Connecting device

Abstract

The bellows section, which has an expandable and contractible internal channel, is properly protected to prevent dielectric breakdown. [Solution] The connecting device 100 comprises a cylindrical housing portion 10 into which a plug device 200 is inserted at one end and a supply pipe P is connected at the other end; a valve body portion 20 that opens to allow liquid to flow from the plug device 200 to the connecting device 100 when it comes into contact with the plug device 200 inserted in the housing portion 10; a bellows portion 30 having an expandable and contractible internal flow path 31 that supplies the liquid flowing in from the plug device 200 to the supply pipe P when the valve body portion 20 is open; and a stopper 40 that forms a supply flow path 41 that supplies liquid from the internal flow path 31 to the supply pipe P, wherein the stopper 40 is made of a conductive fluororesin material including a fluororesin material and a conductive material dispersed in the fluororesin material and is electrically connected to a ground portion 60 that is maintained at ground potential.

Description

Technical Field

[0001] The present invention relates to a connecting device.

Background Art

[0002] Fluororesin materials are widely used in fluid equipment for circulating liquids such as corrosive pure water used in semiconductor manufacturing because of their excellent chemical resistance and stain resistance. On the other hand, fluororesin materials generally have a volume resistivity greater than 10 18 Ω·cm and are generally classified as insulating materials. Therefore, charging may occur due to friction between the fluid flowing through the fluid flow path formed inside the fluid equipment and the fluid when using a fluororesin material.

[0003] Regarding the above problems, an antistatic fluororesin tube is known in which a conductive portion made of a fluororesin composition containing a conductive substance is embedded in a stripe shape on the outer peripheral surface to impart conductivity (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, the antistatic fluororesin tube disclosed in Patent Document 1 does not have conductivity imparted to the inner peripheral surface of the fluid flow path where charging is likely to occur due to friction with the fluid. Therefore, it is impossible to reliably remove the charge generated on the inner peripheral surface of the fluid flow path, and there is a possibility that the resin material forming the fluid flow path may be damaged by excessive electrostatic charging. In particular, in a fluid device having a bellows portion with an expandable and contractible internal flow path, there is a problem that the expandable and contractible portion, which is thinner than other portions, is particularly likely to be damaged by dielectric breakdown.

[0006] This invention has been made in view of these circumstances, and aims to provide a coupling device that can adequately protect a bellows portion, in which an expandable and contractible internal flow path is formed, from dielectric breakdown. [Means for solving the problem]

[0007] To solve the above problems, the present invention employs the following means. The coupling device according to the present invention is a coupling device that connects a plug device for supplying liquid and a supply pipe for supplying the liquid to a destination, comprising: a cylindrical housing portion into which the plug device is inserted at one end and the supply pipe is connected at the other end; a valve body portion that opens to allow the liquid to flow from the plug device to the coupling device when in contact with the plug device inserted in the housing portion; a bellows portion having an expandable and contractible internal flow path formed therein for supplying the liquid flowing from the plug device to the supply pipe when the valve body portion is in the open state; and a flow path portion that forms a supply flow path for supplying the liquid from the internal flow path to the supply pipe, wherein either the bellows portion or the flow path portion is made of a conductive fluororesin material including a fluororesin material and a conductive material dispersed in the fluororesin material and is electrically connected to a ground portion that is maintained at ground potential.

[0008] According to the coupling device of the present invention, when a plug device is inserted into one end of the housing, the valve body opens and liquid flows into the coupling device. The liquid that flows into the housing is supplied from the bellows section, which has an expandable and contractible internal flow path, through the supply flow path formed by the flow path section to the supply piping connected to the other end of the housing.

[0009] When liquid flows from the plug device to the supply piping via the connecting device, static electricity may be generated in the bellows or its surrounding components due to friction between the internal flow path and the liquid. In particular, if the liquid supplied from the plug device to the connecting device is a mist mixed with air, static electricity generation in the bellows or its surrounding components becomes more pronounced. Furthermore, if the cross-sectional area of ​​the flow path through which the liquid flows in the bellows or its surrounding components is smaller than that of the upstream flow path, the liquid flow velocity in the bellows or its surrounding components increases, leading to more pronounced static electricity generation in the bellows or its downstream components.

[0010] In the coupling device according to the present invention, either the bellows portion or the flow channel portion is electrically connected to a ground portion formed of a conductive fluororesin material and maintained at ground potential. Therefore, static electricity accumulated in the bellows portion or a member in its vicinity is removed by the ground portion via either the bellows portion or the flow channel portion formed of a conductive fluororesin material. In this way, the coupling device according to the present invention can adequately protect the bellows portion, in which an expandable and contractible internal flow channel is formed, from dielectric breakdown.

