Conveyor table transfer device, transport system and conveyor table transfer method

Abstract

By the driving of a drive unit 61, a movable linear conveyor 7 moves between a facing position Pa (first facing position) that faces a fixed linear conveyor 5a (first fixed linear conveyor), and a facing position Pb (second facing position) that faces a fixed linear conveyor 5b (second fixed linear conveyor). The movement of this moveable linear conveyor 7 is guided between the facing position Pa and the facing position Pb by a linear guidance mechanism 8. The linear guidance mechanism 8 is attached to the fixed linear conveyor 5a, and attached to the fixed linear conveyor 5b.

Description

[Technical field]

[0001] The present invention relates to a technique for transferring a conveyor table between a plurality of fixed linear conveyors each capable of driving a conveyor table. [Background technology]

[0002] Patent Document 1 describes a conveyance system that circulates carts. This conveyance system includes two conveyance paths arranged in parallel. The conveyance path has a plurality of guide rails arranged in series, and a plurality of coils are arranged in series on each guide rail. The conveyance path drives the conveyor table by magnetic force between a permanent magnet built into the cart, which is the conveyor table, and the coils. Such a conveyance path functions as a fixed linear conveyor that is fixedly installed.

[0003] The transport system further includes two transfer devices arranged at both ends of the two fixed linear conveyors. Each transfer device has a movable linear conveyor that drives a conveyor table by magnetic force in the same manner as described above, and moves the movable linear conveyor between two opposing positions that face the two fixed linear conveyors, respectively. The movable linear conveyor then transfers the conveyor table between the opposing fixed linear conveyors. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2019-062614 A Summary of the Invention [Problem to be solved by the invention]

[0005] In such a conveying system, if the position of the fixed linear conveyor is shifted due to distortion or thermal deformation of the mounting frame on which the fixed linear conveyor is mounted, the movable linear conveyor cannot be accurately positioned relative to the fixed linear conveyor, and as a result, the conveyor table cannot be smoothly transferred between the fixed linear conveyor and the movable linear conveyor.

[0006] The present invention has been made in consideration of the above-mentioned problems, and aims to provide a technology that enables smooth transfer of the conveyor table between a fixed linear conveyor and a movable linear conveyor without being affected by distortion or thermal deformation of the mounting stand on which the fixed linear conveyor is attached. [Means for solving the problem]

[0007] The conveyor table transfer device of the present invention comprises a movable linear conveyor that drives the conveyor table, a drive unit that moves the movable linear conveyor between a first opposing position opposing a first fixed linear conveyor mounted on a mounting frame and a second opposing position opposing a second fixed linear conveyor mounted on the mounting frame, and a linear guide mechanism that guides the movement of the movable linear conveyor by the drive unit between the first opposing position and the second opposing position, wherein the movable linear conveyor positioned at the first opposing position transfers the conveyor table between the first fixed linear conveyor, and the movable linear conveyor positioned at the second opposing position transfers the conveyor table between the second fixed linear conveyor, and the linear guide mechanism is attached to the first fixed linear conveyor and the second fixed linear conveyor.

[0008] The conveyor table transfer method of the present invention includes the steps of positioning a movable linear conveyor at a first opposing position opposing a first fixed linear conveyor mounted on a mounting frame, the movable linear conveyor positioned at the first opposing position transferring the conveyor table to and from the first fixed linear conveyor, moving the movable linear conveyor to a second opposing position opposing a second fixed linear conveyor mounted on the mounting frame, the movable linear conveyor positioned at the second opposing position transferring the conveyor table to and from the second fixed linear conveyor, and guiding the movement of the movable linear conveyor between the first opposing position and the second opposing position by a linear guide mechanism, wherein the linear guide mechanism is attached to the first fixed linear conveyor and the second fixed linear conveyor.

[0009] In the present invention (conveyor table transfer device and method) configured as described above, the movable linear conveyor is moved between a first opposing position opposing the first fixed linear conveyor and a second opposing position opposing the second fixed linear conveyor by driving the driving unit. The movement of the movable linear conveyor is guided between the first opposing position and the second opposing position by the linear guide mechanism. The linear guide mechanism is attached to the first fixed linear conveyor and is also attached to the second fixed linear conveyor. Since the movement of the movable linear conveyor to the first opposing position is guided by the linear guide mechanism attached to the first fixed linear conveyor, the movable linear conveyor moved to the first opposing position can be accurately positioned with respect to the first fixed linear conveyor. Similarly, the movement of the movable linear conveyor to the second opposing position is guided by the linear guide mechanism attached to the second fixed linear conveyor, so that the movable linear conveyor moved to the second opposing position can be accurately positioned with respect to the second fixed linear conveyor. As a result, smooth transfer of the conveyor table between the fixed linear conveyor and the movable linear conveyor can be achieved regardless of distortion or thermal deformation of the mounting frame on which the fixed linear conveyor is mounted.

[0010] The conveyor table transfer device may be configured so that the linear guide mechanism is attached to the bottom surface of the first fixed linear conveyor and also to the bottom surface of the second fixed linear conveyor. By using the bottom surfaces of the first and second fixed linear conveyors to attach the linear guide mechanism in this way, the contact area between the first and second fixed linear conveyors and the linear guide mechanism can be secured widely, and the first and second fixed linear conveyors and the linear guide mechanism can be attached firmly. As a result, the movable linear conveyor that has moved to the first and second opposing positions can be accurately positioned relative to the first and second fixed linear conveyors, and smooth transfer of the conveyor table between them can be performed.

[0011] The conveyor table transfer device may be configured so that the linear guide mechanism is attached to the portion of the first fixed linear conveyor protruding from the mounting frame and is also attached to the portion of the second fixed linear conveyor protruding from the mounting frame. In this configuration, the linear guide mechanism only needs to be attached to the portions of the first and second fixed linear conveyors protruding from the mounting frame, making it easy to attach them.

[0012] The conveyor table transfer device may be configured such that the linear guide mechanism has a first mounting member attached to the first fixed linear conveyor, a second mounting member attached to the second fixed linear conveyor, and a linear guide member attached to the first mounting member and the second mounting member, and the movement of the movable linear conveyor between the first opposing position and the second opposing position is guided by the linear guide member. In this configuration, the movement of the movable linear conveyor is guided between the first opposing position and the second opposing position by the linear guide member. The linear guide member is attached to the first mounting member attached to the first fixed linear conveyor and is also attached to the second mounting member attached to the second fixed linear conveyor. In other words, the movement of the movable linear conveyor to the first opposing position is guided by the linear guide member fixed to the first fixed linear conveyor by the first mounting member, so that the movable linear conveyor moved to the first opposing position can be accurately positioned with respect to the first fixed linear conveyor. Similarly, the movement of the movable linear conveyor to the second opposing position is guided by the linear guide member fixed to the second fixed linear conveyor by the second mounting member, so that the movable linear conveyor moved to the second opposing position can be accurately positioned with respect to the second fixed linear conveyor. As a result, smooth transfer of the conveyor table between the fixed linear conveyor and the movable linear conveyor can be performed regardless of distortion or thermal deformation of the mounting frame to which the fixed linear conveyor is attached.

[0013] The conveyor table transfer device may be configured such that the first mounting member and the second mounting member are provided independently of each other and spaced apart, and the linear guide member is bridged between the first mounting member and the second mounting member. In this configuration, the first mounting member and the second mounting member are provided independently of each other and spaced apart. Therefore, when the mounting frame is deformed such that the mounting locations of the first mounting member and the second mounting member are misaligned, the first mounting member and the second mounting member are displaced in response to the deformation of the mounting frame without interfering with each other. Therefore, it is possible to suppress deformation or inclination of the first fixed linear conveyor and the second fixed linear conveyor attached thereto due to excessive load being applied to the first mounting member and the second mounting member. At this time, the linear guide mechanism bridged between the first mounting member and the second mounting member is deflected in response to the displacement of the first mounting member and the second mounting member. However, although such deflection affects the movement of the movable linear conveyor between the first and second opposing positions, it has almost no effect on the positioning of the movable linear conveyor once it has moved to the first and second opposing positions, because this positioning is mainly performed by the first and second mounting members. As a result, even if the mounting frame is deformed in such a way that the mounting locations of the first and second mounting members are misaligned from each other, smooth transfer of the conveyor table between the fixed linear conveyor and the movable linear conveyor is possible.

[0014] The conveyor table transfer device may be configured to further include a movable member that supports the movable linear conveyor and engages with the linear guide member, and the drive unit drives the movable member to move the movable member along the linear guide member to move the movable linear conveyor between the first and second opposing positions. In this configuration, the movable linear conveyor can be guided to the first and second opposing positions while being firmly supported by the movable member.

[0015] The conveyor table transfer device may be configured such that the first mounting member supports a portion of the linear guide member with which the movable member that positions the movable linear conveyor at the first opposing position engages from the side opposite to the surface where the movable member is attached to the linear guide member, and the second mounting member supports a portion of the linear guide member with which the movable member that positions the movable linear conveyor at the second opposing position engages from the side opposite to the surface where the movable member is attached to the linear guide member. In such a configuration, the first mounting member attached to the first fixed linear conveyor can support the movable member that positions the movable linear conveyor at the first opposing position, and the movable linear conveyor at the first opposing position can be accurately positioned to the first fixed linear conveyor. Similarly, the second mounting member attached to the second fixed linear conveyor can support the movable member that positions the movable linear conveyor at the second opposing position, and the movable linear conveyor at the second opposing position can be accurately positioned to the second fixed linear conveyor. As a result, smooth transfer of the conveyor table between the fixed linear conveyor and the movable linear conveyor can be performed.

