Method for detecting arcing in a power supply system for a process chamber - Patents.com

Abstract

A method for detecting an arc in a power supply system for a plasma processing chamber utilizes visible arc detection sensors to identify a location of an arc and facilitate shutting down a power supply associated with the location of the arc. In some embodiments, the method includes receiving an arc indication from an arc detection sensor operating in the visible light spectrum, at least one arc detection sensor being positioned in an assembly of the power supply system for the plasma processing chamber, determining a location of the arc indication by an arc detection controller of the plasma processing chamber, and activating a safety interlock signal to a power supply of the power supply system of the plasma processing chamber when the at least one arc indication exceeds a threshold value. The safety interlock signal controls a power state of the power supply, and activating the safety interlock signal causes power to be removed from the power supply.

Description

[Technical field]

[0001]

[0001] Embodiments of the present principles relate generally to semiconductor manufacturing. [Background technology]

[0002]

[0002] A semiconductor process chamber may utilize one or more RF power sources for plasma generation or substrate bias during processing. Auxiliary power devices, such as RF impedance matching networks and / or RF filters, may be used with the RF generators. Typical safety protocols for operating the RF power sources are based on impedance mismatches, such as impedance mismatches caused by parasitic plasma conditions in the chamber. When impedance mismatches occur, the RF power sources may be shut down to prevent harm to equipment or personnel. However, the inventors have determined that under non-plasma parasitic conditions, impedance mismatches may not occur, and therefore the safety protocols may leave the RF generators operating, leading to possible damage to equipment and harm to personnel.

[0003]

[0003] Accordingly, the present inventors have provided a method and apparatus for detecting faults in RF powered equipment even when impedance mismatches do not occur, thereby increasing protection of RF powered equipment and personnel. Summary of the Invention

[0004] SUMMARY OF THE DISCLOSURE

[0004] A method and apparatus for detecting arcing in RF power equipment is provided herein.

[0005]

[0005] In some embodiments, a method for detecting an arc discharge in a power supply system may include receiving at least one arc indication from at least one arc detection sensor operating in the visible light spectrum, the at least one arc detection sensor being positioned in at least one assembly of at least one power supply system for a plasma processing chamber; determining at least one location of the at least one arc indication by an arc detection controller of the plasma processing chamber; and activating at least one safety interlock signal to at least one power supply of the at least one power supply system of the plasma processing chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power state of the at least one power supply, and activating the at least one safety interlock signal causing power to be removed from the at least one power supply.

[0006]

[0006] In some embodiments, the method may further include the at least one arc indication including an intensity of the arc, a duration of the arc, or a location of the arc within an assembly of the power supply system, one of the at least one arc detection sensors being configured to provide an arc intensity in the range of about 10,000 lux to about 20,000 lux, one of the at least one arc detection sensors being a fiber optic sensor, multiple fiber optic sensors being positioned in one of the at least one assembly of the at least one power supply system to monitor a particular component, one of the at least one arc detection sensor having a 180 degree detection field of view, and one of the at least one arc detection sensor having a 360 degree detection field of view. The method may further include receiving operational parameters related to a time of the at least one arc indication from a controller of the plasma processing chamber, and providing a diagnosis of a possible cause of the at least one arc indication based at least in part on the operational parameters, the at least one arc indication, and at least one location of the at least one arc indication, where the operational parameters from the controller of the plasma processing chamber include a chamber pressure, a power level, a process chemistry, an impedance matching network capacitor position, or a chamber impedance, and / or the method may further include providing an indication of a location of the at least one arc indication, where the indication is viewable by personnel operating the plasma processing chamber.

[0007] In some embodiments, a method for detecting an arc discharge in a power supply system includes receiving at least one arc indication from at least one arc detection sensor operating in the visible light spectrum, the at least one arc detection sensor positioned in at least one assembly of at least one power supply system for a plasma process chamber, the at least one arc indication including an intensity of the arc, a duration of the arc, or a position of the arc within the assembly of the power supply system, the at least one arc detection sensor configured to provide an arc intensity in a range of about 10,000 lux to about 20,000 lux; determining, by an arc detection controller of the process chamber, at least one location of the at least one arc indication; and activating at least one safety interlock signal to at least one power supply of at least one power supply system of the plasma process chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power state of the at least one power supply, and activating the at least one safety interlock signal causing power to be removed from the at least one power supply; and activating the at least one safety interlock signal to at least one power supply of the at least one power supply system of the plasma process chamber when the at least one arc indication exceeds a threshold value.

