Wide insertion angle process carrier
The process carrier with a wide insertion angle and reduced tooth length design addresses substrate contamination and automation precision issues, improving yield and automation by minimizing contact and particle generation.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- ENTEGRIS INC
- Filing Date
- 2024-03-12
- Publication Date
- 2026-04-10
AI Technical Summary
Substrates, such as disks, are susceptible to contamination during processing due to particle generation from contact with process carriers, and existing carriers require high precision for automation, leading to potential damage and reduced process yield.
A process carrier with a tooth shape providing a wide insertion angle and reduced tooth length, featuring slots with angles between 47° to 76°, allowing for less contact and improved automation compatibility, reducing particle generation and substrate damage.
The wide insertion angle and reduced tooth length design minimizes substrate contact and friction, enhancing process yield and automation compatibility while reducing particle generation and substrate damage.
Smart Images
Figure 2026510939000001_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to a process carrier for one or more substrates, specifically a process carrier having a tooth shape that provides a wide insertion angle to the substrate.
[0002] Priority Claim The present disclosure claims the priority and benefit of U.S. Provisional Patent Application No. 63 / 452,917, filed on March 17, 2023, which is incorporated herein by reference.
Background Art
[0003] A process carrier can be used to store and transport substrates such as disks during processing. The substrate may be susceptible to contamination, such as by particles generated from the disk rubbing against components of the process carrier.
Summary of the Invention
[0004] The present disclosure relates to a process carrier for one or more substrates, specifically a process carrier having a tooth shape that provides a wide insertion angle to the substrate.
[0005] By shortening the length of the teeth used to define the slots in the process carrier and increasing the insertion angle, the amount of contact between the accommodated substrate and the process carrier can be reduced. The teeth have a size and shape such that the tilt of the disk is adjustable within an acceptable range. Thereby, the generation of fine particles from the process carrier can be reduced and the process yield can be improved. Increasing the insertion angle allows the process carrier to be used more widely automated, reducing the accuracy required for the operation of the process carrier or the automation of the insertion or removal of the substrate from the process carrier. The shape and position of the teeth can be further changed with respect to the size of the accommodated substrate so as to reduce the case where the disk stops moving within each slot.
[0006] In one embodiment, the process carrier includes a first sidewall containing a first plurality of teeth and a second sidewall containing a second plurality of teeth. The second sidewall is on the opposite side of the first sidewall. The first plurality of teeth and the corresponding teeth of the second plurality of teeth define a plurality of slots. Each slot of the plurality of slots is configured to accommodate a substrate. Each slot has a slot angle in the range of 47° to 76°.
[0007] In one embodiment, the first set of teeth extends along the height direction of the first side wall by a length of less than half the height direction of the first side wall, and the second set of teeth extends along the height direction of the second side wall by a length of less than half the height direction of the second side wall.
[0008] In one embodiment, the teeth of the first set of teeth are separated by at least the thickness of the substrate, and the teeth of the second set of teeth are separated by at least the thickness of the substrate.
[0009] In one embodiment, each tooth of the first plurality of teeth and the second plurality of teeth includes a first side surface, a second side surface, and a tip portion between the first side surface and the second side surface.
[0010] In one embodiment, each slot has a slot angle in the range of 50° to 54°.
[0011] In one embodiment, the process carrier includes a first sidewall containing a first plurality of teeth and a second sidewall containing a second plurality of teeth. The second sidewall is on the opposite side of the first sidewall. The first plurality of teeth extend along the height direction of the first sidewall by a distance of less than half the height of the first sidewall, and the second plurality of teeth extend along the height direction of the second sidewall by a distance of less than half the height of the second sidewall.
[0012] In one embodiment, the corresponding teeth of a first plurality of teeth and a second plurality of teeth define a plurality of slots, and each of the plurality of slots is configured to accommodate a substrate. Each slot has a slot angle in the range of 47° to 76°. In one embodiment, each slot has a slot angle in the range of 50° to 54°.
[0013] In one embodiment, the teeth of the first set of teeth are separated by at least the thickness of the substrate, and the teeth of the second set of teeth are separated by at least the thickness of the substrate.
[0014] In one embodiment, each tooth of the first plurality of teeth and the second plurality of teeth includes a first side surface, a second side surface, and a tip portion between the first side surface and the second side surface.
