Swinging table

Abstract

To provide a shaking table that facilitates lifetime calculation, can perform accurate positioning, and can appropriately perform high-speed operation.SOLUTION: A shaking table comprises: a base part; a direct acting mechanism including a rail attached to the base part, and a slider attached to the rail so as to be relatively movable; a drive source for linearly reciprocating the slider; a first supporting part attached to the slider, and to be linearly reciprocated together with the slider; a first rolling bearing attached to the first supporting part; a table part to which power from the drive source is transmitted, and capable of performing shaking motion; a second supporting part for supporting the table part; a second rolling bearing attached to the second supporting part; and an eccentric shaft including a first shaft part, and a second shaft part arranged at a position eccentric with respect to the first shaft part, and in which the first shaft part is supported by the first rolling bearing, and the second shaft part is supported by the second rolling bearing.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present disclosure relates to a rocking table. [Background technology]

[0002] A sliding device consisting of a base body and a sliding body is known (see, for example, Patent Document 1). The sliding device disclosed in Patent Document 1 uses a meshing body such as a worm or pinion as a drive system. The rack teeth that mesh with the meshing body are formed on the first sliding member side fixed to the base body or the second sliding member side fixed to the sliding body. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2001-99254 A Summary of the Invention [Problem to be solved by the invention]

[0004] In a oscillating table (e.g., a goniostage), the conventional drive system using a worm gear has the following problems. That is, the drive system using a worm gear uses a so-called sliding mechanism for driving, making it difficult to calculate the lifespan of the device. Also, because the device is configured with a gap, backlash occurs, making it extremely difficult to accurately position the table. Furthermore, there is a limit to high-speed operation.

[0005] Therefore, one object is to provide an oscillating table that allows easy calculation of the service life, enables accurate positioning of the table portion, and allows appropriate high-speed operation. [Means for solving the problem]

[0006] An oscillating table according to the present disclosure comprises a base portion, a linear motion mechanism including a rail attached to the base portion and a slider attached so as to be movable relative to the rail, a drive source for linearly reciprocating the slider, a first support portion attached to the slider and performing linear reciprocating motion together with the slider, a first rolling bearing attached to the first support portion, a table portion to which power from the drive source is transmitted and which can perform oscillating motion, a second support portion supporting the table portion, a second rolling bearing attached to the second support portion, and an eccentric shaft including a first shaft portion and a second shaft portion arranged in an eccentric position relative to the first shaft portion, the first shaft portion being supported by the first rolling bearing and the second shaft portion being supported by the second rolling bearing. Effect of the Invention

[0007] According to the above-mentioned oscillating table, the life calculation can be easily performed, the table portion can be accurately positioned, and high-speed operation can be appropriately performed. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic perspective view showing a rocking table in accordance with the first embodiment of the present disclosure. [Diagram 2] FIG. 2 is a schematic plan view of the oscillating table shown in FIG. [Diagram 3] FIG. 3 is a schematic side view of the oscillating table shown in FIG. [Figure 4] FIG. 4 is a schematic front view of the oscillating table shown in FIG. [Diagram 5] FIG. 5 is a schematic perspective view showing the oscillating table in the first embodiment with a table portion, which will be described later, removed and some members indicated by dashed lines. [Figure 6] FIG. 6 is a schematic plan view of the oscillating table shown in FIG. [Figure 7] FIG. 7 is a schematic side view of the oscillating table shown in FIG. [Figure 8] FIG. 8 is a schematic front view of the oscillating table shown in FIG. [Figure 9]FIG. 9 is a schematic cross-sectional view of the rocking table shown in FIG. 5, including a base portion to be described later, cut along the YZ plane. [Figure 10] FIG. 10 is a schematic plan view of the oscillating table shown in FIG. [Figure 11] FIG. 11 is a schematic side view of the oscillating table shown in FIG. [Figure 12] FIG. 12 is a schematic front view of the oscillating table shown in FIG. [Figure 13] FIG. 13 is an enlarged view of region XIII shown in FIG. [Figure 14] FIG. 14 is a schematic side view of the oscillating table shown in FIG. [Figure 15] FIG. 15 is a schematic side view of the oscillating table showing a state in which a table portion, which will be described later, is tilted by oscillating. [Figure 16] FIG. 16 is a schematic side view of the oscillating table before it is tilted, that is, showing a state in which a table portion, which will be described later, is horizontal. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] [Overview of the embodiment] The oscillating table of the present disclosure comprises a base portion, a linear motion mechanism including a rail attached to the base portion and a slider attached so as to be movable relative to the rail, a drive source for linearly reciprocating the slider, a first support portion attached to the slider and performing linear reciprocating motion together with the slider, a first rolling bearing attached to the first support portion, a table portion to which power from the drive source is transmitted and which can perform oscillating motion, a second support portion supporting the table portion, a second rolling bearing attached to the second support portion, and an eccentric shaft including a first shaft portion and a second shaft portion arranged in an eccentric position relative to the first shaft portion, the first shaft portion being supported by the first rolling bearing and the second shaft portion being supported by the second rolling bearing.

