Device for detecting jumping of molecular pump main shaft or main shaft assembly

Abstract

The invention relates to the technical field of molecular pump spindle runout detection, and provides a device for detecting runout of a molecular pump spindle or a spindle assembly, and the device comprises a body which is provided with a reference plane; the first support is arranged on the reference plane, and two first bearings used for supporting the main shaft or the main shaft assembly to be detected are arranged on the first support at intervals; the second support is arranged on the reference plane, and two second bearings used for supporting the main shaft or the main shaft assembly to be detected are arranged on the second support at intervals; and the dial indicator is arranged on the reference plane and used for detecting the jumping value of the main shaft or the main shaft assembly. According to the device for detecting jumping of the molecular pump main shaft or the main shaft assembly, a common machine tool is not needed, the size of the whole detection equipment is reduced, use is more convenient, and cost is lower; and moreover, different types of molecular pump main shaft runout value detection can be met, and smooth detection of the form and location tolerance of the main shaft is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of molecular pump spindle runout detection, and in particular to a device for detecting the runout of a molecular pump spindle or a spindle assembly. Background Art

[0002] The molecular pump spindle assembly is a key component that provides high speed for the molecular pump, and the processing size and shape and position tolerance of its parts are the key factors to ensure that the molecular pump can run stably at high speed. The measurement of the molecular pump spindle runout and spindle assembly runout is the most important among the shape and position tolerances. When the spindle or the assembled spindle assembly runout value is out of tolerance, it will cause the molecular pump turbine rotor to swing seriously and deviate from the center position, resulting in increased heat generation of the bearing, which will seriously reduce the service life of the molecular pump bearing. In severe cases, the bearing is damaged, causing abnormal noise and broken pump problems in the molecular pump, which seriously affects the quality of the molecular pump product.

[0003] In the prior art, a platform with double center holes or an ordinary machine tool is generally used in conjunction with a dial indicator or a micrometer to measure the spindle runout. Since the equipment is large and the cost is high, it is not convenient for on-site assembly personnel to use it at any time; and it cannot be applied to the spindle that needs to assemble parts (such as a spindle with a center hole at one end and a threaded hole at the other end, or a spindle with threaded holes at both ends). Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is that in the prior art, a platform or an ordinary machine tool with a double center hole is used in conjunction with a dial indicator or a micrometer to measure the spindle runout. Since the equipment is large and the cost is high, it is not convenient for on-site assembly personnel to use it at any time; and it cannot be applied to the spindle on which parts need to be assembled (such as a spindle with a center hole at one end and a threaded hole at the other end, or a spindle with threaded holes at both ends), thereby providing a device for detecting the runout of a molecular pump spindle or a spindle assembly.

[0005] In order to solve the above technical problems, the technical solution of the present invention is as follows:

[0006] The present invention provides a device for detecting the vibration of a molecular pump spindle or a spindle assembly, comprising: a body, the body having a reference plane; a first bracket, arranged on the reference plane, on which two first bearings for supporting the spindle or the spindle assembly to be detected are arranged at intervals; a second bracket, arranged on the reference plane, on which two second bearings for supporting the spindle or the spindle assembly to be detected are arranged at intervals; a micrometer, arranged on the reference plane, and used to detect the vibration value of the spindle or the spindle assembly.

[0007] Furthermore, the device for detecting the vibration of the molecular pump spindle or spindle assembly also includes a first bearing fixing shaft, a first bearing fixing screw, a second bearing fixing shaft and a second bearing fixing screw; the first bearing fixing screw is inserted into the first bracket and at least partially extends from the other side of the first bracket, and the first bearing fixing shaft is threadedly connected to the part of the first bearing fixing screw extending from the first bracket; the inner ring of the first bearing is sleeved on the first bearing fixing shaft; the second bearing fixing screw is inserted into the second bracket and at least partially extends from the other side of the second bracket, and the second bearing fixing shaft is threadedly connected to the part of the second bearing fixing screw extending from the second bracket; the inner ring of the second bearing is sleeved on the second bearing fixing shaft.

[0008] Furthermore, the device for detecting the vibration of the molecular pump spindle or spindle assembly also includes a first bearing spacer and a second bearing spacer; the first bearing spacer is sleeved on the first bearing fixed shaft, and the first bearing spacer is located between the first bearing and the first bracket; the second bearing spacer is sleeved on the second bearing fixed shaft, and the second bearing spacer is located between the second bearing and the second bracket.