[0008] In some embodiments, the method may further include one of the at least one arc detection sensors being a fiber optic sensor, and a plurality of fiber optic sensors being positioned in one of the at least one assembly of the at least one power supply system to monitor a particular component, and the at least one of the at least one arc detection sensors having a 180 degree field of view or a 360 degree field of view. The method may further include receiving operational parameters associated with the occurrence of the at least one arc indication from a controller of the plasma process chamber, and providing a diagnosis of a possible cause of the at least one arc indication based at least in part on the operational parameters, the at least one arc indication, and at least one location of the at least one arc indication, the operational parameters from the controller of the plasma process chamber including a chamber pressure, a power level, a process chemistry, an impedance matching network capacitor location, or a chamber impedance, and / or the method may further include providing a location indication of the at least one arc indication, the indication being viewable by personnel operating the plasma process chamber.

[0009] In some embodiments, a non-transitory computer readable medium that, when executed, includes receiving at least one arc indication from at least one arc detection sensor operating in the visible light spectrum, the at least one arc detection sensor being positioned in at least one assembly of at least one power supply system for a plasma process chamber; determining, by an arc detection controller of the plasma process chamber, at least one location of the at least one arc indication; and detecting a temperature rise or fall of the at least one arc indication from the at least one arc detection sensor operating in the visible light spectrum, the at least one arc detection sensor being positioned in at least one assembly of at least one power supply system for the plasma process chamber. and activating at least one safety interlock signal for at least one power supply of at least one power supply system of the at least one plasma processing chamber when at least one arc indication exceeds a threshold value, wherein the at least one safety interlock signal controls a power state of the at least one power supply, and activating the at least one safety interlock signal causes power to be removed from the at least one power supply.

[0010]

[0010] In some embodiments, the method may further include receiving operational parameters associated with the occurrence of at least one arc indication from a controller of the plasma processing chamber, and providing a diagnosis of a possible cause of the at least one arc indication based at least in part on the operational parameters, the at least one arc indication, and at least one location of the at least one arc indication, and / or the operational parameters from the controller of the plasma processing chamber include chamber pressure, power level, process chemistry, impedance matching network capacitor position, or chamber impedance.

[0011]

[0011] Other further embodiments are disclosed below.

[0012]

[0012] The embodiments of the present principles summarized above and described in more detail below can be understood by reference to the exemplary embodiments of the present principles shown in the attached drawings, which, however, merely illustrate typical embodiments of the present principles and should not be considered as limiting the scope thereof, as the present principles may admit of other equally effective embodiments. [Brief description of the drawings]

[0013] [Figure 1] 1 is a cross-sectional view of a plasma chamber in accordance with some embodiments of the present principles; [Diagram 2] 1 is a cross-sectional view of a power supply system according to some embodiments of the present principles; [Diagram 3] FIG. 13 is a top-down view of an RF filter of a power supply system in accordance with some embodiments of the present principles. [Figure 4] 1 is a cross-sectional view of an RF filter with an arc detector in accordance with some embodiments of the present principles; [Diagram 5] 1 is a cross-sectional view of a fiber optic arc detector according to some embodiments of the present principles; [Figure 6] FIG. 1 is a top down view of a fiber optic arc detector in an RF filter in accordance with some embodiments of the present principles. [Figure 7] 1 is a method for detecting an arc in a power supply system in accordance with some embodiments of the present principles. [Figure 8] 1 is a cross-sectional view of a plasma chamber in accordance with some embodiments of the present principles; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014]

[0021] To facilitate understanding, the same reference numbers have been used, wherever possible, to designate identical elements common to the drawings. The drawings are not drawn to scale and may be simplified for clarity. Elements and features of one embodiment may be beneficially incorporated in other embodiments without further detail.

[0015]

[0022] The method and apparatus provide additional protection for RF power equipment used, for example, in semiconductor process chambers. Arc detection by a visible light spectrum detector protects RF power equipment even when impedance mismatch does not occur, saving expensive equipment and preventing possible harm to personnel. The signal from the optical sensor is sent to a visible arc detector controller and compared to a pre-set threshold. If the threshold is met, a system safety interlock switch is activated, immediately shutting down the RF generating equipment. The method and apparatus of the present principles have advantages such as the wide detection angle of the optical sensor covering all of the RF enclosure, the very fast response time of the arc detector, the ability of the arc detector to protect RF power systems from serious damage, especially in parasitic situations where there is no plasma to change the RF impedance and therefore the reflected power, and accurate location of arcing for root cause analysis and design optimization.

