Method for forming a semiconductor device with memory cells, high voltage devices, and logic devices in a substrate - Patents.com

Abstract

1. A method of forming a semiconductor device by the steps of: recessing a top surface of a semiconductor substrate in a first and second area but not in a third area; forming a first conductive layer in the three areas; forming a second conductive layer in all three areas; removing the first and second conductive layers from the second area and portions of the first and second conductive layers from the first area, resulting in a pair of stack structures each comprising a control gate above a floating gate; forming a third conductive layer in all three areas; forming a protective layer in the first and second areas; removing the third conductive layer from the third area; forming blocks of dummy conductive material in the third area; etching in the first and second areas to form select gates and HV gates; and replacing the blocks of dummy conductive material with blocks of metal material.

Description

[Technical field]

[0001] (Priority Claim) This application claims priority to Chinese Patent Application No. 202110226090.6, filed on March 1, 2021, and entitled "Method Of Forming A Semiconductor Device With Memory Cells, High Voltage Devices And Logic Devices On A Substrate", and U.S. Patent Application No. 17 / 339,880, filed on June 4, 2021, and entitled "Method Of Forming A Semiconductor Device With Memory Cells, High Voltage Devices And Logic Devices On A Substrate".

[0002] FIELD OF THEINVENTION The present invention relates to semiconductor devices with embedded non-volatile memory cells. [Background technology]

[0003] Non-volatile memory semiconductor devices formed in silicon semiconductor substrates are well known. For example, U.S. Patent Nos. 6,747,310, 7,868,375, and 7,927,994 disclose memory cells with four gates (floating gate, control gate, select gate, and erase gate) formed in a semiconductor substrate, which are incorporated herein by reference for all purposes. The source and drain regions are formed as diffusion embedded regions in the substrate and define a channel region therebetween in the substrate. The floating gate is disposed above a first portion of the channel region and controls the conductivity of the first portion, the select gate is disposed above a second portion of the channel region and controls the conductivity of the second portion, the control gate is disposed above the floating gate, and the erase gate is disposed above the source region and laterally adjacent to the floating gate.

[0004] It is also known to form low-voltage and high-voltage logic devices in the same substrate as non-volatile memory cells. See, for example, U.S. Patent No. 9,276,005, which is incorporated herein by reference for all purposes. New gate materials, such as high-K dielectrics and metal gates, are also used to improve performance. However, processing steps in forming memory cells may adversely affect simultaneously fabricated logic devices, and vice versa.

[0005] What is needed is an improved method for fabricating devices that include memory cells, low voltage logic devices, and high voltage devices on the same substrate. Summary of the Invention

[0006] The above-mentioned problems and needs are addressed by a method of forming a semiconductor device, the method comprising: providing a substrate of a semiconductor material including a first area, a second area, and a third area; recessing an upper surface of the substrate in the first area and an upper surface of the substrate in the second area relative to an upper surface of the substrate in a third area; forming a first conductive layer disposed over the top surface in the first, second, and third areas and insulated from the top surface in the first, second, and third areas; forming an insulating layer on the first conductive layer in the first, second, and third areas; thinning the insulating layer in a third area without thinning the insulating layer in the first and second areas; forming a trench through the insulating layer and the first conductive layer in the first, second and third areas and into the substrate; filling the trench with an insulating material; removing the insulating layer from the first, second and third areas after filling the trench; forming a second conductive layer disposed above the first conductive layer in the first, second and third areas and insulated from the first conductive layer in the first, second and third areas; performing one or more etches to selectively remove portions of the first and second conductive layers in a first area and completely remove the first and second conductive layers from a second and third area, the one or more etches resulting in a plurality of pairs of stack structures in the first area, each of the stack structures including a control gate of the second conductive layer disposed above and insulated from a floating gate of the first conductive layer; forming first source regions in the substrate, each disposed between one of the pairs of stack structures; forming a third conductive layer disposed above the top surface of the substrate in the first, second, and third areas and insulated from the top surface of the substrate in the first, second, and third areas; forming a protective insulating layer over the third conductive layer in the first and second areas; removing the third conductive layer from the third area after the protective insulating layer forming step; forming a block of dummy conductive material disposed above and insulated from the top surface in the third area after the step of removing the third conductive layer from the third area; after the step of forming the blocks of dummy conductive material in the third area, etching portions of the protective insulating layer and portions of the third conductive layer in the first and second areas to form a plurality of select gates of the third conductive layer, each disposed adjacent one of the stack structures, and a plurality of HV gates of the third conductive layer, each disposed above an upper surface of the substrate in the second area and insulated from the upper surface of the substrate in the second area; forming first drain regions in the substrate, each adjacent one of the select gates; forming second source regions in the substrate, each adjacent one of the HV gates; forming second drain regions in the substrate, each adjacent one of the HV gates; forming third source regions in the substrate, each adjacent one of the blocks of dummy conductive material; forming third drain regions in the substrate, each adjacent one of the blocks of dummy conductive material; replacing each of the blocks of dummy conductive material with a block of metallic material; Includes.

