Probe for three-dimensional coordinate measuring device and three-dimensional coordinate measuring device equipped with the same

Abstract

To provide a probe for three-dimensional coordinate measurement device which can measure physical quantities over a wide range of a measurement object without requiring the skills of a user, and a three-dimensional coordinate measurement device equipped with the same.SOLUTION: A probe 200 is configured to be portable by a user and includes a body part 250, a stylus 211, and a grip part 230. The body part 250 is provided with a plurality of markers eq which are imaged by a movable camera 120 of a three-dimensional coordinate measurement device 1. The stylus 211 has a contact part that indicates a measurement point by coming into contact with a measurement object, and is attached at a predetermined position with respect to the plurality of markers eq. The grip part 230 is configured to be gripped by a user. The grip part 230 is provided with an operation part which is configured to be operable by the user who grips the grip part 230. The grip part 230 is connected to the body part 250 in a manner to be rotatable around a predetermined rotation axis RA.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a probe for a three-dimensional coordinate measuring device that is used in a three-dimensional coordinate measuring device that calculates the coordinates of a measurement point on a measurement object, and that contacts the measurement object to indicate a measurement point, and a three-dimensional coordinate measuring device equipped with the probe. [Background technology]

[0002] A contact-type three-dimensional coordinate measuring device uses a probe having a contact part. The contact part of the probe is brought into contact with the object to be measured, and the contact position between the object to be measured and the contact part is calculated. By calculating a plurality of positions on the object to be measured, the dimensions of a desired part of the object to be measured are measured.

[0003] The three-dimensional coordinate measuring device described in Patent Document 1 includes a mounting table, a probe, and an imaging unit. A contact portion of the probe is brought into contact with a measurement object placed on the mounting table. Image data is generated by capturing images of multiple markers provided on the probe by the imaging unit. Coordinates of the contact position between the measurement object and the contact portion are calculated based on the image data. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2015-194452 A Summary of the Invention [Problem to be solved by the invention]

[0005] In the above three-dimensional coordinate measuring device, the mounting table and the imaging unit are integrally held by the holding unit so that the area above the mounting table is imaged by the imaging unit. Furthermore, the imaging unit is disposed diagonally above the mounting table and is fixed so that the imaging area faces diagonally downward toward the mounting table. With this configuration, the positional relationship between the measurement object placed on the mounting table and the imaging unit is stable.

[0006] When the measurement object is placed on the mounting table, the parts of the measurement object whose coordinates can be measured are limited to the range where the contact part can contact the imaging part while the imaging part images the markers of the probe. Therefore, depending on the shape and size of the measurement object, the range of the measurable parts of the measurement object may vary greatly depending on the proficiency of the user.

[0007] An object of the present invention is to provide a probe for a three-dimensional coordinate measuring device that enables measurement of physical quantities over a wide range of an object to be measured without requiring the user to have skilled techniques, and a three-dimensional coordinate measuring device equipped with the probe. [Means for solving the problem]

[0008] (1) A probe for a three-dimensional coordinate measuring device according to a first aspect of the present invention includes a plurality of measurement markers imaged by an imaging unit. and a relative positional relationship between a plurality of measurement markers stored in advance. Based on In a predetermined positional relationship with respect to the plurality of measurement markers A probe used in a three-dimensional coordinate measuring device that calculates the coordinates of a measurement point, configured to be portable by a user in order to indicate the measurement point, the probe having a main body having a plurality of measurement markers arranged so as to be imaged from a predetermined direction; A contact portion for indicating a measurement point is provided. Predefined positions for multiple measurement markers In relation to the main body Installed Stylus The device comprises a gripping portion configured to be held by a user and in which a gripping posture by the user is defined, and a connection portion that connects the gripping portion to the main body portion so that the gripping portion is rotatable around a predetermined rotation axis, and when the gripping portion is held by the user in accordance with the defined gripping posture by rotating the gripping portion around the rotation axis via the connection portion, the multiple measurement markers are arranged in different orientations.

[0009] In the above three-dimensional coordinate measuring device, a measurement point is indicated by an indication unit of the probe. At this time, a plurality of measurement markers of the main body are imaged. The coordinates of the indicated measurement point are calculated based on image data obtained by imaging and the positional relationship between the plurality of measurement markers and the indication unit. Therefore, in order to obtain the coordinates of a desired measurement point on a measurement object, when the measurement point is indicated, the plurality of measurement markers need to be located within the field of view of the imaging unit and be directed toward the imaging unit.

[0010] In the above probe, the grip portion rotates around a rotation axis at the connection portion. When the grip portion is gripped by a user in a specified gripping position, the multiple measurement markers are arranged in different directions when the grip portion rotates. This makes it possible to measure physical quantities over a wide range of the measurement object without requiring the user to be skilled.

[0011] (2) The main body may have a marker surface on which the measurement markers are arranged, and the connection part may be provided on the opposite side of the marker surface of the main body. In this case, the grip part is prevented from entering the field of view of the imaging part when imaging the measurement markers. Therefore, reduction in the measurement range is suppressed.

[0012] (3) The rotation axis of the connection part may be arranged along the marker surface, and the grip part may be configured to rotate around the rotation axis via the connection part, so that when the grip part is gripped by a user in accordance with a specified gripping posture, the marker surface may transition between a first state in which the marker surface faces a first direction, and a second state in which the marker surface faces a second direction different from the first direction.

[0013] In this case, the direction in which the marker surface faces can be selectively switched between the first direction and the second direction in response to the rotation of the gripping part. Therefore, by switching between the first state and the second state in response to the usage state of the user, it is possible to facilitate the task of indicating the measurement point.

[0014] (4) The gripping unit may have an operation unit that accepts operation inputs related to measurement by the user, and the gripping posture may be determined by the arrangement of the operation unit. In this case, the operation unit can be easily operated by rotating the gripping unit in an appropriate direction. This makes it possible to appropriately indicate the measurement point. As a result, it becomes possible to measure physical quantities over a wide range of the measurement target without requiring the user to be skilled.

[0015] (5) The gripping portion may be rotated to a first angular position for directing the measurement markers to the imaging portion located directly opposite the user, and a second angular position for directing the measurement markers to the imaging portion located to the side of the user. In this case, the convenience of the user using the probe is improved.

[0016] (6) The main body may include a holding portion that fixes multiple measurement markers and the stylus in a predetermined positional relationship, a cushioning member, and a casing that houses the holding portion and movably supports the holding portion via the cushioning member.

[0019] (7) The operating unit may be composed of a plurality of buttons arranged in a predetermined arrangement, and the gripping unit may be configured to be capable of transitioning between a first arrangement state in which the arrangement of the plurality of buttons relative to the main body unit is in a first arrangement relationship and a second arrangement state in which the arrangement of the plurality of buttons relative to the main body unit is in a second arrangement relationship different from the first arrangement relationship by rotating around a rotation axis.

[0020] In general, in a probe for a three-dimensional coordinate measuring device, the operability of the buttons provided on the probe may be significantly reduced depending on the relationship between the position and posture of the main body and the arrangement of the buttons. According to the above configuration, the relationship of the arrangement of the buttons to the main body can be switched between the first relationship and the second relationship by shifting the grip part between the first arrangement state and the second arrangement state. Therefore, even if the operability of the buttons is reduced when the main body is in a measurement-enabled state, the user can easily change the positional relationship of the arrangement of the buttons to the main body by switching the state of the grip part. This can improve the operability of the buttons.

[0021] (8) The gripping portion may include a built-in battery that supplies power to the multiple measurement markers. The battery has a relatively large weight among the multiple components that make up the probe. As a result, when the battery is housed in the gripping portion, the center of gravity of the entire probe is located at or near the gripping portion. This allows the user to stably operate the probe by gripping the gripping portion.

[0022] (9) The probe further includes a notification display unit provided on the main body portion to notify a user whether or not the multiple measurement markers are present within the imaging field of view of the imaging unit, and the notification display unit may be located closer to the stylus than a connection portion of the main body portion to which the grip portion is connected.

[0023] In this case, the notification display unit is located closer to the stylus than the grip unit. In other words, the notification display unit is located closer to the contact unit. This allows the user to indicate the measurement point by touching the contact unit to a desired part of the measurement object while visually checking the notification display unit.

[0024] (10) The notification display unit may include a first display unit and a second display unit, and the first display unit and the second display unit may be provided in different parts of the main body and facing in different directions.

[0025] In this case, even if it is difficult for the user to see the first display unit when operating the probe, the user can easily know whether or not the multiple measurement markers are present within the imaging field of the imaging unit if the user can see the second display unit. Also, even if it is difficult for the user to see the second display unit when operating the probe, the user can easily know whether or not the multiple measurement markers are present within the imaging field of the imaging unit if the user can see the first display unit. Therefore, the operability of the probe when specifying a measurement point is improved.

[0026] (11) A three-dimensional coordinate measuring device according to a third aspect of the present invention is a three-dimensional coordinate measuring device comprising: a probe for the above-mentioned three-dimensional coordinate measuring device; an imaging unit that images a plurality of measurement markers of the probe; and a calculation unit that calculates the coordinates of a measurement point indicated by a contact unit based on measurement image data showing images of the plurality of measurement markers imaged by the imaging unit.

[0027] The three-dimensional coordinate measuring device includes the above-mentioned probe, which makes it possible to measure physical quantities of a wide range of an object to be measured without requiring the user to have special skills. Effect of the Invention

[0028] According to the present invention, it becomes possible to measure physical quantities over a wide range of a measurement object without requiring the user to have a high level of skill. [Brief description of the drawings]

[0029] [Figure 1] 1 is a schematic diagram showing an example of use of a three-dimensional coordinate measuring device according to an embodiment of the present invention; [Diagram 2] 11 is a schematic diagram showing another example of use of the three-dimensional coordinate measuring device according to the embodiment of the present invention. FIG. [Diagram 3] FIG. 2 is a block diagram showing the configuration of an imaging head and a processing device. [Figure 4] FIG. [Diagram 5] FIG. [Figure 6] FIG. [Figure 7] FIG. 2 is a plan view of the imaging head. [Figure 8] FIG. 2 is an external perspective view of the imaging head with the casing removed. [Figure 9] 5 is a schematic cross-sectional view of the imaging head taken along line AA in FIG. 4. [Figure 10] 10(a) is a schematic vertical sectional view of the reference member of FIG. 9, and (b) is a bottom view of the reference member. [Figure 11]1A and 1B are bottom and side views of the head bottom portion. [Figure 12] 2A and 2B are a plan view and a side view of the head base of FIG. 1. [Figure 13] FIG. 2 is a block diagram showing the basic configuration of a probe. [Figure 14] FIG. 2 is an external perspective view of the probe as viewed in one direction. [Figure 15] FIG. 11 is an external perspective view of the probe as viewed from another direction. [Figure 16] 1 is an external perspective view of a probe with a gripping portion in a second state, as viewed in one direction. FIG. [Figure 17] 13 is an external perspective view of the probe with the gripping portion in the second state, as viewed from another direction. FIG. [Figure 18] 4 is a schematic diagram showing a state in which a user measures a measurement object using a probe whose grip portion is in a first state. FIG. [Figure 19] 10 is a schematic diagram showing a state in which a user measures a measurement object using a probe whose grip portion is in a second state. FIG. [Figure 20] 3 is a partially cutaway cross-sectional view of the probe showing the internal structure of the main body. FIG. [Figure 21] FIG. 2 is an exploded perspective view of the probe for illustrating an outline of the internal structure of the main body. [Figure 22] 4 is a flowchart showing the flow of measurement processing by the main body control circuit of FIG. 3. [Figure 23] 13 is a flowchart showing the flow of a measurement point coordinate calculation process. [Figure 24] 4 is a flowchart showing the flow of a tracking process performed by the main body control circuit of FIG. 3. [Diagram 25] FIG. 13 is an external perspective view of a probe according to another embodiment. [Figure 26] 26 is a perspective view of the external appearance of the probe when the gripping portion is rotated 90° from the state of the probe in FIG. 25. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0030] [1] Basic configuration and usage examples of three-dimensional coordinate measuring device Fig. 1 is a schematic diagram showing an example of use of a three-dimensional coordinate measuring device according to an embodiment of the present invention. As shown in Fig. 1, a three-dimensional coordinate measuring device 1 according to the present embodiment is mainly composed of an imaging head 100, a probe 200, a processing device 300, and a holding unit 800.

