Raman-infrared spectrometer combination and measurement method using Raman and infrared spectroscopy

Abstract

Provided is a Raman-infrared spectroscopic analysis multifunction machine comprising an infrared spectroscopic analysis light source and a Raman spectroscopic analysis light source, a plate for fixing a sample, a stage for arranging the plate, an objective optical element for causing light from the Raman spectroscopic analysis light source to be incident on the sample to obtain Raman light, an objective optical element for causing light from the infrared spectroscopic analysis light source to be incident on the sample to obtain reflected infrared light, a Raman light detecting system including an optical imaging element for generating a visible image, and an infrared light detecting system including an optical imaging element for generating a visible image, wherein: the Raman-infrared spectroscopic analysis multifunction machine is provided with a drive unit for adjusting a positional relationship between a position of the plate and the objective optical element for obtaining the Raman light and the objective optical element for obtaining the infrared light, a switching unit for switching between the Raman light detecting system and the infrared light detecting system, and a control unit for controlling the drive unit, the switching unit, and the optical imaging elements; a marker for adjusting the positional relationship is added to at least one of the plate and the stage; and the control unit controls the drive unit to adjust the positional relationship between the position of the plate and the two objective optical elements on the basis of the position of the marker in the visible images. Also provided is a measuring method employing Raman spectroscopy and infrared spectroscopy, related to the Raman-infrared spectroscopic analysis multifunction machine.

Description

[Technical field]

[0001] The present invention relates to a Raman-infrared spectroscopic analysis combined instrument. More specifically, the present invention relates to a combined analysis device having Raman spectroscopic analysis and infrared spectroscopic analysis. The present invention also relates to an analysis method using infrared spectroscopic analysis and Raman spectroscopic analysis. [Background technology]

[0002] There are various known methods for analyzing unknown substances, and by appropriately selecting an analytical means according to the object of analysis, it is possible to analyze the unknown substance with higher accuracy. For example, Patent Document 1 describes an analytical device that analyzes an object of analysis that contains a mixture of inorganic and organic substances, using diffracted X-rays and fluorescent X-rays for the inorganic region and FT-IR, fluorescence analysis, or Raman analysis for the organic region.

[0003] In particular, infrared and Raman spectroscopy are both effective means of analyzing the molecular structure of unknown organic substances, as they measure intramolecular vibrations. Furthermore, the information obtained from infrared and Raman spectroscopy is complementary, and by combining these two analytical methods, it is possible to clarify the molecular structure of unknown organic substances in greater detail and with greater precision.

[0004] Recently, analytical methods that combine with a microscope for the analysis of minute samples or minute areas have also become known. Patent Document 2 describes an observation device equipped with a microscope optical system and a spectroscopic section that obtains absorption spectra and Raman spectra in the ultraviolet, visible or infrared region.

[0005] For example, in the infrared light detection system, an objective mirror is used as the objective optical element of the microscope optical system, and in the Raman light detection system, an objective lens is used as the objective optical element of the microscope optical system. Therefore, when switching between the infrared light detection system and the Raman light detection system, it is necessary to switch the microscope optical system as well. In other words, when switching between the infrared light detection system and the Raman light detection system, it is necessary to simultaneously switch the objective optical element of the infrared light detection system and the objective optical element of the Raman light detection system.

[0006] However, when switching between microscope optical systems, the optical axis center of the objective optical element of the infrared light detection system or the objective optical element of the Raman light detection system with respect to the sample is shifted due to the optical configuration. When the optical axis center of the objective optical element of the infrared light detection system or the objective optical element of the Raman light detection system is shifted with respect to the sample, a deviation occurs between the measurement position of the Raman light and the measurement position of the infrared light. This deviation becomes more noticeable in a minute sample or a minute measurement area.

