Ultraviolet irradiation device

Abstract

To provide an ultraviolet irradiation device that can irradiate ultraviolet light at a desired position in the photosensitive adhesive layer when continuously manufacturing long-length laminated films. [Solution] A dispensing means for dispensing a laminated film having a substrate and a photosensitive adhesive layer provided on the substrate, A marking means for marking the laminated film unfurled by the aforementioned dispensing means, The mark attached to the laminated film is recognized, and according to the position of the recognized mark, a predetermined area of ​​the photosensitive adhesive layer is determined. An irradiation means for irradiating with ultraviolet light, A winding means for winding up the laminated film that has been irradiated with ultraviolet light, An ultraviolet irradiation device having the following features.

Description

Technical Field

[0001] The present invention relates to an ultraviolet irradiation device.

Background Art

[0002] When cutting or thinly processing a plate-shaped workpiece typified by a semiconductor wafer, an adhesive tape called a dicing tape or a grinding tape is often attached to the workpiece in order to improve the ease of handling of the workpiece. As the adhesive tape, for example, an ultraviolet curable type having an adhesive layer cured by ultraviolet rays (also called a UV tape or the like) is used.

[0003] For example, a dicing / die bonding film having an adhesive layer (2) on a support substrate (1) and a die bonding adhesive layer (3) on the adhesive layer (2), wherein the peelability at the interface between the adhesive layer (2) and the die bonding adhesive layer (3) is different between an interface (A) corresponding to a workpiece attachment portion (3a) on the die bonding adhesive layer (3) and an interface (B) corresponding to a part or all of the other portion (3b), and the peelability of the interface (A) is greater than the peelability of the interface (B), has been proposed (see Patent Document 1). In an example of the proposed technology, the adhesive layer (2) is formed of a radiation curable adhesive, and the adhesive layer (2a) corresponding to the workpiece attachment portion (3a) is irradiated with radiation (see paragraphs

[0020] and

[0035] of Patent Document 1). By doing so, the interface between the adhesive layer (2a) and the adhesive layer (3a) has a property of being easily peeled off during pickup (see paragraph

[0035] of Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] When continuously manufacturing long laminated films such as dicing and die-bonding films, it is necessary to be able to irradiate a portion of the photosensitive adhesive layer with ultraviolet light at the desired location.

[0006] The present invention aims to provide an ultraviolet irradiation device that can irradiate ultraviolet light to a desired position in the photosensitive adhesive layer when continuously manufacturing long laminated films. [Means for solving the problem]

[0007] The inventors of the present invention conducted diligent research to solve the above problems and, as a result, found that they could solve the above problems, and completed the present invention having the following gist. In other words, the present invention encompasses the following:

[0008] [1] A dispensing means for dispensing a substrate and a laminated film having a photosensitive adhesive layer provided on the substrate, A marking means for marking the laminated film unfurled by the aforementioned dispensing means, An irradiation means for recognizing the mark attached to the laminated film and irradiating a predetermined area of ​​the photosensitive adhesive layer with ultraviolet light according to the position of the recognized mark, A winding means for winding up the laminated film that has been irradiated with ultraviolet light, An ultraviolet irradiation device having the following features. [2] The ultraviolet irradiation apparatus according to [1], further comprising a storage means for accumulating the laminated film between the marking means and the irradiation means in the transport direction of the laminated film. [3] The ultraviolet irradiation apparatus according to [1] or [2], further comprising a gripping and conveying means for gripping and conveying the laminated film between the irradiation means and the winding means in the conveying direction of the laminated film. [4] The ultraviolet irradiation device according to any one of [1] to [3], wherein the irradiation means comprises an ultraviolet irradiation light source that emits ultraviolet light and an opening material provided with an opening for irradiating the predetermined area of ​​the photosensitive adhesive layer with ultraviolet light from the ultraviolet irradiation light source. [5] The irradiation means further comprises a mark recognition member that recognizes the mark, In the aforementioned opening material, a notch is provided at the edge of the opening. The mark recognition member recognizes the mark through the notch. [4] The ultraviolet irradiation device described above. [6] The irradiation means further comprises a second opening material having an opening for irradiating the ultraviolet light from the ultraviolet light source onto the predetermined area of ​​the photosensitive adhesive layer, The aforementioned opening member and the second opening member are arranged such that the opening of the aforementioned opening member and the opening of the second opening member overlap. The ultraviolet irradiation device described in [4] or [5]. [7] The ultraviolet irradiation device according to any one of [4] to [6], wherein the irradiation means further comprises a light-shielding member capable of blocking the irradiation of ultraviolet light to the predetermined area of ​​the photosensitive adhesive layer through the opening of the opening material. [8] The ultraviolet irradiation device according to [7], wherein the light-shielding member has a plate-shaped member, and rotation of the plate-shaped member with the thickness direction of the plate-shaped member as the axis of rotation enables irradiation of the photosensitive adhesive layer with ultraviolet light and light shielding. [9] Between the feeding means and the marking means in the transport direction of the laminated film, there is a first tension adjusting means for adjusting the tension of the laminated film, Between the irradiation means and the winding means in the transport direction of the laminated film, there is a second tension adjusting means for adjusting the tension of the film, The ultraviolet irradiation apparatus according to [1], further comprising the following:

[10] The ultraviolet irradiation apparatus according to any one of [1] to [9], wherein the laminated film is a dicing film.

[11] The ultraviolet irradiation device according to any one of [1] to [9], wherein the laminated film has, in this order, a base material, the photosensitive adhesive layer, a plurality of die bond layers provided separately on the photosensitive adhesive layer, and a release film.

[12] The ultraviolet irradiation device according to

[11] , wherein the marking means has a recognition member for recognizing the die bond layer, and the marking means applies a mark to the laminated film according to the position of the die bond layer recognized by the recognition member.

Effect of the Invention

[0009] According to the present invention, it is possible to provide an ultraviolet irradiation device capable of irradiating ultraviolet rays to a desired position of a photosensitive adhesive layer when continuously manufacturing a long laminated film.

Brief Description of the Drawings

[0010] [Figure 1] FIG. 1 is a schematic side view of an example of the ultraviolet irradiation device. [Figure 2] FIG. 2 is a schematic top view of the ultraviolet irradiation device of FIG. 1. [Figure 3] FIG. 3 is a schematic cross-sectional view of an example of the laminated film. [Figure 4] FIG. 4 is a top view of an example of the opening member. [Figure 5] FIG. 5 is a top view of an example of the second opening member. [Figure 6] FIG. 6 is a top view of an example of the shielding member. [Figure 7] FIG. 7 is a schematic side view of another example of the ultraviolet irradiation device. [Figure 8] FIG. 8 is a schematic top view of the ultraviolet irradiation device of FIG. 7. [Figure 9] FIG. 9 is a schematic cross-sectional view of another example of the laminated film. [Figure 10] FIG. 10 is a diagram for explaining the laminated film of FIG. 9. [Figure 11] FIG. 11 is a schematic side view of another example of the ultraviolet irradiation device.

