Optical measuring device

Abstract

To realize high accuracy of measurement while making usability of a user better when measuring a dimension, etc., of a work-piece, which exceeds a visual field range.SOLUTION: An optical measuring device: obtains a first image 401 and a second image 402 that correspond to a one portion and the other portion of a work-piece, respectively to display them; specifies a first contour 306 included in the first image 401 based on a user operation, then specifies a second contour 308 included in the second image 402; sets an offset parameter indicating a relative physical relationship between a light receiving enclosure when the first image 401 was obtained and the light receiving enclosure when the second image 402 was obtained; and measures a dimension of the work-piece using the set offset parameter.SELECTED DRAWING: Figure 12

Description

[Technical field]

[0001] The present invention relates to an optical measuring device that measures a workpiece by projecting measurement light into a space in which the workpiece is placed. [Background technology]

[0002] Conventionally, a transmission-type optical measuring device for measuring the dimensions, etc., of a workpiece has been known (see, for example, Patent Document 1). The optical measuring device disclosed in Patent Document 1 has a light-projecting unit and a light-receiving unit that are installed so as to sandwich the workpiece. Parallel light irradiated from a light source of the light-projecting unit is projected onto an image sensor of the light-receiving unit. Based on the image acquired by the image sensor, the external dimensions, displacement, etc. of the workpiece can be detected. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2012-7898 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, when parallel light is irradiated as in Patent Document 1, the field of view tends to be narrow, and widening the field of view would require a large optical system, making it practically difficult.

[0005] On the other hand, there are cases where it is desired to measure the external dimensions and displacement of a workpiece that exceeds the field of view, such as a long workpiece. In this case, a part of the workpiece is located outside the field of view of the optical measuring device, making it impossible to perform dimensional inspection outside the field of view. Therefore, for example, the user may prepare two optical measuring devices and install the two optical measuring devices so that different parts of the workpiece are within the field of view of each device, or move one optical measuring device to obtain images of two points on the workpiece, thereby measuring the external dimensions and displacement of the workpiece that exceeds the field of view.

[0006] However, in the former method, i.e., the method using two optical measuring devices, only a part of the workpiece appears in the field of view of each image sensor, so that in order to know the relative positional relationship of the feature parts appearing in each field of view, the user must grasp the relative positional relationship of the two optical measuring devices in advance using a jig or a scale, and must perform each measurement relying on auxiliary lines that reflect the positional relationship, which is difficult to say is user-friendly.

[0007] Furthermore, in the latter method described above, i.e., the method of moving one optical measuring device, similar problems can arise as in the former method, since it is necessary to grasp the relative positional relationship before and after the movement using a jig, a scale, etc., and to rely on auxiliary lines for each measurement.

[0008] The present invention has been made in consideration of these points, and its purpose is to obtain high measurement accuracy while improving usability for the user when measuring dimensions, etc. of a workpiece that exceeds the field of view range. [Means for solving the problem]

[0009] In order to achieve the above object, in a first aspect of the present disclosure, an optical measuring device having a measuring head including a light-projecting housing having a light-projecting window and a light-receiving housing having a light-receiving window and a light-receiving telecentric lens on which the parallel light passing through the space is incident and a two-dimensional image sensor receiving the light passing through the light-receiving telecentric lens, and an optical measuring device that performs dimensional measurement of the workpiece placed in the space in a state where the light-projecting window and the light-receiving window are installed so as to face each other, can be assumed. The optical measuring device includes an image acquisition unit that uses the measuring head to capture a portion of a workpiece larger than the imaging field of the two-dimensional image sensor and another portion different from the portion, and acquires a first image and a second image corresponding to the portion and the other portion, respectively, and a display unit that displays the first image and the second image acquired by the image acquisition unit. The optical measuring device further includes a designation unit that designates a first contour included in the first image and designates a second contour included in the second image based on a user operation, an information acquisition unit that acquires geometric information for identifying the relative positional relationship between the first contour and the second contour designated by the designation unit, an input unit that inputs a value indicating the relative positional relationship between the first contour and the second contour, a parameter setting unit that sets an offset parameter indicating the relative positional relationship between the light receiving housing that acquired the first image and the light receiving housing that acquired the second image based on the geometric information acquired by the information acquisition unit and the value input by the input unit, and a measurement unit that performs dimensional measurement of the work using the offset parameter set by the parameter setting unit.

