Panel substrate and manufacturing method of a micro LED display device including the panel substrate

Abstract

To prevent occurrence of a defect in which a micro LED is excessively transferred or is not transferred onto a panel board.SOLUTION: A panel board includes: a base board including multiple sub-pixel areas; a thin-film transistor disposed in each of the multiple sub-pixel areas; an interlayer insulation film disposed on the thin-film transistor; a first optical functional layer that is positioned on the interlayer insulation film and intercepts transmission and reflection of light; a second optical functional layer that is positioned on the first optical functional layer and includes a first viscous pattern portion and a second pattern portion that is less viscous than the first pattern portion; and multiple micro LEDs disposed in positions corresponding to the first pattern portion of the second optical functional layer.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present specification relates to a micro LED, and more particularly to a panel substrate and a method for manufacturing a micro LED display device including the panel substrate. [Background technology]

[0002] Display devices are used in a variety of electronic devices, such as TVs, mobile phones, notebook computers, tablet PCs, etc. For this reason, research is ongoing to develop thinner, lighter, and less power-consuming display devices.

[0003] Among display devices, an emissive display device has a light emitting element or a light source built in the display device and displays information using light generated from the built-in self-emitting element or light source. A display device including a self-emitting element has an advantage that it can be made thinner than a display device having a built-in light source, and is flexible, allowing the construction of a display device that can be folded, bent, or rolled up.

[0004] Examples of display devices incorporating light emitting elements include organic light emitting devices (OLEDs) that include organic materials as a light emitting layer, and micro light emitting diode displays (Micro LEDs) that include inorganic materials as a light emitting layer. Although organic light emitting displays do not require a separate light source, they have a problem in that defective pixels are easily generated due to the characteristics of organic materials that are weak against moisture and oxygen due to the external environment. In contrast, micro LED displays use inorganic materials that are strong against moisture and oxygen as a light emitting layer, so they are not affected by the external environment, have high reliability, and have a longer lifespan than organic light emitting displays.

[0005] In addition, since the micro LED display device is resistant to the external environment, it does not require a protective structure such as a sealant, and various materials can be used as substrates, and it has a thinner structure than an organic light emitting display device and can be used to configure a flexible display device. Therefore, it has an advantage that it is more advantageous than an organic light emitting display device in arranging a plurality of micro LED display devices to configure a large-area display device.

[0006] Meanwhile, in the transfer technology for transferring micro LEDs to a panel substrate, the transfer accuracy of the transfer to the target position affects display device defects. In other words, if the micro LEDs are not transferred to the target position on the panel substrate or are over-transferred to a position that is different from the target position, this can lead to display device defects. As a result, there is an increasing demand for high transfer accuracy when transferring micro LEDs. Also, when transferring multiple micro LEDs to configure a large-area display device, the transfer speed affects product productivity, so research into methods for improving the transfer speed is ongoing. Summary of the Invention [Problem to be solved by the invention]

[0007] The problem to be solved by one embodiment of the present specification is to provide a panel substrate including an optical functional layer having a multi-layer structure including a first functional layer that blocks light transmission and reflection and prevents moisture adsorption, and a second functional layer that minimizes light diffraction characteristics.

[0008] In addition, the problem to be solved by one embodiment of the present specification is to accurately transfer micro LEDs to target positions by introducing a panel substrate including an optical functional layer having a multi-layer structure and imparting different adhesive properties to different regions through a local exposure process.

[0009] This aims to prevent defects such as over-transfer or under-transfer of micro LEDs onto the panel substrate.

[0010] In addition, an object of the present invention is to provide a method for manufacturing a micro LED display device including a panel substrate including optical functional layers having a multi-layer structure having different functions.

[0011] The problem to be solved by one embodiment of the present specification is not limited to the above-mentioned object, and other objects and advantages of the present invention not mentioned can be understood from the following description and can be more clearly understood from the embodiment of the present specification. It will be understood that the objects and advantages of the present specification can be realized by the means and combinations thereof set forth in the claims. [Means for solving the problem]

[0012] A panel substrate according to one embodiment of the present specification includes a base substrate including a plurality of subpixel regions; thin film transistors respectively arranged in the plurality of subpixel regions; an interlayer insulating film arranged on the thin film transistors; a first optical functional layer located on the interlayer insulating film and blocking transmission and reflection of light; a second optical functional layer located on the first optical functional layer and including a first pattern portion having adhesiveness and a second pattern portion less adhesive than the first pattern portion; and a plurality of micro LEDs arranged at positions corresponding to the first pattern portion of the second optical functional layer.