[0007] Therefore, in order to continuously measure Raman light and infrared light using a single device, the operator must align the sample each time the detection systems are switched between the two, which places a burden on the operator and can lengthen the time required for analysis. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] JP 2001-13095 A [Patent Document 2] International Publication No. 2013 / 132734 Summary of the Invention [Problem to be solved by the invention]

[0009] Therefore, there has been a demand for an apparatus that can perform Raman spectroscopic analysis and infrared spectroscopic analysis by quickly correcting the misalignment of the optical axis without placing an excessive burden on the operator, even if the optical axis center of the objective optical element of the Raman light detection system or the objective optical element of the infrared light detection system relative to the sample is misaligned when switching between the Raman light detection system and the infrared light detection system in a single apparatus.

[0010] The present invention aims to provide a combined Raman-infrared spectroscopic analysis device that adjusts the center of the optical axis of a microscope optical system relative to a sample and quickly matches the analysis regions of Raman spectroscopic analysis and infrared spectroscopic analysis, even when the Raman light detection system and the infrared light detection system are continuously switched over without placing an excessive burden on the operator. It is yet another object of the present invention to provide an analytical method using Raman spectroscopy and infrared spectroscopy, which quickly matches the analysis regions of Raman spectroscopy and infrared spectroscopy by adjusting the center of the optical axis of the microscope optical system relative to the sample. [Means for solving the problem]

[0011] That is, the present invention provides: Infrared spectroscopic light source and Raman spectroscopic light source, A plate for fixing the sample, a stage on which the plate is placed; an objective optical element for irradiating light from the Raman spectroscopic analysis light source onto a sample to obtain Raman light; an objective optical element for irradiating light from the infrared spectroscopic light source onto a sample and obtaining reflected infrared light; a Raman optical detection system having an optical imaging element for producing a visible image; and an infrared light detection system having an optical image capture element for generating a visible image; a drive unit for adjusting a positional relationship between the position of the plate and an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light; a switching unit for switching between the Raman light detection system and the infrared light detection system; and a control unit for controlling the driving unit, the switching unit, and the optical imaging element, a marker for adjusting the positional relationship is provided on at least one of the plate and the stage; the control unit controls a drive unit to adjust a positional relationship between a position of the plate and an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light, based on positions of the markers on the visible images acquired by the Raman light detection system and the infrared light detection system; to provide.

[0012] The present invention also provides The sample is irradiated with light, When detecting Raman and infrared light from a sample, confirming, on the visible image, a marker provided on at least one of a plate for fixing a sample and a stage on which the plate is placed; Checking the deviation of the marker; If the marker is misaligned, adjust the positional relationship between the position of the plate and the objective optical element for obtaining Raman light for Raman light detection and the objective optical element for obtaining infrared light for infrared light detection. Raman and infrared spectroscopy measurement methods, to provide. Effect of the Invention

[0013] According to the present invention, there is provided a combined Raman-infrared spectroscopic analysis device that adjusts the center of the optical axis of the microscope optical system relative to the sample, even when the Raman light detection system and the infrared light detection system are continuously switched, and quickly matches the analysis regions of Raman spectroscopic analysis and infrared spectroscopic analysis. The present invention also provides an analytical method using Raman spectroscopy and infrared spectroscopy, in which the analysis regions for Raman spectroscopy and infrared spectroscopy can be quickly aligned by adjusting the center of the optical axis of the microscope optical system relative to the sample. As a result of the present invention, the operator does not need to separately move or adjust the position of the sample, and Raman light and infrared light can be measured seamlessly. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 is a schematic diagram showing one embodiment of the Raman-infrared spectroscopic analysis composite instrument of the present invention, showing a state switched to a Raman light detection system. [Diagram 2] FIG. 1 is a schematic diagram showing one embodiment of the Raman-infrared spectroscopic analysis composite device of the present invention, showing a state switched to an infrared light detection system. [Diagram 3] FIG. 1 is a schematic diagram showing another embodiment of the Raman-infrared spectroscopic analysis composite instrument of the present invention, showing a state in which the instrument is switched to a Raman light detection system using a half mirror. [Figure 4] FIG. 2 is a schematic diagram showing another embodiment of the Raman-infrared spectroscopic analysis composite instrument of the present invention, showing a state in which the instrument is switched to an infrared light detection system using a half mirror. [Diagram 5] A schematic diagram of a circle added as a marker to the stage and the marker being visually recognized in a visible image generated by the optical imaging element of the Raman light detection system. [Figure 6] A schematic diagram of a circular marker added to the stage and visually recognizing the marker in a visible image generated by the optical imaging element of the infrared light detection system. [Figure 7] Schematic diagram of a visible image generated by an optical imaging element with markings added DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] The present invention will be described with reference to Figures 1 and 2, but the present invention is not limited to these figures. The Raman-infrared spectroscopic analysis composite device 1 of the present invention has a Raman spectroscopic analysis light source A, a plate 2, a stage 3, a drive unit 4, an objective optical element 5, an objective optical element 6, a Raman light detection system 7, and an infrared light detection system 8. An optical imaging element 10 is disposed in the Raman light detection system 7, and an infrared spectroscopic analysis light source B and an optical imaging element 11 are disposed in the infrared light detection system 8. A plate 2 is disposed on the stage 3.

