Processing equipment

Abstract

To provide a processing device which can inform a state of the interior of the processing device to an operator.SOLUTION: A processing device processes a processed object and includes: a chuck table which holds the processed object; a processing unit which processes the processed object held by the chuck table; an imaging unit which captures images of objects contained in the processing device to create the images; a control unit including a storage part which stores the images created by the imaging unit; and a display unit which displays the multiple images created by the imaging unit imaging the objects at different timings.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a processing device for processing a workpiece. [Background technology]

[0002] In the device chip manufacturing process, a wafer is used in which devices are formed in multiple areas partitioned by multiple streets (planned division lines) arranged in a grid pattern. By dividing this wafer along the streets, multiple device chips, each equipped with a device, are obtained. The device chips are incorporated into various electronic devices such as mobile phones and personal computers.

[0003] For example, a cutting device is used to divide the wafer. The cutting device includes a chuck table that holds the workpiece, and a processing unit (cutting unit) that performs cutting processing on the workpiece held by the chuck table (see Patent Document 1). The cutting unit has a built-in spindle that functions as a rotation shaft, and an annular cutting blade is attached to the tip of the spindle. The cutting blade is rotated and cuts into the wafer held by the chuck table, thereby cutting and dividing the wafer.

[0004] In recent years, with the miniaturization of electronic devices, there is a demand for thinner device chips. Therefore, a process to thin the wafer is sometimes carried out before the wafer is divided. To thin the wafer, a grinding device equipped with a processing unit (grinding unit) that grinds the workpiece with a grinding wheel, or a polishing device equipped with a processing unit (polishing unit) that polishes the workpiece with a polishing pad, etc. are used. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2011-159823 A Summary of the Invention [Problem to be solved by the invention]

[0006] When processing a workpiece with the above-mentioned various processing devices, foreign matter such as chips (processing chips) generated during processing of the workpiece and liquids (processing liquid, cleaning liquid, etc.) supplied to the workpiece or processing unit scatter and adhere to the inside of the processing device. If the foreign matter or liquid is left adhering to the components (parts) of the processing device, it may cause malfunctions of the components, contamination of the workpiece, or other problems.

[0007] Therefore, when the processing equipment is in operation, it is required to periodically carry out maintenance to clean the components of the processing equipment. However, the timing of maintenance is often left to the discretion of the processing equipment operator. If the operator miscalculates the timing of maintenance and the cleaning work is not carried out for an extended period of time, foreign matter and liquids will accumulate inside the processing equipment, making it more likely to cause malfunctions.

[0008] Also, in order to ensure that cleaning of processing equipment is performed at an appropriate frequency, a method is sometimes used in which a message prompting the performance of maintenance is periodically displayed on a display unit (display) mounted on the processing equipment. However, while the processing equipment is operating normally, the necessity and urgency of the cleaning work is not easily conveyed to the operator by the message alone, and maintenance may be postponed.

[0009] The present invention has been made in consideration of the above problems, and has an object to provide a processing device capable of notifying an operator of the internal state of the processing device. [Means for solving the problem]

[0010] According to one aspect of the present invention, there is provided a processing apparatus for processing a workpiece, the processing apparatus comprising: a chuck table for holding the workpiece; and a chuck for holding the workpiece by the chuck table. A cutting blade for cutting is attached, and a blade cover for covering the cutting blade is provided. Processing unit and object that is a component of processing device The processing unit having the blade cover as aan imaging unit that captures an image and generates an image; and a control unit including a storage unit that stores the image generated by the imaging unit; The workpiece before and after cutting By timing The processing unit having the blade cover and a display unit that simultaneously displays a plurality of images generated by capturing the image with the imaging unit. According to another aspect of the present invention, there is provided a processing device for processing a workpiece, the processing device comprising: a chuck table for holding the workpiece, a processing unit for processing the workpiece held by the chuck table, a moving mechanism for moving the chuck table, a dust-proof and drip-proof cover for covering components of the moving mechanism, an imaging unit for capturing an image of the dust-proof and drip-proof cover as an object that is a component constituting the processing device, a control unit including a memory unit for storing the image generated by the imaging unit, and a display unit for simultaneously displaying a plurality of images generated by capturing an image of the dust-proof and drip-proof cover with the imaging unit at different times. Furthermore, according to another aspect of the present invention, there is provided a processing apparatus for processing a workpiece, the processing apparatus comprising: a chuck table for holding the workpiece, a processing unit for processing the workpiece held by the chuck table, a spinner table for holding and rotating the workpiece, and a nozzle for supplying cleaning liquid to the workpiece held by the spinner table, a cleaning unit for cleaning the workpiece, an imaging unit for imaging the spinner table as an object that is a component of the processing apparatus and generating an image, a control unit including a memory unit for storing the image generated by the imaging unit, and a display unit for simultaneously displaying multiple images generated by imaging the spinner table with the imaging unit at different times.

[0011] Preferably, the storage unit stores subject information specifying the object together with the image, and the display unit displays the subject information together with the image. Also, preferably, the storage unit stores timing information indicating the timing at which the imaging unit captured the object together with the image, and the display unit displays the timing information together with the image. Also, preferably, the display unit displays the image while the processing device is starting up, while the processing device is shutting down, or while the workpiece is being processed. .Ma Also preferably, The processing device is one The imaging unit By The display unit is capable of capturing images of a plurality of the objects. Preferably, the display unit is capable of simultaneously displaying the images of two or more types of the objects. Effect of the Invention

[0012] In the processing device according to one aspect of the present invention, a plurality of images generated by capturing images of an object with an imaging unit at different times are displayed on a display unit. This allows the image of the object's appearance to show the degree to which foreign matter, liquid, etc. has adhered to the object over time. As a result, the operator can visually recognize the internal condition of the processing device, and the operator can easily be informed of the necessity and urgency of cleaning work. [Brief description of the drawings]

