Material Detection Systems

Abstract

To provide a substance detection system capable of reducing area of a required region for disposing multiple substance sensors.SOLUTION: A substance detection system 1 includes multiple boards 2. Multiple through holes 3 through which gas G flows are arranged on the board 2. A substance sensor 4 for detecting object substances M1 to M3 included in the gas G passing through the through holes 3 is provided in at least one through hole 3 on the board 2. The board 2 is laminated such that respective through holes 3 communicate one another. Accordingly, multiple flow paths 5 of the gas G extending in a lamination direction of the board 2 are formed. In the substance detection system 1, the multiple substance sensors 4 are disposed in at least one flow path 5.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a material detection system. [Background technology]

[0002] Patent Document 1 discloses a chemical sensor device as a substance detection system that detects a substance based on the amount of change in resonance frequency that occurs when a substance is adsorbed to or desorbed from a sensitive film. This chemical sensor device includes multiple oscillators, each of which is provided with a sensitive film that exhibits adsorption / desorption characteristics for different substances. Each oscillator includes a piezoelectric substrate, and is excited by the application of an AC voltage to deform the piezoelectric substrate. When a substance is adsorbed to or desorbed from the sensitive film, the resonance frequency of each oscillator changes. This makes it possible to detect the substance.

[0003] This chemical sensor device can detect odors that are made up of multiple substances. The odor contained in the gas is identified based on the pattern of reaction values ​​of each sensitive membrane, i.e., the composition ratio of the multiple substances that make up the odor. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2009-204584 A Summary of the Invention [Problem to be solved by the invention]

[0005] As described above, the odor of a gas is composed of multiple types of substances contained in the gas. Therefore, in order to accurately identify the odor of the gas, multiple substance sensors that detect the corresponding substances are required. In this case, an area is required to arrange the multiple substance sensors, and the more substances to be detected, the larger the area of ​​the area becomes, which is inconvenient.

[0006] The present invention has been made in light of the above-mentioned circumstances, and an object of the present invention is to provide a substance detection system capable of reducing the area required for arranging a plurality of substance sensors. [Means for solving the problem]

[0007] In order to achieve the above object, a substance detection system according to a first aspect of the present invention comprises: a substrate including a plurality of through holes through which a gas flows, at least one of the through holes being provided with a substance sensor for detecting a target substance contained in the gas passing through the through hole; The substrates are stacked such that the through holes are in communication with each other, thereby forming a plurality of gas flow paths extending in a stacking direction of the substrates, A plurality of the substance sensors are disposed in at least one of the flow paths.

[0008] In this case, the cross-sectional size of the through hole perpendicular to the gas flow direction is different between adjacent substrates. This may also be the case.

[0009] a cross-sectional size of the through hole is larger in the substrate downstream of the flow path than in the substrate upstream of the flow path; This may also be the case.

[0010] A size of a cross section of the flow path perpendicular to a direction in which the gas flows increases continuously from the upstream to the downstream of the flow path. This may also be the case.

[0011] The substance sensor comprises: a vibration beam that closes a portion of the through hole; a sensitive film formed on the vibrating beam so as to face the upstream of the gas; a signal output unit capable of outputting a signal indicating a change in the vibration state of the vibrating beam due to adhesion of the target substance contained in the gas passing through the through hole to the sensitive film; Equipped with This may also be the case.

[0012] The size of the vibrating beam is specified so that the resonance frequency of the vibrating beam is uniform between the through holes, regardless of the size of the cross section of the through hole perpendicular to the direction in which the gas flows. This may also be the case.

[0013] the substrates are laminated such that the through-holes in which the substance sensors are provided and the through-holes in which the substance sensors are not provided are alternately connected to each other to form the flow path; This may also be the case.

[0014] The substrates are stacked such that the positions of at least a portion of the outer sides of adjacent substrates are different from each other. This may also be the case.

[0015] The outer shapes, orientations or sizes of the adjacent substrates are different from each other; This may also be the case.

[0016] The substrates are stacked in descending order of outer diameter. This may also be the case.

[0017] The shape of a cross section perpendicular to the direction in which the gas flows in the through hole is circular or polygonal. This may also be the case.

[0018] The boundary line between the edge of the through hole and the vibration beam is linear. This may also be the case.

[0019] A plurality of the substance sensors each detecting a different substance are arranged in the same flow path. This may also be the case.

[0020] A flow control unit is provided which draws in the gas from the outside and outputs the gas to the flow path while keeping the flow of the gas constant. This may also be the case.