[0016] In Fig. 1, light emitted from a light source A passes through various optical elements (not shown) and reaches an objective optical element 5, which is a microscope optical system. In Fig. 1, the arrow indicates the traveling direction of light. The light emitted from the light source A used in Raman spectroscopy is, for example, a visible or near-infrared laser light. For example, wavelengths ranging from 405 nm as a short wavelength example to 1064 nm as a long wavelength example are used, and a combination of 532 nm and 785 nm is often used. The light source B used in the infrared spectroscopic analysis is infrared light emitted from a ceramic heater. The wavelength of the light is several micrometers to several tens of micrometers.

[0017] The objective optical element 5 is configured by combining a convex lens and a concave lens, and the light incident on the objective optical element 5 is focused by these lenses on a measurement target sample (hereinafter also referred to as "sample") fixed on the plate 2. The Raman light scattered by the sample is guided to a Raman light detection system 7 by various optical elements (not shown). A portion of the Raman light guided to the Raman light detection system 7 is guided by various optical elements (not shown) to an optical imaging element 10 included in the Raman light detection system 7. In addition, a portion of the Raman light guided to the Raman light detection system 7 is guided to a Raman spectrometer 71 by various optical elements (not shown).

[0018] The optical imaging element 10 produces a visible image of the area where the Raman light is scattered, so that the measurement area of ​​the sample where the Raman light is being measured can be identified using the optical imaging element 10. The optical imaging element 10 may be, for example, a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor, and is configured to capture still or moving images of a sample. The optical imaging element 10 can capture all or at least any of bright-field images, dark-field images, phase contrast images, fluorescent images, and polarizing microscope images of the sample, depending on the configuration of the objective optical element 5 and transmitted illumination (not shown). The optical imaging element 10 outputs the captured images to a control unit 12 (described later) or another information processing device.

[0019] The Raman spectrometer 71 generates a one- or two-dimensional spectroscopic image of the Raman scattered light from the sample, and obtains a Raman scattering spectrum (hereinafter also referred to as a "Raman spectrum") from the one- or two-dimensional spectroscopic image. The Raman spectrometer 71 can also obtain the Raman spectrum of the sample by extracting a flat spectrum of an area where the object of observation does not exist from the generated one-dimensional or two-dimensional spectroscopic image, and then taking the difference between that spectrum and the spectrum of each pixel. A Raman spectrum is usually a plot of the intensity of emitted light against wavelength. The emitted light contains scattered light due to Raman scattering, and the wavelength shift of the scattered light due to Raman scattering (Raman shift) differs depending on the molecular structure and crystal structure of the sample.

