Charged particle beam equipment

Abstract

A charged particle beam device according to the present invention comprises: an inclining mechanism driving unit that generates driving force; an incline driving force transmission unit that transmits said driving force; and an inclining mechanism part that carries out an inclining action. The inclining mechanism part is provided with: a first load transmission unit and second load transmission unit; a first deformation part, second deformation part, third deformation part, and fourth deformation part; and a sample-holding part that can be inclined. The first load transmission unit moves in a load direction due to a load from the incline driving force transmission unit, and conveys the load to the first deformation part. The second load transmission unit is rotated, about the second deformation part as a fulcrum, by torque generated by deformation of the first deformation part, and conveys the load to the third deformation part. The sample-holding part is rotated, in a direction opposite to that of the second load transmission unit and about the fourth deformation part as a fulcrum, by torque generated by deformation of the third deformation part.

Description

[Technical field]

[0001] The present invention relates to a charged particle beam device. [Background technology]

[0002] Patent Document 1 describes a charged particle beam device equipped with a tilt mechanism that tilts an observation sample in the forward and backward directions when the insertion direction of a sample holder is set to the forward and backward directions. Patent document 1 states, "A rotating screw 16 on the heating holder side provided on pivot 4 is used to loosely tighten the arm, taking thermal expansion into account. When tightening pivot 4, the position of the contact point between the insulator at the tip of arm 3 and the concave surface of heating stage 1 is aligned. One end of conductor wire 34 is fixed using rotating screw 36 attached to arm 3. The other end is fixed using rotating screw 17 on heating stage 1. Arm 3 is bent like one side of a swirl as shown in the figure. Rotation of arm 3 causes it to rotate back and forth around pivot 4." [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2004-63463 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the conventional technology, there was a problem that the positioning accuracy was affected by nonlinear characteristics in the mechanism for tilting the sample.

[0005] Patent Document 1 describes a charged particle beam device equipped with a mechanism for tilting a sample mounted on a heating stage. However, the sample tilt mechanism described in Patent Document 1 rotates by generating relative displacement between two different members, and the nonlinear characteristics of the mechanism (nonlinear gain, backlash, frictional force) generated between the two movable members reduces the positioning accuracy.

[0006] An object of the present invention is to provide a charged particle beam device that enables tilting operation without nonlinear characteristics that affect positioning accuracy by eliminating sliding parts (pivots, etc.) of the rotation axis in a mechanism for tilting a sample. [Means for solving the problem]

[0007] An example of a charged particle beam device according to the present invention is a tilt mechanism drive unit which generates a drive force; - an inclined driving force transmission part for transmitting the driving force; - a tilt mechanism for performing a tilt operation; A charged particle beam device comprising: The tilt mechanism includes: a first load transmission section and a second load transmission section for transmitting a load from the tilt drive force transmission section; a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion that are elastically deformed by a load; a tiltable sample holder for holding a sample, Equipped with The first deformation portion, the second deformation portion, and the third deformation portion are attached to the second load transmission portion, The third deformation portion is above said first deformation portion and said fourth deformation portion, - below said second deformation, - forward of said first deformation portion, - rearward of said fourth deformation, the first load transmission portion moves in a load direction due to a load from the inclination driving force transmission portion and transmits the load to the first deformation portion; the second load transmission portion rotates about the second deformation portion as a fulcrum due to torque generated by deformation of the first deformation portion to transmit a load to the third deformation portion; The sample holder rotates in a direction opposite to that of the second load transmission part, with the fourth deformation part as a fulcrum, due to torque generated by deformation of the third deformation part.

[0008] An example of a sample holder according to the present invention is a tilt mechanism drive unit which generates a drive force; - an inclined driving force transmission part for transmitting the driving force; - a tilt mechanism for performing a tilt operation; A sample holder comprising: The tilt mechanism unit is a first load transmission section and a second load transmission section for transmitting a load from the tilt drive force transmission section; a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion that are elastically deformed by a load; a tiltable sample holder for holding a sample, Equipped with The first deformation portion, the second deformation portion, and the third deformation portion are attached to the second load transmission portion, The third deformation portion is above said first deformation portion and said fourth deformation portion, - below said second deformation, - forward of said first deformation portion, - rearward of said fourth deformation, the first load transmission portion moves in a load direction due to a load from the inclination driving force transmission portion and transmits the load to the first deformation portion; the second load transmission portion rotates about the second deformation portion as a fulcrum due to torque generated by deformation of the first deformation portion to transmit a load to the third deformation portion; The sample holder rotates in a direction opposite to that of the second load transmission part, with the fourth deformation part as a fulcrum, due to torque generated by deformation of the third deformation part.

