Optical spectrum measuring system and optical spectrum measuring method

Abstract

To provide a superior optical spectrum measuring device and an optical spectrum measuring method. [Solution] The optical spectrum measuring device comprises a CCD (Charge Coupled Device) detector including a plurality of photodetectors arranged two-dimensionally, an optical system that splits incident light and irradiates it onto the CCD detector, and a restriction section that restricts the irradiation of light from the optical system onto at least one of a portion of each row and a portion of each column of the plurality of photodetectors.

Description

[Technical field]

[0001] The present invention relates to an optical spectrum measuring device and an optical spectrum measuring method, and more particularly to an optical spectrum measuring device and an optical spectrum measuring method for dispersing target light. [Background technology]

[0002] Non-Patent Document 1 describes an outline of an optical spectrum measuring device, which is an optical instrument that measures the electromagnetic spectrum of light. In recent years, optical spectrum measuring devices for measuring the intensity of each wavelength have been developed.

[0003] Also, an image capturing device using a CCD (Charge Coupled Device) detector as a light receiving means has been developed. For example, Japanese Patent Application Laid-Open No. 2010-266538 (Patent Document 1) discloses the following configuration. That is, the image capturing device includes a CCD image sensor that captures an image, a variable-magnification lens and a lens driver that change the zoom magnification of the image, an operation unit that instructs the change of the zoom magnification, a feature detection unit that detects a feature portion from an image captured by the CCD image sensor, and a CPU that, when the operation unit instructs the change of the zoom magnification, compares the size of the feature portion detected by the feature detection unit with the limit value of the size of the feature portion that the feature detection unit can detect, and controls the variable-magnification lens and the lens driver according to the zoom magnification instructed by the operation unit and the result of the comparison. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2010-266538 A [Patent Document 2] Japanese Patent Application Publication No. 10-145679 [Patent Document 3] JP 2000-324400 A [Patent Document 4] JP 2001-268444 A [Patent Document 5] JP 2001-268446 A [Patent Document 6] JP 2003-298959 A [Non-patent literature]

[0005] [Non-Patent Document 1] "Wikipedia", [online], [searched on January 4, 2017], Internet〈URL:http: / / ja.wikipedia.org / wiki / Spectrometer〉 Summary of the Invention [Problem to be solved by the invention]

[0006] As a light receiving means in an optical spectrum measuring device, for example, a CCD detector as described in Patent Document 1 may be used. In such a configuration, there is a demand for a technique to provide a better device for measuring an optical spectrum.

[0007] The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a superior optical spectrum measuring apparatus and method. [Means for solving the problem]

[0008] (1) In order to solve the above problems, an optical spectrum measuring device according to one aspect of the present invention includes a CCD detector including a plurality of photodetectors arranged in a two-dimensional array, an optical system that disperses incident light and irradiates the dispersed light onto the CCD detector, and a restriction unit that restricts irradiation of light from the optical system onto at least one of a portion of each row and a portion of each column of the plurality of photodetectors.

[0009] With this configuration, for example, by limiting the light irradiation to a general-purpose CCD detector, a CCD detector with a downsized detection area can be realized without developing a new CCD detector, thereby reducing the development cost of the device. Also, since at least one of the number of rows and the number of columns irradiated with light can be reduced, the time required for the acquisition process of the electric charges generated in each light receiving element can be shortened compared to a configuration that does not limit the light irradiation destination. Therefore, a superior optical spectrum measuring device can be provided.

[0010] (2) Preferably, the limiting unit sets a limiting target based on a condition related to spectrum measurement.

[0011] With this configuration, it is possible to set appropriate restriction targets according to the content of the optical spectrum to be measured.

[0012] (3) More preferably, light of each wavelength dispersed by the optical system is irradiated onto the corresponding column, and the number of rows to be subject to the restriction is set based on at least one of the measurement time of one optical spectrum by the CCD detector and the amount of light to be detected by the CCD detector.

[0013] With such a configuration, for example, it is possible to complete the measurement of the optical spectrum within a required measurement time, and to measure the optical spectrum that satisfies a required signal-to-noise (SN) ratio.

[0014] (4) More preferably, light of each wavelength dispersed by the optical system is irradiated onto the corresponding row, and one or more rows other than a plurality of rows respectively corresponding to a plurality of wavelengths of the optical spectrum to be acquired by the optical spectrum measuring device are set as the restriction target.

[0015] With this configuration, the optical spectrum in the required wavelength range can be efficiently measured.

[0016] (5) Preferably, the optical system includes a light collecting section that collects the dispersed light onto the light receiving element group that is not targeted for restriction by the restriction section.

[0017] With this configuration, the intensity of the light irradiated onto the light receiving element group to be used can be increased, thereby improving the signal-to-noise ratio of the optical spectrum.

[0018] (6) Preferably, the CCD detector includes a plurality of column shift registers, each of which is provided for one of the columns, each of which has a plurality of column charge storage elements corresponding to a respective one of the light-receiving elements belonging to the column, and a row shift register, each of which has a plurality of row charge storage elements corresponding to the respective one of the column shift registers, and the column shift register transfers accumulated charge in its own column charge storage element corresponding to the light-receiving element belonging to the row to its own column charge storage element corresponding to the light-receiving element belonging to the other row, or to the corresponding row charge storage element in the row shift register.

[0019] In this manner, by consolidating the charges generated in the light receiving elements irradiated with light for each column, it is possible to efficiently obtain a desired amount of charge for each wavelength.

[0020] (7) Preferably, the restriction section restricts irradiation of light from the optical system to some of the rows and some of the columns.

[0021] With this configuration, it is possible to reduce both the number of rows and the number of columns onto which light is irradiated, and therefore the time required for the process of acquiring the electric charge generated in each light receiving element can be further shortened.

[0022] (8) In order to solve the above-mentioned problems, a method for measuring an optical spectrum according to one aspect of the present invention is a method for measuring an optical spectrum in an optical spectrum measuring device having a CCD detector including a plurality of light receiving elements arranged in a two-dimensional array, the method including the steps of: dispersing incident light and irradiating it onto the CCD detector; and acquiring charges generated in the plurality of light receiving elements by the incident light irradiated onto the CCD detector, wherein in the step of irradiating light onto the CCD detector, irradiation of the dispersed incident light onto at least one of a portion of rows and a portion of columns of each row of the plurality of light receiving elements is limited.

[0023] By using this method, for example, by limiting the light irradiation to a general-purpose CCD detector, a CCD detector with a downsized detection area can be realized without developing a new CCD detector, thereby reducing the development cost of the device. Also, since at least one of the number of rows and columns irradiated with light can be reduced, the time required for the acquisition process of the electric charges generated in each light receiving element can be shortened compared to a configuration that does not limit the light irradiation destination. Therefore, a superior optical spectrum measuring device can be provided. Effect of the Invention

[0024] According to the present invention, it is possible to provide a superior optical spectrum measuring device and an optical spectrum measuring method. [Brief description of the drawings]