[0020] The Raman spectrometer 71 outputs the acquired Raman spectrum to a monitor or the like (not shown), and stores it in a memory storage unit (not shown) if necessary. The Raman light detection system 7 may include, in addition to the optical imaging element 10 and the Raman spectrometer 71, the information processing device, a monitor, a memory storage unit, and other necessary components.

[0021] On the other hand, in Fig. 2, light emitted from a light source B installed in an infrared light detection system 8 is dispersed by various optical elements (not shown) in an infrared spectrometer (not shown) provided in an infrared spectrometer 81 of the infrared light detection system 8 before being guided to the microscope optical system, and reaches the objective optical element 6, which is a part of the microscope optical system. Note that in Fig. 2, the arrows indicate the traveling direction of light, as in Fig. 1.

[0022] Light incident on the objective optical element 6 is focused on the sample fixed on the plate 2. Infrared light reflected by the sample is guided by various optical elements (not shown) to an infrared light detection system 8. From the viewpoint of measurement sensitivity, the objective optical element 6 is preferably a Cassegrain mirror that combines a concave mirror and a convex mirror. A portion of the infrared light guided to the infrared light detection system 8 is guided by various optical elements (not shown) to an optical imaging element 11 included in the infrared light detection system 8. A portion of the infrared light guided to the infrared light detection system 8 is also guided by various optical elements (not shown) to an infrared spectrometer 81, and then to an infrared detector (not shown).

[0023] The optical imaging element 11 produces a visible image of the area where the infrared light is reflected, so that the measurement area of ​​the sample where the infrared light is being measured can be confirmed by the optical imaging element 11 . The optical imaging element 11 can be configured in the same way as the optical imaging element 10. The optical imaging element 11 can capture all or at least any of bright-field images, dark-field images, phase-contrast images, fluorescent images, and polarizing microscope images of the sample, depending on the configuration of the objective optical element 5 and the illumination by transmission or reflection (not shown) that is used depending on the properties of the sample. The optical imaging element 11 outputs the captured images to the control unit 12 described later or to another information processing device or the like.

[0024] The infrared spectrometer 81 is preferably a Fourier transform infrared spectrometer. The spectrometer in the infrared spectrometer 81 is preferably a Michelson interference spectrometer. The light reflected by the sample is guided to an infrared light detection system, a portion of which is guided to the optical imaging element 11 and a portion of which is guided again to the infrared spectrometer 81. A detector (not shown) is disposed in the infrared spectrometer 81, and the light guided to the infrared spectrometer 81 is guided to the detector by an optical element (not shown). This detector detects the infrared light.

[0025] In the case of a Fourier transform infrared spectrometer, the detector is connected to a Fourier transform calculation means which performs a Fourier transform on the infrared light intensity detected by the detector to calculate an infrared spectrum, and further calculates an infrared spectrum of the sample consisting of the difference between the infrared spectra of the sample and the background.

[0026] The infrared spectrometer 81 outputs the acquired infrared spectrum to a monitor or the like (not shown), and stores it in a memory storage unit (not shown) if necessary. In addition to the optical imaging element 11 and the infrared spectrometer 81, the infrared light detection system 8 may include the information processing device, a monitor, a memory storage unit, and other necessary components.

[0027] The Raman-infrared spectroscopic analysis composite device 1 of the present invention switches between the Raman spectroscopic measurement and the infrared spectroscopic measurement as required by the switching mechanism 9. The order of switching between the Raman spectroscopic measurement and the infrared spectroscopic measurement may be either from the Raman spectroscopic measurement to the infrared spectroscopic measurement, or from the infrared spectroscopic measurement to the Raman spectroscopic measurement. There is also no particular limit to the number of times the switching may be performed, and the switching may be performed any number of times as required.

