Inertial measurement unit and display method

Abstract

To provide an inertial measurement device which meets various demands on how a measurement result should be displayed while simplifying measurement result confirmation work.SOLUTION: An inertial measurement device 10 is provided, comprising a sensor unit 20 having at least one inertial sensor, a display unit 70 for displaying a screen based on detection information of the inertial sensor, and a mode selection switch 80. The mode selection switch 80 allows for switching between display modes of the display unit 70.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present invention relates to an inertial measurement unit and the like. [Background technology]

[0002] In recent years, as manufacturing equipment and measuring equipment have become more precise, the importance of vibration measurement has increased in order to improve the efficiency of production processes and yield rates, and therefore simplification of equipment vibration measurement and environmental vibration measurement is desired. For example, Patent Document 1 discloses a vibration monitoring device in which a vibration detection unit detects vibrations using a vibration sensor, transmits vibration data obtained by detection wirelessly, and a vibration monitor receives the transmitted vibration data and displays it on a display unit. According to this vibration monitoring device, the vibration detection unit detects equipment vibrations and environmental vibrations, and the detected vibration data can be displayed on a display unit of a vibration monitor provided separately from the vibration detection unit. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-205868 A Summary of the Invention [Problem to be solved by the invention]

[0004] By using an inertial measurement unit having inertial sensors such as an acceleration sensor and an angular velocity sensor, the above-mentioned device status monitoring and environmental status monitoring can be realized. However, in the method of displaying the measurement results of the inertial measurement unit on a display unit provided separately from the inertial measurement unit as in Patent Document 1, the user must check the measurement results by looking at the display unit provided separately from the inertial measurement unit, which makes the user's checking work complicated. In addition, the content of the information to be displayed on the display unit based on the detection information of the inertial sensor varies depending on the user who uses the inertial measurement unit, and it is necessary to meet various requests regarding the display mode of the display information. [Means for solving the problem]

[0005] One aspect of the present disclosure relates to an inertial measurement device that includes a sensor unit having at least one inertial sensor, a display unit that displays information based on detection information from the inertial sensor, and a mode changing switch, wherein the display mode of the display unit is changed by the mode changing switch. [Brief description of the drawings]

[0006] [Figure 1] 1 is a perspective view showing an example of the configuration of an inertial measurement unit according to an embodiment of the present invention; [Diagram 2] FIG. 4 is a perspective view showing another example of the configuration of the inertial measurement unit according to the embodiment. [Diagram 3] FIG. [Figure 4] FIG. [Diagram 5] FIG. [Figure 6] FIG. [Figure 7] FIG. [Figure 8] FIG. [Figure 9] An explanatory diagram of the mode change switch, reset switch, and measurement start switch. [Figure 10] FIG. 4 is an explanatory diagram of switching of display modes. [Figure 11] FIG. 4 is an explanatory diagram of switching of display modes. [Figure 12] FIG. 2 is an explanatory diagram of a wireless communication unit and an antenna unit. [Figure 13] An explanatory diagram of the connection between the connector on the sensor side and the connector on the board side. [Figure 14] FIG. 4 is a state transition diagram illustrating the operation of the inertial measurement unit. [Figure 15] FIG. 2 is an exploded perspective view of a first configuration example of the sensor unit. [Figure 16] FIG. 13 is an exploded perspective view of a second configuration example of the sensor unit. [Figure 17] FIG. 11 is a plan view of a sensor substrate according to a second configuration example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] The present embodiment will be described below. Note that the present embodiment described below does not unduly limit the contents of the claims. Furthermore, not all of the configurations described in the present embodiment are necessarily essential configurations.

[0008] 1. Inertial Measurement Unit FIG. 1 is a perspective view showing a configuration example of an inertial measurement device 10 of this embodiment. The inertial measurement device 10, which is an IMU (Inertial Measurement Unit), includes a sensor unit 20. The inertial measurement device 10 can also include fixed members 11, 12, and 13, a substrate 40, a base 150, and a protective plate 160. In FIG. 1, the direction from the inertial measurement device 10 toward the mounting surface 2 of the inertial measurement device 10 is defined as a direction DR1, and the direction perpendicular to DR1 is defined as a direction DR2. The direction DR1 is a direction perpendicular to the mounting surface 2, for example, a direction perpendicular to the main surface of the sensor unit 20. The main surface is the top or bottom surface of the sensor unit 20, for example, a surface perpendicular to the side surface. The direction DR3 is a direction perpendicular to the direction DR1 and the direction DR2, and the directions DR4, DR5, and DR6 are opposite to the directions DR1, DR2, and DR3, respectively. The directions DR1, DR2, DR3, DR4, DR5, and DR6 are the first direction, the second direction, the third direction, the fourth direction, the fifth direction, and the sixth direction, respectively.

[0009] The sensor unit 20 includes at least one inertial sensor. The inertial sensor is a physical quantity sensor that detects physical quantity information. Specifically, as described later in FIG. 15, FIG. 16, and FIG. 17, the sensor unit 20 includes at least one acceleration sensor as the at least one inertial sensor. Alternatively, the sensor unit 20 includes at least one acceleration sensor and at least one angular velocity sensor as the at least one inertial sensor. The angular velocity sensor is, for example, a gyro sensor. Note that the inertial sensor is not limited to an acceleration sensor or an angular velocity sensor, and may be a physical quantity sensor that can detect a physical quantity equivalent to acceleration or angular velocity as long as it can detect information about inertia by some detection method. For example, it may be a physical quantity sensor that can detect a physical quantity such as velocity or angular acceleration. The sensor unit 20 also includes a case 24. For example, the sensor unit 20 includes a sensor substrate 210 on which at least one inertial sensor is provided, and a case 24 that houses the sensor substrate 210, as shown in FIG. 15 to FIG. 17 described later. The case 24 is formed from a conductive material such as metal, and the sensor board 210 is provided in the internal storage space.

[0010] At least one of a processing unit 50 and a display unit 60 is provided on the substrate 40. In Fig. 1, both the processing unit 50 and the display unit 60 are provided on the substrate 40. For example, only the processing unit 50 or only the display unit 60 may be provided on the substrate 40. The substrate 40 is a circuit board, such as a printed circuit board on which metal wiring is formed. The substrate 40 is, for example, a rigid substrate.

[0011] The processing unit 50 performs processing based on the detection information of the inertial sensor of the sensor unit 20. The processing unit 50 is a processing circuit, and can be realized by a processor such as an MPU or a CPU. Alternatively, the processing unit 50 may be realized by an ASIC (Application Specific Integrated Circuit) using automatic placement and wiring such as a gate array. For example, the processing unit 50 is electrically connected to the inertial sensor of the sensor unit 20 via a connector or the like as described later, and detection information of the inertial sensor is input to the processing unit 50 via the connector or the like. The detection information is, for example, acceleration information, angular velocity information, or information based on these information. The processing unit 50 performs various processes based on the detection information of the inertial sensor. For example, the processing unit 50 processes the detection information. For example, the processing unit 50 processes the detection information so that the detection information becomes appropriate information for display on the display unit 60 or the display unit 70 in FIG. 2 described later. The processing unit 50 also performs an analysis process of the detection information. For example, the processing unit 50 performs an analysis process of the vibration, inclination, or attitude of the measurement target based on the detection information from the inertial sensor. For example, the processing unit 50 performs an FFT analysis (Fast Fourier Transform Analysis) as the analysis process, and analyzes the frequency components of the vibration information, etc.

[0012] The display unit 60 in FIG. 1 and the display unit 70 in FIG. 2 perform display based on the detection information of the inertial sensor of the sensor unit 20. For example, when the inertial measurement device 10 has a processing unit 50 and display units 60 and 70, the processing unit 50 performs processing based on the detection information of the inertial sensor, and the display units 60 and 70 perform display based on the processing result of the processing unit 50. For example, display information based on the processing result of the detection information by the processing unit 50 is displayed on the display units 60 and 70. For example, when the processing unit 50 processes the detection information, the display units 60 and 70 display display information corresponding to the detection information after the processing. Also, when the processing unit 50 analyzes the detection information, the display units 60 and 70 display display information corresponding to the analysis result. For example, in FIG. 1, the display unit 60, which is a display device, has light-emitting element groups 62 and 64. The light-emitting elements of the light-emitting element groups 62 and 64 are elements that convert an electric signal into an optical signal, and can be realized by semiconductor elements such as light-emitting diodes (LEDs). Alternatively, the light-emitting elements may be realized by elements other than semiconductor elements. 2, the display unit 70, which is a display module, has a display panel 72. The display panel 72 is, for example, an organic EL panel or a liquid crystal panel.

[0013] The board 40 is also provided with a mode changeover switch 80, a reset switch 82, and a measurement start switch 84. The board 40 is also provided with a wireless communication unit 90 and an antenna unit 92. Details of these switches, the wireless communication unit 90, etc. will be described later.

[0014] The board 40 is also provided with an interface unit 100. The interface unit 100 communicates with the outside via wires. For example, the interface unit 100 realizes a communication interface such as UART (Universal Asynchronous Receiver / Transmitter), GPIO (General-Purpose Input / Output), or SPI (Serial Peripheral Interface). UART is an asynchronous serial communication interface. GPIO is a general-purpose communication interface whose operation can be controlled by the user at run time. SPI is an interface that communicates using three or four signal lines such as a serial clock signal line and a serial data signal line. The board 40 is also provided with an interface unit 101 that realizes a communication interface such as J-TAG.

[0015] The substrate 40 is also provided with memories 102, 103, and 104. The memory 102 is, for example, a non-volatile memory, and is realized by, for example, an EEPROM (Electrically Erasable Programmable Read-Only Memory) that allows data to be electrically erased, or an OTP (One Time Programmable) memory using a FAMOS (Floating gate Avalanche injection MOS), etc. The memories 103 and 104 are, for example, SRAMs that temporarily store data. The substrate 40 is also provided with a power supply interface 106, and an external power supply is supplied to the inertial measurement unit 10 via the power supply interface 106.

[0016] The inertial measurement unit 10 also includes a base 150. The base 150 is a member for mounting the inertial measurement unit 10 to the mounting surface 2. For example, the sensor unit 20 is provided between the base 150 and the substrate 40, and the base 150 is fixed to the sensor unit 20 by at least one fixing member, i.e., fixing members 11, 12, and 13. For example, the base 150 is provided between the sensor unit 20 and the mounting surface 2, and the mounting surface 2 is, for example, the surface of an apparatus such as a manufacturing apparatus or a measuring apparatus, or a floor surface on which the apparatus is installed. The base 150 has a recessed portion 154 on its bottom surface, which is the surface on the mounting surface 2 side. By providing such a recessed portion 154, when the inertial measurement unit 10 is attached to the mounting surface 2 by double-sided tape, the work of peeling off the double-sided tape can be facilitated. The sensor unit 20 is provided so as to contact the upper surface of the base 150.

[0017] The protective plate 160 is a member for protecting the substrate 40. The substrate 40 is provided between the sensor unit 20 and the protective plate 160, and thus the components mounted on the substrate 40, such as the processing unit 50, the display unit 60, and the wireless communication unit 90, can be protected by the protective plate 160. The protective plate 160, which is the first protective plate, is, for example, a transparent or semitransparent plate-like member, and can be realized by, for example, a resin plate such as acrylic. The protective plate 160 may be realized by a material other than acrylic, for example, a resin plate made of ABS or PET, or may be realized by a material other than resin.

[0018] The inertial measurement device 10 also includes at least a fixing member that detachably fixes the sensor unit 20 and the substrate 40. Specifically, in FIG. 1, the inertial measurement device 10 includes fixing members 11, 12, and 13 as at least one fixing member. Note that, although three fixing members 11, 12, and 13 are provided in FIG. 1, the number of fixing members may be two or less, or may be four or more. In FIG. 1, columnar members are provided as the fixing members 11, 12, and 13. That is, the fixing members 11, 12, and 13 are columnar members whose long sides are in the direction DR1, and as described later, the columnar members are provided so as to penetrate holes in the sensor unit 20, the substrate 40, and the like.

