Capillary exchange mechanism and wire bonding device

Abstract

It provides an automatic capillary replacement function while preventing the size from increasing. [Solution] The capillary replacement unit 5 includes a supply module 54 that moves a replacement capillary 243T from a capillary storage section 54a to a capillary supply port 54b along a supply direction SD, a replacement module 53 that performs the operations of removing the replacement capillary 243T from the capillary supply port 54b by moving the replacement capillary 243T located at the capillary supply port 54b along the axis and moving the removed replacement capillary 243T along the axis, and a transport module 52 that receives the replacement capillary 243T moved by the moving operation of the replacement module 53 and transports the received replacement capillary 243T by moving it linearly a predetermined distance and rotating it by a predetermined angle.

Description

[Technical field]

[0001] The present invention relates to a capillary exchange mechanism and a wire bonding apparatus. [Background technology]

[0002] A wire bonding apparatus electrically connects a lead frame to electrodes of a semiconductor chip using a wire. The wire is pressed against electrodes of the semiconductor chip from a part called a capillary, and heat or ultrasonic waves are applied to the wire as necessary. As a result, the wire is bonded to the electrodes of the semiconductor chip. This bonding operation is called bonding.

[0003] When bonding is repeated, it becomes difficult to obtain the desired bonding results due to wear of the tip of the capillary, etc. Therefore, the capillary is replaced every time a replacement condition that is set based on the number of bonding operations, etc. is met.

[0004] Patent documents 1 to 3 each disclose techniques related to wire bonding. Patent document 1 discloses an apparatus and method for performing continuous bonding while replacing a capillary, which is a bonding tool. Patent document 2 discloses an apparatus and method for accurately detecting the position of a capillary. Patent document 3 discloses a method for more effectively suppressing wire dislodgment and wire bending. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 4700595 [Patent Document 2] JP 2001-249007 A [Patent Document 3] Patent No. 4467631 Summary of the Invention [Problem to be solved by the invention]

[0006] In a factory that manufactures semiconductor chips, a large number of various manufacturing devices are installed. The number of manufacturing devices corresponds to the production volume in the factory, so the number of manufacturing devices that corresponds to the production volume is installed in the factory. In this case, it is difficult to expand the factory's site area, and in order to increase the number of manufacturing devices in a certain site area, it is desirable to suppress the increase in size of the manufacturing devices. This suppression of the increase in size of the manufacturing devices is also desirable when adding a function to replace capillaries as described in Patent Document 1. In other words, in this technical field, there has been a demand for a mechanism that can provide an automatic capillary replacement function while suppressing the increase in size.

[0007] The present invention provides a capillary exchange mechanism that can provide an automatic capillary exchange function while suppressing an increase in size, and a wire bonding apparatus equipped with the capillary exchange mechanism. [Means for solving the problem]

[0008] A capillary replacement mechanism according to one embodiment of the present invention has a storage section that holds a plurality of replacement capillaries arranged in a supply direction perpendicular to the axis of the replacement capillary, and a capillary supply port for removing the replacement capillary, and is equipped with a supply module that moves the replacement capillary from the storage section to the capillary supply port along the supply direction, a replacement module that performs the operations of removing the replacement capillary from the capillary supply port by moving the replacement capillary located at the capillary supply port along the axis and moving the removed replacement capillary along the axis, and a transport module that performs the operations of receiving the replacement capillary moved by the moving operation of the replacement module and transporting the received replacement capillary in a straight line a predetermined distance and rotating it by a predetermined angle.

[0009] This capillary exchange mechanism can move the replacement capillary in three ways: in the supply direction, along the axis, and by rotating it by a predetermined angle. As a result, the degree of freedom in arranging the supply module, the replacement module, and the transport module for the automatic capillary exchange function is increased. Therefore, these modules can be arranged so that the area required for arranging the capillary exchange mechanism is compact, so that the automatic capillary exchange function can be provided while suppressing an increase in size.

[0010] In the above-mentioned capillary exchange mechanism, a first reference line overlapping the axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined, the transport module is positioned to include the intersection of the first reference line and the second reference line, and the replacement module is positioned adjacent to the transport module along the direction of the second reference line. This configuration allows the replacement module to be located next to the transport module.

[0011] In the above-mentioned capillary exchange mechanism, a first reference line overlapping the axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined, the transport module is positioned to include the intersection of the first reference line and the second reference line, and the supply module is positioned adjacent to the transport module along the direction of the second reference line. This configuration allows the supply module to be located next to the transport module.

[0012] In the above-mentioned capillary replacement mechanism, a first reference line overlapping the axis of the used capillary held by the horn, a second reference line perpendicular to the first reference line, and a third reference line parallel to the first reference line and spaced apart from the first reference line in the direction of the second reference line are defined, the replacement module is positioned to include the intersection of the second reference line and the third reference line, and the supply module is positioned on the third reference line adjacent to the replacement module along the direction of the third reference line. With this configuration, the supply module can be located above or below the replacement module.

[0013] In the above-mentioned capillary exchange mechanism, a first reference line overlapping the axis of the used capillary held by the horn, a second reference line perpendicular to the first reference line, and a third reference line parallel to the first reference line and spaced apart from the first reference line in the direction of the second reference line are defined, the transport module is positioned to include an intersection of the first reference line and the second reference line, the replacement module is positioned to include an intersection of the second reference line and the third reference line, and the supply module is positioned on the third reference line adjacent to the replacement module along the direction of the third reference line. With this configuration, the replacement module can be located next to the transport module and the supply module can be located above or below the replacement module.

[0014] In the above-mentioned capillary exchange mechanism, a first reference line overlapping the axis of the used capillary held by the horn is defined, the transport module is positioned so as to overlap the first reference line, and the replacement module is positioned so as to overlap the first reference line and adjacent to the transport module along the direction of the first reference line. According to this configuration, the replacement module can be disposed below the transport module.

[0015] In the above-mentioned capillary exchange mechanism, a first reference line overlapping the axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined, the transport module is positioned so as to overlap the first reference line but not to include an intersection between the first reference line and the second reference line, and the supply module is positioned so as to overlap the second reference line. According to this configuration, the supply module can be disposed below the transport module.

[0016] In the above-mentioned capillary exchange mechanism, a first reference line overlapping the axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined, the replacement module is positioned to include the intersection of the first reference line and the second reference line, and the supply module is positioned to overlap the second reference line. This arrangement allows the supply module to be located next to the replacement module.

[0017] In the above-mentioned capillary exchange mechanism, a first reference line overlapping the axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined, the transport module is positioned so as to overlap the first reference line but not to include an intersection of the first reference line and the second reference line, the replacement module is positioned so as to include an intersection of the first reference line and the second reference line, and the supply module is positioned so as to overlap the second reference line. According to this configuration, the replacement module can be arranged below the transport module, and the supply module can be arranged next to the replacement module.

[0018] A wire bonding apparatus according to another embodiment of the present invention includes a horn, a capillary detachably attached to the horn, and a capillary exchange mechanism for exchanging a used capillary for a replacement capillary. The capillary exchange mechanism includes a storage unit for holding a plurality of replacement capillaries arranged in a supply direction perpendicular to an axis of the replacement capillary, a capillary supply port for removing the replacement capillary, and a supply module for moving the replacement capillary from the storage unit to the capillary supply port along the supply direction, a replacement module for performing an operation of removing the replacement capillary from the capillary supply port by moving the replacement capillary located at the capillary supply port along the axis and an operation of moving the removed replacement capillary along the axis, and a transport module for performing an operation of receiving the replacement capillary moved by the moving operation of the replacement module and a transport operation of linearly moving the received replacement capillary a predetermined distance and rotating it by a predetermined angle.

