Film forming device

Abstract

To provide a film deposition apparatus capable of easily checking existence of an abnormality of a facility for supplying electricity and a coolant.SOLUTION: A film deposition apparatus includes: a film deposition source 100 for forming a thin film on a substrate S arranged in a chamber 10; an air box 210 having an inside maintained in an air environment and supporting and moving the film deposition source 100; a connection mechanism 240 provided so as to connect the chamber 10 with the air box 210, communicating the outside of the chamber 10 with the inside of the air box 210 and moving accompanied with the movement of the air box 210; and a supply facility included in the inside of the connection mechanism 240 and for supplying electricity and a coolant to the film deposition source 100; and checking means 300 included in the inside of the connection mechanism 240 and for checking whether an abnormality of the supply facility occurs.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a film forming apparatus for forming a thin film on a substrate. [Background technology]

[0002] In a film formation apparatus, a technique is known in which an atmospheric box and an atmospheric arm are provided to keep the inside of the chamber in an atmospheric state in order to supply electricity and a coolant from outside the chamber, the inside of which is a vacuum atmosphere, to a film formation source for forming a thin film on a substrate (see Patent Document 1). In such a technique, if any abnormality occurs, it is necessary to return the inside of the chamber to atmospheric pressure, then open the inside of the atmospheric arm and check for abnormalities in the equipment for supplying electricity and a coolant. Therefore, it takes a long time to investigate the cause of the abnormality. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-95609 Summary of the Invention [Problem to be solved by the invention]

[0004] An object of the present invention is to provide a film forming apparatus that can easily check for the presence or absence of an abnormality in the equipment that supplies electricity and a coolant. [Means for solving the problem]

[0005] The present invention employs the following means to solve the above problems.

[0006] That is, the film forming apparatus of the present invention is a deposition source for forming a thin film on a substrate disposed in the chamber; a support table whose interior is kept in an atmospheric environment and which supports and moves the film formation source; a connecting mechanism that is provided to connect the chamber and the support base, communicates the outside of the chamber with the inside of the support base, and moves in accordance with the movement of the support base; a supply facility provided inside the connection mechanism and configured to supply electricity and a cooling liquid to the deposition source; The connecting mechanism is provided inside the connecting mechanism. The coupling mechanism has an acquisition means for acquiring an electromagnetic wave inside the coupling mechanism, and the acquisition means acquires an image or image data based on the electromagnetic wave acquired. A confirmation means for confirming whether or not an abnormality has occurred in the supply facility. It is characterized by:

[0007] In addition, a film forming apparatus according to another aspect of the present invention includes: a deposition source for forming a thin film on a substrate disposed in the chamber; a support table whose interior is kept in an atmospheric environment and which supports and moves the film formation source; a connecting mechanism that is provided to connect the chamber and the support base, communicates the outside of the chamber with the inside of the support base, and moves in accordance with the movement of the support base; a supply facility provided inside the connection mechanism and configured to supply electricity and a cooling liquid to the deposition source; The present invention is characterized by comprising an acquisition means provided inside the connecting mechanism for acquiring electromagnetic waves inside the connecting mechanism. Effect of the Invention

[0008] As described above, according to the present invention, the presence or absence of an abnormality in equipment that supplies electricity or coolant can be easily checked. [Brief description of the drawings]

[0009] [Figure 1] 1 is a schematic configuration diagram of an internal configuration of a film forming apparatus according to an embodiment, as viewed from above; [Diagram 2] 1 is a schematic cross-sectional view of an internal configuration of a film forming apparatus according to an embodiment of the present invention; [Diagram 3] 1 is a schematic cross-sectional view of an internal configuration of a film forming apparatus according to an embodiment of the present invention; [Figure 4] FIG. 4 is a schematic cross-sectional view showing a part of a connecting mechanism according to the embodiment. [Diagram 5] FIG. 2 is a diagram showing the layout of a confirmation means according to the first embodiment. [Figure 6] FIG. 11 is a diagram showing the layout of a confirmation means according to a second embodiment. [Figure 7] FIG. 11 is a diagram showing the layout of a confirmation means according to a third embodiment. [Figure 8] FIG. 13 is a diagram showing the layout of a confirmation means according to a fourth embodiment. [Figure 9] FIG. 1 is a schematic cross-sectional view illustrating an example of an electronic device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, the embodiment of the present invention will be described in detail with reference to the drawings. However, the dimensions, materials, shapes, relative positions, and the like of the components described in the embodiment are not intended to limit the scope of the present invention unless otherwise specified.