[0011] In the coupling device according to the present invention, the flow channel portion may be formed of the conductive fluororesin material and be electrically connected to the ground portion.

[0012] With this coupling device configuration, by connecting the flow channel, which is located downstream of the bellows in the direction of liquid flow, to the grounding portion, static electricity accumulated on the bellows or nearby components can be removed by the grounding portion via the flow channel, which is formed from a conductive fluororesin material.

[0013] In the coupling device with the above configuration, the flow path portion may be formed in a cylindrical shape and fixed to the inner circumferential surface of the housing portion, the housing portion may have a through hole that penetrates the inner circumferential surface and the outer circumferential surface toward the flow path portion, and the grounding portion may have a conductive member that is inserted into the through hole and positioned in contact with the flow path portion.

[0014] According to the coupling device of this embodiment, by inserting a conductive member into a through hole in the housing and bringing it into contact with the flow path, the flow path can be electrically connected to the ground, thereby appropriately removing static electricity accumulated on the bellows or members in its vicinity.

[0015] In the coupling device with the above configuration, the flow path portion may be a plate-shaped member formed in an annular shape so as to surround the axis through which the supply flow path extends.

[0016] According to the coupling device of this embodiment, the inner circumference of the annularly formed plate-shaped member is used as part of the supply channel, and static electricity accumulated on the liquid flowing through the supply channel or on members in its vicinity can be appropriately removed via the grounding portion.

[0017] In the coupling device according to the present invention, the bellows portion may be formed from the conductive fluororesin material and be electrically connected to the grounding portion.

[0018] With this coupling device configuration, by making the bellows portion electrically connected to the ground portion, static electricity accumulated on the bellows portion or nearby components can be removed by the ground portion via a flow channel formed from a conductive fluororesin material.

[0019] In the coupling device with the above configuration, the housing portion may have a through hole that penetrates the inner circumferential surface and the outer circumferential surface toward the bellows portion, and the grounding portion may have a conductive member that is inserted into the through hole and positioned in contact with the bellows portion.

[0020] According to the coupling device of this embodiment, by inserting a conductive member into a through hole in the housing and bringing it into contact with the bellows, the bellows can be electrically connected to the ground, thereby appropriately removing static electricity accumulated on the bellows or members in its vicinity. [Effects of the Invention]

[0021] According to the present invention, it is possible to provide a connecting device that can appropriately protect a bellows portion in which an expandable and contractible internal flow path is formed from dielectric breakdown.

Brief Description of the Drawings

[0022] [Figure 1] It is a partial longitudinal sectional view showing a liquid supply system according to the first embodiment of the present invention. [Figure 2] It is a partially enlarged view of part A of the liquid supply system shown in FIG. 1, showing a state where the connecting device is attached to the plug device. [Figure 3] It is a partially enlarged view of part A of the liquid supply system shown in FIG. 1, showing a state where the connecting device is removed from the plug device. [Figure 4] It is a longitudinal sectional view showing a modification of the connecting device shown in FIG. 3. [Figure 5] It is a longitudinal sectional view showing a connecting device according to the second embodiment of the present invention. [Figure 6] It is a partially enlarged view of part B of the connecting device shown in FIG. 5. [Figure 7] It is a longitudinal sectional view showing a first modification of the connecting device shown in FIG. 6. [Figure 8] It is a longitudinal sectional view showing a second modification of the connecting device shown in FIG. 6. [Figure 9] It is a longitudinal sectional view showing a third modification of the connecting device shown in FIG. 6. [Figure 10] It is a longitudinal sectional view showing a fourth modification of the connecting device shown in FIG. 6.

Mode for Carrying Out the Invention

[0023] 〔First Embodiment〕 Hereinafter, a liquid supply system 1 according to the first embodiment of the present invention will be described with reference to the drawings. Figure 1 is a partial longitudinal cross-sectional view showing the liquid supply system 1 according to this embodiment. The liquid supply system 1 of this embodiment shown in Figure 1 is a device that supplies liquid L contained in a liquid storage container C to a plurality of supply destination devices (not shown). Here, the liquid L in this embodiment is, for example, pure water or various chemical solutions used in the semiconductor manufacturing process of a semiconductor manufacturing apparatus.

[0024] As shown in Figure 1, the liquid supply system 1 includes a connecting device 100, a plug device 200, and an air supply device 300. The connecting device 100 is a device that connects the plug device 200, which is attached to the liquid storage container C, to the supply piping P that supplies liquid L to the receiving device. The plug device 200 is a device that supplies the liquid L stored in the liquid storage container C to the supply piping P via the connecting device 100. The air supply device 300 is a device that supplies compressed air to the internal space S of the liquid storage container C in the direction indicated by the arrow in Figure 1. The air supply device 300 supplies liquid L to the connecting device 100 via the plug device 200 by increasing the pressure in the internal space S.

