Cleaning equipment and electronic component mounting equipment

Abstract

To provide a cleaning device and an electronic component mounting device that perform cleaning efficiently without reducing cycle time. [Solution] The cleaning apparatus of the embodiment is characterized by comprising: a stage on which a display panel having one or more electrode rows to be cleaned is placed, and which moves in a first direction which is the transport direction of the display panel, a second direction which intersects the first direction, and a rotational direction which is the axis of a third direction which intersects the first and second directions; one or more first cleaning units which move in the second direction and clean one or more of the electrode rows on the display panel which moves in the first direction as the stage unit moves; and a second cleaning unit which is positioned at a reference position for positioning the electrode row to be cleaned from among the one or more electrode rows, and which cleans one or more of the electrode rows on the display panel which moves in the first direction as the stage unit moves.

Description

Technical Field

[0001] Embodiments of the present invention relate to a cleaning device and a mounting device for electronic components.

Background Art

[0002] In display devices such as liquid crystal displays and OLED displays, when mounting a driver IC on a display panel, a technique is used in which the driver IC is mounted on a film-like wiring circuit board containing polyimide, called COF (Chip on Film or Chip on Flexible).

[0003] An electrode row having electrically continuous connection lead terminals is provided along the edge of the display panel of these display devices. After an anisotropic conductive member called a tape-like ACF (Anisotropic Conducting Film) is attached to this electrode row, the driver IC is pressure-bonded.

[0004] In the process before the ACF is attached, foreign matter may adhere to the electrode row. If the ACF is attached to the electrode row with these foreign matters present, a connection failure will occur. Therefore, the display panel is cleaned by a cleaning device and the foreign matters are removed before the ACF is attached.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] In the cleaning apparatus described above, multiple cleaning units, including ultrasonic cleaning, wiping cleaning, and plasma cleaning, are arranged along the substrate transport path. In this apparatus, the electrode rows are cleaned as the substrate is transported and passes through each cleaning unit.

[0007] However, in recent years, the display panel market has seen a demand for the manufacture of irregularly shaped display panels used in vehicles and other applications. Such display panels have curved surfaces (curved sections) and concave edges (notched sections). There is a need for a cleaning device that can also clean the electrode rows located in curved sections, notched sections, and other areas with varying depths on such display panels.

[0008] Therefore, embodiments of the present invention provide a cleaning apparatus and an electronic component mounting apparatus that can clean electrode rows arranged in curved or notched portions of a display panel. [Means for solving the problem]

[0009] The cleaning apparatus of the embodiment is characterized by comprising: a stage on which a display panel having one or more electrode rows to be cleaned is placed, and which moves in a first direction which is the transport direction of the display panel, a second direction which intersects the first direction, and a rotational direction which is the axis of a third direction which intersects the first and second directions; one or more first cleaning units which move in the second direction and clean one or more of the electrode rows on the display panel which moves in the first direction as the stage unit moves; and a second cleaning unit which is positioned at a reference position for positioning the electrode row to be cleaned from among the one or more electrode rows, and which cleans one or more of the electrode rows on the display panel which moves in the first direction as the stage unit moves. [Brief explanation of the drawing]

[0010] [Figure 1] This is an example of connecting the display panel to be crimped and the electronic component in this embodiment. [Figure 2]This is an example of the connection between the electrode row ER of the display panel and the terminal row TR of the electronic component in this embodiment. [Figure 3] This is a cross-sectional view showing the crimped portion of the ACF in the display panel and electronic component in this embodiment. [Figure 4] This is a top view showing an example of the configuration of the mounting device in this embodiment. [Figure 5] This is a schematic diagram of the adhesive device in this embodiment. [Figure 6] This is a schematic diagram of the temporary crimping device in this embodiment. [Figure 7] This is a schematic diagram of the crimping device in this embodiment. [Figure 8] This is a schematic diagram of the cleaning device in this embodiment. [Figure 9] This is a schematic diagram of the ultrasonic cleaning unit in this embodiment. [Figure 10] This is a schematic diagram of the wipe-cleaning unit in this embodiment. [Figure 11] This is a schematic diagram of the plasma cleaning unit in this embodiment. [Figure 12] This is an example of a block diagram of the control unit in this embodiment. [Figure 13] This is the first diagram illustrating the procedure for positioning the cleaning device in this embodiment. [Figure 14] This is the second figure illustrating the procedure for positioning the cleaning device in this embodiment. [Figure 15] This is the third figure illustrating the procedure for positioning the cleaning device in this embodiment. [Figure 16] This is the fourth figure illustrating the procedure for positioning the cleaning device in this embodiment. [Figure 17] This is the fifth figure illustrating the procedure for positioning the cleaning device in this embodiment. [Figure 18] This is the sixth figure illustrating the procedure for positioning the cleaning device in this embodiment. [Figure 19] This is the seventh figure illustrating the procedure for positioning the cleaning device in this embodiment. [Figure 20] It is a diagram for explaining another positioning procedure of the cleaning device in the present embodiment. [Figure 21] It is a flowchart of cleaning in the present embodiment. [Figure 22] It is a diagram for explaining the positioning procedure of the cleaning device in the comparative example. [Figure 23] It is the first diagram for explaining the positioning procedure of the cleaning device in the first modification of the present embodiment. [Figure 24] It is the second diagram for explaining the positioning procedure of the cleaning device in the first modification of the present embodiment. [Figure 25] It is the third diagram for explaining the positioning procedure of the cleaning device in the first modification of the present embodiment. [Figure 26] It is the fourth diagram for explaining the positioning procedure of the cleaning device in the first modification of the present embodiment. [Figure 27] It is the first diagram for explaining the positioning procedure of the cleaning device in the second modification of the present embodiment. [Figure 28] It is the second diagram for explaining the positioning procedure of the cleaning device in the second modification of the present embodiment. [Figure 29] It is the third diagram for explaining the positioning procedure of the cleaning device in the second modification of the present embodiment. [Figure 30] It is the fourth diagram for explaining the positioning procedure of the cleaning device in the second modification of the present embodiment.

Mode for Carrying Out the Invention

[0011] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. This embodiment does not limit the present invention. The drawings are schematic or conceptual, and the ratios of each part, etc. are not necessarily the same as those in reality. In the specification and drawings, the same elements as those described above with respect to the existing drawings are denoted by the same reference numerals, and detailed descriptions are omitted as appropriate.

[0012] Furthermore, in this disclosure, the terms "greater than or equal to" and "less than or equal to" may be interpreted as "greater than" and "less than," respectively.

[0013] Furthermore, the X, Y, and Z axes described below represent axes perpendicular to each other. The X and Y directions intersect each other and correspond to the horizontal direction perpendicular to the direction of gravity, while the Z direction corresponds to the vertical direction intersecting the X and Y directions. Additionally, the +Z direction corresponds to the upward direction, and the -Z direction corresponds to the downward direction. The θ direction corresponds to the direction of rotation with the Z axis as the axis of rotation. The X direction is an example of the first direction, the Y direction is an example of the second direction, and the Z direction is an example of the third direction.

[0014] Figure 1 shows an example of the connection between the display panel 100 and the electronic component 300 to be cleaned in this embodiment. Figure 2 shows an example of the connection between the electrode row ER of the display panel 100 and the terminal row TR of the electronic component 300 in this embodiment, and shows an enlarged view of one crimping location on the display panel 100 and the electronic component 300.

[0015] Referring to Figures 1 and 2, the display panel 100 and electronic components 300 to be cleaned according to this embodiment will be described. In this example, as shown in Figures 1(A) to (F), a case in which multiple electronic components 300 are crimped along the edge of the display panel 100 will be described, but only one electronic component 300 may be crimped. Figure 1 shows an example in which multiple electronic components 300 are crimped onto a relatively large display panel 100 used in vehicles, etc.

[0016] The following describes examples of electronic components 300 arranged along the edges of the display panel 100, including not only cases where the electronic components 300 are arranged on the same line, but also cases where the electronic components 300 are arranged along the edges of the display panel 100 including curved portions, cases where the electronic components 300 are arranged along the edges of the display panel 100 including rectangular notches, and cases where the electronic components 300 are arranged along the edges of multiple sides of the display panel 100, and so on, where the electronic components 300 are arranged on non-collinear lines. (A) to (F) are examples in which multiple electronic components 300 are arranged on the same line or non-collinear lines, or where multiple electronic components 300 are arranged in a mixed manner on the same line or non-collinear lines.

[0017] Figures 1(A), (B), and (C) show examples of crimping electronic components 300 along the edges of a display panel 100 including curved portions, and Figure 1(D) shows an example of crimping electronic components 300 along the edges of a display panel 100 including notched portions. Figure 1(E) shows an example of crimping electronic components 300 along the edges of multiple sides of the display panel 100. Figure 1(F) shows an example of crimping electronic components 300 along the straight portions of the display panel 100.

[0018] As shown in Figure 2, electrode rows ER, which are conductive portions, are provided at predetermined locations on the edge of the display panel 100. The electrode rows ER extend in a direction that intersects with the edge of the display panel 100 and are arranged in rows along the edge. Hereafter, the direction in which these rows are arranged will be referred to as the arrangement direction of the electrode rows ER. An electrode row ER is a collection of multiple electrodes formed in a row. Each electrode row ER is connected to a circuit in the display area via a signal line. Multiple electrode rows ER are arranged side by side with a predetermined interval (pitch p) between them.

[0019] As shown in Figure 1(A), the electronic component 300 is a component that is joined to the display panel 100 via the ACF 500. In this embodiment, for example, COF is used for the electronic component 300. COF is a component in which a driver IC is mounted and printed wiring is formed on a flexible sheet made of a flexible resin.

[0020] As shown in Figure 2, one side of the electronic component 300 is provided with a conductive portion called a terminal row TR. The terminal row TR is a collection of terminals for electrically connecting to the electrode row ER of the display panel 100. Each terminal row TR is connected, for example, to a driver IC on the COF via a signal line. Multiple terminal rows TR are arranged side by side with a predetermined interval (pitch p) between them. The electrode row ER of the display panel 100 and the terminal row TR of the electronic component 300 have a predetermined correspondence in which they should be connected to each other, and they are crimped together so that the positions of the corresponding electrodes and terminals match. For this reason, the electrode row ER and the terminal row TR have the same spacing. The width and spacing of the electrode row ER and the terminal row TR ensure conductivity between the corresponding electrodes and terminals, as well as insulation between other adjacent electrodes and terminals. In the following explanation, for the sake of simplicity, multiple electrode rows ER in a unit to which the electronic component 300 is connected will be simply referred to as the electrode row ER.

[0021] Figure 3 is a cross-sectional view showing the crimped portion of the ACF500 between the display panel 100 and the electronic component 300 in this embodiment.

[0022] As shown in Figure 3(A), ACF500 is an anisotropic conductive material, a film formed by dispersing conductive particles 320 on a substrate 310. A thermosetting resin that hardens upon heating is used as the substrate 310. After the electronic components 300 are positioned on the display panel 100, they are temporarily bonded to the panel via ACF500 with a pressure of approximately 10 to 100 N.

[0023] As shown in Figure 3(B), in this crimping process, the ACF500 is sandwiched between the electronic component 300 and the display panel 100 and crimped with a pressure of approximately 200 to 1000 N. The conductive particles 320 located between the electrode row ER and the terminal row TR are crushed between the electrode row ER and the terminal row TR, thereby achieving conductivity in the thickness direction and insulation in the surface direction of the electrode row ER and the terminal row TR. Furthermore, the thermosetting resin of the base material 310 of the ACF500 hardens upon heating, adhering the electronic component 300 to the display panel 100. In other words, electrical connection between the terminal row TR and the electrode row ER, and mechanical connection between the display panel 100 and the electronic component 300 can be achieved through heat crimping.

[0024] Figure 4 is a top view showing an example of the configuration of the mounting device 10 in this embodiment.

[0025] The cleaning of the electrode array ER, the application of the ACF, and the crimping of the electronic components described above are performed by the mounting apparatus 10 shown in Figure 1. The mounting apparatus 10 comprises a cleaning device 1, an application device 3, a temporary crimping device 5, and a permanent crimping device 7. It also includes a transport device 9 for transporting the display panel 100 between each device of the mounting apparatus 10. The mounting apparatus 10 is an example of an electronic component mounting apparatus. The ACF is an example of a tape-like member. The display panel 100 is an example of an object to be applied.

[0026] In this embodiment, the terminals of the display panel 100 are cleaned by the cleaning device 1 of the mounting device 10. After cleaning, the ACF is attached to the display panel 100 by the adhesive device 3. Then, the electronic components 300 are mounted to the display panel 100 by sequential crimping by the temporary crimping device 5 and the main crimping device 7. After processing is completed in each device, the display panel 100 is transported by the transport device 9.

