Robotic arm and detection device for detecting physical properties of micro-nano assemblies

Abstract

A robotic arm for clamping nanoprobes, a detection device having the robotic arm, and a method for detecting physical properties of a micro-nano assembly are provided. [Solution] A robot arm (1) includes a positioning and adjustment assembly (10) that includes a slide rail assembly (11). The slide rail assembly includes a slide rail top cover and an elastic assembly. The slide rail of the slide rail top cover is received in a slide groove of a slide rail base, and both ends of the elastic assembly are fixed to the slide rail base and the slide rail top cover, respectively. The robot arm further includes a hand wheel assembly (12), a cantilever (14) connected to the positioning and adjustment assembly, and a clamping member (16) having a hole (H). The hand wheel assembly is contactable with the slide rail top cover, and a connecting member (15) is received in a groove (142) of the cantilever.

Description

[Technical Field]

[0001] The present disclosure relates to a robotic arm and a detection device, and more particularly to providing a detection device having a robotic arm that is used to detect physical properties of micro-nano assemblies. [Background technology]

[0002] Probes are commonly used in the manufacturing and analysis of semiconductor assemblies, particularly to detect the structure, size, material properties, or potential defects of chips, wafers, transistors, integrated circuit boards, or other micro- or nano-level electronic assemblies. Different technical fields may require different detection needs, such as structural analysis or electrical testing. For example, surface characteristics of a test object can be detected by scanning the surface of the test object back and forth using an electron beam and observing the reflected or transmitted light to detect the surface characteristics, shape of the irregularities, etc. With the development of science and technology, the range of applications of semiconductors is becoming increasingly broad, and the demand for semiconductor components is increasing day by day. Due to the particular requirements for precision control in the semiconductor manufacturing process, probes are extremely important in the semiconductor industry.

[0003] In conventional detection technologies, probes typically have a specific length and maintain a constant length after being attached to a detection device. However, because the height or thickness of each measurement object is different and the position on the surface of the measurement object that the probe tip must touch is also different, the length of the probe directly affects the distance the tip penetrates into the measurement object. If the probe length is too short, the probe cannot sufficiently contact the surface of the measurement object. Conversely, if the probe length is too long and the tip penetrates too deeply into the surface of the measurement object, the probe and the measurement object are likely to be damaged.

[0004] For similar reasons, the adjustability of the detection device for clamping the probe is also very important. However, conventional detection devices for micro / nano assemblies lack sufficient adjustability because certain assemblies (e.g., the assembly clamping the probe and the cantilever of the robot arm) cannot move relative to each other due to limitations in the rotation axis direction or the connection relationship of the assemblies. The probes of micro / nano assembly detection devices typically require coordinate adjustment with fine widths, and high precision is also required, so multi-axial operability is important for such devices. Furthermore, if the probe cannot be stably clamped or housed in the detection device, it will significantly affect the accuracy of the semiconductor manufacturing process or analysis process.

[0005] As described above, how to accurately adjust the distance between the probe and the object to be measured, and how to improve the adjustment function of the detection device while maintaining the stability of the probe, thereby achieving more accurate measurement results, are technical issues that need to be resolved as soon as possible in this field. Summary of the Invention

[0006] The present disclosure mainly provides a robot arm for clamping a probe, a detection device having the robot arm, and a method for detecting the physical properties of a micro-nano assembly, wherein the robot arm has multi-axial adjustability and good clamping stability, making the operation of the detection device more flexible and convenient, and improving the accuracy of the measurement results.

[0007] In some embodiments, the present disclosure provides a robotic arm for clamping a probe, the robotic arm including a positioning adjustment assembly mounted on a positioning adjustment base. The positioning adjustment assembly includes a slide rail assembly including a slide rail top cover and a resilient assembly. The slide rail of the slide rail top cover is slidably received in a slide groove of the slide rail base, and both ends of the resilient assembly are fixed to the slide rail base and the slide rail top cover, respectively. The robotic arm also includes a handwheel assembly, a cantilever connected to the positioning adjustment assembly, and a clamping member having a hole. The handwheel assembly is contactable with the slide rail top cover, and the connecting member is received in the groove of the cantilever.

[0008] The technical features of the present disclosure have been broadly described above, so that the following detailed description of the present disclosure can be easily understood. Other technical features for achieving the objectives of the present invention will be described below. It should be understood by those skilled in the art to which the present disclosure pertains that the concepts and specific embodiments disclosed below can be modified or utilized as other structures or manufacturing processes to achieve the same objectives as those disclosed herein. It should also be understood by those skilled in the art to which the present disclosure pertains that such equivalent constructions do not depart from the spirit and scope of the present disclosure as defined by the appended utility model claims. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic diagram of a robotic arm according to an embodiment of the present disclosure. [Figure 2A] 1 is an exploded schematic diagram of a robotic arm according to an embodiment of the present disclosure (1). [Figure 2B] FIG. 1 is a side view of a robotic arm with a slide rail top cover in a neutral position according to an embodiment of the present disclosure. [Figure 2C]FIG. 10 is a side view of a robotic arm in accordance with an embodiment of the present disclosure, in which the slide rail top cover contacts the hand wheel assembly and is displaced downward. [Figure 2D] FIG. 10 is a side view of a robotic arm in accordance with an embodiment of the present disclosure, in which the slide rail top cover contacts the hand wheel assembly and is displaced upward. [Figure 3A] FIG. 2 is an exploded schematic view (2) of a robotic arm according to an embodiment of the present disclosure. [Figure 3B] FIG. 1 is a side view of a robotic arm with a slide rail top cover in a neutral position according to an embodiment of the present disclosure. [Figure 3C] FIG. 10 is a side view of a robotic arm in accordance with an embodiment of the present disclosure, in which the slide rail top cover contacts the hand wheel assembly and is displaced to the right. [Figure 3D] FIG. 10 is a side view of a robotic arm in accordance with an embodiment of the present disclosure, in which the slide rail top cover contacts the hand wheel assembly and is displaced to the left. [Figure 4A] FIG. 3 is an exploded schematic diagram of a robotic arm according to an embodiment of the present disclosure. [Figure 4B] FIG. 1 is a side view of a robotic arm with a slide rail top cover in a neutral position according to an embodiment of the present disclosure. [Figure 4C] FIG. 10 is a side view of a robotic arm in accordance with an embodiment of the present disclosure, in which the slide rail top cover contacts the hand wheel assembly and is displaced to the right. [Figure 4D] FIG. 10 is a side view of a robotic arm in accordance with an embodiment of the present disclosure, in which the slide rail top cover contacts the hand wheel assembly and is displaced to the left. [Figure 5A] FIG. 10 is a side view of a robotic arm in accordance with an embodiment of the present disclosure, where a connecting member is received in a groove in a cantilever. [Figure 5B] FIG. 1 illustrates a side view of a robotic arm in accordance with an embodiment of the present disclosure, where one end of a connecting member rotates counterclockwise. [Figure 6A] 1 is a partial enlarged view of a robotic arm with a clamping member in a neutral position according to an embodiment of the present disclosure. [Figure 6B] 1 illustrates a partial enlarged view of a robotic arm in accordance with an embodiment of the present disclosure, where the clamping members rotate clockwise. [Figure 6C] 1 is a partial enlarged view of a robot arm according to an embodiment of the present disclosure, in which a first positioning plate and a second positioning plate of a clamping member are separated. [Figure 7] 1A and 1B are schematic diagrams illustrating a detection device having a robotic arm according to the above-described embodiments of the present disclosure. [Figure 8] 1A and 1B are schematic diagrams illustrating the detection process of the detection device according to the above embodiments of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0010] For ease of explanation, this specification uses spatially relative terms (e.g., "underside," "lower," "below," "upper," "top," "top surface," and the like) to describe the relationship of one assembly or member to another(s) of assemblies or members, as shown in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation shown in the figures. Also, while this specification uses relative direction terms such as "X-axis," "Y-axis," and "Z-axis" to describe the relationship of one assembly or member to another(s) of assemblies or members, these terms are intended to be illustrative and not limiting, and assemblies or members may be oriented in other ways (e.g., rotated 90 degrees or at other orientations) and the spatially relative terms used herein may be interpreted accordingly.