[0021] A plurality of branch paths are provided for dividing the gas output from the flow control section into gases having the same flow rate and flow velocity and sending the gases to the respective flow paths. This may also be the case. Effect of the Invention

[0022] According to the present invention, a substrate is provided with a plurality of through holes, and a substance sensor for detecting a target substance is provided in at least one of the through holes. The plurality of substance sensors are then arranged in a gas flow path formed by stacking substrates. This allows the number of flow paths to be reduced compared to the number of substance sensors, thereby reducing the area required for arranging the plurality of substance sensors. [Brief description of the drawings]

[0023] [Figure 1] 1A is a cross-sectional view of a substrate constituting the substance detection system according to the first embodiment of the present invention, and FIG. 1B is a cross-sectional view showing the configuration of stacked substrates in the substance detection system according to the first embodiment of the present invention. [Diagram 2] 1A is a perspective view of a substance sensor with a through-hole partially removed in a substance detection system according to a second embodiment of the present invention, and FIG. 1B is a perspective view of the substance sensor of FIG. [Diagram 3] FIG. 11 is a perspective view showing a configuration of stacked substrates in a substance detection system according to a second embodiment of the present invention. [Figure 4] (A) is a diagram showing a case where the vibrating beam is a cantilever beam, (B) is a diagram showing a case where the vibrating beam is a doubly supported beam, and (C) is a diagram showing a case where the vibrating beam is fixed to the edge of the through hole at three points. [Diagram 5] 10(A) is a perspective view of stacked substrates in a substance detection system according to a third embodiment of the present invention, and FIG. 10(B) is a perspective view of a substrate constituting the substance detection system of FIG. [Figure 6] 11A and 11B are diagrams showing other examples of substrates to be stacked. [Figure 7]10(A) is a perspective view of stacked substrates in a substance detection system according to a fourth embodiment of the present invention, and FIG. 10(B) is a view of a through-hole in the substance detection system of FIG. [Figure 8] FIG. 11 is a perspective view of a substrate constituting a substance detection system according to a fifth embodiment of the present invention. [Figure 9] 13(A) is a perspective view of stacked substrates in a substance detection system according to a sixth embodiment of the present invention, and (B) is a perspective view of a substrate constituting the substance detection system of (A). [Figure 10] 13(A) is a perspective view of a through-hole provided in a substrate in a substance detection system according to a seventh embodiment of the present invention, and (B) is a top view of a substrate provided with a through-hole, which is a modification of (A). [Figure 11] FIG. 13 is an exploded perspective view of a substance detection system according to an eighth embodiment of the present invention. [Figure 12] FIG. 13 is a cross-sectional perspective view of a substance detection system according to an eighth embodiment of the present invention. [Figure 13] FIG. 2 is an exploded cross-sectional perspective view of the airflow straightening unit with a portion thereof removed. [Figure 14] FIG. 4 is a top view of a second rectification substrate. [Figure 15] 15 is a cross-sectional view taken along line XV-XV of FIG. 14. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In each drawing, the same or equivalent parts are designated by the same reference numerals.

[0025] First embodiment First, a first embodiment of the present invention will be described. As shown in Fig. 1(A), a substance detection system 1 according to the first embodiment includes a substrate 2. Three substrates 2 are shown in Fig. 1(A). However, the substance detection system 1 may include only two substrates 2, or may include three or more substrates 2. That is, the substance detection system 1 includes a plurality of substrates 2.

[0026] The substrate 2 is manufactured, for example, by using MEMS (Micro Electro Mechanical Systems), which is a semiconductor manufacturing technology that realizes microfabrication from an SOI (Silicon on Insulator) substrate. Note that the substrate 2 is not limited to an SOI substrate as long as the substance sensor 4 described later can be mounted on the substrate 2.

[0027] A through hole 3 is provided in the substrate 2. In Fig. 1(A), two through holes 3 are provided per substrate 2. However, three or more through holes 3 may be provided in the substrate 2. That is, the substrate 2 has a plurality of through holes 3 provided therein.

[0028] The through-hole 3 has a size that allows the gas G to pass through. In the substrate 2, a substance sensor 4 is provided in at least one of the through-holes 3. In Fig. 1(A), two through-holes 3 are formed in the substrate 2, and a substance sensor 4 is mounted in one of the through-holes 3.

[0029] The substance sensor 4 detects any one of target substances M1, M2, and M3 contained in the gas G passing through the through hole 3. That is, in this embodiment, there are three types of target substances to be detected, M1 to M3. Three substance sensors 4 are provided in the substance detection system 1. The substance sensor 4 provided on the first substrate 2 as viewed from the +z side detects the target substance M1. The substance sensor 4 provided on the second substrate 2 as viewed from the +z side detects the target substance M2. Furthermore, the substance sensor 4 provided on the third substrate 2 as viewed from the +z side detects the target substance M3. In the following, the target substances M1 to M3 may be collectively referred to as the target substance M as necessary.

[0030] The substance sensor 4 has a beam-shaped member that adsorbs the target substance M. The beam-shaped member extends from the edge of the through-hole 3 so as to block a part of the through-hole 3. The beam-shaped member changes its vibration frequency when the target substance M is adsorbed. The substance sensor 4 detects the target substance M based on the change in vibration frequency.

[0031] The positional relationship of the arrangement positions of the multiple through holes 3 is the same between the substrates 2. As shown in Fig. 1(B), the substrates 2 are stacked in their thickness direction so that the through holes 3 communicate with each other. This forms multiple flow paths 5 for the gas G that extend in the stacking direction of the substrates 2.

[0032] 1(B), two through holes 3 provided in each substrate 2 are connected to form two flow paths 5. One of the flow paths 5 is provided with two substance sensors 4 (two stages). That is, in the substance detection system 1, a plurality of substance sensors 4 are arranged in at least one of the flow paths 5.