[0031] The holding unit 800 includes a mounting unit 810, a mounting table 820, and a head base 830. The mounting unit 810 has a flat plate shape formed to extend in one direction, and is mounted on a mounting surface such as the upper surface of a table. The mounting unit 810 is made of aluminum, iron, or an alloy thereof, and has high rigidity. A mounting table 820 is provided at one end of the mounting unit 810. The mounting table 820 in this example is an optical surface plate having a substantially rectangular shape, and is connected to the upper surface of the mounting unit 810 so that the short side is parallel to the longitudinal direction of the mounting unit 810 (the direction in which the mounting unit 810 extends). The length L1 of the long side of the mounting table 820 is, for example, about 450 mm, and the length L2 of the short side of the mounting table 820 is, for example, about 300 mm. The mounting table 820 may have a square shape, a circular shape, or an elliptical shape. The measurement target S is mounted on the mounting table 820.

[0032] A head pedestal 830 is provided at the other end of the installation section 810. The head pedestal 830 in this example is configured so that the bottom part (hereinafter referred to as the head bottom part) 101 of the imaging head 100 can be attached and detached. With the head bottom part 101 attached on the head pedestal 830, the imaging head 100 is fixed to the installation section 810 and the mounting base 820. On the other hand, with the head bottom part 101 detached from the head pedestal 830, the imaging head 100 is separated from the installation section 810 and the mounting base 820 as shown by the dotted white arrow in FIG. 1.

[0033] The probe 200 is configured to be portable by a user. The probe 200 is provided with a contact portion 211a. To indicate a measurement point, the user brings the contact portion 211a of the probe 200 into contact with a desired portion of the measurement object S. As a result, the contact portion 211a indicates the measurement point, and the contact portion of the measurement object S with the contact portion 211a is indicated as the measurement point.

[0034] A movable camera 120 is provided inside the imaging head 100. The movable camera 120 captures images of a plurality of markers eq (FIG. 14, etc.) provided on the probe 200, which will be described later. The imaging head 100 is also connected to a processing device 300 via a cable CA. The processing device 300 is, for example, a personal computer, to which a main body display unit 310 and a main body operation unit 320 are connected. In the processing device 300, coordinates of a measurement point on the measurement object S are calculated based on image data (hereinafter referred to as measurement image data) obtained by the movable camera 120 capturing an image of the probe 200 and reference image data, which will be described later. By calculating the coordinates of one or more measurement points on the measurement object S, a physical quantity of the measurement object S is measured based on the calculation results.

[0035] When the user moves the probe 200, the direction of the imaging field of the movable camera 120 follows the movement of the probe 200, as shown by thick solid arrows a1 and a2 in FIG. 1. That is, the direction of the movable camera 120 changes so that the probe 200 is located within the imaging field of the movable camera 120 when the probe 200 moves. The movable camera 120 according to this embodiment has a depth of field that covers at least the space above the mounting table 820 when the imaging field of view is directed toward the mounting table 820. Therefore, the three-dimensional coordinate measuring device 1 has a wide measurable area including the space above the mounting table 820. Therefore, the range of positions and orientations of the probe 200 required to measure the physical quantity of the measurement target S is expanded.

[0036] As described above, according to the three-dimensional coordinate measuring device 1 of this embodiment, with the imaging head 100 attached on the head pedestal 830, it is possible to measure the physical quantity of the measurement target S placed on the mounting table 820. On the other hand, if it were possible to measure the physical quantity of the measurement target S that is not placed on the mounting table 820, the convenience of the three-dimensional coordinate measuring device 1 would be improved. Therefore, in addition to the above configuration, the three-dimensional coordinate measuring device 1 of this embodiment further includes a reference stand for fixing the imaging head 100 on an installation surface such as a floor surface. An example of use of the three-dimensional coordinate measuring device 1 using the reference stand will be described.

[0037] 2 is a schematic diagram showing another example of use of the three-dimensional coordinate measuring device 1 according to an embodiment of the present invention. As shown in FIG. 2, the three-dimensional coordinate measuring device 1 further includes a reference stand 900. The reference stand 900 is a tripod, and is composed of a head base 911 and legs 912. The head base 911 is provided at the upper end of the legs 912, and is configured to allow the head bottom 101 of the imaging head 100 to be attached and detached, similar to the head base 830 of the holding unit 800 in FIG. 1. In this example, the imaging head 100 removed from the holding unit 800 in FIG. 1 is attached on the head base 911 of the reference stand 900.

[0038] According to the above-mentioned reference stand 900, the user U can fix the imaging head 100, for example, on the floor surface so that the measurement target S set on the processing machine 9 is located within the range of the depth of field of the movable camera 120. The processing machine 9 is a processing device such as a lathe, a milling machine, or an electric discharge machine. Alternatively, the user U can fix the imaging head 100, for example, on the floor surface so that the measurement target S placed on the floor surface is located within the range of the depth of field of the movable camera 120. Therefore, the user U can measure the physical quantity of the measurement target S that is not placed on the placement table 820 of FIG. 1 by contacting the contact portion 211a of the probe 200 that the user U carries with him / her to a desired portion of the measurement target S. In this example, when the user U moves while carrying the probe 200, the direction of the imaging field of the movable camera 120 follows the movement of the probe 200, as in the example of FIG. 1. The configuration of each part of the three-dimensional coordinate measuring device 1 will be described in detail below.

[0039] [2] Configuration of imaging head 100 and processing device 300 Fig. 3 is a block diagram showing the configurations of the imaging head 100 and the processing device 300. Fig. 4 is a front view of the imaging head 100, and Fig. 5 is a rear view of the imaging head 100. Fig. 6 is a side view of the imaging head 100, and Fig. 7 is a plan view of the imaging head 100. As shown in Figs. 4 to 7, the imaging head 100 has a configuration in which a plurality of components are housed in a casing 90. Fig. 8 is an external perspective view of the imaging head 100 with the casing 90 removed, and Fig. 9 is a schematic cross-sectional view of the imaging head 100 taken along line AA in Fig. 4.

[0040] (1) Imaging head 100 First, the configuration of the imaging head 100 will be described. As shown in Fig. 3, the imaging head 100 includes, as electrical components, a reference camera 110, a movable camera 120, a marker driving circuit 130, a rotation driving circuit 140, a head control circuit 150, a wireless communication circuit 160, a communication circuit 170, an overhead camera 180, and a reference member 190. These components are housed in a casing 90 shown in Figs. 4 to 7 in a state supported by any one of a fixed connecting part 20, a supporting member 30, and a movable member 40 shown by two-dot chain lines in Fig. 3.

[0041] Each of the reference camera 110, the movable camera 120, and the overhead camera 180 includes a CMOS (complementary metal oxide semiconductor) image sensor capable of detecting infrared rays as an imaging element. The reference camera 110, the movable camera 120, and the overhead camera 180 are provided with substrates 111, 121, and 181 on which the CMOS image sensors are mounted, respectively. In FIG. 3, the multiple circuits (140, 150, 160, and 170) surrounded by thick dotted lines generate a higher amount of heat during operation than the various elements mounted on the substrates 111, 121, and 181 of the reference camera 110, the movable camera 120, and the overhead camera 180. In the following description, one or more substrates on which the rotation drive circuit 140, the head control circuit 150, the wireless communication circuit 160, and the communication circuit 170 are mounted are collectively referred to as a heat-generating substrate GS as appropriate.

[0042] 4 to 7, the casing 90 is made up of a lower casing 91, an upper casing 92, and a base casing 93. The lower casing 91 has a substantially cylindrical shape, is fixed to a head bottom 101 of the imaging head 100, and extends a certain distance upward from the head bottom 101. The upper casing 92 is provided at a position above the lower casing 91. The upper casing 92 has a substantially bell shape, and is provided rotatably in a horizontal plane together with a support member 30 (FIG. 8) described later.

[0043] 4, a rectangular opening 92S is formed in a part of the upper casing 92, extending in the vertical direction from near the upper end to the center of the upper casing 92. The rectangular opening 92S guides the imaging field of view of the movable camera 120 to the outside of the casing 90. In addition, the upper casing 92 is formed with two intake sections HA1 on both sides of the rectangular opening 92S and near the lower end of the upper casing 92.

[0044] An overhead camera window 91W is formed on a part of the outer circumferential surface of the lower casing 91. The overhead camera window 91W leads the imaging field of view of the overhead camera 180 to the outside of the casing 90. In the following description, one direction to which the overhead camera window 91W faces is referred to as the front of the imaging head 100. Also, the opposite direction from the one direction using the imaging head 100 as a reference is referred to as the rear of the imaging head 100. In addition to the overhead camera window 91W, two intake sections LA1 are formed near the front and bottom end of the lower casing 91.

[0045] 5 and 6, a board casing 93 is connected to a rearward facing portion (rear half) of the outer circumferential surface of the lower casing 91. The board casing 93 includes a first housing portion 93a and a second housing portion 93b. The first housing portion 93a has a box shape extending from the rear half of the lower casing 91 to the rear of the imaging head 100. The second housing portion 93b is formed so as to protrude upward from a portion of the upper surface of the first housing portion 93a.

[0046] 9, in the board casing 93, the internal space of the first accommodating portion 93a and the internal space of the second accommodating portion 93b are in communication with each other. Also, the internal space of the first accommodating portion 93a and the internal space of the lower casing 91 are in communication with each other. On the other hand, the internal space of the lower casing 91 and the internal space of the upper casing 92 are partitioned by an upper fixing plate 22 described later, and therefore do not communicate with each other.

[0047] 5, 6 and 9, a heat-generating substrate GS is accommodated from the lower part of the first accommodation portion 93a to the upper part of the second accommodation portion 93b inside the substrate casing 93. On the other hand, a plurality of substrates (substrates 111, 121, 181, etc.) having lower heat generation properties than the heat-generating substrate GS are accommodated in the lower casing 91 or the upper casing 92.

[0048] As shown in FIG. 5, an exhaust section LA2 is formed at the lower rear end of the first housing section 93a of the substrate casing 93. An exhaust fan LF is provided inside the first housing section 93a so as to be adjacent to the exhaust section LA2. The exhaust fan LF exhausts the atmosphere inside the lower casing 91 and the substrate casing 93 to the outside of the imaging head 100 through the exhaust section LA2. At this time, air outside the imaging head 100 flows into the inside of the lower casing 91 from the two intake sections LA1 in FIG. 4. As a result, as shown by multiple white arrows f1 in FIG. 6, a smooth air flow is generated from the front of the imaging head 100 through the internal space of the lower casing 91 and the substrate casing 93 to the rear of the imaging head 100. In this case, the heat-generating substrate GS housed in the substrate casing 93 is located downstream of the lower casing 91 in the air flow inside the lower casing 91 and the substrate casing 93. As a result, the heat generated by the heat-generating substrate GS is reduced from entering the internal space of the lower casing 91. Furthermore, since the heat generated by the heat-generating substrate GS does not remain in the internal space of the lower casing 91, the heat generated by the heat-generating substrate GS is prevented from being transmitted to the internal space of the upper casing 92 through the internal space of the lower casing 91.

[0049] As shown in FIG. 7, an exhaust section HA2 is formed in the upper part of the upper casing 92 on the opposite side of the rectangular opening 92S with respect to the center of the upper casing 92 in a plan view. An exhaust fan HF is provided inside the upper casing 92 so as to be adjacent to the exhaust section HA2. The exhaust fan HF exhausts the atmosphere inside the lower casing 91 to the outside of the imaging head 100 through the exhaust section HA2. At this time, air outside the imaging head 100 flows into the inside of the upper casing 92 from the two intake sections HA1 in FIG. 4. This generates a smooth air flow from the two intake sections HA1 of the lower casing 91 through the internal space of the upper casing 92 and obliquely upward from the lower part of the upper casing 92, as shown by multiple white arrows f2 in FIG. 6. In this case, as described below, heat generated in the board 43 on which the movable camera 120 or the marker driving circuit 130 housed in the upper casing 92 is mounted flows smoothly from bottom to top within the lower casing 91 and is discharged to the outside of the lower casing 91.

