How solar cells are manufactured

Abstract

To provide a solar cell with relatively high efficiency and a method for manufacturing the same, a photovoltaic power generation module, and a photovoltaic power generation system.SOLUTION: A method for manufacturing a solar cell includes the steps of: providing a substrate including a base material and a doped conducting material layer, a first surface and a portion of a first side surface of the base material having a textured structure, and the doped conducting material layer covering the textured structure; forming a passivating contact material layer on each surface of the substrate; cutting the substrate, on which the passivating contact material layer is formed, along the thickness direction of the base material to form a sub-substrate, so as to form a doped conducting layer; etching and removing the passivating contact material layer to form a passivating contact layer; and forming, on the doped conducting layer, a first passivation layer which further covers at least a portion of a cut edge side surface that is a cut side surface of the sub-substrate.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present application relates to the field of solar cell technology, and in particular to a solar cell and a manufacturing method thereof, a solar power generation module, and a solar power generation system. [Background technology]

[0002] With the rapid development of photovoltaic technology, the conversion efficiency of crystalline silicon solar cells is improving year by year. Currently, Tunnel Oxide Passivated Contact (TOPCon) cells stand out for their many advantages, such as high efficiency and relatively mature industrial processes, and many manufacturers in the industry have begun to expand their research and development efforts on TOPCon cells. In the manufacturing process of TOPCon cells, related technology involves a doping process on the front and back sides to improve the lateral transport ability of the front and back carriers, but at the same time, a large amount of carriers are recombined on the side of the cell, which makes it easy for leakage problems to occur on the side of the cell, thereby reducing the efficiency of the solar cell. Summary of the Invention [Problem to be solved by the invention]

[0003] Based on this, there is a need to provide a solar cell and a method for manufacturing the same, a photovoltaic power generation module, and a photovoltaic power generation system that have a relatively high efficiency. [Means for solving the problem]

[0004] A first aspect of an embodiment of the present application provides a solar cell, comprising: A substrate including a first surface, a second surface, and a plurality of first side surfaces adjacent to each other between the first surface and the second surface, the substrate having a textured structure on at least a portion of the first surface and the first side surfaces of the substrate; a doped conductive layer disposed on at least the first surface and a portion of the first side surface so as to cover the textured structure; a first passivation layer disposed on the doped conductive layer and covering at least a portion of the first surface and the first side surface so as to cover at least the doped conductive layer; a passivation contact layer disposed on the second surface; and a second passivation layer disposed on the passivation contact layer and covering the second surface so as to cover the passivation contact layer.

[0005] In one embodiment, the first side includes a textured region having a textured structure and a flat region adjacent to the textured region; The first passivation layer completely covers the textured region on the first side and at least partially covers the flat region.

[0006] In one embodiment, an edge of the first passivation layer remote from the first surface is flush with a surface of the passivation contact layer remote from the substrate.

[0007] In one embodiment, the substrate further comprises at least one cutting edge side adjacent between the first surface and the second surface; The textured structure is provided on only a portion of the first surface and the first side surface, and the doped conductive layer is provided on only a portion of the first surface and the first side surface so as to cover the textured structure.

[0008] In one embodiment, the cutting edge side is flush with edges of the doped conductive layer, the first passivation layer, the passivation contact layer, and the second passivation layer that are located on the same side as the cutting edge side in a normal direction of the cutting edge side.

[0009] In one embodiment, the first passivation layer further covers at least a portion of the cutting edge side.

[0010] In one embodiment, the second passivation layer further covers at least some area of ​​the cutting edge side so as to at least partially cover the first passivation layer at the cutting edge side.

[0011] In one embodiment, the substrate further comprises at least one cutting edge side adjacent between the first surface and the second surface; At least a part of the surface of the cutting edge side also has a textured structure, and the doped conductive layer is disposed on the first surface, a part of the surface of the first side, and a part of the surface of the cutting edge side so as to cover the textured structure; The first passivation layer further covers at least a portion of the cut edge side surface so as to cover at least the doped conductive layer.

[0012] In one embodiment, the second passivation layer further covers at least some area of ​​the cutting edge side so as to at least partially cover the first passivation layer at the cutting edge side.

[0013] In one embodiment, the second passivation layer further covers at least a portion of the first side such that the second passivation layer at least partially covers the first passivation layer on the first side.

[0014] In one embodiment, the first side includes a textured region having a textured structure and a flat region adjacent to the textured region; the portion of the first passivation layer located on the first side includes a first portion covering the planar region; A second passivation layer covers at least the first portion.

[0015] In one embodiment, the portion of the first passivation layer located on the first side further includes a second portion covering the textured region; A second passivation layer covers at least a portion of the first portion and the second portion.

[0016] In one embodiment, an edge of the second passivation layer remote from the second surface is flush with an outer surface of the first passivation layer located on the first surface.

[0017] In one embodiment, the textured structure on the first surface of the substrate and the textured structure on the first side of the substrate are continuous structures or have a gap between the textured structure on the first surface of the substrate and the textured structure on the first side of the substrate.

[0018] In one embodiment, the first passivation layer includes a first passivation film and a first anti-reflective film stacked on the doped conductive layer; and / or The second passivation layer includes at least one second anti-reflective coating layer laminated on the passivation contact layer.

[0019] A second aspect of an embodiment of the present application provides a method for manufacturing a solar cell, the method comprising the steps of: providing a substrate including a base material and a doped conductive layer, the base material including a first surface, a second surface, and a plurality of first side surfaces adjacent to the first surface and the second surface, the substrate being provided with a textured structure on at least a portion of the first surface and the first side surfaces of the base material, the doped conductive layer being provided on at least a portion of the first surface and the first side surfaces so as to cover the textured structure; forming a passivation contact layer on a second side of the substrate; forming a first passivation layer on the doped conductive layer, the first passivation layer covering at least the first surface and at least a portion of the first side surface so as to cover at least the doped conductive layer; forming a second passivation layer on the passivation contact layer over the second surface so as to cover the passivation contact layer to form a solar cell substrate.

[0020] In one embodiment, after the step of forming the second passivation layer on the passivation contact layer, The method further includes cutting the solar cell substrate with a laser along a thickness direction to form at least two solar cells.

[0021] In one embodiment, the step of providing a substrate comprises: performing a texturing process and a doping element diffusion on at least the first surface and the first side surface of the substrate; and etching the substrate to expose a first target area on the second surface and each first side of the substrate; The first target areas are areas on each first side of the substrate that are adjacent and connected to the second surface.

[0022] In one embodiment, the step of providing a substrate comprises: cutting the substrate blank along a thickness direction to form a substrate and forming cut edge sides on the substrate; texturing and doping element diffusion at least on the first surface, the first side surface and the cut edge side surface of the substrate; and etching the substrate to expose a second surface of the substrate, a first target area on each of the first side surfaces, and a second target area on each of the cutting edge side surfaces, thereby forming a textured structure and a doped conductive layer covering the textured structure on the first surface of the substrate, a portion of the surface of the first side surfaces, and a portion of the surface of the cutting edge side surfaces; The first target area is the area where the first side is adjacent to the second side, and the second target area is the area where the cutting edge side is adjacent to the second side.

[0023] In one embodiment, forming a passivation contact layer on the second side of the substrate comprises: forming, in sequence, a tunnel material layer, a polysilicon doping material layer, and an oxide material layer on each surface of a substrate; Etching away a layer of oxide material on a surface of the first side of the substrate and on each side of the substrate; and etching away the polysilicon doping material layer and the tunnel material layer on the first surface of the substrate and on each side of the substrate; The first side of the substrate corresponds to the first surface of the base material.

[0024] In one embodiment, forming a passivation contact layer on the second side of the substrate comprises: forming a layer of passivating contact material on each surface of the substrate; cutting the substrate on which the passivation contact material layer is formed along a thickness direction of the base material to form a cut edge side of the base material; and etching away a layer of passivation contact material disposed outside the second surface of the substrate to form the passivation contact layer.

[0025] In one embodiment, after the step of forming the second passivation layer on the passivation contact layer, The method further includes fabricating electrodes on the first passivation layer and the second passivation layer, respectively.

[0026] A third aspect of the present embodiment provides a photovoltaic module including at least one cell string, the cell string including at least two of the solar cells.

[0027] A fourth aspect of the present invention provides a solar power generation system including the solar power generation module.

[0028] A fifth aspect of the present embodiment provides a method for manufacturing a solar cell, the method comprising the steps of: providing a substrate including a base material and a doped conductive material layer, the base material including a first surface, a second surface, and a plurality of first side surfaces adjacent to the first surface and the second surface, the first surface and a portion of the first side surfaces of the base material having a textured structure, the doped conductive material layer being provided on the first surface and a portion of the first side surfaces so as to cover the textured structure; forming a layer of passivating contact material on each surface of the substrate; Cutting the substrate on which the passivation contact material layer is formed along the thickness direction of the base material to form at least two sub-substrates, thereby cutting the doped conductive material layer to form a doped conductive layer; Etching away the passivation contact material layer on a surface and each side of the first side of the sub-substrate to form a passivation contact layer on the sub-substrate, the surface of the first side of the sub-substrate corresponding to the first surface of the substrate; The method includes forming a first passivation layer on the doped conductive layer, the first passivation layer covering at least a portion of the area of ​​the first face and the first side so as to cover at least the doped conductive layer, the first passivation layer further covering at least a portion of the cutting edge side, the cutting edge side being a cut side in the sub-substrate.

[0029] In one embodiment, the step of providing a substrate comprises: performing a texturing process and a doping element diffusion on at least the first surface and the first side surface of the substrate; and etching the substrate to expose a first target area on the second surface and each first side of the substrate; The first target areas are areas on each first side of the substrate that are adjacent and connected to the second surface.

[0030] In one embodiment, the step of etching the substrate to expose first target areas on the second surface and each first side of the substrate includes: Etching the substrate after the texturing process and the doping element diffusion to expose the texture structure on the second surface and each of the first target areas; and etching away the exposed textured features to expose a second surface of the substrate and a first target area on each first side.

[0031] In one embodiment, the step of forming a passivating contact material layer on each surface of the substrate comprises: The method includes forming, in sequence, a tunnel material layer, a polysilicon doping material layer, and an oxide material layer on each surface of a substrate.

[0032] In one embodiment, the step of etching away the passivation contact material layer on the surface and each side of the first side of the sub-substrate to form a passivation contact layer on the sub-substrate comprises: Etching away the layer of oxide material on a surface of the first side of the sub-substrate and on each side of the sub-substrate; Etching away the polysilicon doping material and the tunnel material layer on the first surface of the sub-substrate and on each side of the sub-substrate, and etching and polishing the cut edge sides of the sub-substrate.

[0033] In one embodiment, the step of etching away the oxide material layer is performed by a chain conveyor; The step of etching away the polysilicon doping material and the tunnel material layer is performed by a slot conveyor.

[0034] In one embodiment, after the step of etching away the polysilicon doping material and the tunnel material layer on the surface of the first side of the sub-substrate and on each side of the sub-substrate, The method further includes the step of etching away the oxide material layer on a surface of a second side of the sub-substrate, the surface of the second side of the sub-substrate corresponding to the second surface of the substrate.

[0035] In one embodiment, after the step of forming a first passivation layer on the doped conductive layer, The method further includes forming a second passivation layer on the passivation contact layer, the second passivation layer covering at least the second surface, at least a portion of the first side surface, and at least a portion of the cutting edge side surface so as to cover the passivation contact layer and at least a portion of the first passivation layer.

[0036] In one embodiment, after the step of forming the second passivation layer on the passivation contact layer, The method further includes fabricating electrodes on the first passivation layer and the second passivation layer, respectively, to form a solar cell.

[0037] In one embodiment, the step of cutting the substrate having the passivation contact material layer formed thereon along the thickness direction of the base material to form a sub-substrate includes: The method includes a step of cutting the substrate having the passivation contact material layer formed thereon with a laser along the thickness direction of the base material to form a sub-substrate.

