Solid precursor heating device for induction heating

Abstract

A solid precursor heating device for induction heating is provided. [Solution] The device comprises a bottom plate (11), an outer ring wall (12), a lid (13), and an exhaust pipe (16), the bottom plate and the outer ring wall defining an internal space (14), the lid being removably attached to the top of the outer ring wall, the exhaust pipe being attached to the lid and communicating with the internal space, a stainless steel cylinder (10) having a magnetic permeability of greater than 1 H / m, and a plurality of vertically stacked trays (20a-20c) removably attached to the internal space, each tray having a loading space, a loading plate (22), an annular edge (23), and a ring (24), the loading space being defined between the loading plate, the annular edge, and the ring.

Description

[Technical Field]

[0001] The present invention relates to a solid precursor heating apparatus for inductive heating to produce vapor phase chemical reagents. [Background technology]

[0002] In industrial applications such as semiconductor manufacturing, gas-phase chemical reagents are used in vapor-utilizing processes and are produced by heating and sublimating solid precursors in a temperature-programmed apparatus.

[0003] In the prior art, a heating device for a solid precursor uses a band heater to heat the cylinder of the heating device, and then the cylinder transfers heat energy to the solid precursor inside to sublimate the solid precursor. However, the conduction heating method consumes a lot of heat energy and has low energy efficiency. Summary of the Invention [Problem to be solved by the invention]

[0004] The main objective of the present invention is to provide a solid precursor heating apparatus with higher energy efficiency. [Means for solving the problem]

[0005] To achieve the above and other objects, the present invention provides a solid precursor heating apparatus, which comprises a bottom plate, an outer annular wall, a lid, and an exhaust pipe, the bottom plate and the outer annular wall defining an internal space, the lid being detachably attached to the top of the outer annular wall, the exhaust pipe being attached to the lid and communicating with the internal space, a stainless steel cylinder (hereinafter referred to as "cylinder") having a magnetic permeability of more than 1 H / m, and a plurality of vertically stacked trays detachably attached to the internal space, each tray comprising a mounting space, a mounting plate, an annular edge, and a ring, the mounting space being connected to the mounting plate. the trays are defined between the annular rim and the ring, the support plate is connected to the bottom of the annular rim and is used to support a solid precursor, the ring is connected to the top of the annular rim and the annular rim is in close contact with the outer annular wall, the lowest tray among the plurality of trays is a bottom tray, the support plate of the bottom tray is solid, and the support plates of the remaining trays except for the bottom tray are supported in contact with the ring of the tray directly below, a plurality of vertically stacked trays; a buffer container having a buffer space fluidly connected to the internal space; a pressure gauge provided in the buffer container for sensing the air pressure in the buffer space; and an induction heating device for connecting a signal to the pressure gauge and for increasing the temperature of the cylinder through induction heating in accordance with the air pressure sensed by the pressure gauge. [Effects of the Invention]

[0006] The advantage of the present invention is that the provided stainless steel cylinder is suitable for induction heating, and its high magnetic permeability can help improve energy efficiency. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a schematic diagram of an embodiment of the present invention; [Figure 2] 1 is a perspective view of some components according to an embodiment of the present invention; [Figure 3] FIG. 2 is an exploded view of some components according to an embodiment of the present invention; [Figure 4]1 is a cross-sectional view of some components according to an embodiment of the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0008] 1 to 4, one embodiment of the solid precursor heating apparatus for induction heating of the present invention is shown, which includes a cylinder 10, a plurality of vertically stacked trays 20a, 20b, and 20c, a buffer vessel 30, a pressure gauge 40tp, and an induction heating device 50.

[0009] Cylinder 10 comprises a bottom plate 11, an outer annular wall 12, and a lid 13, with bottom plate 11 and outer annular wall 12 defining an interior space 14, lid 13 removably attached to the top of outer annular wall 12, and cylinder 10 further comprising a plurality of fasteners 15 for fastening lid 13 to the top of outer annular wall 12. Cylinder 10 also comprises an exhaust pipe 16 attached to lid 13, communicating with interior space 14, and for discharging vaporized chemical reagent. In a possible embodiment, cylinder 10 is made of stainless steel, and preferably has a magnetic permeability higher than 1 H / m (particularly in the outer annular wall portion), for example, in the range of 1.04 to 1.05 H / m. In one possible embodiment, the stainless steel used may contain the following composition: 1 wt% or less nickel (Ni), 17-20 wt% chromium (Cr), 1.75-2.5 wt% molybdenum (Mo), 0.025 wt% or less carbon (C), 0.035 wt% or less nitrogen (N), a total of about 0.8 wt% titanium (Ti) and niobium (Nb), and the balance iron (Fe). Preferably, the nickel content in the above composition is 0.6 wt% or less, the chromium content is 17.5-19.5 wt%, and the nitrogen content is 0.025 wt% or less. Stainless steel with the above properties has good thermal conductivity and induction heating efficiency.

