Plasma processing method and plasma processing apparatus

Abstract

This plasma processing method is executed by a plasma processing device including a processing container in which a substrate to be processed is accommodated, a plurality of plasma sources for supplying electromagnetic waves, and a gas supply device for supplying a gas. The plasma processing method includes: a step in which a gas is supplied within the processing container from the gas supply device; a step in which the intensities of the power of electromagnetic waves introduced into the processing container from each of the plurality of plasma sources are controlled individually; and a step in which a plasma of the gas is generated by means of the intensities of the power of the electromagnetic waves introduced from each of the plurality of plasma sources and, in order to apply a desired film stress to a film on a first surface of the substrate to be processed, a desired film is formed on a second surface of the substrate to be processed which is a surface on the opposite side from the first surface of the substrate to be processed.

Description

[Technical field]

[0001] The present disclosure relates to a plasma processing method and a plasma processing apparatus. [Background technology]

[0002] For example, Patent Document 1 describes a plasma processing method in which microwaves are introduced into a processing chamber from a plurality of plasma sources to generate plasma and perform plasma processing on a substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-161960 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a plasma processing method and a plasma processing apparatus that control the stress of a film formed on a substrate to be processed. [Means for solving the problem]

[0005] According to one aspect of the present disclosure, there is provided a plasma processing method performed in a plasma processing apparatus having a processing vessel for accommodating a substrate to be processed, a plurality of plasma sources for supplying electromagnetic waves, and a gas supply device for supplying gas, the method including the steps of: supplying gas from the gas supply device into the processing vessel; individually controlling the power intensity of electromagnetic waves introduced into the processing vessel from each of the plurality of plasma sources; generating plasma of the gas based on the power intensity of the electromagnetic waves introduced from each of the plurality of plasma sources; and depositing a desired film on a second surface of the substrate to be processed, which is the surface opposite to the first surface, so as to impart a desired film stress to a film on the first surface of the substrate to be processed. and a step of measuring a distribution of film stress on the first surface or the second surface, wherein the step of individually controlling the power intensity includes controlling the power intensity of the electromagnetic wave introduced from each of the plasma sources so as to adjust the amount of deposition of the desired film based on the measured distribution of the film stress. A plasma processing method is provided. Effect of the Invention

[0006] According to one aspect, it is possible to control the stress of a film formed on a substrate to be processed. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic cross-sectional view showing an example of a plasma processing apparatus according to an embodiment. [Diagram 2] FIG. 2 is a diagram showing an example of a cross section taken along line AA of FIG. [Diagram 3] FIG. 3 is a diagram showing an example of a film structure of a substrate according to an embodiment. [Figure 4] FIG. 4 is a flowchart showing an example of a plasma processing method according to the embodiment. [Diagram 5] FIG. 5 is a diagram showing an example of Example 1 of the plasma processing method according to the embodiment. [Figure 6] FIG. 6 is a diagram showing an example of bonding of substrates after processing by the plasma processing method according to the embodiment. [Figure 7] FIG. 7 is a diagram showing an example of a result of bonding substrates according to the embodiment. [Figure 8] FIG. 8 is a diagram for explaining an example of a method for measuring a strain of a film according to an embodiment. [Figure 9] FIG. 9 is a diagram showing an example of Example 2 of the plasma processing method according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and duplicated descriptions may be omitted.

[0009] [Plasma processing equipment] A plasma processing apparatus 10 according to an embodiment will be described with reference to Fig. 1. Fig. 1 is a schematic cross-sectional view showing an example of the plasma processing apparatus 10 according to an embodiment. The plasma processing apparatus 10 according to the embodiment is an example of a CVD (chemical vapor deposition) film forming apparatus, and is a microwave plasma processing apparatus that generates plasma from a processing gas by microwaves and performs plasma processing on a substrate.

[0010] The plasma processing apparatus 10 includes a processing vessel 20, a mounting table 21, a gas supply mechanism 30, an exhaust device 40, a microwave introduction module 50, and a control unit 80. The processing vessel 20 accommodates a substrate to be processed (hereinafter referred to as a substrate W), such as a wafer. The mounting table 21 is disposed inside the processing vessel 20 and has a mounting surface 21a on which the substrate W is placed. The gas supply mechanism 30 supplies gas into the processing vessel 20. The exhaust device 40 exhausts the inside of the processing vessel 20 to create a reduced pressure state. The microwave introduction module 50 introduces microwaves to convert the processing gas supplied into the processing vessel 20 into plasma. The control unit 80 controls each part of the plasma processing apparatus 10.

[0011] The processing vessel 20 has, for example, a cylindrical shape. The processing vessel 20 is formed of a metal material such as aluminum or an alloy thereof. The microwave introduction module 50 is disposed in an upper portion of the processing vessel 20 and introduces electromagnetic waves (microwaves in the embodiment) into the processing vessel 20.

[0012] The processing vessel 20 has a plate-shaped top wall 11, a bottom wall 13, and a side wall 12 connecting the top wall 11 and the bottom wall 13. The top wall 11, which is a conductive member, is disposed on the upper part of the processing vessel 20 and has a plurality of openings, each of which is configured to receive a microwave introduction module 50. The side wall 12 has a loading / unloading port 12a for loading / unloading the substrate W between the processing vessel 20 and a transfer chamber (not shown) adjacent to the processing vessel 20. A gate valve G is disposed between the processing vessel 20 and the transfer chamber (not shown). The gate valve G has a function of opening and closing the loading / unloading port 12a. The gate valve G airtightly seals the processing vessel 20 in a closed state, and allows the substrate W to be transferred between the processing vessel 20 and the transfer chamber in an open state.

[0013] The bottom wall 13 has a plurality of exhaust ports 13a (two in FIG. 1 ). The exhaust ports 13a and an exhaust device 40 are connected by an exhaust pipe 14. The exhaust device 40 has an APC valve and a high-speed vacuum pump capable of reducing the pressure in the internal space of the processing vessel 20 to a predetermined vacuum level. An example of the high-speed vacuum pump is a turbo molecular pump. By operating the high-speed vacuum pump of the exhaust device 40, the internal space of the processing vessel 20 is reduced in pressure to a predetermined vacuum level.