[0013] [Figure 1] FIG. [Diagram 2] FIG. 2(A) is a perspective view showing the processing unit, and FIG. 2(B) is a perspective view showing the processing unit with a blade cover attached. [Diagram 3] FIG. 2 is a block diagram showing a control unit. [Figure 4] FIG. 2 is a front view showing a display unit that displays a display screen. [Diagram 5] FIG. 2 is a perspective view showing an imaging unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, an embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. First, a configuration example of a processing device according to this embodiment will be described. FIG. 1 is a perspective view showing a processing device 2. The processing device 2 is a cutting device that processes a workpiece with an annular cutting blade. In FIG. 1, the X-axis direction (processing feed direction, first horizontal direction, front-back direction) and the Y-axis direction (indexing feed direction, second horizontal direction, left-right direction) are perpendicular to each other. Also, the Z-axis direction (vertical direction, up-down direction, height direction) is perpendicular to the X-axis direction and the Y-axis direction.

[0015] The processing device 2 includes a rectangular parallelepiped base 4 that supports or houses each of the components that make up the processing device 2. A rectangular opening 4a that opens onto the upper surface of the base 4 is provided at a corner on the front end side of the base 4. A cassette support table 6 that is raised and lowered by a lifting mechanism (not shown) is provided inside the opening 4a. A cassette 8 capable of housing a plurality of workpieces 11 to be processed by the processing device 2 is disposed on the upper surface of the cassette support table 6. Note that in FIG. 1, the outline of the cassette 8 is indicated by a two-dot chain line.

[0016] For example, the workpiece 11 is a disk-shaped wafer made of a semiconductor material such as silicon, and has a front surface and a back surface that are generally parallel to each other. The workpiece 11 is partitioned into a plurality of rectangular regions by a plurality of streets (planned division lines) arranged in a lattice pattern so as to intersect with each other. Furthermore, devices such as ICs (Integrated Circuits), LSIs (Large Scale Integration), LEDs (Light Emitting Diodes), and MEMS (Micro Electro Mechanical Systems) devices are formed in each of the plurality of regions partitioned by the streets on the front surface side of the workpiece 11.

[0017] A circular tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is attached to the back side of the workpiece 11. The tape 13 includes a film-like base material and an adhesive layer (glue layer) on the base material. For example, the base material is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate, and the adhesive layer is made of an epoxy-, acrylic-, or rubber-based adhesive. The adhesive layer may be made of an ultraviolet-curing resin that is cured by irradiation with ultraviolet rays.

[0018] The outer periphery of the tape 13 is affixed to an annular frame 15 made of metal or the like. The frame 15 has a circular opening in the center that is larger in diameter than the workpiece 11, and the workpiece 11 is placed inside the opening of the frame 15. When the center of the tape 13 is affixed to the workpiece 11 and the outer periphery of the tape 13 is affixed to the frame 15, the workpiece 11 is supported by the frame 15 via the tape 13.

[0019] The workpiece 11 is accommodated in a cassette 8 while being supported by a frame 15, and is processed by the processing device 2. For example, the processing device 2 cuts and divides the workpiece 11 along the streets to produce a plurality of device chips, each of which includes a device.

[0020] However, there are no limitations on the type, material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a wafer (substrate) made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), glass, sapphire, ceramics, resin, metal, etc. Furthermore, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded Package) substrate.

[0021] A rectangular opening 4b is provided on the side of the opening 4a, opening on the upper surface side of the base 4 and extending longitudinally along the X-axis direction. A ball screw type moving mechanism (moving unit) 10 is provided inside the opening 4b. A chuck table (holding table) 12 that holds a workpiece 11 is connected to the moving mechanism 10. The moving mechanism 10 includes a table cover 14 that covers the periphery of the chuck table 12. In addition, bellows-shaped dust-proof and drip-proof covers 16 that are expandable and contractible along the X-axis direction are provided in front and behind the table cover 14 so as to cover the components of the moving mechanism 10.

[0022] The upper surface of the chuck table 12 is a flat surface that is approximately parallel to the X-axis direction and the Y-axis direction, and constitutes a holding surface 12a that holds the workpiece 11. The holding surface 12a is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), and the like formed inside the chuck table 12.

[0023] The moving mechanism 10 moves the chuck table 12 together with the table cover 14 along the X-axis direction. A rotary drive source (not shown), such as a motor, is connected to the chuck table 12, and this rotary drive source rotates the chuck table 12 around a rotation axis roughly parallel to the Z-axis direction. Furthermore, a plurality of clamps 18 are provided around the chuck table 12 to grip and fix a frame 15 supporting the workpiece 11.

[0024] A transport mechanism (not shown) is provided near the openings 4a and 4b to transport the workpiece 11 between the cassette 8 and the chuck table 12. The workpiece 11 is drawn out of the cassette 8 by the transport mechanism and transported to the chuck table 12. The workpiece 11 is then placed on the holding surface 12a of the chuck table 12 via the tape 13. In addition, the frame 15 is fixed by a plurality of clamps 18. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 12a, the workpiece 11 is suction-held by the chuck table 12 via the tape 13.

[0025] A pair of processing units (cutting units) 20a, 20b that cut the workpiece 11 are provided above the chuck table 12. The processing units 20a, 20b cut the workpiece 11 held by the chuck table 12 with an annular cutting blade 70.

[0026] 2(A) is a perspective view showing the machining unit 20a. The machining unit 20a includes a housing 60 formed in a hollow cylindrical shape. A cylindrical spindle 62 arranged along the Y-axis direction is accommodated in the housing 60. A tip end (one end side) of the spindle 62 is exposed from the housing 60. A rotation drive source (not shown) such as a motor that rotates the spindle 62 is connected to a base end (the other end side) of the spindle 62.

