Large-stroke air-floating nano-positioning platform

Abstract

A large-stroke air-floating nano-positioning platform, comprising a base (1) on which linear electric motors (2) are provided, the linear electric motors being connected to an air-floating platform (3), bearing platforms (4) being provided below the air-floating platform, a plurality of shock absorption assemblies (5) being embedded in the base and being spaced apart below each bearing platform, each shock absorption assembly comprising a base plate (50), shock absorption columns (51) being symmetrically arranged at the upper end of each base plate, a piston (52) being fitted in each shock absorption column, a cavity being formed between the bottom end of each piston and an inner wall of each shock absorption column, a sliding rod (53) being fixed to the upper end of each piston, an assembly joint (54) being connected to the top end of each sliding rod and being connected to the bottom end of a corresponding bearing platform, and a shock absorption spring (56) being arranged between each assembly joint and each shock absorption column and being sleeved on each sliding rod. The positioning platform can isolate external vibrations from the air-floating platform, thereby enhancing the stability and precision of sliding, and achieving highly accurate motion positioning.

Description

A long-stroke air-floating nanopositioning platform Technical Field

[0001] The present invention belongs to the technical field of precision servo drive, and in particular relates to a large-stroke air-floating nano-positioning platform. Background Art

[0002] In recent years, high-tech technologies such as microelectronic devices and integrated chip processing technology, scanning microscopy imaging technology, quantum material preparation technology, and biomedical engineering technology have flourished. The accuracy and performance that these systems can achieve depend to a large extent on the accuracy and performance of their nano-positioning subsystems. With the development of nanolithography technology, scanning tunneling microscopes, atomic force microscopes, micro-electromechanical systems and other technologies, nano-positioning platforms have also made great progress.

[0003] In the existing technology, most positioning platforms are driven by piezoelectric ceramic drivers, with a series-parallel structure of amplification mechanism and decoupling structure. The parallel structure has significant advantages over the series structure, such as high stiffness, high load bearing capacity, high speed and high positioning accuracy, but it is difficult to decouple. Compared with the traditional driving method, the piezoelectric ceramic driver has the advantages of high control accuracy, fast response, large driving force, low driving power and wide operating frequency, but it is difficult to achieve a large stroke. The amplification mechanism used in the nanopositioning platform usually includes traditional lever amplification and bridge amplification mechanism. The lever amplification has high stiffness, and in order to achieve a larger amplification factor, the spatial configuration must be increased; the bridge amplification has a larger amplification ratio, but the stiffness is small and the load bearing capacity is too small to meet some high load requirements.

[0004] US Patent Application No. US15853847 discloses a large-load guide mechanism and a multi-degree-of-freedom, long-stroke, high-precision motion platform system. The invention comprises a rigid frame within which a motion platform is mounted. The invention also includes a non-contact brake for driving the motion platform. The rigid frame is used to generate a large-stroke displacement for high-speed motion. The core motion platform is connected to the moving portion of the non-contact actuator. The rigid frame is connected via a first flexible hinge group and a second flexible hinge group. Driven by the actuator, the flexible hinge group elastically deforms to produce a small-stroke, precise displacement. The motion platform system can be flexibly constructed as needed and is manufactured using a universal processing method. Special components such as air bearings or magnetic levitation are not used, resulting in low cost and addressing the short stroke and high cost of existing high-precision motion platforms. However, the invention still has room for improvement regarding the following technical issues: external vibration interference can easily cause jitter, resulting in motion interference and reduced positioning accuracy; and the platform's instantaneous change in sliding direction can easily cause jitter displacement, which is detrimental to component life.

[0005] Summary of the Invention

[0006] The object of the present invention is to provide a large-stroke air-floating nano-positioning platform with high stability and multiple air-floating support modes.

