Resolution-customizable micro spectrometer based on transverse dispersion metasurface

Abstract

The resolution-customizable micro spectrometer based on the transverse dispersion metasurface comprises a dispersion metasurface array structure and a focal plane pixel array, and the dispersion metasurface array structure comprises a plurality of dispersion metasurface sub-arrays which are distributed in an array mode and used for preliminary spectrum decoupling and directional convergence. The dispersion metasurface subarray comprises a plurality of dispersion metasurface units and all-dielectric substrates thereof, the dispersion metasurface units are nano-columns with four-fold symmetry, the nano-columns are periodically arranged, and the phase of transmission light is dynamically regulated and controlled according to the frequency omega of incident light. The focal position (x ', y') of the transmission light on the focal plane is in a linear mapping relation along with the change of the omega; the focal plane pixel array comprises a multi-element plane array composed of a plurality of pixels, and the multi-element plane array is in pixel-level registration with the dispersion metasurface sub-array. According to the invention, pixel-level precise condensation is realized, crosstalk is effectively inhibited, the detection precision is improved, and real snapshot spectral imaging is realized.

Description

Technical Field

[0001] The present invention belongs to the technical fields of nanophotonics and spectrometers, and particularly relates to a miniaturized spectrometer with customizable resolution based on a laterally dispersive metasurface. Background Art

[0002] By establishing the relationship between response and wavelength, a spectrometer can decompose complex spectra and obtain the relative intensities of each wavelength component, and is widely used in fields such as astronomy, biomedicine, material characterization, and chemical analysis. Traditional spectrometers generally achieve spectral splitting through prisms or gratings. Although high spectral resolution can be achieved, they also have the disadvantages of large volume, high price, and being not conducive to integration. This greatly limits their applications in chip-level integration and other aspects.

[0003] With the rapid development of nanophotonics, metasurfaces, as a new type of micro-nano optical field modulation device, can precisely modulate the amplitude, phase, and polarization parameters of light waves, and have the advantages of being lightweight, easy to integrate, and having a high degree of design freedom. They are applied in many fields such as target detection, holography, optical communication, and computing. Applying metasurfaces to the design of spectrometers can realize miniaturized spectrometers that occupy less space and are more conducive to chip-level integration. Currently, the common miniaturized spectrometers based on metasurfaces mainly include narrowband filtering spectrometers and axially dispersive spectrometers.

[0004] The narrowband filtering spectrometer based on metasurfaces only allows light in a specific narrowband wavelength range to pass through, and the light of the remaining wavelengths is absorbed or reflected. Although the peak transmittance of such a design can be optimized to a relatively high value, the average transmittance for the entire band is still very low, and the average energy utilization rate is low. The axially dispersive spectrometer disperses the incident light along the optical axis direction, and the intensity distribution in the axial direction is inversely proportional to the incident light wavelength. Although it can improve the spectral resolution ability and energy utilization rate, it cannot obtain all spectral information in a single snapshot, sacrificing the time resolution.

[0005] Therefore, how to solve the problem that it is difficult to synergistically optimize spectral resolution, energy utilization rate, and time resolution in the prior art, and provide a spectrometer design that does not sacrifice time resolution and has low crosstalk is a technical problem that those skilled in the art urgently need to solve. Summary of the Invention

[0006] The purpose of the present invention is to provide a design of a miniaturized spectrometer with customizable resolution based on a laterally dispersive metasurface to address the problem that it is difficult to balance high spectral resolution ability, high energy utilization rate, and time resolution in the prior art.

[0007] To achieve the above object of the present invention, the following technical solutions are adopted:

[0008] A micro spectrometer with customizable resolution based on a lateral dispersion metasurface, comprising a dispersion metasurface array structure and a focal plane pixel array,

[0009] The dispersion metasurface array structure includes several dispersion metasurface sub-arrays distributed in an array and its all-dielectric substrate for preliminary spectral decoupling and directional focusing. Each dispersion metasurface sub-array includes several dispersion metasurface units. The dispersion metasurface unit is a nanocolumn with four-fold symmetry. The nanocolumns are arranged periodically and dynamically regulate the transmission light phase according to the incident light frequency ω, so that the focal position (x', y') of the transmission light on the focal plane changes linearly with ω, so as to achieve customizable resolution;

[0010] The focal plane pixel array includes a multi-element plane array composed of several pixels, which is pixel-level registered with the dispersion metasurface sub-array and is used to record the spatial intensity distribution of light with different frequencies.

