Microenvironment control system for preventing fogging of lens units in active exposure equipment

Abstract

A microenvironment control system for preventing fogging of the lens unit of an active exposure device is provided. [Solution] A first filter member (20) receives a fluid (A1) and filters the fluid. A water cleaning unit (30) includes a sprinkler device (32), multiple fillers (34), and a drainage device (36). The multiple fillers are installed on one side of the sprinkler device to receive the fluid and liquid (L1) sprayed by the sprinkler device. Each of the multiple fillers has multiple wavy grooves. The groove axis direction of the multiple wavy grooves in each of the multiple fillers has a predetermined groove angle. The multiple fillers are stacked so that they intersect according to the groove angle. The drainage device is installed on one side of the multiple fillers and receives the liquid that has passed through the multiple fillers. A dehumidification unit (40) is used to dehumidify the fluid that passes through. A temperature control unit (50) is used to control the temperature of the fluid that passes through.

Description

[Technical Field]

[0001] The present invention relates to a micro-environment control system for preventing fogging of a lens unit in an active exposure apparatus, and more particularly to a system for controlling the air environment in a factory. [Background technology]

[0002] With the development of the times, most of the technological devices in our daily lives use semiconductor chips, which can be controlled by editable application programs to achieve various functions. The range of applications of semiconductors has expanded to smartphones, automobiles, networks, cloud data, industrial automation, smart homes, and various consumer electronic products. The demand for core semiconductor technology development and component supply in the industrial sector is increasing day by day, driving the steady expansion of the overall potential market.

[0003] In addition, as chips in various fields are developed one after another, the diameter of semiconductor wiring is shrinking and the impact of airborne particulate matter in factories is becoming increasingly greater, so methods for managing and monitoring airborne molecular contamination (AMC) are becoming increasingly important.

[0004] Trace pollutants that exist in the air as gases at normal temperature and pressure, and whose amounts are not harmful to the human body but can affect products, are called gaseous molecular pollutants (AMC). Examples include salts generated from acids and bases, acidic and basic gases such as trimethylsilanol (TMS), SO2, and NH3, as well as airborne particulates.

[0005] As mentioned above, the primary source of contamination is salts generated by acids and bases. In semiconductor manufacturing processes, many high-precision optical lens modules are installed in clean rooms, where processes such as photolithography, inspection, and alignment are often performed. These optical lens units operate for long periods of time in high-temperature, high-humidity, and highly concentrated chemical environments, making them highly susceptible to acidic and basic gases (such as ammonia gas, hydrogen chloride gas, and hydrofluoric acid). When these gases combine with water vapor in the environment, salt crystals form on the lens unit surface, ultimately forming a haze layer that clouds the mirror surface and reduces light transmittance and imaging quality. This type of contamination is difficult to remove.

[0006] The second source of contamination is trimethylsilanol, a common gaseous molecular contaminant and a low-molecular-weight volatile silicon compound. Trimethylsilanol is widely used in the manufacturing processes of various silicon-based materials, as well as in lubricants, cleaning agents, and silicone-based products. If trimethylsilanol enters the interior of an exposure tool, especially the enclosed space where the optical lens and reflector system are located, it can cause contamination that is difficult to remove.

[0007] When exposed to high-energy ultraviolet light, trimethylsilanol undergoes photolysis, generating highly reactive silicon radicals. These reactive species react with traces of oxygen in the air to form solid deposits of silicon dioxide (SiO2). These silicon oxides deposit on the surface of optical lenses, forming a thin, uniform, but difficult-to-remove haze layer. This haze layer alters the refractive index and light transmittance of the optical element surface, resulting in reduced image quality, focal length shifts, and even the loss of the optical properties of the original high-performance coating.