[0010] According to the oscillating table of the present disclosure, the slider included in the linear motion mechanism reciprocates linearly due to the power from the drive source. The first support part attached to the slider reciprocates linearly together with the slider. Then, the table part attached to the second support part via the eccentric shaft oscillates with the linear reciprocating motion of the first support part. Here, the first shaft part of the eccentric shaft is supported by the first rolling bearing, and the second shaft part of the eccentric shaft is supported by the second rolling bearing. Unlike the sliding mechanism, this configuration makes it easy to calculate the life based on fatigue of the rolling body, etc. In addition, since the configuration employs the first rolling bearing and the second rolling bearing, unlike the drive system employing the worm gear, no gap is generated, so that the table part can be accurately positioned and is suitable for high-speed operation. Therefore, according to such an oscillating table, the life calculation is easy, the table part can be accurately positioned, and high-speed operation can be appropriately performed. Here, accurate positioning of the table part means that the angle of inclination of the table part tilted by the oscillating motion can be accurately determined.

[0011] In the above-mentioned oscillating table, the linear motion mechanism may include a linear motion guide unit, which allows the table portion to be oscillated smoothly and to be positioned more accurately.

[0012] In the above-mentioned oscillating table, at least one of the first rolling bearing and the second rolling bearing may include an angular bearing. In this way, the table portion can be smoothly oscillated while appropriately supporting the eccentric shaft, and accurate life calculation can be performed.

[0013] In the above-mentioned oscillating table, the driving source may include a ball screw having a ball screw nut attached to the screw shaft and the first support portion, and a motor for rotating the screw shaft. In this way, the rotational motion of the motor can be converted into the linear motion of the slider to oscillate the table portion more smoothly, and the rotation of the motor can be controlled to achieve high-speed operation and accurate positioning.

[0014] In the above rocking table, when viewed in the horizontal direction, the direction in which an imaginary line segment connecting the center of the first shaft portion and the center of the second shaft portion extends may be horizontal when the table portion is horizontal. This ensures the stability of the rocking table when the table portion is in a horizontal position.

[0015] The oscillating table may be provided with a plurality of sliders. In this way, the first support part can be accurately reciprocated linearly by the plurality of sliders, and more accurate positioning and high-speed operation can be achieved.

[0016] In the above rocking table, the table part may include a sliding part having a sliding surface formed of a curved surface. The base part may include a guide part formed of a curved surface, having a guide surface in contact with the sliding surface, and guiding the table part. In this way, the rocking motion of the table part can be made smoother by the sliding part having the sliding surface and the guide part having the guide surface.

[0017] In the above-mentioned oscillating table, the guide portion may be provided in a pair on either side of the rail, thereby making it possible to more appropriately guide the oscillating table portion.

