Plasma etching equipment, etching machine, focus ring and its jacking structure

Abstract

Disclosed are a plasma etching apparatus, an etching machine, a focus ring (10), and its jacking structure, the focus ring (10) comprising a plurality of ring bodies arranged in a stacked manner, each of the ring bodies being independently arranged, the axial size of the uppermost ring body (1) being larger than the maximum jacking height that the focus ring (10) can tolerate, and during the use of the separate-type focus ring (10), each of the ring bodies can be jacked, thereby dividing the large space below the original focus ring (10) after jacking into several smaller spaces, each of which is connected only by small slits between the structures, limiting the concentration and activity of charged particles in the plasma within the smaller spaces, thereby preventing arc discharge phenomena and achieving the objective of avoiding problems such as spark marks or cracking of the focus ring (10).

Claims

1. A focus ring comprising a plurality of ring bodies arranged in a stacked manner, wherein each of the ring bodies is independently arranged, and the axial size of the uppermost ring body is greater than the maximum jacking height that the focus ring can tolerate.

2. The focus ring according to claim 1, characterized in that the axial size of the uppermost ring body is larger than the axial size of the other ring bodies.

3. The focus ring according to claim 2, characterized in that the axial dimensions of the other ring bodies, excluding the ring body located in the uppermost layer, are the same.

4. The focus ring according to any one of claims 1 to 3, characterized in that the engagement surface between two adjacent ring bodies is an annular plane or an uneven surface.

5. The focus ring according to claim 4, characterized in that the engagement surface between two adjacent ring bodies is an annular plane perpendicular to the axis of the ring body.

6. The focus ring according to any one of claims 1 to 3, characterized in that the engagement surface between two adjacent ring bodies is a curved surface, or a bent surface, or a combination of at least two of the three: a flat surface, a curved surface, and a bent surface.

7. The focus ring according to claim 6, wherein one of the engaging surfaces between two adjacent ring bodies includes a first annular projection and a first annular groove arranged alternately along the radial direction of the ring body, and the other includes a second annular projection and a second annular groove arranged alternately along the radial direction of the ring body, the first annular projection being fitted into the second annular groove, and the second annular projection being fitted into the first annular groove.

8. The focus ring according to claim 6, wherein the engagement surface between two adjacent ring bodies includes a plurality of annular contact surfaces arranged in an annular pattern along the radial direction of the ring body, and each of the annular contact surfaces is arranged sequentially at intervals along the axial direction of the ring body in a stepped manner.

9. The ring body at the top layer is SiO ２ , Si, SiC and Y ２ O ３ It is manufactured from one of the aforementioned ring bodies, and the other ring body is made of SiO ２ or Al ２ O ３ A focus ring according to any one of claims 1 to 3, 5, 7, and 8, characterized in that it is manufactured from [a specific material].

10. A focus ring jacking structure applicable to the focus ring jacking described in any one of claims 1 to 9, wherein the focus ring jacking structure includes a drive unit and a plurality of execution units, the drive unit and each of the execution units are connected to transmit signals, each of the execution units is arranged to correspond to each of the ring bodies of the focus ring, and the drive unit of the focus ring jacking structure drives each of the execution units to jack each of the ring bodies of the focus ring by a predetermined height according to a predetermined command.

11. The aforementioned focus ring jacking structure is A pin member including a plurality of pins connected to each ring body of the focus ring to transmit power, A variable stroke transmission mechanism comprising a variable stroke plate and transmission rods, wherein the variable stroke plate is provided with a transmission structure that engages with each of the transmission rods to transmit power, the transmission rods are connected to pins to transmit power, and one end of each transmission rod away from the pins is in contact with and engaged with the transmission structure, and the gear ratio of each transmission structure is reduced proportionally in order according to the arrangement order of the corresponding ring bodies from top to bottom within the focus ring, A positioning member that guides and positions each of the pins and / or the transmission rod so that each of the pins reciprocates along the axial direction of the focus ring, The focus ring jacking structure according to claim 10, further comprising a drive device for driving the variable stroke plate to reciprocate along a predetermined direction.

12. The focus ring jacking structure according to claim 11, characterized in that the transmission structure is a variable stroke groove, a driven shaft is provided at the bottom of the transmission rod, the axis of the driven shaft intersects with the axis of the transmission rod, the driven shaft is slidably engaged with the variable stroke groove, and the angle of the angle between the connecting line between both ends of the variable stroke groove and the horizontal plane is reduced proportionally in order according to the arrangement order of the corresponding ring bodies from top to bottom within the focus ring.

13. The focus ring jacking structure according to claim 12, characterized in that the positioning member is provided with a guide hole and a guide groove communicating with the guide hole, the transmission rod is slidably engaged with the guide hole, and the driven shaft protrudes from the guide groove and contacts and engages with the variable stroke groove opening.

14. The focus ring jacking structure according to claim 11, wherein the transmission structure is a variable stroke inclined plane, and the angle of the angle between the variable stroke inclined plane and the horizontal plane is reduced proportionally in order according to the arrangement order of the corresponding ring bodies from top to bottom within the focus ring.

15. The focus ring jacking structure according to claim 11, further comprising a fixed base, wherein the variable stroke plate is provided on the fixed base so as to reciprocate perpendicular to the axial direction of the focus ring.

16. The focus ring jacking structure according to claim 15, characterized in that a slider is provided on one of the fixed base and the variable stroke plate, a guide rail is provided on the other, and the slider is slidably engaged with the guide rail so as to connect the variable stroke plate to the fixed base in a slidable manner.

17. The aforementioned focus ring jacking structure is A jacking base, and a pin member provided on the jacking base, which includes a plurality of pins corresponding to each ring body of the focus ring, wherein the gap between the pin and the corresponding ring body increases arithmetically in order according to the arrangement order of the corresponding ring bodies from top to bottom within the focus ring, The focus ring jacking structure according to claim 10, further comprising a drive device which is connected to the jacking base by a transmission rod to transmit power, thereby driving the jacking base to reciprocate along the axial direction of the focus ring.

18. The focus ring jacking structure according to any one of claims 11 to 17, wherein the transmission rod includes a rod body, a fixed flange, and a corrugated tube, the fixed flange is fixed and connected to the etching machine so as to be sealed, the rod body is connected to the pin member so as to pass through the fixed flange, and both ends of the corrugated tube are connected to the fixed flange and the base of the rod body so as to be sealed, respectively.

19. The focus ring jacking structure according to any one of claims 11 to 17, characterized in that each of the pins is arranged at intervals along the circumferential direction around the axis of the focus ring.

20. The focus ring jacking structure according to any one of claims 11 to 17, characterized in that the drive device is a piston cylinder or a linear motor, or the drive device includes a rotary motor and a transmission structure.

21. The focus ring jacking structure according to any one of claims 11 to 17, further comprising a positioning sleeve shaft fixed to and connected to an etching machine for guiding positioning relative to the pin.

22. An etching machine comprising a focus ring according to any one of claims 1 to 9 and a focus ring jacking structure according to any one of claims 10 to 21.

23. Plasma etching equipment, characterized by including the etching machine described in claim 22.

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