Positioning method and positioning device

Abstract

To provide a positioning method and a positioning device capable of accurately and inexpensively performing the positioning of a detector to the center position.SOLUTION: A positioning method includes: a matching step of rotating a detector in a second rotation direction and matching a tip position of a stylus projecting from the bottom surface with the bias of a biasing member to a height position of the bottom surface when the detector is in the center position; first contact steps S3-S5 in which the tip of the stylus is brought into contact with the surface to be measured by moving the detector relative to the surface to be measured in a state where the tip position of the stylus is matched with a height position; and a second contact step in which the detector is rotated in a first rotation direction and the bottom surface is brought into contact with the surface to be measured after completion of the first contact step.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a positioning method and a positioning device for positioning a detector of a surface shape measuring machine at the center of its swing range. [Background technology]

[0002] There is known a surface shape measuring machine that measures the surface shape such as the surface roughness and contour shape of a measured surface of a workpiece. This surface shape measuring machine includes a stylus that is attached so as to be able to swing about a swing fulcrum, a detector having a contact needle or the like provided at the tip of the stylus, and a drive unit that supports the detector so as to be able to swing and moves it along the measured surface. With the contact needle of the detector in contact with the measured surface, the drive unit moves the detector and the measured surface relatively in the horizontal direction, thereby detecting the displacement of the stylus (contact needle) while tracing the measured surface with the contact needle. The surface shape of the measured surface is obtained based on the displacement detection result.

[0003] A well-known example of such a surface shape measuring instrument is a skid measurement type measuring instrument that traces the surface to be measured with a stylus while a skid attached to a detector is in contact with the surface to be measured (see Patent Documents 1 and 2). This surface shape measuring instrument can detect the displacement of the stylus relative to the skid.

[0004] In recent years, there has been an increasing need to automate surface shape measurements using surface shape measuring instruments. For this reason, a robot arm that holds the surface shape measuring instrument is controlled to bring the stylus of the detector into contact with the surface to be measured using the robot arm, and then the driving unit is driven to move the detector relatively in the horizontal direction to the surface to be measured, thereby enabling automatic measurement of the surface shape (see Patent Document 3). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2013-257167 A [Patent Document 2] Patent No. 6458335 [Patent Document 2] Patent No. 6800421 Summary of the Invention [Problem to be solved by the invention]

[0006] Incidentally, when performing surface profile measurement with a surface profile measuring instrument using a robot arm as described in Patent Document 3, in order to prevent the vibration of the robot arm from affecting the results of the surface profile measurement, it is desirable to use the skid measurement type surface profile measuring instrument described in Patent Documents 1 and 2. The skid is in constant contact with the surface to be measured, so the effect of the vibration of the robot arm on the results of the surface profile measurement can be reduced.

[0007] However, when performing surface shape measurement using a skid measurement type surface shape measuring instrument, it is necessary to position the detector at the center of its swing range (movable range) with the skid in contact with the surface to be measured. Therefore, when the skid of the detector is brought into contact with the surface to be measured by a robot arm, it is necessary to teach the robot arm so that the detector is positioned at the center, but teaching of the robot arm is generally performed by a method that relies on visual inspection. As a result, teaching the robot arm takes time, the positioning accuracy of the detector's center position varies from operator to operator, or the detector may be damaged by being pressed too hard against the surface to be measured.

[0008] Instead of teaching the robot arm visually, a method can be considered in which a detection switch (detection sensor) capable of detecting whether the detector is in the center position is provided in the surface profile measuring machine, and the robot arm is taught so that the detector is positioned in the center position based on the detection result of this detection switch. However, this method has the problem of increased costs because it is necessary to add the detection switch and its wiring to the surface profile measuring machine. There are also other issues, such as the need to position the detection switch.

[0009] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a positioning method and a positioning device that can position a detector at its central position with high accuracy and at low cost. [Means for solving the problem]

[0010] A positioning method for achieving the object of the present invention includes a detector including: a skid having a bottom surface that contacts a surface to be measured and a through hole that opens into the bottom surface; a stylus supported so as to be swingable around a swing fulcrum; a contact needle provided at a tip of the stylus that approaches the skid when the stylus rotates in a first rotation direction and moves away from the skid when the stylus rotates in a second rotation direction opposite to the first rotation direction and that is inserted into the through hole; and a biasing member that biases the stylus in the first rotation direction; and a drive unit that holds the detector swingably in the first rotation direction and the second rotation direction and moves the detector in a drive direction perpendicular to the axial direction of the swing fulcrum. The positioning method for a surface shape measuring instrument having a skid for positioning a detector at a central position of the detector's oscillation range when the skid is brought into contact with the surface to be measured includes: a matching step of rotating the detector in a second rotation direction to match the tip position of the stylus protruding from the bottom surface by the biasing member with the height position of the bottom surface when the detector is in the central position; a first contact step of moving the detector relative to the surface to be measured with the tip position of the stylus matched to the height position; and a second contact step of rotating the detector in the first rotation direction after completion of the first contact step to match the bottom surface with the surface to be measured.

[0011] According to this positioning method, the detector can be positioned at the center position without relying on the operator's visual inspection or providing the surface shape measuring instrument with a detection switch (detection sensor) that can detect whether the detector is in the center position.

[0012] In a positioning method according to another aspect of the present invention, the first contact step includes a moving step of moving the detector relative to the measured surface to move one of the tip of the stylus and the measured surface toward the other, a detecting step of continuously detecting the presence or absence of displacement of the stylus while the moving step is being performed, and a stopping step of stopping the moving step when displacement of the stylus is detected in the detecting step. This makes it possible to position the detector to the central position without relying on the operator's visual inspection or providing the surface shape measuring instrument with a detection switch capable of detecting whether the detector is at the central position.