[0011] While adopting the above technical solutions, the present invention can also adopt or combine the following technical solutions:

[0012] As a preferred technical solution of the present invention: the spatial distribution of the phase of the dispersion metasurface units in each dispersion metasurface sub-array is:

[0013] φ(x,y,ω)= +C(ω)

[0014] where ω is the incident light frequency, F is the target focal length, c is the speed of light, (x,y) is the spatial coordinate on the metasurface, (x',y') is the spatial position of the transmission light with frequency ω at the focal point on the focal plane, θ represents the angle between the projection of the incident light in the x-z plane and the z-axis, γ represents the angle between the projection of the incident light in the y-z plane and the z-axis, and C(ω) is a function related only to the frequency.

[0015] As a preferred technical solution of the present invention: the spatial position (x',y') of the transmission light at the focal point on the focal plane is determined by the transmission light frequency, where x'=m1c / ω+n1, y'=m2c / ω+n2, and m1, m2, n1, and n2 are constants independent of the wavelength. By changing the magnitudes of m1, m2, n1, and n2, the focal position of each wavelength within the working band is regulated.

[0016] As a preferred technical solution of the present invention: the dispersion metasurface array structure includes an all-dielectric substrate and dispersion metasurface sub-arrays distributed in an array on the all-dielectric substrate. The dispersion metasurface sub-arrays have the same spectral dispersion ability, and the focal positions of spectral directional focusing of different dispersion metasurface sub-arrays move uniformly.

[0017] As a preferred technical solution of the present invention: For each dispersive metasurface sub-array with a diameter of D, light with a frequency of λ and any polarization state, where λ is within the working band (λmin, λmax), is incident at a fixed angle θ. Due to the different phase modulation results of the dispersive metasurface unit for incident light of different wavelengths, the outgoing light after passing through the dispersive metasurface unit is focused at the position (m1λ + n1, m2λ + n2) on the focal plane with a focal length of F, where m1, m2, and n1, n2 are constants independent of the wavelength. The focal distances of the two limit wavelengths are Δr, and Δr 2 = Δx 2 + Δy 2 , Δx = m1(λ max - λ min ), Δy = m2(λ max - λ min ). Finally, the light signal on the focal plane is received by the detector.

[0018] As a preferred technical solution of the present invention: By keeping m1 = m2 and uniformly changing the magnitudes of n1 and n2, a series of dispersive metasurface sub-arrays with the same dispersion but uniformly shifted focal positions can be obtained. By forming a dispersive metasurface array structure from them, different intensity distributions of the same spectral information can be detected at the focal plane, and the spectral resolution can be further customized through simple calculations.

[0019] As a preferred technical solution of the present invention: The dispersive metasurface sub-array is formed by micro-nano processing into a nano-pillar array at the micro-nano scale, and each nano-pillar in the nano-pillar array adopts an isotropic structure; only by changing the geometric shape of the nano-pillar without changing its spatial orientation, the regulation of the transmission phase is realized.

[0020] As a preferred technical solution of the present invention: The nano-pillar material can be selected from silicon, silicon nitride, or titanium dioxide;

[0021] As a preferred technical solution of the present invention: The cross-section of the nano-pillar is square, the height h of the nano-pillar is 4.5 microns, the base period p is 1.65 microns, the outer side length of the square is 1.0 - 1.4 microns, and the inner ring side length is 0.4 - 0.8 microns.

[0022] As a preferred technical solution of the present invention: The cross-section of the nano-pillar is in the shape of a cross.

[0023] Compared with the prior art, a resolution-customizable micro-spectrometer based on a transverse dispersion metasurface of the present invention has the following beneficial effects: By using a pixel-level polarization-insensitive dispersion metasurface and precisely controlling the phase of the incident light, it solves the problems of large volume, low efficiency, and slow speed caused by the dependence on mechanical scanning or complex spectroscopic elements in traditional spectroscopic detection systems, and realizes snapshot high-precision spectroscopic imaging. Through the customized dispersion of the metasurface sub-array and the precise registration of the focal plane array, different wavelength lights are directionally focused onto the corresponding pixels. Combining with a simple spectral reconstruction algorithm, it achieves the technical effects of high energy utilization efficiency, low crosstalk, and fast response. At the same time, it has the advantages of a compact structure and customizable resolution, providing an efficient and reliable miniaturization solution for portable spectroscopic detection.