[0011] Those skilled in the art will appreciate that, to simplify and clearly illustrate the assemblies in the drawings, the drawings of the present disclosure have not necessarily been drawn to scale. For example, the dimensions of some assemblies in the drawings may be exaggerated relative to other assemblies to aid in understanding various aspects of the present technology.

[0012] As used herein, terms such as "approximately," "substantially," "substantial," and "substantially" are used to describe and account for minor variations. When used in conjunction with an event or circumstance, these terms may refer not only to a situation in which the event or feature clearly occurs, but also to a situation that is very close to the situation in which the event or feature occurs.

[0013] 1 is a schematic diagram of a robotic arm according to an embodiment of the present disclosure. The robotic arm 1 includes a positioning adjustment assembly 10 including at least one slide rail assembly 11, which is connected to a positioning adjustment base 13. In some embodiments of the present disclosure, the slide rail assembly 11 may include a first slide rail assembly 11a, a second slide rail assembly 11b, and a third slide rail assembly 11c. In some embodiments of the present disclosure, the first handwheel assembly 12a cooperates with the first slide rail assembly 11a to move the cantilever 14 along the X-axis direction, the second handwheel assembly 12b cooperates with the second slide rail assembly 11b to move the cantilever 14 along the Y-axis direction, and the third handwheel assembly 12c cooperates with the third slide rail assembly 11c to move the cantilever 14 along the Z-axis direction.

[0014] In some embodiments, the position of the handwheel assembly 12 can be configured differently depending on user preference. For example, while the third handwheel assembly 12c shown in FIG. 1 is positioned on the left side of the positioning and adjustment assembly 10, the third handwheel assembly 12c can also be positioned on the right side of the positioning and adjustment assembly 10 depending on the user's needs (e.g., depending on the user's handedness). Additionally, the handwheel portion of the handwheel assembly 12 (e.g., the handwheel portion 121a of the first handwheel assembly 12a shown in FIG. 2A) may include indentations or scales (not shown) to facilitate user rotation.

[0015] One end of the cantilever 14 is connected to the positioning adjustment assembly 10 via a cantilever connecting plate 141. As shown in FIG. 1 , the cantilever connecting plate 141 has a number of holes, allowing the cantilever connecting plate 141 to be fixed to the positioning adjustment assembly 10 using screws or other fastening methods. In this way, the cantilever 14 is removably mounted on one side of the positioning adjustment assembly 10 by the cantilever connecting plate 141, allowing users to quickly replace the cantilever 14 of the robot arm 1 according to actual usage needs. In some embodiments, the cantilever 14 may be integrally formed with the cantilever connecting plate 141. In other embodiments, multiple cantilevers 14 may be mounted on the surface of the cantilever connecting plate 141, each at a different position and with the same or different lengths, so that one or more clamping members 16 may be disposed on each of the multiple cantilevers 14.

[0016] A groove 142 is provided within the cantilever 14, and a connecting member 15 can be accommodated within the groove 142. One end of the connecting member 15 is pivotally mounted within the groove 142, and the other end is connected to a clamping member 16. The clamping member 16 also has a hole H that can accommodate a probe holder 2 or other members. The probe holder 2 is used to hold various tools such as a probe 3 (see FIG. 7). In some embodiments, a magnetic material or a position-limiting material can be provided in a specific area on the inner diameter surface of the hole H to further stabilize the assembly accommodated in the hole H. This allows a user to operate the robot arm 1 to adjust the position of the probe 3, thereby detecting the physical properties of the measurement target (e.g., a micro-nano assembly). The projection surface of the holder 2 may be accommodated within the cantilever 14. In other embodiments, the number of clamping members 16 may be multiple and may be located outside the projection area of the cantilever 14. These clamping members 16 are used to fix at least one probe 3, a probe array, at least one probe card, or a combination thereof.

[0017] The following describes how the robot arm 1 of the present disclosure displaces the cantilever 14 along the X-axis, Y-axis, and Z-axis directions through mutual cooperation between each handwheel assembly 12 and the corresponding slide rail assembly 11.

[0018] Please refer to FIG. 2A. This figure is a schematic exploded view (1) of a robot arm according to an embodiment of the present disclosure. The first slide rail connection plate 111a of the first slide rail assembly 11a is connected to the second slide rail assembly 11b via the second slide rail connection plate 111b. The first slide rail base 112a is further locked to the first slide rail connection plate 111a. The first slide rail base 112a is integrally connected to the second slide rail assembly 11b, the third slide rail assembly 11c, and the positioning adjustment base 13. A first handwheel connection frame 1121a is provided on the first slide rail base 112a, and a first guide member 1122a is disposed on the first handwheel connection frame 1121a. The first handwheel connection frame 1121a may be fixed to the first slide rail base 112a by means of a lock or the like, or may be integrally molded with the first slide rail base 112a. In this way, the screw 122a of the first handwheel assembly 12a is connected to the first handwheel connection frame 1121a by passing through the through hole of the first guide member 1122a, and can move relative to the first handwheel connection frame 1121a by the rotation lock.