[0038] A sixth aspect of the present embodiment provides a solar cell, the solar cell comprising: A substrate including a first surface, a second surface, and at least one first side surface adjacent between the first surface and the second surface, the substrate having a textured structure on at least a portion of the first surface and the first side surface of the substrate; a doped conductive layer disposed on at least the first surface and a portion of the first side surface so as to cover the textured structure; a first passivation layer disposed on the doped conductive layer and covering at least a portion of the first surface and the first side surface so as to cover at least the doped conductive layer; a passivation contact layer disposed on the second surface; and a second passivation layer that is stacked on the passivation contact layer and covers the second surface so as to cover the passivation contact layer.

[0039] A seventh aspect of the present embodiment provides a method for manufacturing a solar cell, the method comprising the steps of: providing a substrate including a base material and a doped conductive layer, the base material including a first surface, a second surface, and at least one first side surface adjacent between the first surface and the second surface, a textured structure being provided on at least a portion of the first surface and the first side surface of the base material, and the doped conductive layer being provided on at least a portion of the first surface and the first side surface so as to cover the textured structure; forming a passivation contact layer on a second side of the substrate; forming a first passivation layer on the doped conductive layer, the first passivation layer covering at least a portion of the first surface and the first side surface so as to cover at least the doped conductive layer; forming a second passivation layer on the passivation contact layer over the second surface so as to cover the passivation contact layer to form a solar cell substrate.

[0040] An eighth aspect of the present embodiment provides a method for manufacturing a solar cell, the method comprising the steps of: providing a substrate including a base material and a doped conductive material layer, the base material including a first surface, a second surface, and at least one first side surface adjacent between the first surface and the second surface, the base material having a textured structure on at least a portion of the first surface and the first side surface of the base material, the doped conductive material layer being provided on at least the first surface and a portion of the first side surface so as to cover the textured structure; forming a layer of passivating contact material on each surface of the substrate; cutting the substrate on which the passivation contact material layer is formed along a thickness direction of the base material to form a sub-substrate, thereby cutting the doped conductive material layer to form a doped conductive layer; Etching away the passivation contact material layer on a first surface and each side of the sub-substrate to form a passivation contact layer on the sub-substrate, the first surface of the sub-substrate corresponding to the first surface of the substrate; The method includes forming a first passivation layer on the doped conductive layer, the first passivation layer covering at least a portion of the area of ​​the first face and the first side so as to cover at least the doped conductive layer, the first passivation layer further covering at least a portion of the cutting edge side, the cutting edge side being a cut side in the sub-substrate. Effect of the Invention

[0041] In the solar cell of the embodiment of the present application, a textured structure is provided on the first surface and a portion of the first side surface of the substrate, and a doped conductive layer is provided on the first surface and a portion of the first side surface so as to cover the textured structure. Since the textured structure is provided on the portion of the first side surface and the doped conductive layer is provided on the textured structure, the doped conductive layer at that position helps to reduce carrier recombination at the interface where the first side surface is located, and realizes a better passivation effect for the first side surface. In addition, the textured structure provided on the first side surface helps to increase the light absorption area of ​​the solar cell, improve the light-generated current of the solar cell, and improve the efficiency of the solar cell.

[0042] In the solar cell of the embodiment of the present application, the first passivation layer is laminated on the doped conductive layer, and the first passivation layer covers at least a part of the first surface and the first side surface so as to cover at least the doped conductive layer. The first passivation layer covers at least a part of the first surface and the first side surface, and therefore the first passivation layer protects at least a part of the first side surface, thereby increasing the passivation effect on the first side surface and alleviating carrier recombination occurring on the first side surface, and also effectively avoiding leakage current on the first side surface because the first passivation layer is an insulating layer, thereby improving the cell conversion efficiency and increasing the power output of the solar cell. [Brief description of the drawings]

[0043] [Figure 1] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Diagram 2] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Diagram 3] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Figure 4] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Diagram 5] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Figure 6] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Figure 7] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Figure 8] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Figure 9] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Figure 10] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Figure 11] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Figure 12] 1 is a structural schematic diagram of a solar cell provided in one embodiment of the present application; [Figure 13] 1 is a flowchart of a method for manufacturing a solar cell provided in one embodiment of the present application. [Figure 14] 1 is a structural schematic diagram of a substrate in a solar cell manufacturing method provided in an embodiment of the present application; [Figure 15] 1 is a structural schematic diagram of forming a texture structure and a doped conductive layer on a substrate in a solar cell manufacturing method provided in an embodiment of the present application. FIG. [Figure 16A] 1 is a structural schematic diagram of a method for forming a passivation contact layer in a solar cell manufacturing method provided in an embodiment of the present application. [Figure 16B] 1 is a structural schematic diagram of a method for forming a passivation contact layer in a solar cell manufacturing method provided in an embodiment of the present application. [Figure 17] 2 is a schematic diagram of forming a first passivation layer in a method for manufacturing a solar cell provided in one embodiment of the present application. FIG. [Figure 18] FIG. 2 is a schematic diagram of forming a second passivation layer in a method for manufacturing a solar cell provided in an embodiment of the present application. [Figure 19] 1 is a schematic diagram of a solar cell formed in a method for manufacturing a solar cell provided in one embodiment of the present application. [Figure 20]1 is a structural schematic diagram of a first side of a substrate in a solar cell manufacturing method provided in an embodiment of the present application; FIG. [Figure 21] 1 is a structural schematic diagram of a substrate in another solar cell manufacturing method provided in an embodiment of the present application. [Figure 22] 1 is a schematic diagram of forming a passivation contact layer on a substrate in another solar cell manufacturing method provided in an embodiment of the present application. [Figure 23] FIG. 2 is a schematic diagram of forming a first passivation layer on a doped conductive layer in another solar cell manufacturing method provided in an embodiment of the present application. [Figure 24] FIG. 11 is a schematic diagram showing a method for forming a second passivation layer on a passivation contact layer in another solar cell manufacturing method provided in an embodiment of the present application. [Diagram 25] 1 is a schematic diagram showing a process for forming electrodes on a first passivation layer and a second passivation layer in another solar cell manufacturing method provided in an embodiment of the present application. FIG. [Figure 26] 1 is a structural schematic diagram of a solar cell formed in another solar cell manufacturing method provided in an embodiment of the present application. [Figure 27] 11 is a photograph of a cross section of a solar cell cut in another solar cell manufacturing method provided in one embodiment of the present application. [Figure 28] 1 is a flowchart of a method for manufacturing a solar cell provided in one embodiment of the present application. [Figure 29A] 1 is a structural schematic diagram of a substrate in a solar cell manufacturing method provided in an embodiment of the present application; [Figure 29B] 1 is a structural schematic diagram of a substrate on which a passivation contact material layer is formed in a solar cell manufacturing method provided in an embodiment of the present application. FIG. [Diagram 30] 1 is a structural schematic diagram of a sub-substrate in a solar cell manufacturing method provided in one embodiment of the present application. [Diagram 31] 2 is a schematic diagram of forming a first passivation layer in a method for manufacturing a solar cell provided in one embodiment of the present application. FIG. [Diagram 32]FIG. 2 is a schematic diagram of forming a second passivation layer in a method for manufacturing a solar cell provided in an embodiment of the present application. [Diagram 33] 1 is a schematic diagram of a solar cell formed in a method for manufacturing a solar cell provided in one embodiment of the present application. [Diagram 34] 1 is a structural schematic diagram of a solar power generation module provided in an embodiment of the present application; [Diagram 35] 1 is a structural schematic diagram of a manufacturing process of a solar power generation module provided in an embodiment of the present application; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0044] In order to make the above-mentioned objects, features and advantages of the present invention more clearly comprehensible, specific embodiments of the present invention will be described in detail with reference to the drawings. In order to facilitate a full understanding of the present invention, many specific details are described in the following description. However, the present invention can be embodied in many other ways different from those described herein, and those skilled in the art can make similar improvements within the scope of the present invention. Therefore, the present invention is not limited to the specific examples disclosed below.

[0045] In describing the present invention, it should be understood that orientations or positional relationships indicated by terms such as "center," "longitudinal," "lateral," "length," "width," "thickness," "up," "down," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like, are based on the orientations or positional relationships shown in the drawings for ease of and simplicity of description of the present invention, and are not intended to indicate or imply that the devices or elements referred to have a particular orientation or must be configured and operated in a particular orientation, and therefore cannot be taken as limiting the present invention.

[0046] Furthermore, the terms "first" and "second" are merely descriptive and should not be understood to indicate or imply a relative importance or number of technical features being presented. Thus, a feature qualified as "first" or "second" may explicitly or implicitly include at least one of that feature. In the present description, "plurality" means at least two, e.g., two, three, etc., unless otherwise specified.

[0047] In the present invention, unless otherwise expressly specified and limited, the terms "attached", "coupled", "connected", "fixed" and the like should be understood in a broad sense, and unless otherwise specified, may be, for example, a fixed connection, a detachable connection, or integration, may be a mechanical connection or an electrical connection, may be directly connected, may be indirectly connected via an intermediate medium, may be an internal communication between two elements, or may be an interactive relationship between two elements. The specific meaning of the above terms in the present invention can be understood by a person skilled in the art according to a specific situation.

[0048] In the present invention, unless otherwise expressly specified and limited, a first feature being "above" or "below" a second feature means that the first feature and the second feature are in direct contact with each other, or that the first feature and the second feature are in indirect contact with each other via an intermediate medium. Furthermore, a first feature being "above," "above," and "on the upper surface" of a second feature means that the first feature is directly above or diagonally above the second feature, or simply that the horizontal height of the first feature is higher than that of the second feature. A first feature being "below," "below," and "on the lower surface" of a second feature means that the first feature is directly below or diagonally below the second feature, or simply that the horizontal height of the first feature is lower than that of the second feature.

[0049] It should be noted that when an element is referred to as being "fixed" or "mounted" to another element, it may be directly on the other element, or intermediate elements may be present. When an element is referred to as being "connected" to another element, it may be directly connected to the other element, or intermediate elements may co-exist. As used herein, the terms "vertical," "horizontal," "up," "down," "left," "right," and similar expressions are for illustrative purposes only and do not represent the only embodiment.

[0050] Hereinafter, a solar cell and a manufacturing method thereof, a solar power generation module, and a solar power generation system according to embodiments of the present application will be described with reference to the drawings. Unless otherwise specified, the term "cover" in this application refers to partially or completely covering.

[0051] 1, an embodiment of the present application provides a solar cell 100 including a substrate 10, a doped conductive layer 30, a first passivation layer 40, a passivation contact layer 50, and a second passivation layer 60. The substrate 10 includes a first face F, a second face S disposed opposite to each other, and at least one first side face C1 adjacent between the first face F and the second face S.

[0052] The substrate 10 is used to receive incident light and generate photo-generated carriers. Exemplarily, the solar cell 100 may be a TOPCon cell, and both the first face F and the second face S of the substrate 10 may be used to receive incident light. In some embodiments, the substrate 10 further includes at least one cut edge side C2 adjacent between the first face F and the second face S, and the cut edge side C2 is a cut side formed by cutting.

[0053] In the embodiment of the present application, the textured structure 20 is provided on at least a portion of the first surface F and the first side surface C1 of the substrate 10. The doped conductive layer 30 is disposed on at least a portion of the first surface F and the first side surface C1 so as to cover the textured structure 20, for example, the doped conductive layer 30 covers the entire textured structure 20. The first passivation layer 40 is laminated on the doped conductive layer 30, and the first passivation layer 40 covers at least a portion of the first surface F and the first side surface C1 so as to cover at least the doped conductive layer 30, for example, the first passivation layer 40 covers the entire doped conductive layer 30. The passivation contact layer 50 is disposed on the second surface S. The second passivation layer 60 is laminated on the passivation contact layer 50, and the second passivation layer 60 covers the second surface S so as to cover the passivation contact layer 50, for example, the second passivation layer 60 covers the entire passivation contact layer 50.

