Work support methods and work support systems

Abstract

This invention provides a work support method and a work support system that enable accurate adjustment work using virtual measuring tools. [Solution] The space containing the processing liquid nozzle 60 to be adjusted in height is scanned to obtain a spatial mesh for the processing liquid nozzle 60. A virtual measuring tool 90, which is a virtual object, is generated, and a part of it is set as a contact detection area 91. The virtual measuring tool 90 is placed in a predetermined position and the processing liquid nozzle 60 is lowered. When contact between the spatial mesh for the processing liquid nozzle 60 and the virtual measuring tool 90 is detected, the height of the processing liquid nozzle 60 is adjusted by changing the color of the contact detection area 91 of the virtual measuring tool 90 from blue to green. By using the spatial mesh as an element, contact detection between the real object, the processing liquid nozzle 60, and the virtual object, the virtual measuring tool 90, is made possible.

Description

Technical Field

[0001] The present invention relates to a work support method and a work support system for assisting adjustment work such as height adjustment using a virtual measurement tool inside industrial equipment such as a substrate processing apparatus that performs predetermined processing on a substrate. Substrates to be processed by the substrate processing apparatus include, for example, semiconductor substrates, substrates for liquid crystal display devices, substrates for flat panel displays (FPDs), substrates for optical disks, substrates for magnetic disks, or substrates for solar cells.

Background Art

[0002] In recent years, technologies related to mixed reality (MR) have been on the verge of practical application. Mixed reality is a technology that constructs a space in which the virtual world is combined with the real world by projecting virtual objects onto the real world. In such mixed reality, technologies for obtaining the dimensions and distances of real objects and virtual objects are required. For example, a technology for measuring the distance between the tip of a nozzle and a substrate inside a substrate processing apparatus is required. Patent Document 1 discloses a technology for evaluating the distance between two points in a state where a virtual object is superimposed on a real object.

[0003] Also, in work in the real space, the distance between two points is also adjusted using a jig with accurately determined dimensions. For example, a jig with a determined dimension is placed on a substrate (dummy substrate), and the interval between the substrate and the nozzle tip can be adjusted to a predetermined value by bringing the nozzle into contact with the jig. Applying the technology of mixed reality to this work and adjusting the distance between two points using a virtual jig with determined dimensions has also been studied.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, virtual objects generated in virtual space have the property of being able to pass through real objects. For example, a nozzle will pass through a virtual jig. Therefore, contact detection between a virtual jig and a real object has to rely on the operator's visual inspection, making it difficult to accurately adjust the distance between two points using the virtual jig.

[0006] This invention has been made in view of the above problems, and aims to provide a work support method and a work support system that enable accurate adjustment work using a virtual measuring tool. [Means for solving the problem]

[0007] To solve the above problems, a first aspect of the present invention is a work support method for assisting a predetermined adjustment operation using a virtual measuring tool, wherein the work support method comprises: creating a target spatial mesh, which is mesh data acquired by scanning a target part to be adjusted using a portable terminal equipped with a display unit, a communication unit, and a spatial recognition unit; generating a virtual measuring tool using the portable terminal and setting a part of the virtual measuring tool as a contact determination area; installing the virtual measuring tool at a predetermined position; moving the target part toward a target position; and detecting contact between the target spatial mesh and the contact determination area.

[0008] Furthermore, the second embodiment further comprises, in the work support method according to the first embodiment, the mobile terminal notifying the user of contact when contact between the target space mesh and the contact determination area is detected.

[0009] Furthermore, in the third embodiment, in the work support method according to the second embodiment, when the mobile terminal notifies the contact, the mobile terminal changes the color of the contact determination area when contact between the target space mesh and the contact determination area is detected.

[0010] Furthermore, the fourth embodiment is a work support method according to the third embodiment, wherein the virtual measuring tool is set to be transparent to the target space mesh, and when the mobile terminal notifies the contact, the mobile terminal changes the color of the contact determination area to a first color when contact between the target space mesh and the contact determination area is detected, and the mobile terminal changes the color of the contact determination area to a second color different from the first color when it is detected that the target space mesh has entered the contact determination area.

[0011] Furthermore, in the fifth embodiment, in the work support method according to the second embodiment, when the mobile terminal notifies the contact, the mobile terminal emits a sound when contact between the target space mesh and the contact determination area is detected.

[0012] Furthermore, the sixth embodiment is a work support method according to the first embodiment, wherein the virtual measuring tool is set to be impermeable to the target space mesh, and when the target part moves beyond the target position, the movement of the virtual measuring tool stops when the contact determination part comes into contact with the target space mesh when the virtual measuring tool is moved toward the target part.

[0013] Furthermore, in the seventh embodiment, in the work support method according to any of the first to sixth embodiments, the target portion is provided in a substrate processing apparatus that performs a predetermined process on the substrate.

[0014] Furthermore, the eighth aspect is a work support method according to the seventh aspect, wherein the target part is a nozzle that discharges processing liquid onto a substrate, and the adjustment work is adjusting the height of the nozzle.

[0015] Furthermore, the ninth aspect is a work support method according to the seventh aspect, wherein the target part is a lifter that raises and lowers a substrate in a processing tank that stores processing liquid, and the adjustment work is the adjustment of the distance between the liquid surface of the processing liquid and the edge of the substrate.

[0016] Furthermore, the tenth embodiment is a work support method relating to any of the first to ninth embodiments, wherein the mobile terminal is a pair of smart glasses.

[0017] Furthermore, an eleventh embodiment is a work support system that assists in a predetermined adjustment operation using a virtual measuring tool, comprising: a portable terminal equipped with a display unit and a communication unit; a spatial recognition unit provided on the portable terminal that creates a target spatial mesh, which is mesh data acquired by scanning a target part that is the subject of the adjustment operation; a generation unit provided on the portable terminal that generates a virtual measuring tool; a setting unit provided on the portable terminal that sets a part of the virtual measuring tool as a contact determination area; a drive unit that moves the target part toward a target position; and a detection unit that detects contact between the contact determination area of ​​the virtual measuring tool installed at a predetermined position and the target spatial mesh.

[0018] Furthermore, the twelfth embodiment is a work support system according to the eleventh embodiment, wherein the portable terminal further comprises a notification unit that notifies the user of contact when the detection unit detects contact between the target space mesh and the contact determination area.

[0019] Furthermore, the 13th embodiment is a work support system according to the 12th embodiment, wherein the notification unit changes the color of the contact determination area when the detection unit detects contact between the target space mesh and the contact determination area.

[0020] Furthermore, in the 14th embodiment, in the work support system according to the 13th embodiment, the virtual measuring tool is set to be transparent to the target space mesh, and the notification unit changes the color of the contact determination area to a first color when the detection unit detects contact between the target space mesh and the contact determination area, and changes the color of the contact determination area to a second color different from the first color when the detection unit detects entry of the target space mesh into the contact determination area.

[0021] Further, in a 15th aspect, in the work support system according to the 12th aspect, when the detection unit detects contact between the target space mesh and the contact determination part, the notification part emits a sound.