[0016]

[0023] Typically, an RF generator shuts down when high reflected power is detected (typically caused by impedance mismatch). However, detection of high reflected power does not cover all fault conditions. If the RF match is tuned in some situations where no plasma is formed and parasitic conditions exist, the reflected power will still be low and no fault will be detected. When operating correctly, the plasma in the process chamber provides a current load that keeps the voltage inside and outside the chamber at a safe level. If no plasma is formed in the chamber, the voltage in the chamber and power supply system can continue to build up until it is high enough to arc across components. If a reflected power fault is not detected, the RF generator will continue to power the parasitic load, resulting in arcing inside the RF impedance matching network and / or RF filter enclosure, causing serious power supply damage, system overheating, and possibly fire. The method and apparatus of the present principles utilize a visible arc detector positioned in the power supply enclosure to trigger a system safety interlock switch to reduce potential hazards and system damage. The optical sensors act as arc detectors and may be distributed in the RF impedance matching network and RF filter box and positioned near the high voltage area of ​​the enclosure. The optical sensors may have a wide hemispherical (180 degrees) or full spherical (360 degrees) detection angle or a narrow detection angle in the optical sensor's field of view (FOV). The optical sensors may also have different sensitivities and detection ranges. In some embodiments, an arc detector controller may be used in combination with the optical sensors. The signal from the optical sensor is sent to the arc detector controller and compared to a pre-set threshold. If the signal from one or more optical sensors exceeds the threshold, an arc has occurred in the power supply system. The system safety interlock switch is then activated and immediately shuts off the RF generator using the interlock signal.

[0017]

[0024] The method and apparatus of the present principles can be used in many different types of process chambers having power supply systems with different configurations of generators (DC and RF generators, pulsed and non-pulsed generators, etc.) with different configurations of auxiliary support assemblies (RF filters, DC filters, impedance matching networks, etc.). Figures 1 and 8 are examples of plasma process chambers for dielectric etching. However, the embodiments described herein can also be used with process systems configured for use with other plasma processes, such as plasma deposition processes including plasma enhanced chemical vapor deposition (PECVD) processes, plasma enhanced physical vapor deposition (PEPVD) processes, plasma enhanced atomic layer deposition (PEALD) processes, plasma treatment processes, or plasma based ion implantation processes such as plasma enhanced doping (PLAD) processes.

[0018]

[0025] FIG. 1 is a cross-sectional view of one exemplary configuration of a plasma chamber 100 according to some embodiments. The plasma chamber 100 represents an exemplary (non-limiting) chamber in which the method and apparatus of the present principles may be incorporated. The plasma chamber 100 may be used, for example, but not limited to, etching a material on a substrate 110 to form a semiconductor structure. Other process chambers in which the present methods and apparatus may be utilized may be used for deposition, degassing, heating, dewarping the substrate, etc. The plasma chamber 100 is configured to form a capacitively coupled plasma (CCP) 154 in a processing region 118. In some embodiments, an RF power source 128 for plasma generation is provided to an RF base plate 108 in a cathode assembly 138, and a gas distribution plate 130 of a lid 190 is grounded. In some embodiments (not shown), the gas distribution plate 130 may be biased. The plasma chamber 100 includes a cylindrical sidewall 102, a floor 103, and a lid 190. The lid 190 may be a gas distribution showerhead including a gas manifold 152 overlying a gas distribution plate 130 having orifices 132 formed therethrough. The gas manifold 152 is enclosed by a manifold enclosure 192 having a gas supply inlet 140. A gas panel 184 controls the individual flow rates of different process gases to the gas supply inlets 140. The substrate 110 is supported on an upper surface 198 of a pedestal 196 with or without an electrostatic chuck (ESC), and the RF base plate 108 is supported on the pedestal support 106. A pump 182 is connected to the plasma chamber 100 to facilitate evacuating the interior of the plasma chamber 100 and maintaining the interior of the plasma chamber 100 at a desired pressure.

[0019]

[0026] In the illustrated chamber, the RF power supply 128 supplies RF power to the RF base plate 108 to generate a plasma for etching the substrate 110 during processing. A first RF filter 174 and a first RF impedance matching network 172 are disposed between the RF power supply 128 and the RF base plate 108. For example, the RF energy supplied by the RF power supply 128 may be at a frequency ranging from about 13 MHz to about 162 MHz, with non-limiting frequencies such as 13.56 MHz, 60 MHz, 120 MHz, or 162 MHz being usable. In some embodiments, the pulsed RF power supply 128 may provide high voltage pulsed RF power, etc. The pulsed RF power may have a frequency of about 100 Hz to about 5 kHz with a duty cycle ranging from about 5% to about 95%. In some embodiments, the RF or pulsed RF power supply 128 may provide RF or pulsed RF power in a range of about 1 kW to about 20 kW. In some embodiments, the RF or pulsed RF power supply 128 can provide RF or pulsed RF power in the range of about 20 kW to about 60 kW.