[0016] The conveyor table transfer device may be configured such that the linear guide member has a first divided guide member attached to the first mounting member and a second divided guide member attached to the second mounting member, and the first divided guide member and the second divided guide member are provided independently of each other and arranged in series. In this configuration, when a positional deviation occurs between the first mounting member and the second mounting member due to bending or thermal deformation of the mounting frame, the first divided guide member follows the positional deviation of the first mounting member independently of the second divided guide member, and the second divided guide member follows the positional deviation of the second mounting member independently of the first divided guide member. Therefore, the first divided guide member can accurately guide the movable linear conveyor to the first opposing position, and the second divided guide member can accurately guide the movable linear conveyor to the second opposing position. As a result, smooth transfer of the conveyor table between the fixed linear conveyor and the movable linear conveyor is possible.

[0017] The conveyor table transfer device may be configured such that the linear guide member further includes an intermediate guide member disposed between the first divided guide member and the second divided guide member, a first connecting member that connects the first divided guide member and the intermediate guide member to each other, and a second connecting member that connects the second divided guide member and the intermediate guide member to each other, and a play is provided between the first divided guide member and the intermediate guide member, and a play is provided between the second divided guide member and the intermediate guide member. In this configuration, the length of the linear guide member can be adjusted by increasing or decreasing the amount of play between the first and second divided guide members and the intermediate guide member depending on the distance between the first and second mounting members.

[0018] The conveyor table transfer device may be configured such that the first divided guide member and the intermediate guide member are different from each other in at least one of material, strength, and rigidity, and the second divided guide member and the intermediate guide member are different from each other in at least one of material, strength, and rigidity. In this configuration, if a positional deviation occurs between the first divided guide member and the second divided guide member, the intermediate guide member can be deflected in response to this positional deviation. As a result, the deflection of the first and second divided guide members can be suppressed, and the movable linear conveyor can be accurately guided to the first and second opposing positions by the first and second divided guide members.

[0019] The conveyor table transfer device may be configured so that the linear motion guide mechanism further includes a first support member that connects the first mounting member and the mounting frame and fixes the first mounting member to the mounting frame, and a second support member that connects the second mounting member and the mounting frame and fixes the second mounting member to the mounting frame. In this configuration, the load applied to the first and second fixed linear conveyors due to the attachment of the first and second mounting members can be reduced by the first and second support members.

[0020] The conveyor table transfer device may be configured such that the linear guide mechanism has a first engagement portion that engages with the first fixed linear conveyor and a second engagement portion that engages with the second fixed linear conveyor, and the linear guide mechanism and the first fixed linear conveyor are positioned by the first engagement portion engaging with the first fixed linear conveyor, and the linear guide mechanism and the second fixed linear conveyor are positioned by the second engagement portion engaging with the second fixed linear conveyor. In this configuration, the linear guide mechanism and the first and second fixed linear conveyors can be easily positioned by simply engaging the first and second engagement portions of the linear guide mechanism with the first and second fixed linear conveyors.

[0021] The conveyor table transfer device may be configured to further include a position detection unit that detects the position of the movable linear conveyor, and the drive unit controls the position of the movable linear conveyor based on the position detected by the position detection unit, thereby controlling the positioning of the movable linear conveyor to the first opposing position and controlling the positioning of the movable linear conveyor to the second opposing position. In this configuration, the position of the movable linear conveyor can be accurately controlled with respect to the first and second fixed linear conveyors based on the detection result by the position detection unit. However, since the position detection unit only detects the position of the movable linear conveyor at the arrangement location, it cannot detect the attitude of the movable linear conveyor. Therefore, if only the position detection unit is used, there is a risk that the conveyor table will be transferred in a state in which the attitude of the movable linear conveyor is tilted with respect to the first and second fixed linear conveyors. In contrast, in the present invention, the movement of the movable linear conveyor to the first and second opposing positions is guided by the linear guide mechanism attached to the first and second fixed linear conveyors, so that the movable linear conveyor can be opposed to the first and second fixed linear conveyors in an appropriate attitude. As a result, the movable linear conveyor can be positioned in an appropriate position and attitude relative to the first and second fixed linear conveyors.

[0022] The conveying system according to the present invention includes a first fixed linear conveyor that drives the conveyor table, a second fixed linear conveyor that drives the conveyor table, and the above-mentioned conveyor table transfer device, and the conveyor table is transferred between the first fixed linear conveyor and the second fixed linear conveyor by the conveyor table transfer device. Therefore, it is possible to execute smooth transfer of the conveyor table between the fixed linear conveyor and the movable linear conveyor regardless of distortion or thermal deformation of the mounting frame to which the fixed linear conveyor is attached. Effect of the Invention

[0023] According to the present invention, it is possible to perform smooth transfer of the conveyor table between the fixed linear conveyor and the movable linear conveyor, regardless of distortion or thermal deformation of the mounting frame on which the fixed linear conveyor is mounted. [Brief description of the drawings]

[0024] [Figure 1] FIG. 1 is a front view showing a schematic diagram of a transport system according to the present invention. [Diagram 2] FIG. 2 is a partial perspective view showing the conveyance system of FIG. 1. [Diagram 3] FIG. 2 is a partial perspective view showing the conveyance system of FIG. 1. [Figure 4] FIG. 4 is a partial perspective view showing a manner in which the fixed linear conveyor is mounted to the mounting base. [Diagram 5] FIG. 4 is a partial perspective view showing a manner in which the fixed linear conveyor is mounted to the mounting base. [Figure 6] FIG. 4 is a partial perspective view showing the peripheral configuration of the movable linear conveyor. [Figure 7] FIG. 4 is a schematic cross-sectional view of a portion of the link mechanism. [Figure 8] FIG. 4 is a diagram illustrating a configuration of a position detection unit that detects the position of a movable linear conveyor. [Figure 9] FIG. 11 is a plan view showing a transport system according to a modified example. [Figure 10] FIG. 2 is a partial perspective view showing the conveyance system of FIG. 1. [Figure 11]10 is a diagram illustrating an example of a link mechanism included in the transport system illustrated in FIG. 9. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] Fig. 1 is a front view showing a schematic diagram of a conveying system according to the present invention. In this specification, the horizontal X direction, the horizontal Y direction perpendicular to the X direction, and the vertical Z direction are appropriately shown for explanation. As shown in Fig. 1, the conveying system 1 has a configuration for circulating and conveying a plurality of conveyor tables T. On the conveyor tables T, for example, workpieces to be processed in a factory in which the conveying system 1 is installed can be placed.

[0026] The transport system 1 includes a mounting frame 2 made of, for example, metal. The mounting frame 2 includes a base 21, a mounting stage 23a, and a mounting stage 23b. The base 21, the mounting stage 23a, and the mounting stage 23b are horizontally arranged rectangular flat plates, and are arranged at intervals in the Z direction. The mounting frame 2 includes supports 27 erected in the Z direction at the four corners of the upper surface 211 of the base 21, and the mounting stage 23a is attached to the upper ends of these supports 27 and faces the upper surface 211 of the base 21 from above. The mounting frame 2 includes supports 29 erected in the Z direction at the four corners of the upper surface 231 of the mounting stage 23a, and the mounting stage 23b is attached to the upper ends of these supports 29 and faces the upper surface 231 of the mounting stage 23a from above. Each of the upper surface 211 of the base 21, the upper surface 231 of the mounting stage 23a, and the upper surface 231 of the mounting stage 23b is a horizontal plane and has a rectangular shape with sides parallel to the X and Y directions when viewed from the Z direction.

[0027] The transport system 1 has a fixed linear conveyor 5a attached to an upper surface 231 of the mounting stage 23a, and a fixed linear conveyor 5b attached to an upper surface 231 of the mounting stage 23b. The fixed linear conveyor 5a is arranged parallel to the X direction, and both ends of the fixed linear conveyor 5a protrude from both ends of the upper surface 231 of the mounting stage 23a in the X direction. The fixed linear conveyor 5b is arranged parallel to the X direction, and both ends of the fixed linear conveyor 5b protrude from both ends of the upper surface 231 of the mounting stage 23b in the X direction. A conveyor table T can be engaged with and disengaged from each of the fixed linear conveyors 5a and 5b at the ends in the X direction, and the fixed linear conveyors 5a and 5b drive the conveyor tables T engaged with them in the X direction by magnetic force.

[0028] Furthermore, the transport system 1 includes conveyor table transfer devices 6 arranged on both sides of the mounting frame 2 in the X direction, in other words, on both sides of the fixed linear conveyors 5a and 5b. Each conveyor table transfer device 6 transfers the conveyor table T from the fixed linear conveyor 5a to the fixed linear conveyor 5b, and transfers the conveyor table T from the fixed linear conveyor 5b to the fixed linear conveyor 5a.

