Gripper Changer
The gripper exchange device automates the AMR gripper replacement process using a cam claw and support structure to quickly align and secure new grippers, addressing the inefficiencies of conventional methods and improving wafer handling efficiency.
Patent Information
- Application Number
- JP2025003618U
- Authority / Receiving Office
- JP · JP
- Patent Type
- Utility models
- Current Assignee / Owner
- Priority Date
- 2025-01-23
- Filing Date
- 2025-10-21
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2035-10-21
Smart Images
Figure 0003254260000001_ABST
Abstract
Description
[Technical Field]
[0001] The present invention relates to the technical field of wafer transport devices, and more particularly to gripper exchange devices. [Background technology]
[0002] An autonomous mobile robot (AMR) is a general term for warehouse robots that can autonomously determine their positioning and travel path. AMRs are currently widely used in wafer manufacturing processes. However, most commercially available AMRs for wafer handling use non-replaceable grippers, making them unable to handle today's complex operational environments. Some manufacturers have therefore begun to adopt an automatically replaceable connection structure between the AMR's robot arm and gripper, making them detachable. This system uses a "connecting pin" at the connection point between the robot arm and gripper. When replacing a gripper, an operator first pushes in the connecting pin to remove the existing gripper from the robot arm. The operator then aligns the new gripper with the robot arm, pushes in the connecting pin again to connect it, and finally releases the connecting pin to complete the installation. However, this replacement method requires time and effort, which reduces wafer handling efficiency. Summary of the Invention
[0003] The present invention aims to solve at least one of the above problems, and therefore provides a gripper exchange device that reduces the time and labor required for gripper exchange.
[0004] The gripper changer of the present invention includes a support base, a cam claw, an adjustment member, and a drive member. The support base is provided with at least two sets of holding structures for holding the grippers. The cam pawl has a pressing surface. The adjustment member is connected to the cam pawl. The drive member is connected to the adjustment member, and during the gripper replacement operation, the adjustment member is driven to move the cam claw between different holding structures and further to approach and / or press the connecting pin at the connection between the gripper-mounted machine and the gripper. When using this gripper exchange device to replace the gripper of an AMR, the AMR first moves to its designated position and prepares for the exchange. The gripper-mounting machine then moves the existing gripper above the designated holding structure so that it can be dropped correctly onto the holding structure. Next, the drive member drives the adjustment member, bringing the cam claw closer to the connecting pin of the connection section and pressing the pressing surface against the connecting pin. This releases the connection between the existing gripper and the gripper-mounting machine, allowing the existing gripper to drop onto the holding structure. The gripper-mounting machine then moves above the holding structure where the new gripper is located and lowers it to align it. Next, the drive member drives the adjustment member, bringing the cam claw closer to the connection section between the new gripper and the gripper-mounting machine and pressing the pressing surface against the connecting pin, ensuring a secure connection between the new gripper and the gripper-mounting machine. Finally, the cam claw moves away from the connecting pin, completing the installation of the new gripper. This allows for quick gripper exchange, shortening exchange time and improving wafer transport efficiency.
[0005] In the above-described embodiment of the gripper changer, the cam claw includes a main shaft and two claws, each of which is rotatably connected to the main shaft and has the pressing surface, and the two pressing surfaces are arranged opposite to each other. In the above-described embodiment of the gripper exchange device, the pressing surface is provided with a positioning protrusion, which extends along the width direction of the pressing surface. In the above embodiment of the gripper exchange device, the holding structure includes at least two support posts and at least two receiving holes that penetrate the support base. The support pillar supports the gripper, and the accommodation hole accommodates the gripper. In the above-described embodiment of the gripper changer, the support base has a through-hole formed therein, and the support column is threadably connected to the through-hole. The support column has a support surface and an adjustment handle at each end protruding from the through-hole. In the above-described embodiment of the gripper exchange device, the support column includes a column body, an elastic member, an adjustment rod, and a support plate. The column body has an adjustment hole formed therethrough along its axial direction, and the adjustment rod is threadably connected to the adjustment hole. Both ends of the elastic member are connected to the support plate and the adjustment rod, respectively. The support plate is detachably connected to the elastic member, and when the support plate is not supporting a gripper, a gap exists between the support plate and the pillar. In the above-described embodiment of the gripper exchange device, a slide groove is provided on the inner wall of the receiving hole, and a slide plate is slidably disposed in the slide groove to at least partially cover the receiving hole. In the above-described embodiment of the gripper exchange device, a first sensor is provided on the support base and disposed between support columns belonging to the same holding structure, and a second sensor is provided on at least one of the support columns in the same holding structure and detects whether a gripper is installed on the holding structure. In the above-described embodiment of the gripper exchange device, the connecting pin is provided on the gripper-mounted machine. During the process of connection or disconnection between the gripper-mounted machine and the gripper, the cam claw always presses the connecting pin. In the above-described embodiment of the gripper exchange device, the adjustment member is attached to a side surface of the support base, and further includes a first adjustment unit, a second adjustment unit, and a third adjustment unit connected in sequence. The first adjustment unit moves the cam claw in a first horizontal direction. The second adjustment unit moves the cam claw in a vertical direction. The third adjustment unit moves the cam claw in a second horizontal direction.