[0019] Specifically, the screw 122a of the first handwheel assembly 12a is threaded with a male screw (not shown), and the through-hole in the first guide member 1122a is threaded with a female screw (not shown) that corresponds to the male screw of the screw 122a. Therefore, when a user rotates the handwheel portion 121a of the first handwheel assembly 12a, the screw 122a rotates accordingly, and the male screw of the screw 122a and the female screw of the through-hole in the first guide member 1122a are locked together. This allows the first handwheel assembly 12a to be movably locked to the first handwheel connecting frame 1121a of the first slide rail assembly 11a by rotation.

[0020] In some embodiments, the first slide rail assembly 11a does not include the first handwheel connecting frame 1121a, and the first guide member 1122a can be directly installed on the surface of the first slide rail assembly 11a. In this way, the first handwheel assembly 12a can be directly rotated and locked into the through-hole of the first guide member 1122a installed on the surface of the first slide rail assembly 11a.

[0021] The first slide rail assembly 11a further includes at least one pair of displacement adjustment assemblies 113a (two pairs are shown in the figure) and a first slide rail top cover 114a. Each pair of displacement adjustment assemblies 113a includes a first locking member 1131a connected to the first slide rail base 112a, a second locking member 1132a connected to the first slide rail top cover 114a, and a first resilient assembly 1133a disposed between the first locking member 1131a and the second locking member 1132a. One end of the first resilient assembly 1133a is fitted into the first locking member 1131a and fixed to the first slide rail base 112a, and the other end of the first resilient assembly 1133a is fitted into the second locking member 1132a and fixed to the first slide rail top cover 114a. The slide rail 1123a on the first slide rail base 112a has an outer contour that corresponds to the slide groove 1141a in the first slide rail top cover 114a so that the slide rail 1123a slides within the slide groove 1141a, thereby allowing the first slide rail top cover 114a to move relative to the first slide rail base 112a.

[0022] 1 and 2A-2D, the operation of the first slide rail assembly 11a and the first hand wheel assembly 12a is illustrated, with the first slide rail top cover 114a shown in Fig. 2B in a neutral position. The first hand wheel assembly 12a is connected to the first slide rail assembly 11a through the through-holes of the first hand wheel connection frame 1121a and the first guide member 1122a. The screw 122a of the first hand wheel assembly 12a abuts against the surface of the first slide rail top cover 114a. In some embodiments of the present disclosure, the screw 122a abuts against the surface of the slide groove 1141a. When the user rotates the handwheel portion 121a of the first handwheel assembly 12a, the screw 122a rotates and moves downward accordingly. At this time, one end located on the first elastic assembly 1133a is fixed to the first slide rail base 112a and the first slide rail connecting plate 111a via the first locking member 1131a, and the entire assembly is connected to the second slide rail assembly 11b, and the other end is fixed to the first slide rail top cover 114a via the second locking member 1132a. Therefore, when the screw 122a rotates, the one end of the first elastic assembly 1133a fixed to the first slide rail base 112a is held immovable, and the other end fixed to the first slide rail top cover 114a moves in accordance with the compression and tension of the first elastic assembly 1133a, displacing the first slide rail top cover 114a relative to the first slide rail base 112a.

[0023] Specifically, as shown in FIG. 2C, when the user rotates the hand wheel unit 121a clockwise, the screw 122a rotates clockwise accordingly, pressing the first slide rail top cover 114a downward in the X-axis direction. This causes the first elastic assembly 1133a to compress and deform, moving the first slide rail top cover 114a downward relative to the first slide rail base 112a. Conversely, as shown in FIG. 2D, when the user rotates the hand wheel unit 121a counterclockwise, the screw 122a rotates counterclockwise accordingly, moving upward. At this time, the first elastic assembly 1133a presses the first slide rail top cover 114a by a restoring force (elastic force) due to distortion, keeping it in contact with the screw 122a, and moving the first slide rail top cover 114a upward relative to the first slide rail base 112a.

[0024] 2A to 2D, the cantilever 14 is fixed to the cantilever fixing plate 1142a via the cantilever connecting plate 141, thereby connecting the cantilever 14 to the first slide rail top cover 114a of the first slide rail assembly 11a. Therefore, when the first slide rail top cover 114a moves upward or downward together with the first handwheel assembly 12a, the cantilever 14 of the robot arm 1 is displaced accordingly, thereby achieving coordinate adjustment of the cantilever 14 along the X-axis direction.

[0025] As described above, the displacement of the first slide rail top cover 114a can be adjusted by rotating the first handwheel assembly 12a. The maximum amount of displacement that can be adjusted by the first handwheel assembly 12a depends on the length of the screw 122a. Specifically, if the end of the screw 122a moves upward until it is completely inserted into the through-hole of the first guide member 1122a, for example, if the end of the screw 122a becomes flush with the bottom surface of the guide member, the first handwheel assembly 12a cannot be rotated to continue to displace the first slide rail top cover 114a upward. Similarly, if the bottom surface of the handwheel unit 121a contacts the top surface of the first handwheel connection frame 1121a, the first handwheel assembly 12a cannot be rotated to continue to displace the first slide rail top cover 114a downward. However, applying an external force can still further compress the first elastic assembly 1133a, allowing the first slide rail top cover 114a and the cantilever 14 to continue to displace downward. In a preferred embodiment, by rotating the first handwheel assembly 12a, the first slide rail top cover 114a can be moved approximately ±10 mm along the X axis from the neutral position (as shown in FIG. 2B), in other words, the first slide rail top cover 114a can be displaced upward or downward by approximately 10 mm from the neutral position.

[0026] In some embodiments, the robot arm 1 may not include either the cantilever connecting plate 141 or the cantilever fixing plate 1142a. In other words, one end of the cantilever 14 may be directly connected to the first slide rail top cover 114a or may be integrally formed with the first slide rail top cover 114a, thereby realizing connection with the positioning adjustment assembly 10.

[0027] Please refer to FIG. 3A. This figure is a schematic exploded view (2) of a robot arm according to an embodiment of the present disclosure. The second slide rail connecting plate 111b of the second slide rail assembly 11b is connected to the first slide rail assembly 11a via the first slide rail connecting plate 111a. The second slide rail top cover of the second slide rail assembly 11b is locked to the bottom surface of the second slide rail connecting plate 111b, and the second slide rail base 112b is locked to the third slide rail top cover 114c of the third slide rail assembly 11c. As a result, the second slide rail assembly 11b is connected to the first slide rail assembly 11a, and its bottom surface is also integrally connected to the third slide rail assembly 11c and the positioning adjustment base 13.