[0013] In a positioning method according to another aspect of the present invention, the moving step controls a robot that holds the surface shape measuring device and is capable of changing the position and orientation of the surface shape measuring device to move the detector toward the surface to be measured.

[0014] In a positioning method according to another aspect of the present invention, in the matching step, a holder is removably attached to the drive unit, and the detector is pressed by the holder to rotate it a certain angle in the second rotation direction to match the tip position of the stylus to the height position, and rotation restriction is performed by the holder to restrict rotation of the detector in the first rotation direction, and in the second contact step, the holder is removed from the drive unit to release the rotation restriction, thereby rotating the detector in the first rotation direction.

[0015] A positioning device for achieving the object of the present invention is a detector including a skid having a bottom surface that contacts a surface to be measured and a through hole that opens into the bottom surface, a stylus supported so as to be swingable around a swing fulcrum, a contact needle provided at a tip of the stylus that approaches the skid when the stylus rotates in a first rotation direction and moves away from the skid when the stylus rotates in a second rotation direction opposite to the first rotation direction and is inserted into the through hole, and a biasing member that biases the stylus in the first rotation direction, and a drive unit that holds the detector swingably in the first rotation direction and the second rotation direction and moves the detector in a drive direction perpendicular to the axial direction of the swing fulcrum, the positioning device positions the detector at a central position of the swing range of the detector when the skid is brought into contact with the surface to be measured, the positioning device comprising a holder attached to the drive unit, and a pressing state in which the detector is pressed to rotate in the second rotation direction, and a biasing member for biasing the stylus in the first rotation direction. the detector includes a holder that can be switched between a pressed state and a released state in which the pressure is released, a relative movement unit that moves the detector relative to the surface to be measured, a switching control unit that controls switching of the holder between the pressed state and the released state, a movement control unit that drives the relative movement unit to move one of the tip of the stylus and the surface to be measured toward the other when the holder is switched to the pressed state by the switching control unit, and a displacement detection unit that continuously detects whether or not the stylus is displaced while the relative movement unit is being driven, wherein the holder in the pressed state matches the tip position of the stylus protruding from the bottom surface due to the bias of the biasing member with the height position of the bottom surface when the detector is in the central position, the movement control unit stops driving the relative movement unit when displacement of the stylus is detected by the displacement detection unit, and when the driving of the relative movement unit by the movement control unit is stopped, the switching control unit switches the holder from the pressed state to the released state, thereby rotating the detector in a first rotation direction to contact the bottom surface with the surface to be measured.

[0016] In the positioning device according to another aspect of the present invention, the relative moving unit is a robot that holds the surface profile measuring device and is capable of changing the position and attitude of the surface profile measuring device. Effect of the Invention

[0017] The present invention can position the detector at the center position with high accuracy and at low cost. [Brief description of the drawings]

[0018] [Figure 1] FIG. 1 is a schematic diagram showing an example of a surface roughness measuring system according to a first embodiment. [Diagram 2] FIG. 2 is an enlarged view of the tip portion of the robot arm. [Diagram 3] FIG. 2 is an enlarged view of a detector of the surface roughness measuring instrument. [Figure 4] 11 is an explanatory diagram for explaining generation of teaching information for each surface to be measured; FIG. [Diagram 5] This is an explanation for explaining a problem that occurs when generating teaching information. [Figure 6] 11 is a flowchart showing the flow of a positioning method for positioning a detector at a central position when generating teaching information of a surface to be measured. [Figure 7] FIG. 7 is an explanatory diagram for explaining step S1 of the flowchart shown in FIG. 6. [Figure 8] FIG. 7 is an explanatory diagram for explaining steps S2 and S3 of the flowchart shown in FIG. [Figure 9] FIG. 7 is an explanatory diagram for explaining steps S4 and S5 of the flowchart shown in FIG. [Figure 10] FIG. 7 is an explanatory diagram for explaining step S6 of the flowchart shown in FIG. 6. [Figure 11] FIG. 4 is a schematic diagram showing an example of a surface roughness measuring system according to a second embodiment. [Figure 12] 10 is a flowchart showing the flow of a positioning method for positioning a detector at a central position when generating teaching information for a measurement surface in the second embodiment. [Figure 13] FIG. 13 is an explanatory diagram for explaining step S1A of the flowchart shown in FIG. 12. [Figure 14] FIG. 13 is an explanatory diagram for explaining steps S2A and S3A of the flowchart shown in FIG. [Figure 15] FIG. 13 is an explanatory diagram for explaining steps S4A and S5A of the flowchart shown in FIG. 12. [Figure 16] FIG. 13 is an explanatory diagram for explaining step S6A of the flowchart shown in FIG. 12. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] [First embodiment] 1 is a schematic diagram showing an example of a surface roughness measuring system 10 according to a first embodiment to which the positioning method of the present invention is applied. Note that the X, Y and Z axes in the figure are mutually perpendicular, with the X and Y axes being parallel to the horizontal direction and the Z axis being perpendicular to the horizontal direction. Note that in this specification, "parallel" includes "approximately parallel" and "vertical" includes "approximately vertical".

[0020] As shown in FIG. 1, the surface roughness measurement system 10 includes a stage 12, a robot base 14, a robot arm 16, a surface roughness measuring device 18, and a control device 20, and measures the surface roughness of the measurement surface Wa of the workpiece W using the robot arm 16 holding the surface roughness measuring device 18.

[0021] On the stage 12, a workpiece W having a measurement surface Wa to be measured for surface roughness is placed, and a robot base 14 is also installed.

[0022] <Robot base and robot arm> The robot base 14 is disposed at a position on the stage 12 that does not interfere with the placement of the workpiece W or the measurement of the surface roughness of the measurement target surface Wa by the surface roughness measuring instrument 18. A robot arm 16 is provided on the robot base 14. The robot base 14 may be disposed outside the stage 12.

