Non-contact transport alignment device and non-contact transport alignment method using the same

Abstract

The conveying alignment method for a non-contact conveying alignment device includes a conveying alignment movement unit that adjusts the exit position of a first product conveying device on which the products to be conveyed are placed and which moves the products in a straight line; a conveying position sensing unit that senses the entrance position of a second product conveying device that is located separately from the first product conveying device and receives the products moved in a straight line by the first product conveying device and moves them in a straight line; and an alignment control unit that controls the operation of the conveying alignment movement unit and adjusts the exit position of the first product conveying device in accordance with the entrance position of the second product conveying device sensed by the conveying position sensing unit.

Description

Technical Field

[0001] The present invention relates to an alignment device for non-contact conveyance and a non-contact conveyance alignment method using the same. More specifically, when conveying a standing product using a non-contact conveyance device such as a magnetic levitation conveyance device, the present invention relates to a non-contact conveyance alignment device for aligning two non-contact conveyance devices and a non-contact conveyance alignment method using the same.

Background Art

[0002] Generally, a vapor deposition mask used for vapor deposition of a thin film of a display device is conveyed into a vapor deposition chamber after being mounted on a carrier.

[0003] And, in order to minimize the conveyance efficiency and the process progress space, the vapor deposition mask can be conveyed from a stocker in a standing state rather than horizontally.

[0004] Normally, the vapor deposition mask is transferred from a stocker carried on a conveyor to a carrier conveyance device and then inserted into the vapor deposition chamber by the carrier conveyance device.

[0005] That is, the carrier on which the vapor deposition mask is mounted can be inserted into the vapor deposition chamber through the carrier conveyance device.

Summary of the Invention

Problems to be Solved by the Invention

[0006] In a conventional magnetic levitation system, it is difficult to precisely align the positions of a first magnetic conveyance unit for conveying a product and a second magnetic conveyance unit for receiving the product from the first magnetic conveyance unit, and there is a problem that the efficiency decreases during conveyance.

[0007] That is, in a conveyance device that conveys a product in a non-contact manner, such as a magnetic levitation system, since two non-contact conveyance devices lift and convey the product in a separated state, it is difficult to align the two non-contact conveyance devices in a straight line and it takes a long time. [Means for solving the problem]

[0008] Embodiments of the present invention provide a non-contact transport alignment device that quickly and precisely aligns the transport positions of a first product transport unit and a second product transport unit, which transport products in a linear, non-contact manner, and a non-contact transport alignment method utilizing the same.

[0009] One embodiment of the present invention discloses a non-contact transport alignment device including a transport alignment movement unit that adjusts the exit position of a first product transport device on which a product to be transported is placed and which moves the product in a straight line; a transport position sensing unit that senses the entrance position of a second product transport device which is located separately from the first product transport device and receives the product moved in a straight line by the first product transport device and moves it in a straight line; and an alignment control unit that controls the operation of the transport alignment movement unit and adjusts the exit position of the first product transport device in accordance with the entrance position of the second product transport device sensed by the transport position sensing unit. [Effects of the Invention]

[0010] Embodiments of the present invention have the effect of rapidly and precisely aligning the transport positions of a first product transport unit and a second product transport unit, which transport products in a linear, non-contact manner, and significantly improving transport efficiency and transport stability when transporting standing products using a non-contact transport device such as a magnetic levitation transport device.

[0011] In particular, in the embodiment of the present invention, when one of the two product transport units is moved close to the other product transport unit, and then the product is moved linearly and transported in a non-contact manner, the transport position can be quickly and precisely aligned, which has the effect of greatly improving transport efficiency and transport stability during product transport. [Brief explanation of the drawing]

[0012] The aforementioned features of some embodiments and other features will become clearer from the following drawings and detailed description of the invention. [Figure 1]This is a side view showing a contactless conveying alignment device according to one embodiment of the present invention. [Figure 2] This is a front view illustrating the first product transport section of a contactless transport alignment device according to one embodiment of the present invention. [Figure 3] This is a plan view showing the transport position sensing unit in a non-contact transport alignment device according to one embodiment of the present invention. [Figure 4] This is a side view showing an example of application of a transport position sensing unit in a non-contact transport alignment device according to one embodiment of the present invention. [Figure 5] This is a side view showing an example of application of a transport position sensing unit in a non-contact transport alignment device according to one embodiment of the present invention. [Figure 6] This is a flowchart showing one embodiment of the non-contact transport alignment method according to the present invention. [Modes for carrying out the invention]

[0013] One embodiment of the present invention discloses a non-contact transport alignment device including a transport alignment movement unit that adjusts the exit position of a first product transport device on which a product to be transported is placed and which moves the product in a straight line; a transport position sensing unit that senses the entrance position of a second product transport device which is located separately from the first product transport device and receives the product moved in a straight line by the first product transport device and moves it in a straight line; and an alignment control unit that controls the operation of the transport alignment movement unit and adjusts the exit position of the first product transport device in accordance with the entrance position of the second product transport device sensed by the transport position sensing unit.

[0014] In this embodiment, the transport position sensing unit includes a first entrance position sensing unit that senses the entrance position of the second product transport device in the second direction when the transport direction of the product being transported to the first product transport device which is perpendicular to the second direction on a plane is the first direction, and the transport alignment moving unit may include an alignment moving unit that moves the first product transport device from the plane in a direction different from the first direction and adjusts the exit position of the first product transport device.

[0015] In this embodiment, the conveyance position sensing unit further includes a linear movement direction sensing unit that senses the angle of the first product conveyance device with respect to the conveyance direction on a plane, and the conveyance alignment moving unit may include a base support portion where the first product conveyance device is located at the upper part, and an in-plane movement unit for angle adjustment that is located at the lower part of the base support portion and adjusts the angle of the first product conveyance device in the conveyance direction by adjusting the angle on the plane of the base support portion.

[0016] In this embodiment, the linear movement direction sensing unit may include a first distance sensing unit and a second distance sensing unit that are spaced apart on both sides of the first product conveyance device and sense the distance from the second product conveyance device.

[0017] In this embodiment, the in-plane movement unit for angle adjustment may include a plurality of two-axis movement units that are movable in the first direction and the second direction.