[0007] A method for forming a semiconductor device includes: providing a substrate of a semiconductor material including a first area, a second area, and a third area; recessing an upper surface of the substrate in the first area and an upper surface of the substrate in the second area relative to an upper surface of the substrate in a third area; forming an insulating layer over a substrate; thinning the insulating layer in a third area without thinning the insulating layer in the first and second areas; forming a trench through the insulating layer in the first, second and third areas and into the substrate; filling the trench with an insulating material; removing the insulating layer from the first and second areas after the step of filling the trench; forming a first conductive layer disposed over and insulated from the first and second inner upper surfaces; forming a second conductive layer disposed above the first conductive layer in the first and second areas and insulated from the first conductive layer in the first and second areas; performing one or more etches to selectively remove portions of the first and second conductive layers in a first area and completely remove the first and second conductive layers from a second area, the one or more etches resulting in a plurality of pairs of stack structures in the first area, each of the stack structures including a control gate of the second conductive layer disposed above and insulated from a floating gate of the first conductive layer; forming first source regions in the substrate, each disposed between one of the pairs of stack structures; forming a third conductive layer disposed above and insulated from the top surface of the substrate in the first and second areas; forming a protective insulating layer over the third conductive layer in the first and second areas; removing the protective insulating layer from the third area after the step of forming the protective insulating layer; forming a block of dummy conductive material disposed above and insulated from the top surface in the third area after removing the protective insulating layer from the third area; after the step of forming the blocks of dummy conductive material in the third area, etching portions of the protective insulating layer and portions of the third conductive layer in the first and second areas to form a plurality of select gates of the third conductive layer, each disposed adjacent one of the stack structures, and a plurality of HV gates of the third conductive layer, each disposed above the top surface in the second area and insulated from the top surface in the second area; forming first drain regions in the substrate, each adjacent one of the select gates; forming second source regions in the substrate, each adjacent one of the HV gates; forming second drain regions in the substrate, each adjacent one of the HV gates; forming third source regions in the substrate, each adjacent one of the blocks of dummy conductive material; forming third drain regions in the substrate, each adjacent one of the blocks of dummy conductive material; replacing each of the blocks of dummy conductive material with a block of metallic material; may include.

[0008] Other objects and features of the present invention will become apparent from a review of the specification, claims, and accompanying drawings.

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[0016] [Brief description of the drawings]

[0017] [Figure 1A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 1B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 1C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 2A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 2B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 2C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 3A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 3B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 3C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 4A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 4B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 4C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 5A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 5B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 5C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 6A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 6B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 6C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 7A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 7B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 7C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 8A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 8B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 8C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 9A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 9B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 9C]1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 10A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 10B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 10C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 11A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 11B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 11C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 12A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 12B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 12C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 13A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 13B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 13C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 14A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 14B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 14C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 15A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 15B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 15C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 16A] 1A-1D are cross-sectional views of a memory cell area illustrating steps in forming a memory cell. [Figure 16B] 1A-1D are cross-sectional views of HV areas illustrating steps in forming an HV device. [Figure 16C] 1A-1C are cross-sectional views of logic areas illustrating steps in forming a logic device. [Figure 17] FIG. 2 is a cross-sectional view of a memory cell area showing a completed memory cell. [Figure 18] FIG. 13 is a cross-sectional view of the HV area showing the completed HV device. [Figure 19] 1 is a cross-sectional view of a logic area showing a completed logic device. [Figure 20A] 11A-11C are cross-sectional views of a memory cell area illustrating steps in forming a memory cell in an alternative embodiment. [Figure 20B] 11A-11C are cross-sectional views of the HV area illustrating steps of forming a HV device in an alternative embodiment. [Figure 20C] 11A-11C are cross-sectional views of logic areas illustrating steps for forming a logic device in an alternative embodiment. [Figure 21A] 11A-11C are cross-sectional views of a memory cell area illustrating steps in forming a memory cell in an alternative embodiment. [Figure 21B] 11A-11C are cross-sectional views of the HV area illustrating steps of forming a HV device in an alternative embodiment. [Figure 21C] 11A-11C are cross-sectional views of logic areas illustrating steps for forming a logic device in an alternative embodiment. [Figure 22A]11A-11C are cross-sectional views of a memory cell area illustrating steps in forming a memory cell in an alternative embodiment. [Figure 22B] 11A-11C are cross-sectional views of the HV area illustrating steps of forming a HV device in an alternative embodiment. [Figure 22C] 11A-11C are cross-sectional views of logic areas illustrating steps for forming a logic device in an alternative embodiment. [Figure 23A] 11A-11C are cross-sectional views of a memory cell area illustrating steps in forming a memory cell in an alternative embodiment. [Figure 23B] 11A-11C are cross-sectional views of the HV area illustrating steps of forming a HV device in an alternative embodiment. [Figure 23C] 11A-11C are cross-sectional views of logic areas illustrating steps for forming a logic device in an alternative embodiment. [Figure 24A] 11A-11C are cross-sectional views of a memory cell area illustrating steps in forming a memory cell in an alternative embodiment. [Figure 24B] 11A-11C are cross-sectional views of the HV area illustrating steps of forming a HV device in an alternative embodiment. [Figure 24C] 11A-11C are cross-sectional views of logic areas illustrating steps for forming a logic device in an alternative embodiment. [Figure 25A] 11A-11C are cross-sectional views of a memory cell area illustrating steps in forming a memory cell in an alternative embodiment. [Figure 25B] 11A-11C are cross-sectional views of the HV area illustrating steps of forming a HV device in an alternative embodiment. [Figure 25C] 11A-11C are cross-sectional views of logic areas illustrating steps for forming a logic device in an alternative embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] The present invention is a process for forming a semiconductor device by simultaneously forming memory cells, low voltage logic devices, and high voltage logic devices in the same semiconductor substrate. The process described below includes forming memory cells in one or more memory cell areas 2 (also referred to as first areas or MC areas 2) of the substrate 10, high voltage logic devices in one or more high voltage logic device areas 4 (also referred to as second areas or HV areas 4) of the substrate 10, and low voltage logic devices in one or more low voltage logic device areas 6 (also referred to as third areas or logic areas 6) of the substrate 10. The process is described with respect to simultaneously forming pairs of memory cells in the MC areas 2, high voltage logic devices in the HV areas 4, and low voltage logic devices in the logic areas 6. However, multiple such devices in each area may be formed simultaneously. The substrate 10 is a substrate of semiconductor material (e.g., silicon).

