Method for mounting the spindle unit and cutting blades

Abstract

The present invention provides a spindle unit and a method for mounting cutting blades that can improve the ease of mounting cutting blades. [Solution] The spindle unit 10 on which the cutting blade 50 is mounted comprises a spindle 11, a housing 12 that supports the spindle 11 via an air bearing and has an opening 12a from which the spindle 11 protrudes, and a cap 30 mounted on the housing 12. The cap 30 has an insertion portion 31 that is inserted into the opening 12a and a main body portion 32 that surrounds the protruding portion 11e of the spindle 11. Multiple discharge ports 37 for discharging fluid are provided circumferentially on the outer surface of the main body portion 32.

Description

Technical Field

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[0001] The present invention relates to a spindle unit and a method for attaching a cutting blade to the spindle of the spindle unit.

Background Art

[0002] There is known a cutting device for cutting a workpiece such as a semiconductor wafer, which is equipped with an air spindle unit. For example, Patent Document 1 describes an air spindle unit configured by disposing a spindle in a spindle housing via an air bearing. The tip of the spindle protrudes from the spindle housing, and a cutting blade is attached to the protruding tip via a blade mount.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Since the cutting blade is thin and difficult to handle, when attaching the cutting blade to the spindle, the operator often has trouble positioning it at the attachment position. Also, when there is cutting fluid containing cutting chips around the spindle, when attaching the cutting blade to the spindle, there is a risk that the cutting fluid adheres to the attachment location and the cutting chips are trapped. Thus, there is room for improvement regarding the attachment of the cutting blade to the spindle.

[0005] The present invention provides a spindle unit and a method for attaching a cutting blade that can improve the attachment property of the cutting blade.

Means for Solving the Problems

[0006] The present invention Spindle and A housing that supports the spindle via an air bearing and has an opening formed through which the spindle protrudes, A spindle unit comprising a cap that is attached to the housing, and on which a cutting blade is mounted, The aforementioned cap is An insertion portion inserted into the aforementioned opening, It has a main body portion that surrounds the protruding portion of the spindle, Multiple discharge ports for discharging fluid are provided circumferentially on the outer surface of the main body.

[0007] Furthermore, the present invention is A method for mounting a cutting blade to the tip of a spindle of a spindle unit comprising a spindle, a housing that supports the spindle via an air bearing and has an opening through which the spindle protrudes, and a cap that is mounted on the housing, A blade mount fixing step for fixing a blade mount having a boss portion to the tip of the spindle, The cutting blade fixing step includes, after the blade mount fixing step, inserting the boss portion of the blade mount into the through hole formed in the center of the cutting blade and fixing the cutting blade to the blade mount, The cutting blade fixing step involves inserting the boss portion of the blade mount into the through hole of the cutting blade while fluid is being discharged from multiple discharge ports provided circumferentially on the outer surface of the cap.

[0008] Furthermore, the present invention is A method for mounting a cutting blade to the tip of a spindle of a spindle unit comprising a spindle, a housing that supports the spindle via an air bearing and has an opening through which the spindle protrudes, and a cap that is mounted on the housing, A blade mount fixing step for fixing a blade mount having a boss portion to the tip of the spindle, After the blade mount fixing step, the cutting blade fixing step involves inserting the boss portion of the blade mount into the through hole formed in the center of the cutting blade and fixing the cutting blade to the blade mount. Prior to the cutting blade fixing step, the system includes a cleaning step in which fluid is discharged from a plurality of discharge ports provided circumferentially on the outer surface of the cap to clean the area around the cap. [Effects of the Invention]

[0009] According to the present invention, the ease of mounting the cutting blade can be improved. [Brief explanation of the drawing]

[0010] [Figure 1] Figure 1 is a schematic perspective view showing a cutting apparatus 1 equipped with a spindle unit 10 according to one embodiment of the present invention. [Figure 2] Figure 2 is a schematic cross-sectional view showing the spindle unit 10. [Figure 3] Figure 3 is an enlarged cross-sectional view showing the cap 30 attached to the housing 12. [Figure 4] Figure 4 is a front view of the cap 30. [Figure 5] Figure 5 is a side view of the cap 30. [Figure 6] Figure 6 is an exploded perspective view of the spindle unit 10, blade mount 40, and cutting blade 50. [Figure 7] Figure 7 is an exploded cross-sectional view of the spindle unit 10, blade mount 40, and cutting blade 50. [Figure 8] Figure 8 shows an example of a flowchart for mounting the cutting blade 50. [Figure 9] Figure 9 illustrates the blade mount fixing step S1. [Figure 10]FIG. 10 is a diagram for explaining the cleaning step S2. [Figure 11] FIG. 11 is a diagram (part 1) for explaining the cutting blade fixing step S3. [Figure 12] FIG. 12 is a diagram (part 2) for explaining the cutting blade fixing step S3. [Figure 13] FIG. 13 is an exploded cross-sectional view of the spindle unit 10, the blade mount 40, and the cutting blade 50, and shows a modified example in which the cutting blade 50 is composed of a hubless blade. [Figure 14] FIG. 14 is a cross-sectional view of the spindle unit 10 in which the cutting blade 50 composed of a hubless blade is fixed to the blade mount 40. [Figure 15] FIG. 15 is a front view of the cap 30 of the modified example. [Figure 16] FIG. 16 is a side view of the cap 30 of the modified example.