[0011] (Embodiment) A film forming apparatus according to an embodiment of the present invention will be described with reference to Figs. 1 to 4. In this embodiment, a sputtering apparatus will be described as an example of a film forming apparatus. Fig. 1 is a schematic diagram showing the internal configuration of a film forming apparatus according to an embodiment of the present invention, as viewed from above. Fig. 2 is a schematic diagram showing the internal configuration of the film forming apparatus, as viewed in cross section in the direction of arrow V1 in Fig. 1. Fig. 3 is a schematic diagram showing the internal configuration of the film forming apparatus, as viewed in cross section in the direction of arrow V2 in Fig. 1. Fig. 4 is a schematic cross-sectional view showing a part of a connection mechanism according to an embodiment of the present invention, showing the vicinity of a part of an atmospheric arm in cross section.

[0012] <Overall configuration of the film formation device> The overall configuration of a film formation apparatus 1 according to this embodiment will be described with reference to Figures 1 to 3. The film formation apparatus 1 includes a chamber 10 inside which a vacuum atmosphere is maintained, a film formation source 100 provided in the chamber 10, and a driving device 200 for moving the film formation source 100.

[0013] The chamber 10 is provided with a substrate holding mechanism 11 for holding a substrate S, and a mask holding mechanism 12 for holding a mask M. These holding mechanisms keep the substrate S and mask M stationary during the film forming operation (sputtering operation). The chamber 10 is an airtight container, and the interior thereof is maintained in a vacuum or reduced pressure state by an exhaust pump 20. By opening a gas supply valve 30 and supplying gas into the chamber 10, the gas atmosphere (or pressure zone) can be appropriately changed to an appropriate gas atmosphere (or pressure zone) for the process. The entire chamber 10 is electrically grounded by a ground circuit 40.

[0014] The driving device 200 includes an atmospheric box 210 as a support base for supporting the film formation source 100, a pair of guide rails 221, 222 for guiding the movement of the atmospheric box 210, and a moving mechanism 230 for reciprocating the atmospheric box 210. The driving device 200 also includes a connecting mechanism 240 that is provided to connect the chamber 10 and the atmospheric box 210 and moves in accordance with the movement of the atmospheric box 210. The atmospheric box 210 is hollow inside, and the connecting mechanism 240 communicates the outside of the chamber 10 with the inside of the atmospheric box 210, so that the inside of the atmospheric box 210 is kept in an atmospheric environment. By adopting such a configuration, a wiring 51 connected to a power source 50 provided outside the chamber 10 and a cooling pipe 61 connected to a cooling liquid supply device 60 also provided outside the chamber 10 can be connected to the film formation source 100.

[0015] The atmospheric box 210 is configured to move along a pair of guide rails 221, 222 by a moving mechanism 230. The moving mechanism 230 employs a ball screw mechanism. The atmospheric box 210 includes a ball screw 231 and a drive source 232 such as a motor that rotates the ball screw 231. However, the movement mechanism for reciprocating the atmospheric box 210 is not limited to the ball screw mechanism, and various known techniques such as a rack and pinion mechanism may be used.

[0016] The film forming source 100 includes a target 110, a support block 120 and an end block 130 that support both ends of the target 110. In this embodiment, two targets 110 are provided, and one support block 120 and one end block 130 are provided for each of the two targets 110. The target 110 is a cylindrical member that rotates during sputtering, and is also called a rotary cathode. The support block 120 and the end block 130 are fixed to the upper surface of the atmospheric box 210. The target 110 includes a cylindrical target body and a cathode that is an electrode disposed on the inner circumference of the target body. The target 110 is supported rotatably by the support block 120 and the end block 130, and is configured to rotate during sputtering by a drive source such as a motor (not shown) provided in the end block 130. In the case of a magnetron sputtering type sputtering device, in order to generate a magnetic field (leakage magnetic field) between the target 110 and the substrate S, a magnet is provided inside the cathode.

[0017] In the film forming source 100 configured as above, a certain voltage or more is applied between the target 110 and the chamber 10 serving as the anode, whereby plasma is generated between them. Then, positive ions in the plasma collide with the target 110, causing particles of the target material to be emitted from the target 110 (target body). The particles emitted from the target 110 repeatedly collide with each other, and neutral atoms of the target material among the emitted particles are deposited on the substrate S. As a result, a thin film is formed on the substrate S by the constituent atoms of the target 110. In addition, in the case of the magnetron sputtering method, the above-mentioned leakage magnetic field can concentrate the plasma in a predetermined region between the target 110 and the substrate S. As a result, sputtering is performed efficiently, and the deposition rate of the target material on the substrate S can be improved. Furthermore, in the film forming source 100 according to this embodiment, the target 110 is configured to rotate during sputtering. As a result, the consumption region of the target 110 (the region eroded by erosion) is not concentrated in one part, and the utilization efficiency of the target 110 can be improved.