Embodiments for Carrying Out the Invention

[0011] (Ultraviolet Irradiation Device and Ultraviolet Irradiation Method) The ultraviolet irradiation device of the present invention has a feeding means, a marking means, an irradiation means, and a winding means. The ultraviolet irradiation device may further have an accumulating means, a gripping and conveying means, a first tension adjusting means, a second tension adjusting means, a removing means, etc.

[0012] The ultraviolet irradiation method of the present invention has a feeding step, a marking step, an irradiation step, and a winding step. The ultraviolet irradiation method may further have an accumulating step, a gripping and conveying step, a first tension adjusting step, a second tension adjusting step, a removing step, etc.

[0013] <Feeding Means and Feeding Step> The feeding means is a means for feeding a laminated film. The feeding step is a step for feeding a laminated film. The laminated film has a base material and a photosensitive adhesive layer. The photosensitive adhesive layer is provided on the base material. The laminated film is, for example, a dicing film. The laminated film is, for example, a dicing / diebond film. When the laminated film is a dicing / diebond film, the laminated film further has a plurality of diebond layers and a release film. The plurality of diebond layers are provided spaced apart on the photosensitive adhesive layer. The plurality of diebond layers are, for example, arranged side by side in the longitudinal direction (transport direction) in the laminated film. Details of the laminated film will be described later.

[0014] By attaching a mark to the laminated film, recognizing the mark, and irradiating ultraviolet rays to the photosensitive adhesive layer according to the position of the mark, ultraviolet rays can be irradiated to a desired position of the photosensitive adhesive layer.

[0015] The feeding mechanism includes, for example, a feeding roll for feeding out the laminated film and a drive device (for example, a motor) for rotating the feeding roll. In the feeding process, for example, the laminated film is fed out from the feeding roll.

[0016] There are no particular restrictions on the diameter of the feed roll, but 70mm to 80mm is preferred. The feed roll is, for example, an air shaft. The air shaft has a roll body and lugs (claws) arranged on the outer surface of the roll body. When air is injected into the air shaft, the lugs protrude from the outer surface. The protruding lugs press against the inner surface of the core of the film roll. In this way, the film roll is fixed in place.

[0017] The feeding mechanism may include a film break detection member that detects when the laminated film has run out on the feeding roll and when the entire length of the laminated film has been fed out from the feeding roll. The film break detection member is not particularly limited and can be, for example, a sensor (e.g., an optical sensor). The feeding mechanism may include a rotation suppression member that suppresses the rotation of the feeding roll. Examples of rotation suppression members include powder brakes, electromagnetic brakes, and disc brakes. The feeding mechanism may include a tension adjustment member for adjusting the tension of the laminated film fed from the feeding roll. An example of a tension adjustment member is a tension adjustment roll that is movable in a direction perpendicular to the rotation axis.

[0018] <Means for applying marks, and process for applying marks> The marking means is a means for applying a mark to the laminated film that has been fed out by the feeding means. The marking process involves applying marks to the laminated film that has been fed out in the feeding process.

[0019] The mark may be applied to the substrate in the laminated film, to the photosensitive adhesive layer in the laminated film, or to the release film in the laminated film.

[0020] The marking means includes, for example, an ink head. The marking means, for example, ejects ink from the ink head and applies the ink to the laminated film. In this way, a mark is made on the laminated film. The marking process includes, for example, dispensing ink from an ink head to apply the ink to the laminated film. In this way, the laminated film is marked.

[0021] The number of ink heads in the marking means is not particularly limited. For example, the marking means may have multiple ink heads, each of which ejects ink to coat the laminated film.

[0022] The marking means, for example, applies marks to the laminated film at predetermined intervals.

[0023] If the laminated film is a dicing die-bond film, the marking means may have a recognition member that recognizes the die-bond layer. In that case, the marking means marks the laminated film according to the position of the die-bond layer recognized by the recognition member. If the laminated film is a dicing die-bond film, the marking step may include a recognition process to recognize the die-bond layer. In that case, the marking step marks the laminated film according to the position of the die-bond layer recognized by the recognition process. The recognition component recognizes, for example, the position of the edge of the die bond layer. Examples of recognition components include cameras.

[0024] The marking means may include a drying member for drying the marks applied to the laminated film. The marking process may include a drying process to dry the marks applied to the laminated film. Examples of drying components include blowers. One example of a drying process is air blowing. There are no particular restrictions on the temperature of the air used in air blowing; for example, it can range from 20°C to 40°C. By applying air to the marks on the laminated film to dry the marks, the irradiation means is not exposed to the solvent contained in the marks, which prevents the ultraviolet irradiation light source from degrading.

[0025] <Irradiation means and irradiation process> The irradiation means recognizes a mark attached to the laminated film and irradiates a predetermined area of ​​the photosensitive adhesive layer with ultraviolet light according to the position of the recognized mark. The irradiation process involves recognizing a mark attached to the laminated film and irradiating a predetermined area of ​​the photosensitive adhesive layer with ultraviolet light according to the position of the recognized mark.

[0026] An example of a designated region is a circular region. If the designated area is a circular area, its diameter can be, for example, 200 mm to 350 mm. When the laminated film is a dicing film or a dicing-die bond film, the predetermined region is related to the size of the wafer and is a region slightly larger than the size of the wafer. In this respect, the predetermined region may be, for example, a circular region with a diameter of 205 mm to 220 mm to correspond to an 8-inch wafer, or a circular region with a diameter of 305 mm to 320 mm to correspond to a 12-inch wafer.

[0027] The irradiation means includes, for example, an ultraviolet irradiation light source. Examples of ultraviolet irradiation light sources include high-pressure mercury lamps, low-pressure mercury lamps, halogen lamps, and the like.

[0028] The illumination means includes, for example, a mark recognition member that recognizes a mark. An example of a mark recognition member is a camera. The irradiation process includes, for example, a mark recognition process for recognizing a mark. The irradiation means, for example, irradiates a predetermined area of ​​the photosensitive adhesive layer with ultraviolet light according to the position of the mark recognized by the mark recognition member. In the irradiation process, for example, ultraviolet light is irradiated onto a predetermined area of ​​the photosensitive adhesive layer according to the position of the mark recognized by the mark recognition process.

