EDM equipment

Abstract

To provide an electric discharge machining device that improves processing stability and slag removal efficiency, and has high flexibility, efficiency, and quality. [Solution] The electric discharge machining apparatus includes at least one platform and an integrated type electric discharge machining unit. The integrated type electric discharge machining unit is configured by integrating multiple modular electric discharge machining units with a modular design, and the number of units can be flexibly adjusted depending on the area to be machined or the number of electrodes required. At least one electric discharge electrode is disposed in each modular electric discharge machining unit, and the multiple electric discharge electrodes can perform electric discharge machining processes on single or multiple workpieces simultaneously or sequentially. The multiple modular electric discharge machining units share or each have their own components such as a power supply unit, upper machine head, lower machine head, conductive plate, wire feed wheel / wire recovery wheel, and are equipped with insulating components and a slag removal unit.

Description

[Technical Field]

[0001] The present invention relates to a machining apparatus, and more particularly to an electric discharge machining apparatus. [Background technology]

[0002] Electrical Discharge Machining (EDM) is a non-traditional machining technique that uses high temperatures generated by periodic pulse discharges between a tool electrode and a workpiece to etch conductive materials. Wire EDM uses a continuously moving metal wire (wire electrode) as the tool electrode to cut the workpiece along a predetermined path. This technique is widely used in mold manufacturing, precision parts processing, aerospace, and semiconductor wafer cutting, and has significant advantages, especially when machining high-hardness materials and complex contours.

[0003] However, conventional wire-cut EDM machines typically perform machining processes using only a single wire electrode. When multiple cuts need to be made on a single workpiece or when multiple workpieces need to be machined simultaneously, machining with a single wire electrode requires sequential execution or the use of multiple devices, lengthening machining time and reducing overall production efficiency. While there have been technological attempts to develop multi-wire cutting, existing multi-wire machines have a fixed structure and lack flexibility, making it difficult to quickly adjust to various machining requirements (e.g., cutting amount, distance, workpiece size, etc.). Furthermore, the efficiency of slag removal during EDM directly affects the stability and surface quality of the machining. The problem of slag removal is particularly severe in multi-line or high-speed cutting. Existing technologies often struggle to provide solutions that can adapt to variable machining configurations while simultaneously ensuring efficient slag removal. Therefore, how to develop an EDM device that has the ability to be flexibly configured and at the same time balances machining efficiency and slag removal performance has become an important issue to be solved in this field. Summary of the Invention [Problem to be solved by the invention]

[0004] The main objective of the present invention is to provide an electric discharge machining apparatus with a modular design and high integration, which is highly customizable and adaptable, and which can improve machining efficiency and flexibility, ensure machining accuracy and stability, and improve slag removal effect and machining quality. [Means for solving the problem]

[0005] The electrical discharge machining apparatus according to the present invention mainly comprises at least one stage for carrying at least one workpiece, the workpiece defining at least one area to be machined; and an integrated type electrical discharge machining unit mainly comprising a predetermined number of at least one modularized electrical discharge machining units, with at least one discharge electrode disposed in the modularized electrical discharge machining unit, the discharge electrode for performing at least one electrical discharge machining process on the area to be machined on the workpiece placed on the stage, thereby forming at least one machining groove in the area to be machined. The predetermined number of modularized electrical discharge machining units is adjusted according to the number of areas to be machined for the electrical discharge machining process, the number of machining grooves to be formed by the electrical discharge machining process, and / or the number of discharge electrodes used in the electrical discharge machining process.

[0006] In the electric discharge machining apparatus of the present invention, the predetermined number of modularized electric discharge machining units is a plurality of units, and the plurality of modularized electric discharge machining units provide a corresponding number of discharge electrodes to perform the electric discharge machining process.

[0007] The electric discharge machining apparatus of the present invention is characterized in that the plurality of electric discharge electrodes are electrically connected to one power supply unit or to a plurality of power supply units, respectively, thereby performing the electric discharge machining process on the workpiece.

[0008] The electric discharge machining apparatus of the present invention is characterized in that the plurality of electric discharge electrodes of the integrated electric discharge machining unit are distributed parallel to each other along a first direction, and perform the electric discharge machining process in a machining movement direction perpendicular to the first direction.

[0009] The electric discharge machining apparatus according to the present invention is characterized in that the plurality of discharge electrodes of the integrated type electric discharge machining unit have a plurality of discharge sections overlapping the workpiece, and adjacent ones of the plurality of discharge sections are spaced apart by at least one insulating member and are substantially not in contact with each other.

[0010] In the electric discharge machining apparatus according to the present invention, the electrode guide assembly of each of the plurality of modular electric discharge machining units includes a wire feed wheel shared by the plurality of electric discharge electrodes, a plurality of wire separating wheels having a plurality of limiting slots, and a wire retracting wheel shared by the plurality of electric discharge electrodes, wherein the plurality of limiting slots can ensure that the plurality of electric discharge electrodes are substantially separated and can reliably reach their target positions.

[0011] The electric discharge machining apparatus of the present invention is characterized in that the electrode guide assembly of each of the plurality of modular electric discharge machining units includes a wire feed wheel and a wire recovery wheel, thereby ensuring that the plurality of electric discharge electrodes are substantially separated and can reliably reach their target positions.

[0012] In the electric discharge machining apparatus of the present invention, the electrode guide assembly of each of the plurality of modular electric discharge machining units further includes one or more tension adjusting wheels arranged between the wire feed wheel and the wire retract wheel, and the discharge electrode corresponds to the tension adjusting wheel, or the plurality of discharge electrodes correspond to the plurality of tension adjusting wheels, thereby adjusting the tension of each of the discharge electrode or each of the plurality of discharge electrodes.