[0006] The one or more embodiments of the present invention may provide one or more of the following beneficial effects. When replacing an AMR gripper, the AMR first moves to its designated position in the equipment and prepares for the replacement. The gripper-mounting machine then moves the existing gripper above the designated holding structure so that it can be dropped correctly onto the holding structure. Next, the drive member drives the adjustment member, bringing the cam claw close to the connecting pin of the connection section and pressing the pressing surface against the connecting pin. This releases the connection between the existing gripper and the gripper-mounting machine, allowing the existing gripper to drop onto the holding structure. The gripper-mounting machine then moves above the holding structure where the new gripper is located and lowers it to align it. Next, the drive member drives the adjustment member, bringing the cam claw close to the connection section between the new gripper and the gripper-mounting machine and pressing the pressing surface against the connecting pin, ensuring a secure connection between the new gripper and the gripper-mounting machine. Finally, the cam claw moves away from the connecting pin, completing the installation of the new gripper. This allows for quick gripper replacement, shortening replacement time and improving wafer transfer efficiency. Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. [Brief explanation of the drawings]
[0007] The disclosure of the present invention can be more easily understood by referring to the accompanying drawings. As will be appreciated by those skilled in the art, these drawings are for illustrative purposes only and do not limit the scope of protection of the present invention. In addition, like reference numerals in the drawings indicate like elements. [Figure 1] FIG. 1 is a schematic diagram of a gripper exchange device according to an embodiment of the present invention. [Figure 2] FIG. 2 is an enlarged view of part A in FIG. [Figure 3] FIG. 3 is a cross-sectional view of a support column according to an embodiment of the present invention. [Figure 4] FIG. 4 shows the cooperation between the slide plate and the receiving hole according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION
[0008] Hereinafter, several embodiments of the present invention will be described with reference to the accompanying drawings. It will be understood by those skilled in the art that these embodiments are intended to illustrate the technical idea of the present invention, and are not intended to limit the scope of protection of the present invention.
[0009] Conventional gripper replacement methods require time and effort, hindering wafer transfer efficiency. Therefore, this invention proposes a new gripper replacement device. This device includes a cam claw, a support base, an adjustment member, and a drive member. When replacing the gripper of an AMR, the AMR first moves to a predetermined position in this device and prepares for the replacement. Then, the gripper-equipped machine moves the existing gripper above the predetermined holding structure so that the existing gripper can be properly dropped onto the holding structure. Next, the drive member drives the adjustment member, bringing the cam claw close to the connecting pin of the connection part and pressing the pressing surface against the connecting pin. This releases the connection between the existing gripper and the gripper-equipped machine, allowing the existing gripper to drop onto the holding structure. The gripper-equipped machine then moves above the holding structure where the new gripper is located and lowers it to align it. Next, the drive member drives the adjustment member, bringing the cam claw close to the connection part between the new gripper and the gripper-equipped machine and pressing the pressing surface against the connecting pin, ensuring a secure connection between the new gripper and the gripper-equipped machine. Finally, the cam claw is released from the connecting pin, completing the installation of the new gripper. This allows the gripper to be replaced quickly, shortening the replacement time and improving wafer transport efficiency.