[0025] Figure 2 is a magnified view of part A of the liquid supply system 1 shown in Figure 1, showing the coupling device 100 attached to the plug device 200. Figure 3 is a magnified view of part A of the liquid supply system 1 shown in Figure 1, showing the coupling device 100 detached from the plug device 200.

[0026] As shown in Figures 2 and 3, the plug device 200 has a siphon tube 210 that is fixed to the opening C1 of the liquid storage container C and extends along axis X. Axis X is an axis that extends in the vertical direction. The siphon tube 210 extends to the vicinity of the bottom C2 of the liquid storage container C. A male screw 221 is formed on the outer circumferential surface of the main body 220 of the plug device 200. The plug device 200 is fixed to the opening C1 by engaging the male screw 221 with the female screw of the opening C1.

[0027] The coupling device 100 includes a housing portion 10, a valve body portion 20, a bellows portion 30, a stopper (flow channel portion) 40, a spring 50, a grounding portion 60, and a pipe connection portion 70. The stopper 40 is formed of a conductive fluororesin material containing a fluororesin material and a conductive material dispersed in the fluororesin material. The housing portion 10, the valve body portion 20, the bellows portion 30, the spring 50, and the pipe connection portion 70 are formed of a non-conductive fluororesin material in which the conductive material is not dispersed.

[0028] Here, fluororesin materials include, for example, PTFE (polytetrafluoroethylene), PCTFE (polychlorotrifluoroethylene), and PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer). As for fluororesin materials, powdered forms (for example, PTFE G163 manufactured by Asahi Glass) can be used.

[0029] Furthermore, the conductive fluororesin material used in this embodiment is a material comprising a fluororesin material and carbon nanotubes dispersed in the fluororesin material. It is desirable to use carbon nanotubes dispersed in the fluororesin material that have, for example, the following properties. • Having a fiber length of 50 μm or more and 150 μm or less. • The fiber has a diameter of 5 nm or more and 20 nm or less. It has a bulk density of 10 mg / cm³ or more and 70 mg / cm³ or less. The G / D ratio is 0.7 or higher and 2.0 or lower. • The purity is 99.5% or higher. It is formed in multiple layers (for example, 4 to 12 layers). The reason why the carbon nanotube fiber length is set to 50 μm or more is to ensure that a small amount of carbon nanotubes provides sufficient conductivity when dispersed in a fluororesin material.

[0030] Furthermore, the conductive fluororesin material used in this embodiment has a carbon nanotube content ranging from 0.020% by weight to 0.030% by weight. As a result, the volume resistivity of the conductive fluororesin material is 1.0 × 10⁻⁶ 3 Greater than Ω·cm and 1.0 × 10⁻⁶ 4 It became less than Ω·cm.

[0031] The housing portion 10 is a cylindrical member into which a plug device 200 is inserted at one end and a supply pipe P is connected at the other end. The housing portion 10 has a through hole 11 that penetrates the inner and outer surfaces toward the stopper 40.

[0032] As shown in Figure 2, the valve body 20 is a device that, when the plug device 200 is inserted into the housing 10, is in an open state, allowing liquid L to flow from the plug device 200 to the connecting device 100 due to contact between the plug device 200 and the valve body 230. As shown in Figure 3, the valve body 20 is in a closed state when the plug device 200 is not inserted into the housing 10, preventing liquid L from flowing from the plug device 200 to the connecting device 100.

[0033] The bellows section 30 is a component in which an expandable and contractible internal flow path 31 is formed to supply liquid L flowing in from the plug device 200 to the supply pipe P when the valve body section 20 is in the open state. The flow path cross-sectional area of ​​the internal flow path 31 is smaller than the flow path cross-sectional area of ​​the upstream flow path of the internal flow path 31 formed by the siphon tube 210. Therefore, static electricity is easily generated in the bellows section 30 or the stopper 40 located downstream of it.

[0034] The stopper 40 is a member that fixes the upper end portion 30a of the bellows portion 30 to the housing portion 10. The stopper 40 is formed in a cylindrical shape and is fixed to the inner circumferential surface of the housing portion 10. The stopper 40 forms a plurality of supply channels 41 that supply liquid from the internal flow channel 31 of the bellows portion 30 to the supply pipe P.