[0022] Further, in a 16th aspect, in the work support system according to the 11th aspect, the virtual measurement tool is set to be non-transmissive with respect to the target space mesh, and when the drive unit moves the target part beyond the target position, when the virtual measurement tool is moved toward the target part and the contact determination part contacts the target space mesh, the movement of the virtual measurement tool stops.

[0023] Further, in a 17th aspect, in the work support system according to any one of the 11th to 16th aspects, the target part is provided in a substrate processing apparatus that performs a predetermined process on a substrate.

[0024] Further, in an 18th aspect, in the work support system according to the 17th aspect, the target part is a nozzle that discharges a processing liquid onto a substrate, and the adjustment work is adjustment of the height of the nozzle.

[0025] Further, in a 19th aspect, in the work support system according to the 17th aspect, the target part is a lifter that raises and lowers a substrate in a processing tank that stores a processing liquid, and the adjustment work is adjustment of the distance between the liquid surface of the processing liquid and an end of the substrate.

[0026] Further, in a 20th aspect, in the work support system according to any one of the 11th to 19th aspects, the portable terminal is a smart glass.

Advantages of the Invention

[0027] According to the work support method described in the first to tenth embodiments, contact is detected between the target spatial mesh obtained by scanning the target part to be adjusted and a contact determination area of ​​a part of the virtual measuring tool. This enables contact determination between the target part, which is a real object, and the virtual measuring tool, which is a virtual object, through the spatial mesh, and allows for accurate adjustment work using the virtual measuring tool.

[0028] According to the work support system of the 11th to 20th aspects, contact is detected between the target spatial mesh acquired by scanning the target part to be adjusted and a contact determination area of ​​a part of the virtual measuring tool. This enables contact determination between the target part, which is a real object, and the virtual measuring tool, which is a virtual object, through the spatial mesh, and allows for accurate adjustment work using the virtual measuring tool. [Brief explanation of the drawing]

[0029] [Figure 1] Figure 1 is a schematic diagram showing the general configuration of the work support system according to the present invention. [Figure 2] Figure 2 is a plan view illustrating the internal layout of the substrate processing apparatus. [Figure 3] Figure 3 is a plan view showing the schematic configuration of the processing unit. [Figure 4] Figure 4 is a side view showing the schematic configuration of the processing unit. [Figure 5] Figure 5 is a perspective view showing the appearance of the smart glasses. [Figure 6] Figure 6 is a block diagram showing the functional configuration of the control unit of the smart glasses, server, work support terminal, and substrate processing device. [Figure 7] Figure 7 is a flowchart showing the procedure of the work support method according to the present invention. [Figure 8] Figure 8 schematically illustrates the creation of a spatial mesh for the work area. [Figure 9] Figure 9 shows an example of a generated virtual measuring tool. [Figure 10]Figure 10 is a schematic diagram showing the setting of the contact detection area. [Figure 11] Figure 11 shows the virtual measuring tool in a state where it is placed on a dummy circuit board. [Figure 12] Figure 12 shows the state in which the processing liquid nozzle is descending toward the virtual measuring tool. [Figure 13] Figure 13 shows the state in which the processing liquid nozzle is in contact with the virtual measuring tool. [Figure 14] Figure 14 shows the state in which the processing liquid nozzle has entered the interior of the virtual measuring tool. [Figure 15] Figure 15 schematically shows the contact determination between the processing liquid nozzle and the virtual measuring tool in the second embodiment. [Figure 16] Figure 16 shows the state when an impenetrable virtual measuring tool hits a spatial mesh. [Figure 17] Figure 17 is a diagram showing the schematic main components of the substrate processing apparatus according to the third embodiment. [Figure 18] Figure 18 shows the virtual measuring tool in a state where it is placed on the surface of the processing liquid. [Figure 19] Figure 19 shows the state in which the upper edge of the substrate is in contact with the virtual measuring tool. [Modes for carrying out the invention]

[0030] Embodiments of the present invention will be described in detail below with reference to the drawings. In the following, expressions indicating relative or absolute positional relationships (e.g., "in one direction," "along one direction," "parallel," "orthogonal," "center," "concentric," "coaxial," etc.) shall, unless otherwise specified, not only strictly represent the positional relationship but also represent a state in which there is a relative displacement in terms of angle or distance within a tolerance or a range in which a similar level of function can be obtained. Similarly, expressions indicating equality (e.g., "identical," "equal," "homogeneous," etc.) shall, unless otherwise specified, not only represent a state in which there is a quantitatively strictly equal state but also represent a state in which there is a difference in which a tolerance or a similar level of function can be obtained. Furthermore, expressions indicating shape (e.g., "circular," "square," "cylindrical," etc.) shall, unless otherwise specified, not only strictly represent the geometrically precise shape but also represent a shape within a range in which a similar level of effect can be obtained, and may have, for example, irregularities or chamfers. Additionally, expressions such as "equipped," "possessing," "containing," "having," etc., for a component are not exclusive expressions that exclude the existence of other components. Furthermore, the expression "at least one of A, B, and C" includes "A only," "B only," "C only," "any two of A, B, and C," and "all of A, B, and C."

[0031] <First Embodiment> Figure 1 is a schematic diagram showing the general configuration of the work support system according to the present invention. The measurement work support system according to the present invention comprises a plurality of substrate processing devices 40, smart glasses 10, a server 70, and a work support terminal 80. The controllers of the smart glasses 10 and the substrate processing devices 40 are connected to an information communication network 5 (e.g., the Internet) by wireless communication. The work support terminal 80 and the server 70 are connected to the information communication network 5 by wired connection. Information can be sent and received between devices connected to the information communication network 5, for example, information can be exchanged between the smart glasses 10 and the work support terminal 80. Note that the connection of each device to the information communication network 5 by wireless or wired connection is not limited to the above example and can be in an appropriate form (for example, the work support terminal 80 may be connected to the information communication network 5 wirelessly).

[0032] Multiple substrate processing units 40 are arranged side by side, for example, in a cleanroom. A cleanroom is a room located, for example, within a semiconductor device manufacturing plant, where a certain level of air cleanliness is ensured and temperature and humidity are controlled. Workers perform their tasks on the substrate processing units 40 within the cleanroom.

[0033] Figure 2 is a plan view illustrating the internal layout of the substrate processing apparatus 40. The substrate processing apparatus 40 is a single-wafer type substrate cleaning apparatus that processes one substrate W at a time, which is a disc-shaped silicon substrate such as a semiconductor wafer. The substrate processing apparatus 40 comprises an indexer unit 43, a plurality of processing units 50, a main transport robot 48, and a control unit 45.

[0034] The indexer unit 43 has a plurality (three in this embodiment) of load ports LP and indexer robots 41. A carrier C for accommodating a plurality of substrates W to be processed by the processing unit 50 is placed on each load port LP. The carrier C may take the form of a FOUP (front opening unified pod) that houses the substrates W in a sealed space, an SMIF (Standard Mechanical Interface) pod, or an OC (open cassette) that exposes the housed substrates W to the outside air.

[0035] The indexer robot 41 transports the substrate W between the carrier C and the main transport robot 48. The indexer robot 41 is, for example, an articulated robot and can transfer the substrate W to and from any of the carriers C placed on the multiple load ports LP.

