Probe measurement structure

Abstract

To provide a probe measurement structure that can reduce material costs and labor costs. [Solution] The probe measurement structure comprises a circuit board 1, a group of first-side probes G1, and a group of second-side probes G2. The circuit board has a first conductive trace 13 and a second conductive trace 14 in a test area 15. The first-side probe has a first end 21 provided inside the test area and connected to the electrode pad 101 of the object under test, and a second end 22 provided outside the test area and connected to the first conductive trace. The first-side probe comprises a plurality of first probes 2. The second-side probe has a third end 31 provided inside the test area and connected to the electrode pad of the object under test, and a fourth end 32 provided outside the test area and connected to the second conductive trace. The second-side probe comprises a plurality of second probes 3. The distance between the first ends of adjacent first probes is smaller than the distance between the second ends. The distance between the third ends of adjacent second probes is smaller than the distance between the fourth ends.

Description

Technical Field

[0001] The present invention relates to a probe measurement structure, and particularly to a probe card structure having a fan-shaped array of signal paths.

Background Art

[0002] In the manufacturing process of integrated circuits, the measurement of electrical characteristics is an important step to confirm the normal operation of the device. For example, when the wafer manufacturing is completed, it is necessary to measure whether the electrical characteristics of the test key on the wafer meet the needs and confirm the reliability of the wafer. Also, for example, after the chip is manufactured, it is necessary to measure whether the electrical characteristics of the electrical contacts (PADs) on the chip meet the needs and confirm the reliability of the chip. Thereby, by discarding defective chips during dicing, the cost associated with subsequent chip packaging can be saved.

[0003] The probes of conventional cantilever probe cards (CPCs) are arranged in parallel, and the electrical characteristics of the object to be measured are measured by the contact between the probes and the electrode pads (test keys or electrical contacts). With the progress of technology and the need for chip miniaturization, the spacing between the electrode pads in the current object to be measured is becoming increasingly narrow. Therefore, it is necessary to arrange the probes of the CPC in a two-layer array or an alternating array, or to directly use MEMS probes for electrical measurement. The former increases the material cost and labor cost, and the latter significantly increases the manufacturing cost of the probes. Therefore, it is an urgent problem to be solved in this field to meet the needs of a micro-pitch with a single-row probe configuration and thereby reduce the material cost and labor cost.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The technical problem that this invention aims to solve is to provide a probe measurement structure that addresses the shortcomings of conventional technology by meeting the need for minute pitch with a single-row probe configuration, thereby reducing material and labor costs. [Means for solving the problem]

[0005] To solve the above-mentioned technical problems, the present invention provides a probe measurement structure. The probe measurement structure comprises a circuit board having a first surface and a second surface opposite to the first surface, a test area provided in an intermediate area of ​​the first surface, the test area further having a plurality of first conductive traces and a plurality of second conductive traces; at least one group of first side probes comprising a plurality of first probes, disposed within the test area of ​​the circuit board and extending from the inside of the test area toward the outside of the test area, provided on the inside of the test area and arranged to be electrically connected to an electrode pad in the object to be measured, and provided on the outside of the test area and arranged to be electrically connected to the first conductive trace in the circuit board; and disposed within the test area of ​​the circuit board and extending from the inside of the test area toward the outside of the test area, the test The device comprises at least one group of second side probes, each having a plurality of second probes, the plurality of first probes being identical in shape and length, any two adjacent first probes having a distance between their first ends less than the distance between their second ends, the plurality of second probes being identical in shape and length, any two adjacent second probes having a distance between their third ends less than the distance between their fourth ends, and the first ends of the at least one group of first side probes and the third ends of the at least one group of second side probes facing each other.

[0006] To solve the above-mentioned technical problems, the present invention further provides another probe measurement structure. The probe measurement structure has a first surface and a second surface opposite to the first surface, a test area is provided in the intermediate area of ​​the first surface, the test area further has a plurality of first conductive traces and a plurality of second conductive traces, each of the first conductive traces has a first end and a second end, there is a first gap between the first ends of any two adjacent first conductive traces, there is a second gap between the second ends of any two adjacent first conductive traces, and the second gap is larger than the first gap, each of the second conductive traces has a third end and a fourth end, there is a third gap between the third ends of any two adjacent second conductive traces, and the fourth ends of any two adjacent second conductive traces A circuit board is provided with a fourth interval in between, the third interval and the first interval being equal, the fourth interval and the second interval being equal, and the third end and the first end facing each other; a plurality of first probes provided within the test area of ​​the circuit board, each of which one end of the first probe is connected to a first conductive trace and the other end is electrically connected to an electrode pad in the object under test; a plurality of second probes provided within the test area of ​​the circuit board, each of which one end of the second probe is connected to a second conductive trace and the other end is electrically connected to an electrode pad in the object under test.