[0028] Similar to the first slide rail base 112a, the second slide rail base 112b is provided with a second handwheel connection frame 1121b, which may be provided with a second guide member 1122b. The second handwheel connection frame 1121b may be fixed to the second slide rail base 112b by a lock or other means, or may be integrally formed with the second slide rail base 112b. Thus, the second handwheel assembly 12b is connected to the second handwheel connection frame 1121b through the through-hole of the second guide member 1122b and can move relative to the second handwheel connection frame 1121b through the rotation lock. Similarly, the second slide rail assembly 112b also includes at least one displacement adjustment assembly 113b. Each set of displacement adjustment assemblies 113b includes a third locking member 1131b connected to the second slide rail base 112b, a fourth locking member 1132b connected to the second slide rail top cover 114b, and a second resilient assembly 1133b. One end of the second resilient assembly 1133b is fitted into the third locking member 1131b and fixed to the second slide rail base 112b, and the other end of the second resilient assembly 1133b is fitted into the fourth locking member 1132b and fixed to the second slide rail top cover 114b. Similarly, the slide rail 1123b on the second slide rail base 112b has an outer contour corresponding to the slide groove 1141b in the second slide rail top cover 114b, so that the slide rail 1123b slides within the slide groove 1141b. This allows the second slide rail top cover 114b to move relative to the second slide rail base 112b.

[0029] In some embodiments, the second slide rail assembly 11b does not include the second hand wheel connection frame 1121b, and the second guide member 1122b may be directly provided on the surface of the second slide rail assembly 11b. In this way, the second hand wheel assembly 12b can be directly rotated and locked into the through-hole of the second guide member 1122b provided on the surface of the second slide rail assembly 11b.

[0030] 3B-3D show the cooperation between the second slide rail assembly 11b and the second hand wheel assembly 12b, with the second slide rail top cover 114b shown in Fig. 3B in a neutral position. The second hand wheel assembly 12b is connected to the second slide rail assembly 11b through the through-holes of the second hand wheel connecting frame 1121b and the second guide member 1122b. The screw 122b of the second hand wheel assembly 12b abuts against the surface of the second slide rail top cover 114b. In some embodiments of the present disclosure, the screw 122b abuts against the surface of the slide groove 1141b. When the user rotates the handwheel portion 121b of the second handwheel assembly 12b, the screw 122b rotates accordingly and moves to the right. At this time, one end located at the second elastic assembly 1133b is fixed to the second slide rail base 112b and the third slide rail top cover 114c by the third locking member 1131b and is integrally connected to the third slide rail assembly 11c and the positioning adjustment base 13, and the other end is fixed to the second slide rail base 112b and the third slide rail top cover 114c by the fourth locking member 1132b. Because the screw 122b is fixed to the second slide rail top cover 114b and the second slide rail connecting plate 111b, when the screw 122b rotates, one end of the second elastic assembly 1133b fixed to the second slide rail base 112b is held immovable, and the other end fixed to the second slide rail top cover 114b moves in accordance with the compression and tension of the second elastic assembly 1133b, thereby displacing the second slide rail top cover 114b relative to the second slide rail base 112b.

[0031] Specifically, as shown in FIG. 3C, when the user rotates the hand wheel unit 121b clockwise, the screw 122b rotates clockwise accordingly, pushing the second slide rail top cover 114b to the right in the Y-axis direction. This causes the second elastic assembly 1133b to compress and deform, moving the second slide rail top cover 114b to the right relative to the second slide rail base 112b. Conversely, as shown in FIG. 3D, when the user rotates the hand wheel unit 121b counterclockwise, the screw 122b rotates counterclockwise accordingly, moving the second slide rail top cover 114b to the left. At this time, the second elastic assembly 1133b pushes the second slide rail top cover 114b due to a restoring force (elastic force) caused by distortion, and continues to abut against the screw 122b, moving the second slide rail top cover 114b to the left relative to the second slide rail base 112b.

[0032] 3A-3D, the second slide rail assembly 11b is connected to the first slide rail connecting plate 111a of the first slide rail assembly 11a via the second slide rail connecting plate 111b, thereby connecting the first slide rail assembly 11a and the entire cantilever 14 to each other. Therefore, when the second slide rail top cover 114b moves rightward or leftward along with the second hand wheel assembly 12b, the first slide rail assembly 11a and the cantilever 14 of the robot arm 1 are displaced accordingly, thereby achieving coordinate adjustment of the cantilever 14 along the Y-axis direction. Also, similar to the first hand wheel assembly 12a, the maximum amount of displacement that can be adjusted by the second hand wheel assembly 12b depends on the length of the screw 122b. In a preferred embodiment, by rotating the second hand wheel assembly 12b, the second slide rail top cover 114b can be moved approximately ±10 mm along the Y axis from the neutral position (as shown in FIG. 3B), in other words, the second slide rail top cover 114b can be displaced to the right or left by approximately 10 mm from the neutral position.

[0033] 4A is an exploded schematic diagram (3) of a robot arm according to an embodiment of the present disclosure. The third slide rail top cover 114c of the third slide rail assembly 11c is connected to the second slide rail assembly 11b via the second slide rail base 112b. The third slide rail base 112c of the third slide rail assembly 11c is locked to the upper surface of the third slide rail connecting plate 111c, which is locked to the positioning adjustment base 13. This connects the third slide rail assembly 11c to the second slide rail assembly 11b and to the positioning adjustment base 13 via the third slide rail connecting plate 111c. In some embodiments, the third slide rail assembly 11c may not include the third slide rail connecting plate 111c and may be directly connected to the positioning adjustment base 13 via the third slide rail base 112c.

[0034] Similar to the first and second slide rail assemblies 11a and 11b, the third slide rail assembly 11c may include a third handwheel connection frame 1121c on the third slide rail base 112c, and a third guide member 1122c on the third handwheel connection frame 1121c. The third handwheel connection frame 1121c may be fixed to the third slide rail base 112c by a lock or other means, or may be integrally molded with the third slide rail base 112c. Thus, the third handwheel assembly 12c is connected to the third handwheel connection frame 1121c through the through-hole of the third guide member 1122c and can move relative to the third handwheel connection frame 1121c through the rotation lock. The third slide rail assembly 11c also includes at least one displacement adjustment assembly 113c. Each set of displacement adjustment assemblies 113c includes a fifth locking member 1131c connected to the third slide rail base 112c, a sixth locking member 1132c connected to the third slide rail top cover 114c, and a third resilient assembly 1133c. One end of the third resilient assembly 1133c is fitted into the fifth locking member 1131c, thereby securing it to the third slide rail base 112c, and the other end of the third resilient assembly 1133c is fitted into the sixth locking member 1132c, thereby securing it to the third slide rail top cover 114c. Similarly, the slide rail 1123c on the slide rail base 112c has an outer contour that corresponds to the slide groove 1141c in the slide rail top cover 114c, so that the slide rail 1123c slides within the slide groove 1141c. This allows the slide rail top cover 114c to move relative to the slide rail base 112c.

