PCB transport system and PCB transport method

Abstract

This invention provides a substrate transport system and a substrate transport method that can acquire information about the transported substrates. [Solution] The substrate transport system 1 includes a hand 3 for holding a substrate 9, a horizontal articulated robot 2 for transporting the substrate, a camera 5 for photographing the substrate, and a system controller and robot controller that receive the camera's captured data and detect the color of the substrate 9, the type and temperature of the substrate 9 held by the hand 3, or the temperature distribution and surface wetness of the substrate 9. The information about the substrate 9 obtained in this way can be used for various purposes.

Description

Technical Field

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[0001] The technology disclosed herein relates to a substrate transfer system and a substrate transfer method.

Background Art

[0002] Patent Document 1 describes a conventional substrate transfer system. The substrate transfer system includes a horizontally articulated robot. The hand of the robot holds the substrate. The robot transfers the substrate held by the hand.

[0003] The substrate transfer system has a camera. The camera is fixed to the hand. The camera takes a picture of the hand when the hand is not holding the substrate. A diagnostic device including a computer determines whether the hand is deformed based on the image taken by the camera.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Information regarding the substrate can be used in a substrate transfer system including a robot. However, the conventional system cannot acquire information regarding the substrate.

Means for Solving the Problems

[0006] The technology disclosed herein relates to a substrate transfer system. The substrate transfer system includes a horizontally articulated robot having a hand for holding the substrate and transferring the substrate, a camera for taking a picture of the substrate, a controller that receives the imaging data of the camera and detects the temperature of the substrate, and includes The aforementioned camera is a thermal imaging camera. The controller receives the camera's captured data and detects the temperature distribution on the surface of the substrate. The hand is an edge grip hand having an edge guide that engages with the outer edge of the substrate, Based on the temperature distribution of the substrate surface detected by the controller, if the temperature of the area on the substrate where the edge guide engages is below the allowable temperature, the controller permits the horizontal articulated robot to hold the substrate, and if the temperature exceeds the allowable temperature, the controller prohibits the horizontal articulated robot from holding the substrate. [Effects of the Invention]

[0007] The aforementioned substrate transport system can acquire information about the substrate because the camera captures an image of the substrate. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 shows the substrate transport system. [Figure 2] Figure 2 is a block diagram of the substrate transport system. [Figure 3] Figure 3 shows the robot's hand. [Figure 4] Figure 4 shows an image of the circuit board taken by a camera. [Figure 5] Figure 5 shows an image of the circuit board taken by a camera. [Figure 6] Figure 6 shows a modified substrate transport system. [Figure 7] Figure 7 is a block diagram of a modified substrate transport system. [Modes for carrying out the invention]

[0009] The following describes an embodiment of the substrate transport system with reference to the drawings. The substrate transport system described here is illustrative.

[0010] (Circuit board transport system) Figure 1 is a plan view of the substrate transport system 1. Figure 2 is a block diagram of the substrate transport system 1. The substrate transport system 1 transports substrates 9. The substrates 9 are semiconductor wafers or glass substrates. The substrate transport system 1 is, for example, an EFEM (Equipment Front End Module). The substrate transport system 1 is, for example, a sorter. The substrate transport system 1 is, for example, a stocker. The robot system 6 is incorporated into the substrate transport system 1.

[0011] The substrate transport system 1 comprises a housing 10. The housing 10 has a first wall 11, a second wall 12, a third wall 13, and a fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 are each walls perpendicular to the floor. The first wall 11 and the third wall 13 face each other in a first direction. The second wall 12 and the fourth wall 14 face each other in a second direction. The second direction is perpendicular to the first direction. The first wall 11 and the second wall 12 and the first wall 11 and the fourth wall 14 are connected to each other, and the third wall 13 and the second wall 12 and the third wall 13 and the fourth wall 14 are connected to each other. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 form a closed transport space 15.

[0012] The enclosure 10 also has a ceiling wall. The ceiling wall is connected to the first wall 11, the second wall 12, the third wall 13, and the fourth wall 14, and closes the upper end of the transport space 15. An aligner 42 is located inside the transport space 15. The aligner 42 aligns the substrate 9. The aligner 42 is not an essential element of the substrate transport system 1 or the robot system 6.

[0013] The illustrated substrate transfer system 1 is incorporated into the substrate processing equipment 4. Note that the substrate processing equipment 4 is not an essential element of the substrate transfer system 1 or the robot system 6. The substrate processing equipment 4 performs, for example, heat treatment, impurity introduction treatment, thin film formation treatment, lithography treatment, cleaning treatment, and planarization treatment on the substrate 9. Alternatively, the substrate processing equipment 4 inspects the appearance or dimensions of the substrate 9. Alternatively, the process performed by the substrate processing equipment 4 may be a temporary storage for delivering the substrate 9. Here, the accommodation of the substrate 9 by the substrate processing equipment 4 is also included in the processing of the substrate 9. The third wall 13 separates the transfer space 15 and the substrate processing equipment 4. The third wall 13 has an opening 16. The opening 16 is openable and closable. When the opening 16 opens, the transfer space 15 and the substrate processing equipment 4 communicate with each other, and when the opening 16 closes, the communication between the transfer space 15 and the substrate processing equipment 4 is blocked.