[0023] The robot arm 16 corresponds to the robot and relative moving unit of the present invention, and holds the surface roughness measuring instrument 18 and brings a detector 30 (a stylus 48 and a skid 54 described below, see FIG. 3) of the surface roughness measuring instrument 18 into contact with a desired portion of the measurement surface Wa. The robot arm 16 is a multi-joint arm, and includes five arms 16a1 to 16a5, four joints 16b, and an end effector 16c. The number of arms (joints) of the robot arm 16 can be changed as appropriate.

[0024] Arm 16a1 is attached to robot base 14 via a movable shaft (rotary actuator) (not shown) so as to be rotatable around the Z-axis. "Arm 16a1 and arm 16a2", "arm 16a2 and arm 16a3", "arm 16a3 and arm 16a4", "arm 16a4 and arm 16a5", and "arm 16a5 and end effector 16c" are each connected via joint 16b (rotary actuator) so as to be rotatable around an axis perpendicular to the Z-axis. This allows robot arm 16 to freely change the position and posture of surface roughness measuring instrument 18.

[0025] Fig. 2 is an enlarged view of the tip portion of the robot arm 16. As shown in Fig. 2 and the above-mentioned Fig. 1, a surface roughness measuring instrument 18 is held via an adapter 16d at the tip portion of the end effector 16c. Note that the shape of the adapter 16d shown in the figure is only an example, and the shape of the adapter 16d is not limited as long as it can hold the surface roughness measuring instrument 18.

[0026] The drive of each joint 16b and movable axis of the robot arm 16 is controlled by a control device 20, which will be described later.

[0027] <Surface roughness measuring instrument> Fig. 3 is an enlarged view of the detector 30 of the surface roughness measuring instrument 18. The X1, Y1, and Z1 axes in Fig. 3 are coordinate axes of a coordinate system based on the surface roughness measuring instrument 18, the X1 axis direction is parallel to the longitudinal direction of the detector 30, the Z1 axis direction is the sensitivity direction of the detector 30, and the Y1 axis direction is perpendicular to both the X1 axis direction and the Z1 axis direction. In Figs. 1 and 2 described above, the surface roughness measuring instrument 18 is held by the robot arm 16 so that the X1 axis direction is parallel to the X axis direction, the Y1 axis direction is parallel to the Y axis direction, and the Z1 axis direction is parallel to the Z axis direction.

[0028] As shown in Figures 1 to 3, the surface roughness measuring instrument 18 corresponds to the surface shape measuring instrument of the present invention, and is equipped with a detector 30 (also called a pickup), a nosepiece 32, and a driving unit 34 (also called the device main body).

[0029] The detector 30 has a shape extending in the X1-axis direction. The detector 30 is moved along the X1-axis direction (i.e., the measurement surface Wa) by the driving unit 34, whereby the detector 30 traces the measurement surface Wa with the stylus 48 and outputs a detection signal indicating the displacement of the stylus 48 in the Z1-axis direction to the signal processing unit 52 (see FIG. 1).

[0030] The detector 30 comprises a swing support 40, a stylus 42 (also called an arm or a measuring element), a biasing member 44, a detection sensor 46, a contact needle 48, and a housing 30a (also called an arm) that houses these components.

[0031] The swing support 40 has a rotation axis (swing axis) parallel to the Y1 axis direction. The swing support 40 supports the stylus 42 so that it can swing freely.

[0032] The stylus 42 comprises a stylus body 42a that is supported so as to be freely swingable on the swing fulcrum 40, a stylus tip portion 42b that extends from the stylus body 42a to one side in the stylus longitudinal direction, and a stylus base portion 42c that extends from the stylus body 42a to the other side in the stylus longitudinal direction. The shape of the stylus 42 is not limited to the shape shown in Fig. 3 and may be changed as appropriate.

[0033] A contact needle 48 is provided at the tip portion of the stylus tip portion 42b. The contact needle 48 is a downward contact needle that protrudes in one direction perpendicular or oblique to the stylus longitudinal direction of the stylus 42, that is, protrudes downward in the Z1 axis direction. The tip portion of the stylus tip portion 42b and the contact needle 48 protrude from the housing 30a towards the nosepiece 32 and are housed within this nosepiece 32.

[0034] The stylus base end 42c is provided with a core 46a which constitutes a part of a detection sensor 46 which will be described later.

[0035] The stylus 42 is swung in a first rotation direction SW1 and a second rotation direction SW2 with respect to the swing fulcrum 40. The first rotation direction SW1 is a rotation direction in which the stylus tip 42b and the stylus 48 approach a skid 54 described below. The second rotation direction SW2 is a rotation direction opposite to the first rotation direction SW1, and is a rotation direction in which the stylus tip 42b and the stylus 48 move away from the skid 54.

[0036] The biasing member 44 biases the stylus base end 42c upward in the Z1 axis direction. As the biasing member 44, various springs such as a coil spring and a leaf spring are used. Note that the stylus base end 42c may be biased by a known biasing method other than a spring. As a result, the stylus 42 and the contact needle 48 are biased in the first rotation direction SW1 by the biasing member 44 around the swing fulcrum 40.

[0037] For example, a linear variable differential transformer is used as the detection sensor 46. This detection sensor 46 is composed of a core 46a provided at the stylus base end 42c and a coil 46b provided within the housing 30a.

[0038] The core 46a is an iron core extending downward in the Z-axis direction from the stylus base end 42c. The coil 46b is provided at a position below the stylus base end 42c in the Z1-axis direction. The core 46a is inserted into the coil 46b without contacting it.

[0039] Although not shown, the coil 46b is composed of a primary coil and two types of secondary coils. When the primary coil of the coil 46b is excited by the control device 20, a detection signal indicating the position (displacement) of the core 46a in the Z1-axis direction is output from the two types of secondary coils to a signal processing unit 52 (see FIG. 1) via a signal cable 50 (see FIG. 2). As a result, the displacement of the stylus 42 (feed pin 48) in the Z1-axis direction can be detected based on the positional relationship between the swing fulcrum 40, the stylus 42 (feed pin 48), and the core 46a, and the position of the core 46a in the Z1-axis direction detected by the detection sensor 46.

