Molding apparatus and method for manufacturing an article

Abstract

To provide a technique advantageous for achieving both throughput and maintainability of a mold.SOLUTION: There is provided a molding device that molds moldable material by using a mold having a contact area brought into contact with the moldable material on a substrate. The molding device has a control unit that performs processing of bringing the contact area and the moldable material on the substrate into contact with each other. The control unit controls the processing to bring the mold and the substrate into proximity to each other at a first relative speed and subsequently bring the mold and the substrate into proximity to each other at a second relative speed slower than the first relative speed, and controls switching from the first relative speed to the second relative speed to compensate for a manufacturing error in the mold.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a molding apparatus and a method for manufacturing an article. [Background technology]

[0002] Imprint apparatuses have been put to practical use as one type of lithography apparatus for mass production of semiconductor devices, etc. The imprint apparatus forms a pattern of the imprint material on the substrate by bringing the imprint material supplied onto the substrate into contact with a mold, curing the imprint material, and then separating the mold from the cured imprint material. At present, there is a demand for further improvement in the throughput of imprint apparatuses.

[0003] Patent Document 1 discloses drive control of a mold for improving throughput. In Patent Document 1, the mold is driven at high speed before it comes into contact with the imprint material, and then the mold is driven at low speed when filling the imprint material onto the pattern surface of the mold.

[0004] Patent document 2 describes how, when filling the pattern surface of a mold with imprint material on a substrate, the force applied to the mold is controlled based on thickness information of the mold, which has manufacturing errors and dimensional errors, in order to shape the pattern surface of the mold into a target shape. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 5745129 [Patent Document 2] Patent No. 5824380 Summary of the Invention [Problem to be solved by the invention]

[0006] As described in Patent Document 2, the mold has manufacturing errors and dimensional errors. Therefore, individual differences in the thickness and expansion amount of the mold cause errors in the distance between the mold and the substrate. As a result, when the mold is driven at high speed until it comes into contact with the imprinting material as in Patent Document 1, the mold may collide with the substrate at high speed and be destroyed, or conversely, the contact between the pattern surface of the mold and the imprinting material may be shallow, slowing down filling and reducing throughput.

[0007] The present invention provides a technique that is advantageous in terms of achieving both throughput and mold integrity. [Means for solving the problem]

[0008] According to one aspect of the present invention, there is provided a molding apparatus for molding a moldable material on a substrate using a mold having a contact area for contacting the moldable material, the apparatus comprising: a measuring unit that measures the height position of the contact area of ​​the mold; a deformation unit that applies pressure to a space on the opposite side of the contact area of ​​the mold to deform the mold into a convex shape toward the substrate; A control unit that processes the contact area and the moldable material on the substrate. and, the control unit controls the process so that the mold and the substrate approach each other at a first relative speed, and then the mold and the substrate approach each other at a second relative speed that is slower than the first relative speed; Based on the relationship between the pressure applied by the deformation unit and the deformation amount of the mold, which is acquired using the measurement unit, A molding apparatus is provided, characterized in that switching from the first relative speed to the second relative speed is controlled so as to compensate for manufacturing errors of the mold. Effect of the Invention

[0009] According to the present invention, it is possible to provide a technique that is advantageous in achieving both throughput and mold integrity. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a diagram showing the configuration of an imprint apparatus. [Diagram 2] FIG. 4 is a diagram showing the configuration of a mold driving unit. [Diagram 3] A diagram showing the structure of a mold. [Figure 4] FIG. 13 is a diagram illustrating a method for measuring the amount of mold expansion. [Diagram 5]6A to 6C are diagrams for explaining a procedure for determining a reference drive amount of a mold drive unit. [Figure 6] 13A and 13B are diagrams for explaining the drawbacks when a mold thinner than a reference mold is used. [Figure 7] 13A and 13B are diagrams for explaining the drawbacks of using a mold that bulges more than a reference mold. [Figure 8] FIG. 4 is a diagram illustrating the characteristics of the expansion amount of a mask. [Figure 9] 5A to 5C are diagrams for explaining a method of correcting the drive amount of a mold drive unit. [Figure 10] A method for correcting the drive amount of the mold drive unit will be described. [Figure 11] FIG. 1 illustrates a method for manufacturing an article. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0012] First Embodiment The present invention relates to a molding device that performs a molding process for molding a moldable material made of a curable composition on a substrate. The molding process may include a supplying step of discretely supplying droplets onto the substrate, and a contacting step of contacting the moldable material supplied onto the substrate with a mold (master plate, template). The molding process may further include a curing step of curing the moldable material while the moldable material is in contact with the mold, and a separating step of separating the moldable material after curing from the mold.

