross-section of some elements. [Figure 5] This is a perspective view of a part of a joining device according to one embodiment of this invention. [Figure 6] This is a schematic cross-sectional view of a part of a joining device according to one embodiment of this invention. [Figure 7] This is a schematic cross-sectional view of a preheating device according to one embodiment of the present invention. [Modes for carrying out the invention]

[0011] The embodiments of this invention will be described in detail below with reference to the drawings. In the following description, the X, Y, and Z directions are mutually orthogonal directions. Furthermore, the +Z direction is defined as up and the -Z direction as down. The number of members described below is arbitrary. In particular, the multiple members shown in the drawings may be a single member, or there may be a different number of members than those shown.

[0012] The joining device 10 according to this embodiment, shown in Figures 1 and 2, is configured to heat a workpiece W and join a first member W1 and a plurality of second members W2 that constitute the workpiece W. The joining device 10 applies ultrasonic vibration to the workpiece W during joining. This improves the joining strength. The joining device 10 performs soldering or thermocompression bonding as the joining method. The joining device 10 may also be configured to perform resistance welding as the joining method. The joining device 10 may also be configured to perform other joining methods.

[0013] The bonding apparatus 10 comprises a vibration output device 20, a stage 30, two preheating devices 40, a heater tool 50, a controller 60, cooling devices 71-72, an intake device 73, a drive device 80, and power supply circuits 91-93.

[0014] The vibration output device 20 is configured to generate ultrasonic vibrations and output them to the stage 30. As shown in Figures 1 to 4, the vibration output device 20 comprises an ultrasonic vibrating transducer 21, a horn 22 that amplifies the vibrations of the transducer 21, and a support member 23 that supports the transducer 21 and the horn 22. The vibration output device 20 further comprises a vibration transmission member 24 that transmits the vibrations of the horn 22 to the stage 30, and a cooling mechanism 25 that cools the vibration transmission member 24. Each member 21 to 25 extends along the Z direction.

[0015] As shown in Figure 3, the transducer 21 is a Langevin-type transducer. Each terminal 21A to 21D of the transducer 21 is connected to a connector 101 fixed to the support member 23 via wiring (not shown). The connector 101 is connected to a power supply circuit 91 (Figures 1 and 2) via wiring (not shown).

[0016] The horn 22 comprises a horn body 22A formed in a generally frustoconical shape, and an annular (in this case, donut-shaped) flange 22B protruding from the side of the horn body 22A.

[0017] The lower end of the horn body 22A is connected to the transducer 21, and the upper end is connected to the vibration transmission member 24 (Figure 4). The method of connection is arbitrary. For example, screw holes can be made in the lower surface of the horn body 22A and the upper surface of the transducer 21, and the horn body 22A and the transducer 21 can be connected by double-ended screws that fit into these screw holes. The horn body 22A and the vibration transmission member 24 can also be connected in a similar manner. The horn body 22A amplifies the amplitude of the vibration of the transducer 21 and transmits it to the vibration transmission member 24.

[0018] The flange 22B protrudes from the position of the nodal point (node) that occurs in the horn body 22A when the horn body 22A vibrates ultrasonically. A support member 23 is fixed to the flange 22B.

[0019] The support member 23 also functions as a container for housing the vibrator 21. The support member 23 is fixed to a predetermined position of the bonding device 10 by being supported by a support mechanism (not shown). The support member 23 includes a connecting member 23A having an annular plate shape (here, a donut plate shape) connected to the flange 22B, a cylindrical member (here, a cylindrical member) 23B extending downward from the connecting member 23A, and a cover 23C covering the lower end of the cylindrical member 23B.

[0020] The connecting member 23A includes an elastic member 23AA, an elastic member 23AB, a clamping member 23AC, and a clamping member 23AD. All of these are formed in an annular plate shape (here, a donut plate shape). The clamping members 23AC and 23AD are fixed to each other in a state where the flange 22B of the horn 22 is sandwiched from above and below via the elastic members 23AA and 23AB. Thereby, the connecting member 23A is connected to the flange 22B. The flange 22B is provided at the nodal point of the horn body 22A and basically does not vibrate, but may vibrate slightly. The connecting member 23A can absorb this vibration by the elastic members 23AA and 23AB.

[0021] The cylindrical member 23B has an upper end fixed to the connecting member 23A and a lower end fixed to the cover 23C. The cylindrical member 23B covers the periphery of the vibrator 21 in a state of not contacting the vibrator 21, that is, with a gap from the vibrator 21.

[0022] A connector 101 and a joint 102 are fixed to the cover 23C covering the lower end of the cylindrical member 23B in a state of penetrating the cover 23C. As described above, the connector 101 is connected to the vibrator 21 and the power supply circuit 91 (FIGS. 1 and 2) via wiring (not shown). The joint 102 is connected to the cooling device 71 (FIGS. 1 and 2) via a tube (not shown).

[0023] The power supply circuit 91 connected to the connector 101 applies a high-frequency drive voltage to terminals 21A to 21D of the transducer 21. This causes the transducer 21 to vibrate ultrasonically. The transducer 21 expands and contracts in the Z direction during vibration. In other words, the transducer 21 outputs vibrations along the Z direction. The vibrations of the transducer 21 are transmitted to the horn 22, amplified by the horn 22, and then transmitted to the vibration transmission member 24.

