Vibration rectification error correction device, sensor module, and vibration rectification error correction method

Abstract

To provide a vibration rectification error correction device that can correct a vibration rectification error while fixing a group delay amount.SOLUTION: A vibration rectification error correction device comprises: a reference signal generation circuit that outputs a reference signal; a first frequency delta-sigma modulation circuit that performs frequency delta-sigma modulation on the reference signal by using a first measured signal to generate a first frequency delta-sigma modulated signal; a first filter; a second filter that operates in synchronization with the reference signal; and a first timing control circuit that generates a first timing signal obtained by delaying the first measured signal on the basis of, a count value of the number of pulses of the reference signal and controls timing to output an input signal in synchronization with the first timing signal. The first filter and the first timing control circuit are provided on a signal path from output of the first frequency delta-sigma modulation circuit to input of the second filter.SELECTED DRAWING: Figure 22

Description

[Technical field]

[0001] The present invention relates to a vibration rectification error correction device, a sensor module and a vibration rectification error correction method. [Background technology]

[0002] Patent Document 1 describes a sensor module configured to operate a first low-pass filter in synchronization with an output signal from a physical quantity sensor, and perform resampling in synchronization with a reference clock in a subsequent second low-pass filter. With this sensor module, nonlinearity occurs in the input and output of the entire low-pass filter, and by adjusting the vibration rectification error caused by this nonlinearity to be in antiphase with the vibration rectification error caused by the cantilever resonance of the physical quantity sensor, the vibration rectification errors cancel each other out, and the vibration rectification error appearing in the final output can be reduced. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-190897 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the sensor module described in Patent Document 1, the vibration rectification error caused by the nonlinearity of the input / output of the entire low-pass filter is corrected by adjusting the group delay of the first low-pass filter, so the group delay of the entire low-pass filter after adjustment changes depending on the characteristics of the physical quantity sensor. [Means for solving the problem]

[0005] One aspect of the vibration rectification error correction device according to the present invention is to a reference signal generating circuit that outputs a reference signal; a first frequency delta-sigma modulation circuit that uses a first signal under test to frequency delta-sigma modulate the reference signal to generate a first frequency delta-sigma modulated signal; A first filter; a second filter that operates in synchronization with the reference signal; a first timing control circuit that generates a first timing signal by delaying the first signal under measurement based on a count value of the number of pulses of the reference signal, and controls a timing for outputting an input signal in synchronization with the first timing signal; The first filter and the first timing control circuit are provided on a signal path from an output of the first frequency delta-sigma modulation circuit to an input of the second filter.

[0006] One aspect of the sensor module according to the present invention is An embodiment of the vibration rectification error correction device; A physical quantity sensor, The first measured signal is a signal based on an output signal of the physical quantity sensor.

[0007] Another aspect of the sensor module according to the present invention is An embodiment of the vibration rectification error correction device; A first physical quantity sensor; A second physical quantity sensor, the first measured signal is a signal based on an output signal of the first physical quantity sensor, The second measured signal is a signal based on an output signal of the second physical quantity sensor.

[0008] One aspect of the vibration rectification error correction method according to the present invention includes: frequency delta-sigma modulating a reference signal using the signal under test to generate a frequency delta-sigma modulated signal; generating a timing signal by delaying the signal under measurement based on a count value of the number of pulses of the reference signal, and controlling a timing of outputting a signal based on the frequency delta-sigma modulated signal in synchronization with the timing signal; performing a first filtering process on a signal based on the timing-controlled signal in synchronization with the timing signal; and performing a second filtering process on a signal based on the signal obtained by the first filtering process in synchronization with the reference signal.

[0009] Another aspect of the vibration rectification error correction method according to the present invention is to frequency delta-sigma modulating a reference signal using the signal under test to generate a frequency delta-sigma modulated signal; performing a first filtering process on a signal based on the frequency delta-sigma modulated signal in synchronization with the signal under test; generating a timing signal by delaying the signal under measurement based on a count value of the number of pulses of the reference signal, and controlling a timing of outputting a signal based on the signal obtained by the first filtering process in synchronization with the timing signal; and performing a second filtering process on a signal based on the timing-controlled signal in synchronization with the reference signal. [Brief description of the drawings]

[0010] [Figure 1] FIG. [Diagram 2] FIG. [Diagram 3] FIG. [Figure 4] FIG. [Diagram 5] 5 is a cross-sectional view taken along line P1-P1 in FIG. 4 . [Figure 6] FIG. 4 is a diagram illustrating the operation of a physical quantity sensor. [Figure 7] FIG. 4 is a diagram illustrating the operation of a physical quantity sensor. [Figure 8] Functional block diagram of the sensor module. [Figure 9] 4A and 4B are diagrams for explaining the principle of how vibration rectification error occurs due to output waveform distortion. [Figure 10] FIG. 13 is a graph showing the nonlinearity between the applied acceleration and the reciprocal count value. [Figure 11] 5 is a diagram showing nonlinearity between an applied acceleration and an oscillation frequency of a physical quantity sensor. [Figure 12] 5 is a diagram showing nonlinearity between the oscillation frequency and the reciprocal count value of a physical quantity sensor. [Figure 13] FIG. 4 is a diagram showing a configuration example of a frequency ratio measuring circuit. [Figure 14] FIG. 4 is a diagram showing an example of the configuration of a first low-pass filter. [Figure 15] FIG. 4 is a diagram showing an example of the configuration of a second low-pass filter. [Figure 16] 13 is a diagram for explaining that it is possible to adjust vibration rectification errors caused by nonlinearity of the input / output of a frequency ratio measurement circuit. FIG. [Figure 17] FIG. 13 is a graph showing the dependence of vibration rectification error contained in a measured value on the number of taps. [Figure 18] FIG. 4 is a diagram showing a configuration example of a frequency ratio measuring circuit. [Figure 19] FIG. 4 is a diagram showing an example of the configuration of a first low-pass filter. [Figure 20] FIG. 11 is a timing chart of count values ​​input to and output from a FIFO register. [Figure 21] 13 is a diagram for explaining that it is possible to adjust vibration rectification errors caused by nonlinearity of the input / output of a frequency ratio measurement circuit. FIG. [Figure 22] FIG. 13 is a diagram showing an example of the configuration of an improved frequency ratio measurement circuit. [Figure 23] FIG. 2 is a diagram showing an example of the configuration of a timing control circuit. [Figure 24] FIG. 4 is a timing chart of various signals during operation of the timing control circuit. [Diagram 25] FIG. 14 is a diagram showing the measurement results obtained by the frequency ratio measuring circuit having the configuration shown in FIG. 13. [Figure 26]23 is a diagram showing the measurement results obtained by the frequency ratio measuring circuit having the configuration shown in FIG. 22. [Figure 27] FIG. 13 is a diagram showing another example of the configuration of the improved frequency ratio measuring circuit. [Figure 28] FIG. 13 is a diagram showing another example of the configuration of a timing control circuit. [Figure 29] FIG. 11 is a flowchart showing an example of a procedure of a vibration rectification error correction method. [Diagram 30] FIG. 11 is a flowchart showing another example of the procedure of the vibration rectification error correction method. [Diagram 31] FIG. 11 is a diagram showing an example of the configuration of a frequency ratio measuring circuit in the second embodiment. [Diagram 32] FIG. 11 is a diagram showing another example of the configuration of the frequency ratio measuring circuit in the second embodiment. [Diagram 33] FIG. 11 is a flowchart showing an example of a procedure of a vibration rectification error correction method according to the second embodiment. [Diagram 34] FIG. 11 is a flowchart showing another example of the procedure of the vibration rectification error correction method in the second embodiment. [Diagram 35] FIG. 13 is a diagram showing an example of the configuration of a frequency ratio measuring circuit according to a third embodiment. [Diagram 36] FIG. 13 is a diagram showing another example of the configuration of the frequency ratio measuring circuit in the third embodiment. [Figure 37] FIG. 11 is a flowchart showing an example of a procedure of a vibration rectification error correction method according to the third embodiment. [Figure 38] FIG. 13 is a flowchart showing another example of the procedure of the vibration rectification error correction method in the third embodiment. [Figure 39] FIG. 13 is a flowchart showing an example of a procedure of a vibration rectification error correction method according to the fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. Note that the embodiments described below do not unduly limit the contents of the present invention described in the claims. Furthermore, not all of the configurations described below are necessarily essential components of the present invention.

[0012] 1. First embodiment 1-1.Sensor module structure First, an example of the structure of the sensor module of this embodiment will be described.

[0013] 1 is a perspective view of the sensor module 1 as viewed from the mounting surface side to which the sensor module 1 is fixed. In the following explanation, the direction along the long side of the rectangular sensor module 1 in a plan view is defined as the X-axis direction, the direction perpendicular to the X-axis direction in a plan view is defined as the Y-axis direction, and the thickness direction of the sensor module 1 is defined as the Z-axis direction.

[0014] The sensor module 1 has a rectangular parallelepiped shape in plan view, with long sides along the X-axis direction and short sides along the Y-axis direction perpendicular to the X-axis direction. Screw holes 103 are formed in two locations near the ends of one long side and in one location in the center of the other long side. Fixing screws are passed through each of the three screw holes 103, and the sensor module is used in a fixed state to the mounting surface of a mounting object, such as a building, a bulletin board, or various types of equipment.

[0015] 1, an opening 121 is provided on the surface of the sensor module 1 as viewed from the side of the surface on which the sensor module 1 is to be attached. A plug-type connector 116 is disposed inside the opening 121. The connector 116 has a plurality of pins arranged in two rows, and in each row, the plurality of pins are aligned in the Y-axis direction. A socket-type connector (not shown) is connected to the body to which the sensor module 1 is to be attached, and electrical signals such as a drive voltage for the sensor module 1 and detection data are transmitted and received.

[0016] Fig. 2 is an exploded perspective view of the sensor module 1. As shown in Fig. 2, the sensor module 1 is composed of a container 101, a lid 102, a sealing member 141, a circuit board 115, etc. In detail, the sensor module 1 is configured such that the circuit board 115 is attached inside the container 101 with a fixing member 130 interposed therebetween, and the opening of the container 101 is covered with the lid 102 via the sealing member 141 having cushioning properties.

[0017] The container 101 is made of, for example, aluminum and is a container for housing the circuit board 115, which is formed into a box shape having an internal space. The outer shape of the container 101 is a rectangular parallelepiped with a substantially rectangular planar shape, similar to the overall shape of the sensor module 1 described above, and fixing protrusions 104 are provided at two locations near both ends of one long side and at one location in the center of the other long side. Each of the fixing protrusions 104 has a screw hole 103 formed therein.

[0018] The container 101 has a box-like shape with a rectangular parallelepiped outer shape and an opening on one side. The inside of the container 101 is an internal space surrounded by a bottom wall 112 and a side wall 111. In other words, the container 101 is box-like with one side facing the bottom wall 112 as an opening surface 123, and the outer edge of the circuit board 115 is arranged along the inner surface 122 of the side wall 111, and the lid 102 is fixed to cover the opening. Fixing protrusions 104 are erected on the opening surface 123 at two locations near both ends of one long side of the container 101 and at one location in the center of the other long side. The upper surface of the fixing protrusion 104, i.e., the surface exposed in the -Z direction, protrudes from the upper surface of the container 101.

[0019] Furthermore, in the internal space of container 101, a protrusion 129 is provided at the center of one long side opposite fixing protrusion 104 provided at the center of the other long side, protruding from side wall 111 toward the internal space from bottom wall 112 to opening surface 123. A female screw 174 is provided on the upper surface of protrusion 129. Lid 102 is fixed to container 101 via seal member 141 by screw 172 inserted into through hole 176 and female screw 174. Protrusion 129 and fixing protrusion 104 are provided at positions facing constricted portions 133, 134 of circuit board 115 described later.

[0020] In the internal space of container 101, first pedestal 127 and second pedestal 125 are provided, which protrude from bottom wall 112 toward opening surface 123 in a stepped manner. First pedestal 127 is provided at a position facing an arrangement area of ​​plug-type connector 116 attached to circuit board 115. First pedestal 127 is provided with opening 121 shown in FIG. 1, into which plug-type connector 116 is inserted. First pedestal 127 functions as a pedestal for fixing circuit board 115 to container 101.

[0021] Second base 125 is located on the opposite side of first base 127 with respect to fixing protrusion 104 and protrusion 129 located in the center of the long side, and is provided in the vicinity of fixing protrusion 104 and protrusion 129. Second base 125 functions as a base for fixing circuit board 115 to container 101 on the opposite side of first base 127 with respect to fixing protrusion 104 and protrusion 129.

[0022] In the above description, the outer shape of the container 101 is a box shape with a substantially rectangular parallelepiped planar shape and no lid, but the planar shape of the outer shape of the container 101 is not limited to this, and the planar shape of the outer shape of the container 101 may be a square, a hexagon, an octagon, or the like. In addition, in the planar shape of the outer shape of the container 101, the corners of the vertices of a polygon may be chamfered, and further, any of the sides may be a planar shape formed by a curve. In addition, the planar shape of the inside of the container 101 is not limited to the above-mentioned shape, and may be another shape. Furthermore, the planar shapes of the outer shape and the inside of the container 101 may or may not be similar to each other.

[0023] The circuit board 115 is a multi-layer board in which a plurality of through holes and the like are formed, and for example, a glass epoxy board, a composite board, a ceramic board, or the like is used.

[0024] The circuit board 115 has a second surface 115r on the bottom wall 112 side, and a first surface 115f which is the opposite surface to the second surface 115r. The vibration rectification error correction device 2, the three physical quantity sensors 200, and other electronic components (not shown) are mounted on the first surface 115f of the circuit board 115. In addition, a connector 116 is mounted on the second surface 115r of the circuit board 115. Although not shown and their description are omitted, the circuit board 115 may be provided with other wiring, terminal electrodes, and the like.

[0025] Circuit board 115 includes constricted portions 133, 134 where the outer edge of circuit board 115 is constricted, in a central portion in the X-axis direction along the long side of container 101 in a plan view. Constricted portions 133, 134 are provided on both sides of circuit board 115 in the Y-axis direction in a plan view, and are constricted from the outer edge of circuit board 115 toward the center. In addition, constricted portions 133, 134 are provided opposite protrusion 129 and fixed protrusion 104 of container 101.

[0026] The circuit board 115 is inserted into the internal space of the container 101 with the second surface 115r facing the first pedestal 127 and the second pedestal 125. The circuit board 115 is supported in the container 101 by the first pedestal 127 and the second pedestal 125.

[0027] Each of the three physical quantity sensors 200 is a frequency change type sensor in which the frequency of the output signal changes according to the applied physical quantity. Of the three physical quantity sensors 200, the physical quantity sensor 200X detects a physical quantity in the X-axis direction, the physical quantity sensor 200Y detects a physical quantity in the Y-axis direction, and the physical quantity sensor 200Z detects a physical quantity in the Z-axis direction. Specifically, the physical quantity sensor 200X is erected so that the front and back surfaces of the package face the X-axis direction and its side faces the first surface 115f of the circuit board 115. The physical quantity sensor 200X outputs a signal according to the detected physical quantity in the X-axis direction. The physical quantity sensor 200Y is erected so that the front and back surfaces of the package face the Y-axis direction and its side faces the first surface 115f of the circuit board 115. The physical quantity sensor 200Y outputs a signal according to the detected physical quantity in the Y-axis direction. The physical quantity sensor 200Z is provided so that the front and back surfaces of the package face the Z-axis direction, that is, so that the front and back surfaces of the package face the first surface 115f of the circuit board 115. The physical quantity sensor 200Z outputs a signal according to the detected physical quantity in the Z-axis direction.

[0028] The vibration rectification error correction device 2 is electrically connected to the physical quantity sensors 200X, 200Y, and 200Z via wiring and electronic components (not shown). In addition, the vibration rectification error correction device 2 generates physical quantity data in which the vibration rectification error has been reduced, based on the output signals of the physical quantity sensors 200X, 200Y, and 200Z.