[0054] In the embodiment of the present application, the textured structure 20 is provided on the first face F and a part of the first side C1 of the substrate 10, and the doped conductive layer 30 is provided on the first face F and a part of the first side C1 so as to cover the textured structure 20. Since the textured structure 20 is provided on a part of the first side C1 and the doped conductive layer 30 is provided on the textured structure 20, the doped conductive layer 30 at the part of the first side C1 helps to reduce carrier recombination at the interface where the first side C1 is located, and realizes a better passivation effect for the first side C1. In addition, the textured structure 20 provided on the first side C1 helps to increase the light absorption area of ​​the solar cell 100, improve the light-generated current of the solar cell 100, and improve the efficiency of the solar cell 100.

[0055] Meanwhile, the first passivation layer 40 is laminated on the doped conductive layer 30, and the first passivation layer 40 covers at least the first face F and at least a part of the first side C1 so as to cover at least the doped conductive layer 30. Since the first passivation layer 40 covers at least a part of the first face F and the first side C1, the first passivation layer 40 protects at least a part of the first side C1, thereby increasing the passivation effect on the first side C1 and not only alleviating the carrier recombination generated on the first side C1, but also effectively avoiding the occurrence of leakage current on the first side C1 because the first passivation layer 40 is an insulating layer, thereby improving the conversion efficiency of the cell and increasing the power output of the solar cell 100.

[0056] In some embodiments, the solar cell 100 further includes at least two electrodes 70 disposed on the side of the substrate 10 where the first face F is located and the side of the substrate 10 where the second face S is located, respectively. The electrode 70 disposed on the side of the substrate 10 where the first face F is located contacts the doped conductive layer 30 through the first passivation layer 40, thereby being electrically connected to the doped conductive layer 30 and spaced apart from the substrate 10. The electrode 70 disposed on the side of the substrate 10 where the second face S is located contacts the passivation contact layer 50 through the second passivation layer 60, thereby being electrically connected to the passivation contact layer 50 and spaced apart from the substrate 10.

[0057] In the embodiment of the present application, the first surface F and the second surface S of the substrate 10 may be, for example, two end surfaces in the thickness direction H of the substrate, and the substrate 10 includes a plurality of side surfaces adjacent to each other between the first surface F and the second surface S, and the plurality of side surfaces are wound in the circumferential direction of the first surface F and sequentially connected to each other, and both ends of each side surface are connected to the first surface F and the second surface S, respectively. One, a plurality, or all of the plurality of side surfaces may be the first side surface C1. The remaining side surfaces other than the first side surface C1 may be the cutting edge side surface C2. In some embodiments, the substrate 10 may include the first side surface C1 and the cutting edge side surface C2 at the same time, and the first side surface C1 and the cutting edge side surface C2 may be wound in the circumferential direction of the first surface F and sequentially connected to each other. In some embodiments, the substrate 10 is a rectangle in a plan view, and the total number of the first side surfaces C1 and the cutting edge side surfaces C2 is four. The substrate 10 may have other shapes as necessary. In some embodiments, the first side C1 and the cutting edge side C2 are disposed opposite to each other, for example, each first side C1 is connected to each other and further connected to the cutting edge side C2, or the first side C1 and the cutting edge side C2 may be arranged alternately. Of course, the present application is not limited thereto, and the relative positions of the first side C1 and the cutting edge side C2 may be disposed as required.

[0058] The textured structure 20 is provided on the first surface F and a portion of the first side surface C1 of the substrate 10. The textured structure 20 located on the first side surface C1 may be disposed adjacent to the first surface F. In some embodiments, the textured structure 20 on the first surface F of the substrate 10 and the textured structure 20 on the first side surface C1 are continuous structures. In other embodiments, there may be a gap between the textured structure 20 on the first surface F of the substrate 10 and the textured structure 20 on the first side surface C1 of the substrate 10, i.e., both may be discontinuous structures.

[0059] The solar cell 100 may be an N-type cell or a P-type cell, and the substrate 10 of the N-type cell is doped with an N-type element, and the doped conductive layer 30 is doped with a P-type element. The substrate 10 of the P-type cell is doped with a P-type element, and the doped conductive layer 30 is doped with an N-type element. The doped conductive layer 30 is used to form a PN junction with the substrate 10. In the embodiment of the present application, assuming that the substrate 10 is an N-type substrate, the doped conductive layer 30 may be P-type doped, and may be, for example, a doped conductive layer 30 doped with boron element (also called a P+ type emitter).

[0060] The doped conductive layer 30 is partially disposed on the first face F and partially disposed on a surface of the first side face C1, and its coverage covers at least the textured structure 20. In some embodiments, the coverage of the doped conductive layer 30 may be larger than the textured structure 20. In some embodiments, the coverage of the doped conductive layer 30 corresponds to the textured structure 20, i.e., the doped conductive layer 30 just completely covers the textured structure 20.

[0061] Continuing to refer to FIG. 1, the passivation contact layer 50 is disposed on the second surface S, for example, the passivation contact layer 50 may be directly stacked on the second surface S of the substrate 10. The passivation contact layer 50 reduces carrier recombination on the second surface S of the substrate 10, thereby increasing the open circuit voltage of the solar cell 100 and improving the photoelectric conversion efficiency of the solar cell 100. The passivation contact layer 50 may include a tunnel oxide layer 51 and a polysilicon doped conductive layer 52 sequentially stacked on the second surface S. Exemplarily, the tunnel oxide layer 51 is used to realize interface passivation of the second surface S of the substrate 10 to achieve the effect of chemical passivation. Specifically, the dangling bonds on the surface of the substrate 10 are saturated to reduce the interface defect state density of the second surface S of the substrate 10, thereby reducing the recombination center of the second surface S of the substrate 10 and reducing the carrier recombination rate. Here, the material of the tunnel oxide layer 51 may be a dielectric material, such as at least one of silicon oxide, magnesium fluoride, amorphous silicon, polysilicon, silicon carbide, silicon nitride, silicon oxynitride, alumina, or titanium oxide. In some embodiments, the electrode 70 disposed on the second surface S of the substrate 10 may only contact the polysilicon doped conductive layer 52 and be separated from the tunnel oxide layer 51 by the polysilicon doped conductive layer 52.

[0062] The first passivation layer 40 is laminated on the doped conductive layer 30. The first passivation layer 40 plays the role of surface passivation and anti-reflection in the solar cell 100, and can provide good chemical passivation for the dangling bonds on the surface of the substrate 10 and also play the role of anti-reflection on the front side of the solar cell 100.

[0063] Exemplarily, the first passivation layer 40 includes a first passivation film (not shown) and a first anti-reflection film (not shown) which are sequentially stacked on the doped conductive layer 30 .

[0064] The first antireflection film is located on the first surface F side of the substrate 10, i.e., on the surface of the solar cell 100 that receives incident light (called the front surface or light-receiving surface), and provides an antireflection effect on the front surface of the solar cell 100. The first antireflection film may have a multilayer structure. In the first antireflection film with a multilayer structure, the material of each layer may be one or more of silicon oxide, silicon nitride, and silicon oxynitride.

[0065] The first passivation film may have a single-layer structure or a multi-layer structure, and the material of the first passivation film may be at least one of aluminum oxide, silicon oxide, silicon nitride, and silicon oxynitride. The first passivation film may be formed by chemical vapor deposition.

[0066] The first passivation layer 40 covers at least the first face F and at least a portion of the first side C1 so as to cover at least the doped conductive layer 30. Specifically, the first passivation layer 40 can continuously cover at least a portion of the first face F and the first side C1 adjacent to the first face F, and thus cover the doped conductive layer 30. At this time, the first passivation layer 40 includes a portion covering the first face F and another portion continuously extending from the portion covering the first face F onto the first side C1.

[0067] The second passivation layer 60 is laminated on the passivation contact layer 50, and the second passivation layer 60 may adopt a single layer or multi-layer structure, and the material of the second passivation layer 60 may be silicon oxide, silicon nitride, or silicon oxynitride. The second passivation layer 60 is also disposed on the back surface, also called the backlight surface, of the solar cell 100. With the development of solar cell 100 technology, the back surface of the solar cell 100 may also receive the energy of sunlight, mainly reflected light and scattered light from the surrounding environment. The second passivation layer 60 includes at least one layer of a second anti-reflection film (not shown) laminated on the passivation contact layer 50. In this way, the reflectance of sunlight on the back surface of the solar cell 100 can be reduced, the absorption rate of sunlight on the back surface of the solar cell 100 can be improved, and the second passivation layer 60 can simultaneously play the role of passivation and anti-reflection.

[0068] 1 and 2, in some embodiments, the first side C1 includes a textured region R having the textured structure 20 and a flat region P adjacent to the textured region R, where the flat region P refers to a region of the first side C1 where the textured structure 20 is not formed. In some embodiments, the textured region R is adjacent to the first face F, and the flat region P is away from the first face F.

[0069] In some embodiments, as described above, the first passivation layer 40 covers at least the first face F and at least a portion of the area of ​​the first side C1. For example, the edge of the first passivation layer 40 away from the first face F on the first side C1 is flush with the edge of the doped conductive layer 30, or the first passivation layer 40 extends outside the edge of the doped conductive layer 30 along the thickness direction H of the substrate 10.

[0070] In an embodiment in which the first passivation layer 40 extends outside the edge of the doped conductive layer 30 along the thickness direction H of the substrate 10, the first passivation layer 40 can completely cover the textured region R on the first side C1 and at least partially cover the flat region P. In this way, the covering and passivation effect of the first passivation layer 40 on the first side C1 is high.

[0071] The reason why the first passivation layer 40 completely covers the textured region R on the first side C1 and also covers at least a portion of the flat region P may be that, during the manufacturing process of the solar cell 100, a film layer cannot be formed at the contact area between a positioning nodule or the like and the first side C1 of the substrate 10, and this may result in the first passivation layer 40 not completely covering the first side C1.

[0072] 2 shows an embodiment in which the first passivation layer 40 is provided on the first side C1 and the edge remote from the first face F is within the flat region P. FIG 1 shows an embodiment in which the edge of the first passivation layer 40 remote from the first face F is flush with the surface of the passivation contact layer 50 remote from the substrate 10. As can be seen, the embodiment shown in FIG 1 has a higher passivation effect than the embodiment shown in FIG 2.

[0073] In some embodiments, the edges of the first passivation layer 40 are flush with the edges of the doped conductive layer 30; for example, referring to Figures 3 and 4, the first passivation layer 40 does not extend to the flat region P along the thickness direction H of the substrate 10, i.e., the coverage of the first passivation layer 40 coincides with the doped conductive layer 30.

[0074] In some embodiments, the second passivation layer 60 further covers at least a portion of the first side C1, so as to at least partially cover the first passivation layer 40 on the first side C1. The first passivation layer 40 covers at least a portion of the first face F and the first side C1, and the second passivation layer 60 covers at least a portion of the first passivation layer 40, so that the first passivation layer 40 and the second passivation layer 60 together protect at least a portion of the first side C1, increase the passivation effect on at least a portion of the first side C1, and not only alleviate the carrier recombination generated on the first side C1, but also effectively avoid the occurrence of leakage current on the first side C1 because the second passivation layer 60 is an insulating layer, thereby improving the cell conversion efficiency and increasing the power output of the solar cell 100.

[0075] The second passivation layer 60 covers at least a portion of the second surface S and the first side surface C1 so as to cover the passivation contact layer 50 and at least a portion of the first passivation layer 40. Specifically, the second passivation layer 60 continuously covers at least a portion of the area adjacent to the second surface S on the second surface S and the first side surface C1, and thus covers the passivation contact layer 50 and the first passivation layer 40. At this time, the second passivation layer 60 includes a portion covering the second surface S and another portion continuously extending from the portion covering the second surface S onto the first side surface C1.

[0076] The installation range of the second passivation layer 60 on the first side surface C1 will be described below with reference to FIGS.