Embodiments for Carrying Out the Invention

[0011] Hereinafter, an embodiment of a method for mounting a spindle unit and a cutting blade of the present invention will be described based on the accompanying drawings.

[0012] FIG. 1 is a perspective view schematically showing a cutting device 1 equipped with a spindle unit 10 according to an embodiment of the present invention. The X-axis direction and the Y-axis direction shown in FIG. 1 are directions perpendicular to each other on a horizontal plane, and the Z-axis direction is a direction (vertical direction) perpendicular to the X-axis direction and the Y-axis direction.

[0013] The cutting apparatus 1 includes a base 2 on which each component is mounted. A cover 3 is attached to the top of the base 2, covering the upper surface of the base 2. Inside the cover 3 is a spindle unit 10, which has a cutting blade 50 attached to its tip for cutting a workpiece 110 such as a wafer. This spindle unit 10 is connected to a spindle unit movement mechanism (not shown) and is movable, for example, along the Y-axis and Z-axis. Details of the spindle unit 10 will be described later.

[0014] Below the spindle unit 10 is a chuck table 4 for holding the workpiece 110. This chuck table 4 is connected to a chuck table moving mechanism (not shown) and can move, for example, along the X-axis. The chuck table 4 is also connected to a rotation mechanism (not shown) and can rotate around a straight line along the Z-axis as the axis of rotation.

[0015] Furthermore, a cassette table 5 is installed at the corner of the base 2. A cassette 100 capable of accommodating multiple workpieces 110 is placed on the top surface of the cassette table 5. This cassette table 5 is connected to a cassette table moving mechanism (not shown) and can move, for example, along the Z-axis.

[0016] A touch panel 6, which serves as a user interface, is provided on the side 3a of the cover 3. A warning light (pilot lamp) 7 is provided on the top surface 3b of the cover 3. The components of the cutting device 1 are connected to a control unit. This control unit has a processor (e.g., a central processing unit (CPU)) and a storage device including main memory (e.g., volatile memory) and auxiliary storage device (e.g., non-volatile memory), and controls the operation of the components of the cutting device 1.

[0017] [Spindle Unit] Figure 2 is a schematic cross-sectional view of the spindle unit 10. In the following description, the left side of the figure will be referred to as the +Y side and the right side as the -Y side in the Y-axis direction in which the spindle unit 10 extends.

[0018] The spindle unit 10 comprises a spindle 11, a housing 12 that houses the spindle 11, and a cap 30 that is attached to the housing 12.

[0019] The spindle 11 is made of a metal material such as stainless steel. The spindle 11 extends along the Y-axis direction, with its -Y end connected to the motor 20 and its +Y end protruding from the housing 12 through an opening 12a formed in the housing 12. In the spindle unit 10, the -Y side where the motor 20 is located is sometimes called the base end, and the +Y side where the spindle 11 protrudes from the opening 12a is sometimes called the tip end. As will be described in detail later, a cutting blade 50 is mounted on the +Y tip of the spindle 11 via a blade mount 40 (see Figure 12).

[0020] The motor 20 comprises a stator 21 housed at the base end of the housing 12 and a rotor 22 integrated with the spindle 11. The spindle 11 may be integrated with the rotor 22, or it may be connected to a separate rotor 22.

[0021] The housing 12 has a cylindrical shape and is made of a metal material such as stainless steel. The spindle 11 is housed in the internal space of the housing 12, and the housing 12 supports the spindle 11 via air bearings. The housing 12 has a radial air bearing section 13 and a thrust air bearing section 14 in its internal space. When high-pressure air is supplied to the radial air bearing section 13 and the thrust air bearing section 14, an air bearing is formed between the spindle 11 and the housing 12. This keeps the spindle 11 floating in the internal space of the housing 12.