[0013] A method for manufacturing a micro LED display device according to an embodiment of the present specification includes the steps of: forming a plurality of micro LEDs on a growth substrate; transferring the plurality of micro LEDs on the growth substrate to a donor substrate; preparing a panel substrate; forming a first optical functional layer that blocks light transmission and reflection and a second optical functional layer that is made sticky by light on the panel substrate; performing exposure and development processes on the second optical functional layer of the panel substrate to form a first pattern portion having stickiness and a second pattern portion that is less sticky than the first pattern portion; positioning the donor substrate on which the plurality of micro LEDs are disposed on the panel substrate; and transferring the plurality of micro LEDs on the donor substrate to a position corresponding to the first pattern portion of the panel substrate. Effect of the Invention

[0014] According to one embodiment of the present specification, a multi-layer optical functional layer having different functions is formed on a panel substrate, and different adhesive properties are imparted to different regions through a local exposure process, thereby enabling the micro LED to be accurately transferred to a target position on the panel substrate in a secondary transfer process.

[0015] This has the advantage of preventing defects such as the micro LEDs being over-transferred to a location other than the target location on the panel substrate or not being transferred to the target location.

[0016] In addition, by performing the secondary transfer step at least two times using one donor substrate, there is an advantage that the speed of the transfer step can be improved.

[0017] In addition, by introducing a multi-layered optical functional layer on a panel substrate, which includes a first optical functional layer that blocks light transmission and reflection and prevents moisture adsorption, and a second optical functional layer that minimizes the diffraction characteristics of light, product yield and productivity can be improved.

[0018] The effects of the present specification are not limited to those mentioned above, and other effects not mentioned herein will be clearly understood by those skilled in the art from the following description. [Brief description of the drawings]

[0019] [Figure 1] 1 is a cross-sectional view of a display device according to an embodiment of the present specification. [Diagram 2] 2 is an enlarged cross-sectional view showing a portion of the configuration of the micro LED shown in FIG. 1. [Diagram 3] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 4] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Diagram 5] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 6] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 7] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 8] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 9] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 10] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 11] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 12] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 13]1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 14] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 15] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. [Figure 16] 1 is a diagram illustrating a method for manufacturing a micro LED display device according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] The advantages and features of the present specification, as well as the methods for achieving them, will become apparent from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, the present specification is not limited to the embodiments disclosed below, but may be configured in various different forms. However, the present embodiments are provided to complete the disclosure of the specification and to fully convey the scope of the invention to those skilled in the art to which the specification pertains.

[0021] The shapes, sizes, ratios, angles, numbers, etc. disclosed in the drawings to explain the embodiments of the present specification are illustrative, and the present specification is not limited to the matters shown in the drawings. The same reference symbols throughout the specification refer to the same components. In addition, in explaining this specification, if a specific description of related known technology is judged to make the gist of this specification unclear, the detailed description will be omitted. When "includes," "has," "is," etc. are used as mentioned in this specification, other parts can be added unless "only" is used. When a component is indicated in the singular, it includes the case where it includes a plurality, unless otherwise explicitly stated.

[0022] When interpreting elements, it is understood that a margin of error may be included unless otherwise expressly stated.

[0023] When describing the positional relationship between two parts, for example, using "on", "at the top", "below", "to the side", etc., one or more other parts may be located between the two parts, unless "immediately" or "directly" is used.

[0024] When describing a temporal relationship, for example, using "after," "following," "next to," "before," etc., non-consecutive cases can also be included, unless "immediately" or "directly" is used.

[0025] Although the terms "first", "second", etc. are used to describe various components, these components are not limited by these terms. These terms are used merely to distinguish one component from another. Thus, the first component referred to below may be the second component within the technical concept of this specification.

[0026] The features of the embodiments of this specification may be partially or fully combined with each other or combined with each other, and may be technically linked and driven in various ways, and each embodiment may be implemented independently of each other, or may be implemented together in a related relationship.

[0027] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, display devices according to embodiments of the present invention will be described with reference to the accompanying drawings.

[0028] Fig. 1 is a cross-sectional view of a display device according to an embodiment of the present specification, and Fig. 2 is an enlarged cross-sectional view of a part of the configuration of the micro LED shown in Fig. 1.

[0029] 1 and 2, a plurality of micro LEDs 131a, 131b, 131c, 131d, 132a, 132b, 132c, and 132d are arranged on a base substrate 200 of a panel substrate (SUB). A first optical functional layer 210 is arranged on the base substrate 200, and a second optical functional layer 220 including a first pattern portion 226 and a second pattern portion 225a may be arranged on the first optical functional layer 210. The plurality of micro LEDs 131a, 131b, 131c, 131d, 132a, 132b, 132c, and 132d may be arranged at positions corresponding to the first pattern portion 226 of the second optical functional layer 220.