[0024] The cooling device 71 cools the transducer 21, which generates heat when a drive voltage is applied, by supplying gas into the cylindrical member 23B via the joint 102 and a tube (not shown). The support member 23 also serves as a cooling mechanism for the transducer 21 by the cooling device 71. The cooling device 71 is composed of, for example, a blower (fan, blower, compressor, pump, etc.) that blows air (including compressed air) into the cylindrical member 23B via the joint 23E. The cooling device 71 may also be configured as an intake device that draws in air from outside the cylindrical member 23B to cool the transducer 21. The cooling device 71 may also be configured as a liquid cooling device that cools using an insulating liquid. The cooling device 71 as a blower may be directly fixed to the cover 23C.

[0025] As shown in Figure 4, the vibration transmission member 24 is rod-shaped and extends in the Z direction. The lower end of the vibration transmission member 24 is connected to the upper end of the horn 22 as described above. The upper end of the vibration transmission member 24 is connected to the lower end of the stage 30. This connection method is arbitrary, but here, a screw hole 31 is opened in the lower surface of the stage 30, and a screw hole (not shown) is also opened in the upper surface of the vibration transmission member 24, and the two are connected by double screws N1 that are screwed into these screw holes. Note that in Figure 4, the illustration of the double screws N1 and the threads of the screw hole 31 is omitted. The vibration transmission member 24 transmits ultrasonic vibrations from the horn 22 to the stage 30. At this time, the vibration transmission member 24 transmits the vibrations (especially the amplitude) without amplification. In other words, the vibration transmission member 24 is configured as a 1x booster.

[0026] The stage 30, which is connected to the vibration transmission member 24, is heated by a preheating device 40 (Figures 1 and 2), as described later. This heat is transferred to the vibration transmission member 24. It is also conceivable that the heat generated when the vibrator 21 is driven is transferred to the vibration transmission member 24 via the horn 22. The vibration transmission member 24 is cooled by a cooling mechanism 25 to prevent heat from the stage 30 side or the vibrator 21 side from being transferred to the opposite side.

[0027] The cooling mechanism 25 includes a cylindrical member (here, a cylindrical member) 25A and two sealing members 25B, such as O-rings. The two sealing members 25B are positioned at the upper and lower ends of the cylindrical member 25A, respectively. The cylindrical member 25A is fixed to the vibration transmission member 24 via the sealing members 25B. The cylindrical member 25A surrounds the vibration transmission member 24 at a distance from it. Multiple through holes 25AA are formed at the upper and lower ends of the cylindrical member 25A. A joint 103 is connected to each through hole 25AA. The joint 103 is connected to the through hole 25AA by fitting or screwing it into the through hole 25AA. The joint 103 is connected to a cooling device 72 (Figures 1 and 2) via a tube (not shown). The cooling mechanism 25 is structured to cool the vibration transmission member 24 with the cooling device 72.

[0028] The cooling device 72 cools the vibration transmission member 24 by supplying gas into the cylindrical member 25A via the joint 103 and a tube (not shown). The cooling device 72 consists of, for example, a blower (fan, blower, compressor, pump, etc.) that blows air (including compressed air) into the cylindrical member 25A via the joint 103 and a tube (not shown). The blown air flows between the cylindrical member 25A and the vibration transmission member 24, along the vibration transmission member 24, that is, along the Z direction, and is exhausted from a plurality of through holes 25AB formed in the middle of the cylindrical member 25A in the Z direction. The cooling device 72 may also be configured as an intake device, similar to the cooling device 71. In such a case, the through hole 25AA is configured as an exhaust port and the through hole 25AB is configured as an intake port. The cooling device 72 may also be configured as a liquid cooling device.

[0029] As shown in Figures 4 and 5, the stage 30 is formed in the shape of a rectangular parallelepiped, with each side extending in the X, Y, and Z directions, respectively. The stage 30 is formed in a plate shape, with the sides in the Y direction being shorter than the sides in the X direction. The stage 30 supports the first member W1 of the workpiece W before joining. The stage 30 also supports the workpiece W during and after joining the first member W1 and the second member W2. During joining, the stage 30 vibrates ultrasonically, causing the workpiece W to vibrate ultrasonically. As a result, ultrasonic vibration is applied to the workpiece W from the side of the first member W1. This application may cause the entire workpiece W to vibrate ultrasonically, or only the first member W1 of the workpiece W may vibrate ultrasonically. The joining strength is improved by the ultrasonic vibration.

[0030] The upper surface of the stage 30 serves as a support surface 32 for supporting the first member W1 during joining. This upper surface is provided with a projection 33 that engages with the first member W1 to position it. The projection 33 is formed to match the shape of the first member W1 of the workpiece W. Here, the projection 33 includes four types of projections 33A to 33D that surround each of the two projections W11 that protrude downward from the first member W1 when the first member W1 is placed on the stage 30, from both sides in the X and Y directions, and engage with each side surface of each projection W11.

[0031] Furthermore, the support surface 32 of the stage 30 has two intake ports 34 that attract the first member W1 (more specifically, the protrusion W11) to the support surface 32. As shown in Figure 4, the two intake ports 34 are each connected to two L-shaped intake passages 35 that pass through the stage 30. The end 35A of each intake passage 35 opposite to the intake port 34 opens to the side surface 37 of the stage 30. The side surface 37 connects to the support surface 32 and extends in a different direction from the support surface 32 (in this case, perpendicular to it). As shown in Figures 4 and 5, a joint 104 is connected to each end 35A. The joint 104 is connected to the end 35A by fitting or screwing it into the end 35A. The joint 104 is connected to the intake device 73 (Figures 1 and 2) via a tube (not shown). When the intake device 73 draws in air, the air surrounding the intake port 34 is drawn into the intake device 73 from the intake port 34 through the intake passage 35, the joint 104, and a tube (not shown). As a result, the first member W1 is attracted to the support surface 32 by the intake port 34. The intake port 34 is preferably formed on the bottom surface of the recess 32A of the support surface 32 of the stage 30. This makes the attraction area (the area that receives the force of the air supply) of the first member W1 the surface that corresponds to the entire recess 32A. The joint 104 is preferably positioned at the nodal point when the stage 30 vibrates ultrasonically.