[0050] As shown in Figs. 8 and 9, the fixed connection part 20 includes a lower fixed plate 21, an upper fixed plate 22, a plurality of (for example, four) support columns 23, and a hollow support shaft 24. The lower fixed plate 21 has a disk shape and is fixed to the upper surface of the head bottom part 101 by using screws. The upper fixed plate 22 is provided above the lower fixed plate 21 via a plurality of support columns 23. The upper fixed plate 22 has a disk shape similar to the lower fixed plate 21. A circular opening is formed in the center of the upper fixed plate 22. The hollow support shaft 24 is fixed to the upper surface of the upper fixed plate 22 by using screws so as to surround the opening in the center of the upper fixed plate 22. The lower casing 91 is attached to any of the members constituting the fixed connection part 20.

[0051] In the fixed connection part 20, an overhead camera 180 is provided in the space between the lower fixed plate 21 and the upper fixed plate 22 together with various substrates (substrates having lower heat generation than the heat generating substrate GS) other than the heat generating substrate GS. Also, as shown in FIG. 9, a reference camera 110 is provided on the lower fixed plate 21 so as to extend from approximately the center of the lower casing 91 through the opening of the upper fixed plate 22 to the inside of the hollow support shaft 24. In this state, the imaging field of the reference camera 110 faces upward. In this embodiment, the optical axis 110c of the optical system of the reference camera 110 coincides with the central axis of the hollow support shaft 24.

[0052] In addition to the various substrates and reference camera 110 described above, a horizontal rotation mechanism 141 for rotating a support member 30 (described later) around the central axis of the hollow support shaft 24 (for rotating within a plane parallel to the upper surface of the head bottom 101) is provided on the lower fixed plate 21 and the upper fixed plate 22. The horizontal rotation mechanism 141 includes, for example, a motor and various power transmission members.

[0053] As shown in Fig. 8, a support member 30 is provided on the hollow support shaft 24 of the fixed connecting part 20. The support member 30 includes a rotating base 31 and a pair of support frames 32, 33. The rotating base 31 has an opening in the center, and is attached to the upper end of the hollow support shaft 24 via a cross roller bearing CB (Fig. 9) so that the support member 30 can rotate around the central axis of the hollow support shaft 24. The upper casing 92 is attached to one of the members constituting the support member 30. When the support member 30 rotates with respect to the hollow support shaft 24, the upper casing 92 rotates together with the support member 30 relative to the lower casing 91 (see the thick dashed arrow in Fig. 7).

[0054] The pair of support frames 32, 33 are formed to face each other and extend upward from one side and the other side of the rotating base 31. A movable member 40 is provided between the pair of support frames 32, 33 at a position spaced a predetermined distance from the rotating base 31.

[0055] The movable member 40 is supported by the support frames 32, 33 so as to be rotatable (tiltable with respect to a horizontal plane) around a rotation axis 30c passing through opposing portions of the pair of support frames 32, 33. In this embodiment, the rotation axis 30c is perpendicular to the optical axis 110c of the reference camera 110 (FIG. 9) and the central axis of the hollow support shaft 24.

[0056] A tilt rotation mechanism 143 is attached to the support frame 33 near the upper end thereof on the side opposite the movable member 40 and located on the rotation shaft 30c. The tilt rotation mechanism 143 includes, for example, a motor and various power transmission members. The tilt rotation mechanism 143 rotates the movable member 40 around the rotation shaft 30c.

[0057] Movable member 40 is formed in a generally square, flat cylinder shape, and has upper surface 41 and lower surface 42. Movable camera 120 and various boards associated with movable camera 120 are fixed onto movable member 40. In this state, optical axis 120c (FIG. 9) of the optical system of movable camera 120 is parallel to upper surface 41 of movable member 40. A board 43 on which marker drive circuit 130 of FIG. 3 is mounted is provided at the upper end of movable member 40 so as to cover the opening in the center.

[0058] As shown in Fig. 9, a reference member 190 having a plurality of markers ep (Fig. 3) is provided inside the movable member 40. Fig. 10(a) is a schematic vertical cross-sectional view of the reference member 190 in Fig. 9, and Fig. 10(b) is a bottom view of the reference member 190.

[0059] 10(a) and (b), the reference member 190 includes a light-emitting substrate 191, a diffusion plate 192, a glass plate 193, and a diffuse reflection sheet 195. The light-emitting substrate 191, the diffusion plate 192, and the glass plate 193 are layered in this order from top to bottom. The diffuse reflection sheet 195 is provided to surround the outer periphery of the layered structure.

[0060] A plurality of light-emitting elements L are mounted over the entire lower surface of the light-emitting substrate 191. Each light-emitting element L is, for example, an infrared LED (light-emitting diode). A marker driving circuit 130 drives the plurality of light-emitting elements L on the light-emitting substrate 191. This causes the plurality of light-emitting elements L to emit light.

[0061] The diffusion plate 192 is a plate member made of, for example, resin, and transmits downwardly while diffusing the light generated from the multiple light-emitting elements L. The diffusion reflection sheet 195 is a belt-shaped sheet member made of, for example, resin, and reflects inwardly the light from the multiple light-emitting elements L traveling to the side (outward) of the reference member 190 while diffusing it.

[0062] The glass plate 193 is a plate member made of, for example, quartz glass or soda glass. A mask 194 having a plurality of circular openings is provided on the lower surface of the glass plate 193. The mask 194 is, for example, a chrome mask formed on the lower surface of the glass plate 193 by a sputtering method or a vapor deposition method.

[0063] With the above-mentioned configuration, light generated from the multiple light-emitting elements L and diffused by the diffusion plate 192 and the diffuse reflection sheet 195 is emitted below the reference member 190 through the multiple circular openings in the glass plate 193 and the mask 194. In this manner, multiple self-luminous markers ep corresponding to the multiple circular openings, respectively, are formed.

[0064] In this embodiment, as shown in FIG. 10(b), the multiple markers ep are arranged at equal intervals in a matrix on the lower surface (flat surface) of the reference member 190. Among the multiple markers ep, the marker ep located at the center and one marker ep spaced a predetermined distance from the central marker ep are provided with identification marks (dots in this example) for distinguishing them from the other markers ep. These identification marks are formed by a part of the mask 194. In the following description, when distinguishing between two markers ep provided with identification marks from the multiple markers ep, the central marker ep including the identification mark is referred to as a first marker ep1. The other marker ep including the identification mark is referred to as a second marker ep2.

[0065] In the above configuration, the reference member 190 is attached to the movable member 40 such that the multiple markers ep facing downward are located within the imaging field of view of the base camera 110. Furthermore, the reference member 190 is attached to the movable member 40 such that when the upper surface 41 and the lower surface 42 of the movable member 40 are perpendicular to the direction of the optical axis 110c of the base camera 110, the first marker ep1 is located on the optical axis 110c.

[0066] When the support member 30 rotates on the fixed joint 20 and when the movable member 40 rotates around the rotation axis 30c, the images of the multiple markers ep obtained by the reference camera 110 capturing the reference member 190 change. Therefore, for example, assume that the image obtained when the support member 30 and the movable member 40 are in a predetermined reference posture changes. In this case, it is possible to determine how much the support member 30 has rotated from the reference posture based on the positional relationship between the first marker ep1 and the second marker ep2 in the image. Also, it is possible to determine how much the movable member 40 has rotated from the reference posture based on the distortion occurring in the arrangement of the multiple markers ep in the image.

[0067] As described above, the movable camera 120 and the reference member 190 are integrally fixed to the movable member 40. This makes it possible to calculate the position and orientation of the movable camera 120 relative to the reference camera 110 based on image data (hereinafter referred to as reference image data) obtained by the reference camera 110 capturing an image of a plurality of markers ep of the reference member 190.

[0068] A bellows 50 is provided between the movable member 40 and the rotating base 31, which optically and spatially isolates the imaging space rs (Figure 9) including the imaging field of view of the reference camera 110 from the reference camera 110 to the reference member 190 from the outside of the imaging space rs.

[0069] In this example, an upper end of bellows 50 is joined to lower surface 42 of movable member 40, and a lower end of bellows 50 is joined to an upper surface of rotating base 31. As a result, when support member 30 rotates in a horizontal plane, bellows 50 also rotates together with support member 30.

[0070] Also, bellows 50 in this example has a substantially square cylindrical shape, and is configured to be able to maintain an optically and spatially blocked state of imaging space rs by deforming in accordance with the rotation of movable member 40 when tilt rotation mechanism 143 rotates. Furthermore, bellows 50 is provided so as not to interfere with the imaging field of view of reference camera 110 when deforming in accordance with the rotation of movable member 40.

[0071] With this configuration, light is prevented from entering the imaging space rs from outside the imaging space rs. Even if a motor or the like generates heat around the imaging space rs, the generated heat is prevented from entering the imaging space rs. This prevents the atmosphere of the imaging space rs from fluctuating. Therefore, since multiple markers ep are captured with high accuracy, the position and orientation of the movable camera 120 relative to the reference camera 110 can be calculated with high accuracy. Furthermore, with the above configuration, the internal space of the bellows 50 is spatially isolated from the external space, so that the atmosphere of the internal space of the bellows 50 is stabilized.

[0072] In the imaging head 100, as shown in FIG. 8, it is desirable that the center of gravity of the portion (mainly including the movable member 40 and the movable camera 120) provided between the pair of support frames 32, 33 is located on the rotation axis 30c. This stabilizes the rotation of the movable member 40 around the rotation axis 30c. In addition, in the imaging head 100, it is desirable that the center of gravity of the portion (mainly including the support member 30, the movable member 40, and the movable camera 120) that rotates with respect to the fixed connecting part 20 is located on the optical axis 110c of the reference camera 110. This stabilizes the rotation of the support member 30 around the optical axis 110c. In addition, it is possible to reduce the driving force required to rotate the support member 30 and the movable member 40. This reduces the burden on the driving part such as a motor. In this example, weights Wa, Wb are attached to the pair of support frames 32, 33 of the support member 30 to adjust the center of gravity of the portion that rotates with respect to the fixed connecting part 20.

[0073] Overhead camera 180 is provided on fixed connecting part 20 so that its imaging field of view faces forward of imaging head 100. The angle of view of overhead camera 180 is larger than the angles of view of reference camera 110 and movable camera 120. Therefore, the imaging field of view of overhead camera 180 is larger than the imaging field of view of reference camera 110 and movable camera 120.

[0074] In a tracking process described later, the overhead camera 180 is used to capture an image of the probe 200 over a wide range. In this case, even if the probe 200 moves and falls outside the imaging field of the movable camera 120, the probe 200 is captured by the overhead camera 180, and the rough position of the probe 200 can be identified based on image data obtained by imaging (hereinafter referred to as overhead image data). Based on the identified position, the position and attitude of the movable camera 120 are adjusted so that the probe 200 is located within the imaging field of the movable camera 120.

[0075] In this example, the board casing 93 is connected to the lower casing 91 so as to be out of the imaging field of view of the overhead camera 180. This prevents the board casing 93 from limiting the range that can be imaged by the overhead camera 180.

[0076] Fig. 11 is a bottom view and a side view of the head bottom 101, and Fig. 12 is a plan view and a side view of the head base 830 of Fig. 1. As shown in Fig. 11, the head bottom 101 has an annular bottom surface 102 having a circular ring shape and an annular inclined surface 103. The annular inclined surface 103 is inclined upward for a certain distance from the inner edge of the annular bottom surface 102 toward its inside. An opening 104 is formed on the inside of the annular inclined surface 103. A vertical hole 105 that opens downward is formed in a predetermined portion of the annular bottom surface 102.

