Processing System

Abstract

A processing system that irradiates an object with processing light through an irradiation optical system to process the object is provided with: an irradiation device having at least an ultimate optical element in the irradiation optical system; a movement device for moving the irradiation device; a first measurement device for measuring a position of the object, the first measurement device being disposed on the irradiation device; a second measurement device for measuring the position of the object through the ultimate optical element; and a third measurement device for irradiating the irradiation device with measurement light from a position distanced from the irradiation device, and detecting the measurement light to measure the position of the irradiation device.

Description

[Technical field]

[0001] The present invention relates to the technical field of processing systems for processing objects. [Background technology]

[0002] As a processing system capable of processing an object, Patent Document 1 describes a processing system that processes an object by irradiating a processing light onto the surface of the object. This type of processing system is required to appropriately measure the position of at least one of an irradiation device that irradiates the object with the processing light (i.e., a processing device that processes the object) and the object. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2000 / 054925 Brochure Summary of the Invention

[0004] According to a first aspect, there is provided a processing system that processes an object by irradiating the object with processing light via an irradiation optical system, the processing system including an irradiation device having at least a final optical element of the irradiation optical system, a moving device that moves the irradiation device, a first measuring device disposed on the irradiation device and measuring a position of the object, a second measuring device that measures the position of the object via at least the final optical element of the irradiation optical system, and a third measuring device that irradiates measuring light towards the irradiation device from a position away from the irradiation device, detects the measuring light, and measures the position of the irradiation device.

[0005] According to a second aspect, there is provided a processing system that processes an object by irradiating the object with processing light via an irradiation optical system, the processing system comprising: an irradiation device having at least a final optical element of the irradiation optical system; a moving device that moves the irradiation device; a first measuring device disposed on the irradiation device and measuring the position of the object; a second measuring device that measures the position of the object via the irradiation optical system; and a third measuring device that measures the position of the irradiation device.

[0006] According to a third aspect, there is provided a processing system that processes an object by irradiating the object with processing light via an irradiation optical system, the processing system comprising: an irradiation device having at least a final optical element of the irradiation optical system; a moving device that moves the irradiation device; a first measuring device that is arranged at a fixed position relative to the final optical element and measures the position of the object; a second measuring device that measures the position of the object via the final optical element; and a third measuring device that irradiates measurement light to a reflecting part arranged at a fixed position relative to the final optical system, detects the measurement light reflected by the reflecting part, and measures the position of the reflecting part.

[0007] According to a fourth aspect, there is provided a processing system for processing an object, comprising a movable arm, an end effector connected to the movable arm and for processing the object, a first measuring device fixed relative to the end effector and measuring a position of the object, a second measuring device measuring the position of the object via an irradiation optical system, and a third measuring device irradiating measurement light toward the end effector from a position away from the end effector, detecting the measurement light, and measuring the position of the end effector.

[0008] According to a fifth aspect, there is provided a processing system that processes an object by irradiating the object with processing light via an irradiation optical system, the processing system comprising: an irradiation device having at least a final optical element of the irradiation optical system; a first measuring device that measures the position of the object at least in a direction intersecting with the irradiation direction of the processing light; a moving device that moves the irradiation device and the first measuring device; a second measuring device that measures the position of the object in the irradiation direction of the processing light via at least a part of the irradiation optical system; and a third measuring device that irradiates measurement light toward the irradiation device from a position away from the irradiation device and detects the measurement light to measure the position of the irradiation device.

[0009] According to a sixth aspect, there is provided a processing system for processing an object, comprising: a first irradiation device having at least a first final optical element of a first irradiation optical system that irradiates a first processing light onto the object; a second irradiation device having at least a second final optical element of a second irradiation optical system that irradiates a second processing light onto the object; and a measurement device that measures positions of the first and second irradiation devices, wherein the first irradiation device processes a first region of the object and the second irradiation device processes a second region of the object, and the measurement device is capable of measuring positions of the first and second irradiation devices from a position away from the first irradiation device, the second irradiation device, and the object.

[0010] According to a seventh aspect, there is provided a processing system that processes an object by irradiating the object with processing light via an irradiation optical system, the processing system comprising: an irradiation device having at least a final optical element of the irradiation optical system; a moving device that moves the irradiation device; a first measuring device arranged on the irradiation device and measuring the position of the object; a second measuring device that measures the position of the object via at least the final optical element of the irradiation optical system; and a third measuring device that irradiates measurement light towards the irradiation device from a position away from the irradiation device, detects the measurement light, and measures the position of the irradiation device. [Brief description of the drawings]

[0011] [Figure 1]FIG. 1 is a schematic diagram illustrating an example of an overall structure of a processing system according to a first embodiment. [Diagram 2] FIG. 2 is a system configuration diagram showing an example of a system configuration of the processing system according to the first embodiment. [Diagram 3] FIG. 3 is a plan view showing an example of a workpiece marker formed on a workpiece. [Figure 4] FIG. 4 is a block diagram showing a structure of a processing head of the processing system according to the first embodiment. [Diagram 5] FIG. 5 is a perspective view showing measurement light irradiated onto a plurality of points on the workpiece. [Figure 6] FIG. 6 is a schematic diagram showing the structure of the self-propelled drive system and the arm drive system. [Figure 7] FIG. 7 is a schematic diagram showing the structure of the fine movement drive system. [Figure 8] FIG. 8 is a front view showing the appearance of the measuring device. [Figure 9] FIG. 9 is a block diagram showing the structure of the measurement device. [Figure 10] FIG. 10 is a block diagram showing another structure of the measuring device. [Figure 11] FIG. 11 is a schematic diagram showing a specific example of a workpiece to be machined by the machining device. [Figure 12] FIG. 12 is a flowchart showing an example of the flow of the processing operation. [Figure 13] FIG. 13 is a perspective view showing a shot area SA. [Figure 14] FIG. 14 is a schematic diagram showing a processing head located at a position where it cannot irradiate the processing target shot area with processing light. [Figure 15] FIG. 15 is a schematic diagram showing a processing head located at a position where it can irradiate the processing target shot area with processing light. [Figure 16] FIG. 16 is a plan view showing an example of workpiece markers formed in a plurality of shot areas. [Figure 17] FIG. 17 is a system configuration diagram showing the system configuration of the machining system according to the second embodiment. [Figure 18] FIG. 18 is a system configuration diagram showing the system configuration of the machining system according to the third embodiment. [Figure 19] FIG. 19 is a system configuration diagram showing the system configuration of the machining system according to the fourth embodiment. [Figure 20] FIG. 20 is a system configuration diagram showing the system configuration of the machining system according to the fifth embodiment. [Figure 21] FIG. 21 is a front view showing the appearance of a processing device of a processing system according to a fifth embodiment. [Figure 22] FIG. 22 is a system configuration diagram showing the system configuration of the processing system according to the sixth embodiment. [Figure 23] FIG. 23 is a plan view showing the arrangement positions of a plurality of processing devices in a processing system according to the sixth embodiment. [Figure 24] FIG. 24 is a system configuration diagram showing the system configuration of the processing system according to the seventh embodiment. [Diagram 25] FIG. 25 is a plan view showing the arrangement positions of a plurality of processing devices in a processing system according to the seventh embodiment. [Figure 26] FIG. 26 is a cross-sectional view showing an example of a processing head equipped with an end effector. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, an embodiment of the processing system will be described with reference to the drawings. Hereinafter, an embodiment of the processing system will be described using a processing system SYS that processes an object called a workpiece W using processing light EL (that is, performs processing on the workpiece W). However, the present invention is not limited to the embodiment described below.

[0013] In the following description, the positional relationship of various components constituting the machining system SYS will be described using an XYZ orthogonal coordinate system defined by mutually orthogonal X-axis, Y-axis, and Z-axis. For convenience of explanation, in the following description, it is assumed that the X-axis direction and the Y-axis direction are horizontal (i.e., a predetermined direction in a horizontal plane) and the Z-axis direction is vertical (i.e., a direction perpendicular to the horizontal plane, and essentially an up-down direction). Hereinafter, a coordinate system in which the X-axis direction and the Y-axis direction are horizontal and the Z-axis direction is vertical is referred to as a reference coordinate system used as a reference in the machining system SYSa. In the following description, unless otherwise specified, the X-axis, Y-axis, and Z-axis may respectively mean the X-axis, Y-axis, and Z-axis in the reference coordinate system. In addition, the rotation directions (in other words, tilt directions) around the X-axis, Y-axis, and Z-axis are referred to as the θX direction, the θY direction, and the θZ direction, respectively.

[0014] (1) Machining system SYSa according to the first embodiment First, a processing system SYS according to a first embodiment (hereinafter, the processing system SYS according to the first embodiment will be referred to as a "processing system SYSa") will be described.

[0015] (1-1) Structure of the processing system SYSa First, the structure of the processing system SYSa according to the first embodiment will be described with reference to Fig. 1 and Fig. 2. Fig. 1 is a side view showing a schematic appearance of the processing system SYSa according to the first embodiment. Fig. 2 is a system configuration diagram showing the system configuration of the processing system SYSa according to the first embodiment.

[0016] As shown in FIGS. 1 and 2, the processing system SYSa includes a processing device 1, a measuring device 2, and a control device 3.

[0017] The processing device 1 is capable of processing the workpiece W under the control of the control device 3. The workpiece W is an object processed by the processing device 1. The workpiece W may be, for example, a metal, an alloy (e.g., duralumin, etc.), a semiconductor (e.g., silicon), a resin, a composite material such as CFRP (Carbon Fiber Reinforced Plastic), paint (as an example, a paint layer applied to a substrate), glass, or an object made of any other material.

[0018] The workpiece W is placed on the support surface SS. As shown in Fig. 1, the workpiece W may be placed on the support surface SS via a support member SM that supports the workpiece on the support surface SS. Alternatively, the workpiece W may be placed directly on the support surface SS. Since the workpiece W may be placed on the support surface SS, the support surface SS may be referred to as a placement surface.

[0019] The processing device 1 irradiates the processing light EL onto the workpiece W in order to process the workpiece W. The processing light EL may be any type of light as long as it can process the workpiece W by irradiating the workpiece W with the processing light EL. In the first embodiment, the processing light EL is laser light. However, the processing light EL may be a type of light different from laser light. Furthermore, the wavelength of the processing light EL may be any wavelength as long as it can process the workpiece W by irradiating the workpiece W with the processing light EL. For example, the processing light EL may be visible light or invisible light (e.g., at least one of infrared light, ultraviolet light, and extreme ultraviolet light). The processing light EL may include pulsed light (e.g., pulsed light having an emission time of picoseconds or less). Alternatively, the processing light EL may not include pulsed light. In other words, the processing light EL may be continuous light.

[0020] The processing device 1 may perform a removal process to remove a part of the workpiece W by irradiating the workpiece W with the processing light EL. When performing the removal process, the processing device 1 may form a riblet structure on the workpiece W. The riblet structure may include a structure capable of reducing the resistance of the surface of the workpiece W to the fluid (particularly, at least one of frictional resistance and turbulent frictional resistance). The riblet structure may include a structure capable of reducing noise generated when the fluid and the surface of the workpiece W move relatively. For example, the riblet structure may include a structure in which grooves extending along a first direction (e.g., Y-axis direction) along the surface of the workpiece W are arranged in a plurality of rows along a second direction (e.g., X-axis direction) along the surface of the workpiece W and intersecting the first direction. The fluid here means a medium (e.g., at least one of gas and liquid) flowing relative to the surface of the workpiece W. For example, when the surface of the workpiece W moves relative to the medium under a condition in which the medium itself is stationary, the medium may be referred to as a fluid. The state in which the medium is stationary may mean a state in which the medium is not moving relative to a predetermined reference object (for example, the support surface SS or the ground surface).

[0021] When performing removal processing, the processing system SYSa may form an arbitrary structure having an arbitrary shape on the surface of the workpiece W. An example of the arbitrary structure is a structure that generates vortices in the flow of a fluid on the surface of the workpiece W. Another example of the arbitrary structure is a structure for imparting hydrophobicity to the surface of the workpiece W. Another example of the arbitrary structure is a micro- or nanometer-order fine texture structure (typically an uneven structure) formed regularly or irregularly. The fine texture structure may include at least one of a shark skin structure and a dimple structure that have a function of reducing resistance by a fluid (gas and / or liquid). The fine texture structure may include a lotus leaf surface structure that has at least one of a liquid repellent function and a self-cleaning function (for example, having a lotus effect). The fine texture structure may include at least one of a fine protrusion structure having a liquid transport function (see U.S. Patent Publication No. 2017 / 0044002), a concave-convex structure having a lyophilic function, a concave-convex structure having an antifouling function, a moth-eye structure having at least one of a reflectance reducing function and a liquid repellent function, a concave-convex structure that exhibits a structural color by intensifying only light of a specific wavelength by interference, a pillar array structure having an adhesive function using van der Waals forces, a concave-convex structure having an aerodynamic noise reducing function, a honeycomb structure having a droplet collecting function, as well as a concave-convex structure that improves adhesion with a layer formed on the surface, and a concave-convex structure for reducing frictional resistance. Here, the fine texture structure does not have to have a specific function. The processing system SYSa may smooth the surface of the workpiece W. Here, smoothing the surface may mean processing the surface so that the surface after processing is smoother than the surface before processing. The processing system SYSa may also remove burrs present on the surface of the workpiece W.

[0022] In addition to or instead of the removal processing, the processing device 1 may perform additional processing to add a new structure to the workpiece W by irradiating the workpiece W with processing light EL. In this case, the processing device 1 may perform the additional processing to form the above-mentioned riblet structure on the surface of the workpiece W. In addition to or instead of at least one of the removal processing and the additional processing, the processing device 1 may perform marking processing to form a desired mark on the surface of the workpiece W by irradiating the workpiece W with processing light EL.

[0023] The processing device 1 can further measure the workpiece W under the control of the control device 3. The processing device 1 irradiates the workpiece W with the measurement light ML2 in order to measure the workpiece W. The measurement light ML2 may be any type of light as long as the measurement light ML2 can be irradiated onto the workpiece W to measure the workpiece W. In the first embodiment, the description will be given using an example in which the measurement light ML2 is a laser light. However, the measurement light ML2 may be a type of light different from a laser light. Furthermore, the wavelength of the measurement light ML2 may be any wavelength as long as the measurement light ML2 can be irradiated onto the workpiece W to measure the workpiece W. For example, the measurement light ML2 may be visible light or invisible light (for example, at least one of infrared light, ultraviolet light, and extreme ultraviolet light). The measurement light ML2 may include pulsed light (for example, pulsed light having an emission time of picoseconds or less). Alternatively, the measurement light ML2 may not include pulsed light. In other words, the measurement light ML2 may be continuous light.

[0024] The wavelength of the measurement light ML2 may be different from the wavelength of the processing light EL. For example, the wavelength of the measurement light ML2 may be shorter than the wavelength of the processing light EL. As an example, light in a wavelength band of 266 nm or 355 nm may be used as the measurement light ML2, and light in a wavelength band of 532 nm, 1 μm, or 10 μm may be used as the processing light EL. In this case, the spot diameter of the measurement light ML2 on the workpiece W is smaller than the spot diameter of the processing light EL on the workpiece W. As a result, the measurement resolution by the measurement light ML2 is higher than the processing resolution by the processing light EL. The processing resolution may mean the limit value of the fineness of the processing by the processing light EL (for example, the minimum size that can be processed). The measurement resolution may mean the limit value of the fineness of the measurement by the measurement light ML2 (for example, the minimum size that can be measured). However, the wavelength of the measurement light ML2 does not have to be shorter than the wavelength of the processing light EL. The wavelength of the measurement light ML2 may be the same as the wavelength of the processing light EL.

[0025] The processing device 1 may be capable of measuring the state of the workpiece W using the measurement light ML2. The state of the workpiece W may include the position of the workpiece W. The position of the workpiece W may include the position of the surface of the workpiece W. The position of the surface of the workpiece W may include the position of each surface portion obtained by dividing the surface of the workpiece W in at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction. The position of the surface of the workpiece W may include the position of each surface portion obtained by dividing the surface of the workpiece W in at least one of the θX direction, the θY direction, and the θZ direction. In other words, the processing device 1 may be capable of measuring the position of the workpiece W in at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction using the measurement light ML2. Here, the position of the workpiece W in at least one of the θX direction, the θY direction, and the θZ direction may be referred to as the posture of the workpiece W. The position of each surface portion in at least one of the θX direction, the θY direction, and the θZ direction may be considered to be equivalent to the attitude of each surface portion (that is, the orientation of each surface portion (e.g., the orientation of the normal line of each surface portion), which is substantially equivalent to the tilt amount of each surface portion with respect to at least one of the X-axis, the Y-axis, and the Z-axis). The tilt amount of each surface portion referred to here may mean the angle between at least one of the X-axis, the Y-axis, and the Z-axis and the normal line of each surface portion. In this case, it can be said that the state of the workpiece W substantially includes the shape (e.g., three-dimensional shape) of the workpiece W. The state of the workpiece W may also include the size of the workpiece W (e.g., the size in at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction). The processing device 1 may also be capable of measuring the characteristics of the workpiece W using the measurement light ML2. The characteristics of the workpiece W may include the surface roughness of the surface of the workpiece W. The surface roughness may mean the surface roughness defined in ISO25178. The characteristics of the workpiece W may include at least one of the reflectance of the workpiece W to light of a predetermined wavelength. The reflectance of the workpiece W to light of a predetermined wavelength may mean the ratio of the luminous flux of light of the predetermined wavelength reflected by the workpiece W to the luminous flux of light of the predetermined wavelength incident on the workpiece W. Here, the reflectance of the workpiece W may include the reflectance for each wavelength. In other words, the characteristics of the workpiece W may include the color of the workpiece W.Furthermore, the color of the workpiece W may refer to visual perception (color perception or white stimulus) sensed by the composition of light from the surface of the workpiece W (i.e., the wavelength components that make up the light from the surface of the workpiece W).

[0026] In order to process and measure the workpiece W, the processing apparatus 1 is equipped with a processing light source 11 that generates processing light EL, a measurement light source 12 that generates measurement light ML2, a processing head 13, a head drive system 14, and an imaging device 15.

[0027] The machining head 13 irradiates the workpiece W with the machining light EL from the machining light source 11 and with the measurement light ML2 from the measurement light source 12. For this reason, the machining head 13 may be referred to as an irradiation device. In order to irradiate the workpiece W with the machining light EL and the measurement light ML2, the machining head 13 includes a machining optical system 131, a measurement optical system 132, a synthesis optical system 133, and an objective optical system 134. The machining head 13 irradiates the workpiece W with the machining light EL via the machining optical system 131, the synthesis optical system 133, and the objective optical system 134. For this reason, the machining head 13 may be considered to be machining the workpiece W via the machining optical system 131, the synthesis optical system 133, and the objective optical system 134. In this case, the optical system including the machining optical system 131, the synthesis optical system 133, and the objective optical system 134 may be considered to function as an irradiation optical system for irradiating the workpiece W with the machining light EL. Furthermore, the machining head 13 irradiates the workpiece W with the measurement light ML2 via the measurement optical system 132, the synthesis optical system 133, and the objective optical system 134. For this reason, the machining head 13 may be considered to measure the workpiece W via the measurement optical system 132, the synthesis optical system 133, and the objective optical system 134. In this case, the optical system including the measurement optical system 132, the synthesis optical system 133, and the objective optical system 134 may be considered to function as an irradiation optical system for irradiating the workpiece W with the measurement light ML2. Details of the structure of the machining head 13 will be described later with reference to FIG. 4.

[0028] The head drive system 14 moves the processing head 13. Specifically, the head drive system 14 moves the processing head 13 relative to the workpiece W. For this reason, the head drive system 14 may be referred to as a moving device. In order to move the processing head 13, the head drive system 14 includes a self-propelled drive system 141, an arm drive system 142, and a fine movement drive system 143. However, the head drive system 14 does not have to include at least one of the self-propelled drive system 141, the arm drive system 142, and the fine movement drive system 143. The head drive system 14, which is referred to as a moving device, moves the processing head 13 to move a final optical element (specifically, an optical element having the final power among a plurality of optical elements arranged on the optical path of the processing light EL, for example, an fθ lens 1342 described later) provided in the processing head 13. The structures of the self-propelled drive system 141, the arm drive system 142, and the fine movement drive system 143 will be described in detail later with reference to Figures 6 to 7. However, the outline of the self-propelled drive system 141, the arm drive system 142, and the fine movement drive system 143 will be briefly described below.

[0029] The self-propelled drive system 141 can move on the support surface SS on which the workpiece W is supported or placed. Note that the "state in which the self-propelled drive system 141 moves on the support surface SS" may mean a state in which the automatic drive system 141 moves relative to the support surface SS using power generated by the self-propelled drive system 141 itself. The processing head 13 is connected (in other words, coupled or connected) to the self-propelled drive system 141 via the arm drive system 142 and the fine movement drive system 143. Therefore, the self-propelled drive system 141 moves the processing head 13 by self-propelling. Therefore, the self-propelled drive system 141 may be called a moving device or a self-propelled device.

[0030] The arm drive system 142 is a drive system capable of functioning as a robot arm. The processing head 13 is connected to the arm drive system 142 via a fine movement drive system 143. The arm drive system 142 moves the processing head 13 by moving like a robot arm. For this reason, the arm drive system 142 may be referred to as a moving device.

[0031] The arm drive system 142 may move the processing head 13 with a smaller movement stroke than the self-propelled drive system 141. In other words, the self-propelled drive system 141 may move the processing head 13 with a larger movement stroke than the arm drive system 142. The movement stroke may mean the maximum movement amount in one direction. However, the arm drive system 142 may move the processing head 13 with the same or larger movement stroke as the self-propelled drive system 141. On the other hand, the movement accuracy (in other words, movement resolution) of the processing head 13 by the arm drive system 142 may be higher than the movement accuracy of the processing head 13 by the self-propelled drive system 141. In other words, the movement accuracy of the processing head 13 by the self-propelled drive system 141 may be lower than the movement accuracy of the processing head 13 by the arm drive system 142. The movement accuracy (movement resolution) may mean the limit value of the fineness of the movement (for example, the minimum movement amount). However, the movement accuracy of the processing head 13 by the arm drive system 142 may be the same as or lower than the movement accuracy of the processing head 13 by the self-propelled drive system 141. As shown in Fig. 1, the processing head 13 is connected to the arm drive system 142 capable of functioning as a robot arm, and therefore may be referred to as an end effector.