[0018] [Specific Example of the Embodiment] Next, an example of a specific embodiment of the oscillating table of the present disclosure will be described with reference to the drawings. In the following drawings, the same or corresponding parts are designated by the same reference numerals, and the description thereof will not be repeated.

[0019] (Embodiment 1) First, a first embodiment of the present disclosure will be described. FIG. 1 is a schematic perspective view showing a rocking table in the first embodiment of the present disclosure. In FIG. 1 and the following figures, the Y direction is the direction in which a rail described later extends and indicates the longitudinal direction of the rocking table, the X direction indicates the short side direction of the rocking table, and the Z direction indicates the thickness direction (height direction) of the rocking table. The X direction, the Y direction, and the Z direction are each perpendicular to each other. FIG. 2 is a schematic plan view of the rocking table shown in FIG. 1. FIG. 2 is a view of the rocking table shown in FIG. 1 as viewed in the direction indicated by the arrow II. FIG. 3 is a schematic side view of the rocking table shown in FIG. 1. FIG. 3 is a view of the rocking table shown in FIG. 1 as viewed in the direction indicated by the arrow III. FIG. 4 is a schematic front view of the rocking table shown in FIG. 1. FIG. 4 is a view of the rocking table shown in FIG. 1 as viewed in the direction indicated by the arrow IV.

[0020] Fig. 5 is a schematic perspective view showing the oscillating table in the first embodiment with a table portion, described later, removed and some members indicated by dashed lines. Fig. 6 is a schematic plan view of the oscillating table shown in Fig. 5. Fig. 6 is a view of the oscillating table shown in Fig. 5 as viewed in the direction indicated by arrow VI. Fig. 7 is a schematic side view of the oscillating table shown in Fig. 5. Fig. 7 is a view of the oscillating table shown in Fig. 5 as viewed in the direction indicated by arrow VII. Fig. 8 is a schematic front view of the oscillating table shown in Fig. 5. Fig. 8 is a view of the oscillating table shown in Fig. 5 as viewed in the direction indicated by arrow VIII.

[0021] FIG. 9 is a schematic cross-sectional view of the rocking table shown in FIG. 5 including a base portion described later, cut along the YZ plane. FIG. 10 is a schematic plan view of the rocking table shown in FIG. 9. FIG. 10 is a view of the rocking table shown in FIG. 9 as viewed in the direction indicated by an arrow X. FIG. 11 is a schematic side view of the rocking table shown in FIG. 9. FIG. 11 is a view of the rocking table shown in FIG. 9 as viewed in the direction indicated by an arrow XI. FIG. 12 is a schematic front view of the rocking table shown in FIG. 9. FIG. 12 is a view of the rocking table shown in FIG. 9 as viewed in the direction indicated by an arrow XII. FIG. 13 is an enlarged view of an area XIII shown in FIG. 10. FIG. 14 is a schematic side view of the rocking table shown in FIG. 13. FIG. 15 is a schematic side view of the rocking table showing a state in which a table portion described later is tilted by rocking. FIG. 16 is a schematic side view of the rocking table before tilting, that is, showing a state in which a table portion described later is horizontal.

[0022] 1 to 16, a rocking table 10 according to the first embodiment of the present disclosure includes a base portion 11, a linear motion mechanism 12, a drive source 13, a first support portion 14, a first rolling bearing 15, a table portion 16, a second support portion 18, a second rolling bearing 19, and an eccentric shaft 20. In this embodiment, both the first rolling bearing 15 and the second rolling bearing 19 are angular bearings. Next, the configuration of each member will be described.

[0023] The base portion 11 has a rectangular shape when viewed in the Z direction, which is the thickness direction. The base portion 11 is a part that serves as the foundation of the oscillating table 10, and each member is directly or indirectly attached to the base portion 11. The base portion 11 includes a plate-shaped base plate 34 and a pair of guide portions 17a and 17b.