[0033] Gas G flows into flow channel 5 from the opening on the +z side, flows in the -z direction within flow channel 5, and flows out from the opening on the -z side. When gas G contains a target substance M, the target substance M adheres to the substance sensor 4, and the target substance M is detected by the substance sensor 4. In the following embodiment, the direction in which gas G flows in flow channel 5 is the -z direction.

[0034] In this manner, the substance detection system 1 is provided with a substance sensor 4 that detects the target substance M1, a substance sensor 4 that detects the target substance M2, and a substance sensor 4 that detects the target substance M3. The substance sensor 4 that detects the target substance M1 and the substance sensor 4 that detects the target substance M3 are provided in the same flow path 5. Therefore, in this substance detection system 1, the number of flow paths 5 that detect the three types of target substances M1 to M3 can be two, rather than the same number as the number of substance sensors 4, which is three.

[0035] As described above, according to the substance detection system 1 of the present embodiment, the substrate 2 is provided with a plurality of through holes 3, and at least one of the through holes 3 is provided with a substance sensor 4 for detecting a target substance M. The plurality of substance sensors 4 are arranged in a flow path 5 for gas G formed by stacking the substrates 2. This allows the number of flow paths 5 to be reduced relative to the number of substance sensors 4, and therefore the area of ​​the region required for arranging the plurality of substance sensors 4 can be reduced.

[0036] In this embodiment, a plurality of substance sensors 4 that detect different target substances M1 and M3 are arranged in the same flow path 5. This makes it possible to prevent a decrease in the detection level of the target substance M3 in the substance sensor 4 downstream of the flow of gas G in the flow path 5. However, the present invention is not limited to this. Substance sensors 4 that detect the same type of target substance (e.g., M1) may be arranged in the same flow path 5. In this way, the target substance M1 that has not been adsorbed by the upstream substance sensor 4 can be adsorbed by the further downstream substance sensor 4, thereby improving the detection ability of the target substance M1.

[0037] Embodiment 2 Next, a second embodiment of the present invention will be described. The overall configuration of a substance detection system 1 according to this embodiment is the same as the configuration shown in Fig. 1. The substance detection system 1 according to this embodiment is characterized by a substance sensor 4 provided in a through hole 3 of a substrate 2.

[0038] 2(A), the substance sensor 4 constituting the substance detection system 1 according to this embodiment includes a vibrating beam 6. The vibrating beam 6 includes a straight plate-shaped drive beam 6A and a straight plate-shaped detection beam 6B. The drive beam 6A and the detection beam 6B extend from an edge of the through hole 3 toward the opposing edge, and are fixed to the edges of the through hole 3 at both ends.

[0039] The drive beam 6A and the detection beam 6B are orthogonal to each other and connected at the center. The direction in which the drive beam 6A extends is the x' direction, and the direction in which the detection beam 6B extends is the y' direction. The z' direction coincides with the z direction in FIG. 1. In this embodiment, the width of the drive beam 6A, that is, the size of the drive beam 6A in the y'-axis direction, is larger than the width of the detection beam 6B, that is, the size of the detection beam 6B in the x'-axis direction. In addition, the width of the drive electrode 8 and the width of the detection electrode 9 are sized according to the width of the drive beam 6A and the width of the detection beam 6B. However, the present invention is not limited to this. The width of the drive beam 6A and the width of the detection beam 6B may be the same, or the width of the drive beam 6A may be smaller than the width of the detection beam 6B.

[0040] The vibrating beam 6 does not cover the entire through hole 3, but covers a part of the through hole 3. Therefore, the vibrating beam 6 is formed so that the gas G does not remain in the through hole 3 and the gas G can easily pass through the through hole 3.

[0041] A sensitive film 7 is formed on the +z' side surface of the vibrating beam 6. The sensitive film 7 is formed so as to face the flow of the gas G containing the target substance M, i.e., so as to face the upstream of the gas G, so that the sensitive film 7 can easily adsorb the target substance M contained in the gas. The sensitive film 7 adsorbs the target substance M. The material of the sensitive film 7 differs depending on the type of target substance M to be adsorbed. The sensitive film 7 may be formed on a part of the vibrating beam 6, but may also be formed on the entire vibrating beam 6. The larger the area on which the sensitive film 7 is formed, the easier it is to adsorb the target substance M contained in the gas G.

[0042] The target substance M is, for example, a substance contained in the air among a group of chemical substances (odor factors) that constitute an odor. Examples of the target substance M include odor-causing substances that have a specific odor, such as ammonia, mercaptan, aldehyde, hydrogen sulfide, and amine. After the target substance M that constitutes the odor-causing substance is adsorbed by the sensitive film 7, when the concentration of the target substance M in the gas G decreases, the adsorbed target substance M is separated. This makes it possible to reuse the sensitive film 7.

[0043] The vibrating beam 6 is configured so that the vibration frequency (e.g., resonant frequency) changes when the target substance M is adsorbed to the sensitive film 7. In order to prevent the vibration of the vibrating beam 6 from being affected by the vibration of the device in which the substance detection system 1 is incorporated, it is preferable that the vibration frequency of the vibrating beam 6 is set higher and different from the vibration frequency of the device.