[0018] <Connection mechanism> The connection mechanism 240 will be described in more detail. The connection mechanism 240 is composed of a plurality of atmospheric arms, both of which are pivotally supported at both ends and are hollow inside. More specifically, the connection mechanism 240 includes a first atmospheric arm 241 and a second atmospheric arm 242. The first atmospheric arm 241 is configured such that one end (first end 241P shown in the embodiment) is pivotally supported relative to the bottom plate of the chamber 10. The second atmospheric arm 242 is pivotally supported at one end (second end 242Q shown in the embodiment) relative to the other end (second end 241Q shown in the embodiment) of the first atmospheric arm 241. The other end (first end 242P shown in the embodiment) of the second atmospheric arm 242 is pivotally supported relative to the atmospheric box 210.

[0019] 4 shows a schematic cross-sectional view of the structure near one end of the first atmospheric arm 241. As shown in the figure, a through hole 10a is provided in the bottom plate of the chamber 10, and a cylindrical protrusion 241a is provided on the first atmospheric arm 241. A stepped cylindrical member 241b is provided between the bottom plate of the chamber 10 and the first atmospheric arm 241 to rotatably connect them. One end of this cylindrical member 241b is inserted into the through hole 10a provided in the bottom plate of the chamber 10. Also, the protrusion 241a provided on the first atmospheric arm 241 41a is inserted from the other end side of the cylindrical member 241b. The annular gap between the through hole 10a and the cylindrical member 241b and the annular gap between the protruding portion 241a and the cylindrical member 241b are sealed by seal rings 241c and 241d, respectively.

[0020] With the above-mentioned configuration, the first atmospheric arm 241 is supported rotatably relative to the bottom plate of the chamber 10, while the hollow portion inside the first atmospheric arm 241 is separated from the space outside the first atmospheric arm 241 (the internal space of the chamber 10). In other words, the inside of the chamber 10 can be maintained in a vacuum state (or a reduced pressure state). Note that the mechanism in which the first atmospheric arm 241 and the second atmospheric arm 242 are rotatably supported and the mechanism in which the second atmospheric arm 242 and the atmospheric box 210 are rotatably supported are similar mechanisms, and therefore a description thereof will be omitted. Also, in this embodiment, a case in which two arms are used has been shown, but if it is desired to increase the moving distance of the atmospheric box 210, three or more arms can be connected.

[0021] The driving device 200 including the connection mechanism 240 configured as described above allows the film formation source 100 fixed to the atmospheric box 210 to move back and forth together with the atmospheric box 210. This allows the film formation operation (sputtering) to be performed on the substrate S by operating the film formation source 100 during at least one of the forward and backward movements. Therefore, even when forming a film on a substrate S having a large area, a thin film can be continuously formed from one end side to the other end side of the substrate S by performing the film formation operation while moving the film formation source 100 using the driving device 200.

[0022] As described above, supply equipment (wiring 51 and cooling pipe 61) for supplying electricity and cooling liquid to the film formation source 100 is provided inside the connection mechanism 240 (first atmospheric arm 241 and second atmospheric arm 242). A single wiring 51 and a cooling pipe 61 may be provided, or multiple wiring 51 and cooling pipe 61 may be provided. In the film formation apparatus 1 according to this embodiment, a confirmation means 300 for confirming whether or not an abnormality has occurred in the supply equipment is provided inside the connection mechanism 240. Examples of abnormalities in the supply equipment include a break in the wiring 51 and leakage of cooling liquid from the cooling pipe 61.

[0023] In addition, in the film forming apparatus 1 according to the present embodiment, a processing device 300X for processing data obtained by the confirmation means 300 is provided outside the chamber 10. The confirmation means 300 can employ various means as shown in the following examples, and the processing device 300X can employ a device corresponding to the confirmation means 300. For example, when photographed data is sent from the confirmation means 300, a display device (such as a display) for displaying the photographed image can be employed as the processing device 300X. In this case, an inspector can confirm the presence or absence of an abnormality in the supply equipment from the photographed image. In addition, a device (such as a computer) capable of determining the presence or absence of an abnormality in the supply equipment from the obtained data can be employed as the processing device 300X. That is, a device that analyzes the data of the photographed image obtained and determines the presence or absence of an abnormality in the supply equipment can be used. In addition, a device that determines the presence or absence of an abnormality in the supply equipment based on the measured temperature, measured humidity, and detection of water leakage can also be applied. The confirmation means 300 and the processing device 300X can be electrically connected by wiring through the inside of the connection mechanism 240, or data can be transmitted and received wirelessly without using wiring. FIGS. 2 and 3 show a case where data is transmitted and received wirelessly.

[0024] <Advantages of the film forming apparatus according to this embodiment> According to the film forming apparatus 1 configured as above, the presence or absence of an abnormality in the equipment for supplying electricity and coolant can be easily checked without opening the inside of the atmospheric arm by providing the checking means 300. Therefore, the time required for the work of checking the cause of the abnormality can be shortened. In this embodiment, a sputtering apparatus is used as an example of a film forming apparatus. However, the present invention is also applicable to a case where the film forming apparatus is a vacuum deposition apparatus (where the film forming source is an evaporation source).