[0009] Furthermore, the device for detecting the vibration of the molecular pump spindle or spindle assembly also includes a linear guide and a slider; the linear guide is arranged on the reference plane; the slider is arranged at the bottom of the first bracket, and the first bracket is slidably arranged on the linear guide through the slider; and / or the slider is arranged at the bottom of the second bracket, and the second bracket is slidably arranged on the linear guide through the slider.

[0010] Furthermore, the device for detecting the vibration of the molecular pump spindle or spindle assembly also includes a gimbal base and a first knob switch; the gimbal base is arranged on the main body, and an electromagnet is arranged in the gimbal base; the first knob switch is arranged on the outer wall of the gimbal base, and the first knob switch is electrically connected to the electromagnet, and when the first knob switch is turned on, the electromagnet is energized to make the gimbal base adsorbed on the reference plane; the micrometer is arranged on the gimbal base.

[0011] Furthermore, the device for detecting the vibration of the molecular pump spindle or spindle assembly also includes a base linear guide rod and a first fixed knob; the base linear guide rod is arranged on the top surface of the universal meter base; the micrometer is arranged on the base linear guide rod through the first fixed knob; after the first fixed knob is loosened, the micrometer can move up and down along the base linear guide rod.

[0012] Furthermore, the main body also includes a base, a roller and a height adjustment screw; a plurality of the height adjustment screws are arranged at the bottom of the reference plane; the roller is sleeved on the height adjustment screw and is threadedly connected to the height adjustment screw; the base is arranged below the reference plane, and the height adjustment screw at least partially extends into the base; the roller is between the base and the reference plane, and is against the base.

[0013] Furthermore, the rollers include two, wherein the bottom end surface of one of the rollers abuts against the top surface of the base; a semicircular groove is provided on the side wall of the base, and the other roller is provided in the semicircular groove.

[0014] Furthermore, a plurality of legs are provided at the bottom of the base.

[0015] Further, a groove is provided at the top of the first bracket, and the bottom of the groove is lower than the position where the first bearing contacts the spindle to be measured; and / or a groove is provided at the top of the second bracket, and the bottom of the groove is lower than the position where the second bearing contacts the spindle to be measured.

[0016] The technical solution of the present invention has the following advantages:

[0017] The device for detecting the runout of a molecular pump spindle or a spindle assembly provided by the present invention comprises a first bracket and a second bracket arranged at intervals on a reference plane, wherein two first bearings arranged at intervals on the first bracket form one of the "fulcrums" for supporting the spindle to be measured, and two second bearings arranged at intervals on the second bracket form another "fulcrum" for supporting the spindle. During measurement, the spindle or the spindle assembly to be measured is supported by the two "fulcrums", and after the spindle rotates, the runout value can be detected by a micrometer. Compared with the prior art, there is no need to rely on ordinary machine tools, the volume of the entire detection equipment is reduced, and the use is more convenient and the cost is lower. Moreover, compared with a platform using double center holes, since the end of the spindle does not contact the "fulcrum", it can be applicable to a spindle to be assembled with parts (such as a spindle with a center hole at one end and a threaded hole at the other end, or a spindle with threaded holes at both ends), so as to meet the detection of spindle runout values ​​of different types of molecular pumps and ensure the smooth implementation of the detection of the shape and position tolerance of the spindle. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1It is a schematic diagram of a device for detecting the vibration of a molecular pump spindle or a spindle assembly in an embodiment of the present invention from one viewing angle;

[0020] Figure 2 It is a schematic diagram of a device for detecting the runout of a molecular pump spindle or a spindle assembly in an embodiment of the present invention when a spindle to be tested is placed thereon;

[0021] Figure 3 Schematic diagram of the device for detecting the vibration of the main shaft or main shaft assembly of a molecular pump in an embodiment of the present invention from another perspective;

[0022] Figure 4 Schematic diagram of a first bracket in a device for detecting the vibration of a molecular pump spindle or a spindle assembly in an embodiment of the present invention;

[0023] Figure 5 It is a partial structural schematic diagram of a first bracket in a device for detecting the vibration of a molecular pump spindle or a spindle assembly in an embodiment of the present invention;

[0024] Figure 6 It is a schematic diagram of a base and a reference plane in a device for detecting the vibration of a molecular pump spindle or a spindle assembly in an embodiment of the present invention.