[0032] A temperature sensor (e.g., a thermocouple) 106 is attached to the nodal point on the side 37 of the stage 30 to detect the temperature of the stage 30. The temperature detected by the temperature sensor 106 is supplied to the controller 60.

[0033] The two preheating devices 40 non-contactively heat the stage 30 before joining the first member W1 and the second member W2 of the workpiece W. This heating preheats the workpiece W supported on the stage 30. This preheating is performed to preheat the workpiece W so that its temperature quickly reaches the joining temperature during joining. The two preheating devices 40 may each be supported by two support members 110, as shown in Figure 5. As the preheating devices 40, for example, halogen heaters that heat the stage 30 with high-power light may be used.

[0034] As shown in Figure 6, the preheating device 40 comprises a light source 41 and a reflector 42. Note that the internal structure of the preheating device 40 is simplified in Figure 6. In reality, the preheating device 40 will have wiring and circuits for supplying current to the light source 41.

[0035] The light source 41 faces the side surface 38 of the stage 30 and emits heating light to heat the stage 30. The side surface 38 is connected to the support surface 32 and extends in a different direction from the support surface 32 (in this case, perpendicular to it). The side surface 38 is also connected to the side surface 37 and extends in a different direction from the side surface 37 (in this case, perpendicular to it). Since the stage 30 is cubic in shape, the sides 37 and 38 are configured as flat surfaces.

[0036] The reflective member 42 constitutes the housing of the preheating device 40. The reflective member 42 has a hood-shaped reflective surface 42A that covers the light source 41 from the opposite side of the side 38 of the stage 30. The end of the reflective surface 42A on the side 38 (i.e., the hood-shaped opening) is located on the side 38 side of the light source 41A. The entire area of ​​the end of the reflective surface 42A on the side 38 (i.e., the hood-shaped opening) is covered by the side 38 when viewed from the Y direction. The reflective surface 42A reflects the reflected light from the heating light that has been reflected by the side 38 back towards the side 38 (see, for example, the light indicated by arrow L1). The reflective surface 42A can function in this way due to its shape, as well as the support position of the preheating device 40 by the support member 110. The reflected light reflected by the side surface 38 may include not only light that is reflected once from the light source 41 by the reflective surface 42A and then reflected by the side surface 38, as indicated by arrow L1, but also light that is directly emitted from the light source 41 to the side surface 38 and reflected. Furthermore, the reflected light reflected by the side surface 38 may be light that has been reflected multiple times by the reflective surface 42A and / or the side surface 38. The heating light that reaches the side surface 38 includes light that is absorbed by the side surface 38 of the stage 30 and contributes to heating the stage 30, and light that is reflected by the side surface 38 of the stage 30. The heating light reflected by the side surface 38 can be reflected by the reflective surface 42A and reach the side surface 38 again. In this way, by providing the reflective surface 42A, the opportunities for the heating light to reach the side surface 38 are increased, and the heating efficiency by the heating light is improved.

[0037] The reflective surface 42A should be formed from a material with high reflectivity so as to reduce the absorption rate of heating light. For example, the reflective surface 42A should be formed from gold plating or a thin gold film. On the other hand, the stage 30 should be formed from a material that has a high absorption rate of heating light. Hardness and thermal conductivity should also be considered when selecting such a material. To ensure wear resistance against wear during ultrasonic vibration, the hardness of the stage 30 should be high. Also, when the stage 30 is heated, the thermal conductivity of the stage 30 should be low so that heat is not easily transferred to the transducer 21. Titanium oxide is a possible material for this purpose. The absorption rate of heating light is 0.05 for gold and 0.8 for titanium oxide. Thus, due to the relationship between the absorption rate of the reflective surface 42A and the absorption rate of the side surface 38, the absorption of heating light at the reflective surface 42A is suppressed, and the amount of heating light absorbed at the side surface 38 of the stage 30 increases. As a result, a high efficiency can be obtained in terms of the heating efficiency of the stage 30 by heating light. Furthermore, the greater the difference between the absorptivity of the reflective surface 42A and the absorptivity of the side surface 38, the higher the heating efficiency. This difference can be increased by using gold and titanium oxide. Titanium oxide may also be used as the material for the vibration transmission member 24 and the horn 22.

[0038] Furthermore, in order to prevent leakage of heating light from between the reflective surface 42A and the preheating device 40, the preheating device 40 (especially the end of the reflective surface 42A located on the side surface 38 side of the light source 41) and the side surface 38 should be brought close together. For example, the distance between the two should be d = 0.5 mm. Note that d may be a distance within the range of, for example, 0.01 mm to 10 mm, 0.01 mm to 1 mm, or 0.1 mm to 1 mm.

[0039] In each preheating device 40, the reflective surface 42A is preferably formed in a shape that focuses the heating light that reaches the reflective surface directly from the light source 41 to a predetermined focal point P, as shown in Figure 6, where L2 represents multiple beams of light. Such a preheating device 40 is a spot heater. To realize a spot heater, the light source 41 may be configured to emit all the heating light towards the reflective surface 42A first, rather than directly emitting the heating light to the side surface 38. Also, to realize a spot heater, the light source 41 may be configured such that the emission angle of the heating light that directly heads towards the side surface 38 is narrow. The spot heater reduces the amount of heating light traveling between the reflective surface 42A and the preheating device 40, thus further preventing light leakage. The distance between the preheating device 40 (especially the end of the reflective surface 42A located on the side surface 38 side of the light source 41) and the focal point P is also called the focal length D. The above distance d is preferably shorter than the focal length D. As a result, the distance d between the reflective surface 42A and the preheating device 40 is shortened, effectively preventing leakage of heating light, and the heating light is irradiated over a wider area than the focal point P, so that the side surface 38 is heated over a wide area.