[0030] The first optical functional layer 210 is located between the base substrate 200 and the micro LEDs 131a, 131b, 131c, 131d, 132a, 132b, 132c, and 132d, and serves to block light transmission and reflection. The first optical functional layer 210 may include a material that absorbs light. In one example, the first optical functional layer 210 may include carbon black, black titanium oxide, or black iron oxide. The first optical functional layer 210 may also be configured by adding micro porous zeolite to the material that absorbs light. The porous zeolite includes a plurality of pores. As a result, moisture that penetrates from the interface is adsorbed into the pores, thereby preventing or reducing the penetration of moisture into the inside of the display device.

[0031] The second optical functional layer 220 includes a first pattern portion 226 and a second pattern portion 225a. The first pattern portion 226 has a first thickness, and the second pattern portion 225a can have a second thickness that is relatively thinner than the first pattern portion 226. As a result, the second optical functional layer 220 can have a stepped shape. The first pattern portion 226 and the second pattern portion 225a can have a shape in which they are alternately arranged on the panel substrate (SUB). As a result, the second pattern portion 225a can be arranged between two adjacent first pattern portions 226.

[0032] The first pattern portion 226 of the second optical functional layer 220 has adhesiveness, and the adhesiveness allows the multiple micro LEDs 131a, 131b, 131c, 131d, 132a, 132b, 132c, and 132d to be fixed onto the base substrate of the panel substrate (SUB). The second pattern portion 225a is less adhesive than the first pattern portion 226, and the multiple micro LEDs 131a, 131b, 131c, 131d, 132a, 132b, 132c, and 132d do not adhere to the second pattern portion 225a. As a result, the micro LEDs can be accurately transferred to the target position by being transferred only onto the first pattern portion 226 having adhesiveness.

[0033] The second optical functional layer 220 may include an adhesive compound whose adhesiveness is removed by light. That is, the second optical functional layer 220 may include an adhesive composite material that no longer has adhesive power when irradiated with light. Here, the adhesive compound may include a tackifier, a compound, a photo acid generator (PAG), and a quencher. Here, the quencher may include a material that neutralizes the acid generated from the photo acid generator, and may include a basic substance, for example. For example, the quencher may include an amine-based or pyridine-based substance. When the quencher is formed from an amine-based substance, it may include tri(n-octyl)amine or hydroxylamine. When the quencher is formed from a pyridine-based substance, it may include substances such as 2-benzyl pyridine, 4,4'-diphenyl2, 2'dipyridyl, 4-methyl amino pyridine, and 1,3-di(4-pyridyl)propane.

[0034] The adhesive may also include a foaming agent, an antioxidant, a dendrimer, and a photosensitive resin. Here, the photosensitive resin may include a novolac resin. The compound may include an alkaline-phenotype binder, a silicon (Si)-based binder, a photoinitiator, and a solvent. The photoinitiator is a material that is added in small amounts to the UV resin and starts a polymerization reaction when exposed to UV light emitted from an ultraviolet lamp. The solvent may include propylene glycol monomethyl ether acetate (PCMEA).

[0035] Hereinafter, an enlarged view of a region in which one micro LED 132a is arranged among the multiple micro LEDs 131a, 131b, 131c, 131d, 132a, 132b, 132c, and 132d in FIG. 1 will be described with reference to FIG. 2. The corresponding portion can be called a subpixel region. Since there are multiple corresponding portions, there are also multiple subpixel regions. Referring to FIG. 2, a thin film transistor (TFT) for driving the micro LED 132a is arranged on a base substrate 200 of a panel substrate (SUB). The panel substrate SUB includes multiple thin film transistors TFT, and each thin film transistor TFT is arranged corresponding to a subpixel region among the multiple subpixel regions. The base substrate 200 of the panel substrate (SUB) may include a transparent material including glass or plastic. The thin film transistor (TFT) may include a semiconductor layer (ACT) formed on the substrate 200, a gate electrode (GE) located on the semiconductor layer (ACT), and a gate insulating layer (GI) located between the semiconductor layer (ACT) and the gate electrode (GE). A buffer layer may further be included between the base substrate 200 and the semiconductor layer (ACT).

[0036] The semiconductor layer (ACT) may include a channel region (CA) overlapping with the gate electrode (GE) to form a channel, and a source region (SA) and a drain region (DA) located on both sides of the channel region (CA). An interlayer insulating film 201 is disposed on the gate electrode (GE). The interlayer insulating film 201 may include a drain electrode 202 penetrating the gate insulating layer (GI) and electrically connected to the drain region (DA) of the semiconductor layer (ACT). Also, the interlayer insulating film 201 may include a source electrode electrically connected to the source region (SA).