[0008] The mechanism of formation of trimethylsilanol (TMS) contamination is as follows: HMDS+2H2O→2TMS+NH3 HMDS+H2O→HMDSO+NH3 HMDSO+2H2O←→2TMS

[0009] Conventional prevention methods include the use of high-performance filters, environmental gas monitoring, regular cleaning of equipment, and limiting the use of silicon-based materials. However, these measures often fail to completely prevent the diffusion and accumulation of trimethylsilanol. Especially during prolonged operation or under high-energy light source irradiation, trimethylsilanol can gradually cause contamination, and at the same time, the other gaseous molecular contaminants mentioned above are also present, further increasing the cost of contamination removal in precision optical systems.

[0010] In summary, how to effectively manage and suppress the accumulation and deposition of gaseous molecular contaminants such as trimethylsilanol in precision optical systems remains a significant challenge facing conventional technologies.

[0011] In view of the problems of the prior art described above, the present invention provides a microenvironment control system for preventing fogging of the lens unit of an active exposure apparatus, which effectively reduces gas molecule contaminants in the air by using water cleaning, fillers, and filter members, and appropriately controlling the temperature and humidity of the air, thereby solving problems such as damage to the apparatus and reduced processing accuracy. Summary of the Invention

[0012] One of the purposes of this invention is to provide a microenvironment control system for preventing fogging in lens units of active exposure equipment, which effectively reduces the amount of gaseous molecular contaminants that accumulate on the surface of optical elements by first filtering the fluid, then rinsing with water and using a filler, and appropriately controlling the temperature and humidity of the airflow, thereby avoiding problems such as condensation on the equipment, temperature and humidity fluctuations, and damage to the equipment and reduced processing accuracy caused by photochemical contamination.

[0013] To achieve the above objectives and advantages, the present invention provides a micro-environment control system for preventing fogging in a lens unit of an active-type exposure apparatus. The micro-environment control system for preventing fogging in a lens unit of an active-type exposure apparatus is installed inside a housing, with an air inlet and an air outlet at both ends of the housing, and the air inlet is used to receive a fluid. The micro-environment control system for preventing fogging in a lens unit of an active-type exposure apparatus includes a first filter member, a water cleaning unit, a dehumidification unit, and a temperature control unit. The first filter member is connected to the air inlet and is used to receive and filter the fluid. The water cleaning unit includes a sprinkler device that sprays liquid, a plurality of fillers installed on one side of the sprinkler device to receive the fluid that has passed through the first filter member and mix with the liquid by receiving the liquid, and a drainage device installed on one side of the fillers to receive the liquid that has passed through the fillers. Each of the fillers has a plurality of wavy grooves. The groove axis direction of the plurality of wavy grooves in each of the plurality of fillers has a predetermined groove angle. The plurality of fillers are stacked so that they intersect according to the groove angle. The dehumidification unit is in communication with the water cleaning unit and is used to receive the fluid that has passed through the water cleaning unit and dehumidify the passing fluid. The temperature control unit is in communication with the dehumidification unit and the exhaust port and is used to receive the fluid that has passed through the dehumidification unit and control the temperature of the passing fluid. This system provides a microenvironment control system for preventing fogging in a lens unit of an active exposure apparatus, capable of removing gaseous molecular contaminants.

[0014] In one embodiment of the present invention, the present invention further comprises a blowing unit, which is used to transport the fluid received by the anti-fogging microenvironment control system for the active exposure apparatus lens unit.

[0015] In one embodiment of the present invention, the blower unit is in communication with the temperature control unit and receives the fluid that has passed through the temperature control unit.

[0016] In one embodiment of the present invention, the air blowing unit communicates with the first filter member, receives the fluid that has passed through the temperature control unit, and transports the fluid to the water washing unit.

[0017] In one embodiment of the present invention, the fluid is a gas containing pollutants, the liquid includes water, and the first filter member is a filter made of nylon, polypropylene, or polyester.

[0018] In one embodiment of the present invention, the dehumidifying unit further comprises a humidity sensor and an evaporator, the evaporator being disposed on one side of the humidity sensor.

[0019] In one embodiment of the present invention, the temperature control unit further comprises a temperature sensor and a heat exchanger, the heat exchanger being disposed on one side of the temperature sensor.