[0040] The heater tool 50 shown in Figures 1 and 2 moves up and down in the Z direction by the drive device 80. The drive device 80 only needs to move the heater tool 50 and the stage 30 relative to each other in the Z direction, and in addition to or instead of the heater tool 50, the stage 30 and the vibration output device 20 may also be moved up and down. During joining, the heater tool 50 presses the second member W2 against the first member W1 while heating the workpiece W from the second member W2, for example, by pulse heating. Joining is performed by this heating. Before joining, the second member W2 may be placed on the first member W1, or it may be held by the heater tool 50 by suction or the like. Also, if the joining of the first member W1 and the second member W2 is done by soldering, solder is placed between them. In the latter case, the holding of the second member W2 should be released during or after joining. A known configuration can be used for the heater tool 50, so a detailed explanation is omitted.

[0041] The controller 60 shown in Figures 1 and 2 is configured to control the operation of the bonding device 10. The controller 60 consists of at least one or a combination of one or more computers, one or more FPGAs (Field-Programmable Gate Arrays), and one or more ASICs (Application Specific Integrated Circuits).

[0042] The controller 60 performs the following joining process when joining the first member W1 and the second member W2 of the workpiece W. At the start of the joining process, the first member W1 is positioned on the support surface 32 of the stage 30. The first member W1 is positioned by a protrusion 33 formed on the support surface 32. The second member W2 is held by a heater tool 50. The heater tool 50 is initially in a position away from the stage 30.

[0043] After the joining process begins, the controller 60 activates the intake device 73 to start intake. This initiates intake through the intake port 34, causing the first member W1 to be attracted to the support surface 32.

[0044] Subsequently, the controller 60 controls the power supply circuit 92, which is connected to the preheating device 40 via wiring not shown, to start supplying power from the power supply circuit 92 to the preheating device 40. As a result, the light source 41 of the preheating device 40 emits heating light, and the stage 30 is heated. The heating temperature at this time is lower than the joining temperature of the first member W1 and the second member W2 (for example, 200 degrees). The controller 60 may also use the temperature of the stage 30 detected by the temperature sensor 106 as a feedback value to feedback control the power supply circuit 92 (in other words, the heating of the stage 30 by the preheating device 40) so that the stage 30 reaches the desired temperature. The heating of the stage 30 preheats the first member W1. Note that the heating of the stage 30 may start after the heater tool 50 starts pressing the second member W2 against the first member W1, as described later. In such a case, the entire workpiece W is heated from the side of the first member W1. The heating in stage 30 is maintained, for example, until heating by the heater tool 50 described later.

[0045] The controller 60 starts the operation of the cooling device 72 when preheating begins, which initiates the cooling of the vibration transmission member 24 by the cooling mechanism 25, thereby suppressing the transfer of heat from the stage 30 to the vibrator 21.

[0046] The controller 60 controls the drive unit 80 to move the heater tool 50 downward and begin pressing the second member W2 against the first member W1 using the heater tool 50. Subsequently, the controller 60 controls the power supply circuit 91 to cause the transducer 21 to vibrate ultrasonically. This ultrasonic vibration is output to the stage 30 via the horn 22 and the vibration transmission member 24. This ultrasonic vibration is amplified by the horn 22. The stage 30 vibrates ultrasonically in response to the input of the ultrasonic vibration. Due to the ultrasonic vibration of the stage 30, ultrasonic vibration is applied to the workpiece W, which consists of the first member W1 and the second member W2, from the side of the first member W1. This application may cause the entire workpiece W to vibrate ultrasonically, or only the first member W1 of the workpiece W may vibrate ultrasonically. The latter phenomenon can occur especially when the second member W2 is firmly held by the heater tool 50. If solder is interposed between the first member W1 and the second member W2, the solder may also vibrate ultrasonically. The second member W2 is held by the heater tool 50 before the ultrasonic vibration is generated, or it may be held until immediately before or after joining, as described later.

[0047] When the controller 60 starts to ultrasonically vibrate the transducer 21, it starts the operation of the cooling device 71 and begins to cool the transducer 21.

[0048] The controller 60 controls the power supply circuit 93, which is connected to the heater tool 50 via wiring not shown, and starts supplying power from the power supply circuit 93 to the heater tool 50. As a result, the heater tool 50 generates heat, heating of the second member W2 of the workpiece W begins, and joining of the first member W1 and the second member W2 is achieved. The controller 60 may also detect the temperature of the heater tool 50 using a temperature sensor or the like, and control the power supply circuit 93 (more specifically, the amount of power supplied to the heater tool 50) based on that temperature so that the temperature of the heater tool 50 reaches a desired temperature. Power control to the heater tool 50 via the power supply circuit 93 can be performed by any method (for example, power control that realizes pulsed heating).

[0049] After the power supply to the heater tool 50 is terminated, that is, after the bonding is complete, the controller 60 terminates the power supply circuits 91-92 and ends the generation of ultrasonic vibration and preheating. These may be terminated at any time, such as during bonding or immediately before bonding. Furthermore, the controller 60 terminates the suction of the first member W1 and each cooling process at any time. The controller 60 also controls the drive device 80 to raise the heater tool 50 to its initial position so that the bonded workpiece W can be removed.