[0024] The spectral decoupling technology of the dispersion metasurface of the present invention breaks through the inherent limitations of traditional filter-type spectrometers and realizes performance improvement in a spectroscopic mode. By precisely controlling the phase of the incident light to efficiently decouple optical signals of different wavelengths, it significantly improves the energy utilization efficiency and minimizes the loss of light energy. By designing a precise superatom structure array, the incident light is efficiently focused onto the target pixels, reducing the crosstalk between adjacent pixels and greatly improving the accuracy and reliability of spectral detection. By using transverse dispersion control, the system can complete full-spectrum detection without mechanical scanning, and the response time is shortened to the microsecond level, truly realizing snapshot spectroscopic imaging. In the present invention, combined with a high-performance detector, complete spectral cube data can be obtained in a single exposure, providing a new technical solution for real-time dynamic monitoring, and having broad application prospects in many fields such as photon communication, satellite remote sensing, biomedicine, environmental monitoring, and material analysis. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic structural diagram of a resolution-customizable micro-spectrometer based on a transverse dispersion metasurface of the present invention;

[0026] Figure 2 It is a side view of a resolution-customizable micro-spectrometer based on a transverse dispersion metasurface of the present invention;

[0027] Figure 3 It is a schematic cross-sectional view of three four-fold symmetric nanocolumns used in the present invention;

[0028] Figure 4 It is the variation of the x coordinate of the converging spot of the transmitted light passing through the metasurface of the present invention with the wavelength;

[0029] Figure 5 It is the variation of the focusing efficiency of the converging spot of the transmitted light passing through the metasurface of the present invention with the wavelength;

[0030] In the accompanying drawings, there are a dispersion metasurface array structure 1; a dispersion metasurface sub-array 101; a all-dielectric substrate 102; a focal plane pixel array 2; and a pixel 202. Detailed implementation manners

[0031] The implementation methods, principle designs, and technical effects of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0032] A micro spectrometer with customizable resolution based on a lateral dispersion metasurface. The micro spectrometer includes: a dispersion metasurface array structure 1, which includes a plurality of dispersion metasurface sub-arrays 101 distributed in an array and its all-dielectric substrate 102. A metasurface structure insensitive to pixel-level polarization is selected for preliminary spectral decoupling and directional focusing; the dispersion metasurface sub-array 101 includes a plurality of the dispersion metasurface units. The dispersion metasurface units are nano-columns with four-fold symmetry. Each nano-column is arranged periodically, and dynamically adjusts the transmission light phase according to the incident light frequency ω, so that the focal position (x', y') of the transmission light on the focal plane changes linearly with ω, so as to achieve customizable resolution.

[0033] The dispersion metasurface array structure 1 includes an all-dielectric substrate 102 and dispersion metasurface sub-arrays 101 distributed in an array on the all-dielectric substrate. Each dispersion metasurface sub-array has the same spectral dispersion ability, and the focal positions of spectral directional focusing of different dispersion metasurface sub-arrays move uniformly.

[0034] In each dispersion metasurface sub-array, the spatial distribution of the phase required by the dispersion metasurface unit is:

[0035] φ(x,y,ω)= +C(ω),

[0036] where ω is the incident light frequency, F is the target focal length, c is the speed of light, (x,y) is the spatial coordinate on the metasurface, (x',y') is the spatial position of the transmission light focused on the focal plane at the frequency ω, θ represents the angle between the projection of the incident light in the x-z plane and the z-axis, γ represents the angle between the projection of the incident light in the y-z plane and the z-axis, and C(ω) is a function only related to the frequency.

[0037] The spatial position (x',y') of the transmission light focused on the focal plane is determined by the transmission light frequency, where x' = m1c / ω + n1, y' = m2c / ω + n2, and m1, m2, n1, and n2 are constants independent of the wavelength. By changing the magnitudes of m1, m2, n1, and n2, the focal positions of each wavelength within the working band can be freely designed.

[0038] The dispersion metasurface sub-array is formed by micro-nano processing to form a nano-pillar array at the micro-nano scale. Each nano-pillar in the nano-pillar array adopts an isotropic structure; only the geometric shape of the nano-pillars is changed, and no rotation operation is performed on the nano-pillars, that is, the transmission phase is changed while the geometric phase is kept the same to produce the same phase modulation effect for different polarizations.