[0007] The technical solutions adopted by the present invention to achieve the above-mentioned purpose are:

[0008] A large-stroke air-floating nanopositioning platform comprises a base, a linear motor mounted on the base, an air-floating platform connected to the linear motor, a load-bearing platform below the air-floating platform, and multiple shock-absorbing components embedded in the base, spaced apart below the load-bearing platform. The linear motor drives the air-floating platform to slide on the load-bearing platform. Air bearings installed below the air-floating platform provide air-floating support during sliding, allowing the air-floating platform to stop moving promptly for accurate positioning. The linear motor generates vibration during operation, which is transmitted to the base. The shock-absorbing components reduce the vibration transmission from the base to the load-bearing platform, ensuring the positioning accuracy of the air-floating platform.

[0009] Preferably, the shock-absorbing assembly includes a base plate, a shock-absorbing column symmetrically provided on the upper end of the base plate, a piston cooperatingly provided in the shock-absorbing column, the bottom end of the piston and the inner wall of the shock-absorbing column forming a cavity, a slide rod fixed to the upper end of the piston, the top end of the slide rod connected to an assembly head, the assembly head connected to the bottom end of the load-bearing platform, a top plate provided on the assembly head, the top plate connected to the bottom end of the load-bearing platform, a shock-absorbing spring provided between the assembly head and the shock-absorbing column, and the shock-absorbing spring sleeved on the slide rod. The vibration generated by the linear motor and the ground vibration are transmitted to the base. When the base vibrates, the shock-absorbing column on the base plate moves relative to the piston. The piston squeezes the cavity to consume the vibration, reducing vibration transmission. At the same time, multiple shock-absorbing columns can weaken the vibration force in different directions, further reducing vibration transmission, effectively ensuring the stability of the load-bearing platform and its parallelism relative to the air-floating platform, and improving sliding precision. When the piston squeezes the cavity, the shock-absorbing column approaches the assembly head to squeeze the shock-absorbing spring. After the squeezed vibration is consumed, the shock-absorbing spring resets to ensure that it can consume and transmit the next vibration.

[0010] Preferably, the assembly head includes an assembly frame, which is fixed to the top of the slide rod. The assembly frame has an upward conical surface, and a groove is formed around the conical surface. Rollers are rotatably arranged in the groove. An assembly cover is arranged above the assembly frame. Multiple assembly covers are fixed to the same top plate, which is fixed to the bottom end of the load-bearing platform. The inner wall of the assembly cover is arranged in cooperation with the conical surface, and the assembly cover can contact the rollers. The vibration generated by the linear motor and the ground vibration are transmitted to the base. The load-bearing platform drives the assembly cover to move on the assembly frame and contact each roller, so that the rollers and the assembly cover roll and rub against each other, thereby consuming the shaking, and then consuming the vibration energy to transfer to the load-bearing platform, thereby preventing the load-bearing platform from transmitting the vibration to the air-floating platform and affecting the latter's sliding. This helps to maintain the parallelism of the air-floating platform and the load-bearing platform, and improves the sliding precision.

[0011] Preferably, the upper surface of the base is provided with a plurality of downwardly defined square grooves, the number of which is equal to the number of the damping components and their corresponding positions, with the base plate positioned at the bottom of the square grooves. The plurality of damping columns and the assembly head form a gap between the load-bearing platform and the base, improving airflow around the load-bearing platform. This facilitates the rapid flow and dissipation of air after the air bearing outputs an air film on the load-bearing platform, preventing the exhaust air from rapidly flowing back upon contacting the base and affecting the air bearing, thereby improving air bearing stability.

[0012] Preferably, mounting holes are spaced apart at the top of the load-bearing platform, and auxiliary air flotation components are provided within the mounting holes. The auxiliary air flotation components include a porous plate, a column, and a baffle connected sequentially from top to bottom. The porous plate and the baffle are respectively arranged in conjunction with the mounting holes. The mounting holes are connected to a common air inlet pipeline below. The air inlet pipeline is opened within the load-bearing platform and connected to the outside. The air inlet pipeline is connected to a first air pump. The air flow output by the air bearing can be partially trapped within the porous plate. The first air pump can output gas to the air inlet pipeline, which diverts the gas to each mounting hole, thereby pushing the baffle to drive the column and the top perforated plate to slide upward within the mounting hole. At this time, the air flotation platform does not need the air bearing to output the air film, and the air flotation platform is raised by the floating porous plate to form a sliding support.