[0077] In some embodiments, the first passivation layer 40 extends outside the edge of the doped conductive layer 30 along the thickness direction H of the substrate 10, and referring to Figures 1 and 2, the portion of the first passivation layer 40 located on the first side C1 may include a first portion 41 covering the flat region P, and the second passivation layer 60 may cover at least the first portion 41. In this way, it is ensured that the second passivation layer 60 can reliably cover the first passivation layer 40, and a situation where the boundary position between the two is not covered by the passivation layer is avoided.

[0078] Furthermore, the portion of the first passivation layer 40 located on the first side surface C1 further includes a second portion 42 covering the textured region R, and the second passivation layer 60 covers at least a part of the first portion 41 and the second portion 42. In this manner, the coverage of the second passivation layer 60 over the first passivation layer 40 is large, and the passivation effect on the side surface of the solar cell 100 is higher.

[0079] 2, in some embodiments, the second passivation layer 60 covers the entire first portion 41 and a portion of the second portion 42. In other embodiments, the second passivation layer 60 covers only the first portion 41 (not shown), or the second passivation layer 60 covers only the entire second portion 42 (not shown).

[0080] 1, in some embodiments, on the first side C1, the second passivation layer 60 extends along the thickness direction H of the substrate 10 such that an edge of the second passivation layer 60 away from the second side S is flush with the outer surface of the first passivation layer 40 located on the first side F. In this way, the passivation effect on the side of the solar cell 100 is better. If the first passivation layer 40 cannot be plated at the contact position with the quartz boat during the formation process or the uniformity of the first passivation layer 40 is poor due to process fluctuations, the formation area of ​​the second passivation layer 60 can be further increased to further improve the passivation reliability of the side of the solar cell 100.

[0081] 3 and 4, in some embodiments, on the first side C1, the edge of the first passivation layer 40 is flush with the edge of the doped conductive layer 30, and as described above, the portion of the first passivation layer 40 provided on the first side C1 covers only the textured region R. In this case, the second passivation layer 60 covers at least a portion of the textured region R on the first side C1, and for example, the second passivation layer 60 shown in FIG. 4 may cover a portion of the textured region R on the first side C1.

[0082] 3, the second passivation layer 60 extends along the thickness direction H of the substrate 10 at the first side C1 such that the edge of the second passivation layer 60 away from the second surface S is flush with the outer surface of the first passivation layer 40 located on the first surface F. In this way, the passivation effect on the side of the solar cell 100 is better. If the first passivation layer 40 cannot be plated at the contact position with the quartz boat during the formation process or the uniformity of the first passivation layer 40 is poor due to process fluctuations, the formation area of ​​the second passivation layer 60 can be further increased to further improve the passivation reliability of the side edge of the solar cell 100.

[0083] The reason why the second passivation layer 60 covers only a portion of the textured region R on the first side C1 may be that, during the manufacturing process of the solar cell 100, a film layer cannot be formed at the contact area between positioning nodules or the like and the first passivation layer 40 on the first side C1 and the cut edge side C2 of the substrate 10, and therefore the second passivation layer 60 does not completely cover the first passivation layer 40.

[0084] In some embodiments, the substrate 10 further includes at least one cut edge side C2 adjacent between the first face F and the second face S.

[0085] Referring to Figures 1 to 4, in some embodiments, the textured structure 20 is provided on only a portion of the first surface F and the first side C1, and the doped conductive layer 30 is provided on only a portion of the first surface F and the first side C1 so as to cover the textured structure 20.

[0086] For example, the cut edge side C2 is flush with edges of the doped conductive layer 30, the first passivation layer 40, the passivation contact layer 50, and the second passivation layer 60 located on the same side as the cut edge side C2 in the normal direction of the cut edge side C2. In this case, no film layer is provided on the edge surface of the solar cell 100 corresponding to the cut edge side C2, and the solar cell 100 may have a structure in which the cell structure is sliced ​​at the end of the manufacturing process, for example.

[0087] 5 to 8, some embodiments of the present application are based on the above-mentioned embodiments and improve the film layer structure at the position of the cut edge side C2 of the solar cell 100. As can be understood, the film layer structure of the first face F of the substrate 10 and the film layer structure and installation range on the first side C1 are the same as those of the above-mentioned embodiments, and the description thereof will be omitted here.

[0088] Figures 5 and 6 show an embodiment in which the first passivation layer 40 extends outside the edge of the doped conductive layer 30 along the thickness direction H of the substrate 10 at the first side C1. Figures 7 and 8 show an embodiment in which the edge of the first passivation layer 40 is flush with the edge of the doped conductive layer 30 at the first side C1.

[0089] 5 and 7 show an embodiment in which the second passivation layer 60 extends along the thickness direction H of the substrate 10 on the first side C1 until an edge of the second passivation layer 60 is flush with the outer surface of the first passivation layer 40 located on the first surface F. FIGs. 6 and 8 show a case in which the second passivation layer 60 covers only a portion of the second portion 42 (here, the second portion 42 is the area of ​​the first passivation layer 40 located on the first side C1 and covering the textured region R).

[0090] The installation status of the membrane layer on the cut edge side C2 is described as follows.

[0091] 5 to 8, in some embodiments, the textured structure 20 is provided only on a portion of the first surface F and the first side surface C1, and the doped conductive layer 30 is provided only on a portion of the first surface F and the first side surface C1 so as to cover the textured structure 20. In this manner, the textured structure 20 and the doped conductive layer 30 are not provided on the cutting edge side surface C2.

[0092] In some embodiments, the first passivation layer 40 further covers at least a part of the cut edge side C2. The cut edge side C2 corresponds to the cut surface formed by cutting in the solar cell 100, and thus the first passivation layer 40 not only protects at least a part of the area of ​​the cut edge side C2, increases the passivation effect of the cut edge side C2, and alleviates the carrier recombination generated on the cut edge side C2, but also effectively avoids the occurrence of leakage current on the cut edge side C2 because the first passivation layer 40 is an insulating layer, thereby improving the cell conversion efficiency and increasing the power output of the solar cell 100 at the same time.

[0093] Furthermore, regarding the coverage of the first passivation layer 40 on the cutting edge side C2, for example, as shown in Fig. 5, the first passivation layer 40 may be located on the cutting edge side C2 and away from the edge of the first face F, and may be flush with the surface of the passivation contact layer 50 away from the substrate 10. Alternatively, as shown in Figs. 6, 7 and 8, the first passivation layer 40 may be located on the cutting edge side C2 and an edge away from the first face F may be located within the range of the cutting edge side C2.

[0094] Of course, the edge positions of the first passivation layer 40 on the first side C1 and the cut edge side C2 may or may not be flush with each other.

[0095] In some embodiments, the second passivation layer 60 further covers at least some area of ​​the cutting edge side C2 such that it partially covers at least the first passivation layer 40 at the cutting edge side C2.

[0096] 5 and 7, the second passivation layer 60 may extend along the thickness direction H of the substrate 10 at the cut edge side C2 so that the edge of the second passivation layer 60 is flush with the outer surface of the first passivation layer 40 located on the first face F. Alternatively, as shown in FIGS. 6 and 8, the second passivation layer 60 may cover only a portion of the first passivation layer 40 at the cut edge side C2.

[0097] Of course, the edge positions of the second passivation layer 60 on the first side C1 and the cut edge side C2 may or may not be flush with each other.

[0098] 9 to 12, some embodiments of the present application are based on the above-mentioned embodiments and improve the film layer structure at the position of the cut edge side surface C2 of the solar cell 100. As can be understood, the film layer structure of the first surface F of the substrate 10 and the film layer structure and installation range on the first side surface C1 are the same as those of the above-mentioned embodiments, and therefore the description thereof will be omitted here.

[0099] For example, Figures 9 and 10 show an embodiment in which the first passivation layer 40 extends outside the edge of the doped conductive layer 30 along the thickness direction H of the substrate at the first side C1. Figures 11 and 12 show an embodiment in which the edge of the first passivation layer 40 is flush with the edge of the doped conductive layer 30 at the first side C1.

[0100] 9 and 11 show an embodiment in which the second passivation layer 60 extends along the thickness direction H of the substrate 10 on the first side C1 until the edge of the second passivation layer 60 is flush with the outer surface of the first passivation layer 40 located on the first surface F. FIGs. 10 and 12 show an embodiment in which the second passivation layer 60 covers only a part of the second portion 42.

[0101] The installation status of the membrane layer on the cut edge side C2 is described as follows.

[0102] 9 to 12, in some embodiments, the textured structure 20 is also present on at least a portion of the cutting edge side C2, the doped conductive layer 30 is disposed on the first face F, a portion of the surface of the first side C1, and a portion of the surface of the cutting edge side C2 to cover the textured structure 20, and the first passivation layer 40 further covers at least a portion of the cutting edge side C2 to cover at least the doped conductive layer 30. In some embodiments, the doped conductive layer 30 completely covers the textured structure 20 on the cutting edge side C2, and the first passivation layer 40 completely covers the doped conductive layer 30 on the cutting edge side C2.

[0103] In this way, in addition to increasing the passivation effect of the first side C1 and mitigating the carrier recombination generated on the first side C1, since the texture structure 20 is provided on a part of the surface of the cut edge side C2 and the doped conductive layer 30 is provided on the texture structure 20, the doped conductive layer 30 at this position helps to reduce the carrier recombination at the interface where the cut edge side C2 is located, thereby realizing a better passivation effect for the cut edge side C2. In addition, the texture structure 20 provided on the cut edge side C2 helps to increase the light absorption area of ​​the solar cell 100, improve the light-generated current of the solar cell 100, and improve the efficiency of the solar cell 100.

[0104] Meanwhile, the first passivation layer 40 covers at least a part of the area of ​​at least the cut edge side C2 so as to cover at least the doped conductive layer 30. As a result, the first passivation layer 40 not only protects at least a part of the area of ​​the cut edge side C2, increases the passivation effect on the cut edge side C2, and alleviates the carrier recombination occurring on the cut edge side C2, but also effectively prevents the occurrence of leakage current on the cut edge side C2 because the first passivation layer 40 is an insulating layer, thereby improving the cell conversion efficiency and the power output of the solar cell 100.

[0105] Furthermore, regarding the coverage of the first passivation layer 40 on the cutting edge side C2, for example, as shown in FIG. 9, the first passivation layer 40 may extend along the thickness direction H of the substrate 10 so that the edge of the first passivation layer 40 away from the first face F is flush with the surface of the passivation contact layer 50 away from the substrate 10. Or, as shown in FIG. 11 and FIG. 12, the edge of the first passivation layer 40 away from the first face F may be flush with the edge of the doped conductive layer 30 on the cutting edge side C2. Or, as shown in FIG. 10, the first passivation layer 40 may extend outside the edge of the doped conductive layer 30, and the edge of the first passivation layer 40 away from the first face F may be within the range of the cutting edge side C2.

[0106] Of course, the edge positions of the first passivation layer 40 on the first side C1 and the cut edge side C2 may or may not be flush with each other.

[0107] In some embodiments, the second passivation layer 60 covers at least a portion of the area of ​​the cutting edge side C2 such that the second passivation layer 60 at least partially covers the first passivation layer 40 at the cutting edge side C2.

[0108] 9 and 11, the second passivation layer 60 may extend along the thickness direction H of the substrate 10 at the cut edge side C2 so that the edge of the second passivation layer 60 is flush with the outer surface of the first passivation layer 40 located on the first face F. Alternatively, as shown in FIGS. 10 and 12, the second passivation layer 60 may cover only a portion of the first passivation layer 40 at the cut edge side C2.

[0109] Of course, the edge positions of the second passivation layer 60 on the first side C1 and the cut edge side C2 may or may not be flush with each other.

[0110] Although only one first side C1 and one cutting edge side C2 have been described above, when the substrate 10 includes multiple first sides C1 and / or multiple cutting edge sides C2, the multiple first sides C1 and / or multiple cutting edge sides C2 and the film layers thereon may have the same or different structures. The above different embodiments may be used for multiple first sides C1 and / or multiple cutting edge sides C2 in any combination.