[0010] According to this configuration, for example, in the case where there are two sets of measuring heads, when one part of the workpiece is arranged so as to be within the imaging field of the two-dimensional imaging element of one measuring head, a first image corresponding to the one part of the workpiece is acquired. Also, when another part of the workpiece is arranged so as to be within the imaging field of the two-dimensional imaging element of the other measuring head, a second image corresponding to the other part of the workpiece is acquired. Also, in the case where there is one set of measuring heads, when the measuring head is arranged so that one part of the workpiece is within the imaging field of the two-dimensional imaging element of the measuring head, a first image corresponding to the one part of the workpiece is acquired. Also, when the measuring head or the workpiece is moved so that the other part of the workpiece is within the imaging field of the two-dimensional imaging element of the measuring head, a second image corresponding to the other part of the workpiece is acquired.

[0011] When a first image is acquired, a first contour is designated based on a user operation, and when a second image is acquired, a second contour is designated based on a user operation. After each contour is designated, geometric information for specifying a relative positional relationship between the first contour and the second contour is acquired. Examples of the geometric information include a straight line passing through the first contour and the second contour, points located on the first contour, points located on the second contour, etc.

[0012] Whether there are two sets of measuring heads or one set, the light receiving housing when the first image is acquired and the light receiving housing when the second image is acquired are in different positions. According to this configuration, an offset parameter indicating the relative positional relationship between the light receiving housing when the first image is acquired and the light receiving housing when the second image is acquired is set based on the geometric information and a value indicating the relative positional relationship between the first contour and the second contour. Since the dimensional measurement of the work is performed using the set offset parameter, the user can obtain accurate measurement results without relying on auxiliary lines.

[0013] In a second aspect of the present disclosure, the information acquisition unit can acquire a straight line passing through the first contour and the second contour as the geometric information. The input unit is configured to input a reference length of the workpiece along the straight line acquired by the acquisition unit, so that a relative distance between the first contour and the second contour can be accurately set.

[0014] The optical measuring device according to a third aspect of the present disclosure further includes a region setting unit that sets a measurement region on the image acquired by the image acquisition unit. This allows a user to arbitrarily set a measurement region during operation. The measurement unit can then perform dimensional measurement of the workpiece using an edge extracted from the measurement region set by the region setting unit and an offset parameter set by the parameter setting unit.

[0015] The measuring head according to a fourth aspect of the present disclosure includes a first measuring head and a second measuring head. The image acquiring unit generates the first image using the first measuring head, generates the second image using the second measuring head, and acquires the generated first image and second image. By using the first measuring head and the second measuring head, the first image and the second image can be generated without moving the measuring head, and therefore the generation time of both images can be shortened.

[0016] The image acquisition unit according to a fifth aspect of the present disclosure can acquire the first image and the second image having a first coordinate system and a second coordinate system, which are different from each other. The measurement unit can perform dimensional measurement in the first coordinate system when a plurality of measurement areas are designated on the first image acquired by the image acquisition unit, and can perform dimensional measurement in the second coordinate system when a plurality of measurement areas are designated on the second image acquired by the image acquisition unit, and can calculate the correspondence between the first coordinate system and the second coordinate system using the offset parameter to perform dimensional measurement of the workpiece, thereby enabling accurate dimensional measurement in each coordinate system.

[0017] The display unit according to a sixth aspect of the present disclosure is configured to display the first image and the second image such that the first contour and the second contour are aligned on the straight line when the information acquisition unit acquires a straight line passing through the first contour and the second contour as the geometric information. This allows the first image and the second image to be displayed so as to correspond to the actual shape of the workpiece, making it easier for the user to intuitively grasp the measurement point.