[0014] The plasma processing apparatus 10 further includes a support member 22 that supports the mounting table 21 in the processing vessel 20, and an insulating member 23 provided between the support member 22 and the bottom wall 13. The mounting table 21 is for horizontally mounting the substrate W. When the substrate W is loaded and unloaded, it is lifted by lift pins 19 raised by a lifting drive mechanism (not shown), and the substrate W is transferred between the transport mechanism and the mounting table 21. The support member 22 has a cylindrical shape extending from the center of the bottom wall 13 toward the internal space of the processing vessel 20. The mounting table 21 and the support member 22 are formed of, for example, aluminum having a surface that has been anodized (anodized).

[0015] The plasma processing apparatus 10 further includes a high frequency bias power supply 25 that supplies high frequency power to the mounting table 21, and a matching box 24 provided between the mounting table 21 and the high frequency bias power supply 25. The high frequency bias power supply 25 applies high frequency power to the mounting table 21 in order to attract ions to the substrate W. The matching box 24 includes a circuit for matching the output impedance of the high frequency bias power supply 25 with the impedance on the load side (the mounting table 21 side).

[0016] The plasma processing apparatus 10 may further include a temperature control mechanism (not shown) for heating or cooling the mounting table 21. The temperature control mechanism controls the temperature of the substrate W within a range of 25°C (room temperature) to 900°C, for example.

[0017] The gas supply mechanism 30 includes a gas supply device 3a including a gas supply source 31, and piping 32 connecting the gas supply source 31 to a plurality of gas nozzles 2. Note that, although the gas supply device 3a illustrates one gas supply source 31 in Fig. 1, the gas supply device 3a may include a plurality of gas supply sources depending on the type of gas used.

[0018] The gas supply device 3a further includes a mass flow controller and an on-off valve (not shown) provided in the middle of the piping 32. The types of gases supplied into the processing vessel 20, the flow rates of these gases, and the like are controlled by the mass flow controller and the on-off valve.

[0019] The multiple gas nozzles 2 extending from the pipes 32 are cylindrical, penetrate the top wall 11, and protrude vertically from the bottom surface 11a of the top wall 11. The gas nozzles 2 supply processing gases and the like into the processing vessel 20 from gas supply holes 2a at their tips. For example, when forming a silicon nitride film, rare gases such as silane gas (SiH4), nitrogen gas (N2), and argon gas (Ar) are introduced into the processing vessel 20 from the gas supply holes 2a. The multiple gas nozzles 2 may be provided on the side wall 12.

[0020] The microwave introduction module 50 has a microwave output section 51, an antenna unit 60, and a microwave radiating section 63. The microwave output section 51 distributes microwaves to a plurality of paths and outputs them. The antenna unit 60 amplifies the microwaves output from the microwave output section 51 and introduces them to the microwave radiating section 63.

[0021] The antenna unit 60 includes a plurality of antenna modules 61. In the embodiment, the plurality of antenna modules 61 all have the same configuration. Each antenna module 61 has an amplifier section 62 that mainly amplifies and outputs the distributed microwaves, and a microwave introduction mechanism that introduces the microwaves output from the amplifier section 62 into a microwave radiating section 63.

[0022] The microwave radiating units 63 are arranged one at the center of the top wall 11 and six on the periphery, and radiate microwaves into the processing vessel 20. Seven microwave radiating units 63 are arranged at the opening of the top wall 11. However, the number of microwave radiating units 63 is not limited to seven, and the arrangement can be determined appropriately. For example, multiple microwave radiating units 63 may be arranged at the center. Also, multiple microwave radiating units 63 other than six may be arranged on the periphery.

[0023] The microwave radiating unit 63 has a tuner for matching impedance and an antenna unit 65 for radiating amplified microwaves into the processing vessel 20. Furthermore, the microwave radiating unit 63 has a cylindrical main container 66 made of a metal material and extending in the vertical direction, and an inner conductor 67 extending in the main container 66 in the same direction as the main container 66 extends. The main container 66 and the inner conductor 67 form a coaxial tube. The main container 66 forms the outer conductor of this coaxial tube. The inner conductor 67 is rod-shaped or cylindrical. The space between the inner peripheral surface of the main container 66 and the outer peripheral surface of the inner conductor 67 becomes a microwave transmission path 68.

[0024] The antenna section 65 has a microwave slow-wave material 72 connected to the lower end of the inner conductor 67, a planar antenna 71 in contact with the lower surface of the microwave slow-wave material 72, and a microwave transmitting plate 1 in contact with the lower surface of the planar antenna 71. The microwave transmitting plate 1 is fitted into the opening of the top wall 11 via the main body container 66, and its lower surface is exposed to the internal space of the processing container 20. The microwave transmitting plate 1 functions as a microwave transmitting window.

[0025] The planar antenna 71 has a disk shape. The planar antenna 71 has a slot formed to penetrate the planar antenna 71. The microwave slow-wave material 72 is made of a material having a dielectric constant greater than that of a vacuum. Examples of materials that can be used to form the microwave slow-wave material 72 include quartz, ceramics, fluorine-based resins such as polytetrafluoroethylene resin, and polyimide resins. The wavelength of microwaves becomes longer in a vacuum. The microwave slow-wave material 72 has a function of adjusting the plasma by shortening the wavelength of the microwave to be shorter than the wavelength in a vacuum. The phase of the microwave changes depending on the thickness of the microwave slow-wave material 72. Therefore, by adjusting the phase of the microwave depending on the thickness of the microwave slow-wave material 72, the slot position of the planar antenna 71 can be adjusted to be the antinode position of the standing wave of the microwave. This allows the power of the microwave to be efficiently introduced into the processing vessel 20.

[0026] The microwave transmitting plate 1 has a cylindrical shape. The microwave transmitting plate 1 is made of a dielectric material. Examples of the dielectric material that forms the microwave transmitting plate 1 include quartz and ceramics. The microwave transmitting plate 1 has a shape that allows efficient radiation of microwaves in TE mode.

[0027] Each component of the plasma processing apparatus 10 is connected to and controlled by a control unit 80. The control unit 80 is a computer, and includes a process controller equipped with a CPU, a user interface connected to the process controller, and a storage unit.

[0028] The process controller is a control means for collectively controlling each component related to process conditions such as temperature, pressure, gas flow rate, high frequency power for bias application, microwave power intensity, etc. in the plasma processing apparatus 10. Examples of each component include the high frequency bias power supply 25, the gas supply source 31, the exhaust device 40, the microwave introduction module 50, etc.