[0036] Furthermore, the main transport robot 48 transports the substrates W between the indexer robot 41 and the processing unit 50. The main transport robot 48 is configured to be able to perform lifting and lowering movements, swivel movements, and forward and backward movements of its transport arm. The main transport robot 48 receives the unprocessed substrates W that the indexer robot 41 has taken out of the carrier C and carries them into the processing unit 50. Also, the indexer robot 41 receives the processed substrates W that the main transport robot 48 has unloaded from the processing unit 50 and stores them in the carrier C.

[0037] In the substrate processing apparatus 40, for example, three processing units 50 are stacked to form one stack (tower). Then, for example, four stacks are arranged around the main transport robot 48. In other words, one substrate processing apparatus 40 contains, for example, 12 (=3 × 4) processing units 50. Figure 2 schematically shows one of the three stacked processing units 50. Note that the number of processing units 50 in the substrate processing apparatus 40 is not limited to 12 and may be changed as appropriate.

[0038] The main transport robot 48 is positioned in the center of four stacked structures, each containing a processing unit 50. The main transport robot 48 receives the substrates W to be processed from the indexer robot 41 and places them inside the cups 55 of one of the processing units 50. The main transport robot 48 also unloads the processed substrates W from each processing unit 50 and hands them over to the indexer robot 41.

[0039] Furthermore, the substrate processing apparatus 40 includes a control unit 45. The control unit 45 is a general-purpose computer that controls the operation of the indexer robot 41, the main transport robot 48, and the mechanisms provided in each processing unit 50, which are located within the apparatus. The control unit 45 has a touch panel, which is an input / output interface provided on the wall of the apparatus, and a communication unit that communicates with the outside of the apparatus. In Figure 2, for illustrative purposes, the control unit 45 is shown within the indexer unit 43, but it is not limited to this, and the control unit 45 can be provided at an appropriate location within the substrate processing apparatus 40.

[0040] The following describes one of the twelve processing units 50 mounted on the substrate processing apparatus 40, but the other processing units 50 have a similar configuration except for differences in the arrangement of the nozzles.

[0041] The processing unit 50 discharges a processing solution onto a single substrate W to perform a cleaning process. The processing solution is a conceptual term that includes various chemicals and pure water. Examples of chemicals include solutions for etching or for removing particles. Specifically, SC-1 solution (a mixed solution of ammonium hydroxide, hydrogen peroxide, and pure water), SC-2 solution (a mixed solution of hydrochloric acid, hydrogen peroxide, and pure water), or hydrofluoric acid are used.

[0042] Figure 3 is a plan view showing the schematic configuration of the processing unit 50. Figure 4 is a side view showing the schematic configuration of the processing unit 50. The processing unit 50 comprises a processing chamber 51, a rotating holding unit 56, a processing liquid nozzle (first nozzle) 60, a spray nozzle (second nozzle) 65, and a cup 55. The processing chamber 51 is a hollow housing. The rotating holding unit 56, processing liquid nozzle 60, spray nozzle 65, and cup 55 are provided inside the processing chamber 51.

[0043] An outlet / outlet 52 is provided on the side wall of the processing chamber 51. The outlet / outlet 52 is opened and closed by a shutter 53. With the shutter 53 open, the main transport robot 48 loads and unloads substrates W into and out of the processing chamber 51 from the outlet / outlet 52. The shutter 53 closes the outlet / outlet 52 while the substrates W are being processed. When the outlet / outlet 52 is closed by the shutter 53, the inside of the processing chamber 51 becomes a semi-sealed space.

[0044] An FFU (Fan Filter Unit) 54 is provided at the ceiling of the processing chamber 51. The FFU 54 supplies clean air from the ceiling of the processing chamber 51 into the processing chamber 51. This creates a downflow of clean air within the processing chamber 51, moving from top to bottom. The gas supplied into the processing chamber 51 is discharged through an exhaust duct 59 located at the bottom of the processing chamber 51.

[0045] The rotating holding unit 56 includes a spin chuck 57 and a spin motor 58. The spin chuck 57 is a substrate holding unit that holds the substrate W in a horizontal position (a position in which the normal to the main surface of the substrate W is aligned with the vertical direction). The spin chuck 57 is, for example, a vacuum suction type chuck. The spin chuck 57 holds the central part of the lower surface of the substrate W by suction. The spin chuck 57 may be other types of chucks, such as a clamping type mechanical chuck that grips the edge of the substrate W.

[0046] The spin chuck 57 has a disc shape with a diameter smaller than the diameter of the substrate W. When the lower surface of the substrate W is held by the spin chuck 57, the peripheral edge of the substrate W protrudes outward beyond the outer edge of the spin chuck 57.

[0047] The spin chuck 57 is connected to the spin motor 58 via its motor shaft. That is, the upper end of the motor shaft of the spin motor 58 is connected to the center of the lower surface of the spin chuck 57. When the spin motor 58 rotates its motor shaft while the substrate W is held in contact with the spin chuck 57, the substrate W and the spin chuck 57 rotate in the horizontal plane around the axis of rotation which is aligned vertically.

[0048] A cup 55 is provided to surround the spin chuck 57. The cup 55 is movable up and down by a cup lifting mechanism 39 conceptually shown in Figure 4. The cup 55 has a roughly cylindrical shape, and the upper part of the cup 55 is inclined so that it approaches the spin chuck 57 as it goes upwards. However, the inner diameter of the upper part of the cup 55 is larger than the diameter of the substrate W. When processing the substrate W, the upper end of the cup 55 is higher than the height of the substrate W held by the spin chuck 57. Therefore, liquid that is scattered by centrifugal force from the substrate W, which is rotated by the rotating holding part 56 during processing, is caught and collected by the cup 55. The liquid collected by the cup 55 is discharged from a drain pipe (not shown) provided at the bottom of the cup 55. The cup 55 may also have a multi-stage structure with multiple collection ports for different purposes.

[0049] The processing liquid nozzle 60 comprises a nozzle tip 61, a swing arm 62, and a nozzle drive unit 63. The processing liquid nozzle 60 is a straight nozzle that discharges processing liquid in a continuous flow state, for example. The nozzle tip 61 is attached to the end of a swing arm 62 that extends substantially horizontally. Processing liquid is supplied to the nozzle tip 61 from a processing liquid supply source (not shown), and an outlet (not shown) is formed therein, from which the processing liquid is discharged. The swing arm 62 is moved up and down by the nozzle drive unit 63 and is oscillated in the horizontal plane around a pivot axis A1 along the vertical direction.

[0050] The nozzle drive unit 63 raises and lowers and swings the swing arm 62, causing the nozzle tip 61 to move up and down in the vertical direction and to move in an arc-shaped trajectory. This allows the nozzle tip 61 to move between a processing position above the substrate W held by the rotating holding unit 56 and a standby position outside the cup 55. When the nozzle tip 61 is in the processing position, the processing liquid nozzle 60 discharges a chemical solution onto the substrate W held by the rotating holding unit 56, thereby carrying out, for example, a cleaning process of the substrate W. Alternatively, the processing liquid nozzle 60 discharges pure water onto the substrate W, thereby carrying out a pure water rinsing process of the substrate W.