[0018] The display unit according to the seventh aspect of the present disclosure can display the second image in a state where the second image is offset from the first image using the offset parameter set by the parameter setting unit, so that the user can easily intuitively grasp the workpiece. Furthermore, the display unit can display a measurement tool from a measurement area specified on the first image acquired by the image acquisition unit to a measurement area specified on the second image acquired by the image acquisition unit, so that the user can easily intuitively grasp the measurement point.

[0019] The display unit according to the eighth aspect of the present disclosure can display the second image spaced apart from the first image in accordance with an offset parameter set by the parameter setting unit.

[0020] The parameter setting unit according to the ninth aspect of the present disclosure is configured to be capable of executing a first setting mode in which the offset parameter is set based on the geometric information acquired by the information acquisition unit and the value input by the input unit, and a second setting mode in which the offset parameter is set based on the reference length of the workpiece input by the input unit. In the first setting mode, the offset parameter can be set with high accuracy based on the geometric information and a value indicating the relative positional relationship between the first contour and the second contour. On the other hand, in the second setting mode, the offset parameter can be simply set based on the reference length of the workpiece without using the geometric information.

[0021] The input unit according to the tenth aspect of the present disclosure is configured to be able to calculate, as the value indicating the relative positional relationship between the first contour and the second contour, a difference in height between the position of the light receiving housing when the first image is acquired and the position of the light receiving housing when the second image is acquired, a difference in horizontal direction between the position of the light receiving housing when the first image is acquired and the position of the light receiving housing when the second image is acquired, and an angle between the light receiving housing when the first image is acquired and the light receiving housing when the second image is acquired. In other words, since it is possible to input the difference in two directions between the position of the light receiving housing when the first image is acquired and the position of the light receiving housing when the second image is acquired, and the angle between the light receiving housing when the first image is acquired and the light receiving housing when the second image is acquired, the offset parameter can be set with even higher accuracy in the first setting mode.

[0022] The parameter setting unit according to the eleventh aspect of the present disclosure is configured to be capable of executing a first setting process for setting the offset parameter at the time of setting, and a second setting process for setting the offset parameter again at the time of operation. For example, when the ambient temperature rises with the passage of time from the start of operation, it is considered that the relative positional relationship between the light receiving housing when the first image is acquired and the light receiving housing when the second image is acquired changes. In such a case, the parameter setting unit executes the second setting process, so that the relative positional relationship between the light receiving housing when the first image is acquired and the light receiving housing when the second image is acquired can be accurately maintained. Effect of the Invention

[0023] As described above, a first image and a second image corresponding to one part and another part of a workpiece are acquired, and an offset parameter indicating the relative positional relationship between the light receiving housing when the first image is acquired and the light receiving housing when the second image is acquired is set based on geometric information for identifying the relative positional relationship between the first contour contained in the first image and the second contour contained in the second image and a value indicating the relative positional relationship between the two contours, and dimensional measurements of the workpiece can be performed using the set offset parameter.Therefore, when measuring the dimensions, etc. of a workpiece that exceeds the field of view range, high measurement accuracy can be obtained while improving user usability. [Brief description of the drawings]

