Crimping Device

Abstract

To provide a crimp device capable of preventing unexpected deformation of an elastic body caused by vacuuming when crimping a workpiece.SOLUTION: The present invention relates to a crimp device comprising: a transfer plate; a main body mold which includes a side wall part abutted with the transfer plate, a top wall part covering an upper end of the side wall part and a pressing part, and is movable in relative to a work mounting surface of the transfer plate and abutted to the transfer plate to form a vacuum chamber; an elastic body mold including a metal frame body mounted to the top wall part of the main body mold so as to be positioned inside of the vacuum chamber and an elastic body enclosed by the metal frame body; and a groove formed on a surface of the elastic body mold in contact with the top wall part of the metal frame body and continuously connecting an inner edge and an outer edge of the metal frame body. When the vacuum chamber is formed, the groove exhausts a gas residual in a clearance between the pressing part of the main body mold and the elastic body of the elastic body mold into the vacuum chamber, and the main body mold moves the top wall part and the pressing part toward a plurality of works together with the elastic body mold and brings the elastic body into contact with the plurality of works.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a crimping device that presses a workpiece with a pressure mold. [Background technology]

[0002] Conventionally, there has been known a crimping device that pressurizes and crimps a workpiece (work) in a vacuum atmosphere using a pressure die. In such a crimping device, the pressure die is made of an elastic body so that pressure can be applied uniformly to the workpiece.

[0003] For example, Patent Document 1 (see FIG. 2 in particular) describes a pressure device having a flexible layer that is an elastic body, which clamps and presses a workpiece. This pressure device is a pressure device that performs compression bonding by pressure, and can make the pressure distribution uniform even if the workpiece has an uneven shape, and presses the substrate 10 and the circuit element 16 placed thereon via an intervening pad 38 including a flexible body 46 consisting of two layers, a fluid flexible layer 48 and a porous flexible layer 50. As a result, the fluid flexible layer 48 also extends to the recesses of the workpiece, and uniform pressure can be applied to the entire workpiece. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2004-296746 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in Patent Document 1, if air is trapped between the upper die 32 and the flexible body 46, when the space surrounded by the upper die 32, the lower die 30, and the side die 34 is depressurized, the trapped air becomes a positive pressure atmosphere, and the flexible body 46 suddenly deforms. If the upper die 32 is lowered in this state, the expanded convex part of the flexible body 46 comes into contact with the center of the workpiece. If the flexible body 46 is further lowered, the contact area of ​​the flexible body 46 spreads radially from the center of the workpiece. The force of this radial spreading causes a positional deviation in the circuit element 16 that constitutes the workpiece. At this time, the deviation caused in the workpiece remains in this state until the end of the pressurization process, so there is a risk that it will not be possible to perform a precise crimping process.

[0006] Therefore, the present invention has been made in consideration of such problems, and aims to provide a crimping device that can prevent sudden deformation of an elastic body caused by vacuum drawing when crimping a workpiece. [Means for solving the problem]

[0007] In order to solve the above problem, a crimping device for crimping multiple workpieces according to one embodiment of the present invention includes a conveying plate on which the multiple workpieces can be stacked and moved, a side wall portion that abuts against the conveying plate, and a top wall portion and a pressing portion that cover the upper ends of the side wall portions, and is movable relative to the workpiece placement surface of the conveying plate and abuts against the conveying plate to form a vacuum chamber, an elastic body mold including a metal frame attached to the top wall portion of the main body mold so as to be located within the vacuum chamber, and an elastic body surrounded by the metal frame, and a groove formed on a surface of the elastic body mold that contacts the top wall portion of the metal frame and continuously connects an inner edge portion and an outer edge portion of the metal frame, the groove discharging gas remaining in a gap between the pressing portion of the main body mold and the elastic body of the elastic body mold into the vacuum chamber when the vacuum chamber is formed, and the main body mold moves the top wall portion and the pressing portion together with the elastic body mold toward the multiple workpieces, bringing the elastic body into contact with the multiple workpieces. Effect of the Invention