[0010] The present invention will be described in detail below with reference to examples. As shown in FIGS. 1 to 4, the gripper exchange device of this embodiment includes a cam claw 1, a support base 2, an adjustment member 3, and a drive member. The cam claw 1 has a pressing surface 11. The support base 2 is provided with at least two sets of holding structures 21 for holding the gripper. The adjustment member 3 is connected to the cam claw 1, and the drive member is connected to the adjustment member 3. During the gripper replacement operation, the drive member drives the adjustment member 3 to move the cam claw 1 between different holding structures 21, and further moves the adjustment member 3 closer to and / or presses the connecting pin at the connection between the gripper-mounted machine and the gripper 4. Here, the gripper-equipped machine is generally a structure such as a robot arm. In some embodiments, the cam claw 1 always presses the connecting pin to ensure a reliable connection or complete disengagement during the process of connecting or disengaging between the gripper-equipped machine and the gripper 4. In other embodiments, the cam claw 1 may simply press the connecting pin and then release, thereby achieving connection or disengagement. In this embodiment, the connecting pin is provided on the gripper mounting machine, but in other embodiments it may be provided on the gripper 4. Furthermore, the shape of the cam claw 1 can be V-shaped, and the pressing surface 11 is also V-shaped. However, the shape of the cam claw 1 may be a regular shape such as a U-shape or a W-shape, or an irregular shape. What is important is that the connecting pin can be pressed reliably. Furthermore, by making the support base 2 a rectangular plate as a whole, it is possible to stably support the gripper 4 and arrange related structures. In this embodiment, a support column with casters is provided below the support base 2 to make it movable. In some embodiments, the adjustment member 3 may be a mechanical device, such as a multi-axis mechanical arm or a multi-axis moving platform, that allows the gripper 4 to move in multiple directions. 1, the adjustment member 3 is attached to the side of the support base 2, and further includes a first adjustment unit 31, a second adjustment unit 32, and a third adjustment unit 33 connected in sequence. The first adjustment unit 31 moves the cam claw 1 in a first horizontal direction. The second adjustment unit 32 moves the cam claw 1 in a vertical direction. The third adjustment unit 33 moves the cam claw 1 in a second horizontal direction.
[0011] In this embodiment, the first adjustment unit 31 and the second adjustment unit 32 are both air slides, and the third adjustment unit 33 is an air cylinder. The first adjustment unit 31 is arranged in the length direction of the support base 2, and the second adjustment unit 32 is arranged in the height direction of the support base 2. In addition, the housing of the second adjustment unit 32 is connected to the slide base of the first adjustment unit 31, the housing of the third adjustment unit 33 is connected to the slide base of the second adjustment unit 32, and the cam claw 1 is connected to the air cylinder shaft of the third adjustment unit 33. Furthermore, in this embodiment, the first horizontal direction refers to the length direction of the support base 2, and the second horizontal direction refers to the width direction of the support base 2. Therefore, the first adjustment unit 31, the second adjustment unit 32, and the third adjustment unit 33 make it possible to move the cam claw 1 in three-dimensional space. Correspondingly, the driving member includes a driving mechanism such as a compressor, a motor, or an air pump, and drives the first adjustment unit 31, the second adjustment unit 32, and the third adjustment unit 33. Specifically, when replacing the gripper 4 of the AMR, the AMR first moves to a designated position in this device and prepares for replacement. Then, the gripper-mounting machine (robot arm) moves the existing gripper 4 above the designated holding structure so that the existing gripper 4 is dropped correctly onto the holding structure. Next, the drive member drives the adjustment member 3, bringing the cam claw 1 close to the connecting pin of the connection section and pressing the pressing surface 11 against the connecting pin. This releases the connection between the existing gripper 4 and the gripper-mounting machine, and the existing gripper 4 drops onto the holding structure 21. The gripper-mounting machine then moves above the holding structure 21 where the new gripper 4 is placed and lowers it to align it. Next, the drive member drives the adjustment member 3, bringing the cam claw 1 close to the connection section between the new gripper 4 and the gripper-mounting machine and pressing the pressing surface 11 against the connecting pin, securely connecting the new gripper 4 to the robot arm. Finally, the cam claw 1 is released from the connecting pin, completing the installation of the new gripper 4. This allows the gripper 4 to be replaced quickly, shortening the replacement time and improving wafer transport efficiency. In some embodiments, as shown in Figure 2, the cam pawl 1 includes a main shaft 12 and two pawls 13. The pawls 13 are rotatably connected to the main shaft 12 and each have a pressing surface 11, and the two pressing surfaces 11 are arranged opposite each other. Specifically, when actually replacing the gripper 4, the actual position of the connecting pin may differ due to dimensional differences in the gripper 4 or other structural influences. In this case, by adjusting the angle of the two claws 13, the pressing position of the connecting pin by the pressing surface 11 can be corrected, thereby improving the adaptability of the cam claw 1. In some embodiments, as shown in Fig. 2, a positioning protrusion 131 is provided on the pressing surface 11. The positioning protrusion 131 extends along the width direction of the pressing surface 11. This reduces the possibility that the cam claw 1 will exceed the intended position during the pressing operation, and prevents the cam claw 1 from getting caught in the connecting pin and becoming unable to be released. In this embodiment, the cross-sectional shape of the positioning protrusion 131 is arc-shaped. 1 and 3, the support structure includes at least two support posts 211 and at least two receiving holes 212 extending through the support base. The support posts 211 support the grippers 4, and the receiving holes 212 receive the grippers 4.