[0024] [Figure 1] 1 is a schematic diagram of an optical measurement device according to an embodiment of the present invention. [Diagram 2] FIG. 13 is a perspective view showing an example of installation when one set of measuring heads is provided. [Diagram 3] FIG. 13 is a side view showing an example of installation when one set of measuring heads is provided. [Figure 4] FIG. 13 is a perspective view showing a first installation example in which two sets of measuring heads are provided. [Diagram 5] FIG. 13 is a side view showing a second installation example in which two sets of measuring heads are provided. [Figure 6] 4 is a vertical cross-sectional view taken along the optical axis of a light projecting unit and a light receiving unit. FIG. [Figure 7] 10 is a flowchart showing an example of a processing procedure when setting the optical measurement device. [Figure 8] FIG. 13 is an explanatory diagram showing a case where two sets of measuring heads are installed with a gap between them and at an angle. [Figure 9] FIG. 4 is a diagram showing the positional relationship between two sets of measuring heads and a workpiece. [Figure 10] 10 is a flowchart showing an example of a detailed processing procedure at the time of setting. [Figure 11] FIG. 13 is a diagram illustrating an example of a setting user interface screen. [Figure 12]FIG. 4 is a schematic diagram showing the relative positional relationship between a first image and a second image. [Figure 13] 13 is a flowchart showing an automatic calculation process of an offset parameter. [Figure 14] 13 is a setting user interface screen showing an example of automatic calculation of offset parameters. [Figure 15A] 13 is a schematic diagram of a first image and a second image when the angle between the first contour and the second contour is set to 0°. FIG. [Figure 15B] 11 is a schematic diagram of a first image and a second image in a case where the first contour and the second contour are positioned on the same straight line; FIG. [Figure 15C] 11A and 11B are schematic diagrams of a first image and a second image when a reference length is reflected. [Figure 16] 10 is a flowchart showing an example of a processing procedure during operation of the optical measuring device. [Figure 17] FIG. 13 is a diagram showing an example in which a plurality of measurement regions are set on one image. [Figure 18] FIG. 11 is a diagram illustrating position correction of a measurement area. [Figure 19A] FIG. 13 is a diagram showing an image of a workpiece having a different shape. [Figure 19B] FIG. 15B is a view corresponding to FIG. 15A but relating to a workpiece of a different shape. [Figure 20A] 13 is a diagram showing a state in which the center of a through hole and the center of a circular arc portion of a workpiece having a different shape are set. [Figure 20B] 13 is a diagram showing a case where the distance between the center of a through hole and the center of a circular arc portion is set as the reference length. FIG. [Figure 21A] FIG. 13 is a diagram showing a case where a straight line passing through the centers of two through holes is set. [Figure 21B] FIG. 13 is a diagram showing a case where a straight line passing through the center of a circular arc portion is set. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] Hereinafter, the embodiments of the present invention will be described in detail with reference to the drawings. Note that the following description of the preferred embodiments is merely illustrative in nature and is not intended to limit the present invention, its applications, or its uses.

[0026] FIG. 1 is a schematic diagram showing a schematic configuration of an optical measuring device 1 according to an embodiment of the present invention. The optical measuring device 1 is a device that projects measuring light into a space S in which the workpiece W is placed, and is equipped with a measuring head 2, a control device 70, a keyboard 80, a mouse 81, a display device (display unit) 82, and a storage device 83. A programmable controller 90 is connected to the control device 70. The keyboard 80 and the mouse 81 are examples of operation means and input means for operating the optical measuring device 1, and may be, for example, a touch panel type operation means. Using the operation means and input means, it is possible to input various information to the optical measuring device 1 and perform various settings of the optical measuring device 1.

[0027] The display device 82 is configured, for example, by a liquid crystal display or an organic EL display, and is connected to the control device 70 and controlled by the control device 70. The storage device 83 is configured, for example, by a hard disk drive or SSD (solid state drive), and is connected to the control device 70, allowing various data to be exchanged between the control device 70. The programmable controller 90 is an example of an external control device, and is a device that receives a predetermined control signal output from the control device 70 and controls various devices connected externally.

[0028] The measurement head 2 has one light-projecting unit 10 and one light-receiving unit 30. The light-projecting unit 10 includes a light source 11 that generates measurement light, which is parallel light that is projected into a space S in which a workpiece W is placed, a light source holder 12 that holds the light source 11, a diffusing means 13, a light-projecting side reflector 14, a light-projecting side telecentric lens 15, and a light-projecting housing 20.

[0029] The light receiving unit 30 includes a two-dimensional image sensor 31, an image sensor holder 37 that holds the two-dimensional image sensor 31, a light receiving lens 33, an aperture 34, a light receiving side reflector 35, a light receiving side telecentric lens 36, an imaging control unit 39, and a light receiving housing 40. The imaging control unit 39 can be provided in the light receiving unit 30, but may also be provided in the light projecting unit 10.