[0018] In this embodiment, the conveyance position sensing unit includes a second entrance position sensing unit that senses the height of the first product conveyance device, and the conveyance alignment moving unit may further include a conveyance elevator that raises and lowers the first product conveyance device.

[0019] In this embodiment, the first entrance position sensing unit and the second entrance position sensing unit may include a sensor unit disposed on one side of either the first conveyance unit including the first product conveyance device or the second conveyance unit including the second product conveyance device, and a reference position display unit disposed on the other side of the first conveyance unit and the second conveyance unit and displaying a reference position.

[0020] In this embodiment, it further includes a conveyance traveling unit that moves the first product conveyance device toward the second product conveyance device and sets the distance between the first product conveyance device and the second product conveyance device, and the conveyance alignment moving unit may further include a distance adjustment device that moves the first product conveyance device forward and backward in the same direction as the product conveyance direction and readjusts the distance between the first product conveyance device and the second product conveyance device set by the conveyance traveling unit.

[0021] Another embodiment of the present invention is a non-contact conveyance alignment method for linearly moving a product and aligning the outlet of the first product conveyance device and the inlet of the second product conveyance device when linearly moving the product from the first product conveyance device arranged at a distance from each other to the second product conveyance device, the method including a position sensing step of checking the position of the second product conveyance device, and after the position sensing step, a conveyance position alignment step of adjusting the position of the first product conveyance device to align it in a straight line with the second product conveyance device.

[0022] In this embodiment, the position sensing step includes a first position sensing process of sensing the position of the second product conveyance device with respect to the second direction, which is the linear movement direction of the product, and a second position sensing process of sensing the position of the second product conveyance device with respect to a third direction different from the first direction. The conveyance position alignment step may include a process of moving the first product conveyance device in the second direction or the third direction.

[0023] [ In this embodiment, the first position sensing process and the second position sensing process can confirm the position display holes of the target bracket located on the second product conveyance device side by the sensor part of the camera base located on the first product conveyance device side, and sense the position of the second product conveyance device with respect to the second direction and the position with respect to the third direction.

[0024] In this embodiment, the position sensing step further includes a conveyance direction sensing process of sensing the angle of the first product conveyance device with respect to the conveyance direction on a plane. The conveyance position alignment step includes a conveyance direction change process of changing the angle of the first product conveyance device with respect to the conveyance direction on a plane. The conveyance direction change process can selectively operate a plurality of two-axis movement units that are movable in the first direction and the second direction for the base support part where the first product conveyance device is located on the upper surface, and change the angle of the first product conveyance device with respect to the conveyance direction on a plane.

[0025] In this embodiment, the transport direction sensing process measures the distance between the second product transport devices using a first distance sensing unit and a second distance sensing unit located spaced apart on both sides of the first product transport device, and can sense the angle of the first product transport device on the plane.

[0026] In this embodiment, prior to the position sensing step, the transport equipment moving step further includes moving the first product transport equipment to the transport travel section and positioning it at a transport position separated from the second product transport equipment, and the transport position alignment step may further include a distance readjustment step in which the first product transport equipment, positioned at a transport position separated from the second product transport equipment, moves forward and backward in the same direction as the product transport direction and readjusts the distance between the two product transport equipment.

[0027] The present invention will be described more fully below with reference to the accompanying drawings illustrating various embodiments. However, the present invention is embodied in a variety of other forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the present invention may be thorough and complete and so that the scope of the invention may be fully conveyed to those skilled in the art. Identical reference numerals represent the same or corresponding components. In this specification, terms such as “first,” “second,” “third,” etc., are used to describe various elements, components, regions, layers, and / or sections, but components, regions, layers, and / or sections are not limited to such terms. Such terms are used only to distinguish one element, component, region, layer, or section from another element, component, region, layer, or section. Accordingly, “first element,” “component,” “region,” “layer,” or “section” as described below may be referred to as a second element, component, region, layer, or section without departing from the teachings of this specification.

[0028] The terms used herein are not merely for the purpose of describing specific embodiments. As used herein, “a,” “an,” “the,” and “at least one” are not limited in quantity and include both singular and plural unless the context clearly indicates otherwise. Thus, a reference to the “the” element following a reference to the “an” element in a claim includes both one and multiple elements. For example, “an element” is synonymous with “at least one element” unless the context clearly indicates otherwise. “At least one” should not be interpreted as limiting “a” or “an,” and “or” may be interpreted as meaning “and / or.” As used herein, the term “and / or” includes any and any combination of one or more related listed items. The terms “contains” and / or “contains” as used herein are to be further understood to specify the presence of the mentioned feature, region, integer, step, operation, or element, but not to exclude the presence or addition of one or more other features, region, integer, step, operation, element, component, and / or group.

[0029] In the following embodiments, when a part such as a membrane, region, or component is said to be above or on top of another part, this includes not only the case where it is directly above the other part, but also the case where another membrane, region, component, etc. is interposed between them. On the other hand, when an element is said to be "directly above" another element, it means that there is no element in between.

[0030] In the drawings, the size of components may be exaggerated or reduced for illustrative purposes. For example, the size and thickness of each component shown in the drawings are arbitrarily shown for illustrative purposes, and the present invention is not necessarily limited to what is illustrated.

[0031] In the following embodiments, the x, y, and z axes are not limited to the three axes on a Cartesian coordinate system, but can be interpreted in a broader sense that includes them. For example, the x, y, and z axes may be orthogonal to each other, or they may refer to different directions that are not orthogonal to each other.

[0032] Where a particular embodiment can be embodied in a different way, a specific sequence of steps may be performed in a different order than that described. For example, two steps described consecutively may be performed substantially simultaneously, or they may be performed in the reverse order of the description.

[0033] Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as those generally understood by a person of ordinary skill in the art to which the present invention pertains. Terms as defined in commonly used dictionaries should be interpreted to be consistent with their meaning in the context of the relevant art and the present invention, and it should be understood that unless explicitly defined, they should not be interpreted in an overly formal or idealized sense.

[0034] Embodiments are described herein with reference to cross-sectional illustrations, which are schematic examples of idealized embodiments. Then, the appearance of the drawings may change as a result of, for example, manufacturing techniques and / or tolerances. Accordingly, embodiments described herein should not be construed as being limited to specific shapes of the regions shown herein, and should include, for example, shape deviations arising from the manufacturing process. For example, regions illustrated or described as flat may generally have rough or non-linear characteristics. Also, sharp angles shown may be represented as rounded. Accordingly, regions shown in the drawings are schematic in nature, and their shapes are not intended to illustrate the exact shape of the regions or to limit the scope of the claims.