[0015] In one embodiment, the method includes inserting a substrate into a slot configured to accommodate a substrate. The slot is defined within a process carrier. The process carrier includes a first sidewall containing a first plurality of teeth and a second sidewall containing a second plurality of teeth. The second sidewall is on the opposite side of the first sidewall. The first plurality of teeth and the corresponding teeth of the second plurality of teeth define a plurality of slots. Each of the plurality of slots is configured to accommodate a substrate. Each slot has a slot angle in the range of 47° to 76°.
[0016] In one embodiment, the substrate is inserted into the slot using an automated substrate handler.
[0017] In one embodiment, the method further includes removing the substrate from the slot using an automated substrate handler.
[0018] In one embodiment, the first set of teeth extends along the height direction of the first side wall by a length of less than half the height direction of the first side wall, and the second set of teeth extends along the height direction of the second side wall by a length of less than half the height direction of the second side wall.
[0019] In one embodiment, the teeth of the first set of teeth are separated by at least the thickness of the substrate, and the teeth of the second set of teeth are separated by at least the thickness of the substrate.
[0020] In one embodiment, each tooth of the first plurality of teeth and the second plurality of teeth includes a first side surface, a second side surface, and a tip portion between the first side surface and the second side surface.
[0021] In one embodiment, when the substrate is seated in one of the plurality of slots, the center of the substrate is located on the tooth end side of the process carrier with respect to the height direction of the first side wall and the second side wall.
Brief Description of the Drawings
[0022] [Figure 1] It is a diagram showing a process carrier according to one embodiment. [Figure 2] It is a cross-sectional view of the teeth of a process carrier according to one embodiment. [Figure 3] It is a cross-sectional view of a process carrier according to one embodiment and a wafer accommodated in the process carrier.
Mode for Carrying Out the Invention
[0023] The present disclosure relates to a process carrier for one or more disks, specifically a process carrier having a tooth shape that gives a wide insertion angle to the disk.
[0024] As used herein, a "tooth" is defined as a protrusion from the inner surface of a process carrier configured to support and / or hold a substrate within the process carrier. A plurality of teeth can be provided on each of the two opposing inner surfaces of the process carrier. The teeth can be separated by a gap.
[0025] As used herein, a "slot" is defined as a feature of a process carrier configured to accommodate one substrate. The slot can be defined by the opposing side walls of each of the first pair of two adjacent teeth and the corresponding second pair of two adjacent teeth provided on the opposing inner surfaces of the process carrier.
[0026] As used herein, the "slot angle" of a slot is the angle formed between the opposing side walls of each pair of adjacent teeth that define the slot. If one or both of the opposing side walls include a curvature such as a concave or convex portion, the slot angle can be defined for each side wall including the curvature with respect to a plane extending from the base of the tooth to the tip of the tooth.
[0027] As used herein, the "insertion angle" of a slot is the maximum deviation from the axis of the slot at which the substrate can still be successfully inserted into the slot. If the opposing side walls that define the slot are mirror images of each other, the insertion angle can be 1 / 2 of the slot angle.
[0028] FIG. 1 is a diagram showing a process carrier according to an embodiment. The process carrier 100 includes a first end wall 102, a second end wall 104, a first side wall 106, and a second side wall 108. The first side wall 106 and the second side wall 108 each have a plurality of teeth 110. The teeth 110 are distributed across the first side wall 106 and the second side wall 108 so as to define slots 112. The corresponding slots 112 of the first side wall 106 and the second side wall 108 are aligned such that the corresponding slots 112 can each accommodate a substrate 114.
[0029] The process carrier 100 can be, for example, a process carrier configured to accommodate one or more substrates 114 during storage, transportation, and / or processing of those substrates 114. The process carrier 100 can be formed as a single part or assembled from a plurality of component parts. The process carrier 100 can be made of any suitable material. For example, the process carrier 100 includes a polyether ether ketone (PEEK) material. In one embodiment, the surface of the process carrier 100 that contacts the substrate 114 during use can be formed of a PEEK material. In one embodiment, the process carrier is entirely composed of a PEEK material.
[0030] The first end wall 102 and the second end wall 104 define opposing ends of the process carrier 100, respectively. The first side wall 106 extends from the first end wall 102 to the second end wall 104. The second side wall 108 also extends from the first end wall 102 to the second end wall 104. The first end wall 102, the second end wall 104, the first side wall 106, and the second side wall 108 define a space capable of accommodating one or more disks 114.