[0037] A connecting electrode 203 and a wiring line 204 may be disposed on the interlayer insulating film 201. The connecting electrode 203 and the wiring line 204 may be disposed on the same plane. In one example, the wiring line 204 may include a common voltage line. A protective layer 205 covering the connecting electrode 203 and the wiring line 204 is disposed on the interlayer insulating film 201. The protective layer 205 may selectively expose the upper surfaces of the connecting electrode 203 and the wiring line 204.

[0038] Optical functional layers 210 and 220 may be disposed on the protective layer 205. The optical functional layers 210 and 220 may selectively expose the top surfaces of the connecting electrodes 203 and the wiring lines 204 by penetrating the protective layer 205. The optical functional layers 210 and 220 may include a first optical functional layer 210 and a second optical functional layer 220. The second optical functional layer 220 may include a first pattern unit 226 and a second pattern unit 225a. Here, only the first pattern unit 226 may have adhesiveness, except for the second pattern unit 225a.

[0039] The micro LED 132a may be arranged to overlap the first pattern portion 226 of the second optical functional layer 220. The first pattern portion 226 may have adhesiveness, so that the micro LED 132a can be adhered to the first pattern portion 226.

[0040] The micro LED 132a may include a light emitting device structure 120, a first electrode 125, and a second electrode 127. The light emitting device structure 120 may include a first semiconductor layer 105, an active layer 110 disposed on one side of the first semiconductor layer 105, and a second semiconductor layer 115. The first electrode 125 is disposed on the first semiconductor layer 105 where the active layer 110 is not located, and the second electrode 127 is disposed on the second semiconductor layer 115. Meanwhile, in the embodiment of the present specification, for convenience of explanation, a lateral type micro LED is described as an example, but is not limited thereto. In one example, the micro LED may be a vertical type or a flip chip type.

[0041] The first semiconductor layer 105 is a layer for supplying electrons to the active layer 110, and may include a nitride semiconductor containing a first conductive type impurity. For example, the first conductive type impurity may include an N-type impurity. The active layer 110 disposed on one side of the first semiconductor layer 105 may include a multi-quantum well (MQW) structure. The second semiconductor layer 115 is a layer for injecting holes into the active layer 110. The second semiconductor layer 115 may include a nitride semiconductor containing a second conductive type impurity. For example, the second conductive type impurity may include a P-type impurity.

[0042] The micro LED 132a may be covered with a first planarization layer 250. The first planarization film 250 may have a thickness sufficient to flatten the upper surface having a step due to the circuit element. The first planarization layer 250 may include a first contact hole 252 and a second contact hole 254. The first contact hole 252 and the second contact hole 254 may penetrate the first optical functional layer 210, the second pattern portion 225a of the second optical functional layer 220, and the protective layer 205 to expose a part of the surface of the wiring line 204 and the connecting electrode 203. In addition, the first planarization layer 250 may include a third contact hole 253a and a fourth contact hole 253b to expose a part of the upper surface of the first electrode 125 and the second electrode 127 of the micro LED 132a.

[0043] A first wiring electrode 255 and a second wiring electrode 260 are located on the exposed surfaces of the first contact hole 252 and the second contact hole 254, respectively, and may be electrically connected to the wiring line 204 or the drain region (DA) of the semiconductor layer (ACT) of the thin film transistor (TFT). Also, the first wiring electrode 255 and the second wiring electrode 260 are disposed on the exposed surfaces of the first electrode 125 and the second electrode 127, respectively. As a result, the first wiring electrode 255 may be electrically connected to the first electrode 125. The second wiring electrode 260 may be electrically connected to the second electrode 127. The first wiring electrode 255 and the second wiring electrode 260 may be made of the same material. In one example, the first wiring electrode 255 or the second wiring electrode 260 may include a transparent metal oxide such as indium-tin-oxide (ITO) or indium-zinc-oxide (IZO).

[0044] A bank 265 having a bank hole is disposed on the first planarization layer 250. The bank 265 is a boundary region that defines a light-emitting region and serves to separate each sub-pixel. In one example, the first contact hole 252 and the second contact hole 254 in which the first wiring electrode 255 and the second wiring electrode 260 are formed, respectively, may be filled with a material that constitutes the bank 265. Although not shown in the drawing, a black matrix may be disposed on the bank 265. And, a sealant 270 may be disposed on the substrate 200 including the bank 265.

[0045] In the embodiment of the present specification, an optical functional layer having different functions is formed on a panel substrate, and a first pattern part and a second pattern part having different adhesiveness are formed in each region, so that the micro LED can be accurately transferred to the position of the first pattern part having adhesiveness on the panel substrate in the secondary transfer process. This can prevent or reduce the occurrence of defects such as the micro LED being over-transferred to a position other than the target position on the panel substrate or not being transferred to the target position.

[0046] 3 to 16 are views illustrating a method for manufacturing a micro LED display device according to an embodiment of the present specification.