[0035] Figure 1 is a side view showing a contactless transport alignment device according to one embodiment of the present invention, Figure 2 is a front view illustrating the first product transport section 100 of a contactless transport alignment device according to one embodiment of the present invention, and Figure 3 is a plan view showing a transport position sensing section 300 in a contactless transport alignment device according to one embodiment of the present invention.

[0036] An embodiment of a contactless conveying and aligning device will be described in detail below with reference to Figures 1 to 3.

[0037] One embodiment of a non-contact transport alignment device includes a first product transport unit 100 equipped with a first product transport device 110 that moves the loaded product 10 in a straight line. For example, the non-contact transport alignment device can transport the loaded product 10 while maintaining a vertical position relative to the ground.

[0038] The first product transport unit 100 includes a first product storage housing unit 120 in which the first product transport equipment 110 is located.

[0039] The first product transport unit 100 includes a first product transport device 110 on which a product 10 (for example, an object to be transported) is mounted in a standing position and which moves the product 10 in a straight line, and a first product storage housing unit 120 on which the first product transport device 110 is located.

[0040] For example, the first product storage housing section 120 is provided with a first opening / closing section that can be opened and closed to allow the product 10 stored inside to be pulled out from the front, which faces the second product transport housing section described later, and a second opening / closing section that can be opened and closed to allow the product 10 to be brought into the back.

[0041] The first opening / closing section and the second opening / closing section are positioned opposite each other in the direction of linear movement of the product 10 by the first product transport device 110. When the second opening / closing section is opened, the product 10 is transported into the first product storage housing section 120 in a standing state and mounted on the first product transport device 110. With the product 10 mounted inside the first product transport device 110, the first opening / closing section is opened, and the product 10 can be pulled out to the outside by the operation of the first product transport device 110.

[0042] The first product transport unit 100, with the second opening / closing section open, can receive the product 10 from a transport device such as a transport robot or fork unit that picks up and transports the product 10, and the product 10 can be loaded onto the first product transport device 110.

[0043] For example, the first product transport unit 100 can move the product 10 in a straight line through the operation of the first product transport device 110 with the first opening / closing unit open, and move it to the second product transport unit 200.

[0044] As an example, the first product transport unit 100 further includes a transport travel unit 130 that moves the first product transport device 110 toward the second product transport device 210, and after the product 10 is loaded onto the first product transport device 110, the transport travel unit 130 moves the first product transport device 110 toward the second product transport unit 200, positioning it at a predetermined distance from the second product transport device 210 of the second product transport unit 200.

[0045] For example, the transport vehicle 130 may include a plurality of transport wheel sections 130a that roll in contact with the ground, and a transport motor section 130b that rotates at least one of the plurality of transport wheel sections 130a.

[0046] One example of the transport travel unit 130 is that a plurality of travel wheel units 130a are arranged on the lower surface of the first product storage housing unit 120, and the travel wheel units 130a, which are rotated by a motor, move the first product storage housing unit 120 toward the second transport unit, thereby positioning the first product transport device 110 at a predetermined distance from the second product transport device 210.

[0047] Furthermore, the transport travel unit 130 may include, although not shown, a movable panel unit (not shown) that is positioned to be retractable from inside the first product storage housing unit 120 through the first opening / closing unit, and a movable wheel unit (not shown) provided below the movable panel unit (not shown) that rolls along the ground, is rotated by a motor, and moves the movable panel unit (not shown) to the outside of the first product storage housing unit 120.

[0048] The transport travel unit 130, although not shown, may have a mobile trolley structure with the first product transport unit 100 positioned on top and including a plurality of travel wheel units 130a rotated by a motor. It is implemented in various modified forms using a known or commercially available travel structure that moves the first product transport device 110 to a predetermined transport position separated from the second product transport device 210, and further detailed explanation is omitted.

[0049] In other words, the transport travel unit 130 may have a trolley structure that directly moves the first product storage housing unit 120 to the second product storage housing unit 220 via the travel wheel unit 130a, or it may have a structure in which the first product storage housing unit 120 is fixed in a certain position and a movable panel unit (not shown) located inside the first product storage housing unit 120 is moved toward the second product storage housing unit 220, and one example is that the first product transport equipment 110 is brought close to the second product transport equipment 210 via a known travel or movement structure.

[0050] Meanwhile, the second product transport unit 200 receives the product that is being moved linearly by the first product transport device 110, moves it linearly, and transports it to a previously set position.

[0051] The second product transport unit 200 includes a second product transport unit 210 that receives and linearly moves products that have been linearly moved by the first product transport unit 110, and a second product storage housing unit 220 located inside the second product transport unit 210. One example is that the second product transport unit 210 transports the products to a predetermined position, i.e., into the second product storage housing unit 220, thereby completing the transport operation of the product 10.

[0052] The second product storage housing section 220 is provided with a third opening / closing section on the side facing the first product transport section 100, which can be opened and closed. For example, when the third opening / closing section is opened, the product 10 is loaded into the housing, and after the product 10 has been loaded into the housing, the third opening / closing section is closed to seal the interior.

[0053] The first, second, and third opening / closing sections each have a sliding opening / closing structure as an example, but they can also be implemented in various modified forms using known or commercially available opening / closing structures, and further detailed explanations are omitted.

[0054] Product 10 is, for example, a carrier on which a vapor deposition mask is mounted, and the second product transport unit 200 is, for example, a vapor deposition chamber unit into which the carrier on which the vapor deposition mask is mounted is inserted and in which the vapor deposition process is carried out.

[0055] Furthermore, the first product transport unit 100 is, for example, a carrier transport unit for vapor deposition masks that guides a carrier on which vapor deposition masks are mounted to the second product transport unit 200 using the first product transport device 110.

[0056] The first product transport unit 100 and the second product transport unit 200 are also known transport structures in which the product 10 to be transported is moved linearly by the first product transport device 110 and the second product transport device 210, which are spaced apart from each other, and the product is then transmitted to the second product transport device 210 by the first product transport device 110 for transport.