[0013] In this embodiment, an imprinting apparatus, which is an example of a molding apparatus, will be described. FIG. 1 is a diagram showing the configuration of the imprinting apparatus IMP in this embodiment. In this specification and the drawings, directions are shown in an XYZ coordinate system with the horizontal plane as the XY plane. In general, a substrate 11, which is an object to be processed, is placed on a substrate holder 12 so that its surface is parallel to the horizontal plane (XY plane). Therefore, in the following, directions perpendicular to each other in a plane along the surface of the substrate 11 are referred to as the X-axis and Y-axis, and a direction perpendicular to the X-axis and Y-axis is referred to as the Z-axis. In the following, directions parallel to the X-axis, Y-axis, and Z-axis in the XYZ coordinate system are referred to as the X-direction, Y-direction, and Z-direction, respectively, and the rotation direction around the X-axis, the rotation direction around the Y-axis, and the rotation direction around the Z-axis are referred to as the θX-direction, θY-direction, and θZ-direction, respectively.

[0014] In FIG. 1, the mold 10 may be made of quartz or the like that is capable of transmitting ultraviolet light. The mold 10 has a pattern surface 22 on which a pattern such as a circuit pattern is formed on the surface facing the substrate 11. The pattern surface 22 is a contact area that is brought into contact with a moldable material (imprint material) on the substrate. The mold holding unit 9 attracts and holds the mold 10 by vacuum suction force or electrostatic force. The control unit 1 may be made of at least one computer including a CPU and a memory. In addition, the control unit 1 is connected to each component of the imprint device via a line, and can control the operation and adjustment of each component of the imprint device according to a program stored in the memory.

[0015] Substrate 11, which is an object of pattern formation by imprinting, is supported by substrate holding unit 12. Substrate holding unit 12 attracts and holds substrate 11 by vacuum suction force or electrostatic force. Measurement unit 4 measures the position of substrate 11 in the XY directions. Controller 1 can control the drive position of substrate driving unit 13 based on the position of substrate 11 in the XY directions measured by measurement unit 4. Substrate holding unit 12 (i.e. substrate 11) is driven in the XY directions by substrate driving unit 13 so that a shot area on substrate 11 is located under a supply device (not shown). After that, the supply device supplies a formable material (imprint material) onto the shot area.

[0016] The material of the substrate 11 may be, for example, glass, ceramics, metal, semiconductor, resin, etc. If necessary, a member made of a material different from that of the substrate may be provided on the surface of the substrate. The substrate 11 may be, for example, a silicon wafer, a compound semiconductor wafer, or quartz glass.

[0017] The supply of the imprint material by the supply device may be performed to a plurality of shot regions at once, or may be performed for each shot region that comes into contact with a mold in the imprint process. The supply of the imprint material to the substrate 11 may be performed in advance before the substrate 11 is carried into the imprint apparatus IMP.

[0018] As the moldable material (imprint material), a curable composition (sometimes called a resin in an uncured state) that is cured by applying energy for curing is used. The curable composition is a composition that is cured by irradiation with light or by heating. Of these, a photocurable composition that is cured by irradiation with light contains at least a polymerizable compound and a photopolymerization initiator, and may further contain a non-polymerizable compound or a solvent as necessary. The non-polymerizable compound is at least one selected from the group consisting of a sensitizer, a hydrogen donor, an internal mold release agent, a surfactant, an antioxidant, a polymer component, and the like. The viscosity of the imprint material (viscosity at 25°C) is, for example, 1 mPa·s or more and 100 mPa·s or less.

[0019] After the imprint material has been supplied, the substrate driving unit 13 positions the shot area, which is the area to be imprinted, under the mold 10. Thereafter, the mold driving unit 8 moves the mold 10 toward the substrate 11 (in the -Z direction), and the mold 10 comes into contact with the imprint material on the shot area of ​​the substrate 11. The relative speed at which the mold 10 and the substrate 11 approach each other until the mold 10 and the imprint material come into contact at this time is defined as the first relative speed. There does not necessarily have to be one first relative speed. The process from when the substrate 11 is positioned under the mold 10 by the drive of the substrate driving unit 13 until the mold 10 and the imprint material on the substrate 11 start to come into contact with each other is hereinafter referred to as the "contact process" or simply "contact".

[0020] Contact can be made by driving mold 10 in the -Z direction by mold driving unit 8. Alternatively, contact may be made by driving substrate 11 toward mold 10 (+Z direction) by substrate driving unit 13. Alternatively, contact may be made by driving both mold driving unit 8 and substrate driving unit 13. That is, in this embodiment, mold driving unit 8 and substrate driving unit 13 constitute a relative drive mechanism that relatively drives mold holding unit 9 and substrate holding unit 12 so that the distance between mold 10 and substrate 11 changes in order to adjust the relative position between mold 10 and substrate 11.

