Modular board assembly and system incorporating same

Abstract

Fluid flow control devices are important components for delivering process fluids for semiconductor manufacturing. These fluid control devices often rely on substrate blocks to direct the fluid between components. A modular substrate assembly is provided that allows for flexible configuration of flow paths within the fluid flow control device. The modular substrate assembly includes multiple substrate blocks, each of which can be connected via one or more connectors. Channels can extend through the connectors to form part of the flow paths within the substrate assembly.

Description

[Technical Field]

[0001] Fluid control is a key technology in semiconductor chip manufacturing. Fluid control devices are important for delivering process fluids at known flow rates in semiconductor manufacturing and other industrial processes. Such devices are used to measure and precisely control the flow of fluids in a variety of applications. This control relies on a substrate assembly that allows flexible configuration of components to build fluid control devices, as well as a fluid delivery module that contains one or more fluid control devices. [Background technology]

[0002] As chip manufacturing technology advances, the demands on fluid control devices have increased. Semiconductor manufacturing processes require more accurate measurements, lower cost devices, better transient response times, and time consistency in gas delivery. Improved substrate assemblies are desired to reduce device costs and modularize components. Summary of the Invention

[0003] The present invention relates to a substrate assembly for use in mass flow controllers or other gas or liquid delivery devices that may be used in a variety of processes, such as semiconductor chip manufacturing, solar panel manufacturing, etc.

[0004] In one embodiment, the present invention is a system for processing an article. The system includes a fluid supply source configured to supply a process fluid, a processing chamber configured to process an article, and a fluid supply module. The fluid supply module has an inlet fluidly connected to the fluid supply source, an outlet fluidly connected to the processing chamber, a flow path extending from the inlet to the outlet, and a substrate panel. The fluid supply module further includes a first component for fluid control, a substrate assembly, and a seal. The first component for fluid control has a first port having a seal cavity, a second port having a seal cavity, and a first flow path extending from the first port to the second port, the first flow path constituting a first portion of the flow path. The substrate assembly includes a first substrate block and a second substrate block. The first substrate block has a first port having a seal cavity, a first male connector, and a first female connector. The second substrate block has a first port having a seal cavity, the first male connector, and the first female connector. A second flow path extends from the first port of the first substrate block to the first port of the second substrate block, the second flow path constituting a second portion of the flow path. A seal is disposed within the seal cavity of the first port of the first component and the seal cavity of the insert for the first port of the first substrate block. The first port of the first component is connected to the first port of the first substrate block of the substrate assembly, fluidly connecting the first flow path with the second flow path.

[0005] In another embodiment, the present invention is a system for processing an article. The system includes a fluid supply source configured to supply a process fluid, a processing chamber configured to process an article, and a fluid supply module. The fluid supply module has an inlet fluidly connected to the fluid supply source, an outlet fluidly connected to the processing chamber, a flow path extending from the inlet to the outlet, and a substrate panel. The fluid supply module further includes a first component for fluid control and a substrate assembly. The first component for fluid control has a first port, a second port, and a first flow path extending from the first port to the second port, the first flow path constituting a first portion of the flow path. The substrate assembly includes a first substrate block and a second substrate block. The first substrate block has a first port, a first male connector, and a first female connector. The second substrate block has a first port, a first male connector, and a first female connector. The first male connector of the first substrate block is connected to the first female connector of the second substrate block, and the first female connector of the first substrate block is connected to the first male connector of the second substrate block. A second flow path extends from the first port of the first substrate block to the first port of the second substrate block, the second flow path constituting a second portion of the flow path, and the first port of the first component is connected to the first port of the first substrate block of the substrate assembly, fluidly connecting the first flow path with the second flow path.

[0006] In another embodiment, the present invention is a substrate assembly, the substrate assembly comprising a first substrate block and a second substrate block. The first substrate block has a first port, a first male connector, a first female connector, a first passage, and a first channel. The first passage extends from the first port to the first channel, and the first channel extends from the first passage to the first male connector. The second substrate block has a first male connector, a first female connector, a second male connector, and a second female connector, and the first channel extends from the first female connector to the second male connector. The first passage extends from the first port to the second male connector through the first passage of the first substrate block, the first channel of the substrate block, and the first channel of the second substrate block.

[0007] In another embodiment, the invention is a substrate assembly, the substrate assembly including first and second end substrate blocks and a plurality of connecting substrate blocks. Each first end substrate block has a first port and a first connector. Each of the plurality of connecting substrate blocks includes a first connector and a second connector. The first end substrate block is connected to a first connecting substrate block of the plurality of connecting substrate blocks. The first connector of the first end substrate block mates with the first connector of the first connecting substrate block. The second end substrate block is connected to a second connecting substrate block of the plurality of connecting substrate blocks, the first connector of the second end substrate block mates with the second connector of the second connecting substrate block. A first flow path extends from the first port of the first end substrate block, through the first connector of the first end substrate block, to the first connecting substrate block of the plurality of connecting substrate blocks.

[0008] In yet another embodiment, the present invention is a system for processing an article. The system includes a fluid supply configured to supply a process fluid, a processing chamber configured to process an article, and a fluid supply module. The fluid supply module includes an inlet fluidly connected to the fluid supply, an outlet fluidly connected to the processing chamber, a flow path extending from the inlet to the outlet, and a substrate panel. The fluid supply module further includes a first component for controlling flow and a substrate assembly. The first component includes a first port, a second port, and a first flow path extending from the first port to the second port, the first flow path forming a first portion of the flow path. The substrate assembly includes first and second end substrate blocks and a plurality of connecting substrate blocks. Each first end substrate block has a first port and a first connector, and each of the plurality of connecting substrate blocks includes a first connector and a second connector. The first end substrate block is connected to a first connecting substrate block of the plurality of connecting substrate blocks, and the first connector of the same end substrate block engages with the first connector of the first connecting substrate block. The second end board block is connected to a second connecting board block of the plurality of connecting board blocks, and the first connector of the second end board block is engaged with the second connector of the second connecting board block. The first port of the first component is connected to the first port of the first end board block of the board assembly, and the first flow path is fluidly connected to the second flow path.

[0009] Further areas of applicability of the present technology will become apparent from the detailed description provided hereinafter. The detailed description and specific examples, while indicating preferred embodiments, are intended for purposes of illustration only and are not intended to limit the scope of the present technology. [Brief explanation of the drawings]

[0010] The invention of this disclosure will be more fully understood from the following detailed description and the accompanying drawings.

[0011] [Figure 1]FIG. 1 is a schematic diagram of a semiconductor device manufacturing system utilizing one or more flow control devices.

[0012] [Figure 2] 2 is a perspective view of a fluid supply module including at least one flow control device that may be used in the process of FIG. 1. FIG.

[0013] [Figure 3A] 3 is a perspective view of the components mounted on the substrate block and substrate assembly used in the fluid supply module of FIG. 2.

[0014] [Figure 3B] 3B is a cross-sectional view of the component, substrate block, and substrate assembly of FIG. 3A taken along line 3B-3B.

[0015] [Figure 3C] FIG. 3B is a top view of the substrate block and substrate assembly of FIG. 3A.

[0016] [Figure 3D] 3B is a bottom view of the component of FIG. 3A.

[0017] [Figure 4] 3 is a perspective view of a substrate assembly used in the fluid supply module of FIG. 2. FIG.

[0018] [Figure 5] FIG. 5 is a cross-sectional view of the substrate assembly of FIG.

[0019] [Figure 6] FIG. 5 is a left side view of the substrate assembly of FIG.

[0020] [Figure 7] FIG. 5 is a right side view of the substrate assembly of FIG.

[0021] [Figure 8A]5 is a perspective view of a substrate block used in the substrate assembly of FIG. 4, having an end tee configuration.

[0022] [Figure 8B] FIG. 8B is a top view of the substrate block of FIG. 8A.

[0023] [Figure 8C] FIG. 8B is a front view of the substrate block of FIG. 8A.

[0024] [Figure 8D] FIG. 8B is a rear view of the substrate block of FIG. 8A.

[0025] [Figure 8E] 8E is a cross-sectional view of the substrate block of FIG. 8A taken along line 8E-8E.

[0026] [Figure 8F] FIG. 8F is a cross-sectional view of the substrate block taken along line 8F-8F of FIG. 8E.

[0027] [Figure 8G] FIG. 8F is a cross-sectional view of the substrate block taken along line 8F-8F of FIG. 8E.

[0028] [Figure 9A] 5 is a perspective view of a substrate block that can be used in the substrate assembly of FIG. 4, having a left-end configuration.

[0029] [Figure 9B] FIG. 9B is a top view of the substrate block of FIG. 9A.

[0030] [Figure 9C] FIG. 9B is a front view of the substrate block of FIG. 9A.

[0031] [Figure 9D] FIG. 9B is a rear view of the substrate block of FIG. 9A.

[0032] [Figure 9E]9E is a cross-sectional view of the substrate block of FIG. 9A taken along line 9E-9E.

[0033] [Figure 9F] FIG. 9F is a cross-sectional view of the substrate block taken along line 9F-9F of FIG. 9E.

[0034] [Figure 9G] FIG. 9G is a cross-sectional view of the substrate block taken along line 9G-9G of FIG. 9E.

[0035] [Figure 10A] 5 is a perspective view of a substrate block that can be used in the substrate assembly of FIG. 4, having a right-hand end configuration.

[0036] [Figure 10B] 10B is a top view of the substrate block of FIG. 10A.

[0037] [Figure 10C] FIG. 10B is a front view of the substrate block of FIG. 10A.

[0038] [Figure 10D] FIG. 10B is a rear view of the substrate block of FIG. 10A.

[0039] [Figure 10E] 10E is a cross-sectional view of the substrate block of FIG. 10A taken along line 10E-10E.

[0040] [Figure 10F] FIG. 10F is a cross-sectional view of the substrate block taken along line 10F-10F in FIG. 10E.

[0041] [Figure 10G] FIG. 10G is a cross-sectional view of the substrate block taken along line 10G-10G of FIG. 10E.

[0042] [Figure 11A] 5 is a perspective view of a substrate block that may be used in the substrate assembly of FIG. 4, having an end T-shaped entry configuration.

[0043] [Figure 11B] FIG. 11B is a top view of the substrate block of FIG. 11A.

[0044] [Figure 11C] FIG. 11B is a front view of the substrate block of FIG. 11A.

[0045] [Figure 11D] FIG. 11B is a rear view of the substrate block of FIG. 11A.

[0046] [Figure 11E] 33 is a cross-sectional view of the substrate block of FIG. 11A taken along line 33-33.

[0047] [Figure 11F] FIG. 11F is a cross-sectional view of the substrate block taken along line 11F-11F in FIG. 11E.

[0048] [Figure 11G] FIG. 11G is a cross-sectional view of the substrate block taken along line 11G-11G in FIG. 11E.

[0049] [Figure 12A] 5 is a perspective view of a substrate block that may be used in the substrate assembly of FIG. 4, having a left end inlet configuration.

[0050] [Figure 12B] FIG. 12B is a top view of the substrate block of FIG. 12A.

[0051] [Figure 12C] FIG. 12B is a front view of the substrate block of FIG. 12A.

[0052] [Figure 12D] FIG. 12B is a rear view of the substrate block of FIG. 12A.

[0053] [Figure 12E] 12E is a cross-sectional view of the substrate block of FIG. 12A taken along line 12E-12E.

[0054] [Figure 12F] FIG. 12F is a cross-sectional view of the substrate block taken along line 12F-12F of FIG. 12E.

[0055] [Figure 12G] 12G is a cross-sectional view of the substrate block taken along line 12G-12G of FIG. 12E.

[0056] [Figure 13A] 5 is a perspective view of a substrate block that may be used in the substrate assembly of FIG. 4, having a right-end entry configuration.

[0057] [Figure 13B] FIG. 13B is a top view of the substrate block of FIG. 13A.

[0058] [Figure 13C] FIG. 13B is a front view of the substrate block of FIG. 13A.

[0059] [Figure 13D] FIG. 13B is a rear view of the substrate block of FIG. 13A.

[0060] [Figure 13E] 13E is a cross-sectional view of the substrate block of FIG. 13A taken along line 13E-13E.

[0061] [Figure 13F] FIG. 13F is a cross-sectional view of the substrate block taken along line 13F-13F in FIG. 13E.

[0062] [Figure 13G] 13G is a cross-sectional view of the substrate block taken along line 13G-13G of FIG. 13E.

[0063] [Figure 14A] 5 is a perspective view of a substrate block that can be used in the substrate assembly of FIG. 4, having a T-shaped feedthrough configuration.

[0064] [Figure 14B]FIG. 14B is a top view of the substrate block of FIG. 14A.

[0065] [Figure 14C] FIG. 14B is a front view of the substrate block of FIG. 14A.

[0066] [Figure 14D] FIG. 14B is a rear view of the substrate block of FIG. 14A.

[0067] [Figure 14E] 14E is a cross-sectional view of the substrate block of FIG. 14A taken along line 14E-14E.

[0068] [Figure 14F] FIG. 14F is a cross-sectional view of the substrate block taken along line 14F-14F of FIG. 14E.

[0069] [Figure 14G] FIG. 14G is a cross-sectional view of the substrate block taken along line 14G-14G of FIG. 14E.

[0070] [Figure 15A] 5 is a perspective view of a board block that can be used in the board assembly of FIG. 4, having a connector left-side pass-through configuration.

[0071] [Figure 15B] FIG. 15B is a top view of the substrate block of FIG. 15A.

[0072] [Figure 15C] FIG. 15B is a front view of the substrate block of FIG. 15A.

[0073] [Figure 15D] FIG. 15B is a rear view of the substrate block of FIG. 15A.

[0074] [Figure 15E] 15E is a cross-sectional view of the substrate block of FIG. 15A taken along line 15E-15E.

[0075] [Figure 15F]FIG. 15F is a cross-sectional view of the substrate block taken along line 15F-15F of FIG. 15E.

[0076] [Figure 15G] FIG. 15G is a cross-sectional view of the substrate block taken along line 15G-15G of FIG. 15E.

[0077] [Figure 16A] 5 is a perspective view of a board block that can be used in the board assembly of FIG. 4, having a connector right-side through configuration.

[0078] [Figure 16B] FIG. 16B is a top view of the substrate block of FIG. 16A.

[0079] [Figure 16C] FIG. 16B is a front view of the substrate block of FIG. 16A.

[0080] [Figure 16D] FIG. 16B is a rear view of the substrate block of FIG. 16A.

[0081] [Figure 16E] 16E is a cross-sectional view of the substrate block of FIG. 16A taken along line 16E-16E.