[0028] In response to switching from Raman spectroscopy to infrared spectroscopy or from infrared spectroscopy to Raman spectroscopy by the switching mechanism, the driving unit 4 drives the plate 2 or the stage 3 to which the plate 2 is fixed, and adjusts the positional relationship between the objective optical element 5 and the plate 2, and between the objective optical element 6 and the plate 2. The driving unit 4 may also have a function of moving the plate to change the observation position in Raman spectroscopy and infrared spectroscopy. When switching to Raman spectroscopy, the positional relationship between the objective optical element 5 and the plate 2 is adjusted so that the light collected by the objective optical element 5 is collected on a predetermined measurement area of ​​the sample. When switching to infrared spectrometry, the positional relationship between the objective optical element 6 and the plate 2 is adjusted so that the light collected by the objective optical element 6 is collected on a predetermined measurement area of ​​the sample.

[0029] 3 and 4 are schematic diagrams showing a case where switching between Raman spectrometry and infrared spectrometry is performed using optical elements 131 to 135. In this embodiment, the infrared light detection system 8 has an infrared detector 82 in addition to the infrared spectrometer 81. The infrared spectrometer 81 has a built-in light source B for infrared spectroscopic analysis in addition to a light source for Raman spectroscopic analysis, and has an infrared spectrometer (not shown). The infrared spectrometer included in the infrared spectrometer 81 is preferably a Michelson interferometer.

[0030] 3, half mirrors are used as beam splitters for the optical elements 131 and 132. Light emitted from the light source A is irradiated onto the sample through the objective optical element 5 using appropriate optical elements, and the scattered Raman light is guided by the half mirrors 132 and 131 in part to the optical imaging element 10 and in part to the Raman spectrometer 71.

[0031] In FIG. 4, a reflecting mirror is used as the optical element 135, and the light emitted from the light source B, which is different from the light used for Raman spectroscopic analysis and is built into the infrared spectrometer 81, is Infrared Spectrometer 81 After being guided to the objective optical element 6, the light irradiated onto the sample through the objective optical element 6 passes through the objective optical element 6 again, and is guided in part to the optical imaging element 11 and in part to the infrared detector 82 via the optical elements 133 and 134, which use half mirrors as beam splitters. As described above, the Raman spectrum and the infrared spectrum are obtained by the Raman light detection system and the infrared light detection system, respectively.

[0032] In the switching mechanism in Figures 3 and 4, the optical elements 131 to 135 are moved by the driving unit, and the objective optical element 5, the objective optical element 6 and the stage 3 are driven so that the light that has passed through the objective optical element 5 or the objective optical element 6 is irradiated onto the sample. The switching is not limited to that shown in FIG. 3 and FIG. 4. For example, the light source, the optical element, and the stage 3 may be driven, or switching may be performed by other methods.

[0033] As described above, when switching between the Raman light detection system and the infrared light detection system, the optical axis center of the objective optical element of the Raman light detection system or the objective optical element of the infrared light detection system relative to the sample may shift, which may result in different measurement positions or measurement areas of the sample between Raman spectroscopic analysis and infrared spectroscopic analysis. In order to correct this misalignment, in the Raman-infrared spectroscopic analysis composite apparatus of the present invention, markers are provided on at least one of the plate 2 or the stage 3 to adjust the positional relationship between the objective optical element 5 and the plate 2, and between the objective optical element 6 and the plate 2. This marker is visually recognized in the image captured by the optical imaging elements 10 and 11 which generate visible images. Therefore, by comparing the positions of the markers captured in the visible images generated by the optical imaging elements 10 and 11, it is possible to confirm the degree of deviation of the optical axis centers of the objective optical element of the Raman light detection system and the objective optical element of the infrared light detection system with respect to the sample.

[0034] Based on the deviation of this marker, the positional relationship between the objective optical element 5 and the plate 2, and the positional relationship between the objective optical element 6 and the plate 2 are adjusted. The markers may have various shapes, such as lines, dots, combinations of these, circles, rectangles, triangles, crosses, etc. These markers may be provided on at least one of the plate 2 and the stage 3, and are preferably provided on the stage 3 because they are not affected by the position of the plate.