[0027] The cleaning device 1, adhesive device 3, temporary crimping device 5, and main crimping device 7 described above are each equipped with control units 19a, 19b, 19c, and 19d that control their respective movement mechanisms. The mounting device 10 is also equipped with a control unit 19 that integrates and controls these four control units 19a, 19b, 19c, and 19d. For example, after processing in each device is completed, the control unit 19 controls the transport device 9 to transport the display panel 100.

[0028] The cleaning device 1 includes a cleaning unit 1a and has multiple cleaning units adjacent to each other along the transport path of the display panel 100. Each cleaning process is performed sequentially on the display panel 100 as it passes through the transport path at a constant speed. The cleaning processes include, for example, an ultrasonic cleaning process using an ultrasonic airflow obtained by applying ultrasonic vibrations to ionized air (clean air ionized by ionizing clean air), a wiping cleaning process using a wiping cloth and cleaning solution, and a plasma cleaning process that generates plasma under atmospheric pressure for cleaning. In this embodiment, the cleaning device 1 rotates the display panel 100 to position the electrode row ER to correspond to the second cleaning unit 21, which is positioned at a reference position, and then cleans it. On the other hand, the cleaning device 1 positions the first cleaning unit 20 to correspond to the position of each electrode row ER after rotation and then cleans it.

[0029] The cleaning apparatus 1 comprises a cleaning unit 1a and a control unit 19a. The cleaning unit 1a has various moving mechanisms, which are controlled by the control unit 19a. The cleaning process is carried out by the control of the control unit 19a. A detailed configuration will be described later.

[0030] The adhesive device 3 incorporates ACF500 as a reel-shaped adhesive tape, cuts it to a predetermined length, and attaches it to the electrode row ER of the display panel 100. The adhesive device 3 comprises an adhesive unit 3a and a control unit 19b. The adhesive unit 3a has various moving mechanisms, which are controlled by the control unit 19b.

[0031] Figure 5 shows the adhesive unit 3a in this embodiment. The adhesive unit 3a includes a guide roller 1100, a substrate stage 1300, an up / down drive mechanism 1400, a pressure tool 1500, a heater 1500a, a path roller 1800, a supply reel 1900, a feed device 3000, a cylinder 3300, a cutting section 3400, a holding block 3500, and a winding reel 3600. The substrate stage 1300 has a base 1600, and a table 1700 is provided on the upper surface of the base 1600, which is driven in the X, Y, and θ directions by an X drive source 1600a, a Y drive source 1600b, and a θ drive source 1600c. The substrate stage 1300 is also located directly below the pressure tool 1500.

[0032] As shown in Figure 5, a display panel 100, which is to be attached, is supplied to the table 1700 and held in place by suction.

[0033] As shown in Figure 5, the adhesive tape 2000 is attached to a release tape 1000 made of synthetic resin and wound onto a supply reel 1900, and is guided by a pair of guide rollers 1100 with the adhesive tape 2000 facing downwards. As a result, the adhesive tape 2000 faces above the electrode row ER of the display panel 100 placed on the table 1700.

[0034] Above the table 1700, a pressure tool 1500, which serves as an adhesive means and has a heater 1500a, is provided so as to be movable up and down by a vertical drive mechanism 1400. The adhesive tape 2000 is cut to a predetermined length by a cutting section 3400, which will be described later, and the portion 2000a cut to the predetermined length is positioned below the pressure tool 1500 as described later.

[0035] When the portion 2000a of the adhesive tape 2000, which has been cut to a predetermined length, is positioned, the pressurizing tool 1500 descends and the portion 2000a of the adhesive tape 2000, which has been cut to a predetermined length, is attached to the side of the display panel 100 where the electrode row ER is provided. Subsequently, the release tape 1000 is peeled off from the adhesive tape 2000 by the peeling unit 5100, and only the release tape 1000 is wound onto the take-up reel 3600 via the path roller 1800.

[0036] The adhesive tape 2000 and the release tape 1000 are transported by a feeder 3000, which serves as a feeding means. This feeder 3000 has a chuck 3100 formed to grip the release tape 1000. This chuck 3100 is driven reciprocally in the direction indicated by the ± arrows in the figure by a drive mechanism (not shown).

[0037] Therefore, when the chuck 3100 is driven in the direction indicated by the + in the figure while holding the release tape 1000, the adhesive tape 2000 is pulled out from the supply reel 1900 in the + direction together with the release tape 1000, and the portion 2000a cut to a predetermined length is positioned below the pressurizing tool 1500.

[0038] The cutting section 3400 has a cutting section 3400 that is driven vertically by a cylinder 3300 which serves as a drive source.

[0039] The cutting section 3400 is driven upward by the cylinder 3300 to a height that cuts approximately half the thickness of the release tape 1000, which is held in the holding block 3500. In other words, the release tape 1000 is half-cut by the cutting section 3400.

[0040] The release section 5100 peels the release tape 1000 from the adhesive tape 2000 attached to the display panel 100. The release section 5100 has release rods 5200 and 5300. The release rods 5200 and 5300 are, for example, round rods and are members that come into contact with the release tape 1000. The release rod 5200 comes into contact with the surface of the release tape 1000, i.e., the surface on the adhesive tape 2000 side, and the release rod 5300 comes into contact with the back surface of the release tape 1000. The release rods 5200 and 5300 move horizontally from the downstream side to the upstream side in the transport direction of the adhesive tape 2000 while in contact with the release tape 1000, by a moving mechanism (not shown), thereby peeling the release tape 1000 from the adhesive tape 2000 that is pressed onto the display panel 100. Furthermore, after peeling, the peeling rods 5200 and 5300 move horizontally from the upstream side to the downstream side, retracting from the attachment position.

[0041] Let's explain again using Figure 4. The temporary crimping device 5 is a device for temporarily crimping electronic components 300 onto the display panel 100. The temporary crimping device 5 comprises a temporary crimping unit 5a and a control unit 19c. The temporary crimping unit 5a has various moving mechanisms, and these moving mechanisms are controlled by the control unit 19c. After temporary crimping, the display panel with the electronic components 300 temporarily crimped is transported to the main crimping device 7.

[0042] As shown in Figure 6, the temporary crimping unit 5a is provided with a table unit 3200. This table unit 3200 has an XY table 3700 mounted on a base 2100, which is driven in the X and Y directions. A mounting table 2700 is mounted on this XY table 3700, which is driven in the Z and θ directions. Therefore, this mounting table 2700 is driveable in the X, Y, Z, and θ directions. With the panel supported by the table unit 3200, the temporary crimping unit 5a moves the display panel 100 in the X and Y directions to temporarily crimp the electronic components 300.

[0043] Below the attachment position of the temporary crimping unit 5a, there are two imaging units 2200 (only one is shown in the figure) that capture images of alignment marks (not shown) provided on the display panel 100.

[0044] The display panel 100 is placed on the mounting table 2700 by the transport device 9. A backup 2400 is provided at the attachment position. Above the backup 2400, an attachment tool 2500 is provided so as to be movable in the vertical direction.

[0045] The transport device 9 is provided with a transport arm (not shown), and the display panel 100 is supplied onto the mounting table 2700 via the transport arm. The display panel 100 supplied to the mounting table 2700 is held in place by suction by a pad 2900 provided on its upper surface. The edges of the display panel 100 protrude outward from the periphery of the mounting table 2700. The mounting table 2700 on which the display panel 100 is supplied is driven to the other end of the base 2100. That is, the mounting table 2700 is transported from the supply position where the display panel 100 is supplied to the lower part of the temporary crimping position for temporarily crimping the electronic component 300 to one side 100a of the display panel 100 via the ACF 500. Below this crimping position, the alignment marks provided on the display panel 100 are captured by the imaging unit 2200.

[0046] Specifically, the two imaging units 2200 recognize the two alignment marks on the display panel 100, thereby recognizing any θ-direction misalignment of the display panel 100. If there is a θ-direction misalignment, the mounting table 2700 corrects the misalignment in the θ direction. That is, after the display panel 100 is placed on the mounting table 2700, the mounting table 2700 is moved in the Y direction to the temporary crimping position. Then, the two imaging units 2200 detect the alignment marks on the display panel 100 and detect any θ-direction misalignment of the display panel 100. After detecting the θ-direction misalignment, the mounting table 2700 is moved in the θ direction to correct the misalignment.

[0047] Once the display panel 100 is positioned in this manner, the electronic component 300 is supplied to the adhesive tool 2500 from a component supply unit (not shown). The backup 2400 is then raised to a position where it contacts the back surface of the display panel 100. The adhesive tool 2500 is then lowered to perform a preliminary crimping of the electronic component 300 and the display panel 100.

[0048] Let's explain again using Figure 4. The crimping device 7 is a device that permanently crimps the display panel 100 and electronic components 300 that have been temporarily crimped in the temporary crimping device 5. The crimping device 7 comprises a permanent crimping unit 7a and a control unit 19d. The crimping unit 7a has various moving mechanisms, and these moving mechanisms are controlled by the control unit 19d. The display panel 100 and electronic components 300 are heated and crimped at a higher temperature and pressure than during the temporary crimping.

[0049] As shown in Figure 7, the crimping unit 7a is provided with a table unit 3800. This table unit 3800 is mounted on a base 3900, and the base 3900 is provided with an XY table 4000 that is driven in the X and Y directions. A mounting table 4100 that is driven in the Z and θ directions is provided on the XY table 4000. Therefore, the mounting table 4100 is driveable in the X, Y, Z, and θ directions.

[0050] The display panel 100 is supplied onto the mounting table 4100 via a transport arm (not shown) of the transport device 9, and is held in place by suction by a pad 4200 provided on its upper surface. The edges of the display panel 100 protrude outward from the peripheral edge of the mounting table 4100.

[0051] The display panel 100 is supplied to the mounting table 4100 of the crimping unit 7a. That is, the display panel 100 is supplied to the mounting table 4100 at the supply position at one end of the longitudinal direction of the base 3900. After the display panel 100 is placed on the mounting table 4100, the mounting table moves in the Y direction. That is, the mounting table 4100 is moved in the Y direction so that the main crimping tool 4600 is above the portion where the electrode row ER of the display panel 100 and the terminal row TR of the electronic component 300 are temporarily crimped, and the backup 4500 is below it.

[0052] Two imaging units 4300 (only one shown in the figure) are provided at this crimping position to capture alignment marks (not shown) provided on the display panel 100.

[0053] When the mounting table 4100 is transported from the supply position where the display panel 100 is supplied to the lower part of the main crimping position for permanently crimping the electronic component 300 that has been temporarily crimped to one side 100a of the display panel 100, the alignment marks provided on the display panel 100 are captured by the imaging unit 4300 at the lower part of the main crimping position. After the alignment marks on the display panel 100 are captured, the θ-direction displacement of the display panel 100 is detected. After detecting the θ-direction displacement, the mounting table 4100 is moved in the θ-direction in the same manner as the temporary crimping unit 5a to correct the displacement. After correction, the backup 4500 rises to a position where it contacts the back surface of the display panel 100, and then the main crimping tool 4600 pressurizes the temporarily crimped portion to perform permanent crimping.

[0054] When the crimping tool 4600 is applying pressure to the electronic component 300, the mounting table 4100 releases the suction of the pad 4200 and descends to below the main crimping position. The support arm 4400 supports the display panel 100, and the table is driven on the base 3900 from the main crimping position to the supply position. At this supply position, a new display panel 100 with the electronic component 300 temporarily crimped to one side 100a and the other side 100b is supplied to the mounting table 4100. The mounting table 4100, now supplied with the new display panel 100, is then driven to a position below the main crimping position, below the display panel 100 supported by the support arm 4400, that is, a position that can be recognized by the imaging unit 4300, and waits there.

[0055] When the electronic component 300 is fully crimped to one side 100a of the display panel 100, the third transport arm 4700 descends from above the display panel 100, and rises by adhering to the top surface of the display panel 100 with a pad provided on its underside. At the same time, the pair of support arms 4400 open at a predetermined interval, and the mounting table 4100, which is waiting below the crimping position, rises. As described above, the mounting table 4100 is positioned so that one side 100a of the display panel 100 rests on the top surface of the backup 4500, and the electronic component 300 on that side 100a is fully crimped, and this process is repeated.

[0056] Figure 8 is a schematic diagram of the cleaning device 1 in this embodiment.

[0057] The cleaning apparatus 1 in this embodiment comprises multiple cleaning units and cleans each electrode row ER arranged on the display panel 100. The display panel 100 is, for example, a substrate as a component of a flat panel display and has various shapes as shown in Figure 2. As shown in Figure 8, the cleaning apparatus 1 comprises an ultrasonic cleaning unit 12, a wiping cleaning unit 13, a plasma cleaning unit 14, a support unit 15, a stage unit 16, a control unit 19a, and an imaging unit 600. The ultrasonic cleaning unit 12, the wiping cleaning unit 13, the plasma cleaning unit 14, the support unit 15, and the stage unit 16 are collectively referred to as the cleaning unit 1a. The imaging unit 600 is fixed in an initial position and performs imaging to align the display panel 100 to a reference position. The reference position is a pre-set design reference position. By rotating the stage unit 16 to position the electrode row ER on the reference position, the reference position is set so that not only the orientation of the electrode row ER in the rotation direction but also its XY coordinates are positioned on the reference position. In the following explanation, the home position of each cleaning unit will be assumed to be located on the reference position.