[0029] The irradiation means includes, for example, an aperture material. The aperture material acts as a mask. The aperture material is provided with an opening for irradiating a predetermined area of ​​the photosensitive adhesive layer with ultraviolet light from an ultraviolet irradiation light source. The shape of the opening in the aperture material is, for example, circular. The opening may also have a notch. The opening material is provided, for example, between the ultraviolet light source and the laminated film. The mark recognition member preferably recognizes the mark through a notch in the opening. This allows for mark recognition with high positional accuracy.

[0030] The irradiation means includes, for example, a second aperture material. The second aperture material acts as a mask. The second aperture material is provided with an opening for irradiating a predetermined area of ​​the photosensitive adhesive layer with ultraviolet light from an ultraviolet irradiation light source. The shape of the opening in the second aperture material is, for example, circular. If the irradiation means has an aperture member and a second aperture member, the aperture member and the second aperture member are arranged such that the opening of the aperture member and the opening of the second aperture member overlap. The second opening material may have a second opening adjacent to the opening. The second opening material is, for example, circular, and the size of its opening is, for example, 3 mm to 10 mm in diameter. The mark recognition member preferably recognizes the mark through the second opening. The mark recognition member can recognize the mark with higher positional accuracy by recognizing the mark through the notch and the second opening.

[0031] The irradiation means includes, for example, a light-shielding member capable of blocking the irradiation of ultraviolet light to a predetermined area of ​​the photosensitive adhesive layer through an opening in the opening material. The light-shielding member includes, for example, a plate-shaped member. The light-shielding member enables irradiation of ultraviolet light to a predetermined area of ​​the photosensitive adhesive layer and blocking of light by rotating the plate-shaped member with the thickness direction of the plate-shaped member as the axis of rotation. Rotating the plate-shaped member allows for a faster movement speed of the plate-shaped member compared to sliding the plate-shaped member, thus enabling faster switching between irradiation (passage of ultraviolet light) and shielding.

[0032] The irradiation means may have a cooling element. Cooling may be water-cooled or air-cooled using a fan. The cooling element cools the parts of the irradiation means that become hot.

[0033] For example, the amount of ultraviolet radiation irradiated onto a predetermined area of ​​the photosensitive adhesive layer is 1500 J / m². 2 ~4000 J / m 2 These are some examples.

[0034] <Winding mechanism and winding process> The winding means is a means for winding up a laminated film that has been irradiated with ultraviolet light. The winding process involves winding up the laminated film that has been irradiated with ultraviolet light.

[0035] The winding means includes, for example, a winding roll. The winding process is performed, for example, by winding the laminated film onto a winding roll.

[0036] There are no particular restrictions on the diameter of the winding roll, but 70mm to 80mm is preferred. The winding roll is, for example, an air shaft.

[0037] The winding mechanism may include a rotation-restricting member that suppresses the rotation of the winding roll. Examples of rotation-restricting members include powder brakes, electromagnetic brakes, and disc brakes. The winding roll may be controlled by a speed-controlled motor that allows for changes in rotational speed. The winding roll may be equipped with a powder clutch for controlling the tension of the laminated film being wound.

[0038] <Storage means and storage process> The storage means is a means for storing the laminated film. The ultraviolet irradiation device has the storage means between the marking means and the irradiation means in the transport direction of the laminated film. The accumulation process is the process of accumulating the laminated film. The accumulation process takes place between the marking process and the irradiation process.

[0039] The means of storage is what is known as an accumulator. By having a storage means in the ultraviolet irradiation device, the transport of the laminated film located on the irradiation means can be stopped while ultraviolet light is irradiated onto a predetermined area of ​​the photosensitive adhesive layer. This allows the photosensitive adhesive layer to be irradiated with ultraviolet light at a desired dose. By including a storage step in the ultraviolet irradiation step, the transport of the laminated film subjected to the irradiation step can be stopped while ultraviolet light is irradiated onto a predetermined area of ​​the photosensitive adhesive layer. This allows the photosensitive adhesive layer to be irradiated with ultraviolet light at a desired intensity.

[0040] The storage means includes, for example, two guide rolls and a movable roll positioned between the two guide rolls in the direction of conveying the laminated film. The laminated film is stored as the movable roll moves. For example, the two guide rolls contact the laminated film on the upper side of their outer circumferential surfaces and on the side of the movable roll, while the movable roll contacts the laminated film on the lower half of its outer circumferential surface. As the movable roll moves downward, the laminated film is stored in the storage means. The diameter of the guide roll and the movable roll is not particularly limited, but for example, it is 50 mm to 150 mm, and 90 mm to 110 mm is preferred.

[0041] <Gripping and conveying means and gripping and conveying process> The gripping and conveying means is a means for gripping and conveying the laminated film. The ultraviolet irradiation device has the gripping and conveying means between the irradiation means and the winding means in the conveying direction of the laminated film. The gripping and conveying process involves gripping and conveying the laminated film. This process takes place between the irradiation process and the winding process.

[0042] The gripping and conveying mechanism is a so-called grip-feed mechanism. The gripping and transporting means includes, for example, a fixed grip and a movable grip. The fixed grip is immovable. The movable grip is movable in the transporting direction. The material of the grip portion that comes into contact with the laminated film in the fixed grip and the movable grip is, for example, silicone rubber.

[0043] Conveying using a gripping and conveying mechanism offers superior conveying accuracy compared to conveying using rollers. Therefore, by having a gripping and transporting means in the ultraviolet irradiation device, when irradiating a predetermined area of ​​the photosensitive adhesive layer with ultraviolet light, it is possible to irradiate the desired area with high positional accuracy. Furthermore, because the ultraviolet irradiation method includes a gripping and transporting step, when irradiating a predetermined area of ​​the photosensitive adhesive layer with ultraviolet light, it is possible to irradiate the desired area with high positional accuracy.

[0044] <First tension adjustment means and first tension adjustment process> The first tension adjustment means is a means for adjusting the tension of the laminated film. The ultraviolet irradiation device has the first tension adjustment means between the feeding means and the marking means in the transport direction of the laminated film. The first tension adjustment step is a step in which the tension of the laminated film is adjusted. The first tension adjustment step is performed between the feeding step and the marking step.

[0045] The tension of the laminated film is adjusted, for example, by a dancer. The dancer has, for example, two guide rolls and a movable roll positioned between the two guide rolls in the direction of conveying the laminated film. The tension of the laminated film is adjusted by the movable roll applying pressure to it. For example, the two guide rolls contact the laminated film on the upper side of their outer circumferential surfaces and on the side of the movable roll, and the movable roll contacts the laminated film on the lower half of its outer circumferential surface. In this process, the tension of the laminated film is adjusted by the movable roll applying downward pressure to it. The pressure on the laminated film by the movable roll can be applied, for example, by the weight of the movable roll with its weight adjusted. Other methods of applying pressure include, for example, applying pressure by air pressure from an air cylinder using a movable roll connected to an air cylinder, or applying pressure by the reaction force of a spring using a movable roll connected to a spring. In addition, the movable roll may be corrected to a neutral position by changing the feed speed of the feed mechanism in accordance with the movement of the movable roll (for example, vertical movement). The diameter of the guide roll and the movable roll is not particularly limited, but for example, it is 50 mm to 150 mm, and 90 mm to 110 mm is preferred.