[0039] For the focal plane pixel array 2 that is pixel-level registered with the dispersion metasurface sub-array, different pixels 202 respond to incident light of different bands, and by simply reconstructing the response data spectroscopically, the spectral information of the incident light can be restored.

[0040] The present invention provides a micro-spectrometer based on a transverse dispersion metasurface to solve the problem that it is difficult to balance high spectral resolution and high energy utilization rate in a single snapshot.

[0041] The micro-spectrometer based on the transverse dispersion metasurface is composed of a dispersion metasurface array with customizable foci. The metasurface is composed of periodically arranged silicon nano-pillars with high transmittance and low absorption loss in the mid-infrared band. To ensure that the metasurface has a dispersion effect on light of any polarization state, the silicon nano-pillars must satisfy four-fold symmetry. Such a structure makes the phase modulation result of the meta-atoms on the incident light not change with the change of the polarization state of the incident light. To maintain the modulation effect of the nano-pillars on all polarization states, it is necessary to select transmission phase modulation. Therefore, only by changing the geometric shape of the nano-pillars and not performing a rotation operation on the nano-pillars, that is, changing the transmission phase while keeping the geometric phase the same. The phase responses of meta-atoms with different geometric shapes and sizes to incident light of different wavelengths are calculated by the finite-difference time-domain method to construct a meta-atom phase library.

[0042] For each dispersion metasurface sub-array with a diameter of D, light with a frequency of λ and an arbitrary polarization state, where λ is within the working band (λ min , λ max ). Incident at a fixed angle θ, since the metasurface has different phase modulation results for incident light of different wavelengths, the outgoing light after passing through the metasurface is focused at the position (m1λ + n1, m2λ + n2) on the focal plane with a focal length of F, where m1, m2 and n1, n2 are constants independent of the wavelength. The focal distance between the foci of the two limit wavelengths is Δr, Δr 2 = Δx 2 + Δy 2 , Δx = m1(λ max - λ min ), Δy = m2(λ max - λ min ). Finally, the detector receives the optical signal on the focal plane.

[0043] According to the generalized Snell's law, the phase distribution of the dispersion metasurface units in the dispersion metasurface sub-array needs to satisfy the following relationship:

[0044] φ(x, y, ω) = + C(ω)

[0045] where ω is the incident light frequency, F is the target focal length, c is the speed of light, (x, y) are the spatial coordinates on the metasurface, (x', y') are the spatial positions of the transmitted light with frequency ω at the focal point on the focal plane, θ represents the angle between the projection of the incident light in the x - z plane and the z - axis, and γ represents the angle between the projection of the incident light in the y - z plane and the z - axis. Among them, x' = m1c / ω + n1, y' = m2c / ω + n2, m1, m2 and n1, n2 are constants independent of the wavelength. By changing the magnitudes of m1, m2 and n1, n2, the focal point positions of each wavelength within the working band can be freely designed. C(ω) is a function only related to the frequency, and its partial derivative with respect to ω = .

[0046] After calculation, it can be obtained that = 0,

[0047] Perform Taylor expansion on the phase distribution φ(x, y, ω):

[0048] φ(x, y, ω) = φ(x, y, ω0) + | ω0 (ω - ω0) + | ω0 (ω - ω0) 2 + O(ω 3 )

[0049] where ω min < ω0 < ω max . If the metasurface satisfies φ(x, y, ω0), | ω0 and | ω0 for the incident light with a certain frequency ω0, then the metasurface satisfies the phase distribution relation for the incident light with any frequency within the target frequency range. By using the particle swarm optimization algorithm, select the meta - atoms in the meta - atom phase library that match the required target phase, that is, construct a transverse dispersion spectral splitting metasurface.

[0050] Keep m1 and m2 the same, and uniformly change the magnitudes of n1 and n2, then a series of dispersion - identical but focal - point - position - uniformly - shifted dispersion metasurface sub - arrays can be obtained. By forming them into a dispersion metasurface array, different intensity distributions of the same spectral information can be detected at the focal plane, and high spectral resolution can be achieved through simple calculation.

[0051] The minimum spectral resolution achievable by a micro-spectrometer is determined by the dispersion distance of the dispersive metasurface, the detector pixel size, and the types of dispersive metasurface sub-arrays designed in the dispersive metasurface array. The smaller the detector pixel size, the larger the metasurface dispersion distance, and the more types of dispersive metasurfaces with different focal points in the metasurface array, the greater the spectral resolution that can be obtained.