[0057] On the other hand, the first product transport device 110 and the second product transport device 210 are examples of magnetic levitation transport devices that move the product 10 in a straight line by magnetic levitation, while the product 10 is mounted in a standing position.

[0058] For example, the first product transport device 110 includes a first magnetic levitation moving device 111 that moves a product 10 mounted in a standing position in a straight line by magnetic levitation, and a first support frame portion 112 that supports the position of the first magnetic levitation moving device 111.

[0059] The first magnetic levitation moving device 111 includes a first magnetic levitation lower moving section 111a having a first lower rail section into which a portion of the lower end of the product 10 is inserted, and a first magnetic levitation upper moving section 111b having a first upper rail section into which a portion of the upper end of the product 10 is inserted.

[0060] The first magnetic levitation moving device 111 loads the product 10 between the first lower rail section and the first upper rail section, and uses magnetism to levitate the carrier, i.e., the product 10, between the first lower rail section and the first upper rail section, thereby moving the product 10 in a straight line.

[0061] The second product transport device 210 may include, for example, a second magnetic levitation moving device 211 that moves the product 10, which is mounted in a standing position, in a straight line by magnetic levitation, and a second support frame 212 that supports the position of the second magnetic levitation moving device 211.

[0062] The second magnetic levitation moving device 211 includes a second magnetic levitation lower moving section 211a having a second lower rail section into which a portion of the lower end of the product 10 is inserted, and a second magnetic levitation upper moving section 211b having a second upper rail section into which a portion of the upper end of the product 10 is inserted.

[0063] The second magnetic levitation moving device 211 loads the product 10 between the second lower rail section and the second upper rail section, and uses magnetism to levitate the carrier, i.e., the product 10, between the second lower rail section and the second upper rail section, causing the product 10 to move in a straight line and stop at a predetermined position.

[0064] As an example, the first magnetic levitation device 111 and the second magnetic levitation device 211 are magnetic levitation devices with the same structure. A product 10 located between the first lower rail section and the first upper rail section can be inserted between the second lower rail section and the second upper rail section, moved in a straight line between the second lower rail section and the second upper rail section, and stopped at a predetermined position.

[0065] One example is a first product conveying device 110 and a second product conveying device 210 having the same structure and being designed to stably convey the same product 10 in a linear direction.

[0066] The first product transport device 110 and the second product transport device 210 are transport devices equipped with multiple transport wheels in a rail into which the product 10 is inserted and mounted. They can be implemented in various modified forms using a known rail movement structure that moves the product 10 in a straight line along a rail on which the product 10 is mounted freely, and can also be implemented in various modified forms using a known movement structure that moves the product 10 between two mounting structures on which the product 10 is mounted.

[0067] On the other hand, one embodiment of a non-contact transport alignment device includes a transport position sensing unit 300 that senses the entrance position of a second product transport device 210, a transport alignment movement unit 400 that adjusts the exit position of the first product transport device 110 to match the entrance position of the second product transport device 210 as determined by the transport position sensing unit 300, and an alignment control unit 500 that controls the operation of the transport alignment movement unit 400 and aligns the exit position of the first product transport device 110 to match the entrance position of the transport device sensed by the transport position sensing unit 300.

[0068] Since the first product conveying device 110 and the second product conveying device 210 are positioned separately from each other and in a non-contact state, the product 10 can only be accurately conveyed in a straight line when the outlet from which the product 10 is discharged from the first product conveying device 110 coincides with the inlet from which the product 10 enters the second product conveying device 210.

[0069] The alignment control unit 500 controls the operation of the transport alignment movement unit 400 and aligns the exit position of the first product transport device 110 to match the entrance position of the second product transport device 210 detected by the transport position sensing unit 300, thereby enabling the first product transport device 110 and the second product transport device to be aligned in a straight line in the transport direction of the product 10.

[0070] The transport position sensing unit 300 includes a first entrance position sensing unit 310 that senses the entrance position of the second product transport device 210 in a direction different from the transport direction of the product 10 on a plane, that is, in a direction different from the transport direction of the product 10 by the first product transport device 110 and the second product transport device 210.

[0071] The transport and alignment moving unit 400 includes an alignment moving device 410 that moves the first product transport device 110 on a plane in a direction different from the transport direction of the product 10, that is, in a direction different from the transport direction of the product 10 by the first product transport device 110 and the second product transport device 210, and adjusts the exit position of the first product transport device 110.

[0072] The alignment moving device 410, for example, moves the product 10 in a direction perpendicular to the transport direction and plane, and adjusts the exit position of the first product transport device 110 to align it with the entrance of the second product transport device 210.

[0073] Furthermore, the transport and alignment moving unit 400 further includes a first alignment moving plate unit 400a on which the first product transport device 110 is positioned on its upper surface, and the alignment moving device 410 moves the first alignment moving plate unit 400a in a direction perpendicular to the transport direction and plane of the product 10, as an example.

[0074] In other words, the alignment moving device 410 moves the first product conveying device 110 in a direction perpendicular to the conveying direction of the product 10, aligning the exit position of the first product conveying device 110 to coincide with the entrance of the second product conveying device 210.

[0075] For example, when the transport direction of product 10 is in the X-axis direction (for example, the first direction), the alignment moving device 410 moves the first product transport device 110 in the Y-axis direction (for example, the second direction) to align the exit of the first product transport device 110 with the entrance of the second product transport device 210 in the Y-axis direction, enabling alignment.

[0076] Furthermore, the transport position sensing unit 300 further includes a linear movement direction sensing unit 320 that senses the angle of the first product transport device 110 with respect to the transport direction on a plane.

[0077] The linear movement direction sensing unit 320 includes a first distance sensing unit 321 and a second distance sensing unit 322, which are located spaced apart on both sides of the first product conveying unit 110 and sense the distance to the second product conveying unit 200 by sensing the angle of the first product conveying unit 110 on a plane.

[0078] The first distance sensing unit 321 and the second distance sensing unit 322 are located at the same height and separated in the Y-axis direction perpendicular to the product 10 transport direction. By sensing the distance between the first product transport unit 100 and the second product transport unit 200, they can sense the angle of the first product transport device 110 on a plane.