[0082] [Figure 16F] FIG. 16F is a cross-sectional view of the substrate block taken along line 16F-16F of FIG. 16E.

[0083] [Figure 16G] FIG. 16G is a cross-sectional view of the substrate block taken along line 16G-16G of FIG. 16E.

[0084] [Figure 17A] 5 is a perspective view of a board block that can be used in the board assembly of FIG. 4, having a connector T-shaped interruption configuration.

[0085] [Figure 17B] FIG. 17B is a top view of the substrate block of FIG. 17A.

[0086] [Figure 17C] FIG. 17B is a front view of the substrate block of FIG. 17A.

[0087] [Figure 17D] FIG. 17B is a rear view of the substrate block of FIG. 17A.

[0088] [Figure 17E] 17E is a cross-sectional view of the substrate block of FIG. 17A taken along line 17E-17E.

[0089] [Figure 17F] FIG. 17F is a cross-sectional view of the substrate block taken along line 17F-17F of FIG. 17E.

[0090] [Figure 17G] 17G is a cross-sectional view of the substrate block taken along line 17G-17G of FIG. 17E.

[0091] [Figure 18A] 5 is a perspective view of a board block that can be used in the board assembly of FIG. 4, having a connector double T configuration.

[0092] [Figure 18B] FIG. 18B is a top view of the substrate block of FIG. 18A.

[0093] [Figure 18C] FIG. 18B is a front view of the substrate block of FIG. 18A.

[0094] [Figure 18D] FIG. 18B is a rear view of the substrate block of FIG. 18A.

[0095] [Figure 18E] 18E is a cross-sectional view of the substrate block of FIG. 18A taken along line 18E-18E.

[0096] [Figure 18F] FIG. 18F is a cross-sectional view of the substrate block taken along line 18F-18F of FIG. 18E.

[0097] [Figure 18G] 18G is a cross-sectional view of the substrate block taken along line 18G-18G of FIG. 18E.

[0098] [Figure 19A] 5 is a perspective view of a substrate block that can be used in the substrate assembly of FIG. 4, having a spacer arrangement.

[0099] [Figure 19B] FIG. 19B is a top view of the substrate block of FIG. 19A.

[0100] [Figure 19C] FIG. 19B is a front view of the substrate block of FIG. 19A.

[0101] [Figure 19D] FIG. 19B is a rear view of the substrate block of FIG. 19A.

[0102] [Figure 19E] 19E is a cross-sectional view of the substrate block of FIG. 19A taken along line 19E-19E.

[0103] [Figure 19F] FIG. 19F is a cross-sectional view of the substrate block taken along line 19F-19F of FIG. 19E.

[0104] [Figure 19G] 19G is a cross-sectional view of the substrate block taken along line 19G-19G of FIG. 19E.

[0105] All drawings are schematic and not necessarily to scale. Numbered features in one drawing refer to the same features even if not numbered in other drawings, unless otherwise noted. DETAILED DESCRIPTION OF THE INVENTION

[0106] The description of illustrative embodiments according to the principles of the present invention is intended to be read in conjunction with the accompanying drawings, which are to be considered part of the entire description. In describing the embodiments disclosed herein, references to directions or orientations are used for convenience only and do not limit the scope of the present invention. For example, relative terms such as "bottom," "upper," "horizontal," "vertical," "upper," "lower," "left," "right," "top," and "bottom" (and their derivatives) should be interpreted with reference to the positions shown in the description or the applicable drawings. These relative terms are used for convenience only and do not require that the devices be assembled or operated in a particular orientation. Terms such as "attached," "connected," "coupled," and "coupled" are intended to include attachment, either directly or indirectly, via intervening structures, and both movable and fixed relationships (unless expressly stated otherwise). Additionally, the features and advantages of the present invention have been described with reference to preferred embodiments. Therefore, the present invention should not be limited to these preferred embodiments, but merely examples of non-limiting combinations of features that may exist alone or in combination with other features. The scope of the present invention is to be defined by the appended claims.

[0107] The present invention relates to a fitting assembly for use in a fluid supply module having at least one fluid flow control device. In one embodiment, the fluid supply module may include a mass flow controller for supplying a fluid at a known mass flow rate to a semiconductor manufacturing process or similar process. Semiconductor manufacturing is an example of an industry that demands high performance in fluid flow control. As semiconductor manufacturing technology advances, customers require more sophisticated and complex flow control devices. Modern semiconductor processes require reduced cost and maximized component interchangeability in fluid supply modules. The present invention provides a modular fitting assembly that can be used for a variety of applications within a fluid supply module.

[0108] FIG. 1 shows a schematic diagram of an exemplary processing system 1000. The processing system 1000 may employ one or more flow controllers 100 fluidly connected to a processing chamber 1300. These flow controllers 100 are used to supply one or more process fluids to the processing chamber 1300. The fluids may be provided from multiple fluid sources. Multiple flow controllers 100 may be collectively grouped into a fluid supply module 1400. Optionally, multiple fluid supply modules 1400 may be used in the processing system 1000. Multiple flow controllers 100 are connected to the processing chamber 1300 by an outlet manifold 400. Products such as semiconductors and integrated circuits may be processed in the processing chamber 1300.

[0109] Valves 1100 isolate each flow controller 100 from a processing chamber 1300, thereby allowing each flow controller 100 to be selectively connected or isolated to enable various processing steps. The processing chamber 1300 may include an applicator for applying process fluids supplied by the multiple flow controllers 100, thereby allowing for selective or divergent fluid distribution. The processing chamber 1300 may also be a vacuum chamber or a tank or bath for immersing products in fluids supplied by the multiple flow controllers 100. The flow paths from each fluid supply source to the processing chamber 1300 form fluid supply lines.

[0110] Additionally, processing system 1000 may further include an outlet 1200, isolated from processing chamber 1300 by valve 1100, for purging to allow for evacuation of process fluids and switching of one or more flow controllers 100. Optionally, outlet 1200 may be a vacuum source or a liquid outlet configured to evacuate liquid from processing chamber 1300. Flow controller 100 may be a mass flow controller, a flow splitter, or other device for controlling the flow of process fluids within a processing system. Additionally, valve 1100 may be integrated into flow controller 100, if desired.

[0111] Processes performed in the processing system 1000 include wet cleaning, photolithography, ion implantation, dry etching, atomic layer etching, wet etching, plasma ashing, rapid thermal annealing, furnace annealing, thermal oxidation, chemical vapor deposition (CVD), atomic layer deposition (ALD), physical vapor deposition (PVD), molecular beam epitaxy, laser lift-off, electrochemical deposition, chemical mechanical polishing (CMP), wafer testing, electroplating, or other fluid-based processes.

[0112] 2 shows a schematic diagram of an exemplary fluid supply module 1400. In this embodiment, the fluid supply module 1400 has multiple flow control devices 100, each with multiple fluid inlets 101 and multiple fluid outlets 102. In some embodiments, there is not a one-to-one correspondence between the inlets 101 and the outlets 102. Instead, multiple inlets 101 may be connected to a single outlet 102, or a single inlet 101 may branch into multiple outlets 102. This may be done to mix or combine different fluids before being delivered to the processing chamber 1300. Nevertheless, at least one flow path extends from one of the inlets 101 to one of the outlets 102, and that flow path is formed by each component of the fluid supply module 1400.

[0113] As shown, each flow control device 100 is generally arranged in a row, with multiple devices 100 arranged in parallel rows. However, this arrangement is not limited to this, and any arrangement may be used. The fluid supply module 1400 includes a substrate panel 1402. The substrate panel 1402 serves as a support structure for the fluid supply module 1400, but may also be used simply for ease of assembly. Other support configurations are contemplated. One or more substrate blocks 104 and substrate assemblies 300 are in direct surface contact with the top surface 1404 of the substrate panel 1402. The substrate blocks 104 and substrate assemblies 300 include fluid ports for directing fluid to one or more fluid flow components 200, each of which includes a corresponding fluid port, as described below. The fluid flow components 200 are considered "active components," while the substrate blocks 104 and substrate assemblies 300 are considered "passive components." Fluid flow component 200 may include any of a valve, flow controller, pressure transducer, flow measurement sensor, pressure regulator, flow restrictor, actuator, fluid inlet 101 or outlet 102, or other known flow control component. Anchors are used to couple fluid flow component 200 to substrate block 104 and substrate assembly 300. The anchors may be threaded holes or threaded inserts in substrate block 104 or substrate assembly 300, similar threaded features in substrate panel 1402, nuts, or other fastening means that can securely fasten fluid flow component 200.

[0114] 3A-3D, a portion of the fluid supply module 1400 is shown. In particular, the fluid flow component 200 is shown attached to the substrate block 104 and substrate assembly 300 via fasteners 250. The fasteners 250 may be used for both alignment and fastening and may be replaced by any type of fastener capable of fastening the fluid flow component 200 to the substrate block 104. The fasteners 250 may be bolts, screws, pins, or other known fasteners. However, in other embodiments, the fasteners 250 may be separate from the alignment structures. For example, dowel pins or other pins may be used to align the fluid flow component 200 with the substrate block 104 and substrate assembly 300, and then the fluid flow component 200 is secured in place with separate fasteners. Preferably, the fasteners 250 are provided to penetrate the substrate block 104 and substrate assembly 300 and engage the substrate panel 1402. In another configuration, some of the fasteners 250 may connect the substrate block 104 and substrate assembly 300 to the substrate panel 1402, and additional fasteners 250 may secure the component 200 to the substrate block 104 and substrate assembly 300.

[0115] Although not shown in FIGS. 3A-3D , the substrate panel 1402 includes anchors. These anchors have threaded portions or threaded inserts to accept the fasteners 250. Thus, the fasteners 250 pass through the fastener passages 208 in the fluid flow component 200 and the fastener passages 108 in the base block 104 and are attached to the anchors in the base panel 1402. The fasteners 250 are intended for rough alignment; precise alignment is achieved by other geometric features. Therefore, the fastener passages 108 and 208 do not require a precise fit for the fasteners 250. In another embodiment, the fasteners 250 may be attached directly to the base block 104 via threaded holes or inserts in the fastener passages 108. In this case, the base block 104 may be separately attached to the base panel 1402 with additional fasteners. In other embodiments, the fasteners 250 may be attached to supports or other structural members located below the base panel 1402.

[0116] The substrate blocks 104 need not all be identical. Some substrate blocks 104 may have a single fluid port, while others may have two fluid ports. A substrate block 104 with one fluid port may accept a single component 200 and incorporate tubing or other features to allow fluid to pass through. A substrate block 104 with two fluid ports may accept two separate components 200. The substrate assembly 300 may also incorporate one or more fluid ports, and preferably includes multiple fluid ports to allow connection to multiple components 200.

[0117] As best shown in FIG. 3B , an annular seal 290 is disposed between the fluid flow control component 200 and the substrate block 104. Similarly, another annular seal 290 is disposed between the fluid flow control component 200 and the substrate assembly 300. The seal 290 has a central passage 292 through which fluid can pass. The seal 290 provides an airtight seal between the fluid port 210 of the fluid flow control component 200 and the fluid port 310 of the substrate assembly 300. The fluid port 310 of the substrate assembly 300 includes a seal cavity 312. Each fluid port 210 of the fluid flow control component 200 includes a seal cavity 216. Similarly, the second substrate block 104 has two fluid ports 110, each including a seal cavity 116. The seal 290 is disposed between the seal cavity 312 of the substrate assembly 300 and the seal cavity 216 of the fluid flow control component 200. Similarly, a second seal 290 is disposed between another seal cavity 216 of the fluid flow control component 200 and the seal cavity 116 of the second substrate block 104. A fluid flow path 212 extends through the component 200 from the first port 210 to the second port 210.

[0118] FIG. 3C shows the substrate assembly 300 and the substrate block 104 from above. As described above, the substrate assembly 300 has multiple fluid ports 310, and the second substrate block 104 has two fluid ports 110. The seal 290 is inserted into the seal cavity 116 or 312 to seal with the component 200 attached to the substrate assembly 300 or the substrate block 104. The substrate assembly 300 has a seal side mounting surface 314. The substrate block 104 also has a seal side mounting surface 114. The seal side mounting surfaces 314 and 114 are surfaces that receive the seal 290 into the seal cavities 312 and 116. As described below, the seal side mounting surface 314 is formed by the surfaces of multiple substrate blocks that make up the substrate assembly 300. These substrate blocks have a different configuration from the substrate block 104, which is separate from the substrate assembly 300, as will be described in more detail below. In contrast, the substrate block 104 is formed as a single piece, and the seal side mounting surface 114 is formed entirely by the second substrate block 104. Thus, except for the ports 110, the seal side mounting surface 114 is substantially flat. The fluid flow passage 112 extends within the second substrate block 104 from the first port 110 to the second port 110.

[0119] 3D , the fluid flow control component 200 has a sealing side mounting surface 214 with two fluid ports 210, one of which is an inlet and the other an outlet. As described above, the fluid flow path 212 extends from the fluid opening of one fluid port 210 to the fluid opening of the other fluid port 210. The seal 290 is disposed in compression between the fluid flow control component 200 and the substrate assembly 300 or substrate block 104. During assembly, the fasteners 250 bring the sealing side mounting surfaces 114, 214, 314 closer together, reducing the distance between the sealing side mounting surfaces 114, 314 of the substrate assembly 300 and substrate block 104 and the sealing side mounting surface 214 of the fluid flow control component 200. Optionally, the sealing side mounting surface 214 may be spaced apart from or in contact with the sealing side mounting surfaces 114, 314 of the substrate assembly and substrate block 104.

[0120] 4-7, the substrate assembly 300 is shown in detail. The substrate assembly 300 is comprised of multiple substrate blocks 304. The substrate blocks 304 are available in a variety of configurations, allowing for flexible fluid flow configurations. Optionally, some or all of the substrate blocks 304 may include fluid ports 310 with seal cavities 312 for receiving seals 290, as described above. Alternatively, some substrate blocks 304 may not have fluid ports 310. The substrate blocks 304 may also include fastener passages 308, similar to the substrate blocks 104 and components 200. The fastener passages 308 allow components 200 to be attached to the substrate assembly 300 using fasteners 250, which are secured to the substrate blocks 304 and substrate panels 1402 of the substrate assembly 300, as described above. The substrate blocks 304 may be configured with one, two, or no fastener passages 308, as desired. In this embodiment, the fastener passages 308 extend entirely through the substrate block 304, although in other implementations they may extend only partially through the thickness.