[0046] <Second tension adjustment means and second tension adjustment process> The second tension adjustment means is a means for adjusting the tension of the laminated film. The ultraviolet irradiation device has the second tension adjustment means between the irradiation means and the winding means in the transport direction of the laminated film. The second tension adjustment step is a step in which the tension of the laminated film is adjusted. The second tension adjustment step is performed between the irradiation step and the winding step.

[0047] The tension of the laminated film is adjusted, for example, by a dancer. The dancer has, for example, two guide rolls and a movable roll positioned between the two guide rolls in the direction of conveying the laminated film. The tension of the laminated film is adjusted by the movable roll applying pressure to it. For example, the two guide rolls contact the laminated film on the upper side of their outer circumferential surfaces and on the side of the movable roll, and the movable roll contacts the laminated film on the lower half of its outer circumferential surface. In this process, the tension of the laminated film is adjusted by the movable roll applying downward pressure to it. The pressure on the laminated film by the movable roll can be applied, for example, by the weight of the movable roll with its weight adjusted. Other methods of applying pressure include, for example, applying pressure by air pressure from an air cylinder using a movable roll connected to an air cylinder, or applying pressure by the reaction force of a spring using a movable roll connected to a spring. In addition, the movable roll may be corrected to a neutral position by changing the winding speed of the winding means in accordance with the movement of the movable roll (for example, vertical movement). The diameter of the guide roll and the movable roll is not particularly limited, but for example, it is 50 mm to 150 mm, and 90 mm to 110 mm is preferred.

[0048] <Removal means and removal process> The removal means is a method for removing unwanted portions from the laminated film before the laminated film, which has been irradiated with ultraviolet light, is wound up by the winding means. The removal process involves removing unwanted portions from the laminated film before it is wound up in the winding process, after it has been irradiated with ultraviolet light.

[0049] The removal means includes, for example, a separation roll and a winding roll. The removal process is carried out, for example, by separating the unwanted portion from the laminated film using a separation roll and winding it up using a winding roll. Unnecessary areas include, for example, the edges of the laminated film in the width direction.

[0050] The separation roll and the winding roll may each be controlled by a speed control motor capable of changing their rotational speed. The separation roll and winding roll may be equipped with a powder clutch for controlling the tension of the unwanted film being wound.

[0051] The diameter of the separation roll is not particularly limited, but 25mm to 50mm is preferred. There are no particular restrictions on the diameter of the winding roll, but 70mm to 80mm is preferred. The winding roll is, for example, an air shaft.

[0052] <Other means and other processes> Other means include, for example, connecting means and end position adjustment means. Other processes include, for example, joining processes and end position adjustment processes.

[0053] <<Connecting means and connecting process>> The bonding means is a means of joining two laminated films together. An example of a bonding means is a support base that supports the two laminated films. The bonding process is the process of joining two laminated films together. This bonding process is carried out, for example, by placing the two laminated films on a support stand and joining them together on the support stand. The joining of the two laminated films can be done by machine or by a person. A rubber sheet may be provided on the surface of the support base to prevent the laminated film from slipping. For example, the ultraviolet irradiation device has a bonding means between the feeding means and the first tension adjustment means in the transport direction of the laminated film. For example, in an ultraviolet irradiation method, the bonding process is performed between the feeding process and the first tension adjustment process. For example, when all of the roll-shaped laminated film (first laminated film) dispensed from the dispensing roll has been dispensed and it is necessary to replace the laminated film, another roll-shaped laminated film (second laminated film) is attached to the dispensing roll and dispensed. Then, the end of the first laminated film and the beginning of the second laminated film are connected on a support stand. In this way, the laminated film can be replenished without stopping the ultraviolet irradiation device.

[0054] <<End position adjustment means and end position adjustment process>> The edge position adjustment means is a means for adjusting the position of the edges of the laminated film. The edge position adjustment means includes, for example, an edge position detection member. Examples of the edge position detection member include an ultrasonic sensor and an optical sensor having a light emitter and a light receiver. The edge of the laminated film refers to the edge in the width direction of the laminated film. The edge position adjustment process is a process of adjusting the position of the edges of the laminated film. The end position adjustment process is performed, for example, between the first tension adjustment process and the marking process. The end position adjustment process is performed, for example, between the second tension adjustment process and the winding process. For example, the end of the laminated film is detected by an end position detection member, and the position of the end of the laminated film is adjusted. The position of the end of the laminated film is adjusted, for example, by moving the feed roll or winding roll in the rotational axis direction.

[0055] <Laminated film> This section describes a laminated film used in an ultraviolet irradiation device. An example of a laminated film 1000 is a laminated film in which a substrate 1022 and a photosensitive adhesive layer 1021 are laminated together, as shown in Figure 3. An example of such a laminated film is a dicing film. Another example of the laminated film 1000 is a laminated film having, in this order, a release film 1011, a plurality of die bond layers 1012 spaced apart on the release film 1011, a photosensitive adhesive layer 1021, and a substrate 1022, as shown in Figures 9 and 10. This laminated film is a dicing die bond film.