[0035] In some embodiments, the third slide rail assembly 11c does not include the third handwheel connection frame 1121c, and the third guide member 1122c can be directly disposed on the surface of the third slide rail assembly 11c. In this way, the third handwheel assembly 12c can be directly rotated and locked into the through-hole of the third guide member 1122c disposed on the surface of the third slide rail assembly 11c.

[0036] 4B-4D show the operation modes of the third slide rail assembly 11c and the third handwheel assembly 12c cooperating with each other, with the third slide rail top cover 114c shown in Fig. 4B in a neutral position. The third handwheel assembly 12c is connected to the third slide rail assembly 11c through the through-holes of the third handwheel connecting frame 1121c and the third guide member 1122c, and the screw 122c of the third handwheel assembly 12c abuts against the surface of the slide rail top cover 114c. In some embodiments of the present disclosure, the screw 122c abuts against the surface of the slide groove 1141c. When the user rotates the handwheel portion 121c of the third handwheel assembly 12c, the screw 122c rotates accordingly and moves to the right. At this time, one end located on the third elastic assembly 1133c is fixed to the third slide rail base 112c and the third slide rail connecting plate 111c via the fifth locking member 1131c, and the entire assembly is connected to the positioning adjustment base 13, and the other end is fixed to the third slide rail top cover 114c and the second slide rail base 112b via the sixth locking member 1132c. Therefore, when the screw 122c rotates, the one end of the third elastic assembly 1133c fixed to the third slide rail base 112c is held immovable, and the other end fixed to the third slide rail top cover 114c moves in accordance with the compression and tension of the third elastic assembly 1133c, displacing the third slide rail top cover 114c relative to the third slide rail base 112c.

[0037] Specifically, as shown in FIG. 4C, when the user rotates the hand wheel unit 121c clockwise, the screw 122c rotates clockwise accordingly, pushing the third slide rail top cover 114c to the right in the Z-axis direction. This causes the third elastic assembly 1133c to compress and deform, moving the third slide rail top cover 114c to the right relative to the third slide rail base 112c. Conversely, as shown in FIG. 3D, when the user rotates the hand wheel unit 121c counterclockwise, the screw 122c rotates counterclockwise accordingly, moving the third slide rail top cover 114c to the left. At this time, the third elastic assembly 1133c pushes the third slide rail top cover 114c due to a restoring force (elastic force) caused by distortion, keeping it in contact with the screw 122c and moving the third slide rail top cover 114c to the left relative to the third slide rail base 112c.

[0038] 4A-4D, the third slide rail assembly 11c is connected to the second slide rail base 112b of the second slide rail assembly 11b via the third slide rail top cover 114c, thereby connecting the second slide rail assembly 11b, the first slide rail assembly 11a, and the cantilever 14 (not shown) together. Therefore, when the third slide rail top cover 114c moves rightward or leftward together with the third hand wheel assembly 12c, the cantilever 14 of the robot arm 1 is displaced accordingly, thereby achieving coordinate adjustment of the cantilever 14 along the Z-axis. As with the first hand wheel assembly 12a and the second hand wheel assembly 12b, the maximum amount of displacement adjustable by the third hand wheel assembly 12c depends on the length of the screw 122c. In a preferred embodiment, by rotating the third handwheel assembly 12c, the third slide rail top cover 114c can be moved approximately ±10 mm along the Z axis from the neutral position (as shown in FIG. 4B), in other words, the third slide rail top cover 114c can be displaced to the right or left by approximately 10 mm from the neutral position.

[0039] Below, we will explain how the robot arm 1 of the present disclosure adjusts the height adjustment knob 143 to rotate the connecting member 15 in the XZ plane and adjust the coordinate of the tip of the probe 3 (see Figure 7) in the X-axis direction.

[0040] 1 and 5A-5B, Fig. 5A shows connecting member 15 housed in groove 142 of cantilever 14, and Fig. 5B shows connecting member 15 rotating counterclockwise around its first end 151. As can be seen best in Fig. 5A, groove 142 is provided in cantilever 14, and connecting member 15 can be housed inside groove 142, with first end 151 of connecting member 15 positioned inside groove 142 and pivotally attached to cantilever 14 by a bolt and nut working together.

[0041] The robot arm 1 further includes a clamping member 16, a first end 161 of which has an external contour characteristic complementary to that of the second end 152 of the connecting member 15 and is connected to the second end 152 of the connecting member 15 by a lock or other means. As shown in FIG. 1 , the clamping member 16 has a hole H capable of accommodating a probe holder 2 of a detection device D, and the probe holder 2 is further used to hold various detection tools (see FIG. 7 ), such as a probe 3. Therefore, a user can detect physical properties of a measurement object (e.g., a micro-nano assembly) by adjusting the position of the probe 3 by manipulating the clamping member 16 of the robot arm 1.

[0042] 5A and 5B, the cantilever 14 further includes a height adjustment knob 143 provided adjacent to the second end 152 of the connecting member 15. The structure of the height adjustment knob 143 may be similar to that of the handwheel assembly 12 and may include a knob portion 1431 and a screw 1432 having a male thread (not shown). The outer surface of the knob portion 1431 may also be provided with knurling (not shown) to facilitate rotation by the user. A through-hole (not shown) is provided in the cantilever 14 at a position corresponding to the screw 1432, and the through-hole has a female thread that corresponds to the male thread shape of the screw 1432. As a result, the height adjustment knob 143 is connected to the cantilever 14 via the screw 1432 and can be rotated to lock to the cantilever 14.

[0043] The robot arm 1 further includes an elastic assembly 17, the ends of which are fixed to the cantilever 14 and the clamping member 16, respectively. Specifically, the cantilever 14 may have a first anchor 144 on an upper surface of the clamping member 16 near one end thereof, and the clamping member 16 may have a second anchor 162 on an upper surface thereof farther from the cantilever 14. The ends of the elastic assembly 17 may be fixed to the first anchor 144 of the cantilever 14 and the second anchor 162 of the clamping member 16, respectively. The distance between the first anchor 144 and the second anchor 162 may also be adjusted according to design needs. For example, to match the elastic modulus of the elastic assembly 17, a protrusion 163 may be designed on the clamping member 16 and the second anchor 162 may be installed on the upper surface of the protrusion 163, thereby adjusting the distance between the first anchor 144 and the second anchor 162.