[0020] In one embodiment of the present invention, the device further comprises a second filter member, the second filter member being in communication with the exhaust port and adapted to receive and filter the fluid.

[0021] In one embodiment of the present invention, the second filter element is a chemical filter material or a high efficiency air filter (HEPA).

[0022] In one embodiment of the present invention, the groove angle of the plurality of wavy grooves of each of the plurality of fillers is 30° to 75°, and the ratio of the amplitude (wave height) to the wavelength of the plurality of wavy grooves of each of the plurality of fillers is greater than 0.2 and less than 3.2.

[0023] In one embodiment of the present invention, the plurality of filler materials are selected from polyester, nylon, spandex, or any combination of these materials.

[0024] In one embodiment of the present invention, the plurality of fillers are polyester, nylon, spandex, or any combination of these materials.

[0025] In one embodiment of the present invention, the plurality of fillers further comprises an antibacterial additive, wherein the antibacterial additive is polystyrene, polyacrylonitrile, polyethylene, polypropylene, polyester, polyurethane, polyamide, or any combination thereof.

[0026] In one embodiment of the present invention, the water washing unit further comprises a mist eliminator, the mist eliminator is installed on one side of the sprinkler device, and the mist eliminator receives the fluid that has passed through the plurality of fillers.

[0027] In one embodiment of the present invention, the mist eliminator is an aluminosilicate. [Brief explanation of the drawings]

[0028] [Figure 1A] 1 is a structural schematic diagram of an embodiment of the present invention; [Figure 1B] 1 is a schematic diagram of the structure of a filler according to an embodiment of the present invention; [Figure 1C] 1 is a schematic diagram of the structure of a filler according to an embodiment of the present invention; [Figure 1D] 1 is a schematic diagram of the structure of a filler according to an embodiment of the present invention; [Figure 2A] 1 is a schematic diagram of a blower unit according to an embodiment of the present invention; [Figure 2B] 1 is a schematic diagram of a blower unit according to an embodiment of the present invention; [Figure 3A]FIG. 4 is a structural schematic diagram of other components according to an embodiment of the present invention; [Figure 3B] FIG. 4 is a structural schematic diagram of other components according to an embodiment of the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0029] The present invention, which has been made in consideration of the above-mentioned problems of the prior art, relates to a microenvironment control system for preventing fogging in a lens unit of an active exposure apparatus, the microenvironment control system comprising: a first filter member for receiving and filtering a fluid; a water cleaning unit for cleaning and filtering the fluid using a sprinkler device and a plurality of fillers, each of which has a plurality of wavy grooves with a predetermined groove angle, stacked so that the fillers intersect according to the groove angle; a drainage device for receiving the liquid that has passed through the fillers; a dehumidification unit for dehumidifying the fluid; and a temperature control unit for controlling the temperature of the fluid. The use of this system solves the problems of conventional systems, such as condensation, temperature and humidity fluctuations, and photochemical contamination, which can damage the system and reduce processing accuracy.

[0030] The present invention will be described in detail below by illustrating the embodiments of the present invention with reference to the drawings. Note that the structural features of the present invention can be embodied in many different embodiments, and should not be construed as being limited to the exemplary embodiments described herein.

[0031] 1A is a structural schematic diagram of one embodiment of the present invention. As shown, this embodiment is the first embodiment, and illustrates a micro-environment control system 1 for preventing fogging of a lens unit of an active-type exposure apparatus, which is installed inside a housing 10. An air inlet 12 and an air outlet 14 are provided at both ends of the housing 10, respectively. The air inlet 12 receives a fluid A1. The micro-environment control system 1 for preventing fogging of a lens unit of an active-type exposure apparatus includes a first filter member 20, a water cleaning unit 30, a dehumidifying unit 40, and a temperature control unit 50.

[0032] Please refer to FIG. 1A again and to FIG. 1B to FIG. 1D. FIG. 1B to FIG. 1D are structural schematic diagrams of a filler according to one embodiment of the present invention. As shown, this embodiment is a first embodiment, in which the first filter member 20 communicates with the air inlet 12 to receive the fluid A1. The first filter member 20 is a member for filtering the fluid A1, and is a filter made of, for example, nylon, polypropylene, or polyester.