[0021] The imprinting device IMP includes a deformation unit 14 that applies pressure to an air chamber 15, which is a space on the opposite side of the pattern surface 22 of the mold 10, to deform the pattern surface 22 into a convex shape toward the substrate 11. When the mold 10 and the imprinting material on the substrate 11 are brought into contact with each other, the control unit 1 can control the pressure in the air chamber 15 between the mold 10 and the mold holding unit 9 using the deformation unit 14, thereby deforming the shape of the mold 10 into a convex shape toward the substrate 11. This is for the purpose of preventing air from entering the inside of the imprinting material when the mold 10 and the imprinting material on the substrate 11 are brought into contact with each other. The control unit 1 performs a process of bringing the pattern surface 22 into contact with the imprinting material on the substrate 11 while controlling the deformation of the pattern surface 22 by the deformation unit 14. If air enters the inside of the imprinting material, a defective pattern formation due to non-filling may occur. It is possible to extend the filling waiting time to eliminate such non-filling, but in that case, the throughput will decrease. In the later embodiments, a case where the pressure of the air chamber 15 is not controlled (not made convex) and a case where it is controlled (made convex) are described.

[0022] After the mold 10 and the substrate 11 come into contact with each other, the mold driving unit 8 drives the mold 10 toward the substrate 11 (in the -Z direction) to expand the contact surface. This driving may be performed by control based on the distance between the mold 10 and the substrate 11, or may be performed by control based on the force applied to the mold 10.

[0023] The imprint material is sandwiched between the pattern surface 22 of the mold 10 and the substrate 11, so that the pattern is transferred to the imprint material. For this transfer, after the mold 10 comes into contact with the imprint material on the substrate 11, the mold driving unit 8 is driven so that the imprint material spreads over the entire surface of the pattern surface 22. The relative speed at which the mold 10 and the substrate 11 are brought closer to each other (here, the driving speed of the mold driving unit 8) is not necessarily the same, but is performed at a second relative speed that is slower than the first relative speed until the contact. The reason is that it is necessary to prevent air from entering when the imprint material is spread over the entire surface of the pattern surface 22, and this is a fundamentally different concept from driving simply to move the mold 10 in space. The process of spreading the imprint material over the entire surface of the pattern surface 22 by advancing the contact after the contact between the mold 10 and the imprint material on the substrate 11 has started is hereinafter referred to as "pressing".

[0024] The pressure in the air chamber 15 and the mold drive unit 8 can be controlled simultaneously so that the entire surface of the pattern surface 22 comes into contact with the imprint material on the substrate 11 .

[0025] As described above, the mold driving unit 8 and the substrate driving unit 13 constitute a relative driving mechanism that drives at least one of the substrate 11 and the mold 10 so that the relative position between the mold 10 (the pattern surface 22) and the substrate 11 is adjusted. The adjustment of the relative position by the relative driving mechanism includes driving for contact of the pattern surface 22 of the mold 10 with the imprint material on the substrate 11 and separation of the pattern surface 22 from the cured product of the imprint material. The substrate driving unit 13 can be a driving mechanism having multiple degrees of freedom (for example, three axes of X, Y, and θZ axes, preferably six axes of X, Y, Z, θX, θY, and θZ). The mold driving unit 8 can also be a driving mechanism having multiple degrees of freedom (for example, three axes of Z, θX, and θY axes, preferably six axes of X, Y, Z, θX, θY, and θZ).

[0026] 2, the mold driving unit 8 can include three drive systems Z1, Z2, and Z3 that drive the mold holding unit 9 in the Z direction. The drive systems Z1, Z2, and Z3 include, for example, sensors that detect the position in the Z axis direction and the force acting in the Z direction, and can control the position and attitude of the mold 10 and the force applied to the mold 10 based on the outputs of these sensors.

[0027] For example, the drive systems Z1 and Z2 push the mold 10 toward the substrate 11 (-Z direction), and the drive system Z3 pushes the mold 10 toward the opposite side to the substrate 11 (+Z direction), thereby tilting the mold 1 in the +X direction. This type of control enables posture control according to the tilt of the pattern surface 22 of the mold 10 and the tilt and / or in-plane shape of the substrate 11.

[0028] After the imprint material has spread over the entire pattern surface 22, the imprint material is hardened by being provided with hardening energy. The hardening energy is generated from a light source 5 and is provided to the imprint material through a beam splitter 6, a relay optical system 7, and a mold 10. The process of hardening the imprint material by irradiating it with light after the imprint material has spread over the entire pattern surface 22 is hereinafter referred to as "exposure" in this specification.

[0029] The energy for curing may be electromagnetic waves, heat, etc. The electromagnetic waves may be, for example, light having a wavelength selected from the range of 10 nm to 1 mm, such as infrared rays, visible light, or ultraviolet rays.

[0030] After the imprint material has hardened, the mold driving unit 8 is driven to the opposite side (+Z direction) of the substrate 11 to separate the pattern surface 22 of the mold 10 from the imprint material, completing the pattern formation of one shot area. This process of separating the pattern surface 22 and the imprint material after the imprint material has hardened is hereinafter referred to as "mold release" in this specification.