[0019] This wire bonding apparatus includes the above-mentioned capillary exchange mechanism, and therefore the area required for arranging the capillary exchange mechanism can be made compact, which prevents the wire bonding apparatus from becoming larger when an automatic capillary exchange function is added. Effect of the Invention

[0020] According to the present invention, it is possible to provide a capillary exchange mechanism and a wire bonding apparatus that can provide an automatic capillary exchange function while suppressing an increase in size. [Brief description of the drawings]

[0021] [Figure 1] FIG. 1 is a perspective view showing a configuration of a wire bonding apparatus according to an embodiment. [Diagram 2] FIG. 2 is an enlarged plan view showing the tip of the ultrasonic horn. [Diagram 3] 3(a), 3(b), 3(c) and 3(d) are plan views for explaining the operation of removing the capillary. [Figure 4] 4(a), 4(b), 4(c), 4(d) and 4(e) are diagrams for explaining the wire drawing operation performed by the wire bonding apparatus. [Diagram 5] 5(a), 5(b), 5(c), 5(d) and 5(e) are diagrams for explaining the wire drawing operation performed by the wire bonding apparatus. [Figure 6] FIG. 6 is a diagram for explaining an imaging operation performed by the wire bonding apparatus. [Figure 7] FIG. 7 is a diagram showing a schematic configuration of the capillary replacement unit. [Figure 8] FIG. 8 is a diagram showing the arrangement of the transport module, the replacement module and the supply module. [Figure 9] 9(a), 9(b), 9(c) and 9(d) are views for explaining the first transport operation performed by the capillary replacement unit. [Figure 10] 10(a), 10(b), 10(c) and 10(d) are views for explaining the second transport operation performed by the capillary replacement unit. [Figure 11] 11(a) and 11(b) are diagrams for explaining the pulling operation performed by the capillary replacement unit. [Figure 12] 12(a), 12(b), 12(c) and 12(d) are diagrams for explaining the replacement operation performed by the capillary replacement unit. [Figure 13] FIG. 13 is a functional block diagram of a controller provided in the wire bonding apparatus of the embodiment. [Figure 14] FIG. 14 is a flow chart showing the main steps of a method for replacing a capillary according to an embodiment. [Figure 15] FIG. 15 is a flow chart showing in detail the steps of performing preparation for automatic capillary exchange in FIG. [Figure 16] Fig. 16(a) is a diagram showing the operation of moving the capillary onto the waste bond stage, Fig. 16(b) is a diagram showing the operation of advancing the sub-base toward the capillary exchange unit, and Fig. 16(c) is a diagram showing the operation of retracting the sub-base. [Figure 17] FIG. 17 is a flow chart showing in detail the steps of performing the automatic capillary exchange in FIG. [Figure 18] Figures 18(a), 18(b), 18(c) and 18(d) are diagrams showing the process of performing automatic capillary exchange, from the operation of advancing the sub-base to the operation of moving the transport carriage to the exchange position. [Figure 19] Figures 19(a), 19(b), 19(c) and 19(d) are diagrams showing the steps of performing automatic capillary exchange, from the operation of rotating the release pin portion to the operation of moving the replacement table in the insertion direction. [Figure 20]Figures 20(a), 20(b), 20(c) and 20(d) are diagrams showing the steps of performing automatic capillary exchange, from the operation of lowering the transport carriage to a predetermined position to the operation of retracting the sub-base. [Figure 21] FIG. 21 is a flow chart detailing the steps for carrying out the bonding preparation in FIG. [Figure 22] FIG. 22 is a diagram showing the arrangement of the transport module, the replacement module, and the supply module in the capillary replacement unit of the first modified example. [Diagram 23] FIG. 23 is a diagram showing the arrangement of the transport module, the replacement module, and the supply module in the capillary replacement unit of the second modification. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated explanations will be omitted.

[0023] 1 is a perspective view showing a wire bonding apparatus according to an embodiment of the present invention. The wire bonding apparatus 1 includes a wire bonding unit 2, a bonding stage 3, a camera unit 4, a capillary exchange unit 5 (capillary exchange mechanism), and a controller 6.

[0024] The wire bonding unit 2 bonds bonding wires 12 (see FIG. 4, etc.) to the semiconductor chip 11. The bonding stage 3 sequentially moves multiple semiconductor chips 11 to be wire bonded to the working area of ​​the wire bonding unit 2. The camera unit 4 obtains images for controlling the operation of the wire bonding unit 2. The capillary replacement unit 5 replaces a used capillary that needs to be replaced after multiple wire bonding operations with a new replacement capillary. The controller 6 has various control units that control the operation of each part of the wire bonding apparatus 1 and perform various processes.

[0025] The wire bonding unit 2 has a main base 21, a tool XY stage 22, and a sub-base 23. Furthermore, the wire bonding unit 2 has a bonding module 24, a Z-axis drive unit 25, a module base 26, a lower wire clamper 27, and an upper wire clamper 28.

[0026] The tool XY stage 22 is attached to the main base 21. The sub-base 23 is attached to a movable stage of the tool XY stage 22. The tool XY stage 22 moves the sub-base 23 in the X-axis direction and the Y-axis direction. The bonding module 24, the lower wire clamper 27, the upper wire clamper 28, and the camera unit 4 are attached to the sub-base 23. For example, when the sub-base 23 moves in the X-axis direction by the tool XY stage 22, the bonding module 24, the lower wire clamper 27, the upper wire clamper 28, and the camera unit 4 also move integrally in the X-axis direction.

[0027] More specifically, the sub-base 23 includes a sub-base main surface 23a and a sub-base wall surface 23b. A Z-axis drive unit 25 is attached to the sub-base main surface 23a, and a module base 26 is attached to the Z-axis drive unit 25. The bonding module 24 and the lower wire clamper 27 are attached to the module base 26. On the other hand, an upper wire clamper 28 and a camera unit 4 are attached to the sub-base wall surface 23b without intermediate members such as the Z-axis drive unit 25 and the module base 26. With this configuration, the bonding module 24 and the lower wire clamper 27 are reciprocated in the Z-axis direction by the Z-axis drive unit 25. More specifically, the tip of the bonding module 24 and the tip of the lower wire clamper 27 can perform reciprocating arc motion around the Z-axis drive unit 25. During this reciprocating arc motion, the relative position of the lower wire clamper 27 with respect to the bonding module 24 is maintained. On the other hand, the upper wire clamper 28 and the camera unit 4 are not reciprocated in the Z-axis direction by the Z-axis drive unit 25.

[0028] In short, the bonding module 24 and the lower wire clamper 27 move in the X-axis direction, the Y-axis direction, and the Z-axis direction, respectively. In contrast, the upper wire clamper 28 and the camera unit 4 move in the X-axis direction and the Y-axis direction. In the example of this embodiment, the upper wire clamper 28 and the camera unit 4 do not move in the Z-axis direction. However, it is also possible to adopt a configuration in which the upper wire clamper 28 and the camera unit 4 are movable in the Z-axis direction.

[0029] <Bonding Module 24> The bonding module 24 has a horn holder 241, an ultrasonic horn 242, and a capillary 243. The base end side of the horn holder 241 is attached to the Z-axis driving unit 25. The ultrasonic horn 242 is attached to the tip side of the horn holder 241. The capillary 243 is detachably attached to the tip side portion of the ultrasonic horn 242.

[0030] 2, a capillary mounting hole H1 and a pin insertion hole H2 are formed at the tip of the ultrasonic horn 242. The capillary mounting hole H1 and the pin insertion hole H2 penetrate the ultrasonic horn 242 along the Z axis. In this embodiment, the capillary mounting hole H1 is provided on the tip side of the ultrasonic horn 242 relative to the pin insertion hole H2. However, the pin insertion hole H2 may be provided on the tip side of the ultrasonic horn 242 relative to the capillary mounting hole H1.

[0031] The capillary mounting hole H1 and the pin insertion hole H2 communicate with each other. In this embodiment, the capillary mounting hole H1 and the pin insertion hole H2 communicate with each other via a slit S1. The slit S1 penetrates the ultrasonic horn 242 in the Z-axis direction.

[0032] Further, a slit S2 is formed in the ultrasonic horn 242. The slit S2 is in communication with the pin insertion hole H2. The slit S2 is formed closer to the base end side of the ultrasonic horn 242 than the pin insertion hole H2. The slit S2 passes through the ultrasonic horn 242 in the Z-axis direction. In this manner, the capillary mounting hole H1, the slit S1, the pin insertion hole H2, and the slit S2 are in communication with one another.

[0033] The capillary 243 is inserted into the capillary mounting hole H1. Here, the ultrasonic horn 242 is formed of an elastically deformable material. As shown in FIG. 3(a), the capillary mounting hole H1 is smaller than the outer diameter of the capillary 243 when the capillary 243 is not inserted. The ultrasonic horn 242 can hold the capillary 243 inserted into the capillary mounting hole H1 by pushing and widening the capillary mounting hole H1 with its elastic force. That is, the capillary 243 is inserted into the capillary mounting hole H1 with the capillary mounting hole H1 being pushed and widened.

[0034] As shown in FIG. 3(a), the pin insertion hole H2 is an elliptical hole. The release pin 511 of the release module 51 can be inserted into the pin insertion hole H2. The release pin 511 is inserted into the pin insertion hole H2 to release the grip of the capillary 243 by the ultrasonic horn 242. As shown in FIG. 2 and FIG. 3(a), the inner wall surface of the pin insertion hole H2 includes a first surface W1 and a second surface W2 that face each other. The first surface W1 and the second surface W2 face each other in the short direction of the elliptical pin insertion hole H2. The slit S1 and the slit S2 face each other in the long direction of the elliptical pin insertion hole H2. When the release pin 511 of the release module 51 is not inserted into the pin insertion hole H2, the short-side length of the pin insertion hole H2 is shorter than the length L1 of the release pin 511 in the first direction (longitudinal direction). The capillary attachment hole H1 communicates with an end portion in the longitudinal direction of the elliptical pin insertion hole H2 via a slit S1.