[0013] The electric discharge machining apparatus of the present invention is characterized in that the integrated type electric discharge machining unit has the plurality of limiting slots of the plurality of wire dividing wheels, which substantially separate the plurality of electric discharge electrodes, and adjacent ones are spaced apart by at least one insulating member and do not substantially come into contact with each other.

[0014] The electric discharge machining apparatus of the present invention is characterized in that when the plurality of electric discharge electrodes perform the electric discharge machining process on the plurality of areas to be machined of the workpiece, the plurality of electric discharge electrodes form a plurality of electric discharge sections of substantially the same or different sizes in the plurality of areas to be machined of the workpiece.

[0015] The electric discharge machining apparatus of the present invention is characterized in that all of the plurality of discharge electrodes discharge to the plurality of areas to be machined of the workpiece during the electric discharge machining process, or only some of the plurality of discharge electrodes discharge to the plurality of areas to be machined of the workpiece.

[0016] The electric discharge machining apparatus according to the present invention is characterized in that the plurality of electric discharge electrodes perform the electric discharge machining process on the workpiece with the same or different discharge energies during the electric discharge machining process.

[0017] The electric discharge machining apparatus according to the present invention further comprises a slag removal unit, of which there may be one or more slag removal units, which perform a slag removal process on the machining target area after the electric discharge machining process.

[0018] In the electric discharge machining apparatus of the present invention, the plurality of slag removal units correspond one-to-one to the plurality of discharge electrodes, and in the slag removal process, each of the slag removal units applies a plurality of external forces to the machining target area or the plurality of machining target areas.

[0019] The electric discharge machining apparatus according to the present invention is characterized in that the values ​​of the external forces applied by the plurality of slag removal units may be the same or different.

[0020] In the electric discharge machining apparatus of the present invention, the slag removal unit is selected from the group consisting of at least one water fountain unit and at least one water suction unit, and there are one or more water fountain units, which are adapted to match one or more of the water suction units, and the thrust value of the water fountain unit and the suction force value of the water suction unit are the same or different.

[0021] In the electric discharge machining apparatus of the present invention, the slag removal unit is fitted with at least one guide structure to guide the external force of the slag removal unit to the position where the electric discharge machining process is being performed on the area to be machined of the workpiece when the slag removal process is being performed.

[0022] The electric discharge machining apparatus according to the present invention is characterized in that the guide structure moves in synchronization with the feeding operation of the electric discharge electrode or the plurality of electric discharge electrodes.

[0023] In the electric discharge machining apparatus according to the present invention, the guide structure is a flake structure, and the thickness thereof is substantially smaller than or equal to the width of the machining groove.

[0024] The electric discharge machining apparatus according to the present invention is characterized in that the plurality of electric discharge electrodes simultaneously perform the electric discharge machining process on the same workpiece, or each of the electric discharge electrodes performs the electric discharge machining process on a plurality of workpieces.

[0025] The electric discharge machining apparatus of the present invention is characterized in that the plurality of electric discharge electrodes correspond to the same power supply unit or at least one different power supply unit, and perform the electric discharge machining process on the workpiece under the control of the same or at least one different control unit with at least one same or different machining parameter.

[0026] The electric discharge machining apparatus according to the present invention is characterized in that adjacent ones of the plurality of electric discharge electrodes perform the electric discharge machining process on the workpiece in turn with a minimized time interval.

[0027] The electric discharge machining apparatus of the present invention is characterized in that adjacent ones of the plurality of discharge electrodes are kept at a certain distance, and the distance is determined by the thickness of at least one cutting chip to be obtained by performing the electric discharge machining process on the workpiece, the discharge gap of at least one of the plurality of discharge electrodes, and / or the wire diameter of at least one of the plurality of discharge electrodes.

[0028] In the electric discharge machining apparatus according to the present invention, the modular electric discharge machining unit has a modular design, so that a plurality of the modular electric discharge machining units can be detachably combined with the integrated type electric discharge machining unit. [Effects of the Invention]

[0029] The electric discharge machining device according to the present invention has the following advantages. (1) It has a modular design and high integration. By adopting such a modularized EDM unit, the device can be easily assembled and disassembled to form an integrated EDM unit. This design allows users to flexibly adjust the number of modularized units according to their actual needs.

[0030] (2) Highly customizable and adaptable. The modular unit configuration can be adjusted according to the number of areas to be machined, the number of grooves to be formed, and the number of discharge electrodes to be used, meeting the machining needs of single or multiple workpieces and supporting machining using single or multiple discharge electrodes.

[0031] (3) Improved processing efficiency and flexibility. Multiple discharge electrodes can process workpieces simultaneously or sequentially, significantly improving machining speed and production capacity. Multiple discharge electrodes can share or have their own power supply unit, control unit, upper machine head, lower machine head, conductive plate, wire feed wheel / wire return wheel, etc., improving layout flexibility. By setting different machining parameters, each electrode can perform the same or different machining tasks. The dimensions of the discharge sections can be set to be the same or different, which can meet various machining needs. Only some electrodes can be selected for machining, improving operational flexibility. The distance between multiple electrodes can be equal or unequal to meet different cutting thicknesses or design requirements.