[0025] Description of reference numerals:

[0026] 1. Reference plane; 2. First bracket; 3. First bearing; 4. Second bracket; 5. Second bearing; 6. Micrometer; 7. Universal meter base; 8. Base linear guide rod; 9. First knob switch; 10. Groove; 11. Slider; 12. Linear guide rail; 13. Spindle to be measured; 14. Upper bearing mating surface; 15. Lower bearing mating surface; 16. Oil supply cone; 17. Micrometer linear guide rod; 18. Pointer; 19. Dial; 20. First fixed knob; 21. Second fixed knob; 22. Base; 23. Roller; 24. Leg; 25. Semicircular groove; 26. First bearing fixing screw; 27. First bearing fixing shaft; 28. First bearing spacer; 29. ​​Height adjustment screw. DETAILED DESCRIPTION

[0027] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0031] like Figure 1 , Figure 2 As shown, this embodiment provides a device for detecting the runout of a molecular pump spindle or spindle assembly, comprising: a body, the body having a reference plane 1, for example, the reference plane 1 can be a rectangular or square flat plate, the top surface of the flat plate serving as the reference plane 1; a first bracket 2, arranged on the reference plane 1, two first bearings 3 for supporting the spindle or spindle assembly to be measured are arranged on the first bracket 2 at intervals, the interval between the two first bearings 3 can be designed as required, and does not exceed the outer diameter of the spindle 13 to be measured, and the two first bearings 3 can form a generally V-shaped groove as a fulcrum for supporting the spindle. A second bracket 4, arranged on the reference plane 1, the interval between the second bracket 4 and the first bracket 2 can be designed as required, and does not exceed the length of the spindle 13 to be measured or the spindle assembly, two second bearings 5 ​​for supporting the spindle or spindle assembly to be measured are arranged on the second bracket 4 at intervals, similarly, the interval between the two second bearings 5 ​​can be designed as required, and does not exceed the outer diameter of the spindle 13 to be measured, and the two second bearings 5 ​​can form a generally V-shaped groove as another fulcrum for supporting the spindle. For example, the first bearing 3 and the second bearing 5 can both be grease-lubricated bearings. The micrometer 6 is arranged on the reference plane 1 and is used to detect the runout value of the spindle or the spindle assembly.

[0032] For example, one end of the spindle 13 to be tested can be connected and fixed to the oil supply cone 16 through internal and external threads, and the positions corresponding to the two "fulcrums" on the outer wall of the spindle 13 to be tested are respectively recorded as the upper bearing mating surface 14 and the lower bearing mating surface 15. During the test, the upper bearing mating surface 14 contacts the outer walls of the two first bearings 3, and the lower bearing mating surface 15 contacts the outer walls of the two second bearings 5. Move the needle 18 of the micrometer 6 to the position of the oil supply cone 16 to be tested, ensure that the needle 18 of the micrometer 6 is always in contact with the surface of the oil supply cone 16, manually rotate the spindle 13 to be tested, and observe the pointer jump in the dial 19. At this time, the change in the pointer in the dial 19 is the jump value of the spindle or spindle assembly to be tested, thereby realizing the jump value measurement function of the spindle or spindle assembly to be tested.

[0033] The device for detecting the runout of the main shaft or main shaft assembly of a molecular pump provided in this embodiment has a first bracket 2 and a second bracket 4 arranged at intervals on a reference plane 1, and two first bearings 3 arranged at intervals on the first bracket 2 form one of the "fulcrums" for supporting the main shaft 13 to be measured, and two second bearings 5 ​​arranged at intervals on the second bracket 4 form another "fulcrum" for supporting the main shaft. During measurement, the main shaft or main shaft assembly to be measured is supported by the two "fulcrums". After the main shaft rotates, the runout value can be detected by the micrometer 6. Compared with the prior art, there is no need to use ordinary machine tools, which reduces the volume of the entire detection equipment, is more convenient to use, and has lower cost; moreover, compared with a platform using double top holes, since the end of the main shaft does not contact the "fulcrum", it can be applicable to the main shaft to be assembled with parts (such as a main shaft with a top hole at one end and a threaded hole at one end or a main shaft with threaded holes at both ends), meeting the detection of the runout values ​​of the main shafts of different types of molecular pumps, and ensuring the smooth implementation of the detection of the form and position tolerance of the main shaft.