[0013] Preferably, a retaining ring is provided in the mounting hole, and the column and the retaining ring are arranged in cooperation. An auxiliary air path is connected between the walls above and below the retaining ring where the mounting hole is located. An air outlet channel is provided in the column, and the air outlet channel connects the top and side walls of the column. The airflow input into the mounting hole can enter the space on the side of the column through the auxiliary air path, and enter the air outlet channel from the side of the column to reach the top of the column and be output. The output airflow can be evenly output from the orifice plate into an air film, forming an air-floating support for the air-floating platform. In addition, when the air-floating bearing fails, the porous plate that outputs the airflow upward can still provide support for the upward movement, thereby ensuring the sliding stability of the air-floating platform and preventing the air-floating bearing from clogging, which may cause motion interference between the air-floating platform and the linear motor, thereby reducing maintenance costs.

[0014] Preferably, the port of the auxiliary air circuit below the retaining ring is located on the side of the baffle, and the port of the auxiliary air circuit above the retaining ring is located below the porous plate. The baffle is limited by the gas retaining ring that is passed into the mounting hole to prevent the porous plate from moving upward too much and hitting the air flotation platform to cause interference. When the baffle at the bottom is pushed upward by the airflow entering the mounting hole, it leaves the lower port of the auxiliary air circuit. At this time, the airflow entering the mounting hole can flow to the upper port through the lower port of the auxiliary air circuit, and then act on the porous plate from the air outlet channel, so that the porous plate moves up first and then outputs the airflow, ensuring the effectiveness of the air flotation support, preventing the airflow from being dispersed when the porous plate is too far away from the air flotation platform, resulting in insufficient air flotation support force. When the air flotation bearing is blocked, there is a risk of the air flotation platform falling. After the air flotation platform falls, the airflow output by the porous plate is blocked. At this time, the airflow output by the first air pump enters the mounting hole and accumulates under the baffle, supporting the baffle through air pressure, preventing the baffle from falling quickly and hitting the bottom of the mounting hole to cause wear.

[0015] Preferably, the load-bearing platform is provided with stoppers at both ends. The stoppers comprise a mounting sleeve embedded within the load-bearing platform, a sliding post disposed within the mounting sleeve, a rubber head secured to the top of the sliding post, and a hole defined in the bottom of the mounting sleeve. The sliding post is cooperatingly positioned within the hole and capable of sliding movement. The load-bearing platform is provided with a limit air path, the limit air path communicating with the bottom of the mounting sleeve, and a second air pump externally connected to the limit air path. When the air-bearing platform slides to the end of its travel, the second air pump delivers air to the bottom of the mounting sleeve, acting on the sliding post. This causes the sliding post to drive the rubber head on top upward and abut against the bottom of the air-bearing platform, thereby slowly decelerating the air-bearing platform.

[0016] Since the present invention adopts a shock-absorbing component arranged under the load-bearing platform to prevent vibration interference, it has the following beneficial effects: the shock-absorbing component consumes the displacement generated by the vibration through the piston squeezing cavity, reduces vibration interference, and improves the sliding precision of the air-floating platform on the load-bearing platform; the vibration causes the assembly cover and the assembly part to move relative to each other, and the rolling contact between the assembly cover and the roller reduces the vertical vibration transmission, ensures the parallelism of the load-bearing platform and the air-floating platform, and improves the sliding smoothness and precision; the auxiliary air-floating part realizes the air-floating platform's air-floating bearing failure through the porous plate that can float and output air flow. Floating support prevents the air-floating platform from falling and causing damage; the air-floating platform can achieve air-floating movement without being equipped with air-floating bearings, reducing production costs; when the first air pump is started, the auxiliary air path realizes the upward movement of the porous plate and then outputs the air film, ensuring that the porous plate outputs airflow within the effective distance below the air-floating platform, ensuring the stability of the air-floating support; when the air-floating platform falls accidentally, it can form support through the accumulation of air pressure under the baffle, buffering the falling speed and preventing damage to parts caused by falling impact; the limiter achieves deceleration through contact friction with the bottom of the air-floating platform, reducing the possibility of vibration of the air-floating platform after an emergency stop and interference with the load-bearing platform. Therefore, the present invention is a large-stroke air-floating nano-positioning platform with high stability and multiple air-floating support modes. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the connection between the base, air-floating platform and load-bearing platform;