[0033] The water cleaning unit 30 includes a sprinkler device 32, a plurality of fillers 34, and a drainage device 36. The water cleaning unit 30 is connected to the first filter member 20. The sprinkler device 32 sprays liquid L1. The plurality of fillers 34 are installed on one side of the sprinkler device 32. The plurality of fillers 34 receive the fluid A1 that has passed through the first filter member 20 and also receive the liquid L1. Each of the plurality of fillers 34 has a plurality of wavy grooves 342. The plurality of wavy grooves 342 of each of the plurality of fillers 34 have a predetermined groove angle θ1 along the groove axis direction (the groove axis direction of the plurality of wavy grooves 342 of each of the plurality of fillers 34 has a predetermined groove angle θ1 with respect to one side of the filler 34). The plurality of fillers 34 are stacked so as to intersect with each other according to the groove angle θ1, and the structures of the plurality of wavy grooves 342 of the plurality of fillers 34 intersect with each other. The drainage device 36 is installed on one side of the plurality of fillers 34, and the drainage device 36 receives the liquid L1 that has passed through the plurality of fillers 34.

[0034] The plurality of fillers 34 receive the fluid A1 and the liquid L1 and mix the fluid A1 and the liquid L1 with each other, thereby filtering out contaminants contained in the fluid A1.

[0035] The dehumidifying unit 40 is in communication with the water cleaning unit 30. In this embodiment, the dehumidifying unit 40 receives the fluid A1 that has passed through the plurality of fillers 34 of the water cleaning unit 30. The dehumidifying unit 40 is used to dehumidify the fluid A1 passing through and control the humidity of the fluid A1. The temperature control unit 50 is in communication with the dehumidifying unit 40 and the exhaust port 14. The temperature control unit 50 receives the fluid A1 that has passed through the dehumidifying unit 40. The temperature control unit 50 is used to control the temperature of the fluid A1 passing through and prevent the fluid A1 from being overcooled or overheated after the dehumidifying unit 40 dehumidifies the fluid A1.

[0036] In one embodiment, the plurality of fillers 34 may have a plurality of wavy grooves 342 on both sides thereof, and the plurality of fillers 34 may be formed into a corrugated plate member, thereby increasing the mixing area of ​​the fluid A1 and the liquid L1.

[0037] In one embodiment, the water washing unit 30 has a housing, and the sprinkler device 32, the plurality of fillers 34, and the drainage device 36 are installed inside the housing of the water washing unit 30.

[0038] 1A to 1D again. As shown, this embodiment is based on the first embodiment described above, and in this embodiment, the groove angle θ1 of the plurality of wavy grooves 342 of each of the plurality of fillers 34 is 30° to 75°, preferably 40° to 60°. The plurality of fillers 34 are stacked crossing each other, and the plurality of wavy grooves 342 of each filler 34 cross at a certain angle.

[0039] In one embodiment, the plurality of fillers 34, 34' are stacked on top of each other. The plurality of wavy grooves 342, 342' of the plurality of fillers 34, 34' have the groove angles θ1, θ1' along the groove axis direction. The plurality of fillers 34 intersect the groove angles θ1, θ1' at a certain angle (see FIG. 1C).

[0040] In one embodiment, the ratio of the amplitude W1 to the wavelength W2 of the wavy grooves 342 of each of the fillers 34 is greater than 0.2 and less than 3.2. For example, when the amplitude W1 of the wavy grooves 342 is 4 mm, the wavelength W2 of the wavy grooves 342 is 7 mm.

[0041] In one embodiment, the plurality of filler materials 34 are selected from polyester, nylon, spandex, or any combination thereof.

[0042] In one embodiment, the plurality of fillers 34 further comprises an antimicrobial additive, the antimicrobial additive comprising an antimicrobial component and polystyrene, polyacrylonitrile, polyethylene, polypropylene, polyester, polyurethane, polyamide, or any combination thereof.