[0079] The first distance sensing unit 321 and the second distance sensing unit 322 are positioned on the front side of the first product transport unit 100 facing the second product transport unit 200, that is, on the front side of the first product storage housing unit 120 facing the second product storage housing unit 220, and each senses the plane distance between the first product transport unit 100 and the second product transport unit 200 at a distanced position.

[0080] The first distance sensing unit 321 and the second distance sensing unit 322 are positioned on both sides of the first product transport device 110, spaced apart from each other, and sense the distance between the first product transport device 100 and the second product transport device 200. If the two distances are different, it is confirmed that the transport direction of the fixedly positioned second product transport device 210 and the first product transport device 110 are alternately positioned. If the two sensed positions are the same, it is confirmed that the first product transport device 110 and the second product transport device 210 are arranged in a straight line in the same direction as the transport direction of the product 10.

[0081] The first distance sensing unit 321 and the second distance sensing unit 322 each sense the distance between the first product transport unit 100 and the second product transport unit 200, and confirm the angle of the first product transport device 110 on a plane with respect to the transport direction. As a result, the alignment control unit 500 controls the operation of a plurality of two-axis moving units 431, i.e., a plane movement unit 430 for angle adjustment, which will be described later and includes four two-axis moving units 431, so that the two linear transport devices, i.e., the first product transport device 110 and the second product transport device 210, can be aligned in a straight line.

[0082] The transport and alignment moving unit 400 further includes a base support unit 420 on which the first product transport device 110 is positioned, and an angle adjustment planar moving unit 430 located below the base support unit 420, which adjusts the angle of the base support unit 420 on the plane and adjusts the transport direction angle of the first product transport device 110.

[0083] The angle adjustment planar movement unit 430 includes a plurality of two-axis movement units 431 that are movable in the X-axis direction and the Y-axis direction.

[0084] The two-axis moving unit 431 is a commercially available or known unit that moves the base support 420 in the X-axis direction, which is the transport direction of the product 10, and the Y-axis direction, which is perpendicular to it, and further details are omitted.

[0085] For example, the multiple two-axis moving units 431 are provided in pairs on both sides of the leading edge and pairs on both sides of the rear end in the transport direction of the product 10, for a total of four units.

[0086] The transport and alignment moving unit 400 adjusts the transport angle of the first product transport device 110 so that the first product transport device 110 and the second product transport device 210 are aligned in a straight line on a plane.

[0087] Multiple two-axis moving units 431, i.e., a transport alignment moving unit 400 including four two-axis moving units 431, adjust the transport angle of the first product transport device 110 on a plane, align the first product transport device 110 and the second product transport device 210 in a straight line, and enable the product 10 to be transported stably through the two linear transport devices, i.e., the first product transport device 110 and the second product transport device 210.

[0088] Furthermore, the transport position sensing unit 300 includes a second entrance position sensing unit 330 that senses the height of the first product transport device 110.

[0089] Furthermore, the transport and alignment moving unit 400 may further include a transport lifting device 440 that raises and lowers the first product transport equipment 110 and adjusts the height of the exit of the first product transport equipment 110.

[0090] The transport elevator 440 is positioned above the travel wheel section 130a and, as an example, adjusts the height of the exit of the first product transport device 110.

[0091] Furthermore, although not shown in the diagram, the transport elevator 440 is located between the lower surface of the product transport housing and the first product transport device 110, and can adjust the height of the first product transport device 110.

[0092] Multiple transport elevators 440 are positioned in the transport direction of the first product transport device 110, allowing the first product transport device 110 to be positioned horizontally in the longitudinal direction, that is, in the transport direction of the product 10.

[0093] The transport elevator 440 is, for example, a ball-screw type linear actuator, but it can also be implemented in various ways using known elevators, such as a hydraulic cylinder, a rack gear and a pinion gear that meshes with the rack gear and is rotated by a motor, and a rack and pinion structure that converts the rotational force of the motor into linear motion, and a further detailed explanation is omitted.

[0094] When the first product transport unit 100 moves toward the second product transport unit 200 by the transport travel unit 130 and is positioned opposite the second product transport unit 200 at a previously set transport position, the height of the first product transport device 110 may change depending on the ground conditions.

[0095] In other words, as the traveling wheel section 130a rolls along the ground and the first product transport device 110 moves to a predetermined position relative to the second product transport device 210, the height of the exit of the first product transport device 110 changes depending on the ground conditions. As a result, the transport elevator 440 adjusts the height of the exit of the first product transport device 110, aligning the height of the exit of the first product transport device 110 with the height of the entrance of the second product transport device 210, which has the same structure and is located at the product transport position.

[0096] The first entrance position sensing unit 310 and the second entrance position sensing unit 330 include a sensor unit 340 of a camera base located on either the first product transport unit 100 or the second product transport unit 200, and a reference position display unit 350 located on the other side of the first product transport unit 100 or the second product transport unit 200, which displays a reference position confirmed through the video by the sensor unit 340.

[0097] The sensor unit 340 can be, for example, an IPS (Indoor Positioning System) sensor on a camera board, but other known camera board position sensing sensors can also be used.

[0098] One example of a reference position indicator unit 350 is a target bracket equipped with a position indicator hole 351 for displaying a reference position.

[0099] Figures 4 and 5 are side views showing an example of the application of the transport position sensing unit 300 in a non-contact transport alignment device according to one embodiment of the present invention. The figures show an example in which the sensor unit 340, which is an IPS sensor, photographs the reference position display unit 350 and senses the position in the Y-axis direction and the Z-axis direction (for example, the third direction).

[0100] Figure 4 is a diagram showing an example where the reference position display unit 350 is photographed by the sensor unit 340, which is an IPS sensor on the camera base, before alignment, that is, before the position of the first product transport device 110 is aligned by the transport alignment movement unit 400. Figure 5 is a diagram showing an example where alignment has occurred, that is, the first product transport device 110 has been moved by the transport alignment movement unit 400 and aligned with the second product transport device 210.

[0101] Referring to Figure 4, the sensor unit 340 sees the cross axis 341 that detects the position display hole 351 in the captured video, and measures the coordinate values ​​in two axes from the cross axis 341, namely the Y-axis and Z-axis coordinate values ​​by looking at the position display hole 351 of the reference position display unit 350 which is located on the relative side with respect to the cross axis 341.

[0102] The sensor unit 340 is a camera substrate sensor that senses holes or reflectors on the camera substrate and is capable of measuring position values ​​in two directions from a reference point. Further details are omitted.