[0009] An example of a sample insertion structure according to the present invention is A sample insertion structure comprising a sample holder and a sample stage, The sample holder includes: a tilt mechanism drive unit which generates a drive force; - an inclined driving force transmission part for transmitting the driving force; - a tilt mechanism for performing a tilt operation; Equipped with the sample holder is insertable into the sample stage; The tilt mechanism includes: a first load transmission section and a second load transmission section for transmitting a load from the tilt drive force transmission section; a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion that are elastically deformed by a load; a tiltable sample holder for holding a sample, Equipped with The first deformation portion, the second deformation portion, and the third deformation portion are attached to the second load transmission portion, The third deformation portion is above said first deformation portion and said fourth deformation portion, - below said second deformation, - forward of said first deformation portion, - rearward of said fourth deformation, the first load transmission portion moves in a load direction due to a load from the inclination driving force transmission portion and transmits the load to the first deformation portion; the second load transmission portion rotates about the second deformation portion as a fulcrum due to torque generated by deformation of the first deformation portion to transmit a load to the third deformation portion; The sample holder rotates in a direction opposite to that of the second load transmission part, with the fourth deformation part as a fulcrum, due to torque generated by deformation of the third deformation part.

[0010] In one embodiment of the present invention, a method for controlling a position of a sample using a sample holder comprises the steps of: The sample holder includes: a tilt mechanism drive unit which generates a drive force; - an inclined driving force transmission part for transmitting the driving force; - a tilt mechanism for performing a tilt operation; Equipped with The tilt mechanism includes: a first load transmission section and a second load transmission section for transmitting a load from the tilt drive force transmission section; a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion that are elastically deformed by a load; a tiltable sample holder for holding a sample, Equipped with The first deformation portion, the second deformation portion, and the third deformation portion are attached to the second load transmission portion, The third deformation portion is above said first deformation portion and said fourth deformation portion, - below said second deformation, - forward of said first deformation portion, - rearward of said fourth deformation, The method comprises: a step of the first load transmission portion moving in a load direction due to a load from the inclination driving force transmission portion and transmitting the load to the first deformation portion; a step of transmitting a load to the third deformation portion by rotating the second load transmission portion about the second deformation portion as a fulcrum due to a torque generated by deformation of the first deformation portion; a step of rotating the sample holder in a direction opposite to that of the second load transmission part, with the sample holder rotating about the fourth deformation part as a fulcrum due to a torque generated by deformation of the third deformation part; Equipped with. Effect of the Invention

[0011] According to the present invention, the tilt mechanism does not have a sliding portion for the rotation shaft, so that nonlinear characteristics are reduced in the tilt operation of the sample in the charged particle beam device.

[0012] Problems, configurations and effects other than those described above will become apparent from the following description of the embodiments. [Brief description of the drawings]

[0013] [Figure 1] FIG. 2 is a side view of a sample holder and a sample tilt mechanism of the charged particle beam device according to the first embodiment of the present invention. [Diagram 2] 1 is a schematic side view showing an example of the overall configuration of a charged particle beam device according to a first embodiment. [Diagram 3] FIG. 2 is a schematic side view of the sample stage according to the first embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, the embodiments will be described with reference to the drawings. [Example 1] A first embodiment of the present invention will be described below with reference to FIGS.

[0015] 2 is a schematic side view showing an example of the overall configuration of a charged particle beam device according to Example 1. In Example 1, a transmission electron microscope will be described as an example of the charged particle beam device.

[0016] 2 includes, from top to bottom in the vertical direction, an electron gun 10, a mirror body 11, and a stand 17. The mirror body 11 houses, from top to bottom in the vertical direction, an illumination system lens 12, an objective lens 13, an imaging system lens 14, and a detector 15.