[0025] Some specific examples of the checking means 300 will be described below.

[0026] Example 1 Fig. 5 shows the configuration of the confirmation means according to the first embodiment of the present invention. Fig. 5 is a diagram showing the layout of the confirmation means according to the first embodiment of the present invention, and shows a simplified layout relationship between the confirmation means provided inside the connecting mechanism and the connecting mechanism. Fig. 5(a) corresponds to a diagram showing the connecting mechanism as seen from above, and Fig. 5(b) corresponds to a diagram showing the connecting mechanism as seen from the front. In Fig. 5, the outlines of the first atmospheric arm 241 and the second atmospheric arm 242 which constitute the connecting mechanism are shown by dotted lines.

[0027] As the confirmation means according to this embodiment, a first camera 301 and a second camera 302 are employed as acquisition means for acquiring electromagnetic waves inside the first atmospheric arm 241 and the second atmospheric arm 242 constituting the connecting mechanism. These first camera 301 and second camera 302 are configured to be capable of acquiring visible light or infrared light in order to photograph the supply facility. Note that, of the first camera 301 and the second camera 302, a camera capable of acquiring visible light may be employed as one, and a camera capable of acquiring infrared light may be employed as the other.

[0028] When cameras capable of acquiring visible light are employed as the first camera 301 and the second camera 302, it is desirable to provide a first light source 303 and a second light source 304 for irradiating the supply facility inside the first atmospheric arm 241 and the second atmospheric arm 242, respectively. In the case of a camera capable of acquiring visible light, an image display device such as a display can be employed as the processing device 300X to display the captured image. This allows the inspector to check whether there is an abnormality in the supply facility from the captured image. Also, when a camera capable of acquiring infrared light (a so-called infrared camera) is employed, infrared light emitted from the subject of the image such as the supply facility can be visualized and the captured image can be displayed on the display of the processing device 300X. Thus, similarly, the inspector can check whether there is an abnormality in the supply facility from the captured image. Note that a device (such as a computer) capable of determining whether there is an abnormality in the supply facility from the obtained image data may be employed as the processing device 300X. That is, the processing device 300X may analyze the data of the captured image to determine whether there is an abnormality in the supply facility.

[0029] The first camera 301 is disposed in the first atmospheric arm 241 so as to photograph from the first end 241P of the first arm 241 toward the second end 241Q on the side of the joint 243 with the second atmospheric arm 242. The second camera 302 is disposed in the second atmospheric arm 242 so as to photograph from the first end 242P of the second arm 242 toward the second end 242Q on the side of the joint 243 with the first atmospheric arm 241. With the above configuration, the first camera 301 can photograph the entire supply equipment disposed in the first atmospheric arm 241, and the second camera 302 can photograph the entire supply equipment disposed in the second atmospheric arm 242.

[0030] Here, friction is likely to occur between the wiring 51 and the cooling pipe 61 near the inside of the connection part 243 between the first atmospheric arm 241 and the second atmospheric arm 242 when the first atmospheric arm 241 and the second atmospheric arm 242 are operated. In FIG. 5(b), the state of the wiring 51 and the cooling pipe 61 near the connection part 243 is partially shown by solid lines. These wiring 51 and cooling pipe 61 are often provided in multiples, and when the first atmospheric arm 241 and the second atmospheric arm 242 are operated, a load that twists the wiring 51 and the cooling pipe 61 acts particularly near the connection part 243, and friction is likely to occur between the wiring 51 and the cooling pipe 61. For this reason, breakage or cooling failure near the connection part 243 may occur. It is desirable to be able to check for leaks.

[0031] In the above-mentioned first camera 301 and second camera 302, the inside of the connecting part 243 is a blind spot in the shooting range. Therefore, as shown in FIG. 5(b), it is desirable to install a reflecting mirror 305. This allows the second camera 302 to shoot the inside of the connecting part 243, which is a blind spot area. Of course, a reflecting mirror may be provided that allows the first camera 301 to shoot the inside of the connecting part 243. Also, a camera that shoots the inside of the connecting part 243 can be provided separately.

[0032] In this embodiment, a first pendulum 306 is provided within the range of photography by the first camera 301, and a second pendulum 307 is provided within the range of photography by the second camera 302. This makes it possible to check whether the first atmosphere arm 241 and the second atmosphere arm 242 are vibrating abnormally and to check for air leaks, depending on the way the pendulums swing.

[0033] Example 2 Fig. 6 shows the configuration of the confirmation means according to the second embodiment of the present invention. Fig. 6 is a diagram showing the layout of the confirmation means according to the second embodiment of the present invention, and shows a simplified layout relationship between the confirmation means provided inside the connecting mechanism and the connecting mechanism. Fig. 6(a) corresponds to a front view of the connecting mechanism, and Fig. 6(b) corresponds to a top view of the second arm. In Fig. 6, the outlines of the first atmospheric arm 241 and the second atmospheric arm 242 that constitute the connecting mechanism are shown by dotted lines.