[0029] The user interface includes a keyboard and a touch panel for the process manager to input commands for managing the plasma processing apparatus 10, a display for visualizing and displaying the operating status of the plasma processing apparatus 10, and the like.

[0030] The storage unit stores control programs for executing various processes in the plasma processing apparatus 10 under the control of the process controller, recipes in which process condition data and the like are recorded, and the like. The process controller calls up and executes any control program or recipe from the storage unit as necessary, such as in response to an instruction from a user interface. As a result, a desired process is performed in the processing vessel 20 of the plasma processing apparatus 10 under the control of the process controller.

[0031] The above control programs and recipes can be used in a state stored in a computer-readable storage medium, such as a flash memory, a DVD, a Blu-ray disc, etc. The above recipes can also be used online by transmitting them from other devices at any time, for example, via a dedicated line.

[0032] The program for executing the plasma processing method according to the embodiment described below can be stored in a computer-readable storage medium. The program for executing the plasma processing method can also be used online by transmitting it from another device at any time, for example, via a dedicated line. The control unit 80 has a storage medium in which a program for executing the plasma processing method is stored, and executes the program to perform the plasma processing method according to the embodiment in the plasma processing device 10.

[0033] [Bottom of ceiling wall] Next, a microwave introduction mechanism of the bottom surface 11a of the top wall 11 of the processing vessel 20 shown in Fig. 1 will be described with reference to Fig. 2. Fig. 2 shows a cross section taken along line AA in Fig. 1, illustrating an example of the configuration of the bottom surface 11a of the top wall 11 of the processing vessel 20 according to the embodiment.

[0034] In the embodiment, seven microwave radiating parts 63 are arranged at equal intervals, one in the center and six on the periphery, and a microwave transmitting plate 1g of the central microwave radiating part 63 is exposed from the bottom surface 11a in the inner peripheral region of the top wall 11. Also, microwave transmitting plates 1a to 1f of the microwave radiating parts 63 in the outer peripheral region are exposed from the bottom surface 11a in the outer peripheral region of the top wall 11. The exposed surfaces of the microwave transmitting plates 1a to 1g are circular.

[0035] The microwave transparent plates 1a-1f are arranged symmetrically with respect to the center point O. In all of the microwave transparent plates 1a-1g, the distances between the center points of any three adjacent microwave transparent plates 1 are equal. Twelve gas nozzles 2 are arranged at equal intervals in the circumferential direction between the microwave transparent plates 1a-1f in the outer circumferential region and the microwave transparent plate 1g in the inner circumferential region.

[0036] The microwave introduction module 50 is an example of a plurality of plasma sources. In the embodiment, the plurality of plasma sources are microwave plasma sources, and refer to seven plasma sources that radiate microwaves from the microwave transmitting plates 1a to 1g of the microwave introduction module 50, respectively. Hereinafter, the power intensity of the microwaves introduced from each of the seven plasma sources into the processing vessel 20 is individually controlled. That is, the power intensity of the microwaves radiated from each of the microwave transmitting plates 1a to 1g into the processing vessel 20 is individually controlled for each plasma source. Note that the microwave transmitting plate 1 is a general term for the microwave transmitting plates 1a to 1g. The center point of the plasma source of the microwave transmitting plate 1g is O.

[0037] In the above example, the multiple plasma sources represented by microwave transmitting plates 1a-1g are provided on the inner and outer circumferential regions of the bottom surface 11a of the top wall 11, but the present invention is not limited to this. For example, at least one microwave transmitting plate 1 may be provided on the inner circumferential region of the bottom surface 11a, and at least three may be provided on the outer circumferential region. The inner circumferential region of the bottom surface 11a is, for example, a region of the bottom surface 11a that is closer to the inner circumferential side than the gas nozzle 2, and the outer circumferential region of the bottom surface 11a is a region of the bottom surface 11a that is closer to the outer circumferential side than the inner circumferential region of the bottom surface 11a.

[0038] [Substrate film structure] Next, the film structure of the substrate W on which a film is formed by the plasma processing apparatus 10 having such a configuration will be described with reference to Fig. 3. Fig. 3 is a diagram showing an example of the film structure of the substrate W1 according to the embodiment. The substrate W1 is an example of the substrate W. As shown in Fig. 3(a), the substrate W1 has a film structure in which a silicon oxide film (SiO2) 101 and a silicon oxide film 103 are formed on the front and back surfaces of a silicon (Si) base body 102, respectively.

[0039] There is a process for bonding substrates W together. For example, a process for bonding a silicon oxide film 101 on the surface of a substrate W1 in Fig. 3(a) to a silicon oxide film 101 on the surface of a substrate W2 (see Fig. 6) having the same film structure as the substrate W1 can be given as an example. For example, two substrates W are bonded together in a process such as a TSV (Through Silicon Via).

[0040] If there is distortion in either of the two substrates W, voids may occur on the bonded surface when the two substrates W are bonded together, or the state of distortion in the substrates W after bonding may worsen, resulting in defective products. In addition, there may be defects such as films formed on the surfaces of the two bonded substrates W peeling off due to stress.

[0041] In order to control the stress of the film formed on the substrate W, in this embodiment, the front surface of the substrate W is defined as the first surface, the back surface of the substrate W, which is the opposite surface of the first surface, is defined as the second surface, and a desired film is formed on the second surface so as to impart a desired film stress to the film on the first surface. As an example, for a substrate W1 having a film structure as shown in FIG. 3(a), a silicon nitride film (SiN) 104 is formed as a desired film on the back surface of the substrate W1 as shown in FIG. 3(b). The desired film has compressive stress or tensile stress. The stress of the film is inherent to the material. In the following description, regardless of the orientation of the substrate W, the surface on which the desired film is formed is referred to as the back surface (second surface) of the substrate W, and the surface opposite to the surface on which the desired film is formed is referred to as the front surface (first surface) of the substrate W.

[0042] For example, when a silicon nitride film 104 is formed on the back surface of the substrate W1, the silicon nitride film 104 has a compressive stress. The direction of the stress of the silicon nitride film 104 is shown by the outline arrow in Fig. 3(b). By forming the silicon nitride film 104 on the back surface of the substrate W1, a compressive stress shown by the outline arrow acts, and the distribution of the film stress of the silicon oxide film 101 on the front surface changes.