[0025] [Figure 1] FIG. 1 shows a configuration of an optical spectrum measuring system including a comparative example of an optical spectrum measuring device according to an embodiment of the present invention. [Diagram 2] FIG. 2 shows a configuration of a comparative example of an optical spectrum measuring device in the optical spectrum measuring system according to the embodiment of the present invention. [Diagram 3] FIG. 3 is a diagram showing a comparative example of a method for reading out electric charges accumulated in a light receiving element in a CCD detector according to an embodiment of the present invention. [Figure 4] FIG. 4 is a diagram showing a comparative example of a method for reading out electric charges accumulated in a light receiving element in a CCD detector according to an embodiment of the present invention. [Diagram 5] FIG. 5 is a diagram showing a comparative example of a method for reading out electric charges accumulated in a light receiving element in a CCD detector according to an embodiment of the present invention. [Figure 6] FIG. 6 is a diagram showing a comparative example of a method for reading out electric charges accumulated in a light receiving element in a CCD detector according to an embodiment of the present invention. [Figure 7] FIG. 7 is a diagram showing a comparative example of a method for reading out electric charges accumulated in a light receiving element in a CCD detector according to an embodiment of the present invention. [Figure 8] FIG. 8 shows a configuration of an optical spectrum measuring device in an optical spectrum measuring system according to an embodiment of the present invention. [Figure 9] FIG. 9 is a side view of a CCD detector provided in an optical spectrum measurement apparatus according to an embodiment of the present invention, viewed in the horizontal transfer direction. [Figure 10] FIG. 10 shows a configuration of a modified example of a limiting section provided in an optical spectrum measuring apparatus according to an embodiment of the present invention. In FIG. [Figure 11] FIG. 11 shows a configuration of a modified example of a limiting section provided in an optical spectrum measuring apparatus according to an embodiment of the present invention. In FIG. [Figure 12] FIG. 12 is a diagram showing a method of reading out charges accumulated in a light receiving element in a CCD detector according to an embodiment of the present invention. [Figure 13] FIG. 13 is a diagram showing a method of reading out charges accumulated in a light receiving element in a CCD detector according to an embodiment of the present invention. [Figure 14] FIG. 14 is a diagram showing a method of reading out charges accumulated in a light receiving element in a CCD detector according to an embodiment of the present invention. [Figure 15] FIG. 15 is a diagram for explaining the effect of the optical spectrum measuring system according to the embodiment of the present invention. [Figure 16]FIG. 16 shows a configuration of a modified optical system in an optical spectrum measuring apparatus according to an embodiment of the present invention. In FIG. [Figure 17] FIG. 17 shows a configuration of a modified optical spectrum measuring system according to an embodiment of the present invention. In FIG. [Figure 18] FIG. 18 shows a configuration of a modified optical spectrum measurement device in the optical spectrum measurement system according to the embodiment of the present invention. In FIG. [Figure 19] FIG. 19 shows a configuration of a modified optical spectrum measuring device in the optical spectrum measuring system according to the embodiment of the present invention. In FIG. [Figure 20] FIG. 20 shows an example of a sequence when an optical spectrum is measured in the optical spectrum measurement system according to the embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0026] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference characters and their description will not be repeated. In addition, at least some of the embodiments described below may be arbitrarily combined.

[0027] FIG. 1 shows a configuration of an optical spectrum measuring system including a comparative example of an optical spectrum measuring device according to an embodiment of the present invention.

[0028] 1, an optical spectrum measurement system 301 includes an optical spectrum measurement device 1 as a comparative example, a controller 41, and a personal computer (PC) .

[0029] For example, a user sets an object 43 as a measurement target of the optical spectrum measurement device 1. The object 43 is an object that emits light by itself, such as a lighting device or a display device, or an object that reflects or transmits light from a light source.

[0030] The personal computer 42 is capable of accepting operations by a user. For example, when the personal computer 42 accepts an operation by a user to start a measurement, the personal computer 42 transmits a measurement start command to the controller 41 in accordance with the accepted operation.

[0031] The controller 41 controls the optical spectrum measuring apparatus 1 in accordance with a measurement start command sent from the personal computer 42 , and obtains an optical spectrum based on the measurement results of the optical spectrum measuring apparatus 1 .

[0032] The controller 41 performs, for example, a predetermined arithmetic process on the acquired optical spectrum to determine the quality of the object 43. The controller 41 transmits result information indicating the result of the determination to the personal computer .

[0033] When the personal computer 42 receives the result information from the controller 41, the personal computer 42 displays the contents of the received result information, for example, on a display (not shown).

[0034] Although the controller 41 has been described as being configured to transmit the result information to the personal computer 42, the present invention is not limited to this. The controller 41 may be configured to transmit information indicating the optical spectrum to the personal computer 42.

[0035] FIG. 2 shows a configuration of a comparative example of an optical spectrum measuring device in the optical spectrum measuring system according to the embodiment of the present invention.

[0036] 2, the optical spectrum measurement apparatus 1 includes an optical system 5 and a CCD detector 6. The optical system 5 includes a slit 5a, a diffraction grating 5b, a collimating mirror 5d, and a focusing mirror 5e.

[0037] 1 and 2, optical spectrum measuring device 1 is capable of measuring an optical spectrum indicating the intensity of the incident light for each wavelength by separating the incident light from an object 43. Specifically, optical spectrum measuring device 1 is a Czerny-Turner spectrometer.

[0038] In detail, the optical system 5 in the optical spectrum measurement device 1 separates incident light and irradiates the light onto the CCD detector 6 .

[0039] More specifically, the opening of the slit 5a in the optical system 5 has, for example, a rectangular shape, and is provided so that the long side is aligned along the vertical direction.

[0040] Collimating mirror 5d has a reflecting surface, for example, of a spherical shape, and reflects the incident light from object 43 that has passed through slit 5a, converting it into parallel light, and irradiates diffraction grating 5b with the converted parallel light.

[0041] The diffraction grating 5b diffracts the incident light from the collimating mirror 5d in different directions depending on the wavelength.

[0042] More specifically, the diffraction grating 5b is, for example, a reflective diffraction grating having vertical grooves on its reflecting surface, and reflects the incident light from the collimating mirror 5d so that the intensity of the light increases in each direction according to the wavelength.

[0043] The focus mirror 5e has, for example, a spherical reflecting surface, and reflects the incident light diffracted by the diffraction grating 5b to collect the light on the CCD detector 6.

[0044] The CCD detector 6 is specifically a CCD image sensor, and includes a plurality of light receiving elements arranged two-dimensionally.

[0045] More specifically, the CCD detector 6 includes m×n light receiving elements arranged in a matrix of m rows and n columns. Here, the light receiving elements belonging to the columns are aligned in the vertical (V) direction and the light receiving elements belonging to the rows are aligned in the horizontal (H) direction, respectively. Furthermore, m and n are integers of 2 or more.

[0046] The CCD detector 6 is disposed, for example, such that light of each wavelength dispersed by the optical system 5 is irradiated onto light receiving elements belonging to the corresponding row. Therefore, light receiving elements belonging to the same row are irradiated with incident light of the same wavelength.

[0047] The light receiving element is, for example, a photodiode, which is reverse biased by the controller 41 and generates and accumulates electric charges according to the intensity of the received incident light.

[0048] The CCD detector 6 includes, for example, n column shift registers provided for each column, a row shift register, and an output section. In the n column shift registers, for example, m column charge storage elements are provided corresponding to the m light receiving elements belonging to the column. In the row shift register, n row charge storage elements are provided corresponding to the column shift registers.

[0049] [Comparison example of binning processing] 3 to 7 are diagrams showing comparative examples of methods for reading out charges accumulated in light receiving elements in the CCD detector according to the embodiment of the present invention.

[0050] With reference to FIG. 3, in this example, for simplicity of explanation, a method of reading out electric charges in a CCD detector 6 including 4×4 light receiving elements arranged in 4 rows and 4 columns will be described.

[0051] The CCD detector 6 is, for example, an interline CCD or a frame transfer CCD.

[0052] The CCD detector 6 includes, for example, four column shift registers Sc, each of which has four column charge storage elements Cc corresponding to the four light receiving elements in the corresponding column, a row shift register Sr, each of which has four row charge storage elements Cr corresponding to the column shift registers Sc, and an output unit 6a. The output unit 6a is, for example, an amplifier.

[0053] The CCD detector 6 is not limited to an interline CCD or a frame transfer CCD, but may be a full frame transfer CCD. In this case, the four light receiving elements in each column of the CCD detector 6 also function as four column charge storage elements Cc.

[0054] Each row is assigned a row number so that the closer to the row shift register Sr the number is increased, and each column is assigned a column number so that the closer to the output section 6a the number is increased.

[0055] Moreover, the direction parallel to the columns toward the row shift register Sr is defined as a vertical transfer direction Dv, and the direction parallel to the rows toward the output section 6a is defined as a horizontal transfer direction Dh.

[0056] For example, the column shift register Sc transfers the accumulated charge in its own column charge storage element Cc corresponding to a light receiving element belonging to a row to its own column charge storage element Cc corresponding to a light receiving element belonging to another row, or to the corresponding row charge storage element Cr in the row shift register Sr.