[0044] In the arrangement of the above embodiment, the height adjustment knob 143 is provided adjacent to the second end 152 of the connecting member 15, and the opposing first end 151 is pivotally attached to the cantilever 14. Therefore, when a user rotates the knob portion 1431 of the height adjustment knob 143 clockwise, the screw 1432 rotates clockwise and moves downward, pressing and pushing the end of the screw 1432 into the connecting member 15. At this time, because the first end 151 of the connecting member is pivotally attached to the cantilever 14 and cannot move in the X-axis and Y-axis directions, when the screw 1432 presses the connecting member 15 downward, the connecting member 15 rotates in the XY plane around its first end 151 as an axis (more precisely, around the position where the connecting member 15 is pivotally attached to the cantilever 14 as an axis).

[0045] When the user rotates the knob portion 1431 clockwise, the screw 1432 continues to press the connecting member 15 downward, causing the second end 152 of the connecting member 15 to rotate downward. At this time, the elastic assembly 17 is pulled and distorted, and a restoring force (elastic force) is applied between the cantilever 14 and the clamping member 16. When the user rotates the knob portion 1431 of the height adjustment knob 143 counterclockwise, the screw 1432 moves upward, and at this time, the elastic assembly 17 returns the clamping member 16 to its initial position due to the restoring force (elastic force) caused by the distortion (shown in FIG. 5A ).

[0046] 5B, by rotating the height adjustment knob 143, the connecting member 15 can be rotated on the XY plane around its first end 151 as an axis, thereby adjusting the included angle φ between the connecting member 15 and the Y axis. The range over which the included angle φ can be adjusted by turning the height adjustment knob 143 depends on the length of the screw 1432. In a preferred embodiment, the included angle φ is between approximately 0 degrees and 10 degrees.

[0047] The second end 152 of the connecting member 15 rotates substantially in the XY plane. Because the first end 161 of the clamping member 16 is connected to the second end 152 of the connecting member 15, when the second end 152 of the connecting member 15 rotates downward, the clamping member 16 rotates therewith. However, when the clamping member 16 clamps the probe holder 2 and further fixes the probe 3 (see FIG. 7 ), the slight displacement of the tip of the probe 3 in the Y-axis direction due to the rotation of the clamping member 16 is negligible. Therefore, when the probe 3 is attached to the probe holder 2 and the probe holder 2 is clamped by the clamping member 16, the rotation of the height adjustment knob 143 can be regarded as an operation for accurately fine-tuning the coordinate position of the tip of the probe 3 on the X-axis by adjusting the included angle φ between the connecting member 15 and the Y-axis.

[0048] With the arrangement of the above embodiment, by operating the height adjustment knob 143, the connecting member 15 can be rotated at its first end 151 in the XY plane, thereby adjusting the displacement of the clamping member 16 in the X-axis direction. In this way, fine adjustment of the tip coordinate of the probe 3 can be achieved, improving the operational flexibility and measurement accuracy of the detection device D. In addition, the elastic assembly 17 provides a buffering and damping effect when the probe 3 comes into contact with the object to be detected, improving the stability of the probe 3 and further improving the detection accuracy of the detection device D.

[0049] Hereinafter, it will be described how the robot arm of the present disclosure adjusts the position of the probe 3 in the YZ plane by adjusting the included angle between the clamping member 16 and the connecting member 15.

[0050] 5A-6B, FIG. 6A shows the clamping member 16 in a neutral position, and FIG. 6B shows the clamping member 16 rotated clockwise on the YZ plane. A first end 161 of the clamping member 16 is pivotally connected to the second end 152 of the connecting member 15 by a bolt member in cooperation with a nut, so that the clamping member 16 is rotatable relative to the second end 152 of the connecting member 15. When a user rotates the clamping member 16 (as shown in FIG. 6B), the included angle θ between the central axis CA of the hole H of the clamping member 16 and the connecting member 15 can be adjusted. The included angle θ between the central axis CA and the connecting member 15 may be between approximately 0 degrees and ±30 degrees, and in a preferred embodiment, the included angle θ may be between approximately 0 degrees and ±70 degrees. In other words, the clamping member 16 can rotate to the left and right sides relative to the second end 152 of the connecting member 15, so that the included angle θ between the central axis CA and the connecting member 15 can be approximately 0 degrees-70 degrees.

[0051] Since the probe 3 can be attached to the robot arm 1 via the probe holder 2 and the clamping member 16, the arrangement of the above embodiment allows the coordinates of the probe 3 in the YZ plane to be adjusted by rotating the clamping member 16, thereby improving the flexibility of the detection process of the detection device D.

[0052] Please refer to Figures 6A and 6C. Figure 6C shows the first positioning plate 164 and the second positioning plate 165 in a separated state. The clamping member 16 may include the first positioning plate 164 and the second positioning plate 165, and in the embodiment shown in the drawings, the first positioning plate 164 and the second positioning plate 165 are located on both the upper and lower sides, respectively.

[0053] The hole H of the clamping member 16 may be formed between the first positioning plate 164 and the second positioning plate 165. Specifically, the first positioning plate 164 and the second positioning plate 165 may have corresponding substantially arch-shaped half holes whose shapes respectively correspond to the outlines of the upper and lower halves of the probe holder 2. When the first positioning plate 164 and the second positioning plate 165 approach each other, the two arch-shaped half holes form a complete hole H capable of accommodating the probe holder 2.

[0054] One or more distance adjustment members 166 may be further provided between the first positioning plate 164 and the second positioning plate 165. These distance adjustment members 166 adjust the distance between the first positioning plate 164 and the second positioning plate 165, thereby further adjusting the size of the hole H. As shown in FIGS. 6A to 6C , in some embodiments, the distance adjustment member 166 may be configured by cooperation of a bolt and a nut. Once the probe holder 2 is attached to the hole H, a user can rotate the distance adjustment member 166 to adjust the distance between the first positioning plate 164 and the second positioning plate 165 and lock or release the clamping of the probe holder 2.

[0055] In other embodiments, the distance adjustment member 166 may be configured with other assemblies, such as an elastic assembly. In this case, when a user pulls the second positioning plate 165 to separate it from the first positioning plate 164, a strain is generated in the distance adjustment member 166, which provides a restoring force (elastic force) between the first positioning plate 164 and the second positioning plate 165, thereby pulling the second positioning plate 165 back to its initial position (as shown in FIG. 6A ). In this way, the probe holder 2 can be firmly clamped in the hole H.

[0056] It should be understood that when the dimensions of the external contour of the probe holder 2 are equal to or smaller than the size of the hole H, the clamping member 16 can clamp the probe holder 2 with the first positioning plate 164 and the second positioning plate 165 in contact with each other, and when the dimensions of the external contour of the probe holder 2 are larger than the size of the hole H, the clamping member 16 can clamp the probe holder 2 with the first positioning plate 164 and the second positioning plate 165 not in contact with each other, and at this time, at least a portion of the external contour of the probe holder 2 is in close contact with the peripheral wall of the hole H.