[0103] As shown in Figure 4, the alignment control unit 500 receives coordinate values ​​in the Y-axis and Z-axis directions from the sensor unit 340 with respect to the cross axis 341, controls the operation of the alignment moving device 410 to adjust the position of the first product transport device 110 in the Y-axis direction, controls the operation of the transport elevator 440 to adjust the position of the first product transport device 110 in the Z-axis direction, and as shown in Figure 5, positions the intersection of the cross axis 341 at the center of the position indicator hole 351, thereby effectively aligning the positions of the first product transport device 110 and the second product transport device 210 in the Y-axis and Z-axis directions.

[0104] Furthermore, referring to Figures 1 to 3, the transport and alignment moving unit 400 further includes a distance adjustment device 450 that moves the first product transport device 110 back and forth in the same direction as the transport direction of the product 10 and adjusts the distance between the second product transport devices 210.

[0105] More specifically, the transport and alignment moving section 400 further includes a second alignment moving plate section 460, on which an alignment moving device 410 is located on the upper surface and which is moved linearly by a distance adjustment device 450.

[0106] The distance adjustment device 450 is located on the base support 420 and can adjust the distance between the first product conveying device and the second product conveying device by moving both the alignment moving device 410, which is positioned on the second alignment moving plate 460, and the first alignment moving plate 400a, on which the first product conveying device 110 is positioned on its upper surface, in the X-axis direction, i.e., in the same direction as the conveying direction of the product 10.

[0107] The first distance sensing unit 321 and the second distance sensing unit 322 are positioned on the second alignment moving plate section 460 and sense the distance to the second product transport section 200 while moving together with the second alignment moving plate section 460. The alignment control unit 500 receives distance information from the first distance sensing unit 321 and the second distance sensing unit 322, which move forward and backward together with the second alignment moving plate section 460, and not only aligns the angles on the plane of the first product transport device 110, but can also finely adjust the distance between the exit and entrance of the first product transport device 110.

[0108] The distance adjustment device 450 can further adjust the distance between the first product conveying device 110 and the second product conveying device 210 by moving the first product conveying device 110 in the conveying direction of the product 10 after the conveying travel unit 130 has initially positioned the first product conveying device 110 and the second product conveying device 210 at a pre-set conveying position.

[0109] The alignment moving device 410 and distance adjusting device 450 are, for example, ball-screw type linear actuators. However, they can also be implemented in various modified forms using known elevators, including hydraulic cylinders, rack gears and pinion gears that mesh with the rack gears and are rotated by a motor, and rack and pinion structures that convert the rotational force of the motor into linear motion. Further detailed explanations are omitted.

[0110] In particular, the non-contact transport alignment device, when the first product transport device 110 is moved by the transport travel unit 130 and positioned at a predetermined distance while facing the second product transport device 210, senses the position of the second product transport device 210 with the transport position sensing unit 300, moves the position of the first product transport device 110 with the transport alignment moving unit 400, and aligns the positions of the first product transport device 110 and the second product transport device 210 in a straight line.

[0111] More specifically, with the transport direction of product 10 being the X-axis direction as a reference, the first entrance position sensing unit 310 senses the position of the first product transport device 110 in the Y-axis direction, the second entrance position sensing unit 330 senses the position of the second product transport device 210 in the Z-axis direction, and the linear movement direction sensing unit 320, consisting of the first distance sensing unit 321 and the second distance sensing unit 322, measures the distance between the first product transport device 110 and the second product transport device 210.

[0112] The alignment control unit controls the operation of the alignment moving device 410 and the transport elevator 440 based on the position information of the first product transport device 110 in the Y-axis and Z-axis directions transmitted from the first entrance position sensing unit 310 and the second entrance position sensing unit 330, thereby aligning the positions of the first product transport device 110 and the second product transport device 210 in the Y-axis and Z-axis directions.

[0113] Furthermore, the alignment control unit uses distance information transmitted through the first distance sensing unit 321 and the second distance sensing unit 322 located on both sides of the first product conveying device 110 to confirm the conveying direction of the first product conveying device 110, that is, the angle of the first product conveying device 110's swing on a plane, and controls the operation of the angle adjustment plane movement unit 430 to align the first product conveying device 110 and the second product conveying device 210 in a straight line in the X-axis direction.

[0114] Furthermore, after the first product conveying device 110 and the second product conveying device 210 are aligned in a straight line in the X-axis direction, the alignment control unit reconfirms the distance between the first product conveying device 110 and the second product conveying device 210 based on the distance information transmitted through the first distance sensing unit 321 and the second distance sensing unit 322, and controls the operation of the distance adjustment device 450 to finely readjust the distance between the first product conveying device 110 and the second product conveying device 210.

[0115] The non-contact transport alignment device not only aligns the positions of the first product transport device 110 and the second product transport device 210 in the Y and Z axes, based on the fact that the transport direction of the product 10 is the X-axis direction, but also aligns their transport directions on a plane, aligning the first product transport device 110 and the second product transport device 210, which are located spaced apart, so that they are precisely in a straight line.

[0116] Furthermore, after axial alignment between the first product conveying device 110 and the second product conveying device 210 is completed, the non-contact conveying alignment device controls the operation of the distance adjustment device 450 to finely readjust the distance between the first product conveying device 110 and the second product conveying device 210, effectively preventing malfunctions during conveying and enabling precise and stable conveying of the product 10 from the first product conveying device 110 to the second product conveying device 210.

[0117] On the other hand, Figure 6 is a flowchart showing one embodiment of the non-contact transport alignment method according to the present invention, and one embodiment of the non-contact transport alignment method will be described in detail below with reference to Figures 1 and 6.

[0118] One embodiment of a non-contact transport alignment method may include a transport equipment movement step S100 in which the inlet of the first product transport equipment 110 and the outlet of the second product transport equipment 210 are aligned when the product 10 is moved linearly through a first product transport equipment 110 and a second product transport equipment 210 which are positioned spaced apart from each other and move the product 10 linearly.

[0119] The non-contact transport alignment method includes a position sensing step S200 to confirm the position of the second product transport device 210, and a transport position alignment step S300 after the position sensing step S200 to adjust the position of the first product transport device 110 and align it in a straight line with the second product transport device 210.