[0029] The conveyor table transfer device 6 includes a movable linear conveyor 7 arranged parallel to the X direction. The conveyor table T can be engaged with and disengaged from the movable linear conveyor 7 at its end in the X direction, and the movable linear conveyor 7 drives the engaged conveyor table T in the X direction by magnetic force. The conveyor table transfer device 6 drives the movable linear conveyor 7 in the Z direction to move the movable linear conveyor 7 between a facing position Pa that faces the fixed linear conveyor 5a from the X direction and a facing position Pb that faces the fixed linear conveyor 5b from the X direction. The movable linear conveyor 7 and the fixed linear conveyor 5a positioned at the facing position Pa are aligned in the X direction and can transfer the conveyor table T to each other, and the movable linear conveyor 7 and the fixed linear conveyor 5b positioned at the facing position Pb are aligned in the X direction and can transfer the conveyor table T to each other.

[0030] According to the conveyor table transfer device 6, the conveyor table T can be transferred from the fixed linear conveyor 5a to the fixed linear conveyor 5b as follows. First, the conveyor table transfer device 6 positions the movable linear conveyor 7 at the opposing position Pa. Then, the conveyor table T moves from the fixed linear conveyor 5a to the movable linear conveyor 7 at the opposing position Pa. Next, the conveyor table transfer device 6 moves the movable linear conveyor 7 from the opposing position Pa to the opposing position Pb. Finally, the conveyor table T moves from the movable linear conveyor 7 at the opposing position Pb to the fixed linear conveyor 5b. In this way, the transfer of the conveyor table T is completed. Note that by performing the reverse operation, the conveyor table T can be transferred from the fixed linear conveyor 5b to the fixed linear conveyor 5a.

[0031] Since the configurations on both sides of the mounting stand 2 (the two conveyor table transfer devices 6, etc.) are the same, the following description of the transport system 1 will be given mainly on the right side of Fig. 1. Since the linear conveyors 5a and 5b have the same configuration, they will be appropriately referred to as the fixed linear conveyor 5 when there is no need to distinguish between them. Furthermore, the mounting stages 23a and 23b to which the fixed linear conveyors 5a and 5b are attached will also be appropriately referred to as the mounting stage 23.

[0032] 2 and 3 are partial perspective views showing the conveying system of FIG. 1, and FIG. 4 and FIG. 5 are partial perspective views showing the mounting state of the fixed linear conveyor to the mounting frame, and FIG. 6 is a partial perspective view showing the peripheral configuration of the movable linear conveyor. FIG. 2 shows a state in which the movable linear conveyor 7 is located at the facing position Pa, and FIG. 3 shows a state in which the movable linear conveyor 7 is located halfway between the facing positions Pa and Pb. FIG. 4 shows a state in which the fixed linear conveyor 5b is displaced upward from the mounting stage 23b, and FIG. 5 shows a cross section of the end of the fixed linear conveyor 5b to show the internal structure of the fixed linear conveyor 5b. As shown in these figures, the fixed linear conveyor 5 has a linear housing 51, a table cover 53 facing the linear housing 51 from above, and a support plate 55 that supports the table cover 53 with respect to the linear housing 51.

[0033] The linear housing 51 has a main housing 511 extending in the X direction. The main housing 511 and the support plate 55 are integrally formed, and the table cover 53 is fastened to the upper end of the support plate 55. The main housing 511 surrounds the accommodation space that opens downward from above and sides, and has an inverted U shape when viewed from the side in the X direction. The linear housing 51 also has an electrical box 512 disposed in the accommodation space of the main housing 511. The electrical box 512 extends in the X direction and accommodates the electrical system of the fixed linear conveyor 5. The linear housing 51 also has a mounting flange 513 that protrudes laterally (in the Y direction) from the lower end of the main housing 511. The mounting flange 513 extends from both sides of the main housing 511 in the Y direction. The bottom surfaces of the main housing 511 and the mounting flange 513 are flush with each other, and constitute the bottom surface 514 (FIG. 4) of the fixed linear conveyor 5. The bottom surface 514 is a horizontal plane and contacts the upper surface 231 of the mounting stage 23. The main housing 511 and the mounting flange 513 may be configured as separate bodies or as an integrated body. The mounting flange 513 is fastened to the upper surface 231 of the mounting stage 23 by fastening members (screws) at a plurality of fastening points aligned in the X direction. In this way, the fixed linear conveyor 5a is fixed to the upper surface 231 of the mounting stage 23a, and the fixed linear conveyor 5b is fixed to the upper surface 231 of the mounting stage 23b.

[0034] The table cover 53 extends in the X direction, and the conveyor table T can be fitted onto and detached from both ends of the table cover 53 in the X direction. The conveyor table T fitted onto the table cover 53 moves in the X direction along the table cover 53. The support plate 55 extends in the X direction and stands upright in the Z direction, and supports the table cover 53 with a gap between it and the top surface of the main housing 511 of the linear housing 51.

[0035] Furthermore, the fixed linear conveyor 5 has a linear motor stator 56 arranged between the upper surface of the main housing 511 and the table cover 53. The linear motor stator 56 has a plurality of coils arranged in the X direction, and drives the conveyor table T in the X direction by a magnetic force generated between the coils and a linear motor mover (permanent magnet) provided on the conveyor table T. The current flowing through the coils of the linear motor stator 56 is controlled by an electrical system accommodated in the electrical box 512.

[0036] The fixed linear conveyor 5 also has a pair of linear guide rails 57 arranged between the upper surface of the main housing 511 and the table cover 53. The pair of linear guide rails 57 extend in the X direction and are arranged at an interval in the Y direction. The pair of linear guide rails 57 are arranged at both ends of the upper surface of the main housing 511 in the Y direction so as to sandwich the support plate 55 and the linear motor stator 56 in the Y direction. The conveyor table T can be engaged with and disengaged from both ends of the linear guide rails 57 in the X direction, and the movement of the conveyor table T engaged with the linear guide rails 57 is guided in the X direction by the linear guide rails 57.

[0037] As described above, the conveyor table transfer device 6 includes the movable linear conveyor 7. The movable linear conveyor 7 is different from the fixed linear conveyor 5 in the length in the X direction (the movable linear conveyor 7 is shorter than the fixed linear conveyor 5). However, in other respects, the movable linear conveyor 7 has the same configuration as the fixed linear conveyor 5.

[0038] That is, the movable linear conveyor 7 has a linear housing 71 extending in the X direction, and the linear housing 71 has a main housing 711, an electrical box 712, and a mounting flange 713. The movable linear conveyor 7 also has a table cover 73 and a support plate 75, and the table cover 73 is supported by the support plate 75 while being spaced apart from the upper surface of the main housing 711 of the linear housing 71. The conveyor table T can be fitted onto and detached from both ends of the table cover 73 in the X direction, and the conveyor table T fitted onto the table cover 73 moves in the X direction along the table cover 73.

[0039] Furthermore, the movable linear conveyor 7 has a linear motor stator 76 arranged between the upper surface of the main housing 711 and the table cover 73. The linear motor stator 76 drives the conveyor table T in the X direction by a magnetic force generated between the linear motor mover of the conveyor table T based on the control of an electrical system housed in the electrical box 712. The movable linear conveyor 7 also has a pair of linear guide rails 77 arranged between the upper surface of the main housing 711 and the table cover 73. The pair of linear guide rails 77 extend in the X direction and are spaced apart in the Y direction. The conveyor table T can engage with and disengage from both ends of the linear guide rails 77 in the X direction, and the movement of the conveyor table T engaged with the linear guide rails 77 is guided in the X direction by the linear guide rails 77.

[0040] The conveyor table transfer device 6 also includes a linear guide mechanism 8 that guides the movement of the movable linear conveyor 7 in the Z direction between the opposing positions Pa and Pb. The linear guide mechanism 8 includes a mounting block 81a that is attached to the fixed linear conveyor 5a, and a mounting block 81b that is attached to the fixed linear conveyor 5b. The mounting blocks 81a and 81b are different in the objects to which they are attached, but have the same configuration. Therefore, when there is no need to distinguish between them, they will be referred to as mounting blocks 81 as appropriate.

[0041] The mounting block 81 has a pair of side wall plates 811 spaced apart in the Y direction. Each side wall plate 811 is a flat plate arranged parallel to the Z direction and the X direction, and has a rectangular shape extending in the Z direction. The mounting block 81a also has a mounting plate 812 extending in the Y direction between the upper ends of the pair of side wall plates 811. The mounting plate 812 is a flat plate arranged horizontally, and an upper surface 813 of the mounting plate 812 is a horizontal plane. The mounting block 81a also has a reinforcing plate 814 arranged horizontally between the pair of side wall plates 811 below the mounting plate 812. The reinforcing plate 814 has the same configuration as the mounting plate 812. Both ends of the mounting plate 812 and the reinforcing plate 814 in the Y direction are fixed to the pair of side wall plates 811. The mounting block 81 also has a pair of reinforcing plates 815 extending in the Z direction between the mounting plate 812 and the reinforcing plate 814. Each reinforcing plate 815 is a flat plate arranged parallel to the Z direction and the X direction, and has a rectangular shape extending in the Z direction. Both ends of each of the reinforcing plates 815 in the Z direction are fixed to the mounting plate 812 and the reinforcing plate 814.