[0051] On the other hand, the spray nozzle 65 comprises a nozzle tip 66, a swing arm 67, and a nozzle drive unit 68. The spray nozzle 65 is a two-fluid nozzle that, for example, mixes a processing liquid and a pressurized gas to generate droplets, and sprays the mixed fluid of the droplets and gas onto the substrate W. The nozzle tip 66 is attached to the end of a swing arm 67 that extends in a substantially horizontal direction. The processing liquid and pressurized gas are supplied to the nozzle tip 66 from a processing liquid supply source and a gas supply source (not shown), and they are mixed inside or outside the nozzle tip 66 to form a mixed fluid. The swing arm 67 is moved up and down by the nozzle drive unit 68 and is also oscillated in the horizontal plane around a pivot axis A2 along the vertical direction.

[0052] The nozzle drive unit 68 raises and lowers and swings the swing arm 67, causing the nozzle tip 66 to move up and down in the vertical direction and to move in an arc-shaped trajectory. This allows the nozzle tip 66 to move between a processing position above the substrate W held by the rotating holding unit 56 and a standby position outside the cup 55. When the nozzle tip 66 is in the processing position, the spray nozzle 65 discharges a mixed fluid onto the substrate W held by the rotating holding unit 56, thereby carrying out, for example, a cleaning process of the substrate W.

[0053] As shown in Figure 3, the rotational movement of the processing liquid nozzle 60 and the rotational movement of the spray nozzle 65 may interfere with each other. That is, when the processing liquid nozzle 60 is in the processing position, if the spray nozzle 65 also moves above the substrate W, there is a risk of collision between the two. For this reason, an interlock is provided so that when either the processing liquid nozzle 60 or the spray nozzle 65 is in the processing position, the other cannot operate.

[0054] Operators performing tasks such as operating the substrate processing device 40 wear smart glasses 10. Smart glasses 10 are a type of wearable device using a head-mounted display (HMD) system. Smart glasses 10 are also devices for realizing AR (Augmented Reality) or MR (Mixed Reality). For example, Microsoft's "HoloLens" (registered trademark) can be used as smart glasses 10.

[0055] Figure 5 is a perspective view showing the appearance of the smart glasses 10. The smart glasses 10 include a visor 11 and a headband 12. The worker wears the smart glasses 10 by attaching the headband 12 to their head. The worker can adjust the length of the headband 12 to fit the size of their head. The headband 12 is also equipped with a power button, brightness button, volume button, etc.

[0056] The visor 11 includes various sensors and a display. The display is a see-through holographic lens. That is, the display is capable of displaying three-dimensional images in the worker's field of vision using holograms, while also transmitting light from real objects like a normal eyeglass lens. Therefore, a worker wearing the smart glasses 10 can view the displayed three-dimensional image while simultaneously viewing real objects through the display.

[0057] The sensors in the visor 11 include, for example, multiple visible light cameras that primarily image the area in front of the visor 11, an infrared camera that tracks the worker's line of sight, a depth sensor that measures the distance to an object, and an inertial measurement sensor. The infrared camera tracks the line of sight by measuring the eye movements of the wearer of the smart glasses 10. The depth sensor measures the distance to an object using, for example, the Time of Flight (ToF) method. The inertial measurement sensor consists of an accelerometer, a gyroscope, a magnetometer, etc.

[0058] Furthermore, the smart glasses 10 have a built-in computer equipped with a CPU, memory, and storage unit. The smart glasses 10 also have a wireless communication mechanism, and the computer in the smart glasses 10 uses this wireless communication mechanism to connect to the information and communication network 5. In addition, the smart glasses 10 are equipped with a microphone, speaker, and battery.

[0059] Figure 6 is a block diagram showing the functional configuration of the smart glasses 10, the server 70, the work support terminal 80, and the control unit 45 of the substrate processing device 40. The smart glasses 10 comprises an imaging unit 21, a communication unit 22, a display unit 23, a storage unit 24, and a spatial recognition unit 25 as hardware elements. The imaging unit 21 includes a visible light camera provided on the visor 11 described above. The imaging unit 21 includes, for example, four visible light cameras that image the area in front and diagonally in front, and can image the field of view of the worker wearing the smart glasses 10.

[0060] The communication unit 22 includes the wireless communication mechanism of the smart glasses 10 described above. The communication unit 22 transmits and receives data with the work support terminal 80 and the server 70 via the information communication network 5. The communication unit 22 can also transmit and receive data directly with the control unit 45 of the substrate processing device 40 if the distance is short. In other words, the communication unit 22 can transmit data and commands to the control unit 45 of the substrate processing device 40 directly or via the information communication network 5.

[0061] The display unit 23 includes the display of the visor 11 described above. The display unit 23 has a holographic processing device and displays a stereoscopic image at a predetermined spatial position using hologram technology. Note that the stereoscopic image displayed by the display unit 23 is not limited to three-dimensional shapes, but may also be two-dimensional, such as a document.

[0062] The memory unit 24 includes the memory and storage installed in the smart glasses 10. The memory and storage in the smart glasses 10 are, for example, DRAM (Dynamic Random Access Memory) and UFS (Universal Flash Storage), respectively. The memory unit 24 stores applications and data used by the computer in the smart glasses 10.

[0063] The spatial recognition unit 25 includes the depth sensor of the smart glasses 10 described above. The depth sensor can measure the distance to an object. The spatial recognition unit 25 can perform spatial mapping by scanning the space using the depth sensor. Specifically, the spatial recognition unit 25 creates a spatial mesh, which is mesh data, by scanning the space. Because the spatial recognition unit 25 uses a depth sensor, it is possible to scan the space even in dark places.

[0064] The smart glasses 10 also include a generation unit 31, a setting unit 32, a detection unit 33, and a notification unit 34. These generation unit 31, setting unit 32, detection unit 33, and notification unit 34 are functional processing units realized by the CPU of the smart glasses 10 executing a predetermined processing program. The processing contents of the generation unit 31, setting unit 32, detection unit 33, and notification unit 34 will be described further later.

[0065] The control unit 45 of the substrate processing apparatus 40 controls the operation of drive units provided in the processing unit 50, such as the spin motor 58, the cup lifting mechanism 39, and the nozzle drive units 63 and 68. The control unit 45 also controls the operation of the indexer robot 41 and the main transport robot 48. The control unit 45 of the substrate processing apparatus 40 can communicate with the communication unit 22 of the smart glasses 10, and can also control the operation of drive units provided in the processing unit 50 according to operation command instructions transmitted from the smart glasses 10.

[0066] The work support terminal 80 is installed, for example, in the factory of a vendor that manufactures and performs maintenance and inspection of the circuit board processing equipment 40. The server 70 is installed in a cleanroom where multiple circuit board processing equipment 40 are installed. The work support terminal 80 and the server 70 are capable of communicating with the smart glasses 10 via the information and communication network 5. Furthermore, the work support terminal 80 and the server 70 are capable of communicating with each other via the information and communication network 5.