[0027] A mount 64 that supports a cutting blade 70 is fixed to the tip of the spindle 62. The mount 64 includes a disk-shaped flange portion 66 and a cylindrical support shaft (boss portion) 68 that protrudes from the center of a surface 66a of the flange portion 66. On the surface 66a side of the outer periphery of the flange portion 66, an annular protrusion 66b that protrudes from the surface 66a is provided along the outer periphery of the flange portion 66. The tip surface of the protrusion 66b is formed generally parallel to the surface 66a. A threaded portion 68a is formed on the outer periphery of the support shaft 68.

[0028] An annular cutting blade 70 for cutting the workpiece 11 is attached to the mount 64. The cutting blade 70 includes an annular base 72 made of a metal such as an aluminum alloy, and an annular cutting edge 74 formed along the outer edge of the base 72. A cylindrical opening 70a penetrating the cutting blade 70 in the thickness direction is provided in the center of the cutting blade 70.

[0029] The cutting blade 74 is formed so as to protrude from the outer periphery of the base 72 toward the outside in the radial direction of the base 72. For example, the cutting blade 74 is formed by fixing abrasive grains made of diamond, cubic boron nitride (cBN), or the like, with a binder such as a nickel plating layer. There are no limitations on the material of the abrasive grains, the grain size of the abrasive grains, the material of the binder, or the like, and they are appropriately selected depending on the material of the workpiece 11, etc.

[0030] An annular fixing nut 76 for fixing the cutting blade 70 is fastened to the threaded portion 68a of the support shaft 68. A cylindrical opening 76a penetrating the fixing nut 76 in the thickness direction is provided in the center of the fixing nut 76. A thread groove corresponding to the threaded portion 68a of the support shaft 68 is formed on the inner peripheral surface of the fixing nut 76 exposed inside the opening 76a.

[0031] The cutting blade 70 is attached to the mount 64 so that the support shaft 68 is inserted into the opening 70a. In this state, when the fixing nut 76 is screwed onto the threaded portion 68a of the support shaft 68 and tightened, the cutting blade 70 is clamped between the tip surface of the convex portion 66b of the flange portion 66 and the fixing nut 76, and fixed to the tip portion (mount 64) of the spindle 62. Then, the cutting blade 70 rotates around a rotation axis roughly parallel to the Y-axis direction by power transmitted from a rotation drive source via the spindle 62 and the mount 64.

[0032] 2(B) is a perspective view showing the processing unit 20a to which the blade cover 78 is attached. The cutting blade 70 fixed to the processing unit 20a is covered by the blade cover 78 attached to the housing 60. The blade cover 78 includes a pair of connection parts 80 connected to a tube (not shown) through which a liquid (processing liquid) such as pure water is supplied, and a pair of nozzles 82 connected to the connection parts 80 and disposed so as to sandwich the lower end of the cutting blade 70. Each of the pair of nozzles 82 is formed with a supply port (not shown) that opens toward the cutting blade 70.

[0033] When machining fluid is supplied from the tube to the connection part 80, the machining fluid is supplied from the supply ports of the pair of nozzles 82 toward the front and back surfaces of the cutting blade 70. This machining fluid cools the workpiece 11 and the cutting blade 70, and washes away chips (machining chips) generated by machining.

[0034] The cutting blade 70 is rotated and cuts into the workpiece 11 held by the chuck table 12 (see FIG. 1), thereby cutting the workpiece 11. Although FIGS. 2(A) and 2(B) show the processing unit 20a, the processing unit 20b can also be configured in the same manner as the processing unit 20a.

[0035] As shown in Fig. 1, a gate-shaped support structure 22 supporting the processing units 20a, 20b is disposed on the upper surface of the base 4 so as to straddle the opening 4b. A moving mechanism (moving unit) 24a for moving the processing unit 20a along the Y-axis direction and the Z-axis direction, and a moving mechanism (moving unit) 24b for moving the processing unit 20b along the Y-axis direction and the Z-axis direction are provided on both ends of the front side of the support structure 22. The moving mechanisms 24a, 24b are attached to a pair of guide rails 26 disposed on the front side of the support structure 22 along the Y-axis direction.

[0036] The moving mechanism 24a includes a flat moving plate 28a. The moving plate 28a is slidably mounted on the pair of guide rails 26. A nut (not shown) is provided on the back side (rear side) of the moving plate 28a, and a ball screw 30a arranged generally parallel to the guide rails 26 is screwed into the nut. A pulse motor (not shown) that rotates the ball screw 30a is connected to an end of the ball screw 30a. When the ball screw 30a is rotated by the pulse motor, the moving plate 28a moves in the Y-axis direction along the guide rails 26.

[0037] A pair of guide rails 34a are fixed along the Z-axis direction on the surface (front) side of the moving plate 28a. A flat moving plate 36a is slidably attached to the pair of guide rails 34a. A nut (not shown) is provided on the back side (rear side) of the moving plate 36a, and a ball screw 38a arranged approximately parallel to the guide rail 34a is screwed into this nut. A pulse motor 40a that rotates the ball screw 38a is connected to an end of the ball screw 38a. When the ball screw 38a is rotated by the pulse motor 40a, the moving plate 36a moves along the guide rails 34a in the Z-axis direction.

[0038] The moving mechanism 24b includes a flat moving plate 28b. The moving plate 28b is slidably mounted on the pair of guide rails 26. A nut (not shown) is provided on the back side (rear side) of the moving plate 28b, and a ball screw 30b arranged generally parallel to the guide rails 26 is screwed into the nut. A pulse motor 32 that rotates the ball screw 30b is connected to an end of the ball screw 30b. When the ball screw 30b is rotated by the pulse motor 32, the moving plate 28b moves in the Y-axis direction along the guide rails 26.