[0056] The base material 1022 serves as the strength base for the laminated film. Examples of materials for this base material include low-density polyethylene, linear polyethylene, medium-density polyethylene, high-density polyethylene, ultra-low-density polyethylene, random copolymer polypropylene, block copolymer polypropylene, homopolypropylene, polybutene, polymethylpentene and other polyolefins, ethylene-vinyl acetate copolymer, ionomer resin, ethylene-(meth)acrylic acid copolymer, ethylene-(meth)acrylic acid ester (random, alternating) copolymer, ethylene-butene copolymer, ethylene-hexene copolymer, polyurethane, polyester such as polyethylene terephthalate and polyethylene naphthalate, polycarbonate, polyimide, polyetheretherketone, polyimide, polyetherimide, polyamide, fully aromatic polyamide, polyphenyl sulfide, aramid, glass, glass cloth, fluororesin, polyvinyl chloride, polyvinylidene chloride, cellulose resin, silicone resin, and metal (foil). Furthermore, the material for the base material 1022 may be a polymer such as a cross-linked resin. The plastic film may be used in an unstretched state, or it may be used after being uniaxially or biaxially stretched as needed. If a resin sheet that has been given heat-shrinkability by stretching or the like is used, the adhesive area between the photosensitive adhesive layer 1021 and the die bond layer can be reduced by heat-shrinking the base material after dicing, thereby facilitating the recovery of the chip-shaped workpiece. The surface of the substrate 1022 can be subjected to conventional surface treatments, such as chemical or physical treatments like chromic acid treatment, ozone exposure, flame exposure, high-voltage electric shock exposure, or ionizing radiation treatment, or a coating treatment with an undercoat (for example, an adhesive substance described later), in order to improve adhesion and retention with adjacent layers. The base material 1022 can be selected from the same or different types as appropriate, and a blend of several types can be used if necessary. In addition, to impart antistatic properties to the base material 1022, a vapor-deposited layer of a conductive material with a thickness of about 30 to 500 Å, consisting of metal, alloy, or oxides thereof, can be provided on the base material. The base material 1022 may be a single layer or a multi-layer of two or more types. It is preferable that the base material 1022 transmits ultraviolet light. The thickness of the substrate 1022 is not particularly limited and can be determined as appropriate, but is generally between 5 μm and 200 μm.

[0057] The adhesive used to form the photosensitive adhesive layer 1021 is not particularly limited as long as it is photosensitive to ultraviolet light. The photosensitive adhesive layer 1021 can be easily reduced in adhesive strength by increasing the degree of crosslinking through irradiation with ultraviolet light, for example. Therefore, by curing the photosensitive adhesive layer 1021 in accordance with the workpiece attachment area, a photosensitive adhesive layer 1021 with significantly reduced adhesive strength can be easily formed. Since the die bond layer is attached to the cured, reduced-adhesion photosensitive adhesive layer 1021, the interface between the photosensitive adhesive layer 1021 and the die bond layer has the property of easily peeling off during pickup. On the other hand, the parts that have not been irradiated with ultraviolet light have sufficient adhesive strength. The thickness of the photosensitive adhesive layer 1021 is not particularly limited, but from the viewpoint of preventing chipping of the chip cut surface and ensuring the fixation and retention of the die bond layer, it is preferably 1 μm to 50 μm, more preferably 2 μm to 30 μm, and particularly preferably 5 μm to 25 μm.

[0058] The die bond layer 1012 functions as an adhesive layer that adheres closely to the workpiece (such as a semiconductor wafer) when the workpiece is diced into a chip shape, and also as an adhesive layer that fixes the chip-shaped workpiece (such as a semiconductor chip) to the semiconductor element (substrate, chip, etc.) when mounting the resulting chip-shaped workpiece. The die bond layer 1012 can be formed by processing a die bond film into a predetermined shape (e.g., circular). The die bond film can be formed using a conventional die adhesive. A die adhesive that can be formed into a sheet is preferred. Specific die adhesives that can be used include, for example, die adhesives made of thermoplastic resins or thermosetting resins. The die adhesive can be used alone or in combination of two or more types. Furthermore, the die bond film is preferably adhesive to workpieces such as semiconductor wafers or dicing rings at temperatures below 70°C. Even more preferably, it is adhesive at room temperature. Examples of thermoplastic resins (thermoplastic die adhesives) used as die adhesives include saturated polyester resins, thermoplastic polyurethane resins, amide resins (nylon resins), and imide resins. Examples of thermosetting resins (thermosetting die adhesives) include epoxy resins, unsaturated polyester resins, thermosetting acrylic resins, and phenolic resins. For thermosetting resins, desolvated, sheet-formed, and B-staged thermosetting resins are preferred. Mixtures of these thermosetting resins and thermoplastic resins can also be used in a B-staged state. Furthermore, in this invention, resins with high glass transition temperatures, such as silicone-based, rubber-based, urethane-based, imide-based, and acrylic-based resins, can also be used as die adhesives. The thickness of the die bond layer 1012 is not particularly limited, but for example, it is 5 μm or more and 100 μm or less, preferably 10 μm or more and 50 μm or less.

[0059] The release film 1011 functions as a protective material that protects the die bond layer 1012 until it is ready for use. The release film 1011 also plays a supporting role in the manufacturing process of the dicing die bond film. The release film 1011 is usually peeled off when a workpiece is attached to the die bond layer of the dicing die bond film. Examples of release film 1011 include polyethylene, polypropylene, and plastic films surface-coated with release agents such as fluorine-based release agents and long-chain alkyl acrylate-based release agents. The thickness of the release film 1011 is not particularly limited, but is, for example, 5 μm or more and 100 μm or less, preferably 10 μm or more and 50 μm or less.

[0060] <Embodiment of UV irradiation device> An embodiment of the ultraviolet irradiation device will be described with reference to the diagram. Furthermore, while describing an embodiment of the ultraviolet irradiation device, the method of ultraviolet irradiation will also be explained. The ultraviolet irradiation device 1 shown in Figure 1 includes a feeding means 2, a marking means 3, an irradiation means 4, a winding means 5, a storage means 6, a gripping and transporting means 7, a first tension adjustment means 8, and a second tension adjustment means 9. Furthermore, the ultraviolet irradiation device 1 includes end position adjustment members 101 and 102 and a support base 103. In the ultraviolet irradiation device 1 shown in Figure 1, the laminated film is transported in the direction of the solid arrow. The tip of the arrow is considered the downstream side, and the base of the arrow is considered the upstream side. Figure 1 is a side view. Note that the details of the laminated film structure are omitted in Figure 1. Figure 2 is a top view of the ultraviolet irradiation device 1 shown in Figure 1. Note that in Figure 2, the feeding mechanism 2, the winding mechanism 5, the first tension adjustment mechanism 8, the second tension adjustment mechanism 9, the end position adjustment members 101 and 102, and the support base 103 are omitted. Also, in Figure 2, the ultraviolet irradiation light source 41 and the plate-shaped member 45 of the irradiation mechanism 4 shown in Figure 1 are omitted. Figure 3 shows the laminated film used in the ultraviolet irradiation device 1 shown in Figure 1. Figure 3 is a cross-sectional view of the laminated film 1000. The laminated film 1000 has a base material 1022 and a photosensitive adhesive layer 1021.