[0067] The work support terminal 80 and server 70 are typical computer systems. Specifically, the work support terminal 80 and server 70 include a CPU, which is a circuit for performing various calculations; ROM, which is a read-only memory for storing basic programs; RAM, which is a read-write memory for storing various information; a storage unit (for example, a magnetic disk or SSD) for storing control software and data; and a communication unit for communicating with the information and communication network 5.

[0068] The work support terminal 80 is a computer used, for example, by a vendor's work support staff member to assist workers in the cleanroom. The work support staff member can transmit various information from the work support terminal 80 to the smart glasses 10 worn by the workers in the cleanroom.

[0069] Server 70 is a computer in the work support system according to the present invention that performs predetermined processing in response to requests from smart glasses 10 and work support terminal 80. Server 70 is equipped with a relatively large storage unit 74. Large-sized data created by smart glasses 10 and work support terminal 80 may be stored in the storage unit 74. Note that server 70 and work support terminal 80 are not essential elements.

[0070] Next, a work support method using the work support system having the above-described configuration will be explained. Figure 7 is a flowchart showing the procedure of the work support method according to the present invention. In the first embodiment, a case in which the work of adjusting the height of the processing liquid nozzle 60 is performed using a virtual measuring tool will be explained as an example. A worker wearing smart glasses 10 starts the work of adjusting the height of the processing liquid nozzle 60 near the processing unit 50 of the substrate processing apparatus 40.

[0071] First, the operator uses the smart glasses 10 to create a spatial mesh for the part to be worked on (in the first embodiment, the processing liquid nozzle 60) (step S1). Figure 8 is a schematic diagram showing the creation of a spatial mesh for the part to be worked on. To create the spatial mesh, the operator wearing the smart glasses 10 simply needs to turn on the scan mode. For example, the operator selects the scan mode by hand gesture from a menu screen displayed as a stereoscopic image by the display unit 23. This hand gesture is captured and detected by the imaging unit 21, and the computer in the smart glasses 10 recognizes that the scan mode has been selected based on the detection result and turns on the scan mode. Alternatively, the operator may turn on the scan mode by pressing a predetermined button provided on the smart glasses 10. When the scan mode is turned on, the spatial recognition unit 25 of the smart glasses 10 starts scanning the space.

[0072] The area to be scanned for creating the spatial mesh is, for example, the space including the processing liquid nozzle 60, which is the work area, and its surroundings. The spatial recognition unit 25 of the smart glasses 10 scans the space including the processing liquid nozzle 60 and its surroundings to create a spatial mesh, which is mesh data. The spatial mesh created by the spatial recognition unit 25 by scanning the space is mesh data represented by a large number of triangular meshes. Various shapes, including curved surfaces and planes, are represented by a collection of connected triangles. As a fundamental characteristic of spatial meshes, complex shapes including irregularities are represented by high-density triangles, while flat shapes are represented by relatively low-density triangles.

[0073] In the first embodiment, the spatial recognition unit 25 scans the space including the processing liquid nozzle 60 and its surroundings to create a spatial mesh for the processing liquid nozzle 60 as shown in Figure 8. As shown in Figure 8, in the spatial mesh for the processing liquid nozzle 60, which is the work target, the processing liquid nozzle 60 is represented by a collection of interconnected triangular meshes. Furthermore, by scanning the surroundings of the processing liquid nozzle 60, the spatial recognition unit 25 also creates a spatial mesh for the spin chuck 57 and the dummy substrate DW held by it. The dummy substrate DW is a transparent substrate used for adjusting the height of the processing liquid nozzle 60 and has the same size and thickness as the substrate W to be processed.

[0074] By creating a spatial mesh for the processing liquid nozzle 60, the spatial recognition unit 25 enables the smart glasses 10 to recognize the processing liquid nozzle 60 not merely as an image, but as a logical entity.

[0075] Next, the operator generates a virtual measuring tool using the smart glasses 10 (step S2). Figure 9 shows an example of a generated virtual measuring tool. The virtual measuring tool 90 is a virtual object generated by the generation unit 31 of the smart glasses 10, and the display unit 23 displays it as a three-dimensional image using hologram technology. The operator can select an appropriate shape for the virtual measuring tool 90 from the smart glasses 10 according to the purpose of the adjustment work. In the first embodiment, for example, it is made of two cylinders of different diameters stacked in two layers. The height h of the virtual measuring tool 90 generated by the generation unit 31 is set to a value that matches the height of the processing liquid nozzle 60 to be adjusted. The operator specifies the desired value for the height h of the virtual measuring tool 90 from the smart glasses 10. The generation unit 31 generates a virtual measuring tool 90 with the height h specified by the operator. For example, when adjusting the distance between the substrate W held in the spin chuck 57 and the processing liquid nozzle 60 to 15 mm, the operator inputs 15 mm, and the generation unit 31 sets the height h of the virtual measuring tool 90 to 15 mm according to the operator's specification.

[0076] Next, the operator uses the smart glasses 10 to set a portion of the virtual measuring tool 90 as a contact detection area (step S3). Figure 10 is a schematic diagram showing the setting of the contact detection area. The setting unit 32 of the smart glasses 10 sets the portion of the virtual measuring tool 90 specified by the operator as the contact detection area 91. The contact detection area 91 is the part used to perform contact detection (collision detection) between the virtual measuring tool 90 and other elements. The operator uses the smart glasses 10 to specify the portion of the virtual measuring tool 90 that is expected to come into contact. In the first embodiment, based on the operator's specification, the setting unit 32 sets the upper and lower parts of the virtual measuring tool 90 as the contact detection area 91. The set contact detection area 91 is displayed by the smart glasses 10, for example, in blue, for identification with other parts.

[0077] Next, the operator places the virtual measuring tool 90 in the desired position (step S4). Figure 11 shows the state in which the virtual measuring tool 90 is placed on the dummy substrate DW. The operator moves the virtual measuring tool 90, for example, by hand and places it on the dummy substrate DW held by the spin chuck 57. The operator's hand movements are captured and detected by the imaging unit 21 of the smart glasses 10, and the smart glasses 10 moves the virtual measuring tool 90 according to the detection results.

[0078] When the lower surface of the moving virtual measuring tool 90 comes into contact with the dummy circuit board DW, the color of the lower contact detection area 91 displayed by the smart glasses 10 changes, for example, from blue to green. Therefore, if the operator sees that the lower contact detection area 91 has changed to green and simultaneously stops the movement of the virtual measuring tool 90, the virtual measuring tool 90 can be placed on the dummy circuit board DW with its lower surface in contact with the dummy circuit board DW. In addition, the operator places the virtual measuring tool 90 directly below the processing liquid nozzle 60, which is the work area.

[0079] Next, the processing liquid nozzle 60, which is the workpiece, is moved toward a target position where it will come into contact with the virtual measuring tool 90 (step S5). In the first embodiment, the nozzle drive unit 63 lowers the processing liquid nozzle 60 vertically downward. Figure 12 shows the state in which the processing liquid nozzle 60 is descending toward the virtual measuring tool 90. As shown by arrow AR12 in Figure 12, the processing liquid nozzle 60 descends so as to gradually approach the virtual measuring tool 90 below.