[0008] According to the present invention, it is possible to provide a crimping device capable of preventing sudden deformation of an elastic body caused by evacuation when crimping workpieces. [Brief description of the drawings]

[0009] [Figure 1] 1A and 1B are side cross-sectional views showing a crimping device according to an embodiment of the present invention, and FIG. 1B is an enlarged side cross-sectional view of a portion surrounded by Ib in FIG. [Diagram 2] 2(b) is a schematic perspective view of the elastic mold of the crimping device according to an embodiment of the present invention, in which (a) is a side cross-sectional view of the elastic mold in the direction of line IIa in FIG. 2(b), and (b) is a schematic oblique view of the elastic mold. [Diagram 3] FIG. 2 is a schematic plan view showing an elastic mold of the crimping device according to the embodiment of the present invention. [Figure 4] 1A to 1C are schematic cross-sectional views of grooves provided in a metal frame of a crimping device according to an embodiment of the present invention, where (a) to (c) respectively show various cross-sectional shapes of the groove. [Diagram 5] FIG. 11 is a schematic cross-sectional view illustrating the vacuum bonding operation during the workpiece bonding process, showing (a) the movement of the transport plate, (b) the movement of the main body mold and the elastomer mold, and (c) the formation of a chamber and the exhaust of gas from the gap. [Figure 6] FIG. 11 is a schematic cross-sectional view illustrating the vacuum bonding operation in the workpiece bonding process, showing (a) the bonding process using an elastic body when the chamber is in a vacuum state, (b) the rise of the elastic body die after the bonding process using an elastic body, and (c) the state in which the vacuum chamber is open to the atmosphere. [Figure 7] 5A and 5B are schematic cross-sectional views illustrating the compression operation under vacuum in the compression process of the workpiece, showing (a) the rise of the main body die and the elastic die, and (b) the movement of the conveying plate. [Figure 8]8(c) is a schematic diagram showing how the elastic body die of the crimping device according to an embodiment of the present invention is removably engaged with the main body die, and shows (a) a side cross-sectional view of the main body die and elastic body die in the direction of line VIIIa, b in FIG. 8(c) and the bolts screwing them together; (b) a side cross-sectional view showing the state in which the elastic body die is screwed into the main body die by a bolt in the direction of line VIIIa, b in FIG. 8(c); and (c) a schematic plan view of the elastic body die as viewed from below in a state in which the elastic body die is screwed into the main body die by a bolt. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. The embodiment described below is an example of a specific embodiment of the present invention. Therefore, the configuration of the embodiment described below should be appropriately modified or changed depending on the configuration of the device to which the present invention is applied and various conditions, and the present invention is not limited to the following embodiment.

[0011] <About the crimping device> FIG. 1 is a schematic diagram showing a pressure bonding device 100 according to an embodiment of the present invention, in which FIG. 1(a) is a side cross-sectional view of the pressure bonding device 100, and FIG. 1(b) is an enlarged view of an area surrounded by Ib in FIG. 1(a). As shown in FIG. 1(a), the pressure bonding device 100 uniformly pressurizes and pressure-bonds a workpiece W consisting of a substrate such as an electronic circuit and a circuit element arranged on the substrate in a vacuum atmosphere. The pressure bonding device 100 includes a main body mold 10, an elastic body mold 11, a conveying plate 12 on which the workpiece W is placed, and a vacuum pump 14. Here, the main body mold 10 is composed of a pressing portion 15, a top wall portion 16, and a side wall portion 17. The elastic body mold 11 is composed of an elastic body 21 consisting of a pair of intervening pads 18, 19 and a soft layer 20, and a metal frame 22 surrounding the elastic body 21 and the elastic body 21.

[0012] Although details will be described later, the crimping device 100 of this embodiment evacuates the vacuum chamber C when crimping the workpiece W. During this evacuation, in order to prevent the elastic body 21 from being suddenly deformed by the positive pressure atmosphere of the gas in the gap 23, the gas in the gap 23 is evacuated via the groove 22a provided on the upper surface of the metal frame 22 as the vacuum chamber C is evacuated by the vacuum pump 14, thereby preventing the workpiece W from being displaced.