[0031] Multiple teeth 110 extend inward from each of the first side wall 106 and the second side wall 108 into an internal space defined by the first end wall 102, the second end wall 104, the first side wall 106, and the second side wall 108. The teeth can extend along the height direction of the first side wall 106 and / or the second side wall 108. The teeth 110 distributed along the first side wall 106 and the second side wall 108 can extend in the height direction of the process carrier 100 by less than half the height of the process carrier 100. The teeth 110 can be provided on a portion of the first side wall 106 or the second side wall 108, which is less than half the height of each of the first side wall 106 or the second side wall 108. In one embodiment, each tooth 110 extends outward by 0.185 ± 0.015 inches to 0.225 ± 0.015 inches (0.470 ± 0.038 cm to 0.572 ± 0.038 cm) from the first side wall 106 or the second side wall 108, respectively, on which the tooth 110 is located. The portion of the first side wall 106 and the second side wall 108 on which the tooth 110 extends may be defined as the tooth end of the process carrier 100. Each tooth 110 may include a first wall, a tip, and a second wall, for example, a first side wall 204, a tip 206, and a second side wall 208, as described below and shown in Figure 2. The first and second side walls may be straight or curved, for example, having a concave or convex surface when extending from the side wall 106 or the side wall 108, respectively, to the tip. The tip may be flat or rounded. In one embodiment, the tip is flat, and the transitions from the tip to the first and second walls are rounded. In one embodiment, the teeth 110 are distributed along the first side wall 204 and the second side wall 206 such that the individual pitch of each tooth 110 is 0.250 ± 0.002 inches (0.635 ± 0.005 cm), and the total pitch of the area containing the teeth 100 is 6.000 ± 0.015 inches (15.240 ± 0.038 cm). The opposing first and second walls of two adjacent teeth 110 form one opening in the slot 112.
[0032] A slot 112 is defined between adjacent teeth 110 along either the first side wall 106 or the second side wall 108. Each pair of corresponding slots 112 on the first side wall 106 and the second side wall 108 can provide a support structure for a substrate 114. A slot 112 can be defined such that adjacent teeth 110 forming the slot 112 are separated by an amount greater than or equal to the thickness of the substrate 114 that the slot 112 is to accommodate. The slot angle of each slot 112 is in the range of 47° to 76°. The slot angle is the angle between the opposing side walls of the teeth 110 defining the slot 112. If one or both side walls include a curve such as a concave or convex portion, the slot angle may be defined with respect to a plane extending from the base of the tooth 110 to the tip of the tooth 110. In one embodiment, the slot angle is in the range of 50° to 54°. In one embodiment, each slot 112 has an insertion angle of 23.5° to 38°. The insertion angle is the maximum angle between the substrate 114 and the process carrier 100 in the height direction that allows the substrate 114 to be successfully inserted into the slot 112. In one embodiment, the insertion angle may be in the range of 25° to 27°. For example, if the opposing side walls defining the slot 112 are mirror images of each other, the insertion angle may be half the slot angle. The insertion angle of the slot 112 allows for successful insertion even in cases of poor substrate alignment or operational or positioning errors in the automation handling such substrates. The insertion angle allows the process carrier 100 to be used even with low precision in the automation for loading and unloading the substrate 114 from the process carrier 100. The slot angle and insertion angle of the process carrier 100 can further reduce the risk of damaging the substrate 114 during loading and unloading and / or the generation of particles from the process carrier 100. The slot angle and insertion angle of the slot 112 of the process carrier 100 can support the successful insertion and seating of the substrate 114 within the slot 112 without requiring an introduction portion on the teeth 110.Since an introduction section is not required, the teeth 110 can be shortened along the height direction of the process carrier 100, reducing the surface area of the teeth 110 that can contact the substrate 114, and thus reducing the area where friction may occur between the teeth 110 and the substrate 114. In one embodiment, the teeth 110 are distributed along such a direction that the individual pitch of each tooth 110 is 0.250 ± 0.002 inches (0.635 ± 0.005 cm), and the total pitch of the region including the teeth 100 is 6.000 ± 0.015 inches (15.240 ± 0.038 cm).
[0033] The substrate 114 can be, for example, a disk for use in a hard disk drive, a wafer, or another suitable substrate housed in the process carrier 100. The substrate 114 can be circular in shape. The process carrier 100 is configured to house one or more substrates 114. The process carrier 100 is sized to hold one or more substrates 114 in slots 112 defined by at least some of the teeth 110 provided along the first side wall 106 and the second side wall 108. The number of opposing slots 112 provided by the respective teeth 110 on the first side wall 106 and the second side wall 108 may correspond to the number of substrates 114 that can be housed in the process carrier 100.