[0031] If there are other areas on the substrate 11 to which the imprint material has already been supplied, the substrate driving unit 13 is driven so that the next area in which pattern formation is to be performed is positioned under the mold 10, and pattern formation is performed including contact, pressing, exposure, and demolding. If there are no other areas on the substrate 11 to which the imprint material has already been supplied, the imprint material is supplied to a new area. When there are no more areas on the substrate 11 to which pattern formation is to be performed, the substrate 11 is removed from the substrate holding unit 12. This series of imprint processing steps is controlled by the control unit 1.

[0032] Next, the structure of the mold 10 will be described. Fig. 3(a) is a cross-sectional view showing a cross section parallel to the XZ plane of the mold 10. The core-out 21 is the space that will become the air chamber 15 in Fig. 1. The mold thickness 26 is the thickness from the surface held by the mold holding part 9 to the pattern surface 22. The mold thickness 26 includes dimensional errors (manufacturing errors) that occur during the manufacturing process, and these manufacturing errors can cause errors in the relative drive in the Z direction in the contact process.

[0033] FIG. 3(b) is an enlarged view of a portion of FIG. 3(a). The core-out thickness 23 is the thickness of the core-out 21 portion excluding the pattern surface 22. A manufacturing error in the thickness can cause an error in the amount of convexity of the pattern surface 22 when the pressure of the air chamber 15 is controlled to perform the contact process. Even if the same positive pressure value is applied to the air chamber 15, a thinner core-out thickness 23 will expand more easily, resulting in a larger amount of convexity. Similarly, a manufacturing error in the core-out R diameter 27 can also cause an error in the amount of convexity of the pattern surface 22. Even if the same positive pressure value is applied to the air chamber 15, a smaller core-out R diameter 27 will have a larger area of ​​thin core-out thickness 23, resulting in an easier expansion and a larger amount of convexity.

[0034] The following describes how the thickness and the amount of expansion of the mold 10 are obtained during imprinting. The imprinting apparatus IMP may have a measuring unit 2 that measures the height position of the contact area of ​​the mold. In FIG. 1, the measuring unit 2 is disposed on the substrate driving unit 13, and measures the Z-direction distance to the pattern surface 22 of the mold 10 as the height position. In addition, a measuring unit 3 is disposed above the substrate holding unit 12 and to the side of the mold holding unit 9, for measuring the Z-direction distance to the surface of the substrate 11 held by the substrate holding unit 12. FIG. 4(a) shows a state in which the mold 10 is held by the mold holding unit 9, and the core-out 21 (air chamber 15) is not pressure-controlled. In this state, the control unit 1 drives the substrate driving unit 13 so that the measuring unit 2 disposed on the substrate driving unit 13 is located below the pattern surface 22, and the measuring unit 2 measures the distance to the pattern surface 22 to obtain the pre-pressure Z position 24. Furthermore, when contact is made while controlling the pressure of the air chamber 15, the control unit 1 controls the core-out 21 (air chamber 15) of the mold 10 to the same pressure as during imprinting, making the pattern surface 22 convex, and the measurement unit 2 measures the distance to the pattern surface 22 to obtain the post-pressure Z position 25. The control unit 1 can obtain the amount of expansion of the mold 10 used for imprinting by determining the difference between the post-pressure Z position 25 and the pre-pressure Z position 24.

[0035] It has been explained above that in the imprint process, the mold 10 is driven in the Z direction by the mold driving unit 8, and that the manufacturing errors of the mold thickness 26, the core-out thickness 23, and the core-out R diameter 27 are related to errors in the mold in the Z direction. Based on this, an adjustment method in the contact process will be explained.

[0036] FIG. 5 shows an adjustment when determining the drive amount of the mold driving unit 8 in the contact process. For this adjustment, a reference mold (reference mold) and substrate (reference substrate GS) with no manufacturing error or with a known manufacturing error are used. In FIG. 5(a), the reference mold GM and the reference substrate GS are held by the mold holding unit 9 and the substrate holding unit 12, respectively. The control unit 1 drives the substrate driving unit 13 so that the measurement unit 2 is positioned below the pattern surface 22' of the reference mold GM, and the measurement unit 2 measures the distance to the pattern surface 22'. Next, the control unit 1 drives the substrate driving unit 13 so that the reference substrate GS is positioned below the measurement unit 3, and the measurement unit 3 measures the distance to the surface of the reference substrate GS. Based on these measurement results, the control unit 1 performs correction driving by the mold driving unit 8 so that the pattern surface 22' of the reference mold GM and the reference substrate GS face each other in parallel, as in the imprint process. When pressure control of the air chamber 15 is performed, as shown in FIG. 5(b), the control unit 1 also applies pressure to the air chamber 15 of the reference mold GM. Here, the pressure applied to the reference mold GM is, for example, the maximum pressure used in the imprint process. Pressure is applied, and the amount of expansion of the reference mold GM is measured by the measurement unit 2. In Fig. 5(c), the control unit 1 drives the mold driving unit 8 toward the reference substrate GS (-Z direction) so that the relative speed at which the reference mold GM and the reference substrate GS approach each other becomes a second relative speed that is slower than the first relative speed. The control unit 1 drives the mold driving unit 8 until a portion of each of the reference mold GM and the reference substrate GS comes into contact, and stores the drive amount at the time of contact in memory as the reference drive amount of the mold driving unit 8.