[0022] To describe the air bearing of the housing 12 in more detail, the cylindrical wall portion of the housing 12 is provided with an air supply port 15a, an air supply passage 15b, a first supply passage 15c, and a second supply passage 15d. The air supply port 15a is exposed to the outside of the housing 12 and is connected to an external air supply source (not shown) via a piping member such as a tube or pipe. High-pressure air, for example, 0.2 MPa to 1.0 MPa, typically 0.5 MPa, is supplied to the air supply port 15a. The air supply passage 15b communicates with the radial air bearing section 13 via the first supply passage 15c and with the thrust air bearing section 14 via the second supply passage 15d. When air is supplied to the radial air bearing section 13 and the thrust air bearing section 14, an air bearing is formed between the spindle 11 and the housing 12.

[0023] In the radial air bearing section 13, air is blown onto the spindle 11 from the surroundings, thereby maintaining the position of the spindle 11 in the radial direction (X-axis direction and Z-axis direction) at a predetermined position.

[0024] In the thrust air bearing section 14, air is blown from both the front and rear toward the annular thrust plate 11a provided on the spindle 11, thereby maintaining the position of the spindle 11 in the thrust direction (Y-axis direction) at a predetermined position. The thrust plate 11a is a part of the spindle 11 housed at the front end of the housing 12, and is a part with a larger outer diameter than the rest of the spindle 11.

[0025] Furthermore, an air exhaust passage 11b is formed inside the spindle 11 and opens on the outer circumferential surface of the thrust plate 11a. The air exhaust passage 11b communicates with an air exhaust port (not shown) formed on the base end side of the housing 12. When an air bearing is formed between the spindle 11 and the housing 12, some of the air is exhausted to the outside of the spindle unit 10 through the air exhaust passage 11b and the air exhaust port.

[0026] A circular opening 12a is provided at the front end face 12b of the housing 12, and the spindle 11 protrudes from the opening 12a to the outside of the housing 12. The size of the opening 12a is slightly larger than the size of the circular cross-section of the spindle 11.

[0027] Figure 3 is an enlarged cross-sectional view showing the cap 30 attached to the housing 12. Figure 4 is a front view of the cap 30. Figure 5 is a side view of the cap 30.

[0028] As shown in Figures 3 and 4, the cap 30 is fitted around the opening 12a of the housing 12. The cap 30 has a through hole 30a through which the spindle 11 can be inserted. The cap 30 is made of a metal material such as stainless steel.

[0029] The cap 30 protects the portion 11c of the spindle 11 located at the opening 12a and the portion 12c of the housing 12 located around the opening 12a (the portion indicated by the dashed line in Figure 3).

[0030] The cap 30 has an insertion portion 31 that is inserted into the opening 12a of the housing 12, and a main body portion 32 that surrounds the protruding portion 11e of the spindle 11. The insertion portion 31 and the main body portion 32 are formed integrally.

[0031] Specifically, the insertion portion 31 is inserted in the gap between the portion 11c of the spindle 11 and the portion 12c of the housing 12, so as to fit into the opening 12a of the housing 12.

[0032] The main body 32 has an outer diameter larger than the opening 12a of the housing 12 and is attached to the end face 12b on the front side of the housing 12 so as to cover the opening 12a. More specifically, the main body 32 is provided with a plurality of through holes along the circumferential direction through which the cap fixing bolts 33 are inserted in the Y-axis direction. Here, an example is shown in which three through holes are provided at equal angular intervals. In addition, the end face 12b of the housing 12 is provided with a plurality of holes that overlap with the plurality of through holes provided in the main body 32. At least each hole in the housing 12 has a female thread into which the cap fixing bolts 33 can be screwed, and the cap 30 is attached to the housing 12 by fastening the cap fixing bolts 33 that pass through the through holes to the female threads formed in the holes of the housing 12. Note that the through holes of the cap 30 may also have female threads into which the cap fixing bolts 33 can be screwed.

[0033] Since the cap 30 is attached to the housing 12 by cap fixing bolts 33, the cap 30 can be removed from the housing 12 by removing the cap fixing bolts 33. Therefore, maintenance such as cleaning of the cap 30 can be easily performed.

[0034] As shown in Figures 4 and 5, the outer surface of the main body 32 is provided with multiple discharge ports 37 in the circumferential direction for discharging fluid. Here, an example is shown in which 12 discharge ports 37 are provided at equal angular intervals.