[0034] Figure 2 is a cross-sectional view of a tooth of a process carrier according to one embodiment. The tooth 200 can be used as a tooth 110 provided on the process carrier 100, as shown in Figure 1 and described above. Each tooth 200 has a first side base 202, a first side wall 204, a tip 206, a second side wall 208, and a second side base 210. Adjacent teeth 200 are separated by a gap 212.
[0035] The first lateral base 202 is the location on the first side of the tooth 200 where the tooth emerges from the side wall of the process carrier containing the tooth. The first lateral base 202 may extend perpendicular to the surface of the side wall of the process carrier. The first side wall 204 extends between the first lateral base 202 and the tip 206. In one embodiment, the first side wall 204 extends straight from the first lateral base 202 to the tip 206. In several embodiments, the first side wall 204 may have a concave or convex surface as it extends from the first lateral base 202 to the tip 206.
[0036] The tip portion 206 forms the portion furthest from the wall of the process carrier where the teeth 200 are positioned. The tip portion 206 separates the first and second sides of the teeth 200. The tip portion 206 may be flat or rounded. In one embodiment, the tip portion 206 may have a height of 0.185 ± 0.015 inches to 0.225 ± 0.015 inches (0.470 ± 0.038 cm to 0.572 ± 0.038 cm) from the side wall of the process carrier where the teeth 200 are provided. The width of the tip portion 206 may be any suitable width to give the slots defined by adjacent teeth 200 the desired slot and insertion angles. In one embodiment, the width of the tip portion may be selected at least partially on the basis of manufacturability, such as molding limitations. In several embodiments, the tip portion 206 may have a width in the range of 0.015 inches to 0.054 inches (0.038 cm to 0.137 cm). In several embodiments, the width of the tip portion 206 can be selected relative to the width of the teeth from the first side base 202 to the second side base 210 such that the first side wall 204 and the second side wall 208 give a slot angle SA in the range of 47° to 76° and an insertion angle IA in the range of 23.5° to 38°. When the first side wall 204 and / or the second side wall 208 of adjacent teeth 200 define a slot including a concave or convex surface, the insertion angle and / or slot angle can be determined by a straight line from the first side base 202 to the tip portion 206. In several embodiments, the slot defined by the first side wall 204 and the second side wall 208 of adjacent teeth 200 can define a slot angle SA in the range of 50° to 54° and an insertion angle IA in the range of 25° to 27°.
[0037] The second side wall 208 extends between the tip 206 and the second side base 210. In one embodiment, the second side wall 208 extends straight from the tip 206 to the second side base 210. In several embodiments, the first side wall 204 may have a concave or convex surface as it extends from the tip 206 to the second side base 210. The second side base 210 is the location on the second side of the tooth 200 where the tooth emerges from the side wall of the process carrier containing the tooth. The width of the tooth 200 can be defined by the distance from the first side base 202 to the second side base 210.
[0038] The gap 212 is the space between the bases 202, 210 of adjacent teeth 200 formed on the side wall of the process carrier, such as the first side wall 106 or the second side wall 108 of the process carrier 100 as described above and shown in Figure 1. The gap 212 may be such that the distance between adjacent teeth 200 is greater than or equal to the thickness of the substrate in which the teeth 200 are to be housed, for example, the substrate 114 as shown above and shown in Figure 1. The gap 212 may be such that, when the substrate is seated in the slot defined by the two adjacent teeth 200, the center of the substrate is located on the tooth end side of the process carrier with respect to the height direction of the first and second side walls. In one embodiment, the gap 212 may be 0.021 ± 0.003 inches (0.053 ± 0.0076 cm) wide.
[0039] Figure 3 is a cross-sectional view of a process carrier and a substrate housed in the process carrier according to one embodiment. The process carrier 300 includes a first side wall 302 and a second side wall 304. The process carrier 300 includes a substrate 306. The substrate 306 is shown fully seated within the process carrier 300 and is fully inserted into a slot defined by teeth provided on the process carrier 300, such as the teeth 110 defining the slot 112 as described above and shown in Figure 1. The substrate 306 has a center point 308. When the substrate 302 is fully seated within the slot of the process carrier 300, the center point 308 is located on the tooth end side of the process carrier with respect to the height direction of the first and second side walls. The center point 308 is on or below a center line C that extends across the process carrier 300 at half the height H of the process carrier 300. By positioning the substrate 306 so that its center point 308 is below the center line, for example, the risk of the substrate 306 becoming immobile within the process carrier 300 can be reduced. The process carrier 300 increases the clearance for the widest part of the substrate 306, and the teeth of the process carrier also provide clearance for the portion of the substrate 306 that is shaped by these teeth. The increased clearance reduces the possibility of the substrate 306 being squeezed by the process carrier 300 and thus sticking within the process carrier 300 when inserting or removing the substrate 306.