[0039] A pair of guide rails 34b are fixed along the Z-axis direction on the front surface (front face) side of the moving plate 28b. A flat moving plate 36b is slidably mounted on the pair of guide rails 34b. A nut (not shown) is provided on the back surface (rear face) side of the moving plate 36b, and a ball screw 38b arranged approximately parallel to the guide rail 34b is screwed into this nut. A pulse motor 40b that rotates the ball screw 38b is connected to an end of the ball screw 38b. When the ball screw 38b is rotated by the pulse motor 40b, the moving plate 36b moves along the guide rails 34b in the Z-axis direction.

[0040] The machining unit 20a is fixed to the lower part of the movable plate 36a, and the machining unit 20b is fixed to the lower part of the movable plate 36b. In addition, an imaging unit 42 that images the workpiece 11 held by the chuck table 12 and the like is provided at a position adjacent to the machining unit 20a.

[0041] For example, the imaging unit 42 includes a visible light camera having an imaging element that receives visible light and converts it into an electrical signal, and an infrared camera having an imaging element that receives infrared light and converts it into an electrical signal. The image acquired by the imaging unit 42 is used for aligning the workpiece 11 held by the chuck table 12 with the machining units 20a and 20b.

[0042] A circular opening 4c that opens on the upper surface side of the base 4 is provided on the side of the opening 4b opposite to the opening 4a. A cleaning unit 44 that cleans the workpiece 11 is provided inside the opening 4c. The cleaning unit 44 includes a spinner table 46 that holds and rotates the workpiece 11, and a nozzle 48 that supplies a cleaning liquid (cleaning liquid).

[0043] The upper surface of the spinner table 46 is a flat surface roughly parallel to the X-axis direction and the Y-axis direction, and constitutes a holding surface 46a that holds the workpiece 11. The holding surface 46a is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), and the like formed inside the spinner table 46. In addition, a rotation drive source (not shown) such as a motor that rotates the spinner table 46 around a rotation axis roughly parallel to the Z-axis direction is connected to the spinner table 46.

[0044] A nozzle 48 is disposed above the spinner table 46. With the workpiece 11 held by the spinner table 46, the workpiece 11 is cleaned by supplying cleaning liquid from the nozzle 48 while rotating the spinner table 46. There is no limitation on the composition of the cleaning liquid. For example, pure water, pure water mixed with a gas such as air (mixed fluid), etc. may be used as the cleaning liquid.

[0045] A transport mechanism (not shown) is provided near the openings 4b and 4c to transport the workpiece 11 between the chuck table 12 and the spinner table 46. After the workpiece 11 is processed by the processing units 20a and 20b, the transport mechanism transports the workpiece 11 from the chuck table 12 to the spinner table 46 and cleans it.

[0046] A cover 50 is provided on the upper side of the base 4 to cover the components mounted on the base 4. In Fig. 1, the outline of the cover 50 is indicated by a two-dot chain line. In addition, a display unit (display section, display device) 52 that displays various information related to the processing device 2 is provided on the side of the cover 50.

[0047] Various displays can be used as the display unit 52. For example, a touch panel is used as the display unit 52. In this case, the operator of the processing device 2 checks the information displayed on the display unit 52 and inputs information to the processing device 2 by touching the display unit 52. That is, the display unit 52 also functions as an input unit (input section, input device) for inputting various information to the processing device 2, and is used as a user interface. However, the input section may be a mouse, a keyboard, etc. provided separately and independently from the display unit 52.

[0048] An alarm unit (alarm section, alarm device) 54 that notifies an operator of information is provided on the upper surface side of the cover 50. For example, the alarm unit 54 is an indicator light that lights up or flashes when a predetermined phenomenon (such as an abnormality in the processing device) occurs in the processing device 2 to notify the operator of the occurrence of the phenomenon. The alarm unit 54 may also be a speaker. In this case, the alarm unit 54 emits a sound (notification sound) or a voice (notification message) to notify the operator of the occurrence of a predetermined phenomenon when the processing device 2 occurs.

[0049] Moreover, one or more imaging units 56 that capture an image of an object (subject) are provided inside the cover 50. A specific component included in the processing device 2 is set as an object to be imaged by the imaging unit 56. The imaging unit 56 monitors the state of the object by capturing an image of the object.

[0050] There is no limit to the number of imaging units 56 mounted on the processing device 2, and they can be freely selected according to the number of objects to be monitored. Fig. 1 shows, as an example, the processing device 2 equipped with three imaging units 56 (imaging units 56a, 56b, 56c). The imaging units 56a, 56b, 56c are imaging units 56 that capture the processing unit 20a, the dust-proof and drip-proof cover 16, and the spinner table 46, respectively.

[0051] The imaging unit 56a is installed to the side of the processing unit 20a, and generates an image of the processing unit 20a by imaging the processing unit 20a from the cutting blade 70 side. The imaging unit 56b is installed directly above the dust-proof and drip-proof cover 16, and generates an image of the dust-proof and drip-proof cover 16 by imaging the dust-proof and drip-proof cover 16. The imaging unit 56c is installed directly above the spinner table 46, and generates an image of the spinner table 46 by imaging the spinner table 46.

[0052] However, there is no limitation on the subject of the imaging unit 56. For example, the imaging unit 56 may capture and monitor the moving mechanism 10, the chuck table 12, the table cover 14, the clamp 18, the processing unit 20b, the moving mechanisms 24a and 24b, the imaging unit 42, and the like.

[0053] The processing device 2 also includes a control unit (control unit, control device) 58 that controls the processing device 2. The control unit 58 is connected to each of the components constituting the processing device 2 (the cassette support base 6, the moving mechanism 10, the chuck table 12, the clamp 18, the processing units 20a and 20b, the moving mechanisms 24a and 24b, the imaging unit 42, the cleaning unit 44, the display unit 52, the notification unit 54, the imaging unit 56, etc.). The control unit 58 outputs control signals to each of the components of the processing device 2, thereby controlling the operation of each component and operating the processing device 2.