[0032] (4) Processing accuracy and stability can be ensured. The limiting slots in the wire separating wheel can effectively separate and guide multiple discharge electrodes. The insulating material can further ensure insulation between adjacent electrodes to prevent interference and short circuits. The tension adjusting wheel and tension measuring unit can maintain tension stability for each electrode. The vibration measuring unit can monitor the stability of the electrodes.

[0033] (5) The slag removal effect and processing quality can be improved. Optional slag removal units (e.g., air flow, water flow, ultrasonic, magnetic force, etc.) effectively remove slag generated during EDM. The slag removal unit can be used in conjunction with a guide structure to precisely direct the slag removal external force to the machining area, improving slag removal efficiency. The same or different slag removal forces can be applied to different electrodes or areas to improve slag removal effectiveness. Combining a thrust and suction force generation unit can more effectively remove slag and improve machining quality.

[0034] In order to better understand the technical features and achievable technical effects of the present invention, better embodiments and detailed descriptions are provided below. [Brief explanation of the drawings]

[0035] [Figure 1] 1 is a front view of an electric discharge machining apparatus according to the present invention, in which the wire-feeding end and the wire-recovery end of the electric discharge electrode are respectively positioned on a wire-feeding wheel and a wire-recovery wheel; [Figure 2] 1 is a front view of an electric discharge machining apparatus according to the present invention, in which the wire-feeding end and the wire-recovery end of the discharge electrode are respectively located on the same wire-feeding wheel or wire-recovery wheel; [Figure 3] 1 is a top view of an electric discharge machining apparatus according to the present invention, which has one electric discharge electrode. [Figure 4] 1 is a top view showing an electric discharge machining apparatus according to the present invention, which has a plurality of electric discharge electrodes. [Figure 5] 1 is a top view of an electrical discharge machining apparatus according to the present invention, in which multiple modular electrical discharge machining units share the same components (power supply unit, upper mechanical head, lower mechanical head, and conductive plate); [Figure 6] 1 is a top view of an electrical discharge machining apparatus according to the present invention, in which multiple modular electrical discharge machining units share the same components (wire feed wheel and / or wire retrieve wheel). [Figure 7] 1 is a top view showing an electric discharge machining apparatus according to the present invention, in which a plurality of electric discharge electrodes are spaced apart by an insulating member and are not substantially in contact with each other. [Figure 8] 1 is a side view of an electric discharge machining apparatus according to the present invention, in which the dimensions of a plurality of electric discharge sections of a plurality of electric discharge electrodes are substantially the same; [Figure 9] 1 is a side view of an electric discharge machining apparatus according to the present invention, in which the dimensions of the plurality of discharge sections of the plurality of discharge electrodes are substantially different; [Figure 10] 1 is a side view of an electric discharge machining apparatus according to the present invention, in which only a portion of the electric discharge electrodes simultaneously perform an electric discharge machining process on a workpiece; [Figure 11] 1 is a side view of an electric discharge machining apparatus according to the present invention, in which the distances between the plurality of electric discharge electrodes are the same or different; [Figure 12] 1 is a side view of an electric discharge machining apparatus according to the present invention, in which a modular electric discharge machining unit has a slag removal unit; [Figure 13] 1 is a side view of an electric discharge machining apparatus according to the present invention, in which a slag removal unit of a modular electric discharge machining unit is paired with a guide structure; [Figure 14] 1 is a top view of an electric discharge machining apparatus according to the present invention, in which the forces applied by the slag removal units of the modular electric discharge machining units are the same or different; [Figure 15] 1 is a top view of an electric discharge machining apparatus according to the present invention, in which multiple electric discharge electrodes jointly perform an electric discharge machining process on multiple workpieces; [Figure 16] 1 is a top view of an electric discharge machining apparatus according to the present invention, in which a plurality of electric discharge electrodes perform an electric discharge machining process on a corresponding workpiece; DETAILED DESCRIPTION OF THE INVENTION

[0036] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The proportions of the components in the drawings of the embodiments of the present invention are shown for ease of understanding and are not the actual proportions. Furthermore, the dimensional proportions of the assemblies shown in the drawings are for the purpose of explaining the components and their structures, and the present invention is not limited to these proportions. Meanwhile, for ease of understanding, the same components in the following embodiments will be described with the same reference numerals.

[0037] Furthermore, terms used throughout the specification and claims generally have their ordinary meanings as used in the art, in the context disclosed herein, and in the particular context, unless otherwise specified. Some terms used to describe the invention are explained below or elsewhere in this specification to provide those of ordinary skill in the art with additional guidance regarding the description of the invention.

[0038] The use of "first," "second," "third," etc. in this article does not denote a specific order or sequence, nor is it used to limit the invention, but is used only to distinguish between components or operations described with the same terminology.

[0039] Secondly, when this article uses terms such as "including," "comprising," "having," and "containing," they are all open terms, meaning including but not limited to.

[0040] Fig. 1 is a front view of an electric discharge machining apparatus according to the present invention, in which both ends of a discharge electrode (a wire feed end and a wire recovery end) are located on a wire feed wheel and a wire recovery wheel, respectively. Fig. 2 is a front view of an electric discharge machining apparatus according to the present invention, in which both ends of a discharge electrode (a wire feed end and a wire recovery end) are located on the same wire feed wheel (or wire recovery wheel). Fig. 3 is a top view of an electric discharge machining apparatus according to the present invention, in which there is one discharge electrode. Fig. 4 is a top view of an electric discharge machining apparatus according to the present invention, in which there are multiple discharge electrodes.