[0020]

[0027] The RF bias power supply 126 may be coupled to the RF base plate 108 to induce bias control on the substrate 110. The RF base plate 108 is supplied with RF bias power from the RF bias power supply 126 through a second RF filter 166 and a second RF impedance match network 168. For example, the RF energy supplied by the RF bias power supply 126 may be in a frequency range of about 100 kHz to about 20 MHz, with non-limiting frequencies such as 2 MHz or 13.56 MHz being usable. The RF bias power may also be pulsed. In some embodiments, the RF power may be supplied by the RF bias power supply 126 in a range of about tens of watts to hundreds of watts. In some embodiments, the RF power supplied by the RF bias power supply 126 may be from about several kilowatts up to 10 kW. In other applications, the pedestal 196 may be grounded or may remain electrically floating. The electrostatic chuck electrode 160 is supplied with positive and negative high voltage DC power from a high voltage DC power supply 176 through a low pass filter 178. The electrostatic chuck electrode 160 forms an electrostatic charge on the top surface of the pedestal 196 to hold the substrate 110 during processing. In some embodiments, the plasma chamber 100 may have a separate electrode at the edge for edge uniformity control.

[0021]

[0028] A controller 144 may be provided and coupled to the various components of the plasma chamber 100 to control their operation. The controller 144 includes a central processing unit (CPU) 146, a memory 148, and support circuits 150. The controller 144 may directly control the plasma chamber 100 or may control it through a computer (or controller) associated with a particular process chamber and / or support system components. The controller 144 may be one of any form of general-purpose computer processor that can be used in an industrial environment to control various chambers and sub-processors. The memory, or computer readable medium 148, of the controller 144 may be one or more of readily available memories such as random access memory (RAM), read only memory (ROM), floppy disk, hard disk, optical storage media (e.g., compact disk or digital video disk), flash drive, or any other form of digital storage, local or remote. The support circuits 150 are coupled to the CPU 146 to support the processor in a conventional manner. These circuits include cache, power supplies, clock circuits, input / output circuits and subsystems, and the like. The methods for controlling the plasma chamber 100 and / or the arc detection process may be stored in the memory 148 as software routines that may be executed or invoked to control operation of the plasma chamber 100 in the manner described herein. The software routines may also be stored and / or executed by a second CPU (not shown) located remotely from the hardware controlled by the CPU 146. For example, in some embodiments, the strategies and / or arc detection diagnostics or arc detection processes may be stored in the controller 144, which may be in conjunction with the visible arc detector controller 104 to facilitate detection of arcing in the power supply system of the plasma chamber 100.

[0022]

[0029] The visible arc detector controller 104 is connected to the assemblies of the power supply system for the plasma chamber 100 to control the applied power to one or more of the assemblies and to detect arcing via one or more photodetectors 162 mounted on one or more of the assemblies. FIG. 1 is an example of a possible location of the photodetector 162 and is not intended to limit which assemblies may have a photodetector 162 or the number of photodetectors 162 mounted on each assembly. In this embodiment, the power supply system may include assemblies such as an RF power supply 128, a first RF impedance matching network 172, an RF bias power supply 126, a second RF impedance matching network 168, and a second RF filter 166. The RF impedance matching network is an electrical circuit used between the RF source generator and the plasma reactor to optimize power delivery efficiency. At the tuned impedance matching point, maximum power is delivered to the plasma load and nearly zero power is reflected back to the RF source. Examples of RF impedance matching networks include a motorized variable shunt capacitor, a motorized variable series capacitor, and a series inductance element. The circuit configuration is typically an L network or a pi network. To combine the different RF powers on the target, an RF filter is required between the RF impedance matching network and the plasma reactor. RF filters are designed to allow only power in selected frequency ranges and to isolate the RF sources from each other.

[0023]

[0030] The method and apparatus of the present principles are also applicable for use in other chamber configurations, such as the chamber shown in FIG. 8. While the chambers of FIGS. 1 and 8 can be used in etch processes, the method and apparatus are not limited to etch chambers. In FIG. 8, a plasma chamber 800 incorporates a waveform generator 830 connected to an electrostatic chuck electrode 160 below a substrate 110 through a low pass filter 178. The waveform generator 830 generates a DC waveform, such as a pulse or ramp waveform, to the electrostatic chuck electrode 160. The low pass filter 178 prevents RF from being transmitted to the waveform generator 830 and / or the high voltage DC power supply 176 during processing in the plasma chamber 800. The visible arc detector controller 104 may be connected to the high voltage DC power supply 176 and / or the photodetector 162 of any of the assemblies associated with the RF power supply 128 (e.g., first RF filter 174, first RF impedance match network 172, low pass filter 178, etc.). The visible arc detector controller 104 may also be connected to one or more of the assemblies of the RF power supply system and / or one or more assemblies of the DC power supply system including the waveform generator 830 to control the power applied to the assemblies.