[0034] As a confirmation means according to this embodiment, a first camera 301 and a second camera 302 are used as acquisition means for acquiring electromagnetic waves inside the first atmospheric arm 241 and the second atmospheric arm 242 constituting the connecting mechanism, similarly to the first embodiment. The configurations of the first camera 301 and the second camera 302 themselves are as described in the first embodiment.

[0035] In addition, when cameras capable of acquiring visible light are used as the first camera 301 and the second camera 302, it is desirable to provide the first light source 303 and the second light source 304, as described in the first embodiment. The processing device 300X is also as described in the first embodiment.

[0036] The first camera 301 disposed inside the first atmospheric arm 241 is fixed to the second atmospheric arm 242 by a support 301a. As a result, the first camera 301 is disposed so as to take an image from the second end 241Q on the side of the connection with the second atmospheric arm 242 toward the first end 241P on the opposite side of the connection in the first atmospheric arm 241. The second camera 302 disposed inside the second atmospheric arm 242 is fixed to the first atmospheric arm 241 by a support 302a. As a result, the second camera 302 is disposed so as to take an image from the second end 242Q on the side of the connection with the first atmospheric arm 241 toward the first end 242P on the opposite side of the connection in the second atmospheric arm 242. With the above configuration, the first camera 301 can take an image of the entire supply equipment disposed in the first atmospheric arm 241, and the second camera 302 can take an image of the entire supply equipment disposed in the second atmospheric arm 242.

[0037] In this embodiment, the first camera 301 disposed inside the first atmospheric arm 241 is fixed to the second atmospheric arm 242 by a support 301a. The second camera 302 disposed inside the second atmospheric arm 242 is fixed to the first atmospheric arm 241 by a support 302a. As a result, when the first atmospheric arm 241 and the second atmospheric arm 242 rotate relatively to each other, the shooting ranges of the first camera 301 and the second camera 302 change, so that even if the shooting range of the camera is narrow, it is possible to shoot a wide range. 1B shows the second camera 302, and it can be seen that the shooting range of the second camera 302 changes as the second atmospheric arm 242 rotates relative to the first atmospheric arm 241 to which the second camera 302 is fixed.

[0038] Although not shown, it is preferable to provide a plurality of reflecting mirrors or a separate camera in this embodiment as well, so that the inside of connecting part 243 can be photographed. Furthermore, in this embodiment as well, a first pendulum may be provided within the photographing range of first camera 301, and a second pendulum may be provided within the photographing range of second camera 302.

[0039] Example 3 Fig. 7 shows the configuration of the confirmation means according to the third embodiment of the present invention. Fig. 7 is a diagram showing the layout of the confirmation means according to the third embodiment of the present invention, and shows a simplified layout relationship between the confirmation means provided inside the connecting mechanism and the connecting mechanism. Fig. 7(a) corresponds to a diagram showing the connecting mechanism as seen from above, and Fig. 7(b) corresponds to a diagram showing the connecting mechanism as seen from the front. In Fig. 7, the outlines of the first atmospheric arm 241 and the second atmospheric arm 242 which constitute the connecting mechanism are shown by dotted lines.

[0040] As a confirmation means according to the present embodiment, similarly to the first embodiment, a camera 310 is used as an acquisition means for acquiring electromagnetic waves inside the first atmospheric arm 241 and the second atmospheric arm 242 constituting the connecting mechanism. The camera 310 according to the present embodiment is a 360° camera capable of capturing an entire image of a full celestial sphere or a hemisphere. As in the first embodiment, the camera 310 is configured to be capable of acquiring visible light or infrared light in order to capture an image of the supply facility.

[0041] In addition, when a camera capable of acquiring visible light is used as the camera 310, it is desirable to provide the first light source 303 and the second light source 304, as described in the first embodiment. The processing device 300X is also as described in the first embodiment.

[0042] The camera 310 is provided at the connection 243 between the first atmospheric arm 241 and the second atmospheric arm 242. The camera 310 is configured to take images toward the first end 241P on the opposite side to the connection 243 side of the first atmospheric arm 241, and to take images toward the first end 242P on the opposite side to the connection 243 side of the second atmospheric arm 242. In this embodiment, a first reflecting mirror 311 is provided inside the first atmospheric arm 241, and a second reflecting mirror 312 is provided inside the second atmospheric arm 242, so that the camera 310 can take images of the entire interior of each arm.

[0043] Also, although not specifically shown, in this embodiment as well, a first pendulum provided in the first atmospheric arm 241 and a second pendulum provided in the second atmospheric arm 242 may be provided within the shooting range of the camera 310.