[0057] Specifically, first, when a predetermined exposure time has elapsed, the controller 41 performs simultaneous transfer control to transfer the charges accumulated in each light receiving element to the corresponding column charge storage element Cc (step S102).

[0058] At this time, the 16 column charge storage elements Cc store the charges Q1 to Q16, respectively. Furthermore, each light receiving element generates and stores a charge according to the intensity of the received incident light until it receives a new simultaneous transfer control from the controller 41 after the exposure time has elapsed.

[0059] Next, the controller 41 applies a vertical transfer signal Vc1 to each column shift register Sc to shift the charges stored in the column charge storage elements Cc belonging to each column in the direction toward the row shift register Sr, that is, in the vertical transfer direction Dv (step S104).

[0060] At this time, the four row charge storage elements Cr in the row shift register Sr store the charges Q4, Q3, Q2, and Q1 transferred from the four column charge storage elements Cc in the fourth row, respectively.

[0061] Referring to FIG. 4, next, the controller 41 applies a vertical side transfer signal Vc2 to each column shift register Sc to shift the charges accumulated in the column charge storage elements Cc belonging to each column toward the row shift register Sr (step S106).

[0062] At this time, the four row charge storage elements Cr in the row shift register Sr further store the charges transferred from the four column charge storage elements Cc in the fourth row, thereby storing the charges (Q4+Q8), (Q3+Q7), (Q2+Q6), and (Q1+Q5).

[0063] Next, the controller 41 applies a vertical transfer signal Vc3 to each column shift register Sc to shift the charges stored in the column charge storage elements Cc belonging to each column toward the row shift register Sr (step S108).

[0064] At this time, the four row charge storage elements Cr in the row shift register Sr further store the charges transferred from the four column charge storage elements Cc in the fourth row, thereby storing the charges (Q4+Q8+Q12), (Q3+Q7+Q11), (Q2+Q6+Q10), and (Q1+Q5+Q9).

[0065] Referring to FIG. 5, next, the controller 41 applies a vertical side transfer signal Vc4 to each column shift register Sc to shift the charges accumulated in the column charge storage elements Cc belonging to each column toward the row shift register Sr (step S110).

[0066] At this time, the four row charge storage elements Cr in the row shift register Sr further store the charges transferred from the four column charge storage elements Cc in the fourth row, thereby storing the charges (Q4+Q8+Q12+Q16), (Q3+Q7+Q11+Q15), (Q2+Q6+Q10+Q14), and (Q1+Q5+Q9+Q13).

[0067] Next, the controller 41 applies a horizontal transfer signal Hc1 to the row shift register Sr to shift the charges stored in the row charge storage elements Cr belonging to the row shift register Sr in the direction toward the output section 6a, that is, in the horizontal transfer direction Dh (step S112).

[0068] At this time, the charge (Q1+Q5+Q9+Q13) stored in the row charge storage element Cr corresponding to the fourth column shift register Sc is transferred to the output section 6a. The output section 6a outputs a component signal S4 having a level according to the stored charge (Q1+Q5+Q9+Q13) to the controller 41.

[0069] Referring to FIG. 6, next, the controller 41 applies a horizontal transfer signal Hc2 to the row shift register Sr to shift the charges accumulated in the row charge accumulation elements Cr belonging to the row shift register Sr toward the output section 6a (step S114).

[0070] At this time, the charge (Q2+Q6+Q10+Q14) stored in the row charge storage element Cr corresponding to the fourth column shift register Sc is transferred to the output section 6a. The output section 6a outputs a component signal S3 having a level according to the stored charge (Q2+Q6+Q10+Q14) to the controller 41.

[0071] Next, the controller 41 applies a horizontal transfer signal Hc3 to the row shift register Sr to shift the charges stored in the row charge storage elements Cr belonging to the row shift register Sr toward the output section 6a (step S116).

[0072] At this time, the charge (Q3+Q7+Q11+Q15) stored in the row charge storage element Cr corresponding to the fourth column shift register Sc is transferred to the output section 6a. The output section 6a outputs a component signal S2 having a level according to the stored charge (Q3+Q7+Q11+Q15) to the controller 41.

[0073] Referring to FIG. 7, next, the controller 41 applies a horizontal transfer signal Hc4 to the row shift register Sr to shift the charges accumulated in the row charge storage elements Cr belonging to the row shift register Sr toward the output section 6a (step S118).

[0074] At this time, the charge (Q4+Q8+Q12+Q16) stored in the row charge storage element Cr corresponding to the fourth column shift register Sc is transferred to the output section 6a. The output section 6a outputs a component signal S1 having a level according to the stored charge (Q4+Q8+Q12+Q16) to the controller 41.

[0075] The controller 41 obtains an optical spectrum indicating the intensity for each wavelength based on the component signals S4 to S1 transmitted from the output section 6a.

[0076] [assignment] One optical spectrum is measured by the above-mentioned steps S102 to S118, and it is desired to further shorten the time required to measure this one optical spectrum (hereinafter, also referred to as unit measurement time).

[0077] For example, a method of using a CCD detector 6 with fewer rows is conceivable, but if a CCD detector 6 with an appropriate number of rows is not commercially available, it will be necessary to newly develop the CCD detector 6, resulting in a large cost burden.

[0078] Furthermore, if a CCD detector 6 with fewer than the appropriate number of rows is used, it is possible to shorten the unit measurement time, but the total amount of charge stored in the multiple column charge storage elements Cc in a column will be reduced, resulting in a reduced signal-to-noise ratio.

[0079] In other words, there is a need for technology that can shorten the unit measurement time while ensuring a certain level of signal-to-noise ratio by using a general-purpose CCD detector, without having to develop a new CCD detector.

[0080] Therefore, the optical spectrum measurement system according to the embodiment of the present invention solves the above problems by the following configuration and operation.

[0081] [Configuration of optical spectrum measuring device] FIG. 8 shows a configuration of an optical spectrum measuring device in an optical spectrum measuring system according to an embodiment of the present invention.

[0082] 8, an optical spectrum measurement system 301 includes an optical spectrum measurement device 11 instead of the optical spectrum measurement device 1 shown in Fig. 1. The optical spectrum measurement device 11 includes an optical system 5, a CCD detector 6, and a limiting unit (limiting mechanism) 21.

[0083] The configurations and operations of optical system 5 and CCD detector 6 in optical spectrum measurement apparatus 11 are similar to those of optical system 5 and CCD detector 6 in optical spectrum measurement apparatus 1 shown in Fig. 2. CCD detector 6 is, for example, a general-purpose product.

[0084] FIG. 9 is a side view of a CCD detector provided in an optical spectrum measurement apparatus according to an embodiment of the present invention, viewed in the horizontal transfer direction.

[0085] 8 and 9, the limiting unit 21 limits the irradiation of light from the optical system 5 to, for example, some of the rows of the plurality of light receiving elements.

[0086] Specifically, the limiting portion 21 is, for example, a mask member. The limiting portion 21 is opaque in a wavelength band to which the light receiving element in the CCD detector 6 has sensitivity. In Fig. 8, the limiting portion 21 is shown semi-transparent for ease of understanding.

[0087] The restriction section 21 is formed of, for example, metal or resin. The restriction section 21 is provided in an area Au (hereinafter also referred to as a restricted area) on the light receiving surface of the CCD detector 6, where the irradiation destination of the light from the optical system 5 should be restricted. In other words, the restriction section 21 is provided in an area other than an area Ar (hereinafter also referred to as an irradiation target area) on the light receiving surface of the CCD detector 6, where the light from the optical system 5 should be irradiated.

[0088] The limiting section 21 limits the destination of the light from the optical system 5 onto the CCD detector 6, for example, by reflecting the light from the optical system 5.

[0089] However, since the light reflected by the restriction section 21 becomes stray light inside the optical spectrum measuring device 11, it is preferable that the restriction section 21 is configured to limit the irradiation of light from the optical system 5 to the CCD detector 6 by absorbing the light from the optical system 5.