[0043] When a silicon oxide film is formed on the rear surface of the substrate W1, the direction of the stress of the silicon oxide film on the rear surface is opposite to the direction of the white arrow in Fig. 3(b) because the silicon oxide film has tensile stress. Therefore, the distribution of the film stress of the silicon oxide film 101 on the front surface can be changed depending on the type of film formed on the rear surface of the substrate W1.

[0044] Moreover, by controlling the amount of the film formed on the back surface of the substrate W, i.e., the film thickness, it is possible to impart a desired film stress to the silicon oxide film 101 on the front surface of the substrate W. In the plasma processing method according to the embodiment, a gas containing silicon and nitrogen is supplied from the gas supply device 3a to form the silicon nitride film 104. Examples of the gas containing silicon and nitrogen include silane (SiH4) gas and ammonia (NH3) gas.

[0045] The amount of silicon nitride film 104 formed on the rear surface of substrate W can be controlled by the power intensity of microwaves introduced into processing chamber 20 from seven plasma sources (microwave introduction modules 50) that radiate microwaves via microwave transmitting plates 1a-1g. The amount of silicon nitride film 104 increases as the power intensity of the microwaves from each plasma source increases. In other words, the thickness of silicon nitride film 104 increases.

[0046] The distribution of the silicon nitride film 104 formed on the back surface of the substrate W is affected by the power of the microwaves introduced from each of the seven plasma sources. That is, at the positions on the back surface of the substrate W below the positions of the seven plasma sources, the silicon nitride film 104 is formed in an amount corresponding to the intensity of the microwave power introduced from each plasma source. When the microwaves output from a certain plasma source are in an on state (a state in which microwaves are being output), the silicon nitride film 104 is formed with a thickness corresponding to the intensity of the microwave power at the positions on the back surface of the substrate W below that plasma source.

[0047] For example, in the process of forming the silicon nitride film 104, the silicon nitride film 104 may be formed on the rear surface of the substrate W in an amount corresponding to the power intensity of the microwaves introduced from each plasma source so as to impart a film stress that adjusts the distortion of the film on the front surface of the substrate W. Regardless of the state of distortion of the silicon oxide film 101 on the front surface of the substrate W before forming the silicon nitride film 104 on the rear surface, the silicon nitride film 104 may be formed on the rear surface of the substrate W in an amount corresponding to the power intensity of the microwaves introduced from each plasma source in order to forcibly form a desired distortion in the film on the front surface of the substrate W. This makes it possible to freely create the distortion state of the silicon oxide film 101 on the front surface of the substrate W. In other words, by controlling the power intensity of the microwaves introduced from each of the multiple plasma sources, the amount of the silicon nitride film 104 formed on the rear surface of the substrate W and its distribution within the rear surface of the substrate W can be controlled.

[0048] A silicon nitride film 104 may be formed on the rear surface of the substrate W in an amount corresponding to the power intensity of the microwaves introduced from each plasma source so as to impart a film stress that corrects distortion of the silicon oxide film 101. For example, a silicon nitride film 104 may be formed on the rear surface of the substrate W in an amount corresponding to the power intensity of the microwaves introduced from each plasma source so as to impart a film stress that smooths distortion on the surface of the silicon oxide film 101.

[0049] Control of the microwave power intensity includes control of the on and off states of multiple plasma sources, i.e., control of the microwave power intensity includes control from making the microwave power 0 (i.e., off state) to making the microwave power greater than 0 (i.e., on state).

[0050] In the on state, the microwave power intensity (level) can be controlled stepwise or continuously. Below the plasma source with the microwave power turned on, the silicon nitride film 104 is formed in an amount according to the power intensity. By controlling the microwave power intensity emitted from each plasma source to 0 or a value greater than 0, the distribution of the silicon nitride film 104 in the rear surface of the substrate W can be controlled, and the amount of the silicon nitride film 104 can be controlled. This allows the silicon oxide film 101 on the front surface of the substrate W to be given a film stress according to the amount and position of the silicon nitride film 104, and the distortion of the silicon oxide film 101 on the front surface of the substrate W can be adjusted. Hereinafter, "controlling the on / off state of the plasma source" is an example of controlling the microwave power intensity, and the off state of the plasma source indicates controlling the microwave power intensity to 0. The on state of the plasma source indicates controlling the microwave power intensity to a value greater than 0. The value of the microwave power intensity in the ON state may be controlled individually for each plasma source, i.e., the value of the power intensity in the ON state may be controlled to a different value for each plasma source, or may be variably controlled over time.

[0051] [Plasma treatment method] A plasma processing method according to an embodiment for performing the above-described film formation process of the silicon nitride film 104 on the rear surface of the substrate W (hereinafter, referred to as rear surface film formation) will be described with reference to Fig. 4. Fig. 4 is a flowchart showing an example of the plasma processing method according to the embodiment.

[0052] This process is controlled by the control unit 80. When this process is started, the control unit 80 loads the substrate W into the processing vessel 20 and places it on the mounting table 21 (step S1). At this time, the substrate W is placed so that the back surface of the substrate W, which is the surface to be film-formed, faces upward (facing the microwave transmitting plate 1). Next, the control unit 80 supplies silane gas and ammonia gas, as examples of gases containing silicon and nitrogen, from the gas supply device 3a into the processing vessel 20 (step S2).

[0053] Next, the control unit 80 controls the microwave power intensity output from the seven plasma sources individually for each plasma source (step S3). The control of the microwave power intensity includes an off state and an on state. The control of the microwave power intensity also includes various power intensities in the on state.

[0054] Next, plasma is generated according to the power intensity of the microwave output from each plasma source (step S4). Here, plasma of a gas containing silicon and nitrogen is generated according to the power intensity of the microwave output from each plasma source.

[0055] Next, the control unit 80 deposits a silicon nitride film 104 on the rear surface of the substrate W using plasma generated so as to impart a desired film stress to the silicon oxide film 101 on the front surface of the substrate W (step S5). This adjusts the compressive stress generated in the substrate W. After the silicon nitride film 104 is deposited on the rear surface of the substrate W, this process ends. If another desired film is to be deposited on the rear surface instead of the silicon nitride film 104 in step S5, a gas for depositing the desired film is supplied in step S2.