[0057] The configuration of the above embodiment allows probe holders 2 of different sizes to be replaced according to the user's operating needs, and the probe holders 2 can be firmly clamped by the clamping member 16, improving the stability of the detection process of the detection device D.

[0058] The above describes the operation of the robot arm 1 in the XY plane (shown in FIGS. 5A-5B) and the YZ plane (shown in FIGS. 6A-6C). However, it should be understood that adjustments in these different coordinate planes can be performed simultaneously. For example, the clamping member 16 can be rotated clockwise relative to the connecting member 15 (shown in FIG. 6B) while the first end 151 of the connecting member 15 is rotated downward (shown in FIG. 5B).

[0059] Please refer to Figure 7. This figure shows a detection device D equipped with a robot arm 1 of the present disclosure. The detection device D is used to detect physical properties of a micro-nano assembly, and includes a robot arm 1, a probe holder 2, and a probe 3. The structure of the robot arm 1 and the connection relationships between its assemblies have already been described in detail, so the description will not be repeated here.

[0060] The probe holder 2 of the detection device D may be accommodated in the hole H of the clamping member 16 of the robot arm 1, and one end of the probe holder 2 may be used to bond at least one probe 3 to hold the probe 3. In other embodiments, the probe holder 2 may be used to clamp other assemblies such as optical path correction components, semiconductor detection consumables, integrated circuit detection consumables, rigid wires, cables, or electrodes. In practical applications, the probe 3 may be a microprobe, a nanoprobe, an angstrom probe, or other probes for detecting micro- to nano-order assemblies. The probe 3 may also be a straight needle-like object or may have a bent section (as shown in FIG. 7) formed by a bending process. In some embodiments, at least one probe holder 2 may be accommodated in the hole H of the clamping member 16 of the robot arm 1, and one end of the probe holder 2 may be used to bond to a probe card in which a plurality of probes arranged at intervals are arranged in an array on a carrier. In other embodiments, at least one probe 3 or probe card may be provided in the clamping area of the hole H of the clamping member.

[0061] One end of the probe holder 2 is joined to the probe 3, and the other opposite end thereof may be electrically connected to a cable (not shown), which may be a conductive wire, a communication wire, a data transmission wire, or a wire having other similar functions, so that electrical signals can be transmitted and received through the cable during the detection process.

[0062] As shown in FIG. 7 , the robot arm 1 of the detection device D may further include a wire collection clamp 18 provided on the positioning adjustment assembly 10. In some embodiments, the wire collection clamp 18 may be provided on the upper part of the positioning adjustment assembly 10, i.e., on the second slide rail connection plate 111b, and may be fixed by a lock or other method. This wire collection clamp 18 is configured to allow a cable to be inserted therethrough. In other embodiments, the wire collection clamp 18 may be provided at any position on the robot arm 1, for example, on the middle section of the positioning adjustment assembly 10 or the positioning adjustment base 13, or may be integrally formed with the robot arm 1. The arrangement of the above embodiments allows the cables (not shown) to be neatly stored in the wire collection clamp 18, thereby avoiding interference with the normal operation of the detection device D during the detection process.

[0063] Please refer to FIG. 8. FIG. 8 shows the state of the detection device D during the detection process. In practical application, the detection device D can also be placed on a substrate surface BS (see FIG. 8). The base surface BS can be a flat surface, a curved surface, an irregular non-flat surface, or a groove or protrusion structure relative to the surrounding environment. The base surface BS can be made of a flexible material, a non-flexible material, or a combination thereof. Meanwhile, the robot arm 1 can be placed on the base surface BS by adjusting the positioning adjustment base 13. The bottom surface of the positioning adjustment base 13 can be a flat surface, a curved surface, an irregular non-flat bottom surface, or a surface complementary to the shape characteristics of the base surface BS. In some embodiments, the positioning adjustment base 13 is magnetic and can be attracted to the base surface BS, improving the stability of the detection device D during the detection process.

[0064] The present disclosure further provides a method for detecting physical properties of a micro-nano assembly, which includes providing a detection device D having a robot arm 1 disposed on a base surface BS. The connection relationship between the robot arm 1 and the structure of the detection device D and the assembly thereof has already been described in detail, and therefore will not be repeated here.

[0065] In the detection process, a detection device D is installed on a base surface BS to detect the physical properties of a measurement object 4. The measurement object 4 may be a chip, a wafer, a transistor, an integrated circuit, or other micro- or nano-order electronic assemblies. In the detection process, one or more visible and / or invisible light sources S and one or more signal transceivers can be provided to collect the physical properties of the measurement object 4.

[0066] Specifically, after the probe 3 is brought into proximity with or in contact with the surface of the measurement object 4, the light source S can be operated to emit a light beam L, which is irradiated onto the surface of the measurement object 4 to generate a reflected light beam L'. At this time, the receiver R in the signal transceiver can be configured to receive the reflected beam L', thereby acquiring an optical signal related to the measurement object 4. Next, the receiver R transmits the received optical signal via the transmitter of the signal transceiver to an electronic device (e.g., a mobile terminal, a tablet computer, a desktop computer, or any other electronic device capable of performing data processing) for calculation processing, thereby acquiring information about the physical properties of the measurement object 4.

[0067] Furthermore, in the embodiment shown in FIG. 8, the object to be measured 4 and the detection device D are arranged on the same plane, but the object to be measured 4 and the detection device D may be arranged on two surfaces that are separate from each other, and these different surfaces may be at different heights or positions.

[0068] In some embodiments, the detection device D may be a non-destructive detection tool, including, but not limited to, an atomic force microscope (AFM), a transmission electron microscope (TEM), a focused ion beam microscope (FIB), a scanning probe microscope (SPM), an electrostatic force microscope (EFM), a scanning capacitance microscope (SCM), or a scanning ion conductance microscope (SICM).