[0037] Next, referring to FIG. 6, a specific effect of the error in the Z direction caused by the manufacturing error of the mold 10 on the contact at the reference drive amount of the mold drive unit 8 described in FIG. 5 will be described. FIG. 6(a) shows the same state as FIG. 5(a) in which the reference mold GM and the reference substrate GS are mounted. In contrast, in FIG. 6(b), the reference mold GM is replaced with the mold 10. Here, the mold thickness 26 of this mold 10 is thinner than that of the reference mold GM. As shown in FIG. 6(c), when imprinting is performed using the mold 10 at the reference drive amount, the drive amount is insufficient for appropriate contact with the imprint material on the substrate 11 due to the thinner mold thickness 26 of the mold 10. Therefore, the mold drive unit 8 is slowly lowered so that the relative speed at which the mold 10 and the reference substrate GS approach each other is equal to or lower than the first relative speed, which may reduce throughput.

[0038] As described above, there are manufacturing errors in the core-out thickness 23 and the core-out R diameter 27 as manufacturing errors other than the mold thickness 26. With reference to FIG. 7, we will explain how the error in the Z direction caused by the manufacturing error of the core-out thickness 23 and the core-out R diameter 27 of the mold 10 specifically affects the contact at the reference drive amount of the mold drive unit 8 described in FIG. 5. FIG. 7(a) shows the same state as FIG. 5(b) in which the reference mold GM and the reference substrate GS are mounted and pressure is applied to the air chamber 15 of the reference mold GM. In contrast, FIG. 7(b) shows a state in which the reference mold GM is replaced with the mold 10 and the same pressure is applied to the air chamber 15. Here, the core-out thickness 23 of this mold 10 is thinner than that of the reference mold GM due to a manufacturing error. Since the core-out thickness 23 is thinner, the amount of bulge is also larger than that of the reference mold GM. 7(c), if imprinting is performed with such a mold 10 at the reference drive amount, the drive amount is too large because the amount of expansion of the mold 10 is large, and the pattern surface 22 may collide with the substrate 11, possibly destroying the mold 10 or the substrate 11. The same applies when the core-out R diameter 27 is small due to a manufacturing error.

[0039] FIG. 8 illustrates a relationship between the pressure and the deformation amount by the deformation part 14 for each of a plurality of molds. FIG. 8(a) shows the tendency of the pressure and the swelling amount when pressure is applied to the air chamber 15 (cavity) of the mold 10. The horizontal axis is the core-out 21 of the mold 10, the pressure value applied to the air chamber 15 in the imprint process, and the vertical axis is the swelling amount of the mold 10 at that time (Z position after pressure 25 - Z position before pressure 24). As the pressure value used in imprinting, a region having a linear relationship with the swelling amount is often used, so by acquiring data of two points of pressure value / swelling amount, the approximate swelling amount characteristic of the mold 10 can be grasped. There are individual differences in the linear slope and intercept of each of the molds A, B, and C in FIG. 8(a).

[0040] FIG. 8(b) shows the relationship between the difference in inclination among the three dies in FIG. 8(a) and the manufacturing error of the dies. The horizontal axis is the core-out thickness 23 of each die, and the vertical axis is the bulge amount of each die (Z position after pressurization 25 - Z position before pressurization 24). The pressure value applied to the air chamber 15 of the die 10 at this time is constant. FIG. 8(b) also shows the relationship between the bulge amount of each die when the horizontal axis is the core-out R diameter 27 of each die (die D, die E, die F). The difference in the bulge amount shown in FIG. 8(a) is due to the manufacturing errors of the die thickness 26, core-out thickness 23, and core-out R diameter 27 mentioned above.

[0041] As described above, with reference to Figures 8(a) and 8(b), there are multiple factors that affect the amount of expansion of the mold 10. Next, we will explain how to handle the difference in the amount of expansion between molds in an actual imprint process. In the following, the control unit 1 controls the switching from the first relative speed to the second relative speed based on the difference between the height position of the pattern surface 22 of the mold 10 measured by the measurement unit 2 and the height position of the contact area of ​​the reference mold SM with a known manufacturing error measured by the measurement unit 2.

