METAL WIRING MANUFACTURING METHOD, METAL WIRING MANUFACTURING APPARATUS, LASER LIGHT IRRADIATION CONTROL DEVICE, AND LASER LIGHT IRRADIATION CONTROL PROGRAM

Abstract

To manufacture a metal wiring with low resistance and high reliability.SOLUTION: Disclosed is a method of manufacturing the metal wiring, which includes a laser beam irradiation step in which the metal wiring is formed by irradiating a predetermined irradiation area of a film containing metal and / or metal oxide with a laser beam. The laser light irradiation step includes generation of an irradiation unit pattern by dividing the closed figure of a two-dimensional pattern for the irradiation area determination configured with the closed figure by a dividing line.SELECTED DRAWING: Figure 2B

Claims

1. A method for manufacturing a metal wiring, comprising: a laser light irradiation step of forming a metal wiring by irradiating a laser light to a predetermined irradiation area of ​​a film containing a metal and / or a metal oxide, The laser light irradiation step includes the following steps: a division step of dividing a closed figure of a two-dimensional pattern for determining an irradiation region, which is created in advance and is composed of one or more closed figures, into a first closed figure which is a parallelogram and a second closed figure which is other than a parallelogram, thereby generating the second closed figure and an arbitrary first closed figure; an irradiation unit pattern generating step of dividing the second closed figure into two or more third closed figures by a dividing line, and generating each of the third closed figures and each of the first closed figures, if any, as an irradiation unit pattern; A parameter assignment step of assigning preset scanning parameters to each irradiation unit pattern; and an irradiation step of irradiating the irradiation region with laser light by scanning a spot of laser light in a first direction while moving the spot in a second direction different from the first direction so as to fill each irradiation unit pattern in accordance with the irradiation unit pattern and the scanning parameters; Including, The method, wherein the dividing line is a line segment that divides the second closed figure such that a difference Δd between a maximum width dmax and a minimum width dmin of a plurality of the third closed figures in a pre-specified width direction d is smaller than a difference ΔD between a maximum width Dmax and a minimum width Dmin of the second closed figure in a maximum span direction D.

2. The method according to claim 1 , wherein the film subjected to the laser light irradiation step is formed on a substrate.

3. The method according to claim 2 , wherein the film subjected to the laser light irradiation step is a coating film formed on the substrate.

4. The method according to any one of claims 1 to 3, wherein the width direction d is perpendicular or parallel to the parting line.

5. The method according to any one of claims 1 to 4, wherein in the irradiation unit pattern generation step, the number of division lines is specified for each second closed figure, and then the division lines are specified so that the difference between the maximum width and the minimum width of the third closed figure in a direction perpendicular to the division lines is minimized.

6. The method according to any one of claims 1 to 5, wherein the dividing line generates, from each second closed figure, a plurality of third closed figures, the dmax and / or the Δd being substantially the same as each other.

7. In each second closed figure, the dividing line is two or more line segments parallel to the maximum span direction D and constitutes a part or all of a long side of a maximum inscribed rectangle of the third closed figure, The method according to any one of claims 1 to 6, wherein the short side lengths of the maximum inscribed rectangles are approximately the same.

8. The first direction is the long side direction or the short side direction of the first closed figure, if any, and The method according to any one of claims 1 to 7, wherein the direction is perpendicular or parallel to the dividing line of the second closed figure.

9. The method according to any one of claims 1 to 8, wherein the ratio of the minimum scanning length to the maximum scanning length of each irradiation unit pattern is 0.25 or more and 1.0 or less.

10. The method according to any one of claims 1 to 9, wherein the irradiation area is an area obtained by projecting the irradiation unit pattern onto a three-dimensional shape pattern of a film surface that has been previously acquired.

11. The method according to any one of claims 1 to 10, wherein the two-dimensional pattern for determining the irradiation region is generated by generating a three-dimensional pattern for determining the irradiation region on a three-dimensional shape pattern of a film surface obtained in advance, and then projecting the three-dimensional pattern for determining the irradiation region into two dimensions.

12. The two-dimensional pattern for determining an irradiation region is A two-dimensional base pattern previously generated on an XY plane is projected onto a previously acquired XYZ three-dimensional shape pattern of the film surface to generate a three-dimensional pattern for determining an irradiation region; Measuring a dimension B1 of a span portion B in the Y-axis direction on the two-dimensional base pattern; Measuring a dimension B2 of a projection portion of the span portion B on the three-dimensional pattern for determining an irradiation region; multiplying the dimension B1 of the two-dimensional base pattern by B1 / B2 to generate a reduced correction pattern; is a reduced correction pattern generated by The method according to any one of claims 1 to 10, wherein in the irradiating step, an X-axis direction is designated as the first direction and a Y-axis direction is designated as the second direction.

13. The method according to any one of claims 1 to 12, wherein the scanning parameters comprise one or more selected from the group consisting of laser scanning speed, laser power intensity, and laser spot diameter.

14. The method according to any one of claims 1 to 13, wherein the laser light is scanned while overlapping in a line width direction of a scanning line.