[0035] The capillary 243, which is a bonding tool, bonds the bonding wire 12 to the semiconductor chip 11. The capillary 243 has a capillary body 243a and a capillary taper 243b. The capillary body 243a is cylindrical and is held at the tip of the ultrasonic horn 242. The capillary taper 243b is conical and tapered toward the tip, and the tip of the capillary taper 243b is pressed against a pad or the like of the semiconductor chip 11. The capillary 243 has a capillary through hole 243h that extends from the base end surface of the capillary body 243a to the tip surface of the capillary taper 243b. The bonding wire 12 is inserted into the capillary through hole 243h.

[0036] <Lower wire clamper and upper wire clamper> The lower wire clamper 27 and the upper wire clamper 28 can be switched between a state in which the bonding wire 12 is gripped and a state in which the bonding wire 12 is not gripped. As described above, the lower wire clamper 27 is movable along the Z-axis direction. Therefore, the position of the lower wire clamper 27 can be switched between a position close to the upper wire clamper 28 (close position 2N) and a position away from the upper wire clamper 28 (separate position 2F) relative to the upper wire clamper 28, whose position along the Z-axis direction is fixed. By switching between the gripping state and the released state and switching between the close position 2N and the separate position 2F, the lower wire clamper 27 and the upper wire clamper 28 can perform an operation of drawing in the bonding wire 12 from the capillary through hole 243h (drawing operation) and an operation of feeding out the bonding wire 12 to the capillary through hole 243h (feeding operation).

[0037] [Retraction action] The retraction operation will be described with reference to FIG. 4. First, the lower wire clamper 27 at the approach position 2N is opened, and the upper wire clamper 28 is closed (FIG. 4(a)). Next, the opened lower wire clamper 27 and the capillary 243 are moved downward toward the separated position 2F (FIG. 4(b)). At this time, the bonding wire 12 does not move because it is held by the upper wire clamper 28. The downward movement of the capillary 243 relative to the non-moving bonding wire 12 means that the bonding wire 12 moves upward relative to the capillary 243 when viewed from the bonding wire 12. In other words, the bonding wire 12 is retracted into the capillary 243. Next, the lower wire clamper 27 at the separated position 2F is closed, and the upper wire clamper 28 is opened (FIG. 4(c)). Next, the closed lower wire clamper 27 and the capillary 243 are moved upward toward the approach position 2N (FIG. 4(d)). At this time, since the bonding wire 12 is held by the lower wire clamper 27, the bonding wire 12 also moves upward together with the movement of the lower wire clamper 27. As a result, when comparing the state of FIG. 4(a) with the state of FIG. 4(b), the position of the capillary 243 is the same, but the tip of the bonding wire 12 has moved upward. In other words, the bonding wire 12 is drawn into the capillary 243. The operations of FIG. 4(a) to FIG. 4(d) are repeated until a predetermined drawn-in length is reached. The drawn-in length is the distance D1 from the tip of the bonding wire 12 located inside the capillary through-hole 243h to the tip of the capillary 243, as shown in FIG. 4(e).

[0038] [Feed-out operation] The feeding operation will be described with reference to FIG. 5. First, the lower wire clamper 27 at the approach position 2N is closed, and the upper wire clamper 28 is opened (FIG. 5(a)). Next, the closed lower wire clamper 27 and the capillary 243 are moved downward toward the separated position 2F (FIG. 5(b)). At this time, the bonding wire 12 is held by the lower wire clamper 27, so the bonding wire 12 also moves with the downward movement of the lower wire clamper 27. Next, the lower wire clamper 27 at the separated position 2F is opened, and the upper wire clamper 28 is closed (FIG. 5(c)). Next, the opened lower wire clamper 27 and the capillary 243 are moved upward toward the approach position 2N (FIG. 5(d)). At this time, the bonding wire 12 is not held by the lower wire clamper 27. The bonding wire 12 does not move with the upward movement of the lower wire clamper 27. The upward movement of the capillary 243 relative to the non-moving bonding wire 12 means that the bonding wire 12 moves downward relative to the capillary 243 as viewed from the bonding wire 12. That is, the bonding wire 12 is fed to the capillary 243. As a result, when comparing the state of FIG. 5(a) with the state of FIG. 5(d), the position of the capillary 243 is the same, but the tip of the bonding wire 12 moves downward. That is, the bonding wire 12 is fed to the capillary 243. The operations of FIG. 5(a) to FIG. 5(d) are repeated until a predetermined protrusion length D2 is reached. The protrusion length D2 is the distance from the tip of the capillary 243 to the tip of the bonding wire 12, as shown in FIG. 5(e).

[0039] <Camera unit> The camera unit 4 captures an image of the semiconductor chip 11. The captured image of the semiconductor chip 11 is used for positioning the capillary 243 when performing wire bonding on the semiconductor chip 11. In this way, the camera unit 4 functions as a camera unit for wire bonding used for performing wire bonding.

[0040] The camera unit 4 is also used for automatic replacement of the capillary 243 by the capillary replacement unit 5. For example, the camera unit 4 is used for positioning the release pin portion 511, which will be described later, when switching the locked state of the ultrasonic horn 242 to a released state. The camera unit 4 is used for an operation of determining whether the state of the bonding wire 12 protruding from the tip of the capillary 243 is such that bonding can be resumed.

[0041] The camera unit 4 has a camera 41 having an imaging element, a camera arm 42 supporting the camera 41, the tool XY stage 22, and a camera control unit 66. The base end of the camera arm 42 is attached to the tool XY stage 22. The camera 41 is attached to the tip of the camera arm 42. The camera arm 42 supports the camera 41 at a position above the bonding stage 3.

[0042] The camera unit 4 may acquire elevation images of each part by combining light path changing means such as a mirror or a prism. For example, as shown in FIG. 6, a case where the periphery of the tip of the capillary 243 is imaged is illustrated. The capillary 243 protrudes from the lower surface side of the ultrasonic horn 242. Therefore, if the camera 41 is located directly above the ultrasonic horn 242, the periphery of the tip of the capillary 243 cannot be imaged. Therefore, the camera 41 is disposed at a position where it does not overlap with the ultrasonic horn 242. As shown in FIG. 6, when the camera 41 and the capillary 243 are viewed from the front, an arrangement in which the axis of the capillary 243 and the optical axis of the camera 41 are shifted is sometimes called an offset arrangement. An optical component 43 such as a prism or mirror that changes the direction of light is disposed directly below the camera 41. According to such an optical system, the periphery of the tip of the capillary 243 can be imaged by the offset-positioned camera 41. If necessary, a light source component 44 such as a laser diode may be disposed. In this case, the capillary 243 is disposed between the optical component 43 and the light source component 44 .

[0043] The camera 41 and the camera arm 42 are attached to the tool XY stage 22 via the sub-base 23. That is, the camera 41 and the camera arm 42 are driven by the tool XY stage 22, and can move parallel along the XY plane together with the capillary 243 and the like. In this way, the tool XY stage 22 functions as a part of the components of the wire bonding unit 2 and also functions as a part of the components of the camera unit 4. The camera control unit 66 controls various operations of the camera unit 4 and executes various processes. Details of the control performed by the camera control unit 66 will be described later.

[0044] <Capillary exchange unit> The capillary replacement unit 5 collects the used capillary 243E attached to the ultrasonic horn 242, and also attaches a new replacement capillary 243T to the ultrasonic horn 242. In other words, the capillary 243 replacement operation includes the operation of collecting the capillary 243 and the operation of attaching the capillary 243. This capillary 243 replacement operation is automatically performed when a preset condition is satisfied. For example, the condition may be the number of bonding operations. In other words, the capillary 243 replacement operation may be performed every time a predetermined number of bonding operations are performed.

[0045] 7 is a conceptual diagram showing members constituting the capillary replacement unit 5. The capillary replacement unit 5 has a release module 51, a transport module 52, a replacement module 53, and a supply module 54. The release module 51, the transport module 52, and the replacement module 53 are housed in a replacement unit body 50 as an integrated device. The replacement unit body 50 has a module slot 50a into which the supply module 54 is inserted.

[0046] <Release module> The release module 51 has a release pin portion 511 , a release shaft 512 , and a release drive portion 513 .

[0047] The release module 51 switches the state in which the capillary 243 is constrained by the ultrasonic horn 242 to a state in which the capillary 243 is released from the ultrasonic horn 242 (release operation). Furthermore, the release module 51 switches the state in which the capillary 243 is released from the ultrasonic horn 242 to a state in which the capillary 243 is constrained by the ultrasonic horn 242 (lock operation).