[0047] Referring to FIG. 3, a plurality of micro LEDs 130 are formed on an upper surface of a growth substrate 100. The growth substrate 100 may be formed of a material such as, but not limited to, a sapphire substrate, silicon (Si), silicon carbide (SiC), or gallium arsenide (GaAs). The micro LED 130 formed on the growth substrate 100 may include a light emitting device structure 120, a first electrode 125, and a second electrode 127. The light emitting device structure 120 may include a first semiconductor layer 105, an active layer 110 disposed on one side of the first semiconductor layer 105, and a second semiconductor layer 115. The first electrode 125 is disposed on the first semiconductor layer 105 where the active layer 110 is not located, and the second electrode 127 is disposed on the second semiconductor layer 115.

[0048] Referring to FIG. 4, a primary transfer process is performed to transfer multiple micro LEDs 130 onto a donor substrate 140.

[0049] For this purpose, first, the growth substrate 100 on which the multiple micro LEDs 130 are arranged is positioned on the top of the donor substrate 140. The multiple micro LEDs 130 are arranged on the upper surface of the growth substrate 100. The growth substrate 100 may be aligned such that the multiple micro LEDs 130 are positioned in a direction opposite to the upper surface of the donor substrate 140. Then, a laser is irradiated in the upward direction on the rear surface of the growth substrate 100 to separate the multiple micro LEDs 130 from the growth substrate 100 and transfer them onto the donor substrate 140.

[0050] The micro LEDs 130 transferred onto the donor substrate 140 may include micro LEDs 131a, 131b, 131c, and 131d for primary transfer and micro LEDs 132a, 132b, 132c, and 132d for secondary transfer. The micro LEDs 131a, 131b, 131c, and 131d for primary transfer and the micro LEDs 132a, 132b, 132c, and 132d for secondary transfer may be disposed on one donor substrate 140 at a distance from each other.

[0051] Referring to Fig. 5, a panel substrate (SUB) is prepared. Circuit elements may be arranged on the panel substrate (SUB) to drive a plurality of micro LEDs to be arranged thereafter. In one example, the circuit elements may include a thin film transistor (TFT), a connection electrode 203, a wiring line 204, etc. A plurality of circuit elements may be arranged so as to be respectively connected to a plurality of micro LEDs.

[0052] Referring to an enlarged view of part "A" which is one of the circuit elements, the base substrate 200 of the panel substrate (SUB) may include a transparent material including glass or plastic. The thin film transistor (TFT) may include a semiconductor layer (ACT) formed on the base substrate 200, a gate electrode (GE) located on the semiconductor layer (ACT), and a gate insulating layer (GI) located between the semiconductor layer (ACT) and the gate electrode (GE). A buffer layer may further be included between the substrate 200 and the semiconductor layer (ACT).

[0053] The semiconductor layer (ACT) may include a channel region (CA), and a source region (SA) and a drain region (DA) located on both sides of the channel region (CA). An interlayer insulating film 201 is disposed on the gate electrode (GE). The interlayer insulating film 201 may include a drain electrode 202. The interlayer insulating film 201 may also include a source electrode electrically connected to the source region (SA). A connecting electrode 203 and a wiring line 204 may be disposed on the interlayer insulating film 201. The connecting electrode 203 and the wiring line 204 may be disposed on the same plane. In one example, the wiring line 204 may include a common voltage line.

[0054] 6, optical functional layers 210 and 220 are formed on a panel substrate (SUB). The optical functional layers 210 and 220 may include a multi-layer structure in which a first optical functional layer 210 and a second optical functional layer 220 are sequentially stacked.

[0055] The first optical functional layer 210 plays a role in blocking the transmission and reflection of light. The first optical functional layer 210 may be formed including a material capable of absorbing light. In one example, the first optical functional layer 210 may be made of a first material including carbon black, black titanium oxide, or black iron oxide. In addition, the first optical functional layer 210 may be formed by adding micro porous zeolite to the first material. The micro porous zeolite adsorbs moisture that permeates from the interface, thereby preventing or reducing the permeation of moisture into the display device.

[0056] The second optical functional layer 220 formed on the first optical functional layer 210 may include an adhesive compound whose adhesiveness changes depending on light. In one example, the second functional layer 220 may include an adhesive compound including a tackifier, a compound, a photo acid generator (PAG), and a quencher. The tackifier may include a foaming agent, an antioxidant, a dendrimer, and a photosensitive resin. Here, the photosensitive resin may include a novolac resin, which is a chemically amplified resist. The compound may include an alkaline developing binder, a silicon (Si)-based binder, a photoinitiator, and a solvent. The photoinitiator is a material that initiates a polymerization reaction when exposed to UV light emitted from an ultraviolet (UV) lamp during the exposure process. The solvent may include propylene glycol monomethyl ether acetate (PGMEA).