[0014] The substrate processing equipment 4 has a front opening unified pod (FOUP) 41. The FOUP 41 accommodates the substrate 9. The substrate processing equipment 4 has a plurality of FOUPs 41. The plurality of FOUPs 41 are arranged along the first wall 11. The first wall 11 has an opening 17 corresponding to the FOUP 41. The FOUP opener opens and closes the opening 17. The FOUP opener switches the communication and blockage between the transfer space 15 and the FOUP 41.

[0015] The substrate transfer system 1 includes a robot 2. The robot 2 transfers the substrate 9 between the FOUP 41, the aligner 42, and the substrate processing equipment 4 (see the solid line and two-dot chain line in FIG. 1). The robot 2 is located inside the transfer space 15. The robot 2 is a horizontal articulated robot. The structure of the robot 2 will be described later.

[0016] The substrate transfer system 1 has a system controller 18. Note that the system controller 18 is not an essential element of the substrate transfer system 1 or the robot system 6. The system controller 18 performs overall control of the substrate transfer system 1.

[0017] The robot controller 20 is electrically connected to the system controller 18. The electrical connection includes a wired or wireless connection. The robot controller 20 is also electrically connected to the robot 2. The robot controller 20 and the robot 2 constitute the robot system 6. The robot controller 20 controls the robot 2. More specifically, the robot controller 20 receives a control signal from the system controller 18 and outputs a control signal to the robot 2. The robot 2 receives a control signal from the robot controller 20 and here, conveys the substrate 9. Note that the robot controller 20 is not an essential element of the substrate conveyance system 1 or the robot system 6.

[0018] Also, the aligner 42 is electrically connected to the robot controller 20. The electrical connection includes a wired or wireless connection. The aligner 42 is controlled by the robot controller 20.

[0019] (Structure of the robot) As described above, the robot 2 is a horizontal articulated robot. As shown in FIG. 1, the robot 2 has a base 21. The base 21 is installed in the conveyance space 15. The robot 2 has a manipulator 200. The manipulator 200 includes an arm 22 and a hand 3.

[0020] The base 21 supports the arm 22. The arm 22 is movable up and down with respect to the base 21. The arm 22 has links 221 and 222. The arm 22 has a plurality of links 221 and 222. The arm 22 of the illustrated robot 2 has two links, namely, the link 221 and the link 222. Note that the number of links forming the arm 22 is not limited to two.

[0021] The first end of link 221 is supported by the base 21. The base 21 supports the first end of link 221. Link 221 is rotatable about a first axis X1 that extends vertically relative to the base 21. The second end of link 221 is connected to the first end of link 222. Link 222 is rotatable about a second axis X2 that extends vertically relative to link 221.

[0022] Hand 3 is connected to the second end of link 222. Hand 3 and the second end of link 222 are connected. Hand 3 is rotatable about a third axis X3 that extends vertically relative to link 222.

[0023] Figure 3 shows hand 3, which is an end effector that holds the substrate 9. Hand 3 has a body 31 and a holding part 32. The body 31 supports the holding part 32. The body 31 is rotatably connected to the second end of link 222.

[0024] The holding portion 32 is approximately Y-shaped in plan view, as shown in the upper part of Figure 3, and is a thin plate, as shown in the lower part of Figure 3.

[0025] Hand 3 generally holds the substrate 9 in various ways, such as gripping, suction, placement, or fitting. Hand 3 in the illustrated example is an edge grip hand. Hand 3 has an edge guide 33, a second guide 34, and an actuator 35. The edge guide 33, the second guide 34, and the actuator 35 constitute the grip 30 of hand 3. The edge guide 33 is located at the tip of the holding portion 32 and engages with the outer edge of the substrate 9. The second guide 34 is located at the base end of the holding portion 32. The second guide 34 is located on the opposite side of the substrate 9 from the edge guide 33. The actuator 35 is, for example, an extendable air cylinder. The actuator 35 displaces the second guide 34 so that it moves closer to and further away from the substrate 9 (see the arrow in the upper diagram of Figure 3). As the second guide 34 moves closer to the substrate 9, the edge guide 33 and the second guide 34 grip the substrate 9. Hand 3 grips the substrate 9. As the second guide 34 moves away from the substrate 9, the substrate 9 is released from being gripped by the edge guide 33 and the second guide 34. Hand 3 releases its grip on the substrate 9.

[0026] Robot 2 has a sensor 36. Sensor 36 detects the substrate 9 held by hand 3. Sensor 36 is attached to hand 3 as shown in an enlarged view in the lower part of Figure 3. Sensor 36 is, for example, an optical sensor. Sensor 36 detects the substrate 9 held by hand 3. More specifically, sensor 36 projects light onto the substrate 9 and receives reflected light reflected from the surface of the substrate 9. If hand 3 is not holding the substrate 9, sensor 36 does not receive reflected light, so sensor 36 can detect that the substrate 9 is not held by hand 3.