[0043] In one embodiment, the fluid A1 is a gas containing pollutants, such as air outside a factory, and the liquid L1 is a liquid containing water, such as an acidic cleaning solution or an alkaline cleaning solution.

[0044] 2A and 2B are schematic diagrams of a blower unit according to one embodiment of the present invention. As shown, this embodiment is based on the first embodiment described above, and further includes a blower unit 60. The blower unit 60 is used to transport the fluid A1 and create a positive pressure environment in the space area connected to the exhaust port 14. When applied to an optical processing device, it can effectively reduce the amount of gaseous molecular contaminants (AMC) deposited on the surface of optical elements.

[0045] In this embodiment, the air blowing unit 60 is installed between the temperature control unit 50 and the exhaust port 14. The air blowing unit 60 is in communication with the temperature control unit 50 and receives the fluid A1 that has passed through the temperature control unit 50. The air blowing unit 60 then sends the fluid A1 out of the exhaust port 14 (see FIG. 2A).

[0046] 2A and 2B again. As shown, this embodiment is based on the above-described first embodiment, and in this embodiment, the air blowing unit 60 is installed between the first filter member 20 and the water cleaning unit 30. The air blowing unit 60 communicates with the first filter member 20 and receives the fluid A1 that has passed through the first filter member 20. The air blowing unit 60 transports the fluid A1 to the water cleaning unit 30.

[0047] In each of the above-described embodiments of the blower unit 60, the blower unit 60 may be a combination of multiple blowers.

[0048] 3A and 3B are structural schematic diagrams of other components according to an embodiment of the present invention. As shown, this embodiment is based on the above-described embodiments, and in this embodiment, the dehumidifying unit 40 further includes a humidity sensor 42 and an evaporator 44. The evaporator 44 is installed on one side of the humidity sensor 42. The humidity sensor 42 detects the humidity of the fluid A1 passing through it and adjusts the dehumidifying capacity of the evaporator 44 accordingly.

[0049] The temperature control unit 50 further includes a temperature sensor 52 and a heat exchanger 54. The heat exchanger 54 is installed on one side of the temperature sensor 52. The temperature sensor 52 detects the temperature of the fluid A1 passing through it and adjusts the cooling or heating capacity of the heat exchanger 54 accordingly.

[0050] Please refer to Figures 3A and 3B. As shown, this embodiment is based on the above-mentioned embodiments, and further includes a second filter member 70. The second filter member 70 is in communication with the exhaust port 14. The second filter member 70 receives and filters the fluid A1, and filters the fluid A1 passing through it, thereby further reducing the amount of contaminant particles in the fluid A1 and removing other contaminants generated by the above-mentioned units.

[0051] In one embodiment, the second filter member 70 may be a chemical filter material and a high efficiency air filter (HEPA).

[0052] Please refer to Figures 3A and 3B. As shown, this embodiment is based on the above-mentioned embodiments, and in this embodiment, the water cleaning unit 30 further includes a mist eliminator 38. The mist eliminator 38 is installed on one side of the sprinkler device 32. The mist eliminator 38 receives the fluid A1 that has passed through the plurality of fillers 34 and prevents the mist of the liquid L1 from flowing out of the water cleaning unit 30 and contaminating downstream equipment or the manufacturing side.

[0053] In one embodiment, the mist eliminator 38 may further be the same as the plurality of fillers 34, and may be provided with wavy grooves. The structure thereof is the same as the wavy grooves 342 of each of the plurality of fillers 34, and therefore, detailed description thereof will be omitted here.

[0054] In one embodiment, the mist eliminator 38 is made of aluminosilicate (Al x Si y In this case, when x=1, y=1, 2, 3, 4, z=3, 6, 8, 10, and when x=2, y=1, 2, z=5, 6, 7, 9. Furthermore, the aluminosilicate of the mist eliminator 38 is AlSiO3, AlSi2O6, AlSi3O8, AlSiO2, 10 , Al2SiO5, Al2SiO6, Al2Si2O6, Al2Si2O7, or Al2Si2O9.