[0111] As can be understood, the doped conductive layer 30 can be formed by diffusing a doping element on at least a part of the surface of the substrate 10, and the first passivation layer 40 and the second passivation layer 60 can both be formed by deposition (e.g., plasma enhanced chemical vapor deposition). Therefore, the outer surfaces of the doped conductive layer 30, the first passivation layer 40 and the second passivation layer 60 may not be flat, but may be arranged according to a structure, i.e., a shape, corresponding to the surface of the substrate 10. When covering the textured structure 20, the doped conductive layer 30, the first passivation layer 40 and / or the second passivation layer 60 also have a textured structure. When covering a flat surface, for example covering the flat region P, the doped conductive layer 30, the first passivation layer 40 and / or the second passivation layer 60 also have a flat surface.

[0112] This embodiment provides a method for manufacturing a solar cell, which can be used to manufacture the solar cell in any of the above embodiments. The structure, function, operation principle, etc. of the solar cell 100 have already been described in detail in the above embodiments, so the description will be omitted here.

[0113] 13 to 18, the method for manufacturing a solar cell includes steps S10 to S40.

[0114] In step S10, a substrate 101 is provided, the substrate 101 including a base material 10 and a doped conductive layer 30, the base material 10 including a first surface F, a second surface S arranged opposite to each other, and at least one first side surface C1 adjacent between the first surface F and the second surface S, a textured structure 20 is provided on at least a portion of the surface of the first surface F and the first side surface C1 of the base material 10, and the doped conductive layer 30 is provided on at least a portion of the surface of the first surface F and the first side surface C1 so as to cover the textured structure 20.

[0115] In step S20, a passivation contact layer 50 is formed on the second surface S of the substrate 10.

[0116] In step S30, a first passivation layer 40 is formed on the doped conductive layer 30, and the first passivation layer 40 covers at least the first face F and at least a portion of the first side C1 so as to cover at least the doped conductive layer 30.

[0117] In step S40, a second passivation layer 60 is formed on the passivation contact layer 50 to form the solar cell substrate 103, and the second passivation layer 60 covers the second surface S so as to cover the passivation contact layer 50.

[0118] In the above means, the substrate 10 has a textured structure 20 on the first surface F and a part of the first side C1, and the doped conductive layer 30 is disposed on at least the first surface F and a part of the first side C1 so as to cover the textured structure 20. Since the textured structure 20 is disposed on a part of the first side C1 and the doped conductive layer 30 is disposed on the textured structure 20, the doped conductive layer 30 on the first side C1 helps to reduce carrier recombination at the interface where the first side C1 is located, and realizes a better passivation effect for the first side C1. In addition, the textured structure 20 disposed on the first side C1 helps to increase the light absorption area of ​​the solar cell 100, improve the light-generated current of the solar cell 100, and improve the efficiency of the solar cell 100.

[0119] On the other hand, a first passivation layer 40 is formed on the doped conductive layer 30, and the first passivation layer 40 covers at least the first face F and at least a part of the first side C1 so as to cover at least the doped conductive layer 30. Thus, the first passivation layer 40 protects at least a part of the first side C1, increases the passivation effect on the first side C1, and not only alleviates the carrier recombination generated on the first side C1, but also, since the first passivation layer 40 is an insulating material layer, it can effectively avoid the occurrence of leakage current on the first side C1, thereby improving the battery conversion efficiency and increasing the power output of the solar cell 100 at the same time.

[0120] As can be understood, the structures, film layer materials, installation ranges, etc. of the texture structure 20, the doped conductive layer 30, the first passivation layer 40, the passivation contact layer 50 and the second passivation layer 60 have been described in detail in the above-mentioned embodiments, so the description will be omitted here.

[0121] In this embodiment, in step S20, the step of forming the passivation contact layer 50 on the second surface S of the substrate 10 includes: forming, in sequence, a tunnel material layer 51', a polysilicon doping material layer 52', and an oxide material layer 54 on each surface of a substrate 101; Etching away the layer of oxide material 54 on the surface F' of the first side of the substrate 101 and on each side of the substrate 101; The step includes etching away the polysilicon doping material layer 52' ​​and the tunnel material layer 51' on a first side surface F' of the substrate 101 and each side of the substrate 101, where the first side surface F' of the substrate 101 corresponds to the first surface F of the base material 10.

[0122] In this way, only the tunnel material layer, the polysilicon doped material layer, and the oxide material layer on the second surface S are retained, and the tunnel material layer on the second surface S is the tunnel oxide layer 51, and the polysilicon doped material layer on the second surface S is the polysilicon doped conductive layer 52. The oxide material layer (which may be, for example, a silicon oxide layer) may function as a mask in a subsequent process and may be subsequently cleaned by a process such as etching. In this way, the passivation contact layer 50 provided on the second surface S can be formed.

[0123] Illustratively, etching away the oxide material layer is performed by a chain conveyor, and etching away the tunnel material layer and the polysilicon doping material layer is performed by a slot conveyor.

[0124] 19, in some embodiments, in step S40, after the step of forming the second passivation layer 60 on the passivation contact layer 50, the method further includes a step of fabricating electrodes 70 on the first passivation layer 40 and the second passivation layer 60, respectively. Here, the electrode 70 located on the first face F side of the substrate 10 is connected to the doped conductive layer 30 through the first passivation layer 40, and the electrode 70 located on the second face S side of the substrate 10 is connected to the passivation contact layer 50 through the second passivation layer 60.

[0125] As will be appreciated, to improve photoelectric conversion efficiency, a standard cell can be cut in half or into multiple pieces and connected in series to form a module.

[0126] In the solar cell manufacturing method of the embodiment of the present application, the cutting step can be placed at different positions.

[0127] For example, disconnecting at step S10, or disconnecting after step S40, or disconnecting between steps S10 and S40.

[0128] When cutting in step S10, for example, the substrate blank is cut into substrates 10 of a size corresponding to the desired size of the solar cell 100.

[0129] In some embodiments, before doping and texturing, the substrate blank is cut into a substrate 10 of suitable size (corresponding to the size of the solar cell 100 actually required), the cutting step is performed in advance, and the subsequent one-sided etching process and interface passivation process can well passivate each edge surface (including the cut edge side surface C2) of the solar cell 100, reduce carrier recombination, and improve photoelectric conversion efficiency. And since no cutting is performed in the subsequent steps, that is, no new cut surface is generated, the problem of a large amount of carriers recombining on the cut surface in the related art can be effectively avoided.

[0130] Specifically, referring to FIG. 14 and FIG. 15, in step S10, the step of providing a substrate 101 includes: cutting a substrate blank (not shown) along a thickness direction to form a substrate 10, and forming a cut edge side C2 on the substrate 10 by cutting; performing texturing and doping element diffusion on at least the first face F, the first side C1 and the cutting edge side C2 of the substrate 10; and etching the substrate 10 to expose a second surface S of the substrate 10, a first target area C11 on each first side C1, and a second target area C12 on each cutting edge side C2, thereby forming a textured structure 20 and a doped conductive layer 30 covering the textured structure 20 on the first surface F of the substrate 10, a portion of the surface of the first side C1, and a portion of the surface of the cutting edge side C2; The first target area C11 is an area where the first side surface C1 is adjacent to the second surface S, and the second target area C12 is an area where the cutting edge side surface C2 is adjacent to the second surface S.

[0131] In the above step, a texture is formed on each surface of the substrate 10 by a texturing process. A doping element is diffused into the substrate 10, and the doping element is doped into the first surface F of the substrate 10 to form a doped conductive layer 30. During the doping element diffusion process, some of the doping element is introduced into the first side C1, the cutting edge side C2 and the second surface S of the substrate 10, so that the first side C1, the cutting edge side C2 and the second surface S are also covered with the doped conductive material. The first side C1, the cutting edge side C2 and the second surface S of the substrate 10 are etched by a single-sided etching process to remove the doped conductive material and texture structure covering the second surface S of the substrate 10, the first target area C11 on the first side C1 and the second target area C12 on the cutting edge side C2, and expose the second surface S of the substrate 10, the first target area C11 on the first side C1 and the second target area C12 on the cutting edge side C2 to avoid electric leakage. At this time, the texture structure 20 and the doped conductive layer 30 located on the first face F, a portion of the surface of the first side face C1, and a portion of the surface of the cutting edge side face C2 are formed.

[0132] Specifically, the step of etching the substrate 10 to expose the second surface S of the substrate 10, the first target areas C11 on each first side C1 and the second target areas C12 on each cutting edge side C2 includes steps D and E.

[0133] In step D, the substrate 10 after the texturing process and the doping element diffusion is etched to expose the texture structures on the second face S and the first target area C11 on each first side C1 and the second target area C12 on each cut edge side C2. In some embodiments, the etching may be performed using a chain conveyor. Of course, during the etching process, the liquid level of the chain conveyor needs to be controlled to avoid the etching liquid from adhering to the texture structures 20 and the doped conductive layer 30 on the first face F of the substrate 10. In one embodiment, after etching, the first side C1 has an irregular shape as shown in FIG.

[0134] In step E, the textured structures exposed on the second surface S, the first target area C11, and the second target area C12 are etched away, so that the second surface S of the substrate 10, the first target area C11 on each first side C1, and the second target area C12 on each cut edge side C2 are exposed. In some embodiments, the etching may be performed using a slot conveyor. As can be understood, the etching away of the exposed textured structures corresponds to etching and polishing the exposed textured structures into a non-textured form, for example, to form a relatively flat surface. Due to minute fluctuations of the etchant surface and wetting of the substrate 10 during the etching process, the boundary line 11 between the doped conductive layer 30 and the first target area C11 may be irregularly wavy, rather than a straight line, as shown in FIG. 20.

[0135] In some examples, cutting a substrate blank (not shown) along the thickness direction to form substrate 10 includes laser cutting the substrate blank along the thickness direction H to form substrate 10. In some examples, a single laser cut can divide the substrate blank into two substrates 10.

[0136] A method for manufacturing the solar cell cut in step S10 above will be described below using a specific example, and will be compared with a comparative example.

[0137] Example 1: A method for manufacturing a solar cell includes steps SJ to SO.

[0138] In step SJ, referring to FIG. 14, the substrate blank is cut along the thickness direction H to form at least two substrates 10, and the substrate 10 includes a first surface F, a second surface S disposed opposite each other, and a plurality of first side surfaces C1 adjacent between the first surface F and the second surface S, and at least one cut edge side surface C2 formed by cutting.

[0139] In step SK, referring to FIG. 15 , a texturing process and boron diffusion are performed on each surface of the substrate 10, and the substrate 10 is etched to expose the second surface S of the substrate 10, a first target area C11 on each first side C1, and a second target area C12 on each cutting edge side C2, thereby forming a textured structure 20 on the first surface F of the substrate 10, a portion of the surface of each first side C1, and a portion of the surface of each cutting edge side C2, and a doped conductive layer 30 (boron conductive layer) covering the textured structure 20 is formed on the first surface F of the substrate 10, a portion of the surface of each first side C1, and a portion of the surface of each cutting edge side C2, to form a substrate 101.

[0140] In step SL, a tunnel material layer, a polysilicon doping material layer and an oxide material layer are formed on each surface of the substrate 101, and the oxide material layer on the surface F' of the first side of the substrate 101 and each side of the substrate 101 (including each first side C1 and each cutting edge side C2) is etched away, and the polysilicon doping material layer and the tunnel material layer on the surface F' of the first side of the substrate 101 and each side of the substrate 101 are etched away, and the surface F' of the first side of the substrate 101 corresponds to the first surface F of the base material 10. In this way, only the tunnel material layer, the polysilicon doping material layer and the oxide material layer on the second surface S are reserved. The oxide material layer (which may be, for example, a silicon oxide layer) may function as a mask in a subsequent process and may be subsequently cleaned by a process such as etching. In this way, a passivation contact layer 50 provided on the second surface S is formed, as shown in FIG. 16.

[0141] In step SM, referring to FIG. 17, a first passivation layer 40 is formed on the doped conductive layer 30, and the first passivation layer 40 covers at least the first face F, at least a portion of each of the first side faces C1, and at least a portion of each of the cutting edge side faces C2 so as to cover at least the doped conductive layer 30.