[0007] To solve the above-mentioned technical problems, the present invention further provides another probe measurement structure. The probe measurement structure comprises a circuit board having a first surface and a second surface opposite to the first surface, a test area provided in an intermediate area of ​​the first surface, the test area further having a plurality of first conductive traces and a plurality of second conductive traces; at least one group of first side probes comprising a plurality of first probes, disposed within the test area of ​​the circuit board and extending from the inside of the test area toward the outside of the test area, provided on the inside of the test area and arranged to be electrically connected to an electrode pad in the object to be measured, and provided on the outside of the test area and arranged to be electrically connected to the first conductive trace in the circuit board; and disposed within the test area of ​​the circuit board and extending from the inside of the test area toward the outside of the test area, the test area The device comprises at least one group of second side probes, each having a plurality of second probes, the plurality of first probes being identical in shape and length, any two adjacent first probes having a distance between their first ends less than the distance between their second ends, and the plurality of second probes being identical in shape and length, any two adjacent second probes having a distance between their third ends less than the distance between their fourth ends, and at least a portion of the first end of the at least one group of first side probes and the third end of the at least one group of second side probes facing each other. [Effects of the Invention]

[0008] A beneficial effect of the present invention is that the probe measurement structure according to the present invention comprises a circuit board, at least one group of first-side probes, and at least one group of second-side probes. The circuit board has a first surface and a second surface, a test area provided in an intermediate area of ​​the first surface, and the test area further has a plurality of first conductive traces and a plurality of second conductive traces. At least one group of first-side probes is arranged within the test area of ​​the circuit board and extends from the inside of the test area to the outside of the test area. At least one group of first-side probes has a first end provided on the inside of the test area and arranged to be electrically connected to an electrode pad in the object under test, and a second end provided on the outside of the test area and arranged to be electrically connected to a first conductive trace in the circuit board. At least one group of first-side probes comprises a plurality of first probes. At least one group of second-side probes is arranged within the test area of ​​the circuit board and extends from the inside of the test area to the outside of the test area. At least one group of second-side probes has a third end located inside the test area and positioned to be electrically connected to an electrode pad on the object under test, and a fourth end located outside the test area and positioned to be electrically connected to a second conductive trace on a circuit board. At least one group of second-side probes comprises a plurality of second probes. The plurality of first probes are identical in shape and length, and any two adjacent first probes have a first end spacing smaller than the second end spacing. The plurality of second probes are identical in shape and length, and any two adjacent second probes have a third end spacing smaller than the fourth end spacing. The first end of at least one group of first-side probes and the third end of at least one group of second-side probes are positioned opposite each other. The first and second-side probes of this invention can form a fan-shaped arrangement, meeting the need for a small pitch in a single-row probe configuration, thereby reducing material and labor costs.

[0009] To further understand the features and technical details of this invention, please refer to the detailed description and accompanying drawings below. These descriptions and drawings are illustrative of this invention and do not limit it. [Brief explanation of the drawing]

[0010] [Figure 1] This is an exploded perspective view of the probe measurement structure of the first embodiment according to the present invention. [Figure 2] This is an assembled perspective view of the probe measurement structure according to the first embodiment of the present invention. [Figure 3] This is a perspective view of the probe assembly of the first embodiment according to the present invention. [Figure 4] This is a plan view of the probe assembly according to the first embodiment of the present invention. [Figure 5] This is a perspective view of a single probe according to the first embodiment of the present invention. [Figure 6] This is an exploded perspective view of the probe measurement structure of the second embodiment according to the present invention. [Figure 7] This is an assembled perspective view of the probe measurement structure according to the second embodiment of the present invention. [Figure 8] This is a perspective view of a probe assembly according to a second embodiment of the present invention. [Figure 9] This is a plan view of a probe assembly according to a second embodiment of the present invention. [Figure 10] This is a perspective view of a single probe according to a second embodiment of the present invention. [Figure 11] This is a plan view of a probe assembly according to the third embodiment of the present invention. [Figure 12] This is a plan view of the probe assembly according to the fourth embodiment of the present invention. [Figure 13] This is a plan view of the probe assembly according to the fifth embodiment of the present invention. [Figure 14] This is a plan view of the probe assembly according to the sixth embodiment of the present invention. [Modes for carrying out the invention]