[0019] 1A-16A for the MC area 2, 1B-16B for the HV area 4, and 1C-16C for the logic area 6, cross-sectional views of steps in a process for fabricating a semiconductor device are shown. The process begins by recessing a top surface 10a of a silicon substrate 10 in the MC area 2 and the HV area 4 with respect to the logic area 6 by a recess amount R. The step of recessing the substrate top surface 10a may be performed by forming a silicon dioxide (also referred to herein as "oxide") layer on the substrate top surface 10a and forming a silicon nitride (also referred to herein as "nitride") layer on the oxide layer. A photolithography masking step is performed to cover the logic area 6 with photoresist but not the MC and HV areas 2 / 4 (i.e., form photoresist over all three areas, selectively expose portions of the photoresist, and selectively remove portions of the photoresist, leaving exposed portions of the underlying structure (in this case, the nitride layer in the MC and HV areas 2 / 4) while leaving other portions of the underlying structure covered by the photoresist (in this case, the nitride layer in the logic area 6)). A nitride and oxide etch is performed to remove these layers from the MC and HV areas 2 / 4, leaving the top surface 10a in these areas exposed. After photoresist removal, a thermal oxidation is performed to form an oxide layer on the exposed portions of the top surface 10a in the MC and HV areas 2 / 4, while the top surface 10a in the logic area 6 is unaffected (protected by the nitride and oxide layers). This thermal oxidation process consumes some of the silicon of the substrate 10 in the MC and HV areas 2 / 4, effectively lowering the top surface 10a in these areas by a recess amount R. Nitride and oxide etches are then used to remove all of the oxide and nitride layers, resulting in the structure shown in Figures 1A, 1B and 1C. The top surface 10a in the MC and HV areas 2 / 4 is recessed relative to the top surface 10a in the logic area 6 by a recess amount R (e.g., ∼300A).

[0020] Next, an oxide layer 12 is formed on the top surface 10a (e.g., by deposition or thermal growth, etc.). Thereafter, a conductive layer 14 (i.e., a first conductive layer), such as a polysilicon layer, is formed on the oxide layer 12. The conductive layer 14 may alternatively be amorphous silicon, either in-situ doped or undoped. If polysilicon or amorphous silicon is used for the conductive layer 14, an implant and anneal is performed. An oxide layer 18 is formed on the conductive layer 14, followed by a nitride layer 20 formed on the oxide layer 18. A photolithographic masking step is then performed to cover the MC and HV areas 2 / 4 with photoresist 21, but leave the logic area 6 exposed (i.e., the photoresist 21 is removed from the logic area 6 as part of the masking step). Next, as shown in Figures 2A, 2B, and 2C, a nitride etch is used to thin (i.e., reduce the thickness of) nitride layer 20 in logic area 6 (e.g., the etch is preferably timed so that the etch thins nitride layer 20 in logic area 6 by an amount approximately equal to recess amount R, such that the top surface of nitride layer 20 in all three areas 2 / 4 / 6 is substantially the same height).

[0021] After removal of the photoresist 21, a photolithographic masking step is used to selectively cover portions of each area with photoresist. Nitride, oxide, polysilicon, and / or silicon etches are used to form trenches through the nitride layer 20, the oxide layer 18, the conductive layer 14, and the oxide layer 12 into the silicon substrate 10. The trenches are then filled with oxide 22 by oxide deposition and chemical mechanical polishing (CMP) stopping on the nitride layer 20, as shown in Figures 3A and 3B. The trenches filled with oxide 22 run parallel to the active regions in the MC areas 2, but do not extend beyond the active regions as shown in Figure 3A. A 3 is a cross-sectional view of one of the active areas, so the trenches filled with oxide 22 are ANot shown in FIG. Oxide 22 is an insulating material that may also be referred to as shallow trench isolation (STI) oxide 22. STI oxide 22 may include a liner oxide formed by thermal oxidation prior to oxide deposition.

[0022] A series of implants can be performed to create the desired wells in the substrate 10 in each area 2 / 4 / 6 (with photoresist protecting one or more of the other areas during each implant), followed by an oxide etchback to recess the STI oxide 22 below the top of the nitride layer 20. A nitride etch is then used to remove the nitride layer 20. An insulating layer 24 is then formed above the structure. Preferably, the insulating layer 24 is an ONO composite layer with oxide / nitride / oxide sublayers (formed by oxide, nitride, oxide deposition and anneal). However, the insulating layer 24 can instead be formed of a composite of other dielectric layers, or a single dielectric material with no sublayers. A conductive layer 26 (i.e., a second conductive layer), such as a polysilicon layer, is then formed on the structure, in one example by deposition. The conductive layer 26 can instead be amorphous silicon, either in-situ doped or undoped. If polysilicon or undoped amorphous silicon is used for the conductive layer 26, an implant and anneal is performed. A hardmask layer 28 is then formed on conductive layer 26. Hardmask layer 28 may be a nitride layer, a SiCN layer, or a composite of oxide, nitride and / or SiCN layers. The resulting structure is shown in Figures 4A, 4B, and 4C.

[0023] A photolithographic masking step is used to form photoresist 30 on the structure, which is then removed from the HV and logic areas 4 / 6 and selectively removed from the MC area 2 to expose the hardmask layer 28 in the HV and logic areas 4 / 6 and only the portions of the hardmask layer 28 in the MC area 2. A series of etches is used to remove the exposed portions of the hardmask layer 28, the conductive layer 26, and the insulating layer 24, leaving behind the spaced-apart stack structures S1 and S2 pairs of the hardmask layer 28, the conductive layer 26, and the insulating layer 24 in the MC area 2, and completely removing these layers from the HV and logic areas 4 / 6. The resulting structure is shown in Figures 5A, 5B, and 5C.