[0035] The spring 50 is a component that, when the plug device 200 is not inserted into the housing 10, applies a biasing force so that the end 30b of the bellows portion 30 contacts the valve body 20 and maintains the bellows portion 30 in an extended state.

[0036] The grounding portion 60 is a component that is arranged to be electrically connected to the stopper 40 and is maintained at ground potential by being connected to the grounding cable E. The grounding portion 60 has a main body portion 61, a pin member (conductive member) 62, a fixing screw 63, and a mounting screw 64, each formed from a conductive material (for example, stainless steel).

[0037] The main body portion 61 is a cylindrical member formed to surround the upper end of the housing portion 10. The main body portion 61 has female threads into which fixing screws 63 are fastened and female threads into which mounting screws 64 are fastened. The pin member 62 is inserted into the through hole 11 of the housing portion 10. The pin member 62 is positioned in contact with the stopper 40 by being pressed against the outer surface of the stopper 40 by the tip of the fixing screw 63.

[0038] The pipe connection section 70 has a main body 71 that is fastened to the inner circumferential surface of the upper end of the housing section 10, and a fastening nut 72 for fixing the supply pipe P to the upper end of the main body section 71. The pipe connection section 70 fixes the supply pipe P between the fastening nut 72 and the main body section 71 by fastening the fastening nut 72, into which the supply pipe P is inserted, to the main body section 71.

[0039] The operation and effects of the coupling device 100 of this embodiment, as described above, will now be explained.

[0040] According to the coupling device 100 of this embodiment, when the plug device 200 is inserted into one end of the housing portion 10, the valve body portion 20 opens and liquid flows into the coupling device 100. The liquid that flows into the housing portion 10 is supplied from the bellows portion 30, which has an expandable and contractible internal flow path 31, through the supply flow path 41 formed by the stopper 40 to the supply piping P connected to the other end of the housing portion 10.

[0041] When liquid L flows from the plug device 200 to the supply pipe P via the connecting device 100, static electricity may be generated on the bellows section 30 or nearby stoppers 40 and other components due to friction between the internal flow path 31 and the liquid L. In particular, when the liquid supplied from the plug device 200 to the connecting device 100 is in the form of a mist mixed with air, static electricity generation on the bellows section 30 or nearby stoppers 40 and other components becomes more pronounced. For example, when the amount of liquid L stored in the liquid storage container C is small, both liquid L and air are supplied from the liquid storage container C to the siphon tube 210, making it easy for the liquid to become a mist mixed with air.

[0042] In the coupling device 100 of this embodiment, the stopper (flow channel) 40 is electrically connected to the grounding portion 60, which is formed of a conductive fluororesin material and maintained at ground potential. Therefore, static electricity accumulated on the bellows portion 30 or components such as the stopper 40 in its vicinity is removed by the grounding portion 60 via the stopper 40, which is formed of a conductive fluororesin material. In this way, the coupling device 100 of this embodiment can adequately protect the bellows portion 30, in which the expandable and contractible internal flow channel 31 is formed, from dielectric breakdown.

[0043] According to the coupling device 100 of this embodiment, by inserting the pin member 62 into the through hole 11 of the housing portion 10 and bringing it into contact with the stopper 40, the stopper 40 can be electrically connected to the ground portion 60, thereby appropriately removing static electricity accumulated on the bellows portion 30 or members such as the stopper 40 in its vicinity.

[0044] [Variation] In the above description, the stopper 40 is assumed to be made of a conductive fluororesin material and to be electrically connected to a grounding portion 60 that is maintained at ground potential, but other embodiments are also possible. For example, a modified example is possible in which the bellows portion 30 is made of a conductive fluororesin material and to be electrically connected to a grounding portion 60 that is maintained at ground potential.

[0045] Figure 4 is a longitudinal cross-sectional view showing a modified example of the coupling device 100 shown in Figure 3. In the coupling device 100 shown in Figure 4, the bellows portion 30 is made of a conductive fluororesin material and is electrically connected to the ground portion 60 which is maintained at the ground potential. On the other hand, the stopper 40 is made of a non-conductive fluororesin material and is not electrically connected to the ground portion 60 which is maintained at the ground potential.

[0046] In this modified example, the pin member 62 is positioned in contact with the bellows portion 30 by being pressed against the outer circumferential surface of the bellows portion 30 by the tip of the fixing screw 63.

[0047] In this modified coupling device 100, the bellows portion 30 is electrically connected to a ground portion 60 which is formed of a conductive fluororesin material and maintained at ground potential. Therefore, static electricity accumulated in the bellows portion 30 is removed by the ground portion 60 which is electrically connected to the bellows portion 30. In this way, the coupling device 100 of this embodiment can adequately protect the bellows portion 30, in which the expandable and contractible internal flow path 31 is formed, from dielectric breakdown.