[0035] Fig. 5 is a schematic diagram of a stage with a circle provided as a marker, and a marker 22 viewed in a visible image 21 generated by the optical imaging element 10. Fig. 6 is a schematic diagram of a marker 32 viewed in a visible image 31 generated by the optical imaging element 11. By matching the magnifications of the visible images 21 and 31, if the optical axis of the objective optical element of the Raman light detection system or the objective optical element of the infrared light detection system is misaligned, the position of the marker 22 in Fig. 5 and the marker 32 in Fig. 6 will be misaligned.

[0036] The deviation between the markers 22 and 32 can be quantified by comparing the visible image 21 and the visible image 31. When the optical imaging elements 10 and 11 generate the visible images, a reference line 41 may be added to the visible images 21 and 31 as shown in Fig. 7. By adding the reference line to the visible image, the deviation between the markers can be quantified by comparing the positions of the markers 22 and 32 with the reference line. As shown in Fig. 7, a dot may be added to the center of the markers 22 and 32, and a dot may also be added to the center of the reference line 41, and the distance between the positions of the dots may be determined as the deviation. The quantification method may be, for example, to divide the visible image by pixels and express the position of each marker in pixels to determine the deviation between them, or the deviation from the benchmark may be expressed in pixels.

[0037] Based on the quantified deviation, the control unit 12 controls the drive unit 4 to adjust the positional relationship between the objective optical element 5 and the plate 2 , and between the objective optical element 6 and the plate 2 . The control unit 12 has a memory unit and stores the deviations between the benchmark line 41 and the markers 22 and 32 quantified by the method, and each time the Raman light detection system and the infrared light detection system are switched, the control unit 12 controls the drive unit 4 to adjust the positional relationships between the objective optical element 5 and the plate 2, and between the objective optical element 6 and the plate 2 based on the memory, which is preferable from the perspective of reducing the burden on the measurer.

[0038] The present invention also provides a measurement method using Raman spectroscopy and infrared spectroscopy, in which, when a sample is irradiated with light and Raman scattered light and infrared light from the sample are detected, a marker attached to at least one of a plate for fixing the sample and a stage on which the plate is placed is confirmed on a visible image, any misalignment of the marker is confirmed, and if the marker is misaligned, the positional relationship between the position of the plate and the objective optical element for detecting Raman light and the objective optical element for detecting infrared light is adjusted. The marker and the offset of the marker are as described above. Alternatively, the offset of the marker can be confirmed by the above-mentioned marking line and quantified in the same manner as described above. Quantification of the deviation is as described above. Based on the quantification of the deviation, the positional relationship between the objective optical element 5 and the plate 2, and the positional relationship between the objective optical element 6 and the plate 2 are adjusted, and Raman spectroscopy and infrared spectroscopy are measured. The positional relationship is preferably adjusted by moving the stage on which the plate is placed.

[0039] The measurement method using Raman spectroscopy and infrared spectroscopy according to the present invention can be carried out using the above-mentioned combined Raman-infrared spectroscopic analyzer.

[0040] [Aspects] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0041] [1] Infrared and Raman spectroscopic light sources, A plate for fixing the sample, a stage on which the plate is placed; an objective optical element for irradiating light from the Raman spectroscopic analysis light source onto a sample to obtain Raman light; an objective optical element for irradiating light from the infrared spectroscopic light source onto a sample and obtaining reflected infrared light; a Raman optical detection system having an optical imaging element for producing a visible image; and an infrared light detection system having an optical image capture element for generating a visible image; a drive unit for adjusting a positional relationship between the position of the plate and an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light; a switching unit for switching between the Raman light detection system and the infrared light detection system; and a control unit for controlling the driving unit, the switching unit, and the optical imaging element, a marker for adjusting the positional relationship is provided on at least one of the plate and the stage; The control unit controls a drive unit to adjust the positional relationship between the position of the plate and an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light based on the positions of the markers on the visible images acquired by the Raman light detection system and the infrared light detection system.