[0077] 12, the head base 830 has an annular support surface 831 and an annular inclined surface 832 having a circular ring shape. The annular support surface 831 has the same shape as the annular bottom surface 102 of the head bottom portion 101, and is configured to be slidable relative to the annular bottom surface 102. The annular inclined surface 832 corresponds to the annular inclined surface 103 of the head bottom portion 101, and is inclined upward a certain distance from the inner edge of the annular inclined surface 832 toward its inside. Furthermore, the annular inclined surface 832 is configured to be slidable relative to the annular inclined surface 103.

[0078] With this configuration, when the head bottom part 101 is attached onto the head pedestal 830, the head bottom part 101 is placed on the head pedestal 830. In this state, the annular bottom surface 102 and the annular inclined surface 103 of the head bottom part 101 come into contact with the annular support surface 831 and the annular inclined surface 832 of the head pedestal 830. Next, the user rotates the orientation of the head bottom part 101 by sliding the head bottom part 101 on the head pedestal 830 in the circumferential direction.

[0079] Here, a vertical hole 833 that opens upward is formed in the annular support surface 831 of the head pedestal 830. The vertical hole 833 corresponds to the vertical hole 105 of the head bottom 101, and overlaps when the head bottom 101 and the head pedestal 830 are in a predetermined positional relationship. For this reason, for example, an extendable pin member (not shown) is inserted into one of the two vertical holes 105, 833. In this case, by rotating the head bottom 101 on the head pedestal 830, the pin member is inserted into both of the two vertical holes 105, 833 when the head bottom 101 and the head pedestal 830 are in a predetermined positional relationship. As a result, the head bottom 101 and the head pedestal 830 are fixed in a predetermined positional relationship. This completes the attachment of the head bottom 101 to the head pedestal 830.

[0080] 2 has an annular support surface 831 and an annular inclined surface 832, similar to the head base 830 described above. Thereby, the head bottom 101 of the imaging head 100 can be mounted on the head base 911, similar to the example of the head base 830.

[0081] It is desirable that the center of gravity of the entire imaging head 100 be located within an area inside the outer edge of the head bottom 101 in a plan view. In Fig. 7, the outer edge of the head bottom 101 when the imaging head 100 is viewed in a plan view is indicated by a thick two-dot chain line. If the center of gravity of the entire imaging head 100 is located inside the outer edge of the head bottom 101 in a plan view, the imaging head 100 will be stably supported when it is attached to the head pedestals 830, 911.

[0082] 3, reference camera 110, movable camera 120, marker drive circuit 130, rotation drive circuit 140, wireless communication circuit 160, and communication circuit 170 are connected to head control circuit 150. Head control circuit 150 includes a CPU (Central Processing Unit) and memory, or a microcomputer, and controls reference camera 110, movable camera 120, marker drive circuit 130, rotation drive circuit 140, and overhead camera 180.

[0083] As described above, each of reference camera 110, movable camera 120, and overhead camera 180 includes a CMOS image sensor capable of detecting infrared rays. Each of reference camera 110, movable camera 120, and overhead camera 180 also includes a plurality of lenses (optical systems) not shown. An analog electrical signal (hereinafter referred to as a light receiving signal) corresponding to the amount of detection is output from each pixel of reference camera 110, movable camera 120, and overhead camera 180 to head control circuit 150.

[0084] An A / D converter (analog / digital converter) and a FIFO (first in first out) memory (not shown) are implemented in the head control circuit 150. The light receiving signals output from the reference camera 110, the movable camera 120, and the overhead camera 180 are sampled at a constant sampling period by the A / D converter of the head control circuit 150 and converted into digital signals. The digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the processing device 300 as pixel data.

[0085] The marker driving circuit 130 drives the light emitting substrate 191 in Fig. 10(a) based on the control of the head control circuit 150. This causes the multiple light emitting elements L on the light emitting substrate 191 to emit light, and light is emitted from the multiple markers ep of the reference member 190. The light emission timing and the imaging timing of the reference camera 110 are synchronized.

[0086] Rotation drive circuit 140 drives horizontal rotation mechanism 141 in Fig. 8 based on the control of head control circuit 150. This causes support member 30 in Fig. 8 to rotate on fixed connecting portion 20, and causes movable member 40 and upper casing 92 (Fig. 4) to rotate. At this time, the rotation of support member 30 causes the imaging field of movable camera 120, which is guided from the inside to the outside of upper casing 92 through rectangular opening 92S (Fig. 4), to rotate horizontally on head base 830 in Fig. 1 or head base 911 in Fig. 2.

[0087] Further, the rotation drive circuit 140 drives the tilt rotation mechanism 143 of Fig. 8 based on the control of the head control circuit 150. This causes the movable member 40 of Fig. 8 to rotate about the rotation axis 30c between the pair of support frames 32, 33. At this time, the imaging field of the movable camera 120 passing through the rectangular opening 92S (Fig. 4) rotates in the vertical direction along the rectangular opening 92S on the head base 830 of Fig. 1 or the head base 911 of Fig. 2. The rotation of the imaging field of the movable camera 120 by the rotation drive circuit 140 is performed based on a tracking process in the processing device 300, which will be described later.

[0088] The head control circuit 150 performs wireless communication with the probe 200 via a wireless communication circuit 160. The head control circuit 150 also performs wired communication with the processing device 300 via a communication circuit 170 and a cable CA (FIGS. 1 and 2).

[0089] (2) Processing device 300 3, the processing device 300 includes a communication circuit 301, a main body control circuit 302, and a main body memory 303. The communication circuit 301 and the main body memory 303 are connected to the main body control circuit 302. In addition, a main body operation unit 320 and a main body display unit 310 are connected to the main body control circuit 302.

[0090] The main memory 303 includes a ROM (read only memory), a RAM (random access memory), and a hard disk. The main memory 303 stores a measurement processing program and a tracking processing program, which will be described later, together with a system program. The main memory 303 is also used for processing various data and for storing various data, such as pixel data provided by the imaging head 100.

[0091] The main body control circuit 302 includes a CPU. In this embodiment, the main body control circuit 302 and the main body memory 303 are realized by a personal computer. The main body control circuit 302 generates image data based on pixel data provided from the imaging head 100 via the cable CA (FIGS. 1 and 2) and the communication circuit 301. The image data is a collection of multiple pixel data.

[0092] In this embodiment, reference image data, measurement image data, and overhead image data are generated corresponding to the reference camera 110, movable camera 120, and overhead camera 180, respectively, which are provided in the imaging head 100. In addition, image data is generated corresponding to the probe camera 208, which is provided in the probe 200 and will be described later. The main body control circuit 302 calculates the position of the contact portion 211a (FIGS. 1 and 2) of the probe 200 based on the reference image data and measurement image data.

[0093] The main body display unit 310 is configured, for example, with a liquid crystal display panel or an organic EL (electroluminescence) panel. The main body display unit 310 displays the coordinates of the measurement point on the measurement target S and the measurement results of each part of the measurement target S under the control of the main body control circuit 302. The main body display unit 310 also displays a setting screen for making various settings related to the measurement.

[0094] The main body operation unit 320 includes a keyboard and a pointing device. The pointing device includes a mouse, a joystick, etc. The main body operation unit 320 is operated by the user U.

[0095] [3] Configuration of Probe 200 (1) Basic configuration of Probe 200 Fig. 13 is a block diagram showing the basic configuration of the probe 200. As shown in Fig. 13, the probe 200 includes, as electrical components, a probe control unit 201, an indicator lamp 202, a battery 203, a marker driving circuit 204, a probe memory 205, a wireless communication circuit 206, a motion sensor 207, a probe camera 208, a probe operation unit 221, and a plurality of target members 290 (three in this example).

[0096] As shown by a thick two-dot chain line in FIG. 13, the probe 200 has a holding section 210, a probe casing 220, and a gripping section 230 as a configuration for accommodating, supporting, or holding each of the above-mentioned components. The holding section 210 holds a plurality of target members 290. A stylus 211 as an indication section is connected to the holding section 210. The stylus 211 is attached to the holding section 210 in a predetermined positional relationship with respect to the plurality of target members 290. The stylus 211 is a rod-shaped member having the above-mentioned contact section 211a at its tip. In this embodiment, the stylus 211 having the contact section 211a that contacts the measurement point is provided as an indication section for indicating the measurement point, but the configuration may be such that the measurement point is indicated without contact. For example, the configuration may be such that the distance between the probe 200 and the measurement object S is calculated by interference measurement of laser light emitted to the measurement point. The probe casing 220 accommodates most of the holding part 210, as well as the probe control part 201, the indicator light 202, the marker driving circuit 204, the probe memory 205, the wireless communication circuit 206, and the motion sensor 207. The gripping part 230 has a built-in battery 203. The gripping part 230 is further provided with a probe operation part 221. The probe operation part 221 accepts operation input related to measurement by the user U. The probe operation part 221 includes a trigger switch and a plurality of push buttons. The details of the probe operation part 221 will be described later.

[0097] The battery 203 is a rechargeable storage battery, and supplies power to other components provided in the probe 200. More specifically, the battery 203 supplies power to at least the target member 290. The probe control unit 201 includes a CPU and a memory, or a microcomputer, and controls the indicator light 202, the marker driving circuit 204, and the probe camera 208. In addition, the probe control unit 201 performs various processes in response to an operation of the probe operation unit 221 by the user U.

[0098] The indicator light 202 includes, for example, one or more LEDs, and is provided so that its light-emitting portion is exposed to the outside of the probe casing 220. The indicator light 202 performs a light-emitting operation according to the state of the probe 200 under the control of the probe control unit 201.

[0099] Each of the three target members 290 basically has the same configuration as the reference member 190 in Figures 10(a) and (b). The marker driving circuit 204 is connected to the multiple target members 290 and drives the multiple light emitting elements included in each target member 290 under the control of the probe control unit 201.

[0100] The probe memory 205 includes a recording medium such as a non-volatile memory or a hard disk. The probe memory 205 is used to process or store various data. The motion sensor 207 includes a three-axis acceleration sensor and a three-axis gyro sensor, and detects the movement of the probe 200, for example, when the user U carries the probe 200 and moves. Specifically, the motion sensor 207 detects the movement direction, acceleration, attitude, etc. of the probe 200 when the probe 200 moves. The probe camera 208 is, for example, a CCD (charge-coupled device) camera.

[0101] In addition to the above-mentioned CPU and memory or microcomputer, the probe control unit 201 is also equipped with an A / D converter and a FIFO memory (not shown). As a result, in the probe control unit 201, a signal indicating the movement of the probe 200 detected by the motion sensor 207 is converted into data in a digital signal format (hereinafter referred to as movement data). The probe control unit 201 transmits the digital movement data to the imaging head 100 in Fig. 3 by wireless communication through the wireless communication circuit 206. In this case, the movement data is further transferred from the imaging head 100 to the processing device 300.

[0102] In addition, in the probe control unit 201, the light receiving signals output from each pixel of the probe camera 208 are converted into a plurality of pixel data in a digital signal format. The probe control unit 201 transmits the motion data and the plurality of pixel data in a digital format to the imaging head 100 in Fig. 3 by wireless communication through the wireless communication circuit 206. In this case, the pixel data is further transferred from the imaging head 100 to the processing device 300.

[0103] (2) External structure of the probe 200 14 is an external perspective view of the probe 200 seen in one direction, and FIG. 15 is an external perspective view of the probe 200 seen in another direction. In the following description, a structure consisting of a plurality of components housed in the probe casing 220 in FIG. 13 and the holding part 210 is referred to as a main body part 250 of the probe 200. As shown in FIG. 14 and FIG. 15, the main body part 250 is formed so as to extend in one direction, and has a front end part 251, a rear end part 252, a top surface part 253, a bottom surface part 254, a first side surface part 255, and an other side surface part 256. In the following description, in the probe 200, a direction parallel to the direction in which the front end part 251 and the rear end part 252 of the main body part 250 are arranged is referred to as a first direction dr1.