[0080] As the processing liquid nozzle 60 descends, it is continuously determined whether the spatial mesh for the processing liquid nozzle 60 is in contact with the upper contact determination area 91 of the virtual measuring tool 90 (step S6). Since the processing liquid nozzle 60 is a physical entity while the virtual measuring tool 90 is a virtual object, the smart glasses 10 cannot directly detect contact between the two. In the first embodiment, a spatial mesh for the processing liquid nozzle 60 is created, and the detection unit 33 of the smart glasses 10 can detect contact between this spatial mesh and the virtual measuring tool 90. In other words, the smart glasses 10 recognizes both the spatial mesh for the processing liquid nozzle 60 and the virtual measuring tool 90 as logical entities, and the detection unit 33 can detect contact between them. The processing liquid nozzle 60 continues to descend, repeating the process from step S6 back to step S5 until the detection unit 33 detects contact between the spatial mesh and the virtual measuring tool 90.

[0081] On the other hand, when the descending processing liquid nozzle 60 comes into contact with the upper surface of the virtual measuring tool 90, the detection unit 33 of the smart glasses 10 detects contact between the spatial mesh for the processing liquid nozzle 60 and the upper contact detection area 91 of the virtual measuring tool 90. Figure 13 shows the state when the processing liquid nozzle 60 is in contact with the virtual measuring tool 90. When the detection unit 33 detects contact between the spatial mesh for the processing liquid nozzle 60 and the upper contact detection area 91 of the virtual measuring tool 90, the notification unit 34 of the smart glasses 10 changes the color of the upper contact detection area 91, for example, from blue to green (step S7). This allows the operator to recognize that the height position of the processing liquid nozzle 60 has reached the target position (in the first embodiment, the position where the distance between the tip of the processing liquid nozzle 60 and the dummy substrate DW is 15 mm). Similarly, when the virtual measuring tool 90 is placed on the dummy substrate DW, the notification unit 34 changes the color of the lower contact detection area 91 when the detection unit 33 detects contact.

[0082] When an operator visually confirms that the color of the upper contact detection area 91 has changed to green, they instruct the control unit 45 of the substrate processing apparatus 40 to stop the nozzle drive unit 63, causing the processing liquid nozzle 60 to stop descending when it comes into contact with the virtual measuring tool 90. This adjusts the height of the processing liquid nozzle 60 to the target position.

[0083] In the first embodiment, the virtual measuring tool 90 is set to be permeable to the spatial mesh. Therefore, for example, if the operator's stop command is delayed, the processing liquid nozzle 60 may pass the target value and descend, entering the interior of the virtual measuring tool 90. Figure 14 shows the state in which the processing liquid nozzle 60 has entered the interior of the virtual measuring tool 90. When the detection unit 33 detects that the spatial mesh for the processing liquid nozzle 60 has entered the upper contact determination area 91 of the virtual measuring tool 90, the notification unit 34 of the smart glasses 10 changes the color of the upper contact determination area 91 from, for example, green to red.

[0084] When an operator sees that the color of the upper contact detection area 91 has changed to red, they recognize that the processing liquid nozzle 60 has descended beyond the target position. In this case, the operator can, for example, instruct the control unit 45 to raise the processing liquid nozzle 60 to the nozzle drive unit 63, and return the processing liquid nozzle 60 to the target position (the position where the contact detection area 91 turns green).

[0085] In the first embodiment, the space containing the processing liquid nozzle 60 to be adjusted is scanned to obtain a spatial mesh for the processing liquid nozzle 60, and contact between the spatial mesh and the contact detection area 91 of the virtual measuring tool 90 is detected. Direct contact detection between the processing liquid nozzle 60, which is a real object, and the virtual measuring tool 90, which is a virtual object, was difficult. In the first embodiment, a spatial mesh for the processing liquid nozzle 60 is created, and contact between the spatial mesh and the virtual measuring tool 90 is detected. In other words, the spatial mesh enables indirect contact detection between the processing liquid nozzle 60, which is a real object, and the virtual measuring tool 90, which is a virtual object. This makes it possible to perform accurate height adjustment of the processing liquid nozzle 60 using the virtual measuring tool 90.

[0086] Furthermore, in the first embodiment, when the processing liquid nozzle 60 and the upper contact detection area 91 of the virtual measuring tool 90 come into contact, the color of the contact detection area 91 is changed from blue to green, and when the processing liquid nozzle 60 passes the target value and descends to enter the virtual measuring tool 90, the color of the contact detection area 91 is changed from green to red. In other words, the color of the contact detection area 91 is changed in three stages depending on the positional relationship between the processing liquid nozzle 60 and the virtual measuring tool 90. As a result, the operator can recognize not only that the processing liquid nozzle 60 has come into contact with the virtual measuring tool 90, but also that it has passed and entered the interior of the virtual measuring tool 90.

[0087] <Second Embodiment> Next, a second embodiment of the present invention will be described. The configuration of the work support system in the second embodiment is the same as in the first embodiment. In the first embodiment, the virtual measuring tool 90 was set to be transparent to the spatial mesh, whereas in the second embodiment, the virtual measuring tool 90 is set to be non-transparent to the spatial mesh. Such transparency or non-transparency can be set, for example, by the operator specifying it as an option when the generation unit 31 generates the virtual measuring tool 90.

[0088] In the second embodiment, as in the first embodiment, the spatial recognition unit 25 scans the space including the processing liquid nozzle 60 and its surroundings that are the target of the adjustment work to create a spatial mesh for the processing liquid nozzle 60. In addition, the generation unit 31 generates a virtual measuring tool 90, and the setting unit 32 sets a part of the virtual measuring tool 90 as a contact determination area 91.

[0089] In the first embodiment, the operator placed the virtual measuring tool 90 on the dummy substrate DW and then kept the virtual measuring tool 90 stationary. In the second embodiment, the operator lowers the processing liquid nozzle 60 while sliding the virtual measuring tool 90 along the upper surface of the dummy substrate DW. Figure 15 schematically shows the contact detection between the processing liquid nozzle 60 and the virtual measuring tool 90 in the second embodiment. As indicated by arrow AR151 in Figure 15, the nozzle drive unit 63 gradually lowers the processing liquid nozzle 60 downwards, while the operator slides the virtual measuring tool 90 along the upper surface of the dummy substrate DW as indicated by arrow AR152. The operator can, for example, slide the virtual measuring tool 90 by hand.

[0090] Before the processing liquid nozzle 60 reaches the target position, the color of the upper contact detection area 91 does not change even if the virtual measuring tool 90 passes below the processing liquid nozzle 60. In this case, it is necessary to lower the processing liquid nozzle 60 further.

[0091] When the processing liquid nozzle 60 reaches the target position and the virtual measuring tool 90 passes below the processing liquid nozzle 60, the same state as in Figure 13 of the first embodiment occurs, and the color of the upper contact detection area 91 changes, for example, from blue to green. This allows the operator to recognize that the processing liquid nozzle 60 has accurately reached the target position.