[0030] The control device 70 also includes an image acquisition unit 71, a DSP 72, a CPU 73, a memory 74, and an input / output circuit 75. The control device 70 can be configured, for example, by a personal computer. The data of the setting image and the measurement image acquired by the image acquisition unit 71 are subjected to signal processing by the DSP 72, and then output to the CPU 73. In the CPU 73, for example, an edge of the measurement image is extracted, and the measurement unit 73a performs dimensional measurement using the extracted edge. The edge extraction process of the measurement image can be performed by a conventionally known method. The dimensional measurement is, for example, the distance between two edges. The memory 74 includes a RAM and a ROM, and is a part used for storing a program that causes the CPU 73 to execute a predetermined function, and for temporarily storing the measurement image, the installation image, and the measurement result. The input / output circuit 75 is a circuit that outputs the measurement image, the setting image, the measurement result, and a control signal to the outside, and also receives input of the operation state of the keyboard 80 and the mouse 81. The measurement image, setting image, and measurement results can be output from the input / output circuit 75 to the storage device 83. In addition, a control signal can be output from the input / output circuit 75 to the programmable controller 90. Furthermore, the measurement image, setting image, and measurement results can be output to the display device 82 together with data showing a predetermined user interface screen for display. The user interface screen can be generated by the CPU 73.

[0031] (Use of the optical measuring device 1) 2 and 3 show a case where a workpiece W is measured using a pair of measuring heads 2. A space S is formed between the light projecting unit 10 and the light receiving unit 30. In addition, the distance (working distance) between the light projecting unit 10 and the light receiving unit 30 is set within a preset distance.

[0032] The light projecting unit 10 and the light receiving unit 30 can be fixed to a common fixing member 60 for use, but the light projecting unit 10 and the light receiving unit 30 can also be fixed separately to various members (not shown) at the measurement site without using the fixing member 60. The fixing member 60 is a member that constitutes part of the optical measurement device 1, is made of a metal plate that is long in a predetermined direction, and has high rigidity. The light projecting unit 10 is attached to one side of the fixing member 60 in the longitudinal direction, and the light receiving unit 30 is attached to the other side of the fixing member 60 in the longitudinal direction for use. The shape of the fixing member 60 is not limited to the shape shown in the figure, and may be, for example, a hollow member.

[0033] In addition, in the description of this embodiment, the light projecting unit 10 and the light receiving unit 30 are separated in the horizontal direction and the optical axes of both units 10, 30 extend in the horizontal direction and coincide with each other as shown in Fig. 3, but both units 10, 30 may be arranged so that the optical axes extend diagonally, or so that the optical axes extend in the vertical direction. In other words, both units 10, 30 may be arranged so that they are diagonal or vertical when facing each other.

[0034] The workpiece W may be of a size such that the entirety of it falls within the imaging field of the light receiving unit 30, or may be larger than the imaging field of the light receiving unit 30. Details of the latter measurement method will be described later, but for example, the measuring head 2 is installed so that a portion of the workpiece W falls within the imaging field of the measuring head 2, and then the measuring head 2 or the workpiece W is moved so that another portion different from the portion of the workpiece W falls within the imaging field of the measuring head 2, and then the measuring head 2 is installed and imaged. The moving device for moving the measuring head 2 or the workpiece W can be a device equipped with a power source such as a motor or a fluid pressure cylinder, although not shown.

[0035] 4 and 5 show a case where the measurement head 2 includes a first measurement head 2A and a second measurement head 2B. The first measurement head 2A and the second measurement head 2B are the same. The first measurement head 2A has a first light projecting unit 10A and a first light receiving unit 30A, and is fixed to a first fixing member 60A. The second measurement head 2B has a second light projecting unit 10B and a second light receiving unit 30B, and is fixed to a second fixing member 60B. Various members (not shown) at the site where the measurement is performed may be used without using one or both of the first fixing member 60A and the second fixing member 60B.