[0121] The substrate assembly 300 has a bottom surface 316 opposite the seal-side mounting surface 314. The seal-side mounting surface 314 is the surface that receives the seal 290 and the component 200. The bottom surface 316 is in direct contact with the top surface 1404 of the substrate panel 1402. The substrate blocks 304 of the substrate assembly 300 are connected to each other via a plurality of coupling holes 318 that extend parallel to the longitudinal axis AA, as best shown in FIG. 5 . First and second fasteners 320 extend through the coupling holes 318.

[0122] The fasteners 320 may be comprised of a threaded rod 321 and nut 322, or a bolt and nut combination. Alternatively, any configuration necessary to apply a compressive force to prevent the base blocks 304 from easily separating during installation and assembly may be used. A number of covers 323 seal the fasteners 320 within the base blocks 304. The covers 323 and fasteners may be retained by snap-fitting, adhesive, press-fitting, or other known techniques to provide an airtight seal and prevent the ingress of gases and liquids.

[0123] The substrate assembly 300 has a plurality of channels 324 extending parallel to the longitudinal axis AA. The channels 324 may extend through all of the substrate blocks 304, or may extend through only some of the substrate blocks 304. The channels 324 may intersect with flow paths 326 extending from the channels 324 to the fluid ports 310. The flow paths 326 thus form a flow path between the fluid ports 310 and the channels 324. Optionally, each substrate block 304 may have one, two, or more channels 324, as well as one, two, more, or no flow paths 326 at all. Thus, the substrate blocks 304 may be configured differently to allow for routing of any fluid flow path. In some configurations, the channels 324 may not be connected to the flow paths 326 or to other channels 324 and may not form part of a fluid flow path. Each substrate block 304 has a length measured along the longitudinal axis AA. Optionally, all substrate blocks 304 may be the same length, some may be of different lengths, or all substrate blocks 304 may be the same length with only one being longer than the others.

[0124] In yet another configuration, the components 200 themselves may double as one or more substrate blocks 304. Therefore, where high-density packaging is required, the components 200 can incorporate connecting structures to function as substrate blocks 304. Similarly, additional fluid channels may be included in the components 200 to facilitate fluid routing within the fluid supply module 1400. These components 200 may be attached to or form part of the substrate assembly 300. In this manner, the substrate assembly 300 functions as the first layer, and the components 200 function as the second layer. In yet another configuration, additional components 200 may be stacked on top of the components in the second layer to form a three-layer fluid channel configuration. This is particularly useful for increasing routing density when the space available for the fluid supply module 1400 is limited.

[0125] 8A-8G, a substrate block 404 is shown. The substrate block 404 has an end tee configuration and can be used in the substrate assembly 300 described above. The substrate block 404 is used as an end block for the substrate assembly 300, as described in more detail below. The substrate block 404 has a fluid port 410 with a seal cavity 412. The fluid port 412 is formed in a seal side mounting surface 414. A fastener passage 408 is also formed in the seal side mounting surface 414 and extends through the substrate block 404. A bottom surface 416 is located opposite the seal side mounting surface 414.

[0126] The base block 404 has an end face 427 and an opposite mating face 428. The base block 404 has a length L from the end face 427 to the mating face 428. A connecting hole 418 extends from the end face 427 to the mating face 428 for receiving the fastener 320. A female connector 430 and a male connector 440 are formed in the mating face 428. The female connector 430 has a cylindrical cavity 431 formed in the mating face 428. The cylindrical cavity 431 terminates in a bottom 432. An annular groove 433 is formed in the bottom 432. The outer diameter of the annular groove 433 may be the same as or smaller than the diameter of the cylindrical cavity 431. A channel 424 extends from the bottom 432 of the female connector 430 to a communication passage 426, which communicates with the fluid port 410.

[0127] The male connector 440 has a cylindrical protrusion 441 protruding from the mating face 428. The cylindrical protrusion 441 terminates in a tip 442. An annular ring 443 protrudes from the tip 442. The outer diameter of the annular ring 443 may be the same as or smaller than the diameter of the cylindrical protrusion 441. A channel 424 extends from the communication passage 426 to the tip 442 of the cylindrical protrusion 441 of the male connector 440. The annular ring 443 has an inner diameter larger than the diameter of the channel 424, such that the tip 442 forms the end face of the cylindrical protrusion 441 and the annular ring 443 protrudes from that end face. The communication passage 426 extends from the channel 424 to the fluid port 410.

[0128] The male connector 440 is configured to connect to a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 430 is configured to connect to a male connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. The male connector 440 is configured to connect to any female connector on a substrate block 304, and vice versa. This can be achieved by a close or interference fit between the respective surfaces. For example, a seal can be achieved by having the outer diameter of the annular ring 443 or the diameter of the cylindrical protrusion 441 larger than the diameter of the cylindrical cavity 430 or the outer diameter of the annular groove 433. Similarly, the inner diameter of the annular ring 443 can be smaller than the inner diameter of the annular groove 433. In another configuration, the end face of the annular ring 443 can be configured to form a seal with the bottom surface of the annular groove 433. In yet another configuration, the tip 442 of the cylindrical protrusion 441 may form a seal with the bottom 432 of the female connector 430. The fasteners 320 may be used to compress the substrate block 304 to keep the male and female connectors securely mated. Other mating geometries are envisioned, with the goal being to provide a fluid-tight connection between the substrate blocks 304 in the substrate assembly 300. As shown, the end T-shaped configuration of the substrate block 404 has a common connection between the male connector 440, the female connector 430, and the fluid port 410 via the channel 424 and the flow passage 426.

[0129] Two fastener cavities 450 are provided in the end face 427. The fastener cavities 450 are formed as stepped counterbore holes and are configured to receive both the nut 322 and the cover 323, or both the head of a bolt and the cover 323. The fastener cavities 450 are configured so that both the nut 322 and the cover 323 fit inside the end face 427. However, no corresponding fastener cavities 450 are provided in the mating face 428 because the mating face 428 is for mating the board block 404 with another board block 304, and the end face 427 forms the end face of the board assembly 300.

[0130] 9A-9G, a substrate block 504 is shown. The substrate block 504 has a left end configuration and can be used in the substrate assembly 300 described above. The substrate block 504 can be used as an end substrate block in the substrate assembly 300, as will be described in more detail below. The substrate block 504 includes a fluid port 510, which has a seal cavity 512. The fluid port 512 is formed in a seal side mounting surface 514. A fastener passage 508 is also formed in the seal side mounting surface 514 and extends through the substrate block 504. A bottom surface 516 is opposite the seal side mounting surface 514.

[0131] The substrate block 504 has an end face 527 and an opposing mating face 528. The length L of the substrate block 504 is measured from the end face 527 to the mating face 528. The fastener holes 518, as described above, extend from the end face 527 toward the mating face 528 for the fasteners 320 to pass through. The mating face 528 is provided with a female connector 530 and a male connector 540. The female connector 530 has a cylindrical cavity 531 formed in the mating face 528. The cylindrical cavity 531 terminates at a bottom 532. An annular groove 533 is formed in the bottom 532. The outer diameter of the annular groove 533 may be equal to or smaller than the diameter of the cylindrical cavity 531. Unlike the substrate block 404, no channel extends from the bottom 532 of the female connector 530.

[0132] Male connector 540 has a cylindrical protrusion 541 extending from mating face 528. Cylindrical protrusion 541 terminates in a tip 542. An annular ring 543 extends from tip 542. The outer diameter of annular ring 543 may be equal to or smaller than the diameter of cylindrical protrusion 541. Channel 524 extends from communication passage 526 to tip 542 of cylindrical protrusion 541 of male connector 540. The inner diameter of annular ring 543 is larger than the diameter of channel 524, so that tip 542 of cylindrical protrusion 541 forms the end face of a protrusion from which annular ring 543 protrudes. Communication passage 526 extends from channel 524 to fluid port 510.

[0133] The male connector 540 is configured to connect to a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 530 is configured to connect to a male connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. The male connector 540 is configured to mate with any female connector on the substrate block 304, and vice versa. This can be achieved by a close or interference fit between the respective surfaces. For example, a seal can be achieved by having the outer diameter of the annular ring 543 or the diameter of the cylindrical protrusion 541 larger than the diameter of the cylindrical cavity 530 or the outer diameter of the annular groove 533. Similarly, the inner diameter of the annular ring 543 can be smaller than the inner diameter of the annular groove 533. In other configurations, the end face of the annular ring 543 can be configured to form a seal with its bottom face. In still other configurations, the tip 542 of the cylindrical protrusion 541 can form a seal with the bottom 532 of the female connector 530. Fasteners 320 may be used to compress the substrate blocks 304 to maintain the mating of the male and female connectors. Other mating geometries are envisioned, with the goal being to provide a fluid-tight connection between the substrate blocks 304. As can be seen, the left-most configuration of substrate block 504 has a single fluid passage extending from fluid port 510 to male connector 540. The passage extends from fluid port 510 through flow passage 526 and channel 524 to male connector 540. Female connector 530 is fluidically isolated from fluid port 510.

[0134] Two fastener cavities 550 are provided in end face 527. Fastener cavities 550 are formed as stepped counterbore holes that can receive both nut 322 and cover 323, or both the head of a bolt and cover 323. Fastener cavities 550 are configured so that nut 322 and cover 323 are positioned inside end face 527. On the other hand, no corresponding fastener cavities 550 are provided in mating face 528. This is because mating face 528 is for mating board block 504 with another board block 304, and end face 527 forms the end face of board assembly 300.

[0135] 10A-G, a substrate block 604 is shown. The substrate block 604 has an end right configuration and can be used in the substrate assembly 300 described above. The substrate block 604 can be used as an end substrate block in the substrate assembly 300, as described below. The substrate block 604 has a fluid port 610 with a seal cavity 612. The fluid port 612 is formed in a seal mounting surface 614. The seal mounting surface 614 also has fastener passages 608 formed therein that extend through the substrate block 604. Opposite the seal mounting surface 614 is a bottom surface 616.

[0136] The substrate block 604 also has an end face 627 and an opposing mating face 628. The length L of the substrate block 604 is measured from the end face 627 to the mating face 628. The mating face 628 is provided with a female connector 630 and a male connector 640. The female connector 630 has a cylindrical cavity 631 formed in the mating face 628, the cavity 631 terminating in a bottom face 632. The bottom face 632 has an annular groove 633 formed therein. The outer diameter of the annular groove 633 may be the same as or smaller than the diameter of the cylindrical cavity 631. A channel 624 extending from the communication passage 626 is connected to the bottom face 632 of the cylindrical cavity 631 of the female connector 630. The communication passage 626 extends from the channel 624 to the fluid port 610.

[0137] Male connector 640 has a cylindrical protrusion 641 extending from mating face 628. Cylindrical protrusion 641 terminates in a distal end 642. Extending from distal end 642 is an annular ring 643. The outer diameter of annular ring 643 may be the same as or smaller than the diameter of cylindrical protrusion 641. Unlike base block 404, no channel extends from bottom surface 642 of male connector 640. Annular ring 643 has an inner diameter larger than the diameter of channel 624, such that distal end 642 of cylindrical protrusion 641 forms the end face of the protrusion from which annular ring 643 protrudes.

[0138] The male connector 640 is configured to connect to a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 630 is configured to connect to a male connector on another substrate block 304 to form a fluid-tight connection. The male connector 640 can mate with any female connector, and vice versa. This can be achieved by a close or interference fit between the respective surfaces. For example, a seal can be formed by the outer diameter of the annular ring 643 or the diameter of the cylindrical protrusion 641 being larger than the outer diameter of the cylindrical cavity 630 or the annular groove 633. Alternatively, the inner diameter of the annular ring 643 can be smaller than the inner diameter of the annular groove 633. In other configurations, the end face of the annular ring 643 can form a seal with the bottom surface of the annular ring. Alternatively, the distal end 642 of the cylindrical protrusion 641 can form a seal with the bottom surface 632 of the female connector 630. Fasteners 320 compress substrate blocks 304, maintaining the mated male and female connectors. Other mating geometries are contemplated, with the goal of any connector geometry providing a fluid-tight connection between substrate blocks 304 within substrate assembly 300. As shown, in the right-most configuration of substrate block 604, a single fluid flow path extends from fluid port 610 to female connector 630. This flow path runs from fluid port 610 through communication path 626 and channel 624 to female connector 630. Male connector 640 is fluidically isolated from fluid port 610.

[0139] Two fastener cavities 650 are provided in end face 627. Fastener cavities 650 are formed as stepped counterbore holes and are configured to receive both nut 322 and cover 323, or the head of a bolt and cover 323. Fastener cavities 650 are configured so that nut 322 and cover 323 are recessed from end face 627. Mating face 628 is configured to mate board block 604 with another board block 304, and therefore does not have corresponding fastener cavities 650. Meanwhile, end face 627 forms the end face of board assembly 300.

[0140] 11A-G, a substrate block 704 is shown. The substrate block 704 has an end T-shaped inlet configuration and can be used in the substrate assembly 300 described above. The substrate block 704 can be used as an end substrate block in the substrate assembly 300, as described below. The substrate block 704 has a fluid port 710 with a seal cavity 712. The fluid port 712 is formed in a seal mounting surface 714. The seal mounting surface 714 also has fastener passages 708 formed therein that extend through the substrate block 704. Opposite the seal mounting surface 714 is a bottom surface 716.

[0141] The substrate block 704 also has an end face 727 and an opposing mating face 728. The length L of the substrate block 704 is measured from the end face 727 to the mating face 728. A tube 760 is formed in the end face 727 and extends from the end face 727. The tube 760 is in fluid communication with the fluid port 710. The tube 760 is used to enable coupling to an inlet or outlet, another component, or other necessary connection. The tube 760 can be welded to other tubing to form a fluid-tight connection. Alternatively, a coupling or connector can be used to connect to the tube 760. The tube 760 incorporates a channel 762 through which fluid flows and which is in fluid communication with the fluid port 710.

[0142] The connecting hole 718 extends from the end surface 727 to the mating surface 728, allowing the passage of the fastener 320 as described above. The mating surface 728 also includes a female connector 730 and a male connector 740. The female connector 730 has a cylindrical cavity 731 formed in the mating surface 728, terminating in a bottom surface 732. The bottom surface 732 defines an annular groove 733. The outer diameter of the annular groove 733 may be the same as or smaller than the diameter of the cylindrical cavity 731. A channel 724 extending from the communication passage 726 is connected to the bottom surface 732 of the cylindrical cavity 731 of the female connector 730. The communication passage 726 leads from the channel 724 to the fluid port 710.