[0027] (Camera for photographing circuit boards) The robot system 6 is equipped with a camera 5. The camera 5 photographs the substrate 9. As shown in Figure 3, the camera 5 is fixed to the hand 3 of the robot 2. More specifically, the camera 5 is fixed to the upper surface of the body 31 of the hand 3. The camera 5 photographs the substrate 9 held by the hand 3 within the transport space 15. The camera 5 photographs the substrate 9, for example, while the robot 2 is transporting the substrate 9.

[0028] Camera 5, as an example, includes an image sensor and a lens. The lens focuses light onto the image sensor. The image sensor outputs a signal corresponding to the amount of light it receives. The image sensor is either a CCD (Charge Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor.

[0029] Figure 4 shows an example of an image 50 captured by camera 5. Camera 5 is fixed to hand 3 so as to capture substantially the entire surface of the substrate 9 held by hand 3, and the lens has a field of view that allows the entire surface of the substrate 9 held by hand 3 to be captured. The distance between camera 5 and the substrate 9 held by hand 3 is short. The field of view of the lens is relatively wide-angle. The image 50 captured by camera 5 is a color image. However, it is not ruled out that the image captured by camera 5 may be a black and white image.

[0030] The robot controller 20 or the system controller 18 receives the image data 50 captured by the camera 5. The robot controller 20 may receive the image data 50 captured by the camera 5, or the system controller 18 may receive the image data 50 captured by the camera 5. Both the robot controller 20 and the system controller 18 may receive the image data 50 captured by the camera 5.

[0031] Since camera 5 is fixed to hand 3, the pixel positions occupied by the surface of substrate 9 in the image 50 captured by camera 5 are predetermined. Alternatively, the robot controller 20 or system controller 18 may identify substrate 9 in image 50 by extracting edges in the image 50 captured by camera 5.

[0032] The transport space 15 has sufficient brightness for the image sensor to photograph the substrate 9. The substrate transport system 1 may, for example, have a light source for photography in the transport space 15. The amount of light from the light source is set according to the light-receiving sensitivity of the image sensor. As will be described later, the light source may be white light so that the color of the substrate 9 can be determined based on the image captured by the camera.

[0033] (Detection of circuit board color using camera image data) As described above, the robot controller 20 or system controller 18 receives data captured by the camera 5. The robot controller 20 or system controller 18 detects the color of the circuit board 9 based on the image 50 of the circuit board 9 captured by the camera 5 (see Figure 4).

[0034] The color of the substrate 9 changes depending on the type or thickness of the film formed on the surface of the substrate 9. The robot controller 20 or system controller 18 determines the type of substrate 9 held by the hand 3 based on the color of the substrate 9. The robot controller 20 or system controller 18 stores information in advance that corresponds to the color of the substrate 9 and the type of substrate 9.

[0035] The sensor 36 of hand 3 determines the presence or absence of the substrate 9 based on the amount of light received from the surface of the substrate 9. In other words, if the amount of reflected light received by sensor 36 exceeds the threshold, sensor 36 determines that hand 3 is holding the substrate 9. If the amount of reflected light received by sensor 36 is below the threshold, sensor 36 determines that hand 3 is not holding the substrate 9.

[0036] The intensity of light reflected from the surface of the substrate 9 changes depending on the color of the substrate 9. The judgment threshold of the sensor 36 is generally preset to a constant value corresponding to the color of the surface of the substrate 9 held by the hand 3. However, if the color of the substrate 9 held by the hand 3 changes, and the judgment threshold is constant, the hand 3 may mistakenly judge that it is not holding the substrate 9, even though it is, due to the relatively low intensity of the reflected light. A stoppage of the robot system 6 or the substrate transport system 1 due to a misjudgment by the sensor 36 reduces the efficiency of the robot system 6 or the substrate transport system 1.

[0037] Therefore, the robot controller 20 or system controller 18 adjusts the judgment threshold of the sensor 36 according to the color of the substrate 9 determined based on the image 50 captured by the camera 5. Since the judgment threshold of the sensor 36 matches the color of the substrate 9, misjudgments by the sensor 36 are suppressed. This suppresses a decrease in the efficiency of the robot system 6 or the substrate transport system 1 caused by misjudgments by the sensor 36.

[0038] Alternatively, instead of adjusting the judgment threshold of the sensor 36, the amount of light emitted by the sensor 36 onto the substrate 9 may be adjusted according to the color of the substrate 9.

[0039] Furthermore, the color information obtained based on the image 50 captured by camera 5 is not limited to the use of sensor 36 adjustment.

[0040] (Detection of surface wetting of a substrate using camera image data) The robot controller 20 or system controller 18 detects wetting of the substrate 9 surface due to liquid adhering to the substrate 9, based on the image 50 of the substrate 9 captured by the camera 5 (see upper diagram in Figure 5). Due to the difference between the refractive index of the substrate 9 and the refractive index of the liquid, the reflectance of the substrate 9 surface differs from the reflectance of the liquid adhering to the surface. Based on the image 50 of the substrate 9 captured by the camera 5, the robot controller 20 or system controller 18 can detect wetting of the substrate 9 surface. The robot controller 20 or system controller 18 may perform machine learning to improve the accuracy of wetting detection.