[0017] A sample stage 16 is placed on the side of the mirror body 11 at the same height as the objective lens 13. The charged particle beam device 1 includes a sample holder 100 for placing a sample 102 thereon. The sample stage 16 has an insertion portion 101 for inserting the sample holder 100, so that the sample holder 100 can be inserted into the sample stage 16. This allows the sample 102 placed on the sample holder 100 to be inserted into the objective lens 13. The sample holder 100 and the sample stage 16 form a sample insertion structure. The sample holder 100 is also used to control the position of the sample by the method described herein.

[0018] Further, a mount 17 located below the mirror body 11 supports the entire charged particle beam device 1 including the mirror body 11 .

[0019] Furthermore, the charged particle beam device 1 includes a main control unit 18 that controls the entire charged particle beam device 1, and a stage controller 19 (control unit) that controls the sample stage 16.

[0020] To obtain an observation image of a sample 102, an electron beam 20 accelerated from an electron gun 10 is irradiated toward a microscope body 11, and then irradiated onto the sample 102 on a sample holder 100 while being focused by an illumination lens 12 and an objective lens 13. The electron beam 20 transmitted through the sample 102 is magnified by an imaging lens 14 and then detected by a detector 15. An electrical signal from the detector 15 is then input to a main control unit 18 and imaged.

[0021] The sample holder 100 is inserted into the mirror body 11 through the insertion section 101 of the sample stage 16. The sample holder 100 moves the placed sample 102. The sample holder 100 is provided with a tilt mechanism section 130 (see FIG. 1 ) described below, and the insertion section 101 operates to insert the tilt mechanism section 130 into the charged particle beam device 1 (for example, into the mirror body 11). With this configuration, the sample 102 can be inserted into an appropriate position.

[0022] The stage controller 19 transmits a control signal for controlling the tilt mechanism 130. In addition, the position of the sample holder 100 is controlled by a control signal from the stage controller 19. This causes the sample 102 to move to a desired position, and thereby the irradiation position of the electron beam 20 on the sample 102 can be moved.

[0023] Although not shown, the operation of inserting the sample holder 100 into the sample stage 16 is not limited to manual operation, and an automatic conveying device or the like may be used.

[0024] Furthermore, if the sample position after inserting the sample holder 100 can be moved to an appropriate position within the mirror body 11, the insertion portion 101 does not have to be within the sample stage 16, and may be located at a position other than the sample stage 16 within the mirror body 11.

[0025] The configuration of the charged particle beam device is not limited to that described above.

[0026] 3 is a schematic side view of the sample stage 16 of the present invention. In this embodiment, the coordinate system has the X-axis (front-back) in the direction in which the sample holder is inserted, the Y-axis (left-right) perpendicular to the X-axis, and the Z-axis (up-down) vertical, but the orientation of the coordinate system can be arbitrary.

[0027] 3 includes a base 30 that supports the entire sample stage, an X-axis rotation mechanism 40 that rotates around the X-axis, a Z-direction motion mechanism 50 that moves approximately in the Z-axis direction, a Y-direction motion mechanism (not shown) that moves approximately in the Y-axis direction, and an X-axis linear motion mechanism 70 that moves linearly in the X-axis direction. A sample holder 100 on which a sample 102 is placed is inserted into this.

[0028] In this specification, the coordinate origin is not specified, and the expression "rotate around the X-axis" can refer to rotation in the YZ plane with any point as the center. Furthermore, the expression "operate approximately in the Z-axis direction" is not limited to strictly linear movement in the Z-axis direction, but includes movement in which one end of a member moves along a curved trajectory that can be roughly approximated by a straight line, for example, rotational movement in the XZ plane. The same applies to the expression "operate approximately in the Y-axis direction."

[0029] The base 30 has a substantially cylindrical shape, and the sample stage 16 is fixed to the side surface of the mirror body 11 .

[0030] The X-axis rotation mechanism 40 includes a movable section, a drive section, a motion guide section, a drive force transmission section, and a position measurement section, and is installed on the base 30.

[0031] The X-axis rotation mechanism 40 includes a cylindrical rotating tube 41 (movable part) that rotates, an X-axis rotation drive unit 42 (drive unit) that generates a rotational driving force, a bearing 43 (motion guide unit) that guides the rotational motion, a gear 44 (drive force transmission unit) that transmits the rotational driving force to the movable part, and an encoder (not shown; position measurement unit).