[0011] The embodiments disclosed herein will be described below using specific examples. Those skilled in the art will be able to understand the advantages and effects of the present invention from the information disclosed herein. The present invention can be implemented or applied through other different specific embodiments, and the various detailed descriptions herein can be modified and changed in various ways based on different perspectives and uses, without departing from the spirit of the present invention. It should also be noted in advance that the drawings of the present invention are for illustrative purposes only and are not based on actual dimensions. The technical content relating to the present invention will be described in more detail using the following embodiments, but the disclosed content is not intended to limit the scope of protection of the present invention. Furthermore, the term "or" herein should be understood to include any one or more of the items listed in relation to the actual situation.

[0012] [Examples] Refer to Figures 1 and 2. Figure 1 is an exploded perspective view of a probe measurement structure according to the first embodiment of the present invention, and Figure 2 is an assembled perspective view of a probe measurement structure according to the first embodiment of the present invention. The present invention provides a probe measurement structure comprising a circuit board 1, at least one group of first-side probes G1, and at least one group of second-side probes G2.

[0013] The circuit board 1 is a plate, and preferably a circular plate, but the shape of the circuit board 1 is not limited. For example, the circuit board 1 may be a rectangular or other shaped plate. The circuit board 1 has a first surface 11 and a second surface 12 opposite to the first surface 11, and a test area 15 is provided in the intermediate area of ​​the first surface 11, and the test area 15 further has a plurality of first conductive traces 13 and a plurality of second conductive traces 14. The first conductive traces 13 and the second conductive traces 14 are generally made of copper material and their surfaces are covered with an insulating material. The layout of these first conductive traces 13 and these second conductive traces 14 is not particularly limited.

[0014] The at least one group of first side probes G1 is disposed within the test region 15 of the circuit board 1 and extends from the inside of the test region 15 toward the outside of the test region 15. Each first side probe G1 has a first end 21 and a second end 22. The first end 21 is provided inside the test region 15 and is arranged to be electrically connected to the electrode pad 101 on the object to be measured 100. The second end is provided outside the test region 15 and is arranged to be electrically connected to the first conductive trace 13 on the circuit board 1. The at least one group of first side probes G1 includes a plurality of first probes 2. The structure of the first probe 2 is not particularly limited. In this embodiment, the first probe 2 is a plate-shaped probe. In an embodiment, the object to be measured 100 is a wafer, and the electrode pad 101 is a test key on the wafer.

[0015] The at least one group of second side probes G2 is disposed within the test region १5 of the circuit board 1 and extends from the inside of the test region 15 toward the outside of the test region 15. Each second side probe G2 has a third end 31 and a fourth end 32. The third end 31 is provided inside the test region 15 and is arranged to be electrically connected to the electrode pad 101 on the object to be measured 100. The fourth end 32 is provided outside the test region 15 and is arranged to be electrically connected to the second conductive trace 14 on the circuit board 1. The at least one group of second side probes G2 includes a plurality of second probes 3. The structure of the second probe 3 is not particularly limited. In this embodiment, the second probe 3 is a plate-shaped probe.

[0016] In this embodiment, as shown in FIGS. 3 to 5, the plurality of first probes 2 have the same shape and length, and for any two adjacent first probes 2, the distance between the first ends 21 is smaller than the distance between the second ends 22. Specifically, there is a first interval P1 between the first ends 21 of any two adjacent first probes 2, and there is a second interval P2 between the second ends 22 of any two adjacent first probes 2, and the second interval P2 is larger than the first interval P1. In a certain embodiment, the distances between the first ends 21 of any two adjacent first probes 2 are equal, and the distances between the second ends 22 of any two adjacent first probes 2 are also equal.