[0040] manner Please understand that any of embodiments 1-5 can be combined with any of embodiments 6-10 or 11-17. Please understand that any of embodiments 6-10 can be combined with any of embodiments 11-17.
[0041] Embodiment 1. A process carrier, A first lateral wall including a first set of teeth, A second side wall having a second plurality of teeth, and having a second side wall opposite to the first side wall, A process carrier having a first set of teeth and corresponding teeth of a second set of teeth that define a set of slots, each of which is configured to accommodate a substrate, and each slot having a slot angle in the range of 47° to 76°.
[0042] Embodiment 2. The process carrier according to Embodiment 1, wherein the first plurality of teeth extend along the height direction of the first side wall by a length of less than half the height direction of the first side wall, and the second plurality of teeth extend along the height direction of the second side wall by a length of less than half the height direction of the second side wall.
[0043] Embodiment 3. A process carrier according to any one of Embodiments 1 to 2, wherein the teeth of the first plurality of teeth are separated by at least the thickness of the substrate, and the teeth of the second plurality of teeth are separated by at least the thickness of the substrate.
[0044] Embodiment 4. A process carrier according to any one of Embodiments 1 to 3, wherein each tooth of the first plurality of teeth and the second plurality of teeth each includes a first side surface, a second side surface, and a tip portion between the first side surface and the second side surface.
[0045] Embodiment 5. A process carrier according to any one of Embodiments 1 to 4, wherein each slot has a slot angle in the range of 50° to 54°.
[0046] Embodiment 6. A process carrier, A first lateral wall including a first set of teeth, A second side wall having a second plurality of teeth, and having a second side wall opposite to the first side wall, A process carrier in which a first set of teeth extends along the height direction of the first sidewall by less than half the height of the first sidewall, and a second set of teeth extends along the height direction of the second sidewall by less than half the height of the second sidewall.
[0047] Embodiment 7. The process carrier according to Embodiment 6, wherein the corresponding teeth of the first plurality of teeth and the second plurality of teeth define a plurality of slots, each of which is configured to accommodate a substrate, and each slot has a slot angle in the range of 47° to 76°.
[0048] Embodiment 8. The process carrier according to Embodiment 7, wherein each slot has a slot angle in the range of 50° to 54°.
[0049] Embodiment 9. A process carrier according to any one of Embodiments 6 to 8, wherein the teeth of the first plurality of teeth are separated by at least the thickness of the substrate, and the teeth of the second plurality of teeth are separated by at least the thickness of the substrate.
[0050] Embodiment 10. A process carrier according to any one of Embodiments 6 to 9, wherein each tooth of the first plurality of teeth and the second plurality of teeth includes a first side surface, a second side surface, and a tip portion between the first side surface and the second side surface.
[0051] Embodiment 11. A method comprising inserting a substrate into a slot configured to accommodate a substrate, wherein the slot is defined within a process carrier, and the process carrier is A first lateral wall including a first set of teeth, A second side wall having a second plurality of teeth, and having a second side wall opposite to the first side wall, A method wherein a plurality of teeth of the first group and corresponding teeth of a plurality of teeth define a plurality of slots, each of which is configured to accommodate a substrate, and each slot has a slot angle in the range of 47° to 76°.
[0052] Embodiment 12. The method according to Embodiment 11, wherein the substrate is inserted into the slot using an automatic substrate handler.
[0053] Embodiment 13. The method according to any one of embodiments 11 to 12, further comprising removing the board from the slot using an automated board handler.
[0054] Embodiment 14. The method according to any one of Embodiments 11 to 13, wherein the first plurality of teeth extend along the height direction of the first side wall by a length of less than half the height direction of the first side wall, and the second plurality of teeth extend along the height direction of the second side wall by a length of less than half the height direction of the second side wall.
[0055] Embodiment 15. The method according to any one of Embodiments 11 to 14, wherein the teeth of the first plurality of teeth are separated by at least the thickness of the substrate, and the teeth of the second plurality of teeth are separated by at least the thickness of the substrate.