[0104] The front end 251 is provided with a plurality of attachment parts to which the stylus 211 can be attached. The attachment parts are configured to face in different directions. The user U can attach the stylus 211 to a desired one of the attachment parts. As a result, the stylus 211 is attached to the front end 251 in one of a plurality of attitudes corresponding to the respective attachment parts. In the example of FIG. 14 and FIG. 15, the stylus 211 is attached to the front end 251 so as to extend in the first direction dr1. The front end 251 is further provided with a probe camera 208.

[0105] As shown in FIG. 14, three target members 290 and a wireless communication circuit 206 are provided in this order on the upper surface 253 of the main body 250 so as to be lined up from the front end 251 to the rear end 252. Of the three target members 290 in this example, the target member 290 closest to the front end 251 has three markers eq. Each of the remaining two target members 290 has two markers eq. All of the marker surfaces of the target members 290 on which the markers eq are provided are provided on the upper surface 253 of the main body 250 and face the same direction. Each marker eq is a self-luminous marker that emits infrared light. The light emission timing of these multiple markers eq is synchronized with the imaging timing of the movable camera 120 of the imaging head 100.

[0106] As shown in FIG. 15, the bottom surface 254 of the main body 250 has a connection portion 254j for connecting the grip portion 230 formed in a portion slightly closer to the front end 251 than the rear end 252. In the main body 250, the top surface 253 on which the marker eq is provided and the bottom surface 254 on which the connection portion 254j is provided are located on opposite sides. Therefore, the connection portion 254j is provided on the opposite side to the marker surface on which the marker eq is provided. The grip portion 230 has a rod shape that can be held by the user U with one hand. When the user U carries the probe 200, the user U holds the grip portion 230. The gripping posture of the grip portion 230 is specified, for example, in a user's manual based on the ease of handling when the user U carries the probe 200. The grip portion 230 of this embodiment has a recessed shape on the stylus 211 side as shown in FIG. 14, and it is assumed that the user U holds the grip portion 230 by placing his or her fingers in the recess. Therefore, it can be said that the gripping posture when the user U grips the gripping part 230 is also determined by the shape of the gripping part 230. One end of the gripping part 230 is connected to the connection part 254j via a hinge 254h (FIG. 20) described later. In this state, the gripping part 230 is rotatable around a rotation axis RA that passes through the connection part 254j and is parallel to the first direction dr1. Since the rotation axis RA is along the marker surface on which the marker eq is provided, the gripping part 230 rotates around the rotation axis RA, and the position of the user U who grips the gripping part 230 according to the gripping posture is changed with respect to the marker surface. Since the gripping part 230 is connected to the connection part 254j, the rotation axis RA of the rotation with respect to the main body part 250 is determined, and therefore the gripping part 230 is rotatable around the rotation axis RA as a predetermined rotation axis.

[0107] In the examples of Figs. 14 and 15, the grip portion 230 extends from the connection portion 254j in a second direction dr2 intersecting with the first direction dr1. An operation surface 221a is provided on a portion of one end of the grip portion 230 facing the rear end portion 252 side as a part of the probe operation portion 221 of Fig. 13. The operation surface 221a includes a plurality of (four in this example) push buttons 221b, and is configured so that a user holding the grip portion 230 can operate the plurality of push buttons 221b with, for example, a thumb. In addition, a trigger switch 221c is provided on a portion of one end of the grip portion 230 facing the front end portion 251 side as a part of the probe operation portion 221 of Fig. 13. A user holding the grip portion 230 can operate the trigger switch 221c with, for example, an index finger. In this way, the gripping portion 230 is provided with the push button 221b and the trigger switch 221c on the operation surface 221a based on an expected gripping posture by the user U. In other words, the gripping posture when the user U grips the gripping portion 230 is also determined by the arrangement of the probe operation portion 221.

[0108] The other end of the gripping part 230 is provided with a connector for charging the battery 203. When charging the battery 203, a power cable EC is connected to the connector of the gripping part 230 from outside the probe 200. When charging of the battery 203 is completed, the power cable EC is pulled out from the connector of the gripping part 230. The power cable EC may be a cable that enables communication between the probe 200 and the processing device 300. Also, a connector may be provided separately from the connector to which the power cable EC is connected, and a cable that enables communication between the probe 200 and the processing device 300 may be connected to the connector. For example, a USB connector may be provided separately from the connector to which the power cable EC is connected. In this way, even when a connector is provided separately from the connector to which the power cable EC is connected, it is preferable that the connector is provided on the gripping part 230. When the user U carries the probe 200, the cable is located at the user U's hand, so that the cable is less likely to interfere with imaging of the marker eq.

[0109] Here, the hinge 254h (FIG. 20) used for connecting the connection part 254j and the grip part 230 has a so-called click mechanism. Thereby, when the rotation angle of the grip part 230 around the rotation axis RA is at any of a plurality of predetermined rotation angles, a holding force for holding the grip part 230 at that rotation angle is generated in the hinge 254h. Therefore, when the rotation angle of the grip part 230 around the rotation axis RA is at any of a plurality of predetermined rotation angles, the user U can perform stable measurement of the measurement target S while holding the grip part 230. In this embodiment, the hinge 254h has a click mechanism, but does not prevent the grip part 230 from being held at a rotation angle other than the plurality of predetermined rotation angles. Thereby, the user U can carry the probe 200 in a state in which the grip part 230 is rotated so that the grip part 230 is held at a suitable position within the rotation angle range of the grip part 230.

[0110] In this embodiment, a first rotation angle and a second rotation angle are set as part of a plurality of predetermined rotation angles. In this case, the gripper 230 can transition between a first state in which the rotation angle of the gripper 230 is at the first rotation angle and a second state in which the rotation angle of the gripper 230 is at the second rotation angle. The state of the gripper 230 shown in FIG. 14 and FIG. 15 is defined as the first state. Note that in this embodiment, the rotation angle indicates the rotation position of the gripper 230 relative to an arbitrary reference rotation position around the rotation axis RA. That is, the state in which the rotation angle of the gripper 230 is at the first rotation angle indicates a state in which the gripper 230 has rotated by the first angle relative to an arbitrary reference rotation position.

[0111] Fig. 16 is an external perspective view of the probe 200 with the gripping portion 230 in the second state seen in one direction, and Fig. 17 is an external perspective view of the probe 200 with the gripping portion 230 in the second state seen in the other direction. The rotation angle (second rotation angle) of the gripping portion 230 shown in Figs. 16 and 17 is different by about 90° from the rotation angle (first rotation angle) of the gripping portion 230 shown in Figs. 14 and 15. As shown in Figs. 16 and 17, the gripping portion 230 in the second state extends from the connecting portion 254j (Figs. 14 and 15) in a third direction dr3 different from the second direction dr2.

[0112] In this embodiment, in addition to the above-mentioned first and second rotation angles, a third rotation angle that is different from the first rotation angle by about -90° is also set as part of the plurality of predetermined rotation angles. In this case, by setting the rotation angle of gripper 230 to the third rotation angle, the state of gripper 230 can be set to a third state different from the first and second states.

[0113] In the state shown in Fig. 15, the multiple push buttons 221b are arranged such that the substantially rectangular push button 221b is located near the main body 250 in the second direction dr2, and the substantially triangular push button 221b having a side substantially parallel to the long side of the substantially rectangular push button 221b is located far from the main body 250 in the second direction dr2. In contrast, in the state shown in Fig. 17, the multiple push buttons 221b are arranged such that the substantially rectangular push button 221b is located near the main body 250 in the second direction dr2, and the substantially triangular push button 221b having a side substantially parallel to the short side of the substantially rectangular push button 221b is located. Therefore, the arrangement of the multiple push buttons 221b with respect to the main body 250 changes before and after the grip 230 rotates from the first rotation angle shown in Fig. 15 to the second rotation angle shown in Fig. 17.

[0114] In the above embodiment, the operation surface 221a of the probe operation unit 221 is provided with a plurality of push buttons 221b, but the present invention is not limited to this. The operation surface 221a may be provided with a display screen capable of displaying a plurality of graphical interfaces and receiving user operations on the graphical user interfaces. In this case, the plurality of graphical user interfaces displayed on the display screen correspond to a plurality of push buttons. Even in this configuration, if the arrangement relationship of the plurality of graphical user interfaces with respect to the operation surface 221a is the same before and after the rotation of the grip unit 230, the arrangement relationship of the plurality of graphical user interfaces with respect to the main body unit 250 changes before and after the rotation of the grip unit 230.

[0115] The user U holds the grip portion 230 so that the top surface 253 of the main body 250 faces the imaging head 100. Then, the user U operates the probe operation portion 221 while bringing the contact portion 211a into contact with a desired portion of the measurement target S.

[0116] 18 is a schematic diagram showing a state in which the user U measures the measurement target S using the probe 200 with the gripping portion 230 in the first state, and FIG. 19 is a schematic diagram showing a state in which the user U measures the measurement target S using the probe 200 with the gripping portion 230 in the second state. As shown in FIG. 14 and FIG. 15, the second direction dr2 along which the gripping portion 230 is aligned in the first state is a direction intersecting with the upper surface portion 253 of the main body portion 250 on which the marker surface is provided. Therefore, as shown in FIG. 18, when the user U grips the gripping portion 230 at the first rotation angle according to a specified gripping posture, the user U can point multiple marker surfaces toward the movable camera 120 located in a direction directly facing the user. 16 and 17, the third direction dr3 along which the gripping part 230 is aligned at a second rotation angle different from the first rotation angle is a direction along the upper surface 253 of the main body 250 on which the marker surface is provided, and is a direction intersecting the first direction dr1. Therefore, as shown in FIG. 19, when the user U grasps the gripping part 230 at the second rotation angle according to a specified gripping posture, the user U can direct the multiple marker surfaces toward the movable camera 120 located to the side of the user U. Therefore, when the user U grasps the gripping part 230 according to the specified gripping posture, the direction in which the marker surface faces in the first state is different from the direction in which the marker surface faces in the second state as viewed from the user U. From the above, even when the user U grips the grip portion 230 according to a prescribed gripping posture, the multiple markers eq are arranged in different orientations when the grip portion 230 is in the first state and when the grip portion 230 is in the second state. Therefore, by switching the grip portion 230 between the first state and the second state, the user U can change the relative position and posture with respect to the measurement object S and the imaging head 100 having the movable camera 120 while pointing the upper surface portion 253 of the main body portion 250 toward the imaging head 100 having the movable camera 120.

[0117] 14 to 17, a first display unit 202a constituting the indicator light 202 of Fig. 13 is provided on one side surface portion 255 of the main body portion 250 between the front end portion 251 in the first direction dr1 and the connecting portion 254j. Also, a second display unit 202b constituting the indicator light 202 of Fig. 13 is provided on the other side surface portion 256 of the main body portion 250 between the front end portion 251 in the first direction dr1 and the connecting portion 254j.

[0118] Each of the first display unit 202a and the second display unit 202b includes a plurality of green LEDs and a plurality of red LEDs. When the plurality of markers eq provided on the upper surface portion 253 of the probe 200 are present within the imaging field of the movable camera 120 (FIG. 3), the first display unit 202a and the second display unit 202b emit green light. On the other hand, when the plurality of markers eq are not present within the imaging field of the movable camera 120, the first display unit 202a and the second display unit 202b emit red light.

[0119] In the main body 250, the first display unit 202a and the second display unit 202b are located between the grip unit 230 and the stylus 211. This allows the user U to indicate a measurement point by contacting the contact unit 211a with a desired portion of the measurement target S while viewing the first display unit 202a and the second display unit 202b.

[0120] Moreover, the one side surface portion 255 on which the first display unit 202a is provided and the other side surface portion 256 on which the second display unit 202b is provided are surfaces of the main body portion 250 facing in opposite directions. Since the direction in which the first display unit 202a faces is different from the direction in which the second display unit 202b faces, the angle range in which the user U can view these display units is different. Therefore, even if it is difficult for the user U to view the first display unit 202a when operating the probe 200, the user U can easily know whether or not the multiple markers eq are present within the imaging field of the movable camera 120 if he / she can view the second display unit 202b. Also, even if it is difficult for the user U to view the second display unit 202b when operating the probe 200, the user U can easily know whether or not the multiple markers eq are present within the imaging field of the holding unit 210 if he / she can view the first display unit 202a. Therefore, the operability of the probe 200 when specifying a measurement point is improved.