[0017] In this embodiment, the plurality of second probes 3 have the same shape and length, and for any two adjacent second probes 3, the distance between the third ends 31 is smaller than the distance between the fourth ends 32. Specifically, there is a third interval P3 between the third ends 31 of any two adjacent second probes 3, and there is a fourth interval P4 between the fourth ends 32 of any two adjacent second probes 3, and the fourth interval P4 is larger than the third interval P3. In a certain embodiment, the distances between the third ends 31 of any two adjacent second probes 3 are equal, and the distances between the fourth ends 32 of any two adjacent second probes 3 are also equal. Preferably, the first ends 21 of the at least one group of first side probes G1 and the third ends 31 of the at least one group of second side probes G2 are provided opposite to each other.

[0018] In this embodiment, as shown in FIG. 4, the first ends 21 of the at least one group of first side probes G1 are located on a first straight line L1, and the third ends 31 of the at least one group of second side probes G2 are located on a second straight line L2, and the first straight line L1 and the second straight line L2 are parallel to each other. Preferably, the connecting line of the second ends 22 of the plurality of first probes 2 presents a protruding arc shape, and the connecting line of the fourth ends 32 of the plurality of second probes 3 presents a protruding arc shape.

[0019] In this embodiment, as shown in Figure 4, there is a lateral width W between the first end 21 of the first side probe G1 of at least one group and the third end 31 of the second side probe G2 of at least one group, and the lateral width W is the distance between the first end 21 and the third end 31. The first end 21 of the first side probe G1 of at least one group and the third end 31 of the second side probe G2 of at least one group each have a vertical length L, and the vertical length L is the length in the direction of the connection line between the first end 21 of the multiple first probes 2, and the vertical length L is also the length in the direction of the connection line between the third end 31 of the multiple second probes 3, and the vertical length L is greater than the lateral width W. This makes it possible to concentrate the contact parts of the probes (for example, the first end 21 of the first side probe G1 and the third end 31 of the second side probe G2), reduce the occupied space, and reduce the distance between the probe tips.

[0020] As shown in Figure 5, the first probe 2 and the second probe 3 in this embodiment are plate-shaped probes. The first probe 2 and the second probe 3 each have plate-shaped bodies 23 and 33 and contact portions 24 and 34, respectively. The first end 21 and the second end are provided at opposite ends of the plate-shaped body 23, respectively, and the third end 31 and the fourth end 32 are provided at opposite ends of the plate-shaped body 33, respectively. The contact portions 24 and 34 are provided at the first end 21 and the third end 31, respectively. The contact portions 24 and 34 are arranged to be electrically connected to the electrode pad 101 on the object to be measured 100.

[0021] Refer to Figures 6 and 7. Figure 6 is an exploded perspective view of the probe measurement structure of the second embodiment according to the present invention, and Figure 7 is an assembled perspective view of the probe measurement structure of the second embodiment according to the present invention. This embodiment is generally the same as the first embodiment described above, the only difference being that the first probe 2 and the second probe 3 in this embodiment are cantilever probes, and as shown in Figures 8 to 10, the first end 21 and the second end 22 are provided at opposite ends of the first probe 2, and the third end 31 and the fourth end 32 are provided at opposite ends of the second probe 3.

[0022] Refer to Figures 11 and 12. Figure 11 is a plan view of a probe assembly according to a third embodiment of the present invention, and Figure 12 is a plan view of a probe assembly according to a fourth embodiment of the present invention. In the embodiment disclosed in Figure 11, the plurality of first probes 2 and the plurality of second probes 3 are identical in shape and length, but are not limited thereto. In the embodiment disclosed in Figure 12, the plurality of first probes 2 and the plurality of second probes 3 differ in shape or length.

[0023] Refer to Figure 13. Figure 13 is a plan view of a probe assembly according to a fifth embodiment of the present invention. In this embodiment, the first side probe G1 of at least one group further comprises a plurality of third probes 4, the plurality of third probes 4 having the same shape and length, and any two adjacent third probes 4 having a distance between their first ends 21 that is smaller than the distance between their second ends 22. In this embodiment, the second side probe G2 of at least one group further comprises a plurality of fourth probes 5, the plurality of fourth probes 5 having the same shape and length, and any two adjacent fourth probes 5 having a distance between their third ends 31 that is smaller than the distance between their fourth ends 32. In this embodiment, the plurality of third probes 4 and the plurality of fourth probes 5 have the same shape and length, the plurality of first probes 2 and the plurality of third probes 4 have different shapes and lengths, and the plurality of first probes 2 and the plurality of third probes 4 are arranged alternately. The plurality of second probes 3 and the plurality of fourth probes 5 differ in shape and length, and the plurality of second probes 3 and the plurality of fourth probes 5 are arranged alternately.