[0057] Referring to FIG. 7, an exposure mask (M) is disposed on the optical functional layers 210 and 220 for the exposure process. The exposure mask (M) may include an opening 222 for selectively irradiating UV light and a light-shielding portion 224 for blocking UV light. The optical functional layers 210 and 220 may be irradiated with UV light through the opening 222 of the exposure mask (M). Here, the first optical functional layer 210 includes a material that blocks light transmission and reflection, thereby preventing or reducing the influence of light on circuit elements such as thin film transistors (TFTs) located under the first optical functional layer 210. Thus, a light source for the exposure process may be irradiated onto the second optical functional layer 220.

[0058] 8, the first pattern portion 226 of the second optical functional layer 220 corresponding to the light-shielding portion 224 of the exposure mask (M) of FIG. 7 is not exposed to UV light, so that the adhesive force can be maintained. In contrast, the preliminary second pattern portion 225 of the second optical functional layer 220 irradiated with UV light through the opening 222 of the exposure mask (M) is irradiated with UV light, and the adhesive force is removed. Here, the photo acid generator (PAG) included in the material constituting the second optical functional layer 220 can prevent or reduce diffuse reflection of light by minimizing the diffraction characteristic of light. In other words, the diffraction characteristic of light is minimized to prevent or reduce light from reaching the first pattern portion 226, so that the range where the adhesive force is removed can be limited to the preliminary first pattern portion 225.

[0059] Referring to FIG. 9, a developing process is performed on the second optical functional layer 220 after the exposure process to form a first pattern portion 226 and a second pattern portion 225a.

[0060] When UV light is irradiated during the exposure process, acid (+H) is generated from the photoacid generator (PAG) contained in the second photofunctional layer 220, so that the exposed portion, the preliminary second pattern portion 225 of the second photofunctional layer 220, and the unexposed portion, the first pattern portion 226, are dissolved in the developer differently. That is, the exposed portion, the preliminary second pattern portion 225, is sufficiently dissolved in the developer. Also, the first pattern portion 226 is not dissolved in the developer.

[0061] The developing process may dissolve the preliminary second pattern portion 225, so that the second pattern portion 225a is disposed between the adjacent first pattern portions 226. Here, the first pattern portion 226 may have a first thickness since it is not dissolved by the developer. In contrast, the second pattern portion 225a is lower than the first pattern portion 226 by a predetermined thickness (d), so that it has a second thickness that is relatively thinner than the first pattern portion 226. As a result, the first pattern portion 226 has a protruding shape.

[0062] Meanwhile, the line width of the second pattern portion 225a of the second optical functional layer 220 may be affected depending on whether a quencher is contained in the second optical functional layer 220. Hereinafter, the description will be made with reference to Fig. 10 and Fig. 11. Fig. 10 shows a case where a quencher is not contained in the second optical functional layer 220, and Fig. 11 shows a case where a quencher is contained in the second optical functional layer 220.

[0063] 10, when light is applied to the exposed region (EX1) of the second photofunctional layer 220, an acid (+H) is generated from the photoacid generator (PAG) contained in the second photofunctional layer 220 (a). The acid (+H) generated from the photoacid generator (PAG) causes a catalytic reaction in the exposed region (EX1) of the second photofunctional layer 220, so that the exposed and unexposed portions are dissolved in a developer differently. That is, the higher the concentration of the acid (+H) in a portion, the more sufficiently the portion is dissolved in the developer. The exposed region (EX1) can also be called the second pattern portion 225a of the second photofunctional layer 220.

[0064] Here, in the first pattern portion 226 of the second optical functional layer 220 to which light is not supplied, acid (+H) is not generated. However, the acid (+H) generated in the exposure region (EX1) diffuses to the first pattern portion 226 of the second functional layer 220 (b). As described above, the acid (+H) may be formed to have a line width (CD1) that is increased by the region (ΔC) where the acid (+H) diffuses from the target line width by dissolving the acid (+H) with a developer. If the line width (CD1) is increased from the target line width, the area of ​​the portion where the adhesive force is maintained becomes narrow, and the possibility of misalignment occurring when transferring the micro LED thereafter may increase.

[0065] As a result, the embodiment of the present specification can include a method for preventing the diffusion of acid (+H) to other regions other than the exposed region (EX1).

[0066] 11, in an embodiment of the present specification, a quencher (Q) is included in the second optical functional layer 220. The quencher (Q) may include a material that neutralizes the acid generated from the photoacid generator (PAG), and in one example, may include a basic substance.