[0058] Hereinafter, the +X direction, which is the transport direction of the display panel 100, will also be referred to as the transport direction. In this embodiment, the cleaning device 1 has the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14 arranged in that order at predetermined intervals from the upstream side in the transport direction.

[0059] The cleaning apparatus 1 of this embodiment cleans the display panel 100, which is transported in the +X direction, in the order of ultrasonic cleaning, wiping cleaning, and plasma cleaning. Therefore, the support section 15 is connected to the ultrasonic cleaning section 12, the wiping cleaning section 13, and the plasma cleaning section 14 in the order of +X direction. In addition, as shown by the dashed arrows, the cleaning apparatus 1 of this embodiment has a stage section 16 that moves in the +X direction, passing through the ultrasonic cleaning section 12, the wiping cleaning section 13, and the plasma cleaning section 14 in that order, and cleaning the electrode row ER at each cleaning section. Furthermore, during cleaning by each cleaning section, the stage section 16 moves in the +X direction with rotation in the θ direction at a predetermined timing to match the electrode row ER arranged on the display panel 100. For example, if the display panel 100 includes curved or notched portions, the electrode row ER will be arranged along these edges. The cleaning device 1 grasps information such as the position of the electrode row ER placed on the display panel 100 and the inclination of the electrode row ER in the θ direction, and rotates the stage unit 16 in the θ direction and moves it in the +X direction based on this information.

[0060] The cleaning apparatus 1 of this embodiment will be described using an example in which the cleaning section comprises an ultrasonic cleaning section 12, a wiping cleaning section 13, and a plasma cleaning section 14, but the examples of cleaning sections are not limited to these. For example, the cleaning section may be a combination of the ultrasonic cleaning section 12 and the plasma cleaning section 14, or a combination of the wiping cleaning section 13 and the plasma cleaning section 14. These combinations are just examples, and the apparatus may be configured using other cleaning sections in addition to the ultrasonic cleaning section 12, the wiping cleaning section 13, and the plasma cleaning section 14.

[0061] During cleaning by each cleaning unit, the stage unit 16 moves in the +X direction with rotation in the θ direction at a predetermined timing, in accordance with the arrangement of the electrode row ER according to the shape of the display panel 100. In addition, the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 move in the Y direction in accordance with the shape of the display panel 100. The individual parts of the cleaning apparatus 1 will be described below.

[0062] As shown in Figure 8, the stage section 16 comprises a transport stage 161, an X-direction movement mechanism 162, a third Y-direction movement mechanism 164, and a θ-direction movement mechanism 163. The transport stage 161 is a flat platform on which the display panel 100 is placed. The stage section 16 is assembled so that the X-direction movement mechanism 162, the third Y-direction movement mechanism 164, and the θ-direction movement mechanism 163 are stacked in that order. The X-direction movement mechanism 162 moves along the slide rail in the X direction using a built-in ball screw and motor based on the control of the control unit 19a. Similarly, the third Y-direction movement mechanism 164 moves along the slide rail in the Y direction using a built-in ball screw and motor based on the control of the control unit 19a. The θ-direction movement mechanism 163 has a rotation axis centered in the Z direction, and rotates the transport stage 161 using a servo motor (not shown) connected to this rotation axis based on the control of the control unit 19a.

[0063] Furthermore, when the display panel 100 is supplied to the stage unit 16, or when the display panel 100 is discharged from the stage unit 16, the stage unit 16 is positioned at a predetermined supply / discharge position.

[0064] Furthermore, the stage section 16 may also include a Z-direction movement mechanism in addition to the X-direction movement mechanism 162, the third Y-direction movement mechanism 164, and the θ-direction movement mechanism 163. For example, the Z-direction movement mechanism may be driven by, for example, an air cylinder or an electric actuator. The Z-direction movement mechanism drives the X-direction movement mechanism 162, the third Y-direction movement mechanism 164, and the θ-direction movement mechanism 163 in the Z direction.

[0065] As shown in Figure 9, when the display panel 100 placed on the stage unit 16 is transported, the ultrasonic cleaning unit 12 moves to a cleaning position in the Y direction based on the control of the control unit 19a and ultrasonically cleans the electrode rows ER to be cleaned. For cleaning, the ultrasonic cleaning unit 12 generates an ultrasonic airflow by applying ultrasonic vibrations to ionized air, which is ionized clean air. The ultrasonic cleaning unit 12 sprays the ultrasonic airflow onto the electrode rows ER arranged on the display panel 100 to remove dust. After that, the ultrasonic cleaning unit 12 sucks up the airflow sprayed onto the surface of the display panel 100. After cleaning the electrode rows ER to be cleaned, the ultrasonic cleaning unit 12 moves in the Y direction and positions itself for the next electrode row ER to be cleaned. In this way, the ultrasonic cleaning unit 12 cleans each electrode row ER arranged on the display panel 100.

[0066] Figure 9 shows the internal structure of the ultrasonic cleaning unit 12 as viewed from the -Y direction.

[0067] The ultrasonic cleaning unit 12 comprises a casing 123 and a first Y-direction moving mechanism 124. A discharge nozzle 121 and a suction nozzle 122 are provided at the lower end of the casing 123. The casing 123 has an internal space. The inside of the casing 123 is divided into a discharge chamber 127 and a suction chamber 128. The discharge chamber 127 contains an ionizer 126 that ionizes the pressurized clean air and an ultrasonic generator 125 that applies ultrasonic vibrations to the ionized clean air and ejects it from the discharge nozzle 121. The suction chamber 128 collects dust and debris sucked in from the suction nozzle 122. The detailed configuration of the ultrasonic cleaning unit 12 will be described later.

[0068] The discharge nozzle 121 is provided to be inserted into the discharge chamber 127 and is located on the lower end surface side of the casing 123. The discharge nozzle 121 injects ultrasonic airflow onto the electrode row ER on the display panel 100. For example, if the electrode row ER on the display panel 100 becomes charged and dust adheres to it due to static electricity, the positive and negative ions of the ionized ultrasonic airflow remove the static electricity, and furthermore, the aerodynamic dust removal force of the ultrasonic airflow removes dust from the surface of the electrode row ER on the display panel 100.

[0069] The suction nozzle 122 is provided on the lower end surface side of the casing 123. The suction nozzle 122 sucks in the ultrasonic airflow that is injected onto the electrode row ER on the display panel 100 by the discharge nozzle 121. In this embodiment, the ultrasonic cleaning unit 12 is equipped with one suction nozzle 122 in the -X and +X directions, respectively, flanking the discharge nozzle 121. Therefore, the ultrasonic airflow is injected onto the electrode row ER on the display panel 100 and then sucked in by the suction nozzle 122.

[0070] Clean air is supplied to the discharge chamber 127 from a compressed air source (not shown). An ionizer 126 is installed inside the discharge chamber 127 and ionizes the clean air supplied to the discharge chamber 127 by corona discharge. An ultrasonic generator 125 generates ultrasonic vibrations in the ionized clean air. The resulting ultrasonic airflow is injected through the discharge nozzle 121 onto the electrode row ER on the display panel 100.

[0071] The suction chamber 128 is located inside the casing 123 and communicates with the suction nozzle 122. The suction chamber 128 has the function of collecting the ultrasonic airflow injected by the discharge nozzle 121 onto the electrode row ER on the display panel 100 via the suction nozzle 122. In other words, it collects the ultrasonic airflow containing dust and debris removed from the surface of the electrode row ER on the display panel 100.

[0072] The first Y-direction movement mechanism 124 comprises a connection unit 124a, a ball screw 124c, and a linear guide 124d. The connection unit 124a is connected to the ball screw 124c and moves in the Y direction along the linear guide 124d in accordance with the rotation of a servo motor (not shown). When the display panel 100 is transported from the -X direction, the ultrasonic cleaning unit 12 moves the connection unit 124a to position the discharge nozzle 121 in the cleaning position, and then sprays an ultrasonic airflow onto the electrode row ER on the display panel 100 to remove dust and debris adhering to the electrode row ER on the display panel 100.

[0073] The first Y-direction movement mechanism 124 moves in the +Y or -Y direction to move the ultrasonic cleaning unit 12 to the electrode row ER to be cleaned among the electrode rows ER arranged on the display panel 100. The first Y-direction movement mechanism 124 positions the casing 123 at the cleaning position on the display panel 100. As will be described in detail later, the electrode row position information of the electrode row ER is determined in advance by the processing recipe, and the control unit 19a determines the cleaning position using the transport position information, which is the transport position of the display panel 100, and the electrode row position information. The first Y-direction movement mechanism 124 is connected to the support unit 15. The ultrasonic cleaning unit 12 may also be equipped with a first X-direction movement mechanism. In this case, in addition to moving in the Y direction, the ultrasonic cleaning unit 12 moves in the +X or -X direction to move to the cleaning position.

[0074] When injecting ultrasonic airflow onto the display panel 100, the control unit 19a pre-controls the first Y-direction movement mechanism 124 to position the discharge nozzle 121 at the cleaning position of the electrode row ER to be cleaned. The control unit 19a determines the cleaning position using the transport position information and the electrode row position information of the electrode row ER to be cleaned. The discharge nozzle 121 is positioned by the connection unit 124a, connected to the ball screw 124c, sliding along the linear guide 124d. The Y-direction position and control timing may, for example, use a pre-set recipe configured by the user. It is conceivable that the electrode row position information included in this pre-set recipe be stored in the control unit 19a and loaded and used when the program is executed.

[0075] Next, the wiping and cleaning unit 13 will be described as shown in Figure 10. The wiping and cleaning unit 13 is fixedly positioned at a reference position. That is, it does not move in the X, Y, and θ directions. The wiping and cleaning unit 13 is connected to the support unit 15, and when the display panel 100 placed on the stage unit 16 is transported, it wipes and cleans the electrode row ER to be cleaned based on the control of the control unit 19a.

[0076] Figure 10 shows the structure of the wiping and cleaning unit 13 as viewed from the -X direction. As shown in Figure 10, the wiping and cleaning unit 13 comprises an upper pressing head 131, a lower pressing head 132 actuator 134, and a wiping cloth 139. The upper pressing head 131 and the lower pressing head 132 are rectangular members extending in the Y direction, and each has a pressing element at its tip. There is a space between each head into which a panel can be inserted, and the wiping cloth 139 is stretched along the surface of the pressing element. A guide roller 133 for winding up the wiping cloth is provided in the space between each head. A drive arm 135 is connected to the base of each head to drive the respective head. Each drive arm 135 is provided with an actuator 134, which drives the unit. For example, a pneumatic chuck can be used as the actuator 134. The chuck portion opens and closes simultaneously in parallel by cylinder drive, and this movement causes each drive arm 135 to move in parallel. The upper pressing head 131 and the lower pressing head 132 face each other and are moved toward and toward each other by the actuator 134. A wiping cloth 139 is placed on the opposing surfaces of the upper pressing head 131 and the lower pressing head 132. The electrode array ER to be wiped clean enters between the opposing upper pressing head 131 and the lower pressing head 132. The edge of the display panel 100 on which the entered electrode array ER is placed is sandwiched between the upper pressing head 131 and the lower pressing head 132. This causes the wiping cloth 139 to be pressed against the electrode array ER. The wiping cleaning unit 13, with the upper pressing head 131 and the lower pressing head 132 respectively, sandwiches the display panel 100 from above and below, and with the wiping cloth 139 pressed against it, moves the display panel 100 in the X direction by the stage unit 16, thereby cleaning each electrode array ER to be cleaned.

[0077] The wiping and cleaning unit 13, using the upper pressing head 131 and the lower pressing head 132 respectively, releases the clamping of each pressing head once the cleaning of the electrode row ER to be cleaned is complete. When positioned for the next electrode row ER to be cleaned, the pressing heads clamp onto the electrode row ER again to clean it.

[0078] In order to align the cleaning position in the Z-direction of the wiping and cleaning unit 13 with the Z-direction position of the display panel 100 placed on the stage unit 16, the control unit 19a may control the Z-direction movement mechanism to perform Z-direction alignment.

[0079] When the upper pressing head 131 and the lower pressing head 132 sandwich the display panel 100, the surfaces that contact the display panel 100 via the wiping cloth 139 are called contact surfaces 131a and 132a, respectively. In other words, a strip-shaped wiping cloth 139 is arranged along the contact surfaces where the upper pressing head 131 and the lower pressing head 132 contact the electrode row ER that is to be cleaned. As shown in Figure 10, the tips of the upper pressing head 131 and the lower pressing head 132 (on the display panel 100 side) have contact surfaces 131a and 132a that protrude toward the display panel 100, respectively. The rear ends of the upper pressing head 131 and the lower pressing head 132 (on the actuator 134 side) are connected to the drive arm 135 of the actuator 134, respectively.