[0056] <Example 1> As a result of carrying out Example 1 of the plasma processing method according to the embodiment described above, the state of the film on the substrate W is shown in Fig. 5. Fig. 5 is a diagram showing an example of Example 1 of the plasma processing method according to the embodiment.

[0057] In the top rows (A) and (B) of Fig. 5, for each of the seven plasma sources, the diagonal lines indicate that the microwave output is controlled to the on state, and the white circles indicate that the microwave output is controlled to the off state. When the microwave output is controlled to the on state, the intensity of the microwave power output from the plasma source may differ for each plasma source and is controlled individually. No silicon nitride film 104 is formed on the rear surface of the substrate W below the plasma source controlled to the off state.

[0058] Pattern 1 (front surface) in FIG. 5(a: leftmost) shows the measurement result of the unevenness (distortion) state of a silicon oxide film 101 on the front surface of a substrate W1 having a diameter of 300 mm, which is an example of a substrate W, before a film is formed on the rear surface.

[0059] As shown in Fig. 5(A), a silicon nitride film 104 was formed on the rear surface of the substrate W1 in an amount corresponding to the power intensity of the microwaves output from the plasma source. Thereafter, the unevenness of the silicon oxide film 101 on the front surface of the substrate W1 was measured. The corrected pattern 1 in Fig. 5(a: center) shows the difference between the measured value of the unevenness of the silicon oxide film 101 on the front surface of the substrate W1 before the rear surface film is formed, as shown in pattern 1 in Fig. 5(a: leftmost), and the measured value of the unevenness of the silicon oxide film 101 on the front surface of the substrate W1 after the silicon nitride film 104 is formed on the rear surface.

[0060] In other words, the corrected pattern 1 shows the distribution of the change in the distortion of the silicon oxide film 101 on the front surface of the substrate W, i.e., the change in the surface unevenness, due to the film stress applied to the silicon oxide film 101 on the front surface of the substrate W by forming a silicon nitride film 104 on the back surface of the substrate W1.

[0061] 5(A), the plasma sources of microwave transmitting plates 1a, 1d, and 1g are controlled to be in the off state, and the other plasma sources are controlled to be in the on state. In this case, silicon nitride film 104 is not formed in the area below the plasma sources of microwave transmitting plates 1a, 1d, and 1g. Silicon nitride film 104 is formed on the rear surface below the plasma sources of the other microwave transmitting plates 1b, 1c, 1e, and 1f in an amount according to the power intensity of the microwaves output from each plasma source.

[0062] As a result, in the substrate W1, the desired unevenness shown in the corrected pattern (front surface) in Fig. 5(c: center) could be created on the surface of the corrected silicon oxide film 101. In other words, the substrate W1 could forcibly distort the silicon oxide film 101 into the corrected pattern (front surface) in Fig. 5(c: center) in accordance with the amount of the silicon nitride film 104 formed on the rear surface, regardless of the distribution of distortion on the surface of the silicon oxide film 101 of the pattern 1 shown in Fig. 5(a: leftmost) of the substrate W1 before the rear surface film formation.

[0063] 5B, the plasma sources of microwave transmitting plates 1c, 1f, and 1g are controlled to be in the off state, and the other plasma sources are controlled to be in the on state. In this case, silicon nitride film 104 is not formed in the area below the plasma sources of microwave transmitting plates 1c, 1f, and 1g. Silicon nitride film 104 is formed on the rear surface below the plasma sources of the other microwave transmitting plates in an amount according to the power intensity of the microwaves output from each plasma source.

[0064] As a result, the unevenness shown in the corrected pattern (front surface) in Fig. 5(c: rightmost) could be created on the surface of the corrected silicon oxide film 101. In other words, the silicon oxide film 101 of the substrate W1 could be forcibly distorted into the corrected pattern (front surface) in Fig. 5(c: rightmost) in accordance with the amount of the silicon nitride film 104 formed, regardless of the distribution of distortion on the surface of the silicon oxide film 101 of the substrate W1 before the backside film formation in the pattern 1 shown in Fig. 5(a: leftmost) in Fig. 5(a).

[0065] 5(b) shows the state of the unevenness (distortion) of the silicon oxide film 101 on the surface of the substrate W2 having a diameter of 300 mm, which is an example of the substrate W, before the backside film is formed. Similar results were obtained for the substrate W2.

[0066] That is, the same amount of silicon nitride film 104 as that of substrate W1 was formed on the rear surface of substrate W2 according to the on / off states of the seven plasma sources shown in Fig. 5(A) and the on / off states of the seven plasma sources shown in Fig. 5(B). As a result, corrected pattern 2 shown in Fig. 5(b: center) showed approximately the same distribution as corrected pattern 1 shown in Fig. 5(a: center). Moreover, corrected pattern 2 shown in Fig. 5(b: rightmost) showed approximately the same distribution as corrected pattern 1 shown in Fig. 5(a: rightmost).

[0067] As a result, in the substrate W2, it was possible to create an unevenness on the surface of the corrected silicon oxide film 101 that is roughly the same as the corrected pattern (surface) in Fig. 5 (c: center or rightmost). From the above, it was found that the corrected pattern (surface) can be freely changed by controlling the amount (and distribution) of the silicon nitride film 104 formed on the rear surface of the substrate W2 by adjusting the power intensity of the microwaves output from the seven plasma sources.

[0068] [Board bonding] The above-described back surface film formation on the substrates W1 and W2 and bonding of the substrates W1 and W2 will be described with reference to Fig. 6 and Fig. 7. Fig. 6 is a diagram showing an example of bonding of the substrates after processing by the plasma processing method according to the embodiment. Fig. 7 is a diagram showing an example of a result of bonding the substrates according to the embodiment.

[0069] For example, as shown in Fig. 5(A) and Fig. 6(a), the on / off state of each plasma source is controlled to deposit a desired amount of silicon nitride film 104a at a desired position on the rear surface of substrate W1. As a result, the unevenness of silicon oxide film 101a on the front surface of substrate W1 is corrected to the corrected pattern shown in Fig. 5(c: center).

[0070] 5(B) and 6(b), the on / off state of each plasma source is controlled to deposit a desired amount of silicon nitride film 104b at a desired position on the rear surface of substrate W2. As a result, the unevenness of silicon oxide film 101b on the front surface of substrate W2 is corrected to the corrected pattern shown in FIG. 5(c: rightmost).