[0019] FIG. 2 shows another example of the configuration of the inertial measurement unit 10. In FIG. 2, in addition to the configuration of FIG. 1, a substrate 48 is further provided. A display unit 70 having a display panel 72 is provided on the substrate 48. The display panel 72, which is an organic EL panel or a liquid crystal panel, displays information based on the detection information of the sensor unit 20. For example, a processing unit 50 provided on the substrate 40, which is the first substrate, performs an analysis process of vibrations of a measurement target such as a device or a floor surface based on the detection information of the inertial sensor of the sensor unit 20. Then, a display unit 70 provided on the substrate 48, which is the second substrate, displays information resulting from the analysis process. For example, the display unit 70 displays information resulting from an analysis such as FFT of the vibrations of the measurement target. For example, it displays information about the peak frequency and peak value of the vibrations.

[0020] In addition to the protective plate 160, a protective plate 170 is further provided in FIG. 2. The protective plate 170 is, for example, a protective member for the substrate 48. For example, the substrate 48 is provided between the protective plate 160 and the protective plate 170, and the display unit 70 and the like mounted on the substrate 48 can be protected by using the protective plate 170. The protective plate 170, which is the second protective plate, is, for example, a transparent or semitransparent plate-like member, and can be realized by, for example, a resin plate such as acrylic. The protective plate 170, which is the second protective plate, may be realized by a material other than acrylic, or may be realized by a material other than resin, similar to the protective plate 160, which is the first protective plate. Thus, in FIG. 2, the substrate 48 is provided between the protective plate 160 and the protective plate 170, and the substrate 40 is provided between the sensor unit 20 and the protective plate 160.

[0021] Further, a window portion 174 is provided in the protective plate 170, and the display unit 70 mounted on the substrate 48 is disposed at the position of this window portion 174. This allows the user to view the information displayed on the display unit 70 through the window portion 174.

[0022] 3 is an exploded perspective view of the inertial measurement device 10. As shown in FIG. 3, the sensor unit 20 has a plurality of holes 21, 22, 23, and the substrate 40 also has a plurality of holes 41, 42, 43. The fixing members 11, 12, 13, which are columnar members, are fitted into the plurality of holes 41, 42, 43 provided in the substrate 40 and the plurality of holes 21, 22, 23 provided in the sensor unit 20, thereby detachably fixing the sensor unit 20 to the substrate 40. Specifically, the fixing members 11, 12, 13 are provided so as to penetrate the holes 41, 42, 43 in the substrate 40 and the holes 21, 22, 23 in the sensor unit 20. Base 150 also has holes 151, 152, and 153, and base 150 is fixed to sensor unit 20 by fitting fixing members 11, 12, and 13, which are columnar members, into holes 151, 152, and 153 provided in base 150. Protective plate 160 also has a plurality of holes 161, 162, and 163, and protective plate 170 also has a plurality of holes 171, 172, and 173. Fixing members 11, 12, and 13 fit into holes 161, 162, and 163 and holes 171, 172, and 173, so that protective plates 160 and 170 are detachably fixed.

[0023] For example, the fixing members 11, 12, and 13, which are columnar members, are screw members. That is, the fixing members 11, 12, and 13 are male threads with threads cut on the outer periphery. The inner periphery of the holes 151, 152, and 153 of the base 150 is also threaded, forming an internal thread. This allows the tip of the fixing members 11, 12, and 13, which are screw members, to be screwed into the holes 151, 152, and 153 of the base 150, and enables the sensor unit 20, the substrate 40, the protective plate 160, and 170 to be fixed to the base 150. Note that the inner periphery of the holes 21, 22, and 23 of the sensor unit 20, the holes 161, 162, and 163 of the protective plate 160, and the holes 171, 172, and 173 of the protective plate 170 are not threaded, but it is possible to implement a modification in which threads are cut in these holes as well.

[0024] 3, spacers 14, 15, and 16 are provided at positions corresponding to holes 41, 42, and 43 of substrate 40. Spacers 17, 18, and 19 are provided at positions corresponding to holes 161, 162, and 163 of protective plate 160. When fixed, fixing members 11, 12, and 13 pass through the holes of spacers 14, 15, 16, 17, 18, and 19. By providing such spacers 14, 15, 16, 17, 18, and 19, it is possible to provide a gap between substrate 40 and protective plate 160 and between protective plate 160 and protective plate 170.

[0025] It is also possible to modify the spacers 14, 15, 16, 17, 18, and 19 so that the holes are threaded to form female threads. As shown in Fig. 3, the substrate 48 can be supported and attached to the substrate 40 using the support 44. The protective plate 160 is provided with a slit hole 164, and the protective plate 160 is disposed between the substrate 40 and the substrate 48 by attaching the support 44 so that it passes through the slit hole 164.

[0026] Fig. 4 is a side view of the inertial measurement unit 10, and Fig. 5 is a bottom view. As shown in Fig. 4, the sensor unit 20 is provided between the base 150 and the substrate 40. Furthermore, the substrate 40 is provided between the sensor unit 20 and the protective plate 160, and the substrate 48 is provided between the protective plate 160 and the protective plate 170. As described in Fig. 3, fixing members 11, 12, and 13, which are columnar members, are provided so as to fit into holes provided in the respective members of the base 150, the sensor unit 20, the substrate 40, the protective plate 160, the substrate 48, and the protective plate 170, thereby making it possible to detachably fix these members.

[0027] As shown in Figs. 4 and 5, the base 150 has fixing parts 156, 157 on the bottom surface, which is the mounting surface 2 side. The fixing parts 156, 157 are magnets. That is, they are magnetic bodies. The fixing parts 156, 157 are attached to the bottom surface of the base 150 by, for example, screws. This allows the fixing parts 156, 157 to be detachably attached to the base 150. The fixing parts 156, 157 are, for example, cubic in shape, and the bottom surfaces of the fixing parts 156, 157 are grounded to the mounting surface 2. By providing the fixing parts 156, 157, which are magnets, on the bottom surface of the base 150, it becomes possible to easily attach the inertial measurement unit 10 to, for example, a metal surface of an apparatus by the magnetic force of the magnets.

[0028] Fig. 6 is a plan view of protective plate 160. As shown in Fig. 6, protective plate 160 is provided with holes 161, 162, and 163 through which fixing members 11, 12, and 13, which are columnar members, pass. Also, a slit hole 164 is provided through which supporting portion 44 for supporting substrate 48 passes. In Fig. 6, protective plate 160 is a transparent plate-like member.

[0029] FIG. 7 is a plan view of the protective plate 170. As shown in FIG. 7, the protective plate 170 is provided with holes 171, 172, and 173 through which the fixing members 11, 12, and 13 pass. As shown in FIG. 3, the screw heads of the fixing members 11, 12, and 13, which are screw members, are positioned above these holes 171, 172, and 173. The protective plate 170 is also provided with a window 174 so that the user can see the display unit 70 below. The protective plate 170 is also provided with window parts 175 and 176 so that the user can see the light-emitting element groups 62 and 64 of the display unit 60 below. In FIG. 7, the protective plate 170 is a translucent plate-like member colored in a predetermined color, such as blue. The protective plate 170 is also provided with characters for explaining the functions of the switches, which will be described later, and characters for informing the user of the contents of the display information of the light-emitting element groups 62 and 64.

[0030] Fig. 8 is a plan view of the display unit 70. The display unit 70 has a display panel 72. Signal lines for transmitting drive signals for the display panel 72 are electrically connected from the lower substrate 40 through the support portion 44 and substrate 48 to connection terminals of the display unit 70. These connection terminals are provided, for example, on the right side of the display panel 72 in the plane of Fig. 8.

[0031] As described above, the inertial measurement device 10 of this embodiment includes a sensor unit 20 having at least one inertial sensor, a substrate 40 on which at least one of a processing unit 50 that performs processing based on detection information from the inertial sensor and a display unit 60 that displays based on the detection information is provided, and at least one fixing member 11, 12, 13 that detachably fixes the sensor unit 20 and the substrate 40.

[0032] According to the inertial measurement device 10 of this embodiment, processing based on the detection state of the inertial sensor of the sensor unit 20 can be executed by the processing unit 50 provided on the substrate 40, or display based on the detection information can be performed by the display unit 60 provided on the substrate 40. Note that, although the display unit 60 having the light-emitting element groups 62, 64 is provided on the substrate 40 in Fig. 1, a display unit 70 having a display panel 72 may be provided on the substrate 40 as shown in Fig. 2.

[0033] In this embodiment, the sensor unit 20 and the substrate 40 are detachably fixed using fixing members 11, 12, and 13 as shown in FIG. 3. For example, the sensor unit 20 and the substrate 40 are detachably fixed. This allows, for example, the type of the sensor unit 20 and the type of the substrate 40 to be incorporated into the inertial measurement unit 10 to be freely changed. For example, it is possible to incorporate a sensor unit 20 having an acceleration sensor into the inertial measurement unit 10, or to incorporate a sensor unit 20 having both an acceleration sensor and an angular velocity sensor into the inertial measurement unit 10. Alternatively, it is possible to incorporate a substrate 40 provided with only a processing unit 50 into the inertial measurement unit 10, a substrate 40 provided with only a display unit 60, or a substrate 40 provided with both a processing unit 50 and a display unit 60. This allows the inertial measurement unit 10 to meet the needs of various users and improve the expandability of the inertial measurement unit 10. Furthermore, the inertial measurement unit 10 can be attached to the attachment surface 2 with the sensor unit 20 and the substrate 40 firmly fixed by the fixing members 11, 12, and 13. This prevents undesirable vibrations caused by resonance or the like from being transmitted to the inertial measurement unit 10 and adversely affecting the measurements of the inertial measurement unit 10. As a result, it is possible to provide an inertial measurement unit 10 that can improve scalability while preventing deterioration in measurement accuracy.

[0034] For example, up until now, the sensor unit 20 itself has been used as the inertial measurement device 10, and the detection information of the inertial sensor of the sensor unit 20 has been output from the connector 26 of Figs. 15 to 17 described later. For example, the acceleration information and angular velocity information detected by the inertial sensor have been output as detection information as is. However, the detection information of the inertial sensor is difficult to handle and requires specialized knowledge, etc., so there is a problem that it is not convenient for the user. In this case, a method is also conceivable in which a PC (personal computer) is connected to the connector 26 of the sensor unit 20, and various processes such as analysis processing of the detection information are performed using the PC, and the analysis results are displayed on the display unit. However, this method has the problem that the work becomes complicated and the measurement system becomes large-scale because it is necessary to connect the PC to the sensor unit 20 to perform various operations.

[0035] In contrast, in this embodiment, the inertial measurement unit 10 is configured by fixing the sensor unit 20 and the substrate 40 with the fixing members 11, 12, and 13. Therefore, it is possible to perform processing such as analysis processing of the detection information of the inertial sensor of the sensor unit 20 using the processing unit 50 provided on the substrate 40, and to display based on the detection information using the display unit 60 provided on the substrate 40. For example, it is no longer necessary to connect a PC to the inertial measurement unit 10 to perform processing based on the detection information or to display based on the detection information, which improves user convenience. That is, it is possible to perform processing based on the detection information or display based on the detection information simply by attaching the inertial measurement unit 10 to the measurement target. For example, if the measurement target is a device such as a manufacturing device or a measuring device, or a floor surface on which the device is installed, the inertial measurement unit 10 is attached to the mounting surface 2, which is the surface of the device or the floor surface. Then, the processing unit 50 executes processing for analyzing vibrations of the device or floor surface, and the information on the processing results can be output to the outside via the wireless communication unit 90 or the interface unit 100, and the analysis results can be displayed on the display unit 60. Therefore, it becomes possible to monitor the state of the measurement target with a small-scale system that is highly portable and low cost.