[0080] Furthermore, the upper pressing head 131 may be provided with a pore 137 for guiding the cleaning fluid supplied from a cleaning fluid supply mechanism (not shown) to the wiping cloth 139. Similarly, the lower pressing head 132 may be provided with a pore 138. This type of cleaning, in which the wiping cloth 139 remains wet with cleaning fluid, is also called wet cleaning.

[0081] As the stage unit 16 moves, the electrode row ER to be cleaned on the display panel 100 approaches the wiping cleaning unit 13. The wiping cleaning unit 13 then uses an actuator 134 to drive a drive arm 135 connected to the upper pressing head 131 and the lower pressing head 132. The drive of the actuator 134 causes the contact surface 131a to move in the -Z direction and the contact surface 132a to move in the +Z direction. The wiping cleaning unit 13 grips the electrode row ER to be cleaned with the upper pressing head 131 and the lower pressing head 132 with a predetermined pressure. For example, the control unit 19a may control the actuator 134 to grip the display panel 100 just before positioning the electrode row ER to be cleaned with the upper pressing head 131 and the lower pressing head 132.

[0082] The wiping cloth 139 is a strip-shaped cloth used to clean the electrode rows ER of the display panel 100, and is wound onto a supply reel (not shown) positioned in the +Z direction. The wiping cloth 139 is fed out from a state where it is in contact with the contact surface 131a, guided by the guide roller 133 from the contact surface 131a side to the contact surface 132a side, and recovered by a recovery reel (not shown) positioned in the -Z direction. At predetermined timings, for example, after cleaning the electrode rows ER to be cleaned, the wiping cloth is wound up each time, so that a new cleaning surface faces the next electrode row ER to be cleaned. The humidity of the wiping cloth 139 is controlled by a humidity sensor, and when the humidity falls below a predetermined level, cleaning liquid is supplied from the supply pump through pores 137 and 138.

[0083] Figure 11 shows the internal structure of the plasma cleaning unit 14 as viewed from the -Y direction.

[0084] As shown in Figure 11, the plasma cleaning unit 14 comprises a casing 142 and a second Y-direction moving mechanism 143. The casing 142 has an internal space into which a gas supply pipe 147 for supplying plasma gas is provided. Electrodes and a dielectric layer (not shown) are also built into the casing 142. The plasma cleaning unit 14 generates plasma gas inside the casing 142 and irradiates it from the plasma irradiation tube 141, located at the lower end of the plasma irradiation tube 141, toward the electrode row ER to be cleaned. Specifically, with plasma gas supplied inside the casing 142, a high-frequency electric field is applied between the electrode 144 and the casing 142 via the dielectric layer 145 by the high-frequency power supply 146. This causes a dielectric barrier discharge between the electrode 144 and the casing 142, which ionizes or excites the plasma gas present between the casing 142 and the dielectric layer 145, generating plasma. The generated plasma is irradiated from the plasma irradiation tube 141 toward the electrode row ER on the display panel 100.

[0085] Furthermore, when the display panel 100 placed on the stage unit 16 is transported, the plasma cleaning unit 14 moves to a cleaning position in the Y direction based on the control of the control unit 19a and performs plasma cleaning of the electrode rows ER to be cleaned. For cleaning, the plasma cleaning unit 14 generates plasma and irradiates the electrode rows ER on the display panel 100 with the generated plasma. After cleaning the electrode rows ER to be cleaned, the plasma cleaning unit 14 moves in the Y direction and positions itself for the next electrode row ER to be cleaned. In this way, the plasma cleaning unit 14 cleans each electrode row ER on the display panel 100.

[0086] The second Y-direction movement mechanism 143 comprises a connection unit 143a, a ball screw 143c, and a linear guide 143d. The connection unit 143a is connected to the ball screw 143c and moves in the Y direction along the linear guide 143d in accordance with the rotation of a servo motor (not shown). When the display panel 100 is transported from the -X direction, the plasma cleaning unit 14 moves the connection unit 143a to position the plasma irradiation tube 141 in the cleaning position, and then irradiates the display panel 100 with plasma to remove dust.

[0087] The second Y-direction movement mechanism 143 moves in the +Y or -Y direction to move the plasma cleaning unit 14 to the electrode row ER to be cleaned among the electrode rows ER arranged on the display panel 100. Since the electrode row position information of the electrode row ER is predetermined in the processing recipe, the control unit 19a determines the cleaning position using the transport position information, which is the transport position of the display panel 100, and the electrode row position information, similar to the first Y-direction movement mechanism 124. The second Y-direction movement mechanism 143 is connected to the support unit 15. The plasma cleaning unit 14 may also be equipped with a second X-direction movement mechanism. In this case, in addition to moving in the Y direction, the plasma cleaning unit 14 moves in the +X or -X direction to move to the cleaning position.

[0088] The control unit 19a pre-controls the second Y-direction movement mechanism 143 to position the plasma irradiation tube 141 at the cleaning position of the electrode row ER to be cleaned. The control unit 19a determines the cleaning position using the transport position information and the electrode row position information of the electrode row ER to be cleaned. The plasma irradiation tube 141 is positioned by the connection unit 143a, connected to the ball screw 143c, sliding along the linear guide 143d. The position and control timing in the Y direction may be determined using, for example, a processing recipe pre-set by the user. It is conceivable that the electrode row position information included in this processing recipe be stored in the control unit 19a and loaded and used when the program is executed. The second Y-direction movement mechanism 143 has the same configuration as the first Y-direction movement mechanism.

[0089] As described above, in this embodiment, of the three cleaning units, the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 are configured to move in the Y direction. The wiping cleaning unit 13 is fixed in a reference position and does not move in the Y direction. When performing wiping cleaning, the cleaning device 1 rotates the stage unit 16 to position the electrode row ER to be cleaned at the reference position so that the arrangement direction of the electrode row ER is parallel to the X direction. This direction is also perpendicular to the winding direction of the wiping cloth 139. The cleaning device 1 also moves the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 to position them over the electrode row ER to be cleaned, according to the position of the electrode row ER on the display panel 100 rotated by the stage unit 16.

[0090] Among the multiple cleaning units, the cleaning unit equipped with a moving mechanism that moves in the Y direction is also called the first cleaning unit 20. The cleaning unit positioned at a reference position for positioning the electrode row ER to be cleaned is also called the second cleaning unit 21. In this embodiment, the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 are examples of the first cleaning unit 20, and the wiping cleaning unit 13 is an example of the second cleaning unit 21. In this embodiment, the cleaning device 1 is configured to include two first cleaning units 20 and one second cleaning unit 21, but the configuration of the cleaning device 1 is not limited to this.

[0091] The control unit 19a controls each part of the cleaning apparatus 1. The control unit 19a is programmed with control contents for the ultrasonic cleaning unit 12, the wiping cleaning unit 13, the plasma cleaning unit 14, and the stage unit 16, and is executed by a processing unit such as a PLC (Programmable Logic Controller) or CPU (Central Processing Unit). Details of each block will be described later.

[0092] Figure 12 is an example of a block diagram of the control unit 19a in this embodiment.

[0093] The control unit 19a can be implemented, for example, by installing a program for the control unit 19a on a PC (Programmable Controller). The control unit 19a consists of an input / output control unit 190, a mechanism control unit 191, a storage unit 192, and a setting unit 195, etc. Each unit is controlled by a PC (not shown).

[0094] The input / output control unit 190 is an interface that controls signal conversion and input / output between each cleaning unit and stage unit 16 that are to be controlled.

[0095] The mechanism control unit 191 controls the operation of each cleaning unit and the stage unit 16. For example, with the display panel 100 mounted on the stage unit 16, the mechanism control unit 191 rotates the display panel 100 at a predetermined timing or position and moves it in the +X direction. The mechanism control unit 191 passes the display panel 100 through the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14 in that order to clean each electrode row ER. Information necessary for the cleaning process, such as the position of the display panel 100, the position of the electrode row ER, the transport speed and rotation speed of the display panel 100, and the rotation angle, is used, for example, from information loaded from the storage unit 192.

[0096] When the display panel 100 is transported to the stage unit 16 by the transport device 9, the mechanism control unit 191 recognizes the alignment marks on the display panel 100 using the imaging unit 600 and determines the position of the display panel 100. Subsequently, the mechanism control unit 191 moves the X-direction movement mechanism 162, the third Y-direction movement mechanism 164, and the θ-direction movement mechanism 163 to position the stage unit 16 at a predetermined reference position. Using this position as a reference, the mechanism control unit 191 performs the cleaning process using a processing recipe that includes the shape of the panel, the position of the electrode rows, the tilt of the display panel 100, and the operation method of each cleaning unit. The cleaning process by the wiping cleaning unit 13 includes a processing recipe that ensures the direction in which the electrode rows ER to be cleaned are arranged is parallel to the X-direction in which the stage moves. In the following explanation, the initial state will be described as the state in which the display panel 100 is placed on the stage section 16 by the transport device 9, the alignment marks are captured by the imaging unit 600, and the display panel 100 is aligned to the reference position.

[0097] Furthermore, the cleaning device 1 may use an imaging unit 600 that can grasp the position of the electrode rows ER, the tilt of the display panel 100, etc., instead of using a pre-set processing recipe. For example, the cleaning device 1 may control the imaging unit 600 with the control unit 19a to acquire position information of the electrode rows ER to be cleaned on the display panel 100, and create a processing recipe from this information. Alternatively, the cleaning device 1 may be configured to have the imaging unit 600 track the position of each electrode row ER on the display panel 100, and detect the position and tilt of each electrode row ER in real time.

[0098] The mechanism control unit 191 controls the ultrasonic cleaning unit 12 by moving the stage unit 16 in the X direction and rotating it to a predetermined angle, and by controlling the first Y direction movement mechanism 124 to position the discharge nozzle 121 at the position of the electrode row ER to be cleaned. The mechanism control unit 191 then sprays an ultrasonic airflow onto the electrode row ER to be cleaned to perform the cleaning. The mechanism control unit 191 may continuously generate, spray, and suck the ultrasonic airflow during cleaning, or it may perform this series of controls when the discharge nozzle 121 is positioned in the cleaning position.

[0099] The predetermined angle refers to the angle at which the direction in which the electrode array ER to be cleaned is arranged and the X direction in which the stage unit 16 moves are parallel when the electrode array ER to be cleaned is positioned in the wiping cleaning unit 13. In addition, the control unit 19a controls the stage unit 16 to rotate to a predetermined angle before the electrode array ER to be cleaned is positioned in the wiping cleaning unit 13, based on the processing recipe.

[0100] The mechanism control unit 191 controls the wiping and cleaning unit 13 by moving the stage unit 16 so that the display panel 100 approaches the wiping and cleaning unit 13, and then controls the actuator 134 to drive the drive arm 135. The upper pressing head 131 moves in the -Z direction and the lower pressing head 132 moves in the +Z direction, so that the upper pressing head 131 and the lower pressing head 132 grip the display panel 100. Thereafter, the mechanism control unit 191 controls the supply reel and the collection reel of the wiping cloth 139, and while feeding out the wiping cloth 139 and gripping the display panel 100, sequentially cleans the electrode rows ER to be cleaned. After the cleaning is completed, the mechanism control unit 191 controls the actuator 134 again to drive the drive arm 135. The upper pressing head 131 moves in the +Z direction, and the lower pressing head 132 moves in the -Z direction, causing the upper pressing head 131 and the lower pressing head 132 to open the display panel 100.

[0101] The mechanism control unit 191 controls the second Y-direction moving mechanism 143 to position the plasma irradiation tube 141 at the position of the electrode row ER to be cleaned, in order to control the plasma cleaning unit 14. The mechanism control unit 191 irradiates the electrode row ER to be cleaned with plasma to clean it. The mechanism control unit 191 may generate plasma continuously during cleaning, or it may generate it when it is positioned at the cleaning position.

[0102] The memory unit 192 stores various information such as programs and operating conditions. For example, the memory unit 192 stores the position data of the display panel 100, the position data of the electrode row ER which is the cleaning area, the transport speed of the display panel 100, and setting information received from the operator. This information may also be stored in the memory unit 192 in advance by the user.

[0103] The input unit 193 is an input means such as a switch, touch panel, keyboard, or mouse for the operator to operate the cleaning device 1 via the control unit 19a. The operator can use the input unit 193 to input information necessary for control and store it in the storage unit 192.

[0104] The output unit 194 is an output means such as a display, lamp, or meter that makes information for checking the status of the device visible to the operator. For example, the output unit 194 can display an input screen for information received from the input unit 193.

[0105] The setting unit 195 is a processing unit that sets information in the storage unit 192 according to the input. For example, it stores information input from the input unit 193 as setting information in the storage unit.

[0106] Figures 13 to 19 illustrate the procedure for positioning the cleaning device 1 in this embodiment.