[0041] The robot controller 20 or system controller 18 can determine, for example, whether cleaning fluid remains on the surface of the substrate 9 after the cleaning process, based on the image 50 of the substrate 9 captured by the camera 5. Alternatively, the robot controller 20 or system controller 18 can determine the amount of cleaning fluid remaining on the surface of the substrate 9, for example, whether droplets remain on the surface of the substrate 9, or whether the cleaning fluid has spread over the entire surface of the substrate 9. If the robot controller 20 or system controller 18 determines that the surface of the substrate 9 is wet, it may perform error processing in the substrate transport system 1.

[0042] Furthermore, the robot controller 20 or system controller 18 can determine, for example, before the development process, whether developer solution has been applied to the surface of the substrate 9 based on the image 50 of the substrate 9 taken by the camera 5. If the robot controller 20 or system controller 18 determines that developer solution has not been applied to the surface of the substrate 9, it may perform error processing in the substrate transport system 1. Also, for example, after the development process, the robot controller 20 or system controller 18 can determine whether the development has been properly completed based on the image 50 of the substrate 9 taken by the camera 5. If the robot controller 20 or system controller 18 determines that the development has not been properly completed, it may perform error processing in the substrate transport system 1.

[0043] Furthermore, the information regarding wetness obtained based on the image 50 captured by camera 5 can be used for purposes other than those mentioned above.

[0044] (Detection of circuit board temperature using camera image data) Camera 5 may be a thermographic camera. The robot controller 20 or system controller 18 can detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the image 50 of the substrate 9 captured by camera 5 (see the lower part of Figure 5). The image data captured by camera 5 may include temperature information along with the image 50. The robot controller 20 or system controller 18 may also estimate the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the color of the image 50. The robot controller 20 or system controller 18 may determine that the temperature of the substrate 9 is above a predetermined level and perform error processing in the substrate transport system 1.

[0045] Furthermore, the information regarding the temperature or temperature distribution of the substrate 9 obtained based on image 50 can be used for various purposes.

[0046] (Effects and Benefits) The substrate transport system 1 or robot system 6 is equipped with a camera 5 that photographs the substrate 9 held by the hand 3. Based on the image 50 captured by the camera 5, the substrate transport system 1 or robot system 6 can acquire information about the substrate 9.

[0047] Since camera 5 is fixed to hand 3, it can photograph the circuit board 9 while robot 2 is transporting it. Because robot 2 does not stop operating for camera 5 to take pictures, the transport efficiency of the circuit board transport system 1 or robot system 6 is increased. In addition, because camera 5 is fixed to hand 3, camera 5 has the advantage of being able to photograph the circuit board 9 for a longer period of time. Fixing camera 5 to hand 3 is advantageous for photographing the circuit board 9.

[0048] Camera 5 may also photograph the circuit board 9 while robot 2 has stopped transporting the circuit board 9. For example, immediately after robot 2 removes the circuit board 9 from the hoop 41, robot 2 may temporarily stop transporting the circuit board 9, and camera 5 may photograph the circuit board 9. Alternatively, robot 2 may temporarily stop transporting the circuit board 9 immediately before, during, or immediately after setting the circuit board 9 in the aligner 42, and camera 5 may photograph the circuit board 9. Photographing while the transport of the circuit board 9 is stopped improves the quality of the captured image 50. For example, a light source for photography may be installed at the point where the transport of the circuit board 9 is stopped for camera 5 to take photographs.

[0049] Since camera 5 is fixed to hand 3, the substrate transport system 1 or robot system 6 can photograph the substrate 9 held by hand 3 with a single camera 5. In other words, in the substrate transport system 1, multiple cameras 5 installed at various locations in the transport space 15 are unnecessary. The substrate transport system 1 is simple.

[0050] Camera 5 has a field of view that captures the entire surface of the substrate 9. The image 50 captured by camera 5 includes the entire surface of the substrate 9. The robot controller 20 or system controller 18 can accurately acquire information about the substrate 9.

[0051] The robot controller 20 or system controller 18 receives the captured data from the camera 5 and detects the color of the circuit board 9. Based on the color of the circuit board 9, the robot controller 20 or system controller 18 can determine the type of circuit board 9 held by the hand 3.

[0052] Furthermore, the robot controller 20 or system controller 18 sets a judgment threshold related to the amount of light received by the sensor 36 based on the detected color of the substrate 9. This suppresses misjudgments by the sensor 36.

[0053] The robot controller 20 or system controller 18 receives the data captured by the camera 5 and detects the surface wetness of the substrate 9. The robot controller 20 or system controller 18 can accurately determine the state of the substrate 9 before or after processing the substrate 9. The robot controller 20 or system controller 18 can promptly perform error handling in the robot system 6 or substrate transport system 1 as needed.