[0055] In each of the above-described embodiments, the micro-environment control system 1 for preventing fogging of a lens unit of an active exposure apparatus can maintain the efficiency of removing gaseous molecular contaminants for a long period of time. A comparison of the NH3 filtration performance of the micro-environment control system 1 for preventing fogging of a lens unit of an active exposure apparatus and the prior art is shown in Table 1 below.

[0056] Table (1) Differences in NH3 removal efficiency maintenance performance compared to conventional technology JPEG0003252979000002.jpg62139

[0057] The comparison of H2SO4 filtration between the active exposure tool lens unit anti-fogging microenvironment control system 1 and the prior art is shown in Table 2 below.

[0058] Table (2) Differences in H2SO4 removal efficiency maintenance performance compared to conventional technology JPEG0003252979000003.jpg62139

[0059] The comparison of TMS filtration between the active-type exposure tool lens unit anti-fogging microenvironment control system 1 and the prior art is shown in Table 3 below.

[0060] Table (3) Differences in TMS removal efficiency maintenance performance compared to conventional technology JPEG0003252979000004.jpg62139As is clear from the comparison of the long-term removal efficiency between the above and conventional technologies, each of the above-mentioned embodiments can effectively reduce the amount of gas molecule contaminants deposited on the device surface and maintain high removal efficiency over a long period of time.

[0061] In summary, this invention provides an active microenvironment control system for preventing fogging in lens units of exposure tools. It sequentially arranges primary filtration, water cleaning filtration, temperature and humidity control, and final filtration, and uses a blower unit to transport fluids, creating a positive pressure environment in the system's processing area and effectively reducing the accumulation of gaseous molecular contaminants on tool surfaces. This solves the problems of conventional equipment condensation, temperature and humidity fluctuations, and photochemical contamination, resulting in equipment damage and reduced processing accuracy. When applied to exposure tools, this system further solves the problems of gaseous molecular contaminants changing the refractive index and light transmittance of the optical element surfaces of exposure tools, resulting in reduced imaging quality, focal length deviations, and even the impairment of the optical properties of the original high-performance coating layer.

[0062] Therefore, since this invention is truly novel, inventive, and industrially applicable, it meets the patent application requirements of the Patent Act and a patent application will be filed in accordance with the law.

[0063] It should be noted that the above description is merely one embodiment of the present invention and does not limit the scope of the claims of the present invention. Therefore, all equivalent changes and modifications based on the shape, structure, features, and technical ideas described in the claims of the present utility model registration should be included within the scope of the claims of the present utility model registration. [Explanation of symbols]

[0064] 1: Micro-environment control system for preventing fogging of lens units in active exposure equipment 10: Housing 12: Air intake 14: Exhaust port 20: First filter member 30: Water cleaning unit 32: Watering device 34: Filling material 34': Filling material 342: Wavy groove 342': Wavy groove 36: Drainage device 38: Mist Eliminator 40: Dehumidification unit 42: Humidity sensor 44: Evaporator 50: Temperature control unit 52: Temperature sensor 54: Heat exchanger 60: Blower unit 70: Second filter member A1:Fluid L1:Liquid W1: Amplitude W2: Wavelength θ1:Groove angle θ1': Groove angle

Claims

1. 1. A microenvironment control system for preventing fogging of a lens unit of an active exposure apparatus, the microenvironment control system being installed inside a housing, the housing having an intake port and an exhaust port at both ends thereof, the intake port receiving a fluid, a first filter member communicating with the intake port and receiving the fluid, the first filter member being used to filter the fluid; A water washing unit, A sprinkler device that sprays liquid; a plurality of fillers installed on one side of the sprinkler device to receive the fluid that has passed through the first filter member, the plurality of fillers receiving the liquid and mixing the fluid with the liquid, the plurality of fillers each having a plurality of wavy grooves, the groove axes of the plurality of wavy grooves having a predetermined groove angle, and the plurality of fillers stacked so as to intersect according to the groove angle; a drainage device located on one side of the plurality of fillers to receive the liquid that has passed through the plurality of fillers; a water cleaning unit comprising: a dehumidification unit communicating with the water washing unit, receiving the fluid that has passed through the plurality of fillers, and dehumidifying the fluid that passes through; a temperature control unit communicating with the dehumidifying unit and the exhaust port, receiving the fluid that has passed through the dehumidifying unit, and controlling the temperature of the fluid passing through; A microenvironment control system for preventing fogging of a lens unit of an active exposure apparatus, comprising:

2. 2. The micro-environment control system for preventing fogging of a lens unit of an active exposure apparatus according to claim 1, further comprising a blower unit for transporting the fluid received by the micro-environment control system for preventing fogging of a lens unit of an active exposure apparatus.

3. 3. The microenvironment control system for preventing fogging of a lens unit in an active exposure apparatus according to claim 2, wherein the air blowing unit is in communication with the temperature control unit and receives the fluid that has passed through the temperature control unit.

4. 3. A microenvironment control system for preventing fogging of an active exposure apparatus lens unit as described in claim 2, wherein the blowing unit is connected to the first filter member and receives the fluid that has passed through the temperature control unit, and the blowing unit transports the fluid to the water cleaning unit.

5. 2. The microenvironment control system for preventing fogging of an active exposure apparatus lens unit as described in claim 1, wherein the fluid is a gas containing contaminants, the liquid contains water, and the first filter member is a filter made of nylon, polypropylene, or polyester.

6. 2. The micro-environment control system for preventing fogging of a lens unit of an active exposure apparatus according to claim 1, wherein the dehumidifying unit further comprises a humidity sensor and an evaporator, the evaporator being installed on one side of the humidity sensor.

7. 2. The micro-environment control system for preventing fogging of a lens unit of an active exposure apparatus according to claim 1, wherein the temperature control unit further comprises a temperature sensor and a heat exchanger, the heat exchanger being installed on one side of the temperature sensor.

8. 2. The microenvironment control system for preventing fogging of a lens unit of an active exposure apparatus according to claim 1, further comprising a second filter member communicating with the exhaust port and receiving and filtering the fluid.

9. 9. The microenvironment control system for preventing fogging of a lens unit of an active exposure apparatus according to claim 8, wherein the second filter member is a chemical filter material or a high efficiency air filter (HEPA).

10. 2. A microenvironment control system for preventing fogging in an active exposure apparatus lens unit, as described in claim 1, wherein the groove angle of the plurality of wavy grooves of each of the plurality of fillers is 30° to 75°, and the ratio of the amplitude to wavelength of the plurality of wavy grooves of each of the plurality of fillers is greater than 0.2 and less than 3.

2.

11. 2. The microenvironment control system for preventing fogging of a lens unit of an active exposure apparatus according to claim 1, wherein the plurality of filler materials are selected from polyester, nylon, spandex, or any combination thereof.

12. 2. The microenvironment control system for preventing fogging of a lens unit of an active exposure apparatus according to claim 1, wherein the plurality of fillers are polyester, nylon, spandex, or any combination thereof.

13. 13. The microenvironment control system for preventing fogging of an active exposure apparatus lens unit according to claim 12, wherein the plurality of fillers further comprise an antibacterial additive, the antibacterial additive comprising an antibacterial component and polystyrene, polyacrylonitrile, polyethylene, polypropylene, polyester, polyurethane, polyamide, or any combination thereof.

14. 2. The microenvironment control system for preventing fogging of an active exposure apparatus lens unit according to claim 1, wherein the water cleaning unit further includes a mist eliminator, the mist eliminator being installed on one side of the water spray device, and the mist eliminator receiving the fluid that has passed through the plurality of filling materials.

15. 15. The microenvironment control system for preventing fogging of a lens unit of an active type exposure apparatus according to claim 14, wherein the mist eliminator is an aluminosilicate.

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