[0036] For example, for a user who requires only acceleration information, an inertial measurement unit 10 is provided in which a sensor unit 20 provided with an acceleration sensor as an inertial sensor and a substrate 40 are fixed by fixing members 11, 12, and 13. For a user who requires both acceleration information and angular velocity information, an inertial measurement unit 10 is provided in which a sensor unit 20 provided with an acceleration sensor and an angular velocity sensor as inertial sensors and a substrate 40 are fixed by fixing members 11, 12, and 13. For a user who desires a display unit 70 having a display panel 72, an inertial measurement unit 10 is provided in which a sensor unit 20, a substrate 40, and a substrate 48 provided with a display unit 70 are fixed by fixing members 11, 12, and 13, as shown in FIG. 2. In this way, it is possible to provide an inertial measurement unit 10 that meets various user needs, and the expandability of the inertial measurement unit 10 can be increased. In addition, since it is possible to provide an inertial measurement unit 10 in which the sensor unit 20 and the substrate 40 are firmly fixed by fixing members 11, 12, and 13, there is an advantage in that it is possible to prevent a situation in which the accuracy of the measurement results of the inertial measurement unit 10 is degraded due to undesirable vibrations such as resonance.

[0037] In addition, in FIG. 1 and FIG. 2, both the processing unit 50 and the display unit 60 are provided on the substrate 40, but it is sufficient that at least one of the processing unit 50 and the display unit 60 is provided on the substrate 40. For example, when the processing unit 50 is not provided on the substrate 40, processing based on the detection information may be performed using, for example, a processing unit 212 (described later) provided in the sensor unit 20. Alternatively, the processing unit 50 may be provided on the substrate 48 above the substrate 40. Furthermore, the display unit 60 may not be provided on the substrate 40, but may be provided on the substrate 48. Alternatively, the display unit 60 using light-emitting elements may not be provided as the display unit of the inertial measurement unit 10. Furthermore, a display unit 70 having a display panel 72 may be provided on the substrate 40.

[0038] In this embodiment, as shown in FIG. 3, the inertial measurement device 10 includes a plurality of columnar members as the fixing members 11, 12, and 13. The fixing members 11, 12, and 13, which are a plurality of columnar members, are fitted into a plurality of holes 41, 42, and 43 provided in the substrate 40 and a plurality of holes 21, 22, and 23 provided in the sensor unit 20, so that the sensor unit 20 and the substrate 40 are detachably fixed to each other. In this way, various combinations of the sensor unit 20 and the substrate 40 can be freely attached and detached, and the sensor unit 20 and the substrate 40 can be detachably fixed to each other. For example, by replacing the sensor unit 20 with a different type of sensor unit and inserting the fixing members 11, 12, and 13 into the holes 21, 22, and 23, the type of the sensor unit 20 can be changed. Furthermore, it is possible to change the type of board 40 by replacing the board 40 with a different type of board and inserting the fixing members 11, 12, 13 into the holes 41, 42, 43. Therefore, it becomes possible to provide users with various types of sensor units 20 and boards 40 as optional parts, greatly improving the expandability of the inertial measurement unit 10.

[0039] Furthermore, the fixing members 11, 12, and 13, which are a plurality of columnar members, are, for example, screw members. For example, the fixing members 11, 12, and 13 may be male threads with threads cut on the outer periphery. By using screw members as the fixing members 11, 12, and 13 in this manner, it becomes possible to fix the sensor unit 20, the board 40, and the like firmly and stably. This can further prevent the accuracy of the measurement results of the inertial measurement device 10 from deteriorating due to undesirable vibrations caused by resonance, etc. In addition, the installation work of the sensor unit 20, the board 40, and the like becomes easier, and the work efficiency can be improved.

[0040] The inertial measurement device 10 also includes a base 150 for mounting the inertial measurement device 10 on the mounting surface 2. The sensor unit 20 is provided between the base 150 and the substrate 40, and the base 150 is fixed to the sensor unit 20 by at least one fixing member 11, 12, 13. For example, the base 150 is a member that serves as a base for mounting to the mounting surface 2, and the inertial measurement device 10 is attached to the mounting surface 2 by grounding the bottom surface of the base 150 to the mounting surface 2. The mounting surface 2 is, for example, the surface of a device such as a manufacturing device or a measuring device, or the floor surface on which these devices are installed, and is the surface of the measurement target. The sensor unit 20 is fixed by the fixing members 11, 12, 13 so as to be sandwiched between the substrate 40 and the base 150. This fixation can suppress a situation in which the detection accuracy of the inertial sensor of the sensor unit 20 deteriorates due to vibrations caused by resonance, etc. Furthermore, even if the bottom surface of the sensor unit 20 has a shape that is not suitable for mounting to the mounting surface 2, the inertial measurement unit 10 can be stably mounted by mounting the bottom surface of the base 150 to the mounting surface 2 instead of the bottom surface of the sensor unit 20. For example, stable mounting that is not dependent on the shape or type of the sensor unit 20 becomes possible, and erroneous detection due to looseness in the mounting can be prevented.

[0041] As shown in Figs. 4 and 5, the base 150 has fixing parts 156 and 157, which are magnets, on the surface on the mounting surface 2 side. That is, the fixing parts 156 and 157 for fixing the inertial measurement unit 10 to the mounting surface 2 are provided on the bottom surface of the base 150, and these fixing parts 156 and 157 are magnets. For example, the fixing parts 156 and 157 are cubic magnets. In this way, the bottom surfaces of the fixing parts 156 and 157 are attracted to the metal surface of the device, which is the mounting surface 2, by the magnetic force of the magnets. Therefore, by simply bringing the bottom surfaces of the fixing parts 156 and 157 into contact with the mounting surface 2, the inertial measurement unit 10 is fixed and installed on the mounting surface 2 by the magnets, which makes the user's installation work easier and improves work efficiency.

[0042] 4 and 5 show an example in which the number of fixing parts 156, 157 is two, but the number of fixing parts is not limited to this and may be, for example, three or more. In addition, base 150 itself or a part of base 150 may be a magnet.

[0043] As shown in FIG. 4 and FIG. 5, the base 150 has a recessed portion 154 on the surface on the mounting surface 2 side. That is, the bottom surface of the base 150 on the mounting surface 2 side has a recessed portion 154 recessed in the direction DR4 opposite to the direction DR1. By providing such a recessed portion 154, when the inertial measurement unit 10 is attached to the mounting surface 2 by double-sided tape, the work of peeling off the double-sided tape can be simplified. That is, in this embodiment, the inertial measurement unit 10 can be installed on the mounting surface 2 using double-sided tape without using the fixing portions 156 and 157. Specifically, one side of the double-sided tape is adhered to the bottom surface of the base 150, and the other side of the double-sided tape is adhered to the mounting surface 2. In this way, the inertial measurement unit 10 can be installed on the mounting surface 2 with a simple work, and can be installed even when the mounting surface 2 is not a metal surface, for example. In this case, after the measurement is completed and the inertial measurement unit 10 is removed from the mounting surface 2, the double-sided tape must be removed from the bottom surface of the base 150. In this regard, if a recess 154 is provided on the bottom surface of the base 150, the operator, that is, the user, can insert a finger or the like into this recess 154 to easily remove the double-sided tape from the bottom surface of the base 150. The inertial measurement unit 10 can be attached not only with magnets or double-sided tape, but also with screws.

[0044] As shown in FIG. 1 and FIG. 2, the substrate 40 is provided with a wireless communication unit 90 that transmits information based on the detection information of the inertial sensor by wireless. For example, a wireless communication IC that is the wireless communication unit 90 is provided on the substrate 40. Then, information based on the detection information of the inertial sensor is transmitted to the outside by the wireless communication unit 90. For example, when the processing unit 50 performs a process such as an analysis process based on the detection information of the inertial sensor, information on the result of this process is transmitted to the outside by the wireless communication unit 90. Alternatively, the detection information of the inertial sensor itself may be transmitted to the outside by the wireless communication unit 90. In this way, for example, even if the inertial measurement device 10 and the external device are not connected by wire, it becomes possible to transmit information based on the detection information of the inertial sensor to the external device by wireless. For example, while the inertial measurement device 10 is attached to the attachment surface 2, it becomes possible to transmit information based on the detection information detected by the inertial sensor to the external device using the wireless communication unit 90, thereby improving convenience.

[0045] The board 40 is also provided with an interface unit 100 for wired communication with the outside. For example, the interface unit 100 communicates with the outside in a communication interface format such as UART, GPIO, or SPI. For example, the interface unit 100 transmits information based on detection information of an inertial sensor to an external device. By providing such an interface unit 100, it becomes possible to meet various user needs regarding communication interfaces. For example, it becomes possible to convert UART to RS232C to connect the inertial measurement unit 10 to various devices, convert UART to Ethernet (registered trademark), and connect to an SD (registered trademark) card slot device using SPI, thereby improving user convenience.

[0046] The substrate 40 is provided with at least one of a mode changeover switch 80 for changing the mode of the inertial measurement unit 10, a reset switch 82 for resetting the inertial measurement unit 10, and a measurement start switch 84 for starting measurement by the inertial measurement unit 10. Although all of these switches are provided in FIG. 1 and FIG. 2, at least one of these switches may be provided in this embodiment. By providing such various switches, the inertial measurement unit 10 can perform various operations by the user operating each of these switches, and measurement work can be simplified and made more efficient. For example, the user operates the mode changeover switch 80 to change various modes of the inertial measurement unit 10, specifically, the display modes of the display units 60 and 70 are changed. The user operates the reset switch 82 to perform a reset operation of the inertial measurement unit 10. The user operates the measurement start switch 84 to start measurement by the inertial measurement unit 10. The measurement start switch 84 also functions as a measurement end switch, so that, for example, when the user presses the measurement start switch 84 before starting measurement, the mode transitions to status monitoring mode and measurement begins, and when the user presses the measurement start switch 84 again, the status monitoring mode ends. As will be described later, the measurement start switch 84 also functions as a teach switch.

[0047] The inertial measurement unit 10 also includes a protective plate 160, and the substrate 40 is provided between the sensor unit 20 and the protective plate 160. For example, the protective plate 160 is disposed above the substrate 40 in the direction DR4 through a clearance space formed by the spacers 14, 15, and 16. In this manner, the protective plate 160 can provide a dustproof function. The protective plate 160 also serves as a protective member, and can prevent unwanted impacts from being applied to components on the substrate 40, such as the processing unit 50, the display unit 60, and the wireless communication unit 90. For example, in FIG. 1, the user can mount the inertial measurement unit 10 on the mounting surface 2 while holding the inertial measurement unit 10 in his / her hand so that the palm of the hand is in contact with the upper surface of the protective plate 160. In this manner, the protective plate 160 makes it easier for the user to hold the inertial measurement unit 10 in his / her hand, and can facilitate and streamline the mounting process.

[0048] As shown in FIG. 2, the inertial measurement device 10 includes a substrate 40, which is a first substrate, and a substrate 48, which is a second substrate. The substrate 40, which is the first substrate, is provided with a processing unit 50, and the substrate 48, which is the second substrate, is provided with a display unit 70 having a display panel 72. In this way, for example, processing based on the detection information of the inertial sensor of the sensor unit 20 can be executed by the processing unit 50 provided on the substrate 40, and information on the processing result can be displayed on the display panel 72 of the display unit 70 provided on the substrate 48. That is, information based on the detection information can be displayed on the display panel 72. The display panel 72 is realized by an organic EL panel or a liquid crystal panel, so that more detailed and advanced information display is possible compared to the case where a light-emitting element is used. For example, it is possible to display numbers and letters for the measurement value, and to realize more precise and advanced switching processing for the display mode, thereby improving user convenience. It is also possible to implement a modification in which the display unit 70 having the display panel 72 is provided on the substrate 40.