[0121] (3) Internal structure of main body 250 of probe 200 Fig. 20 is a partially cutaway cross-sectional view of the probe 200 showing the internal structure of the main body 250. Fig. 21 is an exploded perspective view of the probe 200 for illustrating an outline of the internal structure of the main body 250.

[0122] As shown in Fig. 20, the holder 210 is mainly composed of a stylus attachment portion 210a and a target member holder 210b. A plurality of attachment portions to which the above-mentioned stylus 211 can be attached are provided on the stylus attachment portion 210a. The target member holder 210b holds a plurality of target members 290. The stylus attachment portion 210a and the target member holder 210b are connected so that their positional relationship does not change. As a result, when the stylus 211 is attached to the stylus attachment portion 210a, the positional relationship between the contact portion 211a of the stylus 211 and the plurality of target members 290 is fixed to a predetermined positional relationship.

[0123] On the other hand, the probe casing 220 is mainly composed of an upper casing 220a and a lower casing 220b. As shown in Fig. 21, when the probe 200 is assembled, the upper casing 220a and the lower casing 220b are arranged to sandwich the holding portion 210 and the multiple rubber bushes rb therebetween.

[0124] Here, as shown in FIG. 20, an opening 299 is formed in the upper casing 220a at a position corresponding to the target member 290. A light-transmitting member that does not prevent the movable camera 120 from capturing an image of the target member 290 may be disposed in the opening 299. With this configuration, the target member 290 is not exposed to the outside of the upper casing 220a, so that the possibility of the target member 290 being contaminated is reduced. In addition, although the present embodiment is configured such that the opening 299 is formed at a position corresponding to the target member 290, the upper casing 220a itself may be configured of a light-transmitting member that does not prevent the movable camera 120 from capturing an image of the target member 290. Note that the opening 299 is not shown in FIG. 21.

[0125] Here, the upper casing 220a is formed with three through holes h1 into which the shafts of the three screws sc can be inserted. Also, the target member holding portion 210b of the holding portion 210 is formed with three through holes h2 corresponding to the three through holes h1 of the upper casing 220a, respectively. Furthermore, the lower casing 220b has a support portion that supports the target member holding portion 210b. The support portion is formed with three through holes h3 (FIG. 20) corresponding to the three through holes h1 of the upper casing 220a and the three through holes h2 of the target member holding portion 210b, respectively.

[0126] The upper casing 220a and the lower casing 220b are connected to each other using three screws sc. The state of one of the three connection parts connected to each other using the three screws sc is shown in a balloon in FIG.

[0127] As shown in more detail in the speech bubble of Fig. 20, in each connection, a collar ca made of metal, for example, is inserted into the through hole h2 of the target member holding part 210b. A screw sc is inserted through the through hole h1 of the upper casing 220a, the collar ca, and the through hole h3 of the lower casing 220b, and a nut nt is attached to the tip of the screw sc. A washer wa is placed between the top surface of the upper casing 220a and the head of the screw sc, and a washer wa is placed between the support part of the lower casing 220b and the nut nt.

[0128] Furthermore, a flexible rubber bushing rb is disposed between the upper casing 220a and the target member holding portion 210b. Furthermore, a flexible rubber bushing rb is disposed between the target member holding portion 210b and the lower casing 220b.

[0129] With this configuration, the holding portion 210 is held by the multiple rubber bushes rb so as to be movable within the probe casing 220. That is, the holding portion 210 is held in a floating state inside the probe casing 220. Specifically, the holding portion 210 is held so as to be movable by about 3 mm relative to the probe casing 220 in the up-down direction of the main body portion 250 (the direction in which the top surface portion 253 and the bottom surface portion 254 are aligned). In addition, the holding portion 210 is held so as to be movable by about 3 mm relative to the probe casing 220 in the left-right direction of the main body portion 250 (the direction in which the one side surface portion 255 and the other side surface portion 256 are aligned).

[0130] In this case, for example, even if a load toward the measurement object S is applied to the gripping part 230 with the contact part 211a of the stylus 211 in contact with the measurement object S, the multiple rubber bushes rb function as a buffer member. This suppresses deformation of the holding part 210, and suppresses a decrease in measurement accuracy caused by a shift in the positional relationship between the stylus 211 and the multiple target members 290.

[0131] Furthermore, according to the above configuration, even if the probe casing 220 is subjected to an impact due to a drop or collision of the probe 200, the impact transmitted from the probe casing 220 to the holding part 210 is mitigated by the multiple rubber bushes rb. This prevents the holding part 210 from being damaged.

[0132] In this embodiment, the first direction dr1 in the probe 200 is defined as a direction parallel to the direction in which the front end 251 and the rear end 252 of the main body 250 are arranged. Meanwhile, as described above, the holding part 210 is held in the probe casing 220 via a plurality of rubber bushes rb. Therefore, when a relative load is applied between the holding part 210 and the probe casing 220, such as when the stylus 211 is brought into contact with the measurement target S, the positional relationship between the front end 251 and the rear end 252 of the main body 250 changes. Therefore, in this embodiment, the first direction dr1 is defined in a state in which no relative load is applied between the holding part 210 and the probe casing 220 and the probe 200 is in a predetermined posture.

[0133] 20 shows a cross section of the connection portion between the main body 250 and the grip portion 230, in addition to the cross section of the main body 250. As shown in Fig. 20, the main body 250 and the connection portion 254j are rotatably connected by a hinge 254h. The hinge 254h in this example includes a hollow member hi1 that guides cables or the like between the internal space of the grip portion 230 and the internal space of the main body 250, and an axis member hi2 that supports the grip portion 230 with respect to the connection portion 254j.

[0134] [4] How to calculate the coordinates of measurement points In the three-dimensional coordinate measuring device 1 according to this embodiment, a three-dimensional coordinate system (hereinafter referred to as the device coordinate system) having a predetermined relationship with respect to the reference camera 110 is defined in advance. In addition, the main memory 303 of the processing device 300 stores in advance the relative positional relationship of a plurality of markers ep on the reference member 190.

[0135] As described above, the reference camera 110 captures images of the multiple markers ep of the reference member 190. In this case, the main body control circuit 302 in Fig. 3 calculates the coordinates of each marker ep in the device coordinate system based on the reference image data obtained by capturing images and the positional relationship of the multiple markers ep stored in the main body memory 303. At this time, each of the multiple markers ep of the reference member 190 is identified based on the first and second markers ep1 and ep2.

[0136] Thereafter, the main body control circuit 302 generates information indicating the position and orientation of the movable camera 120 fixed on the reference member 190 in the device coordinate system based on the calculated coordinates of the multiple markers ep as first position and orientation information.

[0137] In the three-dimensional coordinate measuring device 1 according to this embodiment, in addition to the above-mentioned device coordinate system, a three-dimensional coordinate system (hereinafter referred to as a movable coordinate system) having a predetermined relationship with respect to the movable camera 120 is defined in advance. Furthermore, the main memory 303 of the processing device 300 stores in advance the relative positional relationship of the multiple markers eq on the probe 200.

[0138] As described above, the movable camera 120 captures images of the multiple markers eq of the probe 200. In this case, the main body control circuit 302 in Fig. 3 calculates the coordinates of each marker eq in the movable coordinate system based on the measurement image data obtained by imaging and the positional relationship of the multiple markers eq stored in the main body memory 303.

[0139] Thereafter, the main body control circuit 302 generates information indicating the position and orientation of the probe 200 in the movable coordinate system as second position and orientation information, based on the calculated coordinates of the multiple markers eq.

[0140] The reference camera 110 is fixed on the head bottom 101. Therefore, the device coordinate system does not change when measuring the measurement target S. On the other hand, the movable camera 120 is rotatably provided so that the imaging field of view follows the movement of the probe 200. Therefore, the relationship between the device coordinate system and the movable coordinate system changes with the rotation of the movable camera 120.

[0141] Therefore, in this embodiment, the main body control circuit 302 generates third position and orientation information that expresses the position and orientation of the probe 200 in the device coordinate system based on the first and second position and orientation information. That is, the main body control circuit 302 calculates the relative relationship of the movable coordinate system to the device coordinate system based on the first position and orientation information, and converts the second position and orientation information into information that conforms to the device coordinate system based on the calculated relationship. This generates the third position and orientation information.

[0142] Thereafter, the main body control circuit 302 calculates the coordinates of the measurement point indicated by the probe 200 based on the generated third position and orientation information and the positional relationship between the multiple markers eq on the probe 200 and the contact portion 211a.

[0143] [5] Measurement example 13 is pressed by a user U to calculate the coordinates of a measurement point. For example, the user U operates any of the multiple push buttons 221b and the trigger switch 221c of the probe operation unit 221 with the contact unit 211a in contact with a desired portion of the measurement target S. In this case, the coordinates of the contact portion of the measurement target S with the contact unit 211a are calculated as the coordinates of the measurement point. The calculated coordinates of the measurement point are stored in the main body memory 303 as a measurement result, and are also displayed on the main body display unit 310.

[0144] In the three-dimensional coordinate measuring device 1, a user U can set desired measurement conditions for the measurement object S by operating the main body operation unit 320 of FIG. 3 or the probe operation unit 221 of FIG.

[0145] Specifically, the user U selects geometric elements and measurement items for the measurement object S. The geometric elements are types of geometric shapes that indicate the shape of the part to be measured on the measurement object S. The types of geometric shapes include points, lines, planes, circles, cylinders, spheres, etc. Furthermore, the measurement items indicate what should be measured on the measurement object S, and include various physical quantities such as distance, angle, and flatness.

[0146] After selecting the geometric element and the measurement item, the user U specifies one or more measurement points for the selected geometric element using the probe 200. This generates information (hereinafter referred to as element-specific information) that indicates the selected geometric element, which is specified by one or more measurement points on the measurement target S, in the device coordinate system. Then, the value of the selected measurement item is calculated with respect to the generated element-specific information.

[0147] For example, if the user U wants to measure the distance between a first surface and a second surface of a measurement object S having parallel and opposite surfaces, the user selects the geometric elements "Plane 1" and "Plane 2." The user U also selects the measurement item "distance."

[0148] In this case, in order to identify a plane (first surface) on the measurement object S that corresponds to the geometric element "Plane 1", the user U uses the probe 200 to specify multiple (three or more points in this example) portions of the first surface of the measurement object S as measurement points. This generates element identification information that corresponds to the geometric element "Plane 1".

[0149] Furthermore, in order to identify a plane (second surface) on the measurement object S that corresponds to the geometric element "plane 2", the user U uses the probe 200 to specify multiple (three or more points in this example) portions of the second surface of the measurement object S as measurement points. This generates element identification information that corresponds to the geometric element "plane 2".

[0150] Then, based on two pieces of element identification information corresponding to the geometric elements "Plane 1" and "Plane 2", respectively, the distance between the first and second surfaces of the measurement target S corresponding to the measurement item "distance" is calculated. The calculated measurement result is stored in the main body memory 303 and is displayed on the main body display unit 310.

[0151] [6] Measurement processing Fig. 22 is a flow chart showing the flow of measurement processing by the main body control circuit 302 of Fig. 3. The measurement processing of Fig. 22 is repeatedly performed at a predetermined cycle by the CPU of the main body control circuit 302 of Fig. 3 executing a measurement processing program stored in the main body memory 303. In addition, at the start of the measurement processing, a timer built into the main body control circuit 302 is reset and started.

[0152] First, the main body control circuit 302 judges whether or not a geometric element and a measurement item have been selected based on the presence or absence of an operation of the main body operation unit 320 of FIG. 3 by the user U (step S11).

[0153] When the geometric elements and measurement items are selected, the main body control circuit 302 sets the geometric elements and measurement items as measurement conditions by storing the selected geometric elements and measurement items in the main body memory 303 of Fig. 3 (step S12). After that, the main body control circuit 302 returns to the processing of step S11.