[0036] 4 shows a usage form in which the first measuring head 2A and the second measuring head 2B are arranged horizontally at a predetermined interval, but as shown in FIG. 5, the first measuring head 2A and the second measuring head 2B can also be arranged vertically or obliquely at a predetermined interval. A space S is formed between the first light projecting unit 10A and the first light receiving unit 30A, and between the second light projecting unit 10B and the second light receiving unit 30B. In FIG. 5, the workpiece W is, for example, a circular plate-like workpiece, but it may be a long workpiece, and the shape of the workpiece W is not particularly limited.

[0037] 4 and 5 are used when the workpiece W is larger than the imaging field of the first measuring head 2A (or the second measuring head 2B). In other words, the first measuring head 2A is installed so that one portion of one workpiece W falls within the imaging field of the first measuring head 2A, and the second measuring head 2B is installed so that another portion of the workpiece W falls within the imaging field of the second measuring head 2B.

[0038] The measuring head 2 shown in Figures 2 and 3 is the same as the first measuring head 2A and the second measuring head 2B shown in Figures 4 and 5. The light projecting unit 10 and the light receiving unit 30 constituting the measuring head 2 will be described below in order. Note that three or more sets of measuring heads may be provided.

[0039] (Configuration of light projection unit 10) 6, the light source 11 of the light projection unit 10 is composed of a light emitting diode such as an InGaN green LED, and is mounted on a substrate 11a. An imaging control unit 39 (shown in FIG. 1) composed of a microcomputer or the like is connected to the substrate 11a, and the light source 11 is controlled by this imaging control unit 39.

[0040] The substrate 11a is fixed to the light source holder 12. The light source 11 is oriented so as to project light upward. The light source holder 12 is provided with a collimator lens 12a, which is aberration-corrected so as to obtain parallel light, a light diffusion unit 12b, and one or two light projecting lenses 12c. The collimator lens 12a, the light diffusion unit 12b, and the light projecting lens 12c constitute a diffusion means 13 (also shown in FIG. 1). The collimator lens 12a, the light diffusion unit 12b, and the light projecting lens 12c are arranged so that the optical axes of the collimator lens 12a, the light diffusion unit 12b, and the light projecting lens 12c are positioned on a line that passes through the center of the light source 11 and is perpendicular to the light emission surface of the light source 11.

[0041] The collimator lens 12a is located above the light source 11, and the light from the light source 11 is directly incident on the collimator lens 12a. The light incident on the collimator lens 12a is converted into parallel light and emitted upward. The light diffusion unit 12b is located above the light emission surface of the collimator lens 12a. The light diffusion unit 12b is a member for diffusing the incident light, and the light incident on the light diffusion unit 12b is diffused by passing through the light diffusion unit 12b and emitted upward.

[0042] The surface of the light-projecting housing 20 that faces the light-receiving housing 40 is its front surface, which extends in the vertical direction. The rear surface of the light-projecting housing 20 is the surface located opposite the surface that faces the light-receiving housing 40, and this rear surface is inclined so that it is positioned further forward as it approaches the upper end, and this inclination angle corresponds to the installation angle of the light-projecting side reflector 14, which will be described later. A signal cable C (shown in FIG. 2, etc.) that is connected to the light-receiving unit 30 protrudes to the outside from the lower side of the rear surface. In addition, both side surfaces of the light-projecting housing 20 extend in the vertical direction parallel to each other. The lower surface of the light-projecting housing 20 serves as an attachment surface to the fixing member 60.

[0043] The light-projecting housing 20 contains a light-projecting side reflector 14 that reflects the light emitted from the light-projecting lens 12c. The light-projecting side reflector 14 is formed of, for example, a flat mirror. The light-projecting side reflector 14 is disposed so that the light emitted from the light-projecting lens 12c of the light source holder 12 is incident on the center of the light-projecting side reflector 14. The angle of the light-projecting side reflector 14 is set so that the light incident from the light-projecting lens 12c is emitted in the horizontal direction. The light-projecting side reflector 14 reduces the size of the light-projecting housing 20 by folding the optical path, and is not necessarily required if the size of the light-projecting housing 20 is acceptable.