[0032] The fine movement drive system 143 moves (in other words, drives) the processing head 13 with a smaller movement stroke than the arm drive system 142. For this reason, the fine movement drive system 143 may be referred to as a moving device or a driving device. On the other hand, the movement accuracy of the processing head 13 by the fine movement drive system 143 is higher than the movement accuracy of the processing head 13 by the arm drive system 142. For this reason, in the first embodiment, as described in detail later, the processing system SYSa may use the self-propelled drive system 141 and the arm drive system 142 to position the processing head 13 with relatively coarse or low accuracy relative to the workpiece W. Thereafter, the processing system SYSa may use the fine movement drive system 143 to position the processing head 13 with relatively fine or high accuracy relative to the workpiece W.

[0033] The head drive system 14 may include a power source 144. In the example shown in FIG. 1, the power source 144 is disposed in the self-propelled drive system 141, but the location of the power source 144 is not limited to the location shown in FIG. 1. The power source 144 may supply the self-propelled drive system 141 with electric power used by the self-propelled drive system 141 to move the processing head 13. The power source 144 may supply the arm drive system 142 with electric power used by the arm drive system 142 to move the processing head 13. The power source 144 may supply the fine movement drive system 143 with electric power used by the fine movement drive system 143 to move the processing head 13. The power source 144 may supply electric power to at least one of the self-propelled drive system 141, the arm drive system 142, and the fine movement drive system 143 via a power cable. The power supply 144 may supply power to at least one of the self-propelled drive system 141, the arm drive system 142, and the fine movement drive system 143 using a non-contact power supply system (in other words, a wireless power supply system). The power supply 144 may be charged by power supplied from outside the power supply 144 via a charging cable. The power supply 144 may be charged by power supplied from outside the power supply 144 using a non-contact power supply system (in other words, a wireless power supply system).

[0034] Each of the self-propelled drive system 141, the arm drive system 142, and the fine movement drive system 143 moves the processing head 13 along at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction. Note that moving the processing head 13 along at least one of the θX direction, the θY direction, and the θZ direction may be considered equivalent to changing the orientation of the processing head 13 around at least one of the X-axis, the Y-axis, and the Z-axis.

[0035] When the processing head 13 moves, the positional relationship between the processing head 13 and the workpiece W changes. Furthermore, when the positional relationship between the workpiece W and the processing head 13 changes, the positional relationship between the workpiece W and each optical system (i.e., at least one of the processing optical system 131, the measurement optical system 132, the synthesis optical system 133, and the objective optical system 134) included in the processing head 13 changes. Furthermore, when the positional relationship between the workpiece W and the processing head 13 changes, the irradiation positions of the processing light EL and the measurement light ML2 on the workpiece W change. Therefore, moving the processing head 13 is equivalent to changing the irradiation positions of the processing light EL and the measurement light ML2 on the workpiece W. Moving the processing head 13 may be considered to be equivalent to changing the focusing positions of the processing light EL and the measurement light ML2 on the workpiece W.

[0036] The imaging device 15 is disposed on the processing head 13 (i.e., attached or fixed). Therefore, the imaging device 15 is disposed at a fixed position relative to the processing head 13. Since the processing head 13 is equipped with each of the optical systems described above, the imaging device 15 may be considered to be disposed at a fixed position relative to each of the optical systems equipped in the processing head 13. As described above, when the head drive system 14 moves the processing head 13, the imaging device 15 attached to the processing head 13 also moves. Therefore, the head drive system 14 may be considered to function as a moving device that moves the imaging device 15. Alternatively, the head drive system 14 may be considered to function as a moving device that moves both the processing head 13 and the imaging device 15. The imaging device 15 may be disposed on a member other than the processing head 13. Even in this case, the imaging device 15 may be disposed at a fixed position relative to the processing head 13.

[0037] The imaging device 15 is capable of capturing an image of the workpiece W. For example, the imaging device 15 may illuminate the workpiece W with illumination light ML1, which may be referred to as measurement light, and capture an image of the workpiece W illuminated with the illumination light ML1. Alternatively, the imaging device 15 may capture an image of the workpiece W illuminated with ambient light (or illumination light emitted by a device other than the imaging device 15) without illuminating the workpiece W with the illumination light ML1.

[0038] The imaging device 15 may image the workpiece W without passing through at least a part of each optical system provided in the processing head 13. Incidentally, "imaging the workpiece W without passing through at least a part of the optical system" may mean "imaging the workpiece W without receiving light from the workpiece W that has passed through at least a part of the optical system". "imaging the workpiece W without passing through at least a part of the optical system" may mean "imaging the workpiece W by receiving light from the workpiece W that has not passed through at least a part of the optical system". For example, the imaging device 15 may image the workpiece W without passing through the processing optical system 131, the measurement optical system 132, the synthesis optical system 133, and the objective optical system 134. For example, the imaging device 15 may image the workpiece W without passing through at least the fθ lens 1342.

[0039] The imaging device 15 measures the position of the workpiece W by imaging the workpiece W. For this reason, the imaging device 15 may be referred to as a measuring device. In addition, when the imaging device 15 images the workpiece W without passing through at least a part of each optical system of the processing head 13 as described above, the imaging device 15 may be considered to function as a measuring device that measures the position of the workpiece W without passing through at least a part of each optical system of the processing head 13. In addition, "measuring the position of the workpiece W without passing through at least a part of the optical system" may mean "measuring the position of the workpiece W without using light from the workpiece W that has passed through at least a part of the optical system". "Measuring the position of the workpiece W without passing through at least a part of the optical system" may mean "measuring the position of the workpiece W using light from the workpiece W that has not passed through at least a part of the optical system".

[0040] Specifically, an image of the workpiece W captured by the imaging device 15 (hereinafter referred to as the "workpiece image") is output from the imaging device 15 to the control device 3. The control device 3 calculates the position of the workpiece W by analyzing the workpiece image. For example, the control device 3 calculates the position of the workpiece W in at least one of the X-axis direction, Y-axis direction, Z-axis direction, θX direction, θY direction, and θZ direction by analyzing the workpiece image. In this case, it can be said that the imaging device 15 measures the position of the workpiece W by a method different from the method of measuring the position of the workpiece W using the measurement light ML2 described above. For example, it can be said that the imaging device 15 optically measures the position of the workpiece W without going through each optical system equipped in the machining head 13.

[0041] Since the imaging device 15 is attached to the machining head 13, the imaging device 15 may measure the position of the workpiece W in a head coordinate system determined based on the machining head 13. That is, the control device 3 may calculate the position of the workpiece W in the head coordinate system based on the workpiece image captured by the imaging device 15. The head coordinate system may be a coordinate system in which the axis along the optical axis of the objective optical system 134 provided in the machining head 13 (particularly, the optical axis AX of the fθ lens 1342 described later, see FIG. 4) is the Z axis, and two axes perpendicular to the optical axis AX of the fθ lens 1342 and perpendicular to each other are the X axis and the Y axis. That is, the head coordinate system is a coordinate system defined in the reference coordinate system by three coordinate axes that determine the position and attitude of the machining head 13 relative to the reference coordinate system according to the position (including the attitude) of the machining head 13 in the reference coordinate system. However, since the machining head 13 moves in the reference coordinate system by the head drive system 14, the position of the machining head 13 in the reference coordinate system is known information to the control device 3. Therefore, the control device 3 can convert the coordinates of the reference coordinate system into the coordinates of the head coordinate system based on the position of the machining head 13 in the reference coordinate system, and can convert the coordinates of the head coordinate system into the coordinates of the reference coordinate system. Therefore, the operation of measuring the position of the workpiece W (or any object) in the head coordinate system may be considered to be substantially equivalent to the operation of measuring the position of the workpiece W (or any object) in the reference coordinate system.

[0042] As described later, the machining head 13 irradiates the workpiece W with the measurement light ML2 traveling along the optical axis AX of the fθ lens 1342. For this reason, the head coordinate system may be a coordinate system in which the axis along the new direction (i.e., irradiation direction) of the measurement light ML2 is the Z axis, and two axes perpendicular to the traveling direction of the measurement light ML2 and perpendicular to each other are the X axis and the Y axis. Also, as described later, the machining head 13 irradiates the workpiece W with the processing light EL traveling along the optical axis AX of the fθ lens 1342. For this reason, the head coordinate system is a coordinate system in which the axis along the traveling direction (i.e., irradiation direction) of the processing light EL is the Z axis, and two axes perpendicular to the traveling direction of the processing light EL and perpendicular to each other are the X axis and the Y axis.

[0043] The imaging device 15 may capture an image of a characteristic point of the workpiece W in order to measure the position of the workpiece W. The characteristic point of the workpiece W may include a portion of the workpiece W that is present at a characteristic position. The characteristic position may include, for example, a position corresponding to at least one of a corner of the workpiece W, an edge of the workpiece W, the center of the workpiece W, and a boundary between an area on the workpiece W that has been processed by the processing light EL and an area on the workpiece W that has not yet been processed by the processing light EL. The characteristic point of the workpiece W may include a portion of the workpiece W that has a characteristic shape. The characteristic shape may include, for example, at least one of a convex shape protruding from the surroundings and a concave shape recessed from the surroundings. In this case, the control device 3 may calculate the position of the workpiece W in the head coordinate system by calculating the position of the characteristic point in the workpiece image. For example, the control device 3 may calculate the position of the workpiece W in any one of the X-axis direction, the Y-axis direction, and the θZ direction in the head coordinate system by calculating the position of one characteristic point in the workpiece image. For example, the control device 3 may calculate the position of the workpiece W in any two of the X-axis direction, the Y-axis direction, and the θZ direction in the head coordinate system by calculating the positions of two characteristic points in the workpiece image. For example, the control device 3 may calculate the positions of three or more feature points in the workpiece image, thereby calculating the position of the workpiece W in each of the X-axis direction, the Y-axis direction, and the θZ direction in the head coordinate system.

[0044] The imaging device 15 may image a marker (hereinafter referred to as a "work marker WM") formed on the work W in order to measure the position of the work W. The work marker WM may be referred to as an object marker because it is a marker formed on an object called the work W. An example of the work marker WM is shown in FIG. 3. As shown in FIG. 3, a marker group WMG including at least three work markers WM having a predetermined positional relationship on the surface of the work W may be formed on the work W. In this case, the imaging device 15 may image the marker group WMG (i.e., at least three work markers WM). In this case, the control device 3 may calculate the position of the work W in any one of the X-axis direction, the Y-axis direction, and the θZ direction in the head coordinate system by calculating the position of one work marker WM in the work image. The control device 3 may calculate the position of the work W in any two of the X-axis direction, the Y-axis direction, and the θZ direction in the head coordinate system by calculating the positions of two work markers WM in the work image. The control device 3 may calculate the positions of the workpiece W in each of the X-axis direction, the Y-axis direction, and the θZ direction in the head coordinate system by calculating the positions of three or more workpiece markers WM in the workpiece image. The control device 3 may also calculate the positions of the workpiece W in each of the Z-axis direction, the θX direction, and the θY direction in the head coordinate system by calculating at least one of the shapes and sizes of at least three workpiece markers WM in the workpiece image.

[0045] 1 and 2 again, the measuring device 2 can measure the position of the processing head 13. Therefore, the measuring device 2 may be called a position measuring device. Specifically, the measuring device 2 can measure the position of the processing head 13 in at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction. Here, the position of the processing head 13 in at least one of the θX direction, the θY direction, and the θZ direction may be called the attitude of the processing head 13. The structure of the measuring device 2 itself will be described in detail later with reference to FIGS. 7 and 8. However, the outline of the operation of the measuring device 2 will be briefly described below.

[0046] The measurement device 2 may use measurement light ML3 to measure the position of the processing head 13. Specifically, the measurement device 2 may measure the position of the processing head 13 by irradiating the measurement light ML3 to the processing head 13 and detecting the measurement light ML3 from the processing head 13 (i.e., the return light of the measurement light ML3 from the processing head 13). The return light of the measurement light ML3 from the processing head 13 may include at least one of the reflected light of the measurement light ML3 by the processing head 13 and the scattered light of the measurement light ML3 by the processing head 13.

[0047] In order to irradiate the processing head 13 with the measurement light ML3, the measuring device 2 may be disposed at a position away from the processing head 13. The position away from the processing head 13 may mean at least one of a position different from the position where the processing head 13 is present and a position where there is a space between the processing head 13 and the measuring device 2. For example, the measuring device 2 may be disposed at a position away from the processing head 13 to such an extent that a state in which the distance from the measuring device 2 to the processing head 13 is longer than the distance from the processing head 13 to the workpiece W can be realized. In other words, the measuring device 2 may be disposed at a position away from the processing head 13 to such an extent that a state in which the distance from the processing head 13 to the workpiece W is shorter than the distance from the measuring device 2 to the processing head 13 can be realized. In this case, the measuring device 2 may irradiate the processing head 13 with the measurement light ML3 from a position away from the processing head 13. The measuring device 2 may detect the return light of the measurement light ML3 from the processing head 13 at a position away from the processing head 13.

[0048] The measuring device 2 may irradiate the measuring light ML3 toward an arbitrary part of the processing head 13 and detect the measuring light ML3 from an arbitrary part of the processing head 13. Alternatively, the measuring device 2 may irradiate the measuring light ML3 toward a reflector 136 that is provided in the processing head 13 and can reflect the measuring light ML3 (typically, can retroreflect), and detect the measuring light ML3 from the reflector 136. The reflector 136 may be disposed at a fixed position relative to the processing head 13. The reflector 136 may be disposed at a position where the positional relationship with the processing head 13 does not change. Typically, the reflector 136 may be disposed in the processing head 13 (for example, a head housing 135 that configures the exterior of the processing head 13). In this case, the measuring device 2 measures the position of the reflector 136. However, since the reflector 136 is disposed at a fixed position relative to the processing head 13, the operation of measuring the position of the reflector 136 may be considered to be equivalent to the operation of measuring the position of the processing head 13. It should be noted that a touring ball may be used in addition to or instead of the retroreflective reflector 136.

[0049] The measuring device 2 may measure the position of the workpiece W in addition to or instead of the position of the machining head 13. Specifically, the measuring device 2 may measure the position of the workpiece W in at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction. In order to measure the position of the workpiece W, the measuring device 2 may measure the position of the workpiece W by irradiating the measuring light ML3 onto the workpiece W and detecting the measuring light ML3 from the workpiece W (i.e., the return light of the measuring light ML3 from the workpiece W). The return light of the measuring light ML3 from the workpiece W may include at least one of the reflected light of the measuring light ML3 by the workpiece W and the scattered light of the measuring light ML3 by the workpiece W.

[0050] In order to irradiate the workpiece W with the measurement light ML3, the measurement device 2 may be disposed at a position away from the workpiece W. For example, the measurement device 2 may be disposed at a position away from the workpiece W to the extent that a state in which the distance from the measurement device 2 to the workpiece W is longer than the distance from the processing head 13 to the workpiece W can be realized. In other words, for example, the measurement device 2 may be disposed at a position away from the workpiece W to the extent that a state in which the distance from the processing head 13 to the workpiece W is shorter than the distance from the measurement device 2 to the workpiece W can be realized. In this case, the measurement device 2 may irradiate the measurement light ML3 to the workpiece W from a position away from the workpiece W. The measurement device 2 may measure the position of the workpiece W by detecting the return light of the measurement light ML3 from the workpiece W at a position away from the processing head 13.

[0051] The measuring device 2 may irradiate the measuring light ML3 toward an arbitrary portion of the workpiece W and detect the measuring light ML3 from the arbitrary portion of the workpiece W. Alternatively, the measuring device 2 may irradiate the measuring light ML3 toward a reflector W136 that is arranged on the workpiece W and capable of reflecting the measuring light ML3 (typically capable of retroreflection), and detect the measuring light ML3 from the reflector W136. The reflector W136 may be arranged at a fixed position relative to the workpiece W. The reflector W136 may be arranged at a position where the positional relationship with the workpiece W does not change. Typically, the reflector W136 may be arranged on the workpiece W. In this case, the measuring device 2 measures the position of the reflector W136. However, since the reflector W136 is arranged at a fixed position relative to the workpiece W, the operation of measuring the position of the reflector W136 may be considered to be equivalent to the operation of measuring the position of the workpiece W. In addition, a tooling ball may be used instead of or in addition to the retroreflecting reflector W136.

[0052] As described later in detail, the measurement result by the measuring device 2 (i.e., the measurement result of at least one of the positions of the machining head 13 and the workpiece W using the measurement light ML3) may be mainly used to control the self-propelled drive system 141 and the arm drive system 142, which have relatively low movement accuracy. On the other hand, the measurement result by the imaging device 15 (i.e., the measurement result of the position of the workpiece W using the imaging device 15) may be mainly used to control the fine movement drive system 143, which has relatively high movement accuracy. The measurement result by the machining head 13 (i.e., the measurement result of the position of the workpiece W using the measurement light ML2) may be mainly used to control the galvanometer mirror 1341 described later, which can control the irradiation position (e.g., the focusing position) of the machining light EL with high accuracy. In this case, the measurement resolution of the measuring device 2 (i.e., the resolution of the measurement result of at least one of the positions of the machining head 13 and the workpiece W using the measurement light ML3) may be lower than the measurement resolution of the imaging device 15 (i.e., the resolution of the measurement result of the position of the workpiece W using the imaging device 15). The measurement resolution of the measuring device 2 may be lower than the measurement resolution of the processing head 13 (i.e., the resolution of the measurement result of the position of the workpiece W using the measurement light ML2). In other words, the measurement resolution of each of the imaging device 15 and the processing head 13 may be higher than the measurement resolution of the measuring device 2.

[0053] The control device 3 controls the operation of the machining system SYSa. For example, the control device 3 may set machining conditions for the workpiece W and control the machining device 1 and the measuring device 2 so that the workpiece W is machined according to the set machining conditions. In other words, the control device 3 may control the machining of the workpiece W. For example, the control device 3 may set measurement conditions for the workpiece W and control the machining device 1 and the measuring device 2 so that the workpiece W is measured according to the set measurement conditions.

[0054] In the first embodiment, the control device 3 may control the processing device 1 to process the workpiece W based on the measurement results by the imaging device 15, the measurement results by the processing head 13, and the measurement results by the measuring device 2. That is, the processing system SYSa may process the workpiece W based on the measurement results by the imaging device 15, the measurement results by the processing head 13, and the measurement results by the measuring device 2. Note that the operation of processing the workpiece W based on the measurement results by the imaging device 15, the measurement results by the processing head 13, and the measurement results by the measuring device 2 will be described in detail later with reference to FIG. 12 etc.

[0055] The control device 3 may include, for example, a calculation device and a storage device. The calculation device may include, for example, at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The control device 3 functions as a device that controls the operation of the machining system SYSa by the calculation device executing a computer program. This computer program is a computer program for making the control device 3 (for example, the calculation device) perform (i.e., execute) the operation to be performed by the control device 3, which will be described later. In other words, this computer program is a computer program for making the control device 3 function so as to make the machining system SYSa perform the operation to be described later. The computer program executed by the calculation device may be recorded in a storage device (i.e., a recording medium) included in the control device 3, or may be recorded in any storage medium (for example, a hard disk or a semiconductor memory) built into the control device 3 or externally attachable to the control device 3. Alternatively, the calculation device may download the computer program to be executed from a device external to the control device 3 via a network interface.

[0056] The control device 3 may not be provided inside the processing system SYSa. For example, the control device 3 may be provided as a server or the like outside the processing system SYSa. In this case, the control device 3 and the processing system SYSa may be connected by a wired and / or wireless network (or a data bus and / or a communication line). As the wired network, a network using a serial bus type interface represented by at least one of IEEE1394, RS-232x, RS-422, RS-423, RS-485, and USB may be used. As the wired network, a network using a parallel bus type interface may be used. As the wired network, a network using an interface conforming to Ethernet (registered trademark), represented by at least one of 10BASE-T, 100BASE-TX, and 1000BASE-T, may be used. As the wireless network, a network using radio waves may be used. An example of a network using radio waves is a network conforming to IEEE802.1x (for example, at least one of wireless LAN and Bluetooth (registered trademark)). A network using infrared rays may be used as the wireless network. A network using optical communication may be used as the wireless network. In this case, the control device 3 and the processing system SYSa may be configured to be able to transmit and receive various information via the network. The control device 3 may be able to transmit information such as commands and control parameters to the processing system SYSa via the network. The processing system SYSa may include a receiving device that receives information such as commands and control parameters from the control device 3 via the network. Alternatively, a first control device that performs a part of the processing performed by the control device 3 may be provided inside the processing system SYSa, while a second control device that performs another part of the processing performed by the control device 3 may be provided outside the processing system SYSa.

[0057] As a recording medium for recording the computer program executed by the arithmetic device, at least one of CD-ROM, CD-R, CD-RW, flexible disk, MO, DVD-ROM, DVD-RAM, DVD-R, DVD+R, DVD-RW, DVD+RW, Blu-ray (registered trademark), magnetic medium such as magnetic tape, magneto-optical disk, semiconductor memory such as USB memory, and any other medium capable of storing a program may be used. The recording medium may include a device capable of recording a computer program (for example, a general-purpose device or a dedicated device in which a computer program is implemented in a state in which it can be executed in at least one of the forms of software and firmware). Furthermore, each process or function included in the computer program may be realized by a logical processing block realized in the control device 3 by the control device 3 (i.e., a computer) executing the computer program, or may be realized by hardware such as a predetermined gate array (FPGA, ASIC) provided in the control device 3, or may be realized in a form in which a logical processing block and a partial hardware module that realizes some elements of the hardware are mixed.