[0040] The nosepiece 32 is attached to the tip side of the housing 30a. The nosepiece 32 has an accommodation space for accommodating the tip portion of the stylus tip portion 42b and the contact needle 48. The nosepiece 32 also has a skid 54 at a position within the accommodation space downward in the Z-axis direction away from the tip portion of the stylus tip portion 42b.

[0041] The skid 54 has a skid bottom surface 54a, which is a bottom surface that contacts the measurement surface Wa during surface roughness measurement, and a stylus insertion hole 54b (corresponding to a through hole of the present invention) that opens in the skid bottom surface 54a and through which the stylus 48 is inserted. When the skid bottom surface 54a is not in contact with the measurement surface Wa, the urging member 44 urges the stylus 42 in the first rotation direction SW1, so that the stylus 48 protrudes a certain amount downward in the Z1 axis direction from the skid bottom surface 54a through the stylus insertion hole 54b. Conversely, when the skid bottom surface 54a is in contact with the measurement surface Wa, the stylus 42 is rotated a certain angle in the second rotation direction SW2 against the urging force of the urging member 44, so that the tip of the stylus 48 and the skid bottom surface 54a are positioned in the Z1 axis direction.

[0042] The driving unit 34 has a shape extending in the X1-axis direction like the detector 30, holds the detector 30 so as to be swingable in a first rotation direction SW1 and a second rotation direction SW2, and moves the detector 30 in the X1-axis direction (corresponding to the driving direction of the present invention) under the control of the control device 20. When the driving unit 34 moves the detector 30 in the X1-axis direction, the driving unit 34 outputs a movement amount signal indicating the amount of movement to the signal processing unit 52 via the signal cable 50.

[0043] The drive unit 34 may be provided with a biasing member that biases the detector 30 in the first rotation direction SW1. Alternatively, the drive unit 34 may be provided with a biasing member or elastic body that restores the detector 30 to its original position when the detector 30 rotates from a central position A1 of its swing range R in the first rotation direction SW1 or the second rotation direction SW2 as shown in Fig. 5 described later.

[0044] The signal processing unit 52 is provided in the robot arm 16, and amplifies the detection signal output from the detection sensor 46 and the movement amount signal output from the drive unit 34 as necessary, and then outputs them to the control device 20.

[0045] <Control device> 1, the control device 20 comprehensively controls the operation of the robot arm 16 and the surface roughness measurement of the measurement surface Wa by the surface roughness measuring instrument 18. In addition to the robot arm 16, the surface roughness measuring instrument 18, and the signal processing unit 52, a memory unit 60, an operation unit 62, and a display unit 64 are connected to this control device 20.

[0046] The memory unit 60 stores a control program (not shown), teaching information 66 (teaching information) that defines the positions and postures of the robot arm 16 and the surface roughness measuring device 18 when measuring the surface roughness of the measurement target surface Wa, and the measurement results of the surface roughness of the measurement target surface Wa. The teaching information 66 is created in advance for each measurement target surface Wa of the workpiece W and stored in the memory unit 60.

[0047] The operation unit 62 is used for various operations including manual operation of the robot arm 16, manual operation of the surface roughness measuring instrument 18, registration operation of the teaching information 66, and measurement start operation of the surface roughness measurement.

[0048] The display unit 64 displays various setting screens, the measurement results of the surface roughness of the measurement surface Wa, etc. The display unit 64 also visually displays the displacement of the stylus 48 when the teaching information 66 is registered (see Figs. 8 and 9 described later).

[0049] The control device 20 is configured by a calculation device such as a personal computer, and includes a calculation circuit configured by various processors and memories, etc. The various processors include a central processing unit (CPU), a graphics processing unit (GPU), an application specific integrated circuit (ASIC), and a programmable logic device (e.g., simple programmable logic devices (SPLD), complex programmable logic devices (CPLD), and field programmable gate arrays (FPGA)). The various functions of the control device 20 may be realized by one processor, or may be realized by multiple processors of the same type or different types.

[0050] The control device 20 executes the control program read from the storage unit 60 to function as a robot control unit 70 , a measuring device control unit 72 , a movement amount detection unit 74 , a displacement detection unit 76 , and a surface shape analysis unit 78 .

[0051] The robot control unit 70 controls the operation of the robot arm 16. When measuring the surface roughness of the measurement target surface Wa, the robot control unit 70 controls the position and posture of the surface roughness measuring instrument 18 by controlling the robot arm 16 based on the teaching information 66 in the storage unit 60, and brings the stylus 48 and skid 54 of the detector 30 into contact with the measurement target surface Wa. In addition, the robot control unit 70 drives the robot arm 16 in response to manual operation by the operator using the operation unit 62 when generating the teaching information 66 for each measurement target surface Wa, as will be described in detail later.

[0052] The measuring machine control unit 72 controls the operation of each unit (drive unit 34 and detection sensor 46) of the surface roughness measuring machine 18. When measuring the surface roughness of the measurement target surface Wa, the measuring machine control unit 72 operates the detection sensor 46 after the probe 48 and skid 54 of the detector 30 are brought into contact with the measurement target surface Wa by the robot arm 16, and drives the drive unit 34 to move the detector 30 in the X1-axis direction, thereby causing the probe 48 to scan the measurement target surface Wa. The measuring machine control unit 72 also operates the detection sensor 46 when generating teaching information 66 for each measurement target surface Wa.

[0053] When measuring the surface roughness of the measurement surface Wa, the movement amount detection unit 74 detects the movement amount of the detector 30 based on the movement amount signal input from the drive unit 34 via the signal processing unit 52, and outputs the detection result to the surface shape analysis unit 78.