[0024] After removal of the photoresist 30, oxide deposition or thermal oxidation and etching are used to form oxide spacers 32 along the sides of the stacks S1 and S2 in the MC area 2. Nitride deposition and etching are used to form nitride spacers 34 along the sides of the oxide spacers 32. Oxide and nitride etching can be combined. Depending on the material of the conductive layer 14, an etch such as polysilicon etching or silicon etching is performed to remove the exposed parts of the conductive layer 14, so that each spaced apart stack structure S1 / S2 includes a block of conductive material 14a from the remainder of the conductive layer 14 in the MC area 2, and the conductive layer 14 is completely removed from the HV area / logic area 4 / 6. As shown in Figures 6A, 6B, and 6C, oxide spacers 36 are formed on the sides of the stack structures S1 / S2 by oxide deposition and oxide anisotropic etching along the exposed ends of the blocks of conductive material 14a.

[0025] A photolithographic masking step is used to cover the MC and logic areas 2 / 6 with photoresist, but leave the HV area 4 exposed. An oxide etch is used to remove the oxide layer 12 from the HV area 4. After the photoresist removal, an insulating layer 38 is then formed by thermal growth and / or deposition on the substrate top surface 10a in the HV area 4, as well as on top of the structures in the MC area 2 and on top of the insulating layer 38 in the logic area 6. The insulating layer 38 may be an oxide and / or an oxynitride, and serves as the gate oxide of the HV devices. However, it should be noted that the removal of the oxide layer 12 and replacement with the insulating layer 38 is optional, and the oxide layer 12 may instead be used as part or the entire gate oxide of the HV devices. After the photoresist removal, a photoresist 40 is formed on the structures and removed only from the area between stacks S1 and S2 in the MC area 2 (referred to herein as the inter-stack area). A filling process is performed to form a (first) source region 42 in the substrate between stacks S1 and S2. An oxide etch is then used to remove the insulating layer 38, the oxide spacers 36, and the oxide layer 12 in the inter-stack areas. The resulting structure is shown in Figures 7A, 7B, and 7C.

[0026] After removal of the photoresist 40, a tunnel oxide 44 is formed in the structure. The tunnel oxide 44 can be an oxide and / or oxynitride formed by deposition and / or thermal growth. Due to the catalytic effect of the higher dopant level in the source region 42, the tunnel oxide 44 can have a thicker portion 44a in the source region 42. Using a photolithographic masking step, the HV and logic area 4 / 6 and the inter-stack area in the MC area 2 are covered with photoresist. Areas other than the inter-stack areas of the stack structures S1 and S2 (referred to herein as out-stack areas) remain exposed. Filling can be performed at this point for the portions of the substrate 10 in the out-stack areas (i.e., those substrate portions that underlie the select gates that will be formed later). An oxide etch is used to remove the exposed portions of the oxide layer 12 in the out-stack areas. After removal of the photoresist, an insulating layer 46 is formed in the structure. The insulating layer 46 can be an oxide and / or oxynitride formed by deposition and / or thermal growth or any other suitable dielectric material. The formation of insulating layer 46 thickens or becomes part of tunnel oxide 44 and insulating layer 38. The resulting structure is shown in Figures 8A, 8B, and 8C.

[0027] A conductive layer 48 (i.e., a third conductive layer), such as a polysilicon layer, is formed on the structure. The conductive layer 48 can be in-situ doped or undoped, or alternatively, can be amorphous silicon. If undoped polysilicon or amorphous silicon is used for the conductive layer 48, a doping and anneal is performed. A chemical mechanical polish (CMP) is performed to planarize the top surface of the structure. A further etch-back process is used to recess the top surface of the conductive layer 48 below the tops of the stacks S1 and S2, as shown in Figures 9A, 9B, and 9C.

[0028] At this stage, most of the memory cell formation is completed. A protective insulating layer 54 is formed over the structure. The protective insulating layer 54 can be oxide, nitride, SiCN, or a combination thereof. Using a photolithographic masking step, the MC and HV areas 2 / 4 are covered with photoresist while leaving the logic area 6 exposed. One or more etches are used to remove the protective layer 54, the conductive layer 48, the insulating layer 38, and the oxide layer 12 in the logic area 6, as shown in Figures 10A, 10B, and 10C (after photoresist removal). The protective layer 54 protects the MC and HV areas 2 / 4 from this etch sequence.

[0029] Implants can be performed at this point to form doped P and N wells in the substrate 10 in the logic area 6. A dielectric layer 56 is formed on the exposed substrate top surface 10a in the logic area 6 (which can function as a gate dielectric for logic devices). The dielectric layer 56 can be silicon oxide, silicon oxynitride, a high-K dielectric layer, or a composite thereof. A high-K insulating material is an insulating material that has a dielectric constant K greater than that of silicon dioxide. Examples of high-K insulating materials include HfO2, ZrO2, TiO2, Ta2O5, and combinations thereof. A dummy conductive layer 58, such as a polysilicon layer, is then formed above the structure. An insulating layer 59, such as nitride (also referred to herein as logic insulating layer 59), and a hard mask layer 60 are then formed on the dummy conductive layer 58. A photolithographic masking step is used to cover selected portions of the logic area 6 with photoresist, leaving the insulating layer 59 and hard mask layer 60 exposed throughout the MC and HV areas 2 / 4 and portions of the logic area 6. Then, etching is used to remove the exposed areas of the insulating layer 59 and the hard mask layer 60 in the MC area, the HV area, and the logic areas 2 / 4 / 6. After removing the photoresist, etching is used to remove the exposed portions of the dummy conductive layer 58 and the dielectric layer 56 (i.e., all portions not protected by the remaining portions of the hard mask layer 60 in the logic area 6), leaving the logic stack structures LS1 and LS2 in the logic area 6 including blocks of dummy conductive material 58 disposed in the dielectric layer 56. Dielectric spacers 62 (e.g., nitride) are formed on the sides of the logic stack structures LS1 / LS2 by deposition and etching. At this point, embedding can be performed on the substrate 10 in the logic area 6. The resulting structure is shown in Figures 11A, 11B, and 11C.