[0044] A grounded lower electrode layer is formed on a part of the surface on the -z' side of the vibrating beam 6. The lower electrode layer may be formed entirely on the surface on the -z' side of the vibrating beam 6. A piezoelectric element layer is formed on the lower electrode layer. As shown in FIG. 2(B), a pair of driving electrodes 8 are formed on the piezoelectric element layer at both ends of the driving beam 6A, and a pair of detection electrodes 9 are formed on both ends of the detection beam 6B. In addition, a driving signal line 21, an interelectrode signal line 22, and a detection signal line 23 are formed on the substrate 2 and the vibrating beam 6 as a circuit on the substrate 2. The driving signal line 21 is connected to the driving electrode 8. In addition, the interelectrode signal line 22 connects the detection electrodes 9 to each other on the detection beam 6B. The detection signal line 23 is connected to one of the detection electrodes 9.

[0045] A voltage signal for driving the vibrating beam 6, i.e., a drive signal, is applied to the drive electrode 8 via a drive signal line 21. The vibrating beam 6 vibrates due to the drive signal applied to the drive electrode 8. A voltage signal from one detection electrode 9 generated by the vibration of the vibrating beam 6, i.e., a detection signal, is sent to the other detection electrode 9 via an interelectrode signal line 22. Then, the voltage signals from the pair of detection electrodes 9 are output together via a detection signal line 23.

[0046] Alternatively, the driving electrodes 8 may be connected to each other by inter-electrode signal lines 22, and the driving signal lines 21 may be connected to one of the driving electrodes 8. In this case, the detection electrodes 9 are each connected to the detection signal lines 23, and each output a detection signal to the detection signal line 23. In this case, one of the detection electrodes 9 may be connected to the detection signal line 23, and the other detection electrode 9 may be used as a dummy and not connected to the detection signal line 23.

[0047] Thus, the substance sensor 4 comprises a vibrating beam 6 that blocks part of the through hole 3, a sensitive film 7 formed on the vibrating beam 6 facing upstream of the gas G, and a signal output section (detection electrode 9) capable of outputting a signal indicating a change in the vibration state of the vibrating beam 6 due to adhesion of a target substance M contained in the gas G passing through the through hole 3 to the sensitive film 7.

[0048] The width of the drive beam 6A is greater than the width of the detection beam 6B. The width of the drive electrode 8 is greater than the width of the detection electrode 9. This increases the force that vibrates the vibrating beam 6 and increases the vibration displacement of the detection beam 6B, thereby improving the detection accuracy. The drive electrode 8 and the detection electrode 9 may be formed across the vibrating beam 6 and the edge of the through hole 3. The stress generated by the vibration of the vibrating beam 6 is maximum between the edge of the through hole 3 and the vibrating beam 6, so that the drive force of the vibrating beam 6 and the detection level of the detection signal can be increased.

[0049] 3, in the substance detection system 1 according to the present embodiment, ten through-holes 3 are formed in the substrate 2, and a substance sensor 4 is provided in each of the through-holes 3. This makes it possible to increase the number of substance sensors 4 to 30. By providing a substance sensor 4 in all of the through-holes 3 provided in all of the substrates 2 in this manner, it is possible to maximize the number of types of target substances M to be detected.

[0050] Furthermore, in this substance detection system 1, no substrate on which a substance sensor 4 is not formed is sandwiched between the substrates 2. This allows the substance sensors 4 to be disposed close to each other. This not only increases the detection sensitivity and reduces the variation in the detection level, but also allows the entire device to be made smaller.

[0051] In this embodiment, the vibrating beam 6 is configured such that two doubly supported beams, a drive beam 6A and a detection beam 6B, are connected at the center. In this way, the entire vibrating beam 6 is vibrated by one drive beam 6A, and the vibration of the vibrating beam 6 is detected by the other detection beam 6B, so that the wiring of the circuit that drives the vibrating beam 6 and the wiring of the circuit that detects the vibration of the vibrating beam 6 can be reduced.

[0052] In this embodiment, the drive beam 6A and the detection beam 6B are perpendicular to each other. This makes it possible to prevent the detection beam 6B from interfering with the vibration caused by the drive beam 6A. However, the drive beam 6A and the detection beam 6B do not need to be perpendicular to each other, and may intersect each other.

[0053] In the above embodiment, the drive electrodes 8 are provided at both ends of the drive beam 6A, and the detection electrodes 9 are provided at both ends of the detection beam 6B. However, the present invention is not limited to this. In the material detection system 1, the drive electrode 8 may be provided at one end of the drive beam 6A, and the detection electrode 9 may be provided at one end of the detection beam 6B. In other words, the material detection system 1 may not have the drive electrode 8 provided at the other end of the drive beam 6A, and may not have the detection electrode 9 provided at the other end of the detection beam 6B.

[0054] In addition, in this embodiment, the vibrating beam 6 constituting the material sensor 4 is a cross-shaped beam whose four ends are fixed to the edge of the through hole 3. However, the present invention is not limited to this. As shown in FIG. 4(A), the vibrating beam 6 may be a cantilever beam. In this case, it is desirable to increase the width or thickness of the vibrating beam 6 to increase the vibration frequency of the vibrating beam 6. In this case, the driving electrode 8 and the detection electrode 9 may be provided in parallel at one end of the vibrating beam 6 (the end fixed to the edge of the through hole 3). In addition, one of the driving electrode 8 and the detection electrode 9 may be provided at one end of the vibrating beam 6, and the other electrode may be provided at the other end of the vibrating beam 6. The free end of the vibrating beam 6 may extend to the vicinity of the edge of the through hole 3.