[0143] Male connector 740 has a cylindrical protrusion 741 extending from mating face 728. Cylindrical protrusion 741 terminates in a tip 742. An annular ring 743 extends from tip 742. Optionally, the outer diameter of annular ring 743 may be equal to or smaller than the diameter of cylindrical protrusion 741. A channel 724 extends from tip 742 of cylindrical protrusion 741 of male connector 740 to a communication passage 726. Communication passage 726 extends from channel 724 to a fluid port. Annular ring 743 has an inner diameter greater than the diameter of channel 724, such that tip 742 of cylindrical protrusion 741 defines an end face from which annular ring 743 protrudes.

[0144] The male connector 740 is configured to mate with a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 730 is configured to mate with a male connector on another substrate block 304 to form a fluid-tight connection therebetween. The male connector 740 can interface with a female connector on any substrate block 304, and vice versa. This may be achieved by a close or press-fit fit between the respective surfaces. For example, a seal may be formed when the outer diameter of the annular ring 743 or the diameter of the cylindrical protrusion 741 is larger than the outer diameter of the cylindrical cavity 730 or the annular groove 733. Alternatively, a seal may be formed when the inner diameter of the annular ring 743 is smaller than the inner diameter of the annular groove 733. Furthermore, the end surface of the annular ring 743 may be configured to form a seal with the bottom surface of another annular ring. Alternatively, the tip 742 of the cylindrical protrusion 741 may form a seal with the bottom surface 732 of the female connector 730. Fasteners 320 can be used to compress the substrate blocks 304 together, maintaining the mated male and female connectors. Other mating geometries are contemplated, and the purpose of the connector geometry is to provide a fluid-tight connection between the substrate blocks 304. As shown, the T-shaped end configuration of substrate block 704 defines a fluid flow path from fluid port 710 to female connector 730 and male connector 740. The fluid flow path runs from fluid port 710 through communication path 726 and channel 724 to female connector 730. It also connects to male connector 740 through another communication path 726 and channel 724.

[0145] End face 727 is provided with two fastener cavities 750. Fastener cavities 750 are formed as stepped counterbore holes and are configured to receive nut 322 and cover 323, or bolt head and cover 323. These cavities allow both nut 322 and cover 323 to be held in a recessed position from end face 727. Mating face 728 does not have such cavities 750 because mating face 728 allows mating with another board block 304, and end face 727 forms the termination face of board assembly 300.

[0146] 12A-G, a substrate block 804 is shown. The substrate block 804 has a left-end inlet configuration and can be used with the substrate assembly 300 described above. This substrate block 804 can be used as a termination block for the substrate assembly 300, as will be described in more detail below. The substrate block 804 has a fluid port 810 with a seal cavity 812 formed therein. The fluid port 812 is formed in a seal mounting surface 814. A fastener passage 808 is also formed in the seal mounting surface 814 and extends through the substrate block 804. A bottom surface 816 is opposite the seal mounting surface 814.

[0147] The base block 804 has an end face 827 and an opposing mating face 828. A length L is the distance from the end face 827 to the mating face 828. A tube 860 is formed on the end face 827 and extends from the end face 827. The tube 860 is in fluid communication with the fluid port 810. The tube 860 can provide an inlet, an outlet, or another component or necessary connection. The tube 860 can be welded to another tube to form a fluid-tight connection, or can be connected using a fitting or connector. The tube 860 has a channel 862 formed therein, through which a fluid can flow. The channel 862 is in fluid communication with the fluid port 810.

[0148] A connecting hole 818 for receiving the fastener 320 extends from the end face 827 toward the mating face 828. The mating face 828 also includes a female connector 830 and a male connector 840. The female connector 830 includes a cylindrical cavity 831 formed in the mating face 828. The cavity terminates in a bottom face 832. The bottom face 832 defines an annular groove 833. The outer diameter of the annular groove 833 may be equal to or smaller than the diameter of the cylindrical cavity 831. No channel extends from the bottom face 832 of the cylindrical cavity 831 of the female connector 830. Therefore, there is no fluid path from the fluid port 810 to the female connector 830.

[0149] Male connector 840 has a cylindrical protrusion 841 extending from mating face 828. Protrusion 841 terminates in a tip 842. Extending from tip 842 is an annular ring 843. The outer diameter of annular ring 843 may be equal to or smaller than the diameter of cylindrical protrusion 841. A channel 824 extends from tip 842 of protrusion 841 of male connector 840 to a communication passage 826, which extends from channel 824 to a fluid port. Annular ring 843 has an inner diameter larger than the diameter of channel 824, with tip 842 of protrusion 841 forming an end face from which annular ring 843 protrudes.

[0150] The male connector 840 is configured to mate with a female connector on another substrate block 304 to provide a fluid-tight connection therebetween. Similarly, the female connector 830 is configured to mate with a male connector on another substrate block 304 to provide a fluid-tight connection therebetween. The male connector 840 can interface with a female connector on any substrate block 304, and vice versa. This can be achieved by a close or press-fit fit between the respective surfaces. For example, the outer diameter of the annular ring 843 or the diameter of the cylindrical protrusion 841 can be larger than the outer diameter of the cavity or annular groove 833 of the female connector 830 to form a seal. Alternatively, the inner diameter of the annular ring 843 can be smaller than the inner diameter of the annular groove 833. In other configurations, the end face of the annular ring 843 can form a seal with the bottom surface of the annular ring. Alternatively, the tip 842 of the protrusion 841 can form a seal with the bottom surface 832 of the female connector 830. Fasteners 320 compress and maintain the mating of base blocks 304. Other mating geometries are contemplated, but the goal is to ensure a fluid-tight connection. Base block 804 in the left-end entry configuration has a single flow path from fluid port 810 to male connector 840, via channel 824 and flow path 826 to male connector 840. Female connector 830 is fluidically isolated from fluid port 810.

[0151] Two fastener cavities 850 are formed in end face 827. These cavities are formed as stepped counterbore holes and can accommodate nuts 322 and covers 323 or bolt heads and covers 323. Cavities 850 are configured so that nuts 322 and covers 323 are recessed from end face 827. Mating face 828 does not have corresponding cavities 850 to allow mating with other base blocks 304.

[0152] 13A-G, a substrate block 904 is depicted. The substrate block 904 has a right-end inlet configuration and is available for use in the substrate assembly 300 described above. The substrate block 904 can be used as a terminal substrate block for the assembly 300, as described below. A fluid port 910 is provided, which includes a seal cavity 912. The fluid port 912 is formed in a seal mounting surface 914, and a fastener passage 908 is also formed in this surface and extends through the substrate block 904. A bottom surface 916 is opposite the seal mounting surface 914.

[0153] The base block 904 has an end face 927 and an opposing mating face 928. The length L is from the end face 927 to the mating face 928. A tube 960 is formed in and extends from the end face 927. The tube 960 is in communication with the fluid port 910, allowing for an inlet or outlet, fitting, or other necessary connection. The tube 960 can be welded to another tube to form a fluid-tight connection, or can be connected by a fitting or connector. The tube 960 has a channel 962 formed therein that is in fluid communication with the fluid port 910.

[0154] A connecting hole 918 extends from the end face 927 toward the mating face 928 to allow passage of the fastener 320 as described above. The mating face 928 is provided with a female connector 930 and a male connector 940. The female connector 930 has a cylindrical cavity 931 formed in the mating face 928. The cavity 931 terminates in a bottom face 932 that has an annular groove 933 formed therein. The outer diameter of the annular groove 933 may be equal to or smaller than the diameter of the cylindrical cavity 931. A channel 924 extends from the communication passage 926 to the bottom face 932 of the female connector 930, and the communication passage 926 extends through the channel 924 to the fluid port 910.

[0155] The male connector 940 has a cylindrical protrusion 941 extending from the mating face 928. The cylindrical protrusion 941 terminates in a tip 942. An annular ring 943 extends from the tip 942. Optionally, the outer diameter of the annular ring 943 can be equal to or smaller than the diameter of the cylindrical protrusion 941. A channel 924 leads out from the tip 942 of the cylindrical protrusion 941 of the male connector 940 and extends to a flow path 926. The flow path 926 extends from the channel 924 to a fluid port. The annular ring 943 has an inner diameter larger than the diameter of the channel 924, such that the tip 942 of the cylindrical protrusion 941 forms an end face thereof and the annular ring 943 protrudes from the end face.

[0156] The male connector 940 is configured to connect to a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 930 is configured to connect to a male connector on another substrate block 304 to provide a fluid-tight connection between the two connectors. The male connector 940 is configured to mate with the female connector on any substrate block 304, and vice versa. This can be achieved by a close fit or a press-fit fit between the respective surfaces. For example, a seal can be achieved when the outer diameter of the annular ring 943 or the diameter of the cylindrical protrusion 941 is larger than the diameter of the cylindrical cavity 930 or the outer diameter of the annular groove 933. Similarly, the inner diameter of the annular ring 943 can be smaller than the inner diameter of the annular groove 933. Alternatively, the end face of the annular ring 943 can form a seal with the bottom surface of the annular groove 933, or the tip 942 of the cylindrical protrusion 941 can form a seal with the bottom surface 932 of the female connector 930. Fasteners 320 may be used to compress substrate blocks 304 and ensure that the male and female connectors remain mated. Other mating configurations are contemplated, with the goal of providing a fluid-tight connection between substrate blocks 304 within substrate assembly 300. As can be seen, in the terminal right-side inlet configuration of substrate block 904, a single fluid flow path extends from fluid port 910 to female connector 930. This flow path extends from fluid port 910 through flow path 926 and channel 924 to female connector 930. Male connector 940 is fluidically isolated from fluid port 910.

[0157] The end face 927 has two fastener cavities 950. The fastener cavities 950 are formed as stepped counterbore holes and are configured to receive both the nut 322 and the cover 323, or both the head of a bolt and the cover 323. The fastener cavities 950 are designed so that the nut 322 and the cover 323 are recessed from the end face 927. The mating face 928 does not have fastener cavities 950 because the mating face 928 is configured to mate the board block 904 with another board block 304, while the end face 927 forms the end face of the board assembly 300.

[0158] 14A-G, a substrate block 1504 is illustrated. The substrate block 1504 has a connector T-pass configuration and can be used in the substrate assembly 300 described above. The substrate block 1504 can be used as a connecting substrate block (connector substrate block) within the substrate assembly 300 (described in more detail below). In other words, the substrate block 1504 can be a substrate block 304 located between two end substrate blocks 304. The connecting substrate block allows for the connection of additional components 200 or the rerouting of fluid flow from the channels within each substrate block 304, providing flexibility in fluid flow configuration. The substrate block 1504 has a fluid port 1510, which has a seal cavity 1512. The fluid port 1512 is formed in the sealing mounting surface 1514. A fastener passage 1508 is also formed in the sealing mounting surface 1514 and extends through the substrate block 1504. The bottom surface 1516 is located opposite the seal-side mounting surface 1514 .

[0159] The base block 1504 has opposing mating surfaces 1528. The base block 1504 has a length L from one mating surface 1528 to the other mating surface 1528. The connecting hole 1518 extends from one mating surface 1528 to the other mating surface 1528 to allow the fastener 320 to pass therethrough, as described above. Each mating surface 1528 has a female connector 1530 and a male connector 1540. The female connector 1530 has a cylindrical cavity 1531 formed in the mating surface 1528, the cavity 1531 terminating in a bottom surface 1532. An annular groove 1533 is formed in the bottom surface 1532. Optionally, the outer diameter of the annular groove 1533 may be equal to or smaller than the diameter of the cylindrical cavity 1531.

[0160] Each male connector 1540 has a cylindrical protrusion 1541 extending from mating face 1528. Cylindrical protrusion 1541 terminates in a tip 1542. An annular ring 1543 extends from tip 1542. Optionally, the outer diameter of annular ring 1543 can be equal to or smaller than the diameter of cylindrical protrusion 1541. The inner diameter of annular ring 1543 is greater than the diameter of channel 1524, such that tip 1542 of cylindrical protrusion 1541 forms the end face from which annular ring 1543 protrudes.

[0161] The male connector 1540 is configured to connect to a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 1530 is configured to connect to a male connector on another substrate block 304 to provide a fluid-tight connection between the two connectors. The male connector 1540 can be mated with any female connector, or vice versa. This can be achieved by a close fit or a press-fit between the components. For example, a seal can be achieved if the outer diameter of the annular ring 1543 or the diameter of the cylindrical protrusion 1541 is larger than the diameter of the cylindrical cavity 1530 or the outer diameter of the annular groove 1533. Similarly, the inner diameter of the annular ring 1543 can be smaller than the inner diameter of the annular groove 1533. Alternatively, the end face of the annular ring 1543 can form a seal with the bottom surface of the annular groove 1533, and the tip 1542 of the cylindrical protrusion 1541 can form a seal with the bottom surface 1532 of the female connector 1530. Fasteners 320 may be used to compress the board blocks 304 together and keep the male and female connectors securely mated. Other mating configurations are contemplated, with the goal being to achieve a fluid-tight connection between the board blocks 304 within the board assembly 300.

[0162] As shown, the T-shaped connector tee through configuration of the substrate block 1504 has a fluid path extending from a fluid port 1510 to a female connector 1530 on a first mating face 1528 and to a male connector 1540 on a second mating face 1528. A channel 1524 extends from a bottom 1532 of a cylindrical cavity 1531 of the female connector 1530 on the first mating face 1528 to a distal end 1542 of a cylindrical protrusion 1541 of the male connector 1540 on the second mating face 1528. A passage 1526 extends from the channel 1524 to the fluid port 1510. Another flow path is formed by a second channel 1524 that extends from the distal end 1542 of the cylindrical protrusion 1541 of the male connector 1540 on the first mating surface 1528 to the bottom 1532 of the cylindrical cavity 1531 of the female connector 1530 on the second mating surface 1528. The second channel 1524 is not connected to the fluid port 1510 and is isolated from the fluid port 1510.

[0163] 15A-G, a substrate block 1604 is shown. The substrate block 1604 has a connector left-through configuration and can be used in the substrate assembly 300 described above. The substrate block 1604 can be used as a connecting substrate block (connector substrate block) in the substrate assembly 300, as described below. In other words, the substrate block 1604 can be a substrate block 304 disposed between two end substrate blocks 304. The connecting substrate block allows for connections to additional components 200 and for routing fluid paths from channels within each substrate block 304, allowing for flexible configuration of fluid paths. The substrate block 1604 includes a fluid port 1610 having a seal cavity 1612. The fluid port 1612 is formed in the sealing mounting surface 1614. A fastener passage 1608 is also formed in the sealing mounting surface 1614 and extends through the substrate block 1604. The bottom surface 1616 is located opposite the seal-side mounting surface 1614 .