[0044] The light-emitter telecentric lens 15 is attached to the side of the light-emitter housing 20 facing the light-receiving housing 40. A light-emitter lens mounting hole 22, into which the light-emitter telecentric lens 15 is fitted, is formed so as to penetrate the wall of the light-emitter housing 20 facing the light-receiving housing 40. A light-emitter lens mounting seat 22a is integrally formed on the inner peripheral surface at the rear side of the light-emitter lens mounting hole 22, the light-emitter lens mounting seat 22a protruding radially inward and consisting of a protrusion extending in the circumferential direction. The peripheral portion of the end face at the rear side (light incident side) of the light-emitter telecentric lens 15 abuts against the light-emitter lens mounting seat 22a, whereby the light-emitter telecentric lens 15 is positioned with respect to the light-emitter housing 20.

[0045] The light-projecting telecentric lens 15 is disposed so that its optical axis is horizontal. When the light emitted from the light-projecting reflector 14 enters the light-projecting telecentric lens 15, the light-projecting telecentric lens 15 converts the light into parallel light toward the space S and emits it. The size of the optical image formed by the light-projecting telecentric lens 15 in the space S is constant along the optical axis of the light-projecting telecentric lens 15. The light-projecting telecentric lens 15 focuses the optical image formed in the light-projecting housing 20 as a focused optical image in the space S. The focused optical image is formed in a predetermined range along the optical axis of the light-projecting telecentric lens 15, which depends on the optical path length from the optical image formed in the light-projecting housing 20 to the light-projecting telecentric lens 15. The longer the optical path length, the wider the range in which the optical image is in focus.

[0046] When parallel light is incident from the collimator lens 12a and forms a circular light image in the light diffusion unit 12b, the parallel light that has passed through the light diffusion unit 12b is emitted from the light diffusion unit 12b as diffused light having an angular characteristic in which the parallel component peaks at each point of the light image. By irradiating the space S with an optical image having such an angular characteristic via the light projection telecentric lens 15, it is possible to realize illumination light with substantially uniform light regardless of the location or angle. In addition, the light density of the light passing through the light projection telecentric lens 15 may be increased by adjusting the spread angle of the light emitted from the light diffusion unit 12b to a narrow angle using the two light projection lenses 12c.

[0047] The light-projection housing 20 is provided with a light-projection window 23 for projecting the parallel light emitted from the light-projection-side telecentric lens 15 into the space S. The light-projection window 23 has a substantially circular light-projection-side cover glass 23a formed so as to cover the light-exiting surface of the light-projection-side telecentric lens 15, and a light-projection-side frame body 23b to which the light-projection-side cover glass 23a is attached. The light-projection-side frame body 23b is fitted into the light-projection-side lens attachment hole 22 on the light-exiting surface side of the light-projection-side telecentric lens 15 and fixed to the light-projection housing 20.

[0048] (Configuration of light receiving unit 30) The two-dimensional imaging element 31 of the light receiving unit 30 is composed of, for example, a CMOS image sensor, and pixels are arranged two-dimensionally in the X and Y directions. The two-dimensional imaging element 31 is mounted on a substrate 31a. An imaging control unit 39 (shown in FIG. 1) is provided on the substrate 31a. The two-dimensional imaging element 31 is controlled by the imaging control unit 39. For example, the two-dimensional imaging element 31 is controlled by the imaging control unit 39 so that the imaging interval is several milliseconds to several tens of milliseconds and the exposure time for each imaging is 100 microseconds. By setting the exposure time to 1 millisecond or less, for example 100 microseconds, the optical measuring device 1 can measure a workpiece transported at high speed without stopping it. The exposure time may be controlled by synchronously controlling the lighting control of the light source 11 and the shutter control of the two-dimensional imaging element 31. The substrate 31a is fixed to an imaging element holder 37. By fixing the substrate 31a to the imaging element holder 37, the two-dimensional imaging element 31 can be held by the imaging element holder 37.

[0049] A light-receiving lens unit 38 is fixed to the imaging element holder 37. The relative positions of the light-receiving lens unit 38 and the two-dimensional imaging element 31 are set so that an extension line of the optical axis of the light-receiving lens unit 38 perpendicularly intersects with the center of the two-dimensional imaging element 31. An aperture 34 (shown in FIG. 1) is provided on the upper part of the light-receiving lens unit 38.