[0055] 4(B), a vibrating beam 6 fixed to the edge of the through hole 3 at two points may be used. In this case, the driving electrode 8 and the detection electrode 9 may be provided at both ends of the vibrating beam 6. The driving electrode 8 may be provided at one end of the vibrating beam 6, and the detection electrode 9 may be provided at the other end of the vibrating beam 6. One of the driving electrode 8 and the detection electrode 9 may be provided at one end of the vibrating beam 6, and the other may be provided in the center of the vibrating beam 6.

[0056] Also, as shown in FIG. 4(C), a vibrating beam 6 fixed to the edge of the through hole 3 at three points may be used. In this case, a pair of driving electrodes 8 may be arranged at two ends of the vibrating beam 6, and a detection electrode 9 may be arranged at the remaining end. The positions of the driving electrode 8 and the detection electrode 9 may be interchanged. Furthermore, one of the driving electrode 8 and the detection electrode 9 may be provided at one end of the vibrating beam 6, and the other may be provided in the center of the vibrating beam 6.

[0057] In addition, in this embodiment, the sensitive film 7 is formed on the +z' side surface of the vibrating beam 6, and the driving electrode 8 and the detection electrode 9 are formed on the -z' side surface. However, the present invention is not limited to this. The sensitive film 7 may be formed on the -z' side surface together with the driving electrode 8 and the detection electrode 9. In this case, the sensitive film 7 may be formed in the portion where the driving electrode 8 and the detection electrode 9 are not formed. Also, an insulating layer may be formed on the driving electrode 8 and the detection electrode 9, and the sensitive film 7 may be formed on the insulating layer.

[0058] Third embodiment Next, a third embodiment of the present invention will be described. As shown in Fig. 5(A) and Fig. 5(B), a substance detection system 1 according to this embodiment is the same as the substance detection system 1 according to the second embodiment in that it is configured by stacking three substrates 2.

[0059] As shown in FIG. 5(A), in the substance detection system 1 according to the present embodiment, the substrates 2 are stacked such that the positions of at least a portion of the outer edges of adjacent substrates 2 differ from each other.

[0060] More specifically, as shown in Fig. 5(B), among the stacked substrates 2, the outer shapes, orientations, or sizes of adjacent substrates 2 are different from each other. Specifically, compared to the outer shape of the substrate 2 on the -z side, the outer shape of the central substrate 2 has a shape that protrudes on both sides in the x-axis direction. These substrates 2 have different shapes and sizes. Due to the difference in shape and size, exposed portions 2a that are exposed outward are provided on both sides in the x-axis direction of the central substrate 2.

[0061] In addition, the longitudinal direction of the substrate 2 on the -z side is the y-axis direction, which is different from the longitudinal direction of the central substrate 2. These substrates 2 have different orientations. Due to the difference in orientation, exposed portions 2a that are exposed to the outside are formed on both sides in the y-axis direction of the substrate 2 on the -z side.

[0062] In each substrate 2, the exposed portion 2a may be provided with an electrode for connecting the drive signal line 21 to a signal source, and an electrode for connecting the detection signal line 23 to a detection device (not shown). In addition, the exposed portion 2a may be provided with a fixing portion for fixing the substrate 2 to a housing.

[0063] In this case, the substrates 2 may be stacked in descending order of outer shape, as shown in Fig. 6. In this way, the exposed portion 2a exposed on the -z side can be formed in all the substrates 2, and the electrodes can be formed on the same -z side. Also, as shown in Fig. 6, it is possible to form the exposed portion 2a only on one side in the x-axis direction, the -x side, and align the positions at which the electrodes are formed on all the substrates 2.

[0064] Fourth embodiment Next, a fourth embodiment of the present invention will be described. As shown in Fig. 7(A), a substance detection system 1 according to this embodiment is configured by stacking three substrates 2. In Fig. 7(A), the flow of gas G in a flow path 5 is from the bottom to the top of the page.

[0065] In the substance detection system 1 according to the present embodiment, the size of a cross section perpendicular to the flow direction of the gas G in the through-hole 3 is different between adjacent substrates 2. More specifically, the size of the cross section of the through-hole 3 is larger in the substrate 2 downstream of the flow path 5 than in the substrate 2 upstream of the flow path 5.

[0066] By increasing the cross section from the upstream to the downstream of the flow path 5, the flow of the gas G in the downstream can be slowed down, making it easier for the target substance M to adhere to the substance sensor 4, and improving the detection accuracy.

[0067] In the laminated substrates 2, the width of the vibrating beam 6 increases as the cross section of the through hole 3 increases. Specifically, regardless of the cross section of the through hole 3, the width of the vibrating beam 6 is specified so that the resonant frequency of the vibrating beam 6 is uniform.

[0068] In order to make the resonance frequency of the vibrating beam 6 uniform, the thickness of the vibrating beam 6 (the size in the thickness direction of the substrate 2) may be specified.