[0048] According to the modified coupling device 100, by inserting a conductive member into the through hole of the housing and bringing it into contact with the bellows, the bellows can be electrically connected to the ground, thereby appropriately removing static electricity accumulated on the bellows or members in its vicinity.

[0049] [Second Embodiment] Hereinafter, a coupling device 100A according to a second embodiment of the present invention will be described with reference to the drawings. This embodiment is a modification of the first embodiment and is the same as the first embodiment unless otherwise specifically described below, so the following description will be omitted.

[0050] In the first embodiment, the coupling device 100 guided the liquid L supplied from the plug device 200 vertically from bottom to top to the supply pipe P. In contrast, the coupling device 100A of this embodiment guides the liquid supplied horizontally from the plug device 200A to the supply pipe 300A.

[0051] Figure 5 is a longitudinal cross-sectional view showing a coupling device 100A according to a second embodiment of the present invention. Figure 6 is a partially enlarged view of part B of the coupling device 100A shown in Figure 5. As shown in Figure 5, the coupling device 100A comprises a housing portion 10A, a valve body portion 20A, a bellows portion 30A, a movable portion 40A, a grounding portion 60A, and a pipe connection portion 70A.

[0052] The housing portion 10 is a cylindrical member that extends along the axis Y, with a plug device 200A inserted into one end of the connecting device 100A along the axis Y, and a supply pipe 300A connected to the other end of the connecting device 100A along the axis Y. The axis Y is an axis that extends in the horizontal direction. The housing portion 10A is formed in a cylindrical shape along the axis Y and comprises a first housing portion 10Aa, a second housing portion 10Ab, a third housing portion 10Ac, and a fourth housing portion 10Ad.

[0053] A front cover 10Ae is positioned on one end of the first housing section 10Aa, and a back cover 10Af is positioned on the other end of the fourth housing section 10Ad. The first housing section 10Aa, the second housing section 10Ab, the third housing section 10Ac, and the fourth housing section 10Ad are integrally connected, forming a cylindrical flow path inside through which liquid flows.

[0054] The valve body 20A opens when it comes into contact with the plug device 200A, allowing liquid to flow from the plug device 200A to the housing 10A. The valve body 20A comprises a valve body 20Aa, a spring 20Ab, and a stopper 20Ac. The outer circumferential surface of the valve body 20Aa is cylindrical in shape, extending along the axis Y, and has an outer diameter slightly smaller than the inner circumferential surface of the valve body holder 40Ab, which will be described later. Therefore, the valve body 20Aa is movable along the axis Y while inserted into the internal space of the valve body holder 40Ab.

[0055] The stopper 20Ac is an annular member extending around the axis Y, and is fixed to the valve body holder 40Ab by fastening the male threaded portion formed on its outer circumference to the female threaded portion formed on the inner circumference of the valve body holder 40Ab. The stopper 20Ac is designed to hold the spring 20Ab, which extends along the axis Y, between itself and the valve body 20Aa. The valve body 20Aa is pressed against the inner circumference of the valve body holder 40Ab by the biasing force of the spring 20Ab attempting to extend, forming an endless sealing region between itself and the valve body holder 40Ab that extends around the axis Y.

[0056] The bellows section 30A is a component in which an expandable and contractible internal flow path 31A is formed to supply liquid flowing in from the plug device 200A to the supply pipe 300A. The bellows section 30A is positioned inside the housing section 10A downstream of the valve body section 20A in the direction of liquid flow.

[0057] The movable part 40A is movable along axis Y so as to contact or separate from the plug device 200A, and is formed in a cylindrical shape along axis X, housing the valve body part 20A and the bellows part 30A inside. The movable part 40A comprises a valve body holder 40Ab and a bellows holder 40Aa. The valve body holder 40Ab and the bellows holder 40Aa are integrated by fastening the male thread of the valve body holder 40Ab to the female thread of the bellows holder 40Aa.

[0058] An annular projection 40Ac is formed on the outer circumference of the end of the bellows holder 40Aa, extending along the axis Y. This annular projection 40Ac is positioned in the cylindrical space formed between the third housing portion 10Ac and the fourth housing portion 10Ad, dividing this space into a first pressure chamber P1 and a second pressure chamber P2.

[0059] When compressed air is supplied to the first pressure chamber P1 via the intake / exhaust port 80, it generates a biasing force that moves the annular projection 40Ac along the axis Y. This biasing force is in the direction of contracting the bellows portion 30A. When compressed air is supplied to the second pressure chamber P2 via the intake / exhaust port 81, it generates a biasing force that moves the annular projection 40Ac along the axis Y. This biasing force is in the direction of extending the bellows portion 30A.