[0029] 1-2. Structure of physical quantity sensor Next, an example of the structure of the physical quantity sensor 200 will be described, taking as an example a case where the physical quantity sensor 200 is an acceleration sensor. The three physical quantity sensors 200 shown in Fig. 2, that is, the physical quantity sensors 200X, 200Y, and 200Z, may have the same structure.

[0030] FIG. 3 is a perspective view of the physical quantity sensor 200, FIG. 4 is a plan view of the physical quantity sensor 200, and FIG. 5 is a cross-sectional view taken along line P1-P1 in FIG. 4. Note that FIGS. 3 to 5 only show the inside of the package of the physical quantity sensor 200. For convenience of explanation, each of the following figures shows an x-axis, a y-axis, and a z-axis as three mutually orthogonal axes. In the following explanation, for convenience of explanation, a plan view as seen from the z-axis direction, which is the thickness direction of the extensions 38a and 38b, is also simply referred to as a "plan view."

[0031] The physical quantity sensor 200 has a substrate portion 5 and four weights 50, 52, 54, and 56, as shown in FIGS.

[0032] The substrate portion 5 comprises a plate-shaped base 10 having main surfaces 10a, 10b extending in the x-axis direction and facing opposite each other, a joint portion 12 extending from the base 10 in the y-axis direction, a movable portion 13 extending in a rectangular shape from the joint portion 12 in the opposite direction to the base 10, two support portions 30a, 30b extending along the outer edge of the movable portion 13 from both ends of the base 10 in the x-axis direction, and a physical quantity detection element 40 spanning from the base 10 to the movable portion 13 and joined to the base 10 and the movable portion 13.

[0033] In the two support parts 30a, 30b, the support part 30a extends along the y-axis across a gap 32a from the movable part 13 and is provided with a joint part 36a that fixes the support part 30a and an extension part 38a that extends along the x-axis across a gap 32c from the movable part 13. In other words, the support part 30a extends along the y-axis across a gap 32a from the movable part 13 and is provided with the extension part 38a that extends along the x-axis across a gap 32c from the movable part 13, and the joint part 36a is provided at the part of the support part 30a where the extension part 38a extends. Furthermore, the support portion 30b extends along the y-axis across a gap 32b from the movable portion 13, and is provided with a joint portion 36b that fixes the support portion 30b, and an extension portion 38b that extends along the x-axis across a gap 32c from the movable portion 13. In other words, the support portion 30b extends along the y-axis across a gap 32b from the movable portion 13, and is provided with an extension portion 38b that extends along the x-axis across a gap 32c from the movable portion 13, and the joint portion 36b is provided at the portion of the support portion 30b where the extension portion 38b extends.

[0034] The joints 36a, 36b provided on the supports 30a, 30b are for mounting the substrate 5 of the physical quantity sensor 200 on an external member such as a package. The base 10, the joint 12, the movable part 13, the supports 30a, 30b, and the extensions 38a, 38b may be integrally formed.

[0035] Movable part 13 is surrounded by support parts 30a, 30b and base part 10, and is connected to base part 10 via joint part 12 and supported in a cantilevered state. Movable part 13 has main surfaces 13a, 13b facing opposite each other, a side surface 13c along support part 30a, and a side surface 13d along support part 30b. Main surface 13a faces the same side as main surface 10a of base part 10, and main surface 13b faces the same side as main surface 10b of base part 10.

[0036] The joint part 12 is provided between the base part 10 and the movable part 13, and connects the base part 10 and the movable part 13. The thickness of the joint part 12 is formed to be thinner than the thicknesses of the base part 10 and the movable part 13. The joint part 12 has grooves 12a and 12b. These grooves 12a and 12b are formed along the X-axis, and when the movable part 13 is displaced relative to the base part 10, the grooves 12a and 12b of the joint part 12 function as fulcrums, i.e., intermediate hinges. Such joint part 12 and movable part 13 function as a cantilever.

[0037] Further, a physical amount detection element 40 is fixed to a surface extending from the principal surface 10a of the base 10 to the principal surface 13a of the movable part 13 by a bonding agent 60. The physical amount detection element 40 is fixed at two positions, namely, the central positions in the x-axis direction of each of the principal surfaces 10a and 13a.

[0038] The physical quantity detection element 40 has a base part 42a fixed to the main surface 10a of the base 10 with a bonding agent 60, a base part 42b fixed to the main surface 13a of the movable part 13 with the bonding agent 60, and vibrating beams 41a and 41b located between the base parts 42a and 42b for detecting a physical quantity. In this case, the vibrating beams 41a and 41b are shaped like rectangular columns, and the vibrating beams 41a and 41b are shaped like rectangular columns. When an AC voltage drive signal is applied to excitation electrodes (not shown) provided on the beams 41a and 41b, the beams 41a and 41b vibrate in a bending manner along the x-axis so as to move away from or toward each other. That is, the physical quantity detection element 40 is a tuning fork type vibrating piece.

[0039] Lead electrodes 44a and 44b are provided on the base portion 42a of the physical quantity detection element 40. These lead electrodes 44a and 44b are electrically connected to unillustrated excitation electrodes provided on the vibrating beams 41a and 41b. The lead electrodes 44a and 44b are electrically connected to connection terminals 46a and 46b provided on the main surface 10a of the base 10 by metal wires 48. The connection terminals 46a and 46b are electrically connected to external connection terminals 49a and 49b by wiring not shown. The external connection terminals 49a and 49b are provided on the main surface 10b side of the base 10, which is the surface on which the physical quantity sensor 200 is mounted in a package or the like, so as to overlap the package joint 34 in a plan view. The package joint 34 is for mounting the substrate 5 of the physical quantity sensor 200 on an external member such as a package, and is provided at two locations at both ends of the base 10 in the x-axis direction.

[0040] The physical quantity detection element 40 is formed by patterning a quartz substrate cut at a predetermined angle from a raw quartz stone or the like, using photolithography and etching techniques. In this case, it is desirable that the physical quantity detection element 40 is made of the same material as the base 10 and the movable part 13, in order to reduce the difference in linear expansion coefficient between the physical quantity detection element 40 and the base 10 and the movable part 13.

[0041] Weights 50, 52, 54, and 56 are rectangular in plan view and are provided on movable part 13. Weights 50 and 52 are fixed to main surface 13a of movable part 13 with bonding members 62, and weights 54 and 56 are fixed to main surface 13b of movable part 13 with bonding members 62. Here, weight 50 fixed to main surface 13a has one side, which is an edge of the rectangle, aligned with side surface 13c of movable part 13 in plan view, and the other side aligned with side surface 31d of extension part 38a. By aligning the directions in this way, weight 50 is disposed on the side of side surface 13c of movable part 13, and is disposed so that weight 50 and extension part 38a overlap in plan view. Similarly, weight 52 fixed to main surface 13a is arranged such that one side of the rectangle is oriented in the same direction as side surface 13d of movable part 13, and the other side is oriented in the same direction as side surface 31e of extension part 38b, so that weight 52 is arranged on the side of side surface 13d of movable part 13 and weight 52 and extension part 38b overlap in plan view. Weight 54 fixed to main surface 13b is arranged such that one side of the rectangle is oriented in the same direction as side surface 13c of movable part 13, and the other side is oriented in the same direction as side surface 31d of extension part 38a, so that weight 54 is arranged on the side of side surface 13c of movable part 13 and weight 54 and extension part 38a overlap in plan view. Similarly, weight 56 ​​fixed to main surface 13b is arranged so that, in a planar view, one side of the rectangle is oriented in the same direction as side surface 13d of movable part 13, and the other side is oriented in the same direction as side surface 31e of extension part 38b, such that weight 56 ​​is positioned on the side of side surface 13d of movable part 13 and weight 56 ​​and extension part 38b overlap in a planar view.

[0042] The weights 50, 52, 54, and 56 thus arranged are arranged symmetrically with respect to the physical quantity detection element 40, and the weights 54, 56 are arranged so as to overlap the weights 50, 52, respectively, in a plan view. These weights 50, 52, 54, and 56 are fixed to the movable part 13 by joint members 62 provided at the center of gravity positions of the weights 50, 52, 54, and 56, respectively. Furthermore, since the weights 50, 54 and the extension part 38a and the weights 52, 56 and the extension part 38b overlap each other in a plan view, when an excessive physical quantity is applied, the weights 50, 52, 54, and 56 come into contact with the extension parts 38a and 38b, and the amount of displacement of the weights 50, 52, 54, and 56 can be suppressed.

[0043] The joining member 62 is made of a silicone resin-based thermosetting adhesive or the like. The adhesive is applied to two locations on each of the main surfaces 13a and 13b of the movable part 13, and after the weights 50, 52, 54, and 56 are placed thereon, the adhesive is hardened by heating to fix the weights 50, 52, 54, and 56 to the movable part 13. The bonding surfaces of the weights 50, 52, 54, and 56 facing the main surfaces 13a and 13b of the movable part 13 are rough surfaces. This increases the bonding area of ​​the bonding surfaces when the weights 50, 52, 54, and 56 are fixed to the movable part 13, improving the bonding strength.

[0044] 6, when acceleration in the +Z direction indicated by the arrow α1 is applied to the physical quantity sensor 200 configured as above, a force acts on the movable part 13 in the -Z direction, and the movable part 13 is displaced in the -Z direction with the joint part 12 as a fulcrum. As a result, a force is applied to the physical quantity detection element 40 in a direction in which the base part 42a and the base part 42b move away from each other along the Y axis, and tensile stress is generated in the vibrating beams 41a and 41b. Therefore, the frequency at which the vibrating beams 41a and 41b vibrate becomes higher.

[0045] 7, when acceleration in the -Z direction indicated by the arrow α2 is applied to the physical quantity sensor 200, a force acts on the movable part 13 in the +Z direction, and the movable part 13 is displaced in the +Z direction with the joint part 12 as a fulcrum. As a result, a force is applied to the physical quantity detection element 40 in a direction in which the base part 42a and the base part 42b approach each other along the Y axis, and compressive stress is generated in the vibrating beams 41a and 41b. Therefore, the frequency at which the vibrating beams 41a and 41b vibrate decreases.

[0046] When the frequency at which the vibrating beams 41a, 41b vibrate changes in response to the acceleration, the frequency of the signal output from the external connection terminals 49a, 49b of the physical quantity sensor 200 changes. The sensor module 1 can calculate the value of the acceleration applied to the physical quantity sensor 200 based on the change in frequency of the output signal from the physical quantity sensor 200.

[0047] In order to improve the accuracy of detecting acceleration, which is a physical quantity, it is desirable that joint 12 connecting base 10, which is the fixed part, and movable part 13 be made of quartz, which is a material with a high Q value. For example, base 10, supports 30a and 30b, and movable part 13 may be formed from a quartz plate, and grooves 12a and 12b of joint 12 may be formed by half-etching from both sides of the quartz plate.

[0048] 1-3. Functional configuration of the sensor module 8 is a functional block diagram of the sensor module 1. As described above, the sensor module 1 includes the physical quantity sensors 200X, 200Y, and 200Z, and the vibration rectification error correction device 2.

[0049] The vibration rectification error correction device 2 includes oscillation circuits 201X, 201Y, and 201Z, frequency ratio measuring circuits 202X, 202Y, and 202Z, a microcontrol unit 210, a storage unit 220, and an interface circuit 230.

[0050] The oscillator circuit 201X amplifies the output signal of the physical quantity sensor 200X to generate a drive signal, and applies the drive signal to the physical quantity sensor 200X. The drive signal causes the vibrating beams 41a and 41b of the physical quantity sensor 200X to vibrate at a frequency corresponding to the acceleration in the X-axis direction, and a signal of the frequency is output from the physical quantity sensor 200X. The oscillator circuit 201X also outputs a measured signal SIN_X, which is a square wave signal obtained by amplifying the output signal of the physical quantity sensor 200X, to the frequency ratio measurement circuit 202X. The measured signal SIN_X is a signal based on the output signal of the physical quantity sensor 200X. Note that the physical quantity sensor 200X is an example of a "first physical quantity sensor", and the measured signal SIN_X is an example of a "first measured signal".

[0051] Similarly, the oscillator circuit 201Y amplifies the output signal of the physical quantity sensor 200Y to generate a drive signal, and applies the drive signal to the physical quantity sensor 200Y. The drive signal causes the vibrating beams 41a and 41b of the physical quantity sensor 200Y to vibrate at a frequency corresponding to the acceleration in the Y-axis direction, and a signal of the frequency is output from the physical quantity sensor 200Y. The oscillator circuit 201Y also outputs a measured signal SIN_Y, which is a square wave signal obtained by amplifying the output signal of the physical quantity sensor 200Y, to the frequency ratio measurement circuit 202Y. The measured signal SIN_Y is a signal based on the output signal of the physical quantity sensor 200Y. The physical quantity sensor 200Y is an example of a "second physical quantity sensor", and the measured signal SIN_Y is an example of a "second measured signal".

[0052] Similarly, the oscillator circuit 201Z amplifies the output signal of the physical quantity sensor 200Z to generate a drive signal, and applies the drive signal to the physical quantity sensor 200Z. The drive signal causes the vibrating beams 41a and 41b of the physical quantity sensor 200Z to vibrate at a frequency corresponding to the acceleration in the Z-axis direction, and a signal of the frequency is output from the physical quantity sensor 200Z. In addition, the oscillator circuit 201Z outputs a measured signal SIN_Z, which is a square wave signal obtained by amplifying the output signal of the physical quantity sensor 200Z, to the frequency ratio measurement circuit 202Z. The measured signal SIN_Z is a signal based on the output signal of the physical quantity sensor 200Z.

[0053] The reference signal generating circuit 203 generates and outputs a reference signal CLK having a constant frequency. In this embodiment, the frequency of the reference signal CLK is higher than the frequencies of the signals under measurement SIN_X, SIN_Y, and SIN_Z. It is preferable that the reference signal CLK has high frequency accuracy, and the reference signal generating circuit 203 may be, for example, a temperature compensated crystal oscillator.

[0054] The frequency ratio measurement circuit 202X counts the number of pulses of the reference signal CLK included in a predetermined period of the signal under measurement SIN_X, which is a signal based on the signal output from the oscillation circuit 201X, and outputs a count value CNT_X. The count value CNT_X is a reciprocal count value corresponding to the frequency ratio between the signal under measurement SIN_X and the reference signal CLK.

[0055] The frequency ratio measuring circuit 202Y counts the number of pulses of the reference signal CLK included in a predetermined period of the signal under measurement SIN_Y output from the oscillation circuit 201Y, and outputs a count value CNT_Y. The count value CNT_Y is a reciprocal count value corresponding to the frequency ratio between the signal under measurement SIN_Y and the reference signal CLK.

[0056] The frequency ratio measuring circuit 202Z counts the number of pulses of the reference signal CLK included in a predetermined period of the signal under measurement SIN_Z output from the oscillation circuit 201Z, and outputs a count value CNT_Z. The count value CNT_Z is a reciprocal count value corresponding to the frequency ratio between the signal under measurement SIN_Z and the reference signal CLK.

[0057] The storage unit 220 stores programs and data, and may include volatile memory such as SRAM, DRAM, etc. SRAM is an abbreviation for Static Random Access Memory, and DRAM is an abbreviation for Dynamic Random Access Memory.

[0058] The storage unit 220 may also include non-volatile memory such as semiconductor memory such as EEPROM or flash memory, magnetic storage device such as hard disk device, optical storage device such as optical disk device, etc. EEPROM is an abbreviation for Electrically Erasable Programmable Read Only Memory.

[0059] The micro control unit 210 operates in synchronization with the reference signal CLK, and performs predetermined calculation processing and control processing by executing a program (not shown) stored in the storage unit 220. For example, the micro control unit 210 performs The physical quantity sensors 200X, 200Y, and 200Z measure the physical quantities detected by the physical quantity sensors 200X, 200Y, and 200Z based on the count value CNT_X output from the frequency ratio measurement circuit 202Y, the count value CNT_Y output from the frequency ratio measurement circuit 202Y, and the count value CNT_Z output from the frequency ratio measurement circuit 202Z. Specifically, the micro control unit 210 converts the count value CNT_X, the count value CNT_Y, and the count value CNT_Z into a measurement value of the physical quantity in the X-axis direction, a measurement value of the physical quantity in the Y-axis direction, and a measurement value of the physical quantity in the Z-axis direction, respectively. For example, the storage unit 220 may store table information that specifies the correspondence between the count value and the measurement value of the physical quantity, or information on a relational expression between the count value and the measurement value of the physical quantity, and the micro control unit 210 may convert each count value into a measurement value of the physical quantity by referring to the information.