[0041] 1 to 4 and other figures, the electric discharge machining apparatus 10 according to the present invention mainly includes at least one platform 20 and an integrated type electric discharge machining unit 300. The stage 20 is for supporting at least one workpiece 100. The workpiece 100 defines at least one area 110 to be machined. The integrated electric discharge machining unit 300 is for performing an electric discharge machining process on the area 110 to be machined of the workpiece 100. The stage 20 may be, for example, a fixed-position stage, or a movable, rotatable, or tiltable stage. The stage 20 of the present invention may optionally include a support plate 21 (for example), as shown in FIGS. 1 and 2, or may omit the support plate. The stage 20 of the present invention is not limited to a specific configuration, and the configuration of the stage 20 described above is merely an example and is not intended to limit the present invention. The integrated type electric discharge machining unit 300 according to the present invention is mainly configured by integrating at least one modular electric discharge machining unit 30 having a predetermined number. The predetermined number of modular electric discharge machining units 30 is not limited to one as shown in FIG. 3 or a plurality (e.g., two or more) as shown in FIG. 4.

[0042] In the present invention, known technical means can be used to integrate multiple modularized electric discharge machining units 30 into one integrated type electric discharge machining unit 300. For example, the modularized electric discharge machining unit 30 has a modular design, for example, includes mating parts that can be combined with each other, so that multiple modularized electric discharge machining units 30 can be removably combined into the integrated type electric discharge machining unit 300 by various integration techniques, such as, but not limited to, a snap-on connection method (e.g., a dovetail groove and a slider with a corresponding shape, or a positioning hole and a fixing bolt), a locking method, a magnetic attraction method, or other assembly methods. The present invention can selectively add a modular design to a conventional electric discharge machining unit, thereby forming a modular electric discharge machining unit 30 according to the present invention, which can then be integrated into a single integrated type electric discharge machining unit 300. Examples of the combined components include a combination of a locking block and a locking slot, a combination of a screw hole and a threaded rod, or magnetic components that can be attracted to each other. The structure of the combined components can be modified as needed depending on the integration technology used. Those skilled in the art will readily understand how multiple modular electric discharge machining units 30 can be integrated into an integrated type electric discharge machining unit 300 using the combined components and integration technology. The structure of the combined components and the method for combining them can be based on known prior art, and therefore will not be further described here.

[0043] In the integrated type electric discharge machining unit 300, each modular electric discharge machining unit 30 is provided with at least one electric discharge electrode 32, which allows at least one electric discharge machining process to be performed on the machining area 110 of the workpiece 100 placed on the platform 20. This allows at least one machining groove 120 to be formed in the machining area 110. Both sides A of the electric discharge electrode 32 of the electric discharge machining unit 30 extend along the second direction Y, so that the discharge section B of the electric discharge electrode 32 is parallel to the second direction Y. The second direction Y is perpendicular to the first direction X and the third direction Z. In this invention, the machining movement direction F is parallel to the third direction Z as an example. The discharge section B of the discharge electrode 32 and the area 110 to be machined of the workpiece 100 move reciprocally, circulate, or continuously relative to each other, for example, along the second direction Y shown in FIG. 1 , thereby performing an electric discharge machining process on the area 110 to be machined of the workpiece 100 along the machining movement direction F. The power supply unit 34 of the electric discharge machining unit 30 supplies a first power supply P1 to the discharge electrode 32 and the workpiece 100 during the electric discharge machining process. As a result, discharge energy is applied to the area 110 to be machined of the workpiece 100 via the discharge section B of the discharge electrode 32.

[0044] One feature of the present invention is that the electric discharge machining apparatus 10 integrates a predetermined number of modular electric discharge machining units 30 into a single integrated electric discharge machining unit 300, and the predetermined number of modular electric discharge machining units 30 is adjusted according to the number of areas 110 to be machined in the electric discharge machining process, the number of machining grooves 120 to be formed in the electric discharge machining process, and / or the number of electric discharge electrodes 32 used in the electric discharge machining process. The multiple electric discharge electrodes 32 perform the electric discharge machining process in a first direction X, for example, parallel to each other, but the present invention is not limited thereto. The multiple electric discharge electrodes 32 of the integrated electric discharge machining unit 300 are distributed parallel to each other along the first direction X and perform the electric discharge machining process in a machining movement direction F perpendicular to the first direction X.

[0045] The number of discharge electrodes 32 provided by the integrated type electric discharge machining unit 300 corresponds to the predetermined number of the plurality of modular electric discharge machining units 30. For example, if each modular electric discharge machining unit 30 is provided with one discharge electrode 32, the integrated type electric discharge machining unit 300 integrated with the predetermined number of modular electric discharge machining units 30 can provide the same number of discharge electrodes 32 as the predetermined number, simultaneously or not simultaneously. The plurality of discharge electrodes 32 perform the electric discharge machining process in parallel to each other in the first direction X. Similarly, if each modular electric discharge machining unit 30 is provided with two discharge electrodes 32, the integrated type electric discharge machining unit 300 can provide a greater number (twice as many) of discharge electrodes 32 than the predetermined number, simultaneously or not simultaneously.

[0046] The plurality of discharge electrodes 32 according to the present invention may selectively perform the electric discharge machining process on the same workpiece 100 jointly as shown in Figure 4, or may selectively perform the electric discharge machining process on a plurality of workpieces 100 respectively as shown in Figures 5, 15 and 16. Furthermore, the adjacent plurality of discharge electrodes 32 may selectively perform the electric discharge machining process on the workpieces 100 in sequence with a minimized time interval (for example, as shown in Figure 11).