[0061] The feeding mechanism 2 has a feeding roll 21. The feeding roll 21 is rotatable. The feeding roll 21 is rotated by, for example, a drive device (e.g., a motor; not shown). When irradiating the laminated film with ultraviolet light, a roll of laminated film 1000 wound on a cylindrical core is mounted on the feeding roll 21. Specifically, the feeding roll 21, which is an air shaft, is inserted into the cylindrical core on which the laminated film 1000 is wound, and a lug protrudes due to the injection of air. The protruding lug presses against the inner surface of the core, thereby fixing the roll of laminated film 1000 in place. The marking means 3 has ink heads 31 and 32. The marking means 3 dispenses ink from the ink heads 31 and 32, respectively, and applies the ink to the laminated film 1000. In this way, a mark is placed on the laminated film 1000. Note that there may be only one ink head. The irradiation means 4 recognizes a mark attached to the laminated film 1000 and irradiates a predetermined area of ​​the photosensitive adhesive layer 1021 with ultraviolet light according to the position of the recognized mark. The irradiation means 4 includes an ultraviolet irradiation light source 41, an opening material 42, a mark recognition member 43, a second opening material 44, and a plate-shaped member 45. Figure 4 shows a top view of the opening material 42. As shown in Figure 4, the opening material 42 is provided with an opening 42A for irradiating a predetermined area of ​​the photosensitive adhesive layer 1021 with ultraviolet light from the ultraviolet irradiation light source 41. The opening 42A of the opening material 42 is provided with a notch 42B. Note that in Figure 2, the notch hidden behind the mark recognition member 43 is shown with a dashed line. Figure 5 shows a top view of the second opening material 44. As shown in Figure 5, the second opening material 44 is provided with an opening 44A for irradiating a predetermined area of ​​the photosensitive adhesive layer 1021 with ultraviolet light from the ultraviolet irradiation light source 41. The second opening member 44 has a second opening 44B near the opening 44A. The opening member 42 and the second opening member 44 are arranged so that the opening 42A of the opening member 42 and the opening 44A of the second opening member 44 overlap. The mark recognition member 43 recognizes the mark through the notch 42B and the second opening 44B. Figure 6 shows a top view of the plate-shaped member 45. To explain the switching between illumination and shielding, the opening 42A of the opening member 42 is shown as a dashed line in Figure 6. The plate-shaped member 45 is cross-shaped, as shown in Figure 6. There is a rotation axis 45A at the center of the plate-shaped member 45. Irradiation and shielding can be switched by rotating the plate-shaped member 45 with the thickness direction of the plate-shaped member 45 as the rotation axis. The winding mechanism 5 has a winding roll 51. The winding roll 51 is rotatable. The winding roll 51 is rotated by, for example, a drive device (e.g., a motor; not shown). The storage means 6 includes two guide rolls 61 and 62, and a movable roll 63 positioned between the two guide rolls 61 and 62 in the transport direction of the laminated film 1000. The laminated film 1000 is stored as the movable roll 63 moves. The gripping and transporting means 7 has a fixed grip 71 and a movable grip 72. The fixed grip 71 is immovable. The movable grip 72 is movable in the transporting direction. The first tension adjustment means 8 includes two guide rolls 81 and 82, and a movable roll 83 positioned between the two guide rolls 81 and 82 in the transport direction of the laminated film 1000. The tension of the laminated film 1000 is adjusted by the movable roll 83 applying pressure to the laminated film 1000. The second tension adjustment means 9 includes two guide rolls 91 and 92, and a movable roll 93 positioned between the two guide rolls 91 and 92 in the transport direction of the laminated film 1000. The tension of the laminated film 1000 is adjusted by the movable roll 93 applying pressure to the laminated film 1000.

[0062] The materials of the dispensing roll 21, winding roll 51, guide rolls 61, 62, 81, 82, 91, 92, and movable rolls 63, 83, 93 are not particularly limited, but for example, stainless steel (SUS) is used. These rolls are typically cylindrical in shape, and their length (the length in the width direction of the laminated film 1000) is usually longer than the width of the laminated film 1000.

[0063] The support base 103 is used when joining the two laminated films 1000 together. The end position adjustment members 101 and 102 are used to adjust the position of the ends of the laminated film 1000. The end position adjustment members 101 and 102 are ultrasonic sensors.

[0064] The ultraviolet irradiation method using the ultraviolet irradiation device 1 shown in Figures 1 and 2 will be described below. The laminated film 1000 is fed out from the feed roll 21. A cross-sectional view of the fed laminated film 1000 is shown in Figure 3. The laminated film 1000, unwound from the feed roll 21, is sent to the marking means 3 while its tension is adjusted by the first tension adjustment means 8. The first tension adjustment means 8 adjusts the tension of the laminated film 1000 using two guide rolls 81 and 82 and a movable roll 83. Specifically, the tension of the laminated film 1000 is adjusted by the movable roll 83 applying pressure to the laminated film 1000. The marking means 3 applies ink to the laminated film 1000 by ejecting ink from the ink heads 31 and 32 and coating the laminated film 1000 with the ink. The marked laminated film 1000 moves downstream in the transport direction, passes through the storage means 6, and reaches the irradiation means 4. In the irradiation means 4, the ultraviolet irradiation light source 41 is always on, but the light-shielding member can switch between irradiating the laminated film 1000 with ultraviolet light and shielding it. When the marked laminated film 1000 reaches the irradiation means 4, the mark recognition member 43 recognizes the mark. Then, the storage means 6 stores the laminated film 1000 so that the transport of the laminated film 1000 located at the irradiation means 4 stops. Specifically, the movable roll 63 moves downward to store the laminated film 1000. On the other hand, the fixed grip 71 of the gripping transport means 7 holds the laminated film 1000. This stops the transport of the laminated film 1000 located at the irradiation means 4. Until the transport of the laminated film 1000 stops, a part of the plate-shaped member 45 is positioned in the path of the ultraviolet light, blocking the path of the ultraviolet light. Then, the plate-shaped member 45 rotates, opening the path of the ultraviolet light, and the laminated film 1000 is irradiated with ultraviolet light from the ultraviolet irradiation light source 41. When the required amount of ultraviolet light has been irradiated, the plate-shaped member 45 rotates, and a part of the plate-shaped member 45 is positioned in the path of the ultraviolet light, blocking the path of the ultraviolet light. By doing so, the irradiation of a predetermined area of ​​the photosensitive adhesive layer 1021 of the laminated film 1000 with ultraviolet light is completed. When the irradiation of a predetermined area of ​​the photosensitive adhesive layer 1021 of the laminated film 1000 with ultraviolet light is completed, the accumulation of the laminated film 1000 by the accumulation means 6 ends, and the fixed grip 71 of the gripping and transporting means 7 stops gripping the laminated film 1000. Then, the movable grip 72 of the gripping and transporting means 7 grips the laminated film 1000, and the movable grip 72 moves downstream in the transport direction. As a result, the laminated film 1000 located at the irradiation means 4, which had stopped moving, resumes moving. Each time a marked laminated film 1000 reaches the irradiation means 4, the above steps—stopping the transport of the laminated film 1000, irradiating a predetermined area of ​​the photosensitive adhesive layer 1021 of the laminated film 1000 with ultraviolet light, and restarting the transport of the laminated film 1000 located at the irradiation means 4—are repeated as a series of steps. The laminated film 1000, having resumed movement, is sent to the winding means 5 while its tension is adjusted by the second tension adjustment means 9. The second tension adjustment means 9 adjusts the tension of the laminated film 1000 using two guide rolls 91 and 92 and a movable roll 93. Specifically, the tension of the laminated film 1000 is adjusted by the movable roll 93 applying pressure to the laminated film 1000. The laminated film 1000, wound up by the winding roll 51 of the winding means 5, becomes a roll.