[0090] The limiting unit 21 sets the limiting target based on, for example, conditions related to spectrum measurement.

[0091] More specifically, for example, the number of rows of the CCD detector 6 to be limited is set based on the measurement time for one optical spectrum by the CCD detector 6, that is, the unit measurement time.

[0092] Specifically, the number of rows of the CCD detector 6 to be limited is set so that the unit measurement time is shorter than the time required by the specifications. The number of rows to be limited may be one or more.

[0093] The restricted area Au is provided so as to include the first row on the starting point side in the vertical transfer direction Dv, that is, the first row.

[0094] The restricted area Au may be divided into a plurality of areas, in which case one of the divided restricted areas Au is set to include the first row.

[0095] [Modification 1 of the limiting portion 21] 10 is a diagram showing a configuration of a modified example of a limiting unit provided in an optical spectrum measurement device according to an embodiment of the present invention, in which limiting unit 21 is shown semi-transparently for ease of understanding.

[0096] The first modification of the limiting section 21 limits, for example, the irradiation of light from the optical system 5 onto some of the rows of the plurality of light receiving elements.

[0097] For example, one or more columns other than the multiple columns respectively corresponding to the multiple wavelengths of the optical spectrum to be acquired by the optical spectrum measurement apparatus 11 are set as the restriction target.

[0098] Specifically, one or more columns other than the multiple columns corresponding to the multiple wavelengths required by the specifications are set as the restriction target. The number of columns to be restricted may be one or more.

[0099] The restricted area Au is provided so as to include the first column on the starting point side in the horizontal transfer direction Dh, that is, the first column.

[0100] The restricted area Au may be divided into a plurality of areas, in which case one of the divided restricted areas Au is provided so as to include the first column.

[0101] [Modification 2 of the limiting portion 21] 11 is a diagram showing the configuration of a modified example of a limiting unit provided in an optical spectrum measurement device according to an embodiment of the present invention, in which limiting unit 21 is shown semi-transparently for ease of understanding.

[0102] The second modification of the limiting section 21 limits, for example, the irradiation of light from the optical system 5 to some of the rows and some of the columns of the plurality of light receiving elements.

[0103] For example, one or more columns other than the multiple columns respectively corresponding to the multiple wavelengths of the optical spectrum to be acquired by the optical spectrum measurement apparatus 11 are set as the restriction target.

[0104] Specifically, the restricted area Au shown in FIG. 11 is set, for example, in the row direction according to the setting method shown in FIG. 8, and in the column direction according to the setting method shown in FIG.

[0105] [Binning process] 12 to 14 are diagrams showing a method of reading out charges accumulated in light receiving elements in a CCD detector according to an embodiment of the present invention.

[0106] The CCD detector 6 shown in Fig. 12 is similar to the CCD detector 6 shown in Fig. 3. The CCD detector 6 shown in Fig. 12 is provided with a limiting unit 21 having the same shape as the second modification of the limiting unit 21 shown in Fig. 11. In this example, the limiting unit 21 limits the first row, the second row, and the first column.

[0107] The column shift register Sc, for example, moves the accumulated charge in its own column charge storage element Cc corresponding to a light receiving element in the irradiation target area Ar that belongs to a row to its own column charge storage element Cc corresponding to a light receiving element in another row, or to the corresponding row charge storage element Cr in the row shift register Sr.

[0108] Specifically, first, when a predetermined exposure time has elapsed, the controller 41 performs simultaneous transfer control to transfer the charges accumulated in each light receiving element to the corresponding column charge storage element Cc (step S202).

[0109] At this time, the six column charge storage elements Cc in the irradiation target area Ar store charges Q1 to Q6, respectively.

[0110] Next, the controller 41 applies a vertical transfer signal Vc1 to each column shift register Sc to shift the charges stored in the column charge storage elements Cc belonging to each column toward the row shift register Sr (step S204).

[0111] At this time, the column charge storage element Cc in the first column included in the restricted area Au does not store charge, so the four row charge storage elements Cr in the row shift register Sr store charges of zero, Q3, Q2, and Q1, respectively, based on the four column charge storage elements Cc in the fourth row.

[0112] Referring to FIG. 13, next, the controller 41 applies a vertical side transfer signal Vc2 to each column shift register Sc to shift the charges accumulated in the column charge storage elements Cc belonging to each column toward the row shift register Sr (step S206).

[0113] At this time, the four row charge storage elements Cr in the row shift register Sr further store charges based on the four column charge storage elements Cc in the fourth row, thereby storing charges of zero, (Q3+Q6), (Q2+Q5), and (Q1+Q4).

[0114] Next, the controller 41 applies a horizontal transfer signal Hc1 to the row shift register Sr to shift the charges stored in the row charge storage elements Cr belonging to the row shift register Sr toward the output section 6a (step S208).

[0115] At this time, the charge (Q1+Q4) stored in the row charge storage element Cr corresponding to the fourth column shift register Sc is transferred to the output section 6a. The output section 6a outputs a component signal S4 having a level according to the stored charge (Q1+Q4) to the controller 41.

[0116] Referring to FIG. 14, next, the controller 41 applies a horizontal transfer signal Hc2 to the row shift register Sr to shift the charges accumulated in the row charge accumulation elements Cr belonging to the row shift register Sr toward the output section 6a (step S210).

[0117] At this time, the charge (Q2+Q5) stored in the row charge storage element Cr corresponding to the fourth column shift register Sc is transferred to the output section 6a. The output section 6a outputs a component signal S3 having a level according to the stored charge (Q2+Q5) to the controller 41.

[0118] Next, the controller 41 applies a horizontal transfer signal Hc3 to the row shift register Sr to shift the charges stored in the row charge storage elements Cr belonging to the row shift register Sr toward the output section 6a (step S212).

[0119] At this time, the charge (Q3+Q6) stored in the row charge storage element Cr corresponding to the fourth column shift register Sc is transferred to the output section 6a. The output section 6a outputs a component signal S2 having a level according to the stored charge (Q3+Q6) to the controller 41.

[0120] The controller 41 obtains an optical spectrum indicating the intensity for each wavelength based on the component signals S4 to S2 transmitted from the output section 6a.

[0121] FIG. 15 is a diagram for explaining the effect of the optical spectrum measuring system according to the embodiment of the present invention.

[0122] 15, in the optical spectrum measurement device 1 serving as a comparative example, as shown in FIGS. 3 to 7, the CCD detector 6 receives vertical transfer signals Vc1 to Vc4 and horizontal transfer signals Hc1 to Hc4 in order from the controller 41 after receiving a simultaneous transfer control U1 from the controller 41. The CCD detector 6 transmits component signals S4 to S1 in response to the horizontal transfer signals Hc1 to Hc4 to the controller 41, respectively, whereby the controller 41 completes acquisition of one optical spectrum.

[0123] 12 to 14, in the optical spectrum measurement device 11, the CCD detector 6 receives vertical transfer signals Vc1, Vc2 and horizontal transfer signals Hc1 to Hc3 in order from the controller 41 after receiving a simultaneous transfer control U1 from the controller 41. The CCD detector 6 transmits component signals S4 to S2 in response to the horizontal transfer signals Hc1 to Hc3, respectively, to the controller 41, whereby the controller 41 completes acquisition of one optical spectrum.

[0124] In this way, in the optical spectrum measuring device 11, by configuring the charges accumulated in the irradiation target area Ar to be transferred, the number of charge transfers in the vertical transfer direction Dv and horizontal transfer direction Dh can be reduced, and the unit measurement time can be shortened compared to the unit measurement time of the optical spectrum measuring device 1.

[0125] [Modification of optical system 5] 16 is a diagram showing a configuration of a modified example of the optical system in the optical spectrum measuring apparatus according to the embodiment of the present invention, and is a side view of the CCD detector 6 as seen in the horizontal transfer direction.

[0126] 16, the modified example of optical system 5 further includes a light collecting portion 5g compared to optical system 5 shown in FIG.

[0127] The light collecting unit 5g collects the dispersed light on a group of light receiving elements that the restriction unit 21 does not restrict, for example.