[0035] Each discharge port 37 discharges fluid radially outward from the cap 30. Each discharge port 37 discharges fluid in a direction perpendicular to the outer surface of the main body 32 (normal direction). However, the direction of fluid discharge is not limited to this, and each discharge port 37 may be configured to discharge fluid in a direction inclined with respect to the direction perpendicular to the outer surface of the main body 32, as long as the fluid is discharged radially outward from the cap 30. For example, each discharge port 37 may be configured to discharge fluid in a direction inclined toward the blade mount 40 with respect to the direction perpendicular to the outer surface of the main body 32.

[0036] The fluid discharged from the multiple outlets 37 is a liquid, a gas, or a mixture of a liquid and a gas. A liquid is, for example, water, and a gas is, for example, air. When discharging a gas, it is desirable that the air be under high pressure. Furthermore, the cap 30 may be configured to selectively switch the fluid discharged from the multiple outlets 37 from among a liquid, a gas, or a mixture of a liquid and a gas.

[0037] To describe the fluid discharge structure of the cap 30 in detail, the main body 32 is provided with a supply port 35 through which fluid is supplied, a flow path 36 connecting the supply port 35 to a plurality of discharge ports 37, and a plurality of discharge ports 37 for discharging the fluid that has flowed through the flow path 36. There is one supply port 35 on the cap 30, and in the illustrated example, it is located in the lower half of the cap 30. A piping member 34 through which the fluid supplied from the outside flows is connected to the supply port 35. The piping member 34 may be a tube or pipe, and may be flexible or not. The flow path 36 is provided in an annular shape along the shape of the cap 30. The effects of discharging fluid from the discharge ports 37 of the cap 30 will be described later.

[0038] Figure 15 is a front view of a modified cap 30. Figure 16 is a side view of a modified cap 30. The main body 32 of the cap 30 may further be provided with a switching unit 38 that selectively switches between multiple discharge ports 37 to discharge fluid. The switching unit 38 selectively switches between multiple discharge ports 37 to discharge fluid, for example, by operating an actuator or manually.

[0039] The switching section 38 is composed of, for example, a plurality of gate valves provided in the flow path 36. For example, as shown in Figures 15 and 16, if two gate valves are provided in the lower half of the flow path 36, when the two gate valves are closed, the cap 30 can discharge fluid only from the discharge ports 37 provided in the lower half of the cap 30 out of the plurality of discharge ports 37. When the two gate valves are opened, the cap 30 can discharge fluid from all of the discharge ports 37. Furthermore, by changing the position where the gate valves are provided and the number of gate valves, it is also possible to configure the cap 30 to discharge fluid only from the discharge ports 37 provided in the lower quadrant area of ​​the cap 30 out of the plurality of discharge ports 37.

[0040] Furthermore, each discharge port 37 of the cap 30 may be provided with a nozzle 39 that can change the direction of fluid discharge. The nozzle 39 is rotatable so as to tilt the fluid discharge direction to the +Y side or the -Y side, as shown in Figure 16, for example. This change in the fluid discharge direction is performed by rotating the nozzle 39, for example, by operating an actuator or manually. With this configuration, the fluid can be flowed to a desired position.

[0041] Next, the structure for attaching the cutting blade 50 to the tip of the spindle 11 will be described with reference to Figures 6 and 7. Note that in Figures 6 and 7, the piping member 34 connected to the supply port 35 of the cap 30 is omitted from the illustration. Also, although Figures 6 and 7 show the cap 30 shown in Figures 3 to 5, the modified cap 30 shown in Figures 15 and 16 may also be used.

[0042] Figure 6 is an exploded perspective view of the spindle unit 10, blade mount 40, and cutting blade 50. Figure 7 is an exploded cross-sectional view of the spindle unit 10, blade mount 40, and cutting blade 50. The cutting blade 50 is mounted on the spindle unit 10 via the blade mount 40.

[0043] The blade mount 40 has a cylindrical boss portion 41 with male threads formed on its outer circumference, a flange portion 42 provided on the spindle 11 side (-Y side) of the boss portion 41, and a cylindrical fitting portion 43 that fits onto the tip of the spindle 11. The flange portion 42 is provided with a larger diameter than the boss portion 41 and the fitting portion 43, and the cutting blade 50 abuts against the outer circumference of the end face 42a on the +Y side. When the fitting portion 43 is fitted onto the tip of the spindle 11, it is positioned between the spindle 11 and the cap 30 in the through hole 30a of the cap 30.

[0044] A through hole 40a is provided in the center of the blade mount 40, and a female thread is formed in the through hole 40a into which a mount fixing bolt 46 can be screwed. In addition, a hole 11d is provided in the center of the tip of the spindle 11, and a female thread is formed in the hole 11d into which a mount fixing bolt 46 can be screwed. The blade mount 40 is fixed to the tip of the spindle 11 by fastening the mount fixing bolt 46 to the female threads formed in the through hole 40a and the hole 11d. As a result, the blade mount 40 is provided so as to be able to rotate integrally with the spindle 11.