[0154] If no selection of a geometric element and a measurement item is performed in step S11, the main body control circuit 302 judges whether or not a geometric element and a measurement item are set (step S13). If the geometric element and the measurement item are set, the main body control circuit 302 judges whether or not a command to start measuring the measurement target S has been received (step S14). This judgment is performed based on, for example, whether or not the user U has operated the main body operation unit 320.

[0155] When a command to start measuring the measurement target S is received, the main body control circuit 302 performs a measurement point coordinate calculation process (step S15). The measurement point coordinate calculation process will be described in detail later. Through this process, the main body control circuit 302 calculates the coordinates of the measurement point for identifying the selected geometric element based on the operation of the probe 200 by the user.

[0156] Furthermore, the main body control circuit 302 stores the coordinates of one or more measurement points calculated by the measurement point coordinate calculation process in step S15 in the main body memory 303 (step S16).

[0157] Next, the main body control circuit 302 judges whether or not a command to end the measurement of the measurement target S has been received (step S17). This judgment is made based on the presence or absence of an operation of the main body operation unit 320 by the user U, for example.

[0158] If the measurement end command is not received, the main body control circuit 302 returns to the process of step S15 above. On the other hand, if the measurement end command is received, the main body control circuit 302 generates element identification information for the geometric element set from the coordinates of one or more measurement points stored in the main body memory 303 in the process of the previous step S16 (step S18).

[0159] Thereafter, the main body control circuit 302 calculates the values ​​of the measurement items set based on the element identification information generated in the process of step S18 (step S19), and ends the measurement process. Note that, when a plurality of geometric elements (e.g., two planes, etc.) are set at the time of judgment in step S13, the processes of steps S14 to S18 are performed for each of the set geometric elements.

[0160] If no geometric elements and measurement items are set in step S13 and if no command to start measuring the object S to be measured is received in step S14, the main control circuit 302 determines whether or not a predetermined time has elapsed since the measurement process was started, based on the time measured by the built-in timer (step S20).

[0161] If the predetermined time has not elapsed, the main body control circuit 302 returns to the process of step S11. On the other hand, if the predetermined time has elapsed, the main body control circuit 302 performs a measurement point coordinate calculation process (step S21) to be described later, similar to the process of step S15. After that, the main body control circuit 302 ends the measurement process.

[0162] The process of step S21 is performed, for example, to determine whether or not the probe 200 is within the imaging field of the movable camera 120 or the overhead camera 180 in a tracking process described later.

[0163] 23 is a flowchart showing the flow of the measurement point coordinate calculation process. First, the main body control circuit 302 commands the probe control unit 201 of the probe 200 to emit light of a plurality of markers eq (FIG. 14), and commands the head control circuit 150 of the imaging head 100 to emit light of a plurality of markers ep (FIG. 10(b)) of the reference member 190 (step S101).

[0164] Next, the main body control circuit 302 generates reference image data by causing the head control circuit 150 to capture images of the multiple markers ep of the reference member 190 using the reference camera 110 (step S102). Furthermore, the main body control circuit 302 generates first position and orientation information indicating the position and orientation of the movable camera 120 in the device coordinate system based on the generated reference image data (step S103).

[0165] Next, the main body control circuit 302 generates measurement image data by capturing images of the multiple markers eq of the probe 200 using the movable camera 120 (step S104). In addition, the main body control circuit 302 generates second position and orientation information indicating the position and orientation of the probe 200 in a movable coordinate system based on the generated measurement image data (step S105).

[0166] Thereafter, the main body control circuit 302 generates third position and orientation information expressing the position and orientation of the probe 200 in the device coordinate system based on the first and second position and orientation information (step S106). Also, the main body control circuit 302 calculates the coordinates of the measurement point indicated by the probe 200 based on the generated third position and orientation information.

[0167] The processes of steps S102 and S103 and the processes of steps S104 and S105 may be performed in the reverse order.

[0168] According to the above measurement process, a user U can easily measure a desired physical quantity in the measurement object S by selecting a desired geometric element and measurement item from a predetermined number of geometric elements and a predetermined number of measurement items.

[0169] [7] Tracking process Fig. 24 is a flowchart showing the flow of tracking processing by the main body control circuit 302 of Fig. 3. The tracking processing of Fig. 24 is repeatedly performed at a predetermined cycle by the CPU of the main body control circuit 302 of Fig. 3 executing a tracking processing program stored in the main body memory 303.

[0170] First, the main body control circuit 302 judges whether or not the probe 200 is within the imaging field of the movable camera 120 (step S31). This judgment is made by judging whether or not the measurement image data generated during the processing of steps S15 and S21 in the measurement process includes image data corresponding to a plurality of markers eq.

[0171] If the probe 200 is within the imaging field of the movable camera 120, the main body control circuit 302 proceeds to the process of step S36 described below. On the other hand, if the probe 200 is not within the imaging field of the movable camera 120, the main body control circuit 302 judges whether or not the probe 200 is within the imaging field of the overhead camera 180 (step S32). This judgment is made by judging whether or not the overhead image data generated during the processing of steps S15 and S21 in the above measurement processing includes image data corresponding to a plurality of markers eq.

[0172] If the probe 200 is within the imaging field of the overhead camera 180, the main body control circuit 302 proceeds to the process of step S35 described below. On the other hand, if the probe 200 is not within the imaging field of the movable camera 120, the main body control circuit 302 determines whether or not it is possible to estimate the coordinates of the probe 200 based on the motion data transferred from the probe 200 (step S33). This determination is made based on, for example, whether or not the motion data indicates an abnormal value or whether or not the value indicated by the motion data is 0. If the motion data indicates an abnormal value or if the motion data is 0, it is impossible to estimate the coordinates of the probe 200.

[0173] If it is not possible to estimate the coordinates of the probe 200, the main body control circuit 302 returns to the process of step S31. On the other hand, if it is possible to estimate the coordinates of the probe 200, the main body control circuit 302 estimates the position of the probe 200 based on the movement data. The main body control circuit 302 also commands the adjustment of the position and attitude of the movable camera 120 so that the probe 200 is located within the imaging field of the movable camera 120 (step S34). Thereafter, the main body control circuit 302 returns to the process of step S31.

[0174] In step S32, if the probe 200 is within the imaging field of the overhead camera 180, the main body control circuit 302 calculates the position of the probe 200 based on the overhead image data. The main body control circuit 302 also instructs the head control circuit 150 to adjust the position and attitude of the movable camera 120 so that the probe 200 is located within the imaging field of the movable camera 120 (step S35).

[0175] Next, when the probe 200 is positioned within the imaging field of the movable camera 120, the main body control circuit 302 instructs the head control circuit 150 to adjust the position and attitude of the movable camera 120 so that the center of gravity of the multiple markers eq of the probe 200 is positioned at the center of the imaging field of the movable camera 120 (step S36). Thereafter, the main body control circuit 302 ends the tracking process.

[0176] According to the above tracking process, even when the probe 200 moves, the imaging field of view of the movable camera 120 tracks the multiple markers eq of the probe 200. This eliminates the need for the user U to manually adjust the imaging field of view of the movable camera 120. This makes it possible to measure the coordinates of a desired measurement point of the measurement target S over a wide range without requiring any complicated adjustment work.

[0177] [8] Effects (1) In order to obtain the coordinates of a desired measurement point on the measurement target S, when the measurement point is specified, the multiple markers eq of the probe 200 need to be located within the field of view of the movable camera 120 and facing the movable camera 120. Here, the state of the position and attitude of the main body 250 of the probe 200 when the multiple markers eq are located within the field of view of the movable camera 120 and facing the movable camera 120 is referred to as a measurable state.

[0178] According to the above-mentioned probe 200, even if it is difficult to put the main body 250 into a measurable state using the probe 200 with the gripping portion 230 in one state (e.g., the first state), the user U can transition the gripping portion 230 to another state (e.g., the second or third state). This allows the user U to easily put the main body 250 into a measurable state. This makes it easier to operate the operation unit provided in the gripping portion, and makes it possible to appropriately specify the measurement point. As a result, it becomes possible to measure physical quantities over a wide range of the measurement target S without requiring the user U to be skilled.

[0179] (2) In the above-described probe 200, the battery 203 is built into the grip portion 230. The battery 203 has a relatively large weight among the multiple components constituting the probe 200. As a result, when the battery 203 is housed in the grip portion 230, the center of gravity of the entire probe 200 is located at or near the grip portion 230. As a result, the user can stably operate the probe 200 by gripping the grip portion 230.

[0180] [9] Example of use of Probe Camera 208 By capturing an image of the measurement target S with the probe camera 208 in Fig. 13, the image of the measurement target S can be displayed on the main body display unit 310 in Fig. 3. Hereinafter, the image obtained by the probe camera 208 will be referred to as a captured image.

[0181] The positional relationship between the multiple markers eq of the probe 200 and the probe camera 208, and the characteristics of the probe camera 208 (angle of view, distortion, etc.) are stored in advance as imaging information in, for example, the main body memory 303 of Fig. 3. Therefore, when the multiple markers eq are within the imaging field of view of the movable camera 120, the area imaged by the probe camera 208 is recognized by the main body control circuit 302 of Fig. 3. That is, the three-dimensional space corresponding to the captured image is recognized by the main body control circuit 302. In this case, while displaying the captured image on the main body display unit 310, the geometric elements and measurement items set when measuring the measurement target S can be superimposed and displayed.

[0182]

[10] Other embodiments (1) In the imaging head 100 according to the above embodiment, a plurality of heat-generating substrates GS are housed in the substrate casing 93, but some of the plurality of heat-generating substrates GS may be housed in the lower casing 91. Furthermore, in addition to the plurality of heat-generating substrates GS, the substrate casing 93 may house another substrate having lower heat generation than the heat-generating substrates GS.

[0183] (2) In the imaging head 100 according to the above embodiment, the overhead camera 180 is provided in the lower casing 91, but the present invention is not limited to this. The overhead camera 180 may be housed in the upper casing 92. In this case, the overhead camera 180 is attached to the support member 30, for example.

[0184] (3) In the probe 200 according to the above embodiment, the gripping portion 230 is arranged to extend from the connection portion 254j in a direction intersecting the first direction dr1 and to be rotatable around the rotation axis RA, but the present invention is not limited to this.

[0185] Fig. 25 is an external perspective view of a probe 200 according to another embodiment. The differences between the probe 200 in Fig. 25 and the probe 200 according to the above embodiment will be described. In this probe 200, a connection portion 254j is formed so as to extend a certain length from a bottom surface portion 254 in a direction perpendicular to the first direction dr1. A rod-shaped grip portion 230x is attached to the tip of the connection portion 254j so as to extend parallel to the first direction dr1 toward the rear end portion 252 of the main body portion 250.

[0186] One end of the gripping portion 230x is connected to a connection portion 254j so as to be rotatable around a rotation axis RA parallel or approximately parallel to the first direction dr1, as shown by a thick dashed double-dashed arrow in Fig. 25. An operation surface 221a of the probe operation portion 221 is provided at the other end of the gripping portion 230x so as to be perpendicular or approximately perpendicular to the rotation axis RA. A plurality of push buttons 221b are provided in a predetermined arrangement on the operation surface 221a.

[0187] A trigger switch 221c is provided on a portion of the outer circumferential surface of the gripping portion 230x that is located near the other end. This allows the user U to indicate a measurement point using the probe 200 by gripping the gripping portion 230x with the thumb and index finger located near the probe operation portion 221 and the little finger located near the connection portion 254j.

[0188] As described above, the grip portion 230x is rotatable around the rotation axis RA. In this case, even if the grip portion 230x rotates around the rotation axis RA, the position of the grip portion 230x in the probe 200 does not change. However, the relationship of the arrangement of the multiple push buttons 221b and the trigger switches 221c to the main body 250 changes before and after the rotation of the grip portion 230x.

[0189] Fig. 26 is an external perspective view of the probe 200 when the gripping portion 230x is rotated 90° from the state of the probe 200 in Fig. 25. In the example of Fig. 26, the arrangement of the multiple push buttons 221b on the main body 250 and the arrangement of the multiple push buttons 221b and the trigger switch 221c are different from those in the example of Fig. 25. This allows the user U to easily specify a measurement point on the measurement target S while ensuring operability of the probe operation portion 221 by rotating the gripping portion 230x as necessary.