[0054] For example, the control unit 58 is configured by a computer. Specifically, the control unit 58 includes a processor such as a CPU (Central Processing Unit) that performs calculations necessary for the operation of the processing device 2, and a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory) that stores various information (data, programs, etc.) used for the operation of the processing device 2.

[0055] When the workpiece 11 is processed by the processing device 2, the workpieces 11 stored in the cassette 8 are transported one by one to the chuck table 12 by a transport mechanism (not shown). Then, the workpieces 11 sucked and held by the chuck table 12 are processed by the processing units 20a and 20b. Specifically, the cutting blade 70 attached to the processing unit 20a or the cutting blade 70 attached to the processing unit 20b is rotated and cut into the workpiece 11, thereby cutting the workpiece 11.

[0056] After processing, the workpiece 11 is transported to the cleaning unit 44 by a transport mechanism (not shown) and is suction-held by the spinner table 46. Then, the workpiece 11 is cleaned with a cleaning liquid supplied from a nozzle 48. Thereafter, the workpiece 11 is transported by the transport mechanism (not shown) and stored in the cassette 8 again.

[0057] In this embodiment, a predetermined object provided inside the cover 50 is imaged by the imaging unit 56. Specifically, the processing unit 20a, the dust-proof / water-proof cover 16, and the spinner table 46 are imaged by the imaging units 56a, 56b, and 56c, respectively. Then, the image of the object created by the imaging unit 56 is displayed on the display unit 52. This allows the operator to visually check the state of the object.

[0058] The operation of the processing device 2 is controlled by a control unit 58. Fig. 3 is a block diagram showing the control unit 58. In addition to a block showing the functional configuration of the control unit 58, Fig. 3 also shows schematic diagrams of some of the components of the processing device 2 (the chuck table 12, the clamp 18, the processing unit 20a, the moving mechanism 24a, the display unit 52, and the imaging unit 56a).

[0059] The control unit 58 includes a processing unit 90 and a storage unit 98. The processing unit 90 processes information (signals, data, etc.) input from the outside, and generates and outputs various types of information (signals, data, etc.) to the outside. The storage unit 98 stores information (data, programs, etc.) used for processing in the processing unit 90.

[0060] Specifically, the processing unit 90 includes an input unit 92 to which an image acquired by the imaging unit 56 is input. For example, the imaging unit 56a captures an image of the processing unit 20a set on the target object and outputs the image of the processing unit 20a to the input unit 92. Similarly, the imaging unit 56b (see FIG. 1) outputs an image of the dust-proof / water-proof cover 16 to the input unit 92, and the imaging unit 56c (see FIG. 1) outputs an image of the spinner table 46 to the input unit 92.

[0061] The processing unit 90 also includes a clock unit 94 that measures time. For example, the clock unit 94 measures the current date and time. However, the clock unit 94 may also measure the elapsed time from a predetermined reference time. The time measured by the clock unit 94 is sequentially output to the input unit 92.

[0062] Furthermore, the processing unit 90 includes a display control unit 96 that controls the display of the display unit 52. The display control unit 96 generates a control signal for causing the display unit 52 to display predetermined information, and outputs it to the display unit 52. When the control signal is input from the display control unit 96 to the display unit 52, the display unit 52 displays characters, numbers, symbols, charts, etc. indicating the predetermined information based on the control signal.

[0063] Next, a specific example of an operation method of the processing device 2 will be described with reference to Fig. 3. Note that, as a representative example, the operation will be described below when an image of the processing unit 20a captured by the imaging unit 56a is displayed on the display unit 52. However, the operation is similar when images of the dust-proof / water-proof cover 16 and the spinner table 46 captured by the imaging units 56b and 56c (see Fig. 1) are displayed on the display unit 52.

[0064] First, the target portion is imaged by the imaging unit 56 to obtain an image of the target object (reference image obtaining step). Specifically, the imaging unit 56a images the target object, that is, the processing unit 20a, to generate an image of the processing unit 20a.

[0065] For example, the imaging unit 56a captures an image of the machining unit 20a (unused machining unit 20a, brand new machining unit 20a) before cutting the workpiece 11. In this case, the image generated by the imaging unit 56a shows the machining unit 20a in a clean state with no foreign matter (machining debris, etc.) or liquid (machining liquid, cleaning liquid, etc.) adhering thereto (see image 104a in FIG. 4). Then, the imaging unit 56a outputs the acquired image to the input section 92. This image is used as a reference image to be displayed on the display unit 52 in a display step described later.

[0066] The imaging unit 56a also outputs information (subject information) that identifies an object imaged by the imaging unit 56a to the input unit 92. For example, the imaging units 56a, 56b, and 56c (see FIG. 1) store identification information (such as an identification number) that indicates the subject of the imaging units 56a, 56b, and 56c as the subject information, respectively. The imaging unit 56a then inputs to the input unit 92 an image generated by the imaging unit 56a and subject information that indicates that the component shown in the image is the processing unit 20a.

[0067] Next, the input unit 92 accesses the storage unit 98 and stores the image and subject information input from the imaging unit 56a in the storage unit 98. The input unit 92 also stores the time (imaging time) measured by the timer unit 94 when the image is input from the imaging unit 56a to the input unit 92, together with the image and the subject information, in the storage unit 98. This imaging time corresponds to information (timing information) indicating the timing at which the imaging unit 56a images the machining unit 20a, that is, the timing at which the image is generated. However, there is no limitation on the content and acquisition method of the timing information. For example, the acquisition time of the image measured by a timer built into the imaging unit 56a may be input to the input unit 92 as the timing information.