[0044] Example 4 Fig. 8 shows the configuration of the confirmation means according to the fourth embodiment of the present invention. Fig. 8 is a diagram showing the layout of the confirmation means according to the fourth embodiment of the present invention, and shows a simplified layout relationship between the confirmation means provided inside the connecting mechanism and the connecting mechanism. Figs. 8(a) and (b) correspond to views of the connecting mechanism as seen from the front. In Fig. 8, the outlines of the first atmospheric arm 241 and the second atmospheric arm 242 that constitute the connecting mechanism are shown by dotted lines.

[0045] In the first to third embodiments, the confirmation means is a camera capable of acquiring visible light or infrared light as an acquisition means for acquiring electromagnetic waves, whereas in the present embodiment, another example of the confirmation means is shown.

[0046] In the configuration shown in Fig. 8(a), a radar device 320 integrally including a radar that generates radio waves and an antenna as an acquisition means is provided inside the first air arm 241. The antenna in this radar device 320 is configured to acquire reflected waves of the radar. The radar device 320 is configured to generate radio waves from the first end 241P toward the second end 241Q of the first air arm 241. The processing device 300X can detect the presence or absence of a break in the wire or a leak of the coolant based on the data (information on the reflected waves of the radio waves) obtained from the radar device 320, and can determine the presence or absence of an abnormality in the supply facility.

[0047] 8(a), an ultrasonic device 330 is provided inside the second atmospheric arm 242, which is integrally equipped with an ultrasonic source that generates ultrasonic waves and a receiver as an acquisition means. The receiver in the ultrasonic device 330 is configured to acquire reflected waves of ultrasonic waves from the ultrasonic source. The ultrasonic device 330 is configured to generate ultrasonic waves from the first end 242P toward the second end 242Q of the second atmospheric arm 242. The processing device 300X can detect the presence or absence of a break in the wire or a leak of the cooling liquid based on the data (information on the reflected waves of ultrasonic waves) obtained from the ultrasonic device 330, and can determine the presence or absence of an abnormality in the supply facility.

[0048] 8(a) shows a case where the radar device 320 is provided inside the first atmospheric arm 241, and the ultrasonic device 330 is provided inside the second atmospheric arm 242. However, it is also possible to provide the radar device 320 inside both arms, or to provide the ultrasonic device 330 inside both arms. Of course, it is also possible to provide the ultrasonic device 330 inside the first atmospheric arm 241, and to provide the radar device 320 inside the second atmospheric arm 242. It is also possible to adopt a configuration in which the radar device 320 and the ultrasonic device 330 shown in this embodiment are combined with the configuration of the above-mentioned embodiment 1, 2 or 3.

[0049] In the configuration shown in Fig. 8(b), a thermometer / hygrometer 340 is provided inside the first atmosphere arm 241 as a confirmation means. The processing device 300X can detect leakage of the cooling liquid based on data (temperature and humidity) obtained from the thermometer / hygrometer 340, and can determine whether there is an abnormality in the supply equipment. Note that instead of the thermometer / hygrometer 340, only a thermometer for measuring temperature or only a hygrometer for measuring humidity may be provided. Also, as a means for measuring temperature, an infrared thermometer can be used as an acquisition means for measuring temperature by infrared rays.

[0050] 8(b), a water leakage sensor 350 serving as a confirmation means for detecting water leakage is provided inside the second atmosphere arm 242. The processing device 300X can detect the leakage of the cooling liquid based on the data (information on the detection of water leakage) obtained from the water leakage sensor 350, and can determine whether or not there is an abnormality in the supply facility.

[0051] 8(b) shows a case where a thermometer / hygrometer 340 is provided inside the first atmospheric arm 241, and a water leakage sensor 350 is provided inside the second atmospheric arm 242. However, it is also possible to provide the thermometer / hygrometer 340 inside both arms, or to provide the water leakage sensor 350 inside both arms. Of course, it is also possible to provide the water leakage sensor 350 inside the first atmospheric arm 241, and to provide the thermometer / hygrometer 340 inside the second atmospheric arm 242. It is also possible to adopt a configuration in which the thermometer / hygrometer 340 (only a thermometer or only a hygrometer is also possible) and the water leakage sensor 350 shown in this embodiment are combined with the configuration of the above-mentioned first, second or third embodiment.

[0052] <Electronic device manufacturing method> An example of a method for manufacturing an electronic device using the film forming apparatus shown in the above embodiment will be described. The following shows the configuration of an organic EL display device as an example of an electronic device, and the method for manufacturing the organic EL display device. This illustrates the law.

[0053] First, the organic EL display device to be manufactured will be described. Fig. 9(a) is an overall view of an organic EL display device 500, and Fig. 9(b) shows the cross-sectional structure of one pixel.