[0042] With reference to FIG. 9, a method for correcting the drive amount of the mold driver 8 in the imprint process when the pressure of the air chamber 15 is not controlled (not made convex) will be described. In FIG. 9(a) to (c), the horizontal axis represents the time from contact to pressing in the imprint process, and the vertical axis represents the position of the mold holder 9 in the Z direction. The origin of the vertical axis indicates that the entire pattern surface 22 of the mold 10 is in complete contact with the imprint material. FIG. 9(a) shows a case where the reference mold GM is used as is in the imprint process. When the reference mold GM is used, the mold driver 8 can be driven at the first relative speed until contact without correcting the reference drive amount, and no decrease in throughput occurs. FIG. 9(b) shows a case where a mold 10 having a mold thickness 26 thicker than that of the reference mold GM is used. In this case, the control unit 1 determines a corrected target position based on a drive amount obtained by subtracting the difference between the pre-pressure Z position 24 of the reference mold GM and the pre-pressure Z position 24 of the mold 10 from the reference drive amount. The control unit 1 brings the mold 10 and the substrate 11 closer to the corrected target position at the first relative speed. This makes it possible to prevent the mold 10 and the substrate 11 from colliding with each other. Thereafter, the control unit 1 brings the mold 10 and the substrate 11 even closer to each other at a second relative speed slower than the first relative speed. FIG. 9(c) shows a case where a mold 10 having a mold thickness 26 thinner than the reference mold GM is used. The control unit 1 determines the corrected target position based on a drive amount obtained by adding a difference between the pre-pressure Z position 24 of the mold 10 and the pre-pressure Z position 24 of the reference mold GM to the reference drive amount. The control unit 1 brings the mold 10 and the substrate 11 closer to each other at the first relative speed to the corrected target position. This makes it possible to prevent a decrease in throughput due to an early switch to the second relative speed slower than the first relative speed. Thereafter, the control unit 1 brings the mold 10 and the substrate 11 even closer to each other at a second relative speed slower than the first relative speed.

[0043] The control unit 1 can store the difference in the mold thickness 26 from the reference mold GM in the memory as a parameter of each mold. This allows imprinting with the shortest throughput to be performed for each mold after the first measurement without performing measurements with the measurement unit 2. Of course, taking into consideration possible changes over time in each part, measurements may be performed every time.

[0044] It has been explained above that the difference in mold thickness 26 can be added or subtracted from the reference drive amount to absorb the difference in contact between molds. Next, with reference to Fig. 10, a method of correcting the drive amount of the mold drive unit 8 in the imprint process in which the pressure of the air chamber 15 is controlled (to make it convex) will be explained. Although not shown in Fig. 10, this method also involves adding or subtracting the difference in mold thickness 26 to the reference drive amount as described above. Here, only the correction of the difference in the amount of bulge (amount of deformation) will be mentioned.

[0045] FIG. 10 shows a method of correcting the drive amount of the mold driver 8 in the imprint process when the pressure of the air chamber 15 is controlled (to make it convex). In FIG. 10(a) to (c), the horizontal axis / vertical axis indicates the same as FIG. 9 (time / position in the Z direction). The origin of the vertical axis indicates that the entire pattern surface 22 of the mold 10 is in contact with the imprint material. FIG. 10(a) shows a case where the reference mold GM is used as is in the imprint process. When the reference mold GM is used, the mold driver 8 can be driven at the first relative speed until contact without correcting the reference drive amount, and no decrease in throughput occurs. FIG. 10(b) shows a case where a mold 10 is used in which the core-out thickness 23 is thicker than the reference mold GM and the bulge amount of the pattern surface 22 is smaller even with the same pressure value as the reference mold GM. In this case, the control unit 1 determines a corrected target position based on a drive amount obtained by adding the difference between the bulge amount of the reference mold GM and the bulge amount of the mold 10 to the reference drive amount. The control unit 1 moves the mold 10 and the substrate 11 closer to the corrected target position at the first relative speed. This makes it possible to prevent a decrease in throughput due to an early switch to a second relative speed slower than the first relative speed. Thereafter, the control unit 1 moves the mold 10 and the substrate 11 closer to each other at the second relative speed slower than the first relative speed. FIG. 10(c) shows a case in which the core-out thickness 23 is thinner than the reference mold GM, and the mold bulge amount is larger even if the pressure value is the same as that of the reference mold GM. In this case, the control unit 1 determines the corrected target position based on the drive amount obtained by subtracting the difference between the bulge amount of the reference mold GM and the bulge amount of the mold 10 from the reference drive amount. The control unit 1 moves the mold 10 and the substrate 11 closer to each other at the first relative speed. This makes it possible to prevent a collision between the mold 10 and the substrate 11. Thereafter, the control unit 1 moves the mold 10 and the substrate 11 closer to each other at the second relative speed slower than the first relative speed.

[0046] The control unit 1 stores the amount of expansion of the reference mold GM when the reference drive amount is determined using the reference mold GM. The control unit 1 obtains the relationship (intercept and slope) between the pressure of the air chamber 15 and the amount of expansion before the imprint process only when each mold is used for the first time, and stores it as a parameter for each mold. During imprinting, the control unit 1 corrects the target position or the reference drive amount based on the pressure conditions of the air chamber 15 to be used and the stored relationship. This makes it possible to perform imprinting with the shortest throughput for each mold without performing measurements by the measurement unit 2 after the first measurement. Of course, measurements may be performed each time, taking into account possible changes over time in each part.