[0024] The pair of guide portions 17a and 17b are integrally formed with the base plate 34. The guide portions 17a and 17b are provided at an interval in the X direction so as to sandwich a rail 21 described later. The guide portions 17a and 17b are provided so as to rise from the base plate 34. The guide portion 17a is formed of a curved surface and has a guide surface 29a that contacts a sliding surface 38a described later. The guide portion 17b is formed of a curved surface and has a guide surface 29b that contacts a sliding surface 38b described later. The guide surfaces 29a and 29b are provided at the ends of the guide portions 17a and 17b in the Z direction. The guide surfaces 29a and 29b are each arc-shaped when viewed in the X direction. The curvatures of the guide surfaces 29a and 29b are the same. The guide surfaces 29a and 29b guide the table portion 16 when the table portion 16 swings.

[0025] In this embodiment, the linear motion mechanism 12 is a linear motion guide unit. The linear motion mechanism 12 includes a rail 21 and a plurality of sliders, two in this embodiment, sliders 22a and sliders 22b. The rail 21 is attached to the base portion 11, specifically, to the central region in the X direction of the base plate 34 so as to be placed with the longitudinal direction as the Y direction. The rail 21 is attached and fixed to the base plate 34 by a plurality of bolts. The rail 21 is provided with a rail raceway surface on which the rolling elements roll, recessed along the longitudinal direction.

[0026] The sliders 22a and 22b are each attached to the rail 21. The sliders 22a and 22b each have a slider raceway surface on which the rolling elements roll that is recessed along the longitudinal direction. A plurality of rolling elements, for example balls, are provided between the slider raceway surface of the slider 22a and the rail raceway surface. Similarly, a plurality of rolling elements, for example balls, are provided between the slider raceway surface of the slider 22b and the rail raceway surface. The linear motion mechanism 12 as a linear motion guide unit can smoothly linearly reciprocate the sliders 22a and 22b in the longitudinal direction of the rail 21.

[0027] The driving source 13 causes the sliders 22a and 22b to perform a linear reciprocating motion. In this embodiment, the driving source 13 includes a ball screw 23 and a motor 24. The ball screw 23 includes a ball screw nut 25 and a screw shaft 26. The screw shaft 26 is provided so that its longitudinal direction extends in the Y direction. A screw groove is provided on the outer diameter surface of the screw shaft 26. The screw shaft 26 is rotated by the motor 24. The ball screw nut 25 is attached to the screw shaft 26, and rolling elements (balls) are arranged between the screw groove and a raceway surface provided on the ball screw nut 25. By the rotation of the screw shaft 26, the ball screw nut 25 performs a linear reciprocating motion in the Y direction, which is the longitudinal direction of the screw shaft 26.

[0028] The first support 14 is block-shaped and attached to the ball screw nut 25. The first support 14 is attached so as to be placed on the sliders 22a and 22b. That is, the ball screw nut 25, the first support 14, the sliders 22a and 22b are attached to each other and configured to move as one unit. By the rotation of the screw shaft 26, the ball screw nut 25, the first support 14 attached to the ball screw nut 25, and the sliders 22a and 22b attached to the first support 14 perform linear reciprocating motion in the Y direction in cooperation with each other. The first support 14 is provided with a through hole penetrating in the X direction, and the first rolling bearing 15 is attached in this through hole. In this embodiment, the first support 14 is attached so that the outer ring of the first rolling bearing 15 is fitted into the through hole provided in the first support 14.