[0065] Other embodiments of the ultraviolet irradiation device will be described with reference to the diagrams. Furthermore, while describing an embodiment of the ultraviolet irradiation device, the method of ultraviolet irradiation will also be explained. The ultraviolet irradiation device 1 shown in Figure 7 includes a feeding means 2, a marking means 3, an irradiation means 4, a winding means 5, a storage means 6, a gripping and transporting means 7, a first tension adjustment means 8, and a second tension adjustment means 9. Furthermore, the ultraviolet irradiation device 1 includes end position adjustment members 101 and 102 and a support base 103. In the ultraviolet irradiation device 1 shown in Figure 7, the laminated film is transported in the direction of the solid arrow. The tip of the arrow is considered the downstream side, and the base of the arrow is considered the upstream side. Figure 7 is a side view. Note that the details of the laminated film structure are omitted in Figure 7. Figure 8 is a top view of the ultraviolet irradiation device 1 shown in Figure 7. Note that in Figure 8, the feeding mechanism 2, winding mechanism 5, first tension adjustment mechanism 8, second tension adjustment mechanism 9, end position adjustment members 101 and 102, and support base 103 are omitted. Also, in Figure 8, the ultraviolet irradiation light source 41 and plate-shaped member 45 of the irradiation mechanism 4 shown in Figure 7 are omitted. Figures 9 and 10 show the laminated films used in the ultraviolet irradiation device 1 shown in Figure 7. Figure 9 is a cross-sectional view of the laminated film 1000. Figure 10 is a top view of the laminated film 1000 shown in Figure 9. However, for the sake of clarity, the photosensitive adhesive layer 1021 and the substrate 1022 are not shown in Figure 10. Note that only one die bond layer 1012 is shown in Figure 9, but three die bond layers 1012 are shown in Figure 10. The laminated film 1000 shown in Figure 9 is a laminated film having, in this order, a release film 1011, a plurality of die bond layers 1012 spaced apart on the release film 1011, a photosensitive adhesive layer 1021, and a substrate 1022. This laminated film is a dicing die bond film.

[0066] In the ultraviolet irradiation device 1 shown in Figure 7, the configuration of the dispensing means 2, irradiation means 4, winding means 5, storage means 6, gripping and transporting means 7, first tension adjustment means 8, second tension adjustment means 9, end position adjustment members 101, 102, and support base 103 is the same as that of the ultraviolet irradiation device 1 shown in Figure 1. On the other hand, in the ultraviolet irradiation device 1 shown in Figure 7, the marking means 3 has a recognition member 33 that recognizes the position of the end of the die bond layer, in addition to the ink heads 31 and 32. The ink heads 31 and 31 mark the laminated film 1000 according to the position of the die bond layer 1012 recognized by the recognition member 33.

[0067] The ultraviolet irradiation method using the ultraviolet irradiation device 1 shown in Figures 7 and 8 will be described below. The laminated film 1000 is fed out from the feed roll 21. A cross-sectional view of the fed laminated film 1000 is shown in Figure 9. The laminated film 1000, unwound from the feed roll 21, is sent to the marking means 3 while its tension is adjusted by the first tension adjustment means 8. The first tension adjustment means 8 adjusts the tension of the laminated film 1000 using two guide rolls 81 and 82 and a movable roll 83. Specifically, the tension of the laminated film 1000 is adjusted by the movable roll 83 applying pressure to the laminated film 1000. The recognition member 33 of the marking means 3 recognizes the position of the end of the die bond layer 1012. The ink heads 31 and 32 mark the laminated film 1000 according to the position of the die bond layer 1012 recognized by the recognition member 33. The ink head 31 marks the upstream end of the die bond layer 1012 in the transport direction or slightly upstream of the upstream end (for example, 0 mm to 3 mm away from the upstream end), and the ink head 32 marks the downstream end of the die bond layer 1012 in the transport direction or slightly downstream of the downstream end (for example, 0 mm to 3 mm away from the downstream end). The marked laminated film 1000 moves downstream in the transport direction, passes through the storage means 6, and reaches the irradiation means 4. In the irradiation means 4, the ultraviolet irradiation light source 41 is always on, but the light-shielding member can switch between irradiating the laminated film 1000 with ultraviolet light and shielding it. When the marked laminated film 1000 reaches the irradiation means 4, the mark recognition member 43 recognizes the mark. In one example, the mark is recognized by the ink head 31. Then, the storage means 6 stores the laminated film 1000 so that the transport of the laminated film 1000 located at the irradiation means 4 stops. Specifically, the movable roll 63 moves downward to store the laminated film 1000. On the other hand, the fixed grip 71 of the gripping transport means 7 holds the laminated film 1000. This stops the transport of the laminated film 1000 located at the irradiation means 4. Until the transport of the laminated film 1000 stops, a part of the plate-shaped member 45 is positioned in the path of the ultraviolet light, blocking the path of the ultraviolet light. Then, the plate-shaped member 45 rotates, the path of the ultraviolet light is opened, and the laminated film 1000 is irradiated with ultraviolet light from the ultraviolet irradiation light source 41. When the required amount of ultraviolet light is irradiated, the plate-shaped member 45 rotates, and a part of the plate-shaped member 45 is positioned in the path of the ultraviolet light, thereby blocking the path of the ultraviolet light. In this way, irradiation of a predetermined area of ​​the photosensitive adhesive layer 1021 of the laminated film 1000 with ultraviolet light ends. This predetermined area is the area that covers the die bond layer 1012. When the irradiation of a predetermined area of ​​the photosensitive adhesive layer 1021 of the laminated film 1000 with ultraviolet light is completed, the accumulation of the laminated film 1000 by the accumulation means 6 ends, and the fixed grip 71 of the gripping and transporting means 7 stops gripping the laminated film 1000. Then, the movable grip 72 of the gripping and transporting means 7 grips the laminated film 1000, and the movable grip 72 moves downstream in the transport direction. As a result, the laminated film 1000 located at the irradiation means 4, which had stopped moving, resumes moving. Each time a marked laminated film 1000 reaches the irradiation means 4, the above steps—stopping the transport of the laminated film 1000, irradiating a predetermined area of ​​the photosensitive adhesive layer 1021 of the laminated film 1000 with ultraviolet light, and restarting the transport of the laminated film 1000 located at the irradiation means 4—are repeated as a series of steps. The laminated film 1000, having resumed movement, is sent to the winding means 5 while its tension is adjusted by the second tension adjustment means 9. The second tension adjustment means 9 adjusts the tension of the laminated film 1000 using two guide rolls 91 and 92 and a movable roll 93. Specifically, the tension of the laminated film 1000 is adjusted by the movable roll 93 applying pressure to the laminated film 1000. The laminated film 1000, wound up by the winding roll 51 of the winding means 5, becomes a roll.