[0042] Furthermore, the mounting block 81 has a positioning member 816 that performs positioning with respect to the fixed linear conveyor 5. As shown in FIG. 5, the positioning member 816 is fixed to the upper surface 813 of the mounting plate 812, and has a pair of engagement holes 817 arranged at an interval in the Y direction, and each engagement hole 817 opens upward. On the other hand, the fixed linear conveyor 5 has a pair of engagement protrusions 58 arranged at an interval in the Y direction at the end in the X direction. Each engagement protrusion 58 protrudes downward from the bottom surface 514. Then, the pair of engagement protrusions 58 of the fixed linear conveyor 5 engages with the pair of engagement holes 817 of the positioning member 816 from above, so that the fixed linear conveyor 5 and the mounting block 81 are positioned in the horizontal direction (X direction, Y direction).

[0043] The mounting block 81 is attached to the fixed linear conveyor 5 as follows. That is, the upper surface 813 of the mounting plate 812 of the mounting block 81 is disposed flush with the upper surface 231 of the mounting stage 23, and the portion (mounting surface) of the bottom surface 514 of the fixed linear conveyor 5 protruding in the X direction contacts the upper surface 813 of the mounting plate 812. The pair of engagement protrusions 58 are provided on the portion (mounting surface) protruding in the X direction from the mounting stage 23 and engage with the pair of engagement holes 817. The mounting flange 513 of the fixed linear conveyor 5 protrudes in the X direction from the mounting stage 23 to the mounting plate 812, contacts the upper surface 813 of the mounting plate 812, and is fastened to the upper surface 231 of the mounting stage 23 by fastening members (screws) at a plurality of fastening points arranged in the X direction. In this manner, the upper surface 813 of the mounting block 81a is attached to the bottom surface 514 of the fixed linear conveyor 5a, and the upper surface 813 of the mounting block 81b is attached to the bottom surface 514 of the fixed linear conveyor 5b.

[0044] The linear guide mechanism 8 also has a pair of support plates 82 that attach the mounting block 81 to the mounting stage 23. Each support plate 82 is a horizontally arranged flat plate having a rectangular shape extending in the X direction, and the pair of support plates 82 are arranged on both sides of the fixed linear conveyor 5 in the Y direction. On the other hand, in the Y direction, the mounting plate 812 protrudes on both sides of the fixed linear conveyor 5, and each support plate 82 is bridged between the upper surface 231 of the mounting stage 23 and the upper surface 813 of the mounting plate 812 (a portion protruding in the Y direction from the fixed linear conveyor 5). Each support plate 82 is fastened to the mounting stage 23 and the mounting plate 812 by fastening members (screws) at multiple fastening points. That is, the mounting block 81 is supported by the mounting stage 23 via the pair of support plates 82.

[0045] In this way, the mounting block 81a attached to the fixed linear conveyor 5a and the mounting block 81b attached to the fixed linear conveyor 5b are disposed with a gap in the Z direction. A pair of side wall plates 811 of the mounting block 81a and a pair of side wall plates 811 of the mounting block 81b face each other with a gap in the Z direction. In other words, if the left side along the Y direction in Figs. 2 to 6 is one and the right side is the other, one side wall plate 811 of the mounting block 81a and one side wall plate 811 of the mounting block 81b face each other with a gap in the Z direction, and the other side wall plate 811 of the mounting block 81a and the other side wall plate 811 of the mounting block 81b face each other with a gap in the Z direction.

[0046] Furthermore, the linear guide mechanism 8 includes a pair of linear guide rails 83 each extending in the Z direction. These linear guide rails 83 are arranged in parallel with a gap in the Y direction. The pair of linear guide rails 83 are provided corresponding to a pair of side wall plates 811 of the mounting blocks 81a and 81b. That is, one linear guide rail 83 is bridged between one side wall plate 811 of the mounting block 81a and one side wall plate 811 of the mounting block 81b, and the other linear guide rail 83 is bridged between the other side wall plate 811 of the mounting block 81a and the other side wall plate 811 of the mounting block 81b.

[0047] In the Z direction, the position (height) of the lower end of the linear guide rail 83 coincides with the position (height) of the lower end of the side wall plate 811 of the mounting block 81a, and the position (height) of the upper end of the linear guide rail 83 coincides with the position (height) of the upper end of the side wall plate 811 of the mounting block 81b. A predetermined range from the lower end of the linear guide rail 83 comes into contact with the side wall plate 811 of the mounting block 81a from the X direction and is fastened by a fastening member (screw), and a predetermined range from the upper end of the linear guide rail 83 comes into contact with the side wall plate 811 of the mounting block 81b from the X direction and is fastened by a fastening member (screw).

[0048] Each linear guide rail 83 has split guide rails 831 and 832 and an intermediate guide rail 833. The split guide rail 831 is attached to the side wall plate 811 of the mounting block 81a from the X direction and is supported by this side wall plate 811 in parallel to the Z direction. In the Z direction, the lower end of the split guide rail 831 is at the same position (height) as the lower end of the side wall plate 811 of the mounting block 81a, while the upper end of the split guide rail 831 protrudes upward from this side wall plate 811. In addition, the split guide rail 832 is attached to the side wall plate 811 of the mounting block 81b from the X direction and is supported by this side wall plate 811 in parallel to the Z direction. In the Z direction, the upper end of the split guide rail 832 is at the same position (height) as the upper end of the side wall plate 811 of the mounting block 81b, while the lower end of the split guide rail 832 protrudes downward from this side wall plate 811.

[0049] The split guide rail 831 and the split guide rail 832 face each other with a gap in the Z direction, and the intermediate guide rail 833 is disposed parallel to the Z direction between the split guide rail 831 and the split guide rail 832. In this way, the split guide rail 831, the intermediate guide rail 833, and the split guide rail 832 are lined up in a straight line in the Z direction in order. Note that a play (gap) is provided between the split guide rail 831 and the intermediate guide rail 833, and a play (gap) is provided between the intermediate guide rail 833 and the split guide rail 832.

[0050] The split guide rails 831, 832 and the intermediate guide rail 833 are made of different materials. Specifically, the split guide rails 831, 832 are made of hardened iron, and the intermediate guide rail 833 is made of unhardened iron. Therefore, the intermediate guide rail 833 has a lower strength than the split guide rails 831, 832 and is more flexible in deformation under load.

[0051] The linear guide rail 83 also has a connecting member 837 that connects the split guide rail 831 and the intermediate guide rail 833 to each other, and a connecting member 838 that connects the split guide rail 832 and the intermediate guide rail 833 to each other. That is, the connecting member 837 has a configuration that fastens the stays arranged straddling the split guide rail 831 and the intermediate guide rail 833 to them with a fastening member, thereby fixing and connecting the split guide rail 831 and the intermediate guide rail 833 to each other. The connecting member 838 has a configuration that fastens the stays arranged straddling the split guide rail 832 and the intermediate guide rail 833 to them with a fastening member, thereby fixing and connecting the split guide rail 832 and the intermediate guide rail 833 to each other. In the X direction, the connecting members 837 and 838 are arranged on the same side as the side wall plate 811 with respect to the linear guide rail 83, and are located between the side wall plates 811 of the mounting blocks 81a and 81b.

[0052] Furthermore, the conveyor table transfer device 6 includes a movable member 79 that moves the movable linear conveyor 7 along the linear guide rails 83 of the linear guide mechanism 8. The movable member 79 has a movable plate 791 that is arranged parallel to the Y direction and the Z direction. In the X direction, the movable plate 791 is arranged on the opposite side of the side wall plate 811 with respect to the linear guide rails 83, and both ends of the movable plate 791 in the Y direction face the pair of linear guide rails 83 from the X direction.

[0053] The movable member 79 also has sliders 792 attached to one end and the other end of the movable plate 791 in the Y direction. These sliders 792 extend in the Z direction. The slider 792 at one end of the movable plate 791 is positioned between the movable plate 791 and one of the linear guide rails 83 and engages with the one of the linear guide rails 83. The slider 792 at the other end of the movable plate 791 is positioned between the movable plate 791 and the other linear guide rail 83 and engages with the other linear guide rail 83. These sliders 792 are slidable in the Z direction along the linear guide rail 83 with which they engage.

[0054] Furthermore, the movable member 79 has a support plate 793 attached to an upper end of the movable plate 791. The support plate 793 protrudes from the upper end of the movable plate 791 to the opposite side of the side wall plate 811 in the X direction and is supported horizontally. An upper surface 794 of the support plate 793 is a horizontal plane. In addition, the movable member 79 has a pair of reinforcing braces 795 attached to the movable plate 791 and the support plate 793, and each reinforcing brace 795 reinforces support of the support plate 793 by the movable plate 791.

[0055] The movable linear conveyor 7 is attached to the upper surface 794 of the support plate 793. That is, the bottom surfaces of the main housing 711 and the mounting flange 713 of the movable linear conveyor 7 are flush with each other, forming the bottom surface 714 (FIG. 6) of the movable linear conveyor 7. The bottom surface 714 of the movable linear conveyor 7 contacts the upper surface 794 of the support plate 793, and each mounting flange 713 of the movable linear conveyor 7 is fastened to the upper surface 794 of the support plate 793 by fastening members (screws) at multiple fastening points arranged in the X direction. Note that, in the X direction, a portion (half) of the bottom surface 714 of the movable linear conveyor 7 on the mounting base 2 side contacts the upper surface 794 of the support plate 793, while a portion (half) on the opposite side of the mounting base 2 protrudes from the upper surface 794 of the support plate 793.