[0071] In this state, the silicon oxide films 101a and 101b of the substrates W1 and W2 in FIG. 6 are bonded together with their surfaces facing each other as shown in the contact surface B. At this time, the unevenness of the silicon oxide film 101a on the surface of the substrate W1 and the unevenness of the silicon oxide film 101b on the surface of the substrate W2 are inverted patterns. Therefore, the positions of the convex parts on the surface of the substrate W2 are aligned with the positions of the concave parts of the silicon oxide film 101a on the surface of the substrate W1, and the positions of the concave parts on the surface of the substrate W2 are aligned with the positions of the convex parts of the silicon oxide film 101a on the surface of the substrate W1. As a result, as shown in FIG. 7(a), the substrates W1 and W2 can be bonded together without voids at the contact surface B between the silicon oxide film 101a of the substrate W1 and the silicon oxide film 101b of the substrate W2.

[0072] Conventionally, as shown in Fig. 7(b), if there is distortion on the surface of the substrate W1 or W2, voids Vi are generated on the surface where the substrates W1 and W2 are bonded together, or the distortion of the substrates W1 and W2 after bonding is aggravated, resulting in defective products. In addition, there are cases where the silicon oxide film 101 formed on the surface of the substrate W1 or W2 peels off due to stress.

[0073] In contrast, when the plasma processing method according to this embodiment is performed, by forcibly forming distortions on the surfaces of substrate W1 and substrate W2, substrate W1 and substrate W2 can be bonded together without the generation of voids.

[0074] [Membrane strain measurement] In the first embodiment, a desired amount of silicon nitride film 104 was formed at a desired position without measuring the amount of distortion (unevenness) of the film on the front surface of the substrate W before the back surface film is formed. However, the amount of distortion of the front surface or back surface of the substrate W before the back surface film is formed may be measured.

[0075] Then, based on the measurement results, the power intensity of the microwaves introduced from each plasma source may be controlled so as to adjust the amount of silicon nitride film 104 formed based on the measured amount of distortion on the front or rear surface of the substrate W. In this way, the amount and position of silicon nitride film 104 formed may be specified based on the amount of distortion of the film on the front surface of the substrate W before correction, and the film may be formed on the rear surface. That is, in the first embodiment, the amount of distortion on the front or rear surface of the substrate W before the film is formed on the rear surface may or may not be measured. However, since the location where the silicon nitride film 104 should be formed can be confirmed based on the measurement results, it is preferable to measure the amount of distortion on the front or rear surface of the substrate W before the film is formed on the rear surface in the first embodiment as well.

[0076] [Membrane strain measurement example] An example of measuring the distortion of the film will be described with reference to Fig. 8. Fig. 8 is a diagram for explaining an example of a method for measuring the distortion of the film according to the embodiment.

[0077] In FIG. 8, the area of ​​the substrate W is divided into blocks a to g that correspond one-to-one to the plasma sources of the microwave transmitting plates 1a to 1g, and the average amount of distortion in each block is calculated. As shown in FIG. 8, the amount of distortion in each block is measured by vertically arranging the substrate W, scanning the laser light while irradiating the front or back surface of the substrate W to be measured, and forming an image of the reflected light with a CMOS sensor. The laser light can measure the amount of distortion, such as warping or waviness, of the substrate W caused by stress without contact. Note that the method of measuring the amount of distortion on the front or back surface of the substrate W shown above is an example, and is not limited to this. For example, the amount of plasma for each area may be determined in the following steps. The amount of distortion over the entire wafer is measured (step S11). The average amount of distortion over the entire wafer is measured (step S12). The wafer is divided into areas corresponding to the arrangement of multiple plasma sources, and the average amount of distortion for each area is measured (step S13). The average amount of distortion over the entire wafer is compared with the average amount of distortion for each area to determine the amount of plasma for each area (step S14).

[0078] <Example 2> Next, Example 2 of the plasma processing according to the embodiment will be described with reference to Fig. 9. Fig. 9 is a diagram showing an example of Example 2 of the plasma processing method according to the embodiment. In Example 1, a desired distribution of projections and recesses was forcibly created on the front surface of the substrate W by forming a film on the rear surface of the substrate W. Example 1 of the plasma processing according to the embodiment is suitable for cases where the distortion of the film on the front surface of the substrate W is small or where it is possible to forcibly distort the substrate W.

[0079] On the other hand, in Example 2, a desired film is locally formed on the back surface of the substrate W in accordance with the measurement results of the amount of distortion on the front surface and / or back surface of the substrate W, so as to eliminate distortion of the film on the front surface of the substrate W and flatten the front surface by film formation on the back surface of the substrate W. Example 2 of the plasma processing according to the embodiment is suitable for cases where distortion of the film on the front surface of the substrate W is large or where it is impossible to forcibly distort the substrate W.

[0080] For example, as shown in FIG. 9(a), the substrate W has a film structure in which a silicon oxide film 101 is formed on the surface of a silicon base 102. When distortion is large in region C of the base 102 of the substrate W, the silicon oxide film 101 in region C may peel off from the base 102 due to the distortion of the base 102. In contrast to the film structure in the upper part of FIG. 9(a), the lower part of FIG. 9(a) is a view of the surface 102s of the base 102 viewed from above. In this case, there is distortion in region C of the surface 102s of the base 102. In Example 2, a silicon nitride film 104 is formed on the back surface of region C of the base 102.

[0081] The measurement result shows that there is a distortion in the C region of the surface 102s of the silicon substrate 102 shown in FIG. 9(a). Based on the measurement result, as shown in the film structure in the upper part of FIG. 9(b), a silicon nitride film 104 is locally formed on the back surface 102u of the substrate 102 corresponding to the C region. The amount of the silicon nitride film 104 formed is determined according to the amount of distortion. Specifically, the intensity of the power introduced from each of the multiple plasma sources is controlled so as to impart a film stress that flattens the silicon oxide film 101 on the surface of the substrate W. Here, in order to form the silicon nitride film 104 at a location corresponding to the C region of the back surface 102u of the substrate 102, the plasma source of the microwave transmitting plate 1a corresponding to the C region of the back surface 102u of the substrate 102 is turned on, and the other plasma sources are turned off. This allows the silicon nitride film 104 to be locally formed at a location corresponding to the C region of the back surface 102u of the substrate 102, which is below the plasma source of the microwave transmitting plate 1a.