[0024] In this embodiment, the first ends 21 of the plurality of first probes 2 and the third ends 31 of the plurality of fourth probes 5 are provided facing each other, and the first ends 21 of the plurality of third probes 4 and the third ends of the plurality of second probes 3 are provided facing each other. Preferably, the plurality of first probes 2 and the plurality of third probes 4 are arranged on the same horizontal plane, and the plurality of second probes 3 and the plurality of fourth probes 5 are arranged on the same horizontal plane. In one embodiment, the distance between the first ends 21 of any two adjacent third probes 4 is equal, and the distance between the second ends 22 of any two adjacent third probes 4 is also equal. In one embodiment, the distance between the third ends 31 of any two adjacent fourth probes 5 is equal, and the distance between the fourth ends 32 of any two adjacent fourth probes 5 is also equal.

[0025] Refer to Figure 14. Figure 14 is a plan view of a probe assembly according to the sixth embodiment of the present invention. In this embodiment, the first ends 21 of the plurality of first probes 2 and the third ends 31 of the plurality of second probes 3 are provided facing each other, and the first ends 21 of the plurality of third probes 4 and the third ends 31 of the plurality of fourth probes 5 are provided facing each other. The plurality of first probes 2 and the plurality of third probes 4 are arranged on the same horizontal plane, and the plurality of second probes 3 and the plurality of fourth probes 5 are arranged on the same horizontal plane.

[0026] In this embodiment, as shown in Figures 13 and 14, the connecting lines of the second ends 22 of the plurality of first probes 2 have a protruding arc shape, the connecting lines of the fourth ends 32 of the plurality of second probes 3 have a protruding arc shape, the connecting lines of the second ends 22 of the plurality of third probes 4 have a protruding arc shape, and the connecting lines of the fourth ends 32 of the plurality of fourth probes 5 have a protruding arc shape.

[0027] In another embodiment of the present invention, the first end 21 of at least one group of first-side probes G1 and the third end 31 of at least one group of second-side probes G2 do not have to be provided facing each other completely. That is, at least a portion of the first end 21 of at least one group of first-side probes G1 and the third end 31 of at least one group of second-side probes G2 are provided facing each other. In other words, the first end 21 of at least one group of first-side probes G1 and the corresponding third end 31 of at least one group of second-side probes G2 may be slightly offset from each other, with only a portion of them facing each other.

[0028] The present invention further provides another probe measurement structure. As shown in Figures 1 to 4, the probe measurement structure comprises a circuit board 1, a plurality of first probes 2, and a plurality of second probes 3. The circuit board 1 has a first surface 11 and a second surface 12 opposite to the first surface 11, and a test area 15 is provided in the intermediate area of ​​the first surface 11, and the test area 15 further has a plurality of first conductive traces 13 and a plurality of second conductive traces 14. Each first conductive trace 13 has a first end 131 and a second end 132, there is a first gap P1 between the first ends 131 of any two adjacent first conductive traces 13, and there is a second gap P2 between the second ends 132 of any two adjacent first conductive traces 13, and the second gap P2 is larger than the first gap P1. Each second conductive trace 14 has a third end 141 and a fourth end 142, with a third gap P3 between any two adjacent second conductive traces 14 and a fourth gap P4 between any two adjacent second conductive traces 14 and their fourth ends 142, the third gap P3 and the first gap P1 being equal, the fourth gap P4 and the second gap P2 being equal, and the third end 141 and the first end 131 facing each other.

[0029] Each first probe 2 is positioned such that one end is connected to a first conductive trace 13 and the other end is electrically connected to an electrode pad 101 on the object 100 under test. Each second probe 3 is positioned such that one end is connected to a second conductive trace 14 and the other end is electrically connected to an electrode pad 101 on the object 100 under test. Preferably, the number of first conductive traces 13 and the number of second conductive traces 14 are the same, and the first conductive traces 13 and the second conductive traces 14 are arranged facing each other.