[0054] The robot controller 20 or system controller 18 receives the data captured by the camera 5 and detects the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9. The robot controller 20 or system controller 18 can quickly detect any temperature anomalies in the substrate 9.

[0055] As described above, the substrate transport system 1 or the robot system 6 can acquire information about the substrate 9, and the acquired information about the substrate 9 can be used for various purposes.

[0056] (Variations of photographing circuit boards) A camera 5 fixed to the hand 3 may photograph the substrate 9 in the substrate processing equipment 4 through the aperture 16. The robot controller 20 or system controller 18 can detect the color of the substrate 9 when removing it from the substrate processing equipment 4 based on the data captured by the camera 5.

[0057] Furthermore, the robot controller 20 or system controller 18 can detect surface wetness of the substrate 9 when removing it from the substrate processing equipment 4, based on the data captured by the camera 5.

[0058] Here, if the surface of the substrate 9 is wet, the grip 30 of the hand 3 may slip when gripping the substrate 9. If the robot controller 20 or system controller 18 detects that the surface of the substrate 9 is wet, it may slow down the operation of the actuator 35 when gripping the substrate 9. Slowing down the operation of the actuator 35 increases the stability of the hand 3's holding of the substrate 9. Since the robot 2 can stably hold the substrate 9, for example, it is prevented the robot system 6 or the substrate transport system 1 from stopping because the robot 2 is unable to hold the substrate 9.

[0059] Furthermore, the robot controller 20 or system controller 18 can detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 when removing the substrate 9 from the substrate processing equipment 4, based on the data captured by the camera 5.

[0060] The robot controller 20 or system controller 18 may determine, based on the temperature distribution on the surface of the substrate 9, whether the temperature of the area on the substrate 9 where the edge guide 33 or the second guide 34 makes contact is below the allowable temperature. The allowable temperature is the temperature at which the edge guide 33 or the second guide 34 is allowed to hold the substrate 9. The allowable temperature is set, for example, according to the heat resistance temperature of the edge guide 33 or the second guide 34. If the temperature of the specific area on the substrate 9 is below the allowable temperature, the robot controller 20 or system controller 18 allows the hand 3 to hold the substrate 9, and if the temperature of the specific area on the substrate 9 exceeds the allowable temperature, it prohibits the hand 3 from holding the substrate 9 and waits for the temperature of the substrate 9 to decrease.

[0061] Based on the detected temperature distribution on the surface of the substrate 9, the robot controller 20 or system controller 18 causes the robot 2's hand 3 to grasp the substrate 9 when a specific location on the substrate 9 falls below an acceptable temperature. The robot 2 can then quickly begin transporting the substrate 2. For example, the waiting time for the robot 2 is reduced compared to waiting for a predetermined set time to elapse, taking into account the temperature drop of the substrate 9, before starting to transport the substrate 2. Detecting the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 improves the transport efficiency of the substrate transport system 1 or robot system 6 by reducing unnecessary waiting time.

[0062] The camera 5, fixed to the hand 3, enables detection of the color, temperature, or surface wetness of the substrate 9. Information about the substrate 9 acquired based on the image 50 is used to prevent misjudgments or malfunctions in the substrate transport system 1 that could cause the substrate transport system 1 or robot system 6 to stop. Furthermore, utilizing the information about the substrate 9 improves the transport efficiency of the substrate transport system 1 or robot system 6 by reducing unnecessary waiting time.

[0063] (Modified version of the substrate transport system) Figure 6 shows a modified substrate transport system 100. Figure 7 is a block diagram of the substrate transport system 100. In the substrate transport system 100, the camera 5 is not fixed to the robot 2. The camera 5 is fixed to the housing 10, for example, to the ceiling wall. More specifically, as shown in Figure 6, the camera 5 is located near the aligner 42 in the transport space 15. The camera 5 photographs the substrate 9 set on the aligner 42.

[0064] Camera 5 is electrically connected to system controller 18. The system controller 18 detects the color of the substrate 9 based on the data captured by camera 5. The system controller 18 also detects the wetness of the surface of the substrate 9 based on the data captured by camera 5. The system controller 18 also detects the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 based on the data captured by camera 5.

[0065] In addition to being located near the aligner 42, camera 5 may also be located near the opening 16, for example, as shown by the dashed line in Figure 6, to photograph the substrate 9 in the substrate processing equipment 4. Based on the data captured by camera 5, the system controller 18 can detect the color of the substrate 9 when removing it from the substrate processing equipment 4. The system controller 18 can also detect the wetness of the surface of the substrate 9 when removing it from the substrate processing equipment 4, based on the data captured by camera 5. The system controller 18 can also detect the temperature of the substrate 9 or the temperature distribution on the surface of the substrate 9 when removing it from the substrate processing equipment 4, based on the data captured by camera 5.

[0066] Note that the position of camera 5 is not limited to a specific location. The position of camera 5 can be set to various positions within the transport space 15.

[0067] The aligner 42 may be connected to and controlled by the system controller 18.