[0128] More specifically, the light collecting portion 5g is, for example, a lens. The lens may be spherical or cylindrical in shape.

[0129] The light collecting unit 5g is provided, for example, on the optical path between the focus mirror 5e and the CCD detector 6. Note that the light collecting unit 5g may be provided on the optical path between the slit 5a and the focus mirror 5e.

[0130] The light collecting portion 5g collects onto an irradiation target area Ar of the CCD detector 6 the light that would be irradiated onto the restriction portion 21 if the light collecting portion 5g were not provided (see FIG. 9) out of the light received from the focus mirror 5e.

[0131] With this configuration, the amount of light irradiated onto the irradiation target area Ar can be increased, and the signal-to-noise ratio of the optical spectrum measured by the optical spectrum measurement device 11 can be improved.

[0132] The light collecting unit 5g is not limited to a lens, and may be a mirror capable of collecting light onto the irradiation target area Ar in the CCD detector 6.

[0133] Also, the light collecting section 5g may be configured to collect the light after dispersion onto the irradiation target area Ar shown in FIG. 10 or FIG.

[0134] [Modifications of the Optical Spectrum Measurement System 301] FIG. 17 shows a configuration of a modified optical spectrum measuring system according to an embodiment of the present invention. In FIG.

[0135] 17, in a modified example of an optical spectrum measurement system 301, light from an object 43 is incident on a slit 5a in an optical spectrum measurement device 11 via an optical fiber .

[0136] The configurations and operations of controller 41 and personal computer 42 in the modified example of optical spectrum measurement system 301 are similar to those of controller 41 and personal computer 42 in optical spectrum measurement system 301 shown in FIG.

[0137] The configuration and operation of the optical spectrum measurement apparatus 11 in the modified example of the optical spectrum measurement system 301 are similar to those of the optical spectrum measurement apparatus 11 shown in FIG.

[0138] [Modification 1 of the optical spectrum measuring device 11] FIG. 18 shows a configuration of a modified optical spectrum measurement device in the optical spectrum measurement system according to the embodiment of the present invention. In FIG.

[0139] 18, a first variation of an optical spectrum measurement apparatus 11 shown in Fig. 18 includes an optical system 7 instead of the optical system 5 of the optical spectrum measurement apparatus 11 shown in Fig. 8. The optical system 7 includes a slit 5a and a concave diffraction grating 5f.

[0140] The configurations and operations of the restriction unit 21, slit 5a and CCD detector 6 in the first modification of the optical spectrum measurement apparatus 11 are similar to those of the restriction unit 21, slit 5a and CCD detector 6 in the optical spectrum measurement apparatus 11 shown in FIG.

[0141] 18 shows an optical spectrum measuring apparatus 11 which is a Paschen-Runge spectrometer. The optical system 7 in the optical spectrum measuring apparatus 11 splits incident light into a spectrum and irradiates the spectrum onto the CCD detector 6.

[0142] More specifically, the concave diffraction grating 5f in the optical system 5 is, for example, a reflective diffraction grating having a concave shape, which diffracts the incident light that has passed through the slit 5a in different directions depending on the wavelength, and focuses the diffracted incident light on the CCD detector 6.

[0143] [Modification 2 of Optical Spectrum Measurement Apparatus 11] FIG. 19 shows a configuration of a modified optical spectrum measuring device in the optical spectrum measuring system according to the embodiment of the present invention. In FIG.

[0144] 19, a second modification of the optical spectrum measurement apparatus 11 shown in FIG. 19 includes a limiting section (limiting mechanism) 22 instead of the limiting section 21, as compared with the optical spectrum measurement apparatus 11 shown in FIG.

[0145] The configurations and operations of optical system 5 and CCD detector 6 in the second modification of optical spectrum measurement apparatus 11 are similar to those of optical system 5 and CCD detector 6 in optical spectrum measurement apparatus 11 shown in FIG.

[0146] The limiting section 22 limits, for example, the irradiation of light from the optical system 5 onto some of the rows of the plurality of light receiving elements.

[0147] Specifically, the limiting portion 22 is, for example, a lens. The shape of the lens may be spherical or cylindrical.

[0148] The restriction unit 22 is provided, for example, on the optical path between the focus mirror 5e and the CCD detector 6. Note that the restriction unit 22 may be provided on the optical path between the slit 5a and the focus mirror 5e.

[0149] The restriction section 22 limits the irradiation of light from the optical system 5 to the CCD detector 6 by focusing the light received from the focus mirror 5e, which would be irradiated to the restriction section 21 if the restriction section 22 were not provided (see Figure 9), onto the irradiation target area Ar of the CCD detector 6.

[0150] In the second modification of the optical spectrum measuring device according to the embodiment of the present invention, the restriction unit 22 is configured to restrict irradiation of light from the optical system 5 to some of the rows of the plurality of light receiving elements, but this is not limiting. The restriction unit 22 may be configured to restrict irradiation of light from the optical system 5 to some of the columns of the plurality of light receiving elements, or may be configured to restrict irradiation of light from the optical system 5 to some of the rows of the plurality of light receiving elements and some of the columns of the columns of the plurality of light receiving elements.

[0151] [Operation flow] Each device in the optical spectrum measurement system 301 includes a computer, and a processor such as a CPU in the computer reads out from a memory (not shown) a program including some or all of the steps in the sequence diagrams or flowcharts below, and executes the program. Each of the programs for the devices can be installed from outside. Each of the programs for the devices is distributed in a state in which it is stored in a recording medium.

[0152] FIG. 20 shows an example of a sequence when an optical spectrum is measured in the optical spectrum measurement system according to the embodiment of the present invention.

[0153] 20, first, a user places an object 43 as a measurement target of the optical spectrum measurement apparatus 11 (step S302).

[0154] Next, the user performs an operation on the personal computer 42 to start the measurement (step S304).

[0155] Next, when the personal computer 42 accepts the operation from the user, it transmits a measurement start command to the controller 41 in accordance with the accepted operation (step S306).

[0156] Next, when the controller 41 receives a measurement start command from the personal computer 42, it performs a reset process to clear the electric charge accumulated in each light receiving element in the CCD detector 6 in accordance with the received measurement start command (step S308).

[0157] More specifically, as a reset process, the controller 41 repeatedly transmits a vertical transfer signal to the CCD detector 6 the number of times corresponding to the number of rows (hereinafter also referred to as target rows) included in the irradiation target area Ar of the CCD detector 6, and then repeatedly transmits a horizontal transfer signal to the CCD detector 6 the number of columns (hereinafter also referred to as target columns) included in the irradiation target area Ar. The timing of the reset process also corresponds to the start timing of a predetermined exposure time.

[0158] Next, the controller 41 waits until the exposure time has elapsed (step S310).

[0159] Next, the controller 41 performs simultaneous transfer control to transfer the charges accumulated in each light receiving element to the corresponding column charge storage element Cc (step S312).

[0160] Next, the controller 41 transmits a first vertical transfer signal to the CCD detector 6 (step S314).

[0161] Next, if the number of target rows is three or more, the controller 41 sends a vertical side transfer signal to the CCD detector 6 one or more times, and sends the final vertical side transfer signal, i.e., the vertical side transfer signal corresponding to the row number of the target row, to the CCD detector 6 (step S316).

[0162] Next, the controller 41 transmits the first horizontal transfer signal to the CCD detector 6 (step S318).

[0163] Next, the controller 41 receives a component signal, which is a response to the first horizontal transfer signal, from the CCD detector 6 (step S320).

[0164] Next, if the number of target columns is three or more, the controller 41 transmits the horizontal side transfer signal and receives the component signals one or more times, and transmits the final horizontal side transfer signal, i.e., the horizontal side transfer signal corresponding to the column number of the target column, to the CCD detector 6 (step S322).

[0165] Next, the controller 41 receives a component signal, which is a response to the last horizontal transfer signal, from the CCD detector 6 (step S324).

[0166] Next, when continuous measurement is to be performed (YES in step S326), the controller 41 waits until the next exposure time has elapsed (step S310).