[0024]

[0031] Typically, the RF reflected power is closely monitored to protect against sudden impedance changes in the process chamber. When high reflected power is detected, the RF source generator is shut off to avoid damage to the power supply system. However, using the reflected power to determine faults cannot cover all possible fault conditions. Under some conditions, parasitic loads without plasma formation may have impedances within the match tuning range and not substantially change the reflected power. Even if the RF impedance matching network tunes to the parasitic condition without plasma, the reflected power remains low and the system does not know about the fault. The RF source generator continues to supply power to the parasitic condition without plasma load, building up high voltages in the chamber and power supply assembly. The fault may then cause arcing inside the RF impedance matching network and / or RF filter enclosure, resulting in serious power supply damage, system overheating, and even fire.

[0025]

[0032] To reduce potential hazards and system damage, the visible arc detector controller 104 can be used to trigger a system safety interlock switch. The system safety interlock switch controls the operating state of the RF source generator in the exemplary process chamber. FIG. 1 illustrates the visible arc detector controller 104 in an RF plasma processing system using a plasma chamber 100, and FIG. 8 illustrates the visible arc detector controller 104 in an RF plasma processing system using a plasma chamber 800. FIG. 2 illustrates a diagram 200 of a plasma power supply system of the plasma chamber 100 (or the plasma supply system of the plasma chamber 800), showing the first RF impedance matching network 172 and the first RF filter 174, and in particular the optical sensor 208 distributed near the high voltage area (e.g., the match output and the filter output) inside the power supply system assembly. Similarly, the second RF impedance matching network 168 and the second RF filter 166 may also have an optical sensor 208 distributed therein and connected to the visible arc detector controller 104. The optical sensors may have wide or narrow detection angles of 180 degree hemisphere or 360 degree sphere to detect arcing faults in the power supply system assembly. The signal from the optical sensor 208 is sent to the arc monitor 202 of the visual arc detector controller 104 and compared to a preset threshold stored in the memory of the arc monitor 202 and / or the memory of the controller 144 if connected to the controller 144. If the signal from one or more optical sensors exceeds the threshold, an arcing fault in the power supply system is evident. When an arcing fault is detected, the safety interlock controller 204 activates the system safety interlock switch and an interlock signal is sent to immediately shut off all associated RF source generators. In some embodiments, the optical sensors may be placed in multiple locations in the electrical assembly, including near the output of the high voltage RF filter and RF impedance matching network.If the light intensity exceeds a preset threshold, for example, about 10,000 lux to about 20,000 lux, an interlock signal can be sent to the RF source generator to shut off the power supply within about 100 milliseconds. Since the ambient light intensity level in an office area or laboratory is typically less than 2000 lux, the interlock signal is closed under normal operating conditions and will not be triggered by ambient lighting, even if the power supply system assembly is opened.

[0026]

[0033] The method and apparatus of the present principles can also be used for fault analysis and diagnosis of both the process chamber and the power supply system. The optional diagnostic system 206 of the visual arc detector controller 104 can facilitate the determination of faulty components in the power system and / or in the process chamber or even in the process recipe used by the process chamber. The optional diagnostic system 206 can use look-up tables based on prior knowledge and / or can incorporate machine learning to assist in diagnosing the cause of the arcing. In some embodiments, the optional diagnostic system 206 can be connected to the controller 144 of the plasma chamber 100. The optional diagnostic system 206 can use operating parameters from the plasma chamber 100 at the moment of the detected arc and / or operating parameters prior to the moment of the detected arc to assist in the diagnosis. In many cases, the events that occurred leading up to the arcing can be of great help in determining why the arcing occurred. The optional diagnostic system 206 can use machine learning so that historical data and / or current operating parameters can be constantly monitored to proactively determine if and at which assembly of the power delivery system a fault is likely to occur, preventing damage to equipment and possibly personnel. A visual arc detector controller incorporating the optional diagnostic system 206 can also incorporate optical sensors with greater accuracy and / or advanced capabilities that provide additional information when an arc is detected. For example, the optical sensors may have the capability to report the occurrence of an arc along with an intensity level value, the angle of detection (where the arc occurred within the optical sensor's detection FOV), the time of detection, the duration of the arcing, and / or the number of arcs detected, etc. More advanced optical sensors are more expensive, but also provide the data necessary to provide a diagnosis of the cause of the arc and can be used in the testing or evaluation phase of a chamber design rather than in a production chamber.The light intensity and / or position data, along with other chamber parameters including but not limited to chamber pressure, power levels, chemistry, match capacitor position, chamber impedance, etc., can be used for early detection, fault analysis, and arc hazard mitigation. In some embodiments, process conditions can be varied while monitoring the fiber optic sensor intensity to provide a safe operating regime.