[0012] Here, in order to stably support the gripper 4, at least two support pillars 211 are provided for a single gripper 4. Similarly, at least two accommodation holes 212 for accommodating a single gripper 4 are also provided, and are distributed around the corresponding pair of support pillars 211. The support pillars 211 can stably support the housing of the gripper 4, preventing unnecessary collisions and damage. In addition, the accommodation holes 212 can accommodate a portion of the long gripper 4 downward, preventing damage and enabling effective use of the space below the support base 2, thereby improving space efficiency. The number of support columns 211 included in each support column group 211 may be the same or different, and the arrangement positions of the support columns 211 may also be the same or different. Specifically, they are set according to the shape and size of the gripper 4. In some embodiments, the support base 2 is provided with a through-hole 23, and the support column 211 is screwed into the mounting hole 23. A support surface and an adjustment handle 24 are provided on each end of the support column 211 protruding from the mounting hole 23. By rotating the adjustment handle 24, the user can adjust the height at which the support column 211 protrudes from the support base 2, thereby adapting to grippers 4 of different specifications and allowing the support surface to be properly attached to the gripper 4. 3 , the support column 211 includes a pillar body 2111, an elastic member 2112, an adjustment rod 2113, and a support plate 2114. The pillar body 2111 has an adjustment hole 2115 formed therethrough along its axial direction, and the adjustment rod 2113 is threadably connected to the adjustment hole 2115. Both ends of the elastic member 2112 are connected to the support plate 2114 and the adjustment rod 2113, respectively. The support plate 2114 is detachably connected to the elastic member 2112, and when the support plate 2114 is not supporting the gripper 4, a gap exists between the support plate 2114 and the pillar body 2111.
[0013] In this embodiment, the elastic member 2112 is a coil spring. Specifically, when there is a slight inclination on the contact surface between the gripper 4 and the support column 211, the height of the support plate 2114 can be finely adjusted by rotating the adjustment rod 2113, thereby enabling more stable support of the gripper 4. Furthermore, when the gripper 4 falls onto the support plate 2114, the elastic member 2112 is compressed, thereby absorbing the impact and enabling stable support of the gripper 4. Furthermore, in this embodiment, in order to make it easier to adjust the support plate 2114 and the pillar 2111 via the adjustment handle 24, the adjustment handle 24 and the pillar 2111 are connected by a plug-in method. This allows the user to quickly attach and detach the adjustment handle 24 from the pillar 2111. That is, when adjusting the position of the pillar 2111 (support pillar 211), the adjustment handle 24 is connected to the pillar 2111, and when adjusting the position of the support plate 2114, the adjustment handle 24 is detached from the pillar 2111. 4 , a slide groove 2121 is provided on the inner wall of the receiving hole 212, and a slide plate 2122 is slidably disposed in the slide groove 2121. The slide plate 2122 is for at least partially covering the receiving hole 212. By sliding the slide plate 2122, the cross-sectional size of the receiving hole 212 can be adjusted to allow the gripping portion of the gripper 4 to pass through appropriately, thereby reducing the possibility that the gripper 4 installed on the holding structure 21 will tip over due to contact. In some embodiments, a rubber layer is provided on the upper side of the slide plate 2122. This can reduce damage if the gripping portion of the gripper 4 accidentally hits the slide plate 2122. In some embodiments, a first sensor is provided on the support base 2, and the first sensor is arranged between the support columns 211 belonging to the same holding structure 21. In addition, a second sensor is provided on at least one support column 211 in the same holding structure 21, and the second sensor detects whether a gripper is placed on the holding structure 21. In this embodiment, both the first sensor and the second sensor are optical sensors. The first sensor can instantly detect whether the gripper 4 is positioned above the holding structure 21, and the second sensor can instantly detect whether the gripper 4 is actually placed on the holding structure 21.