[0018] Figure 2 is a schematic diagram of the position of the square slot;

[0019] Figure 3 is a schematic diagram of the connection between the load-bearing platform and the shock-absorbing assembly;

[0020] Figure 4 is a schematic diagram of the structure of the shock absorbing assembly;

[0021] Figure 5 is a partial cross-sectional view of a shock-absorbing column;

[0022] Figure 6 is a schematic diagram of the connection between the mounting hole and the air intake pipe;

[0023] FIG7 is a schematic cross-sectional view of an auxiliary air flotation member;

[0024] FIG8 is a schematic cross-sectional view of a limiting member.

[0025] Figure numbers: base 1; square groove 10; linear motor 2; air floating platform 3; load-bearing platform 4; mounting hole 40; air inlet pipe 41; shock-absorbing assembly 5; bottom plate 50; shock-absorbing column 51; piston 52; slide rod 53; assembly head 54; top plate 55; shock-absorbing spring 56; assembly frame 540; trough body 541; roller 542; assembly cover 543; auxiliary air floating part 6; porous plate 60; column 61; baffle 62; retaining ring 63; auxiliary air circuit 64; limiter 7; mounting sleeve 70; sliding column 71; rubber head 72; sealing plate 73; return spring 74; main air hole 710; secondary air hole 711; injection hole 720. DETAILED DESCRIPTION

[0026] The technical solution of the present invention is further described in detail below with reference to the specific embodiments and the accompanying drawings:

[0027] Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] Referring to Figures 1 to 3, a large-stroke air-floating nano-positioning platform includes: a base 1, a linear motor 2 is provided on the base 1, the linear motor 2 is connected to an air-floating platform 3, a load-bearing platform 4 is provided below the air-floating platform 3, a plurality of shock-absorbing components 5 are embedded in the base 1, and the shock-absorbing components 5 are arranged at intervals below the load-bearing platform 4. The air-floating platform 3 can be equipped with air bearings below.

[0029] The linear motor 2 drives the air-floating platform 3 to slide on the load-bearing platform 4. By installing an air-floating bearing under the air-floating platform 3, air-floating support is achieved during sliding. The air-floating platform 3 can stop moving in time during sliding to achieve accurate positioning. When the linear motor 2 is working, it will generate vibration and transmit it to the base 1. The vibration transmission of the base 1 to the load-bearing platform 4 is weakened by the shock-absorbing component 5 to ensure the positioning accuracy of the air-floating platform 3.

[0030] Referring to Figures 4-5, the shock-absorbing assembly 5 includes a base plate 50, and a shock-absorbing column 51 is symmetrically provided on the upper end of the base plate 50. A piston 52 is provided in the shock-absorbing column 51. The bottom end of the piston 52 and the inner wall of the shock-absorbing column 51 form a cavity. A slide rod 53 is fixed to the upper end of the piston 52, and an assembly head 54 is connected to the top of the slide rod 53. Multiple assembly heads 54 are connected to the same top plate 55, and the top plate 55 is fixed to the bottom end of the load-bearing platform 4. A shock-absorbing spring 56 is provided between the assembly head 54 and the shock-absorbing column 51, and the shock-absorbing spring 56 is sleeved on the slide rod 53.