[0049] The inertial measurement device 10 also includes a protection plate 160 which is a first protection plate, and a protection plate 170 which is a second protection plate. The substrate 40 is provided between the sensor unit 20 and the protection plate 160, and the substrate 48 is provided between the protection plate 160 and the protection plate 170. For example, as shown in FIG. 3, the protection plate 170 is disposed above the protection plate 160 on the direction DR4 side through a clearance space formed by the spacers 17, 18, and 19 provided in the holes 161, 162, and 163 of the protection plate 160, and the substrate 48 is disposed in this clearance space. In this way, the protection plate 160 can protect the components provided on the substrate 40. For example, the components provided on the substrate 40, such as the processing unit 50, the wireless communication unit 90, and the display unit 60, can be protected. Furthermore, the protective plate 170 can protect the components provided on the substrate 48. For example, the components such as the display unit 70 provided on the substrate 48 can be protected. This can effectively prevent the components of the inertial measurement unit 10 from being damaged, for example, by touching them by the user.

[0050] The substrate 40 is also provided with a display unit 60 having light-emitting element groups 62, 64. That is, the display unit 60 is provided with the light-emitting element groups 62, 64 such as LEDs. In this manner, it is possible to display information based on the detection information of the inertial sensor of the sensor unit 20 by a display operation using the light emission of the light-emitting elements of the light-emitting element groups 62, 64. For example, information such as whether or not the measurement result satisfies the judgment criteria can be sufficiently transmitted by the light emission of the light-emitting elements. Furthermore, since the light-emitting elements are less expensive than the display panel 72, it is possible to reduce the cost of the inertial measurement unit 10.

[0051] 2. Switch In this embodiment, the user holds the inertial measurement unit 10 so that its bottom surface is in contact with the mounting surface 2, attaches it using double-sided tape, magnets, screws, or the like, and performs measurement using the inertial measurement unit 10. In this case, when using the inertial measurement unit 10 for measurement, it is desirable for the user to be able to simply perform operations such as setting the mode of the inertial measurement unit 10 and issuing a command to start measurement. Therefore, in this embodiment, as shown in FIG. 9, the inertial measurement unit 10 is provided with various switches such as a mode changeover switch 80, a reset switch 82, and a measurement start switch 84. The mode changeover switch 80 is a switch for changing the mode of the inertial measurement unit 10, and specifically, a switch for changing the display mode of the display unit 70. For example, it is a switch for changing the mode of the display information. The reset switch 82 is a switch for resetting the inertial measurement unit 10. When the reset switch 82 is pressed, the inertial measurement unit 10 is initialized. The measurement start switch 84 is a switch for starting the measurement of the inertial measurement unit 10. The measurement start switch 84 also functions as a switch for ending the measurement of the inertial measurement unit 10. In addition, the measurement start switch 84 also functions as a teach switch for instructing to store the measurement reference information of the inertial measurement in a memory by, for example, pressing and holding it. In addition, the mode changeover switch 80 also functions as a switch for saving the log data of the measurement by pressing and holding it. The slide switch 86 is a switch for selecting wireless communication and a communication interface.

[0052] The display unit 70 performs display based on the detection information of the inertial sensor of the sensor unit 20. For example, in FIG. 9, the display unit 70 displays that the measured vibration meets VC-B in the VC (Vibration Criteria) which is the environmental vibration standard. Also, information on the measured vibration displacement is displayed. In this embodiment, the display mode of the display unit 70 is switched by the mode changeover switch 80. For example, in FIG. 10, the display unit 70 displays the judgment result based on the VC standard. For example, the judgment result that the measured vibration meets VC-B is displayed. That is, in the first display mode of FIG. 10, the judgment result based on the first judgment criterion is displayed. On the other hand, in FIG. 11, the display unit 70 displays the measurement result based on the judgment criterion set by the user. For example, the judgment result showing what percentage the measured vibration is relative to the threshold value set by the user is displayed. That is, in the second display mode of FIG. 11, the judgment result based on the second judgment criterion is displayed. For example, by pressing the mode changeover switch 80, the display mode becomes the first display mode of FIG. 10 or the second display mode of FIG. 11.

[0053] The mode change switch 80 also changes the unit of information displayed based on the detection information of the inertial sensor. That is, the mode change switch 80 changes the display mode for the unit. For example, in FIG. 10, the unit is μm, which is the unit of vibration displacement. Specifically, the peak frequency of the vibration displacement and the vibration displacement at the peak frequency are displayed. Then, by pressing the mode change switch 80, the display is changed to mm / s, which is the unit of vibration velocity, or to Gal, which is the unit of vibration acceleration. Specifically, by pressing the mode change switch 80, the peak frequency of the vibration velocity and the vibration velocity at the peak frequency are displayed, or the peak frequency of the vibration acceleration and the vibration acceleration at the peak frequency are displayed. As an example, the judgment result in VC is displayed at first, and each time the mode change switch 80 is pressed, the display mode is switched in sequence to display the vibration acceleration and its peak frequency, the vibration velocity and its peak frequency, the vibration displacement and its peak frequency, and the percentage of the measured value relative to the threshold value set by the user.

[0054] In addition, the environmental vibration standard VC defines VC-A, VC-B, VC-C, VC-D, VC-E, etc., and by indicating which of these is satisfied, the user can easily understand what vibration level the environmental vibration is. In addition, the threshold value set by the user is stored in, for example, the memory 102 in Fig. 1, which is a non-volatile memory, for example, by setting it by the user. Alternatively, the threshold value may be set by a teach switch, which will be described later.

[0055] As shown in FIG. 9, the mode changeover switch 80 has a movable part 81. The movable part 81 is realized by, for example, a push button. The direction from the inertial measurement device 10 toward the mounting surface 2 is defined as DR1, and the direction perpendicular to the direction DR1 is defined as DR2. The direction DR1 is a first direction, and the direction DR2 is a second direction. The direction DR2 is, for example, a direction along the main surface of the sensor unit 20 or the main surface of the substrate 40, and is, for example, a direction of a short side of the sensor unit 20 or the substrate 40. In this case, the movable part 81 moves in the direction DR2. That is, the push button, which is the movable part 81, moves along the direction shown in A1 in FIG. 9 and can be pressed. The movable part 81 of the mode changeover switch 80 instructs switching of the display mode of the display unit 70. That is, by pressing the push button, which is the movable part 81, the display mode described in FIG. 10 and FIG. 11 is switched.

[0056] In addition, the movable part 81 of the mode switching switch 80, in a non-pressed state, protrudes from the side of the sensor unit 20 in a planar view in the direction DR1. For example, in FIG. 9, the side SD1 is the first short side of the substrate 40, and the side SD2 is the second short side opposite the side SD1. The side SD3 is the first long side of the substrate 40, and the side SD4 is the second long side opposite the side SD3. The mode switching switch 80 is disposed on the side SD3, which is the long side of the substrate 40. The reset switch 82 and the measurement start switch 84 are also disposed on the side SD3. That is, the mode switching switch 80, the reset switch 82, and the measurement start switch 84 are disposed side by side along the side SD3. In addition, the movable part 81 of the mode switching switch 80, in a non-pressed state, protrudes from the side SD3 of the substrate 40 in a planar view, and also protrudes from the side of the sensor unit 20 corresponding to the side SD3 of the substrate 40. That is, the push button, which is the movable part 81, protrudes from the side SD3 when not pressed. In this way, for example, when a user holds the inertial measurement unit 10 with the palm of his / her hand in contact with the upper surface, the user can use, for example, the fingers of his / her hand to press the movable part 81. Therefore, while holding the inertial measurement unit 10, the user can press the push button that is the movable part 81 of the mode changeover switch 80 with the fingers of his / her hand, and can easily change the display mode of the display unit 70. For example, the user can attach the lower surface of the inertial measurement unit 10 to the attachment surface 2 and operate the mode changeover switch 80 with the fingers of his / her hand, improving user convenience.

[0057] The reset switch 82 also has a movable part 83, and can be pressed in the direction indicated by A2 in Fig. 9, but in a non-pressed state, this movable part 83 does not protrude from side SD3 of the substrate 40, nor does it protrude from the side of the sensor unit 20 or the side of the protective plate 160 corresponding to side SD3. In other words, when the movable part 83 of the reset switch 82 is pressed, the inertial measurement unit 10 is reset and initialized, so the movable part 83 is made not to protrude from side SD3. This makes it possible to prevent a user from erroneously performing a reset operation.

[0058] The measurement start switch 84 also has a movable part 85 that is movable in direction DR2, and movement of the movable part 85 of the measurement start switch 84 instructs the inertial measurement unit 10 to start measurement. That is, the push button which is the movable part 85 can be moved and pressed along the direction shown in A3 in Fig. 9. Pressing the push button which is the movable part 85 starts measurement of the inertial measurement unit 10. After measurement has started, pressing the push button which is the movable part 85 again ends the measurement. That is, the measurement start switch 84 also functions as a measurement end switch.

[0059] Furthermore, the movable part 85 of the measurement start switch 84 also protrudes from the side SD3 of the substrate 40 in a non-pressed state, and protrudes from the side of the sensor unit 20 corresponding to the side SD3 in a plan view. That is, the push button, which is the movable part 85, protrudes from the side SD3 in a non-pressed state. In this way, for example, when a user holds the inertial measurement unit 10 with the palm of his / her hand in contact with the upper surface, the movable part 85 can be pressed with, for example, the fingers of the hand. Therefore, the user can press the push button, which is the movable part 85 of the measurement start switch 84, with the fingers of the hand while holding the inertial measurement unit 10, which makes it easier to start measurement, and improves user convenience.

[0060] In this embodiment, the measurement start switch 84 also functions as a teach switch, which is a switch for issuing an instruction to store measurement reference information for inertial measurement in the memory 102 . That is, the measurement start switch 84 functions as a teach switch that causes the inertial measurement unit 10 to learn the measurement reference information. Specifically, for example, when the user presses the measurement start switch 84 for a long time, the measurement start switch 84 functions as a teach switch. When the measurement start switch 84 functions as a teach switch, the teach switch has a movable part 85 that is movable in the direction DR2, and the movement of the movable part 85 of the teach switch instructs the storage of the measurement reference information in the memory 102. Specifically, when the measurement start switch 84 is pressed for a long time, the inertial measurement unit 10 transitions to a learning mode, which is a teach mode. Then, during a predetermined learning period, the inertial measurement unit 10 performs a learning measurement, and a threshold value that becomes the measurement reference information is obtained based on the average value of the measurement values ​​measured during this learning period. Then, this threshold value is stored as the measurement reference information in the memory 102, which is a non-volatile memory. Then, during actual measurement by the inertial measurement unit 10, a judgment process is performed using this threshold value as the measurement reference information, and the judgment result is displayed on the display unit 70. As an example, a display such as that shown in FIG. 11 is performed.

[0061] As described above, the inertial measurement device 10 of this embodiment includes the sensor unit 20 having at least one inertial sensor, the display unit 70 that performs display based on information detected by the inertial sensor, and the mode changeover switch 80. The display mode of the display unit 70 is changed by the mode changeover switch 80. For example, the display mode is changed as described with reference to Figs. 10 and 11. For example, the mode of the display information of the display unit 70 is changed.