[0013] In the crimping device 100, a lifting device (not shown) lowers or raises the main body die 10 and the elastic die 11 relative to the conveying plate 12. As a result, after the side wall portion 17 of the main body die 10 is brought into close contact with the conveying plate 12 to form a vacuum chamber C, the main body die 10 and the elastic die 11 lower relative to the workpiece W on the conveying plate 12 and crimp the workpiece W with the elastic body 21 (see FIG. 6(a)), and after crimping, they rise relative to the workpiece W (see FIG. 5(c)).

[0014] <About the conveyor plate> On the conveying plate 12, a plurality of workpieces W are placed in a stack on a placement surface 12a for placing the workpieces W. When starting the bonding process, the conveying plate 12 moves to a position directly below the main mold 10 with the plurality of workpieces W placed thereon. When the plurality of workpieces W are bonded by the elastic body 21, the side wall portion 17 of the main mold 10 comes into close contact with the conveying plate 12, and a vacuum chamber C surrounded by the conveying plate 12 and the main mold 10 is formed. After the bonding process is completed, the bonded plurality of workpieces W are moved to the next process.

[0015] <About elastic molds> FIG. 2 is a schematic diagram of the elastic body mold 11, FIG. 2(a) is a schematic cross-sectional side view of the elastic body mold 11 in the direction of line IIa in FIG. 2(b), and FIG. 2(b) is a schematic perspective view of the elastic body mold 11. As shown in FIG. 2(a) and (b), the metal frame 22 of the elastic body mold 11 has a groove 22a on the surface that contacts the top wall portion 16 of the main body mold 10. Also, as shown in FIG. 2(b), the elastic body 21 is surrounded by the metal frame 22. Then, the metal frame 22 is attached to the top wall portion 16 of the main body mold 10, so that the elastic body mold 11 is engaged with the main body mold 10. In FIG. 2(b), two grooves 22a are provided, but this is not limited thereto, and four or more grooves may be provided as described below.

[0016] <Regarding the grooves on the metal frame> FIG. 3 is a schematic plan view showing the position of the groove 22a provided in the metal frame 22 of the elastic body mold 11. The groove 22a is provided on the upper surface of the metal frame 22 that contacts the top wall portion 16 of the main body mold 10. The groove 22a fluidly connects the gap 23 between the pressing portion 15 and the elastic body 21 to the inside of the vacuum chamber C, and is a path for continuously connecting the inner edge portion and the outer edge portion of the metal frame 22 and discharging the gas remaining in the gap 23. By providing this groove 22a, the vacuum chamber C is evacuated, and at the same time, gas such as air, nitrogen, or argon remaining in the gap 23 is discharged from the gap 23 to the inside of the vacuum chamber C by negative pressure, and the gap 23 can be evacuated. As a result, when the vacuum chamber C is evacuated, the gap 23 is prevented from becoming a positive pressure atmosphere due to the gas remaining in the gap 23, and sudden deformation of the elastic body 21 caused by the positive pressure atmosphere can be prevented.

[0017] In Fig. 3, four grooves 22a are provided, but the number is not limited to four and five or more grooves may be provided. However, the positions at which grooves 22a are provided are within the range surrounded by the dashed line in Fig. 3, that is, positions away from the outer edge corners of rectangular elastic mold 11 and the middle parts between adjacent outer edge corners. By providing grooves 22a at such positions, it is possible to avoid positions where stress concentration that may cause breakage of elastic mold 11 during the compression bonding process is likely to occur.

[0018] Fig. 4 is a schematic cross-sectional view showing examples of various cross-sectional shapes of groove 22a. Fig. 4(a) shows groove 24 having a V-shaped cross-sectional shape, Fig. 4(b) shows groove 25 having a rectangular cross-sectional shape, and Fig. 4(c) shows groove 26 having a semicircular cross-sectional shape. Grooves 24 to 26 having these cross-sectional shapes make it easier to exhaust gas remaining in gap 23 from gap 23 into vacuum chamber C by negative pressure while evacuating vacuum chamber C, making it easier to evacuate gap 23.