[0031] The vibration generated by the operation of the linear motor 2 and the ground vibration are transmitted to the base 1. When the base 1 vibrates, it drives the shock-absorbing column 51 on the bottom plate 50 to move relative to the piston 52. The piston 52 squeezes the cavity to consume the vibration and reduce the vibration transmission. At the same time, multiple shock-absorbing columns 51 can weaken the vibration force in different directions, further reducing the vibration transmission, effectively ensuring the stability of the load-bearing platform 4 and its parallelism relative to the air-floating platform 3, and improving the sliding precision. When the piston 52 squeezes the cavity, the shock-absorbing column 51 approaches the assembly head 54 to squeeze the shock-absorbing spring 56. After the vibration is consumed, the shock-absorbing spring 56 resets to ensure that it can consume and transmit the next vibration.

[0032] The assembly head 54 includes an assembly frame 540, which is fixed to the top of the slide rod 53. The assembly frame 540 has a conical surface with the small end facing upward. A groove 541 is provided around the conical surface. A roller 542 is rotatably provided in the groove 541. The assembly frame 540 is provided with an assembly cover 543 on the top. The top of the assembly cover 543 is fixed to the bottom end of the load-bearing platform 4. The inner wall of the assembly cover 543 is provided in cooperation with the conical surface. The assembly cover 543 can contact the roller 542.

[0033] The vibration generated by the operation of the linear motor 2 and the ground vibration are transmitted to the base 1, which drives the assembly cover 543 to move on the assembly frame 540 through the load-bearing platform 4 and contact each roller 542, so that the roller 542 and the assembly cover 543 are subjected to rolling friction to consume the shaking, thereby consuming the vibration energy to be transmitted to the load-bearing platform 4, avoiding the load-bearing platform 4 from transmitting the vibration to the air-floating platform 3 to affect the latter's sliding, helping to maintain the parallelism of the air-floating platform 3 and the load-bearing platform 4, and improving the sliding precision.

[0034] Referring to Figure 2 , the upper surface of the base 1 is provided with a plurality of downwardly defined square grooves 10. These grooves 10 are equal in number to the shock-absorbing components 5 and are arranged in a corresponding manner. A base plate 50 is positioned at the bottom of the square grooves 10, and the upper surface of the assembly head 54 is positioned above the upper surface of the base 1. The multiple shock-absorbing columns 51 and the assembly head 54 create a gap between the load-bearing platform 4 and the base 1, enhancing airflow around the load-bearing platform 4. This facilitates the rapid flow and dissipation of air after the air film is released from the air bearing on the load-bearing platform 4, preventing the exhaust air from rapidly flowing back upon contact with the base 1 and affecting the air bearing, thereby improving air bearing stability.

[0035] Referring to Figures 6-7, mounting holes 40 are provided at intervals on the upper end of the load-bearing platform 4, and an auxiliary air flotation component 6 is provided in the mounting hole 40. The auxiliary air flotation component 6 includes a porous plate 60, a column 61 and a baffle 62 connected in sequence from top to bottom. The porous plate 60 and the baffle 62 are respectively arranged in conjunction with the mounting holes 40. The mounting holes 40 are connected to the same air intake pipe 41 at the bottom. The air intake pipe 41 is opened in the load-bearing platform 4 and connected to the outside. The air intake pipe 41 is connected to a first air pump.

[0036] The air flow output by the air bearing can be partially retained in the porous plate 60, and the first air pump can output gas to the air inlet pipe 41. The air inlet pipe 41 diverts the gas to each mounting hole 40, thereby pushing the baffle 62 to drive the column 61 and the top porous plate to slide upward in the mounting hole 40. At this time, the air floating platform 3 does not need the air bearing to output the air film, and the air floating platform 3 is lifted by the floating porous plate 60 to form a sliding support.

[0037] A retaining ring 63 is provided in the mounting hole 40, and the column 61 is arranged in cooperation with the retaining ring 63. An auxiliary air path 64 is connected between the walls above and below the retaining ring 63 of the mounting hole 40. An air outlet channel 65 is opened in the column 61, and the air outlet channel 65 connects the top and side walls of the column 61. The air outlet channel 65 and the auxiliary air path 64 are both connected to the outer space of the column 61.