[0032] The rotating cylinder 41 is built into the base 30, the X-axis rotation drive unit 42 is fixed onto the base 30, the bearing 43 is installed between the base 30 and the rotating cylinder 41, and the gear 44 is installed on the rotating cylinder 41 (for example, near its rear end).

[0033] The operation of the X-axis rotation mechanism is as follows: First, the X-axis rotation drive unit 42, such as a motor, rotates in response to a drive signal from the stage controller 19, and this rotational force is transmitted to a gear 44 at the rear end of the rotating cylinder, causing the rotating cylinder 41 to rotate around the X-axis using a bearing 43 as a rotation guide. As a result, the sample holder 100 supported by the outer cylinder 51 connected to a part of the rotating cylinder 41 and the sample 102 at the tip of the outer cylinder 51 also rotate around the X-axis.

[0034] The Z-direction movement mechanism 50 includes a movable section, a drive section, a movement guide section, a position measurement section, and a vacuum sealing section, and is installed on the rotating cylinder.

[0035] The Z-direction operation mechanism 50 includes an outer cylinder 51 (movable part) that operates in the approximate Z-axis direction, a Z-axis operation drive part 52 that generates a driving force for operation in the approximate Z-axis direction, a counter spring 53 (drive part) that generates a reaction force to the driving force when deformed, a spherical receiver 54 and a spherical fulcrum 55 (operation guide part) that guide the operation in the approximate Z-axis direction, an O-ring 56 for the spherical fulcrum (vacuum sealing part), and an encoder (not shown; position measurement part). Since the drive part acts directly on the movable part, there is no transmission part.

[0036] Strictly speaking, the Z-direction motion mechanism 50 rotates the outer cylinder 51 around the Y-axis, but if the rotation range is narrow, it can also be interpreted as essentially moving the sample 102 linearly in the Z-axis direction.

[0037] The outer tube 51 is built into the rotating tube 41, the Z-axis motion drive unit 52 and the opposing spring 53 are fixed onto the rotating tube 41, the spherical fulcrum 55 is installed at the front end of the outer tube 51 (inside the mirror body), and the spherical support 54 is installed on the mirror body 11 side.

[0038] The operation of the Z-direction movement mechanism 50 is shown below. The Z-axis movement drive unit 52 expands and contracts in response to a drive signal from the stage controller 19. The Z-axis movement drive unit 52 itself may be a linear actuator, for example. The linear force of the Z-axis movement drive unit 52 when expanding and contracting directly pushes the rear end (outside) of the outer cylinder 51, which becomes the point of force of the lever, and the outer cylinder 51 tilts around the Y axis with the spherical fulcrum 55 and the spherical receiver 54 as fulcrums. As a result, the sample holder 100 supported inside the outer cylinder 51 and the sample 102 at its tip move approximately in the Z-axis direction.

[0039] Furthermore, the compressive deformation of the counter spring 53 generates a force that counters the driving force, so that even when the Z-axis operation drive unit 52 performs a contracting operation, the outer cylinder 51 can move in accordance with the operation.

[0040] In order to prevent leakage from the outer cylinder 51 during operation in the Z-axis direction, it is preferable to use a spherical fulcrum O-ring 56 for vacuum sealing.

[0041] The Y-direction motion mechanism is equipped with a movable part, a drive part, a motion guide part, a position measurement part, and a vacuum sealing part, and is installed on a rotating cylinder. The Y-direction motion mechanism can be configured by rotating the Z-direction motion mechanism 90° around the X-axis.

[0042] It comprises an outer cylinder 51 (movable part) that moves in the approximate Y-axis direction, a Y-axis motion drive part (not shown) that generates a motion drive force in the approximate Y-axis direction, a counter spring (not shown, drive part) that generates a reaction force to the drive force, a spherical receiver 54 and a spherical fulcrum 55 (motion guide part) that guide the motion in the approximate Y-axis direction, an O-ring 56 for the spherical fulcrum (vacuum sealing part), and an encoder (not shown, position measurement part). Since the drive part acts directly on the movable part, no transmission part is required.

[0043] Since it operates substantially in the Y-axis direction, the Y-axis motion drive unit and the opposing spring are fixed onto a rotating cylinder 41. The other components are the same as those of the Z-axis motion drive unit.