[0027]

[0034] The optical sensor may have a wide detection angle to cover the entire area of ​​the RF impedance matching network enclosure and the RF filter enclosure. Compared with the software-based detection method, the visible arc detector controller 104 has a faster response time of less than 100 milliseconds. The visible arc detector controller 104 can protect the RF power system from serious damage, especially in some synchronous parasitic no-plasma situations where the RF power source cannot be properly shut off due to the absence of reflected power spikes. The method and apparatus can also be used to determine the exact location of the arcing, which can aid in root cause analysis and system design optimization. The optical fiber sensor can also be used as an optical sensor to detect the arcing, and can be placed in multiple locations to help determine the fault location in a given assembly of the power supply system. The optical fiber sensor has the advantage of being very small and easy to install in the assembly of the power supply system.

[0028]

[0035] The following examples refer to the first RF filter 174 as an exemplary assembly of the power supply system for simplicity, but are not limited thereto, and the method and apparatus are applicable to other assemblies of the power supply system. FIG. 3 is a top-down view 300 showing the first RF filter 174 with the top cover removed. The first RF filter 174 has an output cable 302 connected to an output connector 312 on an assembly board 322 and an input cable 304 connected to an input connector 314. The first optical sensor 318 is mounted directly above the output section of the first RF filter 174 and explicitly monitors the output section. The detection FOV of the first optical sensor 318 can be very wide and can also be used to monitor nearby components such as the capacitor 316. The second optical sensor 320 is positioned near the input section of the first RF filter 174, and the wide detection FOV of the second optical sensor allows it to monitor the inductor 306 or other components 310 along with the resistor 308. By using multiple optical sensors, the visual arc detector controller 104 can further determine not only which assembly failed, but also where within the assembly the failure occurred. The arc position information helps diagnose why the failure occurred, which can be useful both during repairs and in future chamber designs.

[0029]

[0036] FIG. 4 is a cross-sectional view 400 of the first RF filter 174 showing a first optical sensor 402 with a 180 degree detection FOV, a second optical sensor 404 with a 360 degree detection FOV, and a third optical sensor 406 with a narrow FOV. The first optical sensor 402 may be mounted above or to the side of the components of the first RF filter 174 to maximize coverage within the 180 degree detection FOV of the first optical sensor. The first optical sensor 402 may also be mounted to a side wall of the first RF filter 174. The second optical sensor 404 may be mounted away from the side of the first RF filter 174 to maximize coverage using the 360 ​​degree detection FOV of the second optical sensor. The second optical sensor 404 may be located within or between components to maximize coverage from all sides. The third sensor 406 has a narrow detection FOV and may be positioned directly above (as shown) or to the side of a particular area or component within the first RF filter 174. The third optical sensor 406 may be a fiber optic sensor where light is absorbed only at the tip 408 of the sensor. The narrow detection FOV allows very specific components or areas of the first RF filter 174 to be monitored for arcing. In some embodiments, multiple fiber optic based sensors can be positioned in a grid pattern above components of the power delivery system assembly to pinpoint the location of the arc quite precisely, and based on the number of fiber optic based sensors that detect the arc, the size of the arc and whether one or more of the components within the assembly have actually been affected can be determined.

[0030]

[0037] FIG. 5 is a cross-sectional view 500 of a fiber optic arc detector according to some embodiments. Optical fiber-based optical sensors are very small in diameter, allowing for a wide range of applications and deployments that may not be possible with other types of optical sensors. The first fiber optic arc detector 502 has a polished end 514 cut at 90 degrees that allows for detection of light in a narrow detection FOV 508. In some embodiments, the narrow detection FOV 508 may be about 20 degrees to about 30 degrees. The narrow detection FOV 508 allows the first fiber optic arc detector 502 to be positioned to monitor a specific component or location within an assembly while significantly reducing crosstalk from arc faults occurring in other areas of the same assembly. The second fiber optic arc detector 504 has a similar detection FOV 510 as the first fiber optic arc detector 502, ranging from 25 degrees to 35 degrees. An advantage of the second fiber optic arc detector 504 is the polished end 516 cut at 45 degrees that allows for perpendicular detection for the second fiber optic arc detector 504, allowing for side entry of the second fiber optic arc detector 504 into the assembly enclosure rather than above, or allowing top entry to monitor the side of an assembly component or the like. The third fiber optic arc detector 506 has a rounded polished end 518 that allows for a wider FOV 512. The wider FOV 512 allows the third fiber optic detector 506 to take the place of a 180 degree optical sensor, but in a much smaller form factor that is easier to position in the assembly. The wider FOV 512 can be up to about 180 degrees. Diagram 600 of FIG. 6 is a top down view of multiple fiber optic arc detectors 602 positioned on the first RF filter 174. In this embodiment, the multiple fiber optic arc detectors 602 have a narrower detection FOV 604, allowing arc detection in a specific area of ​​the first RF filter 174, improving the location of any arcing within the power supply system assembly.