[0069] Having outlined the features of several embodiments above, those skilled in the art can better understand the aspects of the present disclosure. Those skilled in the art should understand that this disclosure may be used as a basis for designing or modifying other programs and structures to carry out the same purposes and / or achieve the same advantages of the embodiments introduced herein. Those skilled in the art should also understand that various changes, substitutions, and alterations can be made to the present disclosure, and that equivalent structures may be used without departing from the spirit and scope of the present disclosure. [Explanation of symbols]

[0070] 1: Robot arm 10: Positioning adjustment assembly 11: Slide rail assembly 11a: First slide rail assembly 111a: First slide rail connecting plate 111b: Second slide rail connecting plate 112a: First slide rail base 1121a: First handwheel connection frame 1122a: First guide member 113a: Displacement adjustment assembly 114a: First slide rail top cover 1131a: First locking member 1132a: second locking member 1133a: First elastic assembly 1123a:Slide rail 1141a: Slide groove 1142a: Cantilever fixing plate 11b: Second slide rail assembly 114b: Second slide rail top cover 112b: Second slide rail base 1121b: Second handwheel connection frame 1122b: second guide member 113b: Displacement adjustment assembly 1131b: third locking member 1132b: Fourth locking member 1133b: Second elastic assembly 1123b:Slide rail 1141b: Slide groove 11c: Third slide rail assembly 114c: Third slide rail top cover 112c: 3rd slide rail base 1121c: Third handwheel connection frame 1122c: Third guide member 113c: Displacement adjustment assembly 1131c: Fifth locking member 1132c: Sixth locking member 1133c: Third elastic assembly 1123c:Slide rail 1141c: Slide groove 12: Handwheel assembly 12a: First handwheel assembly 121a: Handwheel section 122a: Screw 12b: Second handwheel assembly 121b: Handwheel section 122b: Screw 12c: Third handwheel assembly 121c: Handwheel section 122c: Screw 13: Positioning adjustment base 14: Cantilever 141: Cantilever connection plate 142: Groove 143: Height adjustment knob 1431: Knob 1432: Screw 144: First Anchor 15: Connecting member 151: 1st end 152: 2nd end 16: Holding member 161: 1st end 162: Second Anchor 163: Protrusion 164: First positioning plate 165: Second positioning plate 166: Distance adjustment member 17: Elastic Assembly R: Receiver CA: Central axis 18: Wire collection clamp 2: Probe holder 3: Probe 4: Measurement object BS: Base surface H: Hole S: Light source L: Light beam L': Reflected light beam D: Detection device

Claims

1. A robot arm for clamping a probe, a positioning and adjusting assembly mounted on the positioning and adjusting base, the positioning and adjusting assembly including a first slide rail assembly mounted on the positioning and adjusting assembly, the first slide rail assembly including: a first slide rail top cover, the slide groove of which slidably accommodates the slide rail of the first slide rail base substantially along a first direction; a positioning and adjusting assembly including a first resilient assembly, the ends of which are fixed to the first slide rail base and the first slide rail top cover, respectively; a first handwheel assembly having a screw contactable with the first slide rail top cover; a cantilever, one end of which is connected to the positioning adjustment assembly, the cantilever having a groove therein capable of receiving a connecting member; a clamping member having a hole, a first end of the clamping member configured to be connected to the connecting member; The first handwheel assembly and the first slide rail assembly cooperate with each other to allow the cantilever to move along the first direction. A robotic arm characterized by:

2. 2. The robot arm according to claim 1, wherein a first handwheel connection frame is installed on the first slide rail base, a first guide member is installed on the first handwheel connection frame, and the screw of the first handwheel assembly can be locked into a through-hole of the first guide member.

3. The positioning and adjustment assembly includes: a second slide rail assembly including a second slide rail connecting plate connected to the first slide rail assembly; a second slide rail top cover, the slide groove of which slidably accommodates the slide rail of the second slide rail base substantially along the second direction; a second elastic assembly, the ends of which are fixed to the second slide rail base and the second slide rail top cover, respectively; the robot arm further includes a second handwheel assembly having a screw contactable with the second slide rail top cover; 2. The robot arm of claim 1, wherein the second direction is substantially perpendicular to the first direction.

4. 4. The robot arm according to claim 3, wherein a second hand wheel connection frame is provided on the second slide rail base, a second guide member is installed on the second hand wheel connection frame, and the screw of the second hand wheel assembly can be locked into a through-hole of the second guide member.

5. The positioning and adjustment assembly includes: a third slide rail assembly including a third slide rail top cover connected to the second slide rail assembly, the slide groove of the third slide rail top cover being slidably received in the slide rail of a third slide rail base along a third direction, and the third slide rail base being installed on one side of the positioning adjustment base; a third elastic assembly, both ends of which are fixed between the third slide rail base and the third slide rail top cover, the robot arm further includes a third handwheel assembly having a screw contactable with the third slide rail top cover; 4. The robot arm of claim 3, wherein the third direction is substantially perpendicular to the first direction and the second direction.

6. 6. The robot arm of claim 5, wherein a third hand wheel connection frame is installed on the third slide rail base, a third guide member is installed on the third hand wheel connection frame, and the screw of the third hand wheel assembly can be locked into the through-hole of the third guide member.

7. 2. The robot arm according to claim 1, wherein the first slide rail top cover is movable within ±10 mm relative to the first slide rail base along the first direction.

8. 2. The robot arm of claim 1, wherein the cantilever further includes a cantilever connection plate, and an end of the cantilever is fixed to the positioning adjustment assembly via the cantilever connection plate.

9. 4. The robot arm of claim 3, wherein a first end of the connecting member is positioned within the groove of the cantilever and pivotally attached to the cantilever, such that the connecting member can rotate relative to the cantilever in a first plane consisting of the first direction and the second direction with the first end as an axis, and the connecting member can rotate 10 degrees in the first plane.

10. 10. The robot arm of claim 9, wherein the cantilever further includes a height adjustment knob disposed adjacent a second end of the connecting member opposite the first end.

11. 11. The robot arm of claim 10, further comprising an elastic assembly positioned between the cantilever and the clamping member, wherein both ends of the elastic assembly positioned between the cantilever and the clamping member are fixed to a first anchor positioned on the cantilever and a second anchor positioned on the clamping member, respectively.

12. 12. The robot arm according to claim 11, wherein the second anchor is provided on a protruding portion of the clamping member.

13. 6. The robot arm of claim 5, wherein the first end of the clamping member is movably pivotally connected to a second end of the connecting member opposite the first end, such that the clamping member is movable in a second plane consisting of the second direction and the third direction relative to the second end of the connecting member, and the clamping member is rotatable within ±70 degrees in the second plane.

14. The robot arm of claim 5, wherein the hole of the clamping member is formed between a first positioning plate and a second positioning plate, and one or more distance adjustment members are provided between the first positioning plate and the second positioning plate, and the robot arm further includes a wire concentrating clamp provided on the positioning adjustment assembly.

15. 2. The robot arm according to claim 1, wherein the positioning adjustment base is magnetic.

16. A detection device for detecting a physical property of a micro-nano assembly, comprising: A robot arm according to any one of claims 1 to 15; a probe holder accommodated between the holes of the clamping member; and at least one probe attached to one end of the probe holder. A detection device characterized by:

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