[0047] The multiple discharge electrodes 32 of the integrated type electric discharge machining unit 300 according to the present invention are, for example, electrically connected to a single power supply unit 34 in common, or electrically connected to multiple power supply units 34 respectively, to perform an electric discharge machining process on the workpiece 100. For example, the multiple discharge electrodes 32 each correspond to the same power supply unit 34 as shown in FIG. 5 , or to at least one different power supply unit 34 as shown in FIG. 15 , and perform an electric discharge machining process on a workpiece 100 with the same machining parameters or at least one different machining parameter under the control of the same control unit 90 as shown in FIG. 5 , or under the control of at least one different control unit 90 as shown in FIG. 15 . This allows, for example, the electric discharge machining process to be maintained in a target machining state. Each discharge electrode 32 has a discharge section B overlapping the workpiece 100, and performs the electric discharge machining process on the workpiece 100. Therefore, the multiple discharge electrodes 32 have multiple discharge sections B overlapping the workpiece 100, and adjacent multiple discharge sections B are spaced apart by at least one insulating member 56 as shown in FIG. 15 , and are substantially not in contact with each other. The types of the processing parameters include one or more of a position parameter, a discharge electrical parameter, a debris removal parameter, a displacement parameter, a tension parameter, and a vibration parameter. The discharge electrical parameter may be, for example, a discharge frequency and / or a discharge energy, but the present invention is not limited thereto. Furthermore, the multiple discharge electrodes 32 form multiple discharge sections B on the multiple areas to be machined 110 of the workpiece 100, which may have substantially the same dimensions (e.g., lengths) as shown in Fig. 8 or different dimensions (e.g., lengths) as shown in Fig. 9. The present invention is not limited to all of the multiple discharge electrodes 32 performing discharges on the multiple areas to be machined 110 of the workpiece 100 in the electric discharge machining process as shown in Fig. 8 (for example, or only some of the multiple discharge electrodes 32 performing discharges on the multiple areas to be machined 110 of the workpiece 100 as shown in Fig. 10). In other words, the multiple discharge electrodes 32 according to the present invention are not limited to performing the electric discharge machining process on the workpiece 100 at the same time, and the multiple discharge electrodes 32 may perform the electric discharge machining process on the same or different areas to be machined 110 of the workpiece 100 in order of priority, or only some of the discharge electrodes 32 may be used in the electric discharge machining process, and the integrated type electric discharge machining unit 300 after integration may perform the electric discharge machining process, as long as these can do so. Furthermore, multiple discharge electrodes 32 can selectively perform the EDM process on multiple areas 110 to be machined on the same or different workpieces 100 with the same or different discharge energies. For example, when two or more discharge electrodes 32 sequentially machine the same area 110 to be machined on the workpiece 100, different machining parameters can be set for the electrodes in different sequences. In one embodiment, the first discharge electrode 32 can perform rough machining using a larger discharge energy, and the later discharge electrode 32 can perform fine machining using a smaller discharge energy. This allows the present invention to complete the rough machining and fine machining processes sequentially in a single EDM process, thereby significantly improving the overall machining efficiency and the surface quality of the workpiece 100.

[0048] In the integrated type electric discharge machining unit 300, both sides A of the discharge electrode 32 of each modular electric discharge machining unit 30 are connected across or around a wire guide assembly 400, so that the discharge section B of the discharge electrode 32 is suspended. The ends (wire feed end and wire recovery end) of the discharge electrode 32 are selectively positioned on the wire feed wheel 36 and wire recovery wheel 36', respectively, as shown in FIG. 1. Alternatively, the ends (wire feed end and wire recovery end) of the discharge electrode 32 are also selectively positioned on the same wire feed wheel 36 (wire recovery wheel 36'), respectively, as shown in FIG. 2. The electrode guide assembly 400 of each modular electric discharge machining unit 30 includes a wire feed wheel 36, a plurality of wire separating wheels 37, and a wire recovery wheel 36' for transporting and guiding the discharge electrode 32, and may optionally include, for example, further machine head components, such as an upper machine head 31 and a lower machine head 31', for guiding the discharge electrode 32. Multiple modular electric discharge machining units 30 may share the wire feed wheel 36 and / or the wire recovery wheel 36', as shown in FIG. 6, or multiple modular electric discharge machining units 30 may each have a corresponding wire feed wheel 36 and wire recovery wheel 36', as shown in FIG. 5. The wire feed wheel 36, the wire recovery wheel 36', and the wire separating wheel 37 each include a support member 40 and a holding member 50, which are, for example, assembled or integrally molded. The support member 40 is, for example, a rotatable wheel, and the holding member 50 is, for example, the wheel shaft. The holding member 50 is not limited to being fixed or movable and is applicable to the present invention as long as it can transport and guide the discharge electrode 32. For example, the wire feed wheel 36 and / or the wire recovery wheel 36' can also be selectively connected to different rotation mechanisms (e.g., motors), respectively. For example, the rotation mechanism can rotate the holding members 50 of the wire feed wheel 36 and / or the wire recovery wheel 36', which in turn drives and rotates the wire feed wheel 36 and / or the wire recovery wheel 36'. The holding members 50 of the multiple wire separating wheels 37 can be rotatably mounted at any height and position, for example, to transport and guide the discharge electrode 32. The mounting member 40 and the holding member 50 according to the present invention can also be used as a combination element for combining a predetermined number of modular electric discharge machining units 30 to form a desired integrated type electric discharge machining unit 300, as shown in FIG.