[0034] like Figure 4 , Figure 5As shown, the device for detecting the runout of the molecular pump spindle or spindle assembly further includes a first bearing fixing shaft 27, a first bearing fixing screw 26, a second bearing fixing shaft and a second bearing fixing screw; the first bearing fixing screw 26 is inserted in the first bracket 2 and at least partially extends from the other side of the first bracket 2, and the first bearing fixing shaft 27 is threadedly connected with the portion of the first bearing fixing screw 26 extending from the first bracket 2; the inner ring of the first bearing 3 is sleeved on the first bearing fixing shaft 27. The second bearing fixing screw is inserted in the second bracket 4 and at least partially extends from the other side of the second bracket 4, and the second bearing fixing shaft is threadedly connected with the portion of the second bearing fixing screw extending from the second bracket 4; the inner ring of the second bearing 5 is sleeved on the second bearing fixing shaft. For example, the outer circle of the first bearing fixing shaft 27 and the inner circle of the first bearing 3 can be slightly interfered to ensure assembly accuracy and ensure smooth rotation of the first bearing 3. Similarly, the outer circle of the second bearing fixing shaft and the inner circle of the second bearing 5 can be slightly interfered to ensure assembly accuracy and ensure smooth rotation of the second bearing 5. For example, an arc-shaped groove 10 may be provided at the top of the first bracket 2, and the bottom of the groove 10 is lower than the position of the "fulcrum" to prevent the spindle 13 to be tested from rubbing against the first bracket 2 when rotating. Similarly, an arc-shaped groove 10 may be provided at the top of the second bracket 4, and the bottom of the groove 10 is lower than the position of the "fulcrum" to prevent the spindle 13 to be tested from rubbing against the second bracket 4 when rotating.

[0035] Among them, the device for detecting the runout of the molecular pump main shaft or main shaft assembly also includes a first bearing spacer 28 and a second bearing spacer; the first bearing spacer 28 is sleeved on the first bearing fixed shaft 27, and the first bearing spacer 28 is located between the first bearing 3 and the first bracket 2; the second bearing spacer is sleeved on the second bearing fixed shaft, and the second bearing spacer is located between the second bearing 5 and the second bracket 4. For example, the first bearing spacer 28 and the first bearing fixed shaft 27 can be connected in an interference fit manner, and the setting of the first bearing spacer 28 keeps a certain distance between the first bearing 3 and the first bracket 2, so that the first bearing 3 can rotate smoothly. Similarly, for example, the second bearing spacer and the second bearing fixed shaft can be connected in an interference fit manner, and the setting of the second bearing spacer keeps a certain distance between the second bearing 5 and the second bracket 4, so that the second bearing 5 can rotate smoothly.

[0036] Among them, the device for detecting the runout of the molecular pump spindle or spindle assembly also includes a linear guide 12 and a slider 11; for example, the linear guide 12 can be fixed on the reference plane 1 by screws; the bottom of the first bracket 2 is provided with a slider 11, for example, the slider 11 and the first bracket 2 can be fixedly connected by screws, and the first bracket 2 can be slidably arranged on the linear guide 12 through the slider 11; and / or, the bottom of the second bracket 4 is provided with a slider 11, for example, the slider 11 and the second bracket 4 can be fixedly connected by screws, and the second bracket 4 can be slidably arranged on the linear guide 12 through the slider 11. For example, a return hole bead, a steel ball and a return bead groove can be used to ensure that the slider 11 moves easily and accurately on the linear guide 12. In this way, the spacing between the first bracket 2 and the second bracket 4 can be adjusted according to the spacing between the upper bearing mating surface 14 and the lower bearing mating surface 15 of different spindles, thereby meeting the applicability of different types of spindles.