[0030] [Beneficial effects of the examples] A beneficial effect of the present invention is that the probe measurement structure according to the present invention comprises a circuit board, at least one group of first-side probes, and at least one group of second-side probes. The circuit board has a first surface and a second surface, a test area provided in an intermediate area of ​​the first surface, and the test area further has a plurality of first conductive traces and a plurality of second conductive traces. At least one group of first-side probes is arranged within the test area of ​​the circuit board and extends from the inside of the test area to the outside of the test area. At least one group of first-side probes has a first end provided on the inside of the test area and arranged to be electrically connected to an electrode pad in the object under test, and a second end provided on the outside of the test area and arranged to be electrically connected to a first conductive trace in the circuit board. At least one group of first-side probes comprises a plurality of first probes. At least one group of second-side probes is arranged within the test area of ​​the circuit board and extends from the inside of the test area to the outside of the test area. At least one group of second-side probes has a third end located inside the test area and positioned to be electrically connected to an electrode pad on the object under test, and a fourth end located outside the test area and positioned to be electrically connected to a second conductive trace on a circuit board. At least one group of second-side probes comprises a plurality of second probes. The plurality of first probes are identical in shape and length, and any two adjacent first probes have a first end spacing smaller than the second end spacing. The plurality of second probes are identical in shape and length, and any two adjacent second probes have a third end spacing smaller than the fourth end spacing. The first end of at least one group of first-side probes and the third end of at least one group of second-side probes are positioned opposite each other. The first and second-side probes of this invention can form a fan-shaped arrangement, meeting the need for a small pitch in a single-row probe configuration, thereby reducing material and labor costs.

[0031] The information disclosed above represents only preferred and feasible embodiments of the present invention and does not limit the scope of the utility model claims. Accordingly, all equivalent technical modifications made based on the specifications and drawings of the present invention are included within the scope of the utility model claims. [Explanation of Symbols]

[0032] 1: Circuit board 11: 1st page 12:Second side 13: First conductive trace 131:First end 132:Second end 14: Second conductive trace 141: Third end 142: 4th end 15: Test Area 2: First probe 21:First end 22:Second end 23: Plate-shaped body 24: Contact area 3: Second probe 31: Third end 32: 4th end 33: Plate-shaped body 34: Contact area 4: Third probe 5: Fourth probe P1: First interval P2: 2nd interval P3: Third interval P4: 4th interval W: Horizontal width L: Vertical length L1: 1st straight line L2: Second straight line G1: First side probe G2: Second probe 100: Object to be measured 101: Electrode pads

Claims

1. A circuit board having a first surface and a second surface opposite to the first surface, wherein a test area is provided in an intermediate area of ​​the first surface, and the test area further has a plurality of first conductive traces and a plurality of second conductive traces, A first side probe comprising a plurality of first probes, having a first end provided on the inside of the test area of ​​the circuit board and extending from the inside of the test area toward the outside of the test area, having a second end provided on the outside of the test area and having a second end provided on the outside of the test area and having a plurality of first probes, A second side probe comprising at least one group of second probes, having a third end provided on the inside of the test area of ​​the circuit board and extending from the inside of the test area toward the outside of the test area, having a fourth end provided on the outside of the test area and having a fourth end provided on the outside of the test area and having a second conductive trace on the circuit board, Equipped with, The plurality of first probes are identical in shape and length, and any two adjacent first probes have a distance between their first ends that is smaller than the distance between their second ends. The plurality of second probes are identical in shape and length, and any two adjacent second probes have a distance between their third ends that is smaller than the distance between their fourth ends. The first end of the first side probe of the at least one group and the third end of the second side probe of the at least one group are provided facing each other. A probe measurement structure characterized by the following features.

2. The plurality of first probes and the plurality of second probes are identical in shape and length. The probe measurement structure according to claim 1.

3. The plurality of first probes and the plurality of second probes differ in shape or length. The probe measurement structure according to claim 1.

4. The first side probe of at least one group further comprises a plurality of third probes, the plurality of third probes being identical in shape and length, and any two adjacent third probes having a distance between their first ends that is smaller than the distance between their second ends. The at least one group of second side probes further comprises a plurality of fourth probes, the plurality of fourth probes being identical in shape and length, and any two adjacent fourth probes having a distance between their third ends that is smaller than the distance between their fourth ends. The plurality of third probes and the plurality of fourth probes are identical in shape and length. The plurality of first probes and the plurality of third probes differ in shape and length and are arranged alternately. The plurality of second probes and the plurality of fourth probes differ in shape and length and are arranged alternately. The probe measurement structure according to claim 2.