[0067] When light is applied to the exposure region (EX2) of the second photofunctional layer 220 containing the quencher (Q), an acid (+H) is generated from the photoacid generator (PAG) contained in the exposure region (EX2) of the second photofunctional layer 220 (a). The exposure region (EX2) can also be referred to as the second pattern portion 225a of the second photofunctional layer 220.

[0068] In the first pattern portion 226 where light is not supplied to the second optical functional layer 220, acid (+H) is not generated. In addition, the quencher (Q) neutralizes the acid (+H) at the interface between the exposed region (EX2) and the second pattern portion 226. As a result, the line width (CD2) after the developing process can be formed to have the same width as the width of the exposed region (EX2).

[0069] 12, a donor substrate 140 on which a plurality of micro LEDs are arranged is placed on a panel substrate (SUB). Here, the plurality of micro LEDs may include micro LEDs 131a, 131b, 131c, and 131d for primary transfer and micro LEDs 132a, 132b, 132c, and 132d for secondary transfer.

[0070] Then, the donor substrate 140 is attached and detached on the panel substrate (SUB) by stamping, as shown by the arrow in FIG. 12. Then, the micro LEDs 131a, 131b, 131c, and 131d for primary transfer among the multiple micro LEDs are transferred onto the panel substrate (SUB). The micro LEDs 131a, 131b, 131c, and 131d for primary transfer may be disposed on the first pattern portion 226 of the second optical function layer having adhesiveness. Here, the micro LEDs 132a, 132b, 132c, and 132d for secondary transfer disposed adjacent to the micro LEDs 131a, 131b, 131c, and 131d for primary transfer are not transferred because they correspond to the second pattern portion 225a from which adhesiveness is removed during attachment.

[0071] This can prevent or reduce defects such as the micro LED being over-transferred to a location other than the target location on the panel substrate (SUB) or not being transferred to the target location.

[0072] 13, the donor substrate 140 on which the micro LEDs 132a, 132b, 132c, and 132d for secondary transfer remain is attached and detached on the panel substrate (SUB) by a stamping method as indicated by the arrows in FIG. 13. Then, the micro LEDs 132a, 132b, 132c, and 132d for secondary transfer are transferred onto the panel substrate (SUB). The micro LEDs 132a, 132b, 132c, and 132d for secondary transfer may be disposed on the first pattern portion 226 of the second optical function layer 220 having adhesive properties.

[0073] Thus, the micro LEDs 131a, 131b, 131c, 131d for primary transfer and the micro LEDs 132a, 132b, 132c, 132d for secondary transfer may be arranged on the panel substrate (SUB) so as to overlap with the first pattern portion 226. Here, since the transfer process can be repeated at least two times using one donor substrate 1400, the speed of the transfer process can be improved. In addition, the process of transferring the micro LEDs 131a, 131b, 131c, 131d for primary transfer and the micro LEDs 132a, 132b, 132c, 132d for secondary transfer on the panel substrate (SUB) by stamping can be performed at room temperature. Thus, it is possible to prevent or reduce the occurrence of defects in the element characteristics of the micro LEDs due to heat and pressure, compared to the method of transferring by applying heat and pressure.

[0074] Then, when the donor substrate 140 is removed, a plurality of micro LEDs 131a, 131b, 131c, 131d, 132a, 132b, 132c, and 132d may be arranged corresponding to the positions where the first pattern portion 226 of the second optical functional layer 220 is arranged, as shown in Fig. 14. Referring to Fig. 15 which shows an enlarged view of a part (B) of the plurality of micro LEDs in Fig. 14, the micro LED 132a may include a light emitting element structure 120, a first electrode 125, and a second electrode 127. The first electrode 125 is arranged on the first semiconductor layer 105 where the active layer 110 is not located, and the second electrode 127 is arranged on the second semiconductor layer 115.

[0075] Referring to FIG. 16, a first planarization layer 250 is formed on the micro LED 132a. The first planarization layer 250 may have a thickness sufficient to flatten an upper surface having a step due to a circuit element. Then, a first contact hole 252 and a second contact hole 254 are formed in the first planarization layer 250. The first contact hole 252 and the second contact hole 254 may penetrate the optical functional layer and the protective layer 205 to expose a part of the surface of the wiring line 204 and the connecting electrode 203. In addition, the first planarization layer 250 may include a third contact hole 253a and a fourth contact hole 253b that expose a part of the upper surface of the first electrode 125 and the second electrode 127 of the micro LED 132a.