[0069] In this way, when the size of the through hole 3 changes, the length of the vibrating beam 6 increases and the resonant frequency decreases. Therefore, the length, width, and thickness of the vibrating beam 6 can be determined so that the resonant frequency of the vibrating beam 6 is uniform. In other words, regardless of the size of the cross section at the through hole 3, the size of the vibrating beam 6 is specified so that the resonant frequency of the vibrating beam 6 is the same between the through holes 3.

[0070] Furthermore, during the manufacture of the substance detection system 1, a process of stacking the substrates 2 is performed. In this process, as shown in Fig. 7(B), the edges of the through holes 3 of all the substrates 2 are visible from the -z side, so that the substrates 2 can be aligned while checking that the through holes 3 of the three substrates 2 overlap concentrically. This allows the substrates 2 to be stacked in a state in which they are accurately aligned.

[0071] Fifth embodiment Next, a fifth embodiment of the present invention will be described. As shown in Fig. 8, a substance detection system 1 according to this embodiment is configured by stacking three substrates 2.

[0072] In this embodiment, the flow of gas G in the flow channel 5 is from the top to the bottom of the page. In this embodiment, a sensitive film 7 is provided on the +z side surface of the vibrating beam 6 of the substance sensor 4.

[0073] In the substance detection system 1 according to the present embodiment, the size of a cross section perpendicular to the flow direction of the gas G in the through-hole 3 is different between adjacent substrates 2. More specifically, the size of the cross section of the through-hole 3 is larger in the substrate 2 downstream of the flow path 5 than in the substrate 2 upstream of the flow path 5.

[0074] Furthermore, in this embodiment, the size of the cross section of the flow path 5 perpendicular to the flow direction of the gas G increases continuously from the upstream to the downstream of the flow path 5. That is, the inner sides of the communicating through holes 3 are continuously connected so that there are no irregularities at the joints between the inner sides. In this way, obstacles to the flow of the gas G in the flow path 5 are minimized, and the flow can be made uniform.

[0075] In the substance detection system 1, the size of the cross section of the flow path 5 formed by the through-holes 3 may be gradually reduced from the upstream to the downstream of the flow of the gas G, so long as this increases the amount of target substance M adhering to the sensitive film 7 and improves the detection accuracy. The shape of the flow path 5 can be specified so as to increase the detection sensitivity according to the characteristics of the target substance M to be detected.

[0076] Sixth embodiment Next, a sixth embodiment of the present invention will be described. In the substance detection system 1 shown in Fig. 8, substance sensors 4 are provided in all of the through-holes 3. In contrast, as shown in Fig. 9(A) and Fig. 9(B), in the substance detection system 1 according to this embodiment, the substrates 2 are stacked such that the through-holes 3 provided with the substance sensors 4 and the through-holes 3 not provided with the substance sensors 4 are alternately connected to each other to form a flow path 5.

[0077] By sandwiching the through-holes 3 without the substance sensors 4, it is possible to prevent the concentration of the target substance M from decreasing and the detection sensitivity from decreasing due to the substance sensors 4 being arranged too densely. This is because an excessively dense arrangement of the substance sensors 4 may cause, for example, the upstream vibrating beam 6 to change the flow of the gas G, making it difficult for the gas G to hit the sensitive film 7 on the downstream vibrating beam 6.

[0078] In the present embodiment, the substance sensor 4 is provided every other through-hole 3 constituting the flow path 5. However, the present invention is not limited to this. It is sufficient that at least one through-hole 3 is not provided with a substance sensor 4.

[0079] Seventh embodiment Next, a seventh embodiment of the present invention will be described. In the substance detection system 1 according to the above embodiment, the shape of a cross section perpendicular to the direction in which the gas G flows in the through-hole 3 is circular. In contrast, as shown in Fig. 10(A), in the substance detection system 1 according to the present embodiment, the shape of a cross section perpendicular to the direction in which the gas G flows in the through-hole 3 is rectangular.

[0080] 10(B), in the substance detection system 1 according to the above embodiment, the cross-sectional shape of the through-hole 3 perpendicular to the flow direction of the gas G is an octagon. In this manner, the cross-sectional shape of the through-hole 3 can be a polygon. By making the cross-sectional shape of the through-hole 3 a polygon, the through-holes 3 in the substrate 2 can be arranged closer to each other than in the case of a circle.

[0081] In this embodiment, the boundary between the vibrating beam 6 and the edge of the through hole 3 is linear. By making the boundary a straight line, local stress concentration near the boundary can be prevented, and the vibration state of the vibrating beam 6 can be made with less distortion.

[0082] Furthermore, if the shape of the cross section perpendicular to the flow direction of the gas G in the through-hole 3 is changed from a circle to a polygon inscribed in the circle, the size of the cross section of the through-hole 3 can be reduced. This makes it easier for the gas G to strike the sensitive film 7 on the vibrating beam 6. Furthermore, the mechanical strength of the substrate 2 can be increased.

[0083] Embodiment 8 Next, an eighth embodiment of the present invention will be described. As shown in Fig. 11 and Fig. 12, a substance detection system 1 according to this embodiment includes a sensor unit 10. The sensor unit 10 has a plurality of flow paths 5 formed by stacking substrates 2 in the above first to seventh embodiments.

[0084] The substance detection system 1 further includes a flow control section 11, a flow rectification section 12 having a plurality of branch paths, and housings 13A and 13B.