[0045] The cutting blade 50 is configured as a hub blade. Specifically, the cutting blade 50 has a hub base 51 with a through hole 51a in the center, and a cutting edge 52 fixed to the outer circumference of the hub base 51.

[0046] The hub base 51 is made of a metal material such as an aluminum alloy. The boss portion 41 of the blade mount 40 is inserted through the through hole 51a of the hub base 51, and the boss portion 41 is fitted into the through hole 51a. The blade portion 52 is made up of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a binder such as metal or resin, and is formed to have a predetermined thickness.

[0047] The cutting blade 50 is fixed to the blade mount 40 by fitting the boss portion 41 of the blade mount 40 into the through hole 51a of the hub base 51 and then fastening the blade fixing nut 56 to the male thread of the boss portion 41. In this way, the cutting blade 50 is sandwiched between the blade fixing nut 56 and the blade mount 40 and mounted to the blade mount 40.

[0048] [How to attach the cutting blade] Next, the method for attaching the cutting blade 50 to the tip of the spindle 11 will be explained with reference to Figures 8 to 12. Note that in Figures 9 to 12, the piping member 34 connected to the supply port 35 of the cap 30 is omitted from the illustration. Also, although Figures 9 to 12 show the cap 30 shown in Figures 3 to 5, the modified cap 30 shown in Figures 15 and 16 may also be used.

[0049] Figure 8 shows an example flowchart of the method for mounting the cutting blade 50. The method for mounting the cutting blade 50 comprises a blade mount fixing step S1, a cleaning step S2, and a cutting blade fixing step S3.

[0050] Figure 9 illustrates the blade mount fixing step S1. In the blade mount fixing step S1, the blade mount 40 is fixed to the tip of the spindle 11. Specifically, in the blade mount fixing step S1, the fitting portion 43 of the blade mount 40 is fitted to the tip of the spindle 11, and the mount fixing bolt 46 is fastened to the female threads formed in the through hole 40a and the hole portion 11d.

[0051] Figure 10 illustrates cleaning step S2. If cutting fluid adheres to the area around the blade mount 40, the cutting fluid may drip and adhere to the +Y side end face 42a of the blade mount 40. Since this cutting fluid may contain foreign matter such as cutting chips from the cut workpiece, it is preferable to clean the area around the blade mount 40 to prevent cutting fluid from adhering to the +Y side end face 42a and foreign matter from getting trapped between the blade mount 40 and the cutting blade 50 when fixing the cutting blade 50 to the blade mount 40.

[0052] Therefore, cleaning step S2 cleans the area around the cap 30 by discharging fluid from the discharge port 37 of the cap 30 before the cutting blade fixing step S3. The thick arrow in Figure 10 shows the fluid being discharged from the discharge port 37. Specifically, cleaning step S2 cleans the blade mount 40 fixed to the spindle 11.

[0053] The cap 30, which allows for this type of cleaning, reduces the likelihood of cutting debris getting trapped between the blade mount 40 and the cutting blade 50, thereby improving the ease of mounting the cutting blade 50. Furthermore, by providing the cap 30, which is attached to the spindle unit 10, with a function to perform cleaning step S2, the area around the cap 30 can be cleaned without the need to separately install or bring in a fluid discharge device.

[0054] Figures 11 and 12 illustrate the cutting blade fixing step S3. In the cutting blade fixing step S3, the boss portion 41 of the blade mount 40 is inserted into the through hole 51a of the cutting blade 50 and fitted into place (Figure 11), and the blade fixing nut 56 is fastened to the male thread of the boss portion 41 (Figure 12). In this way, the cutting blade 50 is fixed to the blade mount 40, and the mounting of the cutting blade 50 is completed.

[0055] In this step, the cutting blade fixing step S3 involves inserting the boss portion 41 of the blade mount 40 into the through hole 51a of the cutting blade 50 while fluid is being discharged from the discharge port 37 of the cap 30. The fluid discharged in the cutting blade fixing step S3 is not limited, but is preferably air.