[0092] On the other hand, if the operator attempts to slide the virtual measuring tool 90 while the processing liquid nozzle 60 has descended beyond the target position, in the second embodiment, since the virtual measuring tool 90 is not permeable to the spatial mesh, the movement of the virtual measuring tool 90 is forcibly stopped when the contact detection portion 91 comes into contact with the spatial mesh for the processing liquid nozzle 60. Figure 16 shows the state when the non-permeable virtual measuring tool 90 hits the spatial mesh. If the processing liquid nozzle 60 has descended even slightly beyond the target position, as shown in Figure 16, the virtual measuring tool 90 will hit the spatial mesh for the processing liquid nozzle 60 and become unable to pass through. In addition, the color of the upper contact detection portion 91 of the virtual measuring tool 90 may be changed when the upper contact detection portion 91 hits the processing liquid nozzle 60.

[0093] In the second embodiment, the virtual measuring tool 90 is set to be impermeable to the spatial mesh, and if the processing liquid nozzle 60 descends even slightly beyond the target position, the virtual measuring tool 90 will hit the spatial mesh for the processing liquid nozzle 60 and become unable to pass through, stopping the movement of the virtual measuring tool 90. For this reason, even in the second embodiment, the virtual measuring tool 90 can be used to perform accurate height adjustment of the processing liquid nozzle 60.

[0094] <Third Embodiment> Next, a third embodiment of the present invention will be described. In the first and second embodiments, the substrate processing apparatus 40 was a single-wafer type substrate cleaning apparatus that processed substrates W one at a time, but the substrate processing apparatus of the third embodiment is a batch type substrate cleaning apparatus that immerses multiple substrates W in a processing solution at once for processing. The configuration of other elements of the third embodiment (smart glasses 10, etc.), excluding the substrate processing apparatus, is the same as in the first and second embodiments.

[0095] Figure 17 shows a schematic diagram of the main components of the substrate processing apparatus 140 according to the third embodiment. The processing tank 145 of the substrate processing apparatus 140 stores a processing liquid (chemical solution or pure water). Multiple substrates (for example, 25) W are held in an upright position (the normal to the substrate W is oriented horizontally) by three holding rods 149 provided by the lifter 147. The lifter 147 moves the multiple substrates W up and down between a position where they are immersed in the processing liquid and a position where they are lifted out of the processing liquid by a drive mechanism (not shown). The lifter 147 can also move the multiple substrates W up and down within the processing tank 145 where the processing liquid is stored. By immersing multiple substrates W in the processing liquid, the cleaning process for these multiple substrates W is carried out simultaneously.

[0096] In the third embodiment, as shown in Figure 17, with the entire substrate W immersed in the processing liquid by the lifter 147, the operator uses smart glasses 10 to scan the space including the substrate W and the lifter 147 to create a spatial mesh. The spatial recognition unit 25 of the smart glasses 10 scans the space including the substrate W and its surroundings, thereby creating a spatial mesh for the substrate W as shown in Figure 17.

[0097] Next, the operator generates a virtual measuring tool using the smart glasses 10. In the third embodiment, the generation unit 31 of the smart glasses 10 generates a plate-shaped virtual measuring tool according to the operator's instructions. The thickness of the virtual measuring tool generated by the generation unit 31 is matched to the liquid depth of the substrate W to be adjusted (the distance between the liquid surface of the processing liquid and the upper edge of the substrate W). For example, when adjusting the liquid depth of the substrate W to 7 mm, the generation unit 31 generates a plate-shaped virtual measuring tool with a thickness of 7 mm according to the operator's instructions.

[0098] Furthermore, the setting unit 32 of the smart glasses 10 sets a part of the virtual measuring tool as a contact detection area according to the operator's instructions. In the third embodiment, the setting unit 32 sets the lower part of the virtual measuring tool as a contact detection area.

[0099] Next, the operator places the virtual measuring tool on the surface of the processing liquid stored in the processing tank 145. Figure 18 shows the state in which the virtual measuring tool 190 is placed on the surface of the processing liquid. The operator moves the virtual measuring tool 190, for example by hand, to position it so that the upper surface of the virtual measuring tool 190 coincides with the surface of the processing liquid. Note that the upper surface of the virtual measuring tool 190 is the surface opposite to the contact detection area 191.

[0100] Subsequently, as shown by arrow AR18, the lifter 147 gradually raises the substrate W in the processing liquid. When the upper end of the rising substrate W comes into contact with the lower surface of the virtual measuring tool 190, the detection unit 33 of the smart glasses 10 detects the contact between the spatial mesh of the substrate W and the contact detection area 191 of the virtual measuring tool 190. Figure 19 shows the state when the upper end of the substrate W is in contact with the virtual measuring tool 190. When the detection unit 33 detects the contact between the spatial mesh of the substrate W and the contact detection area 191 of the virtual measuring tool 190, the notification unit 34 of the smart glasses 10 changes the color of the contact detection area 191, for example, from blue to green. This allows the operator to recognize that the height of the substrate W has reached the target position (in the third embodiment, the position where the distance between the upper end of the substrate W and the liquid surface of the processing liquid is 7 mm).

[0101] When an operator visually confirms that the color of the contact detection area 191 has changed to green, they instruct the control unit of the substrate processing apparatus 140 to stop the lifter 147. As a result, the lifter 147 stops rising when the upper edge of the substrate W contacts the lower surface of the virtual measuring tool 190. This adjusts the liquid depth of the substrate W to the desired target value.

[0102] As the lifter 147 rises further, the upper end of the substrate W enters the interior of the virtual measuring tool 190. When the detection unit 33 detects that the spatial mesh for the substrate W has entered the contact detection area 191 of the virtual measuring tool 190, the notification unit 34 of the smart glasses 10 changes the color of the contact detection area 191 from, for example, green to red. Upon seeing that the color of the contact detection area 191 has changed to red, the operator recognizes that the substrate W has risen beyond the target position and that the liquid depth of the substrate W is now shallower than the target value.

[0103] In the third embodiment, the space including the substrate W and lifter 147 to be adjusted is scanned to obtain a spatial mesh for the substrate W, and contact between the spatial mesh and the contact determination area 191 of the virtual measuring tool 190 is detected. In other words, similar to the first embodiment, contact determination between the real object substrate W and the virtual object virtual measuring tool 190 is made possible through the spatial mesh. This makes it possible to perform accurate liquid depth adjustment work on the substrate W using the virtual measuring tool 190.

[0104] <Variation> While embodiments of the present invention have been described above, various modifications can be made to this invention without departing from its spirit. For example, in each of the above embodiments, the notification unit 34 changed the color of the contact detection area when the spatial mesh and the virtual measuring tool came into contact, but instead of this, or in addition to this, the speaker of the smart glasses 10 may emit a sound to notify the contact when contact between the spatial mesh and the virtual measuring tool is detected.

[0105] Furthermore, while the first and second embodiments performed height adjustment of the processing liquid nozzle 60 and the third embodiment performed liquid depth adjustment of the substrate W, the work support technology according to the present invention may be applied to other adjustment tasks. For example, the work support technology according to the present invention may be used to adjust the height of the cup 55, or to adjust the position of the hand of the indexer robot 41 or the main transport robot 48. Alternatively, a virtual measuring tool at a predetermined angle may be generated and the angle adjustment work may be performed.