[0060] The pipe connection section (flow channel section) 70A is a component that forms a supply channel 71A for supplying liquid from the internal flow channel 31A to the supply pipe 300A. As shown in Figure 6, the pipe connection section 70A includes a packing 70Aa, a conductive plate 70Ab, an annular member 70Ac, a conductive sheet 70Ad, and an annular member 70Ae. The pipe connection section 70A is fixed in place between the back cover 10Af and the mounting flange 301A by fastening fastening bolts 90 to the back cover 10Af.

[0061] The conductive sheet 70Ad is formed of a conductive fluororesin material containing a fluororesin material and a conductive material dispersed in the fluororesin material. The packing 70Aa, the annular member 70Ac, and the annular member 70Ae are formed of a non-conductive fluororesin material in which the conductive material is not dispersed. The conductive plate 70Ab is formed of a metal material. The conductive sheet 70Ad is a plate-shaped member formed in an annular shape so as to surround the axis Y, and its inner circumference end comes into contact with the liquid flowing through the supply channel 71A.

[0062] The grounding portion 60A is a component that is arranged to be electrically connected to the conductive sheet 70Ad and is maintained at ground potential by being connected to the grounding cable E. The grounding portion 60A has a mounting screw 61A made of a conductive material (for example, stainless steel). The mounting screw 61A is fastened to a fastening hole formed in the conductive plate 70Ab. The conductive sheet 70Ad is arranged in contact with the conductive plate 70Ab and is maintained at ground potential.

[0063] The operation and effects of the coupling device 100A of this embodiment, as described above, will now be explained.

[0064] According to the coupling device 100A of this embodiment, when the plug device 200A is inserted into one end of the housing portion 10A, the valve body portion 20A opens and liquid flows into the coupling device 100A. The liquid that flows into the housing portion 10A is supplied from the bellows portion 30A, which has an expandable and contractible internal flow path 31A formed therein, through the supply flow path 71A formed by the pipe connection portion 70A to the supply pipe 300A connected to the other end of the housing portion 10A.

[0065] When liquid flows from the plug device 200A to the supply pipe P via the connecting device 100A, static electricity may be generated in the bellows section 30A or nearby components due to friction between the internal flow path 31A and the liquid. In particular, if the liquid supplied from the plug device 200A to the connecting device 100A is in the form of a mist mixed with air, the generation of static electricity in the bellows section 30A or nearby components becomes more pronounced.

[0066] In the coupling device 100A of this embodiment, the conductive sheet (flow channel) 70Ad is electrically connected to the grounding portion 60A, which is formed of a conductive fluororesin material and maintained at ground potential. Therefore, static electricity accumulated on the bellows portion 30A or a member in its vicinity is removed by the grounding portion 60A via the conductive sheet 70Ad, which is formed of a conductive fluororesin material. In this way, the coupling device 100A of this embodiment can adequately protect the bellows portion 30A, in which the expandable and contractible internal flow channel 31A is formed, from dielectric breakdown.

[0067] [First variation] In the above description, the conductive sheet 70Ad of the pipe connection part 70A is brought into contact with the liquid flowing through the supply channel 71A, and the conductive sheet 70Ad is maintained at ground potential by the grounding part 60A, thereby removing static electricity charged on the bellows part 30A or a member in its vicinity. However, other embodiments are also possible. For example, the coupling device 100A of the first modified example shown in Figure 7 may also be used.

[0068] In the first modified example, the pin member 70Ag of the pipe connection part 70A is brought into contact with the liquid flowing through the supply channel 71A, and the pin member 70Ag is maintained at ground potential by the grounding part 60A, thereby removing static electricity charged on the bellows part 30A or a member in its vicinity. As shown in Figure 7, the pipe connection part 70A of the first modified example has an annular member 70Af and a pin member 70Ag.

[0069] The annular member 70Af is formed in an annular shape surrounding the axis Y and is made of a non-conductive fluororesin material in which conductive material is not dispersed. The annular member 70Af has a through hole into which the pin member 70Ag is inserted. The pin member 70Ag is inserted into the through hole formed in the annular member 70Af and is made of a conductive fluororesin material in which conductive material is dispersed. The tip of the pin member 70Ag comes into contact with the liquid flowing through the supply channel 71A while inserted into the through hole.