[0050] As described above, the stage 30 of the joining apparatus 10 according to this embodiment has a support surface 32 that supports at least the first member W1 of the first member W1 and second member W2 that constitute the workpiece W, and a side surface 38 that is connected to the support surface 32 and extends in a direction different from the support surface 32. Furthermore, the heater tool 50 joins the first member W1 and the second member W2 by heating the workpiece W from the side of the second member W2 with the second member W2 placed on the first member W1 supported by the support surface 32. Furthermore, the vibration output device 20 has a transducer 21 that vibrates ultrasonically and vibrates the stage 30 ultrasonically during the joining. Then, the preheating device 40 preheats at least the first member W1 of the workpiece W by non-contact heating the stage 30 before the joining. The preheating device 40 comprises a light source 41 that faces the side surface 38 of the stage 30 and emits heating light to heat the stage 30, and a hood-shaped reflective surface 42A that covers the light source 41 from the opposite side surface 38. This reflective surface 42A is configured to reflect the reflected light from the heating light that has been reflected by the side surface 38 back towards the side surface 38. With this configuration, the stage 30 can apply ultrasonic vibration to the workpiece W by ultrasonic vibration, causing the workpiece W to vibrate ultrasonically. Furthermore, because the preheating device 40, which heats the stage 30 without contact, is equipped with the reflective surface 42A, the heating light reflected by the side surface 38 can be reflected by the reflective surface 42A and reach the side surface 38 again. This increases the opportunities for the heating light to reach the side surface 38, thereby increasing the amount of heating light absorbed by the side surface 38 and improving the heating efficiency by heating light. As described above, according to this embodiment, the stage 30 can be heated with high heating efficiency despite being heated without contact.

[0051] Furthermore, the preheating device 40 is a spot heater formed such that the reflective surface 42A collects the heating light that directly reaches the reflective surface 42A from the light source 41. As a result, the amount of heating light directed between the preheating device 40 and the reflective surface 42A is reduced, and consequently, the amount of heating light leaking from between the preheating device 40 and the reflective surface 42A is reduced, allowing the stage 30 to be heated with high heating efficiency.

[0052] The distance d between the preheating device 40 and the side surface 38 should be shorter than the focal length D of the heating light focused by the preheating device 40 as a spot heater. This narrows the space between the preheating device 40 and the reflective surface 42A, reducing the amount of heating light leaking through this space and resulting in high heating efficiency. In addition, the irradiation range of the heating light on the side surface 38 becomes wider than the focal point P of the heating light, so that the side surface 38 is heated over a wide area. Furthermore, since the reflective surface 42A also reflects the heating light reflected by the side surface 38, the stage 30 is heated with overall high heating efficiency.

[0053] Furthermore, by positioning the preheating device 40 close to the side surface 38, the space between the preheating device 40 and the reflective surface 42A can be narrowed, reducing the amount of heating light leaking from this space, and allowing the stage 30 to be heated with high heating efficiency. As described above, the proximity distance between the two should be within the range of 0.01 mm to 1.0 cm. Alternatively, the proximity distance may be within the range of, for example, 0.1 mm to 10 mm, 0.01 mm to 1 mm, or 0.1 mm to 1 mm. The proximity distance should be such that the preheating device 40 does not come into contact with the ultrasonically vibrating stage 30.

[0054] Furthermore, the absorption rate of heating light on the reflective surface 42A is lower than that of the side surface 38. As a result, the heating light reflected between the reflective surface 42A and the side surface 38 is more likely to be absorbed by the side surface 38 than by the reflective surface 42A, thereby heating the stage 30 with high heating efficiency.

[0055] As is clear from Figure 5, the support surface 32 is formed as a rectangle with a first side extending in the X direction and a second side extending in the Y direction, and the stage 30 is formed as a rectangular parallelepiped. The first side is longer than the second side. Furthermore, the side surface 38 is a surface with the first side as one side. The side surface 37 is a surface with the second side as one side. With this configuration, the thickness of the stage 30 (length in the Y direction) with respect to the irradiation direction of the heating light (Y direction) can be made thin, thereby allowing the temperature of the stage 30 to rise quickly to the desired temperature, and further reducing uneven heating in the thickness direction of the stage 30. Furthermore, because the side surface 38 is a flat surface, the heating light is efficiently absorbed by the side surface 38. For example, the side surface 38 only needs to be formed in a shape where at least the part irradiated with heating light is flat (the other shapes of the stage 30 are arbitrary).

[0056] Furthermore, in this embodiment, two preheating devices 40 heat two parallel and opposite sides 38 of the stage 30. This allows the stage 30 to be heated from both directions, enabling the temperature of the stage 30 to rise quickly to the desired temperature, and also reducing uneven heating in the direction from one side 38 to the other. The support surface 32 is formed as a rectangle having two first sides extending in the X direction and two second sides extending in the Y direction, as described above. The first sides are longer than the second sides. The two sides 38 are surfaces with the two first sides as one side each. With this configuration, the thickness of the stage 30 (length in the Y direction) relative to the irradiation direction of the heating light (Y direction) can be reduced, thereby reducing uneven heating in the thickness direction of the stage 30.

[0057] Furthermore, in this embodiment, a protrusion 33 is formed on the support surface 32 that engages with the first member W1 to position the first member W1. This protrusion 33 suppresses displacement of the first member W1 when the stage 30 vibrates ultrasonically.