[0058] (1-2) Structure of the processing head 13 Next, an example of the structure of the processing head 13 will be described with reference to Fig. 4. Fig. 4 is a cross-sectional view showing an example of the structure of the processing head 13.

[0059] As shown in FIG. 4, the processing light EL generated by the processing light source 11 is incident on the processing head 13 through an optical transmission member 111 such as an optical fiber. The processing light source 11 may be disposed outside the processing head 13. For example, as shown in FIG. 1 described above, the processing light source 11 may be disposed in a self-propelled drive system 141. In this case, the optical transmission member 111 may extend from the processing light source 11 to the processing head 13 via an arm drive system 142 or along the arm drive system 142. However, the position of the processing light source 11 is not limited to the position shown in FIG. 1. The processing light source 11 may be disposed at any position outside the processing head 13, or may be disposed inside the processing head 13.

[0060] The processing light source 11 can generate the processing light EL. When the processing light EL is a laser light, the processing light source 11 may include, for example, a laser diode. Furthermore, the processing light source 11 may be a light source capable of pulse oscillation. In this case, the processing light source 11 can generate pulsed light (for example, pulsed light having an emission time of picoseconds or less) as the processing light EL. In addition, the processing light source 11 may be a CW light source that generates a CW (continuous wave).

[0061] As described above, the processing head 13 includes the processing optical system 131, the measurement optical system 132, the composite optical system 133, and the objective optical system 134. The processing optical system 131, the measurement optical system 132, the composite optical system 133, and the objective optical system 134 are housed in the head housing 135. However, at least one of the processing optical system 131, the measurement optical system 132, the composite optical system 133, and the objective optical system 134 does not have to be housed in the head housing 135.

[0062] The processing optical system 131 is an optical system into which the processing light EL from the processing light source 11 is incident. The processing optical system 131 is an optical system that emits the processing light EL incident on the processing optical system 131 toward the synthesis optical system 133. The processing light EL emitted by the processing optical system 131 is irradiated onto the workpiece W via the synthesis optical system 133 and the objective optical system 134.

[0063] The processing optical system 131 may include, for example, a position adjustment optical system 1311, an angle adjustment optical system 1312, and a focusing position adjustment optical system 1313. The position adjustment optical system 1311 can adjust the emission position of the processing light EL from the processing optical system 131. The position adjustment optical system 1311 may include, for example, a parallel plane plate that can be tilted with respect to the traveling direction of the processing light EL, and the emission position of the processing light EL may be changed by changing the tilt angle of the parallel plane plate. The angle adjustment optical system 1312 can adjust the emission angle (i.e., the emission direction) of the processing light EL from the processing optical system 131. The angle adjustment optical system 1312 may include, for example, a mirror that can be tilted with respect to the traveling direction of the processing light EL, and the emission angle of the processing light EL may be changed by changing the tilt angle of this mirror. The focusing position adjustment optical system 1313 is an optical member that can adjust the focusing position of the processing light EL in the traveling direction of the processing light EL. The focusing position adjustment optical system 1313 may include, for example, a plurality of lenses arranged along the traveling direction of the processing light EL. In this case, the focusing position of the processing light EL is adjusted by moving at least one of the plurality of lenses along its optical axis direction. Alternatively, the focusing position adjustment optical system 1313 may include, for example, an optical member (typically, a galvanometer mirror) capable of moving the focusing position of the processing light EL along a desired direction by deflecting the processing light EL. However, the processing optical system 131 does not have to include at least one of the position adjustment optical system 1311, the angle adjustment optical system 1312, and the focusing position adjustment optical system 1313.

[0064] The processing light EL emitted from the processing optical system 131 enters the synthesis optical system 133. The synthesis optical system 133 includes a beam splitter (e.g., a polarizing beam splitter) 1331. The beam splitter 1331 emits the processing light EL incident on the beam splitter 1331 toward the objective optical system 134. In the example shown in FIG. 4, the processing light EL incident on the beam splitter 1331 passes through the polarization separation surface of the beam splitter 1331 and is emitted toward the objective optical system 134. For this reason, in the example shown in FIG. 4, the processing light EL enters the polarization separation surface of the beam splitter 1331 in a state having a polarization direction that can pass through the polarization separation surface (e.g., a polarization direction that becomes p-polarized light with respect to the polarization separation surface).

[0065] The processing light EL emitted from the combining optical system 133 is incident on the objective optical system 134. The objective optical system 134 emits the processing light EL incident on the objective optical system 134 toward the workpiece W. The objective optical system 134 includes a galvanometer mirror 1341 and an fθ lens 1342.

[0066] The processing light EL incident on the objective optical system 134 is incident on the galvanometer mirror 1341. The galvanometer mirror 1341 deflects the processing light EL (i.e., changes the emission angle of the processing light EL). The galvanometer mirror 1341 deflects the processing light EL to change the focusing position of the processing light EL in a plane intersecting the optical axis AX of the fθ lens 1342 (i.e., in a plane along the XY plane in the head coordinate system). For this reason, the galvanometer mirror 1341 may be referred to as a focusing position changing device. Normally, as shown in FIG. 4, the processing head 13 irradiates the processing light EL on the workpiece W in a state in which the optical axis AX of the fθ lens 1342 intersects with the surface of the workpiece W. For this reason, when the focusing position of the processing light EL in the plane intersecting the optical axis AX is changed, the irradiation position of the processing light EL on the surface of the workpiece W is changed in a direction along the surface of the workpiece W. In other words, the irradiation position of the processing light EL is changed along at least one of the X-axis direction and the Y-axis direction in the head coordinate system. Therefore, the galvanometer mirror 1341 can function as an irradiation position changing device that can change the irradiation position of the processing light EL on the surface of the workpiece W along the surface of the workpiece W.

[0067] The galvanometer mirror 1341 includes an X-scanning mirror 1341X and a Y-scanning mirror 1341Y. Each of the X-scanning mirror 1341X and the Y-scanning mirror 1341Y is a tilt angle variable mirror whose angle with respect to the optical path of the processing light EL incident on the galvanometer mirror 1341 is changed. The X-scanning mirror 1341X deflects the processing light EL so as to change the irradiation position of the processing light EL on the workpiece W along the X-axis direction in the head coordinate system. In this case, the X-scanning mirror 1341X may be rotatable or swingable around the Y-axis in the head coordinate system. The Y-scanning mirror 1341Y deflects the processing light EL so as to change the irradiation position of the processing light EL on the workpiece W along the Y-axis direction in the head coordinate system. In this case, the Y-scanning mirror 1341Y may be rotatable or swingable around the X-axis in the head coordinate system.

[0068] In addition, the processing optical system 131 may include any deflection optical member capable of deflecting the processing light EL in addition to or instead of the galvanometer mirror 1341. An example of such a deflection optical member is a polygon mirror having a plurality of reflecting surfaces with different angles. The polygon mirror is rotatable so as to change the incident angle of the processing light EL with respect to one reflecting surface during a period in which the processing light EL is irradiated onto the one reflecting surface and to switch the reflecting surface onto which the processing light EL is irradiated among a plurality of reflecting surfaces. Another example of such a deflection optical member is at least one of an acousto-optical element, an electro-optical element, a MEMS mirror, and a two-dimensional mirror capable of rotating (swinging) in two axial directions.

[0069] Alternatively, the irradiation position of the processing light EL on the surface of the workpiece W is also changed when the head drive system 14 described above moves the processing head 13 relative to the workpiece W. For this reason, the processing device 1 does not need to be equipped with the galvanometer mirror 1341.

[0070] The processing light EL from the galvanometer mirror 1341 is incident on the fθ lens 1342. The fθ lens 1342 irradiates the processing light EL from the galvanometer mirror 1341 onto the workpiece W. Specifically, the fθ lens 1342 emits the processing light EL in a direction along the optical axis AX of the fθ lens 1342. As a result, the processing light EL emitted by the fθ lens 1342 travels in a direction along the optical axis AX to be incident on the workpiece W.

[0071] The fθ lens 1342 focuses the processing light EL from the galvanometer mirror 1341 onto the workpiece W. In this case, the processing light EL emitted from the fθ lens 1342 may be irradiated onto the workpiece W without passing through another optical element having power (in other words, an optical member such as a lens). In this case, the fθ lens 1342 may be referred to as the final optical element since it is the optical element having the final stage of power (i.e., the optical element closest to the workpiece W) among multiple optical elements arranged on the optical path of the processing light EL.

[0072] In order for the machining head 13 to irradiate the workpiece W with the processing light EL, the machining head 13 may include at least an fθ lens 1342. In this case, the processing light EL may be incident on the machining head 13 via the processing optical system 131, the synthesis optical system 133, and the galvanometer mirror 1341 arranged outside the machining head 13. The machining head 13 may irradiate the processing light EL incident on the machining head 13 onto the workpiece W via the fθ lens 1342.

[0073] The measurement light ML2 generated by the measurement light source 12 is further incident on the processing head 13 via an optical transmission member 121 such as an optical fiber. The measurement light source 12 may be disposed outside the processing head 13. For example, as shown in FIG. 1 described above, the measurement light source 12 may be disposed in a self-propelled drive system 141. In this case, the optical transmission member 121 may extend from the measurement light source 12 to the processing head 13 via an arm drive system 142 or along the arm drive system 142. However, the position of the measurement light source 12 is not limited to the position shown in FIG. 1. The measurement light source 12 may be disposed at any position outside the processing head 13 (for example, on the support surface SS), or may be disposed inside the processing head 13.

[0074] The measurement light source 12 may include an optical frequency comb light source. The optical frequency comb light source is a light source capable of generating light including frequency components equally spaced on the frequency axis (hereinafter referred to as "optical frequency comb") as pulsed light. In this case, the measurement light source 12 emits pulsed light including frequency components equally spaced on the frequency axis as the measurement light ML2. However, the measurement light source 12 may include a light source different from the optical frequency comb light source.

[0075] In the example shown in FIG. 4, the processing system SYSa includes a plurality of measurement light sources 12. For example, the processing system SYSa may include a measurement light source 12#1 and a measurement light source 12#2. The plurality of measurement light sources 12 each emit a plurality of measurement light beams ML2 that are phase-synchronized with each other and have coherence. For example, the plurality of measurement light sources 12 may have different oscillation frequencies. Therefore, the plurality of measurement light beams ML2 emitted by the plurality of measurement light sources 12 each become a plurality of measurement light beams ML2 with different pulse frequencies (for example, the number of pulse light beams per unit time, which is the reciprocal of the emission period of the pulse light). As an example, the measurement light source 12#1 may emit a measurement light ML2#1 with a pulse frequency of 25 GHz, and the measurement light source 12#2 may emit a measurement light ML2#2 with a pulse frequency of 25 GHz+α (for example, +100 kHz). However, the processing system SYSa may include a single measurement light source 12.

[0076] The measurement light ML2 emitted from the measurement light source 12 is incident on the measurement optical system 132. The measurement optical system 132 is an optical system that emits the measurement light ML2 incident on the measurement optical system 132 toward the synthesis optical system 133. The measurement light ML2 emitted by the measurement optical system 132 is irradiated onto the workpiece W via the synthesis optical system 133 and the objective optical system 134. That is, the measurement optical system 132 irradiates the measurement light ML2 onto the workpiece W via the synthesis optical system 133 and the objective optical system 134 in order to measure the workpiece W.

[0077] The measurement optical system 132 includes, for example, a mirror 1320, a beam splitter 1321, a beam splitter 1322, a detector 1323, a beam splitter 1324, a mirror 1325, a detector 1326, a mirror 1327, and a galvanometer mirror 1328.

[0078] The measurement light ML2 emitted from the measurement light source 12 is incident on the beam splitter 1321. Specifically, the measurement light ML2 emitted from the measurement light source 12#1 (hereinafter referred to as “measurement light ML2#1”) is incident on the beam splitter 1321. The measurement light ML2 emitted from the measurement light source 12#2 (hereinafter referred to as “measurement light ML2#2”) is incident on the beam splitter 1321 via the mirror 1320. The beam splitter 1321 emits the measurement light ML2#1 and ML#2 incident on the beam splitter 1321 toward the beam splitter 1322.

[0079] The beam splitter 1322 reflects measurement light ML2#1-1, which is a part of measurement light ML2#1 incident on the beam splitter 1322, toward the detector 1323. The beam splitter 1322 emits measurement light ML2#1-2, which is the other part of measurement light ML2#1 incident on the beam splitter 1322, toward the beam splitter 1324. The beam splitter 1322 reflects measurement light ML2#2-1, which is a part of measurement light ML2#2 incident on the beam splitter 1322, toward the detector 1323. The beam splitter 1322 emits measurement light ML2#2-2, which is the other part of measurement light ML2#2 incident on the beam splitter 1322, toward the beam splitter 1324.

[0080] The measurement beams ML2#1-1 and ML#2-1 emitted from the beam splitter 1322 are incident on the detector 1323. The detector 1323 detects interference light generated by interference between the measurement beams ML2#1-1 and ML2#2-1. Specifically, the detector 1323 detects the interference light by receiving the interference light. For this reason, the detector 1323 may include a light receiving element (light receiving unit, typically a photoelectric conversion element) capable of receiving light. The detection result of the detector 1323 is output to the control device 3.

[0081] The measurement beams ML2#1-2 and ML#2-2 emitted from the beam splitter 1322 are incident on the beam splitter 1324. The beam splitter 1324 emits at least a portion of the measurement beam ML2#1-2 incident on the beam splitter 1324 toward a mirror 1325. The beam splitter 1324 emits at least a portion of the measurement beam ML2#2-2 incident on the beam splitter 1324 toward a mirror 1327.

[0082] The measurement light ML2#1-2 emitted from the beam splitter 1324 is incident on the mirror 1325. The measurement light ML2#1-2 incident on the mirror 1325 is reflected by a reflecting surface of the mirror 1325 (the reflecting surface may be referred to as a reference surface). Specifically, the mirror 1325 reflects the measurement light ML2#1-2 incident on the mirror 1325 toward the beam splitter 1324. That is, the mirror 1325 emits the measurement light ML2#1-2 incident on the mirror 1325 as the reflected light, that is, the measurement light ML2#1-3, toward the beam splitter 1324. In this case, the measurement light ML2#1-3 may be referred to as a reference light. The measurement light ML2#1-3 emitted from the mirror 1325 is incident on the beam splitter 1324. The beam splitter 1324 emits the measurement light ML2#1-3 incident on the beam splitter 1324 toward the beam splitter 1322. The measurement light ML2#1-3 emitted from the beam splitter 1324 is incident on the beam splitter 1322. The beam splitter 1322 emits the measurement light ML2#1-3 incident on the beam splitter 1322 toward the detector 1326.

[0083] On the other hand, measurement light ML2#2-2 emitted from beam splitter 1324 is incident on mirror 1327. Mirror 1327 reflects measurement light ML2#2-2 incident on mirror 1327 toward galvanometer mirror 1328. That is, mirror 1327 emits measurement light ML#2-2 incident on mirror 1327 toward galvanometer mirror 1328.

[0084] The galvanometer mirror 1328 deflects the measurement light ML#2-2 (i.e., changes the emission angle of the measurement light ML#2-2). The galvanometer mirror 1328 deflects the measurement light ML2#2-2 to change the focusing position of the measurement light ML2#2-2 in a plane intersecting the optical axis AX of the fθ lens 1342 (i.e., in a plane along the XY plane in the head coordinate system). Usually, as shown in FIG. 4, the machining head 13 irradiates the measurement light ML2#2-2 onto the workpiece W in a state in which the optical axis AX of the fθ lens 1342 intersects with the surface of the workpiece W. Therefore, when the focusing position of the measurement light ML2#2-2 in the plane intersecting the optical axis AX is changed, the irradiation position of the measurement light ML2#2-2 on the surface of the workpiece W is changed in a direction along the surface of the workpiece W. That is, the irradiation position of the measurement light ML2#2-2 is changed along at least one of the X-axis direction and the Y-axis direction in the head coordinate system. Therefore, the galvanometer mirror 1341 can function as an irradiation position changing device that can change the irradiation position of the measurement light ML2#2-2 on the surface of the workpiece W along the surface of the workpiece W.

[0085] The galvanometer mirror 1328 includes an X-scanning mirror 1328X and a Y-scanning mirror 1328Y. Each of the X-scanning mirror 1328X and the Y-scanning mirror 1328Y is a tilt angle variable mirror in which the angle with respect to the optical path of the measurement light ML2#2-2 incident on the galvanometer mirror 1328 is changed. The X-scanning mirror 1328X deflects the measurement light ML2#2-2 so as to change the irradiation position of the measurement light ML2#2-2 on the workpiece W along the X-axis direction in the head coordinate system. In this case, the X-scanning mirror 1328X may be rotatable or swingable around the Y-axis in the head coordinate system. The Y-scanning mirror 1328Y deflects the processing light EL so as to change the irradiation position of the measurement light ML2#2-2 on the workpiece W along the Y-axis direction in the head coordinate system. In this case, the Y-scanning mirror 1328Y may be rotatable or swingable around the X-axis in the head coordinate system.

[0086] The measurement light ML2#2-2 from the galvanometer mirror 1328 enters the combining optical system 133. The beam splitter 1331 of the combining optical system 133 emits the measurement light ML2#2-2 incident on the beam splitter 1331 toward the objective optical system 134. In the example shown in Fig. 4, the measurement light ML2#2-2 incident on the combining optical system 133 is reflected on the polarization separation surface and thereby emitted toward the objective optical system 134. For this reason, in the example shown in Fig. 4, the measurement light ML2#2-2 enters the polarization separation surface of the beam splitter 1331 while having a polarization direction that can be reflected on the polarization separation surface (for example, a polarization direction that becomes s-polarized light with respect to the polarization separation surface).

[0087] Here, as described above, the processing light EL is incident on the beam splitter 1331 in addition to the measurement light ML2#2-2. That is, both the measurement light ML2#2-2 and the processing light EL pass through the beam splitter 1331. The beam splitter 1331 outputs the processing light EL and the measurement light ML2#2-2, which are incident on the beam splitter 1331 from different directions, in the same direction (that is, toward the same objective optical system 134). Therefore, the beam splitter 1331 essentially functions as a combining optical member that combines the processing light EL and the measurement light ML2#2-2.

[0088] In addition, when the wavelengths of the processing light EL and the measurement light ML2 are different, the combining optical system 133 may include a dichroic mirror as a combining optical member instead of the beam splitter 1331. Even in this case, the combining optical system 133 can combine the processing light EL and the measurement light ML2#2-2 using the dichroic mirror (that is, combine the optical path of the processing light EL and the optical path of the measurement light ML2#2-2).

[0089] The measurement light ML2#2-2 emitted from the beam splitter 1331 is incident on the galvanometer mirror 1341. The galvanometer mirror 1341 deflects the measurement light ML2#2-2 in the same manner as when it deflects the processing light EL. Therefore, the galvanometer mirror 1341 can change the irradiation position of the measurement light ML2#2-2 on the surface of the workpiece W in the direction along the surface of the workpiece W.

[0090] As described above, the processing light EL is incident on the galvanometer mirror 1341 in addition to the measurement light ML2#2-2. That is, the processing light EL and the measurement light ML2#2-2 combined by the beam splitter 1331 are incident on the galvanometer mirror 1341. Therefore, both the measurement light ML2#2-2 and the processing light EL pass through the same galvanometer mirror 1341. Therefore, the galvanometer mirror 1341 can synchronously change the irradiation position of the processing light EL on the workpiece W and the irradiation position of the measurement light ML2#2-2 on the workpiece W. That is, the galvanometer mirror 1341 can change the irradiation position of the processing light EL on the workpiece W and the irradiation position of the measurement light ML2#2-2 on the workpiece W in conjunction with each other.

[0091] On the other hand, as described above, the measurement light ML#2-2 is irradiated onto the workpiece W via the galvanometer mirror 1328, while the processing light EL is irradiated onto the workpiece W without passing through the galvanometer mirror 1328. Therefore, the processing system SYSa can independently move the irradiation position of the measurement light ML#2-2 on the workpiece W relative to the irradiation position of the processing light EL on the workpiece W using the galvanometer mirror 1328. The processing system SYSa can independently change the irradiation position of the processing light EL on the workpiece W and the irradiation position of the measurement light ML#2-2 on the workpiece W. The processing system SYSa can change the positional relationship between the irradiation position of the processing light EL on the workpiece W and the irradiation position of the measurement light ML#2-2 on the workpiece W. Note that, when the positional relationship between the irradiation position of the processing light EL on the workpiece W and the irradiation position of the measurement light ML#2-2 on the workpiece W is not changed, the processing system SYSa does not need to include the galvanometer mirror 1328.

[0092] The measurement light ML2#2-2 emitted from the galvanometer mirror 1341 is incident on the fθ lens 1342. The fθ lens 1342 irradiates the measurement light ML2#2-2 from the galvanometer mirror 1341 onto the workpiece W. Specifically, the fθ lens 1342 emits the measurement light ML2#2-2 in a direction along the optical axis AX of the fθ lens 1342. As a result, the measurement light ML2#2-2 emitted by the fθ lens 1342 travels in a direction along the optical axis AX to be incident on the workpiece W.

[0093] The fθ lens 1342 may focus the measurement light ML2#2-2 from the galvanometer mirror 1341 onto the workpiece W. In this case, the measurement light ML2#2-2 emitted from the fθ lens 1342 may be irradiated onto the workpiece W without passing through another optical element (in other words, an optical member such as a lens) having power.

[0094] When the workpiece W is irradiated with the measurement light ML2#2-2, light resulting from the irradiation of the measurement light ML2#2-2 is generated from the workpiece W. In other words, when the workpiece W is irradiated with the measurement light ML2#2-2, light resulting from the irradiation of the measurement light ML2#2-2 is emitted from the workpiece W. The light resulting from the irradiation of the measurement light ML2#2-2 (in other words, light emitted from the workpiece W due to the irradiation of the measurement light ML2#2-2) may include at least one of the measurement light ML2#2-2 reflected by the workpiece W (i.e., reflected light), the measurement light ML2#2-2 scattered by the workpiece W (i.e., scattered light), the measurement light ML2#2-2 diffracted by the workpiece W (i.e., diffracted light), and the measurement light ML2#2-2 transmitted through the workpiece W (i.e., transmitted light).