[0049] Each of the plurality of wire dividing wheels 37 has at least one limiting slot 42 and is provided, for example, on the surface of the mounting member 40. The discharge electrodes 32 are constrained in the limiting slots 42, and the discharge electrodes 32 in different limiting slots 42 can be arranged electrically independent from each other or can be electrically connected to each other via, for example, a conductive plate 43. For example, the plurality of discharge electrodes 32 may share a single conductive plate 43 as shown in FIG. 5, or each may have a corresponding conductive plate 43 as shown in FIG. 4. According to the present invention, the plurality of limiting slots 42 can substantially separate the plurality of discharge electrodes 32 and ensure the transmission of the plurality of discharge electrodes 32 to the target position (e.g., the machining groove 120 or other position). Similarly, the plurality of modularized electric discharge machining units 30 may selectively share an upper machine head 31 and / or a lower machine head 31'. Thus, the plurality of discharge electrodes 32 may share the upper machine head 31 and / or the lower machine head 31' as shown in FIG. 5, or the plurality of modularized electric discharge machining units 30 may each have an upper machine head 31 and / or a lower machine head 31' as shown in FIG. 4. Thus, the plurality of discharge electrodes 32 correspond to one upper machine head 31 and / or one lower machine head 31'.

[0050] The electrode guide assembly 400 of each modularized electric discharge machining unit 30 further optionally includes one or more tension adjustment wheels 37' disposed between the wire feed wheel 36 and the wire retraction wheel 36'. Each of the discharge electrodes 32 corresponds to one tension adjustment wheel 37', or shares one tension adjustment wheel 37', thereby adjusting the tension of each discharge electrode 32. In the present invention, the plurality of discharge electrodes 32 are substantially separated by the plurality of limiting slots 42 of the plurality of wire separating wheels 37, and further, adjacent discharge electrodes 32 among the plurality of discharge electrodes 32 are spaced apart by an insulating member 56 so as to be substantially non-contact with each other, as shown in FIG. 7 . Furthermore, the electric discharge machining apparatus 10 according to the present invention optionally includes a tension measuring unit 38, which is, for example, a tension meter, for measuring the tension value of the discharge electrode 32. Alternatively, the electric discharge machining apparatus 10 further optionally includes a vibration measuring unit 39, which measures the vibration value of the discharge electrode 32.

[0051] 12 to 14, the modularized electric discharge machining unit 30 optionally includes one or more slag removal units 64. The slag removal units 64 perform a slag removal process on one or more areas to be machined 110 where the electric discharge machining process is performed. This makes it possible to remove slag generated when the electric discharge electrode 32 applies electric discharge energy to the workpiece 100, for example. For example, the plurality of slag removal units 64 correspond one-to-one to the plurality of discharge electrodes 32, and respectively apply a plurality of external forces F2 to one or a plurality of processing areas 110 during the slag removal process. The slag removal units 64 may be, for example, an air flow generator, a water flow generator, an ultrasonic generator, a piezoelectric vibrator, or a magnetic force generator. The external force F2 may be, for example, an air flow, a water flow, an ultrasonic vibration, a piezoelectric vibration, an attractive force, or a magnetic force. The values ​​of the plurality of external forces F2 may be the same or different. For example, as shown in FIG. 12, the slag removal unit 64 is selected from the group consisting of at least one thrust generating unit 64A (e.g., a water spray unit) and at least one suction generating unit 64B (e.g., a water suction unit). There may be one or more thrust generating units 64A, each paired with one or more suction generating units 64B. The value of the thrust F21 generated by the thrust generating unit 64A may be the same as or different from the value of the suction force F22 generated by the suction generating unit 64B. The direction or position of the external force F applied by the slag removal unit 64 is manually or automatically adjusted to correspond to the position (e.g., the machining groove 120) where the electric discharge machining process is being performed in the machining target area 110 of the workpiece 100. The thrust generating unit 64A and the suction generating unit 64B respectively press and remove the slag generated during the electric discharge phase of the electric discharge machining process. This effectively improves the effectiveness of slag removal. The slag removal unit 64 of the modularized electric discharge machining unit 30 according to the present invention may optionally further include at least one guide structure 66, as shown in FIG. 13 . The guide structure 66 guides the external force F2 generated by the slag removal unit 64 to the position (e.g., the machining groove 120) where the electric discharge machining process is being performed in the machining target area 110 of the workpiece 100. This can assist in slag removal. The guide structure 66 moves synchronously with the feed operation of one or more electric discharge electrodes 32. For example, the guide structure 66 may be a flake structure, such as a copper foil or silicon steel plate, but the present invention is not limited thereto. The guide structure 66 may include or be made of any suitable material, and its thickness may be substantially smaller than or equal to the width of the machining groove 120.

[0052] The workpiece 100 may be any conductive or semiconductive material suitable for electrical discharge machining, such as an ingot or wafer, and may have the appearance of a block or sheet, such as a cylinder. Taking a semiconductor material as an example, the workpiece 100 may be made of a semiconductor material selected from the group consisting of silicon, gallium arsenide, indium phosphide, gallium nitride, and silicon carbide. For example, let us assume that the workpiece 100 defines multiple machining areas 110. These machining areas 110 can be selectively positioned at any positions on the workpiece 100 suitable for machining. The distances between these machining areas 110 correspond (e.g., are the same) to define the cutting thickness, thinning thickness, or cutting distance of the workpiece 100. These values ​​are adjusted according to actual machining requirements and are not limited to being equal to each other. Adjacent discharge electrodes 32 are spaced apart by a certain distance, and this distance is determined by the thickness of at least one cut piece desired to be obtained when the workpiece 100 undergoes the electric discharge machining process, the discharge gap of at least one of the discharge electrodes 32, and / or the wire diameter of at least one of the discharge electrodes 32. Furthermore, the values ​​of the distances between the discharge electrodes 32 do not necessarily need to be equal to each other. The distances are, for example, the front-to-back distance D1 and / or the left-to-right distance D2 between the discharge electrodes 32, as shown in FIG. 11 .