15. The method of claim 14 , wherein the overlap is greater than or equal to 10% and less than or equal to 99% of the line width.

16. The method of any one of claims 1 to 15, wherein the film comprises copper and / or copper oxide.

17. The method of any one of claims 1 to 16, wherein the membrane further comprises a dispersing agent.

18. 1. A metal wiring manufacturing apparatus for forming metal wiring by irradiating a laser beam to a preset irradiation area of ​​a film in a structure including a film containing a metal and / or metal oxide, comprising: The metal wiring manufacturing apparatus comprises: a structure holder that holds the structure; A laser oscillator that generates laser light; A laser beam scanning device that scans the laser beam emitted from the laser oscillation device; and a processing device for controlling the laser oscillation device and the laser beam scanning device; Equipped with The processing device comprising: outputting a scanning control signal according to a plurality of irradiation unit patterns and scanning parameters assigned to each of the plurality of irradiation unit patterns to the laser oscillation device and the laser light scanning device, and operating the laser oscillation device and the laser light scanning device so as to move a spot of laser light in a second direction different from the first direction while scanning the spot of laser light in a first direction so as to fill the irradiation unit pattern; the irradiation unit pattern is composed of a third closed figure generated by dividing a second closed figure other than a parallelogram by a division line, and optionally, a first closed figure that is a parallelogram; the dividing line being a line segment dividing the second closed figure such that a difference Δd between a maximum width dmax and a minimum width dmin of the plurality of third closed figures in a pre-specified width direction d is smaller than a difference ΔD between a maximum width Dmax and a minimum width Dmin of the second closed figure in a maximum span direction D.

19. 19. The metal wiring manufacturing apparatus according to claim 18, wherein the laser beam scanning device is a galvanometer scanner including a galvanometer motor and a galvanometer mirror.

20. 20. The metal wiring manufacturing apparatus according to claim 18 or 19, wherein the scanning parameters include one or more selected from the group consisting of a laser scanning speed, a laser output intensity, and a laser spot diameter.

21. A laser light irradiation control device that controls a laser oscillation device and a laser light scanning device of a metal wiring manufacturing apparatus to irradiate a laser light to a preset irradiation area of ​​a film containing a metal and / or metal oxide, a coordinate data generating unit that distinguishes a first closed figure, which is a parallelogram, from a second closed figure, which is a shape other than a parallelogram, from the input two-dimensional pattern for determining an irradiation region, divides the second closed figure into two or more third closed figures by a division line, and generates coordinate data for each of the first and third closed figures as irradiation unit patterns; a scanning control signal generating unit that assigns preset scanning parameters to the coordinate data and generates a scanning control signal according to the coordinate data and the scanning parameters; an output unit that outputs the scanning control signal to a laser oscillator and a laser beam scanning device; a dividing line that divides the second closed figure such that a difference Δd between a maximum width dmax and a minimum width dmin of a plurality of the third closed figures in a pre-specified width direction d is smaller than a difference ΔD between a maximum width Dmax and a minimum width Dmin of the second closed figure in a maximum span direction D of the second closed figure.

22. 22. The laser light irradiation control device according to claim 21, wherein the width direction d is perpendicular or parallel to the division line.

23. 23. A laser light irradiation control device as described in claim 21 or 22, which specifies the number of division lines for each second closed figure, and then specifies the division lines so that the difference between the maximum width and the minimum width of the third closed figure in a direction perpendicular to the division lines is minimized.

24. The laser light irradiation control device according to any one of claims 21 to 23, wherein the division lines generate a plurality of third closed figures from each second closed figure, the dmax and / or the Δd being substantially the same as one another.

25. In each second closed figure, the dividing line is two or more line segments parallel to the maximum span direction D and constitutes a part or all of a long side of a maximum inscribed rectangle of the third closed figure, The laser light irradiation control device according to any one of claims 21 to 24, wherein the short side lengths of the maximum inscribed rectangles are substantially the same.

26. The scanning parameters include a scanning direction, the scanning direction being: the long side direction or the short side direction of the first closed figure, if any, and The laser light irradiation control device according to any one of claims 21 to 25, wherein the direction is perpendicular or parallel to the dividing line of the second closed figure.

27. The laser light irradiation control device according to any one of claims 21 to 26, wherein a ratio of a minimum scanning length to a maximum scanning length of each irradiation unit pattern is 0.25 or more and 1.0 or less.

28. The laser light irradiation control device according to any one of claims 21 to 27, wherein the irradiation area is an area obtained by projecting the irradiation unit pattern onto a three-dimensional shape pattern of a film surface that has been previously acquired.

29. The laser light irradiation control device according to any one of claims 21 to 28, wherein the two-dimensional pattern for determining the irradiation area is generated by generating a three-dimensional pattern for determining the irradiation area on a three-dimensional shape pattern of a film surface acquired in advance, and then projecting the three-dimensional pattern for determining the irradiation area into two dimensions.