[0167] On the other hand, if continuous measurement is not to be performed (NO in step S326), the controller 41 generates an optical spectrum from each component signal received from the CCD detector 6, and performs a predetermined arithmetic processing on the generated optical spectrum to determine whether the object 43 is good or bad (step S328).

[0168] Next, the controller 41 transmits result information indicating the determination result to the personal computer 42 (step S330).

[0169] In the optical spectrum measuring device according to the embodiment of the present invention, the number of rows of the CCD detector 6 to be limited is set based on the unit measurement time, but the present invention is not limited to this. The number of rows of the CCD detector 6 to be limited may be set based on the amount of light to be detected by the CCD detector 6. Specifically, the number of rows of the CCD detector 6 to be limited is set based on a required SNR. Alternatively, the number of rows of the CCD detector 6 to be limited may be set based on the unit measurement time and the amount of light to be detected by the CCD detector 6. Alternatively, the number of rows of the CCD detector 6 to be limited may be set arbitrarily, for example, regardless of the unit measurement time and the amount of light.

[0170] In the optical spectrum measuring device according to the embodiment of the present invention, the restriction target of the restriction unit 21 is set based on the conditions related to spectrum measurement, but this is not limiting. In the optical spectrum measuring device 11, the restriction target of the restriction unit 21 may be set based on conditions unrelated to spectrum measurement. Specifically, for example, the number of rows of the CCD detector 6 to be restricted may be set based on the charge storage capacity of the row charge storage element Cr in the row shift register Sr. More specifically, the number of rows of the CCD detector 6 to be restricted is set so that when the charges stored in each column charge storage element Cc in the column shift register Sc are transferred to the corresponding row charge storage element Cr by the binning process, the total amount of the transferred charges does not exceed the charge storage capacity of the row charge storage element Cr.

[0171] In the optical spectrum measurement device according to the embodiment of the present invention, one or more columns other than the multiple columns corresponding to the multiple wavelengths of the optical spectrum to be acquired by the optical spectrum measurement device 11 are set as the restriction target, but this is not limited to the above. The optical spectrum measurement device 11 may be configured such that one or more columns are set as the restriction target based on other conditions, regardless of the multiple wavelengths of the optical spectrum to be acquired by the optical spectrum measurement device 11.

[0172] Although the optical spectrum measuring device according to the embodiment of the present invention is configured to perform binning, this is not limiting. The optical spectrum measuring device 11 may be configured not to perform binning. Specifically, the optical spectrum measuring device 11 may be configured to read out the charges accumulated in the multiple light receiving elements separately.

[0173] In the optical spectrum measurement device according to the embodiment of the present invention, the restriction target area Au is configured to include the first row on the starting point side in the vertical transfer direction Dv, i.e., the first row, but this is not limited to this. The restriction target area Au may be configured not to include the first row on the starting point side in the vertical transfer direction Dv.

[0174] Specifically, for example, in the CCD detector 6 shown in FIG. 12, when the restricted area Au includes the third and fourth rows and the irradiated area Ar includes the first and second rows, it is possible to obtain correct component signals by the following method.

[0175] That is, after the first exposure time has elapsed, the controller 41 applies the vertical transfer signal Vc1 twice to each column shift register Sc to shift the charges stored in the column charge storage elements Cc belonging to each column in the vertical transfer direction Dv.

[0176] At this time, the charge of the column charge storage element Cc in the restricted area Au moves to the row charge storage element Cr in the row shift register Sr corresponding to the column to which it belongs, and the charge stored in the column charge storage element Cc in the irradiation target area Ar moves to the corresponding column charge storage element Cc in the restricted area Au.

[0177] Next, the controller 41 clears the charges stored in the row charge storage elements Cr belonging to the row shift register Sr by applying the horizontal transfer signal Hc1 four times to the row shift register Sr. At this time, the controller 41 discards the component signals transmitted from the output section 6a.

[0178] Next, after the second exposure time has elapsed, the controller 41 applies the vertical transfer signal Vc1 twice to each column shift register Sc to shift the charges stored in the column charge storage elements Cc belonging to each column in the vertical transfer direction Dv.

[0179] At this time, the charge in the column charge storage element Cc in the restricted area Au, i.e., the charge stored in the first exposure time, moves to the row charge storage element Cr corresponding to the column to which it belongs, and the charge stored in the column charge storage element Cc in the irradiation target area Ar, i.e., the charge stored in the second exposure time, moves to the corresponding column charge storage element Cc in the restricted area Au.

[0180] Next, the controller 41 applies the horizontal transfer signal Hc1 to the row shift register Sr four times to sequentially obtain component signals based on the charges accumulated during the first exposure time.

[0181] In the optical spectrum measurement device according to the embodiment of the present invention, the restriction target area Au is configured to include the first column on the starting side in the horizontal transfer direction Dh, i.e., the first column, but this is not limited to this. The restriction target area Au may be configured not to include the first column on the starting side in the horizontal transfer direction Dh.

[0182] Specifically, for example, in the CCD detector 6 shown in FIG. 12, if the restricted area Au includes the third and fourth columns and the illuminated area Ar includes the first and second columns, it is possible to obtain correct component signals by the following method.

[0183] That is, the controller 41 clears the charges accumulated in the row charge storage elements Cr corresponding to the irradiation target area Ar by applying the horizontal transfer signal Hc1 twice to the row shift register Sr. At this time, the controller 41 discards the component signals transmitted from the output section 6a.

[0184] Next, after the first exposure time has elapsed, the controller 41 applies the vertical transfer signal Vc1 four times to each column shift register Sc to shift the charges stored in the column charge storage elements Cc belonging to each column in the vertical transfer direction Dv.

[0185] At this time, the charge stored in the column charge storage element Cc in the irradiation target area Ar moves to the row charge storage element Cr in the row shift register Sr corresponding to the column to which it belongs.

[0186] Next, the controller 41 transfers the charges accumulated in the row charge storage elements Cr corresponding to the irradiation target area Ar, i.e., the charges accumulated during the first exposure time, to the row charge storage elements Cr corresponding to the restriction target area Au by applying the horizontal transfer signal Hc1 twice to the row shift register Sr. At this time, the controller 41 discards the component signals transmitted from the output section 6a.

[0187] Next, after the second exposure time has elapsed, the controller 41 applies the vertical transfer signal Vc1 four times to each column shift register Sc to shift the charges stored in the column charge storage elements Cc belonging to each column in the vertical transfer direction Dv.

[0188] At this time, the charge stored in the column charge storage element Cc in the irradiation target area Ar moves to the row charge storage element Cr in the row shift register Sr corresponding to the column to which it belongs.

[0189] Next, the controller 41 applies the horizontal transfer signal Hc1 twice to the row shift register Sr to sequentially acquire component signals based on the charges accumulated during the first exposure time, and transfers the charges accumulated in the row charge storage element Cr corresponding to the irradiation target area Ar, i.e., the charges accumulated during the second exposure time, to the row charge storage element Cr corresponding to the restriction target area Au.

[0190] In a configuration in which the restricted area Au is arranged so as not to include the first row on the starting side in the vertical transfer direction Dv, and in a configuration in which the restricted area Au is arranged so as not to include the first column on the starting side in the horizontal transfer direction Dh, the controller 41 acquires a component signal based on the charge accumulated during the first exposure time after the second exposure time has elapsed.

[0191] 8, 10, and 11, in a configuration in which the restricted area Au is provided to include the first row on the starting point side in the vertical transfer direction Dv, and in a configuration in which the restricted area Au is provided to include the first column on the starting point side in the horizontal transfer direction Dh, the controller 41 can obtain the component signal based on the charge accumulated in the first exposure time earlier. Specifically, the controller 41 can obtain the component signal, for example, during or before the second exposure time.

[0192] Incidentally, a possible configuration is one in which a CCD detector or the like is used as a light receiving means in an optical spectrum measuring device, as described in, for example, Patent Document 1. In such a configuration, there is a demand for a technique to provide a better device for measuring an optical spectrum.