[0031]

[0038] FIG. 7 is a method 700 for detecting an arc in a power supply system according to some embodiments. In block 702, at least one arc indication is received from at least one arc detection sensor operating in the visible light spectrum (wavelengths 380 nm to 700 nm). The arc detection sensor is positioned in at least one assembly of at least one power supply system for a plasma process chamber. The arc indication may include arc intensity, arc duration, angle of arc detection, and / or location of the arc within the assembly of the power supply system, etc. In some embodiments, the arc detection sensor may be configured to provide an arc intensity ranging from about 10,000 lux to about 20,000 lux. In some embodiments, the arc detection sensor may be a fiber optic sensor. Multiple fiber optic sensors may also be positioned in one assembly of one power supply system to monitor a particular part of the assembly. Also, the arc detection sensor may be an optical sensor with a 180 degree detection field of view, or may be an optical sensor with a 360 degree detection field of view.

[0032]

[0039] In optional block 704, operational parameters related to the time or occurrence of at least one arc indication are received from a controller of the plasma process chamber. In some embodiments, the operational parameters from the controller of the plasma process chamber may include, but are not limited to, chamber pressure, power level, process chemistry, impedance matching network capacitor position, and / or chamber impedance. The state of the operational parameters may help determine why a particular arc occurred and may allow the arc to be prevented from occurring in some cases. In block 706, the location of at least one arc indication is determined by a visible arc detection controller of the plasma process chamber. In its simplest form, the visible arc detection controller need only be wired to know that input 1 is an RF filter and input 2 is an RF impedance matching network of the first RF power supply. If the state of input 1 changes from low to high (input voltage) or from high to low (input ground), the visible arc detection controller knows that an arc has occurred in the RF filter and shuts down the first RF power supply. In more complex embodiments, multiple arc detection sensors may be used in the first RF filter and the visible arc detector controller may use additional logic (e.g., which sensors (sensor self-identification) and how many reported arcing, detection angle, intensity value, etc.) to determine which particular area or component of the first RF filter the arc occurred in.

[0033]

[0040] At block 708, when the arc indication exceeds a threshold, activate at least one safety interlock signal for at least one power supply of at least one power supply system of the plasma process chamber. The at least one safety interlock signal controls the power state of the power supply, and activating the safety interlock signal removes power from the power supply. In some embodiments, the visible arc detector controller may be able to identify faults that are common to other power supplies and are likely to occur under the current process chamber conditions. The visible arc detector controller may then send safety interlock signals to multiple power supplies to prevent damage from occurring in other systems. In some embodiments, a location indication of the arc indication may be viewable by personnel operating the plasma process chamber and / or at a remote location such as a monitoring station. Because arcing can be dangerous to personnel, the visible arc detector controller may also display warning signs or other indications (e.g., audible alarms, visual alarms, etc.) to warn personnel of possible damage or even fire to keep personnel safe in the local area of ​​the process chamber or power system and / or in the monitoring area.

[0034]

[0041] At optional block 710, a diagnosis of a possible cause of the at least one arc indication is provided. The diagnosis is based at least in part on the operating parameters, the at least one arc indication, and at least one location of the at least one arc indication. As described above, the visible arc detector controller may utilize lookup tables and other systems to help provide a diagnosis of why a fault occurred. The visible arc detector controller may also utilize machine learning to help predict when arcing may occur and prevent cascading events that may cause serious damage to equipment. The visible arc detector controller may interface with the process chamber controller and / or other systems to collect process information and chamber conditions at the time of and leading up to the arcing to help determine the cause of arcing in a particular assembly of the power supply system.

[0035]

[0042] Embodiments of the present principles may be implemented in hardware, firmware, software, or any combination thereof. Also, embodiments may be implemented as instructions stored using one or more computer-readable media that can be read and executed by one or more processors. A computer-readable medium may include any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computing platform or a "virtual machine" running on one or more computing platforms). For example, a computer-readable medium may include any suitable form of volatile or non-volatile memory. In some embodiments, a computer-readable medium may include a non-transitory computer-readable medium.

[0036]

[0043] While the forgoing is directed to embodiments of the present principles, other and further embodiments of the present principles may be devised without departing from the basic scope thereof.

Claims

1. 1. A method for detecting arcing in an electrical power supply system, comprising: receiving at least one arc indication from at least one arc detection sensor operating in the visible light spectrum, the at least one arc detection sensor being positioned in at least one assembly of at least one power supply system for the plasma processing chamber; determining, by an arc detection controller of the plasma processing chamber, at least one location of the at least one arc indication; activating at least one safety interlock signal for at least one power supply of the at least one power supply system of the plasma processing chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power state of the at least one power supply, and activating the at least one safety interlock signal causing power to be removed from the at least one power supply. The method includes:

2. The method of claim 1 , wherein the at least one arc indication includes an arc intensity, an arc duration, or an arc location within an assembly of the power supply system.