[0056] In this configuration, the movement of the movable linear conveyor 7 in the Z direction can be guided by a linear guide rail 83 that engages with a movable member 79 that supports the movable linear conveyor 7. The conveyor table transfer device 6 includes a drive unit 61 for driving the movable linear conveyor 7 in the Z direction. The drive unit 61 includes a single-axis robot 62 that is installed parallel to the Z direction, a drive member 63 that moves in the Z direction by the driving force of the single-axis robot 62, and a pair of linear guide rails 64 that guide the movement of the drive member 63.

[0057] The single-axis robot 62 is arranged offset in the Y direction with respect to the movable linear conveyor 7 and the movable member 79, and has a robot housing 621 extending in the Z direction, a ball screw 622 arranged parallel to the Z direction, and a motor 623 for rotating the ball screw 622. The robot housing 621 of the single-axis robot 62 has an opening 624 facing the movable linear conveyor 7 from the Y direction. The ball screw 622 is arranged in the robot housing 621, and the motor 623 is attached to the upper end of the robot housing 621. The ball screw 622 and the motor 623 are coupled. The single-axis robot 62 is attached to the mounting frame 2 by a mounting bracket consisting of a back plate 671 and an L-shaped bracket 672. Specifically, the back plate 671 is a flat plate that is parallel to the Z direction and the X direction and is long in the Z direction. The back plate 671 is attached to the surface of the single-axis robot 62 opposite the movable linear conveyor 7 in the Y direction. The back plate 671 is attached to the mounting base 2 by a plurality of L-shaped brackets 67 aligned in the Z direction. In this manner, the single-axis robot 62 is fixed to and supported by the mounting base 2.

[0058] The pair of linear guide rails 64 are arranged parallel to each other in the Z direction with a gap therebetween in the X direction. The linear guide rails 64 are arranged in the robot housing 621 so as to sandwich the ball screw 622 when viewed from the Y direction, and are attached to the inner wall of the robot housing 621.

[0059] The driving member 63 is disposed shifted toward the single-axis robot 62 side from the movable member 79 in the Y direction, and is located between the movable member 79 and the single-axis robot 62. The driving member 63 has a driving plate 631 disposed parallel to the Z direction and the X direction, and sliders 632 attached to both ends of the driving plate 631 in the X direction. These sliders 632 extend in the Z direction. In addition, the sliders 632 at one end and the sliders 632 at the other end of the driving plate 631 engage with a pair of linear guide rails 64 in the X direction. That is, in the X direction, the slider 632 at one end of the driving plate 631 engages with one linear guide rail 64, and the slider 632 at the other end of the driving plate 631 engages with the other linear guide rail 64. Furthermore, the driving plate 631 is attached to a nut of the ball screw 622, and moves in the Z direction along with the nut.

[0060] In this configuration, the driving member 63 can be moved in the Z direction by rotating the ball screw 622 with the motor 623. Furthermore, the movement of the driving member 63 in the Z direction can be guided by a linear guide rail 64 that engages with the driving member 63.

[0061] Furthermore, the conveyor table transfer device 6 includes a link mechanism 9 that connects a movable member 79 that supports the movable linear conveyor 7 and a driving member 63 that is driven by the single-axis robot 62. This link mechanism 9 will be described with reference to Fig. 7. Here, Fig. 7 is a schematic diagram showing a cross section of a portion of the link mechanism.

[0062] The link mechanism 9 has a connection plate 91 arranged parallel to the Z direction and the X direction, and an arm 92 extending from the connection plate 91 in the Y direction. The connection plate 91 is attached to the driving plate 631 of the driving member 63, and the arm 92 extends from the connection plate 91 toward the movable member 79 in parallel to the Y direction. The arm 92 is a flat plate having a tapered shape that tapers toward the movable member 79 in the Y direction. The arm 92 is also arranged on the opposite side of the linear guide rail 83 with respect to the movable plate 791 in the X direction.

[0063] Furthermore, the link mechanism 9 has a shaft holder 931 attached to the tip of the arm 92 in the Y direction (the end of the arm 92 on the movable member 79 side) and a shaft 932 held by the shaft holder 931. The shaft 932 is held parallel to the X direction, and the tip of the shaft 932 protrudes from the shaft holder 931 to the movable plate 791 side in the X direction. A spherical bearing 94 is attached to the tip of the shaft 932. The spherical bearing 94 has an inner ring 941 fixed to the shaft 932 and an outer ring 942 fitted onto the inner ring 941, and the inner ring 941 and the outer ring 942 can slide against each other while being in spherical contact with each other.

[0064] Furthermore, the link mechanism 9 has a shaft holder 951 attached to the movable plate 791, and a shaft 952 held by the shaft holder 951. The shaft 952 is held parallel to the X direction, and the tip of the shaft 952 protrudes in the X direction from the shaft holder 951 towards the shaft holder 931. A spherical bearing 96 is attached to the tip of the shaft 952. The spherical bearing 96 has an inner ring 961 fixed to the shaft 952, and an outer ring 962 fitted onto the inner ring 961, and the inner ring 961 and the outer ring 962 can slide against each other while being in spherical contact with each other.

[0065] Thus, the link mechanism 9 has the spherical bearing 94 and the spherical bearing 96 arranged in the Z direction. Furthermore, the link mechanism 9 has a holder plate 97 that holds the outer rings 942, 962 of these spherical bearings 94, 96, respectively. In other words, the outer ring 942 of the spherical bearing 94 and the outer ring 962 of the spherical bearing 96 are fixed to the holder plate 97.

[0066] In this manner, the link mechanism 9 connects the driving member 63 and the movable member 79 by two spherical bearings 94, 96, each having three degrees of freedom. In this configuration, when the driving member 63 moves in the Z direction while being guided by the pair of linear guide rails 64 in accordance with the rotation of the ball screw 622 by the driving unit 61, the movement of the driving member 63 is transmitted to the movable member 79 via the link mechanism 9 to drive the movable member 79 in the Z direction. As a result, the movable linear conveyor 7 is driven in the Z direction while being guided by the pair of linear guide rails 83.

[0067] According to the conveyor table transfer device 6, the movable linear conveyor 7 can be positioned at each of the opposing positions Pa and Pb by the drive unit 61. The conveyor table transfer device 6 has a position detection unit 69 (FIG. 8) that detects the position of the movable linear conveyor 7 in order to accurately perform such positioning.

[0068] FIG. 8 is a diagram showing a schematic configuration of a position detection unit that detects the position of the movable linear conveyor. The position detection unit 69 has a linear scale 691 and a linear sensor 692. The linear scale 691 is attached to each of the mounting blocks 81a and 81b. As shown in particular in FIG. 2 and FIG. 3, the linear scale 691 is attached to the reinforcing plate 815 of the mounting block 81 and is arranged parallel to the Z direction. On the other hand, the linear sensor 692 is attached to the movable plate 791 of the movable member 79 that supports the movable linear conveyor 7 and is arranged parallel to the Z direction. In this configuration, the linear sensor 692 detects the position (height) of the movable linear conveyor 7 in the Z direction by reading the linear scale 691 while facing the linear scale 691 from the X direction.

[0069] When positioning the movable linear conveyor 7 at the facing position Pa, the motor 623 of the conveyor table transfer device 6 controls the amount of rotation of the ball screw 622 based on the result of the linear sensor 692 reading the linear scale 691 attached to the mounting block 81a. This allows the movable linear conveyor 7 to be accurately positioned at the facing position Pa. When positioning the movable linear conveyor 7 at the facing position Pb, the motor 623 of the conveyor table transfer device 6 controls the amount of rotation of the ball screw 622 based on the result of the linear sensor 692 reading the linear scale 691 attached to the mounting block 81b. This allows the movable linear conveyor 7 to be accurately positioned at the facing position Pb.

[0070] 2, when the movable linear conveyor 7 is located at the facing position Pa, the movable member 79 faces the mounting block 81a from the X direction, sandwiching the linear guide rail 83. That is, the mounting block 81a is adjacent to the movable member 79 engaged with the linear guide rail 83 from the X direction, and supports the lower end portion of the linear guide rail 83 with which the movable member 79 engages, from the opposite side to the surface where the movable member 79 is attached to the linear guide rail 83 (the surface on the movable member 79 side in the X direction). This allows the movable linear conveyor 7 located at the facing position Pa to be firmly supported by the mounting block 81a.

[0071] Similarly, when the movable linear conveyor 7 is located at the facing position Pb, the movable member 79 faces the mounting block 81b in the X direction, sandwiching the linear guide rail 83. In other words, the mounting block 81b is adjacent to the movable member 79 that engages with the linear guide rail 83 in the X direction, and supports the upper end portion of the linear guide rail 83 that engages with the movable member 79 from the opposite side to the surface where the movable member 79 is attached to the linear guide rail 83 (the surface on the movable member 79 side in the X direction). This allows the movable linear conveyor 7 located at the facing position Pb to be firmly supported by the mounting block 81b.