[0193] In contrast, in the optical spectrum measurement device according to the embodiment of the present invention, the CCD detector 6 includes a plurality of light receiving elements arranged two-dimensionally. The optical system 5 separates the incident light and irradiates it on the CCD detector 6. The restriction unit 21 restricts the irradiation of light from the optical system 5 to at least one of some of the rows and some of the columns of the plurality of light receiving elements.

[0194] With this configuration, for example, by limiting the light irradiation to a general-purpose CCD detector 6, a CCD detector with a downsized detection area can be realized without developing a new CCD detector, thereby reducing the development cost of the device. Also, since at least one of the number of rows and the number of columns irradiated with light can be reduced, the time required for the acquisition process of the electric charges generated in each light receiving element can be shortened compared to a configuration that does not limit the light irradiation destination. Therefore, a superior optical spectrum measuring device can be provided.

[0195] In the optical spectrum measurement device according to the embodiment of the present invention, the restriction target of limiting unit 21 is set based on the conditions related to spectrum measurement.

[0196] With this configuration, it is possible to set appropriate restriction targets according to the content of the optical spectrum to be measured.

[0197] In the optical spectrum measurement device according to the embodiment of the present invention, the light of each wavelength dispersed by the optical system 5 is irradiated onto the corresponding column. The number of rows to be limited is set based on at least one of the measurement time for one optical spectrum by the CCD detector 6 and the amount of light that the CCD detector 6 should detect.

[0198] With such a configuration, for example, it is possible to complete the measurement of the optical spectrum within a required measurement time, and to measure the optical spectrum that satisfies a required signal-to-noise ratio.

[0199] In the optical spectrum measurement device according to the embodiment of the present invention, the light of each wavelength dispersed by the optical system 5 is irradiated onto the corresponding column. One or more columns other than the columns corresponding to the wavelengths of the optical spectrum to be acquired by the optical spectrum measurement device 11 are set as the restriction target.

[0200] With this configuration, the optical spectrum in the required wavelength range can be efficiently measured.

[0201] In the optical spectrum measurement device according to the embodiment of the present invention, the optical system 5 includes a light collecting unit 5g that collects the dispersed light onto the light receiving element group that is not targeted for restriction by the restriction unit .

[0202] With this configuration, the intensity of the light irradiated onto the light receiving element group to be used can be increased, thereby improving the signal-to-noise ratio of the optical spectrum.

[0203] In the optical spectrum measuring apparatus according to the embodiment of the present invention, the CCD detector 6 includes a plurality of column shift registers Sc, each of which has a plurality of column charge storage elements Cc corresponding to a plurality of light receiving elements belonging to each column, and a row shift register Sr, each of which has a plurality of row charge storage elements Cr corresponding to a plurality of column shift registers Sc. The column shift register Sc transfers the accumulated charge in its own column charge storage element Cc corresponding to a light receiving element belonging to a row to its own column charge storage element Cc corresponding to a light receiving element belonging to another row, or to the corresponding row charge storage element Cr in the row shift register Sr.

[0204] In this manner, by consolidating the charges generated in the light receiving elements irradiated with light for each column, it is possible to efficiently obtain a desired amount of charge for each wavelength.

[0205] In the optical spectrum measurement device according to the embodiment of the present invention, the restriction unit 21 restricts the irradiation of light from the optical system 5 onto some of the rows and some of the columns.

[0206] With this configuration, it is possible to reduce both the number of rows and the number of columns onto which light is irradiated, and therefore the time required for the process of acquiring the electric charge generated in each light receiving element can be further shortened.

[0207] In the optical spectrum measuring method according to the embodiment of the present invention, first, incident light is split into light beams and irradiated onto the CCD detector 6. Next, charges generated in the multiple light receiving elements by the incident light irradiated onto the CCD detector 6 are acquired. Then, when irradiating the CCD detector 6 with light, irradiation of the split incident light onto at least one of some rows and some columns of the multiple light receiving elements is restricted.

[0208] With this method, for example, by limiting the light irradiation to a general-purpose CCD detector 6, a CCD detector with a downsized detection area can be realized without developing a new CCD detector, thereby reducing the development cost of the device. Also, since at least one of the number of rows and the number of columns irradiated with light can be reduced, the time required for the acquisition process of the electric charges generated in each light receiving element can be shortened compared to a configuration that does not limit the light irradiation destination. Therefore, a superior optical spectrum measuring device can be provided.

[0209] The above-described embodiments should be considered as illustrative and not restrictive in all respects. The scope of the present invention is defined by the claims, not the above description, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0210] 1. Optical spectrum measuring device 5 Optical system 5a Slit 5b Diffraction grating 5d Collimating Mirror 5e Focus Mirror 5f concave diffraction grating 5g Light collecting part 6a Output section 6 CCD detector 7 Optical system 11 Optical spectrum measuring device 21 Restrictions 22 Restrictions 41 Controller 42 Personal Computers 43 Object 44 Optical Fiber 301 Optical Spectral Measurement System

Claims

1. An optical spectrum measurement system, comprising: a CCD (Charge Coupled Device) detector including a plurality of light receiving elements arranged two-dimensionally; an optical system that splits incident light into a light beam and irradiates the light beam onto the CCD detector; a limiting unit that limits irradiation of light from the optical system to at least one of a portion of each row and a portion of each column in the matrix arrangement of the plurality of light receiving elements; and a controller. the CCD detector includes a plurality of column shift registers provided for each of the columns, each of which has a plurality of column charge storage elements corresponding to the plurality of light receiving elements belonging to the column, and a row shift register, each of which has a plurality of row charge storage elements corresponding to the plurality of column shift registers, the controller performs a vertical transfer process for shifting the accumulated charges in the column charge storage elements belonging to each column by providing a vertical side transfer signal to each of the column shift registers, and a horizontal transfer process for shifting the accumulated charges in the row charge storage elements by providing a horizontal side transfer signal to the row shift registers; the column shift register receives the vertical transfer signal from the controller, and transfers the charges stored in the column charge storage elements corresponding to the light receiving elements in the row to the column charge storage elements corresponding to the light receiving elements in the other row, or to the corresponding row charge storage elements in the row shift register; the row shift register receives the horizontal side transfer signal from the controller and transfers the accumulated charges in the row charge storage elements to other row charge storage elements or to an outside of the row shift register; the limiting section forms, on the light receiving surface of the CCD detector, one restricted area, which is an area where irradiation of light from the optical system is restricted, and one illuminated area, which is an area where irradiation of light from the optical system is not restricted; the controller performs the vertical transfer process of shifting the accumulated charge in the column charge storage element belonging to each column N times by applying the vertical side transfer signal N times to each of the column shift registers, and then performs the horizontal transfer process of shifting the accumulated charge in the row charge storage element M times by applying the horizontal side transfer signal M times to the row shift registers, multiple times, where N is the number of the rows included in the irradiation target area (N is a positive integer) and M is the number of the columns included in the irradiation target area (M is a positive integer); the CCD detector is of the frame transfer type; the controller performs a simultaneous transfer control once for each of the processing steps, prior to the processing step, for transferring charges accumulated in all of the light receiving elements in the CCD detector to the corresponding column charge storage elements in a common exposure time; The optical system collects the dispersed light onto the entire light receiving surface including the restriction target area and the irradiation target area, the optical system focuses the dispersed light onto the CCD detector so that the dispersed light of each wavelength is irradiated onto the corresponding row; An optical spectrum measurement system, wherein the restriction unit restricts irradiation of light to the restricted area including one or more of the columns other than a plurality of the columns each corresponding to a plurality of wavelengths of the optical spectrum to be acquired by the optical spectrum measurement system.