[0053] In summary, the electrical discharge machining apparatus of the present invention has a modular design that allows a predetermined number of modular electrical discharge machining units to be integrated into one integrated type electrical discharge machining unit, and the predetermined number of the modular electrical discharge machining units can be adjusted according to the number of areas to be machined in the electrical discharge machining process, the number of machining grooves to be formed in the electrical discharge machining process, and / or the number of discharge electrodes used in the electrical discharge machining process.

[0054] The electric discharge machining device according to the present invention has the following advantages. (1) It has a modular design and high integration. By adopting such a modularized EDM unit, it can be easily assembled and disassembled to form an integrated EDM unit. This design allows users to flexibly adjust the number of modularized units according to their actual needs.

[0055] (2) Highly customizable and adaptable. The modular unit configuration can be adjusted according to the number of areas to be machined, the number of grooves to be formed, and the number of discharge electrodes to be used, meeting the machining needs of single or multiple workpieces and supporting machining using single or multiple discharge electrodes.

[0056] (3) Improved processing efficiency and flexibility. Multiple discharge electrodes can process workpieces simultaneously or sequentially, significantly improving machining speed and production capacity. Multiple discharge electrodes can share or have their own power supply unit, control unit, upper machine head, lower machine head, conductive plate, wire feed wheel / wire return wheel, etc., improving layout flexibility. By setting different machining parameters, each electrode can perform the same or different machining tasks. The dimensions of the discharge sections can be set to be the same or different, which can meet various machining needs. Only some electrodes can be selected for machining, improving operational flexibility. The distance between multiple electrodes can be equal or unequal to meet different cutting thicknesses or design requirements.

[0057] (4) Processing accuracy and stability can be ensured. The limiting slots in the wire separating wheel can effectively separate and guide multiple discharge electrodes. The insulating material can further ensure insulation between adjacent electrodes to prevent interference and short circuits. The tension adjusting wheel and tension measuring unit can maintain tension stability for each electrode. The vibration measuring unit can monitor the stability of the electrodes.

[0058] (5) The slag removal effect and processing quality can be improved. Optional slag removal units (e.g., air flow, water flow, ultrasonic, magnetic force, etc.) effectively remove slag generated during EDM. The slag removal unit can be used in conjunction with a guide structure to precisely direct the slag removal external force to the machining area, improving slag removal efficiency. The same or different slag removal forces can be applied to different electrodes or areas to improve slag removal effectiveness. Combining a thrust and suction force generation unit can more effectively remove slag and improve machining quality.

[0059] The foregoing description is by way of example only and is not intended to be limiting. Any equivalent modifications or variations thereto that do not depart from the spirit and scope of the invention are within the scope of the claims. [Explanation of symbols]

[0060] 10 Electrical discharge machining equipment 20 Platform 21 Support board 30 Modular Electrical Discharge Machining Unit 31 Upper Machine Head 31' Lower Machine Head 32 Discharge electrode 34 Power Supply Unit 36 Wire feed wheel 36' Wire Recovery Wheel 37 Wire Separator Wheel 37' Tension Adjustment Wheel 38 Tension measurement unit 39 Vibration Measurement Unit 40 Mounting material 42 Limited Slots 43 Conductive Plate 50 holding member 56 Insulating material 64 Slag removal unit 64A Thrust Generator Unit 64B suction power generation unit 66 Guide structure 90 Control Unit 100 workpieces 110 Processing area 120 Machining groove 300 Integrated Type EDM Unit 400 Electrode Guide Assembly A Both sides of the discharge electrode B Discharge section D1 Front-rear distance D2 Left and right distance F Machining movement direction F2 external force F21 Thrust F22 Suction power P1 First power supply X first direction Y Second direction Z third direction

Claims

1. at least one platform for receiving at least one workpiece, said workpiece defining at least one area to be machined; an integrated type electric discharge machining unit configured by integrating a predetermined number of at least one modular electric discharge machining unit, wherein at least one electric discharge electrode is disposed in the modular electric discharge machining unit, and the electric discharge electrode is used to perform at least one electric discharge machining process on the area to be machined on the workpiece placed on the platform, thereby forming at least one machining groove in the area to be machined; the predetermined number of modularized electric discharge machining units is adjusted according to the number of areas to be machined in which the electric discharge machining process is performed, the number of machining grooves to be formed in the electric discharge machining process, and / or the number of discharge electrodes used in the electric discharge machining process. Electrical discharge machining equipment.

2. 2. The electric discharge machining apparatus according to claim 1, wherein the predetermined number of modularized electric discharge machining units is a plurality of modularized electric discharge machining units, and the plurality of modularized electric discharge machining units provide a plurality of the electric discharge electrodes corresponding to the predetermined number to perform the electric discharge machining process.

3. 3. The electric discharge machining apparatus according to claim 2, wherein the plurality of electric discharge electrodes are electrically connected to one power supply unit or to a plurality of the power supply units, respectively, to perform the electric discharge machining process on the workpiece.

4. 3. The electric discharge machining apparatus according to claim 2, wherein the plurality of electric discharge electrodes of the integrated type electric discharge machining unit are distributed to be parallel to each other along a first direction, and perform the electric discharge machining process in a machining movement direction perpendicular to the first direction.