[0019] <About the main mold> The main mold body 10 is composed of a pressing section 15, a top wall section 16, and a side wall section 17. The metal frame 22 of the elastic mold body 11 is attached to the top wall section 16. The main mold body 10 can be raised and lowered relative to the workpiece W placement surface 12a of the conveying plate 12 by a lifting device (not shown). Furthermore, when the side wall section 17 is in close contact with the conveying plate 12, the pressing section 15 and the top wall section 16 can be raised and lowered relative to the workpiece W placement surface 12a of the conveying plate 12.

[0020] <About the pressing part> Of the various parts constituting the main body die 10, the pressing part 15 is located in the center of the main body die 10 and forms a gap 23 with the elastic body 21 of the elastic body die 11. The pressing part 15 is provided facing the elastic body 21 of the elastic body die 11 and enables the elastic body 21 to apply pressure to the workpiece W by lowering the elastic body die 11 together with the top wall part 16 to which the metal frame 22 is attached and applying pressure.

[0021] <About the workpiece crimping process> 5 to 7 are schematic cross-sectional views showing each pressing step from when the conveying plate 12 conveys the work W directly below the main mold 10 to when the conveying plate 12 conveys the work W again after the work W has been pressed.

[0022] FIG. 5 is a schematic cross-sectional view showing the process from when the conveying plate 12 moves to when the vacuum chamber C is formed. As shown in FIG. 5(a), the conveying plate 12 on which the work W is placed moves in the direction of the arrow A1, and the work W stops so that it is located directly below the main body mold 10, particularly directly below the elastic body 21. Next, as shown in FIG. 5(b), the main body mold 10 and the elastic body mold 11 move to the conveying plate 12 in the direction of the arrow A2. Then, the side wall portion 17 of the main body mold 10 is in close contact with the conveying plate 12, and the vacuum chamber C is formed by the main body mold 10 and the conveying plate 12. As shown in FIG. 5(c), when the vacuum pump 14 starts to evacuate the vacuum chamber C, the gas in the gap 23 is discharged through the groove 22a as shown by the arrow.

[0023] FIG. 6 is a schematic cross-sectional view showing a process in which the internal space 27 of the vacuum chamber C is evacuated and the elastic body 21 presses the workpiece W. As shown in FIG. 6(a), the vacuum pump 14 evacuates the gas in the internal space 27 of the vacuum chamber C, and the internal space 27 of the vacuum chamber C becomes a vacuum atmosphere. This prevents the gas from being trapped between the elastic body 21 and the workpiece W, which makes it impossible for the elastic body 21 to uniformly pressurize the workpiece W. In addition, at this time, the gas inside the gap 23 has already been evacuated through the groove 22a, so that the elastic body 21 is prevented from suddenly deforming due to the positive pressure atmosphere caused by the gas in the gap 23. Next, the pressing portion 15 and the top wall portion 16 of the main body mold 10 descend in the direction of the arrow A4 relative to the conveying plate 12, and at the same time, the elastic body mold 11 descends and the elastic body 21 presses the workpiece W. Then, as shown in Fig. 6(b), the pressing portion 15, the top wall portion 16, and the elastic mold 11 rise in the direction of the arrow A5 relative to the conveying plate 12. After that, as shown in Fig. 6(c), the vacuum chamber C, which had been in a vacuum state, is opened to the atmosphere.

[0024] 7 is a schematic cross-sectional view showing a process in which the conveying plate 12 moves the bonded workpiece W after the vacuum chamber C is opened to the atmosphere. As shown in FIG. 7(a), the main body mold 10 and the elastic mold 11 rise in the direction of the arrow A6 relative to the conveying plate 12. Then, as shown in FIG. 7(b), the conveying plate 12 on which the workpiece W is placed moves the bonded workpiece W in the direction of the arrow A7, that is, to the next process. Note that the conveying direction of the workpiece W is not limited to the direction of the arrow A7, and it may be conveyed so as to return in the opposite direction to the arrow A1 in FIG. 5(a), for example.