[0044] The operation of the Y-direction movement mechanism 60 is shown below. The Y-axis movement drive unit expands and contracts in response to a drive signal from the stage controller 19. The Y-axis movement drive unit itself may be a linear actuator, for example. Other operations are the same as those of the Z-direction movement mechanism. As a result, the sample holder 100 supported inside the outer tube 51 and the sample 102 at its tip move approximately in the Y-axis direction. In addition, the compressive deformation of the opposing spring generates a force that opposes the driving force, so that even when the Y-axis movement drive unit contracts, the outer tube 51 can move in accordance with the movement.

[0045] Since the outer cylinder 51 is guided by the spherical bearing 54 and the spherical fulcrum 55, it can accommodate movement in approximately the Z-axis direction (or rotation around the Y-axis) and movement in approximately the Y-axis direction (or rotation around the Z-axis).

[0046] To move linearly in the X-axis direction, the X-axis linear motion mechanism 70 includes a movable part, a drive part, a motion guide part, a drive force transmission part, a position measurement part, and a vacuum sealing part, and is installed on the rotating cylinder 41.

[0047] The X-axis linear motion mechanism 70 includes a slide cylinder 72 that moves linearly in the X-axis direction, a holder abutment portion 73 (movable portion), an X-axis linear motion drive portion 74 (drive portion) that generates a linear motion drive force in the X-axis direction, a guide pin 75 and a holder guide groove 76 (motion guide portion) that guide the X-axis linear motion, a lever 77 (driving force transmission portion), an O-ring 78 for the holder and an O-ring 79 between the inner cylinder and the outer cylinder (vacuum sealing portion), an encoder (not shown; position measurement portion), and an inner cylinder 71. The inner cylinder 71 is formed, for example, by partially fitting and fixing two cylindrical members.

[0048] The inner cylinder 71 is disposed inside the outer cylinder 51, and the sliding cylinder 72 is disposed inside the inner cylinder 71. Furthermore, the sliding cylinder 72 is connected to the inner cylinder 71 via a bellows 80. The holder abutment portion 73 is disposed inside the inner cylinder 71. The holder abutment portion 73 is connected to the sliding cylinder 72 via a bellows 81. The guide pin 75 is coupled to the sample holder 100. The lever 77 is installed in the rotating cylinder 41. Furthermore, the holder O-ring 78 is installed between the sample holder 100 and the sliding cylinder 72, and the inner-outer cylinder O-ring 79 is installed between the outer cylinder 51 and the inner cylinder 71.

[0049] The operation of the X-axis linear motion mechanism 70 is shown below. A drive signal from the stage controller 19 causes the X-axis linear motion drive unit 74, such as a linear actuator, to expand and contract, and the linear force generated during this expansion and contraction pushes the lever, which becomes the force point of the lever 77. The point of action of the lever 77 then pushes the flange of the slide cylinder 72, causing the slide cylinder 72 to move linearly backward in the X-axis direction. As a result, the sample holder 100 supported inside the outer cylinder 51 and the sample 102 at its tip move linearly in the X-axis direction. When moving linearly forward in the X-axis direction, vacuum negative pressure can be used.

[0050] In addition, in order to prevent leakage between the sample holder 100 and the slide tube 72 and between the outer tube 51 and the inner tube 71 during linear motion along the X-axis, it is preferable to perform vacuum sealing using an O-ring 78 for the holder and an O-ring 79 between the inner tube and outer tube.

[0051] In this embodiment, the sample stage 16 includes a base 30 that supports the entire sample stage, an X-axis rotation mechanism 40 that rotates around the X-axis, a Z-direction movement mechanism 50 that moves approximately in the Z-axis direction, a Y-direction movement mechanism that moves approximately in the Y-axis direction, and an X-axis linear movement mechanism 70 that moves linearly along the X-axis, however, the configuration of the sample stage 16 is not limited to this.

[0052] Fig. 1 is a cross-sectional side view of a sample holder equipped with a tilt mechanism of this embodiment. Fig. 1(a) shows the entire sample holder 100, and Fig. 1(b) shows an enlarged view of the vicinity of the tip of the sample holder 100. The coordinate system is the same as that in Fig. 3. The sample holder 100 is used in a state where it is inserted through an insertion part 101.