[0072] In the embodiment described above, the movable linear conveyor 7 is moved between a facing position Pa (first facing position) facing the fixed linear conveyor 5a (first fixed linear conveyor) and a facing position Pb (second facing position) facing the fixed linear conveyor 5b (second fixed linear conveyor) by driving the driving unit 61. The movement of the movable linear conveyor 7 is guided between the facing positions Pa and Pb by the linear guide mechanism 8. The linear guide mechanism 8 is attached to the fixed linear conveyor 5a and is also attached to the fixed linear conveyor 5b. Since the movement of the movable linear conveyor 7 to the facing position Pa is guided by the linear guide mechanism 8 attached to the fixed linear conveyor 5a in this manner, the movable linear conveyor 7 that has moved to the facing position Pa can be accurately positioned with respect to the facing position Pa. Similarly, the movement of the movable linear conveyor 7 to the facing position Pb is guided by the linear guide mechanism 8 attached to the fixed linear conveyor 5b, so that the movable linear conveyor 7 that has moved to the facing position Pb can be accurately positioned with respect to the fixed linear conveyor 5b. As a result, the conveyor table T can be smoothly transferred between the fixed linear conveyors 5a, 5b and the movable linear conveyor 7 regardless of distortion or thermal deformation of the mounting frame 2 on which the fixed linear conveyors 5a, 5b are attached.

[0073] In addition, the linear guide mechanism 8 is attached to the bottom surface 514 of the fixed linear conveyor 5a, and is also attached to the bottom surface 514 of the fixed linear conveyor 5b. By using the bottom surfaces 514 of the fixed linear conveyors 5a and 5b to attach the linear guide mechanism 8 in this manner, a wide contact area between the fixed linear conveyors 5a and 5b and the linear guide mechanism 8 can be secured, and the fixed linear conveyors 5a and 5b can be securely attached to the linear guide mechanism 8. As a result, the movable linear conveyor 7 that has moved to the opposing positions Pa and Pb can be accurately positioned relative to the fixed linear conveyors 5a and 5b, and the conveyor table T can be smoothly transferred between them.

[0074] In addition, the linear guide mechanism 8 is attached to the portion of the fixed linear conveyor 5a protruding from the mounting frame 2, and is also attached to the portion of the fixed linear conveyor 5b protruding from the mounting frame 2. In this configuration, it is only necessary to attach the linear guide mechanism 8 to the portion of the fixed linear conveyors 5a and 5b protruding from the mounting frame 2 without requiring processing such as cutting out the mounting frame 2 to expose the mounting portions of the fixed linear conveyors 5a and 5b, and therefore these attachments can be easily performed.

[0075] The linear guide mechanism 8 has a mounting block 81a (first mounting member) attached to the fixed linear conveyor 5a, a mounting block 81b (second mounting member) attached to the fixed linear conveyor 5b, and a linear guide rail 83 (linear guide member) attached to the mounting block 81a and the mounting block 81b. In this configuration, the movement of the movable linear conveyor 7 is guided between the opposing positions Pa and Pb by the linear guide rail 83. The linear guide rail 83 is attached to the mounting block 81a attached to the fixed linear conveyor 5a, and is also attached to the mounting block 81b attached to the fixed linear conveyor 5b. In other words, the movement of the movable linear conveyor 7 to the opposing position Pa is guided by the linear guide rail 83 fixed to the fixed linear conveyor 5a by the mounting block 81a, so that the movable linear conveyor 7 that has moved to the opposing position Pa can be accurately positioned with respect to the fixed linear conveyor 5a. Similarly, the movement of the movable linear conveyor 7 to the opposing position Pb is guided by the linear guide rail 83 fixed to the fixed linear conveyor 5b by the mounting block 81b, so that the movable linear conveyor 7 moved to the opposing position Pb can be accurately positioned with respect to the fixed linear conveyor 5b. As a result, the conveyor table T can be smoothly transferred between the fixed linear conveyors 5a, 5b and the movable linear conveyor 7 regardless of distortion or thermal deformation of the mounting frame 2 to which the fixed linear conveyors 5a, 5b are attached.

[0076] In addition, the mounting block 81a and the mounting block 81b are provided independently of each other and arranged with a gap therebetween, and the linear guide rail 83 is bridged between the mounting block 81a and the mounting block 81b. In this configuration, when the mounting frame 2 is deformed such that the mounting points of the mounting block 81a and the mounting block 81b are misaligned from each other, the mounting block 81a and the mounting block 81b are displaced according to the deformation of the mounting frame 2 without interfering with each other. Therefore, it is possible to suppress the deformation or tilt of the fixed linear conveyor 5a and the fixed linear conveyor 5b attached to the mounting block 81a and the mounting block 81b due to an excessive load being applied to the mounting block 81a and the mounting block 81b. At this time, the linear guide rail 83 bridged between the mounting block 81a and the mounting block 81b is deflected according to the displacement of the mounting block 81a and the mounting block 81b. However, although such bending affects the movement of the movable linear conveyor 7 between the opposing positions Pa and Pb, it has almost no effect on the positioning of the movable linear conveyor 7 that has moved to the opposing positions Pa and Pb. This is because this positioning is mainly performed by the mounting blocks 81a and 81b. As a result, even if the mounting base 2 is deformed in such a way that the mounting positions of the mounting blocks 81a and 81b on the mounting base 2 are misaligned from each other, the conveyor table T can be smoothly transferred between the fixed linear conveyors 5a and 5b and the movable linear conveyor 7.

[0077] Also provided is a movable member 79 that engages with the linear guide rail 83 while supporting the movable linear conveyor 7. The driving unit 61 drives the movable member 79 to move the movable member 79 along the linear guide rail 83, thereby moving the movable linear conveyor 7 between the opposing positions Pa and Pb. In this configuration, the movable linear conveyor 7 can be guided to the opposing positions Pa and Pb while being firmly supported by the movable member 79.

[0078] Also, the mounting block 81a supports the portion of the linear guide rail 83 with which the movable member 79 that positions the movable linear conveyor 7 at the opposing position Pa engages from the opposite side of the movable member 79. Also, the mounting block 81b supports the portion of the linear guide rail 83 with which the movable member 79 that positions the movable linear conveyor 7 at the opposing position Pb engages from the opposite side of the movable member 79. In this configuration, the mounting block 81a attached to the fixed linear conveyor 5a can support the movable member 79 that positions the movable linear conveyor 7 at the opposing position Pa, and the movable linear conveyor 7 at the opposing position Pa can be accurately positioned to the fixed linear conveyor 5a. Similarly, the mounting block 81b attached to the fixed linear conveyor 5b can support the movable member 79 that positions the movable linear conveyor 7 at the opposing position Pb, and the movable linear conveyor 7 at the opposing position Pb can be accurately positioned to the fixed linear conveyor 5b. As a result, the conveyor table T can be smoothly transferred between the fixed linear conveyors 5a, 5b and the movable linear conveyor 7.

[0079] In addition, the linear guide rail 83 has a divided guide rail 831 (first divided guide member) attached to the mounting block 81a and a divided guide rail 832 (second divided guide member) attached to the mounting block 81b, and the divided guide rail 831 and the divided guide rail 832 are provided independently of each other and arranged in series. In this configuration, when a positional deviation occurs between the mounting block 81a and the mounting block 81b due to bending or thermal deformation of the mounting base 2, the divided guide rail 831 follows the positional deviation of the mounting block 81a independently of the divided guide rail 832, and the divided guide rail 832 follows the positional deviation of the mounting block 81b independently of the divided guide rail 831. Therefore, the divided guide rail 831 can accurately guide the movable linear conveyor 7 to the opposing position Pa, and the divided guide rail 832 can accurately guide the movable linear conveyor 7 to the opposing position Pb. As a result, the conveyor table T can be smoothly transferred between the fixed linear conveyors 5a, 5b and the movable linear conveyor 7.

[0080] Further, an intermediate guide rail 833 is disposed between the split guide rail 831 and the split guide rail 832. The split guide rail 831 and the intermediate guide rail 833 are attached to each other by a connecting member 837 (first connecting member), and the split guide rail 832 and the intermediate guide rail 833 are attached to each other by a connecting member 838 (second connecting member). Further, a play is provided between the split guide rail 831 and the intermediate guide rail 833, and a play is provided between the split guide rail 832 and the intermediate guide rail 833. In this configuration, the amount of play between the split guide rails 831, 832 and the intermediate guide rail 833 can be increased or decreased depending on the distance between the mounting block 81a and the mounting block 81b, thereby adjusting the length of the linear guide rail 83.

[0081] Furthermore, the split guide rail 831 and the intermediate guide rail 833 are different from each other in terms of material and rigidity, and the split guide rail 832 and the intermediate guide rail 833 are different from each other in terms of material and rigidity. In this configuration, if a positional deviation occurs between the split guide rail 831 and the split guide rail 832, the intermediate guide rail 833 can be deflected in response to this positional deviation. As a result, the deflection of the split guide rails 831, 832 can be suppressed, and the split guide rails 831, 832 can accurately guide the movable linear conveyor 7 to the opposing positions Pa, Pb.