[0037] like Figure 3 As shown, the device for detecting the runout of the molecular pump spindle or spindle assembly further includes a universal meter base 7 and a first knob switch 9; the universal meter base 7 is arranged on the body, and an electromagnet is arranged inside the universal meter base 7; the first knob switch 9 is arranged on the outer wall of the universal meter base 7, and the first knob switch 9 is electrically connected to the electromagnet, and when the first knob switch 9 is turned on, the electromagnet is energized to make the universal meter base 7 adsorbed on the reference plane 1; the micrometer 6 is arranged on the universal meter base 7. When in use, when the first knob switch 9 is turned on, the universal meter base 7 is tightly fixed on the reference plane 1 by magnetic force, and when the first knob switch 9 is turned off, the universal meter base 7 can be arbitrarily moved on the reference plane 1, thereby realizing that the universal meter base 7 can be fixed at any position on the reference plane 1, so that the micrometer 6 can perform runout detection on different positions of the spindle.

[0038] The device for detecting the vibration of the molecular pump spindle or spindle assembly also includes a base linear guide rod 8 and a first fixed knob 20; the base linear guide rod 8 is arranged on the top surface of the universal meter base 7; the dial gauge 6 is arranged on the base linear guide rod 8 through the first fixed knob 20; after the first fixed knob 20 is loosened, the dial gauge 6 can move up and down along the base linear guide rod 8. For the dial gauge 6, it includes a dial gauge linear guide rod 17, a dial 19, a second fixed knob 21 and a needle 18. When installed, the dial gauge linear guide rod 17 can be fixed on the base linear guide rod 8 through the first fixed knob 20, and the dial 19 is connected and fixed on the dial gauge linear guide rod 17 through the second fixed knob 21. When in use, the first fixed knob 20 and the second fixed knob 21 are opened respectively, and the position of the needle 18 can be adjusted arbitrarily according to the height of the spindle to be measured. Afterwards, the first knob switch 9, the first fixing knob 20 and the second fixing knob 21 are tightened respectively to fix the position of the watch hand 18.

[0039] like Figure 6 As shown, the body also includes a base 22, a roller 23 and a height adjustment screw 29; a plurality of height adjustment screws 29 are provided at the bottom of the reference plane 1; the roller 23 is sleeved on the height adjustment screw 29 and is threadedly connected with the height adjustment screw 29; the base 22 is provided below the reference plane 1, and the height adjustment screw 29 at least partially extends into the base 22; the roller 23 is between the base 22 and the reference plane 1, and abuts against the base 22. A plurality of legs 24 are provided at the bottom of the base 22. The roller 23 may include two, and the bottom end surface of one roller 23 abuts against the top surface of the base 22; a semicircular groove 25 is provided on the side wall of the base 22, and the other roller 23 is provided in the semicircular groove 25.

[0040] For example, four legs 24 may be provided at the bottom of the base 22, each leg 24 is fixed to the base 22 by screws, and the four vertices of the base 22 may be connected to the reference plane 1 by height adjustment screws 29. Among them, the four vertices of the base 22 are provided with semicircular grooves 25 for installing rollers 23, and two rollers 23 are respectively installed on each height adjustment screw 29, one of the rollers 23 is located in the semicircular groove 25 on the base 22, and the other roller 23 is located above the base 22, and is used to adjust the height of the reference plane 1 to ensure that the flatness of the reference plane 1 is qualified (as a standard plane).

[0041] In summary, the device for detecting the runout of the molecular pump spindle or spindle assembly in the present application can be fully applicable to spindles or spindle assemblies of different types (with top holes at both ends, a top hole at one end, a threaded hole at one end, or threaded holes at both ends), and can meet the detection of spindle runout values ​​of different types of molecular pumps, ensure the smooth implementation of the detection of the spindle form and position tolerances, avoid the flow of unqualified products into the assembly process, and ensure the quality of molecular pump products.

[0042] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A device for detecting the vibration of a molecular pump spindle or spindle assembly, characterized in that: include: A body having a reference plane (1); A first bracket (2) is arranged on the reference plane (1), and two first bearings (3) for supporting a spindle or a spindle assembly to be inspected are arranged on the first bracket (2) at intervals; A second bracket (4) is arranged on the reference plane (1), and two second bearings (5) for supporting the spindle or spindle assembly to be inspected are arranged on the second bracket (4) at intervals; A micrometer (6) is arranged on the reference plane (1) and is used to detect the runout value of the spindle or the spindle assembly.