[0048] When the capillary 243 is in a state of being restrained by the ultrasonic horn 242, the capillary 243 cannot be removed from the ultrasonic horn 242. When the capillary 243 is in a state of being released from the ultrasonic horn 242, the capillary 243 can be removed from the ultrasonic horn 242. Also, when the capillary 243 is in a state of being released from the ultrasonic horn 242, the capillary 243 can be attached to the ultrasonic horn 242.

[0049] [Release Action] Next, a grip release operation for releasing the grip of the capillary 243 by the ultrasonic horn 242 will be described. This grip release operation is performed by the release module 51. As shown in Fig. 3(a), the ultrasonic horn 242 grips the capillary 243 inserted into the capillary attachment hole H1 by elastic force. When releasing this grip, the release pin portion 511 of the release module 51 is inserted into the pin insertion hole H2 of the ultrasonic horn 242. The insertion operation of the release module 51 into the pin insertion hole H2 is performed by the release drive unit 513.

[0050] As shown in FIG. 3(b), with the release pin 511 inserted into the pin insertion hole H2, the release pin 511 is rotated 90 degrees around the Z axis. As a result, the first surface W1 and the second surface W2 are pressed by both ends in the first direction of the release pin 511 (both ends in the longitudinal direction of the elliptical shape). The first surface W1 and the second surface W2 are pressed by the release pin 511, so that the ultrasonic horn 242 is elastically deformed. As a result, the distance between the first surface W1 and the second surface W2 of the pin insertion hole H2 becomes wider. The rotational operation of the release module 51 is performed by the release drive unit 513.

[0051] Here, the pin insertion hole H2 and the capillary mounting hole H1 communicate with each other via the slit S1. Therefore, the release pin 511 widens the gap between the first surface W1 and the second surface W2, and the capillary mounting hole H1 is also widened. The capillary mounting hole H1 is widened, and the grip of the capillary 243 by the ultrasonic horn 242 is released. That is, the grip release operation is an operation of rotating the release module 51 with the release pin 511 inserted in the pin insertion hole H2. The grip release operation is an operation of pressing the first surface W1 and the second surface W2 with both ends in the first direction (both ends in the longitudinal direction of the elliptical shape) of the release pin 511, thereby widening the gap between the first surface W1 and the second surface W2 and widening the capillary mounting hole H1. In this manner, the release module 51 widens the pin insertion hole H2 and the capillary attachment hole H1, thereby releasing the grip of the capillary 243 by the ultrasonic horn 242.

[0052] As shown in FIG. 3(b), in a state where the capillary mounting hole H1 is pushed open by the release module 51, the capillary 243 is removed from the ultrasonic horn 242, and a new capillary 243 is inserted into the capillary mounting hole H1. The replacement of the capillary 243 is performed by the capillary replacement unit 5. Thereafter, as shown in FIG. 3(c), the release pin portion 511 is rotated 90 degrees around the Z axis to release the pressure applied by the release pin portion 511 to the first surface portion W1 and the second surface portion W2. In other words, the grip release operation is released. As a result, the pin insertion hole H2 and the capillary mounting hole H1 try to return to their original shapes shown in FIG. 3(a). Due to the elastic force that tries to return to the original shapes, the capillary 243 inserted into the capillary mounting hole H1 is gripped by the inner wall surface of the capillary mounting hole H1.

[0053] 3(d), the release pin portion 511 is removed from the pin insertion hole H2. In this manner, the ultrasonic horn 242 can use the release module 51 to grip and release the capillary 243 by the ultrasonic horn 242.

[0054] <Transport module> 7 again, the conveying module 52 includes a conveying carriage 521, a conveying linear shaft 522, and a conveying driver 523. The conveying module 52 further includes a conveying carousel 524 and a conveying rotary pinion 525.

[0055] The transport module 52 extracts the used capillary 243E from the ultrasonic horn 242 at the replacement position 52S. Furthermore, the transport module 52 transports the extracted used capillary 243E from the replacement position 52S to the rear.

[0056] The transport module 52 receives the replacement capillary 243T at the replacement position 52E from the replacement module 53. The transport module 52 transports the replacement capillary 243T from the replacement position 52E to the replacement position 52S. The transport module 52 inserts the replacement capillary 243T into the ultrasonic horn 242 at the replacement position 52S.

[0057] Thus, the movement of the transport carriage 521 includes linear movement between the exchange position 52S and the replacement position 52E, and rotational movement to change the attitude of the used capillary 243E. In this embodiment, the entire period of the rotational movement overlaps with a part of the period of the linear movement. In other words, the period of the linear movement includes a period of only linear movement and a period in which the linear movement and the rotational movement are parallel to each other.

[0058] The transfer module 52 having the above-mentioned configuration is capable of executing a first transfer operation and a second transfer operation which will be described below.

[0059] [First transport operation] Here, the case where the used capillary 243E is transported from the exchange position 52S to the replacement position 52E is referred to as a first transport operation. In the first transport operation, first, a linear movement in the downward direction is started, and only the linear movement is performed until the transport carriage 521 reaches the transport carousel 524.

[0060] The linear movement is performed by a conveying linear shaft 522 and a conveying driver 523. The conveying carriage 521 and the conveying linear shaft 522 constitute a so-called feed screw (lead screw) mechanism. When the conveying driver 523 rotates the conveying linear shaft 522, the conveying carriage 521 mounted on the conveying linear shaft 522, which is a screw shaft, moves linearly. The movement direction of the conveying carriage 521 is determined by the rotation direction of the conveying linear shaft 522. Note that instead of the feed screw, a mechanism such as a ball screw may be used.

[0061] After the transport carriage 521 reaches the transport carousel 524, the linear movement and the clockwise rotational movement are executed in parallel.

[0062] More specifically, a conveying rotary rack 524 is provided on the lower end side of the conveying linear shaft 522. As shown in FIG. 9(a), when the conveying carriage 521 at the exchange position 52S approaches the lower end side of the conveying linear shaft 522, the conveying rotary pinion 525 provided on the conveying carriage 521 engages with the conveying rotary rack 524 as shown in FIG. 9(b). As a result, the conveying carriage 521 rotates in a predetermined direction as the conveying carriage 521 moves (see FIG. 9(c)). For example, as shown in FIG. 9(d), the conveying carriage 521 rotates 90 degrees clockwise. As a result, the posture (replacement posture) of the used capillary 243E that has moved to the exchange position 52E is different from the posture (exchange posture) of the used capillary 243E at the exchange position 52S. The posture of the used capillary 243E referred to here may be defined as the angle of the axis AE of the used capillary 243E based on the Z-axis direction. For example, the orientation of the used capillary 243E at the replacement position 52S is such that the angle with respect to the Z-axis direction is 0 degrees. For example, the orientation of the used capillary 243E at the replacement position 52E is such that the angle with respect to the Z-axis direction is 90 degrees.

[0063] If a direction is defined for the axis AE of the used capillary 243E, the attitude of the used capillary 243E can be defined in more detail. For example, the direction from the base end to the tip end of the used capillary 243E is defined as positive. In this case, too, the angle of the used capillary 243E with respect to the Z-axis direction at the replacement position 52S is 0 degrees. For example, when the tip end of the used capillary 243E is on the upper side and the base end is on the lower side due to the rotation of the transport carriage 521, the angle of the used capillary 243E with respect to the Z-axis direction at the replacement position 52S can be said to be 180 degrees.

[0064] [Second transport operation] Next, the case where the replacement capillary 243T is transported from the replacement position 52E to the replacement position 52S is referred to as the second transport operation. As shown in Figures 10(a) and 10(b), in the second transport operation, an upward linear movement is started and a counterclockwise rotational movement is performed in parallel. While the transport carriage 521 is engaged with the transport rotating rack 524, the linear movement and the rotational movement are performed in parallel. Then, as shown in Figures 10(c) and 10(d), after the transport carriage 521 is no longer engaged with the transport rotating rack 524, only the upward linear movement is performed.

[0065] <Replacement module> The replacement module 53 has a replacement table 531 , a replacement drive unit 532 , a replacement linear shaft 533 , a replacement shaft 534 , a replacement movable piece 535 , and a replacement fixed piece 536 .

[0066] [Pull-out operation] The replacement module 53 pulls out the used capillary 243E transported to the replacement position 52E from the transport carriage 521. More specifically, the replacement table 531 and the replacement moving piece 535 move together from the replacement fixed piece 536 by the operation of the replacement drive unit 532 and the replacement linear shaft 533 (see FIG. 11(b)). Since the replacement moving piece 535 is caught by the capillary taper portion 243b of the capillary 243, when the replacement moving piece 535 moves in a direction away from the replacement fixed piece 536, the capillary 243 also moves in a direction away from the replacement fixed piece 536 in accordance with the movement of the replacement moving piece 535. As a result, the capillary 243 is pulled out from the transport carriage 521.