[0054] As shown in FIG. 9(a), a plurality of pixels 502 each including a plurality of light-emitting elements are arranged in a matrix in a display region 501 of an organic EL display device 500. Although details will be described later, each light-emitting element has a structure including an organic layer sandwiched between a pair of electrodes. Note that the pixel here refers to the smallest unit that allows a desired color to be displayed in the display region 501. In the case of the organic EL display device according to this embodiment, the pixel 502 is configured by a combination of a first light-emitting element 502R, a second light-emitting element 502G, and a third light-emitting element 502B that emit light different from each other. The pixel 502 is often configured by a combination of a red light-emitting element, a green light-emitting element, and a blue light-emitting element, but may also be a combination of a yellow light-emitting element, a cyan light-emitting element, and a white light-emitting element, and is not particularly limited as long as it is at least one color.

[0055] Fig. 9(b) is a schematic partial cross-sectional view taken along line VV in Fig. 9(a). A pixel 502 is made up of a plurality of light-emitting elements, and each light-emitting element has a first electrode (anode) 504, a hole transport layer 505, any one of light-emitting layers 506R, 506G, and 506B, an electron transport layer 507, and a second electrode (cathode) 508 on a substrate 503. Among these, the hole transport layer 505, the light-emitting layers 506R, 506G, and 506B, and the electron transport layer 507 correspond to organic layers. In this embodiment, the light-emitting layer 506R is an organic EL layer that emits red light, the light-emitting layer 506G is an organic EL layer that emits green light, and the light-emitting layer 506B is an organic EL layer that emits blue light. The light-emitting layers 506R, 506G, and 506B are formed in patterns corresponding to light-emitting elements (sometimes referred to as organic EL elements) that emit red, green, and blue light, respectively.

[0056] The first electrode 504 is formed separately for each light-emitting element. The hole transport layer 505, the electron transport layer 507, and the second electrode 508 may be formed in common for the plurality of light-emitting elements 502R, 502G, and 502B, or may be formed for each light-emitting element. In order to prevent the first electrode 504 and the second electrode 508 from being shorted by foreign matter, an insulating layer 509 is provided between the first electrodes 504. Furthermore, since the organic EL layer deteriorates due to moisture and oxygen, a protective layer 510 is provided to protect the organic EL element from moisture and oxygen.

[0057] 9(b), the hole transport layer 505 and the electron transport layer 507 are shown as single layers, but depending on the structure of the organic EL display element, they may be formed of multiple layers including a hole blocking layer and an electron blocking layer. In addition, a hole injection layer having an energy band structure that can smoothly inject holes from the first electrode 504 to the hole transport layer 505 can be formed between the first electrode 504 and the hole transport layer 505. Similarly, an electron injection layer can be formed between the second electrode 508 and the electron transport layer 507.

[0058] Next, an example of a method for manufacturing an organic EL display device will be specifically described.

[0059] First, a circuit (not shown) for driving the organic EL display device and a substrate (mother glass) 503 on which a first electrode 504 is formed are prepared.

[0060] An acrylic resin is formed by spin coating on the substrate 503 on which the first electrode 504 is formed, and the acrylic resin is patterned by lithography so as to form an opening in the portion where the first electrode 504 is formed, thereby forming an insulating layer 509. This opening corresponds to the light-emitting region where the light-emitting element actually emits light.

[0061] The substrate 503 on which the insulating layer 509 is patterned is placed on a substrate carrier on which an adhesive member is arranged. The substrate 503 is placed on the substrate 501. The substrate 503 is held by an adhesive member. The substrate 503 is then carried into a first organic material film forming apparatus, and after being inverted, a hole transport layer 505 is formed as a common layer on the first electrode 504 in the display area. The hole transport layer 505 is formed by vacuum deposition. In practice, the hole transport layer 505 is formed to be larger than the display area 501, so no high-resolution mask is required.

[0062] Next, the substrate 503 on which the hole transport layer 505 has been formed is carried into a second organic material film forming apparatus. The substrate and a mask are aligned, and the substrate is placed on the mask. A red light emitting layer 506R is formed on the portion of the substrate 503 where a red light emitting element is to be disposed.

[0063] Similar to the formation of the light-emitting layer 506R, a green-emitting light-emitting layer 506G is formed by a third organic material film formation apparatus, and a blue-emitting light-emitting layer 506B is formed by a fourth organic material film formation apparatus. After the formation of the light-emitting layers 506R, 506G, and 506B is completed, an electron transport layer 507 is formed over the entire display area 501 by a fifth film formation apparatus. The electron transport layer 507 is formed as a layer common to the three color light-emitting layers 506R, 506G, and 506B.

[0064] The substrate on which the electron transport layer 507 has been formed is moved in a metallic evaporation material deposition device, and a second electrode 508 is deposited.