[0190]

[11] Correspondence between each component of the claims and each part of the embodiment Below, examples of correspondence between each component of the claims and each part of the embodiment will be described, but the present invention is not limited to the following examples.

[0191] In the above embodiment, the three-dimensional coordinate measuring device 1 is an example of a three-dimensional coordinate measuring device, the probe 200 is an example of a probe, the multiple markers eq of the probe 200 are an example of multiple measurement markers, the main body 250 is an example of a main body, the contact portion 211a is an example of a contact portion, the stylus 211 is an example of an indication portion and a stylus, the gripping portion 230 is an example of a gripping portion, and the probe operating portion 221 is an example of an operating portion.

[0192] In addition, rotation axis RA is an example of a rotation axis, connection portion 254j is an example of a connection portion, battery 203 is an example of a battery, indicator light 202 is an example of a notification display portion, first display portion 202a is an example of a first display portion, second display portion 202b is an example of a second display portion, multiple push buttons 221b are an example of multiple buttons, the state of grip portion 230 shown in FIG. 25 is an example of a first arrangement state, the state of grip portion 230 shown in FIG. 26 is an example of a second arrangement state, movable camera 120 is an example of an imaging portion, and main body control circuit 302 is an example of a calculation portion and a measurement portion.

[0193] As each component of a claim, various other elements having the configuration or function described in the claim may be used.

[12] Reference form (1) A probe for a three-dimensional coordinate measuring device in a first reference form is used in a three-dimensional coordinate measuring device that calculates the coordinates of a measurement point on a measurement object based on a plurality of measurement markers imaged by an imaging unit, and is configured to be carried by a user to indicate the measurement point. The probe comprises a main body having a plurality of measurement markers arranged so that they can be imaged from a predetermined direction, an indication unit attached to the main body at a predetermined position relative to the plurality of measurement markers and for indicating the measurement point, a gripping portion configured to be held by a user and in which a gripping posture by the user is specified, and a connection portion that connects the gripping portion to the main body so that it can be rotated around a predetermined rotation axis, and when the gripping portion is held by the user in accordance with the specified gripping posture by rotating the gripping portion around the rotation axis via the connection portion, the plurality of measurement markers are arranged in different orientations. In the above three-dimensional coordinate measuring device, a measurement point is indicated by an indication unit of the probe. At this time, a plurality of measurement markers of the main body are imaged. The coordinates of the indicated measurement point are calculated based on image data obtained by imaging and the positional relationship between the plurality of measurement markers and the indication unit. Therefore, in order to obtain the coordinates of a desired measurement point on a measurement object, when the measurement point is indicated, the plurality of measurement markers need to be located within the field of view of the imaging unit and be directed toward the imaging unit. In the above probe, the grip portion rotates around a rotation axis at the connection portion. When the grip portion is gripped by a user in a specified gripping position, the multiple measurement markers are arranged in different directions when the grip portion rotates. This makes it possible to measure physical quantities over a wide range of the measurement object without requiring the user to be skilled. (2) A probe for a three-dimensional coordinate measuring device in a second reference form is used in a three-dimensional coordinate measuring device that calculates the coordinates of a measurement point on a measurement object based on a plurality of measurement markers imaged by an imaging unit, and is configured to be carried by a user to indicate a measurement point. The probe has a main body having a plurality of measurement markers, a contact unit that indicates a measurement point by contacting the measurement object, and is equipped with a stylus attached to a predetermined position on the main body with respect to the plurality of measurement markers, a holding unit configured to be held by a user, and an operation unit provided on the holding unit and configured to be operable by the user holding the holding unit, and the holding unit is connected to the main body so as to be rotatable around a predetermined rotation axis. In the above three-dimensional coordinate measuring device, a measurement point is specified by contacting a contact portion of the probe with an arbitrary portion of the measurement object. At this time, a plurality of measurement markers on the main body are imaged. The coordinates of the specified measurement point are calculated based on image data obtained by imaging and the positional relationship between the plurality of measurement markers and the contact portion. Therefore, in order to obtain the coordinates of a desired measurement point on the measurement object, it is necessary that the plurality of measurement markers are located within the field of view of the imaging unit and are facing the imaging unit when the measurement point is specified. Here, the state of the position and posture of the main body when the multiple measurement markers are located within the field of view of the imaging unit and facing the imaging unit is called a measurable state. In the above probe, even if it is difficult for the user to set the main body to a measurable state when the gripping unit is at one rotation angle, the main body can be easily set to a measurable state by changing the rotation angle of the gripping unit from one rotation angle. Alternatively, even if it is difficult for the user to operate the operation unit by setting the main body to a measurable state when the gripping unit is at one rotation angle, the operation unit can be easily operated by changing the rotation angle of the gripping unit from one rotation angle. This makes it possible to appropriately specify the measurement point. As a result, it becomes possible to measure physical quantities over a wide range of the measurement object without requiring the user to be skilled. (3) A three-dimensional coordinate measuring device according to a third reference embodiment includes a probe for the above-mentioned three-dimensional coordinate measuring device, an imaging unit that images a plurality of measurement markers of the probe, and a calculation unit that calculates the coordinates of a measurement point indicated by a contact unit based on measurement image data indicating images of the plurality of measurement markers imaged by the imaging unit. The three-dimensional coordinate measuring device includes the above-mentioned probe, which makes it possible to measure physical quantities of a wide range of an object to be measured without requiring the user to have special skills. [Explanation of symbols]

[0194] 1 ... three-dimensional coordinate measuring device, 9 ... machining machine, 900 ... reference stand, 20 ... fixed connection part, 21 ... lower fixed plate, 22 ... upper fixed plate, 23 ... support, 24 ... hollow support shaft, 30 ... support member, 30c, RA ... rotating shaft, 31 ... rotating base, 32, 33 ... support frame, 40 ... movable member, 41 ... upper surface, 42 ... lower surface, 43, 111, 121, 181 ... substrate, 50 ... bellows, 90 ... casing, 91, 220b ... lower casing, 91W ... window for overhead camera, 92, 220a ... upper casing, 92S ... rectangular opening, 93 ... substrate casing, 93a, 93b ... storage section, 100 ... imaging head, 10 1...head bottom, 102...annular bottom surface, 103,832...annular inclined surface, 104...opening, 105,833...vertical hole, 110...reference camera, 110c,120c...optical axis, 120...movable camera, 130,204...marker drive circuit, 140...rotation drive circuit, 141...horizontal rotation mechanism, 143...tilt rotation mechanism, 150...head control circuit, 160,206...wireless communication circuit, 170,301...communication circuit, 180...overhead camera, 190...reference member, 191...light emitting substrate, 192...diffusion plate, 193...glass plate, 194...mask, 195...diffusion reflection sheet, 200...probe, 201 ...probe control unit, 202...indicator lamp, 202a...first display unit, 202b...second display unit, 203...battery, 205...probe memory, 207...motion sensor, 208...probe camera, 210, 800...holding unit, 210a...stylus mounting unit, 210b...target member holding unit, 211...stylus, 211a...contact unit, 220...probe casing, 221...probe operation unit, 221a...operation surface, 221b...push button, 221c...trigger switch, 230, 230x...holding unit, 250...main body unit, 251...front end, 252...rear end, 253...upper surface, 2 54... bottom surface, 254h... hinge, 254j... connection portion, 255... one side portion, 256... other side portion, 290... target member, 299... opening, 300... processing device, 302... main body control circuit, 303... main body memory, 310... main body display portion, 320... main body operation portion, 810... installation portion, 820... placement base, 830, 911... head base, 831... annular support surface, 912... legs, ca... collar, CA... cable, CB... cross roller bearing, EC... power cable, ep, ep1, ep2, eq... marker, GS... heat generating substrate, h1, h2, h3... through hole, HA1, LA1... intake portion,HA2, LA2…exhaust section, HF, LF…exhaust fan, hi1…hollow member, hi2…shaft member, rb…rubber bush, rs…imaging space, S…measurement object, sc…screw, U…user, Wa, Wb…weight,

Claims

1. A probe used in a three-dimensional coordinate measuring device that calculates coordinates of a measurement point that is in a predetermined positional relationship with respect to a plurality of measurement markers based on a relative positional relationship between the plurality of measurement markers captured by an imaging unit and a plurality of measurement markers that is stored in advance, the probe being configured to be portable by a user in order to indicate the measurement point, A main body having a plurality of measurement markers arranged so as to be imaged from a predetermined direction; a stylus having a contact portion for indicating the measurement point and attached to the main body in a predetermined positional relationship with the plurality of measurement markers; A gripping portion configured to be gripped by a user and in which a gripping posture by the user is defined; a connection portion that connects the grip portion to the main body portion so as to be rotatable around a predetermined rotation axis; A probe for a three-dimensional coordinate measuring device, in which the multiple measurement markers are positioned in different orientations when the gripping portion is gripped by the user according to the specified gripping posture by rotating the gripping portion around the rotation axis via the connection portion.

2. The main body has a marker surface on which the plurality of measurement markers are arranged, 2. The probe for a three-dimensional coordinate measuring apparatus according to claim 1, wherein the connection portion is provided on a side of the main body opposite to the marker surface.

3. The rotation axis of the connection portion is provided along the marker surface, 3. A probe for a three-dimensional coordinate measuring device as described in claim 2, configured so that the gripping portion can be transitioned between a first state in which the marker surface faces a first direction when the gripping portion is gripped by the user according to the specified gripping posture by rotating around the rotation axis via the connection portion, and a second state in which the marker surface faces a second direction different from the first direction.

4. the gripping unit has an operation unit that accepts operation input related to measurement by a user, 4. The probe for a three-dimensional coordinate measuring apparatus according to claim 1, wherein the gripping posture is determined by the arrangement of the operation portion.

5. A probe for a three-dimensional coordinate measuring device as described in any one of claims 1 to 4, wherein the grip portion rotates to a first angular position for directing the multiple measurement markers toward the imaging unit in a position directly facing a user, and a second angular position for directing the multiple measurement markers toward the imaging unit to the side of the user.

6. The main body portion is a holder that fixes the plurality of measurement markers and the stylus in a predetermined positional relationship; A cushioning member; 6. The probe for a three-dimensional coordinate measuring apparatus according to claim 1, further comprising: a casing that houses the holding portion and movably supports the holding portion via the buffer member.

7. the operation unit is configured with a plurality of buttons arranged in a predetermined arrangement, 5. The probe for a three-dimensional coordinate measuring device according to claim 4, wherein the grip portion is configured to be capable of transitioning between a first arrangement state in which an arrangement of the plurality of buttons relative to the main body portion is in a first arrangement relationship and a second arrangement state in which the arrangement of the plurality of buttons relative to the main body portion is in a second arrangement relationship different from the first arrangement relationship by rotating around the rotation axis.

8. 8. The probe for a three-dimensional coordinate measuring apparatus according to claim 1, wherein the grip portion has a built-in battery for supplying power to the plurality of measurement markers.

9. a notification display unit provided on the main body unit to notify a user whether or not the plurality of measurement markers are present within an imaging field of view of the imaging unit; The probe for a three-dimensional coordinate measuring device according to any one of claims 1 to 8, wherein the notification display unit is located closer to the stylus than a connection portion of the main body to which the grip unit is connected.

10. the notification display unit includes a first display unit and a second display unit, 10. The probe for a three-dimensional coordinate measuring apparatus according to claim 9, wherein the first display section and the second display section are provided at different parts of the main body and facing in different directions.

11. A probe for a three-dimensional coordinate measuring apparatus according to any one of claims 1 to 10; an imaging unit that images a plurality of measurement markers of the probe; a calculation unit that calculates coordinates of the measurement point indicated by the contact unit based on measurement image data indicating images of the plurality of measurement markers captured by the imaging unit; a measurement unit that measures a physical quantity of the object to be measured based on a calculation result of the calculation unit.

Images