[0058] Furthermore, an air intake port 34 is provided in the support surface 32, and the support surface 32 is configured to attract the first member W1 by the air intake port 34. This attraction suppresses the displacement of the first member W1 when the stage 30 vibrates ultrasonically.

[0059] Furthermore, an intake passage 35 is formed inside the stage 30, connected to the intake port 34, through which the air drawn in by the intake port 34 passes. The opening position in the stage 30 at the end 35A of the intake passage 35 opposite the intake port 34 is the position of the nodal point when the stage 30 vibrates ultrasonically. This reduces the ultrasonic vibration of intake components connected to the opening, thereby reducing deterioration of those components due to ultrasonic vibration. In particular, a joint 104 is connected to the end 35A, and the intake device 73 draws in air from around the intake port 34 via the joint 104, the intake passage 35, and the intake port 34. In this case, the ultrasonic vibration of the joint 104 and tubes (not shown) connected to the joint 104 is reduced, thereby reducing deterioration of these components due to ultrasonic vibration.

[0060] Furthermore, the vibration output device 20 includes a horn 22 that amplifies the ultrasonic vibrations output by the transducer 21, a vibration transmission member 24 that transmits the ultrasonic vibrations amplified by the horn 22 to the stage 30, and a cooling mechanism 25 that cools the vibration transmission member 24. With this configuration, even if heat from the stage 30 is transmitted to the vibration transmission member 24, the vibration transmission member 24 is cooled by the cooling mechanism 25, making it difficult for heat from the stage 30 to be transmitted to the horn 22 and transducer 21. In addition, by providing the vibration transmission member 24, the distance between the horn 22 and transducer 21 and the stage 30 can be increased, making it even more difficult for heat from the stage 30 to be transmitted to the horn 22 and transducer 21.

[0061] As is clear from Figures 1 and 2, the preheating device 40 is preferably configured to irradiate the upper end of the stage 30 (the end where the support surface 32 is located) with heating light, but not the opposite lower end. This allows a temperature gradient to be created between the lower end of the stage 30, which is the end on the vibration output device 20 side, and the upper end, which is the irradiation position of the heating light. This suppresses the temperature rise at the lower end and reduces the thermal impact on the vibrator 21 and other components.

[0062] The cooling mechanism 25 includes a cylindrical member 25A that covers the vibration transmission member 24, and is configured to flow a coolant between the vibration transmission member 24 and the cylindrical member 25A. The coolant is air from the cooling device 72, for example. This configuration enables cooling of the vibration transmission member 24 with a simple configuration. The sealing member 25B, which is interposed between the vibration transmission member 24 and the cylindrical member 25A to support the cylindrical member 25A, is preferably positioned at the nodal point of the vibration transmission member 24 during ultrasonic vibration. This reduces the transmission of vibrations to the cylindrical member 25A.

[0063] The vibration output device 20 further includes a support member 23 as a cooling mechanism for cooling the vibrator 21. This prevents the vibrator 21 from becoming overheated.

[0064] Furthermore, the bonding device 10 includes a temperature sensor 106 for detecting the temperature of the stage 30, and a controller 60 for controlling the heating of the stage 30 by the preheating device 40 based on the temperature detected by the temperature sensor 106. The temperature sensor 106 is fixed to the position of the nodal point of the stage 30 when the stage 30 vibrates ultrasonically. This reduces the adverse effects of the ultrasonic vibration of the stage 30 on the temperature sensor 106.

[0065] However, in this embodiment, there is a problem in that the heat from the stage 30 is not easily transferred to the oscillator 21. Configuration A below can be considered as a solution to this problem. According to configuration A below, the heat from the stage 30 can be not easily transferred to the oscillator 21 (including not being transferred at all). In this case, the preheating device 40 may heat the stage 30 by contacting it. Any configuration from the above embodiment can be adopted for configuration A below. (Configuration A) A stage having a support surface that supports at least the first member among the first and second members constituting the workpiece, and a first side surface that is connected to the support surface and extends in a direction different from the support surface, A heater tool that joins the first member and the second member by heating the workpiece from the side of the second member while the second member is placed on the first member supported by the support surface, A vibration output device having an ultrasonic vibrating transducer that causes the stage to vibrate ultrasonically during bonding, The system includes a preheating device that preheats at least the first member of the workpiece by heating the stage before the joining, The vibration output device is A horn that amplifies the ultrasonic vibrations output by the transducer, A vibration transmission member that transmits the ultrasonic vibrations amplified by the horn to the stage, The system includes a first cooling mechanism for cooling the vibration transmission member, Bonding equipment.

[0066] The present invention can be applied not only to joining devices but also to heating systems in general that heat objects without contact. The heating system may have the following configuration B. Examples of objects to be heated include components that are difficult to heat by contact due to vibration. Any part of the configuration of the above embodiment can be applied to the following heating system. For example, any part of the configuration of the stage 30 can be applied as the shape of the object to be heated. Also, any part of the configuration of the preheating device 40 can be applied as the configuration of the heating device. (Configuration B) A heating device comprising a light source facing the object to be heated and emitting heating light to heat the object, and a hood-shaped reflective surface covering the light source from the opposite side of the object to be heated, for non-contact heating of the object, The heating device is supported by a support member that supports the reflective surface at a position where the reflective surface can reflect the reflected light from the heating object toward the heating object, A heating system equipped with the following features.

[0067] (Scope of the present invention) The present invention is not limited to the embodiments described above. For example, the present invention includes various modifications to the above embodiments and modifications that can be understood by those skilled in the art within the scope of the technical concept of the present invention. The configurations listed in the above embodiments and modifications can be combined as appropriate to the extent that they do not contradict each other. It is also possible to delete any of the above configurations.