[0065] Thereafter, the substrate is transferred to a plasma CVD apparatus, where a protective layer 510 is formed, completing the film formation process on the substrate 503. After inversion, the adhesive member is peeled off from the substrate 503 as described in the above embodiment, thereby separating the substrate 503 from the substrate carrier. Then, the organic EL display device 500 is completed through cutting.

[0066] If the substrate 503 on which the insulating layer 509 is patterned is exposed to an atmosphere containing moisture or oxygen from the time when it is carried into the film forming apparatus until the film formation of the protective layer 810 is completed, the light emitting layer made of an organic EL material may be deteriorated by moisture or oxygen. Therefore, in this embodiment, the substrate is carried in and out of the film forming apparatus in a vacuum atmosphere or an inert gas atmosphere.

[0067] In each of the above embodiments, the confirmation means 300 is provided inside the two arms (the first atmospheric arm 241 and the second atmospheric arm 242) that make up the connecting mechanism. However, even when three or more arms are provided that make up the connecting mechanism, it is preferable to provide confirmation means inside all of the arms so that the presence or absence of an abnormality in the equipment can be confirmed. [Explanation of symbols]

[0068] 1...Film forming apparatus 10...Chamber 50...Power supply 51...Wiring 60...Cooling liquid supply apparatus 61...Cooling pipe 100...Film forming source 210...Atmospheric box 240...Connecting mechanism 300...Confirmation means 300X...Processing apparatus 301, 302, 310...Camera 305, 311, 312...Reflector 306, 307...Pendulum 320...Radar device 330...Ultrasonic device 340...Thermometer and hygrometer 350...Water leakage sensor

Claims

1. a deposition source for forming a thin film on a substrate disposed in the chamber; a support table whose interior is kept in an atmospheric environment and which supports and moves the film formation source; a connecting mechanism that is provided to connect the chamber and the support stand, communicates between the outside of the chamber and the inside of the support stand, and moves in accordance with the movement of the support stand; a supply facility provided inside the connection mechanism and configured to supply electricity and a cooling liquid to the deposition source; and a confirmation means for confirming whether or not an abnormality has occurred in the supply facility from an image or image data based on the electromagnetic waves acquired by the acquisition means. A film forming apparatus comprising:

2. a deposition source for forming a thin film on a substrate disposed in the chamber; a support table whose interior is kept in an atmospheric environment and which supports and moves the film formation source; a connecting mechanism that is provided to connect the chamber and the support stand, communicates between the outside of the chamber and the inside of the support stand, and moves in accordance with the movement of the support stand; a supply facility provided inside the connection mechanism and configured to supply electricity and a cooling liquid to the deposition source; and an acquisition means provided inside the connection mechanism for acquiring electromagnetic waves from inside the connection mechanism. A film forming apparatus comprising:

3. The acquisition means is a camera that acquires visible light or infrared light to photograph the supply facility.

3. The film forming apparatus according to claim 1, wherein the film forming apparatus is a film forming apparatus.

4. the coupling mechanism includes a first air arm and a second air arm that are rotatably coupled to each other, The camera is a first camera that takes images in the first atmospheric arm from an end of the first atmospheric arm toward a connecting portion with the second atmospheric arm, and a second camera that takes images in the second atmospheric arm from an end of the second atmospheric arm toward a connecting portion with the first atmospheric arm. and a second camera.

4. The film forming apparatus according to claim 3.

5. the coupling mechanism includes a first air arm and a second air arm that are rotatably coupled to each other, The camera includes a first camera fixed to the second atmospheric arm and taking an image from a connecting portion side with the second atmospheric arm toward an end portion of the first atmospheric arm opposite to the connecting portion side, and a second camera fixed to the first atmospheric arm and taking an image from a connecting portion side with the first atmospheric arm toward an end portion of the second atmospheric arm opposite to the connecting portion side.

4. The film forming apparatus according to claim 3.

6. the coupling mechanism includes a first air arm and a second air arm that are rotatably coupled to each other, The camera is provided at a connection between the first atmospheric arm and the second atmospheric arm, and is configured to take an image toward an end of the first atmospheric arm opposite to the connection side, and to take an image toward an end of the second atmospheric arm opposite to the connection side.

4. The film forming apparatus according to claim 3.

7. A light source for illuminating the supply facility is provided inside the connection mechanism.

7. The film forming apparatus according to claim 3, wherein the film forming apparatus is a film forming apparatus having a film forming function.

8. A reflector is provided inside the connecting mechanism, which enables the camera to capture images of blind spots in the camera's own image capturing range.

8. The film forming apparatus according to claim 3, wherein the film forming apparatus is a film forming apparatus having a film forming function.

9. A pendulum is provided within the connecting mechanism and within the range of photography by the camera.

9. The film forming apparatus according to claim 3, wherein the film forming apparatus is a film forming apparatus having a film forming function.

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