[0054] During surface roughness measurement of the measurement target surface Wa, the displacement detection unit 76 continuously detects the displacement of the probe 48 in the Z1-axis direction based on the detection signals continuously input from the detection sensor 46 via the signal processing unit 52, and sequentially outputs the detection results to the surface shape analysis unit 78. Furthermore, during generation of the teaching information 66 for each measurement target surface Wa, the displacement detection unit 76 sequentially outputs the detection results indicating the presence or absence of displacement of the probe 48 in the Z1-axis direction to the display unit 64.

[0055] When measuring the surface roughness of the measurement surface Wa, the surface shape analysis unit 78 calculates the surface roughness of the measurement surface Wa based on the amount of movement of the detector 30 input from the movement amount detection unit 74 and the displacement of the stylus 48 input from the displacement detection unit 76.

[0056] <Teaching information generation (teaching operation)> 4 is an explanatory diagram for explaining generation of teaching information 66 for each measurement target surface Wa. As shown by symbols C1 to C5 in FIG. 4, when measuring the surface roughness of each measurement target surface Wa of the workpiece W, teaching information 66 is generated for each measurement target surface Wa and stored in the storage unit 60.

[0057] Specifically, the operator operates the operation unit 62 to manually drive the robot arm 16, thereby bringing the stylus 48 and skid 54 of the detector 30 into contact with the measurement surface Wa. At this time, the robot control unit 70 drives the robot arm 16 in response to the operator's operation, and stores information on the movement of the robot arm 16 until the stylus 48 and skid 54 come into contact with the measurement surface Wa in the storage unit 60 as teaching information 66. Examples of this teaching information 66 include information indicating a measurement path including a target point, three-dimensional coordinates of intermediate points, etc.

[0058] Similarly, the registration operation of the teaching information 66 is repeated for all the measurement surfaces Wa, whereby the teaching information 66 for each measurement surface Wa is stored in the storage unit 60.

[0059] Fig. 5 is an explanatory diagram for explaining the problems that occur when generating the teaching information 66. When generating the teaching information 66, the stylus 48 and skid 54 of the detector 30 are brought into contact with the measurement surface Wa by manual operation by an operator, so if the detector 30 is pressed too hard against the measurement surface Wa, as shown by reference numeral 5A in Fig. 5, the surface roughness measuring instrument 18 may be damaged. Conversely, as shown by reference numeral 5B in Fig. 5, if the detector 30 is not pressed hard enough, the skid 54 does not make sufficient contact with the measurement surface Wa, resulting in a decrease in the measurement accuracy of the surface roughness.

[0060] Therefore, as shown by reference symbol 5C in Fig. 5, when the stylus 48 and skid 54 of the detector 30 are brought into contact with the measurement surface Wa, it is necessary to position the detector 30 at the center position A1 (also called the neutral position) of its swing range R. In this embodiment, the center position A1 of the detector 30 can be positioned without relying on the operator's visual inspection or providing the surface roughness measuring instrument 18 with a detection switch (detection sensor) for detecting the center position A1 of the detector 30. Specifically, in this embodiment, the detector 30 is positioned at the center position A1 using a holder 80 (see Fig. 7), the detection sensor 46, and the stylus 48.

[0061] [Positioning method of the first embodiment] Fig. 6 is a flowchart showing the flow of a positioning method for positioning the detector 30 at the central position A1 when generating the teaching information 66 of the measurement surface Wa. Fig. 7 is an explanatory diagram for explaining step S1 of the flowchart shown in Fig. 6. Fig. 8 is an explanatory diagram for explaining steps S2 and S3 of the flowchart shown in Fig. 6. Fig. 9 is an explanatory diagram for explaining steps S4 and S5 of the flowchart shown in Fig. 6. Fig. 10 is an explanatory diagram for explaining step S6 of the flowchart shown in Fig. 6.

[0062] As shown by reference symbol 7A in Figures 6 and 7, before bringing the stylus 48 and skid 54 of the detector 30 into contact with the surface to be measured Wa, i.e., with the stylus 48 protruding a certain amount downward in the Z1 axis direction from the bottom surface 54a of the skid, the operator detachably attaches the holder 80 to the drive unit 34 (step S1).

[0063] When the holder 80 is attached to the drive unit 34, it presses the detector 30 in the second rotation direction SW2 as shown by reference symbol 7B in Fig. 7, thereby rotating the detector 30 by a certain angle in the second rotation direction SW2. At this time, the shape and mounting position of the holder 80 are adjusted so that the tip position of the stylus 48 protruding from the skid bottom surface 54a coincides with the height position A2 of the skid bottom surface 54a when the detector 30 is in the central position A1. Here, the height position A2 is known by being obtained from the design information of the surface roughness measuring instrument 18 or by actual measurement. Therefore, the shape and mounting position of the holder 80 can be adjusted according to the height position A2.

[0064] In this way, the tip position of the stylus 48 can be aligned with the height position A2 simply by the operator detachably attaching the holder 80 to the drive unit 34. Furthermore, the detector 30 is supported by the holder 80, so that its rotation in the first rotation direction SW1 is restricted. Therefore, step S1 corresponds to the alignment step of the present invention.

[0065] 6 and 8, after completion of step S1, the operator performs an operation input of the robot arm 16 to the operation unit 62 so that the stylus 48 of the detector 30 and the skid bottom surface 54a move toward the measurement surface Wa. In response to this operation input, the robot control unit 70 drives the robot arm 16 to move the stylus 48 and the skid bottom surface 54a toward the measurement surface Wa (step S2, which corresponds to the moving step of the present invention). In addition, the robot control unit 70 starts storing the teaching information 66.