5. The first ends of the plurality of first probes and the third ends of the plurality of fourth probes are provided facing each other, The first ends of the plurality of third probes and the third ends of the plurality of second probes are provided facing each other, The plurality of first probes and the plurality of third probes are arranged on the same horizontal plane, and the plurality of second probes and the plurality of fourth probes are arranged on the same horizontal plane. The probe measurement structure according to claim 4.

6. The first ends of the plurality of first probes and the third ends of the plurality of second probes are provided facing each other, The first ends of the plurality of third probes and the third ends of the plurality of fourth probes are provided facing each other, The plurality of first probes and the plurality of third probes are arranged on the same horizontal plane, and the plurality of second probes and the plurality of fourth probes are arranged on the same horizontal plane. The probe measurement structure according to claim 4.

7. The first end of the first side probe of at least one group is located on a first straight line, the third end of the second side probe of at least one group is located on a second straight line, and the first straight line and the second straight line are parallel to each other. The probe measurement structure according to claim 1.

8. The connecting wires at the second ends of the plurality of first probes have a protruding arc shape, and the connecting wires at the fourth ends of the plurality of second probes have a protruding arc shape. The probe measurement structure according to claim 2.

9. The connecting wires at the second ends of the plurality of first probes are in a protruding arc shape, the connecting wires at the fourth ends of the plurality of second probes are in a protruding arc shape, the connecting wires at the second ends of the plurality of third probes are in a protruding arc shape, and the connecting wires at the fourth ends of the plurality of fourth probes are in a protruding arc shape. The probe measurement structure according to claim 4.

10. There is a lateral width between the first end of the first side probe of the at least one group and the third end of the second side probe of the at least one group, and the lateral width is the distance between the first end and the third end; the first end of the first side probe of the at least one group and the third end of the second side probe of the at least one group each have a vertical length, the vertical length is the length in the direction of the connection line between the first ends of the plurality of first probes, and the vertical length is also the length in the direction of the connection line between the third ends of the plurality of second probes, and the vertical length is greater than the lateral width. The probe measurement structure according to claim 1.

11. A circuit board having a first surface and a second surface opposite to the first surface, a test area provided in the intermediate area of ​​the first surface, the test area further having a plurality of first conductive traces and a plurality of second conductive traces, each of the first conductive traces having a first end and a second end, there being a first gap between the first ends of any two adjacent first conductive traces, there being a second gap between the second ends of any two adjacent first conductive traces, and the second gap is larger than the first gap, each of the second conductive traces having a third end and a fourth end, there being a third gap between the third ends of any two adjacent second conductive traces, there being a fourth gap between the fourth ends of any two adjacent second conductive traces, the third gap and the first gap are equal, the fourth gap and the second gap are equal, and the third end and the first end are provided facing each other, A plurality of first probes provided within the test area of ​​the circuit board, each of which is arranged such that one end is connected to the first conductive trace and the other end is electrically connected to an electrode pad on the object to be measured, A plurality of second probes provided within the test area of ​​the circuit board, each of which is arranged such that one end is connected to the second conductive trace and the other end is electrically connected to the electrode pad on the object under test, A probe measurement structure characterized by having the following features.

12. The number of the plurality of first conductive traces and the plurality of second conductive traces are the same, and the first conductive traces and the second conductive traces are provided facing each other. The probe measurement structure according to claim 11.

13. A circuit board having a first surface and a second surface opposite to the first surface, wherein a test area is provided in an intermediate area of ​​the first surface, and the test area further has a plurality of first conductive traces and a plurality of second conductive traces, A first side probe comprising a plurality of first probes, having a first end provided on the inside of the test area of ​​the circuit board and extending from the inside of the test area toward the outside of the test area, having a second end provided on the outside of the test area and having a second end provided on the outside of the test area and having a plurality of first probes, A second side probe comprising at least one group of second probes, having a third end provided on the inside of the test area of ​​the circuit board and extending from the inside of the test area toward the outside of the test area, having a fourth end provided on the outside of the test area and having a fourth end provided on the outside of the test area and having a second conductive trace on the circuit board, Equipped with, The plurality of first probes are identical in shape and length, and any two adjacent first probes have a distance between their first ends that is smaller than the distance between their second ends. The plurality of second probes are identical in shape and length, and any two adjacent second probes have a distance between their third ends that is smaller than the distance between their fourth ends. The first end of the first side probe of the at least one group and the third end of the second side probe of the at least one group are provided so that at least a portion of them faces each other. A probe measurement structure characterized by the following features.

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