[0164] The substrate block 1604 also includes opposing mating surfaces 1628. The substrate block 1604 has a length L from the first mating surface 1628 to the second mating surface 1628. A connecting hole 1618 for receiving the fastener 320 extends from one mating surface 1628 to the other mating surface 1628. Each mating surface 1628 includes a female connector 1630 and a male connector 1640. The female connector 1630 includes a cylindrical cavity 1631 formed in the mating surface 1628. The cylindrical cavity 1631 terminates at a bottom 1632. An annular groove 1633 is formed in the bottom 1632. Optionally, the annular groove 1633 may have an outer diameter equal to or smaller than the diameter of the cylindrical cavity 1631.

[0165] Each male connector 1640 includes a cylindrical protrusion 1641 extending from the mating face 1628. The cylindrical protrusion 1641 terminates in a distal end 1642. An annular ring 1643 extends from the distal end 1642. Optionally, the annular ring 1643 may have an outer diameter equal to or smaller than the diameter of the cylindrical protrusion 1641. The annular ring 1643 also has an inner diameter greater than the diameter of the channel 1624, such that the distal end 1642 of the cylindrical protrusion 1641 forms the end face of the cylindrical protrusion 1641, from which the annular ring 1643 protrudes.

[0166] The male connector 1640 is configured to mate with a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 1630 is configured to mate with a male connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. The male connector 1640 can mate with any female connector on a substrate block 304, and vice versa. This may be achieved by a close fit or an interference fit between the respective surfaces. For example, a seal is achieved when the outer diameter of the annular ring 1643 or the diameter of the cylindrical protrusion 1641 is larger than the diameter of the cylindrical cavity 1630 or the outer diameter of the annular groove 1633. Similarly, a seal is formed when the inner diameter of the annular ring 1643 is smaller than the inner diameter of the annular groove 1633. In another configuration, an end face of the annular ring 1643 may be configured to form a seal with the bottom surface of the annular ring 1643. In yet another configuration, the distal end 1642 of the cylindrical projection 1641 may form a seal with the bottom surface 1632 of the female connector 1630. The fasteners 320 may be used to compress the substrate block 304 and maintain the mated state of the male and female connectors. Other mating geometries are envisioned, with the goal of any connector geometry being to provide a fluid-tight connection between the substrate blocks 304 within the substrate assembly 300.

[0167] As shown, the connector left-side pass-through feature of the substrate block 1604 has a fluid passage extending from the fluid port 1610 to the male connector 1640 on the first mating surface 1628. The channel 1624 extends from the distal end 1642 of the cylindrical protrusion 1641 of the male connector 1640 on the first mating surface 1628 to a passage 1626. The passage 1626 extends from the channel 1624 to the fluid port 1610. Another fluid passage is formed by a second channel 1624 extending from the bottom 1632 of the cylindrical cavity 1631 of the female connector 1630 on the first mating surface 1628 to the distal end 1642 of the cylindrical protrusion 1641 of the male connector 1640 on the second mating surface 1628. The second channel 1624 is not connected to the fluid port 1610 and is isolated from the fluid port 1610.

[0168] 16A-G, a substrate block 1704 is shown. The substrate block 1704 has a connector-right-side penetration configuration and can be used in the substrate assembly 300 described above. The substrate block 1704 can be used as a connecting substrate block (connector substrate block) in the substrate assembly 300, as described below. In other words, the substrate block 1704 can be a substrate block 304 disposed between two end substrate blocks 304. The connecting substrate block allows for connections to additional components 200 and for directing fluid paths from channels within each substrate block 304, allowing for flexible configuration of fluid paths. The substrate block 1704 includes a fluid port 1710 having a seal cavity 1712. The fluid port 1712 is formed in the sealing side mounting surface 1714. A fastener passage 1708 is also formed in the sealing side mounting surface 1714 and extends through the substrate block 1704. A bottom surface 1716 is located opposite the sealing side mounting surface 1714.

[0169] The base block 1704 also includes opposing mating surfaces 1728. The base block 1704 has a length L from the first mating surface 1728 to the second mating surface 1728. A connecting hole 1718 for receiving the fastener 320 extends from one mating surface 1728 to the other mating surface 1728. Each mating surface 1728 includes a female connector 1730 and a male connector 1740. The female connector 1730 includes a cylindrical cavity 1731 formed in the mating surface 1728, the cylindrical cavity 1731 terminating at a bottom 1732. An annular groove 1733 is formed in the bottom 1732. Optionally, the annular groove 1733 may have an outer diameter equal to or smaller than the diameter of the cylindrical cavity 1731.

[0170] The male connectors 1740 each include a cylindrical protrusion 1741 extending from the mating face 1728. The cylindrical protrusions 1741 terminate at distal ends 1742 from which annular rings 1743 extend. Optionally, the outer diameter of the annular rings 1743 may be equal to or smaller than the diameter of the cylindrical protrusions 1741. The annular rings 1743 also have an inner diameter that is larger than the diameter of the channel 1724, with the distal ends 1742 of the cylindrical protrusions 1741 forming the end face from which the annular rings 1743 protrude.

[0171] The male connector 1740 is configured to mate with a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 1730 is configured to mate with a male connector on another substrate block 304 to provide a fluid-tight connection. The male connector 1740 is configured to mate with a female connector on any other substrate block 304, and vice versa. This can be achieved by a close or interference fit between the surfaces. For example, a seal can be formed if the outer diameter of the annular ring 1743 or the diameter of the cylindrical protrusion 1741 is larger than the diameter of the cylindrical cavity 1730 or the outer diameter of the annular groove 1733. Similarly, a seal can be formed if the inner diameter of the annular ring 1743 is smaller than the inner diameter of the annular groove 1733. In another configuration, an end face of the annular ring 1743 can be configured to form a seal with the bottom surface of the annular ring 1733. In yet another configuration, the distal end 1742 of the cylindrical projection 1741 may form a seal with the bottom 1732 of the female connector 1730. The fasteners 320 are used to compress the substrate block 304 to keep the male and female connectors securely mated. Various other mating geometries are contemplated, with the goal being to provide a fluid-tight connection between the substrate blocks 304 within the substrate assembly 300.

[0172] As shown, the connector right-side pass-through feature of the substrate block 1704 has a flow path extending from the fluid port 1710 to the bottom 1732 of the cylindrical cavity 1731 of the female connector 1730 on the first mating face 1728. A channel 1724 extends from the bottom 1732 of the cylindrical cavity 1731 of the female connector 1730 on the first mating face 1728 to a passage 1726. The passage 1726 extends from the channel 1724 to the fluid port 1710. Another flow path is formed by a second channel 1724 extending from the distal end 1742 of the cylindrical protrusion 1741 of the male connector 1740 on the first mating face 1728 to the bottom 1732 of the cylindrical cavity 1731 of the female connector 1730 on the second mating face 1728. The second channel 1724 is not connected to the fluid port 1710 and is isolated from the fluid port 1710 .

[0173] 17A-G, a substrate block 1804 is shown. The substrate block 1804 has a connector T-blocking configuration and can be used in the substrate assembly 300 described above. The substrate block 1804 can be used as a connecting substrate block (connector substrate block) in the substrate assembly 300, as described below. In other words, the substrate block 1804 can be a substrate block 304 disposed between two end substrate blocks 304. The connecting substrate block allows for connection to additional components 200 and for fluid paths to be routed from channels within each substrate block 304, allowing for flexible fluid path configuration. The substrate block 1804 includes a fluid port 1810 having a seal cavity 1812. The fluid port 1812 is formed in the sealing mounting surface 1814. A fastener passage 1808 is also formed in the sealing mounting surface 1814 and extends through the substrate block 1804. A bottom surface 1816 is located opposite the sealing mounting surface 1814.

[0174] The substrate blocks 1804 have opposing mating surfaces 1828. The length L of the substrate block 1804 is the length L from the first mating surface 1828 to the second mating surface 1828. The mating holes 1818 extend from the first mating surface 1828 to the second mating surface 1828, allowing the fasteners 320 to pass therethrough, as described above. Each mating surface 1828 is provided with a female connector 1830 and a male connector 1840. The female connector 1830 has a cylindrical cavity 1831 formed in the mating surface 1828, the cavity 1831 terminating in a bottom surface 1832. An annular groove 1833 is formed in the bottom surface 1832. Note that the outer diameter of the annular groove 1833 may be equal to or smaller than the diameter of the cylindrical cavity 1831.

[0175] Each male connector 1840 has a cylindrical protrusion 1841 extending from mating face 1828. Cylindrical protrusion 1841 terminates in a tip 1842. An annular ring 1843 extends from tip 1842. The outer diameter of annular ring 1843 may be equal to or smaller than the diameter of cylindrical protrusion 1841. Additionally, the inner diameter of annular ring 1843 is greater than the diameter of channel 1824, such that tip 1842 of cylindrical protrusion 1841 forms an end face from which annular ring 1843 protrudes.

[0176] The male connector 1840 is configured to mate with a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 1830 is configured to mate with a male connector on another substrate block 304 to provide a fluid-tight connection. The male connector 1840 can interface with any female connector, and the female connector 1830 can interface with any male connector. This connection can be achieved by a tight fit or a press fit. For example, a seal can be formed by having the outer diameter of the annular ring 1843 or the diameter of the cylindrical protrusion 1841 larger than the outer diameter of the cylindrical cavity 1830 or the annular groove 1833. A seal can also be achieved by having the inner diameter of the annular ring 1843 smaller than the inner diameter of the annular groove 1833. Other configurations include an end face of the annular ring 1843 forming a seal with the bottom surface of the annular ring 1833, or a tip 1842 of the cylindrical protrusion 1841 forming a seal with the bottom surface 1832 of the female connector 1830. Fasteners 320 may compress the board blocks 304 together to ensure that the male and female connectors remain mated. Other mating geometries are contemplated, and the purpose of the connector geometries is to provide a fluid-tight connection between the board blocks 304 within the board assembly 300.

[0177] As shown, the connector T-interrupt configuration of the substrate block 1804 has a fluid passage extending from the fluid port 1810 to the male connector 1840 on the first mating surface 1828 and the female connector 1830 on the second mating surface 1828. The channel 1824 extends from the bottom surface 1832 of the cylindrical cavity 1831 of the female connector 1830 on the second mating surface 1828 to the tip 1842 of the cylindrical protrusion 1841 of the male connector 1840 on the first mating surface 1828. A passage 1826 extends from the channel 1824 to the fluid port 1810. No fluid passage is formed between the female connector 1830 on the first mating surface 1828 and the male connector 1840 on the second mating surface 1828.

[0178] 18A-G, a substrate block 1904 is shown. The substrate block 1904 has a connector double-T configuration and can be used in the substrate assembly 300 described above. The substrate block 1904 can be used as a connecting substrate block (connector substrate block) within the substrate assembly 300, as described below. In other words, the substrate block 1904 is a substrate block 304 located between two end substrate blocks 304. The connecting substrate block allows for the attachment of additional components 200 and routing of flow from channels within each substrate block 304, enabling flexible configuration of flow paths. The substrate block 1904 includes a fluid port 1910 having a seal cavity 1912. The fluid port 1912 is formed in the sealing mounting surface 1914. A fastener passage 1908 is also formed in the sealing mounting surface 1914 and extends through the substrate block 1904. A bottom surface 1916 is located opposite the sealing mounting surface 1914.

[0179] The substrate blocks 1904 also have opposing mating surfaces 1928. The length L of the substrate block 1904 is the distance from the first mating surface 1928 to the second mating surface 1928. A mating hole 1918 extends from the first mating surface 1928 to the second mating surface 1928, allowing the fastener 320 to pass therethrough, as described above. Each mating surface 1928 is provided with a female connector 1930 and a male connector 1940. The female connector 1930 has a cylindrical cavity 1931 formed in the mating surface 1928, the cavity 1931 terminating in a bottom surface 1932. An annular groove 1933 is formed in the bottom surface 1932. Note that the outer diameter of the annular groove 1933 may be equal to or smaller than the diameter of the cylindrical cavity 1931.

[0180] Each male connector 1940 has a cylindrical protrusion 1941 extending from mating face 1928. Cylindrical protrusion 1941 terminates in a tip 1942. An annular ring 1943 extends from tip 1942. Optionally, the outer diameter of annular ring 1943 can be equal to or smaller than the diameter of cylindrical protrusion 1941. Annular ring 1943 has an inner diameter that is larger than the diameter of channel 1924, such that tip 1942 of cylindrical protrusion 1941 forms the end face of protrusion 1941 from which annular ring 1943 protrudes.

[0181] The male connector 1940 is configured to mate with a female connector on another substrate block 304 to provide a fluid-tight connection between the male and female connectors. Similarly, the female connector 1930 is configured to mate with a male connector on another substrate block 304 to provide a fluid-tight connection between the two. The male connector 1940 can be mated with any female connector, and the female connector 1930 can be mated with any male connector. This can be achieved by a tight or interference fit between the respective contacting surfaces. For example, a seal can be achieved by having the outer diameter of the annular ring 1943 or the diameter of the cylindrical protrusion 1941 larger than the diameter of the cylindrical cavity 1930 or the outer diameter of the annular groove 1933. Similarly, the inner diameter of the annular ring 1943 can be smaller than the inner diameter of the annular groove 1933. In other configurations, the end face of the annular ring 1943 can form a seal with the bottom surface of the annular ring. In yet another configuration, the tip 1942 of the cylindrical protrusion 1941 can form a seal with the bottom surface 1932 of the female connector 1930. Fasteners 320 are used to compress the base blocks 304 and keep the male and female connectors mated. Other mating geometries are contemplated, with the goal being to provide a fluid-tight connection between the base blocks 304 in any connector geometry.

[0182] As can be seen, the connector double-tee configuration of the base block 1904 defines a fluid path from the fluid port 1910 to the male connector 1940 on the first mating surface 1928 and the female connector 1930 on the second mating surface 1928. A first channel 1924 extends from a bottom surface 1932 of a cylindrical cavity 1931 of the female connector 1930 on the second mating surface 1928 to a tip 1942 of the male connector 1940 on the first mating surface 1928. In addition, a fluid path extends from the fluid port 1910 to the female connector 1930 on the first mating surface 1928 and the male connector 1940 on the second mating surface 1928. A second channel 1924 extends from a bottom surface 1932 of the female connector 1930 on the first mating surface 1928 to a tip 1942 of the male connector 1940 on the second mating surface 1928. There are first and second communication paths 1926 leading from the first and second channels 1924, respectively, to the fluid port 1910. The fluid port 1910 is therefore in fluid communication with the male and female connectors 1940, 1930 on both mating faces 1928.