[0076] Next, a first wiring electrode 255 and a second wiring electrode 260 are formed on the exposed surfaces of the first contact hole 252 and the second contact hole 254, respectively, to electrically connect with the wiring line 204 or the drain region (DA) of the semiconductor layer (ACT) of the thin film transistor (TFT). Also, the first wiring electrode 255 and the second wiring electrode 260 may be disposed on the exposed surfaces of the first electrode 125 and the second electrode 127, respectively. Thus, the first wiring electrode 255 may be electrically connected to the first electrode 125. The second wiring electrode 260 may be electrically connected to the second electrode 127. The first wiring electrode 255 and the second wiring electrode 260 may be made of the same material. In one example, the first wiring electrode 255 or the second wiring electrode 260 may include a transparent metal oxide such as indium-tin-oxide (ITO) or indium-zinc-oxide (IZO).

[0077] Next, a bank 265 having a bank hole is formed on the first planarization layer 250. The bank 265 divides adjacent sub-pixels to define light-emitting regions. In one example, the first contact hole 252 and the second contact hole 254 in which the first wiring electrode 255 and the second wiring electrode 260 are formed, respectively, may be filled with a material constituting the bank 265. A sealant 270 is formed on the panel substrate (SUB) including the bank 265 to protect the micro LED 132a from external impact or foreign matter.

[0078] According to the embodiment of the present specification, an optical functional layer is formed on a panel substrate, and a local exposure process is performed to give different adhesiveness to each region, thereby enabling the micro LED to be accurately transferred to a target position on the panel substrate in a secondary transfer process. This has the advantage of preventing or reducing defects such as the micro LED being over-transferred to a position other than the target position on the panel substrate or not being transferred to the target position. [Explanation of symbols]

[0079] 100 Growth substrate 105 First semiconductor layer 110 Active layer 115 Second semiconductor layer 120 Nitride Semiconductor Structures 125 1st electrode 127 2nd electrode 130 Micro LED 140 Donor Substrate SUB Panel Board 200 Base Board TFT Thin Film Transistor 201 Interlayer insulating film 203 Connecting electrode 204 Wiring Line 210 1st photofunctional layer 220 Second photofunctional layer 226 First Pattern Section 225 Second Pattern Section

Claims

1. a base substrate including a plurality of subpixel regions; a plurality of thin film transistors disposed in the plurality of sub-pixel regions, respectively; an interlayer insulating film disposed on the thin film transistor; a first optical functional layer located on the interlayer insulating film and blocking transmission and reflection of light; A second optical functional layer disposed on the first optical functional layer, the second optical functional layer having a plurality of first patterns and a plurality of second patterns, the plurality of first patterns having a first adhesiveness, and the plurality of second patterns having a second adhesiveness lower than the first adhesiveness; a plurality of micro LEDs arranged at positions corresponding to the plurality of first patterns of the second light functional layer; Including, The second optical functional layer includes an adhesive compound that is detackified when irradiated with light. Panel board.

2. The plurality of first patterns of the second optical functional layer have a first thickness, the plurality of second patterns have a second thickness that is thinner than the first thickness, and the second optical functional layer has a step. The panel substrate according to claim 1 .

3. The plurality of first patterns and the plurality of second patterns are alternately arranged. The panel substrate according to claim 1 .

4. The first optical functional layer includes a first material including carbon black, black titanium oxide, or black iron oxide, and a porous zeolite added to the first material. The panel substrate according to claim 1 .

5. The adhesive composition includes an adhesive, a composition, a photoacid generator, and a quencher. The panel substrate according to claim 1 .

6. The quencher includes a basic substance that neutralizes the acid generated from the photoacid generator. The panel substrate according to claim 5 .

7. a base substrate including a plurality of subpixel regions; a first optical functional layer including a plurality of first patterns and a plurality of second patterns, the plurality of first patterns having a first adhesiveness, the plurality of second patterns having a second adhesiveness lower than the first adhesiveness, and the plurality of first patterns and the plurality of second patterns being arranged in contact with each other in a lateral direction; a plurality of micro light emitting diodes arranged in each of the plurality of first patterns of the first optical functional layer; A display device comprising:

8. The plurality of first patterns of the first optical functional layer have a first thickness, the plurality of second patterns of the first optical functional layer have a second thickness that is thinner than the first thickness, and the plurality of first patterns in contact with the plurality of second patterns form a step. The display device according to claim 7.

9. The first optical functional layer includes an adhesive compound that is detackified when irradiated with light. The display device according to claim 7.

10. The adhesive composition includes an adhesive, a composition, a photoacid generator, and a quencher. The display device according to claim 9.

11. The quencher includes a basic substance that neutralizes the acid generated from the photoacid generator. The display device according to claim 10.

12. The second optical functional layer further includes a second optical functional layer between the first optical functional layer and the base substrate, the second optical functional layer including a first material including carbon black, black titanium oxide, or black iron oxide, and a porous zeolite added to the first material. The display device according to claim 7.

13. The plurality of micro light emitting diodes are not disposed on the second pattern of the first light functional layer. The display device according to claim 7.

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