[0029] The table portion 16 is plate-shaped and is attached so as to cover the base portion 11 in the Z direction. The table portion 16 can be swung by power transmitted from a drive source. The table portion 16 includes a mounting portion 27 having a plane 37 that can be parallel to the XY plane. The plane 37 of the mounting portion 27 is a surface exposed in the Z direction. A surface located on the opposite side of the plane 37 of the mounting portion 27 in the thickness direction faces the base portion 11. Due to the swinging motion of the table portion 16, the plane 37 of the mounting portion 27 is inclined with respect to the horizontal direction. At both ends of the mounting portion 27 in the X direction, flange portions 35a and 35b are provided which protrude toward the base plate 34 side. The end faces in the Z direction of the flange portions 35a and 35b are formed of curved surfaces. The Z-direction end face of flange portion 35a and the Z-direction end face of flange portion 35b each have an arc shape when viewed in the X direction.

[0030] The table portion 16 includes a sliding portion 28a having a sliding surface 38a formed of a curved surface. The table portion 16 includes a sliding portion 28b having a sliding surface 38b formed of a curved surface. The sliding portion 28a and the sliding portion 28b are each attached to the surface of the mounting portion 27 facing the base plate 34 by bolts. In this embodiment, the sliding portion 28a and the sliding portion 28b are each detachably attached to the mounting portion 27. The sliding portion 28a is disposed so as to contact the flange portion 35a. The sliding portion 28b is disposed so as to contact the flange portion 35b. The sliding surface 38a and the sliding surface 38b are each arc-shaped when viewed in the X direction. The curvatures of the sliding surface 38a and the sliding surface 38b are the same.

[0031] The second support 18 is attached to the table 16 and supports the table 16. The second support 18 is attached to the surface of the mounting portion 27 of the table 16 that faces the base plate 34. The second support 18 is also block-shaped. Specifically, the second support 18 has a tapered portion whose width in the Y direction narrows as it approaches the base 11 when viewed in the X direction. The second support 18 is provided with a through hole penetrating in the X direction, and the second rolling bearing 19 is attached in this through hole. In this embodiment, the second support 18 is attached such that an outer ring of the second rolling bearing 19 is fitted into the through hole provided in the second support 18.

[0032] The eccentric shaft 20 is attached so that its axial direction is the X-direction. The eccentric shaft 20 includes a first shaft portion 31, a second shaft portion 32, and a connecting portion 33. The connecting portion 33 is plate-shaped and is provided to connect the first shaft portion 31 and the second shaft portion 32. The second shaft portion 32 is disposed at a position eccentric to the first shaft portion 31. Specifically, the end portion of the first shaft portion in the X-direction and the end portion of the second shaft portion 32 in the X-direction are connected in a state in which the centers of the respective shaft portions are shifted, that is, in an eccentric state. The eccentric shaft 20 rotates around the center 36b of the second shaft portion 32 as the rotation center. In this case, the second shaft portion 32 rotates on its axis. Since the second shaft portion 32 is disposed at a position eccentric to the first shaft portion 31, the first shaft portion 31 revolves around the center 36b of the second shaft portion 32 as the rotation center. It should be noted that the center 36a of the first shaft portion 31 and the center 36b of the second shaft portion 32 are illustrated in FIGS.

[0033] The eccentric shaft 20 is supported by the first rolling bearing 15 and the second rolling bearing 19. Specifically, the first shaft portion 31 of the eccentric shaft 20 is supported by the first rolling bearing 15. Also, the second shaft portion 32 of the eccentric shaft 20 is supported by the second rolling bearing 19. In this embodiment, the first shaft portion 31 is fitted inside the inner ring included in the first rolling bearing 15. Also, the second shaft portion 32 is fitted inside the inner ring included in the second rolling bearing 19. Here, when viewed in the horizontal direction, when the table portion 16, specifically, the plane 37 of the mounting portion 27 is horizontal, the direction in which the virtual line segment 39 connecting the center 36a of the first shaft portion 31 and the center 36b of the second shaft portion 32 extends is horizontal. Note that the virtual line segment 39 is illustrated by a dashed line in FIG. 15 and FIG. 16. Furthermore, when the table portion 16 swings and the plane 37 tilts, the imaginary line segment 39 also tilts.