[0082] The silicon nitride film 104 has a compressive stress. Therefore, as shown in the lower part of FIG. 9(b), a distribution of film stress occurs on the rear surface 102u of the base 102 in accordance with the compressive stress of the silicon nitride film 104. This changes the distribution of film stress on the front surface 102s of the base 102. As a result, as shown in the lower part of FIG. 9(c), the front surface 102s of the base 102 is flattened. This makes it possible to prevent peeling of the silicon oxide film 101 formed on the front surface 102s of the base 102, as shown in the upper part of FIG. 9(c).

[0083] As described above, the plasma processing method according to this embodiment can adjust the distortion of the substrate W. This allows the films on the front surfaces of two substrates W to be bonded together without generating voids. In addition, it is possible to avoid problems such as the film formed on the front surface of the substrate W peeling off due to stress. Furthermore, the electrical conductivity of the film can be increased by alleviating the stress on the front surface film by forming a film on the back surface.

[0084] In this way, by controlling the power intensity of the microwaves output from the multiple plasma sources, the amount and distribution of the desired film formed on the back surface of the substrate W can be controlled, thereby controlling the stress of the film on the front surface of the substrate W.

[0085] The direction of the stress varies depending on the desired film to be formed on the back surface. Therefore, it is preferable to control the power intensity of the microwaves output from each plasma source so as to adjust the amount of the desired film to be formed in accordance with the direction of the stress of the desired film in the process of forming the desired film.

[0086] In Example 1 of the plasma processing method according to the present embodiment, the step of individually controlling the power intensity includes controlling the power intensity of microwaves introduced from each of the multiple plasma sources so as to impart a first film stress to a film on a first surface of a first substrate to be processed, the step of forming a desired film includes generating plasma of a gas according to the power intensity of microwaves introduced from each of the multiple plasma sources, and forming a desired film on a second surface of the first substrate to be processed that is the opposite surface to the first surface so as to impart a first film stress to a film on the first surface of the first substrate to be processed, and the step of individually controlling the power intensity includes controlling the power intensity of microwaves introduced from each of the multiple plasma sources so as to impart a first film stress to a film on the first surface of the first substrate to be processed. The step of controlling the power intensity of the microwaves introduced from each of the multiple plasma sources so as to impart a second film stress for making the distortion state of the film on the first surface of the second substrate to an inverted state from the distortion state of the film on the first surface of the first substrate when bonding the film on the first surface of the first substrate to the film on the first surface of the first substrate to be processed, and forming a desired film includes generating a plasma of a gas according to the power intensity of the microwaves introduced from each of the multiple plasma sources, and forming a desired film on the second surface of the second substrate to be processed, which is the surface opposite to the first surface, so as to impart the second film stress to the film on the first surface of the second substrate to be processed. This allows the two substrates to be bonded together without generating voids.

[0087] In Example 2 of the plasma processing method according to this embodiment, the step of individually controlling the power intensity controls the power intensity of the microwaves introduced from each of the multiple plasma sources so as to impart a film stress that smoothes the film on the first surface of the substrate to be processed, and the step of forming a desired film generates gas plasma according to the power intensity of the microwaves introduced from each of the multiple plasma sources, and forms the desired film on the second surface of the substrate to be processed, which is the opposite surface to the first surface, so as to impart a film stress that smoothes the film on the first surface of the substrate to be processed. This makes it possible to eliminate peeling of the film on the substrate W due to distortion of the substrate W.

[0088] The plasma processing method and plasma processing apparatus according to the embodiments disclosed herein should be considered as illustrative in all respects and not restrictive. The embodiments can be modified and improved in various forms without departing from the scope and spirit of the appended claims. The matters described in the above embodiments can be configured in other ways as long as they are not inconsistent, and can be combined as long as they are not inconsistent.

[0089] The plasma processing method and the method for measuring the amount of distortion on the front or rear surface of a substrate shown in FIG. 4 are performed automatically mainly under the control of the control unit 80 or a measuring device (not shown).

[0090] This application claims priority to U.S. Application 17 / 176446, filed in the U.S. Patent and Trademark Office on February 16, 2021, the entire contents of which are incorporated herein by reference. [Explanation of symbols]

[0091] 3a Gas supply equipment 10 Plasma treatment device 20 Processing vessel 21 Placement table 50 Microwave introduction module 80 Control section

Claims

1. A plasma processing method carried out in a plasma processing apparatus having a processing vessel for accommodating a substrate to be processed, a plurality of plasma sources for supplying electromagnetic waves, and a gas supply device for supplying gas, comprising: supplying a gas from the gas supply device into the processing chamber; individually controlling the intensity of power of electromagnetic waves introduced into the processing vessel from each of the plurality of plasma sources; generating plasma of the gas by adjusting the power intensity of electromagnetic waves introduced from each of the plurality of plasma sources, and depositing a desired film on a second surface of the substrate to be processed, the second surface being the opposite surface to the first surface, so as to impart a desired film stress to the film on the first surface of the substrate to be processed; measuring a distribution of film stress on the first surface or the second surface, The step of individually controlling the power intensity controls the power intensity of the electromagnetic waves introduced from each of the plasma sources so as to adjust the amount of deposition of the desired film based on the distribution of the measured film stress.

2. A plasma processing method carried out in a plasma processing apparatus having a processing vessel for accommodating a substrate to be processed, a plurality of plasma sources for supplying electromagnetic waves, and a gas supply device for supplying gas, comprising: supplying a gas from the gas supply device into the processing chamber; individually controlling the intensity of power of electromagnetic waves introduced into the processing vessel from each of the plurality of plasma sources; generating plasma of the gas by adjusting the power intensity of electromagnetic waves introduced from each of the plurality of plasma sources, and depositing a desired film on a second surface of the substrate to be processed, the second surface being the opposite surface to the first surface, so as to impart a desired film stress to the film on the first surface of the substrate to be processed; The process of individually controlling the power intensity is a plasma processing method in which the power intensity of the electromagnetic waves introduced from each of the plasma sources is controlled so as to adjust the amount of the desired film formed in the process of forming the desired film according to the direction of stress of the desired film.