[0095] At least a part of the light emitted from the workpiece W due to the irradiation of the measurement light ML2#2-2 (hereinafter, this light is referred to as "measurement light ML2#2-3") enters the objective optical system 134. The measurement light ML2#2-3 that entered the objective optical system 134 enters the synthesis optical system 133 via the fθ lens 1342 and the galvanometer mirror 1341. The beam splitter 1331 of the synthesis optical system 133 emits the measurement light ML2#2-3 that entered the beam splitter 1331 toward the measurement optical system 132. In the example shown in FIG. 4, the measurement light ML2#2-3 that entered the beam splitter 1331 is reflected at the polarization separation surface and is emitted toward the measurement optical system 132. For this reason, in the example shown in FIG. 4, the measurement light ML2#2-3 enters the polarization separation surface of the beam splitter 1331 in a state in which it has a polarization direction that can be reflected at the polarization separation surface.

[0096] The measurement light ML2#2-3 emitted from the beam splitter 1331 is incident on a galvanometer mirror 1328 of the measurement optical system 132. The galvanometer mirror 1328 emits the measurement light ML2#2-3 incident on the galvanometer mirror 1328 toward a mirror 1327. The mirror 1327 reflects the measurement light ML2#2-3 incident on the mirror 1327 toward the beam splitter 1324. The beam splitter 1324 emits at least a portion of the measurement light ML2#2-3 incident on the beam splitter 1324 toward the beam splitter 1322. The beam splitter 1322 emits at least a portion of the measurement light ML2#2-3 incident on the beam splitter 1322 toward a detector 1326.

[0097] As described above, in addition to the measurement light ML2#2-3, the measurement light ML2#1-3 is incident on the detector 1326. That is, the measurement light ML2#2-3 directed toward the detector 1326 via the workpiece W and the measurement light ML2#1-3 directed toward the detector 1326 without passing through the workpiece W are incident on the detector 1326. The detector 1326 detects interference light generated by interference between the measurement light ML2#1-3 and the measurement light ML2#2-3. Specifically, the detector 1326 detects the interference light by receiving the interference light. For this reason, the detector 1326 may be provided with a light receiving element (light receiving unit) capable of receiving light. The detection result of the detector 1326 is output to the control device 3.

[0098] The control device 3 calculates the state of the workpiece W (typically, the position of the workpiece W, as described above) based on the detection results of the detector 1323 and the detector 1326. Specifically, since the pulse frequency of the measurement light ML2#1 is different from the pulse frequency of the measurement light ML2#2, the pulse frequency of the measurement light ML2#1-1 is different from the pulse frequency of the measurement light ML2#2-1. Therefore, the interference light between the measurement light ML2#1-1 and the measurement light ML2#2-1 becomes an interference light in which a pulse light appears in synchronization with the timing when the pulse light constituting the measurement light ML2#1-1 and the pulse light constituting the measurement light ML2#2-1 are simultaneously incident on the detector 1323. Similarly, the pulse frequency of the measurement light ML2#1-3 is different from the pulse frequency of the measurement light ML2#2-3. Therefore, the interference light between the measurement light ML2#1-3 and the measurement light ML2#2-3 becomes an interference light in which a pulsed light appears in synchronization with the timing when the pulsed light constituting the measurement light ML2#1-3 and the pulsed light constituting the measurement light ML2#2-3 are simultaneously incident on the detector 1326. Here, the position (position on the time axis) of the pulsed light that creates the interference light detected by the detector 1326 varies based on the positional relationship between the processing head 13 and the workpiece W. This is because the interference light detected by the detector 1326 is the interference light between the measurement light ML2#2-3 heading toward the detector 1326 via the workpiece W and the measurement light ML2#1-3 heading toward the detector 1326 without going through the workpiece W. On the other hand, the position (position on the time axis) of the pulsed light that creates the interference light detected by the detector 1323 does not vary based on the positional relationship between the processing head 13 and the workpiece W. For this reason, it can be said that the time difference between the pulsed light that creates the interference light detected by the detector 1326 and the pulsed light that creates the interference light detected by the detector 1323 indirectly indicates the positional relationship between the processing head 13 and the workpiece W (typically, the distance between the processing head 13 and the workpiece W). For this reason, the control device 3 can calculate the state of the workpiece W based on the time difference between the pulsed light that creates the interference light detected by the detector 1326 and the pulsed light that creates the interference light detected by the detector 1323. Specifically, the control device 3 can calculate the position of the irradiated portion of the workpiece W irradiated with the measurement light ML2#2-2 based on the time difference between the pulsed light that creates the interference light detected by the detector 1326 and the pulsed light that creates the interference light detected by the detector 1323.In particular, the control device 3 can calculate the position of the irradiated portion of the workpiece W in the irradiation direction of the measurement light ML2 emitted from the fθ lens 1342 (i.e., the Z-axis direction of the head coordinate system). That is, the control device 3 can calculate the position of the workpiece W in the Z-axis direction of the head coordinate system.

[0099] As shown in FIG. 5, the processing head 13 may deflect the measurement light ML2#2-2 using at least one of the galvanometer mirrors 1328 and 1341 to sequentially irradiate the measurement light ML2#2-2 to a plurality of locations on the workpiece W. Alternatively, the processing head 13 may scan the surface of the workpiece W with the measurement light ML2#2-2 by deflecting the measurement light ML2#2-2 using at least one of the galvanometer mirrors 1328 and 1341. In this case, the control device 3 can calculate the positions of a plurality of irradiated portions of the workpiece W in the irradiation direction of the measurement light ML2 emitted from the fθ lens 1342 (i.e., the Z-axis direction of the head coordinate system). As a result, the control device 3 may calculate the shape of the surface of the workpiece W. Furthermore, the control device 3 may calculate the position of the workpiece W in at least one of the rotation direction around the X-axis of the head coordinate system and the rotation direction around the Y-axis of the head coordinate system based on the positions of at least three irradiated portions of the workpiece W in the Z-axis direction of the head coordinate system.

[0100] In this way, the processing device 1, in cooperation with the control device 3, can measure the position of the workpiece W using the measurement light ML2 irradiated to the workpiece W via the measurement optical system 132 (further, the composite optical system 133 and the objective optical system 134). In particular, the processing device 1, in cooperation with the control device 3, can measure the position of the workpiece W using the measurement light ML2 irradiated to the workpiece W via at least the fθ lens 1342. For example, the processing device 1, in cooperation with the control device 3, can measure the position of the workpiece W in at least one of the direction along the Z axis of the head coordinate system, the rotation direction around the X axis of the head coordinate system, and the rotation direction around the Y axis of the head coordinate system. For this reason, the measurement optical system 132 and the like used to irradiate the measurement light ML2 to the workpiece W may be referred to as a measurement device.

[0101] (1-3) Structure of head drive system 14 Next, a description will be given of an example of the structure of head drive system 14. As described above, head drive system 14 includes self-propelled drive system 141, arm drive system 142, and fine movement drive system 143. Therefore, hereinafter, self-propelled drive system 141, arm drive system 142, and fine movement drive system 143 will be described in that order.

[0102] (1-3-1-1) Structure of self-propelled drive system 141 First, the self-propelled drive system 141 will be described with reference to Fig. 6. Fig. 6 is a cross-sectional view showing the structure of the self-propelled drive system 141.

[0103] As shown in FIG. 6, the self-propelled drive system 141 includes a dolly 1411 and a motor 1412. The dolly 1411 is a platform on which wheels are attached. The dolly 1411 is disposed on a support surface SS. The wheels of the dolly 1411 can rotate using the power of the motor 1412. As a result, the dolly 1411 can move on the support surface SS using the power of the motor 1412 that is driven under the control of the control device 3. In other words, the dolly 1411 can move on the support surface SS by itself using the power of the motor 1412. In this case, the motor 1412 may be regarded as functioning as a moving mechanism that moves the dolly 1411.

[0104] The carriage 1411 is connected to the arm drive system 142. Therefore, the carriage 1411 may be referred to as a connection member to which the arm drive system 142 is connected. Specifically, the arm drive system 142 is attached (i.e., fixed) to the carriage 1411 (to the upper surface of the carriage 1411 in the example shown in FIG. 6). Therefore, when the carriage 1411 moves, the arm drive system 142 also moves. Furthermore, the fine movement drive system 143 is connected to the arm drive system 142. Specifically, the fine movement drive system 143 is attached (i.e., fixed) to the arm drive system 142. Therefore, when the carriage 1411 moves, the fine movement drive system 143 also moves. Furthermore, the processing head 13 is connected to the fine movement drive system 143. Specifically, the processing head 13 is attached (i.e., fixed) to the fine movement drive system 143. Therefore, when the carriage 1411 moves, the processing head 13 also moves. Therefore, the self-propelled drive system 141 can function as a moving device that moves the processing head 13 by self-propelling.

[0105] As described in detail later, the control device 3 may control the self-propelled drive system 141 based on the measurement result by the measuring device 2. That is, the control device 3 may control the self-propelled drive system 141 to move the processing head 13 relative to the workpiece W based on the position of at least one of the processing head 13 and the workpiece W measured by the measuring device 2. For example, as described above, the measuring device 2 can measure the position of at least one of the processing head 13 and the workpiece W in at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction. Therefore, the control device 3 may control the self-propelled drive system 141 to move the processing head 13 along at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction based on the measurement result by the measuring device 2. However, the control device 3 may control the self-propelled drive system 141 based on at least one of the measurement result by the processing head 13 and the measurement result by the imaging device 15.

[0106] (1-3-1-2) Structure of arm drive system 142 Next, the structure of the arm drive system 142 will be described with reference to Fig. 6. Fig. 6 is a cross-sectional view showing the structure of the arm drive system 142.

[0107] As shown in Fig. 6, the arm drive system 142 includes a base 1420. The base 1420 is connected to the self-propelled drive system 141 (specifically, the dolly 1411). That is, the base 1420 is attached to (that is, fixed to) the dolly 1411. For this reason, the base 1420 may be referred to as a connection member that is connected to the self-propelled drive system 141. One end of a robot arm 1421 is attached to the base 1420. The base 1420 supports the robot arm 1421. The base 1420 is used as a base member for supporting the robot arm 1421.

[0108] As shown in Fig. 6, the above-mentioned processing light source 11 and measurement light source 12 are disposed near a portion of the carriage 1411 to which the stand 1420 is connected. However, the arrangement positions of the processing light source 11 and the measurement light source 12 are not limited to the example shown in Fig. 6. For example, at least one of the processing light source 11 and the measurement light source 12 may be disposed in the arm drive system 142. For example, at least one of the processing light source 11 and the measurement light source 12 may be disposed inside an exterior member constituting at least one of the self-propelled drive system 141 and the arm drive system 142 so as not to be visible from the outside.

[0109] The robot arm 1421 includes a plurality of arm members 1422. The plurality of arm members 1422 are movably connected via at least one joint member 1423. Therefore, the robot arm 1421 may be called a movable arm. The robot arm 1421 may be a manipulator having three or more degrees of freedom. Therefore, the arm drive system 142 may function as a robot having a so-called vertical multi-joint structure. The arm drive system 142 is not limited to a robot having a vertical multi-joint structure, and may function as, for example, a robot having a horizontal multi-joint structure, such as a polar coordinate type robot, a cylindrical coordinate type robot, a Cartesian coordinate type robot, or a parallel link type robot. The arm drive system 142 may include a single joint (i.e., a drive axis defined by the joint member 1423). Alternatively, the arm drive system 142 may include a plurality of joints.

[0110] The joint member 1423 may connect at least two arm members such that one arm member 1422 connected to the joint member 1423 can rotate around one drive axis (e.g., at least one of a rotation axis around the X-axis, a rotation axis around the Y-axis, and a rotation axis around the Z-axis) with respect to one arm member 1422 connected to the joint member 1423. The joint member 1423 may connect at least two arm members such that the other arm member 1422 connected to the joint member 1423 can move along one drive axis (e.g., at least one of a movement axis along the X-axis, a movement axis along the Y-axis, and a movement axis along the Z-axis) with respect to one arm member 1422 connected to the joint member 1423.

[0111] The two arm members 1422 connected via a joint member 1423 are moved by actuators 1424 corresponding to each joint. Fig. 6 shows an example in which the arm drive system 142 is provided with four actuators 1424 corresponding to the four joint members 1423. As a result, at least one arm member 1422 moves. Therefore, at least one arm member 1422 is movable with respect to the workpiece W. In other words, at least one arm member 1422 is movable so that the relative positional relationship between the at least one arm member 1422 and the workpiece W is changed.

[0112] A fine movement drive system 143 is connected to the robot arm 1421. Specifically, the fine movement drive system 143 is connected (i.e., attached or fixed) to one arm member 1422″ that is located at a position farthest from the base 1420 among the multiple arm members 1422. For ease of explanation, the one arm member 1422 to which the fine movement drive system 143 is attached will be referred to as the distal arm member 1425 below. The fine movement drive system 143 may be directly attached to the distal arm member 1425, or may be indirectly attached to the distal arm member 1425 via another member. The distal arm member 1425 may be referred to as a connecting member to which the fine movement drive system 143 is connected.

[0113] When the distal arm member 1425 is moved by the actuator 1424 described above, the distal arm member 1425 moves relative to the base 1420. In other words, when the distal arm member 1425 moves, the relative position between the base 1420 and the distal arm member 1425 changes. As a result, the fine movement drive system 143 attached to the distal arm member 1425 also moves. Therefore, the arm drive system 142 can move the fine movement drive system 143. Specifically, the arm drive system 142 can move the fine movement drive system 143 relative to the workpiece W. The arm drive system 142 can move the fine movement drive system 143 so that the relative positional relationship between the fine movement drive system 143 and the workpiece W is changed. In addition, when the fine movement drive system 143 moves, the processing head 13 attached to the fine movement drive system 143 also moves. Therefore, the arm drive system 142 can function as a moving device that moves the processing head 13. In addition to or instead of the fine movement drive system 143 attached to the distal arm member 1425, the fine movement drive system 143 may be disposed between the multiple arm members 1422. The fine movement drive system 143 may also be disposed between the arm member 1422 and the joint member 1423, and / or between the joint member 1423 and the base 1420.

[0114] As described in detail later, the control device 3 may control the arm drive system 142 based on the measurement result by the measuring device 2. That is, the control device 3 may control the arm drive system 142 to move the processing head 13 based on the position of at least one of the processing head 13 and the workpiece W measured by the measuring device 2. For example, as described above, the measuring device 2 can measure the position of at least one of the processing head 13 and the workpiece W in at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction. Therefore, the control device 3 may control the arm drive system 142 to move the processing head 13 along at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction based on the measurement result by the measuring device 2. However, the control device 3 may control the arm drive system 142 based on at least one of the measurement result by the processing head 13 and the measurement result by the imaging device 15.

[0115] (1-3-1-2) Structure of the fine motion drive system 143 Next, the structure of the fine movement drive system 143 will be described with reference to Fig. 7. Fig. 7 is a cross-sectional view showing the structure of the fine movement drive system 143.

[0116] As shown in FIG. 7, the fine movement drive system 143 includes a support member 1431 , a support member 1432 , an air spring 1433 , a damper member 1434 , and a drive member 1435 .

[0117] The support member 1431 is connected to the arm drive system 142. Specifically, the support member 1431 is attached (i.e., fixed) to the distal arm member 1425 of the arm drive system 142. Therefore, the support member 1431 may be referred to as a connecting member connected to the arm drive system 142. The support member 1432 is attached to the processing head 13. Therefore, the support member 1432 may be referred to as a connecting member connected to the processing head 13.

[0118] The support member 1431 and the support member 1432 are coupled (in other words, connected) via the air spring 1433, the damper member 1434, and the drive member 1435. That is, the air spring 1433, the damper member 1434, and the drive member 1435 are attached to the support members 1431 and 1432, respectively, so as to couple the support member 1431 and the support member 1432. Since the arm drive system 142 is attached to the support member 1431 and the machining head 13 is attached to the support member 1432, the air spring 1433, the damper member 1434, and the drive member 1435 may be regarded as being substantially attached to the support members 1431 and 1432, respectively, so as to couple the arm drive system 142 and the machining head 13.

[0119] The air spring 1433 applies an elastic force caused by the pressure of a gas (air, for example) to at least one of the support members 1431 and 1432 under the control of the control device 3. The air spring 1433 applies an elastic force caused by the pressure of the gas to at least one of the arm drive system 142 and the processing head 13 via at least one of the support members 1431 and 1432 under the control of the control device 3. In particular, the air spring 1433 may apply an elastic force caused by the pressure of the gas to at least one of the support members 1431 and 1432 along a direction in which the support members 1431 and 1432 are aligned (for example, the Z-axis direction in the arm coordinate system, which is the direction of gravity, for example). The air spring 1433 may be referred to as an elastic member.

[0120] In order to impart an elastic force caused by the gas pressure, gas is supplied to the air spring 1433 from a gas supply device 14361 via a pipe 14362 and a valve 14363. The control device 3 controls at least one of the gas supply device 14361 and the valve 14363 based on the measurement result of a pressure gauge 1436 that measures the gas pressure in the air spring 1433. Note that the fine movement drive system 143 does not need to include the gas supply device 14361, the pipe 14362, and the valve 14363. In this case, the air spring 1433 may impart an elastic force caused by the internal gas pressure to at least one of the support members 1431 and 1432, regardless of the control of the control device 3.

[0121] The air spring 1433 may support the weight of the support member 1432 by using an elastic force under the control of the control device 3. Specifically, the air spring 1433 may support the weight of the support member 1432 by using an elastic force along the direction in which the support members 1431 and 1432 are aligned (for example, the Z-axis direction in the head coordinate system). Since the processing head 13 is attached to the support member 1432, the air spring 1433 may support the weight of the processing head 13 attached to the support member 1432 by using an elastic force. Specifically, the air spring 1433 may support the weight of the processing head 13 by using an elastic force along the direction in which the arm drive system 142 (particularly, the distal arm member 1425) and the processing head 13 are aligned. In this case, the air spring 1433 may function as a weight canceller that cancels the weight of the processing head 13. The air spring 1433 may support the weight of the support member 1432 by using an elastic force, regardless of the control of the control device 3.

[0122] The air spring 1433 may use elastic force to reduce vibrations transmitted between the arm drive system 142 and the processing head 13 via the fine movement drive system 143 under the control of the control device 3. That is, the air spring 1433 may use elastic force to damp vibrations transmitted between the arm drive system 142 and the processing head 13 via the fine movement drive system 143. Specifically, the air spring 1433 may use elastic force to reduce (dampen) vibrations traveling (i.e., transmitted) from the arm drive system 142 to the processing head 13 via the fine movement drive system 143. In this case, the control device 3 may control at least one of the gas supply device 14361 and the valve 14363 based on the measurement result of the pressure gauge 1436 so that the vibrations transmitted between the arm drive system 142 and the processing head 13 via the fine movement drive system 143 are reduced (i.e., damped). Furthermore, the air spring 1433 may utilize elastic force to reduce vibrations transmitted between the arm drive system 142 and the processing head 13 via the fine movement drive system 143, regardless of the control of the control device 3.

[0123] The damper member 1434 imparts an elastic force caused by a factor other than air pressure to at least one of the support members 1431 and 1432. The damper member 1434 imparts an elastic force caused by a factor other than air pressure to at least one of the arm drive system 142 and the processing head 13 via at least one of the support members 1431 and 1432. In particular, the damper member 1434 may impart an elastic force to at least one of the support members 1431 and 1432 along a direction in which the support members 1431 and 1432 are aligned (for example, the Z-axis direction in the head coordinate system, which is the direction of gravity, as an example). In other words, the damper member 1434 may impart an elastic force to at least one of the arm drive system 142 and the processing head 13 via at least one of the support members 1431 and 1432 along a direction in which the arm drive system 142 (particularly, the distal arm member 1425) and the processing head 13 are aligned. The damper member 1434 may also be referred to as an elastic member.

[0124] The damper member 1434 may support the weight of the support member 1432 by using an elastic force, similar to the air spring 1433. The damper member 1434 may reduce vibration transmitted between the arm drive system 142 and the processing head 13 via the fine movement drive system 143 by using an elastic force, similar to the air spring 1433. The damper member 1434 may convert the vibration of the air spring 1433 into damped vibration by using an elastic force. In other words, the damper member 1434 may convert the vibration transmitted between the arm drive system 142 and the processing head 13 via the fine movement drive system 143 into damped vibration by using an elastic force.

[0125] The damper member 1434 may be any member capable of applying elastic force. For example, the damper member 1434 may include a compression spring coil. For example, the damper member 1434 may include a leaf spring.

[0126] The driving member 1435 can generate a driving force under the control of the control device 3. The driving member 1435 can impart the generated driving force to at least one of the support members 1431 and 1432. The driving member 1435 can impart the generated driving force to at least one of the arm driving system 142 and the processing head 13 via at least one of the support members 1431 and 1432. The driving member 1435 may have any structure as long as it can generate a driving force. For example, the driving member 1435 may have a structure capable of electrically generating a driving force. For example, the driving member 1435 may have a structure capable of magnetically generating a driving force. As an example, FIG. 7 shows an example in which the driving member 1435 is a voice coil motor (VCM) capable of electrically generating a driving force. Note that since a voice coil motor is a type of linear motor, the driving member 1435 may be a linear motor different from the voice coil motor. The drive member 1435 may be a device that generates a driving force along a linear axis.

[0127] The driving member 1435 may have a structure in which a member of the driving member 1435 attached to the support member 1431 does not come into physical contact with a member of the driving member 1435 attached to the support member 1432. For example, when the driving member 1435 is a voice coil motor, a member of the driving member 1435 attached to the support member 1431 (e.g., a member including either a coil or a magnetic pole) does not come into physical contact with a member of the driving member 1435 attached to the support member 1432 (e.g., a member including the other of a coil or a magnetic pole).