[0070] The annular member 70Af may have only one through-hole for inserting the pin member 70Ag, as shown in Figure 7, or it may have multiple through-holes along the circumferential direction around the axis Y (for example, three holes at 120-degree intervals). If the annular member 70Af has multiple through-holes, a pin member 70Ag is inserted into each through-hole. Each pin member 70Ag is mounted to be electrically connected to the ground portion 60A.

[0071] The grounding portion 60A is a component that is arranged to conduct electricity through the pin member 70Ag and is maintained at ground potential by being connected to the grounding cable E. The grounding portion 60A includes a mounting screw 62A, a fixing screw 63A, a conductive plate 64A, and a conductive material 65A, each formed from a conductive material (for example, stainless steel).

[0072] Mounting screws 62A are fastened to fastening holes formed in the annular member 70Af. Fixing screws 63A are attached to the conductive plate 64A to fix the grounding cable E in a state of electrical contact with the conductive plate 64A. The conductive material 65A is installed in a through hole formed in the annular member 70Af in a state of contact with the pin member 70Ag. The pin member 70Ag is positioned in contact with the conductive material 65A and is maintained at ground potential by being electrically connected to the grounding cable E via mounting screws 62A.

[0073] In this modified coupling device 100A, the pin member (flow channel) 70Ag is electrically connected to the grounding portion 60A, which is formed of a conductive fluororesin material and maintained at ground potential. Therefore, static electricity charged on the bellows portion 30A or a member in its vicinity is removed by the grounding portion 60A via the pin member 70Ag, which is formed of a conductive fluororesin material. In this way, the coupling device 100A of this embodiment can adequately protect the bellows portion 30A, in which the expandable and contractible internal flow channel 31A is formed, from dielectric breakdown.

[0074] [Second variation] In the first modified example, a pin member 70Ag made of a conductive fluororesin material is inserted into a through hole formed in the annular member 70Af of the pipe connection part 70A and brought into contact with the liquid flowing through the supply channel 71A. However, other embodiments are also possible. For example, the connecting device 100A of the second modified example shown in Figure 8 may also be used.

[0075] The second modified coupling device 100A has a pin member 32A inserted into a through hole formed in the bellows portion 30A. The pin member 32A is a member inserted into the through hole formed in the bellows portion 30A and is made of a conductive fluororesin material in which a conductive material is dispersed. The tip of the pin member 32A is in contact with the liquid flowing through the internal channel 31A when inserted into the through hole. The pin member 32A is positioned in contact with the back cover 10Af, which is made of a conductive metal material (for example, stainless steel).

[0076] The bellows portion 30A may have only one through-hole for inserting the pin member 32A, as shown in Figure 8, or it may have multiple through-holes along the circumferential direction around the axis Y (for example, three holes at 120-degree intervals). If the bellows portion 30A has multiple through-holes, a pin member 32A is inserted into each through-hole. Each pin member 32A is installed to be electrically connected to the ground portion 60A.

[0077] The grounding portion 60A is a component that is arranged to be electrically connected to the back cover 10Af and is maintained at ground potential by being connected to the grounding cable E. The grounding portion 60A has a mounting screw 66A made of a conductive material (for example, stainless steel). The mounting screw 66A is fastened to a fastening hole formed in the back cover 10Af. The pin member 32A is positioned in contact with the back cover 10Af and is maintained at ground potential.

[0078] In this modified coupling device 100A, the pin member (flow channel) 70Ag is electrically connected to the grounding portion 60A, which is formed of a conductive fluororesin material and maintained at ground potential. Therefore, static electricity charged on the bellows portion 30A or a member in its vicinity is removed by the grounding portion 60A via the pin member 70Ag, which is formed of a conductive fluororesin material. In this way, the coupling device 100A of this embodiment can adequately protect the bellows portion 30A, in which the expandable and contractible internal flow channel 31A is formed, from dielectric breakdown.

[0079] [Third variation] In the second modified example, a pin member 32A made of a conductive fluororesin material is inserted into a through hole formed in the bellows portion 30A and brought into contact with the liquid flowing through the internal channel 31A, but other embodiments are also possible. For example, as shown in Figure 9, the coupling device 100A of the third modified example may be one in which the bellows portion 30A is made of a conductive fluororesin material and is electrically connected to a ground portion 60A that is maintained at ground potential.

[0080] The third modified coupling device 100A has a bellows portion 30A formed from a conductive fluororesin material. The bellows portion 30A is positioned in contact with a back cover 10Af formed from a conductive metal material (for example, stainless steel).

[0081] The grounding portion 60A is a component that is arranged to be electrically connected to the back cover 10Af and is maintained at ground potential by being connected to the grounding cable E. The grounding portion 60A has a mounting screw 66A made of a conductive material (for example, stainless steel). The mounting screw 66A is fastened to a fastening hole formed in the back cover 10Af. The bellows portion 30A is positioned in contact with the back cover 10Af and is maintained at ground potential.