[0034] Next, the operation of the oscillating table 10 will be described. The screw shaft 26 of the ball screw 23 rotates due to the transmission of rotational force from the motor 24. This causes the ball screw nut 25 attached to the screw shaft 26 to perform linear motion in the Y direction. In conjunction with the linear motion of the ball screw nut 25, the first support portion 14 also performs linear motion. The eccentric shaft 20 rotates in response to the linear motion of the first support portion 14. Due to the rotation of the eccentric shaft 20, the table portion 16 is guided by the guide surface 29a of the pair of guide portions 17a and the guide surface 29b of the pair of guide portions 17b, and thus oscillates together with the second support portion 18. Due to the oscillation of the table portion 16, the plane 37 of the placement portion 27 is inclined.

[0035] According to the oscillating table 10 having such a configuration, the sliders 22a and 22b included in the linear motion mechanism perform linear reciprocating motion by the power from the driving source 13. The first support portion 14 attached to the sliders 22a and 22b performs linear reciprocating motion together with the sliders 22a and 22b. Then, the table portion 16 attached to the second support portion 18 via the eccentric shaft 20 performs a oscillating motion in association with the linear reciprocating motion of the first support portion 14. Here, the first shaft portion 31 of the eccentric shaft 20 is supported by the first rolling bearing 15, and the second shaft portion 32 of the eccentric shaft 20 is supported by the second rolling bearing 19. Unlike a sliding mechanism, such a configuration makes it easy to calculate the lifespan based on fatigue of the rolling elements, etc. Furthermore, since the configuration employs the first rolling bearing 15 and the second rolling bearing 19, no gap is generated unlike a drive system employing a worm gear, so that the table portion 16 can be accurately positioned and is suitable for high-speed operation. Therefore, with such a oscillating table 10, it is easy to calculate the service life, the table portion 16 can be accurately positioned, and high-speed operation can be appropriately performed.

[0036] In this embodiment, the linear motion mechanism 12 includes a linear motion guide unit, which allows the table portion 16 to swing smoothly and to be positioned more accurately.

[0037] In this embodiment, both the first rolling bearing and the second rolling bearing are angular bearings, which allows the table portion 16 to oscillate smoothly while properly supporting the eccentric shaft 20, thereby enabling accurate life calculation.

[0038] In this embodiment, the driving source 13 includes a ball screw 23 having a ball screw nut 25 attached to a screw shaft 26 and the first support portion 14, and a motor 24 that rotates the screw shaft 26. Therefore, the rotational motion of the motor 24 is converted into linear motion of the sliders 22a and 22b, so that the table portion 16 can be swung more smoothly, and the rotation of the motor 24 can be controlled to achieve high-speed operation and accurate positioning.

[0039] In this embodiment, when the table portion 16 is horizontal, the direction in which the imaginary line segment 39 connecting the center 36a of the first shaft portion 31 and the center 36b of the second shaft portion 32 extends is horizontal. Therefore, the stability of the oscillating table 10 can be ensured when the table portion 16 is in a horizontal position.

[0040] In this embodiment, a plurality of sliders 22a and 22b, specifically, two sliders 22a and 22b are provided. Therefore, the plurality of sliders 22a and 22b can accurately perform linear reciprocating motion of the first support portion 14, and more accurate positioning and high-speed operation can be achieved.

[0041] In this embodiment, the table portion 16 includes a sliding portion 28a having a sliding surface 38a formed of a curved surface, and a sliding portion 28b having a sliding surface 38b formed of a curved surface. The base portion 11 includes a guide portion 17a formed of a curved surface, having a guide surface 29a in contact with the sliding surface 38a, and guiding the table portion 16, and a guide portion 17b formed of a curved surface, having a guide surface 29b in contact with the sliding surface 38b, and guiding the table portion 16. Thus, the swinging motion of the table portion 16 can be made smoother by the sliding portion 28a and the sliding portion 28b having the sliding surface 38a and the sliding surface 38b, respectively, and the guide portion 17a and the guide portion 17b having the guide surface 29a and the guide surface 29b, respectively.