[0068] (Note) The following examples illustrate configurations based on the above embodiments and modifications. Any partial configuration of the above embodiments and modifications may be applied to each appendix. Furthermore, parts of each appendix may be combined. (Note 1) A stage having a support surface that supports at least the first member among the first and second members constituting the workpiece, and a first side surface that is connected to the support surface and extends in a direction different from the support surface, A heater tool that joins the first member and the second member by heating the workpiece from the side of the second member while the second member is placed on the first member supported by the support surface, A vibration output device having an ultrasonic vibrating transducer that causes the stage to vibrate ultrasonically during bonding, The system includes a first preheating device that preheats at least the first member of the workpiece by non-contact heating the stage before the joining, The first preheating device, A light source facing the first side surface of the stage and emitting heating light to heat the stage, The light source is provided with a hood-shaped reflective surface that covers the light source from the opposite side of the first side surface, and the reflective surface reflects the reflected light from the first side surface toward the first side surface. Bonding equipment. (Note 2) The preheating device is a spot heater in which the reflective surface is shaped to concentrate the heating light that reaches the reflective surface directly from the light source. The joining device described in Appendix 1. (Note 3) The distance between the preheating device and the first side surface is shorter than the focal length of the heating light focused by the preheating device, which is a spot heater. The joining device described in Appendix 2. (Note 4) The preheating device is located adjacent to the first side surface. The joining device described in Appendix 1 or 2. (Note 5) The distance between the preheating device and the first side surface is within the range of 0.3 mm to 1.0 cm. The joining device described in Appendix 4. (Note 6) The absorption rate of the heating light on the reflective surface is lower than the absorption rate of the heating light on the first side surface. A joining device as described in any of the appendices 1 to 5. (Note 7) The support surface is formed in the shape of a rectangle having a first side extending in the X direction and a second side extending in the Y direction perpendicular to the X direction. The first side is longer than the second side. The first side is a surface with the first side as one of its edges. A bonding device as described in any of the appendices 1 to 6. (Note 8) The stage is connected to the support surface and further comprises a second side parallel to and opposite to the first side, The bonding apparatus further comprises a second preheating device that preheats the stage non-contact before bonding, The aforementioned second preheating device, A light source that emits heating light to heat the stage, facing the second side surface of the stage, The light source is provided with a reflective surface that covers the light source from the opposite side of the second side, and is a hood-shaped reflective surface that reflects the reflected light from the second side of the heating light toward the second side, A bonding device as described in any of the appendices 1 to 7. (Note 9) The support surface is formed in the shape of a rectangle having two first sides extending in the X direction and two second sides extending in the Y direction perpendicular to the X direction. The two first sides are longer than the two second sides. The first side and the second side are surfaces with the two first edges each forming one side. The joining device described in Appendix 8. (Note 10) A protrusion is formed on the support surface that engages with the first member to position the first member. A bonding device as described in any of the appendices 1 to 9. (Note 11) The aforementioned support surface has an air intake port for drawing in air. The support surface is configured to attract the first member by the intake air from the intake port. A bonding device as described in any of the appendices 1 to 10. (Note 12) Inside the aforementioned stage, an intake passage is formed which is connected to the intake port and through which the air drawn in by the intake port passes. The opening position on the stage at the end of the intake passage opposite to the intake port is the position of the nodal point when the stage vibrates ultrasonically. A bonding device as described in any of the appendices 1 to 11. (Note 13) A joint connected to the aforementioned end, The system further comprises the aforementioned joint, the aforementioned intake passage, and an intake device that draws in air from around the intake port through the intake port. The joining device described in Appendix 12. (Note 14) The vibration output device is A horn that amplifies the ultrasonic vibrations output by the transducer, A vibration transmission member that transmits the ultrasonic vibrations amplified by the horn to the stage, The system includes a first cooling mechanism for cooling the vibration transmission member, A bonding device as described in any of the appendices 1 to 13. (Note 15) The first cooling mechanism comprises a cylindrical member covering the vibration transmission member, and is configured to flow a refrigerant between the vibration transmission member and the cylindrical member. The joining device described in Appendix 14. (Note 16) The vibration output device further comprises a second cooling mechanism for cooling the vibrator. The joining device described in Appendix 14. (Note 17) A temperature sensor for detecting the temperature of the stage, The system further comprises a controller that controls heating of the stage by the first preheating device based on the temperature detected by the temperature sensor, The temperature sensor is fixed at the position of the nodal point of the stage when the stage vibrates ultrasonically. A bonding device as described in any of the appendices 1 to 16. (Note 18) A stage having a support surface that supports at least the first member among the first and second members constituting the workpiece, and a first side surface that is connected to the support surface and extends in a direction different from the support surface, A heater tool that joins the first member and the second member by heating the workpiece from the side of the second member while the second member is placed on the first member supported by the support surface, A vibration output device having an ultrasonic vibrating transducer that causes the stage to vibrate ultrasonically during bonding, The system includes a preheating device that preheats at least the first member of the workpiece by heating the stage before the joining, The vibration output device is A horn that amplifies the ultrasonic vibrations output by the transducer, A vibration transmission member that transmits the ultrasonic vibrations amplified by the horn to the stage, The system includes a first cooling mechanism for cooling the vibration transmission member, Bonding equipment. (Note 19) A heating device comprising a light source facing the object to be heated and emitting heating light to heat the object, and a hood-shaped reflective surface covering the light source from the opposite side of the object to be heated, for non-contact heating of the object, The heating device is supported by a support member that supports the reflective surface at a position where the reflective surface can reflect the reflected light from the heating object toward the heating object, A heating system equipped with the following features. The configuration in question may be any of the configurations described in Appendix 2 to 9. [Explanation of Symbols]