[0068] In this way, in the reference image acquisition step, the image (reference image) generated by the imaging unit 56a, subject information identifying the object (processing unit 20a) depicted in the image, and timing information indicating the timing at which the image was generated are stored in the memory unit 98 in a linked state to each other.

[0069] Next, the workpiece 11 is processed by the processing unit 20a (processing step). Specifically, the workpiece 11 held by the chuck table 12 is cut by the cutting blade 70 attached to the processing unit 20a. The processed workpiece 11 is then transported to the cleaning unit 44 (see FIG. 1) and held by the spinner table 46. The workpiece 11 is then washed with a cleaning liquid supplied from a nozzle 48.

[0070] When the workpiece 11 is cut by the machining unit 20a, foreign matter (machining chips, etc.) and liquid (machining fluid) are scattered. As a result, the foreign matter and liquid adhere to and accumulate on the dust-proof / water-proof cover 16 and the machining unit 20a. When the workpiece 11 is cleaned by the cleaning unit 44, the foreign matter and cleaning fluid adhering to the workpiece 11 adhere to and accumulate on the holding surface 46a of the spinner table 46. Therefore, as the machining of the workpiece 11 by the machining device 2 continues, the dust-proof / water-proof cover 16, the machining unit 20a, and the spinner table 46 gradually become dirty.

[0071] Next, the target portion is imaged by the imaging unit 56, and an image of the target object is obtained (observation image obtaining step). Specifically, after the processing and cleaning of the workpiece 11 by the processing device 2 is continued for a certain period of time, the imaging unit 56a images the target object, that is, the processing unit 20a, at a predetermined timing, and an image of the processing unit 20a is generated. This image is used as an observation image displayed on the display unit 52 in a display step described later.

[0072] In the observation image acquisition step, the imaging unit 56a captures an image of the machining unit 20a (used machining unit 20a) after cutting the workpiece 11. Therefore, the image generated by the imaging unit 56a shows the machining unit 20a with foreign matter or liquid attached thereto (see image 104b in FIG. 4). Then, the imaging unit 56a outputs the acquired image and subject information to the input unit 92.

[0073] Next, the input unit 92 accesses the storage unit 98 and stores the image and subject information input from the imaging unit 56a and the imaging time input from the timer unit 94 in the storage unit 98. As a result, similar to the reference image acquisition step, the image (observation image) generated by the imaging unit 56a, the subject information identifying the object (processing unit 20a) appearing in the image, and the timing information indicating the timing at which the image was generated are stored in the storage unit 98 in a linked state.

[0074] Next, the image acquired in the reference image acquiring step (reference image) and the image acquired in the observation image acquiring step (observation image) are displayed on the display unit 52 (display step). In the display step, a control signal is output from the display control unit 96 to the display unit 52, and the reference image and the observation image are displayed on the display unit 52.

[0075] Specifically, first, the reference image and the observation image stored in the storage unit 98 are read out and input to the display control unit 96. At this time, the subject information and timing information linked to the reference image are also input to the display control unit 96 together with the reference image. Similarly, the subject information and timing information linked to the observation image are also input to the display control unit 96 together with the observation image.

[0076] Then, the display control unit 96 generates a control signal for displaying the reference image, the observation image, the subject information, and the timing information on the display unit 52. When this control signal is input to the display unit 52, a display screen is displayed on the display unit 52.

[0077] 4 is a front view showing display unit 52 displaying a display screen (display image) 100. Display screen 100 includes a display field (reference image display field) 102a for displaying a reference image, and a display field (observation image display field) 102b for displaying an observation image. For example, display fields 102a and 102b are displayed adjacent to each other in the center of display screen 100.

[0078] In the display field 102a, an image (reference image) 104a acquired in the reference image acquisition step is displayed. For example, the image 104a is an image representing an unused machining unit 20a. In addition, in the display field 102a, object information 106a of the object (machining unit 20a) represented in the image 104a and timing information 108a of the image 104a are displayed.

[0079] In the display field 102b, an image (observation image) 104b acquired in the observation image acquisition step is displayed. For example, the image 104b is an image representing a used machining unit 20a. In addition, in the display field 102b, subject information 106b of the subject (machining unit 20a) represented in the image 104b and timing information 108b of the image 104b are displayed.

[0080] For example, the display fields 102a and 102b display a character string "processing unit" representing the name of the subject as subject information 106a and 106b, respectively. Also, the display fields 102a and 102b display numbers representing the date (year / month / day) and time (hour / minute / second) when the images 104a and 104b were acquired as timing information 108a and 108b, respectively.

[0081] However, the display manner of the subject information 106a, 106b and the timing information 108a, 108b displayed in the display fields 102a, 102b can be changed as appropriate. For example, if the components represented by the images 104a, 104b are clear at a glance, the display of the subject information 106a, 106b may be omitted. Also, only one of the date or time when the images 104a, 104b were acquired may be displayed as the timing information 108a, 108b. Furthermore, the time, number of days, number of months, number of years, etc. from when the image 104a was acquired to when the image 104b was acquired may be displayed as the timing information 108b displayed in the display field 102b.

[0082] By simultaneously displaying the images 104a and 104b on the display unit 52, the operator of the processing device 2 can visually compare the appearance of the processing unit 20a before and after use, and can instantly recognize that foreign matter or liquid is attached to the processing unit 20a. As a result, the operator can easily recognize that the processing unit 20a needs to be cleaned, and maintenance of the processing device 2 is urged. When the display screen 100 is displayed on the display unit 52, the notification unit 54 (see FIG. 1) may be caused to notify the operator that the display screen 100 is being displayed, and the operator may be urged to check the display screen 100.