3. The method of claim 2 , wherein one of the at least one arc detection sensor is configured to provide an arc intensity in a range from about 10,000 lux to about 20,000 lux.

4. The method of claim 1 , wherein one of the at least one arc detection sensors is a fiber optic sensor.

5. The method of claim 4 , wherein a plurality of fiber optic sensors are positioned in one of the at least one assembly of the at least one power supply system to monitor a particular component.

6. The method of claim 1 , wherein one of the at least one arc detection sensor has a detection field of view of 180 degrees.

7. The method of claim 1 , wherein one of the at least one arc detection sensor has a 360 degree field of view.

8. receiving from a controller of the plasma processing chamber an operating parameter related to a time of the at least one arc indication; providing a diagnosis of a probable cause of the at least one arc indication based at least in part on the operating parameters, the at least one arc indication, and at least one location of the at least one arc indication; The method of claim 1 further comprising:

9. 10. The method of claim 8, wherein the operating parameters from the plasma processing chamber controller include chamber pressure, power level, process chemistry, impedance match network capacitor position, or chamber impedance.

10. providing a location indication of the at least one arc indication, the indication being viewable by personnel operating the plasma processing chamber; The method of claim 1 further comprising:

11. 1. A method for detecting arcing in an electrical power supply system, comprising: receiving at least one arc indication from at least one arc detection sensor operating in the visible light spectrum, the at least one arc detection sensor positioned in at least one assembly of at least one power supply system for a plasma processing chamber, the at least one arc indication including an intensity of the arc, a duration of the arc, or a position of the arc within the assembly of the power supply system, the at least one arc detection sensor configured to provide an arc intensity in a range of about 10,000 lux to about 20,000 lux; determining, by an arc detection controller of the plasma processing chamber, at least one location of the at least one arc indication; activating at least one safety interlock signal for at least one power supply of the at least one power supply system of the plasma process chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power state of the at least one power supply, and activating the at least one safety interlock signal causing power to be removed from the at least one power supply; activating at least one safety interlock signal for at least one power supply of the at least one power supply system of the plasma process chamber when the at least one arc indication exceeds a threshold value; The method includes:

12. The method of claim 11 , wherein one of the at least one arc detection sensors is a fiber optic sensor.

13. The method of claim 12 , wherein a plurality of fiber optic sensors are positioned in one of the at least one assembly of the at least one power supply system to monitor a particular component.

14. The method of claim 11 , wherein one of the at least one arc detection sensor has a 180 degree field of view or a 360 degree field of view.

15. receiving from a controller of the plasma processing chamber an operating parameter associated with the occurrence of the at least one arc indication; providing a diagnosis of a probable cause of the at least one arc indication based at least in part on the operating parameters, the at least one arc indication, and at least one location of the at least one arc indication; The method of claim 11 further comprising:

16. 16. The method of claim 15, wherein the operating parameters from the plasma processing chamber controller include chamber pressure, power level, process chemistry, impedance match network capacitor position, or chamber impedance.

17. providing a location indication of the at least one arc indication, the indication being viewable by personnel operating the plasma processing chamber; The method of claim 11 further comprising:

18. A non-transitory computer readable medium that, when executed, receiving at least one arc indication from at least one arc detection sensor operating in the visible light spectrum, the at least one arc detection sensor being positioned in at least one assembly of at least one power supply system for the plasma processing chamber; determining, by an arc detection controller of the plasma processing chamber, at least one location of the at least one arc indication; activating at least one safety interlock signal for at least one power supply of the at least one power supply system of the plasma processing chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power state of the at least one power supply, and activating the at least one safety interlock signal causing power to be removed from the at least one power supply; activating at least one safety interlock signal for at least one power supply of the at least one power supply system of the plasma processing chamber when the at least one arc indication exceeds a threshold value; 16. A non-transitory computer readable medium having stored thereon instructions for performing a method for detecting an arc in an electrical power supply system, the method comprising:

19. The method further comprises: receiving from a controller of the plasma processing chamber an operating parameter associated with the occurrence of the at least one arc indication; providing a diagnosis of a probable cause of the at least one arc indication based at least in part on the operating parameters, the at least one arc indication, and at least one location of the at least one arc indication; 20. The non-transitory computer readable medium of claim 18, comprising:

20. 20. The non-transitory computer readable medium of claim 19, wherein the operating parameters from the plasma processing chamber controller include chamber pressure, power level, process chemistry, impedance match network capacitor position, or chamber impedance.

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