[0082] In this modified coupling device 100A, the bellows portion 30A is electrically connected to the ground portion 60A, which is formed of a conductive fluororesin material and maintained at ground potential. Therefore, static electricity charged on the bellows portion 30A or nearby components is removed by the ground portion 60A. In this way, the coupling device 100A of this embodiment can adequately protect the bellows portion 30A, in which the expandable and contractible internal flow path 31A is formed, from dielectric breakdown.

[0083] [Fourth variation] In the third modified example, the connecting device 100A is formed by making the entire bellows portion 30A from a conductive fluororesin material, but other embodiments are also possible. For example, as shown in the fourth modified example of the connecting device 100A in Figure 10, a part of the bellows portion 30A may be formed from a conductive fluororesin material, and the rest from a non-conductive fluororesin material.

[0084] As shown in Figure 10, the bellows portion 30A of the third modified example has a first member 30Aa, a second member 30Ab, and a third member 30Ac. The first member 30Aa and the second member 30Ab are each made of a non-conductive fluororesin material. On the other hand, the third member 30Ac is an annular and plate-shaped member formed around the axis Y, and is made of a conductive fluororesin material. The third member 30Ac is positioned between the first member 30Aa and the second member 30Ab such that its inner circumferential end contacts the liquid flowing through the supply channel 71A.

[0085] The grounding portion 60A is a component that is arranged to be electrically connected to the third member 30Ac and is maintained at ground potential by being connected to the grounding cable E. The grounding portion 60A has mounting screws 66A and 67A made of a conductive material (for example, stainless steel). Mounting screws 66A and 67A are fastened to fastening holes formed in the back cover 10Af. The third member 30Ac is positioned in contact with the mounting screws 67A and is maintained at ground potential via the back cover 10Af and the mounting screws 66A. [Explanation of Symbols]

[0086] 1. Liquid supply system 10,10A Housing section 11 Through holes 20,20A Valve body 30,30A Bellows section 31,31A Internal flow path 32A Pin component 40 Stopper (flow channel section) 41 Supply channel 50 Spring 60, 60A grounding 70, 70A Pipe connection section (flow channel section) 70Aa packing 70Ab conductive plate 70Ac annular member 70Ad conductive sheet 70Ae, 70Af annular member 70Ag pin component 71 Main body 71A Supply channel 72 Fastening nuts 90 fastening bolts 100, 100A coupling device 200, 200A plug device 210 Siphon tube 220 Main body 230 Valve body 300 Air supply device 300A supply piping 301A Mounting flange C Liquid storage container C1 opening C2 bottom E Grounding cable L liquid P Supply piping P1 First pressure chamber P2 Second pressure chamber S interior space X,Y axis

Claims

1. A connecting device that connects a plug device for supplying liquid and a supply pipe for supplying the liquid to a destination, A cylindrical housing portion into which the plug device is inserted at one end and the supply piping is connected at the other end, A valve body that, upon contact with the plug device inserted into the housing portion, opens to allow the liquid to flow from the plug device to the connecting device, A bellows section having an expandable and contractible internal flow path that supplies the liquid flowing in from the plug device to the supply pipe when the valve body is in the open state, The system includes a flow path section that forms a supply flow path for supplying the liquid from the internal flow path to the supply pipe, A coupling device in which either the bellows portion or the flow channel portion is formed of a conductive fluororesin material comprising a fluororesin material and a conductive material dispersed in the fluororesin material, and is electrically connected to a ground portion that is maintained at ground potential.

2. The connecting device according to claim 1, wherein the flow channel portion is formed of the conductive fluororesin material and is electrically connected to the ground portion.

3. The flow channel is formed in a cylindrical shape and fixed to the inner circumferential surface of the housing. The housing portion has a through hole that penetrates the inner circumferential surface and the outer circumferential surface toward the flow path portion. The coupling device according to claim 2, wherein the grounding portion has a conductive member that is inserted into the through hole and positioned in contact with the flow path portion.

4. The coupling device according to claim 2, wherein the flow channel portion is a plate-shaped member formed in an annular shape so as to surround the axis through which the supply flow channel extends.

5. The coupling device according to claim 1, wherein the bellows portion is formed of the conductive fluororesin material and is electrically connected to the ground portion.

6. The housing portion has a through hole that penetrates the inner circumferential surface and the outer circumferential surface toward the bellows portion. The coupling device according to claim 5, wherein the grounding portion has a conductive member that is inserted into the through hole and positioned in contact with the bellows portion.

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