[0025] In the crimping device 100 of this embodiment, when the vacuum chamber C is evacuated to crimp the workpiece W, the gas in the gap 23 is evacuated via the groove 22a. This suppresses sudden deformation of the elastic body 21 due to the positive pressure atmosphere of the gas in the gap 23, and prevents the workpiece W from shifting.

[0026] <About the elastic mold that can be detached from the main mold> 1 to 7, the engagement means between the metal frame 22 and the top wall 16 of the main mold 10 has not been specifically described, but in this embodiment, the metal frame 22 and the top wall 16 of the main mold 10 are removably engaged with each other by an engagement means, which is screwing with bolts 101. Also, in this embodiment, the metal frame 22 and the top wall 16 of the main mold 10 are screwed with bolts 101, but this is not limited to this and other engagement means such as screws may be used.

[0027] FIG. 8 is a diagram showing a crimping device 100 of the present invention in which an elastic mold is detachably engaged with a main mold. As shown in FIG. 8(a), this embodiment has the same configuration as the crimping device 100 described above. Meanwhile, the metal frame 22 is engaged with the top wall 16 of the main mold 10 by a plurality of bolts 101. Note that this figure is a cross-sectional view in the direction of line VIIIa, b in FIG. 8(c), but for the sake of explanation, the bolts are shown in a state in which they are unscrewed. In addition, bolt holes 102 are provided in the metal frame 22 and the top wall 16, and the metal frame 22 is fastened to the main mold 10 via the top wall 16 by screwing in the bolts 101.

[0028] As shown in Fig. 8(b), the metal frame 22 and the top wall 16 of the main mold body 10 are screwed and unscrewed by bolts 101. Note that this figure is a cross-sectional view taken along line VIIIa, b in Fig. 8(c), but for the sake of explanation, the bolts 101 are shown by dashed lines.

[0029] 8(c), the elastic mold 11 is screwed into the main mold 10 so that each bolt 101 will not come off even if high pressure is applied during the crimping process while avoiding the groove 22a. A total of eight bolts 101 are used, two at each corner of the elastic mold 11, which has a rectangular shape in a plan view. However, this is not limited to this, and three or more bolts may be used at other positions.

[0030] In the crimping device 100 of the present invention, since the elastic body mold 11 can be detachably engaged with the main mold 10, when the elastic body 21 deteriorates due to repeated crimping steps, the elastic body 21 can be replaced with a new one together with the elastic body mold 11. Also, the elastic body mold 11 provided with the groove 22a can be attached to a conventional device having an elastic body mold without a groove. As a result, the same effect as that of the crimping device 100 of this embodiment can be obtained even with the conventional device. And, when the engagement means is a screwing means, the elastic body mold 11 can be more easily attached and detached from the main mold 10.

[0031] (Embodiments of the invention) A first embodiment of the present invention is a crimping device for crimping multiple workpieces, comprising: a conveying plate on which multiple workpieces can be stacked and moved; a side wall portion that abuts against the conveying plate, and a top wall portion and a pressing portion that cover the upper ends of the side wall portions, and which is movable relative to the workpiece placement surface of the conveying plate and abuts against the conveying plate to form a vacuum chamber; a metal frame attached to the top wall portion of the main body mold so as to be located within the vacuum chamber; an elastic body mold comprising an elastic body surrounded by the metal frame; and a groove formed on the surface of the elastic body mold that contacts the top wall portion of the metal frame and continuously connects the inner and outer edges of the metal frame, wherein the groove discharges gas remaining in the gap between the pressing portion of the main body mold and the elastic body of the elastic body mold into the vacuum chamber when the vacuum chamber is formed, and the main body mold moves the top wall portion and the pressing portion together with the elastic body mold toward the multiple workpieces, bringing the elastic body into contact with the multiple workpieces.