[0067] [Replacement operation] Furthermore, the replacement module 53 inserts the replacement capillary 243T into the transport carriage 521 from which the used capillary 243E has been pulled out. More specifically, the replacement table 531 and the replacement moving piece 535 approach the replacement fixed piece 536 together by the operation of the replacement drive unit 532 and the replacement linear shaft 533. This operation of the replacement table 531 and the replacement moving piece 535 approaching the replacement fixed piece 536 includes several steps described below.

[0068] In the first stage (see FIG. 12(a)), as the replacement table 531 moves, the upright portion 531a of the replacement table 531 approaches the replacement fixed piece 536 while pressing the base end surface of the replacement capillary 243T located at the capillary supply port 54b. As a result, the replacement capillary 243T falls from the capillary supply port 54b onto the replacement table 531 (see FIG. 12(b)). In the second stage, as the replacement table 531 moves, the replacement movable piece 535 comes into contact with the replacement fixed piece 536 (see FIG. 12(c)). In the third stage, as the replacement table 531 moves, the replacement table 531 approaches the replacement fixed piece 536 further. In this third stage, the replacement movable piece 535 does not move because it is in contact with the replacement fixed piece 536. Therefore, in the third stage, the replacement table 531 carrying the replacement capillary 243T approaches the replacement moving piece 535 abutting the replacement fixed piece 536. In other words, in the third stage, the distance from the replacement table 531 carrying the replacement capillary 243T to the replacement moving piece 535 abutting the replacement fixed piece 536 gradually decreases. In the fourth stage (see FIG. 12(d)), as the replacement table 531 moves, the capillary taper portion 243b of the replacement capillary 243T carried on the replacement table 531 passes through the replacement moving piece 535 and the replacement fixed piece 536 and is inserted into the transport carriage 521.

[0069] <Supply module> The supply module 54 has a capillary receiving portion 54a and a capillary supply port 54b.

[0070] The supply module 54 can be removed from the module slot 50a as necessary. The supply module 54 accommodates a plurality of replacement capillaries 243T in the capillary accommodation portion 54a. The supply module 54 supplies the replacement capillaries 243T one by one to the replacement module 53 from the capillary supply port 54b in response to the operation of the replacement module 53.

[0071] Next, the positional relationship of the above-mentioned transfer module 52, replacement module 53, and supply module 54 will be described with reference to Fig. 8. According to the positional relationship of each module described below, the area required for the operation up to inserting the replacement capillary 243T into the ultrasonic horn 242 can be made compact.

[0072] In order to explain the positional relationship of each module, a first reference line B1, a second reference line B2, and a third reference line B3 are defined. These reference lines are based on the axis line AE of the used capillary 243E attached to the ultrasonic horn 242. The first reference line B1 is defined as overlapping with the axis line AE of the used capillary 243E. The second reference line B2 is defined as being perpendicular to the first reference line B1. The first reference line B1 and the second reference line B2 define a first intersection point C1 where the first reference line B1 and the second reference line B2 intersect with each other. The third reference line B3 is defined as being parallel to the first reference line B1 and spaced apart from the first reference line B1 in the direction of the second reference line B2. The second reference line B2 and the third reference line B3 define a second intersection point C2 where the second reference line B2 and the third reference line B3 intersect with each other.

[0073] First, the transfer module 52 is disposed so as to overlap the first reference line B1. Also, the transfer module 52 is disposed so as to include the first intersection C1. Here, "including the first intersection C1" means that the first intersection C1 is located within the area of ​​the transfer module 52 when the transfer module 52 is viewed from the front as shown in FIG. 8. For example, the first intersection C1 may be located at the replacement position 52E described above. Furthermore, the first intersection C1 may be located at the rotation center of the capillary catcher 52F of the transfer carriage 521 located at the replacement position 52E. In this case, for example, the first reference line B1 may overlap with the central axis of the cylindrical capillary catcher 52F.

[0074] Next, the replacement module 53 is arranged so as to overlap the second reference line B2. The replacement module 53 is arranged so as to be adjacent to the transport module 52 along the direction of the second reference line B2. In other words, when the replacement module 53 is viewed from the front, the second reference line B2 is located within the area of ​​the replacement module 53. The second reference line B2 may coincide with an axis that defines the direction in which the used capillary 234E is pulled out from the capillary catcher 52F of the transport carriage 521. In other words, the second reference line B2 may coincide with an axis that defines the direction in which the replacement capillary 243T is inserted into the capillary catcher 52F of the transport carriage 521. The replacement module 53 is also arranged so as to include the second intersection C2. The meaning of "including the second intersection C2" is the same as that explained in the description of "including the first intersection C1".

[0075] The supply module 54 is disposed adjacent to the transport module 52 along the direction of the second reference line B2. The supply module 54 is also disposed so as to overlap with the third reference line B3. More strictly speaking, the supply module 54 is inserted into the module slot 50a of the replacement unit body 50 as described above. Therefore, a configuration in which a part of the supply module 54 is integrated with the replacement module 53 is also included in the configuration in which the supply module 54 is adjacent to the transport module 52. Since the replacement module 53 is disposed at the second intersection C2 on the third reference line B3, a configuration for passing the replacement capillary 243T from the supply module 54 to the replacement module 53 is disposed on the third reference line B3. This configuration for passing the replacement capillary 243T from the supply module 54 to the replacement module 53 is the above-mentioned capillary supply port 54b.

[0076] With the transfer module 52, replacement module 53 and supply module 54 arranged as described above, the replacement capillary 243T is inserted into the ultrasonic horn 242 through the movements described below.

[0077] The replacement capillary 243T is held in the capillary storage section 54a of the supply module 54. In the capillary storage section 54a, a plurality of replacement capillaries 243T are arranged in a supply direction SD perpendicular to the axis AT of the replacement capillary 243T. This supply direction SD is a direction toward the replacement module 53 along the third reference line B3. The plurality of replacement capillaries 243T in the capillary storage section 54a move from the capillary storage section 54a to the capillary supply port 54b along the supply direction SD every time a replacement capillary 243T is taken out from the capillary supply port 54b. That is, the replacement capillary 243T moves along the third reference line B3 when moving from the capillary storage section 54a to the capillary supply port 54b.

[0078] The replacement module 53 takes out the replacement capillary 243T located at the capillary supply port 54b. Specifically, the replacement module 53 moves the replacement capillary 243T located at the capillary supply port 54b along the axis AT of the replacement capillary 243T. The capillary supply port 54b includes a protrusion 54b1 that prevents the replacement capillary 243T from falling, and a gap 54b2 through which the replacement capillary 243T falls. The replacement capillary 243T located at the capillary supply port 54b is caught by the protrusion 54b1. When the replacement module 53 moves the replacement capillary 243T in the insertion direction (see FIG. 12(b)), the replacement capillary 243T moves from the protrusion 54b1 to the gap 54b2. As a result, the replacement capillary 243T falls through the gap 54b2 and is placed on the replacement table 531 of the replacement module 53.

[0079] That is, the replacement capillary 243T undergoes movement along the third reference line B3 and movement along the second reference line B2 when moving from the supply module 54 to the replacement module 53. Details of the movement from the supply module 54 to the replacement module 53 have already been described in [Replacement Operation] based on Figures 12(a), 12(b), 12(c), and 12(d).

[0080] The transport module 52 executes an operation of receiving the replacement capillary 243T and a transport operation of linearly moving the received replacement capillary 243T by a predetermined distance and rotating it by a predetermined angle. The receiving operation (S308: see FIG. 19(d)) is to insert the replacement capillary 243T into the transport carriage 521 waiting at the replacement position 52E. In other words, the receiving operation is an active operation of moving the replacement table 531 from the perspective of the replacement module 53. On the other hand, the receiving operation is a passive operation of making the transport carriage 521 wait at the replacement position 52E from the perspective of the transport module 52. The receiving operation may be interpreted as an operation of moving the transport carriage 521 to the replacement position 52E.

[0081] On the other hand, the transport operation (S309: see FIG. 20(a)) is an active operation of the transport module 52. The transport operation described here means the above-mentioned [second transport operation]. Therefore, a detailed description will be omitted.

[0082] <Controller> The controller 6 controls the operations of the wire bonding unit 2 and the capillary replacement unit 5. The controller 6 is a computer having a processor that executes various programs and a memory that stores the programs and a desired database. The controller 6 receives information provided from various sensors provided in the wire bonding apparatus 1. Then, the controller 6 uses the received information to output control signals for controlling the operations of the wire bonding unit 2 and the capillary replacement unit 5.