[0183] It is contemplated that substrate assemblies 300 including the substrate blocks disclosed herein can be used in any substrate block configuration. This allows for flexible mounting of components 200 necessary for a desired flow path configuration, allowing for flexible placement as needed. It is further contemplated that components 200 may be integrated into the substrate assembly 300 to improve packaging density or achieve other system objectives. For example, the substrate block 304 may include components 200 that function as flow mixers, check valves, etc. The components 200 may not be mounted on the sealing surface of the substrate assembly 300, but may instead form part of an assembly onto which additional components 200 are mounted. As can be seen, the modular nature of the substrate assembly 300 allows for flexible design and assembly without requiring multiple unique substrate blocks 104 for specific applications.

[0184] 19A-G, a substrate block 2004 is shown. The substrate block 2004 has a spacer configuration and can be used in the substrate assembly 300 described above. The substrate block 2004 can be used as a connecting substrate block (connector substrate block) in the substrate assembly 300, as described in detail below. That is, the substrate block 2004 can be a substrate block 304 disposed between two end substrate blocks 304. The connecting substrate block allows for the attachment of additional components 200 and the configuration of fluid paths from channels within each substrate block 304, enabling flexible fluid path configurations. The substrate block 2004 does not have fluid ports or fastener passages, but has dimensions that form part of the fluid flow path and allow for the attachment of components 200 on other substrate blocks 304. The substrate block has a sealing side mounting surface 2014 that is flush with the sealing side mounting surface of the other substrate block 304. A bottom surface 2016 is located opposite the sealing side mounting surface 2014.

[0185] The substrate block 2004 also has opposing mating faces 2028. The length L of the substrate block 2004 is measured from the first mating face 2028 to the second mating face 2028. The length L of the substrate block 2004 may be greater or less than the lengths L of the other substrate blocks. Optionally, the length L may be the same as the other substrate blocks, but need not be limited to a particular length to accommodate a variety of components 200 having different port spacings or dimensional constraints. Generally, all of the aforementioned substrate blocks have the same length L. The substrate block 2004 may be longer than the other substrate blocks.

[0186] A coupling hole 2018 extends from one mating surface 2028 to the other mating surface 2028 to allow the fastener 320 to pass therethrough. Each mating surface 2028 is provided with a female connector 2030 and a male connector 2040. The female connector 2030 has a cylindrical cavity 2031 formed in the mating surface 2028. The cylindrical cavity 2031 terminates in a bottom surface 2032. An annular groove 2033 is formed in the bottom surface 2032. Optionally, the outer diameter of the annular groove 2033 may be equal to or smaller than the diameter of the cylindrical cavity 2031.

[0187] Each male connector 2040 has a cylindrical protrusion 2041 extending from mating face 2028. Cylindrical protrusion 2041 terminates in a tip 2042. An annular ring 2043 extends from tip 2042. Optionally, the outer diameter of annular ring 2043 may be equal to or smaller than the diameter of cylindrical protrusion 2041. The inner diameter of annular ring 2043 is greater than the diameter of channel 2024, such that tip 2042 of cylindrical protrusion 2041 forms the end face of the protrusion, from which annular ring 2043 protrudes.

[0188] The male connector 2040 is configured to mate with a female connector on another substrate block 304 to provide a fluid-tight connection. Similarly, the female connector 2030 is configured to mate with a male connector on another substrate block 304 to provide a fluid-tight connection. The male connector 2040 and the female connector 2030 are connectable with the female and male connectors of any other substrate block, respectively. This may be achieved by a tight or interference fit between contacting surfaces. For example, a seal is achieved when the outer diameter of the annular ring 2043 or the diameter of the protrusion 2041 is larger than the diameter of the cavity 2030 or the outer diameter of the annular groove 2033. Similarly, the inner diameter of the annular ring 2043 may be smaller than the inner diameter of the annular groove 2033. In other configurations, the end face of the annular ring 2043 may form a seal with its bottom surface, or the tip 2042 of the protrusion 2041 may form a seal with the bottom surface 2032 of the female connector 2030. Fasteners 320 may compress the substrate blocks 304 to keep the connector securely mated. Other mating geometries are contemplated, with the goal being to provide a fluid-tight connection between the substrate blocks 304 in any configuration.

[0189] As shown, the spacer arrangement of the substrate block 2004 has a flow path between the male connector 2040 on the first mating surface 2028 and the female connector 2030 on the second mating surface 2028. The first channel 2024 extends from the bottom surface 2032 of the cylindrical cavity 2031 of the female connector 2030 on the second mating surface 2028 to the tip 2042 of the cylindrical protrusion 2041 of the male connector 2040 on the first mating surface 2028. The second channel 2024 extends from the bottom surface 2032 of the cylindrical cavity 2031 of the female connector 2030 on the first mating surface 2028 to the tip 2042 of the cylindrical protrusion 2041 of the male connector 2040 on the second mating surface 2028. Thus, the two parallel channels 2024 form first and second flow paths through the substrate block 2004.

[0190] It is contemplated that substrate assemblies 300 may be used that include substrate blocks of any configuration disclosed herein. This allows for the flexibility of mounting components 200 necessary to achieve a desired flow path configuration and the flexibility of repositioning components 200 as needed. It is further contemplated that components 200 may be integrated into the substrate assembly 300 to improve packaging density or achieve other system goals. For example, the substrate block 304 may include components 200 that function as fluid mixers, check valves, or other components. The components 200 need not be mounted on the sealing side mounting surface of the substrate assembly 300; instead, they may form part of the substrate assembly, with additional components 200 mounted thereon. As should be apparent, the modular nature of the substrate assembly 300 allows for design and assembly flexibility without requiring the provision of multiple application-specific substrate blocks 104.