[0047] In the embodiment described above, the control unit 1 controls the contact and pressing processes so that the mold 10 and the substrate 11 approach each other at a first relative speed, and then approach each other at a second relative speed slower than the first relative speed. Here, the control unit 1 controls the switching from the first relative speed to the second relative speed so as to compensate for the manufacturing error of the mold 10. This appropriate switching can prevent a collision between the mold 10 and the substrate 11, or a decrease in throughput caused by a rapid switching to the second relative speed slower than the first relative speed. This achieves both throughput and mold maintainability.

[0048] <Second embodiment> In the above-mentioned first embodiment, an imprinting apparatus that transfers a pattern of a mold to an imprinting material by contacting the imprinting material with a mold has been described as one aspect of a molding apparatus. However, the present invention can also be applied to a planarizing apparatus that forms a planarizing film of a composition on a substrate by contacting a moldable material (composition) on the substrate with a member (mold) having a flat surface, as another aspect of a molding apparatus.

[0049] The base pattern on the substrate has a roughness profile caused by the pattern formed in the previous process. In particular, with the recent trend toward multi-layered structures for memory elements, some process substrates have steps of around 100 nm. The steps caused by the gentle waviness of the entire substrate can be corrected by the focus tracking function of the scanning exposure device used in the photo process. However, fine-pitched unevenness that falls within the exposure slit area of ​​the exposure device may be outside the depth of focus (DOF) of the exposure device. Conventionally, methods for forming planarizing layers such as SOC (Spin On Carbon) and CMP (Chemical Mechanical Polishing) have been used to smooth the base pattern on the substrate. However, there is a problem that sufficient planarization performance cannot be obtained with conventional technologies, and the unevenness of the base due to multi-layering is likely to increase further in the future.

[0050] In order to solve this problem, a planarization device that uses the above-mentioned imprint technology to planarize a substrate is being considered. The planarization device brings the flat surface of a member or a member (flat template) on which no pattern is formed into contact with an uncured composition that has been previously supplied to the substrate to perform local planarization within the substrate surface. The composition is then cured while in contact with the flat template, and the flat template is separated from the cured composition. This forms a planarization layer on the substrate. The planarization device using the imprint technology drops an amount of composition according to the step of the substrate, and is therefore expected to improve the accuracy of planarization compared to existing methods.

[0051] In the case of a planarization apparatus, a planarization film is formed all over the substrate in one go. In this case, the above-described embodiment can be applied to reduce overflow of the composition from the substrate and non-filling.

[0052] <Embodiment of the article manufacturing method> The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing an article such as a microdevice such as a semiconductor device or an element having a fine structure. The method for manufacturing an article according to the present embodiment includes a step of molding a moldable material supplied (applied) to a substrate using the above-mentioned molding device, and a step of processing the substrate that has undergone the molding step. Furthermore, the manufacturing method includes other well-known steps (oxidation, film formation, deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The method for manufacturing an article according to the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article compared to conventional methods.

[0053] The pattern of the cured product formed by using the imprinting apparatus is used permanently on at least a part of various articles, or temporarily when manufacturing various articles. The articles include electric circuit elements, optical elements, MEMS, recording elements, sensors, and molds. Examples of the electric circuit elements include volatile or non-volatile semiconductor memories such as DRAM, SRAM, flash memory, and MRAM, and semiconductor elements such as LSI, CCD, image sensors, and FPGA. Examples of the molds include molds for imprinting.

[0054] The pattern of the cured product is used as it is as at least a part of a component of the article, or is used temporarily as a resist mask, which is removed after etching or ion implantation in a substrate processing step.

[0055] Next, a method for manufacturing an article will be described. In step SA of Fig. 11, a substrate 1z such as a silicon substrate having a workpiece 2z such as an insulator formed on its surface is prepared, and then an imprint material 3z is applied to the surface of the workpiece 2z by an inkjet method or the like. Here, a state in which the imprint material 3z in the form of multiple droplets is applied onto the substrate is shown.

[0056] In step SB of Fig. 11, the imprinting mold 4z is placed facing the imprinting material 3z on the substrate with the side on which the concave-convex pattern is formed. In step SC of Fig. 11, the substrate 1z to which the imprinting material 3z has been applied is brought into contact with the mold 4z, and pressure is applied. The imprinting material 3z fills the gap between the mold 4z and the workpiece 2z. When light is irradiated through the mold 4z in this state as energy for hardening, the imprinting material 3z hardens.