[0052] Example 1

[0053] A resolution-customizable micro-spectrometer based on a transverse dispersive metasurface of the present invention will hereinafter introduce the working principle and implementation effect of the micro-spectrometer from two parts: dispersive metasurface regulation and focal plane spectral detection:

[0054] As Figure 1 - Figure 2 shown, the detected optical signal is incident on the metasurface structure 1. Here, a design is made with a target working wavelength of 3 - 5 µm, a metasurface diameter of 60 µm, and a focal length F of 100 µm as an example. Light with a wavelength of λ and an arbitrary polarization state, where λ is within the working band (λ min , λ max ). Incident at a fixed angle θ, since the metasurface has different phase modulation results for incident light of different wavelengths, the outgoing light after passing through the metasurface is focused at the position (m1λ + n1, m2λ + n2) on the focal plane.

[0055] The focal plane pixel array that is pixel-level registered with the dispersive metasurface sub-array. Different pixels respond to incident light of different bands, and by simply reconstructing the spectral data of the responses, the spectral information of the incident light can be restored.

[0056] As Figure 3 shown, three cross-sectional views of four-fold symmetric nanocolumns used in the present invention have the same regulation effect on all polarization states. By changing the geometric shape of the nanocolumns, the transmission phase is changed, without rotating the nanocolumns, and the geometric phase remains the same. The phase responses of superatoms with different geometric shapes and sizes to incident light of different wavelengths are calculated by the finite-difference time-domain method to construct a superatom phase library.

[0057] As Figure 4 shown, the wavelength decoupling effect of the present invention is demonstrated. The x-coordinate positions of the focal points of incident light at 21 wavelengths are calculated at equal wavelength intervals. Incident light with a wavelength of 3 µm is focused at the focal plane spatial position (20 µm, 0), incident light with a wavelength of 5 µm is focused at (-20 µm, 0), and the focal points of the remaining incident light are linearly distributed between (20 µm, 0) and (-20 µm, 0). The mean absolute error between the focal point positions of incident light of different wavelengths and their theoretical positions is less than 2%.

[0058] As Figure 5As shown, the simulation results of the light field focusing performance of the present invention are demonstrated. The focusing efficiency is defined as the ratio of the transmitted power within three FWHMs around the actual focal point to the power of the light incident on the metasurface. In the working wavelength range of 3 - 5 µm, the average focusing efficiency exceeds 50%. At a wavelength of 4.4 µm, the focusing efficiency of the dispersive metasurface is the highest, reaching 62.443%.

[0059] The present invention provides a resolution - customizable micro - spectrometer based on a lateral - dispersion metasurface, which includes a dispersive metasurface array and a focal - plane pixel array. Different dispersive metasurface sub - arrays customize different focal - point center positions. The dispersive metasurface adopts a pixel - level polarization - insensitive structure, and realizes efficient spectral decoupling and directional convergence through precise regulation of the phase of the incident light. The focal - plane array is accurately registered with the dispersive metasurface sub - array. Different pixels respond to specific wavelength bands respectively. By simply reconstructing the spectrum of the response data, the spectral information of the incident light can be restored. The present invention uses a spectroscopic mode to improve the energy utilization rate and reduce light - energy loss; realizes pixel - level precise light collection through an array of super - atom structures, effectively suppresses crosstalk, and improves the detection accuracy; uses lateral - dispersion regulation without mechanical scanning to achieve true snapshot spectral imaging. It has the characteristics of being structurally compact, resolution - customizable, and fast - responding, providing an efficient and reliable miniaturization solution for spectral detection.

[0060] The above - mentioned specific embodiments are used to explain the present invention, which are only the preferred embodiments of the present invention, rather than limiting the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and scope of the claims of the present invention fall within the protection scope of the present invention.

Claims

1. A micro spectrometer with customizable resolution based on a lateral dispersion metasurface, characterized in that: It includes a dispersion metasurface array structure and a focal plane pixel array. The dispersion metasurface array structure includes a number of dispersion metasurface sub-arrays distributed in an array and its all-dielectric substrate for preliminary spectral decoupling and directional focusing. The dispersion metasurface sub-array includes a number of dispersion metasurface units. The dispersion metasurface unit is a nanocolumn with four-fold symmetry. Each nanocolumn is arranged periodically and dynamically regulates the transmission light phase according to the incident light frequency ω, so that the focal position (x', y') of the transmission light on the focal plane shows a linear mapping relationship with the change of ω, so as to achieve customizable resolution. The focal plane pixel array includes a multi-element plane array composed of a number of pixels, which is pixel-level registered with the dispersion metasurface sub-array and is used to record the spatial intensity distribution of light with different frequencies.