[0191] Example Claim Set [Claim 1] 1. A system for processing items, comprising: a fluid supply configured to supply a process fluid; a processing chamber configured to process the article; and a fluid supply module, the fluid supply module comprising: an inlet fluidly connected to the fluid source; an outlet fluidly connected to the processing chamber; a flow path extending from the inlet to the outlet; PCB panel, a first component for controlling flow, the first component including a first port having a seal cavity, a second port having a seal cavity, and a first flow path extending from the first port to the second port, the first flow path forming a first portion of the flow path; a substrate assembly attached to the substrate panel, the substrate assembly comprising: a first substrate block having a first port, a first male connector, and a first female connector, the first port including a seal cavity; a second substrate block having a first port, a first male connector, and a first female connector, the first port including a seal cavity, and a second flow path extending from the first port of the first substrate block to the first port of the second substrate block forming a second portion of the flow path; and a substrate assembly including a seal disposed within a seal cavity of the first port of the first component and a seal cavity of the first port of the first substrate block. a fluid supply module including a first port of the first component connected to a first port of the first substrate block of the substrate assembly, and the first flow path fluidly connected to the second flow path. [Claim 2] 2. The system of claim 1, wherein a first male connector of the first substrate block is connected to a first female connector of the second substrate block. [Claim 3] 3. The system of claim 2, wherein a first female connector of the first substrate block is connected to a first male connector of the second substrate block. [Claim 4] 4. The system of claim 2 or claim 3, wherein a first male connector of the first substrate block forms a fluid-tight connection with a first female connector of the second substrate block. [Claim 5] 5. The system according to claim 1, wherein the second substrate block further comprises a second male connector and a second female connector. [Claim 6] 6. The system of claim 5, wherein the second substrate block further comprises a channel, the channel extending from a first male connector of the second substrate block to a second female connector of the second substrate block. [Claim 7] 7. The system of claim 6, wherein the second substrate block includes a passageway extending from a first port of the second substrate block to the channel. [Claim 8] 8. The system of claim 6 or claim 7, wherein the second substrate block further comprises a second channel, the second channel extending from a second male connector of the second substrate block to a first female connector of the second substrate block, the second channel extending parallel to the channel. [Claim 9] 9. The system of claim 8, wherein the second substrate block includes a second communication passageway extending from a first port of the second substrate block to the second channel. [Claim 10] 10. A system according to any one of claims 1 to 9, wherein the substrate assembly further comprises a third substrate block, the third substrate block including a first male connector, a first female connector, a second male connector, and a second female connector, and the third substrate block is connected to the second substrate block. [Claim 11] 11. The system of claim 10, wherein the second flow path extends through the third substrate block. [Claim 12] 12. The system of claim 10 or claim 11, wherein the third substrate block comprises a first port. [Claim 13] 12. A system according to claim 10 or claim 11, wherein the third substrate block does not have any ports. [Claim 14] 14. The system of claim 1, wherein the substrate assembly further comprises a longitudinal axis extending through the first substrate block and the second substrate block, and wherein each of the first substrate block and the second substrate block has a length measured along the longitudinal axis, the lengths being equal. [Claim 15] 15. The system of claim 14, further comprising a third substrate block, the third substrate block having a length measured along the longitudinal axis that is different from the lengths of the first substrate block and the second substrate block. [Claim 16] 16. The system of claim 15, wherein the third substrate block has a length greater than the lengths of the first and second substrate blocks. [Claim 17] 17. The system according to claim 1, wherein the first substrate block forms a T-shaped portion. [Claim 18] 17. The system according to claim 1, wherein the first substrate block further comprises a tube portion, the tube portion being fluidly connected to the first port. [Claim 19] 19. A system as described in any one of claims 1 to 18, wherein the substrate assembly further comprises a first fastening member and a second fastening member, the first fastening member and the second fastening member extending through the first substrate block and the second substrate block. [Claim 20] 20. The system of claim 19, wherein the substrate assembly further comprises a longitudinal axis, and the first fastening member and second fastening member extend parallel to the longitudinal axis. [Claim 21] 21. A system as claimed in any one of claims 1 to 20, wherein the first male connector of the first substrate block comprises a cylindrical protrusion and an annular ring extending from a distal end of the cylindrical protrusion. [Claim 22] 22. A system according to any one of claims 1 to 21, wherein the first female connector of the first substrate block comprises a cylindrical cavity and an annular groove formed in the bottom of the cylindrical cavity. [Claim 23] 1. A system for processing items, comprising: a fluid supply configured to supply a process fluid; a processing chamber configured to process the article; and a fluid supply module, the fluid supply module comprising: an inlet fluidly connected to the fluid source; an outlet fluidly connected to the processing chamber; a flow path extending from the inlet to the outlet; PCB panel, a first component for controlling flow, the first component comprising a first port, a second port, and a first flow path extending from the first port to the second port, the first flow path forming a first portion of the flow path; a substrate assembly attached to the substrate panel, the substrate assembly comprising: a first substrate block having a first port, a first male connector, and a first female connector; a second substrate block having a first port, a first male connector, and a first female connector, wherein the first male connector of the first substrate block is connected to the first female connector of the second substrate block, and the first female connector of the first substrate block is connected to the first male connector of the second substrate block; a second substrate block having a second flow path extending from a first port of the first substrate block to a first port of the second substrate block, the second flow path forming a second portion of the flow path. a fluid supply module including: wherein a first port of the first component is connected to a first port of the first substrate block of the substrate assembly, and the first flow path is fluidly connected to the second flow path. [Claim 24] 24. The system of claim 23, wherein a first male connector of the first substrate block forms a fluid-tight connection with a first female connector of the second substrate block. [Claim 25] 25. The system of claim 23 or claim 24, wherein the second substrate block further comprises a second male connector and a second female connector. [Claim 26] 26. The system of claim 25, wherein the second substrate block further comprises a channel, the channel extending from a first male connector to a second female connector of the second substrate block. [Claim 27] 27. The system of claim 26, wherein the second substrate block comprises a passageway extending from a first port of the second substrate block to the channel. [Claim 28] 28. A system as described in claim 26 or claim 27, wherein the second substrate block further comprises a second channel, the second channel extending from a second male connector of the second substrate block to a first female connector of the second substrate block, the second channel extending parallel to the channel. [Claim 29] 30. The system of claim 28, wherein the second substrate block includes a second communication passageway extending from a first port of the second substrate block to the second channel. [Claim 30] 30. A system as claimed in any one of claims 23 to 29, wherein the substrate assembly further comprises a third substrate block, the third substrate block including a first male connector, a first female connector, a second male connector and a second female connector, and the third substrate block is connected to the second substrate block. [Claim 31] 31. The system of claim 30, wherein the second flow path extends through the third substrate block. [Claim 32] 32. A system according to claim 30 or claim 31, wherein the third substrate block comprises a first port. [Claim 33] 32. A system according to claim 30 or claim 31, wherein the third substrate block does not have any ports. [Claim 34] 34. A system according to any one of claims 23 to 33, wherein the substrate assembly further comprises a longitudinal axis extending through the first substrate block and the second substrate block, each of the first substrate block and the second substrate block having a length measured along the longitudinal axis, the lengths being equal. [Claim 35] 35. The system of claim 34, further comprising a third substrate block, the third substrate block having a length measured along the longitudinal axis that is different from the lengths of the first and second substrate blocks. [Claim 36] 36. The system of claim 35, wherein the third substrate block has a length greater than the lengths of the first and second substrate blocks. [Claim 37] 37. The system according to any one of claims 23 to 36, wherein the first substrate block forms a T-section. [Claim 38] 37. The system according to any one of claims 23 to 36, wherein the first substrate block further comprises a tube portion, the tube portion being fluidly connected to the first port. [Claim 39] 39. A system as described in any one of claims 23 to 38, wherein the substrate assembly further comprises a first fastening member and a second fastening member, the first fastening member and the second fastening member extending through the first substrate block and the second substrate block. [Claim 40] 40. The system of claim 39, wherein the substrate assembly further comprises a longitudinal axis, and the first fastening member and second fastening member extend parallel to the longitudinal axis. [Claim 41] 41. A system as claimed in any one of claims 23 to 40, wherein the first male connector of the first substrate block comprises a cylindrical protrusion and an annular ring extending from a distal end of the cylindrical protrusion. [Claim 42] 42. A system according to any one of claims 23 to 41, wherein the first female connector of the first substrate block comprises a cylindrical cavity and an annular groove formed in the bottom of the cylindrical cavity. [Claim 43] A substrate assembly, a first substrate block including a first port, a first male connector, a first female connector, a first communication passage, and a first channel, the first communication passage extending from the first port to the first channel, and the first channel extending from the first communication passage to the first male connector; a second substrate block including a first male connector, a first female connector, a second male connector, a second female connector, and a first channel extending from the first female connector to the second male connector; a first flow path extending from the first port to the second male connector via the first communication flow path of the first substrate block, the first channel, and the first channel of the second substrate block; A substrate assembly comprising: [Claim 44] 44. The board assembly of claim 43, wherein a first male connector of the first board block is connected to a first female connector of the second board block. [Claim 45] 45. The board assembly of claim 44, wherein a first female connector of the first board block is connected to a first male connector of the second board block. [Claim 46] 46. ​​A substrate assembly according to claim 44 or claim 45, wherein a first male connector of the first substrate block forms a fluid-tight connection with a first female connector of the second substrate block. [Claim 47] 47. The board assembly according to claim 43, wherein the second board block further comprises a second male connector and a second female connector. [Claim 48] 48. The substrate assembly of claim 47, wherein the second substrate block further comprises a channel, the channel extending from a first male connector of the second substrate block to a second female connector of the second substrate block. [Claim 49] 49. The substrate assembly of claim 48, wherein the second substrate block includes a through passageway, the passageway extending from a first port of the second substrate block to the channel. [Claim 50] 50. A substrate assembly as described in claim 48 or claim 49, wherein the second substrate block further comprises a second channel, the second channel extending from the second male connector of the second substrate block to the first female connector of the second substrate block, and the second channel extending parallel to the channel. [Claim 51] 51. The substrate assembly of claim 50, wherein the second substrate block includes a second flow path, the second flow path extending from a first port of the second substrate block to the second channel. [Claim 52] A substrate assembly as described in any one of claims 43 to 51, wherein the substrate assembly further comprises a third substrate block, the third substrate block including a first male connector, a first female connector, a second male connector and a second female connector, and the third substrate block is connected to the second substrate block. [Claim 53] 53. The substrate assembly of claim 52, wherein the first flow path extends through the third substrate block. [Claim 54] 54. A substrate assembly according to claim 52 or claim 53, wherein the third substrate block comprises a first port. [Claim 55] 54. A substrate assembly according to claim 52 or claim 53, wherein the third substrate block does not have a port. [Claim 56] 56. A substrate assembly as described in any one of claims 43 to 55, further comprising a longitudinal axis extending through the first substrate block and the second substrate block, each of the first substrate block and the second substrate block having a length measured along the longitudinal axis, the lengths being equal. [Claim 57] 57. The substrate assembly of claim 56, further comprising a third substrate block, the third substrate block having a length measured along the longitudinal axis that is different from the lengths of the first substrate block and the second substrate block. [Claim 58] 58. The substrate assembly of claim 57, wherein the third substrate block has a length greater than the lengths of the first and second substrate blocks. [Claim 59] 59. The substrate assembly according to claim 43, wherein the first substrate block forms a T-shaped portion. [Claim 60] 60. The substrate assembly according to any one of claims 43 to 59, wherein the first substrate block further comprises a tube portion, the tube portion being fluidly connected to the first port. [Claim 61] A substrate assembly as described in any one of claims 43 to 60, wherein the substrate assembly further comprises a first fastening member and a second fastening member, the fastening members extending through the first substrate block and the second substrate block. [Claim 62] 62. The substrate assembly of claim 61, wherein the substrate assembly further comprises a longitudinal axis, and the first fastening member and second fastening member extend parallel to the longitudinal axis. [Claim 63] A substrate assembly as described in any one of claims 43 to 62, wherein the first male connector of the first substrate block comprises a cylindrical protrusion and an annular ring extending from the distal end of the cylindrical protrusion. [Claim 64] A substrate assembly as described in any one of claims 43 to 63, wherein the first female connector of the first substrate block has a cylindrical cavity and an annular groove formed in the bottom of the cylindrical cavity. [Claim 65] A substrate assembly, a first end substrate block and a second end substrate block each having a first port and a first connector; a plurality of connection board blocks each including a first connector and a second connector; the first end substrate block is connected to a first connecting substrate block of the plurality of connecting substrate blocks, and a first connector of the first end substrate block engages with a first connector of the first connecting substrate block; the second end substrate block is connected to a second connecting substrate block of the plurality of connecting substrate blocks, and a first connector of the second end substrate block engages with a second connector of the second connecting substrate block; a first flow path extending from a first port in the first end substrate block, through a first connector in the first end substrate block, to the first connecting substrate block; [Claim 66] 66. The board assembly of claim 65, wherein a first connector of the first end board block is connected to a first connector of the first connecting board block. [Claim 67] 67. The substrate assembly of claim 66, wherein a first connector of the first end substrate block forms a fluid-tight connection with the first connecting substrate block. [Claim 68] 68. The board assembly according to any one of claims 65 to 67, wherein each of the plurality of connection board blocks further includes a third connector and a fourth connector. [Claim 69] 69. A substrate assembly as described in claim 68, wherein the first connecting substrate block further comprises a channel, the channel extending from a first connector of the first connecting substrate block to a third connector of the first connecting substrate block. [Claim 70] 70. A substrate assembly as described in claim 69, wherein the first connecting substrate block has a first port and a flow path, the flow path extending from the first port of the first connecting substrate block to the channel. [Claim 71] 71. A substrate assembly as described in claim 69 or claim 70, wherein the first connecting substrate block further comprises a second channel, the second channel extending from the second connector of the first connecting substrate block to the fourth connector of the first connecting substrate block, and the second channel extending parallel to the channel. [Claim 72] 66. The substrate assembly of claim 65, wherein the first flow passage extends through the second end substrate block. [Claim 73] 73. A substrate assembly as described in any one of claims 65 to 72, further comprising a longitudinal axis extending through the first end substrate block and the second end substrate block, each of the first end substrate block and the second end substrate block having a length measured along the longitudinal axis, and the lengths of the first end substrate block and the second end substrate block being equal. [Claim 74] 74. The substrate assembly of claim 73, wherein the first connecting substrate block has a length measured along the longitudinal axis that is different from the lengths of the first end substrate block and the second end substrate block. [Claim 75] 75. The substrate assembly of claim 74, wherein the length of the first connecting substrate block is greater than the lengths of the first end substrate block and the second end substrate block. [Claim 76] 76. The substrate assembly according to claim 65, wherein the first end substrate block forms a T-shaped portion. [Claim 77] 77. The substrate assembly according to any one of claims 65 to 76, wherein a first end substrate block further comprises a tube portion, the tube portion being fluidly connected to the first port. [Claim 78] 78. The board assembly according to any one of claims 65 to 77, further comprising a first fastening member and a second fastening member that pass through the first end board block and the second end board block. [Claim 79] 79. The substrate assembly of claim 78, further comprising a longitudinal axis, the first fastening member and second fastening member extending parallel to the longitudinal axis. [Claim 80] 80. A substrate assembly as described in any one of claims 65 to 79, wherein the first connector of the first end substrate block includes a cylindrical protrusion and an annular ring extending from the distal end of the cylindrical protrusion. [Claim 81] 80. A substrate assembly as described in any one of claims 65 to 79, wherein the first connector of the first end substrate block includes a cylindrical cavity and an annular groove formed in the bottom of the cavity. [Claim 82] 1. A system for processing items, comprising: a fluid supply configured to supply a process fluid; a processing chamber configured to process the article; and 1. A fluid supply module, comprising: an inlet fluidly connected to said fluid source; an outlet fluidly connected to the processing chamber; a flow path extending from said inlet to said outlet; PCB panel; a first component for controlling flow, the first component including a first port, a second port, and a first flow path extending from the first port to the second port, the first flow path forming a first portion of the flow path; a substrate assembly attached to the substrate panel, the substrate assembly comprising: a first end board block and a second end board block, each including a first port and a first connector; and A substrate assembly including a plurality of connection substrate blocks, each including a first connector and a second connector. a fluid supply module including: the first end substrate block is connected to a first connecting substrate block of the plurality of connecting substrate blocks, and a first connector of the first end substrate block engages with a first connector of the first connecting substrate block; the second end substrate block is connected to a second connecting substrate block among the plurality of connecting substrate blocks, and a first connector of the second end substrate block engages with a second connector of the second connecting substrate block; a second flow path extending from a first port of the first end substrate block, through a first connector of the first end substrate block, to the first connecting substrate block, the second flow path forming a second portion of the flow path; A system wherein a first port of the first component is connected to a first port of the first end substrate block of the substrate assembly, and the first flow path is fluidly connected to the second flow path. [Claim 83] 83. The system of claim 82, wherein a first connector of the first end substrate block is connected to a first connector of the first connecting substrate block. [Claim 84] 84. The system of claim 83, wherein a first connector of the first end substrate block forms a fluid-tight connection with the first connecting substrate block. [Claim 85] 85. The system according to any one of claims 82 to 84, wherein each of the plurality of connection board blocks further includes a third connector and a fourth connector. [Claim 86] 86. The system of claim 85, wherein the first connection substrate block further includes a channel, the channel extending from a first connector of the first connection substrate block to a third connector of the first connection substrate block. [Claim 87] 87. The system of claim 86, wherein the first connecting substrate block includes a first port and a flow passage, the flow passage extending from the first port of the first connecting substrate block to the channel. [Claim 88] 88. A system as described in claim 86 or 87, wherein the first connection substrate block further includes a second channel, the second channel extending from a second connector of the first connection substrate block to a fourth connector of the first connection substrate block and extending parallel to the channel. [Claim 89] 89. A system according to any one of claims 82 to 88, wherein the second flow path extends through the second end substrate block. [Claim 90] 90. A system as claimed in any one of claims 82 to 89, wherein the substrate assembly further includes a longitudinal axis passing through the first end substrate block and the second end substrate block, each of the first end substrate block and the second end substrate block having a length measured along the longitudinal axis, the lengths of the first end substrate block and the second end substrate block being equal. [Claim 91] 91. The system of claim 90, wherein the length of the first connecting substrate block along the longitudinal axis is different from the lengths of the first end substrate block and the second end substrate block. [Claim 92] 92. The system of claim 91, wherein the length of the first connecting substrate block is greater than the length of the first end substrate block and the second end substrate block. [Claim 93] 93. A system according to any one of claims 82 to 92, wherein the first end substrate block forms a T-section. [Claim 94] 94. The system of any one of claims 82 to 93, wherein the first end substrate block further includes a tube portion, the tube portion being fluidly connected to the first port. [Claim 95] 95. The system of any one of claims 82 to 94, further comprising first and second fastening members passing through the first and second end substrate blocks. [Claim 96] 96. The system of claim 95, further comprising a longitudinal axis, the first fastening member and second fastening member extending parallel to the longitudinal axis. [Claim 97] 97. A system as claimed in any one of claims 82 to 96, wherein the first connector of the first end substrate block includes a cylindrical protrusion and an annular ring extending from a distal end of the cylindrical protrusion. [Claim 98] 97. A system as claimed in any one of claims 82 to 96, wherein the first connector of the first end substrate block includes a cylindrical cavity and an annular groove formed in a bottom surface of the cylindrical cavity.

[0192] While the present invention has been described with reference to specific examples, including presently preferred embodiments, those skilled in the art will recognize that numerous modifications and substitutions are possible with respect to the above-described systems and techniques. That is, other embodiments may be utilized, and structural and functional changes may be made without departing from the scope of the present invention. Accordingly, the spirit and scope of the present invention should be construed broadly in accordance with the following claims.

Claims

1. 1. A system for processing items, comprising: a fluid supply configured to supply a process fluid; a processing chamber configured to process the article; and A fluid supply module, the fluid supply module comprising: an inlet fluidly connected to the fluid source; an outlet fluidly connected to the processing chamber; a flow path extending from the inlet to the outlet; PCB panel, a first component for controlling flow, the first component including a first port having a seal cavity, a second port having a seal cavity, and a first flow path extending from the first port to the second port, the first flow path forming a first portion of the flow path; a substrate assembly attached to the substrate panel, the substrate assembly comprising: a first substrate block having a first port, a first male connector, and a first female connector, the first port including a seal cavity; a second substrate block having a first port, a first male connector, and a first female connector, the first port including a seal cavity, and a second flow path extending from the first port of the first substrate block to the first port of the second substrate block forming a second portion of the flow path; and a substrate assembly including a seal disposed within a seal cavity of the first port of the first component and a seal cavity of the first port of the first substrate block; a fluid supply module including a first port of the first component connected to a first port of the first substrate block of the substrate assembly, and the first flow path fluidly connected to the second flow path.

2. 2. The system of claim 1, wherein a first male connector of the first substrate block is connected to a first female connector of the second substrate block.

3. 3. The system of claim 2, wherein a first female connector of the first substrate block is connected to a first male connector of the second substrate block.

4. 4. The system of claim 2 or claim 3, wherein a first male connector of the first substrate block forms a fluid-tight connection with a first female connector of the second substrate block.

5. 5. The system according to claim 1, wherein the second substrate block further comprises a second male connector and a second female connector.

6. 6. The system of claim 5, wherein the second substrate block further comprises a channel, the channel extending from a first male connector of the second substrate block to a second female connector of the second substrate block.

7. 7. The system of claim 6, wherein the second substrate block includes a passageway extending from a first port of the second substrate block to the channel.

8. 8. A system as described in claim 6 or claim 7, wherein the second substrate block further comprises a second channel, the second channel extending from the second male connector of the second substrate block to the first female connector of the second substrate block, the second channel extending parallel to the channel.

9. 9. The system of claim 8, wherein the second substrate block includes a second communication passageway extending from a first port of the second substrate block to the second channel.

10. 10. The system of claim 1, wherein the substrate assembly further comprises a third substrate block, the third substrate block including a first male connector, a first female connector, a second male connector, and a second female connector, and the third substrate block is connected to the second substrate block.

11. The system of claim 10 , wherein the second flow path extends through the third substrate block.

12. 12. The system of claim 10 or claim 11, wherein the third substrate block comprises a first port.

13. 12. The system of claim 10 or claim 11, wherein the third substrate block does not have any ports.

14. 14. The system of claim 1, wherein the substrate assembly further comprises a longitudinal axis extending through the first substrate block and the second substrate block, and wherein the first substrate block and the second substrate block each have a length measured along the longitudinal axis, the lengths being equal.

15. 15. The system of claim 14, further comprising a third substrate block, the third substrate block having a length measured along the longitudinal axis that is different from the lengths of the first substrate block and the second substrate block.

16. 16. The system of claim 15, wherein the third substrate block has a length greater than the lengths of the first and second substrate blocks.

17. The system of any one of claims 1 to 16, wherein the first substrate block forms a T-section.

18. 17. The system of claim 1, wherein the first substrate block further comprises a tube portion, the tube portion fluidly connected to the first port.

19. 19. The system of any one of claims 1 to 18, wherein the substrate assembly further comprises a first fastening member and a second fastening member, the first fastening member and the second fastening member extending through the first substrate block and the second substrate block.

20. 20. The system of claim 19, wherein the substrate assembly further comprises a longitudinal axis, and the first fastening member and second fastening member extend parallel to the longitudinal axis.

21. 21. The system of any one of claims 1 to 20, wherein the first male connector of the first substrate block comprises a cylindrical protrusion and an annular ring extending from a distal end of the cylindrical protrusion.