[0068] In the hand 3, a mounting member may be interposed between the main body 31 and the holding part 32. The holding part 32 is fixed to the main body 31 via the mounting member. When the camera 5 is fixed to the hand 3, the camera 5 may be fixed to the main body 31. The camera 5 may also be fixed to the mounting member.

[0069] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, dedicated processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuits. In this disclosure, a circuit, unit, or means is hardware that performs the enumerated functions, or hardware programmed to perform the enumerated functions. The hardware may be hardware disclosed herein, or other known hardware that is programmed or configured to perform the enumerated functions. If the hardware is a processor, which is considered a type of circuit, then the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or the processor.

[0070] (Aspect) The embodiments described above are specific examples of the following embodiments.

[0071] (Aspect 1) A horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and for transporting the substrate (9), A camera (5) for photographing the substrate (9), A controller (18, 20) receives the captured data from the camera (5) and detects the color of the substrate (9), A substrate transport system (1, 100) comprising the above.

[0072] Based on the image data of the circuit board (9) taken by the camera (5), the controllers (18, 20) can acquire color information of the circuit board (9). The circuit board transport system (1, 100) can use the color information of the circuit board (9) for various purposes.

[0073] (Aspect 2) The horizontal articulated robot (2) has an optical substrate detection sensor (36) that receives reflected light from light irradiated onto the substrate (9) held by the hand (3), The substrate transport system (1, 100) according to embodiment 1, wherein the controller (18, 20) sets a threshold value for the amount of light received by the substrate detection sensor (36) based on the color of the substrate (9) detected based on the imaging data.

[0074] Changing the detection threshold of the substrate detection sensor (36) based on the color of the substrate (9) suppresses false detections by the substrate detection sensor (36). The substrate transport system (1, 100) can suppress the decrease in transport efficiency caused by false detections by the substrate detection sensor (36).

[0075] (Aspect 3) A horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and for transporting the substrate (9), A camera (5) for photographing the substrate (9), A controller (18, 20) receives the captured data from the camera (5) and detects the temperature of the substrate (9), A substrate transport system (1, 100) comprising the above.

[0076] Based on the image data of the substrate (9) taken by the camera (5), the controllers (18, 20) can acquire information about the temperature of the substrate (9). The substrate transport system (1, 100) can use the temperature information of the substrate (9) for various purposes.

[0077] (Aspect 4) The substrate transport system (1, 100) according to embodiment 3, wherein the controller (18, 20) determines that there is an abnormality when the temperature of the substrate (9) is above a predetermined level.

[0078] The controllers (18, 20) can quickly detect temperature anomalies in the substrate (9) based on the temperature information of the substrate (9) captured by the camera (5).

[0079] (Appendix 5) The camera (5) is a thermographic camera, The substrate transport system (1, 100) according to embodiment 3 or 4, wherein the controller (18, 20) receives the captured data from the camera (5) and detects the temperature distribution on the surface of the substrate (9).

[0080] The substrate transport system (1, 100) can utilize information on the temperature distribution of the substrate (9) surface for various purposes.

[0081] (Aspect 6) The hand (3) is an edge grip hand having an edge guide (33) that engages with the outer edge of the substrate (9), The substrate transport system (1, 100) according to embodiment 5, wherein the controller (18, 20) allows the horizontal articulated robot (2) to hold the substrate (9) if the temperature of the portion of the substrate (9) where the edge guide (33) engages is below an allowable temperature, and prohibits the horizontal articulated robot (2) from holding the substrate (9) if the temperature exceeds an allowable temperature.

[0082] Based on the detected temperature distribution, the horizontal articulated robot (2) can hold the substrate (9) if the temperature at the point where the edge guide (33) engages falls below the allowable temperature. Since the wasted waiting time for the substrate (9) to cool down is reduced, the transport efficiency of the substrate transport system (1, 100) is increased.

[0083] (Aspect 7) A horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and for transporting the substrate (9), A camera (5) for photographing the substrate (9), A controller (18, 20) receives the captured data from the camera (5) and detects wetting of the surface of the substrate (9), A substrate transport system (1, 100) comprising the above.

[0084] Based on the image data of the substrate (9) taken by the camera (5), the controllers (18, 20) can acquire information about the surface wetness of the substrate (9). The substrate transport system (1, 100) can use the surface wetness information of the substrate (9) for various purposes.

[0085] (Pattern 8) The substrate transport system (1, 100) according to embodiment 7, wherein the controller (18, 20) determines that there is an abnormality when the surface of the substrate (9) is wet.

[0086] The controllers (18, 20) can quickly detect abnormalities in the substrate (9) based on information about the surface wetness of the substrate (9) captured by the camera (5).

[0087] (Aspect 9) The hand (3) is an edge grip hand having an edge guide (33) that engages with the outer edge of the substrate (9), and a second guide (34) that moves closer to and further away from the substrate (9) on the opposite side of the substrate (9) from the edge guide (33). A substrate transport system (1, 100) according to embodiment 7 or 8, wherein the controller (18, 20) changes the approaching motion of the second guide (34) to the substrate (9) when the surface of the substrate (9) is detected to be wet.