[0082] Further, the linear motion guide mechanism 8 has a support plate 82 (first support member) that connects the mounting block 81a and the mounting frame 2 and fixes the mounting block 81a to the mounting frame 2, and a support plate 82 (second support member) that connects the mounting block 81b and the mounting frame 2 and fixes the mounting block 81b to the mounting frame 2. In this configuration, the support plate 82 can reduce the load applied to the fixed linear conveyors 5a, 5b due to the attachment of the mounting blocks 81a, 81b.

[0083] Furthermore, the linear guide mechanism 8 has an engagement hole 817 (first engagement portion) that engages with (the engagement protrusion 58 of) the fixed linear conveyor 5a, and an engagement hole 817 (second engagement portion) that engages with (the engagement protrusion 58 of) the fixed linear conveyor 5b. As a result, the linear guide mechanism 8 and the fixed linear conveyors 5a and 5b can be easily positioned by simply engaging these.

[0084] In addition, a position detection unit 69 is provided to detect the position of the movable linear conveyor 7, and the driving unit 61 controls the position of the movable linear conveyor 7 based on the position detected by the position detection unit 69, thereby controlling the positioning of the movable linear conveyor 7 to the opposing positions Pa and Pb. In this configuration, the position of the movable linear conveyor 7 can be accurately controlled with respect to the fixed linear conveyors 5a and 5b based on the detection result by the position detection unit 69. However, since the position detection unit 69 only detects the position of the movable linear conveyor 7 at its arrangement location, it cannot detect the attitude of the movable linear conveyor 7. Therefore, if the position detection unit 69 is used alone, there is a risk that the conveyor table T will be transferred in a state in which the attitude of the movable linear conveyor 7 is tilted with respect to the fixed linear conveyors 5a and 5b. In contrast, in this embodiment, the linear guide mechanism 8 attached to the fixed linear conveyors 5a and 5b guides the movement of the movable linear conveyor 7 to the opposing positions Pa and Pb, so that the movable linear conveyor 7 can be opposed to the fixed linear conveyors 5a and 5b in an appropriate attitude. As a result, the movable linear conveyor 7 can be positioned in an appropriate position and attitude relative to the fixed linear conveyors 5a and 5b.

[0085] In this manner, in the above embodiment, the conveying system 1 corresponds to an example of the "conveying system" of the present invention, the fixed linear conveyor 5a corresponds to an example of the "first fixed linear conveyor" of the present invention, the fixed linear conveyor 5b corresponds to an example of the "second fixed linear conveyor" of the present invention, the bottom surface 514 corresponds to an example of the "bottom surface" of the present invention, the conveyor table transfer device 6 corresponds to an example of the "conveyor table transfer device" of the present invention, the drive unit 61 corresponds to an example of the "drive unit" of the present invention, the position detection unit 69 corresponds to an example of the "position detection unit" of the present invention, the movable linear conveyor 7 corresponds to an example of the "movable linear conveyor" of the present invention, the movable member 79 corresponds to an example of the "movable member" of the present invention, the linear guide mechanism 8 corresponds to an example of the "linear guide mechanism" of the present invention, the mounting block 81a corresponds to an example of the "first mounting member" of the present invention, and the mounting block 81b corresponds to an example of the "second mounting member" of the present invention. the second mounting member", the engagement hole 817 corresponds to an example of a "first engagement portion" or a "second engagement portion" of the present invention, the support plate 82 corresponds to an example of a "first support member" or a "second support member" of the present invention, the linear guide rail 83 corresponds to an example of a "linear guide member" of the present invention, the divided guide rail 831 corresponds to an example of a "first divided guide member" of the present invention, the divided guide rail 832 corresponds to an example of a "second divided guide member" of the present invention, the intermediate guide rail 833 corresponds to an example of an "intermediate guide member" of the present invention, the connecting member 837 corresponds to an example of a "first connecting member" of the present invention, the connecting member 838 corresponds to an example of a "second connecting member" of the present invention, the opposing position Pa corresponds to an example of a "first opposing position" of the present invention, the opposing position Pb corresponds to an example of a "second opposing position" of the present invention, and the conveyor table T corresponds to an example of a "conveyor table" of the present invention.

[0086] The present invention is not limited to the above-mentioned embodiment, and various modifications can be made to the above-mentioned embodiment without departing from the spirit of the present invention. For example, the modified example shown in Fig. 9 to Fig. 11 may be configured. Fig. 9 is a plan view showing a transport system according to the modified example, Fig. 10 is a partial perspective view showing the transport system of Fig. 1, and Fig. 11 is a schematic diagram showing an example of a link mechanism included in the transport system shown in Fig. 9. In Fig. 11, a part of the internal structure of the link mechanism 9 is shown by a dashed line.

[0087] The difference between the embodiment shown in Figures 1 to 8 and the modified example shown in Figures 9 to 11 is mainly the driving direction of the movable linear conveyor 7. In the above embodiment, the movable linear conveyor 7 is driven in the Z direction, whereas in the modified example, the movable linear conveyor 7 is driven in the Y direction. Therefore, the differences from the above embodiment will be mainly described, and the common configurations will be given the corresponding reference numerals and the description will be omitted as appropriate. It goes without saying that the same effects can be achieved by providing the common configurations.

[0088] In the transport system 1 according to the modified example, the fixed linear conveyors 5a and 5b are attached to the upper surface 231 of the same mounting stage 23, and are arranged parallel to the X direction with a gap therebetween in the Y direction. In response to this, the conveyor table transfer device 6 drives the movable linear conveyor 7 in the Y direction to move the movable linear conveyor 7 between a facing position Pa that faces the fixed linear conveyor 5a from the X direction and a facing position Pb that faces the fixed linear conveyor 5b from the X direction.

[0089] In the linear guide mechanism 8, mounting blocks 81a and 81b are arranged in the Y direction corresponding to the fixed linear conveyors 5a and 5b. The upper surface of the mounting block 81a is attached to the bottom surface of the fixed linear conveyor 5a, and the upper surface of the mounting block 81b is attached to the bottom surface of the fixed linear conveyor 5b. A pair of linear guide rails 83 are stretched across the mounting blocks 81a and 81b in the Y direction. The pair of linear guide rails 83 are attached to the mounting blocks 81a and 81b with a gap in the Z direction, and are supported parallel to each other in the Y direction. The movable member 79 engages with the pair of linear guide rails 83. Therefore, the movable member 79 is guided by the linear guide rails 83 to move in the Y direction between the opposing positions Pa and Pb.

[0090] Moreover, the single-axis robot 62 of the drive unit 61 is provided parallel to the Y direction, and drives a drive member 63 supported parallel to the Y direction and the Z direction in the Y direction by a motor 623. The single-axis robot 62 is also attached with a pair of linear guide rails 64 (not shown in FIG. 9) extending parallel to the Y direction, and the drive member 63 driven by the motor 623 moves in the Y direction while being guided by the linear guide rails 64.

[0091] Furthermore, the driving member 63 driven by the motor 623 and the movable member 79 supporting the movable linear conveyor 7 are connected by a link mechanism 9. Therefore, when the driving member 63 driven by the motor 623 moves in the Y direction while being guided by the pair of linear guide rails 64, the movement of the driving member 63 is transmitted to the movable member 79 via the link mechanism 9 to drive the movable member 79 in the Y direction. As a result, the movable linear conveyor 7 is driven in the Y direction while being guided by the pair of linear guide rails 83.

[0092] In the link mechanism 9, the connection plate 91 is disposed in parallel to the Y direction and the Z direction and is attached to the driving member 63, and the arm 92 is extended from the connection plate 91 while being bent in the X direction, the Y direction, and the Z direction, and extends upward. The shaft holder 931 is attached to the tip (upper end) of the arm 92, and the tip of the shaft 932 protrudes in the X direction from the shaft holder 931 toward the movable plate 791 side. A spherical bearing 94 is attached to the tip of the shaft 932. In addition, the tip of the shaft 952 protrudes in the X direction from the shaft holder 951 attached to the movable plate 791 toward the shaft holder 931 side. A spherical bearing 96 is attached to the tip of the shaft 952. Thus, in this link mechanism 9, the spherical bearing 94 and the spherical bearing 96 are arranged in the Y direction and held by the holder plate 97.

[0093] Further, the link mechanism 9 has a biasing spring 98 provided between the shaft holder 931 and the shaft holder 951. Both ends of the biasing spring 98 are attached to the shaft holder 931 and the shaft holder 951, and the biasing spring 98 generates an elastic force that brings the shaft holder 931 and the shaft holder 951 closer to each other. As shown in FIG. 11, the shaft holder 931 and the shaft holder 951 are arranged with a shift in the Y direction. Therefore, a force is generated that brings the spherical bearing 94 and the spherical bearing 96 closer to each other in the Y direction, and the inner ring 941 and the outer ring 942 of the spherical bearing 94 are pressed by the pressing force Fy, and the inner ring 961 and the outer ring 962 of the spherical bearing 96 are pressed by the pressing force Fy. In this way, rattling of the spherical bearings 94 and 96 in the Y direction is suppressed. The biasing spring 98 is not limited to a tension coil spring that generates an elastic force that draws both ends closer together, but may be a compression coil spring that generates an elastic force that draws both ends apart.