[0083] The controller 6 executes the capillary exchange program to perform the functions of several functional components shown in FIG. 13. Specifically, the controller 6 has a bonding control unit 61, a clamper control unit 62, a release control unit 63, a transport control unit 64, and a replacement control unit 65. The bonding control unit 61 outputs a control signal G61a to the Z-axis drive unit 25 and outputs a control signal G61b to the tool XY stage 22. The clamper control unit 62 outputs a control signal G62a to the lower wire clamper 27 and outputs a control signal G62b to the upper wire clamper 28. The release control unit 63 outputs a control signal G63 to the release drive unit 513 of the capillary exchange unit 5. The transport control unit 64 outputs a control signal G64 to the transport drive unit 523 of the capillary exchange unit 5. The replacement control unit 65 outputs a control signal G65 to the replacement drive unit 532 of the capillary exchange unit 5.

[0084] The controller 6 has, as functional components, a camera control unit 66 and a detection sensor control unit 67. The camera control unit 66 processes the planar image and the elevation image acquired by the camera 41. As a result, the position of each part in the XYZ directions is detected.

[0085] The detection sensor control unit 67 receives detection data from a plurality of detection sensors 50S provided in the capillary replacement unit 5. For example, the detection sensor 50S confirms that the used capillary 243E and the replacement capillary 243T, which are sequentially transported inside the capillary replacement unit 5, are present at predetermined positions. After it is confirmed that the used capillary 243E and the replacement capillary 243T are present at the predetermined positions, the controller 6 proceeds to the next operation.

[0086] <How to replace the capillary> The method for replacing the capillary described below is executed by the functional components of the controller 6 shown in Fig. 13. In the following description, the manner in which the method for replacing the capillary is executed by the controller 6 is described in detail. The flow chart of Fig. 14 shows the main steps of the method for replacing the capillary. The three main steps constituting the method for replacing the capillary are illustrated in detail in Figs. 15, 17, and 21, respectively.

[0087] <Preparation for capillary replacement> First, the controller 6 judges whether the conditions for capillary replacement are satisfied (S1). When the controller 6 judges that the conditions for capillary replacement are not satisfied (S1: NO), it resumes bonding without replacing the capillary 243 in use (S5). When the controller 6 judges that the conditions for capillary replacement are satisfied (S1: YES), it proceeds to the operation of replacing the used capillary 243E (S2, S3, S4).

[0088] The controller 6 executes preparation for capillary replacement (S2). More specifically, as shown in Fig. 15, first, the controller 6 ends bonding (S21). The controller 6 outputs a control signal D61a to the Z-axis driver 25 to stop the arc reciprocating motion of the bonding module 24.

[0089] Next, the controller 6 forms a straight tail (S22). A straight tail is a part of the bonding wire 12 protruding from the tip of the capillary 243, and does not have a ball 122 (see FIG. 5(d)) formed at its tip. If the ball 122 is formed, the tip of the bonding wire 12 cannot be drawn into the capillary through-hole 243h, but with a straight tail, the tip of the bonding wire 12 can be drawn into the capillary through-hole 243h. In other words, forming a straight tail means removing the ball 122, and the operation of removing the ball 122 is called a so-called throw-away bond operation.

[0090] First, the controller 6 moves the capillary 243 above the sacrificial bond stage 15 (FIG. 16(a), S221). Next, the controller 6 opens the upper wire clamper 28 and lowers the capillary 243 together with the open lower wire clamper 27. As a result, the ball 122 is bonded to the sacrificial bond stage 15. Next, the controller 6 closes the upper wire clamper 28 and raises the capillary 243 together with the open lower wire clamper 27. Next, the controller 6 opens the upper wire clamper 28 and closes the lower wire clamper 27. Then, the controller 6 raises the capillary 243 together with the closed lower wire clamper 27. As a result, the bonding wire 12 is cut at a location where the strength is relatively reduced. For example, the strength of the neck where the ball 122 and the bonding wire 12 are connected is easily reduced by bonding, so the bonding wire 12 is cut at this location.

[0091] Then, the controller 6 draws the tip of the bonding wire 12 into the used capillary 243E (S23). This step S23 is the above-mentioned [drawing operation] described with reference to FIG.

[0092] <Replacement of capillary: S3> First, as shown in Fig. 17, the controller 6 advances the sub-base 23 toward the capillary exchange unit 5 (S301, see Figs. 16(b) and 18(a)). By this operation, the capillary 243 moves from above the temporary bond stage 15 to above the capillary exchange unit 5. Next, the controller 6 lowers the ultrasonic horn 242 to insert the used capillary 243E into the capillary guiding section 55 (S302, see Fig. 18(b)).

[0093] Next, the controller 6 inserts the release pin portion 511 into the pin insertion hole H2 (S303, see FIG. 18(c)). In this operation, the release pin portion 511 is simply inserted into the pin insertion hole H2, and a release operation by rotating the release pin portion 511 is not performed. Therefore, in this operation, the capillary 243 is restrained by the ultrasonic horn 242. Next, the controller 6 moves the conveying carriage 521 upward (S304, see FIG. 18(d)). As a result, the capillary 243 is inserted into the conveying carriage 521. When the capillary 243 is inserted, the conveying carriage 521 holds the capillary 243. Next, the controller 6 rotates the release pin portion 511 forward (S305, see FIG. 19(a)). This step S305 is the above-mentioned [release operation] described using FIG. 3. As a result, the capillary 243 is released from the state of being restrained by the ultrasonic horn 242 (released state).

[0094] Next, the controller 6 moves the transport carriage 521 from the exchange position 52S to the replacement position 52E (S306, see FIG. 19(b)). This step S306 is the [first transport operation] described above with reference to FIG. 9. As a result of this step S306, the used capillary 243E moves from the exchange position 52S to the replacement position 52E, and the posture of the used capillary 243E becomes the replacement posture at an angle of 0 degrees with respect to the Z axis, and the replacement posture at an angle of 90 degrees with respect to the Z axis.

[0095] Next, the controller 6 moves the replacement table 531 in the pull-out direction (S307, see FIG. 19(c)). This step S307 corresponds to the aforementioned [pull-out operation] described with reference to FIG. 11. Next, the controller 6 moves the replacement table 531 in the insertion direction (S308, see FIG. 19(d)). This step S308 corresponds to the aforementioned [replacement operation] described with reference to FIG. 12. As a result of the pull-out operation (S307) and replacement operation (S308), the used capillary 243E held by the transport carriage 521 at the second position is replaced with the replacement capillary 243T.

[0096] Next, the controller 6 moves the transport carriage 521 from the replacement position 52E to the replacement position 52S (S309, see FIG. 20(a)). This step S309 is the [second transport operation] described above with reference to FIG. 10. As a result of this step S309, the replacement capillary 243T moves from the replacement position 52E to the replacement position 52S, and the posture of the replacement capillary 243T changes from the replacement posture at an angle of 90 degrees with respect to the Z axis to a replacement posture at an angle of 0 degrees with respect to the Z axis. The rising replacement capillary 243T is guided by the capillary guide unit 55 to the capillary through-hole 243h of the ultrasonic horn 242. Since the used capillary 243E is pulled out from the ultrasonic horn 242 while being in contact with the capillary guide 55, it can be said that the position of the used capillary 243E is preserved by the capillary guide 55. Therefore, the replacement capillary 243T guided by the capillary guide 55 that preserves the position of the used capillary 243E can be accurately inserted into the position of the used capillary 243E. Similarly, when the used capillary 243E is pulled out, the bonding wire 12 is not affected in any way. Therefore, the tip of the bonding wire 12 is guided to the capillary through-hole 243h of the replacement capillary 243T that is inserted so as to be in the same position as the used capillary 243E.

[0097] Next, the controller 6 reversely rotates the release pin portion 511 (S310, see FIG. 20(b)). This reverse rotation switches the ultrasonic horn 242 from the release state to the lock state. As a result, the replacement capillary 243T is fixed to the ultrasonic horn 242. Next, the controller 6 lowers the transport carriage 521 to a predetermined position (S311, see FIG. 20(c)). Then, the controller 6 pulls out the release pin portion 511 from the pin insertion hole H2 (S312, see FIG. 20(c)). Next, the controller 6 raises the ultrasonic horn 242 to pull out the replacement capillary 243T from the capillary guide portion 55 (S313, see FIG. 20(d)). Then, the controller 6 moves the sub-base 23 backward (S314, see FIG. 16(c)).

[0098] <Bonding preparation: S4> Then, the controller 6 executes preparation for bonding shown in FIG. 21 (S4). A first condition and a second condition may be set as conditions for resuming bonding. The first condition is the protruding length D2 of the bonding wire 12 protruding from the tip of the capillary 243. The second condition is the shape of the ball 122 formed at the tip of the bonding wire 12. In step S4, the bonding wire 12 that satisfies the first and second conditions is formed. The controller 6 first sets the state to satisfy the first condition, and then sets the state to satisfy the second condition after the first condition is satisfied.