3. A plasma processing method carried out in a plasma processing apparatus having a processing vessel for accommodating a substrate to be processed, a plurality of plasma sources for supplying electromagnetic waves, and a gas supply device for supplying gas, comprising: supplying a gas from the gas supply device into the processing chamber; individually controlling the intensity of power of electromagnetic waves introduced into the processing vessel from each of the plurality of plasma sources; generating plasma of the gas by adjusting the power intensity of electromagnetic waves introduced from each of the plurality of plasma sources, and depositing a desired film on a second surface of the substrate to be processed, the second surface being the opposite surface to the first surface, so as to impart a desired film stress to the film on the first surface of the substrate to be processed; the step of individually controlling the power intensity includes controlling the power intensity of the electromagnetic waves introduced from each of the plurality of plasma sources so as to impart a film stress that smoothes a film on a first surface of the substrate to be processed; The process of forming the desired film is a plasma processing method in which plasma of the gas is generated by adjusting the power intensity of electromagnetic waves introduced from each of the multiple plasma sources, and the desired film is formed on a second surface of the substrate to be processed, which is the opposite surface to the first surface, so as to impart a film stress that smoothes the film on the first surface of the substrate.

4. the step of depositing the desired film includes depositing the desired film on the second surface in an amount corresponding to the power intensity of the electromagnetic waves introduced from each plasma source so as to impart a film stress that adjusts distortion of the film on the first surface; The plasma processing method according to claim 1 .

5. the step of depositing the desired film includes depositing the desired film on the second surface in an amount corresponding to the intensity of the power of the electromagnetic waves introduced from each plasma source so as to impart a film stress for correcting distortion of the film on the first surface; The plasma processing method according to claim 1 .

6. The step of supplying a gas includes supplying a gas containing silicon and nitrogen, the step of forming the desired film includes forming a silicon nitride film as the desired film on the second surface, and adjusting a film formation amount of the silicon nitride film to adjust a compressive stress of the silicon nitride film; The plasma processing method according to claim 1 .

7. the step of individually controlling the power intensity includes controlling the power intensity of the electromagnetic waves introduced from each of the plurality of plasma sources so as to impart a first film stress to a film on a first surface of a first processed substrate; The step of forming the desired film includes generating plasma of the gas by adjusting the power intensity of electromagnetic waves introduced from each of the plurality of plasma sources, and forming a desired film on a second surface of the first substrate, which is the opposite surface of the first substrate, so as to impart the first film stress to a film on the first surface of the first substrate; the step of individually controlling the power intensity includes controlling the power intensity of the electromagnetic waves introduced from each of the plurality of plasma sources so as to impart a second film stress for making the distortion state of the film on the first surface of the second substrate to be processed a state that is inverted from the distortion state of the film on the first surface of the first substrate when bonding the film on the first surface of the second substrate to the film on the first surface of the first substrate to be processed; the step of forming the desired film includes generating plasma of the gas by adjusting the power intensity of electromagnetic waves introduced from each of the plurality of plasma sources, and forming a desired film on a second surface of the second substrate to be processed, the second surface being the opposite surface to the first surface, so as to impart the second film stress to a film on the first surface of the second substrate to be processed; The plasma processing method according to claim 1 .

8. A plasma processing apparatus including a processing vessel for accommodating a substrate to be processed, a plurality of plasma sources for supplying electromagnetic waves, a gas supply device for supplying gas, a control unit for controlling film formation on the substrate to be processed, and a measurement device, The control unit is supplying a gas from the gas supply device into the processing chamber; individually controlling the intensity of power of electromagnetic waves introduced into the processing vessel from each of the plurality of plasma sources; generating plasma of the gas by adjusting the power intensity of electromagnetic waves introduced from each of the plurality of plasma sources, and depositing a desired film on a second surface of the substrate to be processed, the second surface being the opposite surface to the first surface, so as to impart a desired film stress to the film on the first surface of the substrate to be processed; measuring a distribution of film stress on the first surface or the second surface by the measuring device; The step of individually controlling the power intensity controls the power intensity of the electromagnetic waves introduced from each of the plasma sources so as to adjust the amount of deposition of the desired film based on the distribution of the measured film stress.

9. A plasma processing apparatus having a processing vessel that accommodates a substrate to be processed, a plurality of plasma sources that supply electromagnetic waves, a gas supply device that supplies gas, and a control unit that controls film formation on the substrate to be processed, The control unit is supplying a gas from the gas supply device into the processing chamber; individually controlling the intensity of power of electromagnetic waves introduced into the processing vessel from each of the plurality of plasma sources; generating plasma of the gas by controlling the power intensity of the electromagnetic waves introduced from each of the plurality of plasma sources, and depositing a desired film on a second surface of the substrate to be processed, the second surface being the opposite surface to the first surface, so as to impart a desired film stress to the film on the first surface of the substrate to be processed; The process of individually controlling the power intensity controls the power intensity of the electromagnetic waves introduced from each of the plasma sources so as to adjust the amount of the desired film formed in accordance with the direction of stress of the desired film in the process of forming the desired film.

10. A plasma processing apparatus having a processing vessel for accommodating a substrate to be processed, a plurality of plasma sources for supplying electromagnetic waves, a gas supply device for supplying gas, and a control unit for controlling film formation on the substrate to be processed, The control unit is supplying a gas from the gas supply device into the processing chamber; individually controlling the intensity of power of electromagnetic waves introduced into the processing vessel from each of the plurality of plasma sources; generating plasma of the gas by controlling the power intensity of the electromagnetic waves introduced from each of the plurality of plasma sources, and depositing a desired film on a second surface of the substrate to be processed, the second surface being the opposite surface to the first surface, so as to impart a desired film stress to the film on the first surface of the substrate to be processed; the step of individually controlling the power intensity includes controlling the power intensity of the electromagnetic waves introduced from each of the plurality of plasma sources so as to impart a film stress that smoothes a film on a first surface of the substrate to be processed; The process of forming the desired film in the plasma processing apparatus generates plasma of the gas by adjusting the power intensity of electromagnetic waves introduced from each of the multiple plasma sources, and forms the desired film on a second surface of the substrate to be processed, which is the opposite surface to the first surface, so as to impart a film stress that smoothes the film on the first surface of the substrate.

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