[0060] The micro control unit 210 may transmit the measured values ​​of the physical quantity in the X-axis direction, the Y-axis direction, and the Z-axis direction to the processing device 3 via the interface circuit 230. Alternatively, the micro control unit 210 may write the measured values ​​of the physical quantity in the X-axis direction, the Y-axis direction, and the Z-axis direction to the storage unit 220, and the processing device 3 may read out each measured value via the interface circuit 230.

[0061] Since the frequency ratio measurement circuits 202X, 202Y, and 202Z have the same configuration and operation, hereinafter, any one of the frequency ratio measurement circuits 202X, 202Y, and 202Z will be referred to as the frequency ratio measurement circuit 202. Also, any one of the signals under measurement SIN_X, SIN_Y, and SIN_Z input to the frequency ratio measurement circuit 202 will be referred to as the signal under measurement SIN, and any one of the count values ​​CNT_X, CNT_Y, and CNT_Z output from the frequency ratio measurement circuit 202 will be referred to as the count value CNT.

[0062] 1-4. Vibration rectification error The vibration rectification error corresponds to a DC offset that occurs during rectification due to the nonlinearity of the response of the sensor module 1 to vibration, and is observed as an abnormal shift in the output offset of the sensor module 1. In applications where the DC output of the sensor module 1 is directly used as the measurement target, such as an inclinometer using the sensor module 1, this can cause serious measurement errors. There are three main mechanisms that cause vibration rectification errors: [1] asymmetric rails, [2] nonlinearity of the scale factor, and [3] structural resonance of the physical quantity sensor 200.

[0063] [1] Vibration rectification error caused by asymmetric rails When the sensitivity axis of the physical quantity sensor 200 is in the direction of gravitational acceleration, the measurement value of the sensor module 1 includes a gravitational acceleration of 1g=9.8m / s 2 For example, if the dynamic range of the physical quantity sensor 200 is 2 g, then vibrations of up to 1 g can be measured without clipping. If vibrations exceeding 1 g are applied in this state, clipping occurs asymmetrically, and the measured value will contain a vibration rectification error.

[0064] For example, when the dynamic range is as wide as 15 g, clipping rarely becomes a problem in normal usage environments. On the other hand, the physical quantity sensor 200 has a built-in physical protection mechanism for the purpose of preventing damage to the physical quantity detection element 40, and when the vibration level exceeds a certain threshold, the protection mechanism is activated, causing clipping. To prevent this, it is necessary to devise an attachment for installing the sensor module 1 and take measures such as damping vibrations in the resonant frequency band.

[0065] [2] Vibration rectification error caused by nonlinearity of the scale factor 9 is a diagram for explaining the principle of how vibration rectification errors occur due to output waveform distortion. In FIG. 9, the solid line indicates a sine wave vibration waveform and a waveform obtained by smoothing the vibration waveform, and the dashed line indicates a waveform obtained by smoothing the sine wave vibration waveform. shows a vibration waveform that is asymmetric above and below the vibration center and a waveform obtained by smoothing the vibration waveform. The smoothed waveform shown by the solid line is 0, while the smoothed waveform shown by the dashed line is a negative value, and an offset occurs during smoothing.

[0066] The physical quantity sensor 200 is a frequency change type sensor, and the count value CNT corresponding to the frequency ratio between the measured signal SIN and the reference signal CLK is a reciprocal count value. The relationship between the acceleration applied to the physical quantity sensor 200 and the reciprocal count value is nonlinear. The dashed line in FIG. 10 indicates the nonlinearity between the applied acceleration and the reciprocal count value. The dashed line in FIG. 11 indicates the nonlinearity between the applied acceleration and the oscillation frequency of the physical quantity sensor 200. The dashed line in FIG. 12 indicates the nonlinearity between the oscillation frequency of the physical quantity sensor 200 and the reciprocal count value. The dashed line in FIG. 10 is obtained by combining the dashed line in FIG. 11 and the dashed line in FIG. 12.

[0067] Here, by correcting the relationship between the oscillation frequency and the reciprocal count value as shown by the solid line in Fig. 12, the relationship between the acceleration and the reciprocal count value can be made closer to linear as shown by the solid line in Fig. 10. Specifically, the above-mentioned micro control unit 210 can correct the count value CNT using the correction function expressed by equation (1).

[0068]

number

[0069] In formula (1), c is the count value before correction corresponding to the dashed line in Fig. 10, Y is the count value after correction corresponding to the solid line in Fig. 10, and d is a coefficient that determines the degree of correction shown in Fig. 12. For example, the coefficient d is stored in the storage unit 220 or is set by the processing device 3.

[0070] [3] Vibration rectification error caused by cantilever resonance The physical quantity sensor 200 detects acceleration by transmitting the deflection of a weighted cantilever due to acceleration to the physical quantity detection element 40, which is a double-ended tuning fork vibrator, to change the tension acting on the physical quantity detection element 40, thereby changing the oscillation frequency. Therefore, the physical quantity detection element 40 has a resonance frequency due to the structure of the cantilever, and when the cantilever resonance is excited, an inherent vibration rectification error occurs. The cantilever resonance has a frequency higher than the frequency band corresponding to the range of detectable acceleration, and the vibration component is removed by the low-pass filter inside the vibration rectification error correction device 2, but a vibration rectification error occurs as a bias offset reflecting the asymmetry of the vibration. As the amplitude of the cantilever resonance increases, the asymmetry of the output waveform of the physical quantity sensor 200 increases, and the vibration rectification error also increases. Therefore, it is an important issue to reduce the vibration rectification error caused by the cantilever resonance.

[0071] In this embodiment, the frequency ratio measurement circuit 202 is a reciprocal counting circuit that counts the number of pulses of the reference signal CLK included in a predetermined period of the signal SIN under test, and the timing of acquiring this count value is synchronized with the signal SIN under test. On the other hand, the count value CNT output from the frequency ratio measurement circuit 202 needs to be synchronized with a divided signal of the reference signal CLK, and resampling is required because the timing of acquiring the count value of the number of pulses of the reference signal CLK is not synchronized with the divided signal of the reference signal CLK. In the frequency ratio measurement circuit 202, by devising a configuration required for resampling, it is possible to generate a count value CNT in which the vibration rectification error caused by the cantilever resonance is corrected.

[0072] 1-5. Configuration of frequency ratio measurement circuit The frequency ratio measurement circuit 202 measures the frequency ratio between the signal under test SIN and the reference signal CLK by a reciprocal counting method. Fig. 13 is a diagram showing an example of the configuration of the frequency ratio measurement circuit 202. As shown in Fig. 13, the frequency ratio measurement circuit 202 includes a frequency delta-sigma modulation circuit 300, a first low-pass filter 310, a latch circuit 320, and a second low-pass filter 330.

[0073] The frequency delta-sigma modulation circuit 300 uses the signal under test SIN to frequency-delta-sigma modulate the reference signal CLK and generate a frequency delta-sigma modulated signal. The frequency delta-sigma modulation circuit 300 includes a counter 301, a latch circuit 302, a latch circuit 303, and a subtractor 304. The counter 301 counts the rising edges of the reference signal CLK and outputs a count value CT0. The latch circuit 302 latches and holds the count value CT0 in synchronization with the rising edges of the signal under test SIN. The latch circuit 303 latches and holds the count value held by the latch circuit 302 in synchronization with the rising edges of the signal under test SIN. The subtractor 304 subtracts the count value held by the latch circuit 303 from the count value held by the latch circuit 302 to generate and output a count value CT1. This count value CT1 is the frequency delta-sigma modulated signal generated by the frequency delta-sigma modulation circuit 300.

[0074] This frequency delta-sigma modulation circuit 300 is also called a first-order frequency delta-sigma modulator, and latches the count value of the number of pulses of the reference signal CLK twice by the signal under test SIN, and sequentially holds the count value of the number of pulses of the reference signal CLK using the rising edge of the signal under test SIN as a trigger. Here, the frequency delta-sigma modulation circuit 300 has been described as performing the latch operation at the rising edge of the signal under test SIN, but the latch operation may be performed at the falling edge, or at both the rising edge and the falling edge. In addition, the subtractor 304 calculates the difference between the two count values ​​held in the latch circuits 302 and 303, and outputs the increment of the count value of the number of pulses of the reference signal CLK observed during one period of the signal under test SIN over time without any dead period. When the frequency of the signal under test SIN is fx and the frequency of the reference signal CLK is fc, the frequency ratio is fc / fx. The frequency delta-sigma modulation circuit 300 outputs a frequency delta-sigma modulated signal indicating the frequency ratio as a digital signal sequence.

[0075] The first low-pass filter 310 operates in synchronization with the signal under test SIN, and outputs a count value CT2 in which noise components contained in the count value CT1, which is the frequency delta-sigma modulated signal output from the frequency delta-sigma modulation circuit 300, have been removed or reduced. In Fig. 13, the first low-pass filter 310 is provided immediately after the frequency delta-sigma modulation circuit 300, but it is sufficient that the first low-pass filter 310 is provided on the signal path from the output of the frequency delta-sigma modulation circuit 300 to the input of the second low-pass filter 330.

[0076] The latch circuit 320 latches the count value CT2 output from the first low-pass filter 310 in synchronization with the rising edge of the reference signal CLK, and holds it as a count value CT3.

[0077] The second low-pass filter 330 operates in synchronization with the reference signal CLK, and outputs a count value from which noise components contained in the count value CT3 held by the latch circuit 320 have been removed or reduced. The count value output from the second low-pass filter 330 is output to the micro control unit 210 as the count value CNT.

[0078] Fig. 14 is a diagram showing a configuration example of the first low-pass filter 310. In the example of Fig. 14, the first low-pass filter 310 includes a delay element 311, an integrator 312, an integrator 313, a decimator 314, a delay element 315, a differentiator 316, a delay element 317, and a differential and a counter 318. Each section of the first low-pass filter 310 operates in synchronization with the signal under test SIN.

[0079] The delay element 311 outputs a count value obtained by delaying the count value CT1 in synchronization with the signal under test SIN. The number of taps of the delay element 311 is na. For example, the delay element 311 is realized by a shift register in which na registers are connected in series.

[0080] The integrator 312 outputs a count value obtained by integrating the count values ​​output from the delay element 311 in synchronization with the signal under test SIN.

[0081] The integrator 313 outputs a count value obtained by integrating the count value output from the integrator 312 in synchronization with the signal under test SIN.

[0082] Decimator 314 outputs a count value obtained by decimating the count value output from integrator 313 to a rate of 1 / R in synchronization with signal under test SIN.

[0083] The delay element 315 outputs a count value obtained by delaying the count value output from the decimator 314 in synchronization with the signal under test SIN. The number of taps of the delay element 315 is n1. For example, the delay element 315 is realized by a shift register in which n1 registers are connected in series.

[0084] The differentiator 316 outputs a count value obtained by subtracting the count value output from the delay element 315 from the count value output from the decimator 314 .

[0085] The delay element 317 outputs a count value obtained by delaying the count value output from the differentiator 316 in synchronization with the signal under test SIN. The number of taps of the delay element 317 is n2. For example, the delay element 317 is realized by a shift register in which n2 registers are connected in series.

[0086] The differentiator 318 subtracts the count value output from the delay element 317 from the count value output from the differentiator 316 to output a count value CT2.

[0087] The tap numbers n1 and n2 and the decimation ratio R are fixed, and the tap number na is variable. For example, the tap number na is stored in the storage unit 220 or is set by the processing device 3.

[0088] The first low-pass filter 310 thus configured functions as a CIC filter with a group delay amount that is variable according to the number of taps na. CIC is an abbreviation for Cascaded Integrator Comb.

[0089] Fig. 15 is a diagram showing an example of the configuration of the second low-pass filter 330. In the example of Fig. 15, the second low-pass filter 330 has an integrator 331, a delay element 332, a differentiator 333, and a decimator 334. Each component of the second low-pass filter 330 operates in synchronization with the reference signal CLK.

[0090] The integrator 331 outputs a count value obtained by integrating the count value CT3 in synchronization with the reference signal CLK.

[0091] The delay element 332 outputs a count value obtained by delaying the count value output from the integrator 331 in synchronization with the reference signal CLK. The number of taps of the delay element 332 is n3. For example, The delay element 332 is realized by a shift register in which n3 registers are connected in series.

[0092] The differentiator 333 outputs a count value obtained by subtracting the count value output from the delay element 332 from the count value output from the integrator 331 .

[0093] The decimator 334 outputs a count value CNT obtained by decimating the count value output from the differentiator 333 at a rate of 1 / n3 in synchronization with the reference signal CLK.

[0094] The number of taps and the decimation ratio, n3, are fixed.

[0095] The second low-pass filter 330 thus configured accumulates the count value CT3 while resampling it with the reference signal CLK, and therefore functions as a weighted moving average filter that weights the count value CT3 by its duration.

[0096] In this way, the first low-pass filter 310 operates in synchronization with the signal under test SIN, and the second low-pass filter 330 performs resampling in synchronization with the reference signal CLK, so that nonlinearity occurs in the input and output of the frequency ratio measurement circuit 202. Therefore, the count value CNT output from the frequency ratio measurement circuit 202 contains a vibration rectification error caused by this nonlinearity. Then, by adjusting the number of taps na of the delay element 311 of the first low-pass filter 310, this vibration rectification error can be adjusted.

[0097] FIG. 16 is a diagram for explaining that the vibration rectification error caused by the nonlinearity of the input and output of the frequency ratio measurement circuit 202 can be adjusted. FIG. 16 shows an example in which the period of the signal under test SIN is longer than that of the reference signal CLK, and the update period of the count value CNT is longer than that of the signal under test SIN, and the horizontal axis corresponds to the passage of time. In FIG. 16, the timing of the rising edge of the reference signal CLK is indicated by a short vertical line. Also, the timing of the change of the count values ​​CT1 and CT2 is indicated by a short vertical line. Note that FIG. 16 uses simplified numerical values ​​for the purpose of explaining the mechanism for adjusting the vibration rectification error to facilitate understanding. Also, although the count value CT2 is not determined until after the count value CT1 is determined, it is described as if the count value CT2 is determined before the count value CT1 is determined, but the actual calculation of the count value CT2 is performed after the count value CT1 is determined.

[0098] In Fig. 16, (A) is an example in which the period of the signal SIN under test is constant, and (B), (C), and (D) are examples in which the signal SIN under test is frequency modulated. In (B), (C), and (D), the group delay of the first low-pass filter 310 is different from each other. For simplicity, the period of the reference signal CLK and the period of the signal SIN under test are assumed to be a simple integer ratio, and the count value CT1 input to the first low-pass filter 310 is output as it is with a constant group delay. The second low-pass filter 330 integrates the count value CT2 output from the first low-pass filter 310 with the latched count value CT3 in synchronization with the reference signal CLK, and outputs the integrated value for 16 times as the count value CNT.

[0099] In the example of (A), the count value CT2 is always 4, and the count value CNT is 4×16=64. In the example of (B), the signal under test SIN is frequency modulated, and the group delay of the first low-pass filter 310 is set to 0, so the count value CT2 repeats 5, 5, 3, 3. Since time weighting is applied during the accumulation, the count value CNT becomes 5×10+3×6=68, which is larger than the count value CNT of (A). In the example of (C), the count value CT2 repeats 5, 5, 3, 3, just like in the example of (B), but a group delay occurs in the first low-pass filter 310. Since time weighting is applied during the accumulation, As a result, the count value CNT becomes 5×8+3×8=64, which is the same value as the count value CNT in (A). In the example of (D), the count value CT2 repeats 5, 5, 3, 3, as in the examples of (B) and (C), but this example shows a case in which the group delay caused by the first low-pass filter 310 is larger than in the example of (C). In the example of (D), the count value CNT becomes 5×6+3×10=60, which is smaller than the count value CNT in (A).