[0038] The airflow input into the mounting hole 40 can enter the side space of the column 61 through the auxiliary air path 64, and enter the air outlet channel 65 from the side of the column 61 to reach the top of the column 61 and be output. The output airflow can be evenly output from the orifice plate into an air film, forming an air-floating support for the air-floating platform 3. When the air-floating bearing fails, the porous plate 60 that outputs the airflow upward can still provide support for floating, thereby ensuring the sliding stability of the air-floating platform 3 and avoiding the blockage of the air-floating bearing, which may cause motion interference between the air-floating platform 3 and the linear motor 2, thereby reducing maintenance costs.

[0039] The port of the auxiliary gas path 64 below the retaining ring 63 is located on the side of the baffle 62, and the port of the auxiliary gas path 64 above the retaining ring 63 is located below the porous plate 60. The porous plate 60 can be pushed out and contact the air bearing.

[0040] The air flow output by the first air pump enters the mounting hole 40 and accumulates under the baffle 62, supporting the baffle 62 by the air pressure, preventing the baffle 62 from falling quickly and hitting the bottom of the mounting hole 40 and causing wear.

[0041] Referring to Figure 8, the load-bearing platform 4 is provided with limit members 7 at the two end positions. The limit members 7 include a mounting sleeve 70 embedded in the load-bearing platform 4, a sliding column 71 is provided in the mounting sleeve 70, a rubber head 72 is fixed on the top of the sliding column 71, a hole is provided at the bottom of the mounting sleeve 70, the sliding column 71 is matched and arranged in the hole and can slide, the load-bearing platform 4 is provided with a limit air path 42, the limit air path 42 is connected to the bottom of the mounting sleeve 70, and the outside of the limit air path 42 is connected to a second air pump.

[0042] It should be noted that the linear motor 2 has a grating scale for detecting the sliding position of the air bearing table 3 .

[0043] When the air-floating platform 3 slides to the end of its travel, the second air pump outputs air flow to the bottom of the mounting sleeve 70 and acts on the sliding column 71, so that the sliding column 71 drives the rubber head 72 on the top to move upward and abut against the bottom of the air-floating platform 3, thereby slowly decelerating the air-floating platform 3.

[0044] The sliding column 71 is connected to a sealing plate 73 in the middle. The sealing plate 73 is cooperated with the inner wall of the mounting sleeve 70 and can slide axially. A return spring 74 is provided between the sealing plate 73 and the bottom of the mounting sleeve 70. The return spring 74 is sleeved on the sliding column 71. A main air hole 710 is provided at the axis of the sliding column 71. The main air hole 710 is connected to the upper and lower end surfaces of the sliding column 71. The sliding column 71 is provided with a secondary air hole 711. The secondary air hole 711 is located below the sealing plate 73 and is connected to the main air hole 710. An injection hole 720 is provided at the axis of the rubber head 72. The diameter of the injection hole 720 is much smaller than that of the main air hole 710, and the injection hole 720 is connected to the main air hole 710.

[0045] When the second air pump is started, the grating ruler detects that the air-floating platform 3 is close to the end of its stroke, and a part of the air flow entering the limiting air path 42 can be output outward from the air jet hole 720, forming an opposite air flow to the air-floating bearing output air film, thereby decelerating the air-floating platform 3. When the grating ruler detects that the air-floating platform 3 has reached the end of its stroke, another part of the air entering the limiting air path 42 is output from the main air hole 710 to the auxiliary air hole 711. At this time, the air pressure in the cavity between the sliding column 71, the mounting sleeve 70 and the sealing plate 73 increases, pushing the sealing plate 73 to drive the sliding column 71 to slide upward, so that the rubber head 72 approaches and abuts the air-floating platform 3, and the deceleration speed of the rubber head 72 on the air-floating platform 3 is increased by pneumatic means, thereby improving the positioning accuracy. In addition, compared with the plate limiting scheme of the prior art, the friction contact method avoids the damage to parts and vibration interference caused by the impact when the air-floating platform 3 stops suddenly, resulting in inaccurate positioning.