[0062] According to the inertial measurement unit 10 having such a configuration, the display unit 70 of the inertial measurement unit 10 can display information based on the detection information of the inertial sensor of the sensor unit. For example, by simply attaching the inertial measurement unit 10 to a measurement target, the display unit 70 can display information based on the detection information. Therefore, for example, it is not necessary to connect a PC to the inertial measurement unit 10 and use the display unit of the PC to display information based on the detection information, so that the confirmation work of the measurement results can be simplified and the user's convenience can be improved. When the user operates the mode change switch 80 provided on the inertial measurement unit 10, the display mode of the display unit 70 is changed. Specifically, as described in FIG. 10 and FIG. 11, when the user operates the mode change switch 80, the display mode is changed, for example, so that the judgment result of the measurement based on a different judgment criterion is displayed on the display unit 70 or the unit of information displayed on the display unit 70 is changed. Therefore, by simply operating the mode change switch 80, the display mode of the display unit 70 can be switched between various modes, making it possible to meet a variety of needs for the display format of measurement results, further improving user convenience.

[0063] 9, the mode changeover switch 80 does not necessarily have to be provided on the substrate 40, and may be provided on a substrate other than the substrate 40. For example, the mode changeover switch 80 may be provided on the substrate 48 on which the display unit 70 is provided, rather than on the substrate 40 on which the processing unit 50 and the like are provided. Alternatively, various modifications are possible, such as providing the mode changeover switch 80 on the upper surface of the sensor unit 20.

[0064] As shown in FIG. 9, the mode changeover switch 80 has a movable portion 81 that is movable in a direction DR2 perpendicular to a direction DR1 from the inertial measurement device 10 toward the mounting surface 2. Then, movement of the movable part 81 of the mode change switch 80 instructs the display unit 70 to switch the display mode. In this way, the user can instruct the display unit 70 to switch the display mode by, for example, holding the inertial measurement unit 10 with the palm of his / her hand in contact with the upper surface of the inertial measurement unit 10 and moving the movable part 81 in the direction DR2 that is parallel to the upper surface of the inertial measurement unit 10. Therefore, the user can instruct the display mode to be switched with a simple operation, and cause the display unit 70 to display information based on the detection information of the inertial sensor in the display mode that the user desires.

[0065] Moreover, the movable part 81 of the mode changeover switch 80 protrudes from the side of the sensor unit 20 in a plan view in the direction DR1 in a non-pressed state. In this way, when the user holds the inertial measurement device 10 with the palm of the hand in contact with the upper surface, the movable part 81 of the mode changeover switch 80 is in a protruding state in the non-pressed state. Therefore, when the user holds the inertial measurement device 10 and presses the protruding movable part 81 with, for example, the fingers of the hand, the display mode of the display unit 70 is switched. Therefore, the display mode of the display unit 70 is switched by a simple operation of simply pressing the movable part 81 that protrudes in a direction parallel to the upper surface of the sensor unit 20 in the non-pressed state, which improves user convenience.

[0066] The inertial measurement unit 10 also includes a measurement start switch 84 for starting measurement by the inertial measurement unit 10. Providing such a measurement start switch 84 eliminates the need for processing such as issuing a measurement start command from a PC or the like. Then, when the user wishes to start measurement, the inertial measurement unit 10 can start measurement by the simple operation of pressing the measurement start switch 84.

[0067] Furthermore, the measurement start switch 84 has a movable part 85 that is movable in a direction DR2 perpendicular to the direction DR1 toward the mounting surface 2. The movement of the movable part 85 of the measurement start switch 84 instructs the inertial measurement unit 10 to start measurement. In this manner, the user can instruct the inertial measurement unit 10 to start measurement by, for example, holding the inertial measurement unit 10 with the palm of his or her hand in contact with the upper surface and moving the movable part 85 in the direction DR2 that is parallel to the upper surface. Therefore, the user can instruct the inertial measurement unit 10 to start measurement with a simple operation at a timing that the user desires.

[0068] The inertial measurement unit 10 also includes a memory 102 and a teach switch for issuing an instruction to store measurement reference information for inertial measurement in the memory 102. In Fig. 9, for example, the measurement start switch 84 also serves as the teach switch, and when the measurement start switch 84 is pressed and held down, the learning mode is entered and a threshold value, which is the measurement reference information for inertial measurement, is stored in the memory 102. Then, for example, a measurement determination process using this threshold value as a determination criterion is performed by the processing unit 50, or the result of the measurement using this threshold value as a determination criterion is displayed on the display unit 70. In this way, the inertial measurement unit 10 can learn measurement reference information corresponding to the status and environmental conditions of the device to be measured, and measurement using the measurement reference information can be realized.

[0069] The teach switch, which also serves as the measurement start switch 84, has a movable part 85 that is movable in the direction DR2. The movement of the movable part 85 of the teach switch instructs storage of the measurement reference information in the memory 102. In this manner, the user can instruct storage of the measurement reference information in the memory 102 by, for example, holding the inertial measurement unit 10 with the palm of his / her hand in contact with the upper surface and moving the movable part 85 in the direction DR2, which is parallel to the upper surface. Therefore, the user can cause the inertial measurement unit 10 to learn the judgment reference information for a period that the user desires the inertial measurement unit 10 to learn.

[0070] The inertial measurement unit 10 also includes a substrate 40 on which a mode changeover switch 80 is provided. For example, the mode changeover switch 80 is provided on the substrate 40 on which the processing unit 50 or the display unit 60 is provided. Then, for example, the mode changeover switch 80 is mounted on the substrate 40 arranged parallel to the upper surface of the sensor unit 20. This makes it possible to mount the mode changeover switch 80 in a compact mounting form on the inertial measurement unit 10. In particular, by setting the movable direction of the movable part 81 of the mode changeover switch 80 to a direction parallel to the surface of the substrate 40, it becomes possible to realize a compact mounting of the mode changeover switch 80.

[0071] As described with reference to FIG. 1 and FIG. 2, the inertial measurement unit 10 includes at least one fixing member 11, 12, 13 that detachably fixes the sensor unit 20 and the substrate 40. That is, the sensor unit 20 having the inertial sensor and the substrate 40 having the mode change switch 80 are detachably fixed by the fixing members 11, 12, 13. In this way, the type of the sensor unit 20 and the type of the substrate 40 incorporated in the inertial measurement unit 10 can be freely changed, improving the expandability of the inertial measurement unit 10. In addition, since the inertial measurement unit 10 can be attached to the attachment surface 2 with the sensor unit 20 and the substrate 40 fixed by the fixing members 11, 12, 13, it is possible to prevent undesirable vibrations due to resonance from being transmitted to the inertial measurement unit 10 and adversely affecting the measurement.

[0072] The inertial measurement unit 10 also includes a substrate 40 which is a first substrate and a substrate 48 which is a second substrate, with a mode changeover switch 80 provided on the substrate 40 and a display unit 70 provided on the substrate 48. The substrate 40 is provided between the sensor unit 20 and the substrate 48. In this manner, when the mode changeover switch 80 provided on the substrate 40 is operated, the display mode of the display unit 70 provided on the substrate 48 is switched. Since the mode changeover switch 80 is provided on the substrate 40 which is provided between the sensor unit 20 and the substrate 48, the mode changeover switch 80 is disposed, for example, near the center in the height direction of the inertial measurement unit 10, and the operability of the mode changeover switch 80 can be improved. On the other hand, since the display unit 70 is provided on the substrate 48 arranged on the side of the substrate 40 in the direction DR4, which is the upper direction, the display unit 70 can be arranged in a position that is easy for the user to view.

[0073] In addition, the display unit 70 displays the judgment result based on the first judgment criterion in the first display mode, and displays the judgment result based on the second judgment criterion in the second display mode, as the judgment result of the judgment process based on the detection information. As an example, in the first display mode, the display unit 70 displays the judgment result as shown in FIG. 10, and in the second display mode, the display unit 70 displays the judgment result as shown in FIG. 11. In this way, it is possible to switch between the first display mode in which the judgment result based on the first judgment criterion is displayed and the second display mode in which the judgment result based on the second judgment criterion is displayed by the mode changeover switch 80. Therefore, by the user operating the mode changeover switch 80, the judgment results of the measurement based on different judgment criteria are displayed on the display unit 70, and it is possible to present the judgment results based on various judgment criteria to the user.

[0074] In this case, the first judgment criterion is the judgment criterion of VC (Vibration Criteria), and the second judgment criterion is the judgment criterion set by the user. For example, in the first display mode, as shown in FIG. 10, the judgment result of the judgment criterion of VC, which is the first judgment criterion, is displayed. For example, it is displayed whether the vibration measured by the inertial measurement unit 10 satisfies any of VC-A, VC-B, VC-C, VC-D, VC-E, etc., which are indicators of the environmental vibration standard. On the other hand, in the second display mode, as shown in FIG. 11, the judgment result of the judgment criterion set by the user is displayed. For example, it is displayed how the measurement result of the inertial measurement unit 10 is with respect to the judgment criterion set by the user. For example, when the judgment criterion set by the user is a threshold value, it is displayed how much the measured value is relative to the threshold value. In this way, it is possible to switch between the first display mode in which the judgment result of the judgment criterion of VC is displayed and the second display mode in which the judgment result of the judgment criterion set by the user is displayed by the mode changeover switch 80. When the display unit 60 consisting of the light-emitting element groups 62 and 64 is used, as is clear from FIG. 7, the light-emitting element group 62 is used to display whether the measurement value satisfies VC-A, VC-B, VC-C, VC-D, VC-E, or the like. The light-emitting element group 64 is used to display whether the peak value is L (low), M (middle), or H (high), for example. That is, the light-emitting elements corresponding to the positions of L, M, and H emit light to display whether the peak value is at a low level, a medium level, or a high level. Note that "A" in FIG. 7 indicates an alarm state, and the light-emitting element corresponding to the position of "A" emits light to notify the user that an alarm state has occurred, such as when the measurement value exceeds a threshold value.

[0075] Furthermore, the unit of information displayed based on the detected information is switched by the mode selector switch 80. For example, in the case of vibration measurement, the unit of the displayed measurement value is switched between vibration displacement (μm), vibration velocity (mm / s), and vibration acceleration (Gal) by operating the mode selector switch 80, as shown in Fig. 10. In this way, measurement values ​​in various units can be displayed to the user by operating the mode selector switch 80, improving user convenience.

[0076] The inertial measurement device 10 also includes a processing unit 50 that performs processing based on the detection information. The processing unit 50 performs analysis processing of the vibration information of the detection target, and the display unit 70 displays the result information of the analysis processing. The display unit 60 also displays the result information of the analysis processing. For example, the processing unit 50 performs analysis processing such as FFT analysis of the vibration information based on the detection information from the inertial sensor of the sensor unit 20. The display unit 70 displays, as the result information of the analysis processing, for example, the peak frequency of the vibration, the vibration displacement at the peak frequency, the vibration velocity, or the vibration acceleration. In this way, even if the detection information of the inertial sensor is difficult for the user to handle, the processing unit 50 performs analysis processing of the detection information and the display unit 70 displays the result information of the analysis processing, so that the user can easily understand what the vibration state of the detection target is.