[0107] The procedure for cleaning three electrode rows ER (ER1 to ER3) arranged on the edge of a display panel 100 including a curved portion using the cleaning device 1 will be described with reference to Figures 13 to 19. In this embodiment, the display panel 100 has different edge depths (positions in the Y direction), and the electrode rows ER1 to ER3 are arranged non-collinearly at the edge. In this embodiment, three electrode rows ER are used as an example on the edge of the display panel 100, but the number of electrode rows ER can be one or more. Even if the number of electrode rows ER is one or more, cleaning can be performed in the same order as below: ultrasonic cleaning, wiping cleaning, and plasma cleaning. The cleaning method using the cleaning device 1 as described below is also one aspect of the present invention.

[0108] Electrode rows ER1 to ER3 are examples of the first to third electrode rows, respectively. The electrode rows ER arranged on the display panel 100 are not limited to these examples, and the display panel 100 may have the first to nth electrode rows (n being an integer of 1 or more). The cleaning device 1 can clean the electrode rows of various display panels 100, such as those shown in Figure 1, by combining the movement and rotation of the stage section 16 in the X direction with the movement of the ultrasonic cleaning section 12 and the plasma cleaning section 14 in the Y direction. The procedure for positioning each electrode row ER on the second cleaning section 21 and the first cleaning section 20 on each electrode row ER is not limited to the examples shown in Figures 13 to 19. For example, these positioning procedures may be changed depending on the shape of the display panel 100 and the electrode rows ER arranged thereon. Various positioning can be performed by combining the procedure of positioning the electrode row ER to be cleaned on the second cleaning section 21, and then moving the first cleaning section 20 in the Y direction to position it on the electrode row ER to be cleaned.

[0109] Furthermore, in Figures 13-19, for the sake of simplicity, the positions of the discharge nozzle 121 in the ultrasonic cleaning unit 12, the pressing heads in the wiping cleaning unit 13, and the plasma irradiation tube 141 in the plasma cleaning unit 14 of the cleaning apparatus 1 are shown as US, WET, and PLAZMA, respectively. The dashed line extending in the X direction indicates the reference position, and in the initial state, each cleaning unit is assumed to be positioned at the home position. This dashed line is also called the reference line. In this embodiment, the initial state is when the display panel 100 before cleaning is placed on the transport stage 161. Furthermore, information necessary for the cleaning process (processing recipe), such as the transport speed and rotation speed of the stage unit 16 and position information, is assumed to be loaded from the storage unit 192. In addition, the processing recipes for the operation of the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14 are also assumed to be loaded from the storage unit 192.

[0110] The processing recipe specifies, for example, movement and rotation control in the stage section 16, movement control in the ultrasonic cleaning section 12, flow rate control of clean air and ultrasonic operation control, opening and closing operation of each pressing head in the wiping cleaning section, winding operation of the wiping cloth and operation of the processing liquid, movement control, gas supply control and discharge control in the plasma cleaning section 14. The control unit 19a controls each mechanism in accordance with this processing recipe.

[0111] As shown in Figure 13(A), in the initial state, the imaging unit 600 captures alignment marks on the display panel 100, and then the display panel 100 is aligned to the reference position. Based on the recognition results of the imaging unit 600, the mechanism control unit 191 controls each movement mechanism to move the stage unit 16 in the X, Y, and θ directions to align it to the origin position. The origin position is set so that the arrangement direction of the electrode row ER2 is parallel to the reference line. In Figure 13(A), the control unit 19a controls the imaging unit 600 and aligns it to the origin position. According to the processing recipe, the control unit 19a moves the X-direction movement mechanism 162 to move the display panel 100 on the transport stage 161 in the X direction.

[0112] The ultrasonic airflow discharged from the discharge nozzle 121 of the ultrasonic cleaning unit 12 and the plasma gas irradiated from the plasma irradiation tube 141 of the plasma cleaning unit 14 may be discharged or irradiated at all times, or the processing recipe may be set so that they are discharged or irradiated just before the discharge nozzle 121 and the plasma irradiation tube 141 are positioned at each electrode row ER, and then stopped after passing through each electrode row ER.

[0113] Next, as shown in Figure 13(B), the θ-direction movement mechanism 163 rotates the stage section 16 in the θ direction to adjust the orientation and position of the electrode array ER1, which is the electrode array that the wiping and cleaning section 13 will clean first. The θ-direction movement mechanism 163 rotates the stage section 16 in the θ direction so that the arrangement direction of the electrode array ER1 is parallel to the X direction, that is, so that the electrode array ER1 is on the reference position. In this figure, the dashed line, which is the reference position, is the direction in which the arrangement direction of the electrode array ER1 is parallel to the X direction. Note that when the electrode array ER1 is cleaned by the wiping and cleaning section 13, this is done before the electrode array ER1 is cleaned by the ultrasonic cleaning section 12.

[0114] As shown in Figure 13(C), the electrode array ER1 is positioned on the dashed line, which is the reference position, by the rotation of the stage unit 16. With the electrode array ER1 positioned at the reference position, the display panel 100 is moved in the X direction by the X-direction movement mechanism 162, and as it moves in the X direction, it passes the position corresponding to the ultrasonic cleaning unit 12, and cleaning is performed by ultrasonic airflow. At this time, when cleaning the electrode array ER1, the ultrasonic cleaning unit 12 does not move in the Y direction by the first Y-direction movement mechanism 124.

[0115] Next, Figure 14(A) shows the state after the electrode array ER1 has passed through the ultrasonic cleaning unit 12 and the cleaning of electrode array ER1 by the ultrasonic cleaning unit 12 has been completed. In this state, the ultrasonic cleaning unit 12 is positioned over electrode array ER2, which will be cleaned next. Specifically, the stage unit 16 is moved in the X direction by the X direction movement mechanism 162, and the discharge nozzle 121 of the ultrasonic cleaning unit 12 is moved in the -Y direction by the first Y direction movement mechanism 124 to position it over electrode array ER2. In other words, the ultrasonic cleaning unit 12 is positioned in the Y direction over which electrode array ER2 passes, without changing the orientation of the display panel 100.

[0116] The ultrasonic cleaning unit 12 cleans the electrode row ER2 of the display panel 100, which moves in the X direction, by an ultrasonic airflow discharged from the discharge nozzle 121 (Figure 14(B)).

[0117] After the ultrasonic cleaning unit 12 has cleaned the electrode row ER2, the ultrasonic cleaning unit 12 is positioned in the Y direction through which the electrode row ER3 passes, as shown in Figure 14(C). The X-direction moving mechanism 162 continues to move the stage unit 16 in the X direction, and the first Y-direction moving mechanism 124 moves the discharge nozzle 121 of the ultrasonic cleaning unit 12 in the -Y direction to position it for cleaning the electrode row ER3. At this time, the discharge nozzle 121 of the ultrasonic cleaning unit 12 moves to correspond to the position of the electrode row ER3, which has been positioned by the rotation of the display panel 100.

[0118] The ultrasonic cleaning unit 12 cleans the electrode row ER3 of the display panel 100, which moves in the X direction by the ultrasonic airflow discharged from the discharge nozzle 121 (Figure 15(A), (B)).

[0119] In this embodiment, at this time, as shown in Figure 15(B), the electrode array ER1 reaches the wiping and cleaning unit 13. As the stage unit 16 moves in the X direction, the electrode array ER1 is cleaned by the wiping and cleaning unit 13. When wiping and cleaning the electrode array ER1, the actuator 134 drives the upper pressing head 131 and the lower pressing head 132 to grip the display panel 100. In this embodiment, in the processing recipe, the mechanism control unit 191 is set to grip the display panel 100 at the timing immediately before positioning the electrode array ER to be cleaned in a position where it can be gripped by the upper pressing head 131 and the lower pressing head 132, and the display panel 100 is gripped at this timing. In addition, before gripping the display panel 100, the mechanism control unit 191 sends out a wiping cloth 139 supplied with cleaning liquid. Furthermore, after cleaning the electrode array ER1, the mechanism control unit 191 feeds out a wiping cloth so that the new cleaning surface faces the next electrode array ER to be cleaned.

[0120] In this embodiment, ultrasonic cleaning of the last electrode row ER3 on the display panel 100 is completed at this time. Once ultrasonic cleaning of all electrode rows ER (ER1 to ER3) is completed by the ultrasonic cleaning unit 12, the mechanism control unit 191 controls the first Y-direction movement mechanism 124 to move the discharge nozzle 121 in the +Y direction and position it in the home position.

[0121] With the wiping and cleaning unit 13 gripping the display panel 100, the display panel 100 moves in the X direction, the electrode row ER1 passes over it, and once the wiping and cleaning unit 13 has finished cleaning the electrode row ER1, the gripping of the display panel 100 by each pressing head is released. The X-direction movement mechanism 162 continues to move the stage unit 16 in the X direction, and the θ-direction movement mechanism 163 rotates the stage unit 16 in the θ direction so that the arrangement direction of the electrode row ER2 becomes parallel to the X direction (Figure 15(C)). At this time, the dashed line, which is the reference position, is parallel to the arrangement direction of the electrode row ER2 and to the X direction.

[0122] In this embodiment, after the electrode array ER2 is aligned parallel to the X direction, the electrode array ER2 reaches the wiping and cleaning unit 13, as shown in Figure 16(A). With the display panel 100 again being held between the upper pressing head 131 and the lower pressing head 132 of the wiping and cleaning unit 13, the electrode array ER2 continues to move in the X direction, thereby cleaning the electrode array ER2.

[0123] After cleaning of the electrode array ER2 is complete, the clamping by each pressing head is released, and as shown in Figure 16(B), the X-direction moving mechanism 162 moves the stage section 16 in the X direction, while the θ-direction moving mechanism 163 rotates the stage section 16 in the θ direction so that the arrangement direction of the electrode array ER3 becomes parallel to the X direction. At this time, the dashed line, which serves as the reference position, is the direction parallel to the X direction and the arrangement direction of the electrode array ER3.

[0124] In this embodiment, after the arrangement direction of the electrode array ER3 becomes parallel to the X direction, the electrode array ER3 reaches the wiping and cleaning section 13, as shown in Figure 16(C).

[0125] Furthermore, after the cleaning of electrode row ER2 is completed, the second Y-direction moving mechanism 143 positions the plasma irradiation tube 141 of the plasma cleaning unit 14 at the cleaning position of electrode row ER1 in the -Y direction. At this time, the plasma irradiation tube 141 of the plasma cleaning unit 14 moves to correspond to the position of electrode row ER1 positioned by the rotation of the display panel 100. Note that the movement of the plasma cleaning unit 14 may be performed at an appropriate timing, as the position through which electrode row ER1 will pass is known in advance.

[0126] In this embodiment, as shown in Figure 17(A), when electrode array ER3 reaches the wiping and cleaning unit 13, electrode array ER1 simultaneously reaches the plasma cleaning unit 14. That is, cleaning of electrode array ER3 in the wiping and cleaning unit 13 and cleaning of electrode array ER1 in the plasma cleaning unit 14 are performed simultaneously.

[0127] At this time, in the wiping and cleaning unit 13, the upper pressing head 131 and the lower pressing head 132 grip the display panel 100, and in this state, the electrode array ER3 continues to move in the X direction, thereby cleaning the electrode array ER3.

[0128] Simultaneously, the plasma cleaning unit 14 cleans the electrode row ER1 of the display panel 100, which is moving in the X direction. In Figure 17(A), the cleaning of electrode row ER3 by the wiping cleaning unit 13 and the cleaning of electrode row ER1 by the plasma cleaning unit 14 occur at the same time, but it is not necessary for them to be at the same time. After the cleaning of electrode row ER3 is completed, the wiping cleaning unit 13 again drives the drive arm 135 by the actuator 134, causing the upper pressing head 131 and the lower pressing head 132 to open the display panel 100.

[0129] After the cleaning of electrode array ER1 is complete, the plasma cleaning unit 14 is positioned where electrode array ER2 will pass, as shown in Figure 17(B). Specifically, the plasma irradiation tube 141 of the plasma cleaning unit 14 is moved by the second Y-direction moving mechanism 143 to position it at the cleaning position corresponding to electrode array ER2 in the Y direction.

[0130] When the plasma cleaning unit 14 is positioned to correspond to the electrode row ER2, as shown in Figure 17(C), the plasma irradiated from the plasma irradiation tube 141 of the plasma cleaning unit 14 cleans the electrode row ER2, which moves together with the display panel 100 that moves in the X direction.

[0131] After the plasma cleaning unit 14 cleans the electrode row ER2, as shown in Figure 18(A), the stage unit 16 is not rotated, and the plasma irradiation tube 141 of the plasma cleaning unit 14 is positioned in the cleaning position corresponding to the electrode row ER3 in the Y direction by the second Y-direction moving mechanism 143. This position is the reference position, which is the position on the dashed line.