[0083] The above-mentioned operating method of the processing apparatus 2 is realized by controlling the operation of each component of the processing apparatus 2 by the control unit 58. Specifically, a storage section 98 of the control unit 58 stores a program for causing the processing apparatus 2 to execute a reference image acquisition step, a processing step, an observation image acquisition step, and a display step. Then, the control unit 58 reads out the program from the storage section 98, executes it, and outputs a control signal to each component of the processing apparatus 2. In this way, the operating method of the processing apparatus 2 according to this embodiment is implemented.

[0084] There is no limitation on the timing at which the reference image acquisition step, the observation image acquisition step, and the display step are performed. For example, the reference image acquisition step may be performed by the manufacturer of the processing device 2 before shipping the processing device 2, or may be performed by the user of the processing device 2. Also, the reference image acquisition step may be performed immediately after maintenance of the processing unit 20a is performed, and an image of the processing unit 20a after cleaning may be stored in the storage unit 98 as a reference image.

[0085] Also, for example, the observation image acquiring step is performed immediately before the display step is performed. In this case, the observation image acquiring step is performed at a predetermined timing while the processing device 2 is in operation, and then the display step is performed continuously. The observation image acquiring step may also be performed at a predetermined time interval while the processing device 2 is in operation. In this case, a plurality of observation images are stored in the memory unit 98.

[0086] Also, for example, the display step is performed during the period from when a start instruction is given to the processing device 2 until the processing device 2 is ready to process the workpiece 11 (during the start-up of the processing device 2) or during the period from when a stop instruction is given to the processing device 2 until the processing device 2 stops (during the shut-down of the processing device 2). Also, the display step may be performed during the processing of the workpiece 11 by the processing device 2, that is, during the transportation, processing, cleaning, etc. of the workpiece 11.

[0087] Although the above describes the case where the machining unit 20a is observed, the observation of other components of the machining device 2 can be performed in a similar manner. For example, when the dustproof / waterproof cover 16 is imaged by the imaging unit 56b (see FIG. 1), images of the dustproof / waterproof cover 16 before and after use are displayed on the display unit 52. When the spinner table 46 is imaged by the imaging unit 56c (see FIG. 1), images of the spinner table 46 before and after use are displayed on the display unit 52. This notifies the operator of a change in the state of the dustproof / waterproof cover 16 or the spinner table 46. Images of two or more types of components before and after use may be displayed simultaneously on the display unit 52.

[0088] As described above, in the processing device 2 according to this embodiment, images 104a and 104b generated by capturing images of an object with the imaging unit 56 at different times are displayed on the display unit 52 (see FIG. 4). This allows the image of the external appearance of an object to show how much foreign matter, liquid, etc. has adhered to the object inside the processing device 2 over time. As a result, the operator can visually recognize the internal state of the processing device 2, making it easier to convey to the operator the necessity and urgency of a cleaning operation.

[0089] The imaging unit 56 mounted on the processing device 2 can be freely designed as long as it can capture an image of the target object. Fig. 5 is a perspective view showing the imaging unit 56. For example, the imaging unit 56 includes a camera 120 that captures an image of the target object, and a cover mechanism 130 provided adjacent to the camera 120.

[0090] A visible light camera, an infrared camera, or the like can be used as camera 120. For example, camera 120 is a visible light camera equipped with image sensor 122 including a plurality of imaging elements, lens (objective lens) 124, and lens cover 126. Note that lens cover 126 is a transparent member (transparent body) through which visible light passes, and is made of, for example, plastic, glass (quartz glass, borosilicate glass, etc.), or the like.

[0091] The cover mechanism 130 includes a disk-shaped cover 132. The cover 132 is a transparent body similar to the lens cover 126, and includes a front surface 132a and a back surface 132b. The radius of the cover 132 is larger than the width (diameter) of the lens cover 126, and the cover 132 is disposed so as to overlap with the lens cover 126.

[0092] Furthermore, the cover mechanism 130 includes a cylindrical spindle 134 disposed along the thickness direction of the lens cover 126. One end of the spindle 134 is connected to the center of the back surface 132b of the cover 132, and the other end of the spindle 134 is connected to a rotation drive source 136 such as a motor. Power transmitted from the rotation drive source 136 to the cover 132 via the spindle 134 causes the cover 132 to rotate around a rotation axis that is approximately parallel to the thickness direction of the cover 132.

[0093] The camera 120 is disposed so that the lens cover 126 faces the object. Then, light from the object passes through the cover 132, the lens cover 126, and the lens 124, and is received by the image sensor 122. In this way, an image of the object is captured.

[0094] Here, lens cover 126 of camera 120 is covered with cover 132. This prevents foreign matter or liquid from adhering to lens cover 126. Furthermore, when capturing an image of an object with camera 120, if cover 132 is rotated, foreign matter or liquid adhering to cover 132 is blown away by centrifugal force. This prevents foreign matter or liquid from appearing in the image generated by camera 120, and a clear image is acquired.

[0095] It is preferable that surface 132a of cover 132 is curved in a convex shape so that the closer to the center the region is, the more it is disposed on the opposite side to spindle 134. This makes it easier for foreign matter or liquid adhering to surface 132a of cover 132 to move toward the outer periphery of cover 132 and be removed from cover 132.

[0096] 1 illustrates the processing device 2 equipped with a plurality of imaging units 56 (imaging units 56a, 56b, 56c), but the processing device 2 may be equipped with only one imaging unit 56. The imaging unit 56 may be connected to a moving mechanism capable of positioning the imaging unit 56 at two or more different positions. In this case, a plurality of objects can be imaged using one imaging unit 56. An image generated by the imaging unit 56 and position information (subject information) of the imaging unit 56 when the imaging unit 56 images the object are input to the input unit 92 (see FIG. 3).

[0097] Further, a storage chamber for storing the imaging unit 56 may be provided inside the processing device 2. By storing the imaging unit 56 in the storage chamber while the imaging unit 56 is not capturing an image of an object, it is possible to prevent foreign matter or liquid from adhering to the imaging unit 56.