[0053] A tilt mechanism 130 that performs tilting operation to tilt the sample in the front-back direction is installed at the tip of the sample holder 100. Note that "tilting in the front-back direction" refers to, for example, rotation within the front-back up-down plane (rotation around the Y axis).

[0054] The sample holder 100 comprises a tilt mechanism drive unit 110 (installed at the rear end of the sample holder 100 and generating the driving force required for the tilting operation of the tilt mechanism unit 130), a tilt driving force transmission unit 120 (equipped with a rod or screw-shaped member and transmitting the driving force to the tip of the sample holder 100), and a tilt mechanism unit 130 (installed at the tip of the sample holder 100 and having a mechanism for tilting the sample in the forward and backward directions).

[0055] The charged particle beam device 1 includes a guide unit 121 that guides the movement of the tilt driving force transmission unit 120. The guide unit 121 is hollow cylindrical, and the tilt driving force transmission unit 120 is inserted into the hollow portion of the guide unit 121. With this structure, the movement direction of the tilt driving force transmission unit 120 is appropriately controlled.

[0056] The tilt mechanism 130 includes a load transmission section 140 that transmits the driving force from the tilt driving force transmission section 120, four deformation sections 150 that are elastically deformed by the driving force, and a sample holder 160 that holds the sample 102 and can be tilted.

[0057] The load transmission section 140 includes a first load transmission section 141 and a second load transmission section 142 that transmit the driving force from the inclined driving force transmission section 120. The second load transmission section 142 can be formed, for example, in a triangular shape or a triangular prism shape. The second load transmission section 142 can be supported, for example, by the deformation section 150 at or near each apex of the triangle. The second load transmission section 142 can be formed, for example, in a highly rigid structure.

[0058] The deformation portion 150 is simply shown in a circular shape in the figure, but may have any shape that allows elastic deformation. For example, a leaf spring may be used. Also, the leaf spring may be folded back to make it easier to deform. The specific shape and / or structure of the deformation portion 150 can be appropriately designed by a person skilled in the art.

[0059] The sample holder 160 includes a portion for holding a sample (not shown), and may also include a leaf spring or the like for fixing the sample.

[0060] The deformation portion 150 is a deformation portion that is elastically deformed by a load, and includes a first deformation portion 151, a second deformation portion 152, a third deformation portion 153, and a fourth deformation portion 154.

[0061] When the second load transmission part 142 has a triangular shape, the first deformation part 151, the second deformation part 152, and the third deformation part 153 can be attached to different vertices of the second load transmission part 142. In this way, the second load transmission part 142 can appropriately support each deformation part with a simple shape.

[0062] The first load transmission section 141 is connected to the inclined driving force transmission section 120 and the first deformation section 151. The second load transmission section 142 is connected to the first deformation section 151, the second deformation section 152, and the third deformation section 153. For example, the first deformation section 151, the second deformation section 152, and the third deformation section 153 are attached to the second load transmission section 142. The sample holder 160 is connected to the third deformation section 153 and the fourth deformation section 154.

[0063] The first deformation portion 151 is connected to the first load transmission portion 141 and the second load transmission portion 142. This ensures that the driving force is transmitted between the first load transmission portion 141 and the second load transmission portion 142.

[0064] The second deformation portion 152 is connected to the guide portion 121 and the second load transmission portion 142. This fixes the fulcrum when the second load transmission portion 142 rotates.

[0065] The third deformation section 153 is connected to the second load transmission section 142 and the sample holder 160. This ensures that the driving force is transmitted between the second load transmission section 142 and the sample holder 160.

[0066] The fourth deformation portion 154 is connected to the guide portion 121 and the sample holder 160. This fixes the fulcrum when the sample holder 160 rotates.

[0067] The first deformation portion 151 and the second deformation portion 152 are disposed rearward of the third deformation portion 153. The fourth deformation portion 154 is disposed forward of the third deformation portion 153. Both the first deformation portion 151 and the fourth deformation portion 154 are disposed below the second deformation portion 152 and the third deformation portion 153.

[0068] The third deformation portion 153 is located above the first deformation portion 151 and the fourth deformation portion 154 , below the second deformation portion 152 , forward of the first deformation portion 151 , and rearward of the fourth deformation portion 154 .