[0142] In step SN, referring to FIG. 18, a second passivation layer 60 is formed on the passivation contact layer 50, and the second passivation layer 60 covers at least the second surface S, at least a portion of each of the first side surfaces C1, and at least a portion of each of the cutting edge side surfaces C2 so as to cover at least a portion of the passivation contact layer 50 and the first passivation layer 40.

[0143] In step SO, referring to FIG. 19, electrodes 70 are fabricated on the first passivation layer 40 and the second passivation layer 60, respectively, to form the solar cell 100.

[0144] Solar cell 100 manufactured in steps SJ to SO is referred to as solar cell A1.

[0145] Comparative Example 1: A method for manufacturing a solar cell includes steps SP to SU.

[0146] In step SP, a silicon wafer is cleaned and textured, and a boron diffusion is performed on the front side of the cleaned and textured silicon wafer.

[0147] In step SQ, the borosilicate glass BSG that has spread onto the back and side surfaces of the silicon wafer is removed, and the side and back surfaces of the silicon wafer are polished with an alkali.

[0148] In step SR, a tunnel oxide layer and a polysilicon doped conductive layer are formed on the backside of the silicon wafer.

[0149] In step SS, a passivation anti-reflective coating is deposited on both the front side of the silicon wafer and the back side of the silicon wafer.

[0150] In step ST, electrodes are fabricated on both the front surface and the back surface of the silicon wafer.

[0151] In step SU it is laser cut in half.

[0152] The solar cell manufactured through steps SP to ST of the comparative example is referred to as solar cell B1, and the solar cell manufactured through steps SP to SU of the comparative example is referred to as solar cell B2.

[0153] A cell performance test was conducted on the solar cell A1 and the solar cells B1 and B2, and the test results are recorded in Table 1, where Uoc is the open circuit voltage, FF is the fill factor, Eta is the conversion efficiency, Isc is the short circuit current, and IRev2 is the reverse current.

[0154] [Table 1]

[0155] From the above experimental results, it was found that the efficiency of the solar cell A1 (after cutting) manufactured by the method of Example 1 was almost the same as the efficiency of the entire solar cell B1 (uncut) of Comparative Example 1, but compared to the solar cell B2 after cutting of Comparative Example 1, the cell open circuit voltage increased by 0.7 mV, the fill factor increased by about 0.74%, the cell conversion efficiency increased by about 0.33%, and the reverse current decreased from 0.09 A to 0.05 A, indicating that the efficiency of the solar cell A1 manufactured by the method of Example 1 was higher.

[0156] In the above embodiment, the cutting is performed in step S10. In some other embodiments, the cutting may be performed after step S40, for example, cutting last after the fabrication of each membrane layer is completed.

[0157] In an embodiment in which cutting is performed after step S40, the method for manufacturing a solar cell further includes step S50 after step S40 of forming a second passivation layer 60 on the passivation contact layer 50.

[0158] In step S50, laser cutting is performed along the thickness direction of the solar cell base body 103 (as shown in FIG. 25) to form cut edge side surfaces C2 of the base material 10.

[0159] By cutting, the solar cell base body 103 can be divided into a plurality of solar cells 100. For example, the solar cell base body 103 may be cut equally into two along the thickness direction H to form two solar cells 100 (as shown in FIG. 26).

[0160] In some embodiments, the step of forming electrodes 70 on the first passivation layer 40 and the second passivation layer 60 may be performed before the cutting step S50 above.

[0161] It is also possible not to cut the substrate blank in step S10. In this case, the substrate 10 only includes the first side C1 and does not include the cut edge side C2, and in this embodiment, the step of providing the substrate 101 in step S10 can be: performing a texturing process and a doping element diffusion process on at least the first face F and the first side C1 of the substrate 10; Etching the substrate 10 to expose a first target area C11 on the second surface S and each first side C1 of the substrate 10; Here, the first target area C11 is an area adjacent to and connected to the second surface S on each first side surface C1 of the base material 10.

[0162] In the above step, a texture is formed on each surface of the substrate 10 by a texturing process. A doping element is diffused into the substrate 10, and the doping element is doped into the first surface F of the substrate 10 to form a doped conductive layer 30. During the doping element diffusion process, some of the doping element is introduced into the first side C1 and the second surface S of the substrate 10, so that the first side C1 and the second surface S are also covered with the doped conductive material. The first side C1 and the second surface S of the substrate 10 are etched by a single-sided etching process to remove the doped conductive material and the texture structure covering the second surface S of the substrate 10 and the first target area C11 on the first side C1, and expose the second surface S of the substrate 10 and the first target area C11 on each first side C1 to avoid leakage current. At this time, the texture structure 20 and the doped conductive material layer 30 located on the first surface F and part of the first side C1 are formed.

[0163] Specifically, the step of etching the substrate 10 so as to expose the first target areas C11 on the second surface S and each of the first side surfaces C1 of the substrate 10 includes a step D' and a step E'.

[0164] In step D', the substrate 10 after the texturing process and the doping element diffusion is etched to expose the textured structures on the second side S and each first target area C11. In some embodiments, the etching may be performed using a chain conveyor. Of course, during the etching process, the liquid level of the chain conveyor needs to be controlled to avoid the etching liquid from adhering to the textured structures 20 and the doped conductive material layer 30 on the first side F of the substrate 10. In one embodiment, the first side C1 after etching has an irregular shape as shown in FIG. 20.

[0165] In step E', the exposed textured structure is etched away to expose the second surface S of the substrate 10 and the first target area C11 on each of the first side surfaces C1. In some embodiments, the etching may be performed using a slotted conveyor. As can be understood, etching away the exposed textured structure on the surface of the substrate 10 corresponds to etching and polishing the textured structure 20 on the first target area C11 and the second surface S of the substrate 10 into a non-textured form, for example to form a relatively flat surface. Due to minute fluctuations of the etchant surface and wetting of the substrate 10 during the etching process, the boundary line 11 between the doped conductive layer 30 and the first target area C11 may be irregularly wavy rather than straight, as shown in FIG. 20.

[0166] In this embodiment, the solar cell 100 is formed after cutting the solar cell base body 103 formed in step S40, so that the size of the finally formed solar cell 100 (shown in FIG. 26) is smaller than the size of the solar cell base body 103 (FIG. 25).

[0167] As will be understood, after cutting the solar cell base body 103, a cut surface CQ formed by the cutting is newly produced as shown in FIG.

[0168] A specific example of a method for manufacturing a solar cell in which cutting is performed after step S40 will be described below, and will be compared with a comparative example.

[0169] Example 2: A method for manufacturing a solar cell includes steps SJ' to SO'.

[0170] In step SJ', referring to FIG. 21 , each surface of the substrate 10 is textured and boron diffused, and the substrate 10 is etched to expose a first target area C11 on the second surface S and each first side C1 of the substrate 10, thereby forming a textured structure 20 on a portion of the first surface F and the first side C1 of the substrate 10, and forming a doped conductive layer 30 (boron conductive layer) covering the textured structure 20 on the first surface F and a portion of the first side C1 to form a substrate 101.

[0171] In step SK', referring to FIG. 22, a tunnel material layer, a polysilicon doping material layer, and a silicon oxide material layer (not shown) are sequentially formed on each surface of the substrate 101, the silicon oxide material layer on the first side surface F' of the substrate 101 and each side surface of the substrate 101 is etched away, and the tunnel material layer and the polysilicon doping material layer on the first side surface of the substrate 101 and each side surface of the substrate 101 are etched away, thus leaving only the tunnel material layer, the polysilicon doping material layer, and the oxide material layer on the second surface S. Of course, the oxide material layer here (which may be, for example, a silicon oxide layer) may function as a mask in a subsequent process, and may be subsequently cleaned by a process such as etching. In this way, the passivation contact layer 50 provided on the second surface S can be formed as shown in FIG. 22.

[0172] In step SL', referring to FIG. 23, a first passivation layer 40 is formed on the doped conductive layer 30, and the first passivation layer 40 covers the entire area of ​​the first face F and the first side C1 so as to cover the doped conductive material layer 30.

[0173] In step SM', referring to FIG. 24, a second passivation layer 60 is formed on the passivation contact layer 50 to form the solar cell substrate 103, where the second passivation layer 60 covers the entire area of ​​the second surface S and the first side C1, covers the passivation contact layer 50, and completely covers the portion of the first passivation layer 40 provided on the first side C1.

[0174] In step SN', referring to FIG. 25, electrodes 70 are fabricated on the first passivation layer 40 and the second passivation layer 60 of the solar cell substrate 103, respectively.

[0175] 26, in step SO', the solar cell base body 103 is cut with a laser along the thickness direction H to form at least two solar cells 100. The solar cell 100 manufactured in steps SJ' to SO' is referred to as solar cell A2.

[0176] A cell performance test was carried out on the solar cell A2 and the solar cell B1, and the test results are recorded in Table 2, where Uoc is the open circuit voltage, FF is the fill factor, Eta is the conversion efficiency, Isc is the short circuit current, and IRev2 is the reverse current.

[0177] [Table 2]

[0178] The above experimental results show that compared with solar cell B1, the open circuit voltage of solar cell A2 is increased by 1.1 mV, the fill factor is increased by about 0.02%, and the conversion efficiency is increased by 0.06%. In the 12 V bias test, the leakage current is reduced from 0.08 A to 0.05 A. This shows that the leakage current of solar cell A2 is effectively reduced and the efficiency is high.

[0179] With the rapid development of photovoltaic technology and the expansion of its application range, the market demand for high-efficiency photovoltaic modules is increasing. Generally, the encapsulation of photovoltaic modules adopts a full-sheet design, and as the output current increases, the impact of internal losses becomes greater. Therefore, in order to reduce the losses inside the module and improve the output power of the photovoltaic module, the packaging of the module is gradually updated to the current half-sheet or multi-sheet technology. This technology usually cuts standard-specification cells into half-sheets or multiple cell sheets by laser cutting, but the laser cutting technology causes high recombination on the cut side of the cut half-sheet cells, and there are many dangling bonds and defect states on the surface, which become effective recombination centers of carriers and are prone to leakage problems on the cut side, thereby reducing the efficiency of the solar cell.

[0180] In this embodiment, the cutting step is performed in the solar cell manufacturing process, i.e., after depositing the passivation contact material, and the cut surface is passivated during the subsequent deposition of the first and second passivation layers, thereby avoiding the recombination problem at the cut surface and improving the efficiency of the solar cell 100.

[0181] The method for manufacturing another solar cell provided in this embodiment is used to manufacture the solar cell 100 in any of the above embodiments. The structure, function, and operation principle of the solar cell 100 have already been described in detail in the above embodiments, so detailed description will be omitted here. In this embodiment, the cutting step is performed in the step of manufacturing the passivation contact layer 50.

[0182] 28 to 33, the method for manufacturing a solar cell provided in this embodiment includes steps S100 to S500.

[0183] In step S100, a substrate 101' is provided, the substrate 101' including a base material 10 and a doped conductive material layer 30', the base material 10 including a first surface F, a second surface S, and at least one first side surface C1 adjacent between the first surface F and the second surface S, and having a textured structure 20 on at least a portion of the surface of the first surface F and the first side surface C1 of the base material 10, and the doped conductive material layer 30' is provided on at least a portion of the surface of the first surface F and the first side surface C1 so as to cover the textured structure 20.

[0184] In step S200, a passivation contact material layer 50' is formed on each surface of the substrate 101'.

[0185] In step S300, the substrate 101' on which the passivation contact material layer 50' is formed is cut along the thickness direction H of the substrate to form a sub-substrate 102 having a cut edge side C2, and the doped conductive material layer 30' is cut to form a doped conductive layer 30. In some embodiments, the substrate 101' can be divided into at least two sub-substrates 102 by cutting.

[0186] In step S400, the passivation contact material layer 50' on the first side surface F' and each side of the sub-substrate 102 is etched away to form a passivation contact layer 50 on the sub-substrate 102, and the first side surface F' of the sub-substrate 102 corresponds to the first surface F of the substrate 10.