[0098] Furthermore, in this embodiment, an example has been described in which the processing device 2 is a cutting device that cuts the workpiece 11 using the processing units (cutting units) 20a and 20b, but there is no limitation on the type of the processing device 2. For example, the processing device 2 may be a grinding device equipped with a processing unit (grinding unit) that grinds the workpiece 11, or a polishing device equipped with a processing unit (polishing unit) that polishes the workpiece 11.

[0099] The grinding unit of the grinding device has a spindle, and an annular grinding wheel including a grinding stone is attached to the tip of the spindle. The grinding unit grinds the workpiece 11 by bringing the grinding stone into contact with the workpiece 11 while rotating the grinding wheel. The polishing unit of the polishing device has a spindle, and a disk-shaped polishing pad is attached to the tip of the spindle. The polishing unit polishes the workpiece 11 by bringing the polishing pad into contact with the workpiece 11 while rotating the polishing pad.

[0100] The processing device 2 may also be a laser processing device equipped with a processing unit (laser irradiation unit) that processes the workpiece 11 by irradiating it with a laser beam. The laser irradiation unit includes a laser oscillator that oscillates a laser with a predetermined wavelength, and a condenser that condenses the laser beam emitted from the laser oscillator. The workpiece 11 is processed by irradiating the workpiece 11 with a laser beam from the laser irradiation unit.

[0101] In addition, the structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0102] 11 Workpiece 13 Tape (dicing tape) 15 Frames 2 Processing equipment 4 Foundation 4a,4b,4c opening 6 Cassette Support Stand 8 Cassettes 10. Mobile mechanism (mobile unit) 12 Chuck table (holding table) 12a Holding surface 14 Table Cover 16 Dust-proof / water-proof cover 18 Clamp 20a, 20b Processing unit (cutting unit) 22 Support structure 24a, 24b Moving mechanism (moving unit) 26 Guide rail 28a, 28b Moving plate 30a, 30b Ball screw 32 Pulse motor 34a, 34b Guide rail 36a, 36b Moving plate 38a, 38b Ball screw 40a, 40b Pulse motor 42 Imaging unit 44 Cleaning Unit 46 Spinner Table 46a Holding surface 48 Nozzles 50 Cover 52 Display unit (display unit, display device) 54 Notification unit (notification section, notification device) 56, 56a, 56b, 56c Imaging unit 58 Control unit (control unit, control device) 60 Housing 62 Spindle 64 Mount 66 Flange part 66a surface 66b Convex 68 Support shaft (boss part) 68a Threaded part 70 Cutting Blade 70a aperture 72 Foundation 74 Cutting blade 76 Fixing nut 76a aperture 78 Blade Cover 80 Connection 82 Nozzle 90 Processing section 92 Input section 94 Timing section 96 Display control section 98 Memory section 100 Display screen (display image) 102a Display field (reference image display field) 102b Display column (observation image display column) 104a Image (reference image) 104b Image (observation image) 106a, 106b Subject information 108a, 108b Timing information 120 Camera 122 Image Sensor 124 Lens (Objective Lens) 126 Lens cover 130 Cover mechanism 132 Cover 132a surface 132b back side 134 Spindle 136 Rotational drive source

Claims

1. A processing device for processing a workpiece, comprising: A chuck table for holding the workpiece; a machining unit to which a cutting blade for cutting the workpiece held by the chuck table is attached and which includes a blade cover for covering the cutting blade; an imaging unit for capturing an image of the processing unit having the blade cover as an object that is a component of the processing device, and generating an image of the processing unit; a control unit including a storage unit for storing the image generated by the imaging unit; A processing apparatus characterized by comprising: a display unit that simultaneously displays multiple images generated by capturing images of the processing unit equipped with the blade cover with the imaging unit before and after cutting the workpiece.

2. A processing device for processing a workpiece, comprising: A chuck table for holding the workpiece; a processing unit that processes the workpiece held by the chuck table; a moving mechanism for moving the chuck table; A dust-proof and drip-proof cover that covers the components of the movement mechanism; an imaging unit for capturing an image of the dust-proof and drip-proof cover as an object that is a component of the processing device, and generating an image of the image; a control unit including a storage unit for storing the image generated by the imaging unit; and a display unit that simultaneously displays a plurality of images generated by capturing images of the dust-proof and drip-proof cover with the imaging unit at different times.

3. A processing device for processing a workpiece, comprising: A chuck table for holding the workpiece; a processing unit that processes the workpiece held by the chuck table; a cleaning unit for cleaning the workpiece, the cleaning unit including a spinner table for holding and rotating the workpiece and a nozzle for supplying a cleaning liquid to the workpiece held by the spinner table; an imaging unit for capturing an image of the spinner table as an object that is a component of the processing apparatus and generating an image of the object; a control unit including a storage unit for storing the image generated by the imaging unit; a display unit that simultaneously displays a plurality of images generated by capturing images of the spinner table with the imaging unit at different times.

4. The storage unit stores subject information that identifies the object together with the image, 4. The processing device according to claim 1, wherein the display unit displays the subject information together with the image.

5. the storage unit stores timing information indicating a timing at which the imaging unit captured an image of the object together with the image; 5. The processing device according to claim 1, wherein the display unit displays the timing information together with the image.

6. 6. The processing apparatus according to claim 1, wherein the display unit displays the image while the processing apparatus is starting up, while the processing apparatus is shutting down, or while the workpiece is being processed.

7. A processing apparatus as described in any one of claims 1 to 6, characterized in that a plurality of objects can be imaged by a single imaging unit.

8. 8. The processing device according to claim 1, wherein the display unit is capable of simultaneously displaying the images of two or more types of the objects.

Images