[0132] When the plasma irradiation tube 141 of the plasma cleaning unit 14 is positioned to correspond to the electrode row ER3, the plasma irradiated from the plasma irradiation tube 141 cleans the electrode row ER3, which moves together with the display panel 100 that moves in the X direction, as shown in Figure 18(B).

[0133] As shown in Figure 18(C), after the cleaning of the electrode row ER3 by the plasma cleaning unit 14 is completed, the stage unit 16 is rotated in the θ direction to return the display panel 100 to its initial state, as shown in Figure 19. At this time, the stage unit 16 is rotated in the θ direction so that the arrangement direction of the central electrode row, electrode row ER2, is parallel to the X direction, that is, so that the electrode row ER2 is on the reference position.

[0134] After cleaning of each electrode row ER is complete, the display panel 100 is transported to an unshown discharge section for further processing.

[0135] Furthermore, another procedure for positioning the cleaning device 1 in this embodiment will be explained with reference to Figure 20.

[0136] Figure 20(A) shows the state in which the mechanism control unit 191 positions the plasma cleaning unit 14 in the electrode row ER3, Figure 20(B) shows the state in which the mechanism control unit 191 rotates the stage unit 16 in the θ direction to return it to the initial position which is the rotation direction before cleaning, and Figure 20(A) shows the state after cleaning of electrode rows ER1 to ER3 is completed.

[0137] In this procedure, the steps from Figure 13(A) to Figure 17(C) are the same and therefore will not be explained. In this procedure, the plasma cleaning unit 14, which is the first cleaning unit 20 located furthest downstream in the transport direction, completes cleaning of electrode rows ER1 to ER2. Before the plasma cleaning unit 14 cleans electrode row ER3, the stage unit 16 is rotated in the θ direction to its initial position. In this example, the stage unit 16 is described as being positioned at its initial position after the cleaning of electrode row ER2 is completed, but the processing recipe may be set so that the stage unit 16 is positioned at its initial position after a predetermined electrode row ER is cleaned by a predetermined cleaning unit.

[0138] As shown in Figure 20(A), the second Y-direction movement mechanism 143 moves the plasma irradiation tube 141 of the plasma cleaning unit 14 in the Y direction. Unlike Figure 18(B), before the electrode row ER3 is cleaned by the plasma cleaning unit 14, the arrangement direction of the electrode row ER2 becomes parallel to the dashed line which is the reference position as the stage unit 16 rotates in the θ direction, that is, the display panel 100 is positioned in its initial position (see Figure 20(B)). In Figure 20(A), the plasma irradiation tube 141 moves in the Y direction to correspond to the position of the electrode row ER3 when the display panel 100 is positioned in its initial position.

[0139] After the display panel 100 is positioned in its initial position by the stage unit 16 and the plasma irradiation tube 141 is positioned to correspond to the electrode row ER3, the electrode row ER3 of the display panel 100, which is moving in the X direction, is cleaned by the plasma irradiated from the plasma irradiation tube 141, as shown in Figure 20(B).

[0140] After cleaning of each electrode row ER is complete, the display panel 100 is transported to an unshown discharge section for further processing (Figure 20(C)).

[0141] Figure 21 is a flowchart of the cleaning process in this embodiment.

[0142] This flowchart describes the cleaning process, starting with the initial state of the display panel 100 being placed on the transport stage 161 before cleaning. It is also assumed that information necessary for the cleaning process, such as the transport speed and rotation speed of the display panel 100, is loaded from the storage unit 192. Furthermore, in the following steps, the operation of rotating the stage unit 16 includes rotating the stage unit 16 to 0 degrees. For example, this includes rotating the stage unit 16 to 0 degrees in step S2 and rotating the stage unit 16 to 0 degrees in step S7. Note that the rotation operation may also involve rotating the stage unit 16 to 0 degrees in step S2 and then rotating it to a predetermined angle greater than 0 degrees in step S7, as in the case where ultrasonic cleaning of an electrode row ER is performed first without rotating the stage unit 16, and then the stage unit 16 is rotated to position the electrode row ER in the wiping cleaning unit 13 for wiping cleaning.

[0143] Furthermore, in this embodiment, an example of performing ultrasonic cleaning, wiping cleaning, and plasma cleaning on electrode rows ER1 to ERn (where n is an integer of 1 or more) arranged on the display panel 100 will be described. The electrode rows ER1 to ERn are assumed to be arranged in this order linearly or nonlinearly on the display panel 100. The description will focus on a flow in which ultrasonic cleaning is performed on electrode rows ER1 to ERn in this order, followed by wiping cleaning in the same order, and then plasma cleaning in the same order. However, various cleaning flows are possible depending on the shape of the display panel 100 and the arrangement of the electrode rows ER. Additionally, one electrode row ER and another electrode row ER may be cleaned in parallel using different cleaning methods.

[0144] In this embodiment, the initial state is set by positioning the Y-direction positions of the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14 at a reference position (see Figure 13(A)) (step S0).

[0145] In step S1, the variable i is assigned the value 1. In this flowchart, the variable i is an integer satisfying 1 <= i <= n and is used to describe the i-th electrode row ER to be cleaned. In step S2, the mechanism control unit 191 controls the X-direction movement mechanism 162 to move the display panel 100 placed on the stage unit 16 in the +X direction, that is, in the direction of each cleaning unit. Thereafter, the stage unit 16 moves in the X direction at a predetermined speed according to the processing recipe. If i = 1, the mechanism control unit 191 controls the θ-direction movement mechanism 163 to rotate the stage unit 16 in the θ direction. When rotating the stage unit 16, the mechanism control unit 191 rotates the stage unit 16 in the θ direction so that the arrangement direction of the electrode row ER1 is parallel to the X direction, that is, so that the electrode row ER1 is on the reference position.

[0146] In this embodiment, as shown in Figure 13(B), the stage unit 16 moves in the X direction while rotating in the θ direction so that the electrode row ER1 becomes the reference position (step S2). That is, the electrode row ERi becomes the electrode row ER1 because the variable i=1 is set. Simultaneously or subsequently, the mechanism control unit 191 positions the ultrasonic cleaning unit 12 at the Y direction position of the electrode row ER1, which is the first object to be cleaned (step S3). In this embodiment, since the ultrasonic cleaning unit 12 is initially positioned at the reference position, the movement of the ultrasonic cleaning unit 12 in the Y direction at this time is skipped.

[0147] When the electrode array ER1 reaches the ultrasonic cleaning unit 12 due to the movement of the display panel 100 in the X direction, the mechanism control unit 191 sprays ultrasonic air from the discharge nozzle 121 of the ultrasonic cleaning unit 12, which is positioned on the reference position, onto the electrode array ER1 as it passes through the ultrasonic airflow. In other words, once the electrode array ER1 is positioned in the ultrasonic cleaning unit 12, the electrode array ER1 is ultrasonically cleaned (step S4).

[0148] Simultaneously with or immediately following the ultrasonic cleaning of the electrode array ER1, which is the first object to be cleaned, in step S5, the mechanism control unit 191 determines whether the variable i is less than n. If the variable i is less than n (YES in step S5), the mechanism control unit 191 adds 1 to the variable i (i+1). In this case, the variable i becomes 2. Then, when the ultrasonic cleaning of the electrode array ER1 is completed, the process returns to step S3. In step S3, the Y-direction position of the ultrasonic cleaning unit 12 is positioned at the Y-direction position of the electrode array ER2 while the rotation state of the stage unit 16 remains unchanged. That is, as shown in Figure 14(A), the ultrasonic cleaning unit 12 is moved to the Y-direction position of the electrode array ER2. This positioning of the ultrasonic cleaning unit 12 is performed by the mechanism control unit 191 controlling the first Y-direction movement mechanism 124 relative to the stage unit 16, which is moving in the X-direction at a predetermined speed, to move the discharge nozzle 121 to the Y-direction position of the electrode array ER1 that is to be cleaned. As the stage unit 16 continues to move in the X direction, once the electrode array ER2 reaches the ultrasonic cleaning unit 12, ultrasonic cleaning is performed on the electrode array ER2.

[0149] Subsequently, steps S3 to S5 are repeated to perform ultrasonic cleaning of electrode rows ER2 to ERn. In step S5, if the mechanism control unit 191 determines that variable i is not less than n (NO in step S5), it completes the ultrasonic cleaning and returns the ultrasonic cleaning unit 12 to its initial position as shown in Figure 15(B). The cleaning process then proceeds to step S6. In step S6, 1 is assigned to variable i again. In the following steps, variable i refers to the i-th electrode row ER that is to be wiped clean.

[0150] In this embodiment, the electrode array ER1 is wiped clean by the wiping unit 13 simultaneously with or immediately following the ultrasonic cleaning of electrode array ER3, which is the last object to be ultrasonically cleaned (step S8). The wiping unit 13 is fixed in a reference position. Therefore, in step S1, the electrode array ER1, which remains positioned in the reference position, can be wiped clean while moving in the X direction. (See Figure 15(B))

[0151] In this embodiment, during ultrasonic cleaning, the stage unit 16 is rotated so that the electrode row ER1 is in the reference position. Therefore, during wiping, as shown in Figure 15(A), the process is initially carried out in the same rotated state as during ultrasonic cleaning. However, after wiping one electrode row ER is completed, the stage unit 16 rotates in the θ direction.

[0152] In other words, in the first step S7 of this embodiment, the rotation operation in the θ direction is skipped because in step S1, the stage unit 16 has already been rotated in the θ direction to match the arrangement direction of the electrode row ER1. In step S8, when the mechanism control unit 191 positions the display panel 100 in a position where it can be gripped by the upper pressing head 131 and the lower pressing head 132, it controls the actuator 134 to grip the display panel 100. The mechanism control unit 191 grips the display panel 100 and cleans the electrode row ER1. After cleaning the electrode row ER1, each pressing head releases the display panel 100.

[0153] Simultaneously with or immediately following the wiping and cleaning of electrode array ER1, in step S9, the mechanism control unit 191 determines whether the variable i is less than n. If the variable i is less than n (YES in step S9), 1 is added to the variable i, and the process returns to step S7. In this case, since the variable i is 1, the variable i becomes 2. In step S7 after cleaning electrode array ER1, the mechanism control unit 191 controls the θ-direction movement mechanism 163 to rotate the stage unit 16 in the θ direction. The mechanism control unit 191 rotates the stage unit 16 in the θ direction so that the arrangement direction of electrode array ERi is parallel to the X direction. Therefore, in this case, the stage unit 16 is rotated in the θ direction to position electrode array ER2 at the reference position (see Figure 15(C)). Then, the X-movement of electrode array ER2 causes the wiping and cleaning unit 13 to perform wiping and cleaning of electrode array ER2.

[0154] Subsequently, steps S7 to S9 are repeated to perform wiping and cleaning of electrode rows ER2 to ERn. In step S9, if the mechanism control unit 191 determines that variable i is not less than n (NO in step S5), it completes the wiping and cleaning and proceeds to step S10. In step S10, 1 is assigned to variable i again. In the transition step, variable i refers to the i-th electrode row ER that is the target of plasma cleaning.

[0155] In this embodiment, the determination in step 9 is performed simultaneously with or immediately following the wiping and cleaning of electrode array ER3, which is the last object to be wiped and cleaned. At this time, the variable i=3, and the determination in step 9 is NO, so the process proceeds to step S10.

[0156] At this time, in step S11, the mechanism control unit 191 positions the plasma irradiation tube 141 of the plasma cleaning unit 14 on the electrode row ER1 because the variable i=1 (see Figure 16(C)). This positioning is performed by the mechanism control unit 191 controlling the second Y-direction movement mechanism 143 with respect to the stage unit 16 which moves in the X direction at a predetermined speed, thereby moving the plasma irradiation tube 141 to the position in the Y direction of the electrode row ER1 to be cleaned. In step S12, as shown in Figure 17(A), the mechanism control unit 191 performs plasma cleaning after the positioning in the Y direction is completed.

[0157] In this embodiment, during plasma cleaning, as shown in Figure 17, the stage section 16 remains in the final wiping cleaning state, and θ is fixed until the plasma cleaning of the last electrode row ER is completed.

[0158] In step S13, the mechanism control unit 191 determines whether the variable i is less than n. If the variable i is less than n (YES in step S13), 1 is added to the variable i and the process returns to step S11. In this case, since the variable i is 1, the variable i becomes 2. Subsequently, steps S11 to S13 are repeated to perform plasma cleaning of the electrode rows ER2 to ERN. In step S11, if the mechanism control unit 191 determines that the variable i is not less than n (NO in step S13), the plasma cleaning is completed and the process is finished. After this, as shown in Figure 19, the display panel 100 is returned to its initial reference state by the rotation of the stage unit 16 in the θ direction and movement in the X direction.

[0159] (effect) According to this embodiment, the cleaning device 1 rotates the display panel 100 in the θ direction so that the wiping cleaning by the wiping cleaning unit 13 is parallel to the arrangement direction of the electrode rows ER, thereby positioning the electrode rows ER. Furthermore, the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 are positioned at the positions of each electrode row ER after rotation to perform cleaning. As a result, the cleaning device 1 can clean even when the electrode rows ER are provided in parts of the display panel 100 that have different depths, such as curved or notched portions.