[0088] When the surface of the substrate (9) is wet, the approach movement of the second guide (34) to the substrate (9) is changed, allowing the hand (3) to hold the substrate (9) stably.

[0089] (Aspect 10) The camera (5) photographs the substrate (9) held by the hand (3), according to any one of embodiments 1 to 9 of the substrate transport system (1, 100).

[0090] (Aspect 11) The substrate transport system (1, 100) according to any one of embodiments 1 to 10, wherein the camera (5) photographs the substrate (9) set in an aligner (42) that adjusts the orientation of the substrate (9).

[0091] (Aspect 12) The camera (5) photographs the substrate (9) set in a substrate processing equipment (4) that performs processing on the substrate (9), according to any one of embodiments 1 to 11 of the substrate transport system (1, 100).

[0092] The camera (5) can photograph the circuit board (9) at various times.

[0093] (Aspect 13) The camera (5) is located on the ceiling of the space (15) in which the manipulator (200) of the horizontal articulated robot (2) moves, according to any one of embodiments 1 to 12 of the substrate transport system (1, 100).

[0094] The camera (5) located on the ceiling is suitable for photographing the circuit board (9).

[0095] (Aspect 14) The camera (5) is fixed to the hand (3), a substrate transport system (1, 100) according to any one of embodiments 1 to 12.

[0096] The camera (5) fixed to the hand (3) can photograph the circuit board (9) from close range.

[0097] (Aspect 15) The circuit board (9) is transported by a horizontal articulated robot (2). The camera (5) takes a picture of the substrate (9), A substrate transport method in which the color of the substrate (9) is detected based on the image data of the substrate (9).

[0098] (Aspect 16) The circuit board (9) is transported by a horizontal articulated robot (2). The camera (5) takes a picture of the substrate (9), A substrate transport method in which the temperature of the substrate (9) is detected based on the image data of the substrate (9).

[0099] (Aspect 17) The circuit board (9) is transported by a horizontal articulated robot (2). The camera (5) takes a picture of the substrate (9), A substrate transport method in which wetting of the surface of the substrate (9) is detected based on the image data of the substrate (9).

[0100] (Aspect 18) A horizontal articulated robot (2) having a hand (3) for holding a substrate (9) and for transporting the substrate (9), A camera (5) for photographing the substrate (9) which is fixed to and held by the hand (3), A substrate transport system (1, 100) comprising the above.

[0101] Since the camera (5) photographs the circuit board (9), the circuit board transport system (1, 100) can acquire information about the circuit board (9). Also, since the camera (5) moves to various positions together with the hand (3), one camera (5) can photograph multiple circuit boards (9). Furthermore, since the camera (5) can photograph the circuit board (9) while the horizontal articulated robot (2) is transporting the circuit board (9), the transport efficiency of the horizontal articulated robot (2) is increased.

[0102] (Aspect 19) The camera (5) photographs the surface of the substrate (9), according to the substrate transport system (1, 100) of embodiment 18.

[0103] Various processes can be performed based on the image of the substrate (9) surface captured by the camera (5).

[0104] (Aspect 20) The substrate transport system (1, 100) according to embodiment 19, wherein the camera (5) has a field of view that captures the entire surface of the substrate (9).

[0105] Since the entire surface of the substrate (9) is photographed, more information about the substrate (9) can be obtained.

[0106] (Aspect 21) The substrate transport system (1, 100) according to any one of embodiments 18 to 20, wherein the camera (5) photographs the substrate (9) while the horizontal articulated robot (2) is transporting the substrate (9).

[0107] Because the transport of the substrate (9) is not stopped for the camera (5) to take pictures, the transport efficiency of the substrate transport system (1, 100) is increased.

[0108] (Aspect 22) The substrate transport system (1, 100) according to any one of embodiments 18 to 20, wherein the camera (5) photographs the substrate (9) while the horizontal articulated robot (2) has stopped transporting the substrate (9).

[0109] When the transport of the substrate (9) is stopped, the camera (5) takes a picture of the surface of the substrate (9), allowing the substrate transport system (1, 100) to acquire a high-quality image (50).

[0110] (Aspect 23) The substrate transport system (1, 100) according to embodiment 22, wherein the camera (5) photographs the substrate (9) at the time the horizontal articulated robot (2) removes the substrate (9) from the hoop (41).

[0111] The camera (5) can photograph the circuit board (9) at the appropriate time.

[0112] (Aspect 24) The substrate transport system (1, 100) according to embodiment 22, wherein the camera (5) photographs the substrate (9) at the time the horizontal articulated robot (2) sets the substrate (9) on the aligner (42).

[0113] The camera (5) can photograph the circuit board (9) at the appropriate time.

[0114] (Aspect 25) A substrate transport system (1, 100) according to any one of embodiments 18 to 24, wherein the color of the substrate (9) is detected based on the captured data of the camera (5).

[0115] If the color of the substrate (9) is detected, the substrate transport system (1, 100) can determine the type of film formed on the substrate (9).