[0056] As fluid is discharged radially outward from the discharge port 37 of the cap 30, the Bernoulli effect pulls the cutting blade 50 towards the blade mount 40. This action makes it easier for the operator to position the through hole 51a of the cutting blade 50 relative to the boss portion 41 of the blade mount 40 when attaching the cutting blade 50 to the blade mount 40. Thus, by performing the cutting blade fixing step S3 with fluid discharged from the discharge port 37 of the cap 30, the ease of attaching the cutting blade 50 can be improved. Note that the step of fastening the blade fixing nut 56 to the male thread of the boss portion 41 in the cutting blade fixing step S3 may be performed with fluid discharged from the discharge port 37 of the cap 30 or without fluid discharge.

[0057] In the embodiments described above, fluid is discharged from the discharge port 37 of the cap 30 when the cutting blade 50 is attached to the spindle 11. However, fluid may also be discharged from the discharge port 37 of the cap 30 at times other than when the cutting blade 50 is attached to the spindle 11.

[0058] For example, when cleaning (washing) the chuck table 4 or the workpiece 110 held on the chuck table 4, fluid may be discharged from the discharge port 37 of the cap 30. Specifically, the discharge port 37 of the cap 30 mounted on the housing 12 may be positioned above the chuck table 4 or the workpiece 110, and fluid may be discharged. This allows the chuck table 4 or the workpiece 110 to be cleaned (washed). The fluid discharged at this time is mainly a liquid or a mixed fluid of liquid and gas.

[0059] Furthermore, to dry the cleaned (washed) workpiece 110, a fluid may be discharged from the discharge port 37 of the cap 30. The fluid discharged at this time is mainly gas. This blows away any liquid present on the upper surface of the workpiece 110, thus preventing the liquid on the workpiece 110 from spilling when it is transported to the next process.

[0060] Furthermore, when a cap 30 having a switching section 38 as shown in Figures 15 and 16 is mounted on the housing 12, the fluid may be discharged only from the discharge ports 37 located in the lower half of the cap 30 or from the discharge ports 37 located in the lower quadrant of the cap 30. With such a configuration, when cleaning the chuck table 4 or the workpiece 110, the fluid can be discharged only to the areas that need cleaning (e.g., the cutting line), thereby reducing the amount of fluid supplied. As a result, energy saving can be achieved.

[0061] Furthermore, when a cap 30 having a nozzle 39, as shown in Figures 15 and 16, is attached to the housing 12, the fluid discharge direction can be changed to clean the area that needs cleaning, thereby enabling efficient cleaning.

[0062] (modified version) In the embodiment described above, the cutting blade 50 was configured as a hub blade having a hub base 51, but it is not limited to this. For example, the cutting blade 50 may be configured as a hubless blade without a hub base 51.

[0063] Figure 13 is an exploded cross-sectional view of the spindle unit 10, blade mount 40, and cutting blade 50, and shows a modified example in which the cutting blade 50 is composed of a hubless blade. Figure 14 is a cross-sectional view of the spindle unit 10 in which the cutting blade 50, composed of a hubless blade, is fixed to the blade mount 40. In the description of this modified example, the same reference numerals are used for components common to the previously described embodiment, and repeated descriptions are omitted.

[0064] The cutting blade 50 is composed of a disc-shaped blade portion 52 with a through hole 52a in the center. The boss portion 41 of the blade mount 40 is inserted through the through hole 52a, and the boss portion 41 is fitted into the through hole 52a. The cutting blade 50 is fixed to the blade mount 40 by fastening the blade fixing nut 56 to the male thread of the boss portion 41 while the boss portion 41 of the blade mount 40 is fitted into the through hole 52a of the hub base 51. In this way, the cutting blade 50 is sandwiched between the blade fixing nut 56 and the blade mount 40 and mounted to the blade mount 40.

[0065] The modified cutting blade 50, configured as a hubless blade, is particularly thin and difficult to handle, making it easy for the operator to have trouble aligning the through-hole 52a of the cutting blade 50 with the boss portion 41 of the blade mount 40 when attaching the cutting blade 50 to the blade mount 40.

[0066] Therefore, in the modified example, it is preferable that the cutting blade fixing step S3 fixes the cutting blade 50 to the blade mount 40 while fluid is being discharged from the discharge port 37 of the cap 30. This makes it easier for the operator to position the through hole 52a of the cutting blade 50 and the boss portion 41 of the blade mount 40 when attaching the cutting blade 50 to the blade mount 40, thereby improving the ease of attaching the cutting blade 50.

[0067] Although one embodiment of the present invention and various modifications have been described above with reference to the accompanying drawings, it goes without saying that the present invention is not limited to these embodiments. It is clear to those skilled in the art that various modifications or alterations can be conceived within the scope of the claims, and these are also understood to naturally fall within the technical scope of the present invention. Furthermore, the components of the above embodiments may be combined arbitrarily without departing from the spirit of the invention.