[0069] 10...Joining device, 20...Vibration output device, 21...Vibrator, 21A~21D...Terminal, 22...Horn, 22A...Horn body, 22B...Flange, 23...Support member, 23A...Connecting member, 23AA~23AB...Elastic member, 23AC~23AD...Clamping member, 23B...Cylindrical member, 23C...Cover, 23E...Joint, 24...Vibration transmission member, 25...Cooling mechanism, 25A...Cylindrical member, 25AA~25AB...Through hole, 25B...Sealing member, 30...Stage, 31...Screw hole, 32...Support surface, 32A...Recess, 33,33A~33D...Convex Part, 34...Air intake port, 35...Air intake passage, 35A...End, 37~38...Side, 40...Preheating device, 41...Light source, 42...Reflective member, 42A...Reflective surface, 50...Heater tool, 60...Controller, 71~72...Cooling device, 73...Air intake device, 80...Drive device, 91~93...Power supply circuit, 101...Connector, 102~104...Joint, 106...Temperature sensor, 110...Support member, d...Distance, D...Focal length, L1...Arrow, L2...Light, N1...Double screw, P...Focus, W...Workpiece, W1...First member, W2...Second member, W11...Convex part.

Claims

1. A stage having a support surface that supports at least the first member among the first and second members constituting the workpiece, and a first side surface that is connected to the support surface and extends in a direction different from the support surface, A heater tool that joins the first member and the second member by heating the workpiece from the side of the second member while the second member is placed on the first member supported by the support surface, A vibration output device having an ultrasonic vibrating transducer that causes the stage to vibrate ultrasonically during bonding, The system includes a first preheating device that preheats at least the first member of the workpiece by non-contact heating the stage before the joining, The first preheating device is A light source facing the first side surface of the stage and emitting heating light to heat the stage, The light source is provided with a hood-shaped reflective surface that covers the light source from the opposite side of the first side surface, and the reflective surface reflects the heated light reflected by the first side surface toward the first side surface, Bonding equipment.

2. The preheating device is a spot heater in which the reflective surface is shaped to concentrate the heating light that reaches the reflective surface directly from the light source. The joining device according to claim 1.

3. The distance between the preheating device and the first side surface is shorter than the focal length of the heating light focused by the preheating device, which is a spot heater. The joining device according to claim 2.

4. The preheating device is located in close proximity to the first side surface. The joining device according to claim 1.

5. The distance between the preheating device and the first side surface is within the range of 0.01 mm to 1.0 cm. The joining device according to claim 4.

6. The absorption rate of the heating light on the reflective surface is lower than the absorption rate of the heating light on the first side surface. The joining device according to claim 1.

7. The support surface is formed in the shape of a rectangle having a first side extending in the X direction and a second side extending in the Y direction perpendicular to the X direction. The first side is longer than the second side. The first side is a surface with the first side as one of its edges. The joining device according to claim 1.

8. The stage is connected to the support surface and further comprises a second side parallel to and opposite to the first side, The bonding apparatus further comprises a second preheating device that preheats the stage non-contact before bonding, The second preheating device is, A light source facing the second side surface of the stage and emitting heating light to heat the stage, The light source is covered from the opposite side of the second side, and the reflective surface is hood-shaped and reflects the reflected light from the second side toward the second side of the heating light, The joining device according to claim 1.

9. The support surface is formed as a rectangle having two first sides extending in the X direction and two second sides extending in the Y direction perpendicular to the X direction. The two first sides are longer than the two second sides. The first side and the second side are surfaces with the two first edges each forming one side. The joining device according to claim 8.

10. A protrusion is formed on the support surface that engages with the first member to position the first member. The joining device according to claim 1.

11. The aforementioned support surface has an air intake port for drawing in air. The support surface is configured to attract the first member by the intake air from the intake port. The joining device according to claim 1.

12. Inside the aforementioned stage, an intake passage is formed which is connected to the intake port and through which the air drawn in by the intake port passes. The opening position on the stage at the end of the intake passage opposite to the intake port is the position of the nodal point when the stage vibrates ultrasonically. The joining device according to claim 1.

13. A joint connected to the aforementioned end, The system further comprises the aforementioned joint, the aforementioned intake passage, and an intake device that draws in air from around the intake port through the intake port. The joining device according to claim 12.

14. The vibration output device is A horn that amplifies the ultrasonic vibrations output by the transducer, A vibration transmission member that transmits the ultrasonic vibrations amplified by the horn to the stage, The system includes a first cooling mechanism for cooling the vibration transmission member, The joining device according to claim 1.

15. The first cooling mechanism comprises a cylindrical member that covers the vibration transmission member, and is configured to flow a refrigerant between the vibration transmission member and the cylindrical member. The joining device according to claim 14.

16. The vibration output device further comprises a second cooling mechanism for cooling the vibrator. The joining device according to claim 14.

17. A temperature sensor for detecting the temperature of the stage, The system further comprises a controller that controls heating of the stage by the first preheating device based on the temperature detected by the temperature sensor, The temperature sensor is fixed at the position of the nodal point of the stage when the stage vibrates ultrasonically. The joining device according to claim 1.

18. A heating device comprising a light source facing the object to be heated and emitting heating light to heat the object, and a hood-shaped reflective surface covering the light source from the opposite side of the object to be heated, for non-contact heating of the object, The heating device is supported by a support member that supports the reflective surface at a position where the reflective surface can reflect the reflected light from the heating object toward the heating object, A heating system equipped with the following features.

Images