[0077] 3. Wireless communication unit, antenna unit In the inertial measurement device 10 of this embodiment, a wireless communication unit 90 and an antenna unit 92 connected to the wireless communication unit 90 are provided to wirelessly transmit information based on the detection information of the inertial sensor of the sensor unit 20 to the outside. The wireless communication unit 90 is a device that performs close-proximity wireless communication such as Bluetooth (registered trademark, hereinafter simply referred to as BT as appropriate), and is realized by, for example, a wireless communication IC that is an integrated circuit device. Note that the wireless communication performed by the wireless communication unit 90 is not limited to BT, and may be close-proximity wireless communication such as ZigBee or Wi-Fi (registered trademark), or may be wireless communication such as Wi-Fi (registered trademark). On the other hand, as described later with reference to Figs. 15 to 17, the sensor unit 20 includes a sensor board 210 on which an inertial sensor is provided, and a conductive case 24 that houses the sensor board 210. The case 24 includes, for example, a container 220 and a lid 222, and the sensor board 210 is housed in a housing space formed by the container 220 and the lid 222. In Fig. 15, the sensor substrate 210 is provided with acceleration sensors 30X, 30Y, and 30Z as inertial sensors. The acceleration sensors 30X, 30Y, and 30Z detect acceleration information in the X-axis, Y-axis, and Z-axis directions as detection information, respectively. In Figs. 16 and 17, the sensor substrate 210 is provided with an acceleration sensor 32 and angular velocity sensors 34X, 34Y, and 34Z as inertial sensors. The acceleration sensor 32 detects acceleration information in the X-axis, Y-axis, and Z-axis directions as detection information, respectively. The angular velocity sensors 34X, 34Y, and 34Z detect angular velocity information around the X-axis, Y-axis, and Z-axis as detection information, respectively.

[0078] 15 to 17, the case 24 is made of a conductive material such as metal. In this way, by housing the sensor board 210 on which the inertial sensor is mounted inside the conductive case 24, it is possible to reduce adverse effects of external electromagnetic waves and the like on the inertial sensor. For example, if the conductive case 24 is not provided, problems such as drift in the detection information of the inertial sensor due to external electromagnetic waves and the like occur, but by providing the inertial sensor inside the conductive case 24, it is possible to suppress the occurrence of such problems.

[0079] However, it has been found that if such a conductive case 24 is located near the antenna unit 92, a problem occurs in that the sensitivity of the antenna unit 92 decreases. For example, the antenna unit 92 is realized by an inductor made of metal wiring formed on a substrate, but if the inductor made of the metal wiring of the antenna unit 92 is located directly above the conductive case 24, the sensitivity of the antenna unit 92 will decrease significantly.

[0080] In this embodiment, as shown in FIG. 12, when the direction from the inertial measurement device 10 toward the mounting surface 2 is DR1, the antenna portion 92 is provided so as to protrude from the side of the case 24 of the sensor unit 20 in a plan view in the direction DR1. For example, in FIG. 12, the substrate 40 has sides SD1 and SD2 which are opposing short sides and sides SD3 and SD4 which are opposing long sides. The direction from the side SD1 toward the side SD2 is DR3, and the opposite direction of DR3 is DR6. The direction from the side SD3 toward the side SD4 is DR2, and the opposite direction of DR2 is DR5. The antenna portion 92 protrudes from the side SD1 which is the short side of the substrate 40, and also protrudes from the side of the sensor unit 20 corresponding to the side SD1. Specifically, the antenna portion 92 is provided so as to protrude from the side SD1 toward the direction DR6.

[0081] In this way, for example, the antenna section 92 is not located directly above the conductive case 24 of the sensor unit 20. Specifically, the inductor of the metal wiring of the antenna section 92 is not located directly above the conductive case 24. Therefore, it is possible to suppress a decrease in sensitivity of the antenna section 92 caused by the conductive case 24. That is, if the antenna section 92 is provided on the side of the side SD1 in the direction DR3 in FIG. 12, the presence of the conductive case 24 directly below the antenna section 92 causes a decrease in sensitivity of the antenna section 92. On the other hand, by providing the antenna section 92 on the side of the side SD1 in the direction DR6 as shown in FIG. 12, the conductive case 24 is not present directly below the antenna section 92, and the sensitivity of the antenna section 92 can be improved accordingly.

[0082] As described above, the inertial measurement device 10 of this embodiment includes the sensor unit 20 having at least one inertial sensor, the wireless communication unit 90 that wirelessly transmits information based on detection information from the inertial sensor, and the antenna unit 92 connected to the wireless communication unit 90. By providing the wireless communication unit 90 and the antenna unit 92 in this manner, it becomes possible to wirelessly transmit information based on detection information from the inertial sensor to an external device. This makes it possible to transmit information based on detection information to an external device, for example, without connecting the inertial measurement device 10 to the external device by wire, thereby improving user convenience.

[0083] Here, the sensor unit 20 includes an inertial sensor, a sensor board 210 on which the inertial sensor is provided, and a conductive case 24 that houses the sensor board 210. That is, in Fig. 15, the sensor board 210 on which acceleration sensors 30X, 30Y, and 30Z are provided as the inertial sensor is housed in the case 24. In Figs. 16 and 17, the sensor board 210 on which acceleration sensor 32 and angular velocity sensors 34X, 34Y, and 34Z are provided as the inertial sensor is housed in the case 24. In this way, the inertial sensor is housed in the conductive case 24, and it is possible to prevent the accuracy of the detection information of the inertial sensor from being deteriorated due to external electromagnetic waves or the like.

[0084] 12, in the inertial measurement device 10 of this embodiment, the antenna unit 92 is provided so as to protrude from a side of the case 24 in a plan view in a direction DR1 toward the mounting surface 2. That is, the antenna unit 92 protrudes from the side SD1 of the substrate 40, and also protrudes from the lower side of the case 24 corresponding to this side SD1. In this manner, it is possible to suppress a decrease in the sensitivity of the antenna unit 92 caused by the conductive case 24. Therefore, it is possible to simultaneously suppress a deterioration in the detection accuracy of the inertial sensor caused by housing the inertial sensor inside the conductive case 24, and improve the sensitivity of the antenna unit 92.

[0085] 12, the wireless communication unit 90 and the antenna unit 92 do not necessarily need to be provided on the substrate 40, and may be provided on a substrate other than the substrate 40. For example, the wireless communication unit 90 and the antenna unit 92 may be provided on the substrate 48 on which the display unit 70 is provided, rather than on the substrate 40 on which the processing unit 50 and the like are provided. Alternatively, various modifications are possible, such as providing the wireless communication unit 90 and the antenna unit 92 on the upper surface of the sensor unit 20.

[0086] The inertial measurement device 10 also includes a substrate 40 on which the wireless communication unit 90 is provided, and a protective plate 160. As described with reference to FIG. 1 and FIG. 2, the substrate 40 is provided between the sensor unit 20 and the protective plate 160, and as shown in FIG. 12, the antenna unit 92 does not protrude from the protective plate 160 in a plan view in the direction DR1. That is, the antenna unit 92 protrudes in the direction DR6 from the side SD1 of the substrate 40 and the corresponding side of the sensor unit 20, but does not protrude in the direction DR6 from the corresponding side of the protective plate 160. For example, the conductive case 24 of the sensor unit 20 does not exist below the antenna unit 92, but the protective plate 160 is provided above the antenna unit 92 so as to cover the antenna unit 92. In this way, if the antenna unit 92 does not protrude from the protective plate 160 in a plan view and the protective plate 160 is provided so as to cover the antenna unit 92, the protective plate 160 serves as a protective member, and it is possible to prevent the antenna unit 92 from being subjected to an undesirable impact or the like. For example, it is possible to prevent the occurrence of a situation in which the user's fingers or the like accidentally touch the antenna portion 92 and the antenna portion 92 is damaged. Therefore, by having the antenna portion 92 protrude from the conductive case 24 in a planar view, the sensitivity of communication is improved, while by not protruding from the protective plate 160 in a planar view, the antenna portion 92 can be protected from external impacts.

[0087] The inertial measurement device 10 also includes a substrate 40 on which a wireless communication unit 90 is provided, and an antenna unit 92 is provided so as to protrude from a side SD1, which is a short side of the substrate 40. Specifically, a communication substrate 94 is mounted on the substrate 40 on which the processing unit 50 and the like are provided, and the wireless communication unit 90 and the antenna unit 92 are provided on the communication substrate 94. That is, a wireless communication IC, which is the wireless communication unit 90, is mounted on the communication substrate 94, and an inductor made of metal wiring is formed on a substrate portion of the communication substrate 94 protruding from the side SD1 of the substrate 40, thereby realizing the antenna unit 92. Note that the substrate portion on which the wireless communication unit 90 is mounted and the substrate portion on which the antenna unit 92 is formed may be realized by an integrated substrate or may be realized by separate substrates. By providing the antenna unit 92 so as to protrude from the side SD1 of the substrate 40 in this manner, the risk of an undesirable impact being applied to the antenna unit 92 can be reduced. For example, when a user holds the two long sides of the inertial measurement unit 10 with the palm of the hand touching the top surface, it is possible to prevent the user's fingers or other parts from touching the antenna unit 92, thereby preventing undesirable impact from being applied to the antenna unit 92.

[0088] 12, the wireless communication unit 90 is provided on the side SD1, which is the short side of the substrate 40. Specifically, the wireless communication unit 90 is arranged along the side SD1 on the side of the side SD1 in the direction DR3. The antenna unit 92 connected to the wireless communication unit 90 is arranged to protrude from the side SD1 in the direction DR6. In this way, the antenna unit 92 is electrically connected to the wireless communication unit 90 arranged on the side SD1 of the substrate 40 by a short path, and the antenna unit 92 protrudes from the side SD1, improving the sensitivity of the antenna unit 92. This makes it possible to implement the wireless communication unit 90 and the antenna unit 92 on the substrate 40 in a compact implementation form, while also improving the sensitivity of the antenna unit 92.

[0089] The inertial measurement unit 10 also includes a substrate 40 on which a wireless communication unit 90 is provided, and a processing unit 50 that is provided on the substrate 40 and performs processing based on the detection information of the inertial sensor of the sensor unit 20. The wireless communication unit 90 transmits information processed by the processing unit 50. For example, when the processing unit 50 processes the detection information of the inertial sensor, the wireless communication unit 90 transmits the processed detection information to the outside by wireless, for example. When the processing unit 50 performs an analysis process of the detection information of the inertial sensor, the wireless communication unit 90 transmits, for example, the result information of the analysis process to the outside. In this way, it becomes possible to wirelessly transmit to the outside by the wireless communication unit 90 information obtained by the processing unit 50 performing a predetermined process on the detection information, rather than the detection information of the inertial sensor itself. Therefore, the external device of the inertial measurement unit 10 does not need to perform the processing performed by the processing unit 50 of the inertial measurement unit 10, and it becomes possible to reduce the processing load and reduce the cost of the measurement system including the inertial measurement unit 10.

[0090] Furthermore, the detection information of the inertial sensor is difficult to handle and requires specialized knowledge, etc., which can result in a lack of convenience for the user. However, by having the inertial measurement device 10 transmit information after processing by the processing unit 50, it becomes possible to transmit information that is easy for the user to handle, thereby improving user convenience.

[0091] As shown in FIG. 12, in the inertial measurement device 10 of this embodiment, the antenna unit 92 is provided so as to protrude from the side SD1 of the substrate, and the processing unit 50 is provided between the wireless communication unit 90 and the side SD2 opposite to the side SD1. The side SD1 is the first short side, and the side SD2 is the second short side. For example, when the direction from the side SD1 of the substrate 40 toward the side SD2 is designated as DR3, and the opposite direction of the direction DR3 is designated as DR6, the antenna unit 92 is provided on the side of the wireless communication unit 90 in the direction DR6 so as to protrude from the side SD1 of the substrate 40. The wireless communication unit 90 is provided on the side of the antenna unit 92 in the direction DR3, and the processing unit 50 is provided on the side of the wireless communication unit 90 in the direction DR3. In this way, the antenna unit 92, the wireless communication unit 90, and the processing unit 50 can be efficiently arranged along the direction from the side SD1, which is the short side of the substrate 40, toward the opposite side SD2. For example, the antenna unit 92, wireless communication unit 90, and processing unit 50 can be arranged in this order along the longer sides SD3 and SD4 of the substrate 40, thereby improving the efficiency of mounting circuit components on the substrate 40.