[0042] According to the invention [1] above, there is provided a combined Raman-infrared spectroscopic analysis device that can adjust the center of the optical axis of the microscope optical system relative to the sample, even when the Raman light detection system and the infrared light detection system are continuously switched, and quickly matches the analysis areas of Raman spectroscopic analysis and infrared spectroscopic analysis.

[0043] [2] The Raman-infrared spectroscopic analysis combination apparatus described in [1], wherein the switching unit switches between an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light in response to switching between the Raman light detection system and the infrared light detection system.

[0044] [3] The Raman and infrared spectroscopic analysis combination apparatus according to either [1] or [2], wherein the visible image of the Raman light detection system and the visible image of the infrared light detection system each have a marking line. [4] The control unit has a memory unit, and when switching between the Raman light detection system and the infrared light detection system, the memory unit stores a visible image of the Raman light detection system and a visible image of the infrared light detection system. the position of the marker as viewed at and storing an amount of deviation between the visible image of the Raman light detection system and the marked line of the visible image of the infrared light detection system, and each time the Raman light detection system and the infrared light detection system are switched, the control unit adjusts the positional relationship between the position of the plate and the objective optical element for obtaining the Raman light or the objective optical element for obtaining the infrared light based on the amount of deviation stored in the memory unit.

[0045] [5] The Raman-infrared spectroscopic analysis combination apparatus according to [4], wherein the amount of deviation is an amount of deviation of a pixel on the visible image. [6] The Raman-infrared spectroscopic analysis composite machine described in any one of [1] to [5], wherein the drive unit drives the stage to adjust the positional relationship between the position of the plate and an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light. [7] The Raman-infrared spectroscopic analysis combination apparatus according to any one of [1] to [6], wherein the marker is provided on the stage. [8] The Raman-infrared spectroscopic analysis combination apparatus according to any one of [1] to [7], wherein the objective optical element for obtaining the infrared light is a Cassegrain mirror. [9] A Raman-infrared spectroscopic analysis combination apparatus according to any one of [1] to [8], wherein the Raman light source irradiates light of 532 nm and 785 nm.

[0046] From [2] above 9 According to the invention of [1], a combined Raman-infrared spectroscopic analysis device is provided which can more quickly adjust the center of the optical axis of the microscope optical system relative to the sample even when continuously switching between the Raman light detection system and the infrared light detection system, thereby reducing the burden on the operator.

[0047] The present invention also provides [ 10 ] Irradiate the sample with light, When detecting Raman and infrared light from a sample, confirming, on the visible image, a marker provided on at least one of a plate for fixing a sample and a stage on which the plate is placed; Checking the deviation of the marker; If the marker is misaligned, adjust the position of the plate and the positional relationship between the objective optical element for Raman light detection and the objective optical element for infrared light detection. Measurement methods using Raman and infrared spectroscopy.

[0048] The above [ 10 According to the invention of [1], a method of analysis using Raman spectroscopy and infrared spectroscopy is provided in which the analysis regions of Raman spectroscopy and infrared spectroscopy can be quickly aligned by adjusting the center of the optical axis of the microscope optical system relative to the sample.

[0049] [ 11 ] The misalignment of the marker is confirmed by the misalignment between the marker and a mark line provided on a visible image. 10

[0043] The measurement method described in. [ 12 ] Positional relationship between an objective optical element for obtaining Raman light for Raman light detection and an objective optical element for obtaining infrared light for infrared light detection of The adjustment is performed by moving the stage. 10 ]or[ 11 ] The measurement method according to any one of the preceding claims.