22. 22. The system of claim 1, wherein the first female connector of the first substrate block comprises a cylindrical cavity and an annular groove formed in the bottom of the cylindrical cavity.

23. 1. A system for processing items, comprising: a fluid supply configured to supply a process fluid; a processing chamber configured to process the article; and a fluid supply module, the fluid supply module comprising: an inlet fluidly connected to the fluid source; an outlet fluidly connected to the processing chamber; a flow path extending from the inlet to the outlet; PCB panel, a first component for controlling flow, the first component comprising a first port, a second port, and a first flow path extending from the first port to the second port, the first flow path forming a first portion of the flow path; a substrate assembly attached to the substrate panel, the substrate assembly comprising: a first substrate block having a first port, a first male connector, and a first female connector; and a fluid supply module including a substrate assembly comprising a second substrate block having a first port, a first male connector, and a first female connector, wherein the first male connector of the first substrate block is connected to the first female connector of the second substrate block and the first female connector of the first substrate block is connected to the first male connector of the second substrate block, and wherein a second flow path extends from the first port of the first substrate block to the first port of the second substrate block, the second flow path forming a second portion of the flow path; a first port of the first component connected to a first port of the first substrate block of the substrate assembly, and the first flow path fluidly connected to the second flow path.

24. 24. The system of claim 23, wherein a first male connector of the first substrate block forms a fluid-tight connection with a first female connector of the second substrate block.

25. 25. The system of claim 23 or claim 24, wherein the second substrate block further comprises a second male connector and a second female connector.

26. 26. The system of claim 25, wherein the second substrate block further comprises a channel, the channel extending from a first male connector to a second female connector of the second substrate block.

27. 27. The system of claim 26, wherein the second substrate block comprises a through passageway, the through passageway extending from a first port of the second substrate block to the channel.

28. 28. A system as described in claim 26 or claim 27, wherein the second substrate block further comprises a second channel, the second channel extending from the second male connector of the second substrate block to the first female connector of the second substrate block, the second channel extending parallel to the channel.

29. 30. The system of claim 28, wherein the second substrate block includes a second communication passageway, the second communication passageway extending from a first port of the second substrate block to the second channel.

30. 30. The system of any one of claims 23 to 29, wherein the substrate assembly further comprises a third substrate block, the third substrate block including a first male connector, a first female connector, a second male connector, and a second female connector, and the third substrate block is connected to the second substrate block.

31. 31. The system of claim 30, wherein the second flow path extends through the third substrate block.

32. 32. A system according to claim 30 or claim 31, wherein the third substrate block comprises a first port.

33. 32. A system according to claim 30 or claim 31, wherein the third substrate block does not have any ports.

34. 34. The system of claim 23, wherein the substrate assembly further comprises a longitudinal axis extending through the first substrate block and the second substrate block, and wherein the first substrate block and the second substrate block each have a length measured along the longitudinal axis, the lengths being equal.

35. 35. The system of claim 34, further comprising a third substrate block, the third substrate block having a length measured along the longitudinal axis that is different from the lengths of the first and second substrate blocks.

36. 36. The system of claim 35, wherein the third substrate block has a length greater than the lengths of the first and second substrate blocks.

37. 37. The system of any one of claims 23 to 36, wherein the first substrate block forms a T-section.

38. 37. The system of any one of claims 23 to 36, wherein the first substrate block further comprises a tube portion, the tube portion fluidly connected to the first port.

39. 39. The system of any one of claims 23 to 38, wherein the substrate assembly further comprises first and second fastening members, the first and second fastening members extending through the first and second substrate blocks.

40. 40. The system of claim 39, wherein the substrate assembly further comprises a longitudinal axis, and the first fastening member and second fastening member extend parallel to the longitudinal axis.

41. 41. The system of any one of claims 23 to 40, wherein the first male connector of the first substrate block comprises a cylindrical protrusion and an annular ring extending from a distal end of the cylindrical protrusion.

42. 42. The system of claim 23, wherein the first female connector of the first substrate block comprises a cylindrical cavity and an annular groove formed in the bottom of the cylindrical cavity.

43. A substrate assembly, a first substrate block including a first port, a first male connector, a first female connector, a first communication passage, and a first channel, the first communication passage extending from the first port to the first channel, and the first channel extending from the first communication passage to the first male connector; a second substrate block including a first male connector, a first female connector, a second male connector, a second female connector, and a first channel extending from the first female connector to the second male connector; a first flow path extending from the first port to the second male connector via the first communication flow path of the first substrate block, the first channel, and the first channel of the second substrate block; A substrate assembly comprising:

44. 44. The board assembly of claim 43, wherein a first male connector of the first board block is connected to a first female connector of the second board block.

45. 45. The board assembly of claim 44, wherein a first female connector of the first board block is connected to a first male connector of the second board block.

46. 46. ​​A substrate assembly according to claim 44 or claim 45, wherein a first male connector of the first substrate block forms a fluid-tight connection with a first female connector of the second substrate block.

47. 47. The board assembly according to any one of claims 43 to 46, wherein the second board block further comprises a second male connector and a second female connector.

48. 48. The substrate assembly of claim 47, wherein the second substrate block further comprises a channel, the channel extending from a first male connector of the second substrate block to a second female connector of the second substrate block.

49. 49. The substrate assembly of claim 48, wherein the second substrate block includes a through passageway, the passageway extending from a first port of the second substrate block to the channel.

50. 50. A substrate assembly as described in claim 48 or claim 49, wherein the second substrate block further comprises a second channel, the second channel extending from the second male connector of the second substrate block to the first female connector of the second substrate block, the second channel extending parallel to the channel.

51. 51. The substrate assembly of claim 50, wherein the second substrate block includes a second flow path, the second flow path extending from a first port of the second substrate block to the second channel.

52. 52. A substrate assembly as described in any one of claims 43 to 51, further comprising a third substrate block, the third substrate block including a first male connector, a first female connector, a second male connector and a second female connector, the third substrate block being connected to the second substrate block.

53. 53. The substrate assembly of claim 52, wherein the first flow path extends through the third substrate block.

54. 54. The substrate assembly of claim 52 or claim 53, wherein the third substrate block comprises a first port.

55. 54. The substrate assembly of claim 52 or claim 53, wherein the third substrate block does not have a port.

56. 56. A substrate assembly as described in any one of claims 43 to 55, further comprising a longitudinal axis extending through the first substrate block and the second substrate block, each of the first substrate block and the second substrate block having a length measured along the longitudinal axis, the lengths being equal.

57. 57. The substrate assembly of claim 56, further comprising a third substrate block, the third substrate block having a length measured along the longitudinal axis that is different from the lengths of the first substrate block and the second substrate block.

58. 58. The substrate assembly of claim 57, wherein the third substrate block has a length greater than the lengths of the first and second substrate blocks.

59. 59. The substrate assembly according to any one of claims 43 to 58, wherein the first substrate block forms a T-section.

60. 60. The substrate assembly of any one of claims 43 to 59, wherein the first substrate block further comprises a tube portion, the tube portion being fluidly connected to the first port.

61. 61. A substrate assembly as described in any one of claims 43 to 60, further comprising a first fastening member and a second fastening member, the fastening members extending through the first substrate block and the second substrate block.

62. 62. The substrate assembly of claim 61, wherein the substrate assembly further comprises a longitudinal axis, and the first fastening member and second fastening member extend parallel to the longitudinal axis.

63. A substrate assembly as described in any one of claims 43 to 62, wherein the first male connector of the first substrate block comprises a cylindrical protrusion and an annular ring extending from the distal end of the cylindrical protrusion.

64. A substrate assembly as described in any one of claims 43 to 63, wherein the first female connector of the first substrate block comprises a cylindrical cavity and an annular groove formed in the bottom of the cylindrical cavity.

65. A substrate assembly, a first end substrate block and a second end substrate block each having a first port and a first connector; a plurality of connection board blocks each including a first connector and a second connector; the first end substrate block is connected to a first connecting substrate block of the plurality of connecting substrate blocks, and a first connector of the first end substrate block engages with a first connector of the first connecting substrate block; the second end substrate block is connected to a second connecting substrate block of the plurality of connecting substrate blocks, and a first connector of the second end substrate block engages with a second connector of the second connecting substrate block; a first flow path extending from a first port in the first end substrate block, through a first connector in the first end substrate block, to the first connecting substrate block;

66. 66. The board assembly of claim 65, wherein a first connector of the first end board block is connected to a first connector of the first connecting board block.

67. 67. The substrate assembly of claim 66, wherein a first connector of the first end substrate block forms a fluid-tight connection with the first connecting substrate block.

68. 68. The board assembly according to any one of claims 65 to 67, wherein each of the plurality of connection board blocks further comprises a third connector and a fourth connector.

69. 69. The substrate assembly of claim 68, wherein the first connecting substrate block further comprises a channel, the channel extending from a first connector of the first connecting substrate block to a third connector of the first connecting substrate block.

70. 70. The substrate assembly of claim 69, wherein the first connecting substrate block has a first port and a flow passage, the flow passage extending from the first port of the first connecting substrate block to the channel.

71. 71. A substrate assembly as described in claim 69 or claim 70, wherein the first connecting substrate block further comprises a second channel, the second channel extending from the second connector of the first connecting substrate block to the fourth connector of the first connecting substrate block, and the second channel extending parallel to the channel.

72. 66. The substrate assembly of claim 65, wherein the first through passage extends through the second end substrate block.

73. 73. A substrate assembly as described in any one of claims 65 to 72, further comprising a longitudinal axis extending through the first end substrate block and the second end substrate block, each of the first end substrate block and the second end substrate block having a length measured along the longitudinal axis, the lengths of the first end substrate block and the second end substrate block being equal.

74. 74. The substrate assembly of claim 73, wherein the first connecting substrate block has a length measured along the longitudinal axis that is different from the lengths of the first end substrate block and the second end substrate block.

75. 75. The substrate assembly of claim 74, wherein the length of the first connecting substrate block is greater than the lengths of the first end substrate block and the second end substrate block.

76. 76. The substrate assembly of any one of claims 65 to 75, wherein the first end substrate block forms a T-section.

77. 77. The substrate assembly of any one of claims 65 to 76, wherein a first end substrate block further comprises a tube portion, the tube portion being fluidly connected to the first port.

78. 78. The substrate assembly of any one of claims 65 to 77, further comprising first and second fastening members passing through the first and second end substrate blocks.

79. 79. The substrate assembly of claim 78, further comprising a longitudinal axis, the first fastening member and second fastening member extending parallel to the longitudinal axis.

80. 80. A substrate assembly as described in any one of claims 65 to 79, wherein the first connector of the first end substrate block includes a cylindrical protrusion and an annular ring extending from the distal end of the cylindrical protrusion.

81. 80. A substrate assembly as claimed in any one of claims 65 to 79, wherein the first connector of the first end substrate block includes a cylindrical cavity and an annular groove formed in the bottom of the cavity.

82. 1. A system for processing items, comprising: a fluid supply configured to supply a process fluid; a processing chamber configured to process the article; and A fluid supply module, the fluid supply module comprising: an inlet fluidly connected to said fluid source; an outlet fluidly connected to the processing chamber; a flow path extending from the inlet to the outlet; Substrate panel; a first component for controlling flow, the first component including a first port, a second port, and a first flow path extending from the first port to the second port, the first flow path forming a first portion of the flow path; a substrate assembly attached to the substrate panel, the substrate assembly comprising: a first end board block and a second end board block, each including a first port and a first connector; and A substrate assembly including a plurality of connection substrate blocks, each including a first connector and a second connector. a fluid supply module including: the first end substrate block is connected to a first connecting substrate block of the plurality of connecting substrate blocks, and a first connector of the first end substrate block engages with a first connector of the first connecting substrate block; the second end substrate block is connected to a second connecting substrate block among the plurality of connecting substrate blocks, and a first connector of the second end substrate block engages with a second connector of the second connecting substrate block; a second flow path extending from a first port of the first end substrate block, through a first connector of the first end substrate block, to the first connecting substrate block, the second flow path forming a second portion of the flow path; A system wherein a first port of the first component is connected to a first port of the first end substrate block of the substrate assembly, and the first flow path is fluidly connected to the second flow path.

83. 83. The system of claim 82, wherein a first connector of the first end substrate block is connected to a first connector of the first connecting substrate block.

84. 84. The system of claim 83, wherein a first connector of the first end substrate block forms a fluid-tight connection with the first connecting substrate block.

85. 85. The system according to any one of claims 82 to 84, wherein each of the plurality of connection substrate blocks further includes a third connector and a fourth connector.

86. 86. The system of claim 85, wherein the first connection substrate block further includes a channel, the channel extending from a first connector of the first connection substrate block to a third connector of the first connection substrate block.

87. 87. The system of claim 86, wherein the first connecting substrate block includes a first port and a through passage, the through passage extending from the first port of the first connecting substrate block to the channel.

88. 88. A system as described in claim 86 or 87, wherein the first connection substrate block further includes a second channel, the second channel extending from a second connector of the first connection substrate block to a fourth connector of the first connection substrate block and extending parallel to the channel.

89. 89. A system according to any one of claims 82 to 88, wherein the second flow path extends through the second end substrate block.

90. 90. A system as claimed in any one of claims 82 to 89, wherein the substrate assembly further comprises a longitudinal axis passing through the first end substrate block and the second end substrate block, each of the first end substrate block and the second end substrate block having a length measured along the longitudinal axis, the lengths of the first end substrate block and the second end substrate block being equal.

91. 91. The system of claim 90, wherein the length of the first connecting substrate block along the longitudinal axis is different from the lengths of the first end substrate block and the second end substrate block.

92. 92. The system of claim 91, wherein the length of the first connecting substrate block is greater than the length of the first end substrate block and the second end substrate block.

93. 93. A system according to any one of claims 82 to 92, wherein the first end substrate block forms a T-section.

94. 94. The system of any one of claims 82 to 93, wherein the first end substrate block further comprises a tube portion, the tube portion being fluidly connected to the first port.

95. 95. The system of any one of claims 82 to 94, further comprising first and second fastening members passing through the first and second end substrate blocks.

96. 96. The system of claim 95, further comprising a longitudinal axis, the first fastening member and second fastening member extending parallel to the longitudinal axis.

97. 97. The system of any one of claims 82 to 96, wherein the first connector of the first end substrate block includes a cylindrical protrusion and an annular ring extending from a distal end of the cylindrical protrusion.

98. 97. A system as claimed in any one of claims 82 to 96, wherein the first connector of the first end substrate block includes a cylindrical cavity and an annular groove formed in a bottom surface of the cylindrical cavity.

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