[0100] 16, it can be qualitatively understood that the vibration rectification error caused by the nonlinearity of the input / output of the frequency ratio measurement circuit 202 varies depending on the group delay of the first low-pass filter 310. By adjusting the group delay of the first low-pass filter 310 so that the vibration rectification error caused by the nonlinearity of the input / output of the frequency ratio measurement circuit 202 is in antiphase with the vibration rectification error caused by the cantilever resonance, it becomes possible to cancel each other's vibration rectification errors. The group delay of the first low-pass filter 310 can be adjusted by setting the number of taps na of the delay element 311.

[0101] Fig. 17 is a diagram showing the dependency of the vibration rectification error included in the measurement value by the vibration rectification error correction device 2 on the tap number na. In Fig. 17, the horizontal axis is the tap number na, and the vertical axis is the vibration rectification error. Note that VRE on the vertical axis is an abbreviation for Vibration Rectification Error. Fig. 17 shows that if the tap number na is appropriately set, it is possible to correct the vibration rectification error and bring it close to zero.

[0102] In first low-pass filter 310 with the configuration in Fig. 14, delay element 311 is realized by a FIFO register using a shift register, so if the FIFO register is taken out of first low-pass filter 310, frequency ratio measurement circuit 202 with the configuration in Fig. 13 will have the configuration shown in Fig. 18, and first low-pass filter 310 with the configuration in Fig. 14 will have the configuration shown in Fig. 19. FIFO is an abbreviation for First In First Out.

[0103] Fig. 20 shows an example of a timing chart of the count value CT1 input to the FIFO register 340 and the count value CT1' output from the FIFO register 340. In the example of Fig. 20, the count values ​​CT1, CT1' change in synchronization with both edges of the signal under measurement SIN. That is, in the example of Fig. 20, the frequency delta-sigma modulation circuit 300 and the FIFO register 340 operate in synchronization with both edges of the signal under measurement SIN. Case 1 is a case where the number of stages of the FIFO register 340 is two, and Case 2 is a case where the number of stages of the FIFO register 340 is four.

[0104] In the frequency ratio measurement circuit 202 having the configuration of FIG. 18, if the number of stages of the FIFO register 340, which is equivalent to the number of taps na of the delay element 311, is adjusted to appropriately set the amount of group delay, it is possible to correct the vibration rectification error and bring it closer to zero.

[0105] However, since the characteristics of the three physical quantity detection elements 40 of the physical quantity sensors 200X, 200Y, and 200Z vary from one another, the optimal values ​​of the group delay amounts required for correcting the vibration rectification error also vary from one another in the frequency ratio measurement circuits 202X, 202Y, and 202Z. Therefore, when the optimal values ​​of the group delay amounts of the frequency ratio measurement circuits 202X, 202Y, and 202Z are different from one another, the times from when the measured signals SIN_X, SIN_Y, and SIN_Z are input to the frequency ratio measurement circuits 202X, 202Y, and 202Z, respectively, until the count values ​​CNT_X, CNT_Y, and CNT_Z are output, respectively, are also different from one another. Therefore, for example, when highly accurate synchronous measurement is required between the X-axis, the Y-axis, and the Z-axis, this may cause a problem.

[0106] Therefore, in this embodiment, the timing at which the count value CT1′ is output is controlled while keeping the group delay amount fixed, that is, the count value C The frequency ratio measurement circuit 202 is improved so as to correct the vibration rectification error by controlling the timing at which T2 is output.

[0107] FIG. 21 is a diagram for explaining that the vibration rectification error caused by the nonlinearity of the input and output of the frequency ratio measurement circuit 202 can be adjusted by controlling the timing at which the count value CT2 is output. FIG. 21 shows an example in which the period of the signal under test SIN is longer than that of the reference signal CLK, and the update period of the count value CNT is longer than that of the signal under test SIN, and the horizontal axis corresponds to the passage of time. In FIG. 21, the timing of the rising edge of the reference signal CLK is indicated by short vertical lines. Also, the timing at which the count values ​​CT1 and CT2 change is indicated by short vertical lines. Note that FIG. 21 uses simplified numerical values ​​for the purpose of explaining the mechanism for adjusting the vibration rectification error in order to make it easier to understand. Also, although the count value CT2 is not determined until after the count value CT1 is determined, it is described as if the count value CT2 is determined before the count value CT1 is determined, but the actual calculation of the count value CT2 is performed after the count value CT1 is determined.

[0108] In Fig. 21, (A) is an example in which the period of the signal SIN under test is constant, and (B), (C), and (D) are examples in which the signal SIN under test is frequency modulated. In (B), (C), and (D), the output timing of the count value CT2 is different from each other. For simplicity, the period of the reference signal CLK and the period of the signal SIN under test are assumed to be a simple integer ratio, and the count value CT1 is output as is from the first low-pass filter 310 at a constant timing. The second low-pass filter 330 integrates the count value CT3 in which the count value CT2 is latched, in synchronization with the reference signal CLK, and outputs the integrated value for 16 times as the count value CNT.

[0109] In the example of (A) in FIG. 21, the count value CT2 is always 4, and the count value CNT is 4×16=64. In the example of (B), the measured signal SIN is frequency modulated, and the output timing of the count value CT2 is the same as the output timing of the count value CT1, so the count value CT2 repeats 5, 5, 3, 3. Since weighting is performed by time during the accumulation, the count value CNT becomes 5×10+3×6=68, which is larger than the count value CNT of (A). In the example of (C), the count value CT2 repeats 5, 5, 3, 3, as in the example of (B), but the output timing of the count value CT2 is delayed from the output timing of the count value CT1. As a result of weighting by time during the accumulation, the count value CNT becomes 5×8+3×8=64, which is the same value as the count value CNT of (A). In the example (D), the count value CT2 repeats 5, 5, 3, 3, just like in the examples (B) and (C), but this shows a case where the output timing of the count value CT2 is further delayed compared to the example (C). In the example (D), the count value CNT is 5 x 6 + 3 x 10 = 60, which is smaller than the count value CNT in (A).

[0110] 21, it can be qualitatively understood that the vibration rectification error caused by the nonlinearity of the input / output of the frequency ratio measurement circuit 202 changes depending on the output timing of the count value CT2. By controlling the output timing of the count value CT2 so that the vibration rectification error caused by the nonlinearity of the input / output of the frequency ratio measurement circuit 202 is in antiphase with the vibration rectification error caused by the cantilever resonance, that is, by controlling the output timing of the count value CT1', it becomes possible to cancel out each other's vibration rectification errors.

[0111] Fig. 22 is a diagram showing an example of the configuration of a frequency ratio measurement circuit 202 improved so as to correct vibration rectification errors by controlling the output timing of the count value CT1'. In Fig. 22, the same components as those in Fig. 18 are denoted by the same reference numerals.

[0112] In the example of FIG. 22, the frequency ratio measurement circuit 202 includes a frequency delta-sigma modulation circuit 300, a first low-pass filter 310, a latch circuit 320, a second low-pass filter 330, and a timing control circuit 350.

[0113] The operation of the frequency delta-sigma modulation circuit 300 is the same as that in FIG. 13, and therefore a description thereof will be omitted.

[0114] A count value CT1, which is a delta-sigma modulated signal, is input to the timing control circuit 350. Then, the timing control circuit 350 generates a timing signal TM by delaying the signal under measurement SIN based on a count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting the count value CT1, which is the input signal, as a count value CT1' in synchronization with the timing signal TM.

[0115] The first low-pass filter 310 receives the count value CT1', which is an output signal of the timing control circuit 350, and operates in synchronization with the timing signal TM. The first low-pass filter 310 then outputs a count value CT2 in which noise components contained in the count value CT1' have been removed or reduced.

[0116] The operations of the latch circuit 320 and the second low-pass filter 330 are the same as those in FIG. 13, and therefore will not be described.

[0117] Fig. 23 is a diagram showing an example of the configuration of the timing control circuit 350. In the example of Fig. 23, the timing control circuit 350 includes a latch circuit 351, a counter 352, a dual port RAM 353, an output timing generation circuit 354, a counter 355, and a buffer circuit 356.

[0118] The latch circuit 351 latches the value of the lowest m bits of the count value CT0 of the number of pulses of the reference signal CLK in synchronization with an edge of the signal under measurement SIN, and holds it as a count value ICT, where m is an integer equal to or greater than 1.

[0119] The counter 352 counts the edges of the signal under test SIN and outputs a count value IADDR.

[0120] The dual port RAM 353 writes the count value ICT to an address specified by the count value IADDR in synchronization with the rising edge of the reference signal CLK, and outputs the count value stored in the address specified by the count value OADDR as the count value OCT.

[0121] The output timing generation circuit 354 generates a timing signal TM whose logic level is inverted every time the value of the lowest m bits of the count value CT0 matches the count value OCT. For example, the logic level of the timing signal TM is inverted every time the value of the lowest 3 bits of the count value CT0 matches the count value OCT.

[0122] The counter 355 counts the edges of the timing signal TM and outputs a count value OADDR.

[0123] The buffer circuit 356 acquires and holds a count value CT1 in synchronization with an edge of the signal under test SIN, and outputs the oldest count value of the M held count values ​​as a count value CT1' in synchronization with an edge of the timing signal TM, where M is an integer equal to or greater than 2. For example, the buffer circuit 356 may be a FIFO register with M stages.

[0124] The timing control circuit 350 thus configured generates a timing signal TM by delaying the signal under test SIN based on the count value CT0, and controls the timing of outputting the count value CT1 as the count value CT1' in synchronization with the timing signal TM. When the micro control unit 210 sets the initial value of the count value OADDR, and the initial value of the count value OADDR changes, the output timing of the count value CT1' changes.

[0125] FIG. 24 shows an example of a timing chart of various signals during operation of the timing control circuit 350. In the example of FIG. 24, the count value CT0 counts up by 1 from the initial value of 0 in synchronization with the rising edge of the reference signal CLK. As a result, the lower 3 bits of the count value CT0 repeatedly count up from 0 to 7 and back to 0. Also, the count value IADDR counts up by 1 from the initial value of 0 in synchronization with both edges of the signal under measurement SIN. Also, the count value ICT changes to the value of the lower 3 bits of the count value CT0 in synchronization with both edges of the signal under measurement SIN. Also, the count value CT1 changes in synchronization with both edges of the signal under measurement SIN. Case 1 is a case where the initial value of the count value OADDR is 2, and Case 2 is a case where the initial value of the count value OADDR is 0.

[0126] The count value OADDR is initialized after a predetermined time has elapsed since the count value IADDR starts to count up. In the example of Fig. 24, the count value OADDR is initialized when the count value CT0 becomes 16. The count value OCT changes in synchronization with the count value OADDR, and the logic level of the timing signal TM is inverted every time the value of the lowest 3 bits of the count value CT0 matches the count value OCT. The buffer circuit 356 is a four-stage FIFO register, which acquires and holds the count value CT1 in synchronization with the edges of the signal under test SIN, and outputs the count value CT1' in synchronization with the edges of the timing signal TM.

[0127] Comparing Case 1 and Case 2, the timing at which the logical level of the timing signal TM is inverted differs, and therefore the output timing of the count value CT1' differs, and therefore the vibration rectification error caused by the nonlinearity of the input / output of the frequency ratio measurement circuit 202 also differs. Therefore, by setting the initial value of the count value OADDR, it is possible to make a correction so as to reduce the vibration rectification error that ultimately occurs due to the cantilever resonance.

[0128] The initial value of the count value OADDR is information for controlling the delay amount of the timing signal TM obtained by delaying the measured signal SIN, and is stored in the storage unit 220. For example, in the manufacturing process of the sensor module 1, the inspection device acquires the vibration rectification error of the measurement value while sequentially changing the initial value of the count value OADDR through the interface circuit 230, and obtains the relationship between the initial value of the count value OADDR and the vibration rectification error. Then, the inspection device calculates the initial value of the count value OADDR at which the vibration rectification error of the measurement value is reduced based on the relationship between the initial value of the count value OADDR and the vibration rectification error, and writes the calculated initial value of the count value OADDR into the non-volatile memory of the storage unit 220 through the interface circuit 230. In this way, the initial value of the count value OADDR is stored in the storage unit 220 of the vibration rectification error correction device 2 before the sensor module 1 starts measurement. The initial value of the count value OADDR stored in the storage unit 220 is read by the micro control unit 210 and set in the counter 355 of the timing control circuit 350.

[0129] In the example of Fig. 24, the difference between the output timing of the count value CT1' in Case 1 and the output timing of the count value CT1' in Case 2 is less than one period of the signal under test SIN, and it is clear that the amount of group delay is fixed. Fig. 25 is a plot of measured values ​​in the same environment for two cases in which the number of taps na is different in the frequency ratio measurement circuit 202 configured as shown in Fig. 13. On the other hand, Fig. 26 is a plot of measured values ​​in the same environment for two cases in which the number of taps na is different in the frequency ratio measurement circuit 202 configured as shown in Fig. 22. These are plots of measured values ​​in the same environment for two cases where the initial value of the count value OADDR is different in the frequency ratio measurement circuit 202. In Fig. 25 and Fig. 26, the horizontal axis is time and the vertical axis is acceleration. The solid line indicates one measurement result, and the dashed line indicates the other measurement result. In Fig. 25, a group delay difference of about 1 ms occurs between the two measurement results, whereas in Fig. 26, it can be confirmed that the group delay difference between the two measurement results is less than the measurement error.

[0130] In the frequency ratio measurement circuit 202X having the configuration of FIG. 22, the frequency delta sigma modulation circuit 300 is an example of a "first frequency delta sigma modulation circuit", the count value CT1 which is an output signal of the frequency delta sigma modulation circuit 300 is an example of a "first frequency delta sigma modulation signal", and the timing control circuit 350 is an example of a "first timing control circuit". In the frequency ratio measurement circuit 202X having the configuration of FIG. 22, the first low-pass filter 310 is an example of a "first filter", and the second low-pass filter 330 is an example of a "second filter". In the frequency ratio measurement circuit 202X having the configuration of FIG. 22, the timing signal TM is an example of a "first timing signal". In addition, the signal under measurement SIN_X is an example of a "first signal under measurement".

[0131] 22, the frequency delta-sigma modulation circuit 300 is an example of a "second frequency delta-sigma modulation circuit", the count value CT1 which is an output signal of the frequency delta-sigma modulation circuit 300 is an example of a "second frequency delta-sigma modulation signal", and the timing control circuit 350 is an example of a "third timing control circuit". In the frequency ratio measurement circuit 202Y of the configuration of FIG. 22, the first low-pass filter 310 is an example of a "fourth filter", and the second low-pass filter 330 is an example of a "fifth filter". In the frequency ratio measurement circuit 202Y of the configuration of FIG. 22, the timing signal TM is an example of a "third timing signal". In addition, the signal under measurement SIN_Y is an example of a "second signal under measurement".

[0132] In FIG. 22 , in the frequency ratio measurement circuit 202, the first low-pass filter 310 is provided immediately after the timing control circuit 350, but the first low-pass filter 310 and the timing control circuit 350 only need to be provided on the signal path from the output of the frequency delta-sigma modulation circuit 300 to the input of the second low-pass filter 330.

[0133] For example, as shown in Fig. 27, in frequency ratio measurement circuit 202, a timing control circuit 350 may be provided immediately after first low-pass filter 310. An example configuration of timing control circuit 350 included in frequency ratio measurement circuit 202 having the configuration in Fig. 27 is shown in Fig. 28.

[0134] In the example of FIG. 27, the operation of the frequency delta-sigma modulation circuit 300 is the same as that in FIG. 13, and therefore a description thereof will be omitted.