[0066] When the robot arm 16 starts to be driven, that is, when the surface roughness measuring instrument 18 starts to move, the displacement detection unit 76 continuously detects the presence or absence of displacement of the probe 48 based on the detection signals continuously input from the detection sensor 46 via the signal processing unit 52, and sequentially outputs the detection results to the display unit 64 (step S3, which corresponds to the detection step of the present invention). This enables the operator to determine whether the tip of the probe 48 has come into contact with the measurement surface Wa based on the detection screen 64a displayed on the display unit 64 and visually indicating the presence or absence of displacement of the probe 48. The operator then continues to manually drive the robot arm 16 until the tip of the probe 48 comes into contact with the measurement surface Wa (NO in step S4).

[0067] 6 and 9, when the tip of the stylus 48 comes into contact with the surface Wa to be measured, the operator performs an operation to stop the robot arm 16 (including stopping the operation of the operation unit 62) via the operation unit 62 based on the detection screen 64a displayed on the display unit 64 (YES in step S4). In response to this operation stop, the robot control unit 70 stops the drive of the robot arm 16 (step S5, which corresponds to the stop step of the present invention). Note that steps S2 to S5 correspond to the first contact step of the present invention.

[0068] When step S5 is completed, the tip position of the stylus 48, i.e., the height position A2, can be aligned with the measurement surface Wa. In addition, the robot control unit 70 stores in the memory unit 60 the teaching information 66 corresponding to the measurement surface Wa with which the detector 30 has been brought into contact.

[0069] 6 and 10, after the driving of the robot arm 16 is stopped, the operator removes the holder 80 from the driving unit 34 (step S6, which corresponds to the second contact step of the present invention). As a result, as shown by the symbol XA in Fig. 10, the restriction of rotation of the detector 30 in the first rotation direction SW1 by the holder 80 is released, and the detector 30 rotates in the first rotation direction SW1 by gravity or a restoring force of a biasing member (not shown) or the like, and the skid bottom surface 54a comes into contact with the measurement surface Wa. At this time, since the height position A2 is aligned with the measurement surface Wa, the detector 30 is positioned at the center position A1 with the skid bottom surface 54a in contact with the measurement surface Wa.

[0070] Hereinafter, when there are a plurality of measurement target surfaces Wa, the processing from step S1 to step S6 is repeatedly executed for each measurement target surface Wa, and the teaching information 66 for each measurement target surface Wa is stored in the storage unit 60.

[0071] As described above, in this embodiment, by using the holder 80, the detection sensor 46, and the stylus 48, the detector 30 can be positioned at the central position A1 without relying on visual inspection. This shortens the time required to teach the robot arm 16, reduces the occurrence of variations in the positioning accuracy of the detector 30 at the central position A1 for each operator, and prevents damage to the surface roughness measuring instrument 18 caused by pressing the detector 30 too hard against the measurement surface Wa. In addition, since it is not necessary to provide the surface roughness measuring instrument 18 with a detection switch that is more expensive than the holder 80 in order to detect whether the detector 30 is at the central position A1 or not, it is possible to reduce costs and eliminate the risk of failure of the detection switch. As a result, the detector 30 can be positioned at the central position A1 with high accuracy and low cost.

[0072] [Positioning method of the second embodiment] 11 is a schematic diagram showing an example of a surface roughness measuring system 10 according to the second embodiment. In the first embodiment, the positioning of the detector 30 to the central position A1 during generation of the teaching information 66 is manually performed by an operator, but in the second embodiment, the positioning of the detector 30 to the central position A1 is automatically performed.

[0073] The surface roughness measuring system 10 of the second embodiment has basically the same configuration as the surface roughness measuring system 10 of the first embodiment, except that a holder 80A is provided in the driving unit 34, the control device 20 functions as a switching control unit 79, and the functions of the robot control unit 70 and the displacement detection unit 76 are partially different. For this reason, parts that are the same in function or configuration as those of the first embodiment are given the same reference numerals and their description will be omitted.

[0074] The holder 80A, together with the robot arm 16, the control device 20, and the detection sensor 46, constitutes the positioning device of the present invention. The holder 80A is attached to the drive unit 34 and has a pressing part 81 that is displaceable in the Z1-axis direction (the same direction as the Z-axis direction in the drawing). Under the control of a switching control unit 79 described later, the holder 80A can be switched between a pressing state (see FIG. 13) in which the pressing part 81 presses the detector 30 from below in the Z-axis direction to rotate it in the second rotation direction SW2 by a certain angle, and a pressing release state (see FIG. 11) in which the pressing of the detector 30 by the pressing part 81 is released. When the holder 80A is switched to the pressing state, the mounting position of the holder 80A to the drive unit 34 and the protruding amount of the pressing part 81 are adjusted so that the tip position of the stylus 48 coincides with the height position A2 described above.

[0075] When generating teaching information 66 for each measured surface Wa, the displacement detection unit 76 of the second embodiment continuously detects the presence or absence of displacement of the stylus 48 based on the detection signals continuously input from the detection sensor 46 via the signal processing unit 52, and sequentially outputs the detection results to the robot control unit 70.

[0076] The robot control unit 70 (corresponding to the movement control unit of the present invention) of the second embodiment drives the robot arm 16 according to a movement program created in advance for each measured surface Wa when the holder 80A is switched from the released state to the pressed state during generation of the teaching information 66, and moves the detector 30 (the stylus 48 and the skid bottom surface 54a) toward the measured surface Wa. The movement program is information indicating a simplified measurement path from the initial position and initial posture of the detector 30 to the measured surface Wa (target point).