[0030] Using a photolithographic masking step, the logic area 6, a portion of the HV area 4, and a portion of the MC area 2 are covered with photoresist 64 (i.e., covering the inter-stack area, the stack structures S1 and S2, and those portions of the out-stack area directly adjacent to the stack structures S1 and S2). As shown in Figures 12A, 12B, and 12C, etching is used to remove the exposed portions of the protective layer 54 and the conductive layer 48. After removing the photoresist 64, additional selective filling and etching can be performed (i.e., by additional photolithographic masking steps and filling) in different exposed portions of the substrate 10. For example, the logic area 6 may be covered by photoresist, while the MC and HV areas 2 / 4 are left exposed, and filling is performed in the portions of the substrate 10 that are only covered by the insulating layers 38 and 46. Using a photolithographic masking step, the logic area 6 is covered, while the MC and HV areas 2 / 4 are left exposed. Etching is then used to thin the exposed portions of insulating layers 38 and 46 (and also thin protective insulating layer 54) so ​​that subsequent processing can provide better buried penetration into HV area 4. The resulting structure is shown in Figures 13A, 13B, and 13C (after photoresist removal).

[0031] A semi-nonconformal layer 70 is formed on the structure. This layer retains some of the conformity of the underlying topography, but is thinner on top of the underlying topography compared to where the vertical and horizontal surfaces meet. To achieve such a varying thickness, it is preferred to form the layer 70 using a flowable material. One non-limiting example of a material for the semi-nonconformal layer 70 is a BARC material (bottom anti-reflective coating), which is commonly used to reduce reflectivity at the resist interface during photolithography. BARC materials are flowable and wettable, and are easily etched and removed with minimal process damage due to their high selectivity to oxides. Other materials that can be used for the semi-nonconformal layer 70 include photoresist or spin-on glass (SOG). An etch (e.g., anisotropic) is used to remove the top of the semi-nonconformal layer 70 from the protective insulating layer 54 of the remaining portions of the stack structures S1 / S2 and the conductive layer 48, as well as the hard mask layer 60 of the logical stack structures LS1 / LS2, exposing them, while leaving the insulating layers 38 and 46 covered by the semi-nonconformal layer 70 (i.e., this portion of the semi-nonconformal layer 70 serves as a hard mask for the next etching step). An etch is used to remove the hard mask layer 60 of the logical stack structures LS1 / LS2. The resulting structure is shown in Figures 14A, 14B, and 14C.

[0032] After removal of the semi-nonconformal layer 70, oxide and nitride deposition followed by spacer etching is used to form oxide spacers 66 and nitride spacers (not shown) on the sides of the stack structures S1 / S2 in the MC area 2, on the sides of the stack structures LS1 / LS2 in the logic area 6, and on the sides of the structures in the HV area 4. An implant is performed to form a (first) drain region 74 in the substrate adjacent to the oxide spacer 66 in the MC area 2, a (second) source region and a (second) drain region 76 / 78 adjacent to the oxide spacer 66 in the HV area 4, and a (third) source region and a (third) drain region 80 / 82 adjacent to the oxide spacer 66 in the logic area 6. The implantation of any given region can be performed by forming a photoresist to prevent implantation of other regions that should not be implanted. For example, drain region 74 in MC area 2, source / drain regions 76 / 78 in HV area 4, and source / drain regions 80 / 82 in logic area 6, of the same doping type, can be formed simultaneously by forming photoresist in the areas of opposite source / drain doping type and then performing a single implant in MC, HV, and logic areas 2 / 4 / 6. At this point, a blocking layer 84 can be formed to prevent any silicidation in the next step by a deposition, masking step, and etch. The remaining portions of protective insulating layer 54 in MC and HV areas 2 / 4 that are not protected by blocking layer 84 are also removed during the above etch, exposing conductive layer 48 to subsequent silicidation. Metal deposition and annealing are then performed to form silicide 86 on the top surfaces of the exposed portions of conductive layer 48, source regions 76 / 80, and drain regions 74 / 78 / 82. Blocking layer 84 prevents silicide formation in any areas where such formation is not desired. Optionally, a blocking layer 84 may be maintained over selected portions of the source / drain areas 74 / 76 / 78 / 80 / 82 and / or conductive layer 48 to prevent silicide formation in these selected regions.An etch, such as a nitride etch, is then used to remove the oxide spacers 66 and the nitride spacers of the insulating layer 59 in the logic area 6 (exposing the blocks of dummy conductive layer 58) and the hard mask layer 28 in the MC area 2. The resulting structure is shown in Figures 15A, 15B, and 15C.

[0033] A layer 88 (e.g., nitride) is formed over the structure. A thick layer of inter-level dielectric (ILD) insulating material 90 is then formed over the layer 88. CMP is performed to planarize and recess the ILD insulating material 90, exposing the dummy conductive layer 58 in the logic area 6. A photolithographic masking step is used to cover the MC and HV areas 2 / 4 with photoresist, leaving the logic area 6 exposed. An etch, such as a polysilicon etch, is then used to remove the blocks of dummy conductive layer 58 in the logic area 6. A layer, such as, but not limited to, Al, Ti, TiAlN, TaSiN, TaN, TiN, or other suitable metal material, or a composite thereof, is formed over the structure. CMP is then performed to remove the metal gate material layer, leaving blocks of metal material 94 disposed on the dielectric layer 56 in the logic area 6. The final structure is shown in Figures 16A, 16B, and 16C.