[0069] The operation of the tilt mechanism configured as above is as follows. The tilt mechanism drive unit 110 using a motor or the like generates a rotational force or a linear driving force, and this force is transmitted to the tilt driving force transmission unit 120, which then directly moves forward and backward in a linear motion or moves forward and backward while rotating, thereby transmitting the driving force to the tilt mechanism unit 130.

[0070] In the tilting mechanism 130, first, the first load transmission part 141 receives a linear force. The first load transmission part 141 moves in the load direction due to the load from the tilting driving force transmission part 120, and moves forward, for example, by being guided by the guide part 121. As a result, the first load transmission part 141 transmits the load to the first deformation part 151. The first deformation part 151 is deformed by the load from the first load transmission part 141.

[0071] The force generated by the deformation of the first deformation portion 151 acts on the second load transmission portion 142 at the point of force of the lever. The second load transmission portion 142 rotates around the second deformation portion 152 as a fulcrum due to the torque generated by the deformation of the first deformation portion 151, and transmits the load to the third deformation portion 153. The acting force of the second load transmission portion 142 at this time is transmitted to the third deformation portion 153, causing the third deformation portion 153 to deform.

[0072] The force generated by the deformation of the third deformation part 153 acts on the sample holding part 160 at the point of force of the lever. The sample holding part 160 rotates in the opposite direction to the second load transmission part 142 (counterclockwise in the example of FIG. 1(b)) around the fourth deformation part 154 as a fulcrum due to the torque generated by the deformation of the third deformation part 153.

[0073] When the sample holder 160 is to be rotated in the opposite direction to that shown in FIG. 1(b), the rotation direction of the motor is reversed.

[0074] According to the above configuration, since the charged particle beam device 1 does not have a sliding portion of the rotation shaft, nonlinear characteristics are reduced in the tilting operation of the sample in the charged particle beam device 1. For example, the tilting operation of the sample becomes possible by only elastic deformation.

[0075] In addition, by eliminating the sliding parts, tilting operation is possible without the nonlinear characteristics of the mechanism (which affects the positioning accuracy). In addition, since the second load transmission part 142 has a triangular structure, it has higher rigidity than a parallel link structure, resulting in a structure with high vibration resistance. [Explanation of symbols]

[0076] 1...Charged particle beam device 16...Sample stage (sample insertion structure) 19...Stage controller (control unit) 100...Sample holder (sample insertion structure) 101…insertion part 102...Sample 110...Tilt mechanism drive unit 120...Inclined driving force transmission section 121...Guide section 130...Tilt mechanism section 140...Load transmission part 141…First load transmission part 142…Second load transmission part 150…Deformation section 151…First deformation section 152…Second deformation section 153…Third deformation section 154…Fourth deformation section 160...Sample holder

Claims

1. a tilt mechanism drive unit which generates a drive force; - an inclined driving force transmission part for transmitting the driving force; - a tilt mechanism for performing a tilt operation; A charged particle beam device comprising: The tilt mechanism includes: a first load transmission part and a second load transmission part for transmitting a load from the tilt drive force transmission part; a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion which are elastically deformed by a load; a tiltable sample holder for holding a sample, Equipped with the first deformation portion, the second deformation portion, and the third deformation portion are attached to the second load transmission portion, The third deformation portion is above said first deformation and said fourth deformation, - below said second deformation, - forward of said first deformation, - rearward of said fourth deformation, the first load transmission portion moves in a load direction due to a load from the tilt driving force transmission portion and transmits the load to the first deformation portion; the second load transmission portion rotates about the second deformation portion as a fulcrum due to torque generated by deformation of the first deformation portion to transmit a load to the third deformation portion; the sample holder rotates in a direction opposite to that of the second load transmission part, with the fourth deformation part as a fulcrum, due to a torque generated by the deformation of the third deformation part. Charged particle beam device.

2. the charged particle beam device includes a sample stage having an insertion portion; the insertion unit operates to insert the tilt mechanism unit into the charged particle beam device; The charged particle beam device according to claim 1 .

3. The charged particle beam device according to claim 1 , further comprising a control unit that transmits a control signal for controlling the tilt mechanism unit.

4. The charged particle beam device according to claim 1 , wherein the second load transmission portion is triangular, and the first deformation portion, the second deformation portion, and the third deformation portion are attached to different vertices of the second load transmission portion.