[0014] In the description herein, references to the terms "one embodiment," "some embodiments," "example," "embodiment," "some examples," etc., mean that the specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. Illustrative references to these terms herein do not necessarily refer to the same embodiment or example. Furthermore, the specific described feature, structure, material, or characteristic may be used in any appropriate combination in any one or more embodiments or examples. Furthermore, terms such as "first" and "second" are used merely for convenience of description and do not indicate the degree of importance or limit or imply the number of technical features. Therefore, elements followed by limitations such as "first" or "second" are to be interpreted as including at least one of the relevant features, either explicitly or implicitly. In the description of the present invention, "plurality" includes at least two (e.g., two or three), unless otherwise clearly limited. Although the present invention has been described and illustrated in detail, it should be understood that these examples are merely illustrative and are not intended to limit the scope of the present invention. Those skilled in the art may make changes, modifications, substitutions, and variations to the above examples within the scope of the present invention. [Explanation of symbols]
[0015] 1 Cam claw 11 Pressing surface 12 spindle 13 Nails 131 Positioning protrusion 2 Support stand 21 Retention structure 211 Support column 2111 Column 2112 Elastic member 2113 Adjustment rod 2114 Support plate 2115 Adjustment hole 212 Receiving hole 2121 Slide groove 2122 Slide plate 23 Mounting hole 24 Adjustment handle 3 Adjustment parts 31 1st adjustment section 32 Second adjustment section 33 Third adjustment section 4 Grippers
Claims
1. A gripper exchange device including a support base, a cam claw, an adjustment member, and a drive member, The support base is provided with at least two or more sets of holding structures for holding the grippers, The cam claw has a pressing surface, The adjustment member is connected to a cam claw; The driving member is connected to the adjusting member, and in a gripper replacement operation, the adjusting member is driven to move the cam claw between different holding structures, and further to approach and / or press a connecting pin at a connection portion between the gripper-mounted machine and the gripper. A gripper exchange device comprising:
2. 2. The gripper exchange device according to claim 1, wherein the cam claw includes a main shaft and two claws, the claws are rotatably connected to the main shaft, each of the claws has the pressing surface, and the two pressing surfaces are arranged opposite to each other.
3. 3. The gripper exchange device according to claim 2, wherein the pressing surface is provided with a positioning protrusion, the positioning protrusion extending along the width direction of the pressing surface.
4. the support structure includes at least two support posts and at least two receiving holes extending through the support base; 2. The gripper exchange device according to claim 1, wherein the support column supports the gripper, and the accommodation hole accommodates the gripper.
5. 5. The gripper exchange device according to claim 4, wherein the support base is provided with a through-hole, the support column is threadably connected to the mounting hole, and the support column is provided with a support surface and an adjustment handle at each end protruding from the mounting hole.
6. The support column includes a column body, an elastic member, an adjustment rod, and a support plate, the column body has an adjustment hole formed therethrough along its axial direction, the adjustment rod is screwed into the adjustment hole, and both ends of the elastic member are connected to the support plate and the adjustment rod, respectively; 5. The gripper exchange device according to claim 4, wherein the support plate is detachably connected to the elastic member, and when the support plate is not supporting a gripper, a gap exists between the support plate and the pillar.
7. 5. The gripper exchange device according to claim 4, wherein a slide groove is provided on an inner wall of the accommodation hole, a slide plate is slidably disposed within the slide groove, and the slide plate is adapted to at least partially cover the accommodation hole.
8. 5. The gripper exchange device according to claim 4, wherein a first sensor is provided on the support base, the first sensor being arranged between support columns belonging to the same holding structure, and a second sensor is provided on at least one of the support columns in the same holding structure, and the second sensor detects whether a gripper is installed on the holding structure.
9. the connecting pin is provided on the gripper-mounted machine; 2. The gripper exchange device according to claim 1, wherein the cam claw constantly presses the connecting pin during the process of connecting or disconnecting the gripper from the gripper-equipped machine.
10. 2. The gripper exchange device according to claim 1, wherein the adjustment member is attached to a side surface of the support base, and further wherein the adjustment member includes a first adjustment unit, a second adjustment unit, and a third adjustment unit connected in sequence, the first adjustment unit moving the cam claw in a first horizontal direction, the second adjustment unit moving the cam claw in a vertical direction, and the third adjustment unit moving the cam claw in a second horizontal direction.