2. The micro spectrometer with customizable resolution based on the lateral dispersion metasurface according to claim 1, characterized in that: The spatial distribution of the phase of the dispersion metasurface units in each dispersion metasurface sub-array is as follows: φ(x,y,ω)= +C(ω) where ω is the incident light frequency, F is the target focal length, c is the speed of light, (x, y) is the spatial coordinate on the metasurface, (x', y') is the spatial position of the transmission light with frequency ω at the focal point on the focal plane, θ represents the angle between the projection of the incident light in the x-z plane and the z-axis, γ represents the angle between the projection of the incident light in the y-z plane and the z-axis, and C(ω) is a function related only to the frequency.

3. The micro spectrometer with customizable resolution based on the lateral dispersion metasurface according to claim 2, characterized in that: The spatial position (x', y') of the transmission light at the focal point on the focal plane is determined by the transmission light frequency, where x' = m1c / ω + n1, y' = m2c / ω + n2, and m1, m2 and n1, n2 are constants independent of the wavelength. By changing the magnitudes of m1, m2 and n1, n2, the focal position of each wavelength within the working band is regulated.

4. The miniaturized spectrometer with customizable resolution based on the lateral dispersion metasurface according to claim 1, wherein: The dispersion metasurface array structure includes an all-dielectric substrate and dispersion metasurface sub-arrays distributed in an array on the all-dielectric substrate. The dispersion metasurface sub-arrays have the same spectral dispersion ability, and the focal positions of the spectral directional focusing of different dispersion metasurface sub-arrays move uniformly.

5. The miniaturized spectrometer with customizable resolution based on a lateral dispersion metasurface according to claim 1, characterized in that: For each dispersive metasurface sub-array with a diameter of D, light with a frequency of λ and an arbitrary polarization state, where λ is within the working band (λ min , λ max ), is incident at a fixed angle θ. Due to the different phase modulation results of the dispersive metasurface unit for incident light of different wavelengths, the outgoing light after passing through the dispersive metasurface unit is focused at the position (m1λ + n1, m2λ + n2) on the focal plane with a focal length of F, where m1, m2, n1, and n2 are constants independent of the wavelength. The focal distance between the foci of the two limit wavelengths is Δr, and Δr 2 = Δx 2 + Δy 2 , Δx = m1(λ max - λ min ), Δy = m2(λ max - λ min ). Finally, the light signal on the focal plane is received by the detector.

6. The micro spectrometer with customizable resolution based on the lateral dispersion metasurface according to claim 1, characterized in that: By keeping m1 = m2 and uniformly changing the magnitudes of n1 and n2, a series of dispersion metasurface sub-arrays with the same dispersion but uniformly moving focal positions can be obtained. By forming a dispersion metasurface array structure with them, different intensity distributions of the same spectral information can be detected at the focal plane, and the spectral resolution can be further customized through simple calculations.

7. The miniaturized spectrometer with customizable resolution based on the lateral dispersion metasurface according to claim 1, characterized in that: The dispersion metasurface sub-array is formed into a nano-column array at the micro-nano scale through micro-nano processing. Each nano-column in the nano-column array adopts an isotropic structure; only by changing the geometric shape of the nano-column without changing its spatial orientation, the regulation of the transmission phase is realized.

8. The micro spectrometer with customizable resolution based on a lateral dispersion metasurface according to claim 7, characterized in that: The material of the nano-column is selected from silicon, silicon nitride or titanium dioxide.

9. The micro spectrometer with customizable resolution based on the lateral dispersion metasurface according to claim 7, characterized in that: The cross-section of the nano-column is square, the height h of the nano-column is 4.5 microns, the substrate period p is 1.65 microns, the outer side length of the square is 1.0 - 1.4 microns, and the inner ring side length is 0.4 - 0.8 microns.

10. The micro spectrometer with customizable resolution based on the lateral dispersion metasurface according to claim 7, characterized in that: The cross-section of the nano-column is in the shape of a cross.

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