[0128] The driving member 1435 may move at least one of the support members 1431 and 1432 using a driving force under the control of the control device 3. The driving member 1435 may move at least one of the arm driving system 142 and the processing head 13 by moving at least one of the support members 1431 and 1432 using a driving force under the control of the control device 3. In this case, the driving member 1435 may change the relative position between the arm driving system 142 and the processing head 13 by moving at least one of the arm driving system 142 and the processing head 13 using a driving force.

[0129] The driving member 1435 may change the relative position between the arm driving system 142 and the processing head 13 under the control of the control device 3 based on the measurement result of the position measurement device 1437 included in the fine movement driving system 143. The position measurement device 1437 measures the relative position between the arm driving system 142 and the processing head 13. For example, the position measurement device 1437 may be an encoder including a detection unit 14371 attached to the support member 1431 and a scale unit 14372 attached to the support member 1432. The measurement result of the position measurement device 1437 includes information regarding the relative position between the support member 1431 and the support member 1432. Since the arm driving system 142 is attached to the support member 1431 and the processing head 13 is attached to the support member 1432, the information regarding the relative position between the support member 1431 and the support member 1432 includes information regarding the relative position between the arm driving system 142 and the processing head 13. Therefore, the control device 3 can appropriately identify the relative position between the arm drive system 142 and the processing head 13. As a result, the control device 3 can appropriately change the relative position between the arm drive system 142 and the processing head 13 based on the measurement result of the position measurement device 1437.

[0130] The driving member 1435 may change the relative position between the arm drive system 142 and the machining head 13 (typically, move the machining head 13 relative to the arm drive system 142) under the control of the control device 3, thereby moving (i.e., driving) the machining head 13 relative to the workpiece W. The driving member 1435 may move (i.e., drive) the machining head 13 so that the relative positional relationship between the machining head 13 and the workpiece W is changed.

[0131] The driving member 1435 may use the driving force to change the relative position between the arm driving system 142 and the processing head 13 under the control of the control device 3, thereby reducing vibration transmitted between the arm driving system 142 and the processing head 13 via the fine movement driving system 143. In other words, the driving member 1435 may use the driving force to attenuate vibration transmitted between the arm driving system 142 and the processing head 13 via the fine movement driving system 143. Specifically, the driving member 1435 may use the driving force to reduce (attenuate) vibration traveling (i.e., transmitted) from the arm driving system 142 to the processing head 13 via the fine movement driving system 143.

[0132] The driving member 1435 may convert the vibration of the air spring 1433 into damped vibration by changing the relative position between the arm driving system 142 and the processing head 13 using the driving force. In other words, the driving member 1435 may convert the vibration transmitted between the arm driving system 142 and the processing head 13 via the fine movement driving system 143 into damped vibration using the driving force. In this case, it can be said that the driving member 1435 reduces the relative displacement amount between the arm driving system 142 and the processing head 13 caused by the vibration from the arm driving system 142 toward the processing head 13 using the driving force. Specifically, it can be said that the driving member 1435 reduces the relative displacement amount between the part of the arm driving system 142 to which the fine movement driving system 143 is connected (i.e., the distal arm member 1425) and the part of the processing head 13 to which the fine movement driving system 143 is connected, caused by the vibration from the arm driving system 142 toward the processing head 13, using the driving force. If the driving member 1435 can convert the vibration of the air spring 1433 into damped vibration, the fine-motion driving system 143 does not need to include the damper member 1434. However, even if the driving member 1435 cannot convert the vibration of the air spring 1433 into damped vibration, the fine-motion driving system 143 does not need to include the damper member 1434. Furthermore, the number of air springs 1433, the number of damper members 1434, and the number of driving members 1435 do not need to be equal to one another.

[0133] The driving member 1435 may apply a driving force acting along a direction including a component in the direction in which the air spring 1433 and / or the damper member 1434 apply an elastic force. In the example shown in FIG. 6, since the air spring 1433 and / or the damper member 1434 apply an elastic force along the Z-axis direction of the head coordinate system, the driving member 1435 may apply a driving force acting along a direction including a component in the Z-axis direction. When the driving member 1435 generates a driving force acting along a direction including a component in the direction in which the air spring 1433 and / or the damper member 1434 apply an elastic force, the driving member 1435 can convert the vibration of the air spring 1433 into a damped vibration by using this driving force. When converting the vibration of the air spring 1433 into a damped vibration, the driving member 1435 may change the resonance frequency of the air spring 1433 by using the driving force. Typically, the driving member 1435 may increase the resonance frequency of the air spring 1433 by using the driving force.

[0134] A device that actively reduces vibrations using an elastic member such as the air spring 1433 and the drive member 1435 may be called an active vibration isolation device. For this reason, the fine movement drive system 143 may be called an active vibration isolation device. An active vibration isolation device may be called an active vibration isolation system (AVIS).

[0135] As described in detail later, the control device 3 may control the fine movement drive system 143 based on the measurement result by the imaging device 15. That is, the control device 3 may control the fine movement drive system 143 to move the processing head 13 based on the position of the workpiece W measured by the imaging device 15. For example, as described above, the imaging device 15 can measure the position of the processing head 13 in at least one of the X-axis direction, the Y-axis direction, and the θZ direction. In this case, the control device 3 may control the fine movement drive system 143 to move the processing head 13 along at least one of the X-axis direction, the Y-axis direction, and the θZ direction based on the measurement result by the imaging device 15. For example, as described above, the imaging device 15 can measure the position of the processing head 13 in at least one of the Z-axis direction, the θX direction, and the θY direction. In this case, the control device 3 may control the fine movement drive system 143 to move the processing head 13 along at least one of the Z-axis direction, the θX direction, and the θY direction based on the measurement result by the imaging device 15. However, the control device 3 may control the fine movement drive system 143 based on at least one of the measurement results by the machining head 13 and the measurement results by the measuring device 2.

[0136] (1-4) Structure of measuring device 2 Next, the structure of the measurement device 2 will be described. The measurement device 2 may be, for example, a measurement device including a laser radar system described in US Patent Application Publication No. 2012 / 188557 (for example, a measurement device using frequency-modulated measurement light). An example of the measurement device 2 including the laser radar system described in US Patent Application Publication No. 2012 / 188557 will be described below with reference to Figs. 8 and 9. Fig. 8 is a front view showing the appearance of the measurement device 2. Fig. 9 is a block diagram showing the structure of the measurement device 2.

[0137] As shown in FIG. 8, the measuring device 2 includes a stand 210 and a housing 220. The stand 210 is a stand that supports the housing 220. The stand 210 may be disposed on a support surface SS on which the processing device 1 and the workpiece W are disposed, for example. The stand 210 may be disposed on the support surface SS via a support member (not shown), or may be disposed directly on the support surface SS. The housing 220 is a member that houses the optical assembly 230 shown in FIG. 9. The housing 220 may be rotatable around a predetermined rotation axis. In the example shown in FIG. 8, the housing 220 is rotatable around a rotation axis along the X-axis and a rotation axis along the Z-axis.

[0138] As shown in FIG. 9, optical assembly 230 includes a measurement light source 231, a pointing beam source 232, a beam splitter 233, a beam splitter 234, a beam splitter 235, a mirror 236, an optical circuit 237, and a detector 238.

[0139] The measurement light source 231 generates the measurement light ML3. A part of the measurement light ML3 generated by the measurement light source 231 is emitted from the exit 221 formed in the housing 220 via the beam splitters 234 and 235 and the mirror 236. The measurement light ML3 emitted from the exit 221 is incident on the reflector 136 (or the reflector W136, the same below). When the housing 220 rotates around the rotation axis as described above, the emission direction of the measurement light ML3 from the measurement device 2 changes. For this reason, the control device 3 may rotate the housing 220 so that the measurement light ML3 is incident on the reflector 136 arranged at a desired position. The reflector 136 reflects at least a part of the measurement light ML3 incident on the reflector 136. At least a part of the measurement light ML3 reflected by the reflector 136 (hereinafter referred to as "return light ML4") is incident on the optical assembly 230 via the exit 221. The return light ML4 incident on the optical assembly 230 is incident on the detector 238 via the mirror 236 and the beam splitter 235. Meanwhile, another part of the measurement light ML3 generated by the measurement light source 231 is incident on the detector 238 via the beam splitter 234 and the optical circuit 237 described in U.S. Patent Application Publication No. 2012 / 188557 (or U.S. Patent No. 4,733,606, etc.). The control device 3 calculates the position of the processing head 13 based on the detection result of the measurement light ML3 and the return light ML4 by the detector 238. For example, the control device 3 calculates the position of the processing head 13 based on the detection result of the measurement light ML3 and the return light ML4 by the detector 238 using the optical heterodyne detection described in U.S. Patent Application Publication No. 2012 / 188557 (or U.S. Patent No. 4,733,606, etc.).

[0140] The pointing beam source 232 generates a pointing beam B. The pointing beam B is used to identify a position on the reflector 136 to which the measurement light ML3 is directed. The pointing beam B may include visible light. The pointing beam B generated by the pointing beam source 232 is emitted from an emission port 221 formed in the housing 220 via beam splitters 233, 234, and 235 and a mirror 236. The pointing beam B emitted from the emission port 221 enters the reflector 136. However, the optical assembly 230 does not have to irradiate the pointing beam B to the reflector 136.

[0141] The measurement device 2 is not limited to a measurement device including a laser radar system described in U.S. Patent Application Publication No. 2012 / 188557. For example, the measurement device 2 may be a measurement device including a laser coordinate measuring device described in U.S. Patent No. 7,800,758 (e.g., a measurement device using intensity-modulated measurement light). For example, the measurement device 2 may be a measurement device including an absolute distance meter described in U.S. Patent No. 6,847,436 (e.g., a measurement device using intensity-modulated measurement light).

[0142] Alternatively, the measurement device 2 may include an optical assembly 230' capable of measuring the position of at least one of the machining head 13 and the workpiece W using a method similar to the method of measuring the position of the workpiece W using the measurement light ML2 described above, instead of the optical assembly 230 shown in FIG. 9. An example of the optical assembly 230' is shown in FIG. 10. As shown in FIG. 10, the optical assembly 230' includes a measurement light source 12'#1, a measurement light source 12'#2, a mirror 1320', a beam splitter 1321', a beam splitter 1322', a detector 1323', a beam splitter 1324', a mirror 1325', a detector 1326', a mirror 1327', a galvanometer mirror 1328', a galvanometer mirror 1341', and an fθ lens 1342'. Measurement light source 12'#1, measurement light source 12'#2, mirror 1320', beam splitter 1321', beam splitter 1322', detector 1323', beam splitter 1324', mirror 1325', detector 1326', mirror 1327', galvanometer mirror 1328', galvanometer mirror 1341', and fθ lens 1342' may be similar to measurement light source 12#1, measurement light source 12#2, mirror 1320, beam splitter 1321, beam splitter 1322, detector 1323, beam splitter 1324, mirror 1325, detector 1326, mirror 1327, galvanometer mirror 1328, galvanometer mirror 1341, and fθ lens 1342 described above. In other words, the optical assembly 230' may measure the position of at least one of the machining head 13 and the workpiece W by detecting interference light between the measurement light ML3#1 from the measurement light source 12'#1 and the measurement light ML3#2 from the measurement light source 12'#2 using the detectors 1323' and 1326'. Since the irradiation positions of the measurement lights ML3#1 and #2 can be changed by rotating the housing 220 as described above, the optical assembly 230' does not need to include the galvanometer mirrors 1328 and 1341.

[0143] (1-5) Machining operation Next, the machining operation performed by the machining system SYSa to machine the workpiece W will be described.

[0144] (1-5-1) Specific examples of workpieces W that are the subject of machining operations First, a specific example of the workpiece W to be processed will be described with reference to FIG.

[0145] As shown in FIG. 11, the processing device 1 may process a workpiece W larger than the processing device 1. In the example shown in FIG. 11, the processing device 1 processes a workpiece W corresponding to at least a part of an aircraft. In this case, the processing device 1 may process at least a part of the aircraft so as to form the above-mentioned riblet structure on at least a part of the aircraft. For example, the processing device 1 may process at least a part of the aircraft so as to form the above-mentioned riblet structure on at least a part of the fuselage, main wing, horizontal stabilizer, and / or vertical stabilizer of the aircraft. However, the processing device 1 may process a workpiece W smaller than the processing device 1. The processing device 1 may process a workpiece W having the same size as the processing device 1. In addition, the processing device 1 may process a workpiece W having a size larger than the movement stroke of the head drive system 14 provided in the processing device 1. The processing device 1 may process a workpiece W having a size larger than a range (for example, a shot area SA described later) in which the processing light EL can be irradiated without moving the processing head 13 using the head drive system 14 provided in the processing device 1.

[0146] As described above, the riblet structure is a structure capable of reducing the resistance of the surface of the workpiece W to the fluid (particularly, at least one of the friction resistance and the turbulent friction resistance). For this reason, the processing apparatus 1 may process the workpiece W corresponding to at least a part of an object for which it is desired to reduce the resistance to the fluid. For example, the processing apparatus 1 may process the workpiece W corresponding to at least a part of an object (that is, a moving object) that can move so that at least a part of the object moves in a fluid (for example, at least one of a gas and a liquid). An example of the moving object is at least one of a helicopter and a drone. In this case, for example, the processing apparatus 1 may process at least a part of the body and / or rotor of at least one of the helicopter and the drone. Other examples of the moving object are a railroad car, a linear motor car, an automobile, a bicycle, a ship, and a rocket. In this case, at least a part of the body of the railroad car, the body of the linear motor car, the body of the automobile, the frame of the bicycle, the hull of the ship, and / or the body of the rocket may be processed. Another example of the moving object is at least one of a turbine, a fan, and a windmill. In this case, the processing part is not limited to a rotating part (moving part), and may be a fixed part that comes into contact with the fluid. Alternatively, the processing device 1 may process a workpiece W that corresponds to an object at least a part of which comes into contact with a flowing fluid. An example of an object at least a part of which comes into contact with a flowing fluid is a pipe through which a fluid flows inside. In this case, the processing device 1 may process at least a part of the inner wall of the pipe that faces the pipe.

[0147] (1-5-2) Processing flow Next, an example of the flow of the processing operation will be described with reference to Fig. 12. Fig. 12 is a flowchart showing an example of the flow of the processing operation.

[0148] As shown in FIG. 12, the control device 3 acquires recipe information (step S10). The recipe information is information used by the processing system SYSa to process the workpiece W. For this reason, the recipe information may include various information related to the processing of the workpiece W. For example, the recipe information may include workpiece information related to the workpiece W to be processed. The workpiece information may include at least one of information related to the shape of the workpiece W, information related to the size of the workpiece W, and information related to the position of the workpiece W. The recipe information may include processing content information related to the content of processing to be performed on each part of the workpiece W in addition to or instead of the workpiece information. For example, the processing content information may include information related to the characteristics of the riblet structure to be formed on each part of the workpiece W (for example, at least one of the width, depth, extension direction, and pitch of the grooves constituting the riblet structure). The characteristics of this riblet structure may be referred to as the morphology of the riblet structure.

[0149] The recipe information may include shot area information regarding the shot area SA set on the surface of the workpiece W. As shown in FIG. 13, which is a perspective view showing the shot area SA, a plurality of shot areas SA may be set on the workpiece W. In particular, when the processing device 1 processes a workpiece W larger than the processing device 1 as described above, a plurality of shot areas SA are likely to be set on the workpiece W. Each shot area SA may indicate an area (in other words, a range) where processing is performed by the processing device 1 with the positional relationship between the processing head 13 and the workpiece W fixed (that is, without changing). Since the workpiece W is processed by the processing light EL as described above, the area where processing is performed by the processing device 1 corresponds to an area where the processing head 13 can irradiate the processing light EL. Furthermore, with the positional relationship between the processing head 13 and the workpiece W fixed, the irradiation position of the processing light EL on the workpiece W is changed by the galvanometer mirror 1341. For this reason, typically, the shot area SA may be set to be an area that coincides with the scanning range of the processing light EL deflected by the galvanometer mirror 1341 with the positional relationship between the processing head 13 and the workpiece W fixed, or that is narrower than the scanning range, as shown in Figure 13.

[0150] The shot area information may include information regarding the position of each shot area SA on the workpiece W. The shot area information may include information regarding the size of each shot area SA on the workpiece W. The shot area information may include information regarding the size of each shot area SA on the workpiece W. The control device 3 may set a plurality of shot areas SA on the surface of the workpiece W. In this case, the recipe information may not include the shot area information.

[0151] When a plurality of shot areas SA are set on the surface of the workpiece W, the processing device 1 processes the plurality of shot areas SA in sequence. Specifically, the processing device 1 moves the processing head 13 toward a position where the processing head 13 can irradiate the processing light EL to one shot area SA. Then, the processing device 1 processes the one shot area SA by irradiating the processing light EL to the one shot area SA. After completing the processing of the one shot area SA, the processing device 1 moves the processing head 13 toward a position where the processing head 13 can irradiate the processing light EL to another shot area SA different from the one shot area SA. Then, the processing device 1 processes the other shot area SA by irradiating the processing light EL to the other shot area SA. Thereafter, the processing device 1 repeats the same operation until the processing of the plurality of shot areas SA is completed.

[0152] For this reason, the control device 3 identifies the position on the workpiece W of one shot area SA to be processed by the processing device 1 (typically, the position in the reference coordinate system) based on the recipe information (step S11). For convenience of explanation, in the following explanation, the one shot area SA identified in step S11 will be referred to as the processing target shot area PSA. Note that, when the control device 3 sets a plurality of shot areas SA on the surface of the workpiece W, the control device 3 may set one of the plurality of shot areas SA set by the control device 3 as the processing target shot area PSA.

[0153] Thereafter, the control device 3 identifies the position of the machining head 13 based on the measurement results by the measuring device 2 (step S12). The control device 3 may also identify the position of the workpiece W as necessary. The measuring device 2 may continue to measure the position of the machining head 13 while the machining operation shown in FIG. 2 is being performed. However, the measuring device 2 may measure the position of the machining head 13 at a timing when the measurement results by the measuring device 2 are required. The measuring device 2 may measure the position of the machining head 13 periodically. The measuring device 2 may measure the position of the machining head 13 at random timing.

[0154] Thereafter, the control device 3 moves the processing head 13 to a position where the processing head 13 can irradiate the processing target shot area PSA with the processing light EL based on the position of the processing target shot area PSA specified in step S11 and the position of the processing head 13 specified in step S12 (step S13). Specifically, the control device 3 controls at least one of the self-propelled drive system 141 and the arm drive system 142 to move the processing head 13 to a position where the processing head 13 can irradiate the processing target shot area PSA with the processing light EL. That is, the control device 3 moves the processing head 13 to the processing target shot area PSA by controlling at least one of the self-propelled drive system 141 and the arm drive system 142. As a result, the processing head 13 moves from a position where the processing head 13 cannot irradiate the processing target shot area PSA with the processing light EL as shown in FIG. 14 to a position where the processing head 13 can irradiate the processing target shot area PSA with the processing light EL as shown in FIG. 15.

[0155] Since the imaging device 15 is attached to the processing head 13, when the processing head 13 moves, the imaging device 15 also moves. In this case, the imaging device 15 may be capable of imaging the processing target shot area PSA when the processing head 13 is located at a position where the processing head 13 can irradiate the processing target shot area PSA with the processing light EL. Therefore, the imaging device 15 may be aligned with the processing head 13 so that the imaging device 15 can image the processing target shot area PSA when the processing head 13 is located at a position where the processing head 13 can irradiate the processing target shot area PSA with the processing light EL.

[0156] As described above, when the movement accuracy of the processing head 13 by the arm drive system 142 is higher than the movement accuracy of the processing head 13 by the self-propelled drive system 141, the control device 3 may move the processing head 13 with relatively coarse accuracy using the self-propelled drive system 141, and then move the processing head 13 with relatively fine accuracy using the arm drive system 142. In other words, the control device 3 may align the processing head 13 with the processing target shot area PSA with relatively coarse accuracy using the self-propelled drive system 141, and then align the processing head 13 with relatively fine accuracy using the arm drive system 142.

[0157] The control device 3 may control at least one of the self-propelled drive system 141 and the arm drive system 142 so that the processing device 1 (particularly, the processing head 13 and the head drive system 14) does not interfere with the workpiece W while the processing head 13 is moving. In other words, the control device 3 may control at least one of the self-propelled drive system 141 and the arm drive system 142 so that the processing device 1 (particularly, the processing head 13 and the head drive system 14) does not contact or collide with the workpiece W while the processing head 13 is moving. In this case, the self-propelled drive system 141 may be considered to be a drive system that can move without interfering with the workpiece W.

[0158] On the other hand, during a period when at least one of the self-propelled drive system 141 and the arm drive system 142 is moving the processing head 13, the fine movement drive system 143 does not need to move the processing head 13. During a period when at least one of the self-propelled drive system 141 and the arm drive system 142 is moving the processing head 13, the processing device 1 does not need to irradiate the processing light EL to the workpiece W. For this reason, during a period when at least one of the self-propelled drive system 141 and the arm drive system 142 is moving the processing head 13, the galvanometer mirror 1341 that deflects the processing light EL does not need to be driven. In other words, the galvanometer mirror 1341 does not need to change the focusing position of the processing light EL in a plane along the XY plane in the head coordinate system. The galvanometer mirror 1341 does not need to change the irradiation position of the processing light EL on the workpiece W.