[0099] First, the controller 6 executes a sending operation (S41). This step S41 is the above-mentioned "sending operation" explained with reference to FIG. 5. Next, the controller 6 executes a protrusion length measurement (S42). This protrusion length measurement may use an image captured by the camera 41 and the optical component 43 as shown in FIG. 5. The controller 6 obtains the protrusion length D2 by analyzing the image.

[0100] Next, the controller 6 judges whether the wire protrusion length D2 is longer than the lower limit (S43). When the controller 6 judges that the protrusion length D2 is not longer than the lower limit (S43: NO), that is, when the protrusion length D2 is shorter than the lower limit, the controller 6 executes the feeding operation (S44). Then, the controller 6 executes the protrusion length measurement again (S42). On the other hand, when the controller 6 judges that the protrusion length D2 is longer than the lower limit (S43: YES), the controller 6 judges whether the protrusion length D2 of the bonding wire 12 is shorter than the upper limit (S45).

[0101] When the controller 6 determines that the protrusion length D2 is not shorter than the upper limit (S45: NO), that is, when the protrusion length D2 is longer than the upper limit, the controller 6 executes a retraction operation (S46). Then, the controller 6 executes protrusion length measurement again (S42). When the controller 6 determines that the protrusion length D2 is shorter than the upper limit (S45: YES), the controller 6 completes preparation for bonding.

[0102] That is, by the controller 6 executing steps S42 to S46, it is possible to obtain a protrusion length D2 that is in the range of not less than the lower limit value and not more than the upper limit value.

[0103] Next, the controller 6 forms a ball 122 at the tip of the bonding wire 12 (S47). The controller 6 moves the tip of the bonding wire 12 to a discharge area of ​​a discharge device. Then, the controller 6 operates the discharge device to form a ball 122 at the tip of the bonding wire 12. Next, the controller 6 determines whether or not the shape of the ball 122 satisfies a predetermined condition (S48). This determination may also be made using an image captured by the camera 41 and the optical component 43. The controller 6 obtains information regarding the shape of the ball 122 by analyzing the image.

[0104] When the controller 6 determines that the shape of the ball 122 does not satisfy the conditions (S48: NO), it forms the ball 122 again. Specifically, the controller 6 removes the ball 122 that does not satisfy the conditions by discard bonding (S49). Then, the controller 6 forms the ball 122 again by the discharge device. On the other hand, when the controller 6 determines that the shape of the ball 122 satisfies the conditions (S48: YES), it is ready to resume bonding. Then, the controller 6 resumes bonding (S5).

[0105] <Action and effect> The wire bonding apparatus 1 includes an ultrasonic horn 242, a capillary 243 detachably attached to the ultrasonic horn 242, and a capillary replacement unit 5 that replaces a used capillary 243E with a replacement capillary 243T. The capillary replacement unit 5 has a capillary storage section 54a that stores a plurality of replacement capillaries 243T arranged in a supply direction SD perpendicular to the axis AT of the replacement capillary 243T, and a capillary supply port 54b for removing the replacement capillary 243T. The capillary replacement unit 5 has a supply module 54 that moves the replacement capillary 243T from the capillary storage section 54a to the capillary supply port 54b along the supply direction SD, and a supply module 54 that removes the replacement capillary 243T located at the capillary supply port 54b from the capillary storage section 54a along the axis AT. and a transport module 52 that performs an operation of receiving the replacement capillary 243T moved by the moving operation of the replacement module 53, and a transport operation of moving the received replacement capillary 243T in a straight line a predetermined distance and rotating it by a predetermined angle.

[0106] The wire bonding apparatus 1 and the capillary exchange unit 5 can move the exchange capillary 243T in three ways: in the supply direction SD, along the axis lines AT and AE, and by rotating the capillary 243T by a predetermined angle. As a result, the degree of freedom in arranging the supply module 54, the replacement module 53, and the transport module 52 for the automatic capillary 243 exchange function is increased. Therefore, it is possible to arrange these modules so that the area required for arranging the capillary exchange unit 5 is compact, and therefore it is possible to provide the automatic capillary exchange function while suppressing an increase in size.

[0107] In the capillary replacement unit 5, a first reference line B1 overlapping with the axis line AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The transport module 52 is disposed so as to include a first intersection C1 of the first reference line B1 and the second reference line B2. The replacement module 53 is disposed so as to be adjacent to the transport module 52 along the direction of the second reference line B2. This configuration allows the exchange module 53 to be located next to the transport module 52 .

[0108] In the capillary replacement unit 5, a first reference line B1 overlapping with the axis line AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The transfer module 52 is disposed so as to include a first intersection C1 of the first reference line B1 and the second reference line B2. The supply module 54 is disposed so as to be adjacent to the transfer module 52 along the direction of the second reference line B2. This configuration allows for the supply module 54 to be located adjacent to the transport module 52 .

[0109] In the capillary replacement unit 5, a first reference line B1 overlapping with the axis AE of the used capillary 243E held by the ultrasonic horn 242, a second reference line B2 perpendicular to the first reference line B1, and a third reference line B3 parallel to the first reference line B1 and spaced apart from the first reference line B1 in the direction of the second reference line B2 are defined. The replacement module 53 is disposed so as to include an intersection of the second reference line B2 and the third reference line B3. The supply module 54 is disposed on the third reference line B3 so as to be adjacent to the replacement module 53 along the direction of the third reference line B3. With this configuration, the supply module 54 can be arranged above the replacement module 53 .

[0110] In the capillary replacement unit 5, a first reference line B1 overlapping with the axis AE of the used capillary 243E held by the ultrasonic horn 242, a second reference line B2 perpendicular to the first reference line B1, and a third reference line B3 parallel to the first reference line B1 and spaced apart from the first reference line B1 in the direction of the second reference line B2 are defined. The transfer module 52 is disposed so as to include the intersection of the first reference line B1 and the second reference line B2, and the replacement module 53 is disposed so as to include the intersection of the second reference line B2 and the third reference line B3. The supply module 54 is disposed on the third reference line B3 so as to be adjacent to the replacement module 53 along the direction of the third reference line B3. According to this configuration, the replacement module 53 can be arranged next to the transport module 52 and the supply module 54 can be arranged above the replacement module 53 .

[0111] <Modification> Although the capillary exchange mechanism and the wire bonding apparatus according to the present invention have been described above as examples, the capillary exchange mechanism and the wire bonding apparatus are not limited to the above-described embodiments. For example, the positional relationship between the transfer module 52, the replacement module 53, and the supply module 54 is not limited to the example shown in Fig. 8. As another example of the positional relationship between the transfer module 52, the replacement module 53, and the supply module 54, modified examples 1 and 2 will be described.

[0112] <Variation 1> Fig. 22 shows a schematic diagram of the positional relationship between the transport module 52, the replacement module 53, and the supply module 54 in the capillary replacement unit 5A of the modified example 1. As shown in Fig. 22, the transport module 52, the replacement module 53, and the supply module 54 in the capillary replacement unit 5A of the modified example 1 can also be defined by a first reference line B1, a second reference line B2, and a first intersection point C1. The definitions of the first reference line B1, the second reference line B2, and the first intersection point C1 are the same as those described in the embodiment.

[0113] First, the transfer module 52 of the first modification is disposed so as to overlap the first reference line B1, similar to the embodiment. On the other hand, the transfer module 52 of the first modification is disposed so as not to include the first intersection C1, unlike the embodiment.

[0114] Next, the replacement module 53 of the first modification example is arranged so as to overlap the first reference line B1, unlike the embodiment. Furthermore, the replacement module 53 is arranged so as to be adjacent to the transport module 52 along the direction of the first reference line B1. Furthermore, the replacement module 53 is arranged so as to include the first intersection point C1, unlike the embodiment. For example, it can be said that the replacement module 53 of the first modification example is arranged below the transport module 52.

[0115] The supply module 54 of the first modification is disposed so as to overlap with the second reference line B2. The axis AT of the replacement capillary 243T held by the supply module 54 of the first modification is parallel to the first reference line B1. In FIG. 22, the supply module 54A1 is disposed on the right side of the replacement module 53 on the paper. The supply module 54A2 may be disposed on the left side of the replacement module 53 on the paper.

[0116] The movement of the replacement capillary 243T in the capillary replacement unit 5A of the modified example 1 differs from that of the replacement capillary 243T in the transport module 52 in the embodiment. In the embodiment, the attitude of the replacement capillary 243T received by the transport module 52 from the replacement module 53 is such that the axis AT of the replacement capillary 243T is 90 degrees relative to the first reference line B1 (Z-axis). On the other hand, in the modified example 1, the attitude of the replacement capillary 243T received by the transport module 52 from the replacement module 53 is such that the axis AT of the replacement capillary 243T is 180 degrees relative to the first reference line B1 (Z-axis). The axis AT of the replacement capillary 243T being 180 degrees relative to the first reference line B1 (Z-axis) means that the axis AT of the replacement capillary 243T overlaps (is parallel to) the first reference line B1, but the orientation of the replacement capillary 243T is reversed. The tip of the capillary 233E held by the ultrasonic horn 242 faces downward. In contrast, in the first modification, the tip of the replacement capillary 243T that the transport module 52 receives from the replacement module 53 faces upward.