[0034] FIG. 17 shows the final memory cell structure in MC area 2, which includes a pair of memory cells each sharing a source region 42 spaced from two drain regions 74 and having a channel region 96 in silicon 10 extending therebetween. Each memory cell includes a floating gate 14a (i.e., a block of remaining conductive material from the conductive layer 14) disposed above and insulated from a first portion of the channel region 96 to control the conductivity of the first portion of the channel region 96, a select gate 48a (i.e., a block of remaining conductive material from the conductive layer 48) disposed above and insulated from a second portion of the channel region 96 to control the conductivity of the second portion of the channel region 96, a control gate 26a (i.e., a block of remaining conductive material from the conductive layer 26) disposed above and insulated from the floating gate 14a, and an erase gate 48b (i.e., a block of remaining conductive material from the conductive layer 48) disposed above and insulated from a source region 42 (shared by a pair of memory cells). The pairs of memory cells extend in a column direction (BL direction), and the columns of memory cells are formed with an STI oxide 22 between adjacent columns. The row of control gates is formed as a continuous control gate line that interconnects the control gates 26a across a row of memory cells, the row of select gates 48a is formed as a continuous select gate line (also known as a word gate line) that interconnects the select gates 48a across a row of memory cells, and the row of erase gates 48b is formed as a continuous erase gate line that interconnects the erase gates 48b across pairs of rows of memory cells.

[0035] The final HV devices are shown in Figure 18. Each HV device includes spaced apart source and drain regions 76 and 78 with a channel region 98 in the silicon substrate 10 extending therebetween. An HV gate 48c (i.e., a block of remaining conductive material from conductive layer 48) is disposed above and insulated from the channel region 98 to control the conductivity of the channel region 98.

[0036] The final logic device is shown in Figure 19. Each logic device includes spaced apart source and drain regions 80 and 82 with a channel region 100 in the silicon substrate 10 extending therebetween. A block of metal gate 94 is disposed above and insulated from the channel region 100 (by dielectric layer 56) to control the conductivity of the channel region 100.

[0037] The above method of forming memory cells, HV devices, and logic devices on the same substrate has many advantages. Because the formation of the memory cells and HV devices is completed before the metal gates 94 are formed in the logic area 6, the metal gates 94 in the logic area 6 are not adversely affected by the formation of the memory cells and HV devices. The process steps for forming the gates in the MC and HV areas 2 / 4 are separate and independent from (and can be customized to) the process steps for the formation of the gates in the logic area 6. The MC and HV areas 2 / 4 are covered by a protective insulating layer 54 after the majority of the formation of the memory cells and HV devices is completed and before processing in the logic area 6 (i.e., before the removal of layers in the logic area 6 remaining from the formation of the memory cells and HV devices, and before the deposition and removal of layers used in the formation of the logic devices, including but not limited to the removal of dummy polysilicon). The top surface 10a of the substrate 10 is recessed in the MC and HV areas 2 / 4 relative to the logic area 6 to accommodate the taller structures in the MC / HV areas 2 / 4 (i.e., the tops of the shorter logic devices in the logic area 6 are slightly taller than the tops of the taller memory cells and HV devices in the MC / HV areas 2 / 4, and CMP across all three areas can be used for processing - e.g., the tops of the select gates 48a and HV gates 48c are substantially flush with the dummy conductive layer 58 during CMP of the ILD 90). Layer 88 protects the silicided conductive layer 48 from the CMP used in forming the metal gate 94, and conductive layer 26 serves as a stop layer for this CMP. The silicide 86 enhances the conductivity of the drain region 74, and the source / drain regions 76 / 78, source / drain regions 80 / 82, the select gate 48a, the erase gate 48b, and the HV gate 48c. The semi-non-conformal layer 70 protects the oxide and silicon in the source / drain regions of the MC and HV areas 2 while the hardmask layer 60 is removed from the logic areas 6 .The memory cell select gate 48a, memory cell erase gate 48b, and HV gate 48c can be formed using a single conductive material deposition (i.e., a single polysilicon layer formed by a single polysilicon deposition can be used to form all three types of gates). Furthermore, the same polysilicon etch can be used to define one edge of each select gate 48a and both edges of each HV gate 48c. The thicknesses of the various layers 46, 12, 38, and 56 (used as gate oxides) are independent of each other, each optimized for its respective gate operation. For example, the insulating layer 46 under the select gate 48a is preferably thinner than the oxide layer 12 under the floating gate 14a.

[0038] The nitride etch (see FIGS. 2A-2C and related description) to thin the nitride layer 20 ensures that the top surface of the nitride layer 20 is at substantially the same height in the MC, HV and logic areas 2 / 4 / 6, even though the MC and HV areas 2 / 4 have a recessed substrate top surface 10a relative to the logic areas 6 (and the oxide layer 12 / 18 and conductive layer 14 below the nitride layer 20 are formed in all three areas), making subsequent processing better and more uniform across all three areas. The CMP used to planarize the conductive layer 48 on top of the stack structures S1 and S2, followed by the etch to recess the conductive layer 48 below the top of the stack structures S1 and S2 (see FIGS. 9A-9C and related description) provides reliable control of the height of the conductive layer 48 in the MC and HV areas 2 / 4 (e.g., using APC (automatic process control) to measure the thickness of the conductive layer 48 before the etching process and then derive the etching time based on the etch rate of the etch), thus avoiding additional masking steps. Finally, the protective insulating layer 54 in the MC and HV areas 2 / 4 and the hard mask layer 60 in the logic area 6 are etched after the formation of the semi-conformal layer 70, eliminating the need for an extra masking step before forming the silicide 86.