[0094] In this modification, the movement of the movable linear conveyor 7 is guided between the opposing positions Pa and Pb by the linear guide mechanism 8. The linear guide mechanism 8 is attached to the fixed linear conveyor 5a and the fixed linear conveyor 5b. Therefore, the conveyor table T can be smoothly transferred between the fixed linear conveyors 5a and 5b and the movable linear conveyor 7, regardless of distortion or thermal deformation of the mounting frame 2 to which the fixed linear conveyors 5a and 5b are attached.

[0095] In addition, modifications other than those shown in the above modified examples can be made as appropriate. For example, the number of fixed linear conveyors 5 is not limited to two, and may be three or more. In this case, the linear guide mechanisms 8 may be attached to all of the fixed linear conveyors 5, or may be attached to only some of the fixed linear conveyors 5. Even in the latter case, the same effects as those described above can be obtained for the part of the fixed linear conveyors 5.

[0096] Furthermore, the method of driving the conveyor table T by the fixed linear conveyor 5 and the movable linear conveyor 7 does not have to be based on linear motors, but may be based on a combination of screws and hollow motors.

[0097] Furthermore, the specific configuration of the mounting blocks 81a, 81b is not limited to the above example in which a plurality of plates are combined, and the mounting block 81 may be formed of, for example, a single rectangular member.

[0098] Furthermore, the linear guide rail 83 does not have to be made up of a plurality of rails, but may be made up of a single rail.

[0099] Furthermore, when the linear guide rail 83 is configured with a plurality of rails, the linear guide rail 83 may be configured with only the two divided guide rails 831, 832 without providing the intermediate guide rail 833.

[0100] Alternatively, the linear guide rail 83 may be configured with a plurality of rails, so that the linear guide rail 83 is configured with four or more rails.

[0101] In addition, the characteristics of the split guide rail 831, the split guide rail 832, and the connecting guide rail 833 can be changed as appropriate. Specifically, the split guide rail 831 and the connecting guide rail 833 can be configured to differ from each other in at least one of material, strength, and rigidity. When the rigidities are made different, the rigidity of the connecting guide rail 833 can be made lower than the rigidity of the split guide rail 831. Similarly, the split guide rail 832 and the connecting guide rail 833 can be configured to differ from each other in at least one of material, strength, and rigidity. When the rigidities are made different, the rigidity of the connecting guide rail 833 can be made lower than the rigidity of the split guide rail 832.

[0102] Furthermore, the linear guide rail 83 and the linear guide rail 64 may be changed to other members that perform linear guiding, such as a linear bushing, a ball spline, or a cam follower.

[0103] In addition, when positioning the fixed linear conveyor 5 and the mounting block 81 by engaging the engaging protrusions with the engaging holes, the fixed linear conveyor 5 may be provided with engaging holes and the mounting block 81 may be provided with engaging protrusions. [Explanation of symbols]

[0104] 1. Transport system 5a…Fixed linear conveyor (first fixed linear conveyor) 5b…Fixed linear conveyor (second fixed linear conveyor) 514…Bottom 6...Conveyor table transfer device 61...Drive unit 69... Position detection unit 7... Movable linear conveyor 79... Movable parts 8...Linear guide mechanism 81...Mounting block (first mounting member) 81b...Mounting block (second mounting member) 817...Engagement hole (first engagement portion, second engagement portion) 82...Support plate (first support member, second support member) 83...Linear guide rail (linear guide member) 831...Split guide rail (first split guide member) 832...Split guide rail (second split guide member) 833...Intermediate guide rail (intermediate guide member) 837...Connecting member (first connecting member) 838...Connecting member (second connecting member) Pa…Facing position (first facing position) Pb…opposing position (second opposing position) T…Conveyor table

Claims

1. a movable linear conveyor that drives the conveyor table; A drive unit that moves the movable linear conveyor between a first opposing position facing a first fixed linear conveyor attached to a mounting frame and a second opposing position facing a second fixed linear conveyor attached to the mounting frame; a linear motion guide mechanism that guides the movement of the movable linear conveyor by the driving unit between the first opposing position and the second opposing position; Equipped with The movable linear conveyor located at the first opposing position transfers the conveyor table between the movable linear conveyor and the first fixed linear conveyor, The movable linear conveyor located at the second opposing position transfers the conveyor table between the movable linear conveyor and the second fixed linear conveyor, The linear motion guide mechanism is attached to the first fixed linear conveyor and is also attached to the second fixed linear conveyor, The first fixed linear conveyor is a conveyor table transfer device that drives a conveyor table in a direction perpendicular to a direction in which the linear guide mechanism guides the movable linear conveyor.

2. 2. The conveyor table transfer device according to claim 1, wherein the linear motion guide mechanism is attached to a bottom surface of the first fixed linear conveyor and is also attached to a bottom surface of the second fixed linear conveyor.

3. 3. The conveyor table transfer device according to claim 1, wherein the linear guide mechanism is attached to a portion of the first fixed linear conveyor protruding from the mounting frame and is also attached to a portion of the second fixed linear conveyor protruding from the mounting frame.

4. 4. The conveyor table transfer device according to any one of claims 1 to 3, wherein the linear guide mechanism has a first mounting member attached to the first fixed linear conveyor, a second mounting member attached to the second fixed linear conveyor, and a linear guide member attached to the first mounting member and the second mounting member, and the movement of the movable linear conveyor between the first opposing position and the second opposing position is guided by the linear guide member.

5. The first mounting member and the second mounting member are provided independently of each other and arranged at an interval, 5. The conveyor table transfer device according to claim 4, wherein the linear motion guide member is bridged between the first mounting member and the second mounting member.

6. A movable member that supports the movable linear conveyor and engages with the linear guide member, The conveyor table transfer device according to claim 5, wherein the drive unit drives the movable member to move the movable member along the linear guide member, thereby moving the movable linear conveyor between the first opposing position and the second opposing position.

7. The first mounting member supports a portion of the linear guide member with which the movable member is engaged to position the movable linear conveyor at the first opposing position from a side opposite to a surface where the movable member is attached to the linear guide member, The conveyor table transfer device described in claim 6, wherein the second mounting member supports a portion of the linear guide member with which the movable member engages to position the movable linear conveyor at the second opposing position, from the side opposite to the surface where the movable member is attached to the linear guide member.

8. A conveyor table transfer device as described in any one of claims 5 to 7, wherein the linear guide member has a first divided guide member attached to the first mounting member and a second divided guide member attached to the second mounting member, and the first divided guide member and the second divided guide member are provided independently of each other and arranged in series.

9. the linear guide member further includes an intermediate guide member disposed between the first divided guide member and the second divided guide member, a first connecting member that connects the first divided guide member and the intermediate guide member to each other, and a second connecting member that connects the second divided guide member and the intermediate guide member to each other, 9. The conveyor table transfer device according to claim 8, wherein a play is provided between the first divided guide member and the intermediate guide member, and a play is provided between the second divided guide member and the intermediate guide member.

10. the first divided guide member and the intermediate guide member are different from each other in at least one of material, strength, and rigidity, 10. The conveyor table transfer device according to claim 9, wherein the second divided guide member and the intermediate guide member are different from each other in at least one of material, strength, and rigidity.

11. 11. The conveyor table transfer device according to any one of claims 5 to 10, wherein the linear guide mechanism further includes a first support member that connects the first mounting member and the mounting frame and fixes the first mounting member to the mounting frame, and a second support member that connects the second mounting member and the mounting frame and fixes the second mounting member to the mounting frame.

12. The linear motion guide mechanism has a first engagement portion that engages with the first fixed linear conveyor and a second engagement portion that engages with the second fixed linear conveyor, The first engagement portion engages with the first fixed linear conveyor, thereby positioning the linear motion guide mechanism and the first fixed linear conveyor, The conveyor table transfer device according to claim 1 , wherein the second engagement portion is engaged with the second fixed linear conveyor, thereby positioning the linear motion guide mechanism and the second fixed linear conveyor.

13. A position detection unit that detects the position of the movable linear conveyor is further provided. A conveyor table transfer device as described in any one of claims 1 to 12, wherein the drive unit controls the position of the movable linear conveyor based on the position detected by the position detection unit, thereby controlling the positioning of the movable linear conveyor to the first opposing position and controlling the positioning of the movable linear conveyor to the second opposing position.

14. a first fixed linear conveyor that drives the conveyor table; A second fixed linear conveyor that drives the conveyor table; The conveyor table transfer device according to any one of claims 1 to 13, Equipped with A conveying system in which the conveyor table transfer device transfers the conveyor table between the first fixed linear conveyor and the second fixed linear conveyor.

15. Positioning the movable linear conveyor at a first opposing position opposing a first fixed linear conveyor attached to a mounting frame; A step of transferring a conveyor table between the movable linear conveyor located at the first opposing position and the first fixed linear conveyor; moving the movable linear conveyor to a second opposing position opposite a second fixed linear conveyor mounted on the mounting frame; A step of transferring the conveyor table between the movable linear conveyor located at the second opposing position and the second fixed linear conveyor; guiding the movement of the movable linear conveyor between the first opposing position and the second opposing position by a linear motion guide mechanism; Equipped with The linear motion guide mechanism is attached to the first fixed linear conveyor and is also attached to the second fixed linear conveyor, The conveyor table transfer method includes the step of: driving the first fixed linear conveyor in a direction perpendicular to a direction in which the linear guide mechanism guides the movable linear conveyor.

Images