[0057] 11, after the imprint material 3z is cured, the mold 4z and the substrate 1z are separated, and a pattern of the cured product of the imprint material 3z is formed on the substrate 1z. In this cured product pattern, the recesses of the mold correspond to the protrusions of the cured product, and the protrusions of the mold correspond to the recesses of the cured product, i.e., the recessed and protruding patterns of the mold 4z are transferred to the imprint material 3z.

[0058] In step SE of Fig. 11, etching is performed using the pattern of the cured material as an etching-resistant mask, and the portions of the surface of the workpiece 2z where there is no cured material or where only a thin layer remains are removed to form grooves 5z. In step SF of Fig. 11, the pattern of the cured material is removed to obtain an article in which grooves 5z are formed on the surface of the workpiece 2z. Here, the pattern of the cured material is removed, but it may be used as an interlayer insulating film included in a semiconductor element or the like, that is, a component of an article, without being removed after processing.

[0059] Although the example of using a mold for transferring a circuit pattern having a concave-convex pattern as the mold 4z has been described, a mold (blank template) having a flat portion without a concave-convex pattern may also be used. The blank template is used in a flattening device (molding device) that performs a flattening process (molding process) in which the flat portion molds the composition on the substrate to be flattened. The flattening process includes a step of curing the composition by irradiation with light or by heating in a state in which the flat portion of the blank template is brought into contact with the composition supplied onto the substrate.

[0060] The invention is not limited to the above-described embodiments, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0061] IMP: imprint device, 1: control unit, 8: mold driving unit, 10: mold, 11: substrate, 12: substrate holding unit

Claims

1. 1. A molding apparatus for molding a moldable material on a substrate using a mold having a contact area for contacting the moldable material, the molding apparatus comprising: A measuring unit that measures a height position of the contact area of ​​the mold; a deformation section that deforms the mold into a convex shape toward the substrate by applying pressure to a space on an opposite side to the contact region of the mold; A control unit that performs a process of contacting the contact area with the moldable material on the substrate while controlling the deformation of the mold by the deformation unit, The control unit is controlling the process so that the mold and the substrate approach each other at a first relative speed, and then the mold and the substrate approach each other at a second relative speed slower than the first relative speed; controlling switching from the first relative velocity to the second relative velocity so as to compensate for a manufacturing error of the mold, based on a relationship between a pressure applied by the deformation unit and a deformation amount of the mold, the relationship being acquired using the measurement unit; A molding apparatus comprising:

2. The molding apparatus according to claim 1, characterized in that the control unit controls the switching from the first relative speed to the second relative speed based on the difference between the height position of the contact area of ​​the mold measured by the measurement unit and the height position of the contact area of ​​a reference mold having a known manufacturing error measured by the measurement unit.

3. The molding apparatus described in claim 2, characterized in that the control unit controls the switching from the first relative speed to the second relative speed based on the difference between the amount of deformation of the mold caused by the deformation unit obtained using the measurement unit and the amount of deformation of a reference mold having a known manufacturing error caused by the deformation unit obtained using the measurement unit.

4. The molding apparatus according to claim 3, characterized in that the control unit controls the switching from the first relative speed to the second relative speed based on a previously obtained relationship between the pressure applied by the deformation unit and the amount of deformation for each of the multiple molds.

5. A molding apparatus for molding a moldable material on a substrate using a mold having a contact area for contacting the moldable material, comprising: A measuring unit that measures a height position of the contact area of ​​the mold; a deformation section that deforms the mold into a convex shape toward the substrate by applying pressure to a space on an opposite side to the contact region of the mold; A control unit that performs a process of contacting the contact area with the moldable material on the substrate while controlling the deformation of the mold by the deformation unit, The control unit is controlling the process so that the mold and the substrate approach each other at a first relative speed, and then the mold and the substrate approach each other at a second relative speed slower than the first relative speed; controlling switching from the first relative velocity to the second relative velocity so as to compensate for a manufacturing error of the mold, based on a previously obtained relationship between the pressure and the amount of deformation by the deformation unit for each of a plurality of molds, and a difference between the amount of deformation of the mold by the deformation unit obtained using the measurement unit and the amount of deformation of a reference mold having a known manufacturing error obtained using the measurement unit; A molding apparatus comprising:

6. the contact area has a pattern to be transferred to the moldable material on the substrate; the molding device is an imprinting device that transfers the pattern to an imprinting material, which is the moldable material on the substrate, by contacting the contact area of ​​the mold with the imprinting material; A molding apparatus according to any one of claims 1 to 5.

7. the contact area is a flat surface; the molding device is a planarizing device that forms a planarized film of the moldable material on the substrate by contacting a flat surface of the mold with the moldable material on the substrate; 7. The molding apparatus according to claim 1, wherein the molding apparatus is a molding apparatus having a first opening and a second opening.

8. Moulding a mouldable material on a substrate using a moulding apparatus according to any one of claims 1 to 7; a step of processing the substrate that has been subjected to the molding step; having A method for manufacturing an article, comprising the steps of: manufacturing an article from the substrate that has been subjected to the processing step.

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