[0010] The plurality of trays 20a, 20b, 20c are detachably mounted in the internal space 14, and each tray 20a, 20b, 20c has a mounting space 21, a mounting plate 22, an annular edge 23, and a ring 24. The mounting space 21 is defined between the mounting plate 22, the annular edge 23, and the ring 24. The mounting plate 22 is connected to the bottom of the annular edge 23 and is used to mount a solid precursor, such as a tungsten precursor or a molybdenum precursor, which can be vaporized by heat to become a gas-phase chemical reagent. The ring 24 is connected to the top of the annular edge 23, and the annular edge 23 is tightly attached to the outer annular wall 12, allowing the thermal energy of the cylinder 10 to be transferred to the plurality of trays. The lowest tray among the plurality of trays is bottom tray 20c, and the mounting plate 22 of bottom tray 20c is not hollow, and the mounting plates 22 of the remaining trays 20a and 20b, except for bottom tray 20c, are supported by a ring 24 of the tray directly below. The highest tray among the plurality of trays is top tray 20a, and the center of the mounting plate 22 of top tray 20a is hollow. Among the plurality of trays, the tray between the bottom tray 20c and the top tray 20a is at least one intermediate tray 20b (there are multiple intermediate trays in this embodiment), and the center of the loading plate 22 of the intermediate tray 20b has an upright tube 25 that penetrates from the top to the bottom and an inner ring 26, and the inner ring 26 extends radially outward from the top of the upright tube 25. Since the height of the upright tube 25 of each intermediate tray 20b is lower than the height of the annular edge 23, the gas-phase chemical reagent can be sent out from the exhaust pipe 16 to the outside through the passage formed by the upright tube.

[0011] The buffer container 30 has a buffer space 31, which is fluidly connected to the internal space 14, allowing the gas-phase chemical reagent to be supplied from the internal space 14 into the buffer space 31. A pressure gauge 40 is provided in the buffer container 30 and is used to sense the air pressure within the buffer space 31. An induction heating device 50 connects a signal to the pressure gauge 40 and can heat the cylinder 10 by induction heating in response to the sensed air pressure. Specifically, when the sensed air pressure is lower than the required air pressure range, the induction heating device 50 is turned on or its output is increased to directly heat the cylinder, thereby indirectly heating the solid precursor inside the cylinder and supplying more gas-phase chemical reagent. When the sensed air pressure is higher than the required air pressure range, the induction heating device is turned off or its output is reduced to reduce heating to the cylinder and thereby reduce the supply of gas-phase chemical reagent. In this way, the supply air pressure of the gas-phase chemical reagent can be maintained more stably, thereby solving the common control delay problem in the prior art. In addition, compared with the prior art, which always heats the cylinder by conduction, the induction heating used in the present invention also has better energy efficiency. [Explanation of symbols]

[0012] 10 cylinders 11 Bottom plate 12 Outer ring wall 13 Lid 14 Interior Space 15 Fastening device 16 Exhaust pipe 20a, 20b, 20c trays 21 Placement space 22 Loading plate 23 Annular edge 24 Ring 25 Upright tube 26 Inner ring 30 Buffer container 31 Buffer space 40 Pressure Gauge 50 Induction heating device

Claims

1. a stainless steel cylinder comprising a bottom plate, an outer annular wall, a lid, and an exhaust pipe, the bottom plate and the outer annular wall defining an internal space, the lid being detachably attached to a top of the outer annular wall, the exhaust pipe being attached to the lid and communicating with the internal space, the stainless steel cylinder having a magnetic permeability of more than 1 H / m; a plurality of vertically stacked trays, each of which is detachably mounted in the internal space, and each of which comprises a mounting space, a mounting plate, an annular edge, and a ring, the mounting space being defined between the mounting plate, the annular edge, and the ring, the mounting plate being connected to the bottom of the annular edge and used to mount a solid precursor, the ring being connected to the top of the annular edge, and the annular edge being in close contact with the outer ring wall, the lowest tray of the plurality of trays being a bottom tray, the mounting plate of the bottom tray being solid, and the mounting plates of the remaining trays except for the bottom tray being supported by abutting against the ring of the tray directly below; A solid precursor heating device for induction heating, comprising:

2. 2. The solid precursor heating apparatus for induction heating according to claim 1, wherein the uppermost tray among the plurality of trays is a top tray, and the center of the placing plate of the top tray is hollow.

3. 3. The solid precursor heating apparatus for induction heating according to claim 2, wherein the tray between the bottom tray and the top tray among the plurality of trays is at least one intermediate tray, and the center of the placing plate of the intermediate tray has an upright cylinder penetrating from the top to the bottom and an inner ring, the inner ring extends radially outward from the top of the upright cylinder, and the height of the upright cylinder of the at least one intermediate tray is lower than the height of the annular edge of the at least one intermediate tray.

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