[0068] Other embodiments of the ultraviolet irradiation device will be described with reference to the diagrams. The ultraviolet irradiation device 1 shown in Figure 11 includes a feeding means 2, a marking means 3, an irradiation means 4, a winding means 5, a storage means 6, a gripping and transporting means 7, a first tension adjustment means 8, and a second tension adjustment means 9. Furthermore, the ultraviolet irradiation device 1 includes a removal means 110, end position adjustment members 101 and 102, and a support base 103. In the ultraviolet irradiation device 1 shown in Figure 11, the laminated film is transported in the direction of the solid arrow. The tip of the arrow is considered the downstream side, and the base of the arrow is considered the upstream side. Figure 11 is a side view. Note that the details of the laminated film structure are omitted in Figure 11.

[0069] In the ultraviolet irradiation device 1 shown in Figure 11, the configuration of the feeding means 2, marking means 3, irradiation means 4, winding means 5, storage means 6, gripping and transporting means 7, first tension adjustment means 8, second tension adjustment means 9, end position adjustment members 101, 102, and support base 103 is the same as that of the ultraviolet irradiation device 1 shown in Figure 7. On the other hand, the ultraviolet irradiation device 1 shown in Figure 11 has a removal means 110. The removal means 110 is a means for removing unwanted portions from the laminated film 1000 before the laminated film 1000, which has been irradiated with ultraviolet light, is wound up by the winding means 5. The removal means 110 has a separation roll 111 and a winding roll 112. The separation roll 111 separates the unwanted portions from the laminated film 1000, and the separated unwanted portions are wound up by the winding roll 112. [Explanation of symbols]

[0070] 1 Ultraviolet irradiation device 2. Dispensing mechanism 21 Feed Roll 3. Marking method 31 Inkheads 32 Inkheads 33 Recognition Member 4 Irradiation means 41 Ultraviolet irradiation light source 42 Opening material 42A opening 42B Notch 43 Mark Recognition Member 44. Second opening material 44A opening 44B 2nd opening 45 Plate-shaped member 5. Winding means 51 Reel Roll 6. Storage means 61 Guide Roll 62 Guide Roll 63 Movable Roll 7 Gripping and conveying means 71 Fixed Grip 72 Movable Grip 8 First tension adjustment means 81 Guide Roll 82 Guide Roll 83 Movable Roll 9 Second tension adjustment means 91 Guide Roll 92 Guide Roll 93 Movable Roll 101 End position adjustment member 102 End position adjustment member 103 Support stand 110 Removal means 111 Separation Roll 112 Reel Roll 1000 Laminated Film 1011 Release film 1012 Diebond layer 1022 Base material 1021 Photosensitive adhesive layer

Claims

1. A dispensing means for dispensing a laminated film having a substrate and a photosensitive adhesive layer provided on the substrate, A marking means for marking the laminated film unfurled by the aforementioned dispensing means, An irradiation means for recognizing the mark attached to the laminated film and irradiating a predetermined area of ​​the photosensitive adhesive layer with ultraviolet light according to the position of the recognized mark, A winding means for winding up the laminated film that has been irradiated with ultraviolet light, An ultraviolet irradiation device having the following features.

2. The ultraviolet irradiation apparatus according to claim 1, further comprising a storage means for accumulating the laminated film between the marking means and the irradiation means in the transport direction of the laminated film.

3. The ultraviolet irradiation apparatus according to claim 1, further comprising a gripping and conveying means for gripping and conveying the laminated film between the irradiation means and the winding means in the conveying direction of the laminated film, wherein the gripping and conveying means conveys the laminated film.

4. The ultraviolet irradiation device according to claim 1, wherein the irradiation means comprises an ultraviolet irradiation light source that emits ultraviolet light, and an opening material provided with an opening for irradiating the predetermined area of ​​the photosensitive adhesive layer with ultraviolet light from the ultraviolet irradiation light source.

5. The irradiation means further includes a mark recognition member that recognizes the mark, In the aforementioned opening material, a notch is provided at the edge of the opening. The mark recognition member recognizes the mark through the notch. The ultraviolet irradiation device according to claim 4.

6. The irradiation means further comprises a second opening material having an opening for irradiating the predetermined region of the photosensitive adhesive layer with ultraviolet light from the ultraviolet irradiation light source, The aforementioned opening member and the second opening member are arranged such that the opening of the aforementioned opening member and the opening of the second opening member overlap. The ultraviolet irradiation device according to claim 4.

7. The ultraviolet irradiation device according to claim 4, wherein the irradiation means further comprises a light-shielding member capable of blocking the irradiation of ultraviolet light to the predetermined area of ​​the photosensitive adhesive layer through the opening of the opening material.

8. The ultraviolet irradiation device according to claim 7, wherein the light-shielding member has a plate-shaped member, and rotation of the plate-shaped member with the thickness direction of the plate-shaped member as the axis of rotation enables irradiation of the photosensitive adhesive layer with ultraviolet light and light shielding.

9. Between the feeding means and the marking means in the transport direction of the laminated film, there is a first tension adjusting means for adjusting the tension of the laminated film, Between the irradiation means and the winding means in the transport direction of the laminated film, there is a second tension adjusting means for adjusting the tension of the film. The ultraviolet irradiation apparatus according to claim 1, further comprising the above.

10. The ultraviolet irradiation apparatus according to claim 1, wherein the laminated film is a dicing film.

11. The ultraviolet irradiation apparatus according to claim 1, wherein the laminated film is a dicing die bond film having, in this order, the substrate, the photosensitive adhesive layer, a plurality of die bond layers spaced apart on the photosensitive adhesive layer, and a release film.

12. The ultraviolet irradiation apparatus according to claim 11, wherein the marking means has a recognition member that recognizes the die bond layer, and the marking means marks the laminated film according to the position of the die bond layer recognized by the recognition member.

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