[0092] The inertial measurement device 10 also includes an interface unit 100 for communicating data with the outside via a wire. The interface unit 100 is disposed on a side SD2, which is the second short side of the substrate. Specifically, the interface unit 100 is disposed along the side SD2 in the direction DR6 of the side SD2. The interface unit 100 is a circuit that realizes a communication interface such as UART, GPI, or SPI. By providing such an interface unit 100, it becomes possible to transmit information based on detection information of the inertial sensor to an external device and to receive commands from an external device by using a widely used wired communication interface such as UART, GPI, or SPI. By providing the interface unit 100 on the side SD2 of the substrate 40, the antenna unit 92, the wireless communication unit 90, the processing unit 50, and the interface unit 100 can be efficiently disposed along the long side direction of the substrate 40, thereby improving the mounting efficiency of circuit components on the substrate 40.

[0093] As shown in FIG. 12, at least one of the mode switch 80, the reset switch 82, and the measurement start switch 84 is provided on the side SD3, which is the long side of the substrate 40. In this way, the wireless communication unit 90, the processing unit 50, and the interface unit 100 can be arranged in the area between the sides SD1 and SD2, which are the short sides of the inertial measurement unit 10, and the mode switch 80, the reset switch 82, and the measurement start switch 84 can be arranged in the area along the side SD3, which is the long side of the substrate 40, thereby realizing an efficient mounting layout. The inertial measurement unit 10 also includes at least one fixing member 11, 12, and 13 that detachably fixes the sensor unit 20 to the substrate 40 on which the wireless communication unit 90 and the like are provided. In this way, as described above, the expandability of the inertial measurement unit 10 can be improved, and it is also possible to prevent undesirable vibrations due to resonance and the like from being transmitted to the inertial measurement unit 10 and adversely affecting the measurement.

[0094] As shown in FIG. 13, in the inertial measurement device 10 of this embodiment, the sensor unit 20 has a sensor-side connector 26 on the surface facing the substrate 40. That is, the sensor unit 20 has a connector 26 on the upper surface. The substrate 40 has a substrate-side connector 46 connected to the sensor-side connector 26 on the surface facing the sensor unit 20. That is, the substrate 40 has a connector 46 on the lower surface, and the connector 46 of the substrate 40 is electrically connected to the connector 26 of the sensor unit 20. Specifically, as shown in FIG. 1 and FIG. 2, in a state in which the sensor unit 20 and the substrate 40 are fixed by the fixing members 11, 12, and 13, the connector 26 of the sensor unit 20 and the connector 46 of the substrate 40 are electrically connected. This makes it possible to transmit the detection information of the inertial sensor of the sensor unit 20 to the substrate 40 via these connectors 26 and 46. Then, the processing unit 50 provided on the substrate 40 can perform processing based on the detection information of the inertial sensor, and the display unit 60 provided on the substrate 40 can perform display based on the detection information of the inertial sensor. Connector 26 is, for example, a male connector realized by a plurality of pin terminals, and connector 46 is, for example, a female connector to which a male connector can be connected.

[0095] FIG. 14 is a state transition diagram for explaining the operation of the inertial measurement unit 10 of this embodiment. When the inertial measurement unit 10 is powered and started, it first transitions to an initialization processing state. Then, when the enablement of BT (Bluetooth (registered trademark)) is detected by selection with the slide switch 86, BT is set, and when the setting is completed, it returns to the initialization processing state. When BT is enabled, wired communication is disabled. On the other hand, when the transition of the light display operation is detected by selection with the slide switch 86, it transitions to the light display mode. In the light display mode, the interface unit 100 goes into the GPIO output mode, and light display by a Patlite (registered trademark) or the like using the inertial measurement unit 10 becomes possible.

[0096] If the slide switch 86 has not selected to enable BT or to transition to the light display mode, the device transitions to the standby mode as a transition to the standby operation has been detected. In the standby mode, for example, when the measurement start switch 84 is pressed and held for a long time or when a learning request is made by issuing a command, the device transitions to the learning mode and a learning process is performed. In the learning mode, for example, a predetermined light-emitting element of the display unit 60 flashes or the word "LEARING" is displayed on the display unit 70 to inform the user that learning is in progress. Then, during the learning period of the learning mode, a measurement is performed, and a measurement threshold value, which is measurement reference information for inertial measurement, is calculated based on the measurement result during the learning period. Then, the calculated threshold value is stored in the memory 102, which is a non-volatile memory. When the learning process is completed, the device returns to the standby mode. Also, in the standby mode, when a setting request is made by issuing a command from an external device, for example, various setting processes for the inertial measurement unit 10 are performed, and when the setting is completed, the device returns to the standby mode.

[0097] In the standby mode, when the measurement start switch 84 is pressed and a request to start status monitoring is made, the mode transitions to status monitoring mode. In the status monitoring mode, the display units 60 and 70 display the measurement results. In addition, when the mode changeover switch 80 is pressed at this time, the display mode is switched. In the status monitoring mode, for example, if the measurement value exceeds a threshold value, the mode transitions to an alarm state, and, for example, the alarm light-emitting element of the display unit 60 flashes. In addition, when the mode transitions to the alarm state, log data is also saved. In the status monitoring mode or the alarm state, when a request to stop status monitoring is made, for example, by pressing the measurement start switch 84 again, the mode transitions to the standby mode.

[0098] In the inertial measurement unit 10 of the present embodiment described above, the user first attaches the inertial measurement unit 10 to a device or a floor surface and presses the measurement start switch 84. For example, the user holds the inertial measurement unit 10 so that the top surface of the inertial measurement unit 10 touches the palm of the hand, and presses the measurement start switch 84 using the fingers of the hand. When the inertial measurement unit 10 learns a threshold value, the user presses the measurement start switch 84 for a long time to learn the measurement threshold value, and then presses the measurement start switch 84. After pressing the measurement start switch 84, the user waits for a given measurement time. For example, the measurement time is 5 to 10 seconds, and the length of the measurement time is configurable. When the measurement time ends, the user is notified of the measurement result by the display of the LED, which is a light-emitting element of the display unit 60, or the display panel 72 of the display unit 70. At this time, the user can switch to various display modes by pressing the mode change switch 80. The user can stop the status monitoring mode and transition to the standby mode by pressing the measurement start switch 84 again. Thus, according to the inertial measurement device 10 of this embodiment, the user can perform measurements with simple operations. Since information based on the detection information of the inertial sensor is displayed on the display units 60 and 70, the measurement results can be confirmed by easy-to-understand information display, improving convenience. Furthermore, by operating the mode changeover switch 80, the measurement results can be confirmed in various display modes. Furthermore, since the wireless communication unit 90 and the antenna unit 92 are provided, the information based on the detection information of the inertial sensor can be transmitted to an external device by wireless communication. In this case, since the antenna unit 92 is provided so as to protrude from the main surface of the case 24 of the sensor unit 20, wireless communication with high antenna sensitivity is possible.

[0099] 4.Sensor unit FIG. 15 shows a first configuration example of the sensor unit 20. FIG. 15 is an exploded perspective view of the sensor unit 20. The sensor unit 20 in FIG. 15 includes a sensor substrate 210 on which at least one acceleration sensor is provided as at least one inertial sensor, and a case 24 that accommodates the sensor substrate 210. In FIG. 15, acceleration sensors 30X, 30Y, and 30Z that detect acceleration in the directions of the X-axis, Y-axis, and Z-axis are provided on the sensor substrate 210 as at least one acceleration sensor. The acceleration sensors 30X, 30Y, and 30Z are mounted on the sensor substrate 210 so that their main surfaces are orthogonal to the X-axis, Y-axis, and Z-axis, respectively. The acceleration sensors 30X, 30Y, and 30Z are, for example, acceleration sensors using a quartz crystal resonator, and can detect acceleration with higher accuracy than an acceleration sensor of a MEMS (Micro Electro Mechanical Systems). This makes it possible to detect vibrations of the device or floor with higher accuracy. In FIG. 15, three acceleration sensors 30X, 30Y, and 30Z are provided on the sensor substrate 210 for detecting acceleration in three axes; however, various modifications are possible, such as providing one acceleration sensor on the sensor substrate 210 for detecting acceleration in one axis, or providing two acceleration sensors on the sensor substrate 210 for detecting acceleration in two axes.

[0100] The sensor substrate 210 is also provided with a processing unit 212 implemented by an ASIC, a microcomputer, or the like. For example, the processing unit 212 of the sensor unit 20 may execute part or all of the processing performed by the processing unit 50 of the inertial measurement device 10. A connector 26 consisting of a plurality of connector terminals is provided on a second surface, which is the reverse side of the first surface, which is the main surface, of the sensor substrate 210 on which the acceleration sensors 30X, 30Y, and 30Z are provided. As described in FIG. 13, the connector 26 of the sensor unit 20 is connected to a connector 46 on the reverse side of the substrate 40 of the inertial measurement device 10.

[0101] The case 24 is made of a conductive material such as metal, and has a container 220 and a lid 222. The sensor substrate 210 is housed in a storage space formed by the container 220 and the lid 222, and the container 220 and the lid 222 are fixed and sealed with fixing members such as screws. A seal member 224 is provided between the lid 222 and the sensor substrate 210 to serve as a cushioning material.

[0102] 16 and 17 show a second configuration example of the sensor unit 20. FIG. 16 is an exploded perspective view of the sensor unit 20, and FIG. 17 is a plan view of the sensor substrate 210. The sensor unit 20 in FIG. 16 and FIG. 17 includes a sensor substrate 210 on which at least one acceleration sensor and at least one angular velocity sensor are provided as at least one inertial sensor, and a case 24 that accommodates the sensor substrate 210. In FIG. 16 and FIG. 17, an acceleration sensor 32 that detects acceleration in the directions of the X-axis, Y-axis, and Z-axis is provided on the sensor substrate 210 as at least one acceleration sensor. Inside the acceleration sensor 32, a sensor element that detects acceleration in the X-axis direction and the Y-axis direction, and a sensor element that detects acceleration in the Z-axis direction are provided. These sensor elements are, for example, MEMS sensor elements. Note that the sensor substrate 210 can be modified in various ways, such as providing individual acceleration sensors for each of the X-axis, Y-axis, and Z-axis, or providing an acceleration sensor for two axes or one axis, namely, the X-axis, Y-axis, and Z-axis. 16 and 17, angular velocity sensors 34X, 34Y, and 34Z are provided as at least one angular velocity sensor, which detect angular velocities around the X-axis, Y-axis, and Z-axis. The angular velocity sensors 34X, 34Y, and 34Z are mounted on the sensor substrate 210 so that their main surfaces are perpendicular to the X-axis, Y-axis, and Z-axis, respectively. The angular velocity sensors 34X, 34Y, and 34Z are gyro sensors that detect angular velocities using, for example, a quartz crystal vibrator. By providing the angular velocity sensor as well as the acceleration sensor on the sensor substrate 210 in this way, it becomes possible to detect not only vibrations, but also the inclination and change in posture of an object. In Figures 16 and 17, three angular velocity sensors 34X, 34Y, and 34Z are provided on the sensor substrate 210 for detecting angular velocity on three axes, but various modifications are possible, such as providing one angular velocity sensor on the sensor substrate 210 for detecting angular velocity on one axis, or providing two angular velocity sensors on the sensor substrate 210 for detecting angular velocity on two axes.

[0103] 17, a connector 26 consisting of a plurality of connector terminals is provided on a first surface, which is the main surface of a sensor substrate 210 on which the acceleration sensor 32 and the like are provided. As described in FIG. 13, the connector 26 of the sensor unit 20 is connected to a connector 46 on the rear surface of a substrate 40 of the inertial measurement device 10. A processing unit (not shown) realized by an ASIC, a microcomputer, or the like is provided on a second surface, which is the rear surface of the sensor substrate 210. For example, a part or all of the processing performed by the processing unit 50 of the inertial measurement device 10 may be executed by the processing unit of the sensor unit 20.