[0085] The flow control section 11 is disposed at the most upstream position in the flow of the gas G. The flow control section 11 is a pump or a blower that draws in and blows out the gas G. In this embodiment, the flow control section 11 is disposed upstream of the rectification section 12 in the flow of the gas G. The flow control section 11 causes the gas G to flow into the rectification section 12. In this embodiment, the flow control section 11 blows the flowing gas G into the rectification section 12.

[0086] The flow control unit 11 can control the start and end of the drive. The drive time of the flow control unit 11 can be constant at the time of detection.

[0087] The rectifier 12 is provided between the flow control section 11 and the sensor section 10 in the flow of the gas G. The gas G blown out from the flow control section 11 flows into the rectifier 12. The rectifier 12 uniformly suppresses the flow of the gas that has flowed in and sends it to each of the flow paths 5 of the multiple sensor sections 10. Here, "uniformly suppressing" refers to restricting the flow of the gas G so that the flows of the gas G between the flow paths 5 can be considered to be uniform or equal to each other. The rectifier 12 rectifies the flow of the gas G so that the flow rate and flow speed of the gas G sent to each of the multiple flow paths 5 are uniform.

[0088] 13, 14, and 15, the rectification unit 12 includes a first rectification substrate 40 and a second rectification substrate 41. The first rectification substrate 40 is provided with an inflow hole 31. The second rectification substrate 41 is provided with a branch path 32 and an outflow hole 33.

[0089] As shown in Fig. 13, the most upstream inlet 31 is a through hole. One end of the inlet 31, i.e., the upstream end, is arranged to align with the outlet of the flow control section 11. As shown in Fig. 15, the inlet 31 receives the gas G blown out from the flow control section 11.

[0090] As shown in FIG. 14 and FIG. 15, the branch path 32 is provided with two flow paths 32a, both ends 32b, and a flow path 32c. The two flow paths 32a extend parallel to each other. The center of each of the flow paths 32a communicates with the inlet hole 31. The gas G blown out from the flow control section 11 flows from the inlet hole 31 into the flow path 32a. The gas G flows toward both ends 32b of the flow path 32a, and then flows into the flow path 32c branching from both ends 32b, and reaches the end of the flow path 32c. The end of the flow path 32c communicates with the outlet hole 33, and the gas G is sent to the flow path 5 of the sensor section 10 through the outlet hole 33.

[0091] The shape of the branch passage 32 is specified so that the flow rate and flow speed of the gas G supplied to each of the multiple outflow holes 33 are the same. Some of the outflow holes 33 are provided at the junction of two flow paths 32c. The width of the two flow paths 32c provided toward the junction is half the width of the other flow paths 32c. This makes the flow rate of the gas G flowing through all of the outflow holes 33 uniform.

[0092] The outflow hole 33 is provided for each flow path 5. The outflow hole 33 communicates between the branch path 32 and the flow path 5. Each of the plurality of outflow holes 33 has the same shape and size.

[0093] The operation of the substance detection system 1 described above is the same as that of the substance detection system 1 according to the first embodiment. First, the power supply of the flow control unit 11 is turned on to start blowing the gas G. The gas G flowing in from the inlet 13a of the housing 13A is drawn into the flow control unit 11, and the flow control unit 11 causes the flowing in gas G to flow into the inlet 31 of the rectification unit 12. The gas G supplied to the inlet 31 flows into the branch path 32.

[0094] In the flow path 32a of the branch path 32, the flow direction of the gas G is changed, and the gas G advances to both end portions 32b. The gas G that has advanced to both end portions 32b further advances through the flow path 32c and reaches the outflow holes 33. That is, the gas G branches out while its flow rate is suppressed by the flow path 32a, and flows into each outflow hole 33 so that the flow rate and flow velocity are the same among the outflow holes 33.

[0095] The gas G flowing into each outlet hole 33 is supplied to the flow path 5 of the sensor unit 10 at the same flow rate and at the same flow rate. The gas G supplied to the flow path 5 hits the sensitive film 7 and is then discharged from the flow path 5.

[0096] In this way, with the substance detection system 1 of this embodiment, gas G can be applied to each sensitive film 7 at a uniform flow rate and flow speed, making it possible to accurately measure the ratio of reaction values ​​at each sensitive film 7.

[0097] Housings 13A and 13B are the casings of the substance detection system 1. Housing 13A is provided with an inlet 13a for gas G. A replaceable filter is attached to inlet 13a. This filter prevents foreign matter from entering as gas G flows in. Housing 13B is provided with an outlet 13b for gas G. The substance detection system 1 according to this embodiment includes an internal frame 15. The internal frame 15 and housing 13B hold the rectifying unit 12 and the sensor unit 10 therebetween.

[0098] Furthermore, in this embodiment, it is possible to detect multiple target substances M contained in the gas G. In this way, it is also possible to detect multiple odors contained in the gas G. Since the flow rate and flow speed of the gas G flowing through each sensitive membrane 7 are uniform, it becomes possible to accurately determine the ratio of odors contained in the gas G based on the detected substances.