[0077] Furthermore, after the robot arm 16 starts to drive (after the surface roughness measuring instrument 18 starts to move), the robot control unit 70 judges whether the displacement of the probe 48 exceeds a predetermined threshold value, i.e., whether the tip of the probe 48 has come into contact with the measurement surface Wa, based on the detection results indicating the presence or absence of displacement of the probe 48 continuously input from the displacement detection unit 76. If the displacement of the probe 48 is equal to or less than the predetermined threshold value, the robot control unit 70 judges that the tip of the probe 48 has not come into contact with the measurement surface Wa, and continues the movement of the surface roughness measuring instrument 18. If the displacement of the probe 48 exceeds the predetermined threshold value, the robot control unit 70 judges that the tip of the probe 48 has come into contact with the measurement surface Wa, and stops the drive of the robot arm 16.

[0078] The switching control unit 79 controls switching between the pressed state and the released state of the holder 80A. This switching control unit 79 switches the holder 80A from the released state, which is the initial state, to the pressed state when generation of the teaching information 66 of the measurement target surface Wa starts. In addition, the switching control unit 79 maintains the pressed state of the holder 80A while the robot control unit 70 is driving the robot arm 16, and switches the holder 80A from the pressed state to the released state when the robot control unit 70 stops driving the robot arm 16.

[0079] [Positioning method of the second embodiment] Fig. 12 is a flowchart showing the flow of a positioning method for positioning the detector 30 at the central position A1 when generating the teaching information 66 of the measurement surface Wa in the second embodiment. Fig. 13 is an explanatory diagram for explaining step S1A of the flowchart shown in Fig. 12. Fig. 14 is an explanatory diagram for explaining steps S2A and S3A of the flowchart shown in Fig. 12. Fig. 15 is an explanatory diagram for explaining steps S4A and S5A of the flowchart shown in Fig. 12. Fig. 16 is an explanatory diagram for explaining step S6A of the flowchart shown in Fig. 12.

[0080] 12 and 13, when the operator operates the operation unit 62 to start generating the teaching information 66 of the measurement surface Wa, the switching control unit 79 switches the holder 80A from the released state to the pressed state (step S1A, which corresponds to the matching step of the present invention). As a result, the detector 30 is pressed by the pressing unit 81 of the holder 80A, and the detector 30 rotates in the second rotation direction SW2 by a certain angle, so that the tip position of the stylus 48 can be matched with the height position A2, as in the first embodiment. In this case, the rotation of the detector 30 in the first rotation direction SW1 is restricted by the pressing unit 81.

[0081] 12 and 14, when the holder 80A is switched to the pressing state, the robot control unit 70 drives the robot arm 16 according to a movement program corresponding to the measurement surface Wa to move the detector 30 toward the measurement surface Wa (step S2A, which corresponds to the movement step of the present invention). In addition, the robot control unit 70 starts storing the teaching information 66.

[0082] When the robot arm 16 starts to drive, i.e., when the surface roughness measuring instrument 18 starts to move, the displacement detection unit 76 continuously detects the presence or absence of displacement of the probe 48 based on the detection signals continuously input from the detection sensor 46 via the signal processing unit 52, and sequentially outputs the detection results to the robot control unit 70 (step S3A, which corresponds to the detection step of the present invention). This allows the robot control unit 70 to determine whether the tip of the probe 48 has come into contact with the measurement surface Wa. Then, when the robot control unit 70 determines that the tip of the probe 48 has not come into contact with the measurement surface Wa, it continues to drive the robot arm 16 (NO in step S4A).

[0083] On the other hand, as shown in Fig. 12 and Fig. 15, when the robot control unit 70 determines that the tip of the stylus 48 has contacted the measurement surface Wa based on the detection results sequentially input from the displacement detection unit 76, it stops driving the robot arm 16 (YES in step S4A, step S5A, which corresponds to the stop step of the present invention). Note that steps S2A to S5A correspond to the first contact step of the present invention. This makes it possible to align the tip position of the stylus 48, i.e., the height position A2, with the measurement surface Wa, as in the first embodiment. Furthermore, the robot control unit 70 stores teaching information 66 corresponding to the measurement surface Wa in the memory unit 60.

[0084] 12 and 16, when the driving of the robot arm 16 stops, the switching control unit 79 switches the holder 80A from the pressing state to the pressing release state (step S6A, which corresponds to the second contact step of the present invention). This releases the restriction on the rotation of the detector 30 in the first rotation direction SW1 by the holder 80A, so that the detector 30 rotates in the first rotation direction SW1 and the skid bottom surface 54a comes into contact with the measurement surface Wa, as in the first embodiment. As a result, the detector 30 is positioned at the center position A1 with the skid bottom surface 54a in contact with the measurement surface Wa.

[0085] Hereinafter, when there are a plurality of measurement target surfaces Wa, the processing from step S1A to step S6A is repeatedly executed for each measurement target surface Wa, and the teaching information 66 for each measurement target surface Wa is stored in the storage unit 60.

[0086] As described above, in the second embodiment, the detector 30 can be automatically positioned at the central position A1. As a result, this positioning can be completed in a shorter time than in the first embodiment. Also, the variation in the positioning accuracy of the detector 30 at the central position A1 can be reduced compared to the first embodiment.

[0087] [others] In each of the above embodiments, the robot arm 16 holding the surface roughness measuring instrument 18 brings the probe 48 and the skid bottom surface 54a of the detector 30 into contact with the measurement surface Wa, but various robots capable of moving either the detector 30 (probe 48 and skid bottom surface 54a) or the measurement surface Wa (stage 12) toward the other may be used. Also, instead of using a robot, various known moving mechanisms (actuators) capable of moving either the detector 30 or the measurement surface Wa toward the other may be used.