[0160] Furthermore, according to this embodiment, the cleaning device 1 can perform wiping and cleaning parallel to the arrangement direction of the electrode rows ER by rotating the display panel 100 on the stage section 16. In other words, the cleaning device 1 can uniformly contact each electrode row ER with the wiping cloth, enabling uniform wiping and cleaning.

[0161] Furthermore, according to this embodiment, since the cleaning device 1 is configured such that the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 move in the Y direction by a Y direction movement mechanism, it becomes possible to position the display panel 100 on the electrode row ER which moves in the Y direction as the display panel 100 rotates, and cleaning can be performed in accordance with the electrode row ER of the display panel 100 which moves in the X direction.

[0162] Next, we will compare the cleaning device 1 described in this embodiment with the cleaning device 1 shown in Figure 22. In the comparative example shown in Figure 22, the cleaning device 1 does not have a Y-direction movement mechanism for each cleaning section. Therefore, for example, when cleaning electrode rows ER1 to ER3 that are not collinear on the edge of a display panel 100 including a curved portion, the cleaning device 1 needs to rotate the stage section 16 in the θ direction to position it in each cleaning section each time it cleans each electrode row ER.

[0163] As shown in Figure 22(A), when cleaning the electrode array ER1, the stage unit 16 is rotated in the θ direction so that the arrangement direction of the electrode array ER1 is parallel to the X direction. In this state, the stage unit 16 is moved in the X direction, and the electrode array ER1 is cleaned by passing through the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14.

[0164] Once the cleaning of the electrode array ER1 is complete by each cleaning unit, the stage unit 16 is moved in the -X direction. In other words, it is returned to the initial position when the display panel 100 was placed on the stage unit 16 (Figure 22(B)).

[0165] At this position, the stage unit 16 rotates in the θ direction so that the arrangement direction of the electrode row ER2 is parallel to the X direction. In this state, while moving the stage unit 16 in the X direction, the electrode row ER2 is cleaned by passing through the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14.

[0166] Once the cleaning of the electrode array ER2 is completed by each cleaning unit, the stage unit 16 is moved in the -X direction. In other words, it is returned to the initial position when the display panel 100 was placed on the stage unit 16 (Figure 22(C)). At this position, the stage unit 16 rotates in the θ direction so that the arrangement direction of the electrode array ER3 is parallel to the X direction. In this state, as the stage unit 16 is moved in the X direction, the electrode array ER3 is cleaned by passing through each cleaning unit: the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14.

[0167] As described above, if the display panel 100 includes curved shapes (curved portions) or concave shapes (notched portions) on its edges, the cleaning device 1 can rotate the stage unit 16 according to the angle at which the electrode rows ER are positioned, thereby positioning the electrode rows ER to be cleaned in each cleaning section and performing the cleaning. However, for large display panels 100 used in vehicles, etc., it is necessary to rotate the stage unit 16 back to its initial position each time an electrode row ER is cleaned, which increases the cycle time.

[0168] According to this embodiment, even when the electrode array ER is provided in curved or notched portions of the display panel 100, or in other areas with different depths, the cleaning device 1 can clean with just one movement in the X direction, thus enabling efficient processing without reducing the cycle time. Therefore, productivity can be improved.

[0169] Furthermore, the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 may be equipped with an X-direction movement mechanism to adjust the distance between the ultrasonic cleaning unit 12 and the wipe cleaning unit 13, and between the wipe cleaning unit 13 and the plasma cleaning unit 14. This allows the position in the X-direction of each cleaning unit to be adjusted according to the spacing of each electrode row ER.

[0170] Next, a first modified example of the cleaning device 1 in this embodiment will be described. In this modified example, the procedure for the cleaning device 1 to clean three electrode rows ER arranged on the edge of a recessed display panel 100 having a notched portion will be described as electrode rows ER1 to ER3. In this example, electrode row ER2 will be described as being located in the notched portion.

[0171] In such cases, the rotation angle of the stage section 16 by the θ-direction movement mechanism 163 may be set to 0 degrees.

[0172] Furthermore, in the modified configuration, the stage section 16 is positioned by the third Y-direction moving mechanism 164 to position the electrode rows ER located in the notch section at the cleaning position of the wiping cleaning section 13, in order to clean the electrode rows ER located in the notch section by the wiping cleaning section 13. In this modified configuration, a processing recipe for cleaning the electrode rows ER located in the area including the notch section of the display panel 100 is pre-programmed, and the processing is executed based on this data.

[0173] As shown in Figure 23(A), in the initial state, the imaging unit 600 captures alignment marks on the display panel 100, and then the stage unit 16 is positioned at the origin. In this modified example, the movement mechanisms move the stage unit 16 so that the arrangement direction of electrode rows ER1 and ER3, among the electrode rows ER1 to ER3, is at the reference position. At this time, the arrangement direction of electrode rows ER1 and ER3 is perpendicular to the winding direction of the wiping cloth 139 of the wiping and cleaning unit 13, so the θ-direction movement mechanism 163 sets its rotation angle in the θ direction to 0 degrees. Subsequently, according to the processing recipe, the X-direction movement mechanism 162 moves the display panel 100 on the transport stage 161 in the X direction.

[0174] As shown in Figure 23(B), the electrode array ER1 is positioned in the reference direction, and the X-direction movement mechanism 162 causes the electrode array ER1 to pass under the discharge nozzle 121 of the ultrasonic cleaning unit 12, where it is cleaned by the ultrasonic airflow discharged from the discharge nozzle.

[0175] When ultrasonic cleaning of electrode array ER1 is complete, the ultrasonic cleaning unit 12 moves the discharge nozzle 121 in the Y direction by the first Y-direction movement mechanism 124 to correspond to the position of electrode array ER2, which is to be cleaned next. As shown in Figure 23(C), the first Y-direction movement mechanism 124 moves the discharge nozzle 121 from the reference position in the -Y direction to a predetermined distance to correspond to electrode array ER2. The X-direction movement mechanism 162 causes electrode array ER2 to pass under the discharge nozzle 121 of the ultrasonic cleaning unit 12 and clean it by the ultrasonic airflow discharged from the discharge nozzle.

[0176] When ultrasonic cleaning of electrode row ER2 is complete, the ultrasonic cleaning unit 12 moves the discharge nozzle 121 in the Y direction by the first Y-direction movement mechanism 124 to correspond to the position of electrode row ER3, which is the next to be cleaned. As shown in Figure 24(A), the first Y-direction movement mechanism 124 moves the discharge nozzle 121 in the +Y direction by a predetermined distance to correspond to electrode row ER3, which is located at the reference position. The X-direction movement mechanism 162 causes electrode row ER3 to pass under the discharge nozzle 121 of the ultrasonic cleaning unit 12 and clean it with the ultrasonic airflow discharged from the discharge nozzle. Furthermore, simultaneously with the cleaning of electrode row ER3, electrode row ER1 passes through the wiping cleaning unit 13. At this time, each pressing head of the wiping cleaning unit 13 grips the display panel 100, and electrode row ER1 is wiped clean by the wiping cloth 139 while moving in the X direction.

[0177] Once the electrode row ER1 has been wiped clean, each pressing head releases its grip on the display panel 100. The third Y-direction moving mechanism 164 moves the stage section 16 in the +Y direction so that the electrode row ER2, which is the target of the wiping and cleaning section 13, is positioned at the reference position. As shown in Figure 24(B), when the wiping and cleaning section 13 is positioned to correspond to the electrode row ER2, each pressing head grips the display panel 100 and cleans the electrode row ER2, which is moving in the X direction, with the wiping cloth 139.

[0178] Once the wiping and cleaning of electrode row ER2 is complete, each pressing head releases its grip on the display panel 100. The third Y-direction moving mechanism 164 moves the stage section 16 in the -Y direction so that the positions of electrode row ER3, which is to be cleaned by the wiping and cleaning section 13, and electrode row ER1, which is to be cleaned by plasma cleaning, are at the reference position. As shown in Figure 24(C), when the wiping and cleaning section 13 is positioned to correspond to electrode row ER3, each pressing head grips the display panel 100 and cleans electrode row ER3, which is moving in the X direction, with the wiping cloth 139. Furthermore, the X-direction moving mechanism 162 causes electrode row ER1 to pass under the plasma irradiation tube 141 of the plasma cleaning section 14 and is cleaned by the plasma irradiated from the plasma irradiation tube 141.

[0179] Once the cleaning of electrode array ER1 by the plasma cleaning unit 14 is complete, the plasma cleaning unit 14 is moved by a predetermined distance in the -Y direction by the second Y-direction moving mechanism 143 to correspond to the position of electrode array ER2. As shown in Figure 25(A), the electrode array ER2 passes under the plasma irradiation tube 141 of the plasma cleaning unit 14 by the X-direction moving mechanism 162 and is cleaned by the plasma irradiated from the plasma irradiation tube 141.

[0180] Once the plasma cleaning of electrode array ER2 is complete, the plasma cleaning unit 14 moves by a predetermined distance in the +Y direction by the second Y-direction moving mechanism 143 to correspond to the position of electrode array ER3, which is located at the reference position (see Figure 25(B)).

[0181] As shown in Figure 25(B), the electrode array ER3 passes under the plasma irradiation tube 141 of the plasma cleaning unit 14 by the X-direction movement mechanism 162, and the electrode array ER3 is cleaned by the plasma irradiated from the plasma irradiation tube 141.

[0182] When the plasma irradiation tube 141 is positioned to correspond to the electrode row ER3, the display panel 100, which moves in the X direction along the reference position, indicates that the electrode row ER3 passes under the plasma irradiation tube 141 of the plasma cleaning unit 14 and is cleaned by the plasma irradiated from the plasma irradiation tube 141 (see Figure 25(C)).

[0183] Once the cleaning of electrode rows ER1 to ER3 by each cleaning unit is complete, the respective drive mechanisms move the display panel 100 on the stage unit 16 to a position for removal (see Figure 26). The display panel 100 is then removed to an unshown discharge unit for further processing.

[0184] Next, a second modified example of the cleaning device 1 in this embodiment will be described using Figures 27 to 30.

[0185] This modified example describes a cleaning procedure for a display panel 100 having a notched portion. In this modified example, the display panel 100 has a notched portion in the center and curved portions on either side of it. Electrode arrays ER are arranged in both the notched portion and the curved portions of this display panel 100.

[0186] As shown in Figures 27-30, the procedure for cleaning electrode rows ER1 to ER3, respectively, which are located on the edge of the display panel 100 including the notched portion, will be described below. In this example, electrode rows ER1 and ER3 are located on the curved edge, and electrode row ER2 is located on the notched portion.

[0187] When the display panel 100 is placed on the stage unit 16, the θ-direction movement mechanism 163 rotates the stage unit 16 to a predetermined angle in the θ direction in order to clean the electrode row ER1. At this time, the mechanism control unit 191 positions the electrode row ER1, which is the electrode row that the wiping cleaning unit 13 will clean first, to a position corresponding to the wiping cleaning unit 13. The θ-direction movement mechanism 163 rotates the stage unit 16 in the θ direction so that the arrangement direction of the electrode row ER1 is parallel to the wiping cleaning unit 13, that is, so that the electrode row ER1 is on the reference position. As shown in Figure 27(A), the dashed line that represents the reference position is the direction in which the arrangement direction of the electrode row ER1 is parallel to the wiping cleaning unit 13. At this time, since the electrode row ER1 is positioned at the reference position, it is not necessary to move the stage unit 16 in the Y direction by the third Y-direction movement mechanism 164. In this modified example, a processing recipe for cleaning the notched portion of the display panel 100 and the electrode row ER arranged on the curved surface is pre-programmed, and the processing is executed based on this data.

[0188] When the stage section 16 rotates due to the θ-direction movement mechanism 163, the X-direction movement mechanism 162 drives the stage section 16, moving the display panel 100 in the X direction. The electrode row ER1 of the display panel 100, moving in the X direction, is positioned to correspond to the ultrasonic cleaning section 12. Since the electrode row ER1 is positioned on the reference position, the electrode row ER1 of the display panel 100 passes below the discharge nozzle 121 of the ultrasonic cleaning section 12 by the X-direction movement of the stage section 16 by the X-direction movement mechanism 162, without moving the stage section 16 in the Y direction by the first Y-direction movement mechanism 124. Then, the electrode row ER1 is ultrasonically cleaned by the ultrasonic airflow discharged from the discharge nozzle 121 (see Figure 27(B)).

[0189] When ultrasonic cleaning of electrode row ER1 is completed, the ultrasonic cleaning unit 12 moves the discharge nozzle 121 of the ultrasonic cleaning unit 12 by a predetermined distance in the -Y direction by the first Y-direction moving mechanism 124, as shown in Figure 27(C), to position it at the cleaning position corresponding to electrode row ER2 in the Y direction.