[0117] Similarly to the capillary replacement unit 5 of the embodiment, the capillary replacement unit 5A of the first modification also makes it possible to make the area required for the operation of inserting the replacement capillary 243T into the ultrasonic horn 242 compact.

[0118] In the capillary replacement unit 5A, a first reference line B1 is defined, which overlaps with an axis line AE of the used capillary 243E held by the ultrasonic horn 242. The transport module 52 is disposed so as to overlap with the first reference line B1. The replacement module 53 is disposed so as to overlap with the first reference line B1 and to be adjacent to the transport module 52 along the direction of the first reference line B1. According to this configuration, the replacement module 53 can be disposed below the transport module 52 .

[0119] In the capillary replacement unit 5A, a first reference line B1 overlapping with the axis line AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The transport module 52 is disposed so as to overlap with the first reference line B1 but not to include a first intersection C1 between the first reference line B1 and the second reference line B2. The supply module 54 is disposed so as to overlap with the second reference line B2. According to this configuration, the supply module 54 can be disposed below the transport module 52 .

[0120] In the capillary replacement unit 5A, a first reference line B1 overlapping with the axis line AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The replacement module 53 is disposed so as to include a first intersection C1 of the first reference line B1 and the second reference line B2. The supply module 54 is disposed so as to overlap with the second reference line B2. This configuration allows the supply module 54 to be located next to the replacement module 53 .

[0121] In the capillary replacement unit 5A, a first reference line B1 overlapping the axis line AE of the used capillary 243E held by the ultrasonic horn 242 and a second reference line B2 perpendicular to the first reference line B1 are defined. The transport module 52 is disposed so as to overlap the first reference line B1 but not to include a first intersection point C1 between the first reference line B1 and the second reference line B2. The replacement module 53 is disposed so as to include a second intersection point C2 between the first reference line B1 and the second reference line B2. The supply module 54 is disposed so as to overlap the second reference line B2. According to this configuration, the replacement module 53 can be disposed below the transport module 52 , and the supply module 54 can be disposed next to the replacement module 53 .

[0122] <Variation 2> In the capillary replacement unit 5 of the embodiment, the transport module 52, the replacement module 53, and the supply module 54 are arranged on a so-called YZ plane. As in the capillary replacement unit 5B of the second modified example shown in FIG. 23, the transport module 52, the replacement module 53, and the supply module 54 may be arranged on a so-called XZ plane. With such a configuration, the area required for the operation to insert the replacement capillary 243T into the ultrasonic horn 242 can be made compact, as in the capillary replacement unit 5 of the embodiment. In addition, the capillary replacement unit 5B of the second modified example has a plurality of replacement modules 53 and supply modules 54 (four in the example of FIG. 23). The four supply modules 54 may each hold the same type of replacement capillary 243T. In this case, the number of times that an empty supply module 54 is replaced with a new supply module 54 filled with the replacement capillary 243T can be reduced. In addition, the four supply modules 54 may each hold a different type of replacement capillary 243T. The bonding mode required for the wire bonding apparatus may differ for each semiconductor chip 11. Also, the bonding mode may differ for each location on the same semiconductor chip 11. When the four supply modules 54 hold different types of replacement capillaries 243T, the appropriate replacement capillary 243T can be inserted into the ultrasonic horn 242 according to the required bonding mode. [Explanation of symbols]

[0123] 1...wire bonding apparatus, 5...capillary exchange unit (capillary exchange mechanism), 41...camera, 52...transport module, 52S...exchange position, 52E...replacement position, 53...replacement module, 122...ball, 242...ultrasonic horn (horn), 243...capillary, 243E...used capillary, 243h...capillary through hole, 243T...replacement capillary, AE, AT...axis.

Claims

1. a supply module having a storage section for storing a plurality of replacement capillaries arranged in a supply direction perpendicular to an axis of the replacement capillaries and a capillary supply port for removing the replacement capillaries, the supply module moving the replacement capillaries from the storage section to the capillary supply port along the supply direction; a moving member that moves relative to the storage portion while holding the replacement capillary; The moving member is provided with a capillary contact portion, a replacement module that executes an operation of removing the replacement capillary from the capillary supply port by pressing the replacement capillary with the capillary contact portion as the replacement capillary moves along the axis relative to the storage portion, and an operation of moving the replacement capillary removed by the removal operation along the axis by the moving member; A capillary exchange mechanism comprising: a transport module that performs an operation of receiving the replacement capillary moved by the moving operation of the replacement module; and a transport operation of linearly moving the received replacement capillary a predetermined distance and rotating it a predetermined angle.

2. The transport module moves the used capillary from a first position to a second position; The capillary exchange mechanism according to claim 1 , wherein the moving member moves along the axis to pull out the used capillary present at the second position from the transport module.

3. A first reference line overlapping an axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined; the transfer module is disposed so as to include an intersection of the first reference line and the second reference line; The capillary exchange mechanism of claim 1 , wherein the replacement module is disposed adjacent to the transport module along the orientation of the second reference line.

4. A first reference line overlapping an axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined; the transfer module is disposed so as to include an intersection of the first reference line and the second reference line; The capillary exchange mechanism of claim 1 , wherein the supply module is disposed adjacent to the transport module along a direction of the second reference line.

5. A first reference line overlapping an axis of a used capillary held by the horn, a second reference line perpendicular to the first reference line, and a third reference line parallel to the first reference line and spaced apart from the first reference line in a direction of the second reference line are defined; the replacement module is disposed so as to include an intersection of the second reference line and the third reference line; The capillary exchange mechanism of claim 1 , wherein the supply module is disposed adjacent to the replacement module on the third reference line along an orientation of the third reference line.

6. A first reference line overlapping an axis of a used capillary held by the horn, a second reference line perpendicular to the first reference line, and a third reference line parallel to the first reference line and spaced apart from the first reference line in a direction of the second reference line are defined; the transfer module is disposed so as to include an intersection of the first reference line and the second reference line; the replacement module is disposed so as to include an intersection of the second reference line and the third reference line; The capillary exchange mechanism of claim 1 , wherein the supply module is disposed adjacent to the replacement module on the third reference line along an orientation of the third reference line.

7. A first reference line is defined that overlaps with an axis of the used capillary held by the horn; the transport module is disposed so as to overlap the first reference line; The capillary exchange mechanism of claim 1 , wherein the replacement module is disposed so as to overlap the first reference line and to be adjacent to the transport module along a direction of the first reference line.

8. A first reference line overlapping an axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined; the transfer module is disposed so as to overlap the first reference line but not to include an intersection of the first reference line and the second reference line; The capillary exchange mechanism of claim 1 , wherein the supply module is positioned to overlap the second reference line.

9. A first reference line overlapping an axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined; the replacement module is disposed so as to include an intersection of the first reference line and the second reference line; The capillary exchange mechanism of claim 1 , wherein the supply module is positioned to overlap the second reference line.

10. A first reference line overlapping an axis of the used capillary held by the horn and a second reference line perpendicular to the first reference line are defined; the transfer module is disposed so as to overlap the first reference line but not to include an intersection of the first reference line and the second reference line; the replacement module is disposed so as to include an intersection of the first reference line and the second reference line; The capillary exchange mechanism of claim 1 , wherein the supply module is positioned to overlap the second reference line.

11. Horn and a capillary detachably attached to the horn; a capillary replacement mechanism for replacing the used capillary with a replacement capillary; The capillary exchange mechanism includes: a supply module having a storage section that stores a plurality of the replacement capillaries arranged in a supply direction perpendicular to an axis of the replacement capillaries and a capillary supply port for removing the replacement capillaries, and that moves the replacement capillaries from the storage section to the capillary supply port along the supply direction; a moving member that moves relative to the storage portion while holding the replacement capillary; a replacement module that is provided with a capillary contact portion on the moving member, and that executes an operation of removing the replacement capillary from the capillary supply port by pressing the capillary contact portion as the moving member moves along the axis with respect to the storage portion, and an operation of moving the replacement capillary removed by the removing operation along the axis by the moving member; A wire bonding apparatus having a conveying module that performs an operation of receiving the replacement capillary moved by the moving operation of the replacement module, and a conveying operation of linearly moving the received replacement capillary a predetermined distance and rotating it a predetermined angle.

Images