[0056] Embodiment 16. The method according to any one of Embodiments 11 to 15, wherein each tooth of the first plurality of teeth and the second plurality of teeth each includes a first side surface, a second side surface, and a tip portion between the first side surface and the second side surface.
[0057] Embodiment 17. The method according to any one of embodiments 11 to 16, wherein when the substrate is seated in one of a plurality of slots, the center of the substrate is located on the tooth end side of the process carrier with respect to the height direction of the first side wall and the second side wall.
[0058] The examples disclosed in this application should be considered in all respects to be illustrative and not limiting. The scope of the invention is indicated not by the foregoing description but by the appended claims, and all modifications made within the meaning and equivalent scope of the claims are intended to be incorporated herein.
Claims
1. It is a process carrier, A first lateral wall including a first set of teeth, A second side wall comprising a second plurality of teeth, having a second side wall opposite to the first side wall, A process carrier wherein the first plurality of teeth and the corresponding teeth of the second plurality of teeth define a plurality of slots, each of which is configured to accommodate a substrate, and each of the slots has a slot angle in the range of 47° to 76°.
2. The process carrier according to claim 1, wherein the first plurality of teeth extend along the height direction of the first side wall by a length of less than half the height of the first side wall, and the second plurality of teeth extend along the height direction of the second side wall by a length of less than half the height of the second side wall.
3. The process carrier according to claim 1, wherein the teeth of the first plurality of teeth are separated from each other by at least the thickness of the substrate, and the teeth of the second plurality of teeth are separated from each other by at least the thickness of the substrate.
4. The process carrier according to claim 1, wherein each of the first plurality of teeth and the second plurality of teeth includes a first side surface, a second side surface, and a tip portion between the first side surface and the second side surface.
5. The process carrier according to claim 1, wherein each of the slots has a slot angle in the range of 50° to 54°.
6. It is a process carrier, A first lateral wall including a first set of teeth, A second side wall comprising a second plurality of teeth, having a second side wall opposite to the first side wall, A process carrier wherein the first plurality of teeth extend along the height direction of the first side wall by a length of less than half the height of the first side wall, and the second plurality of teeth extend along the height direction of the second side wall by a length of less than half the height of the second side wall.
7. The process carrier according to claim 6, wherein the first plurality of teeth and the corresponding teeth of the second plurality of teeth define a plurality of slots, each of the plurality of slots is configured to accommodate a substrate, and each of the slots has a slot angle in the range of 47° to 76°.
8. The process carrier according to claim 7, wherein each of the slots has a slot angle in the range of 50° to 54°.
9. The process carrier according to claim 6, wherein the teeth of the first plurality of teeth are separated from each other by at least the thickness of the substrate, and the teeth of the second plurality of teeth are separated from each other by at least the thickness of the substrate.
10. The process carrier according to claim 6, wherein each of the first plurality of teeth and the second plurality of teeth includes a first side surface, a second side surface, and a tip portion between the first side surface and the second side surface.
11. A method comprising inserting a substrate into a slot configured to accommodate a substrate, wherein the slot is defined within a process carrier, and the process carrier is A first lateral wall including a first set of teeth, A second side wall comprising a second plurality of teeth, having a second side wall opposite to the first side wall, A method wherein the first plurality of teeth and the corresponding teeth of the second plurality of teeth define a plurality of slots, each of the plurality of slots is configured to accommodate a substrate, and each of the slots has a slot angle in the range of 47° to 76°.
12. The method according to claim 11, wherein the substrate is inserted into the slot using an automatic substrate handler.
13. The method according to claim 11, further comprising removing the substrate from the slot using an automated substrate handler.
14. The method according to claim 11, wherein the first plurality of teeth extend along the height direction of the first side wall by a length of less than half the height of the first side wall, and the second plurality of teeth extend along the height direction of the second side wall by a length of less than half the height of the second side wall.
15. The method according to claim 11, wherein the teeth of the first plurality of teeth are separated from each other by at least the thickness of the substrate, and the teeth of the second plurality of teeth are separated from each other by at least the thickness of the substrate.
16. The method according to claim 11, wherein each of the first plurality of teeth and the second plurality of teeth includes a first side surface, a second side surface, and a tip portion between the first side surface and the second side surface.
17. The method according to claim 11, wherein when the substrate is seated in one of the plurality of slots, the center of the substrate is located on the tooth end side of the process carrier with respect to the height direction of the first side wall and the second side wall.