[0120] The position sensing step S200 includes a first position sensing process S210 that senses the position of the second product conveying device 210 relative to the Y-axis direction when the linear movement direction of the product 10 is in the X-axis direction, and a second position sensing process S220 that senses the position of the second product conveying device 210 relative to the Z-axis direction.

[0121] In the first position sensing process S210 and the second position sensing process S220, the sensor unit 340 of the camera base located on the first product transport device 110 side checks the position indicator hole 351 of the target bracket located on the second product transport device 210 side, and senses the position of the second product transport device 210 in the Y-axis direction and the Z-axis direction.

[0122] More specifically, the sensor unit 340 is, for example, an IPS sensor on a camera substrate, but other known position sensing sensors on camera substrates can also be used.

[0123] In the first position sensing process S210 and the second position sensing process S220, the position of the second product conveying device 210 in the Y-axis direction and the position in the Z-axis direction are sensed from the image captured by the sensor unit 340, which is an IPS sensor, using the coordinate values ​​in the two axes of the position display hole 351, that is, the coordinate values ​​in the Y-axis direction and the Z-axis direction, with respect to the intersection of the cross axis 341.

[0124] Furthermore, the transport position alignment step S300 includes a process S310 to move the first product transport device 110 in the Y-axis direction or the Z-axis direction, aligning the position of the first product transport device 110 by moving it in the Y-axis direction or the Z-axis direction so that the intersection of the cross axes 341 is located at the center of the position indicator hole 351.

[0125] Furthermore, the position sensing step S200 further includes a transport direction sensing process S230 that senses the angle of the first product transport device 110 with respect to the transport direction on a plane.

[0126] The transport direction sensing process S230 involves sensing the angle of the first product transport device 110 with respect to the transport direction on its plane, and using the first distance sensing unit 321 and the second distance sensing unit 322, which are located spaced apart from both sides of the first product transport device 110, to measure the distance between the first product transport device 210 and the second product transport device 210, thereby sensing the angle of the first product transport device 110 on its plane.

[0127] The transport direction sensing process S230 can confirm that the first product transport device 110 is not in a straight line with the second product transport device 210 but is offset from it, if the distances measured by the first distance sensing unit 321 and the second distance sensing unit 322 are different.

[0128] In the transport direction sensing process S230, if the distances measured by the first distance sensing unit 321 and the second distance sensing unit 322 are the same, it can be confirmed that the first product transport device 110 is positioned in a straight line with the second product transport device 210.

[0129] The transport position alignment step S300 includes a transport direction changing process S320 in which the angle of the first product transport device 110 with respect to the transport direction is changed on the plane of the first product transport device 110. One example of the transport direction changing process S320 is to selectively operate a plurality of two-axis moving units 431 that are movable in the X-axis direction and the Y-axis direction on the base support portion 420 on which the first product transport device 110 is located on the upper surface, thereby changing the angle of the first product transport device 110 with respect to the transport direction on the plane of the first product transport device 110.

[0130] When transporting a product 10 of a certain length or longer by moving it in a straight line between a first product transport device 110 and a second product transport device 210, the first product transport device 110 and the second product transport device 210 must be kept in a straight line until the transport of the product 10 is completed, that is, until the product 10 is located only in the second product transport device 210.

[0131] This allows the first product conveying device 110 and the second product conveying device 210 to be aligned in a straight line until the conveying of the product 10 is completed through the conveying direction sensing process S230 and the conveying direction changing process S320, thereby enabling stable conveying of products 10 of a certain length or longer through the first product conveying device 110 and the second product conveying device 210.

[0132] The two-axis moving unit 431 is a known unit that moves the base support 420 in the X-axis direction, which is the transport direction of the product 10, and the Y-axis direction, which is perpendicular to it, and a further detailed explanation is omitted.

[0133] On the other hand, one embodiment of the non-contact transport alignment method further includes a transport equipment moving step S100 in which the first product transport equipment 110 is moved before the position sensing step S200 to a transport position separated from the second product transport equipment 210.

[0134] The transport equipment moving step S100 is a known transport equipment structure including wheels that roll along the ground, and one example is moving the first product transport equipment 110 toward the second product transport equipment 210.

[0135] Furthermore, the transport position alignment step S300 further includes a distance readjustment process S330 in which the first product transport device 110, which is located at a transport position separated from the second product transport device 210, is moved back and forth in the X-axis direction, i.e., in the same direction as the transport direction of the product 10, in order to readjust the distance between it and the second product transport device 210.

[0136] The distance readjustment process S330 finely readjusts the distance between the first product conveying device 110 and the second product conveying device 210, effectively preventing malfunctions during conveyance and enabling precise and stable conveyance of the product 10 from the first product conveying device 110 to the second product conveying device 210.

[0137] In other words, in one embodiment of the non-contact transport alignment method, while moving the first product transport device 110 close to the second product transport device 210, the position of the second product transport device 210 in the Y-axis direction and the Z-axis direction is sensed in the first position sensing process S210 and the second position sensing process, and then the first product transport device 110 is moved in the Y-axis direction or the Z-axis direction to align the position of the first product transport device 110. At the same time, the angle of the first product transport device 110 with respect to the transport direction is sensed on a plane in the transport direction sensing process S230, and then the angle of the first product transport device 110 with respect to the transport direction is changed on a plane in the transport direction changing process S320, thereby aligning the first product transport device 110 and the second product transport device 210 in a straight line without misalignment not only in the X-axis, Y-axis, and Z-axis directions, but also on a plane.

[0138] Furthermore, in one embodiment of the non-contact transport alignment method, after the first product transport device 110 and the second product transport device 210 are aligned in a straight line, the distance between the first product transport device 110 and the second product transport device 210 is finely readjusted to prevent malfunctions during transport and to transport the product 10 from the first product transport device 110 to the second product transport device 210 precisely and stably.

[0139] The non-contact transport alignment device and non-contact transport alignment method quickly and precisely align the transport positions of the first product transport section 100 and the second product transport section 200, which transport the product 10 in a non-contact manner by moving it in a straight line. By utilizing a non-contact transport device such as a magnetic levitation transport device, the transport efficiency and transport stability can be greatly improved when transporting the product 10 in a standing position.