[0088] In each of the above embodiments, the positioning of the detector 30 of the surface roughness measuring machine 18 that measures the surface roughness of the measurement target surface Wa to the central position A1 has been described as an example, but the present invention can be applied to the positioning of the detector of various surface shape measuring machines that have a stylus 48 and a skid 54, such as a contour shape measuring machine that measures the contour shape of the measurement target surface Wa. Note that if the measurement target surface Wa is limited to a horizontal plane (including an approximately horizontal plane), the weight of the stylus 48 and the stylus tip portion 42b may be used to urge the stylus 42 in the first rotation direction SW1, in which case the urging member 44 may be omitted. [Explanation of symbols]

[0089] 10 Measurement System 12 Stages 14 Robot base 16 Robot Arm 16a1~16a5 Arm 16b Joint 16c End effector 16d adapter 18 Measuring Instruments 20 Control device 30 Detector 30a Housing 32 Nosepiece 34 Drive unit 40 Swing Support Point 42 Stylus 42a Stylus body 42b Stylus tip 42c Stylus base end 44 Pressing member 46 Detection sensor 46a Core 46b Coil 48 Stylus 50 Signal Cable 52 Signal Processing Section 54 Skid 54a Skid bottom 54b Stylus insertion hole 60 Storage section 62 Operation section 64 Display section 64a Detection screen 66 Instructional Information 70 Robot control unit 72 Measuring device control section 74 Movement amount detection unit 76 Displacement detection unit 78 Surface shape analysis section 79 Switching control section 80 Holder 80A retainer 81 Pressing part A1 center position A2 Height position R Swing Range SW1 1st rotation direction SW2 Second rotation direction Double work Wa Measured surface

Claims

1. a detector comprising: a skid having a bottom surface in contact with a surface to be measured and a through hole opening to the bottom surface; a stylus supported so as to be swingable about a swing fulcrum; a contact needle provided at a tip of the stylus which approaches the skid when the stylus rotates in a first rotation direction and moves away from the skid when the stylus rotates in a second rotation direction opposite to the first rotation direction and which is inserted into the through hole; and a biasing member which biases the stylus in the first rotation direction; a drive unit that holds the detector so as to be swingable in the first rotation direction and the second rotation direction and moves the detector in a drive direction perpendicular to an axial direction of the swing fulcrum; A surface shape measuring instrument comprising: A method for positioning the detector at a center position of a swing range of the detector when the skid is brought into contact with the surface to be measured, comprising the steps of: a matching step of rotating the detector in the second rotation direction before the skid is brought into contact with the surface to be measured, and matching a tip position of the stylus protruding from the bottom surface by the biasing member against the stylus in the detector with a height position of the bottom surface when the detector is assumed to be at the central position; a first contact step of moving the detector relative to the surface to be measured while maintaining the orientation of the detector in the matching step, thereby bringing the tip of the stylus into contact with the surface to be measured; a second contacting step of rotating the detector in the first rotation direction to bring the bottom surface into contact with the surface to be measured after the first contacting step is completed; The positioning method includes:

2. The first contacting step comprises: a moving step of moving the detector relative to the surface to be measured, so as to move one of the tip of the stylus and the surface to be measured toward the other; a detection step of continuously detecting the presence or absence of displacement of the stylus while the moving step is being performed; a stopping step of stopping the moving step when the displacement of the stylus is detected in the detecting step; The method of claim 1 , further comprising:

3. 3. The positioning method according to claim 2, wherein in the moving step, a robot that holds the surface shape measuring device and is capable of changing the position and orientation of the surface shape measuring device is controlled to move the detector toward the measurement surface.

4. In the matching step, a holder is detachably attached to the drive unit, and the holder presses the detector and rotates it by a certain angle in the second rotation direction to match the tip position of the stylus to the height position, and the holder performs rotation regulation to regulate the rotation of the detector in the first rotation direction. The positioning method according to claim 1 , wherein in the second contact step, the holder is detached from the drive unit to release the rotation restriction, thereby rotating the detector in the first rotation direction.

5. a detector comprising: a skid having a bottom surface in contact with a surface to be measured and a through hole opening to the bottom surface; a stylus supported so as to be swingable about a swing fulcrum; a contact needle provided at a tip of the stylus which approaches the skid when the stylus rotates in a first rotation direction and moves away from the skid when the stylus rotates in a second rotation direction opposite to the first rotation direction and which is inserted into the through hole; and a biasing member which biases the stylus in the first rotation direction; a drive unit that holds the detector so as to be swingable in the first rotation direction and the second rotation direction and moves the detector in a drive direction perpendicular to an axial direction of the swing fulcrum; A surface shape measuring instrument comprising: A positioning device that positions the detector at a center position of a swing range of the detector when the skid is brought into contact with the surface to be measured, a holder attached to the drive unit and switchable between a pressing state in which the detector is pressed to rotate in the second rotation direction and a pressing release state in which the detector is released from the pressing; a relative movement unit that moves the detector relative to the surface to be measured; a switching control unit that controls switching between the pressed state and the released state of the holder; a movement control unit that drives the relative movement unit to move one of the tip of the stylus and the surface to be measured toward the other when the holder is switched to the pressing state by the switching control unit before the skid is brought into contact with the surface to be measured; a displacement detection unit that continuously detects the presence or absence of displacement of the stylus while the relative moving unit is being driven; Equipped with When the detector is rotated in the second rotation direction by the holder in the pressed state, the stylus is biased by the biasing member against the stylus in the detector, causing the stylus to protrude from the bottom surface, the holder in the pressed state maintains the attitude of the detector so that the tip position of the stylus protruding from the bottom surface by the biasing force of the biasing member coincides with the height position of the bottom surface when the detector is assumed to be at the central position; the movement control unit stops driving the relative movement unit when the displacement of the stylus is detected by the displacement detection unit, A positioning device in which, when the driving of the relative moving part by the movement control part is stopped, the switching control part switches the holder from the pressed state to the released state, thereby rotating the detector in the first rotation direction and bringing the bottom surface into contact with the measured surface.

6. 6. The positioning apparatus according to claim 5, wherein the relative moving unit is a robot that holds the surface shape measuring device and is capable of changing the position and attitude of the surface shape measuring device.

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