[0135] The first low-pass filter 310 receives the count value CT1, which is the frequency delta-sigma modulated signal output from the frequency delta-sigma modulation circuit 300, and operates in synchronization with the signal under measurement SIN. The first low-pass filter 310 then outputs a count value CT2 in which noise components contained in the count value CT1 have been removed or reduced.

[0136] The timing control circuit 350 receives the count value CT2, which is the output signal of the first low-pass filter 310. The timing control circuit 350 generates a timing signal TM by delaying the signal under measurement SIN based on the count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting the count value CT2, which is the input signal, as the count value CT2' in synchronization with the timing signal TM.

[0137] The latch circuit 320 latches the count value CT2' output from the timing control circuit 350 in synchronization with the rising edge of the reference signal CLK, and holds it as a count value CT3.

[0138] The operations of the latch circuit 320 and the second low-pass filter 330 are the same as those in FIG. 13, and therefore will not be described.

[0139] Furthermore, the timing control circuit 350 shown in FIG. 28 is the same as the timing control circuit 350 shown in FIG. 23 except that the count value CT2 is input to the buffer circuit 356 and the count value CT2' is output, and the timing signal TM is not input to the first low-pass filter 310, so a description thereof will be omitted.

[0140] In the frequency ratio measurement circuit 202X having the configuration shown in FIG. 27, the frequency delta-sigma modulation circuit 300 is an example of a "first frequency delta-sigma modulation circuit", and the timing control circuit 350 is an example of a "first timing control circuit". In the frequency ratio measurement circuit 202X having the configuration shown in FIG. 27, the first low-pass filter 310 is an example of a "first filter", and the second low-pass filter 330 is an example of a "second filter". In the frequency ratio measurement circuit 202X having the configuration shown in FIG. 27, the timing signal TM is an example of a "first timing signal".

[0141] 27, the frequency delta-sigma modulation circuit 300 is an example of a "second frequency delta-sigma modulation circuit," and the timing control circuit 350 is an example of a "third timing control circuit." Also, in the frequency ratio measurement circuit 202Y with the configuration of FIG. 27, the first low-pass filter 310 is an example of a "fourth filter," and the second low-pass filter 330 is an example of a "fifth filter." Also, in the frequency ratio measurement circuit 202Y with the configuration of FIG. 27, the timing signal TM is an example of a "third timing signal."

[0142] 1-6. Vibration rectification error correction method FIG. 29 is a flow chart showing an example of the procedure of a vibration rectification error correction method by the vibration rectification error correction device 2 including the frequency ratio measuring circuit 202 having the configuration of FIG.

[0143] As shown in FIG. 29, first, in step S10, the vibration rectification error correction device 2 uses the signal under test SIN to frequency delta-sigma modulate the reference signal CLK to generate a frequency delta-sigma modulated signal.

[0144] Next, in step S20, the vibration rectification error correction device 2 generates a timing signal TM by delaying the measured signal SIN based on a count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting a count value CT1', which is a signal based on the count value CT1, which is the frequency delta-sigma modulated signal generated in step S10, in synchronization with the timing signal TM.

[0145] Next, in step S30, the vibration rectification error correction device 2 performs a first filter process in synchronization with the timing signal TM on the count value CT1' which is a signal based on the timing-controlled signal output in step S20.

[0146] Next, in step S40, the vibration rectification error correction device 2 performs a second filter process on the count value CT3, which is a signal based on the count value CT2, which is a signal obtained by the first filter process in step S30, in synchronization with the reference signal CLK.

[0147] In step S50, the vibration rectification error correction device 2 repeats steps S10, S20, S30, and S40 until the measurement is completed.

[0148] FIG. 30 is a flow chart showing an example of the procedure of a vibration rectification error correcting method by the vibration rectification error correcting device 2 including the frequency ratio measuring circuit 202 having the configuration of FIG.

[0149] As shown in FIG. 30, first, in step S11, the vibration rectification error correction device 2 performs frequency delta-sigma modulation on the reference signal CLK using the signal under test SIN to generate a frequency delta-sigma modulated signal.

[0150] Next, in step S21, the vibration rectification error correction device 2 performs a first filter process on the count value CT1, which is a signal based on the frequency delta-sigma modulated signal generated in step S11, in synchronization with the signal SIN to be measured.

[0151] Next, in step S31, the vibration rectification error correction device 2 generates a timing signal TM by delaying the measured signal SIN based on a count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting a count value CT2', which is a signal based on the count value CT2, which is a signal obtained by the first filter processing in step S21, in synchronization with the timing signal TM.

[0152] Next, in step S41, the vibration rectification error correction device 2 performs a second filter process on the count value CT3, which is a signal based on the count value CT2', which is a timing-controlled signal output in synchronization with the timing signal TM in step S31, in synchronization with the reference signal CLK.

[0153] In step S51, the vibration rectification error correction device 2 repeats steps S11, S21, S31, and S41 until the measurement is completed.

[0154] 1-7.Effects As described above, in the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, the frequency delta-sigma modulation circuit 300 uses the measured signal SIN to perform frequency delta-sigma modulation of the reference signal CLK, the first low-pass filter 310 operates in synchronization with the timing signal TM obtained by delaying the measured signal SIN or the measured signal SIN, and the second low-pass filter 330 operates in synchronization with the reference signal CLK different from the measured signal SIN. Therefore, nonlinearity occurs in the relationship between the frequency delta-sigma modulation signal and the output signal of the second low-pass filter 330, and the vibration rectification error caused by this nonlinearity changes depending on the delay amount of the timing signal TM. Therefore, by setting the delay amount of the timing signal TM to an appropriate value, the vibration rectification error caused by this nonlinearity and the vibration rectification error caused by the asymmetry of the measured signal SIN cancel each other out, and the vibration rectification error included in the output signal of the second low-pass filter 330 is reduced. Furthermore, in the vibration rectification error correction device 2, the timing control circuit 350 does not control the delay amount of the signal based on the frequency delta-sigma modulated signal so as to correct the vibration rectification error, but controls the timing of outputting the signal based on the frequency delta-sigma modulated signal, so that the group delay amount of the signal path through which the measured signal SIN propagates to the output of the second low-pass filter 330 is constant. Therefore, according to the sensor module 1 of the first embodiment, the vibration rectification error correction device 2 can correct the vibration rectification error while keeping the group delay amount fixed.

[0155] In addition, according to the sensor module 1 of the first embodiment, the initial value of the count value OADDR, which is information on the delay amount of the timing signal TM, is stored in the non-volatile memory of the storage unit 220 in the vibration rectification error correction device 2, and the information is received from the processing device 3. Therefore, vibration rectification errors can be corrected without any need for a compensation.

[0156] In the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, the group delay amount of the signal path in which the measured signal SIN_X propagates to the output of the second low-pass filter 330 of the frequency ratio measurement circuit 202X is constant, the group delay amount of the signal path in which the measured signal SIN_Y propagates to the output of the second low-pass filter 330 of the frequency ratio measurement circuit 202Y is constant, and the group delay amount of the signal path in which the measured signal SIN_Z propagates to the output of the second low-pass filter 330 of the frequency ratio measurement circuit 202Z is ​​constant. Therefore, the time from when the measured signal SIN_X is input to the frequency ratio measurement circuit 202X until the corresponding signal is output, the time from when the measured signal SIN_Y is input to the frequency ratio measurement circuit 202Y until the corresponding signal is output, and the time from when the measured signal SIN_Z is input to the frequency ratio measurement circuit 202Z until the corresponding signal is output are almost the same. Therefore, according to the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, the vibration rectification error can be corrected by matching the timing of the measurement of the measured signal SIN_X by the frequency ratio measurement circuit 202X, the measurement of the measured signal SIN_Y by the frequency ratio measurement circuit 202Y, and the measurement of the measured signal SIN_Z by the frequency ratio measurement circuit 202Z, thereby improving the measurement accuracy and the accuracy of synchronous measurement.

[0157] 2. Second embodiment Hereinafter, for the sensor module of the second embodiment, components similar to those of the first embodiment will be given the same symbols, explanations that overlap with the first embodiment will be omitted or simplified, and mainly the differences from the first embodiment will be described.

[0158] In the first embodiment, the operation of the timing control circuit 350 is synchronized with the signal under test SIN, so the correction resolution of the vibration rectification error is determined by the period of the signal under test SIN, and the longer the period of the signal under test SIN, the lower the correction resolution becomes. Therefore, there is a certain limit to the correction resolution of the vibration rectification error.

[0159] Therefore, in this embodiment, in order to improve the correction resolution of the vibration rectification error, the frequency ratio measurement circuit 202 is improved. Fig. 31 is a diagram showing an example of the configuration of the frequency ratio measurement circuit 202 included in the sensor module 1 of the second embodiment. In Fig. 31, the same components as those in Fig. 22 are denoted by the same reference numerals.

[0160] In the example of FIG. 31, the frequency ratio measurement circuit 202 includes a frequency delta-sigma modulation circuit 300, a first low-pass filter 310, a latch circuit 320, a latch circuit 321, a second low-pass filter 330, a first timing control circuit 350-1, a second timing control circuit 350-2, a third low-pass filter 360, a multiplier 371, a multiplier 372, and an adder 373.

[0161] The operation of the frequency delta-sigma modulation circuit 300 is the same as that in FIG. 22, and therefore the description thereof will be omitted.

[0162] The first timing control circuit 350-1 receives a count value CT1, which is a delta-sigma modulated signal. The first timing control circuit 350-1 generates a first timing signal TM-1 by delaying the measured signal SIN based on a count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting the count value CT1, which is the input signal, as a count value CT1'-1 in synchronization with the first timing signal TM-1. The configuration of the first timing control circuit 350-1 is similar to that of the timing control circuit 350 shown in FIG. 23, and therefore illustration and description thereof will be omitted.

[0163] The first low-pass filter 310 receives the count value CT1'-1, which is an output signal of the first timing control circuit 350-1, and operates in synchronization with the first timing signal TM-1. The first low-pass filter 310 then outputs the count value CT2-1, which is a result of removing or reducing noise components contained in the count value CT1'-1.

[0164] The latch circuit 320 latches the count value CT2-1 output from the first low-pass filter 310 in synchronization with the rising edge of the reference signal CLK, and holds it as a count value CT3-1.

[0165] The second timing control circuit 350-2 receives a count value CT1, which is a delta-sigma modulated signal. The second timing control circuit 350-2 generates a second timing signal TM-2 by delaying the measured signal SIN based on a count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting the count value CT1, which is the input signal, as a count value CT1'-2 in synchronization with the second timing signal TM-2. The configuration of the second timing control circuit 350-2 is similar to that of the timing control circuit 350 shown in FIG. 23, and therefore illustration and description thereof will be omitted.

[0166] The third low-pass filter 360 receives the count value CT1'-2, which is the output signal of the second timing control circuit 350-2, and operates in synchronization with the second timing signal TM-2. The third low-pass filter 360 outputs a count value CT2-2 in which noise components contained in the count value CT1'-2 have been removed or reduced. The configuration of the third low-pass filter 360 is similar to that of the first low-pass filter 310 shown in FIG. 19, and therefore illustration and description thereof will be omitted.

[0167] The latch circuit 321 latches the count value CT2-2 output from the third low-pass filter 360 in synchronization with the rising edge of the reference signal CLK, and holds it as a count value CT3-2.

[0168] The multiplier 371 outputs a count value obtained by multiplying the count value CT3-1 held by the latch circuit 320 by a, where a is a predetermined positive real number. The count value output from the multiplier 371 is a first signal based on the output signal of the first low-pass filter 310.

[0169] The multiplier 372 outputs a count value obtained by multiplying the count value CT3-2 held by the latch circuit 321 by b, where b is a predetermined positive real number. The count value output from the multiplier 372 is a second signal based on the output signal of the third low-pass filter 360.

[0170] The adder 373 outputs a count value CT4 obtained by adding the count value output from the multiplier 371, which is the first signal, to the count value output from the multiplier 372, which is the second signal. The count value CT4 output from the adder 373 is a third signal based on the first signal and the second signal.

[0171] The second low-pass filter 330 receives the count value CT4 output from the adder 373 as a third signal. The second low-pass filter 330 operates in synchronization with the reference signal CLK, and outputs a count value as a fourth signal in which noise components contained in the count value CT4 have been removed or reduced. The count value output from the second low-pass filter 330 is output to the micro control unit 210 as the count value CNT.

[0172] Here, if the count value output from the multiplier 371, which is the first signal, is input to the second low-pass filter 330, the fifth signal output from the second low-pass filter 330 will be The timing at which the count value CT1'-1 is output from the first timing control circuit 350-1 and the timing at which the count value CT1'-2 is output from the second timing control circuit 350-2 are appropriately controlled so that the polarity of the first vibration rectification error included in the signal CT1'-1 and the polarity of the second vibration rectification error included in the sixth signal output from the second low-pass filter 330 when the count value output from the multiplier 372, which is the second signal, is input to the second low-pass filter 330, are different. Therefore, the first vibration rectification error and the second vibration rectification error cancel each other out by the addition of the first signal and the second signal in the adder 373, and the vibration rectification error included in the count value CNT, which is the fourth signal, is reduced. That is, the frequency ratio measurement circuit 202 having the configuration of FIG. 31 improves the correction resolution of the vibration rectification error.

[0173] Fig. 32 is a diagram showing another configuration example of the frequency ratio measuring circuit 202 included in the sensor module 1 of the second embodiment. In Fig. 32, the same components as those in Fig. 31 are denoted by the same reference numerals.

[0174] In the example of FIG. 32, the frequency ratio measurement circuit 202 includes a frequency delta-sigma modulation circuit 300, a first low-pass filter 310, a latch circuit 320, a latch circuit 321, a second low-pass filter 330, a first timing control circuit 350-1, a second timing control circuit 350-2, a multiplier 371, a multiplier 372, and an adder 373.

[0175] The operations of the frequency delta-sigma modulation circuit 300 and the first low-pass filter 310 are the same as those in FIG. 27, and therefore will not be described.

[0176] The first timing control circuit 350-1 receives the count value CT2, which is an output signal of the first low-pass filter 310. The first timing control circuit 350-1 generates a first timing signal TM-1 by delaying the measured signal SIN based on the count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting the count value CT2, which is an input signal, as the count value CT2'-1 in synchronization with the first timing signal TM-1 (not shown). The configuration of the first timing control circuit 350-1 is similar to the configuration of the timing control circuit 350 shown in FIG. 28, and therefore the illustration and description thereof are omitted. The first timing signal TM-1 corresponds to the timing signal TM in FIG. 28.

[0177] The latch circuit 320 latches the count value CT2'-1 output from the first low-pass filter 310 in synchronization with the rising edge of the reference signal CLK, and holds it as a count value CT3-1.

[0178] The second timing control circuit 350-2 receives the count value CT2, which is an output signal of the first low-pass filter 310. The second timing control circuit 350-2 generates a second timing signal TM-2 (not shown) by delaying the measured signal SIN based on the count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting the count value CT2, which is an input signal, as the count value CT2'-2 in synchronization with the second timing signal TM-2. The configuration of the second timing control circuit 350-2 is similar to the configuration of the timing control circuit 350 shown in FIG. 28, and therefore the illustration and description thereof will be omitted. The second timing signal TM-2 corresponds to the timing signal TM in FIG. 28.

[0179] The latch circuit 321 latches the count value CT2'-2 output from the third low-pass filter 360 in synchronization with the rising edge of the reference signal CLK, and holds it as a count value CT3-2.

[0180] Operations of the multiplier 371, the multiplier 372, the adder 373, and the second low-pass filter 330 is the same as in FIG. 31, so its explanation will be omitted.

[0181] Here, the timing at which the count value CT2'-1 is output from the first timing control circuit 350-1 and the timing at which the count value CT2'-2 is output from the second timing control circuit 350-2 are appropriately controlled so that the polarity of the first vibration rectification error included in the fifth signal output from the second low-pass filter 330 when the count value output from the multiplier 371, which is the first signal, is input to the second low-pass filter 330 is different from the polarity of the second vibration rectification error included in the sixth signal output from the second low-pass filter 330 when the count value output from the multiplier 372, which is the second signal, is input to the second low-pass filter 330. Therefore, the first vibration rectification error and the second vibration rectification error cancel each other out by the addition of the first signal and the second signal in the adder 373, and the vibration rectification error included in the count value CNT, which is the fourth signal, is reduced. That is, the frequency ratio measurement circuit 202 having the configuration of FIG. 32 improves the correction resolution of the vibration rectification error.