[0140] In particular, when one of the two product transport units is moved close to the other product transport unit, and then the product 10 is moved in a straight line and transported in a non-contact manner, the non-contact transport alignment device and non-contact transport method can quickly and precisely align the transport position, greatly improving transport efficiency and transport stability during the transport of the product 10.

[0141] Such general and specific embodiments may be embodied using systems, methods, computer programs, or combinations of systems, methods, and computer programs.

[0142] The present invention should not be construed as being limited to the embodiments described herein. Rather, these embodiments are provided so as to make the invention thorough and complete and so as to fully convey the spirit of the invention to those skilled in the art.

[0143] Although the present invention has been specifically illustrated and described with reference to embodiments, those skilled in the art will understand that a variety of modifications to the form and details are possible without departing from the spirit or scope of the invention as defined in the claims set forth later. [Industrial applicability]

[0144] According to one embodiment of the present invention, a non-contact transport alignment device and a non-contact transport alignment method using the same are provided, and embodiments of the present invention can be applied to non-contact transport devices for transporting substrates or mask assemblies in the field of display devices.

Claims

1. A transport alignment moving unit adjusts the exit position of a first product transport device that moves the products to be transported in a straight line, where the products to be transported are placed. A transport position sensing unit that senses the entrance position of a second product transport device, which is positioned separately from the first product transport device and receives and linearly moves products that are linearly moved by the first product transport device, A non-contact conveying and aligning device, characterized by including an alignment control unit that controls the operation of the conveying and aligning moving unit and adjusts the exit position of the first product conveying device in accordance with the entrance position of the second product conveying device sensed by the conveying position sensing unit.

2. The aforementioned transport position sensing unit is When the transport direction of a product to be transported to the first product transport device, which is perpendicular to the second direction on a plane, is the first direction, the system includes a first entrance position sensing unit that senses the entrance position of the second product transport device in the second direction. The non-contact conveying and aligning device according to claim 1, characterized in that the conveying and aligning moving unit includes an aligning moving device that moves the first product conveying device on a plane in a direction different from the first direction and adjusts the exit position of the first product conveying device.

3. The transport position sensing unit further includes a linear movement direction sensing unit that senses the angle of the first product transport device with respect to the transport direction on a plane, The aforementioned transport and alignment moving unit is The base support section on which the first product transport device is located is located at the top, The non-contact conveying alignment device according to claim 2, further comprising an angle-adjusting planar moving part located below the base support part, which adjusts the angle of the base support part on the plane and adjusts the conveying direction angle of the first product conveying device.

4. The non-contact conveying alignment device according to claim 3, characterized in that the linear movement direction sensing unit is located at a distance from both sides of the first product conveying device and includes a first distance sensing unit and a second distance sensing unit that sense the distance to the second product conveying device.

5. The non-contact conveying alignment device according to claim 3, characterized in that the angle adjustment planar moving section includes a plurality of two-axis moving units that are movable in a first direction and a second direction.

6. The transport position sensing unit includes a second entrance position sensing unit that senses the height of the first product transport equipment. The non-contact conveying and aligning device according to claim 2, characterized in that the conveying and aligning moving unit further includes a conveying lifting device for raising and lowering the first product conveying device.

7. The first entrance position sensing unit and the second entrance position sensing unit are, A sensor section of a camera substrate is located on either the first transport section, which includes the first product transport equipment, or the second transport section, which includes the second product transport equipment. The non-contact transport alignment device according to claim 6, further comprising a reference position display unit disposed on the other side of the first transport unit and the second transport unit, which displays a reference position confirmed via video from the sensor unit.

8. The system further includes a transport travel unit that moves the first product transport device toward the second product transport device and sets the distance between the first product transport device and the second product transport device, The aforementioned transport and alignment moving unit is The non-contact conveying alignment device according to claim 1, further comprising a distance adjustment device that moves the first product conveying device back and forth in the same direction as the conveying direction of the product, and readjusts the distance between the first product conveying device and the second product conveying device set by the conveying travel unit.

9. In a non-contact transport alignment method in which a product is moved in a straight line from a first product transport device to a second product transport device, which are spaced apart from each other, the exit of the first product transport device and the entrance of the second product transport device are aligned, A position sensing step to confirm the position of the second product transport device, A non-contact transport alignment method, characterized by including a transport position alignment step after the position sensing step, which involves adjusting the position of the first product transport device to align it in a straight line with the second product transport device.

10. The position sensing step is, A first position sensing process that senses the position of the second product conveying device relative to the second direction when the first direction is different from the second direction which is the linear movement direction of the product, The process includes a second position sensing process for sensing the position of a second product conveying device in a third direction different from the first direction, The aforementioned transport position alignment step is, The non-contact conveying alignment method according to claim 9, characterized in that it includes a step of moving the first product conveying device in a second or third direction.

11. The first position sensing process and the second position sensing process are as follows: The non-contact transport alignment method according to claim 10, characterized in that the sensor portion of the camera base located on the first product transport device side confirms the position indicator hole of the target bracket located on the second product transport device side, and senses the position of the second product transport device in the second direction and the position in the third direction.

12. The position sensing step further includes a transport direction sensing step of sensing the angle of the first product transport device with respect to the transport direction on a plane, The transport position alignment step includes a transport direction changing process that changes the angle with respect to the transport direction on the plane of the first product transport equipment, The non-contact conveying alignment method according to claim 10, characterized in that the conveying direction changing process selectively operates a plurality of two-axis moving units that are movable in a first direction and a second direction on a base support portion located on the upper surface of the first product conveying device, thereby changing the angle with respect to the conveying direction on the plane of the first product conveying device.

13. The transport direction sensing process is as follows: The non-contact conveying alignment method according to claim 12, characterized in that a first distance sensing unit and a second distance sensing unit, positioned at a distance from both sides of the first product conveying device, measure the distance between the second product conveying devices and sense the angle of the first product conveying device on a plane.

14. Prior to the position sensing step, the method further includes a transport equipment moving step in which the first product transport equipment is moved to the transport travel section and positioned at a transport location separated from the second product transport equipment, The aforementioned transport position alignment step is, The non-contact conveying alignment method according to claim 9, further comprising a distance readjustment step of moving the first product conveying device, which is located at a conveying position separated from the second product conveying device, forward and backward in the same direction as the conveying direction of the product, and readjusting the distance between the second product conveying devices.

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