[0068] For example, in the embodiment described above, fluid was discharged from the outlet 37 of the cap 30 in both the cleaning step S2 and the cutting blade fixing step S3 of the method for mounting the cutting blade 50, but this is not limited to this. For example, fluid may be discharged from the outlet 37 of the cap 30 only in the cleaning step S2, or only in the cutting blade fixing step S3. If fluid is discharged from the outlet 37 of the cap 30 only in the cutting blade fixing step S3, it is equivalent to the method for mounting the cutting blade 50 not including the cleaning step S2.

[0069] Furthermore, the spindle unit 10 may be configured to allow interchangeability between a cap 30 provided with a discharge port 37 and a cap not provided with a discharge port 37.

[0070] This specification includes at least the following: The components and other elements corresponding to those in the embodiments described above are shown in parentheses as examples, but are not limited thereto.

[0071] (1) Spindle (spindle 11) and A housing (housing 12) that supports the spindle via an air bearing and has an opening (opening 12a) through which the spindle protrudes, A spindle unit (spindle unit 10) is provided, which includes a cap (cap 30) attached to the housing, and a cutting blade (cutting blade 50) attached to it, The aforementioned cap is An insertion portion (insertion portion 31) is inserted into the aforementioned opening, The spindle has a main body portion (main body portion 32) that surrounds the protruding portion (protruding portion 11e), Multiple discharge ports (discharge ports 37) for discharging fluid are provided circumferentially on the outer surface of the main body. Spindle unit.

[0072] According to (1), the outer surface of the main body of the cap is provided with multiple outlets for discharging fluid in the circumferential direction. When a cutting blade is attached, discharging fluid from the multiple outlets of the cap causes the cutting blade to be pulled toward the spindle side (cap side) by the Bernoulli effect, improving the ease of attaching the cutting blade. Furthermore, discharging fluid from the multiple outlets of the cap cleans the area around the cap, thus reducing the likelihood of foreign matter such as cutting chips getting caught in the attachment area of ​​the cutting blade when it is attached. Therefore, the ease of attaching the cutting blade can be improved.

[0073] (2) The spindle unit described in (1), The fluid is a liquid, a gas, or a mixed fluid of the liquid and the gas. Spindle unit.

[0074] According to (2), the ease of mounting the cutting blade can be improved by discharging a liquid, gas, or a mixture thereof from the outlet of the cap.

[0075] (3) A spindle unit as described in (1) or (2), The main body is further provided with a supply port (supply port 35) into which the fluid is supplied, and a flow path (flow path 36) connecting the supply port and the plurality of discharge ports. A piping member (piping member 34) through which the fluid supplied from the outside flows is connected to the supply port. Spindle unit.

[0076] According to (3), the fluid can be discharged around the spindle via the supply port, flow path, and discharge port provided in the cap.

[0077] (4) A spindle unit according to any one of (1) to (3), The main body is further provided with a switching unit (switching unit 38) that selectively switches which discharge port from which the fluid is discharged among the plurality of discharge ports. Spindle unit.

[0078] According to (4), when cleaning around the cap, fluid can be discharged from only some of the multiple discharge ports. Therefore, fluid can be discharged only to the areas that need cleaning, and the amount of fluid supplied can be reduced.

[0079] (5) A spindle unit according to any one of (1) to (4), Each discharge port is provided with a nozzle (nozzle 39) that can change the direction of fluid discharge. Spindle unit.

[0080] According to (5), when cleaning around the cap, the fluid can be discharged to a desired position.

[0081] (6) A method for mounting a cutting blade to the tip of a spindle of a spindle unit (spindle unit 10), which comprises a spindle (spindle 11), a housing (housing 12) that supports the spindle via an air bearing and has an opening (opening 12a) through which the spindle protrudes, and a cap (cap 30) that is mounted on the housing, A blade mount fixing step (blade mount fixing step S1) is performed to fix a blade mount (blade mount 40) having a boss portion (boss portion 41) to the tip of the spindle, The cutting blade fixing step (cutting blade fixing step S3) is performed after the blade mount fixing step, by inserting the boss portion of the blade mount into the through hole (through hole 51a, 52a) formed in the center of the cutting blade and fixing the cutting blade to the blade mount. The cutting blade fixing step involves inserting the boss portion of the blade mount into the through hole of the cutting blade while fluid is being discharged from a plurality of discharge ports (discharge ports 37) provided circumferentially on the outer surface of the cap. How to attach the cutting blade.