[0106] Furthermore, the detection unit 33 may be configured to allow for some margin in its contact detection between the spatial mesh and the virtual measuring tool. That is, the detection unit 33 may be configured to detect contact between the two when the spatial mesh enters a predetermined range (for example, within ±0.2 mm) from the surface of the virtual measuring tool.

[0107] Alternatively, the color of the contact detection area may be changed only at the moment the spatial mesh comes into contact with the virtual measuring tool, or the color of the contact detection area may be changed continuously even after the spatial mesh that has come into contact with the virtual measuring tool has moved away.

[0108] Furthermore, in each of the above embodiments, the notification unit 34 notified when the spatial mesh and the virtual measuring tool came into contact. Alternatively, when the detection unit 33 detects contact between the spatial mesh and the virtual measuring tool, control may be performed to stop the operation of the work target part corresponding to that spatial mesh. For example, when the detection unit 33 detects contact between the spatial mesh of the processing liquid nozzle 60 and the virtual measuring tool 90, the control unit 45 may provide feedback control to the nozzle drive unit 63 to stop the descent of the processing liquid nozzle 60.

[0109] Furthermore, the substrate processing equipment subject to adjustment work is not limited to substrate cleaning equipment; any equipment that performs a predetermined process on substrates, such as heat treatment equipment, exposure equipment, coating and developing equipment, measuring equipment, or inspection equipment, is acceptable.

[0110] Furthermore, the parts subject to adjustment are not limited to elements provided in the substrate processing equipment, but can be any elements provided in industrial equipment. Examples of such industrial equipment include printing processing equipment, film deposition equipment, medical equipment, and visual inspection equipment. [Explanation of Symbols]

[0111] 5. Information and communication network 10 Smart Glasses 21 Imaging Department 22 Communications Department 23 Display section 24 Memory section 25 Spatial recognition section 31 Generation part 32 Setting section 33 Detection unit 34 Announcement Department 40,140 Substrate processing equipment 41 Indexer Robot 45 Control Unit 48 Main transport robot 50 processing units 55 cups 56 Rotating holding part 57 Spin Chuck 58 Spin Motor 60 Processing liquid nozzles 63,68 Nozzle drive unit 65 spray nozzles 70 servers 80 Work support terminals 90,190 virtual measuring tools 91,191 Contact detection site 145 Processing tank 147 Lifter W board

Claims

1. A work support method that assists in a predetermined adjustment operation using a virtual measuring tool, The aforementioned work support method is Creating a target spatial mesh, which is mesh data acquired by scanning the target part to be adjusted using a mobile terminal equipped with a display unit, a communication unit, and a spatial recognition unit. The mobile terminal generates a virtual measuring tool, and a part of the virtual measuring tool is set as a contact detection area. To set the virtual measuring tool in a predetermined position, To move the aforementioned target part toward the target position, To detect contact between the target space mesh and the contact determination area, A work support method equipped with the following features.

2. In the work support method described in claim 1, A work support method further comprising the mobile terminal notifying the user of contact when contact is detected between the target space mesh and the contact determination area.

3. In the work support method described in claim 2, A work support method in which, when the mobile terminal notifies the contact, the mobile terminal changes the color of the contact determination area when contact between the target space mesh and the contact determination area is detected.

4. In the work support method described in claim 3, The virtual measuring tool is configured to be transparent to the target space mesh, A work support method wherein, when the mobile terminal notifies the contact, the mobile terminal changes the color of the contact determination area to a first color when contact between the target space mesh and the contact determination area is detected, and the mobile terminal changes the color of the contact determination area to a second color different from the first color when it is detected that the target space mesh has entered the contact determination area.

5. In the work support method described in claim 2, A work support method in which the mobile terminal emits a sound when contact between the target space mesh and the contact determination area is detected when the mobile terminal notifies the contact.

6. In the work support method described in claim 1, The virtual measuring tool is set to be non-transparent to the target space mesh, A work support method wherein, if the target part moves beyond the target position, the virtual measuring tool is moved toward the target part and the movement of the virtual measuring tool stops when the contact determination part comes into contact with the target space mesh.

7. In the work support method according to any one of claims 1 to 6, The aforementioned target part is a work support method provided in a substrate processing apparatus that performs predetermined processing on a substrate.

8. In the work support method described in claim 7, The aforementioned target part is a nozzle that discharges processing liquid onto the substrate, The adjustment operation is a work support method for adjusting the height of the nozzle.

9. In the work support method described in claim 7, The aforementioned target part is a lifter that raises and lowers the substrate within a processing tank that stores the processing liquid. The adjustment operation is a work support method that involves adjusting the distance between the liquid level of the processing solution and the edge of the substrate.

10. In the work support method described in claim 1, The aforementioned mobile device is a work support method, specifically smart glasses.

11. A work support system that assists with predetermined adjustment tasks using a virtual measuring tool, A portable terminal equipped with a display unit and a communication unit, The aforementioned mobile terminal includes a spatial recognition unit that creates a target spatial mesh, which is mesh data acquired by scanning the target part that is the subject of the adjustment work, The aforementioned mobile terminal includes a generation unit that generates a virtual measuring tool, The mobile terminal includes a setting unit that sets a part of the virtual measuring tool as a contact determination area, A drive unit that moves the target part toward the target position, A detection unit that detects contact between the contact determination portion of the virtual measuring tool installed at a predetermined position and the target space mesh, A work support system equipped with the following features.

12. In the work support system according to claim 11, The aforementioned mobile terminal is a work support system further comprising a notification unit that notifies the user of contact when the detection unit detects contact between the target space mesh and the contact determination area.

13. In the work support system according to claim 12, The notification unit is a work support system that changes the color of the contact determination area when the detection unit detects contact between the target space mesh and the contact determination area.

14. In the work support system according to claim 13, The virtual measuring tool is configured to be transparent to the target space mesh, The notification unit is a work support system that changes the color of the contact determination area to a first color when the detection unit detects contact between the target space mesh and the contact determination area, and changes the color of the contact determination area to a second color different from the first color when the detection unit detects entry of the target space mesh into the contact determination area.

15. In the work support system according to claim 12, The notification unit is a work support system that emits sound when the detection unit detects contact between the target space mesh and the contact determination area.

16. In the work support system according to claim 11, The virtual measuring tool is set to be non-transparent to the target space mesh, A work support system in which, when the drive unit moves the target part beyond the target position, the virtual measuring tool stops moving when the contact determination part comes into contact with the target space mesh when the virtual measuring tool is moved toward the target part.

17. In the work support system according to any one of claims 11 to 16, The aforementioned target part is a work support system provided in a substrate processing device that performs predetermined processing on a substrate.

18. In the work support system according to claim 17, The aforementioned target part is a nozzle that discharges processing liquid onto the substrate, The aforementioned adjustment operation is a work support system for adjusting the height of the nozzle.

19. In the work support system according to claim 17, The aforementioned target part is a lifter that raises and lowers the substrate within a processing tank that stores the processing liquid. The adjustment operation is a work support system that adjusts the distance between the liquid level of the processing solution and the edge of the substrate.

20. In the work support system according to claim 11, The aforementioned mobile device is a work support system consisting of smart glasses.

Images