5. The charged particle beam device according to claim 1 , further comprising a guide portion that guides a movement of the tilt drive force transmission portion.

6. The charged particle beam device according to claim 5 , wherein the guide portion is a hollow cylinder, and the tilt drive force transmission portion is inserted through a hollow portion of the guide portion.

7. The charged particle beam device according to claim 1 , wherein the first deformation portion is connected to the first load transmission portion and the second load transmission portion.

8. The charged particle beam device according to claim 5 , wherein the second deformation portion is connected to the guide portion and the second load transmission portion.

9. The charged particle beam device according to claim 1 , wherein the third deformation section is connected to the second load transmission section and the sample holder.

10. The charged particle beam device according to claim 5 , wherein the fourth deformation portion is connected to the guide portion and the sample holder.

11. a tilt mechanism drive unit which generates a drive force; - an inclined driving force transmission part for transmitting the driving force; - a tilt mechanism for performing a tilt operation; A sample holder comprising: The tilt mechanism includes: a first load transmission part and a second load transmission part for transmitting a load from the tilt drive force transmission part; a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion which are elastically deformed by a load; a tiltable sample holder for holding a sample, Equipped with the first deformation portion, the second deformation portion, and the third deformation portion are attached to the second load transmission portion, The third deformation portion is above said first deformation and said fourth deformation, - below said second deformation, - forward of said first deformation, - rearward of said fourth deformation, the first load transmission portion moves in a load direction due to a load from the tilt driving force transmission portion and transmits the load to the first deformation portion; the second load transmission portion rotates about the second deformation portion as a fulcrum due to torque generated by deformation of the first deformation portion to transmit a load to the third deformation portion; the sample holder rotates in a direction opposite to that of the second load transmission part, with the fourth deformation part as a fulcrum, due to a torque generated by the deformation of the third deformation part. Sample holder.

12. A sample insertion structure comprising a sample holder and a sample stage, The sample holder includes: a tilt mechanism drive unit which generates a drive force; - an inclined driving force transmission part for transmitting the driving force; - a tilt mechanism for performing a tilt operation; Equipped with the sample holder is insertable into the sample stage; The tilt mechanism includes: a first load transmission part and a second load transmission part for transmitting a load from the tilt drive force transmission part; a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion which are elastically deformed by a load; a tiltable sample holder for holding a sample, Equipped with the first deformation portion, the second deformation portion, and the third deformation portion are attached to the second load transmission portion, The third deformation portion is above said first deformation and said fourth deformation, - below said second deformation, - forward of said first deformation, - rearward of said fourth deformation, the first load transmission portion moves in a load direction due to a load from the tilt driving force transmission portion and transmits the load to the first deformation portion; the second load transmission portion rotates about the second deformation portion as a fulcrum due to torque generated by deformation of the first deformation portion to transmit a load to the third deformation portion; the sample holder rotates in a direction opposite to that of the second load transmission part, with the fourth deformation part as a fulcrum, due to a torque generated by the deformation of the third deformation part. Sample insertion structure.

13. 1. A method for controlling a position of a specimen using a specimen holder, comprising the steps of: The sample holder includes: a tilt mechanism drive unit which generates a drive force; - an inclined driving force transmission part for transmitting the driving force; - a tilt mechanism for performing a tilt operation; Equipped with The tilt mechanism includes: a first load transmission part and a second load transmission part for transmitting a load from the tilt drive force transmission part; a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion which are elastically deformed by a load; a tiltable sample holder for holding a sample, Equipped with the first deformation portion, the second deformation portion, and the third deformation portion are attached to the second load transmission portion, The third deformation portion is above said first deformation and said fourth deformation, - below said second deformation, - forward of said first deformation, - rearward of said fourth deformation, The method comprises: a step of the first load transmission portion moving in a load direction due to a load from the inclination driving force transmission portion and transmitting the load to the first deformation portion; a step of transmitting a load to the third deformation portion by rotating the second load transmission portion about the second deformation portion as a fulcrum due to a torque generated by deformation of the first deformation portion; a step of rotating the sample holder in a direction opposite to that of the second load transmission part, with the sample holder rotating about the fourth deformation part as a fulcrum due to a torque generated by deformation of the third deformation part; A method comprising:

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