[0116] (Aspect 26) A substrate transport system (1, 100) according to any one of embodiments 18 to 24, wherein the temperature of the substrate (9) is detected based on the captured data of the camera (5).

[0117] If the temperature of the substrate (9) is detected, the substrate transport system (1, 100) can determine if there is an abnormality in the substrate (9).

[0118] (Aspect 27) A substrate transport system (1, 100) according to embodiment 26, wherein the temperature distribution of the surface of the substrate (9) is detected based on the captured data of the camera (5).

[0119] If the temperature distribution on the surface of the substrate (9) is detected, the horizontal articulated robot (2) can quickly hold the substrate (9), reducing the waiting time for the substrate (9) to cool down.

[0120] (Aspect 28) A substrate transport system (1, 100) according to any one of embodiments 18 to 24, wherein wetting of the surface of the substrate (9) is detected based on the captured data of the camera (5).

[0121] If wetting of the substrate (9) surface is detected, the substrate transport system (1, 100) can determine the condition of the substrate (9) surface. [Explanation of symbols]

[0122] 1. Substrate transport system 100 board transport system 2. Horizontal articulated robot 3 Hands 41 Hoops 42 Alaina 5 Cameras 6 Robot Systems 9 circuit boards

Claims

1. A horizontal articulated robot having a hand for holding a substrate and for transporting the substrate, A camera for photographing the aforementioned substrate, A controller that receives the captured data from the aforementioned camera and detects the temperature of the substrate, Equipped with, The aforementioned camera is a thermal imaging camera. The controller receives the camera's captured data and detects the temperature distribution on the surface of the substrate. The hand is an edge grip hand having an edge guide that engages with the outer edge of the substrate, A substrate transport system in which the controller, based on the detected temperature distribution on the surface of the substrate, permits the horizontal articulated robot to hold the substrate if the temperature of the area on the substrate where the edge guide engages is below an acceptable temperature, and prohibits the horizontal articulated robot from holding the substrate if the temperature exceeds an acceptable temperature.

2. In the substrate transport system according to claim 1, The aforementioned controller is a substrate transport system that determines an abnormality when the temperature of the substrate exceeds a predetermined level.

3. In the substrate transport system according to claim 1 or 2, The camera is part of a substrate transport system that photographs the substrate held in the hand.

4. In the substrate transport system according to claim 1 or 2, The camera is part of a substrate transport system that photographs the substrate set in an aligner that adjusts the orientation of the substrate.

5. In the substrate transport system according to claim 1 or 2, The camera is part of a substrate transport system that photographs the substrate set in a substrate processing facility that performs processing on the substrate.

6. In the substrate transport system according to claim 1 or 2, The camera is located on the ceiling of the space in which the manipulator of the horizontal articulated robot moves, and is part of a substrate transport system.

7. In the substrate transport system according to claim 1 or 2, The camera is fixed to the hand, and the system is a substrate transport system.

8. In the substrate transport system according to claim 3, The aforementioned horizontal articulated robot temporarily stops transporting the substrate in order to take pictures with the camera. The aforementioned camera is part of a substrate transport system that photographs the substrate while the horizontal articulated robot temporarily stops transporting the substrate.

9. A horizontal articulated robot having a hand for holding a substrate and for transporting the substrate, A camera for photographing the aforementioned substrate, A controller that receives the captured data from the aforementioned camera and detects the temperature of the substrate, Equipped with, The aforementioned camera is a thermal imaging camera. The controller receives the camera's captured data and detects the temperature distribution on the surface of the substrate. The hand is an edge grip hand having an edge guide that engages with the outer edge of the substrate, A substrate transport system in which the controller, based on the detected temperature distribution on the surface of the substrate, permits the horizontal articulated robot to hold the substrate if the temperature on the surface of the substrate is below an acceptable temperature, and prohibits the horizontal articulated robot from holding the substrate if the temperature exceeds an acceptable temperature.

10. A thermal imaging camera takes a picture of the circuit board. The controller receives the data captured by the thermographic camera and detects the temperature distribution on the surface of the substrate. In the aforementioned substrate, if the temperature of the area where the edge guide of the edge grip hand engages is below the allowable temperature, the controller permits the horizontal articulated robot to hold the substrate with the edge grip hand; if the temperature exceeds the allowable temperature, the controller prohibits the horizontal articulated robot from holding the substrate with the edge grip hand. A method for transporting a substrate, wherein the substrate held by the edge grip hand is transported by the horizontal articulated robot.

11. A thermal imaging camera takes a picture of the circuit board. The controller receives the data captured by the thermographic camera and detects the temperature distribution on the surface of the substrate. When the surface temperature of the substrate is below the permissible temperature, the controller permits the horizontal articulated robot with edge gripping hands to hold the substrate, and when the temperature exceeds the permissible temperature, the controller prohibits the horizontal articulated robot from holding the substrate. A method for transporting a substrate, wherein the substrate held by the edge grip hand is transported by the horizontal articulated robot.

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