2. An optical spectrum measurement system, comprising: a CCD detector including a plurality of light receiving elements arranged two-dimensionally; an optical system that splits incident light into a light beam and irradiates the light beam onto the CCD detector; a limiting unit that limits irradiation of light from the optical system to at least one of a portion of each row and a portion of each column in the matrix arrangement of the plurality of light receiving elements; and a controller. the CCD detector includes a plurality of column shift registers provided for each of the columns, each of which has a plurality of column charge storage elements corresponding to the plurality of light receiving elements belonging to the column, and a row shift register, each of which has a plurality of row charge storage elements corresponding to the plurality of column shift registers, the controller performs a vertical transfer process for shifting the accumulated charges in the column charge storage elements belonging to each column by providing a vertical side transfer signal to each of the column shift registers, and a horizontal transfer process for shifting the accumulated charges in the row charge storage elements by providing a horizontal side transfer signal to the row shift registers; the column shift register receives the vertical transfer signal from the controller, and transfers the charges stored in the column charge storage elements corresponding to the light receiving elements in the row to the column charge storage elements corresponding to the light receiving elements in the other row, or to the corresponding row charge storage elements in the row shift register; the row shift register receives the horizontal side transfer signal from the controller and transfers the accumulated charges in the row charge storage elements to other row charge storage elements or to an outside of the row shift register; the limiting section forms, on the light receiving surface of the CCD detector, one restricted area, which is an area where irradiation of light from the optical system is restricted, and one illuminated area, which is an area where irradiation of light from the optical system is not restricted; the controller performs the vertical transfer process of shifting the accumulated charge in the column charge storage element belonging to each column N times by applying the vertical side transfer signal N times to each of the column shift registers, and then performs the horizontal transfer process of shifting the accumulated charge in the row charge storage element M times by applying the horizontal side transfer signal M times to the row shift registers, multiple times, where N is the number of the rows included in the irradiation target area (N is a positive integer) and M is the number of the columns included in the irradiation target area (M is a positive integer); the CCD detector is of a full frame transfer type; the restricted area includes a first row on a starting side in a direction in which the accumulated charges are transferred in the vertical transfer process, The optical system collects the dispersed light onto the entire light receiving surface including the restriction target area and the irradiation target area, the optical system focuses the dispersed light onto the CCD detector so that the dispersed light of each wavelength is irradiated onto the corresponding row; An optical spectrum measurement system, wherein the restriction unit restricts irradiation of light to the restricted area including one or more of the columns other than a plurality of the columns each corresponding to a plurality of wavelengths of the optical spectrum to be acquired by the optical spectrum measurement system.

3. 1. A method for measuring an optical spectrum in an optical spectrum measurement system having a CCD detector including a plurality of light receiving elements arranged in a two-dimensional array, comprising: A step of splitting incident light and irradiating the CCD detector with the split light; acquiring charges generated in the plurality of light receiving elements by the incident light irradiated to the CCD detector; In the step of splitting the incident light and irradiating the split light on the CCD detector, irradiation of the split incident light on at least one of a part of rows and a part of columns in a matrix arrangement of the plurality of light receiving elements is limited; the CCD detector includes a plurality of column shift registers provided for each of the columns, each of which has a plurality of column charge storage elements corresponding to the plurality of light receiving elements belonging to the column, and a row shift register, each of which has a plurality of row charge storage elements corresponding to the plurality of column shift registers, In the step of acquiring the electric charges, a vertical transfer process is performed in which the electric charges stored in the column charge storage elements belonging to each column are shifted by applying a vertical side transfer signal to each of the column shift registers, and a horizontal transfer process is performed in which the electric charges stored in the row charge storage elements are shifted by applying a horizontal side transfer signal to the row shift registers; the column shift register receives the vertical transfer signal, and transfers the charges stored in the column charge storage elements corresponding to the light receiving elements in the row to the column charge storage elements corresponding to the light receiving elements in the other row, or to the corresponding row charge storage elements in the row shift register; the row shift register receives the horizontal transfer signal and transfers the charges stored in the row charge storage elements to other row charge storage elements or to an outside of the row shift register; In the step of splitting the incident light and irradiating the split light on the CCD detector, a restricted area, which is an area where irradiation of the split incident light is restricted, and an irradiation area, which is an area where irradiation of the split incident light is not restricted, are formed on a light receiving surface of the CCD detector, In the step of acquiring the electric charges, when the number of the rows included in the irradiation target area is N (N is a positive integer) and the number of the columns included in the irradiation target area is M (M is a positive integer), the vertical transfer process is performed by applying the vertical side transfer signal N times to each of the column shift registers to shift the accumulated electric charges in the column charge accumulation elements belonging to each column N times, and then the horizontal transfer process is performed by applying the horizontal side transfer signal M times to the row shift registers to shift the accumulated electric charges in the row charge accumulation elements M times. the CCD detector is of the frame transfer type; In the step of acquiring the electric charges, a simultaneous transfer control is performed once for each of the processing procedures, prior to the processing procedure, to transfer the electric charges accumulated in all of the light receiving elements in the CCD detector to the corresponding column charge storage elements at once during a common exposure time; In the step of splitting the incident light and irradiating the CCD detector, the split light is focused onto the entire light receiving surface including the restricted area and the irradiation area; In the step of splitting the incident light and irradiating the light on the CCD detector, the split light is focused on the CCD detector so that the split light of each wavelength is irradiated on the corresponding row; In the step of dispersing the incident light and irradiating it onto the CCD detector, the optical spectrum measurement system restricts the irradiation of light to a restricted area including one or more of the columns other than a plurality of the columns each corresponding to a plurality of wavelengths of the optical spectrum to be acquired.

4. A method for measuring an optical spectrum in an optical spectrum measurement system having a CCD detector including a plurality of light receiving elements arranged two-dimensionally, comprising: A step of splitting incident light and irradiating the CCD detector with the split light; acquiring charges generated in the plurality of light receiving elements by the incident light irradiated to the CCD detector; In the step of splitting the incident light and irradiating the split light on the CCD detector, irradiation of the split incident light on at least one of a part of rows and a part of columns in a matrix arrangement of the plurality of light receiving elements is limited; the CCD detector includes a plurality of column shift registers provided for each of the columns, each of which has a plurality of column charge storage elements corresponding to the plurality of light receiving elements belonging to the column, and a row shift register, each of which has a plurality of row charge storage elements corresponding to the plurality of column shift registers, In the step of acquiring the electric charges, a vertical transfer process is performed in which the electric charges stored in the column charge storage elements belonging to each column are shifted by applying a vertical side transfer signal to each of the column shift registers, and a horizontal transfer process is performed in which the electric charges stored in the row charge storage elements are shifted by applying a horizontal side transfer signal to the row shift registers; the column shift register receives the vertical transfer signal, and transfers the charges stored in the column charge storage elements corresponding to the light receiving elements in the row to the column charge storage elements corresponding to the light receiving elements in the other row, or to the corresponding row charge storage elements in the row shift register; the row shift register receives the horizontal transfer signal and transfers the charges stored in the row charge storage elements to other row charge storage elements or to an outside of the row shift register; In the step of splitting the incident light and irradiating the split light on the CCD detector, a restricted area, which is an area where irradiation of the split incident light is restricted, and an irradiation area, which is an area where irradiation of the split incident light is not restricted, are formed on a light receiving surface of the CCD detector, In the step of acquiring the electric charges, when the number of the rows included in the irradiation target area is N (N is a positive integer) and the number of the columns included in the irradiation target area is M (M is a positive integer), the vertical transfer process is performed by applying the vertical side transfer signal N times to each of the column shift registers to shift the accumulated electric charges in the column charge accumulation elements belonging to each column N times, and then the horizontal transfer process is performed by applying the horizontal side transfer signal M times to the row shift registers to shift the accumulated electric charges in the row charge accumulation elements M times. the CCD detector is of a full frame transfer type; the restricted area includes a first row on a starting side in a direction in which the accumulated charges are transferred in the vertical transfer process, In the step of splitting the incident light and irradiating the CCD detector, the split light is focused onto the entire light receiving surface including the restricted area and the irradiation area; In the step of splitting the incident light and irradiating the light on the CCD detector, the split light is focused on the CCD detector so that the split light of each wavelength is irradiated on the corresponding row; In the step of dispersing the incident light and irradiating it onto the CCD detector, the optical spectrum measurement system restricts the irradiation of light to a restricted area including one or more of the columns other than a plurality of the columns each corresponding to a plurality of wavelengths of the optical spectrum to be acquired.

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