2. The device for detecting the vibration of the main shaft or main shaft assembly of a molecular pump according to claim 1, characterized in that: It also includes a first bearing fixing shaft (27), a first bearing fixing screw (26), a second bearing fixing shaft and a second bearing fixing screw; The first bearing fixing screw (26) is inserted into the first bracket (2) and at least partially extends out from the other side of the first bracket (2); the first bearing fixing shaft (27) is threadedly connected to the portion of the first bearing fixing screw (26) extending out of the first bracket (2); the inner ring of the first bearing (3) is sleeved on the first bearing fixing shaft (27); The second bearing fixing screw is inserted into the second bracket (4) and at least partially extends from the other side of the second bracket (4); the second bearing fixing shaft is threadedly connected to the portion of the second bearing fixing screw extending from the second bracket (4); and the inner ring of the second bearing (5) is sleeved on the second bearing fixing shaft.

3. The device for detecting the vibration of the main shaft or main shaft assembly of a molecular pump according to claim 2, characterized in that: Also includes a first bearing spacer (28) and a second bearing spacer; The first bearing spacer (28) is sleeved on the first bearing fixing shaft (27), and the first bearing spacer (28) is located between the first bearing (3) and the first bracket (2); The second bearing spacer is sleeved on the second bearing fixed shaft, and the second bearing spacer is located between the second bearing (5) and the second bracket (4).

4. The device for detecting the vibration of a molecular pump spindle or a spindle assembly according to claim 1, characterized in that: It also includes a linear guide rail (12) and a slide block (11); The linear guide rail (12) is arranged on the reference plane (1); The bottom of the first bracket (2) is provided with the sliding block (11), and the first bracket (2) is slidably arranged on the linear guide rail (12) via the sliding block (11); And / or, the bottom of the second bracket (4) is provided with the sliding block (11), and the second bracket (4) is slidably arranged on the linear guide rail (12) via the sliding block (11).

5. The device for detecting the vibration of the main shaft or main shaft assembly of a molecular pump according to claim 1, characterized in that: It also includes a universal meter base (7) and a first knob switch (9); The universal meter base (7) is arranged on the main body, and an electromagnet is arranged inside the universal meter base (7); The first knob switch (9) is arranged on the outer side wall of the gimbal base (7), and the first knob switch (9) is electrically connected to the electromagnet, and when the first knob switch (9) is turned on, the electromagnet is energized to make the gimbal base (7) adsorbed on the reference plane (1); The micrometer (6) is arranged on the universal meter base (7).

6. The device for detecting the vibration of the main shaft or main shaft assembly of a molecular pump according to claim 5, characterized in that: It also includes a base linear guide rod (8) and a first fixed knob (20); The base linear guide rod (8) is arranged on the top surface of the universal table base (7); The micrometer (6) is arranged on the base linear guide rod (8) via the first fixing knob (20); after the first fixing knob (20) is loosened, the micrometer (6) can move up and down along the base linear guide rod (8).

7. The device for detecting the vibration of the main shaft or main shaft assembly of a molecular pump according to claim 1, characterized in that: The body also includes a base (22), a roller (23) and a height adjustment screw (29); A plurality of height-adjusting screw rods (29) are arranged at the bottom of the reference plane (1); The roller (23) is sleeved on the height-adjusting screw (29) and is threadedly connected to the height-adjusting screw (29); The base (22) is arranged below the reference plane (1), and the height adjustment screw rod (29) at least partially extends into the base (22); The roller (23) is located between the base (22) and the reference plane (1), and abuts against the base (22).

8. The device for detecting the vibration of the main shaft or main shaft assembly of a molecular pump according to claim 7, characterized in that: The rollers (23) include two, wherein the bottom end surface of one of the rollers (23) abuts against the top surface of the base (22); A semicircular groove (25) is arranged on the side wall of the base (22), and another roller (23) is arranged in the semicircular groove (25).

9. The device for detecting the vibration of the main shaft or main shaft assembly of a molecular pump according to claim 7, characterized in that: A plurality of legs (24) are provided at the bottom of the base (22).

10. The device for detecting the vibration of the main shaft or main shaft assembly of a molecular pump according to claim 1, characterized in that: A groove (10) is provided on the top of the first bracket (2), and the bottom of the groove (10) is lower than the position where the first bearing (3) contacts the main shaft (13) to be measured; And / or, a groove (10) is provided on the top of the second bracket (4), and the bottom of the groove (10) is lower than the position where the second bearing (5) contacts the spindle (13) to be measured.

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