30. The two-dimensional pattern for determining an irradiation region is A two-dimensional base pattern previously generated on an XY plane is projected onto a previously acquired XYZ three-dimensional shape pattern of the film surface to generate a three-dimensional pattern for determining an irradiation region; Measuring a dimension B1 of a span portion B in the Y-axis direction on the two-dimensional base pattern; Measuring a dimension B2 of a projection portion of the span portion B on the three-dimensional pattern for determining an irradiation region; multiplying the dimension B1 of the two-dimensional base pattern by B1 / B2 to generate a reduced correction pattern; is a reduced correction pattern generated by The laser light irradiation control device according to any one of claims 21 to 28, wherein the X-axis direction is the direction of the scanning length of the laser light, and the Y-axis direction is the direction of the scanning width of the laser light.

31. The laser light irradiation control device according to any one of claims 21 to 30, wherein the scanning parameters include one or more selected from the group consisting of a laser scanning speed, a laser output intensity, and a laser spot diameter.

32. A laser light irradiation control program for controlling a laser oscillator and a laser light scanner of a metal wiring manufacturing apparatus in order to irradiate a laser light onto a preset irradiation region of a film containing a metal and / or metal oxide, comprising: Distinguishing a first closed figure, which is a parallelogram, from a second closed figure, which is a shape other than a parallelogram, from the input two-dimensional pattern for determining an irradiation region, dividing the second closed figure into two or more third closed figures by a dividing line, and generating respective coordinate data for the first and third closed figures as irradiation unit patterns; Assigning preset scanning parameters to the coordinate data; generating a scan control signal according to the coordinate data and the scan parameters; outputting the scanning control signal; and making the laser light irradiation control device execute the above steps, a dividing line that divides the second closed figure such that a difference Δd between a maximum width dmax and a minimum width dmin of a plurality of the third closed figures in a pre-specified width direction d is smaller than a difference ΔD between a maximum width Dmax and a minimum width Dmin of the second closed figure in a maximum span direction D.

33. The laser light irradiation control program according to claim 32 , wherein the width direction d is a direction perpendicular or parallel to the parting line.

34. A laser light irradiation control program as described in claim 32 or 33, which specifies the number of division lines for each second closed figure, and then specifies the division lines so that the difference between the maximum width and the minimum width of the third closed figure in a direction perpendicular to the division lines is minimized.

35. The laser light irradiation control program according to any one of claims 32 to 34, wherein the dividing line generates a plurality of third closed figures from each second closed figure, the dmax and / or the Δd being substantially the same as each other.

36. In each second closed figure, the dividing line is two or more line segments parallel to the maximum span direction D and constitutes a part or all of a long side of a maximum inscribed rectangle of the third closed figure, The laser light irradiation control program according to any one of claims 32 to 35, wherein the short side lengths of the maximum inscribed rectangles are substantially the same.

37. The scanning parameters include a scanning direction, the scanning direction being: the long side direction or the short side direction of the first closed figure, if any, and The laser light irradiation control program according to any one of claims 32 to 36, wherein the direction is perpendicular or parallel to the dividing line of the second closed figure.

38. The laser light irradiation control program according to any one of claims 32 to 37, wherein a ratio of a minimum scanning length to a maximum scanning length of each irradiation unit pattern is 0.25 or more and 1.0 or less.

39. The laser light irradiation control program according to any one of claims 32 to 38, wherein the irradiation area is an area obtained by projecting the irradiation unit pattern onto a three-dimensional shape pattern of a film surface that has been previously acquired.

40. The two-dimensional pattern for determining the irradiation area is generated by generating a three-dimensional pattern for determining the irradiation area on a three-dimensional shape pattern of a film surface obtained in advance, and then projecting the three-dimensional pattern for determining the irradiation area into two dimensions. The laser light irradiation control program according to any one of claims 32 to 39.

41. The two-dimensional pattern for determining an irradiation region is A two-dimensional base pattern previously generated on an XY plane is projected onto a previously acquired XYZ three-dimensional shape pattern of the film surface to generate a three-dimensional pattern for determining an irradiation region; Measuring a dimension B1 of a span portion B in the Y-axis direction on the two-dimensional base pattern; Measuring a dimension B2 of a projection portion of the span portion B on the three-dimensional pattern for determining an irradiation region; multiplying the dimension B1 of the two-dimensional base pattern by B1 / B2 to generate a reduced correction pattern; is a reduced correction pattern generated by 40. The laser light irradiation control program according to claim 32, wherein the X-axis direction is the direction of the scanning length of the laser light, and the Y-axis direction is the direction of the scanning width of the laser light.

42. The laser light irradiation control program according to any one of claims 32 to 41, wherein the scanning parameters include one or more selected from the group consisting of a laser scanning speed, a laser output intensity, and a laser spot diameter.

43. The laser light irradiation control program according to any one of claims 32 to 42, wherein the laser light scanning device is caused to scan the laser light while overlapping it in a line width direction of a scanning line.

44. 44. The laser light irradiation control program according to claim 43, wherein the overlap is equal to or greater than 10% and equal to or less than 99% of the line width.

45. A computer-readable recording medium or recording device storing the program according to any one of claims 32 to 44.

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