[0182] 31 and 32, the frequency delta-sigma modulation circuit 300 is an example of a "first frequency delta-sigma modulation circuit", the first timing control circuit 350-1 is an example of a "first timing control circuit", and the second timing control circuit 350-2 is an example of a "second timing control circuit". Furthermore, the first timing signal TM-1 is an example of a "first timing signal", and the second timing signal TM-2 is an example of a "second timing signal". Furthermore, the first low-pass filter 310 is an example of a "first filter", and the second low-pass filter 330 is an example of a "second filter".

[0183] For example, in the manufacturing process of the sensor module 1, the inspection device acquires the vibration rectification error of the measurement value while sequentially changing the initial value of the count value OADDR in the first timing control circuit 350-1 and the initial value of the count value OADDR in the second timing control circuit 350-2 while keeping them at the same value, and obtains the relationship between the initial value of the count value OADDR and the vibration rectification error. Then, based on the relationship between the initial value of the count value OADDR and the vibration rectification error, the inspection device calculates the initial value of the count value OADDR in the first timing control circuit 350-1 and the initial value of the count value OADDR in the second timing control circuit 350-2 at which the vibration rectification error of the measurement value is reduced, and writes these calculated initial values ​​of the count value OADDR into the non-volatile memory of the storage unit 220 via the interface circuit 230. In this way, the initial value of the count value OADDR in the first timing control circuit 350-1 and the initial value of the count value OADDR in the second timing control circuit 350-2 are stored in the storage unit 220 of the vibration rectification error correction device 2 before the sensor module 1 starts measurement. The initial values ​​of these count values ​​OADDR stored in the memory unit 220 are read out by the micro control unit 210 and set in the counter 355 of the first timing control circuit 350-1 and the counter 355 of the second timing control circuit 350-2, respectively.

[0184] FIG. 33 is a flow chart showing an example of the procedure of a vibration rectification error correction method by the vibration rectification error correction device 2 including the frequency ratio measuring circuit 202 having the configuration of FIG.

[0185] As shown in FIG. 33, first, in step S110, the vibration rectification error correction device 2 uses the signal under test SIN to frequency delta-sigma modulate the reference signal CLK to generate a frequency delta-sigma modulated signal.

[0186] Next, in step S120, the vibration rectification error correction device 2 generates a first timing signal TM-1 by delaying the measured signal SIN based on the count value CT0 of the number of pulses of the reference signal CLK, and synchronizes with the first timing signal TM-1 to generate the frequency It controls the timing of outputting the count value CT1'-1, which is a signal based on the count value CT1, which is a delta-sigma modulated signal.

[0187] Next, in step S130, the vibration rectification error correction device 2 performs a first filter process in synchronization with the first timing signal TM-1 on the count value CT1'-1, which is a signal based on the timing-controlled signal output in step S120.

[0188] Next, in step S140, the vibration rectification error correction device 2 generates a second timing signal TM-2 by delaying the measured signal SIN based on the count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting the count value CT1'-2, which is a signal based on the count value CT1, which is the frequency delta-sigma modulated signal generated in step S110, in synchronization with the second timing signal TM-2.

[0189] Next, in step S150, the vibration rectification error correction device 2 performs a third filter process on the count value CT1'-2, which is a signal based on the timing-controlled signal output in step S140, in synchronization with the second timing signal TM-2.

[0190] Next, in step S160, the vibration rectification error correction device 2 generates a count value CT4, which is a third signal based on a first signal based on the count value CT2-1, which is a signal obtained by the first filter processing in step S130, and a second signal based on the count value CT2-2, which is a signal obtained by the third filter processing in step S150.

[0191] Next, in step S170, the vibration rectification error correction device 2 performs a second filter process on the count value CT4, which is the third signal generated in step S160, in synchronization with the reference signal CLK to generate a count value CNT, which is a fourth signal.

[0192] In step S180, the vibration rectification error correction device 2 repeats steps S110, S120, S130, S140, S150, S160, and S170 until the measurement is completed.

[0193] FIG. 34 is a flow chart showing an example of the procedure of a vibration rectification error correction method by the vibration rectification error correction device 2 including the frequency ratio measuring circuit 202 having the configuration of FIG.

[0194] As shown in FIG. 34, first, in step S111, the vibration rectification error correction device 2 performs frequency delta-sigma modulation on the reference signal CLK using the signal under test SIN to generate a frequency delta-sigma modulated signal.

[0195] Next, in step S121, the vibration rectification error correction device 2 performs a first filter process on the count value CT1, which is a signal based on the frequency delta-sigma modulated signal generated in step S111, in synchronization with the signal SIN to be measured.

[0196] Next, in step S131, the vibration rectification error correction device 2 generates a first timing signal TM-1 by delaying the measured signal SIN based on a count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting a count value CT2'-1, which is a signal based on the count value CT2, which is a signal obtained by the first filter processing in step S121, in synchronization with the first timing signal TM-1.

[0197] Next, in step S141, the vibration rectification error correction device 2 generates a second timing signal TM-2 by delaying the measured signal SIN based on the count value CT0 of the number of pulses of the reference signal CLK, and generates a count value CT Controls the timing of outputting 2'-2.

[0198] Next, in step S151, the vibration rectification error correction device 2 generates a count value CT4, which is a third signal based on a first signal based on the count value CT2'-1, which is a signal whose timing is controlled to be output in synchronization with the first timing signal TM-1 in step S131, and a second signal based on the count value CT2'-2, which is a signal whose timing is controlled to be output in synchronization with the second timing signal TM-2 in step S141.

[0199] Next, in step S161, the vibration rectification error correction device 2 performs a second filter process on the count value CT4, which is the third signal generated in step S151, in synchronization with the reference signal CLK to generate a count value CNT, which is a fourth signal.

[0200] In step S171, the vibration rectification error correction device 2 repeats steps S111, S121, S131, S141, S151, and S161 until the measurement is completed.

[0201] The sensor module 1 of the second embodiment described above provides the same effects as the sensor module 1 of the first embodiment.

[0202] In addition, in the sensor module 1 of the second embodiment, nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the fifth and sixth signals in the vibration rectification error correction device 2. Then, by making the delay amount of the first timing signal TM-1 and the delay amount of the second timing signal TM-2 different, the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the fifth signal differs from the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the sixth signal. Therefore, according to the sensor module 1 of the second embodiment, in the vibration rectification error correction device 2, by using the first signal and the second signal in which the delay amount of the first timing signal TM-1 and the delay amount of the second timing signal TM-2 are set to appropriate values ​​so that the polarity of the first vibration rectification error included in the fifth signal and the second vibration rectification error included in the sixth signal are different, the correction resolution of the vibration rectification error is improved, and the vibration rectification error included in the fourth signal can be effectively reduced. As a result, the vibration rectification error of the measured value can be effectively reduced, and the measurement accuracy of the physical quantity is improved.

[0203] 3. Third embodiment Hereinafter, for the sensor module of the third embodiment, components similar to those of the first or second embodiment are given the same symbols, explanations that overlap with the first or second embodiment are omitted or simplified, and mainly the differences from the first and second embodiments are described.

[0204] Fig. 35 is a diagram showing an example of the configuration of a frequency ratio measuring circuit 202 included in the sensor module 1 of the third embodiment. In Fig. 35, the same components as those in Fig. 22 are denoted by the same reference numerals.

[0205] In the example of FIG. 35, the frequency ratio measurement circuit 202 includes a frequency delta-sigma modulation circuit 300, a first low-pass filter 310, a latch circuit 320, a second low-pass filter 330, a timing control circuit 350, a delay element 374, a delay element 375, and an adder 376.

[0206] The operations of the frequency delta-sigma modulation circuit 300, the timing control circuit 350, the first low-pass filter 310, the latch circuit 320, and the second low-pass filter 330 are the same as those in FIG. 22, and therefore will not be described.

[0207] The delay element 374 delays the output of the second low-pass filter 330 in synchronization with the reference signal CLK. The delay element 374 outputs a count value obtained by multiplying the count value CT4, which is a signal, by a and delaying it. The number of taps of the delay element 374 is na, where a is a positive real number. For example, the delay element 374 is realized by a multiplier and a shift register in which na registers are connected in series. The count value output from the delay element 374 is a first signal having a first group delay amount based on the output signal of the second filter.

[0208] The delay element 375 outputs a count value obtained by multiplying the count value CT4, which is the output signal of the second low-pass filter 330, by b and delaying it in synchronization with the reference signal CLK. b is a positive real number. The number of taps of the delay element 375 is nb. For example, the delay element 375 is realized by a multiplier and a shift register in which nb registers are connected in series. The count value output from the delay element 375 is a first signal having a second group delay amount different from the first group delay amount based on the output signal of the second filter.

[0209] The adder 376 outputs a count value obtained by adding the count value output from the delay element 374, which is the first signal, and the count value output from the delay element 375, which is the second signal. The count value CT4 output from the adder 373 is a third signal based on the first signal and the second signal. The count value output from the adder 373 is output to the micro control unit 210 as the count value CNT.

[0210] Here, the first group delay amount and the second group delay amount are set to appropriate values ​​so that the first vibration rectification error included in the count value output from the delay element 374, which is the first signal, and the second vibration rectification error included in the count value output from the delay element 375, which is the second signal, have different polarities. Therefore, by adding the first signal and the second signal in the adder 376, the first vibration rectification error and the second vibration rectification error cancel each other out, and the vibration rectification error included in the count value CNT, which is the third signal, is reduced. That is, the frequency ratio measurement circuit 202 having the configuration of FIG. 35 improves the correction resolution of the vibration rectification error.

[0211] In FIG. 35, in the frequency ratio measurement circuit 202, the first low-pass filter 310 is provided immediately after the timing control circuit 350, but the first low-pass filter 310 and the timing control circuit 350 only need to be provided on the signal path from the output of the frequency delta-sigma modulation circuit 300 to the input of the second low-pass filter 330.

[0212] For example, as shown in Fig. 36, in the frequency ratio measurement circuit 202, a timing control circuit 350 may be provided immediately after the first low-pass filter 310. In the example of Fig. 36, the operations of the frequency delta-sigma modulation circuit 300, the first low-pass filter 310, the timing control circuit 350, the latch circuit 320, and the second low-pass filter 330 are the same as those in Fig. 27, and therefore their description will be omitted. In addition, the operations of the delay element 374, the delay element 375, and the adder 376 are the same as those in Fig. 35, and therefore their description will be omitted.

[0213] 35 and 36, the frequency delta-sigma modulation circuit 300 is an example of a "first frequency delta-sigma modulation circuit," and the timing control circuit 350 is an example of a "first timing control circuit." Furthermore, the timing signal TM is an example of a "first timing signal." Furthermore, the first low-pass filter 310 is an example of a "first filter," and the second low-pass filter 330 is an example of a "second filter."

[0214] For example, in the manufacturing process of the sensor module 1, the inspection device acquires the vibration rectification error of the measurement value while sequentially changing the initial value of the count value OADDR via the interface circuit 230, and obtains the relationship between the initial value of the count value OADDR and the vibration rectification error. Then, based on the relationship between the initial value of the count value OADDR and the vibration rectification error, the inspection device calculates the initial value of the count value OADDR at which the vibration rectification error of the measurement value is reduced. In a state where the initial value of the count value OADDR is set to the calculated value, the inspection device sets the initial value of the count value OADDR to the calculated value via the interface circuit 230, and acquires the vibration rectification error of the measurement value while sequentially changing the tap numbers na and nb while keeping them the same, and obtains the relationship between the tap numbers and the vibration rectification error. Then, the inspection device calculates the tap numbers na and nb and the real numbers a and b that reduce the vibration rectification error of the measurement value based on the relationship between the tap numbers and the vibration rectification error. The inspection device writes the calculated initial value of the count value OADDR, the tap numbers na and nb, and the real numbers a and b to the non-volatile memory of the storage unit 220 via the interface circuit 230. In this way, the initial value of the count value OADDR, the tap numbers na and nb, and the real numbers a and b are stored in the storage unit 220 of the vibration rectification error correction device 2 before the sensor module 1 starts measurement. The initial value of the count value OADDR stored in the storage unit 220 is read by the micro control unit 210 and set in the counter 355 of the timing control circuit 350. Furthermore, the tap numbers na and nb and the real numbers a and b stored in the storage section 220 are read out by the micro control unit 210 and set in the delay elements 374 and 375 .

[0215] FIG. 37 is a flow chart showing an example of the procedure of a vibration rectification error correction method by the vibration rectification error correction device 2 including the frequency ratio measuring circuit 202 having the configuration of FIG.

[0216] As shown in FIG. 37, first, in step S210, the vibration rectification error correction device 2 uses the signal under test SIN to frequency delta-sigma modulate the reference signal CLK to generate a frequency delta-sigma modulated signal.

[0217] Next, in step S220, the vibration rectification error correction device 2 generates a timing signal TM by delaying the measured signal SIN based on a count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting a count value CT1', which is a signal based on the count value CT1, which is the frequency delta-sigma modulated signal generated in step S210, in synchronization with the timing signal TM.

[0218] Next, in step S230, the vibration rectification error correction device 2 performs a first filter process in synchronization with the timing signal TM on the count value CT1' which is a signal based on the timing-controlled signal output in step S220.

[0219] Next, in step S240, the vibration rectification error correction device 2 performs a second filter process on the count value CT3, which is a signal based on the count value CT2, which is a signal obtained by the first filter process in step S230, in synchronization with the reference signal CLK.

[0220] Next, in step S250, the vibration rectification error correction device 2 generates a count value CNT which is a third signal based on a first signal having a first group delay amount based on the count value CT4 which is a signal obtained by the second filter processing in step S240, and a second signal having a second group delay amount different from the first group delay amount based on the count value CT4 which is a signal obtained by the second filter processing in step S240.

[0221] In step S260, the vibration rectification error correction device 2 repeats steps S210, S220, S230, S240, and S250 until the measurement is completed.

[0222] FIG. 38 is a flow chart showing an example of the procedure of a vibration rectification error correction method by the vibration rectification error correction device 2 including the frequency ratio measuring circuit 202 having the configuration of FIG.

[0223] As shown in FIG. 38, first, in step S211, the vibration rectification error correction device 2 uses the measured signal SIN to perform frequency delta-sigma modulation on the reference signal CLK to obtain a frequency delta-sigma A modulated signal is generated.

[0224] Next, in step S221, the vibration rectification error correction device 2 performs a first filter process on the count value CT1, which is a signal based on the frequency delta-sigma modulated signal generated in step S211, in synchronization with the signal SIN to be measured.

[0225] Next, in step S231, the vibration rectification error correction device 2 generates a timing signal TM by delaying the measured signal SIN based on a count value CT0 of the number of pulses of the reference signal CLK, and controls the timing of outputting a count value CT2', which is a signal based on the count value CT2, which is a signal obtained by the first filter processing in step S221, in synchronization with the timing signal TM.

[0226] Next, in step S241, the vibration rectification error correction device 2 performs a second filter process on the count value CT3, which is a signal based on the count value CT2', which is a timing-controlled signal output in synchronization with the timing signal TM in step S231, in synchronization with the reference signal CLK.

[0227] Next, in step S251, the vibration rectification error correction device 2 generates a count value CNT which is a third signal based on a first signal having a first group delay amount based on the count value CT4 which is a signal obtained by the second filter processing in step S241, and a second signal having a second group delay amount different from the first group delay amount based on the count value CT4 which is a signal obtained by the second filter processing in step S241.

[0228] In step S261, the vibration rectification error correction device 2 repeats steps S211, S221, S231, S241, and S251 until the measurement is completed.

[0229] According to the sensor module 1 of the third embodiment described above, the same effects as those of the sensor module 1 of the first embodiment are achieved.