[0187] In step S500, a first passivation layer 40 is formed on the doped conductive layer 30, the first passivation layer 40 covering at least a portion of the first face F and the first side C1 so as to cover at least the doped conductive layer 30, and the first passivation layer 40 further covering at least a portion of the cutting edge side C2, which is the side cut in the sub-substrate 102.

[0188] In the above embodiment, the first surface F and a part of the first side C1 of the substrate 10 have the textured structure 20, and the doped conductive material layer 30' is disposed on the first surface F and a part of the first side C1 so as to cover the textured structure 20. Since the textured structure 20 is disposed on the part of the first side C1 and the doped conductive material layer 30' is disposed on the textured structure 20, in the solar cell 100 formed after cutting, the doped conductive material layer 30' on the first side C1 helps to reduce carrier recombination at the interface of the first side C1, and realizes a better passivation effect of the first side C1. In addition, in the solar cell 100 formed after cutting, the textured structure 20 disposed on the first side C1 helps to increase the light absorption area of ​​the solar cell 100, improve the light-generated current of the solar cell 100, and improve the efficiency of the solar cell 100.

[0189] On the other hand, the first passivation layer 40 is formed on the doped conductive layer 30, and the first passivation layer 40 covers at least a part of the cut edge side C2, so that the first passivation layer 40 protects at least a part of the cut edge side C2, and generates a passivation effect on at least a part of the cut edge side C2, and can mitigate carrier recombination occurring on the cut edge side C2. In addition, since the first passivation layer 40 is an insulating layer, it can effectively prevent leakage current from occurring on the cut edge side C2, thereby improving the cell conversion efficiency and increasing the power output of the solar cell 100.

[0190] Furthermore, the first passivation layer 40 further covers at least a portion of the first face F and the first side C1, so as to cover at least the doped conductive layer 30. By covering at least a portion of the first face F and the first side C1, the first passivation layer 40 can protect at least a portion of the first side C1, increase the passivation effect of at least a portion of the first side C1, and not only can it mitigate the carrier recombination generated on the first side C1, but also, since the first passivation layer 40 is an insulating layer, it can effectively prevent the occurrence of leakage current on the first side C1, thereby further improving the cell conversion efficiency and increasing the power output of the solar cell 100.

[0191] 30, in some embodiments, in step S300, the substrate 101' is cut into at least two pieces, in other words, the substrate 101' is cut in step S300 and then the solar cell 100 is formed through subsequent manufacturing steps, so that the size of the base material 10 in the substrate 101' is larger than the size of the base material 10 in the solar cell 100. Otherwise, the first surface F and the second surface S included in the base material 10 in the substrate 101' are the same as the first surface F and the second surface S included in the base material 10 in the finally formed solar cell 100 except for the size and area, so a description thereof will be omitted here.

[0192] Compared to the original substrate 10, the substrate 101' is cut into a number of sub-substrates 102, the size of a first side C1 of a portion of the substrate 10 of each sub-substrate 102 is reduced, and a new cut surface formed by cutting, i.e., a cut edge side C2, is generated on the substrate 10 of the sub-substrate 102 (i.e., of the solar cell 100).

[0193] 29A, in the substrate 101′, a plurality of first side surfaces C1 of the base material 10 are connected to each other and arranged together around the first face F, and each first side surface C1 is connected between the first face F and the second face S. In addition, the first face F and a portion of the surface of the first side surface C1 of the base material 10 have a textured structure 20, and as described above, for example, the textured structure 20 on the first face F of the base material 10 and the textured structure 20 on the first side surface C1 may be a continuous structure or a discontinuous structure. In this way, when it is a continuous structure, the entire textured structure 20 is formed as a cover covering the first face F of the base material 10.

[0194] In this embodiment, the doped conductive material layer 30' forms the doped conductive layer 30 after the cutting step of step S300. Therefore, the material, film layer structure, installation range, etc. of the doped conductive material layer 30' are the same as those of the doped conductive layer 30 in the above embodiment, so the description is omitted here.

[0195] The doped conductive material layer 30' is provided on the first face F and a portion of the first side C1 to cover the textured structure 20, so that the doped conductive material layer 30' is partly disposed on the first face F and the other part is disposed on a portion of the first side C1, and its coverage covers the textured structure 20. In some embodiments, the coverage of the doped conductive material layer 30' may be larger than the textured structure 20. In some embodiments, the coverage of the doped conductive material layer 30' corresponds to the textured structure 20, i.e., the doped conductive material layer 30' just completely covers the textured structure 20.

[0196] 29B, in step S200, a passivation contact material layer 50' is formed on the second surface S of the base material 10 of the substrate 101', and at the same time, a passivation contact material layer 50' is also formed on the surface F' and each side of the first side of the substrate 101'. In step S400, in addition to the passivation contact material layer 50' on the second surface S of the base material 10 of the cut sub-substrate 102, the passivation contact material layer 50' on the other surfaces is etched and removed, thereby forming a passivation contact layer 50. The material of the passivation contact material layer 50' is the same as that of the passivation contact layer 50 in the above embodiment. Exemplarily, the passivation contact material layer 50' may include a tunnel material layer 51' and a polysilicon doping material layer 52' ​​sequentially stacked on the second surface S. The material and structure of the tunnel material layer 51' are the same as those of the tunnel oxide layer 51, and the material and structure of the polysilicon doped material layer 52' ​​are the same as those of the polysilicon doped conductive layer 52, so that the description thereof will be omitted here.

[0197] 31, in step S500, a first passivation layer 40 is formed on the doped conductive layer 30. The first passivation layer 40 has already been described in detail in the previous embodiments, so the description will be omitted here.

[0198] In some embodiments, in step S100, referring to FIG. 29A, providing a substrate 101′ includes: performing a texturing process and a doping element diffusion process on at least the first face F and the first side C1 of the substrate 10; and etching the substrate 10 so that the first target areas C11 on the second surface S and each of the first side surfaces C1 of the substrate 10 are exposed.

[0199] Here, the first target area C11 is an area of ​​each first side surface C1 of the base material 10 that is adjacent to and connected to the second surface S.

[0200] In the above step, the texturing process forms textures on each surface of the substrate 10, and at this time, the doping element is diffused into the substrate 10, and the doping element is doped into the first surface F of the substrate 10 to form a doped conductive material layer 30'. During the doping element diffusion process, some of the doping element is introduced into the first side C1 and the second surface S of the substrate 10, so that the first side C1 and the second surface S are also covered with the doped conductive material. The first side C1 and the second surface S of the substrate 10 are etched by a single-sided etching process, and the doped conductive material and the texture structure covering the second surface S of the substrate 10 and the first target area C11 on the first side C1 are removed, so that the second surface S of the substrate 10 and the first target area C11 on each first side C1 of the substrate 10 are exposed to avoid leakage current. At this time, the texture structure 20 and the doped conductive material layer 30' located on the first surface F and part of the surface of the first side C1 are formed.

[0201] Specifically, the step of etching the substrate 10 so as to expose the first target areas C11 on the second surface S and each of the first side surfaces C1 of the substrate 10 includes step D'' and step E''.

[0202] In step D'', the substrate 10 after the texturing process and the doping element diffusion is etched to expose the textured structures on the second surface S and the first target areas C11 on each first side surface C1. In some embodiments, the etching may be performed using a chain conveyor. Of course, during the etching process, the liquid level of the chain conveyor needs to be controlled to avoid the etching liquid from adhering to the textured structures 20 and the doped conductive material layer 30' on the first surface F of the substrate 10, thus forming an irregular shape on the first side surface C1 after etching.

[0203] In step E'', the exposed textured structure is etched away to expose the second surface S of the substrate 10 and the first target areas C11 on each of the first sides C1. In some embodiments, the etching may be performed using a slotted conveyor. As will be appreciated, etching away the textured structure 20 on the surface of the substrate 10 corresponds to etching and polishing the textured structure 20 in the first target areas C11 and the second surface S of the substrate 10 into a non-textured form, e.g., to form a relatively flat surface.

[0204] In some embodiments, in step S200, forming a passivation contact material layer 50' on each surface of the substrate 101' includes sequentially stacking a tunnel material layer 51', a polysilicon doping material layer 52' ​​and an oxide material layer (mask layer) on each surface of the substrate 101'.

[0205] 30, in some embodiments, in step S400, the step of etching away the passivation contact material layer 50′ on the surface F′ and each side of the first side of the sub-substrate 102 to form the passivation contact layer 50 on the sub-substrate 102 includes: Etching away the oxide material layer on the surface F' of the first side of the sub-substrate 102 and on each side of the sub-substrate 102; The step includes a step of etching away the polysilicon doping material layer 52' ​​and the tunnel material layer 51' on the surface F' of the first side of the sub-substrate 102 and on each side of the sub-substrate 102, and etching and polishing the cut edge side C2 of the sub-substrate 102.

[0206] In this way, the laser damage layer at the position of the cutting edge side C2 caused by the cutting can be etched and polished, and carrier recombination at the interface of the cutting edge side C2 can be reduced. Exemplarily, the etching and removal of the oxide material layer is performed by a chain conveyor, and the etching and removal of the polysilicon doping material layer 52' ​​and the tunnel material layer 51' is performed by a slot conveyor.

[0207] Furthermore, after the step of etching and removing the polysilicon doping material layer 52' ​​and the tunnel material layer 51' on the surface F' of the first side of the sub-substrate 102 and on each side of the sub-substrate 102, The method further includes a step of etching away the oxide material layer on the second side surface S' of the sub-substrate 102, so that the second side surface S' of the sub-substrate 102 corresponds to the second surface S of the substrate 10, thereby forming a passivation contact layer 50 on the sub-substrate 102.

[0208] In some embodiments, in step S300, cutting the substrate 101 forming the passivation contact material layer 50' along the thickness direction H of the base material to form at least two sub-substrates 102 includes cutting the substrate 101 forming the passivation contact material layer 50' with a laser along the thickness direction H of the base material to form the sub-substrates 102.

[0209] In some embodiments, the substrate 101 can be divided into two sub-substrates 102 of the same size by one laser cutting. As can be understood, in the sub-substrate 102, the base material 10, the textured structure 20, and the doped conductive layer 30 are the same as the base material 10, the textured structure 20, and the doped conductive layer 30 in the solar cell 100 in the above embodiments.

[0210] In some embodiments, referring to FIG. 32, in step S500, after forming the first passivation layer 40 on the doped conductive layer 30, The method further includes a step of forming a second passivation layer 60 on the passivation contact layer 50, the second passivation layer 60 covering at least the second surface S, at least a portion of the first side C1, and at least a portion of the cutting edge side C2 so as to cover at least a portion of the passivation contact layer 50 and the first passivation layer 40.

[0211] In this way, the first passivation layer 40 and the second passivation layer 60 together protect portions of the first side C1 and the cut edge side C2, increase the passivation effect on the first side C1 and the cut edge side C2, and not only mitigate carrier recombination occurring on the side of the solar cell 100, but also, since the first passivation layer 40 and the second passivation layer 60 are insulating layers, the occurrence of leakage current on the side of the solar cell 100 can be effectively avoided, thereby improving the cell conversion efficiency and increasing the power output of the solar cell 100 at the same time.

[0212] In some embodiments, referring to FIG. 33, after the step of forming the second passivation layer 60 on the passivation contact layer 50, the method further includes a step of fabricating electrodes 70 on the first passivation layer 40 and the second passivation layer 60, respectively, to form the solar cell 100.

[0213] As shown in Figure 33, the electrode 70 located on the first surface F side of the substrate 10 is connected to the doped conductive layer 30 through the first passivation layer 40, and the electrode 70 located on the second surface S side of the substrate 10 is connected to the passivation contact layer 50 through the second passivation layer 60.

[0214] The manufacturing method of the solar cell of the embodiment will be described below by taking one specific example.

[0215] Example 3: A method for manufacturing a solar cell includes steps SJ'' to SO''.