[0039] 20A-25A, 20B-25B, and 20C-25C disclose an alternative embodiment starting from the structure shown in FIGS. 1A-1C. An oxide layer 101 is formed on the top surface 10a by oxide deposition or thermal oxidation. A nitride layer 102 is formed on the oxide layer 101. A photolithographic masking step is then performed to cover the MC and HV areas 2 / 4 with photoresist 104 while leaving the logic area 6 exposed. A nitride etch is then used to thin (i.e. reduce the thickness) the nitride layer 102 in the logic area 6, making the top surface of the nitride layer 102 substantially the same height in all three areas, i.e. MC, HV and logic areas 2 / 4 / 6, as shown in FIGS. 20A, 20B, and 20C.

[0040] After removal of the photoresist 104, a photolithographic masking step is used to selectively cover portions of each area with photoresist. Nitride, oxide and silicon etches are used to form trenches through the nitride layer 102, the oxide layer 101 and into the silicon substrate 10. After removal of the photoresist, the trenches are filled with an STI oxide 106 by oxide deposition and chemical mechanical polishing (CMP) stopping on the nitride layer 102, as shown in Figures 21A, 21B and 21C. The STI oxide 106 may include a liner oxide formed by thermal oxidation prior to oxide deposition.

[0041] A photolithography masking step is then performed to cover the logic area with photoresist, but leave the MC and HV areas 2 / 4 exposed. Then, one or more etches are used to remove the nitride layer 102 and the oxide layer 101 from the MC and HV areas 2 / 4. After the photoresist removal, an oxide layer 108 is formed on the substrate surface 10a in the MC and HV areas 2 / 4, for example by thermal oxidation. A conductive layer 110, such as a polysilicon layer, is then formed on the structure, for example by deposition. The conductive layer 110 may alternatively be amorphous silicon, either in-situ doped or undoped. If undoped polysilicon or amorphous silicon is used for the layer 110, an implant and anneal are performed. Chemical mechanical polishing and etchback are used to planarize and recess the conductive layer 110 in the MC and HV areas 2 / 4, and to remove the conductive layer 110 from the logic area 6. An oxide etch may then be used to recess the STI oxide 106. The resulting structures are shown in Figures 22A, 22B, and 22C.

[0042] Next, the formation of insulating layer 24, conductive layer 26, hard mask layer 28, stack structure S1 and S2, oxide spacer 32, oxide spacer 36, insulating layer 38, source region 42, tunnel oxide 44, and insulating layer 46 is performed using the steps described above with respect to Figures 4A-8A, 4B-8B, and 4C-8C. The resulting structure is shown in Figures 23A, 23B, and 23C. Next, the formation of conductive layer 48 as described above (i.e., deposition, CMP, and etchback) is performed, so that conductive layer 48 is completely removed by CMP from logic area 6 due to the presence of nitride layer 102 in logic area 6, as shown in Figures 24A-24C. Next, as shown in Figures 25A-25C, a protective insulating layer 54 is formed on the conductive layer 48 in the MC and HV areas 2 / 4 as described above, and then an etch is performed to remove the insulating layer 38, the oxide layer 101, and the nitride layer 102 from the logic area 6 and recess the STI oxide 106 in the logic area 6. The processing steps described above with respect to Figures 11A-11C through 16A-16C are performed to complete the structure. An advantage of this alternative embodiment is that a simpler and more efficient etch can be used to form the trench filled with the STI oxide 106 (because the trench is formed through only two layers before reaching the substrate 10 (see Figures 21A-21C) rather than through four layers before reaching the substrate 10 (see Figures 3A-3C)).

[0043] It will be understood that the present invention is not limited to the embodiments described above and illustrated herein, but encompasses any and all modifications within the scope of the appended claims. For example, references to the present invention herein are not intended to limit the scope of the claims or the terms of the claims, but instead merely refer to one or more features that may be covered by one or more of the claims. The material, process, and numerical examples described above are merely illustrative and should not be considered as limiting the scope of the claims. Furthermore, as will be apparent from the claims and the specification, all method steps need not be performed in the exact order illustrated or claimed, but rather any order is possible for proper formation of the memory cell areas and logic areas of the present invention, unless otherwise specified in the claims. Finally, a single layer of material can be formed as multiple layers of such or similar materials, and vice versa.

[0044] It should be noted that, as used herein, both the terms "over" and "on" are inclusive of "directly" (with no intermediate materials, elements, or spaces disposed therebetween) and "indirectly" (with intermediate materials, elements, or spaces disposed therebetween). Similarly, the term "adjacent" includes "directly adjacent" (without any intermediate materials, elements, or spaces disposed therebetween) and "indirectly adjacent" (with intermediate materials, elements, or spaces disposed therebetween). For example, forming an element "over a substrate" can include forming the element directly on the substrate without any intermediate materials / elements therebetween, as well as forming the element indirectly on the substrate with one or more intermediate materials / elements therebetween.