5. 3. The electric discharge machining apparatus according to claim 2, wherein the plurality of discharge electrodes of the integrated type electric discharge machining unit have a plurality of discharge sections overlapping the workpiece, and adjacent discharge sections among the plurality of discharge sections are kept apart by at least one insulating member at a certain distance and do not come into contact with each other.

6. 3. The electric discharge machining apparatus according to claim 2, wherein the electrode guide assembly of each of the plurality of modularized electric discharge machining units comprises: a wire feed wheel shared by the plurality of electric discharge electrodes; a plurality of wire separating wheels having a plurality of limiting slots; and a wire recovering wheel shared by the plurality of electric discharge electrodes, wherein the plurality of limiting slots separate the plurality of electric discharge electrodes and allow them to reach target positions.

7. 3. The electric discharge machining apparatus according to claim 2, wherein the electrode guide assembly of each of the plurality of modular electric discharge machining units comprises a wire feed wheel and a wire retract wheel, whereby the plurality of electric discharge electrodes are separated and reach the target position.

8. 8. The electric discharge machining apparatus according to claim 6 or 7, wherein the electrode guide assembly of each of the plurality of modularized electric discharge machining units further includes one or more tension adjusting wheels provided between the wire feed wheel and the wire retract wheel, and the electric discharge electrode corresponds to the tension adjusting wheel, or the plurality of electric discharge electrodes correspond to the plurality of tension adjusting wheels, thereby adjusting the tension of each of the electric discharge electrode or each of the plurality of electric discharge electrodes.

9. 7. The electric discharge machining apparatus according to claim 6, wherein the integrated type electric discharge machining unit has the plurality of limiting slots of the plurality of wire dividing wheels to separate the plurality of electric discharge electrodes, and adjacent electric discharge electrodes are kept at a certain distance from each other by at least one insulating member and do not come into contact with each other.

10. 3. The electric discharge machining apparatus according to claim 2, wherein the plurality of electric discharge electrodes form a plurality of electric discharge sections of the same or different sizes in the plurality of areas to be machined of the workpiece when performing the electric discharge machining process on the plurality of areas to be machined of the workpiece.

11. 3. The electric discharge machining apparatus according to claim 2, wherein all of the plurality of electric discharge electrodes perform electric discharges on the plurality of areas to be machined of the workpiece during the electric discharge machining process, or only some of the plurality of electric discharge electrodes perform electric discharges on the plurality of areas to be machined of the workpiece.

12. The electric discharge machining apparatus according to claim 2 , wherein the plurality of electric discharge electrodes perform the electric discharge machining process on the workpiece with the same or different electric discharge energies in the electric discharge machining process.

13. 3. The electric discharge machining apparatus according to claim 2, further comprising one or more slag removal units, which perform a slag removal process on the machining target area after the electric discharge machining process.

14. 14. The electric discharge machining apparatus according to claim 13, wherein the plurality of slag removal units correspond one-to-one to the plurality of discharge electrodes, and apply a plurality of external forces to the machining target area or the plurality of machining target areas, respectively, in the slag removal process.

15. The electric discharge machining apparatus according to claim 14, wherein the values ​​of the external forces applied by the slag removing units are the same or different.

16. 16. The electric discharge machining apparatus according to claim 15, wherein the slag removal unit is selected from the group consisting of at least one water fountain unit and at least one water suction unit, the number of the water fountain units is one or more, and the water fountain unit is adapted to match the one or more water suction units, and the thrust value by the water fountain unit and the suction force value by the water suction unit are the same or different.

17. 14. The electric discharge machining apparatus according to claim 13, wherein the slag removal unit is fitted to at least one guide structure to guide an external force generated by the slag removal unit to a position on the area to be machined of the workpiece where the electric discharge machining process is being performed when the slag removal process is being performed.

18. 18. The electric discharge machining apparatus according to claim 17, wherein the guide structure moves in synchronization with a feeding operation of the electric discharge electrode or the plurality of electric discharge electrodes.

19. 18. The electric discharge machining device according to claim 17, wherein the guide structure is a flake structure, and the thickness thereof is smaller than or equal to the width of the machining groove.

20. The electric discharge machining apparatus according to claim 2 , wherein the plurality of electric discharge electrodes simultaneously perform the electric discharge machining process on the same workpiece, or each perform the electric discharge machining process on a plurality of workpieces.

21. 3. The electric discharge machining apparatus according to claim 2, wherein the plurality of electric discharge electrodes correspond to the same power supply unit or at least one different power supply unit, and perform the electric discharge machining process on the workpiece under the control of the same or at least one different control unit with at least one same or different machining parameter.

22. 2. The electric discharge machining apparatus according to claim 1, wherein the plurality of adjacent electric discharge electrodes perform the electric discharge machining process on the workpiece in sequence with a minimized time interval between each other.

23. 2. The electric discharge machining apparatus according to claim 1, wherein the adjacent plurality of discharge electrodes are kept at a constant distance from each other, and the distance is determined by a thickness of at least one cutting chip to be obtained by performing the electric discharge machining process on the workpiece, a discharge gap of at least one of the plurality of discharge electrodes, and / or a wire diameter of at least one of the plurality of discharge electrodes.

24. 2. The electric discharge machining apparatus according to claim 1, wherein the modularized electric discharge machining unit is of a modular design, whereby a plurality of the modularized electric discharge machining units can be removably combined with the integrated type electric discharge machining unit.

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