[0032] In this manner, when the vacuum chamber C is evacuated to press the workpiece W, the gap 23 is evacuated via the groove 22a. This suppresses sudden deformation of the elastic body 21 due to the positive pressure atmosphere of the gas in the gap 23, and prevents the workpiece W from shifting.

[0033] A second embodiment of the present invention is the first embodiment, wherein the elastic mold has a rectangular shape, and the grooves are provided spaced apart from the outer corners of the elastic mold and from the intermediate portions between adjacent outer corners.

[0034] In this way, the elastic mold 11 has a rectangular shape, and the grooves 22a are provided away from the outer edge corners and the middle parts between the adjacent outer edge corners of the elastic mold 11. This makes it possible to avoid the places in the elastic mold 11 where stress concentration is likely to occur, and prevents the elastic mold 11 from breaking during the crimping process.

[0035] A third embodiment of the present invention is a first or second embodiment, in which the elastomer mold is removably engaged with the main mold by an engagement means, and can be removed by disengaging it from the main mold.

[0036] In this manner, the elastic body mold 11 is removably engaged with the main body mold 10 by the engaging means, and can be removed by disengaging from the main body mold 10. This provides the advantage that when the elastic body 21 deteriorates due to repeated crimping steps, the elastic body 21 can be replaced together with the elastic body mold 11 for a new one.

[0037] Furthermore, the elastic die 11 with the groove 22a can be attached to a conventional device having an elastic die without a groove. This has the effect of preventing the elastic body from suddenly deforming due to the positive pressure atmosphere of gas in the gap, and preventing the work from shifting, even in the conventional device.

[0038] A fourth embodiment of the present invention is the third embodiment, in which the engaging means is a screw means.

[0039] In this way, the elastic body mold 11 is removably screwed to the main body mold 10 by a screwing means, and can be removed by unscrewing it from the main body mold 10. This has the effect of making it easier to attach and detach the elastic body mold 11 to and from the main body mold 10. [Explanation of symbols]

[0040] 100 Crimping device 10 Main body mold 11 Elastic mold 12 Transport plate 12a Placement surface 14 Vacuum Pump 15 Pressing section 16 Ceiling wall 17 Side wall 18 Interposition Pad 19 Interposition Pad 20 Flexible layer 21 Elastic Body 22 Metal frame 22a groove 23 Gap 27 Interior Space 101 Volts 102 Bolt Hole W work C. Vacuum chamber

Claims

1. A crimping device for crimping a plurality of workpieces, A conveying plate capable of moving the plurality of workpieces stacked on one another; a main mold that includes a side wall portion that contacts the conveying plate, and a top wall portion and a pressing portion that cover the upper end of the side wall portion, and is movable relative to a work placement surface of the conveying plate and contacts the conveying plate to form a vacuum chamber; an elastic body mold including a metal frame attached to the top wall of the main body mold so as to be located within the vacuum chamber, and an elastic body surrounded by the metal frame; a groove formed on a surface of the elastic mold that comes into contact with the top wall portion of the metal frame, the groove continuously connecting an inner edge portion and an outer edge portion of the metal frame; Equipped with the groove exhausts gas remaining in a gap between the pressing portion of the main body mold and the elastic body of the elastic body mold into the vacuum chamber when the vacuum chamber is formed; A crimping device in which the main body die moves the top wall portion and the pressing portion together with the elastic body die toward the multiple workpieces, bringing the elastic body into contact with the multiple workpieces.

2. The crimping device according to claim 1 , wherein the elastic die has a rectangular shape, and the groove is provided spaced apart from an outer edge corner of the elastic die and from a middle portion between adjacent outer edge corners.

3. 3. The crimping device according to claim 1, wherein the elastic mold is removably engaged with the main mold by an engaging means, and is removable by disengaging from the main mold.

4. 4. The crimping device of claim 3, wherein said engagement means is a threaded engagement means.

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