[0104] The case 24 is made of a conductive material such as metal, and has a container 220 and a lid 222. The sensor substrate 210 is housed in a storage space formed by the container 220 and the lid 222, and the container 220 and the lid 222 are fixed and sealed with fixing members such as screws. A seal member 224 is provided between the lid 222 and the sensor substrate 210 to serve as a cushioning material.

[0105] As described above, the inertial measurement device of this embodiment includes a sensor unit having at least one inertial sensor, a display unit that performs a display based on information detected by the inertial sensor, and a mode change switch. The display mode of the display unit is changed by the mode change switch.

[0106] According to this embodiment, the display based on the detection information of the inertial sensor of the sensor unit can be performed on the display unit of the inertial measurement unit, so that the confirmation work of the measurement results can be simplified. In addition, the display mode of the display unit can be changed by operating the mode change switch, so that it is possible to meet various needs for the display form of the measurement results.

[0107] In this embodiment, when a direction from the inertial measurement unit toward the mounting surface of the inertial measurement unit is defined as a first direction and a direction perpendicular to the first direction is defined as a second direction, the mode change switch may have a movable part that is movable in the second direction. Then, movement of the movable part of the mode change switch may instruct the display unit to switch the display mode.

[0108] In this way, the user can instruct the display mode to be switched by a simple operation of moving the movable part of the mode change switch in a second direction perpendicular to a first direction from the inertial measurement unit to the mounting surface.

[0109] In this embodiment, the movable portion of the mode change switch may protrude from a side of the sensor unit in a plan view in the first direction when in a non-pressed state.

[0110] In this way, the display mode of the display unit can be changed by the simple operation of simply pressing the movable part of the mode change switch, which protrudes from the side of the sensor unit when not pressed, thereby improving user convenience.

[0111] In this embodiment, a measurement start switch for starting measurement by the inertial measurement unit may also be included.

[0112] In this way, the inertial measurement unit can start measurement by simply operating the measurement start switch, improving user convenience.

[0113] In this embodiment, when a direction from the inertial measurement unit toward the mounting surface of the inertial measurement unit is defined as a first direction and a direction perpendicular to the first direction is defined as a second direction, the measurement start switch may have a movable part that is movable in the second direction. Then, movement of the movable part of the measurement start switch may instruct the inertial measurement unit to start measurement.

[0114] In this manner, the user can instruct the inertial measurement unit to start measurement by a simple operation of moving the movable part of the measurement start switch in a second direction perpendicular to a first direction from the inertial measurement unit toward the mounting surface.

[0115] In this embodiment, a memory and a teach switch for issuing an instruction to store measurement reference information for inertial measurement in the memory may also be included.

[0116] In this way, it is possible to have the inertial measurement unit learn measurement reference information corresponding to the measurement object, and to realize measurement using the measurement reference information.

[0117] In this embodiment, when a direction from the inertial measurement unit toward the mounting surface of the inertial measurement unit is defined as a first direction and a direction perpendicular to the first direction is defined as a second direction, the teach switch may have a movable part that is movable in the second direction. Then, movement of the movable part of the teach switch may instruct storage of the measurement reference information in the memory.

[0118] In this manner, the user can instruct the measurement reference information to be stored in memory by the simple operation of moving the movable part of the teach switch in a second direction perpendicular to the first direction from the inertial measurement device toward the mounting surface.

[0119] In addition, this embodiment may include a substrate on which a mode changeover switch is provided.

[0120] In this way, the mode changeover switch can be mounted in the inertial measurement unit in a compact manner.

[0121] In this embodiment, at least one fixing member that detachably fixes the sensor unit and the substrate may be included.

[0122] In this way, the sensor units and boards incorporated in the inertial measurement unit can be freely changed, improving the expandability of the inertial measurement unit.

[0123] In this embodiment, the substrate may include a first substrate and a second substrate, the mode change switch may be provided on the first substrate, the display unit may be provided on the second substrate, and the first substrate may be provided between the sensor unit and the second substrate.

[0124] In this way, when the mode change switch provided on the first substrate is operated, the display mode of the display unit provided on the second substrate is changed. Since the mode change switch is provided on the first substrate provided between the sensor unit and the second substrate, the operability of the mode change switch can be improved.

[0125] In addition, in this embodiment, the display unit may display the judgment result based on the first judgment criterion in the first display mode as the judgment result of the judgment process based on the detection information, and may display the judgment result based on the second judgment criterion in the second display mode.

[0126] In this way, when the user operates the mode change switch, the results of measurements made under different criteria are displayed on the display unit, making it possible to present the user with the results of measurements made under a variety of criteria.

[0127] In this embodiment, the first criterion may be a VC (Vibration Criteria) criterion, and the second criterion may be a criterion set by the user.

[0128] In this way, it becomes possible to use the mode change switch to switch between a first display mode in which the judgment results based on the VC judgment criteria are displayed, and a second display mode in which the judgment results based on the judgment criteria set by the user are displayed.

[0129] In this embodiment, the unit of information displayed based on the detection information may be changed by the mode change switch.

[0130] In this way, measurement values ​​can be displayed to the user in various units by operating the mode changeover switch, improving user convenience.

[0131] In addition, this embodiment may include a processing unit that performs processing based on the detection information, and the processing unit may perform an analysis process of the vibration information of the detection target, and the display unit may display the result information of the analysis process.

[0132] In this way, the processing unit performs an analysis process of the detection information of the inertial sensor, and the display unit displays the result information of the analysis process, allowing the user to easily understand the vibration state of the detection target.

[0133] In the present embodiment, the sensor unit may include a sensor board on which at least one acceleration sensor is provided as at least one inertial sensor, and a case that houses the sensor board.

[0134] In this way, the display based on the detection information of the acceleration sensor provided on the sensor board of the sensor unit can be performed on the display unit provided in the inertial measurement unit, thereby simplifying the task of checking the measurement results.

[0135] In the present embodiment, the sensor unit may include a sensor substrate on which at least one acceleration sensor and at least one angular velocity sensor are provided as at least one inertial sensor, and a case for accommodating the sensor substrate.

[0136] In this way, the display based on the detection information from the acceleration sensor and angular velocity sensor provided on the sensor board of the sensor unit can be performed on the display unit provided in the inertial measurement device, thereby simplifying the task of checking the measurement results.

[0137] Although the present embodiment has been described in detail as above, it will be easily understood by those skilled in the art that many modifications are possible without substantially departing from the novel matters and effects of the present disclosure. Therefore, all such modifications are intended to be included in the scope of the present disclosure. For example, a term described at least once in the specification or drawings together with a different term having a broader meaning or synonymy can be replaced with that different term anywhere in the specification or drawings. In addition, all combinations of the present embodiment and modifications are also included in the scope of the present disclosure. Furthermore, the configuration and operation of the inertial measurement device are not limited to those described in the present embodiment, and various modifications are possible. [Explanation of symbols]

[0138] 2... mounting surface, 10... inertial measurement unit, 11, 12, 13... fixing member, 14, 15, 16, 17, 18, 19 ... Spacer, 20 ... Sensor unit, 21, 22, 23...hole portion, 24...case, 26...connector, 30X, 30Y, 30Z…Acceleration sensor, 32…Acceleration sensor, 34X, 34Y, 34Z...Angular velocity sensor, 40...Substrate, 41, 42, 43...hole portion, 44...support portion, 46...connector, 48...circuit board, 50: processing unit, 60: display unit, 62, 64: light-emitting element group, 70: display unit, 72...display panel, 80...mode change switch, 82...reset switch, 84... measurement start switch, 81, 83, 85... movable part, 86... slide switch, 90... wireless communication unit, 92... antenna unit, 94... communication board, 100, 101... interface unit, 102, 103, 104... memory, 106...power supply interface, 150...base, 151, 152, 153...holes, 154: recessed portion; 156, 157: fixed portion; 160: protective plate; 161, 162, 163...hole portion, 164...slit hole, 170...protective plate, 171, 172, 173...hole portion, 174, 175, 176...window portion, 210: sensor substrate, 212: processing section, 220: container, 222: lid section, 224...sealing member, DR1, DR2, DR3, DR4, DR5, DR6...direction, SD1, SD2, SD3, SD4...side

Claims

1. When two directions perpendicular to each other are defined as a first direction and a second direction, Along the first direction, A second substrate on which a display unit is provided; a first substrate on which a mode changeover switch is provided; a sensor unit including at least one inertial sensor; With the base, overlap, A space is provided between the second substrate and the first substrate, The base is fixed to the sensor unit, The display unit performs a display based on the detection information of the inertial sensor, The display mode of the display unit is changed by the mode change switch, As a result of the determination process based on the detection information, in the first display mode, a first determination criterion In the first display mode, the judgment result based on the first judgment criterion is displayed. death, The first criterion is a VC (Vibration Criteria) criterion, and the second criterion is is a judgment criterion set by a user.

2. In claim 1, the mode changeover switch includes a movable portion movable in the second direction, The display mode of the display unit is changed by moving the movable portion of the mode change switch.

23. An inertial measurement system comprising: an inertial measurement device configured to instruct a changeover of a position of the inertial measurement device;

3. In claim 2, The movable portion of the mode changeover switch is in the first direction when not pressed. and a sensor unit provided on the sensor base, the sensor unit being disposed on the sensor base. Device.

4. In claim 1, An inertial measurement device comprising: a measurement start switch for starting measurement Measuring equipment.

5. In claim 4, the measurement start switch includes a movable portion movable in the second direction, The measurement start switch is operated to start measurement by the inertial measurement unit.

1. An inertial measurement system comprising:

6. In claim 1, Memory and A teach switch for instructing the measurement reference information of the inertial measurement to be stored in the memory. An inertial measurement system comprising:

7. In claim 6, the teach switch includes a movable portion movable in the second direction, The movable portion of the teach switch is moved to the memory of the measurement reference information. An inertial measurement system in which storage of the

8. In any one of claims 1 to 7, At least one fixing portion that detachably fixes the sensor unit and the first substrate 16. An inertial measurement system comprising:

9. In any one of claims 1 to 8, The unit of information displayed based on the detected information is changed by the mode change switch.

1. An inertial measurement unit comprising:

10. In any one of claims 1 to 9, a processing unit that performs processing based on the detection information; The processing unit performs an analysis process of vibration information of a detection target, The inertial measurement system according to claim 1, wherein the display unit displays result information of the analysis processing.

11. In any one of claims 1 to 10, The sensor unit includes: At least one acceleration sensor is provided as the at least one inertial sensor. A sensor substrate, a case for accommodating the sensor substrate; 1. An inertial measurement device comprising:

12. In any one of claims 1 to 11, The sensor unit includes: At least one inertial sensor may include at least one acceleration sensor. a sensor substrate on which at least one angular velocity sensor is provided; a case for accommodating the sensor substrate; 1. An inertial measurement device comprising:

13. The display unit displays information based on the detection information of the inertial sensor. Switching the display mode of the display unit based on an instruction from a mode switching switch; The display mode is a first display mode for displaying a result of a judgment based on the detection information according to a first judgment criterion; a second display mode for displaying a result of a judgment based on the detection information according to a second judgment criterion; Including, The first criterion is a Vibration Criteria (VC) criterion, The display method according to claim 1, wherein the second criterion is a criterion set by a user.

14. In claim 13, The detection information is any one of acceleration information, angular velocity information, and information based on these information. A display method comprising:

15. In claim 14, Based on the detection information, an analysis process is performed on any one of the vibration, inclination, and attitude of the measurement target. stomach, The display unit is A display method, comprising: displaying display information corresponding to an analysis result of the analysis process.

16. In claim 15, The analysis process includes: FFT (Fast Fourier Transform Analysis) is performed to analyze the frequency components of vibration information. A display method comprising:

Images