[0046] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A long-stroke air-floating nanopositioning platform, comprising: A base (1), wherein a linear motor (2) is provided on the base (1), wherein the linear motor (2) is connected to an air-floating platform (3), and a bearing platform (4) is provided below the air-floating platform (3). The invention is characterized in that the base (1) is embedded with a plurality of shock absorbing components (5), and the shock absorbing components (5) are arranged at intervals below the load-bearing platform (4). The shock absorbing assembly (5) comprises a bottom plate (50), a shock absorbing column (51) is symmetrically arranged at the upper end of the bottom plate (50), a piston (52) is arranged in the shock absorbing column (51), the bottom end of the piston (52) and the inner wall of the shock absorbing column (51) form a cavity, a sliding rod (53) is fixed to the upper end of the piston (52), the top end of the sliding rod (53) is connected to an assembly head (54), a top plate (55) is arranged on the assembly head (54), the top plate (55) is connected to the bottom end of the load-bearing platform (4), a shock absorbing spring (56) is arranged between the assembly head (54) and the shock absorbing column (51), and the shock absorbing spring (56) is sleeved on the sliding rod (53). The assembly head (54) comprises an assembly frame (540), the assembly frame (540) is fixed to the top of the slide bar (53), the assembly frame (540) has an upward conical surface, a groove body (541) is provided around the conical surface, a roller (542) is rotatably provided in the groove body (541), an assembly cover (543) is provided above the assembly frame (540), the top of the assembly cover (543) is fixed to the bottom of the load-bearing platform (4), the inner wall of the assembly cover (543) is provided in cooperation with the conical surface, and the assembly cover (543) can contact the roller (542), The upper end of the load-bearing platform (4) is provided with mounting holes (40) at intervals, and an auxiliary air flotation component (6) is provided in the mounting hole (40). The auxiliary air flotation component (6) comprises a porous plate (60), a column (61) and a baffle (62) connected in sequence from top to bottom. The porous plate (60) and the baffle (62) are respectively arranged in cooperation with the mounting holes (40). The mounting holes (40) are connected to the same air intake pipeline (41) at the bottom. The air intake pipeline (41) ) is opened in the load-bearing platform (4) and is connected to the outside, the air inlet pipeline (41) is connected to a first air pump, a retaining ring (63) is arranged in the mounting hole (40), the column (61) and the retaining ring (63) are arranged in cooperation, the mounting hole (40) is located between the walls above and below the retaining ring (63) and an auxiliary air path (64) is connected, the column (61) is opened with an air outlet channel, and the air outlet channel is connected to the top and side wall of the column (61), The port of the auxiliary gas circuit (64) located below the retaining ring (63) is located on the side of the retaining plate (62), and the port of the auxiliary gas circuit (64) located above the retaining ring (63) is located below the porous plate (60).

2. The large-stroke air-floating nanopositioning platform according to claim 1, characterized in that: The upper end surface of the base (1) is provided with a plurality of square grooves (10) downwardly, the number of the square grooves (10) is equal to the number of the shock absorbing components (5) and the positions are arranged correspondingly, and the bottom plate (50) is arranged at the bottom end of the square grooves (10).

3. The large-stroke air-floating nanopositioning platform according to claim 1, characterized in that: The load-bearing platform (4) is provided with a limit piece (7) at two end positions, the limit piece (7) comprises a mounting sleeve (70) embedded in the load-bearing platform (4), a sliding column (71) is provided in the mounting sleeve (70), a rubber head (72) is fixed to the top of the sliding column (71), a hole is provided at the bottom of the mounting sleeve (70), the sliding column (71) is matched and slidably arranged in the hole, the load-bearing platform (4) is provided with a limit air path, the limit air path is communicated with the bottom of the mounting sleeve (70), and the limit air path is externally connected to a second air pump.

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