[0216] In step SJ'', referring to FIG. 29A, each surface of the substrate 10 is textured and boron diffused, and the substrate 10 is etched to expose first target areas C11 on the second surface S and each first side C1 of the substrate 10, thereby forming a textured structure 20 on the first surface F and a portion of the first side C1 of the substrate 10, and forming a doped conductive material layer 30' (boron conductive material layer) covering the textured structure 20 on the first surface F and a portion of the first side C1 to form a substrate 101'.

[0217] In step SK'', referring to FIG. 29B, a tunnel material layer 51', a polysilicon doping material layer 52' ​​and an oxide material layer are formed on each surface of the substrate 101'.

[0218] In step SL'', referring to FIG. 30, the substrate 101' on which the passivation contact material layer is formed is cut along the thickness direction H of the substrate to form at least two sub-substrates 102, and the doped conductive material layer 30' is cut to form the doped conductive layer 30. The oxide material layer on the surface F' of the first side of the sub-substrate 102 and on each side of the sub-substrate 102 is etched and removed, the polysilicon doped material layer 52' ​​and the tunnel material layer 51' on the surface F' of the first side of the sub-substrate 102 and on each side of the sub-substrate 102 are etched and removed, and the cut edge side C2 of the sub-substrate 102 is etched and polished, thus leaving only the tunnel material layer 51', the polysilicon doped material layer 52' ​​and the oxide material layer on the second surface S of the substrate 10 of the sub-substrate 102. Of course, the oxide material layer here (which may be, for example, a silicon oxide layer) may function as a mask in a subsequent process, and may be subsequently cleaned by a process such as etching. In this manner, the passivation contact layer 50 can be formed on the sub-substrate 102 .

[0219] In step SM'', referring to FIG. 31, a first passivation layer 40 is formed on the doped conductive layer 30, and the first passivation layer 40 covers at least a portion of the surface F' (first surface F of the substrate 10) and the first side C1 of the first side of the sub-substrate 102 so as to cover at least the doped conductive layer 30, and the first passivation layer 40 further covers at least a portion of the cutting edge side C2.

[0220] In step SN'', referring to Figure 32, a second passivation layer 60 is formed on the passivation contact layer 50, and the second passivation layer 60 covers at least the second side surface of the sub-substrate 102, at least a portion of the first side C1, and at least a portion of the cutting edge side C2, so as to cover at least a portion of the passivation contact layer 50 and the first passivation layer 40, and the second side surface of the sub-substrate corresponds to the second surface S of the substrate 10.

[0221] In step SO'', referring to FIG. 33, electrodes 70 are fabricated on the first passivation layer 40 and the second passivation layer 60, respectively.

[0222] The solar cell 100 manufactured in steps SJ'' to SO'' is referred to as solar cell A3.

[0223] The solar cell A3 and the solar cells B1 and B2 are subjected to a cell performance test, and the test results are recorded in Table 3, where Uoc is the open circuit voltage, FF is the fill factor, Eta is the conversion efficiency, Isc is the short circuit current, and IRev2 is the reverse current.

[0224] [Table 3]

[0225] From the above experimental results, it was found that the efficiency of the solar cell A3 (after cutting) manufactured by the method of Example 3 was almost the same as that of the entire solar cell B1 (uncut) of Comparative Example 1, but compared to the solar cell B2 after cutting of Comparative Example 2, the cell open circuit voltage increased by 1.7 mV, the fill factor increased by about 0.73%, the cell conversion efficiency increased by about 0.3%, and the reverse current decreased from 0.09 A to 0.07 A, so that the efficiency of the solar cell A3 manufactured by the method of Example 3 was higher.

[0226] Referring to FIG. 34, this embodiment provides a solar power generation module 200 including at least one battery string 210, where the battery string 210 includes at least two solar cells 100 of any of the above embodiments, and each solar cell 100 can be connected by a series welding method.

[0227] Furthermore, referring to FIG. 35 , the solar cell substrate 103 formed in step S40 can be cut in half or into thirds to obtain solar cells 100, and multiple solar cells 100 can be further connected to each other by serial welding to form a photovoltaic power generation module 200.

[0228] Exemplarily, multiple solar cells 100 are serially welded by solder ribbons 72, so that electrical energy generated from a single solar cell 100 can be collected for subsequent transportation. Specifically, the front electrode 70 of each solar cell 100 is connected to the back electrode 70 of an adjacent solar cell 100 by the solder ribbons 72, and the back electrode 70 of each solar cell 100 is connected to the front electrode 70 of another adjacent solar cell 100 by the solder ribbons 72, thereby connecting multiple solar cells 100 in series. Of course, the solar cells 100 may be arranged with intervals between them, or may be stacked like tiles.

[0229] Exemplarily, the photovoltaic module 200 further includes an encapsulation layer and a cover plate (not shown), where the encapsulation layer is used to cover the surface of the battery string 210, and the cover plate is used to cover the surface of the encapsulation layer away from the battery string 210. The solar cells 100 are electrically connected in the form of a full sheet or multiple sheets to form multiple battery strings 210, and the multiple battery strings 210 are electrically connected in a series and / or parallel manner. Specifically, in some embodiments, the multiple battery strings 210 may be electrically connected between each other by a conductive tape. The encapsulation layer covers the surface of the solar cells 100. Exemplarily, the encapsulation layer may be an organic encapsulation film, such as an ethylene-vinyl acetate copolymer film, a polyethylene octene co-elastomer film, or a polyethylene terephthalate film. The cover plate may be a cover plate having a light transmission function, such as a glass cover plate, a plastic cover plate, or the like.

[0230] An embodiment of the present application provides a solar power generation system (not shown) including the solar power generation module 200 described above.

[0231] The photovoltaic power generation system may be applied to a photovoltaic power station such as a ground power station, a roof power station, or a water power station, and may be applied to equipment or devices that generate electricity using sunlight, such as a solar power source, a solar street lamp, a solar car, or a solar building. Of course, it is understood that the application scene of the photovoltaic power generation system is not limited thereto, that is, it can be applied to any field where solar power generation is required. Taking a photovoltaic power generation system network as an example, the photovoltaic power generation system includes a photovoltaic power generation array, a busbar box, and an inverter, and the photovoltaic power generation array may be a combination of an array of a plurality of photovoltaic power generation modules 200, for example, a plurality of photovoltaic power generation modules 200 may constitute a plurality of photovoltaic power generation arrays, the photovoltaic power generation array is connected to a busbar box, and the busbar box collects the current generated by the photovoltaic power generation array, and the collected current is converted into an AC current required by the commercial power grid through an inverter, and then connected to the commercial power grid to realize solar power supply.

[0232] The technical features of the above embodiments can be combined in any manner. For the sake of brevity, not all possible combinations of the technical features of the above embodiments are described. However, as long as no contradiction occurs in the combination of these technical features, they should be considered to be within the scope of the present specification.

[0233] The above examples merely show some embodiments of the present invention, and the description is more specific and detailed, but it should not be understood as limiting the scope of the claims. It should be noted that those skilled in the art may make some modifications and improvements without departing from the concept of the present invention, which are within the scope of protection of the present invention. Therefore, the scope of protection of the patent of the present invention shall be subject to the scope of the attached claims. [Explanation of symbols]

[0234] 100 solar cell; 101, 101' substrate; 102 sub-substrate; 103 solar cell substrate; F first surface; S second surface; C1 first side; C11 first target area; C12 second target area; C2 cut edge side; CQ cut surface; P flat area; R textured area; H thickness direction of substrate; 10 substrate; 11 boundary line; 20 textured structure; 30 doped conductive layer; 30' doped conductive material layer; 40 first passivation layer; 41 first portion; 42 second portion; 50 passivation contact layer; 51 tunnel oxide layer; 52 polysilicon doped conductive layer; 60 second passivation layer; 70 electrode; 200 photovoltaic module; 210 cell string

Claims

1. providing a substrate including a base material and a doped conductive material layer, the base material including a first surface, a second surface, and a plurality of first side surfaces adjacent to the first surface and the second surface, the base material having a textured structure on a surface of the first surface and a portion of the first side surfaces, the doped conductive material layer being provided on the surface of the first surface and a portion of the first side surfaces so as to cover the textured structure; forming a layer of passivating contact material on each surface of the substrate; cutting the substrate on which the passivation contact material layer is formed along a thickness direction of the base material to form at least two sub-substrates, thereby cutting the doped conductive material layer to form a doped conductive layer; etching away the passivation contact material layer on a first surface and each side of the sub-substrate to form a passivation contact layer on the sub-substrate, the first surface of the sub-substrate corresponding to the first surface of the substrate; A method for manufacturing a solar cell, comprising: a step of forming a first passivation layer on the doped conductive layer, the first passivation layer covering at least a portion of the first surface and the first side surface so as to cover at least the doped conductive layer, the first passivation layer further covering at least a portion of a cut edge side surface, the cut edge side surface being a cut side surface in the sub-substrate.

2. The step of providing a substrate comprises: performing a texturing process and a doping element diffusion on at least the first surface and the first side surface of the substrate; and etching the substrate to expose first target areas on the second surface and each of the first sides of the substrate; 2 . The method for manufacturing a solar cell according to claim 1 , wherein the first target area is an area adjacent to and connected to the second surface on each of the first side surfaces of the substrate.

3. Etching the substrate to expose the first target areas on the second surface and each of the first side surfaces of the substrate, Etching the substrate after the texturing process and the doping element diffusion to expose the texture structure on the second surface and each of the first target areas; 3. The method for manufacturing a solar cell according to claim 2, further comprising a step of etching and removing the exposed texture structure to expose the first target area on the second surface and each of the first side surfaces of the substrate.

4. The step of forming the passivation contact material layer on each surface of the substrate comprises:

2. The method for manufacturing a solar cell according to claim 1, further comprising the steps of forming, in order, a tunnel material layer, a polysilicon doping material layer, and an oxide material layer on each surface of the substrate.

5. Etching away the passivation contact material layer on the first surface and each side of the sub-substrate to form the passivation contact layer on the sub-substrate includes: Etching away the oxide material layer on the first surface of the sub-substrate and on each side of the sub-substrate; 5. The method of claim 4, further comprising the steps of: etching away the polysilicon doping material and the tunnel material layer on the first surface of the sub-substrate and on each side of the sub-substrate; and etching and polishing the cut edge side of the sub-substrate.

6. the step of etching away the oxide material layer is performed by a chain conveyor; 6. The method of claim 5, wherein the step of etching away the polysilicon doping material and the tunnel material layer is performed by a slot conveyor.

7. after the step of etching away the polysilicon doping material and the tunnel material layer on the first surface of the sub-substrate and on each side of the sub-substrate; 6. The method for manufacturing a solar cell according to claim 5, further comprising the step of etching away the oxide material layer on a second side surface of the sub-substrate, the second side surface of the sub-substrate corresponding to the second surface of the base material.

8. After the step of forming the first passivation layer on the doped conductive layer, 2. The method for manufacturing a solar cell according to claim 1, further comprising forming a second passivation layer on the passivation contact layer, the second passivation layer covering at least the second surface, at least a portion of the first side surface, and at least a portion of the cut edge side surface so as to cover the passivation contact layer and at least a portion of the first passivation layer.

9. After the step of forming the second passivation layer on the passivation contact layer, 9. The method of claim 8, further comprising the step of fabricating electrodes on the first passivation layer and the second passivation layer, respectively, to form a solar cell.

10. 10. The method for manufacturing a solar cell according to claim 9, wherein the electrodes are a first electrode located on one side of the substrate, penetrating the first passivation layer and connected to the doping conductive layer, and a second electrode located on the other side of the substrate, penetrating the second passivation layer and connected to the passivation contact layer.

11. The step of cutting the substrate on which the passivation contact material layer is formed along a thickness direction of the base material to form the sub-substrate includes: The method for manufacturing a solar cell according to claim 1 , further comprising the step of cutting the substrate on which the passivation contact material layer is formed with a laser along a thickness direction of the base material to form the sub-substrate.

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