Claims

1. 1. A method of forming a semiconductor device, comprising: providing a substrate of a semiconductor material including a first area, a second area, and a third area; recessing an upper surface of the substrate in the first area and an upper surface of the substrate in the second area relative to an upper surface of the substrate in the third area; forming a first conductive layer disposed over the top surface in the first, second, and third areas and insulated from the top surface in the first, second, and third areas; forming an insulating layer on the first conductive layer in the first, second, and third areas; thinning the insulating layer in the third area without thinning the insulating layer in the first and second areas; forming a trench through the insulating layer and the first conductive layer in the first, second and third areas and into the substrate; filling the trench with an insulating material; removing the insulating layer from the first, second and third areas after the filling of the trench; forming a second conductive layer disposed above the first conductive layer in the first, second and third areas and insulated from the first conductive layer in the first, second and third areas; performing one or more etches to selectively remove portions of the first and second conductive layers in the first area and completely remove the first and second conductive layers from the second and third areas, the one or more etches resulting in a plurality of pairs of stack structures in the first area, each of the stack structures including a control gate of the second conductive layer disposed above and insulated from a floating gate of the first conductive layer; forming first source regions in the substrate, each disposed between one of the pairs of the stack structures; forming a third conductive layer disposed above the top surface of the substrate in the first, second, and third areas and insulated from the top surface of the substrate in the first, second, and third areas; forming a protective insulating layer over the third conductive layer in the first and second areas; removing the third conductive layer from the third area after the forming of the protective insulating layer; forming a block of dummy conductive material disposed above and insulated from the top surface in the third area after the step of removing the third conductive layer from the third area; after the step of forming the blocks of dummy conductive material in the third area, etching portions of the protective insulating layer and portions of the third conductive layer in the first and second areas to form a plurality of select gates of the third conductive layer, each disposed adjacent one of the stack structures, and a plurality of HV gates of the third conductive layer, each disposed above the top surface of the substrate in the second area and insulated from the top surface of the substrate in the second area; forming first drain regions in the substrate, each adjacent one of the select gates; forming second source regions in the substrate, each adjacent one of the HV gates; forming second drain regions in the substrate, each adjacent one of the HV gates; forming third source regions in the substrate, each adjacent one of the blocks of dummy conductive material; forming third drain regions in the substrate, each adjacent one of the blocks of dummy conductive material; replacing each of the blocks of dummy conductive material with a block of metallic material; A method comprising:

2. The method of claim 1 , wherein each of the blocks of metallic material is insulated from the top surface of the substrate in the third area by a layer of high-K insulating material.

3. 2. The method of claim 1 , wherein prior to the replacing step, each of the blocks of dummy conductive material is insulated from the top surface of the substrate in the third area by a layer of high-K insulating material, and the replacing step further comprises forming each of the blocks of metallic material on the layer of high-K insulating material.

4. 2. The method of claim 1, wherein for each pair of stack structures, an erase gate of the third conductive layer is disposed between the pair of stack structures and disposed above and insulated from one of the source regions.

5. 2. The method of claim 1, wherein each of the first, second and third conductive layers is formed of polysilicon or amorphous silicon.

6. 2. The method of claim 1, further comprising forming a silicide on said first, second and third drain regions and said second and third source regions.

7. 5. The method of claim 4, further comprising forming a silicide on the select gate, the erase gate, and the HV gate prior to the replacing step.

8. The method of claim 1 , wherein for each of the stack structures, the control gate is insulated from the floating gate by an ONO insulating layer.

9. 5. The method of claim 4, wherein forming the blocks of dummy conductive material comprises forming a logic insulation layer on the blocks of dummy conductive material and forming a hard mask layer on the logic insulation layer.

10. Prior to the replacing step, forming a layer of flowable material in the first, second, and third areas; removing a portion of the layer of flowable material to expose the hard mask layer; removing the hard mask layer; The method of claim 9 , further comprising the step of: removing the layer of flowable material.

11. 11. The method of claim 10, further comprising forming a silicide on the select gate, the erase gate, and the HV gate, wherein the logic insulation layer prevents formation of a silicide on the blocks of dummy conductive material.

12. 1. A method of forming a semiconductor device, comprising: providing a substrate of a semiconductor material including a first area, a second area, and a third area; recessing an upper surface of the substrate in the first area and an upper surface of the substrate in the second area relative to an upper surface of the substrate in the third area; forming an insulating layer over the substrate; thinning the insulating layer in the third area without thinning the insulating layer in the first and second areas; forming a trench through the insulating layer in the first, second and third areas and into the substrate; filling the trench with an insulating material; removing the insulating layer from the first and second areas after the filling of the trench; forming a first conductive layer disposed above the top surface in the first and second areas and insulated from the top surface in the first and second areas; forming a second conductive layer disposed above the first conductive layer in the first and second areas and insulated from the first conductive layer in the first and second areas; performing one or more etches to selectively remove portions of the first and second conductive layers in the first area and completely remove the first and second conductive layers from the second area, the one or more etches resulting in a plurality of pairs of stack structures in the first area, each of the stack structures including a control gate of the second conductive layer disposed above and insulated from a floating gate of the first conductive layer; forming first source regions in the substrate, each disposed between one of the pairs of the stack structures; forming a third conductive layer disposed above and insulated from the top surface of the substrate in the first and second areas; forming a protective insulating layer over the third conductive layer in the first, second, and third areas; removing the protective insulating layer from the third area after the forming step; forming a block of dummy conductive material disposed above and insulated from the top surface in the third area after the step of removing the protective insulating layer from the third area; after the forming step of the blocks of dummy conductive material in the third area, etching portions of the protective insulating layer and portions of the third conductive layer in the first and second areas to form a plurality of select gates of the third conductive layer, each disposed adjacent one of the stack structures, and a plurality of HV gates of the third conductive layer, each disposed above the top surface in the second area and insulated from the top surface in the second area; forming first drain regions in the substrate, each adjacent one of the select gates; forming second source regions in the substrate, each adjacent one of the HV gates; forming second drain regions in the substrate, each adjacent one of the HV gates; forming third source regions in the substrate, each adjacent one of the blocks of dummy conductive material; forming third drain regions in the substrate, each adjacent one of the blocks of dummy conductive material; replacing each of the blocks of dummy conductive material with a block of metallic material; A method comprising:

13. The method of claim 12 , wherein each of the blocks of metallic material is insulated from the top surface in the third area by a layer of high-K insulating material.

14. 13. The method of claim 12, wherein for each pair of the stack structures, an erase gate of the third conductive layer is disposed between the pair of stack structures and disposed above and insulated from one of the source regions.

15. 15. The method of claim 14, further comprising forming a silicide on the first, second and third drain regions, the second and third source regions, the select gate, the erase gate, and the HV gate.

16. 13. The method of claim 12, wherein for each of the stack structures, the control gate is insulated from the floating gate by an ONO insulating layer.

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