[0230] In addition, in the sensor module 1 of the third embodiment, nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the first and second signals in the vibration rectification error correction device 2. Since the first group delay amount of the first signal and the second group delay amount of the second signal are different, the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the first signal differs from the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the second signal. Therefore, according to the sensor module 1 of the third embodiment, the vibration rectification error correction device 2 uses the first signal and the second signal in which the first group delay amount and the second group delay amount are set to appropriate values ​​so that the polarity of the first vibration rectification error included in the first signal and the second vibration rectification error included in the second signal are different, thereby improving the correction resolution of the vibration rectification error, and effectively reducing the vibration rectification error included in the count value CNT, which is the third signal. As a result, the vibration rectification error of the measured value can be effectively reduced, and the measurement accuracy of the physical quantity is improved.

[0231] 4. Fourth embodiment Hereinafter, for the sensor module of the fourth embodiment, components similar to those of the first, second or third embodiment are given the same symbols, explanations that overlap with the first, second or third embodiment are omitted or simplified, and mainly the differences from the first, second and third embodiments will be described.

[0232] Since the sensitivity of the physical quantity sensor 200 is strongly correlated with the cantilever resonance frequency, it is possible to check for abnormalities in the sensitivity of the physical quantity sensor 200 by measuring the cantilever resonance frequency. For example, if the weight fixed to the cantilever is missing for some reason, the mass of the cantilever decreases, and the cantilever resonance frequency shifts to a higher frequency. At the same time, the sensitivity of the physical quantity sensor 200 decreases, which appears as an abnormality in the sensitivity of the physical quantity sensor 200. In addition, if the cantilever is damaged by a strong impact or the like, this also appears as an abnormality in the sensitivity of the physical quantity sensor 200, and the cantilever resonance frequency also shifts. Therefore, identifying the cantilever resonance frequency is one method for determining whether the sensitivity of the physical quantity sensor 200 is within the specifications. Generally, FFT can be used to identify the resonance frequency, but since the cantilever resonance frequency is a frequency higher than the signal band of the measurement target and the resonance frequency component is attenuated by the first low-pass filter 310 and the second low-pass filter 330, some kind of ingenuity is required to identify the resonance frequency with high accuracy. As described with reference to FIG. 21, the vibration rectification error changes in a constant cycle with respect to the change in the timing at which the count value is output from the timing control circuit 350. This period is determined by the cantilever resonance frequency and the frequency of the physical quantity detection element 40, and the fluctuation period of the vibration rectification error also changes when the cantilever resonance frequency or the frequency of the physical quantity detection element 40 changes. Therefore, by measuring the period of change in the vibration rectification error relative to a change in the output timing of the count value from the timing control circuit 350, it is possible to obtain an index for determining whether the sensitivity of the physical quantity sensor 200 is within the specifications.

[0233] The structure and functional configuration of the sensor module 1 of the fourth embodiment are similar to those of the first, second or third embodiment, and therefore illustration and description thereof will be omitted.

[0234] In the sensor module 1 of the fourth embodiment, the vibration rectification error correction device 2 has a normal operation mode for measuring the frequency ratio between the above-mentioned measured signal SIN and the reference signal CLK, and an inspection mode for checking the sensitivity of the physical quantity sensor 200. The microcontrol unit 210 receives a predetermined command from the processing device 3 via the interface circuit 230, so that the vibration rectification error correction device 2 is set to the normal operation mode or the inspection mode. For example, in the manufacturing process of the sensor module 1, the inspection device may set the vibration rectification error correction device 2 to the inspection mode, and the vibration rectification error correction device 2 may check the sensitivity of the physical quantity sensor 200. The inspection device may select the sensor module 1 as a non-defective product based on the result of the sensitivity check. Alternatively, after the sensor module 1 is installed and before it is operated, the processing device 3 sets the vibration rectification error correction device 2 to the inspection mode, and the vibration rectification error correction device 2 checks the sensitivity of the physical quantity sensor 200. If there is no abnormality in the sensitivity of the physical quantity sensor 200 based on the result of the sensitivity check, the processing device 3 sets the vibration rectification error correction device 2 to a normal operation mode and operates the sensor module 1. In the normal operation mode, as in the first, second or third embodiment, a measurement value in which the vibration rectification error is corrected is obtained. In addition, the processing device 3 may periodically set the vibration rectification error correction device 2 to an inspection mode, so that the vibration rectification error correction device 2 performs a sensitivity check. Note that the normal operation mode is an example of a "first operation mode", and the inspection mode is an example of a "second operation mode".

[0235] In the inspection mode, the physical quantity sensor 200 is operated in a stable vibration environment, and the micro control unit 210 functions as a control circuit and acquires the output timing dependency of the vibration rectification error based on the output signal of the physical quantity sensor 200 while changing the output timing of the count value from the timing control circuit 350. To achieve this, the micro control unit 210 first sets the cutoff frequency of the second low-pass filter 330 lower than that in the normal operation mode. Specifically, the micro control unit 210 sets the cutoff frequency of the second low-pass filter 330 to, for example, several Hz so that the vibration rectification error included in the output value of the second low-pass filter 330 is emphasized. For example, the micro control unit 210 may lower the cutoff frequency by increasing the number of taps of the second low-pass filter 330 compared to that in the normal operation mode.

[0236] Furthermore, the micro control unit 210 acquires the vibration rectification error of the measurement value while sequentially changing the initial value of the count value OADDR for the timing control circuit 350 having the configuration shown in Figure 23 or Figure 28, and stores the initial value of the count value OADDR and the vibration rectification error in correspondence with each other in the memory unit 220.

[0237] The processing device 3 reads out correspondence information between the initial value of the count value OADDR and the vibration rectification error from the storage unit 220 via the interface circuit 230, and calculates the period in which the vibration rectification error changes from a graph plotting the relationship between the initial value of the count value OADDR and the vibration rectification error, similar to the graph plotting the relationship between the number of taps and the vibration rectification error as shown in Fig. 17. Since this period is determined by the cantilever resonance frequency and the frequency of the physical quantity detection element 40, the processing device 3 can back-calculate the cantilever resonance frequency. Based on the calculated cantilever resonance frequency, the processing device 3 can determine whether the sensitivity of the physical quantity sensor 200 is within the specifications.

[0238] Alternatively, the micro control unit 210 may read out correspondence information between the initial value of the count value OADDR and the vibration rectification error from the memory unit 220, calculate the cantilever resonance frequency based on a graph plotting the relationship between the initial value of the count value OADDR and the vibration rectification error, and determine whether the sensitivity of the physical quantity sensor 200 is within the specifications.

[0239] FIG. 39 is a flowchart showing an example of the procedure of the vibration rectification error correcting method by the vibration rectification error correcting device 2 of the fourth embodiment.

[0240] As shown in Fig. 39, first, when the normal operation mode is set in step S310, the vibration rectification error correction device 2 measures the frequency ratio between the measured signal SIN and the reference signal CLK in step S320. Specifically, the vibration rectification error correction device 2 having the frequency ratio measurement circuit 202 of the configuration of Fig. 22 performs steps S10, S20, S30, and S40 of Fig. 29. Also, the vibration rectification error correction device 2 having the frequency ratio measurement circuit 202 of the configuration of Fig. 27 performs steps S11, S21, S31, and S41 of Fig. 30. Also, the vibration rectification error correction device 2 having the frequency ratio measurement circuit 202 of the configuration of Fig. 31 performs steps S110, S120, S130, S140, S150, S160, and S170 of Fig. 33. Moreover, the vibration rectification error correction device 2 having the frequency ratio measurement circuit 202 having the configuration of Fig. 32 performs steps S111, S121, S131, S141, S151, and S161 of Fig. 34. Moreover, the vibration rectification error correction device 2 having the frequency ratio measurement circuit 202 having the configuration of Fig. 35 performs steps S210, S220, S230, S240, and S250 of Fig. 37. Moreover, the vibration rectification error correction device 2 having the frequency ratio measurement circuit 202 having the configuration of Fig. 36 performs steps S211, S221, S231, S241, and S251 of Fig. 38.

[0241] In step S330, the vibration rectification error correction device 2 repeats step S320 until the measurement is completed.

[0242] If the normal operation mode is not set in step S310 and the inspection mode is set in step S340, the vibration rectification error correction device 2 sets the cutoff frequency of the second low-pass filter 330 lower in step S350 than in the normal operation mode.

[0243] Next, in step S360, the vibration rectification error correction device 2 sets the initial value of the count value OADDR to a predetermined value.

[0244] Next, in step S370, the vibration rectification error correction device 2 acquires the count value CNT which is the output value of the frequency ratio measuring circuit 202.

[0245] Next, in step S380, the vibration rectification error correction device 2 determines whether or not all output values ​​of the frequency ratio measuring circuit 202 required for sensitivity determination have been acquired.

[0246] If acquisition of the necessary output values ​​has not been completed, in step S390, the vibration rectification error correction device 2 changes the initial value of the count value OADDR.

[0247] Then, when acquisition of the necessary output values ​​is completed, in step S400, the processing device 3 or the vibration rectification error correction device 2 calculates the period of change in the vibration rectification error using the output value of the frequency ratio measuring circuit 202 acquired in step S370.

[0248] Next, in step S410, the processing device 3 or the vibration rectification error correction device 2 calculates the cantilever resonance frequency from the period of change in the vibration rectification error.

[0249] Next, in step S420, the processing device 3 or the vibration rectification error correction device 2 determines whether the sensitivity of the physical quantity sensor 200 is within specifications based on the cantilever resonance frequency.

[0250] Then, in step S430, the inspection mode of the vibration rectification error correction device 2 is ended, and steps S310 and after are repeated.

[0251] According to the sensor module 1 of the fourth embodiment described above, similar to the sensor module 1 of the first, second or third embodiment, in the vibration rectification error correction device 2, a measurement value with reduced vibration rectification error is obtained in normal operation mode.

[0252] On the other hand, in the inspection mode, the cutoff frequency of the second low-pass filter 330 is set lower than that in the normal operation mode, so that the vibration rectification error included in the signal output from the second low-pass filter 330 is emphasized. Therefore, according to the sensor module 1 of the third embodiment, in the inspection mode, the vibration rectification error correction device 2 obtains information indicating the relationship between the delay amount of the timing signal TM and the vibration rectification error, or information indicating the relationship between the delay amount of the first timing signal TM-1 and the delay amount of the second timing signal TM-2 and the vibration rectification error. By using this information, the vibration rectification error correction device 2, the inspection device, or the processing device 3 can calculate the cantilever resonance frequency of the physical quantity sensor 200, and determine whether the sensitivity of the physical quantity sensor 200 is within the specifications based on the cantilever resonance frequency.

[0253] 5. Variations The present invention is not limited to the present embodiment, and various modifications are possible within the scope of the present invention.

[0254] For example, in each of the above embodiments, the sensor module 1 has three physical quantity sensors 200, but the number of physical quantity sensors 200 included in the sensor module 1 may be one, two, or four or more.

[0255] In addition, in each of the above embodiments, the sensor module 1 including an acceleration sensor as the physical quantity sensor 200 has been exemplified, but the sensor module 1 may include sensors such as an angular velocity sensor, a pressure sensor, an optical sensor, etc. as the physical quantity sensor 200. The sensor module 1 may include two or more types of physical quantity sensors among various physical quantity sensors such as an acceleration sensor, an angular velocity sensor, a pressure sensor, an optical sensor, etc.

[0256] In each of the above-described embodiments, the physical quantity detection element 40 of the physical quantity sensor 200 is Although an element made of quartz crystal has been given as an example, the physical quantity detection element 40 may be made of a piezoelectric element other than quartz crystal, or may be a capacitance type MEMS element. MEMS is an abbreviation for Micro Electro Mechanical Systems.

[0257] In addition, in each of the above embodiments, the first low-pass filter 310 is given as an example of the first filter, the second low-pass filter 330 is given as an example of the second filter, and the third low-pass filter 360 is given as an example of the third filter, but the first filter, the second filter, and the third filter may be a high-pass filter, a band-pass filter, or a smoothing filter. Similarly, the first filter process, the second filter process, and the third filter process may be a high-pass filter process, a band-pass filter process, or a smoothing filter process other than a low-pass filter process.

[0258] The present invention is not limited to the present embodiment, and various modifications are possible within the scope of the present invention.

[0259] The above-described embodiment and modifications are merely examples, and the present invention is not limited to these. For example, the embodiments and modifications can be appropriately combined.

[0260] The present invention includes configurations that are substantially the same as the configurations described in the embodiments, for example, configurations with the same functions, methods, and results, or configurations with the same purpose and effects. The present invention also includes configurations in which non-essential parts of the configurations described in the embodiments are replaced. The present invention also includes configurations that achieve the same effects as the configurations described in the embodiments, or configurations that can achieve the same purpose. The present invention also includes configurations in which publicly known technology is added to the configurations described in the embodiments.

[0261] The following can be derived from the above-described embodiment and modifications.

[0262] One aspect of the vibration rectification error correction device is a reference signal generating circuit that outputs a reference signal; a first frequency delta-sigma modulation circuit that uses a first signal under test to frequency delta-sigma modulate the reference signal to generate a first frequency delta-sigma modulated signal; A first filter; a second filter that operates in synchronization with the reference signal; a first timing control circuit that generates a first timing signal by delaying the first signal under measurement based on a count value of the number of pulses of the reference signal, and controls a timing for outputting an input signal in synchronization with the first timing signal; The first filter and the first timing control circuit are provided on a signal path from an output of the first frequency delta-sigma modulation circuit to an input of the second filter.

[0263] In this vibration rectification error correction device, the frequency delta-sigma modulation circuit frequency delta-sigma modulates the reference signal using the first signal under measurement, and the second filter operates in synchronization with a reference signal different from the first signal under measurement, so that nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the output signal of the second filter. The vibration rectification error caused by this nonlinearity changes according to the delay amount of the first timing signal. Therefore, by setting the delay amount of the first timing signal to an appropriate value, the vibration rectification error caused by this nonlinearity and the vibration rectification error caused by the asymmetry of the first signal under measurement cancel each other out, and the vibration rectification error contained in the output signal of the second filter is reduced. In addition, in order to correct the vibration rectification error, the delay amount of the signal based on the frequency delta-sigma modulated signal is not controlled, but the timing of outputting the signal based on the frequency delta-sigma modulated signal is controlled. The amount of group delay in the signal path through which the signal under test propagates to the output of the second filter is constant. Therefore, this vibration rectification error correction device can correct the vibration rectification error while keeping the amount of group delay fixed.

[0264] One aspect of the vibration rectification error correction device is as follows: The timing controller may further include a storage unit that stores information for controlling the amount of delay of the first timing signal.

[0265] According to this vibration rectification error correction device, it is possible to correct the vibration rectification error without receiving information on the delay amount of the first timing signal from an external device.

[0266] In one aspect of the vibration rectification error correction device, the first timing control circuit receives the first frequency delta-sigma modulated signal; The first filter may receive an output signal from the first timing control circuit and operate in synchronization with the first timing signal.

[0267] One aspect of the vibration rectification error correction device is as follows: a second timing control circuit which receives the first frequency delta-sigma modulated signal, generates a second timing signal by delaying the first signal under measurement based on a count value of the number of pulses of the reference signal, and controls a timing for outputting the input signal in synchronization with the second timing signal; a third filter to which an output signal of the second timing control circuit is input and which operates in synchronization with the first timing signal; the second filter receives a first signal based on the output signal of the first filter and a third signal based on the output signal of the third filter, and outputs a fourth signal; A first vibration rectification error contained in a fifth signal output from the second filter when the first signal is input to the second filter and a second vibration rectification error contained in a sixth signal output from the second filter when the second signal is input to the second filter may have different polarities.