[0099] In addition, as in this embodiment, the flow straightening unit 12 can not only disperse the flow of the gas G, but also provide a joining portion. In any case, it is sufficient that the flow of the gas G flowing into each flow path 5 of the sensor unit 10 is uniform. The flow paths of the flow straightening unit 12 can be determined based on the results of a flow simulation of the gas G.

[0100] As described above, the flow control unit 11 draws in the gas G from the outside and sends the gas to the rectification unit 12 in order to output the gas G to the flow path 5 while keeping the flow of the gas G constant. The multiple branch paths 32 in the rectification unit 12 divide the gas G output from the flow control unit 11 into gases G with the same flow rate and flow velocity and send them to the respective flow paths 5.

[0101] In this embodiment, the flow control section 11 is provided upstream of the rectification section 12 and the sensor section 10. However, the present invention is not limited to this. The flow control section 11 may be provided downstream of the rectification section 12 and the sensor section 10, or may be provided both upstream and downstream.

[0102] Furthermore, the substance detection system 1 may be provided with the flow rectifying unit 12 instead of the flow control unit 11. Alternatively, the flow control unit 11 may be provided without providing the flow rectifying unit 12.

[0103] In the above embodiment, the substrate 2 is a rectangular flat plate. However, the present invention is not limited to this. The outer shape of the substrate 2 may be a disk shape or a polygonal shape. The substrate 2 may have a convex portion or a concave portion on its outer shape.

[0104] Various embodiments and modifications of the present invention are possible without departing from the broad spirit and scope of the present invention. The above-described embodiments are for the purpose of explaining the present invention and do not limit the scope of the present invention. That is, the scope of the present invention is indicated by the claims, not the embodiments. Various modifications made within the scope of the claims and the scope of the invention equivalent thereto are considered to be within the scope of the present invention. [Industrial Applicability]

[0105] The present invention can be applied to detect substances contained in gas. [Explanation of symbols]

[0106] 1 substance detection system, 2 substrate, 2a exposed portion, 3 through hole, 4 substance sensor, 5 flow path, 6 vibration beam, 6A driving beam, 6B detection beam, 7 sensitive membrane, 8 driving electrode, 9 detection electrode, 10 sensor portion, 11 flow control portion, 12 rectification portion, 13A, 13B housing, 13a inlet, 13b outlet, 15 internal frame, 21 driving signal line, 22 inter-electrode signal line, 23 detection signal line, 31 inlet hole, 32 branch path, 32a flow path, 32b both ends, 32c flow path, 33 outlet hole, 40 first rectification substrate, 41 second rectification substrate, G gas, M1, M2, M3 target substance

Claims

1. a substrate including a plurality of through holes through which a gas flows, at least one of the through holes being provided with a substance sensor for detecting a target substance contained in the gas passing through the through hole; The substrates are stacked such that the through holes are in communication with each other, thereby forming a plurality of gas flow paths extending in a stacking direction of the substrates, A plurality of the substance sensors are arranged in at least one of the flow paths. Material detection systems.

2. The cross-sectional size of the through hole perpendicular to the gas flow direction is different between adjacent substrates. The substance detection system of claim 1 .

3. a cross-sectional size of the through hole is larger in the substrate downstream of the flow path than in the substrate upstream of the flow path; The substance detection system of claim 2 .

4. A size of a cross section of the flow path perpendicular to a direction in which the gas flows increases continuously from the upstream to the downstream of the flow path. The substance detection system of claim 3 .

5. The substance sensor comprises: a vibration beam that closes a portion of the through hole; a sensitive film formed on the vibrating beam so as to face the upstream of the gas; a signal output unit capable of outputting a signal indicating a change in the vibration state of the vibrating beam due to adhesion of the target substance contained in the gas passing through the through hole to the sensitive film; Equipped with A substance detection system according to any one of claims 1 to 4.

6. The size of the vibrating beam is specified so that the resonance frequency of the vibrating beam is uniform between the through holes, regardless of the size of the cross section of the through hole perpendicular to the direction in which the gas flows. The substance detection system of claim 5 .

7. the substrates are laminated such that the through-holes in which the substance sensors are provided and the through-holes in which the substance sensors are not provided are alternately connected to each other to form the flow path; A substance detection system according to any one of claims 1 to 6.

8. The substrates are stacked such that the positions of at least a portion of the outer sides of adjacent substrates are different from each other. A substance detection system according to any one of claims 1 to 7.

9. The outer shapes, orientations or sizes of the adjacent substrates are different from each other; The substance detection system of claim 8.

10. The substrates are stacked in descending order of outer diameter.

10. The substance detection system of claim 9.

11. The shape of a cross section perpendicular to the direction in which the gas flows in the through hole is circular or polygonal. A substance detection system according to any one of claims 1 to 10.

12. The boundary line between the edge of the through hole and the vibration beam is linear.

7. A substance detection system according to claim 5 or 6.

13. A plurality of the substance sensors each detecting a different substance are arranged in the same flow path. A substance detection system according to any one of claims 1 to 12.

14. A flow control unit is provided which draws in the gas from the outside and outputs the gas to the flow path while keeping the flow of the gas constant. A substance detection system according to any one of claims 1 to 13.

15. A plurality of branch paths are provided for dividing the gas output from the flow control section into gases having the same flow rate and flow velocity and sending the gases to the respective flow paths.

15. The material detection system of claim 14.

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