[0042] In this embodiment, the guide portion 17a and the guide portion 17b are provided as a pair on either side of the rail 21. This makes it possible to guide the oscillating table portion 16 more appropriately.

[0043] (Other embodiments) In the above embodiment, the guide portion 17a and the guide portion 17b are provided as a pair to sandwich the rail 21, but this is not limiting, and only one of them may be provided.

[0044] In the above embodiment, a plurality of sliders 22a and a plurality of sliders 22b are provided, but the present invention is not limited to this, and the number of sliders may be one.

[0045] In the above embodiment, the driving source 13 includes the ball screw 23 having the ball screw nut 25 attached to the screw shaft 26 and the first support portion 14, and the motor 24 that rotates the screw shaft 26, but this is not limited thereto, and the driving source 13 may use another mechanism capable of performing linear reciprocating motion, for example, a linear motor. Also, in the above embodiment, a linear motion guide unit is used as the linear motion mechanism, but this is not limited thereto, and other linear motion mechanisms may be adopted.

[0046] It should be understood that the embodiments disclosed herein are illustrative in all respects and are not restrictive in any respect. The scope of the present invention is defined by the claims, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0047] 10 oscillating table, 11 base portion, 12 linear motion mechanism, 13 driving source, 14 first support portion, 15 first rolling bearing, 16 table portion, 17a, 17b guide portion, 18 second support portion, 19 second rolling bearing, 20 eccentric shaft, 21 rail, 22a, 22b slider, 23 ball screw, 24 motor, 25 ball screw nut, 26 screw shaft, 27 mounting portion, 28a, 28b sliding portion, 29a, 29b guide surface, 31 first shaft portion, 32 second shaft portion, 33 connecting portion, 34 base plate, 35a, 35b flange portion, 36a, 36b center, 37 plane, 38a, 38b sliding surface, 39 imaginary line segment.

Claims

1. A base portion; a linear motion mechanism including a rail attached to the base portion and a slider attached to the rail so as to be movable relative to the rail; A drive source for linearly reciprocating the slider; a first support portion attached to the slider and linearly reciprocating together with the slider; a first rolling bearing attached to the first support portion; a table portion capable of swinging motion by transmitting power from the drive source; A second support portion that supports the table portion; a second rolling bearing attached to the second support portion; an eccentric shaft including a first shaft portion and a second shaft portion disposed at an eccentric position relative to the first shaft portion, the first shaft portion being supported by the first rolling bearing, and the second shaft portion being supported by the second rolling bearing; The first shaft portion performs an orbital motion by the rotational motion of the second shaft portion.

2. The oscillating table according to claim 1 , wherein the linear motion mechanism includes a linear motion guide unit.

3. 3. The oscillating table according to claim 1, wherein at least one of the first rolling bearing and the second rolling bearing includes an angular bearing.

4. The driving source is a ball screw including a ball screw nut attached to a screw shaft and the first support portion; The oscillating table according to claim 1 or 2, further comprising: a motor for rotating the screw shaft.

5. 3. The oscillating table according to claim 1, wherein when the table portion is horizontal when viewed in a horizontal direction, a direction in which an imaginary line segment connecting a center of the first shaft portion and a center of the second shaft portion extends is horizontal.

6. 3. The oscillating table according to claim 1, wherein a plurality of said sliders are provided.

7. the table portion includes a sliding portion having a sliding surface formed of a curved surface, 3. The oscillating table according to claim 1, wherein the base portion includes a guide portion that is formed of a curved surface, has a guide surface that contacts the sliding surface, and guides the table portion.

8. The oscillating table according to claim 7 , wherein the guide portion is provided in a pair on either side of the rail.

Images