[0050] The above [ 11 ] and [ 12 According to the invention of [1], an analytical method using Raman spectroscopy and infrared spectroscopy is provided that can more quickly adjust the optical axis center of the microscope optical system relative to the sample and easily match the analysis regions of Raman spectroscopy and infrared spectroscopy. [Explanation of symbols]

[0051] 1: Infrared / Raman combined instrument 2: Plate 3: Stage 4: Drive unit 5: Objective optics 6: Objective optics 7: Raman optical detection system 71: Raman spectrometer 8: Infrared light detection system 81: Infrared spectrometer 82: Infrared detector 9: Switching mechanism 10, 11: Optical imaging element 12: Control unit 131 to 135: Optical elements 21, 22: Visible images 31, 32: Marker 41: Marked line A: Raman spectroscopy light source B: Light source for infrared spectroscopy

Claims

1. Infrared spectroscopic light source and Raman spectroscopic light source, A plate for fixing the sample, a stage on which the plate is placed; an objective optical element for irradiating light from the Raman spectroscopic analysis light source onto a sample to obtain Raman light; an objective optical element for irradiating light from the infrared spectroscopic light source onto a sample and obtaining reflected infrared light; a Raman light detection system having an optical imaging element for producing a visible image; and an infrared light detection system having an optical image capture element for generating a visible image; a drive unit for adjusting a positional relationship between the position of the plate and an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light; A switching unit that switches between the Raman light detection system and the infrared light detection system, and a control unit for controlling the driving unit, the switching unit, and the optical imaging element, a marker for adjusting the positional relationship is provided on at least one of the plate and the stage; The control unit controls a drive unit to adjust the positional relationship between the position of the plate and an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light based on the position of the marker on the visible image acquired by the Raman light detection system and the infrared light detection system.

2. 2. The Raman-infrared spectroscopic analysis complex according to claim 1, wherein the switching unit switches between an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light in response to switching between the Raman light detection system and the infrared light detection system.

3. 3. The combined Raman and infrared spectroscopic analysis apparatus according to claim 1, wherein the visible image of the Raman light detection system and the visible image of the infrared light detection system each have a benchmark line.

4. 4. The Raman-infrared spectroscopic analysis composite apparatus according to claim 3, wherein the control unit has a memory unit, and when switching between the Raman light detection system and the infrared light detection system, the memory unit stores an amount of deviation between a position of the marker visible on the visible image of the Raman light detection system and the visible image of the infrared light detection system and a reference line in the visible image of the Raman light detection system and the visible image of the infrared light detection system, and each time the Raman light detection system and the infrared light detection system are switched, the control unit adjusts a positional relationship between the position of the plate and an objective optical element for obtaining the Raman light or an objective optical element for obtaining the infrared light based on the amount of deviation stored in the memory unit.

5. 5. The combined Raman and infrared spectroscopic analysis apparatus according to claim 4, wherein the amount of deviation is an amount of deviation of a pixel on the visible image.

6. 2. The Raman-infrared spectroscopic analysis composite machine according to claim 1, wherein the driving unit drives the stage to adjust the positional relationship between the position of the plate and an objective optical element for obtaining the Raman light and an objective optical element for obtaining the infrared light.

7. 2. The Raman-infrared spectroscopic analysis combination apparatus according to claim 1, wherein the marker is provided on the stage.

8. 2. The combined Raman and infrared spectroscopic analyzer according to claim 1, wherein the objective optical element for obtaining the infrared light is a Cassegrain mirror.

9. 2. The Raman-infrared spectroscopic analysis combination apparatus according to claim 1, wherein the Raman light source irradiates light of 532 nm and 785 nm.

10. The sample is irradiated with light, When detecting Raman and infrared light from a sample, confirming, on the visible image, a marker provided on at least one of a plate for fixing a sample and a stage on which the plate is placed; Checking the deviation of the marker; If the marker is misaligned, adjust the position of the plate and the positional relationship between the objective optical element for Raman light detection and the objective optical element for infrared light detection. Measurement methods using Raman and infrared spectroscopy.

11. The measurement method according to claim 10, wherein the deviation of the marker is confirmed by a deviation between the marker and a marked line provided on the visible image.

12. 12. The measuring method according to claim 10, wherein the positional relationship between the objective optical element for detecting Raman light and the objective optical element for detecting infrared light is adjusted by moving a stage.

Images