[0190] When the discharge nozzle 121 of the ultrasonic cleaning unit 12 is positioned to clean the electrode row ER2, the electrode row ER2 of the display panel 100, which is oriented in the X direction by the X-direction movement mechanism 162, passes below the discharge nozzle 121 of the ultrasonic cleaning unit 12. The electrode row ER2 is cleaned by the ultrasonic airflow discharged from the discharge nozzle 121 (see Figure 28(A)).

[0191] After ultrasonic cleaning of electrode row ER2 is complete, the ultrasonic cleaning unit 12 moves its discharge nozzle 121 in the -Y direction using the first Y-direction movement mechanism 124 to position it to correspond to the cleaning position of electrode row ER3 in the Y direction. The electrode row ER3 of the display panel 100, which is moved in the X direction by the X-direction movement mechanism 162, passes below the discharge nozzle 121 of the ultrasonic cleaning unit 12. Electrode row ER3 is cleaned by the ultrasonic airflow discharged from the discharge nozzle 121 (see Figure 28(B)). The electrode row ER1 of the display panel 100 is moved in the X direction by the X-direction movement mechanism 162 and is wiped clean by passing through the wipe cleaning unit 13.

[0192] After the wiping and cleaning of electrode array ER1 and the ultrasonic cleaning of electrode array ER3 are completed, the stage unit 16 is moved in the +Y direction and then rotated in the θ direction for cleaning electrode array ER2 by the wiping and cleaning unit 13. At this time, the θ direction movement mechanism 163 rotates the stage unit 16 in the θ direction so that the arrangement direction of electrode array ER2 is parallel to the wiping and cleaning unit 13. Furthermore, the third Y direction movement mechanism 164 moves the stage unit 16 in the Y direction to position electrode array ER2 in a position corresponding to the wiping and cleaning unit 13. After electrode array ER2 is positioned in the wiping and cleaning unit 13, the display panel 100 is moved in the X direction to perform wiping and cleaning of electrode array ER2 (see Figure 28(C)).

[0193] Once the cleaning of electrode row ER2 by the wiping cleaning unit 13 is complete, the stage unit 16 is moved in the -Y direction and then rotated in the θ direction for cleaning electrode row ER3 by the wiping cleaning unit 13. At this time, the θ direction movement mechanism 163 rotates the stage unit 16 in the θ direction so that the arrangement direction of electrode row ER3 is parallel to the wiping cleaning unit 13. Furthermore, the stage unit 16 is moved in the -Y direction by the third Y direction movement mechanism 164 to position electrode row ER3 in a position corresponding to the wiping cleaning unit 13. At this time, for cleaning electrode row ER1 by the plasma cleaning unit 14, the plasma irradiation tube 141 of the plasma cleaning unit 14 is moved in the -Y direction by the second Y direction movement mechanism 143 to position it in a cleaning position corresponding to electrode row ER1 (see Figure 28(A)).

[0194] As the display panel 100 moves in the X direction by the X-direction movement mechanism 162, the electrode row ER3 passes through the wiping and cleaning section 13, and is wiped and cleaned by the wiping and cleaning section 13. At the same time as the electrode row ER3 is wiped and cleaned by the wiping and cleaning section 13, the electrode row ER1 passes below the plasma irradiation tube 141 of the plasma cleaning section 14. As a result, the electrode row ER1 is plasma cleaned by the plasma irradiated from the plasma irradiation tube 141 (see Figure 28(B)).

[0195] After the plasma cleaning of electrode array ER1 is complete, the plasma cleaning of electrode array ER2 is performed. In this second modification, since the positions of electrode array ER2 and electrode array ER1 in the Y direction are the same, the plasma cleaning unit 14 is not moved in the Y direction. If the positions of electrode array ER2 and electrode array ER1 in the Y direction are different, the second Y-direction movement mechanism 143 positions the plasma irradiation tube 141 of the plasma cleaning unit 14 at the cleaning position of electrode array ER2 in the Y direction. The X-direction movement of the display panel 100 by the X-direction movement mechanism 162 causes electrode array ER2 to pass below the plasma irradiation tube 141 of the plasma cleaning unit 14. After passing below the plasma irradiation tube 141, electrode array ER2 is plasma cleaned by the plasma irradiated from the plasma irradiation tube 141 of the plasma cleaning unit 14 (see Figure 29(C)).

[0196] Once the plasma cleaning of electrode array ER2 is complete, the plasma cleaning of electrode array ER3 is performed. The plasma cleaning unit 14 is moved to a position in the Y direction corresponding to electrode array ER3 by the second Y-direction moving mechanism 143 (see Figure 30(A)).

[0197] As the X-direction movement of the display panel 100 by the X-direction movement mechanism 162 moves the electrode array ER3 below the plasma irradiation tube 141 of the plasma cleaning unit 14. As a result, the electrode array ER3 is plasma-cleaned by the plasma irradiated from the plasma irradiation tube 141 (see Figure 30(B)).

[0198] After all electrode rows ER have been cleaned, the Y and θ directions of the stage section 16 are returned to their initial positions. The display panel 100 is then transported to an unillustrated discharge section for further processing.

[0199] According to the first modified example of this embodiment, the cleaning device 1 moves the display panel 100 in the X direction together with the stage unit 16, and moves the stage unit 16 in the Y direction to align the position of the electrode row ER in the notched portion of the display panel 100 with the position of the wipe cleaning unit 13, thereby positioning the Y-direction position of the electrode row ER in the notched portion of the display panel 100 with the position of the wipe cleaning unit 13, and performing wipe cleaning of the electrode row ER in the notched portion of the display panel 100 by the wipe cleaning unit 13. Furthermore, the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 are positioned at the position of each electrode row ER for cleaning. As a result, the cleaning device 1 can clean the display panel 100 in a single movement in the X direction, even when an electrode row ER is provided in the notched portion of the display panel 100.

[0200] According to a second modification of this embodiment, the cleaning device 1 moves the display panel 100 together with the stage unit 16 in the X direction, and moves the stage unit 16 in the Y direction to align the position of the electrode row ER in the notched portion of the display panel 100 with the position of the wipe cleaning unit 13, thereby positioning the electrode row ER in the notched portion of the display panel 100 in the Y direction with the position of the wipe cleaning unit 13, and enabling the wipe cleaning unit 13 to wipe and clean the electrode row ER in the notched portion of the display panel 100. Furthermore, the stage unit 16 is rotated so that the arrangement direction of each electrode row ER arranged on the curved surface of the edge of the display panel 100 is parallel to the wipe cleaning unit 13, thereby enabling the wipe cleaning of each electrode row ER arranged on the curved surface of the edge of the display panel 100. In addition, the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 are positioned at the position of each electrode row ER for cleaning. As a result, the cleaning device 1 can clean the display panel 100 in a single movement in the X direction, even when electrode rows ER are arranged on a curved portion of the edge of the display panel 100, and electrode rows ER are also provided in the notched portion.

[0201] In the first and second modified examples described above, the stage section 16 was used as the third Y-direction movement mechanism 164. However, the third Y-direction movement mechanism 164 may be provided in the wiping and cleaning section 13, and the wiping and cleaning section 13 may be moved in the Y direction. By using such a configuration, the same effect can be obtained.

[0202] Although several embodiments have been described above, these embodiments are presented only as examples and are not intended to limit the scope of the invention. The novel cleaning apparatus 1 described herein can be implemented in a variety of other forms. Furthermore, various omissions, substitutions, modifications, and combinations can be made to the forms of the cleaning apparatus 1 described herein without departing from the spirit of the invention. The appended claims and equivalents are intended to include such forms and modifications included in the scope and spirit of the invention. [Explanation of Symbols]

[0203] 1: Cleaning device, 1a: Cleaning unit, 3: Adhesion device, 5: Temporary crimping device, 7: Main crimping device, 10: Mounting device, 12: Ultrasonic cleaning unit, 13: Wipe-cleaning section, 14: Plasma cleaning section, 15: Support section, 16: Stage section, 19: Control unit, 20: First cleaning unit, 21: Second cleaning unit, 100: Display panel, 121: Discharge nozzle, 122: Suction nozzle, 123: Casing, 124: First Y-direction movement mechanism, 124a: Connection unit, 124c: ball screw, 124d: linear guide, 125: Ultrasonic generator, 126: Ionizer, 127: Discharge chamber, 128: Suction chamber, 131: Upper pressing head, 131a: Contact surface, 132: Lower pressing head, 132a: Contact surface, 133: Guide roller, 134: Actuator, 135: Drive arm, 137: Hole, 138: Pores, 139: Wiping cloth, 141: Plasma irradiation tube, 142: Casing, 143: Second Y-direction movement mechanism, 144: Electrode, 145: Dielectric layer, 146: High-frequency power supply, 147: Gas supply pipe, 161: Conveyor stage, 162: X direction movement mechanism, 163: θ direction movement mechanism, 164: 3rd Y direction movement mechanism, 190: Input / Output Control Unit, 191: Mechanism Control Unit, 192: Memory Unit, 193: Input Unit, 194: Output unit, 195: Setting unit, 200: Processor, 201: Main memory, 202: Auxiliary storage device, 203: Network interface, 204: Device interface, 205: Bus, 206: External device, 300: Electronic components, 310: Base material, 320: Conductive particles, 500: ACF, 600: Imaging unit, 1000: Release tape, 1100: Guide roller, 1300: PCB stage, 1400: Up / down drive mechanism, 1500: Pressurizing tool, 1600: Base, 1600a: X drive source, 1600b: Y drive source, 1600c: θ drive source, 1700: table, 1800: path roller, 1900: Supply reel, 2000: Adhesive tape, 2100: Base, 2200: Imaging unit, 2400: Backup, 2500: Adhesion tool, 2600: First transport arm, 2700: Mounting table, 2800: Second transport arm, 2900: Pad, 3000: Feeder, 3100: Chuck, 3200: Table unit, 3300: Cylinder 3400: Cutting section, 3500: Holding block, 3600: Winding reel, 3700: XY table, 3800: Table unit, 3900: Base, 4000: XY table, 4100: mounting table, 4200: pad, 4300: Imaging unit, 4400: Support arm, 4500: Backup, 4600: Main crimping tool, 4700: Third conveyor arm, 4800: Fourth conveyor arm, 4900: Protective tape, 5100: Release part, 5200: Release rod, 5300: Release rod, ER: electrode row

Claims

1. A display panel having one or more electrode rows to be cleaned is placed on a stage section that moves in a first direction which is the transport direction of the display panel, a second direction which intersects the first direction, and a rotational direction which intersects the first and second directions. One or more first cleaning units that move in the second direction and clean one or more electrode rows on the display panel that move in the first direction as the stage unit moves, A second cleaning unit is positioned at a reference position for positioning one or more of the electrode rows to be cleaned, and cleans one or more of the electrode rows on a display panel that moves in the first direction as the stage unit moves. A cleaning device characterized by being equipped with the following features.

2. The cleaning apparatus according to claim 1, characterized in that the stage portion moves the display panel in a rotational direction with the third direction as its axis, such that the arrangement direction of the electrode row to be cleaned by the second cleaning portion among one or more electrode rows on the display panel is parallel to the first direction.

3. The cleaning apparatus according to claim 2, characterized in that one or more of the first cleaning units move in a second direction relative to the position of one or more of the electrode rows positioned by the rotational movement of the stage unit to perform cleaning.

4. The cleaning apparatus according to claim 1, characterized in that one or more of the first cleaning units move in a second direction to perform cleaning so as to correspond to the position of the electrode row to be cleaned on a display panel that moves in a first direction.

5. The cleaning apparatus according to any one of claims 1 to 4, characterized in that the second cleaning unit is a wiping cleaning unit that contacts the electrode row and performs wiping cleaning.

6. The cleaning apparatus according to any one of claims 1 to 4, characterized in that one or more of the first cleaning units include an ultrasonic cleaning unit that cleans by blowing ultrasonically charged air onto the electrode row or a plasma cleaning unit that cleans by irradiating the electrode row with plasma.

7. The cleaning apparatus according to any one of claims 1 to 4, characterized in that one or more of the electrode rows are arranged non-collinearly along the edge of the display panel.

8. A mounting apparatus equipped with a cleaning device for mounting electronic components to one or more electrode rows provided on the edge of a display panel to be mounted, The cleaning device is A display panel having one or more electrode rows to be cleaned is placed on a stage that moves in a first direction which is the transport direction of the display panel, a second direction which intersects the first direction, and a rotational direction which intersects the first and second directions. One or more first cleaning units that move in the second direction and clean one or more electrode rows on the display panel that move in the first direction as the stage unit moves, A second cleaning unit is positioned at a reference position for positioning one or more of the electrode rows to be cleaned, and cleans one or more of the electrode rows on the display panel that moves in the first direction as the stage unit moves. An electronic component mounting apparatus characterized by comprising the following:

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