[0159] After the processing head 13 moves to a position where the processing head 13 can irradiate the processing target shot area PSA with the processing light EL, the control device 3 controls the fine movement drive system 143 based on the measurement result by the imaging device 15 (step S14). For this reason, after the processing head 13 moves to a position where the processing head 13 can irradiate the processing target shot area PSA with the processing light EL, the imaging device 15 may start imaging the workpiece W (particularly, the processing target shot area PSA). In other words, the processing device 1 may start measuring the position of the workpiece W using the imaging device 15 after the processing head 13 moves to a position where the processing head 13 can irradiate the processing target shot area PSA with the processing light EL. However, if the processing device 1 does not have the fine movement drive system 143, the processing system SYSa does not need to perform the operation in step S14.

[0160] The control device 3 may recognize the processing target shot area PSA from the measurement result by the imaging device 15, and control the fine movement drive system 143 based on the measurement result by the imaging device 15 so that the relative positional relationship between the recognized processing target shot area PSA and the processing head 13 (particularly, the fθ lens 1342) is fixed. In other words, the control device 3 may control the fine movement drive system 143 based on the measurement result by the imaging device 15 so that the processing head 13 (particularly, the fθ lens 1342) is stationary with respect to the recognized processing target shot area PSA. In this case, even if the workpiece W moves with respect to the processing head 13, the fine movement drive system 143 moves the processing head 13 in accordance with the movement of the workpiece W. For example, even if the workpiece W moves by one movement amount in one direction with respect to the processing head 13, the fine movement drive system 143 moves the processing head 13 by one movement amount in one direction with respect to the movement of the workpiece W. As a result, the relative positional relationship between the processing target shot area PSA and the processing head 13 (particularly, the fθ lens 1342) does not change. Therefore, when controlling the galvanometer mirror 1341 so that the processing light EL is irradiated to a desired position in the processing target shot area PSA, the control device 3 does not need to consider the movement of the workpiece W relative to the processing head 13. In other words, the control device 3 can control the galvanometer mirror 1341 so that the processing light EL is irradiated to a desired position in the processing target shot area PSA without considering the movement of the workpiece W relative to the processing head 13. Since the relative positional relationship between the processing target shot area PSA and the processing head 13 (particularly, the fθ lens 1342) does not change, it can be said that the control device 3 performs control that does not change the relative positional relationship between the recognized processing target shot area PSA and the processing head 13 (particularly, the fθ lens 1342).

[0161] As described above, when the imaging device 15 captures the workpiece marker WM formed on the workpiece W, the workpiece marker WM may be formed in each shot area SA. For example, as shown in FIG. 16 showing the workpiece marker WM formed in a plurality of shot areas SA, the workpiece marker WM may be formed in each shot area SA at the same position as the position where the workpiece marker WM is formed in the other shot areas SA. When a marker group WMG including a plurality of workpiece markers WM is formed, the marker group WMG may be formed in each shot area SA at the same position as the position where the marker group WMG is formed in the other shot areas SA. In this case, the control device 3 may calculate the position of the processing target shot area PSA based on the position of the workpiece marker WM formed in the processing target shot area PSA. Alternatively, the control device 3 may calculate the position of the processing target shot area PSA based on the position of the workpiece marker WM formed in the other shot area SA having a predetermined positional relationship with the processing target shot area PSA.

[0162] The workpiece marker WM may be formed in advance on the workpiece W before the processing device 1 processes the workpiece W. Alternatively, the workpiece marker WM may be formed by the processing device 1. For example, the processing device 1 may form the workpiece marker WM by irradiating the first shot area SA (or a position having a predetermined positional relationship with the first shot area SA) with the processing light EL before starting to process the first shot area SA set in the processing target shot area PSA. In this case, the imaging device 15 may image the workpiece marker WM formed in the first shot area SA (or a position having a predetermined positional relationship with the first shot area SA) during the period when the processing device 1 processes the first shot area SA. The control device 3 may calculate the position of the first shot area SA based on the position of the workpiece marker WM formed in the first shot area SA. Alternatively, the processing apparatus 1 may form a workpiece marker WM by irradiating the processing light EL to a second shot area SA (or a position having a predetermined positional relationship with respect to the second shot area SA, for example, the first shot area SA) to be processed next to the first shot area SA during at least a part of the period during which the first shot area SA set in the processing target shot area PSA is processed. In this case, the imaging device 15 may image the workpiece marker WM formed in the second shot area SA (or a position having a predetermined positional relationship with respect to the second shot area SA, for example, the first shot area SA) during the period during which the processing apparatus 1 processes the second shot area SA. The control device 3 may calculate the position of the first shot area SA based on the position of the workpiece marker WM formed in the second shot area SA (or a position having a predetermined positional relationship with respect to the second shot area SA, for example, the first shot area SA).

[0163] During the period when the control device 3 controls the fine movement drive system 143 based on the measurement results by the imaging device 15, the processing head 13 is aligned with high precision with respect to the processing target shot area PSA by the fine movement drive system 143. Therefore, during the period when the control device 3 controls the fine movement drive system 143 based on the measurement results by the imaging device 15, the self-propelled drive system 141 and the arm drive system 142, which have lower movement accuracy than the fine movement drive system 143, do not need to move the processing head 13.

[0164] Incidentally, while at least one of the self-propelled drive system 141 and the arm drive system 142 is moving the processing head 13 in step S13, the control device 3 may control the fine movement drive system 143 based on the measurement result by the imaging device 15. That is, while at least one of the self-propelled drive system 141 and the arm drive system 142 is moving the processing head 13 in step S13, the imaging device 15 may start imaging the workpiece W (particularly, the processing target shot area PSA). While at least one of the self-propelled drive system 141 and the arm drive system 142 is moving the processing head 13 in step S13, the processing device 1 may start measuring the position of the workpiece W using the imaging device 15.

[0165] During a period in which the fine movement drive system 143 is controlled based on the measurement result by the imaging device 15, the processing device 1 starts processing the shot area PSA to be processed. Specifically, the processing device 1 specifies the processing content of the shot area PSA to be processed based on the recipe information, and irradiates the shot area PSA to be processed with the processing light EL so that the processing corresponding to the specified processing content is performed on the shot area PSA to be processed (step S15). For example, the processing device 1 may irradiate a desired position in the shot area PSA to be processed with the processing light EL using the galvanometer mirror 1341 so that a riblet structure based on the recipe information is formed in the shot area PSA to be processed.

[0166] During the period in which the processing target shot area PSA is being processed, the control device 3 controls the galvanometer mirror 1341 based on the measurement result by the processing head 13 and the recipe information (step S16). That is, the control device 3 controls the galvanometer mirror 1341 based on the measurement result by the processing head 13 while controlling the fine movement drive system 143 based on the measurement result by the imaging device 15. Specifically, while or after the fine movement drive system 143 moves the processing head 13 in accordance with the movement of the workpiece W due to the movement of the workpiece W relative to the processing head 13, the control device 3 controls the galvanometer mirror 1341 based on the measurement result by the processing head 13. However, if the processing device 1 does not include the galvanometer mirror 1341, the processing system SYSa does not need to perform the operation in step S16.

[0167] Specifically, the control device 3 may irradiate the measurement light ML2 to a plurality of points on the processing target shot area PSA by controlling the galvanometer mirror 1328 that can change the irradiation position of the measurement light ML2 on the surface of the workpiece W independently of the irradiation position of the processing light EL. As a result, the control device 3 can specify the shape of the processing target shot area PSA (the shape of the surface portion of the surface of the workpiece W in which the processing target shot area PSA is set). Note that the control device 3 may irradiate the measurement light ML2 to a plurality of points on the second shot area SA to be set in the processing target shot area PSA next before the period in which the first shot area SA is set in the processing target shot area PSA (for example, while the second shot area SA is set in the processing target shot area PSA). In other words, the control device 3 may specify in advance the shape of the first shot area SA to be set in the processing target shot area PSA next before the first shot area SA is set in the processing target shot area PSA.

[0168] Thereafter, the control device 3 may control the galvanometer mirror 1341 so that the processing light EL is irradiated to a desired position in the processing target shot area PSA having the specified shape based on the specified shape of the processing target shot area PSA. As an example, if the operation of the galvanometer mirror 1341 when irradiating the processing light EL to the processing target shot area PSA having a flat surface shape is the same as the operation of the galvanometer mirror 1341 when irradiating the processing light EL to the processing target shot area PSA having a curved surface shape, the characteristics of the processing light EL irradiated to the surface of the processing target shot area PSA having a flat surface shape may be different from the characteristics of the processing light EL irradiated to the surface of the processing target shot area PSA having a curved surface shape. For example, the fluence of the processing light EL irradiated to the surface of the processing target shot area PSA having a flat surface shape may be different from the fluence of the processing light EL irradiated to the surface of the processing target shot area PSA having a curved surface shape. Therefore, the control device 3 may control the irradiation mode of the processing light EL in the processing target shot area PSA by controlling the galvanometer mirror 1341 so that the processing target shot area PSA can be processed based on the processing content indicated by the recipe information regardless of the difference in the surface shape of the processing target shot area PSA. For example, the control device 3 may control the galvanometer mirror 1341 so that the processing target shot area PSA can be processed based on the processing content indicated by the recipe information regardless of the difference in the surface shape of the processing target shot area PSA. For example, the control device 3 may control at least one of the movement direction, movement amount, and movement speed of the focusing position of the processing light EL in at least one of the X-axis direction and Y-axis direction of the head coordinate system by controlling the galvanometer mirror 1341.

[0169] The galvanometer mirror 1341 may be an optical system capable of moving the focusing position of the processing light EL along at least one of the X-axis and Y-axis directions of the head coordinate system, as well as moving the focusing position of the processing light EL along the Z-axis direction of the head coordinate system (i.e., the traveling direction of the processing light EL). The focusing position of the processing light EL along the Z-axis direction of the head coordinate system may be referred to as a focal position. For this reason, the galvanometer mirror 1341 may be referred to as a focal position changing device. In other words, the galvanometer mirror 1341 may be an optical system capable of changing the relative positional relationship between the focusing position of the processing light EL and the surface of the workpiece W along the Z-axis direction of the head coordinate system. In this case, the control device 3 may control the galvanometer mirror 1341 so that the processing target shot area PSA is processed based on the processing content indicated by the recipe information, regardless of the difference in the shape of the surface of the processing target shot area PSA. For example, the control device 3 may control at least one of the moving direction, moving amount, and moving speed of the focusing position of the processing light EL in the Z-axis direction of the head coordinate system by controlling the galvanometer mirror 1341. The control device 3 may control the galvanometer mirror 1341 so that the focusing position of the processing light EL is set on or near the surface of the processing target shot area PSA, regardless of differences in the surface shape of the processing target shot area PSA.

[0170] The above-mentioned focusing position adjusting optical system 1313 is an optical system that can move the focusing position (focal position) of the processing light EL along the Z-axis direction of the head coordinate system (i.e., the traveling direction of the processing light EL). Therefore, the control device 3 may control the focusing position adjusting optical system 1313 in addition to or instead of the galvanometer mirror 1341 based on the measurement result using the measurement light ML2 by the processing head 13.

[0171] After starting the processing of the shot area PSA to be processed, the control device 3 judges whether the processing of the shot area PSA to be processed is completed or not (step S17). If it is judged in step S17 that the processing of the shot area PSA to be processed is not yet completed (step S17: No), the processing system SYSa repeats the operations from step S14 to step S17. In other words, the processing system SYSa continues the processing of the shot area PSA to be processed.

[0172] On the other hand, when it is determined in step S17 that the processing of the processing target shot area PSA is completed (step S17: Yes), the control device 3 determines whether or not to newly process another shot area SA (step S18). That is, the control device 3 sets the other shot area SA as a new processing target shot area PSA, and then determines whether or not to start processing the new processing target shot area PSA (step S18). For example, when the processing of at least one of the multiple shot areas SA set on the workpiece W has not yet been completed, the control device 3 may determine that at least one shot area SA that has not yet been processed is to be newly processed. For example, when the processing of all of the multiple shot areas SA set on the workpiece W has been completed, the control device 3 may determine that it is not necessary to newly process another shot area SA.

[0173] As a result of the determination in step S18, if it is determined that another shot area SA is to be newly processed (step S18: Yes), the processing system SYSa repeats the operations from step S11 to step S18. That is, the processing system SYSa sets the other shot area SA as a new processing target shot area PSA, and processes the new processing target shot area PSA. On the other hand, as a result of the determination in step S18, if it is determined that another shot area SA is not to be newly processed (step S18: No), the processing system SYSa may end the processing operation shown in FIG.

[0174] (1-6) Technical effects of processing system SYSa The machining system SYSa described above can appropriately machine the workpiece W using the processing light EL. Furthermore, the machining system SYSa can measure the position of the workpiece W using at least one of the imaging device 15, the machining head 13, and the measuring device 2. Furthermore, the machining system SYSa can measure the position of the machining head 13 using the measuring device 2. Therefore, the machining system SYSa can identify the relative positional relationship between the machining head 13 and the workpiece W with high precision, and can align the machining head 13 with respect to the workpiece W with high precision. As a result, the machining system SYSa can machine the workpiece W with high precision.

[0175] In addition, the machining system SYSa can measure the position of at least one of the workpiece W and the machining head 13 using at least one of the imaging device 15, the machining head 13, and the measuring device 2, which can function as three measuring devices with different measurement methods. Therefore, the machining system SYSa can measure the position of an object that is difficult to measure with a measuring device using a first measurement method, with a measuring device using a second measurement method different from the first measurement method. Therefore, the machining system SYSa can measure the position of at least one of the workpiece W and the machining head 13 with high accuracy, compared to a comparative example machining system that does not have multiple measuring devices with different measurement methods.

[0176] (2) Machining system SYSb according to the second embodiment Next, a processing system SYS according to a second embodiment (hereinafter, the processing system SYS according to the second embodiment will be referred to as a "processing system SYSb") will be described with reference to Fig. 17. Fig. 17 is a system configuration diagram showing the system configuration of the processing system SYSb according to the second embodiment.

[0177] As shown in FIG. 17, the processing system SYSb according to the second embodiment differs from the processing system SYSa according to the first embodiment described above in that it includes a processing device 1b instead of the processing device 1. Other features of the processing system SYSb may be the same as other features of the processing system SYSa. The processing device 1b differs from the processing device 1 in that it includes a range finder 15b in addition to or instead of the imaging device 15. Other features of the processing device 1b may be the same as other features of the processing device 1.

[0178] The range finder 15b is different from the imaging device 15 that measures the position of the workpiece W by imaging the workpiece W in that the range finder 15b irradiates the workpiece W with measurement light such as laser light and detects the measurement light from the workpiece W to measure the position of the workpiece W. In this case, the range finder 15b irradiates the workpiece W with measurement light without passing through each optical system (particularly, at least the fθ lens 1342) equipped in the processing head 13. Furthermore, the range finder 15b detects the measurement light from the workpiece W without passing through each optical system (particularly, at least the fθ lens 1342) equipped in the processing head 13. For this reason, the range finder 15b may function as a measuring device that measures the position of the workpiece W without passing through each optical system (particularly, at least the fθ lens 1342) equipped in the processing head 13. Other features of the range finder 15b may be the same as other features of the imaging device 15.

[0179] The range finder 15b may function as a measuring device that measures the position of the workpiece W (particularly, the position of the irradiated portion irradiated with the measurement light) in the irradiation direction of the measurement light (e.g., the Z-axis direction of the head coordinate system) similar to the machining head 13 that emits the measurement light ML2 described above. Furthermore, the range finder 15b may irradiate the measurement light to multiple locations on the workpiece W. In this case, the range finder 15b may function as a measuring device that measures the shape of the workpiece W similar to the machining head 13 that emits the measurement light ML2 described above.

[0180] The measurement results by the range finder 15b may be used for the same purpose as the measurement results by the imaging device 15. For example, the control device 3 may control the fine movement drive system 143 based on the measurement results by the range finder 15b (see step S14 in FIG. 12).

[0181] The range finder 15b is disposed (i.e., attached or fixed) to the processing head 13, similarly to the imaging device 15. That is, the arrangement of the range finder 15b may be the same as the arrangement of the imaging device 15. Therefore, as the processing head 13 moves, the range finder 15b also moves.

[0182] An example of the range finder 15b is a TOF (Time Of Flight) sensor. When the processing system SYSb includes the range finder 15b in addition to the imaging device 15, the processing system SYSb may measure the position of the processing head 13 using an RGB-D sensor (i.e., a sensor capable of measuring depth).

[0183] The processing system SYSb according to the second embodiment can provide the same effects as those provided by the processing system SYSa according to the first embodiment described above.

[0184] (3) Machining system SYSc according to the third embodiment Next, a processing system SYS according to a third embodiment (hereinafter, the processing system SYS according to the third embodiment will be referred to as a "processing system SYSc") will be described with reference to Fig. 18. Fig. 18 is a system configuration diagram showing the system configuration of the processing system SYSc according to the third embodiment.

[0185] As shown in FIG. 18, the processing system SYSc according to the third embodiment differs from the processing system SYSa according to the first embodiment described above in that it includes a processing device 1c instead of the processing device 1. Furthermore, the processing system SYSc differs from the processing system SYSa in that it does not need to include a measuring device 2. However, the processing system SYSc may include the measuring device 2. Other features of the processing system SYSc may be the same as other features of the processing system SYSa. Compared to the processing device 1, the processing device 1c differs from the processing device 1 in that it includes a satellite positioning device 16c. Other features of the processing device 1c may be the same as other features of the processing device 1.

[0186] The satellite positioning device 16c is the same as the measuring device 2 described above in that it can measure the position of at least one of the processing head 13 and the workpiece W. However, the method of measuring the position of at least one of the processing head 13 and the workpiece W by the satellite positioning device 16c is different from the method of measuring the position of at least one of the processing head 13 and the workpiece W by the measuring device 2. Specifically, the satellite positioning device 16c measures the position of at least one of the processing head 13 and the workpiece W using a satellite positioning system such as a GPS (Global Positioning System). For this reason, the satellite positioning device 16c may include a receiving device that is arranged at a fixed position with respect to at least one of the processing head 13 and the workpiece W (i.e., a position where the positional relationship with at least one of the processing head 13 and the workpiece W does not change) and is capable of receiving a signal from an artificial satellite that constitutes the satellite positioning system. The reception result by the receiving device (i.e., the measurement result by the satellite positioning device 16c) is output to the control device 3. The control device 3 calculates the position of at least one of the processing head 13 and the workpiece W where the receiving device is arranged based on the reception result by the receiving device. The machining system SYSc may include a local positioning device in addition to or instead of the satellite positioning device 16c. That is, the machining system SYSc may measure the position of at least one of the machining head 13 and the workpiece W using a local positioning device in addition to or instead of the satellite positioning device 16c.

[0187] The machining system SYSc according to the third embodiment can provide the same effects as those provided by the machining system SYSa according to the first embodiment.

[0188] The processing system SYSb according to the second embodiment may have components specific to the processing system SYSc according to the third embodiment. The components specific to the processing system SYSc according to the third embodiment may include components related to the satellite positioning device 16c.

[0189] (4) Machining system SYSd according to the fourth embodiment Next, a processing system SYS according to a fourth embodiment (hereinafter, the processing system SYS according to the fourth embodiment will be referred to as a "processing system SYSd") will be described with reference to Fig. 19. Fig. 19 is a system configuration diagram showing the system configuration of the processing system SYSd according to the fourth embodiment.

[0190] As shown in FIG. 19, the processing system SYSd according to the fourth embodiment differs from the processing system SYSa according to the first embodiment described above in that it includes a processing device 1d instead of the processing device 1. Furthermore, the processing system SYSd differs from the processing system SYSa in that it does not need to include a measuring device 2. However, the processing system SYSd may include the measuring device 2. Other features of the processing system SYSd may be the same as other features of the processing system SYSa. Compared to the processing device 1, the processing device 1d differs in that it includes a gyro sensor 16d. Other features of the processing device 1d may be the same as other features of the processing device 1.

[0191] The gyro sensor 16d is an angular velocity detection device capable of detecting the angular velocity of the processing head 13. For this reason, the gyro sensor 16d may be disposed in the processing head 13. The angular velocity of the processing head 13 detected by the gyro sensor 16d is output to the control device 3. The control device 3 may calculate the position of the processing head 13 based on the angular velocity of the processing head 13. For example, the control device 3 may calculate the amount of movement of the processing head 13 by integrating the angular velocity of the processing head 13, and calculate the position of the processing head 13 based on the amount of movement of the processing head 13. More specifically, for this reason, the gyro sensor 16d may be considered to function as a measurement device capable of measuring the position of the processing head 13.

[0192] The machining system SYSd may include a gyro sensor 16d capable of detecting the angular velocity of the workpiece W in addition to or instead of the gyro sensor 16d capable of detecting the angular velocity of the machining head 13. The gyro sensor 16d capable of detecting the angular velocity of the workpiece W may be disposed on the workpiece W. The angular velocity of the workpiece W detected by the gyro sensor 16d is output to the control device 3. The control device 3 may calculate the position of the workpiece W based on the angular velocity of the workpiece W. For example, the control device 3 may calculate the amount of movement of the workpiece W by integrating the angular velocity of the workpiece W, and calculate the position of the workpiece W based on the amount of movement of the workpiece W. For this reason, the gyro sensor 16d may be considered to function as a measuring device capable of measuring the position of the workpiece W.

[0193] The machining system SYSd according to the fourth embodiment can provide the same effects as those provided by the machining system SYSa according to the first embodiment described above.

[0194] At least one of the processing system SYSb according to the second embodiment to the processing system SYSc according to the third embodiment may have the components specific to the processing system SYSd according to the fourth embodiment. The components specific to the processing system SYSd according to the fourth embodiment may include the components related to the gyro sensor 16d.

[0195] (5) Machining system SYSe according to the fifth embodiment Next, a processing system SYS according to a fifth embodiment (hereinafter, the processing system SYS according to the fifth embodiment will be referred to as a "processing system SYSe") will be described with reference to Fig. 20 and Fig. 21. Fig. 20 is a system configuration diagram showing the system configuration of the processing system SYSe according to the fifth embodiment. Fig. 21 is a front view showing the appearance of a processing device 1e of the processing system SYSe according to the fifth embodiment.