[0082] According to (6), the outer surface of the cap is provided with multiple outlets for discharging fluid in the circumferential direction. When a cutting blade is mounted, discharging fluid from the multiple outlets of the cap causes the cutting blade to be pulled toward the spindle side (cap side) by the Bernoulli effect, thereby improving the ease of mounting the cutting blade.

[0083] (7) A method for mounting a cutting blade to the tip of a spindle of a spindle unit (spindle unit 10), which comprises a spindle (spindle 11), a housing (housing 12) that supports the spindle via an air bearing and has an opening (opening 12a) through which the spindle protrudes, and a cap (cap 30) that is mounted on the housing, A blade mount fixing step (blade mount fixing step S1) is performed to fix a blade mount (blade mount 40) having a boss portion (boss portion 41) to the tip of the spindle, After the blade mount fixing step, the cutting blade fixing step (cutting blade fixing step S3) is performed, in which the boss portion of the blade mount is inserted into the through hole (through hole 51a, 52a) formed in the center of the cutting blade and the cutting blade is fixed to the blade mount. Prior to the cutting blade fixing step, the procedure includes a cleaning step (cleaning step S2) in which fluid is discharged from a plurality of discharge ports (discharge ports 37) provided circumferentially on the outer surface of the cap to clean the area around the cap. How to attach the cutting blade.

[0084] According to (7), the outer surface of the cap is provided with multiple outlets for discharging fluid in the circumferential direction. By discharging fluid from the multiple outlets of the cap, the area around the cap can be cleaned, which reduces the likelihood of foreign matter such as cutting chips getting caught in the mounting area of ​​the cutting blade when the cutting blade is attached. Therefore, the ease of attaching the cutting blade can be improved. [Explanation of symbols]

[0085] 10 Spindle Units 11 spindles 11e Protrusion 12 Housing 12a opening 30 caps 31 Insertion part 32 Main body 34 Piping components 35 supply ports 36 channels 37 Discharge port 38 Switching section 39 nozzles 40 Blade Mount 41 Boss Section 50 cutting blades 51a Through hole 52a through hole S1 Blade Mount Fixing Step S2 Cleaning Step S3 Cutting blade fixing step

Claims

1. Spindle and A housing that supports the spindle via an air bearing and has an opening formed through which the spindle protrudes, A spindle unit comprising a cap that is attached to the housing, and on which a cutting blade is mounted, The aforementioned cap is An insertion portion inserted into the aforementioned opening, It has a main body portion that surrounds the protruding portion of the spindle, Multiple discharge ports for discharging fluid are provided circumferentially on the outer surface of the main body. Spindle unit.

2. A spindle unit according to claim 1, The fluid is a liquid, a gas, or a mixed fluid of the liquid and the gas. Spindle unit.

3. A spindle unit according to claim 1 or 2, The main body is further provided with a supply port into which the fluid is supplied, and a flow path connecting the supply port and the plurality of discharge ports. A piping member through which the fluid supplied from the outside flows is connected to the supply port. Spindle unit.

4. A spindle unit according to claim 1 or 2, The main body is further provided with a switching unit that selectively switches which discharge port from among the plurality of discharge ports discharges the fluid. Spindle unit.

5. A spindle unit according to claim 1 or 2, Each discharge port is provided with a nozzle that can change the direction of fluid discharge. Spindle unit.

6. A method for mounting a cutting blade to the tip of a spindle of a spindle unit comprising a spindle, a housing that supports the spindle via an air bearing and has an opening through which the spindle protrudes, and a cap that is mounted on the housing, A blade mount fixing step for fixing a blade mount having a boss portion to the tip of the spindle, The cutting blade fixing step includes, after the blade mount fixing step, inserting the boss portion of the blade mount into the through hole formed in the center of the cutting blade and fixing the cutting blade to the blade mount, The cutting blade fixing step involves inserting the boss portion of the blade mount into the through hole of the cutting blade while fluid is being discharged from a plurality of discharge ports provided circumferentially on the outer surface of the cap. How to attach the cutting blade.

7. A method for mounting a cutting blade to the tip of a spindle of a spindle unit comprising a spindle, a housing that supports the spindle via an air bearing and has an opening through which the spindle protrudes, and a cap that is mounted on the housing, A blade mount fixing step for fixing a blade mount having a boss portion to the tip of the spindle, After the blade mount fixing step, the cutting blade fixing step involves inserting the boss portion of the blade mount into the through hole formed in the center of the cutting blade and fixing the cutting blade to the blade mount. Prior to the cutting blade fixing step, the system includes a cleaning step in which fluid is discharged from a plurality of discharge ports provided circumferentially on the outer surface of the cap to clean the area around the cap. How to attach the cutting blade.

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