[0268] In this vibration rectification error correction device, nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the fifth and sixth signals. By making the delay amount of the first timing signal different from the delay amount of the second timing signal, the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the fifth signal differs from the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the sixth signal. Therefore, according to this vibration rectification error correction device, by using the first signal and the second signal in which the delay amount of the first timing signal and the delay amount of the second timing signal are set to appropriate values ​​so that the polarity of the first vibration rectification error included in the fifth signal and the second vibration rectification error included in the sixth signal are different, the correction resolution of the vibration rectification error is improved, and the vibration rectification error included in the fourth signal can be effectively reduced.

[0269] In one aspect of the vibration rectification error correction device, the first filter receives the first frequency delta-sigma modulated signal and operates in synchronization with the first signal under test; The first timing control circuit may receive an output signal of the first filter.

[0270] One aspect of the vibration rectification error correction device is as follows: A second signal under test that is a delayed signal based on a count value of the number of pulses of the reference signal a second timing control circuit that generates a second timing signal and controls a timing of outputting an input signal in synchronization with the second timing signal; an output signal of the first filter is input to the second timing control circuit; the second filter receives a first signal based on the output signal of the first timing control circuit, a second signal based on the output signal of the second timing control circuit, and a third signal based on the second signal, and outputs a fourth signal; A first vibration rectification error contained in a fifth signal output from the second filter when the first signal is input to the second filter and a second vibration rectification error contained in a sixth signal output from the second filter when the second signal is input to the second filter may have different polarities.

[0271] In this vibration rectification error correction device, nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the fifth and sixth signals. By making the delay amount of the first timing signal different from the delay amount of the second timing signal, the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the fifth signal differs from the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the sixth signal. Therefore, according to this vibration rectification error correction device, by using the first signal and the second signal in which the delay amount of the first timing signal and the delay amount of the second timing signal are set to appropriate values ​​so that the polarity of the first vibration rectification error included in the fifth signal and the second vibration rectification error included in the sixth signal are different, the correction resolution of the vibration rectification error is improved, and the vibration rectification error included in the fourth signal can be effectively reduced.

[0272] In one aspect of the vibration rectification error correction device, generating a third signal based on a first signal having a first group delay based on an output signal of the second filter and a second signal having a second group delay based on the second filter, the second group delay being different from the first group delay; A first vibration rectification error included in the first signal and a second vibration rectification error included in the second signal may have opposite polarities.

[0273] In this vibration rectification error correction device, nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the first signal based on the output signal of the second filter and the second signal based on the output signal of the second filter. Since the first group delay amount of the first signal and the second group delay amount of the second signal are different, the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the first signal differs from the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the second signal. Therefore, according to this vibration rectification error correction device, the correction resolution of the vibration rectification error is improved by using the first signal and the second signal in which the first group delay amount and the second group delay amount are set to appropriate values ​​so that the polarity of the first vibration rectification error contained in the first signal and the second vibration rectification error contained in the second signal are different, and therefore the vibration rectification error contained in the third signal can be effectively reduced.

[0274] One aspect of the vibration rectification error correction device is as follows: The frequency ratio measuring device may have a first operation mode in which a frequency ratio between the first signal under test and the reference signal is measured, and a second operation mode in which a cutoff frequency of the second filter is lower than that in the first operation mode.

[0275] In this vibration rectification error correction device, in the first operation mode, the effect of reducing the vibration rectification error contained in the output signal of the second filter is obtained. On the other hand, in the second operation mode, since the cutoff frequency of the second filter is lower than that in the first operation mode, the vibration rectification error contained in the output signal of the second filter is emphasized. Therefore, according to this vibration rectification error correction device, in the second operation mode, the delay amount of the first timing signal is changed while the output signal of the second filter is obtained, thereby making it possible to obtain the delay amount of the first timing signal and the vibration rectification error. The vibration rectification error correction device or an external device can use this information to, for example, calculate the frequency of the structural resonance of the sensor that outputs the measured signal, and determine whether the sensitivity of the sensor is within specifications based on the frequency of the structural resonance.

[0276] One aspect of the vibration rectification error correction device is as follows: a second frequency delta-sigma modulation circuit that frequency delta-sigma modulates the reference signal using a second signal under test to generate a second frequency delta-sigma modulated signal; a fourth filter that operates in synchronization with the second signal under test; a fifth filter that operates in synchronization with the reference signal; a third timing control circuit that generates a third timing signal by delaying the second signal under measurement based on a count value of the number of pulses of the reference signal, and controls a timing for outputting an input signal in synchronization with the third timing signal; The fourth filter and the third timing control circuit may be provided on a signal path from an output of the second frequency delta-sigma modulation circuit to an input of the fifth filter.

[0277] In this vibration rectification error correction device, the group delay of the signal path through which the first signal under measurement propagates to the output of the second filter is constant, and the group delay of the signal path through which the second signal under measurement propagates to the output of the fifth filter is also constant. Therefore, the time from when the first signal under measurement is input to when the corresponding signal is output from the second filter is almost the same as the time from when the second signal under measurement is input to when the corresponding signal is output from the fifth filter. Therefore, according to this vibration rectification error correction device, it is possible to correct the vibration rectification error while matching the timing of the measurement of the first signal under measurement and the measurement of the second signal under measurement.

[0278] One aspect of the sensor module is An embodiment of the vibration rectification error correction device; A physical quantity sensor, The first measured signal is a signal based on an output signal of the physical quantity sensor.

[0279] According to this sensor module, by including a vibration rectification error correction device, it is possible to correct vibration rectification errors in measurements based on the output signal of the physical quantity sensor while keeping the group delay amount fixed, thereby improving measurement accuracy.

[0280] Another aspect of the sensor module is An embodiment of the vibration rectification error correction device; A first physical quantity sensor; A second physical quantity sensor, the first measured signal is a signal based on an output signal of the first physical quantity sensor, The second measured signal is a signal based on an output signal of the second physical quantity sensor.

[0281] According to this sensor module, by being equipped with a vibration rectification error correction device, it is possible to correct the vibration rectification error of the measurement value based on the output signal of the first physical quantity sensor and the vibration rectification error of the measurement value based on the output signal of the second physical quantity sensor while keeping the group delay amount fixed, thereby improving the measurement accuracy and the accuracy of synchronous measurement.

[0282] One aspect of a vibration rectification error correction method includes: frequency delta-sigma modulating a reference signal using the signal under test to generate a frequency delta-sigma modulated signal; generating a timing signal by delaying the signal under measurement based on a count value of the number of pulses of the reference signal, and controlling a timing of outputting a signal based on the frequency delta-sigma modulated signal in synchronization with the timing signal; performing a first filtering process on a signal based on the timing-controlled signal in synchronization with the timing signal; and performing a second filtering process on a signal based on the signal obtained by the first filtering process in synchronization with the reference signal.

[0283] In this vibration rectification error correction method, the first filtering is performed in synchronization with a timing signal obtained by delaying the signal under test, and the second filtering is performed in synchronization with a reference signal different from the signal under test, so that nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the output signal of the second filter. The vibration rectification error caused by this nonlinearity changes according to the delay amount of the timing signal. Therefore, by setting the delay amount of the timing signal to an appropriate value, the vibration rectification error caused by this nonlinearity and the vibration rectification error caused by the asymmetry of the signal under test cancel each other out, and the vibration rectification error contained in the output signal of the second filter is reduced. In addition, the delay amount of the signal based on the frequency delta-sigma modulated signal is not controlled so that the vibration rectification error is corrected, but the timing of outputting the signal based on the frequency delta-sigma modulated signal is controlled, so that the group delay amount of the signal path through which the signal under test propagates to the output of the second filter is constant. Therefore, according to this vibration rectification error correction method, the vibration rectification error can be corrected while keeping the group delay amount fixed.

[0284] Another aspect of the vibration rectification error correction method includes: frequency delta-sigma modulating a reference signal using the signal under test to generate a frequency delta-sigma modulated signal; performing a first filtering process on a signal based on the frequency delta-sigma modulated signal in synchronization with the signal under test; generating a timing signal by delaying the signal under measurement based on a count value of the number of pulses of the reference signal, and controlling a timing of outputting a signal based on the signal obtained by the first filtering process in synchronization with the timing signal; and performing a second filtering process on a signal based on the timing-controlled signal in synchronization with the reference signal.

[0285] In this vibration rectification error correction method, the first filter process is performed in synchronization with the signal under test, and the second filter process is performed in synchronization with a reference signal different from the signal under test, so that nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the output signal of the second filter. The vibration rectification error caused by this nonlinearity changes according to the delay amount of the timing signal. Therefore, by setting the delay amount of the timing signal to an appropriate value, the vibration rectification error caused by this nonlinearity and the vibration rectification error caused by the asymmetry of the signal under test cancel each other out, and the vibration rectification error contained in the output signal of the second filter is reduced. In addition, the delay amount of the signal based on the frequency delta-sigma modulated signal is not controlled so that the vibration rectification error is corrected, but the timing of outputting the signal based on the frequency delta-sigma modulated signal is controlled, so that the group delay amount of the signal path through which the signal under test propagates to the output of the second filter is constant. Therefore, according to this vibration rectification error correction method, the vibration rectification error can be corrected while keeping the group delay amount fixed. [Explanation of symbols]

[0286] 1...sensor module, 2...vibration rectification error correction device, 3...processing device, 5...substrate portion, 10...base portion, 12...joint portion, 13...movable portion, 30a, 30b...support portion, 34...package joint portion, 36a, 36b...joint portion, 38a, 38b...extension portion, 40...physical quantity detection element, 50, 52, 54, 56...weight, 62...joint member, 101...container, 102...lid, 103...screw hole, 104...fixing projection, 111...side wall, 112...bottom wall, 115...circuit board, 115f...first surface, 115r...second surface, 116...connector, 121...opening, 122...inner surface, 123...opening surface, 125...second base, 127...first base, 129...projection, 130...fixing member, 133, 134...necked portion, 141...sealing member, 172...screw, 174...female screw, 176...through hole, 200, 200X, 200Y , 200Z...physical quantity sensor, 201X, 201Y, 201Z...oscillation circuit, 202, 202X, 202Y, 202Z...frequency ratio measurement circuit, 203...reference signal generation circuit, 210...microcontrol unit, 220...storage unit, 230...interface circuit, 300...frequency delta-sigma modulation circuit, 301...counter, 302...latch circuit, 303...latch circuit, 304...subtractor, 310...th 1 low-pass filter, 311... delay element, 312... integrator, 313... integrator, 314... decimator, 315... delay element, 316... differentiator, 317... delay element, 318... differentiator, 320... latch circuit, 321... latch circuit, 330... second low-pass filter, 331... integrator, 332... delay element, 333... differentiator, 334... decimator, 340... FIFO register, 350... timing control control circuit, 350-1...first timing control circuit, 350-2...second timing control circuit, 351...latch circuit, 352...counter, 353...dual port RAM, 354...output timing generation circuit, 355...counter, 356...buffer circuit, 360...third low pass filter, 371...multiplier, 372...multiplier, 373...adder, 374...delay element, 375...delay element, 376...adder

Claims

1. a reference signal generating circuit that outputs a reference signal; a first frequency delta-sigma modulation circuit that uses a first signal under test to frequency delta-sigma modulate the reference signal to generate a first frequency delta-sigma modulated signal; A first filter; a second filter that operates in synchronization with the reference signal; a first timing control circuit that generates a first timing signal by delaying the first signal under measurement by a first delay amount based on a count value of the number of pulses of the reference signal, and controls a timing of outputting an input signal in synchronization with the first timing signal; A vibration rectification error correction device, wherein the first filter and the first timing control circuit are provided on a signal path from an output of the first frequency delta-sigma modulation circuit to an input of the second filter.

2. In claim 1, A vibration rectification error correction device comprising a storage unit that stores information for controlling the first delay amount.

3. In claim 1 or 2, the first timing control circuit receives the first frequency delta-sigma modulated signal; The vibration rectification error correction device, wherein the first filter receives an output signal from the first timing control circuit and operates in synchronization with the first timing signal.

4. In claim 3, a second timing control circuit that receives the first frequency delta-sigma modulated signal, generates a second timing signal by delaying the first signal under test by a second delay amount different from the first delay amount based on a count value of the number of pulses of the reference signal, and controls a timing of outputting the input signal in synchronization with the second timing signal; The output signal of the second timing control circuit is input, and is synchronized with the second timing signal. and a third filter operable to detect the presence of the third filter. the second filter receives a first signal based on the output signal of the first filter and a third signal based on the output signal of the third filter, and outputs a fourth signal; a vibration rectification error correction device, wherein the first delay amount and the second delay amount are set so that the polarity of a first vibration rectification error contained in a fifth signal output from the second filter when the first signal is input to the second filter is different from the polarity of a second vibration rectification error contained in a sixth signal output from the second filter when the second signal is input to the second filter.

5. In claim 1 or 2, the first filter receives the first frequency delta-sigma modulated signal and operates in synchronization with the first signal under test; The vibration rectification error correction device, wherein an output signal of the first filter is input to the first timing control circuit.

6. In claim 5, a second timing control circuit that generates a second timing signal by delaying the first signal under measurement by a second delay amount different from the first delay amount based on a count value of the number of pulses of the reference signal, and controls a timing of outputting an input signal in synchronization with the second timing signal; an output signal of the first filter is input to the second timing control circuit; the second filter receives a first signal based on the output signal of the first timing control circuit, a second signal based on the output signal of the second timing control circuit, and a third signal based on the second signal, and outputs a fourth signal; a vibration rectification error correction device, wherein the first delay amount and the second delay amount are set so that the polarity of a first vibration rectification error contained in a fifth signal output from the second filter when the first signal is input to the second filter is different from the polarity of a second vibration rectification error contained in a sixth signal output from the second filter when the second signal is input to the second filter.

7. In claim 3 or 5, generating a third signal based on a first signal having a first group delay based on an output signal of the second filter and a second signal having a second group delay different from the first group delay based on the second filter; A vibration rectification error correction device, wherein a first vibration rectification error contained in the first signal and a second vibration rectification error contained in the second signal have opposite polarities.

8. In any one of claims 1 to 4, a first operation mode for measuring a frequency ratio between the first measured signal and the reference signal, and a second operation mode in which a cutoff frequency of the second filter is lower than that of the first operation mode.

9. In any one of claims 1 to 8, a second frequency delta-sigma modulation circuit that frequency delta-sigma modulates the reference signal using a second signal under test to generate a second frequency delta-sigma modulated signal; a fourth filter that operates in synchronization with the second signal under test; a fifth filter that operates in synchronization with the reference signal; A third timing signal is generated by delaying the second signal under test based on a count value of the number of pulses of the reference signal, and an input signal is synchronized with the third timing signal. and a third timing control circuit for controlling a timing for outputting the A vibration rectification error correction device, wherein the fourth filter and the third timing control circuit are provided on a signal path from an output of the second frequency delta-sigma modulation circuit to an input of the fifth filter.

10. A vibration rectification error correction device according to any one of claims 1 to 8, A physical quantity sensor, The first measured signal is a signal based on an output signal of the physical quantity sensor.

11. A vibration rectification error correction device according to claim 9; A first physical quantity sensor; A second physical quantity sensor, the first measured signal is a signal based on an output signal of the first physical quantity sensor, The second measured signal is a signal based on an output signal of the second physical quantity sensor.

12. frequency delta-sigma modulating a reference signal using the signal under test to generate a frequency delta-sigma modulated signal; generating a timing signal by delaying the signal under measurement based on a count value of the number of pulses of the reference signal, and controlling a timing of outputting a signal based on the frequency delta-sigma modulated signal in synchronization with the timing signal; performing a first filtering process on a signal based on the timing-controlled signal in synchronization with the timing signal; performing a second filtering process on a signal based on the signal obtained by the first filtering process in synchronization with the reference signal.

13. frequency delta-sigma modulating a reference signal using the signal under test to generate a frequency delta-sigma modulated signal; performing a first filtering process on a signal based on the frequency delta-sigma modulated signal in synchronization with the signal under test; generating a timing signal by delaying the signal under measurement based on a count value of the number of pulses of the reference signal, and controlling a timing of outputting a signal based on the signal obtained by the first filtering process in synchronization with the timing signal; and performing a second filtering process on a signal based on the timing-controlled signal in synchronization with the reference signal.

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