[0196] As shown in FIG. 20 and FIG. 21, the processing system SYSe according to the fifth embodiment is different from the processing system SYSa according to the first embodiment described above in that it includes a processing device 1e instead of the processing device 1. Other features of the processing system SYSe may be the same as other features of the processing system SYSa. The processing device 1e is different from the processing device 1 in that it includes a head drive system 14e instead of the head drive system 14. Other features of the processing device 1e may be the same as other features of the processing device 1. The head drive system 14e is different from the head drive system 14 in that it includes a flying drive system 141e in addition to or instead of the self-propelled drive system 141. Other features of the head drive system 14e may be the same as other features of the head drive system 14.

[0197] The flying drive system 141e is different from the self-propelled drive system 141 that can self-propel on the support surface SS in that it can fly at a position away from the support surface SS. In other words, the flying drive system 141e is different from the self-propelled drive system 141 that moves the processing head 13 by self-propelling on the support surface SS in that it moves the processing head 13 by flying at a position away from the support surface SS. Note that the position away from the support surface SS may mean at least one of a position different from the position where the support surface SS exists and a position where there is a space between the support surface SS. In addition, the state in which the flying drive system 141e flies may mean a state in which the flying drive system 141e flies in the air. Other features of the flying drive system 141e may be the same as other features of the self-propelled drive system 141.

[0198] The machining system SYSe according to the fifth embodiment can provide the same effects as those provided by the machining system SYSa according to the first embodiment described above.

[0199] At least one of the processing system SYSb according to the second embodiment to the processing system SYSd according to the fourth embodiment may have a configuration requirement specific to the processing system SYSe according to the fifth embodiment. The configuration requirement specific to the processing system SYSe according to the fifth embodiment may include a configuration requirement related to the flight drive system 141e.

[0200] (6) Machining system SYSf according to the sixth embodiment Next, a processing system SYS according to a sixth embodiment (hereinafter, the processing system SYS according to the sixth embodiment will be referred to as a "processing system SYSf") will be described with reference to Fig. 22. Fig. 22 is a system configuration diagram showing the system configuration of the processing system SYSf according to the sixth embodiment.

[0201] As shown in Fig. 22, the processing system SYSf according to the sixth embodiment differs from the processing system SYSa according to the first embodiment described above in that it includes a plurality of processing apparatuses 1. In the example shown in Fig. 22, the processing system SYSf includes n (where n is an integer of 2 or more) processing apparatuses 1 (specifically, processing apparatus 1#1 to processing apparatus 1#n). Other features of the processing system SYSf may be the same as other features of the processing system SYSa.

[0202] Each of the multiple processing devices 1 corresponds to the above-mentioned processing device 1. Therefore, each processing device 1#k (where k is a variable indicating an integer greater than or equal to 1 and less than or equal to n) includes a processing light source 11, a measurement light source 12, a processing head 13, a head drive system 14 (i.e., a self-propelled drive system 141, an arm drive system 142, and a fine movement drive system 143), and an imaging device 15. In the following, for the sake of convenience, a label "#k" will be added to the end of each reference symbol of the components included in the processing device 1#k and the components unique to the processing device 1#k.

[0203] The processing devices 1 are disposed in different processing spaces PSP. Specifically, as shown in FIG. 23, which is a plan view showing the arrangement positions of the processing devices 1, the processing device 1#1 may be disposed in the processing space PSP#1, the processing device 1#2 may be disposed in the processing space PSP#2, ..., the processing device 1#n may be disposed in the processing space PSP#n. The head drive system 14#k may move the processing head 13#k in the processing space PSP#k. On the other hand, the head drive system 14#k may move the processing head 13#k so that the processing head 13#k does not protrude outside the processing space PSP#k (and further, the processing device 1#k does not protrude outside the processing space PSP#k). The processing device 1#k processes a portion of the workpiece W that is included in the processing space PSP#k. That is, the processing device 1#k processes an area of ​​the surface of the workpiece W that is included in the processing space PSP#k by irradiating the area with the processing light EL. Specifically, as shown in Figure 23, processing device 1#1 processes an area WP#1 of the surface of the workpiece W that is included in processing space PSP#1, processing device 1#2 processes an area WP#2 of the surface of the workpiece W that is included in processing space PSP#2, ..., processing device 1#n processes an area WP#n of the surface of the workpiece W that is included in processing space PSP#n.

[0204] The machining space #k may not overlap with a machining space PSP#m (where m is a variable indicating an integer between 1 and n, and different from the variable k) different from the machining space #k. Alternatively, the machining space #k may at least partially overlap with the machining space PSP#m. In the example shown in FIG. 23, the machining space PSP#1 partially overlaps with the machining space PSP#2.

[0205] The measuring device 2 measures the positions of the multiple processing heads 13 provided to the multiple processing devices 1, respectively. That is, the measuring device 2 (i) measures the position of the processing head 13#1 of the processing device 1#1 by irradiating the processing device 1#1 with the measurement light ML3, (ii) measures the position of the processing head 13#2 of the processing device 1#2 by irradiating the processing device 1#2 with the measurement light ML3, ..., (n) measures the position of the processing head 13#n of the processing device 1#n by irradiating the processing device 1#n with the measurement light ML3. Therefore, the measurement space MSP of the measuring device 2 may include multiple processing spaces PSP#1 to PSP#n. Note that the measurement space MSP may mean a space in which the measuring device 2 can measure the position of an object present therein.

[0206] The control device 3 controls each of the multiple processing devices 1. To control the processing device 1#k, the control device 3 may use at least the measurement result of the position of the workpiece W by the imaging device 15#k, the measurement result of the position of the workpiece W by the processing head 13#k, and the measurement result of the position of the processing head 13#k by the measuring device 2. For example, in step S13 of FIG. 12, the control device 3 may control the self-propelled drive system 141#1 and the arm drive system 142#k based on the measurement result of the position of the processing head 13#k by the measuring device 2 so that the processing head 13#k moves toward the processing target shot area PSA (hereinafter referred to as processing target shot area PSA#k) to be processed by the processing device 1#k. At this time, the control device 3 may control the head drive system 14#k (particularly, the self-propelled drive system 141#k and the arm drive system 142#k) and the head drive system 14#m (particularly, the self-propelled drive system 141#m and the arm drive system 142#m) so that the processing device 1#k does not collide with the other processing device 1#m. In particular, when the processing space PSP#k and the processing space PSP#m at least partially overlap, the control device 3 may control the head drive systems 14#k and 14#m so that the processing device 1#k does not collide with the other processing device 1#m. For example, in step S14 of FIG. 12, the control device 3 may control the fine movement drive system 143#k based on the measurement result by the imaging device 15#k so that the relative positional relationship between the processing target shot area PSA#k and the processing head 13#k (particularly, the fθ lens 1342#k) is fixed. For example, in step S16 of FIG. 12, the control device 3 may control the galvanometer mirror 1341#k based on the measurement result by the processing head 13#k.

[0207] The control device 3 may control the multiple processing devices 1 so that the multiple processing devices 1 simultaneously process the workpiece W. The control device 3 may control the multiple processing devices 1 so that at least two of the multiple processing devices 1 simultaneously process the workpiece W. The control device 3 may control the multiple processing devices 1 so that at least one of the multiple processing devices 1 processes the workpiece W, while at least another of the multiple processing devices 1 does not process the workpiece W.

[0208] The machining system SYSf according to the sixth embodiment can achieve the same effects as those achieved by the machining system SYSa according to the first embodiment described above. In particular, when at least two machining devices 1 simultaneously machine the workpieces W, the throughput of machining the workpieces W is improved.

[0209] At least one of the processing system SYSb according to the second embodiment to the processing system SYSe according to the fifth embodiment may have the configuration requirements specific to the processing system SYSf according to the sixth embodiment. The configuration requirements specific to the processing system SYSf according to the sixth embodiment may include the configuration requirements related to the multiple processing devices 1.

[0210] (7) Machining system SYSg according to the seventh embodiment Next, a processing system SYS according to a seventh embodiment (hereinafter, the processing system SYS according to the seventh embodiment will be referred to as a "processing system SYSg") will be described with reference to Fig. 24. Fig. 24 is a system configuration diagram showing the system configuration of the processing system SYSg according to the seventh embodiment.

[0211] As shown in Fig. 24, the processing system SYSg according to the seventh embodiment differs from the processing system SYSf according to the sixth embodiment described above in that it includes a plurality of measuring apparatuses 2. In the example shown in Fig. 24, the processing system SYSg includes two measuring apparatuses 2 (specifically, measuring apparatus 2#1 and measuring apparatus 2#2). However, the processing system SYSg may include three or more measuring apparatuses 2. Other features of the processing system SYSf may be the same as other features of the processing system SYSa.

[0212] Each measuring device 2 measures the position of at least one processing head 13 present in the measurement space MSP of each measuring device 2. For example, as shown in FIG. 25, which is a plan view showing the arrangement positions of a plurality of processing devices 1, the measuring device 2#1 measures the position of at least one processing head 13 present in the measurement space MSP#1 of the measuring device 2#1. Meanwhile, the measuring device 2#2 measures the position of at least one processing head 13 present in the measurement space MSP#2 of the measuring device 2#2. In the example shown in FIG. 25, n1 (where n1 is an integer of 1 or more) processing devices 1 (specifically, processing devices 1#1-1 to 1#1-n1) exist in the measurement space MSP#1. Therefore, the measuring device 2#1 measures the positions of the processing heads 13#1-1 to 13#1-n1 provided in the processing devices 1#1-1 to 1#1-n1, respectively. 25, there are n2 (n2 is an integer equal to or greater than 1) processing tools 1 (specifically, processing tools 1#2-1 to 1#2-n2) in the measurement space MSP#2. Therefore, the measuring tool 2#2 measures the positions of the processing heads 13#2-1 to 13#2-n2 provided on the processing tools 1#2-1 to 1#2-n2, respectively.

[0213] One measurement space MSP may not overlap with another measurement space MSP different from the one measurement space MSP. Alternatively, one measurement space MSP may at least partially overlap with another measurement space MSP. In the example shown in FIG. 25, the measurement space MSP#1 partially overlaps with the measurement space MSP#2.

[0214] The machining apparatuses 1#1-1 to 1#1-n1 are disposed in different machining spaces PSP included in the measurement space MSP#1, respectively. Specifically, as shown in FIG. 25, the machining apparatus 1#1-1 may be disposed in the machining space PSP#1-1, the machining apparatus 1#1-2 may be disposed in the machining space PSP#1-2, ..., the machining apparatus 1#1-n1 may be disposed in the machining space PSP#1-n1. In this case, the machining apparatus 1#1-1 machines an area WP#1-1 included in the machining space PSP#1-1 on the surface of the workpiece W, the machining apparatus 1#1-2 machines an area WP#1-2 included in the machining space PSP#1-2 on the surface of the workpiece W, ..., the machining apparatus 1#1-n1 machines an area WP#1-n1 included in the machining space PSP#1-n1 on the surface of the workpiece W.

[0215] Similarly, the processing device 1#2-1 to the processing device 1#2-n2 are respectively arranged in different machining spaces PSP included in the measurement space MSP#2. Specifically, as shown in FIG. 25, the processing device 1#2-1 may be arranged in the machining space PSP#2-1, the processing device 1#2-2 may be arranged in the machining space PSP#2-2, ..., the processing device 1#2-n2 may be arranged in the machining space PSP#2-n2. In this case, the processing device 1#2-1 processes the area WP#2-1 included in the machining space PSP#2-1 on the surface of the workpiece W, the processing device 1#2-2 processes the area WP#2-2 included in the machining space PSP#2-2 on the surface of the workpiece W, ..., the processing device 1#2-n2 processes the area WP#2-n2 included in the machining space PSP#2-n2 on the surface of the workpiece W.

[0216] The control device 3 controls each of the multiple processing devices 1. To control the processing device 1#1-k1 (where k1 is a variable indicating an integer not less than 1 and not more than n1), the control device 3 may use at least a measurement result of the position of the workpiece W by the imaging device 15#1-k1 of the processing device 1#1-k1, a measurement result of the position of the workpiece W by the processing head 13#1-k1 of the processing device 1#1-k1, and a measurement result of the position of the processing head 13#1-k1 of the processing device 1#1-k1 by the measuring device 2#1. On the other hand, the control device 3 may use at least the measurement result of the position of the workpiece W by the imaging device 15#2-k2 of the processing device 1#2-k2, the measurement result of the position of the workpiece W by the processing head 13#2-k2 of the processing device 1#2-k2, and the measurement result of the position of the processing head 13#2-k2 of the processing device 1#2-k2 by the measuring device 2#2 to control the processing device 1#2-k2 (where k2 is a variable indicating an integer not less than 1 and not more than n2). Note that the method by which the control device 3 controls the multiple processing devices 1 in the seventh embodiment may be the same as the method in the sixth embodiment, and therefore a detailed description thereof will be omitted. However, in the seventh embodiment, the control device 3 may control the head drive system 14#1-k1 of the processing device 1#1-k1 and the head drive system 14#2-k2 of the processing device 1#2-k2 based on the measurement results by the measuring devices 2#1 and 2#2 so that the processing device 1#1-k1 does not collide with the processing device 1#2-k2 when moving the processing head 13 in step S13 of Figure 12.

[0217] The machining system SYSg according to the seventh embodiment can provide the same effects as those provided by the machining system SYSf according to the sixth embodiment.

[0218] In addition, in the processing system SYSf according to the sixth embodiment and the processing system SYSg according to the seventh embodiment, the number of measuring devices 2 is smaller than the number of processing devices 1. However, the number of measuring devices 2 may be greater than the number of processing devices 1. Also, the number of processing devices 1 and the number of measuring devices 2 may be the same.

[0219] At least one of the machining system SYSb according to the second embodiment to the machining system SYSe according to the fifth embodiment may have the components specific to the machining system SYSg according to the seventh embodiment. The components specific to the machining system SYSg according to the seventh embodiment may include components related to a plurality of measuring devices 2.

[0220] (8) Variations In the above description, the processing system SYS measures the position of the workpiece W using the imaging device 15, measures the position of the workpiece W using the measurement light ML2 via the measurement optical system 132, and measures the positions of at least one of the processing head 13 and the workpiece W using the measurement device 2. However, the processing system SYS does not have to measure the position of the workpiece W using the imaging device 15. In this case, the processing system SYS does not have to include the imaging device 15. The processing system SYSa does not have to perform the operation in step S14 of FIG. 12. In addition, the processing system SYS does not have to measure the position of the workpiece W using the measurement light ML2 via the measurement optical system 132. In this case, the processing system SYS does not have to include components (specifically, the measurement light source 12 and the measurement optical system 132) necessary to irradiate the measurement light ML2 to the workpiece W. The processing system SYSa does not have to perform the operation in step S16 of FIG. 12. The processing system SYS does not have to measure the position of at least one of the processing head 13 and the workpiece W using the measurement device 2. In this case, the processing system SYS does not need to include the measuring device 2.

[0221] In the above description, the processing system SYS includes the processing head 13 capable of emitting the processing light EL. However, the processing system SYS may include a processing head 13h including an arbitrary end effector 136h capable of performing an arbitrary operation on the workpiece W in addition to or instead of the processing head 13 capable of emitting the processing light EL. An example of the processing head 13h including the end effector 136h is shown in FIG. 26. In the example shown in FIG. 26, the end effector 136h is attached to the head housing 135. The processing system SYS including such an end effector 136h may be referred to as a robot system. The processing head 13h may differ from the processing head 13 in that it may not include components related to the processing light EL (specifically, the processing optical system 131). Furthermore, when the processing head 13h does not include components related to the processing light EL, the processing head 13h may not include the synthesis optical system 133 because it is not necessary to synthesize the processing light EL and the measurement light ML2. However, the processing head 13h may include components related to the processing light EL and a synthesis optical system 133.

[0222] In the above description, the processing device 1 processes the workpiece W by irradiating the workpiece W with the processing light EL. However, the processing device 1 may also process the workpiece W by irradiating the workpiece W with an arbitrary energy beam other than light (this energy beam may be referred to as a "processing beam"). In this case, the processing device 1 may be equipped with a beam source capable of generating the arbitrary energy beam in addition to or instead of the processing light source 11. Examples of the arbitrary energy beam include charged particle beams such as electron beams and ion beams. Another example of the arbitrary energy beam includes electromagnetic waves.

[0223] Alternatively, the processing device 1 may use a tool to process the workpiece W. That is, the processing device 1 may machine the workpiece W. In this case, the processing head 13 may be equipped with a tool in addition to or instead of each optical system. However, even when the processing device 1 performs machining, if the processing head 13 measures the position of the workpiece W using the measurement light ML2, the processing head 13 may be equipped with an optical system (specifically, the measurement optical system 132 and the objective optical system 134) necessary for irradiating the measurement light ML2 to the workpiece W.

[0224] The processing device 1 may include an exhaust device. The exhaust device may be capable of exhausting gas in the processing space in which the workpiece W is placed. In particular, the exhaust device may be capable of sucking unnecessary substances generated by irradiation of the processing light EL from the processing space to the outside of the processing space by exhausting the gas in the processing space. In particular, if the unnecessary substances are present on the optical path of the processing light EL, the unnecessary substances may affect the irradiation of the processing light EL to the workpiece W. For this reason, the exhaust device may particularly suck the unnecessary substances together with the gas in the space from the space including the optical path of the processing light EL between the fθ lens 1342, which is the final optical element of the processing head 13, and the workpiece W. Note that an example of the unnecessary substances is the steam of the workpiece W (that is, a gas containing fine particles formed by condensation of the steam of the workpiece W, so-called fumes).

[0225] The processing apparatus 1 may include a gas supply device. The gas supply device may supply gas to the processing space in which the workpiece W is disposed. In particular, the gas supply device may supply gas to the processing space to prevent unnecessary substances generated by irradiation of the processing light EL from adhering to the processing head 13 (particularly, the fθ lens 1342 which is the final optical element of the processing head 13) located in the processing space. The gas supply device may supply gas to the processing space to blow away (i.e., remove) unnecessary substances adhering to the processing head 13 (particularly, the fθ lens 1342 which is the final optical element of the processing head 13).

[0226] The requirements of each of the above-described embodiments may be combined as appropriate. Some of the requirements of each of the above-described embodiments may not be used. The requirements of each of the above-described embodiments may be replaced with the requirements of other embodiments as appropriate. In addition, to the extent permitted by law, the disclosures of all publications and U.S. patents relating to the devices, etc. cited in each of the above-described embodiments are incorporated by reference into the present description.

[0227] Furthermore, the present invention can be modified as appropriate within the scope that does not contradict the gist or concept of the invention that can be read from the claims and the entire specification, and a processing system involving such modifications is also included in the technical concept of the present invention. [Explanation of symbols]

[0228] 1 Processing equipment 13 Processing head 131 Processing optical system 132 Measurement Optical System 134 Objective Optical System 14 Head drive system 141 Self-propelled drive system 142 Arm drive system 143 Micromotion Drive System 15 Imaging device 2. Measurement equipment 3. Control device EL processing light ML1, ML2, ML3 measurement light SYS Machining System

Claims

1. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via the irradiation optical system; a third measurement device that measures the position of the irradiation device; Equipped with the first measurement device is disposed at a fixed position relative to the final optical element and measures the position of the object; The third measurement device is a processing system that irradiates measurement light onto a reflecting portion that is arranged at a fixed position relative to the final optical element, detects the measurement light reflected by the reflecting portion, and measures the position of the reflecting portion.

2. the first measuring device measures the position of the object at least in a direction intersecting with the irradiation direction of the processing light, the second measurement device measures the position of the object in the irradiation direction of the processing light via at least a part of the irradiation optical system; The third measurement device irradiates measurement light toward the irradiation device from a position distant from the irradiation device, detects the measurement light, and measures the position of the irradiation device. The processing system of claim 1 .

3. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via at least the final optical element of the illumination optical system; a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device and detects the measurement light to measure the position of the irradiation device; a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the movement device; Equipped with The driving device drives the irradiation device based on the measurement result by the first measuring device. A processing system.

4. the moving device moves the irradiation device based on the measurement result by the third measuring device; Measurement by the first measuring device is started while or after the irradiation device is moved by the moving device. The processing system according to claim 3 .

5. a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the movement device; a focal position changing device that changes the focal position of the processing light; Further provided with the moving device moves the irradiation device and the first measuring device based on the measurement result by the third measuring device; the drive device drives the irradiation device in at least one direction based on a measurement result by the first measurement device while or after the irradiation device is moved by the movement device, The focal position changing device changes the focal position of the processing light based on the measurement result by the second measuring device while or after the irradiation device is driven by the driving device. The processing system according to claim 3 or 4.

6. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via at least the final optical element of the illumination optical system; a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device and detects the measurement light to measure the position of the irradiation device; a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the movement device; a focal position changing device that changes the focal position of the processing light; Equipped with the moving device moves the irradiation device and the first measuring device based on the measurement result by the third measuring device; the drive device drives the irradiation device in at least one direction based on a measurement result by the first measurement device while or after the irradiation device is moved by the movement device, The focal position changing device changes the focal position of the processing light based on the measurement result by the second measuring device while or after the irradiation device is driven by the driving device. Processing system.

7. The processing system processes the object based on a measurement result by the first measuring device, a measurement result by the second measuring device, and a measurement result by the third measuring device. The processing system according to any one of claims 3 to 6.

8. The second measurement device measures the position of the object by irradiating measurement light source light from a measurement light source via at least a part of the irradiation optical system and detecting the measurement light source light from the object via the irradiation optical system. The processing system according to any one of claims 3 to 7.

9. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via at least the final optical element of the illumination optical system; a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device, detects the measurement light, and measures the position of the irradiation device; Equipped with The second measurement device measures the position of the object by irradiating measurement light source light from a measurement light source via at least a part of the irradiation optical system and detecting the measurement light source light from the object via the irradiation optical system. Processing system.

10. The distance from the irradiation device to the object is shorter than the distance between the third measurement device and the irradiation device. The processing system according to any one of claims 3 to 9.

11. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via at least the final optical element of the illumination optical system; a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device, detects the measurement light, and measures the position of the irradiation device; Equipped with The distance from the irradiation device to the object is shorter than the distance between the third measurement device and the irradiation device. Processing system.

12. The measurement resolution of the first measurement device and the measurement resolution of the second measurement device are higher than the measurement resolution of the third measurement device. The processing system according to any one of claims 3 to 11.

13. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via at least the final optical element of the illumination optical system; a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device and detects the measurement light to measure the position of the irradiation device; Equipped with The measurement resolution of the first measurement device and the measurement resolution of the second measurement device are higher than the measurement resolution of the third measurement device. Processing system.

14. Further comprising a control device for controlling the processing of the object; The control device A predetermined area of ​​the object is recognized based on the measurement result of the first measuring device, and control is performed to stop the irradiation device relative to the recognized predetermined area. The processing system according to any one of claims 3 to 13.

15. Further comprising a control device for controlling the processing of the object; The control device controlling the moving device to move the irradiation device toward a predetermined region of the object based on the measurement result of the third measuring device; Recognizing the predetermined area based on the measurement result of the first measuring device, and performing control to stop the irradiation device with respect to the recognized predetermined area; The irradiation device is controlled so as to perform processing based on the measurement result of the second measurement device. The processing system according to any one of claims 3 to 14.

16. A processing system for processing an object, comprising: A movable arm; an end effector connected to the movable arm for processing the object; a first measurement device fixed relative to the end effector and configured to measure the position of the object; a second measurement device that measures the position of the object via an illumination optical system; a third measurement device that irradiates measurement light toward the end effector from a position distant from the end effector, detects the measurement light, and measures the position of the end effector; A processing system comprising:

17. The processing system processes the object based on a measurement result by the first measuring device, a measurement result by the second measuring device, and a measurement result by the third measuring device.

17. The processing system of any one of claims 1 to 2 and 16.

18. The measurement resolution of the first measurement device and the measurement resolution of the second measurement device are higher than the measurement resolution of the third measurement device.

18. A processing system according to any one of claims 1 to 2 and 16 to 17.

19. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via the irradiation optical system; a third measurement device that measures the position of the irradiation device; Equipped with The measurement resolution of the first measurement device and the measurement resolution of the second measurement device are higher than the measurement resolution of the third measurement device. Processing system.

20. a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the movement device; The driving device drives the irradiation device based on the measurement result by the first measuring device. The processing system according to claim 1 or 2.

21. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via the irradiation optical system; a third measurement device that measures the position of the irradiation device; a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the movement device; Equipped with The driving device drives the irradiation device based on the measurement result by the first measuring device. Processing system.

22. the moving device moves the irradiation device based on the measurement result by the third measuring device; Measurement by the first measuring device is started while or after the irradiation device is moved by the moving device.

22. The processing system of any one of claims 1 to 2, 20 and 21.

23. a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the movement device; a focal position changing device that changes the focal position of the processing light; Further provided with the moving device moves the irradiation device and the first measuring device based on the measurement result by the third measuring device; the drive device drives the irradiation device in at least one direction based on a measurement result by the first measurement device while or after the irradiation device is moved by the movement device, The focal position changing device changes the focal position of the processing light based on the measurement result by the second measuring device while or after the irradiation device is driven by the driving device.

23. The processing system of any one of claims 1 to 2 and 20 to 22.

24. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via the irradiation optical system; a third measurement device that measures the position of the irradiation device; a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the movement device; a focal position changing device that changes the focal position of the processing light; Equipped with the moving device moves the irradiation device and the first measuring device based on the measurement result by the third measuring device; the drive device drives the irradiation device in at least one direction based on a measurement result by the first measurement device while or after the irradiation device is moved by the movement device, The focal position changing device changes the focal position of the processing light based on the measurement result by the second measuring device while or after the irradiation device is driven by the driving device. Processing system.

25. The second measurement device measures the position of the object by irradiating measurement light source light from a measurement light source via at least a part of the irradiation optical system and detecting the measurement light source light from the object via the irradiation optical system.

25. The processing system of any one of claims 1-2 and 20-24.

26. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via the irradiation optical system; a third measurement device that measures the position of the irradiation device; Equipped with The second measurement device measures the position of the object by irradiating measurement light source light from a measurement light source via at least a part of the irradiation optical system and detecting the measurement light source light from the object via the irradiation optical system. Processing system.

27. The distance from the irradiation device to the object is shorter than the distance between the third measurement device and the irradiation device.

27. The processing system of any one of claims 1-2 and 20-26.

28. Further comprising a control device for controlling the processing of the object; The control device A predetermined area of ​​the object is recognized based on the measurement result of the first measuring device, and control is performed to stop the irradiation device relative to the recognized predetermined area.

28. The processing system of any one of claims 1-2 and 20-27.

29. the processing system processes the object by irradiating the object with processing light via an irradiation optical system; the end effector includes an illumination device having at least a final optical element of the illumination optical system; The movable arm is a moving device that moves the irradiation device. The processing system of claim 16.

30. a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the movable arm; The driving device drives the irradiation device based on the measurement result by the first measuring device.

30. The processing system of claim 29.

31. the movable arm moves the irradiation device based on the measurement result by the third measurement device; Measurement by the first measuring device is started while or after the irradiation device is moved by the movable arm.

31. The processing system according to claim 29 or 30.

32. a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the movable arm; a focal position changing device that changes the focal position of the processing light; Further provided with the movable arm moves the irradiation device and the first measurement device based on a measurement result by the third measurement device; the drive device drives the irradiation device in at least one direction based on a measurement result by the first measurement device while or after the irradiation device is moved by the movable arm; The focal position changing device changes the focal position of the processing light based on the measurement result by the second measuring device while or after the irradiation device is driven by the driving device.

32. The processing system of any one of claims 29 to 31.

33. The second measurement device measures the position of the object by irradiating measurement light source light from a measurement light source via at least a part of the irradiation optical system and detecting the measurement light source light from the object via the irradiation optical system.

33. The processing system of any one of claims 29 to 32.

34. The distance from the irradiation device to the object is shorter than the distance between the third measurement device and the irradiation device.

34. The processing system of any one of claims 29 to 33.

35. Further comprising a control device for controlling the processing of the object; The control device A predetermined area of ​​the object is recognized based on the measurement result of the first measuring device, and control is performed to stop the irradiation device relative to the recognized predetermined area.

35. The processing system of any one of claims 29 to 34.

36. The first measurement device includes an imaging device capable of imaging the object.

36. The processing system of any one of claims 1 to 35.

37. The imaging device is capable of capturing an image of an object marker formed on the object.

37. The processing system of claim 36.

38. A processing system that processes an object by irradiating the object with processing light via an irradiation optical system, an illumination device having at least a final optical element of the illumination optical system; a moving device that moves the irradiation device; a first measurement device disposed in the irradiation device and configured to measure a position of the object; a second measurement device that measures the position of the object via the irradiation optical system; a third measurement device that measures the position of the irradiation device; Equipped with the first measurement device includes an imaging device capable of imaging the object, The imaging device is capable of capturing an image of an object marker formed on the object. Processing system.

39. The first measurement device includes a first optical measurement device that can measure the position of the object by irradiating the object with measurement light without passing through the irradiation optical system and detecting the measurement light from the object without passing through the irradiation optical system.

16. The processing system according to any one of claims 1 to 15.

40. The first measurement device measures the position of the object without passing through at least the final optical element.

40. The processing system of any one of claims 1 to 15 and 39.

41. The second measurement device includes a second optical measurement device that is capable of irradiating measurement light source light from a measurement light source via the irradiation optical system and detecting the measurement light source light from the object via the irradiation optical system.

41. The processing system of any one of claims 1 to 15 and 39 to 40.

42. the measurement light source is a first measurement light source, The second measurement device is capable of detecting interference light between the measurement light source light from the object via the irradiation optical system and reference light from a second measurement light source.

42. The processing system of claim 8, 9, 25, 26, 33 or 41.

43. At least one of the measurement light source light and the reference light includes pulsed light including frequency components arranged at equal intervals on a frequency axis.

43. The processing system of claim 42.

44. The third measurement device includes a third optical measurement device that is capable of irradiating the measurement light and detecting the measurement light from the irradiation device. The processing system according to any one of claims 1 to 3.

45. The third measurement device includes a position measurement device capable of measuring the position of at least one of the irradiation device and the object from a position distant from the irradiation device and the object.

45. The processing system of any one of claims 1 to 15, 39 to 41 and 44.

46. The first measurement device is capable of measuring the position of the object in at least one of a direction along a first measurement axis, a direction along a second measurement axis intersecting the first measurement axis, and a rotational direction around a third measurement axis intersecting both the first and second measurement axes.

46. ​​The processing system of any one of claims 1 to 45.

47. The second measurement device is capable of measuring the position of the object in a direction along a third measurement axis that intersects both a first measurement axis and a second measurement axis that intersects the first measurement axis.

47. The processing system of any one of claims 1 to 46.

48. the second measurement device measures the position of the object by irradiating measurement light source light from a measurement light source and detecting the measurement light source light from the object; The direction along the third measurement axis is parallel to the direction along the irradiation direction of the measurement light source light.

48. The processing system of claim 47.

49. The second measurement device is capable of detecting the shape of the surface of the object by irradiating measurement light source light from a measurement light source onto each of a plurality of points on the surface of the object and detecting the measurement light source light from the plurality of points via the irradiation optical system.

49. The processing system of any one of claims 1 to 48.

50. The second measurement device is capable of measuring the position of the object in at least one of a direction along a third measurement axis intersecting both a first measurement axis and a second measurement axis intersecting the first measurement axis, a rotation direction around the first measurement axis, and a rotation direction around the second measurement axis.

50. The processing system of any one of claims 1 to 49.

51. The third measurement device includes an angular velocity detection device capable of detecting the angular velocity of the irradiation device.

46. ​​The processing system of any one of claims 1 to 15, 39 to 41 and 44 to 45.

52. The third measurement device includes an angular velocity detection device capable of detecting the angular velocity of the end effector.

36. The processing system of any one of claims 16 and 29 to 35.

53. The third measurement device includes a satellite positioning device capable of measuring the position of at least one of the irradiation optical system and the object using a satellite positioning system.

52. The processing system of any one of claims 1 to 15, 39 to 41, 44 to 45 and 51.

54. The third measurement device includes a satellite positioning device capable of measuring the position of the end effector using a satellite positioning system.

53. The processing system of any one of claims 16, 29 to 35 and 52.

55. The third measurement device is capable of measuring the position of the irradiation device in at least one of a direction along a first measurement axis, a direction along a second measurement axis intersecting the first measurement axis, a direction along a third measurement axis intersecting both the first and second measurement axes, a rotation direction around the first measurement axis, a rotation direction around the second measurement axis, and a rotation direction around the third measurement axis.

54. The processing system of any one of claims 1 to 15, 39 to 41, 44 to 45, 51 and 53.

56. The third measurement device is capable of measuring the position of the end effector in at least one of a direction along a first measurement axis, a direction along a second measurement axis intersecting the first measurement axis, a direction along a third measurement axis intersecting both the first and second measurement axes, a rotational direction around the first measurement axis, a rotational direction around the second measurement axis, and a rotational direction around the third measurement axis.

55. The processing system of any one of claims 16, 29 to 35, 52 and 54.

57. the processing system processes the object by irradiating the object with processing light via an irradiation optical system; the end effector includes an illumination device having at least a final optical element of the illumination optical system; The movable arm is a moving device that moves the irradiation device. The processing system of claim 16.

58. the moving device is a first moving device; a drive device that drives the irradiation device with a movement stroke that is smaller than the movement stroke of the first movement device; a second moving device that moves the irradiation device with a movement stroke larger than the movement stroke of the first moving device; Further provided with the irradiation optical system includes a focal position changing device that changes the focal position of the processing light to change the irradiation position of the processing light on the surface of the object, The drive device is a first connecting member connected to the irradiation device; a second connecting member connected to the first moving device; a driving member that changes a relative positional relationship between the first connecting member and the second connecting member to move the irradiation device relative to the object; an elastic member that connects the first connecting member and the second connecting member; Including, The first moving device is a third connecting member connected to the driving device; a fourth connecting member connected to the second moving device; a movable member that is movable so as to change the relative positional relationship between the third connecting member and the fourth connecting member; Including, The second moving device is a fifth connecting member connected to the first moving device; a movement mechanism that moves a fifth connection member relative to the object; 58. The processing system of any one of claims 1 to 15, 39 to 41, 44 to 45, 51, 55 and 57, comprising:

59. The movable member includes a plurality of arm members and a joint member that movably connects the plurality of arm members.

59. The processing system of claim 58.

60. The moving mechanism includes at least one of a self-propelled device that can move by itself without interfering with the object and a flying device that can fly at a position away from the object.

60. The processing system of any one of claims 58 or 59.

61. the movement accuracy of the drive device is higher than the movement accuracy of the first movement device, The movement accuracy of the first moving device is higher than the movement accuracy of the second moving device.

61. The processing system of any one of claims 58 to 60.

62. performing a first operation of controlling at least one of the first and second moving devices based on the measurement result of the third measurement device and position information relating to the position of the shot area so that the irradiation device moves to a position where the irradiation optical system can irradiate the processing light onto the shot area on the surface of the object; After the first operation is performed, the driving device is controlled based on the measurement result of the first measurement device so that the relative positional relationship between the shot area and at least the final optical element of the irradiation optical system is fixed, and a second operation is performed to control the focus position changing device based on the measurement result of the second measurement device and processing content information indicating the processing content of the shot area so that the processing light is irradiated onto a desired position of the shot area.

62. The processing system of any one of claims 58 to 61.

63. During the first operation, the driving device does not move the irradiation device, and the focal position changing device does not change the focal position; During the second operation, the first and second moving devices do not move the irradiation device.

63. The processing system of claim 62.

64. During the period in which the first operation is being performed, the second moving device moves the irradiation device, and then the first moving device moves the irradiation device.

64. The processing system of any one of claims 62 or 63.

65. A processing system for processing an object, comprising: a first irradiation device having at least a first final optical element of a first irradiation optical system that irradiates the object with first processing light; a second irradiation device having at least a second final optical element of a second irradiation optical system that irradiates the object with second processing light; a measuring device that measures the positions of the first and second irradiation devices; a first moving device that moves the first irradiation device; a second moving device that moves the second irradiation device; a control device for controlling the first and second moving devices; Equipped with the first irradiation device processes a first region of the object; the second irradiation device processes a second region of the object; the measurement device is capable of measuring positions of the first and second illumination devices from a position away from the first illumination device, the second illumination device, and the object; The control device moves the first and second irradiation devices based on the result of the measurement device so that the first irradiation device and the second irradiation device do not collide with each other. Processing system.

66. the first irradiation device is disposed in a first processing space, The second irradiation device is disposed in a second processing space different from the first processing space.

66. The processing system of claim 65.

67. the measurement device is a first measurement device, a third irradiation device having at least a third final optical element of a third irradiation optical system that irradiates the object with third processing light; a second measurement device that measures the position of the third irradiation device; Equipped with the third irradiation device processes a third region of the object; The second measurement device is capable of measuring the position of the third illumination device from a position distant from the third illumination device and the object.

67. The processing system of claim 65 or 66.

68. A processing system for processing an object, comprising: a first irradiation device having at least a first final optical element of a first irradiation optical system that irradiates the object with first processing light; a second irradiation device having at least a second final optical element of a second irradiation optical system that irradiates the object with second processing light; a third irradiation device having at least a third final optical element of a third irradiation optical system that irradiates the object with third processing light; a first measurement device that measures the positions of the first and second irradiation devices; a second measurement device that measures the position of the third irradiation device; Equipped with the first irradiation device processes a first region of the object; the second irradiation device processes a second region of the object; the third irradiation device processes a third region of the object; the first measurement device is capable of measuring positions of the first and second illumination devices from a position away from the first illumination device, the second illumination device, and the object; The second measurement device is capable of measuring the position of the third illumination device from a position distant from the third illumination device and the object. Processing system.

69. a first moving device that moves the first irradiation device; a second moving device that moves the second irradiation device; a third moving device that moves the third irradiation device; a control device that controls the first to third moving devices; Equipped with the control device moves the first and second irradiation devices based on the measurement result of the first measurement device; The control device moves the third irradiation device based on the measurement result of the second measurement device.

69. The processing system of claim 67 or 68.

70. The control device moves the first to third irradiation devices based on the results of the first and second measurement devices so that the first irradiation device, the second irradiation device, and the third irradiation device do not collide with each other.

70. The processing system of claim 69.

71. the first irradiation device is disposed in a first processing space, The second irradiation device is disposed in a second processing space different from the first processing space. The third irradiation device is disposed in a third processing space different from the first and second processing spaces.

71. The processing system of any one of claims 67 to 70.

72. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device; moving the irradiation device using a moving device; Equipped with the first measurement device is disposed at a fixed position relative to the final optical element and measures the position of the object; A processing method in which the third measurement device irradiates measurement light onto a reflecting portion arranged at a fixed position relative to the final optical element, detects the measurement light reflected by the reflecting portion, and measures the position of the reflecting portion.

73. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via at least the final optical element of the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device and detects the measurement light to measure the position of the irradiation device; moving the irradiation device using a moving device; driving the irradiation device using a drive device that drives the irradiation device with a movement stroke smaller than the movement stroke of the movement device based on the measurement result by the first measurement device; A processing method comprising:

74. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via at least the final optical element of the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device and detects the measurement light to measure the position of the irradiation device; moving the irradiation device and the first measurement device using a movement device based on the measurement result by the third measurement device; driving the irradiation device using a drive device that drives the irradiation device with a movement stroke smaller than the movement stroke of the movement device based on the measurement result of the first measurement device while or after the irradiation device is moved by the movement device; changing a focal position of the processing light based on a measurement result by the second measurement device while or after the irradiation device is being driven by the drive device; A processing method comprising:

75. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via at least the final optical element of the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device and detects the measurement light to measure the position of the irradiation device; moving the irradiation device using a moving device; Equipped with A processing method in which the second measurement device measures the position of the object by irradiating measurement light source light from a measurement light source through at least a part of the irradiation optical system and detecting the measurement light source light from the object through the irradiation optical system.

76. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via at least the final optical element of the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device and detects the measurement light to measure the position of the irradiation device; moving the irradiation device using a moving device; Equipped with The distance from the irradiation device to the object is shorter than the distance between the third measurement device and the irradiation device. Processing method.

77. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via at least the final optical element of the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device that irradiates measurement light toward the irradiation device from a position distant from the irradiation device and detects the measurement light to measure the position of the irradiation device; moving the irradiation device using a moving device; Equipped with The measurement resolution of the first measurement device and the measurement resolution of the second measurement device are higher than the measurement resolution of the third measurement device. Processing method.

78. A processing method for processing an object, comprising: measuring a position of the object using a first metrology device, the first metrology device being connected to an end effector connected to a movable arm and fixed relative to the end effector for processing the object; measuring the position of the object via an illumination optical system using a second measurement device; measuring the position of the end effector using a third measurement device that irradiates a measurement light toward the end effector from a position distant from the end effector and detects the measurement light to measure the position of the end effector; A processing method comprising:

79. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device; moving the irradiation device using a moving device; Equipped with The measurement resolution of the first measurement device and the measurement resolution of the second measurement device are higher than the measurement resolution of the third measurement device. Processing method.

80. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device; moving the irradiation device using a moving device; driving the irradiation device using a drive device that drives the irradiation device with a movement stroke smaller than the movement stroke of the movement device based on the measurement result by the first measurement device; A processing method comprising:

81. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device; moving the irradiation device and the first measuring device using a moving device based on the measurement result by the third measuring device; driving the irradiation device using a drive device that drives the irradiation device with a movement stroke smaller than the movement stroke of the movement device based on the measurement result of the first measurement device while or after the irradiation device is moved by the movement device; changing a focal position of the processing light based on a measurement result by the second measurement device while or after the irradiation device is being driven by the drive device; A processing method comprising:

82. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device; moving the irradiation device using a moving device; Equipped with A processing method in which the second measurement device measures the position of the object by irradiating measurement light source light from a measurement light source through at least a part of the irradiation optical system and detecting the measurement light source light from the object through the irradiation optical system.

83. A processing method for processing an object by irradiating the object with processing light via an irradiation optical system, comprising: measuring the position of the object using a first measurement device disposed in an illumination device having at least a final optical element of the illumination optical system; measuring the position of the object via the illumination optical system using a second measurement device; measuring the position of the irradiation device using a third measurement device; moving the irradiation device using a moving device; capturing an image of an object marker formed on the object using an imaging device capable of capturing an image of the object; A processing method comprising:

84. A processing method for processing an object, comprising: Processing a first region of the object using a first irradiation device having at least a first final optical element of a first irradiation optical system that irradiates the object with first processing light; Processing a second region of the object using a second irradiation device having at least a second final optical element of a second irradiation optical system that irradiates the object with second processing light; measuring positions of the first and second illumination devices using a measurement device capable of measuring the positions of the first and second illumination devices from a position away from the first illumination device, the second illumination device, and the object; using a first moving device that moves the first irradiation device and a second moving device that moves the second irradiation device, to move the first and second irradiation devices so that the first irradiation device and the second irradiation device do not collide with each other based on a result of the measurement device; A processing method comprising:

85. A processing method for processing an object, comprising: Processing a first region of the object using a first irradiation device having at least a first final optical element of a first irradiation optical system that irradiates the object with first processing light; Processing a second region of the object using a second irradiation device having at least a second final optical element of a second irradiation optical system that irradiates the object with second processing light; Processing a third region of the object using a third irradiation device having at least a third final optical element of a third irradiation optical system that irradiates the object with third processing light; measuring positions of the first and second illumination devices using a first measurement device capable of measuring the positions of the first and second illumination devices from a position away from the first illumination device, the second illumination device, and the object; measuring the position of the third irradiation device using a second measurement device capable of measuring the position of the third irradiation device from a position distant from the third irradiation device and the object; A processing method comprising:

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