[0050] The aperture 34 passes the parallel light received through the light-receiving telecentric lens 36 and blocks disturbance light other than the parallel light. This reduces the influence of disturbance light. The light-receiving lens unit 38 may be an image-side telecentric lens. The image-side telecentric lens prevents the size of the image formed on the two-dimensional image sensor 31 from changing even if the distance between the light-receiving lens unit 38 and the two-dimensional image sensor 31 changes. For example, even if the distance between the light-receiving lens unit 38 and the two-dimensional image sensor 31 changes due to thermal expansion of the image sensor holder 37, the size of the image formed on the two-dimensional image sensor 31 does not change, so the influence of temperature change can be reduced. By making the light-projecting telecentric lens 15 an object-side telecentric lens and making the light-receiving lens unit 38 an image-side telecentric lens, a double-telecentric optical system can be obtained.

[0051] The surface of the light-receiving housing 40 that faces the light-projecting housing 20 is the front surface, which extends in the vertical direction. The rear surface of the light-receiving housing 40 is the surface located opposite the surface that faces the light-projecting housing 20, and this rear surface is inclined so that it is positioned further forward as it approaches the upper end, and this inclination angle corresponds to the installation angle of the light-receiving side reflector 35 described later. A signal cable C connected to the light-projecting unit 10 and a connection cable D (shown in FIG. 2, etc.) connected to the control device 70 extend to the outside from the lower side of the rear surface. In addition, both side surfaces of the light-receiving housing 40 extend in the vertical direction parallel to each other. The lower surface of the light-receiving housing 40 is the mounting surface for the fixing member 60.

[0052] As shown in FIG. 6, the light-receiving telecentric lens 36 is attached to the side of the light-receiving housing 40 facing the light-projecting housing 20, and is arranged so that its optical axis is located on the same optical axis as the light-projecting telecentric lens 15. A light-receiving lens mounting hole 42 into which the light-receiving telecentric lens 36 is fitted is formed so as to penetrate the wall of the light-receiving housing 40 facing the light-projecting housing 20. A light-receiving lens mounting seat 42a is integrally formed on the inner peripheral surface at the back side of the light-receiving lens mounting hole 42, which protrudes radially inward and is formed of a protrusion extending in the circumferential direction. The light-receiving telecentric lens 36 is positioned relative to the light-receiving housing 40 by abutting the peripheral portion of the end face at the back side (light output side) of the light-receiving telecentric lens 36 against the light-receiving lens mounting seat 42a.

[0053] The light-receiving housing 40 is provided with a light-receiving window 43 for allowing the parallel light emitted from the light-emitting telecentric lens 15 and passing through the space S to be incident on the light-receiving telecentric lens 36. The light-receiving window 43 has a substantially circular light-receiving cover glass 43a formed so as to cover the light incident surface of the light-receiving telecentric lens 36, and a light-receiving frame 43b to which the light-receiving cover glass 43a is attached. The light-receiving frame 43b is fitted into the light incident surface side of the light-receiving telecentric lens 36 in the light-receiving lens attachment hole 42 and fixed to the light-receiving housing 40.

[0054] The light-receiving housing 40 has a light-receiving reflector mounting hole 44 into which the light-receiving reflector 35 is fitted. A light-receiving reflector mounting seat 44a is integrally formed on the inner peripheral surface at the rear of the light-receiving reflector mounting hole 44, which protrudes radially inward and is composed of a protrusion extending in the circumferential direction. The light-receiving reflector 35 is positioned relative to the light-receiving housing 40 when the peripheral portion of the rear end face of the light-receiving reflector 35 abuts against the light-receiving reflector mounting seat 44a. A cover 44d is attached to the light-receiving housing 40 to cover the reflector mounting hole 44 from the outside of the light-receiving housing 40.

[0055] The light-receiving side reflector 35 is composed of, for example, a flat mirror. The light-receiving side reflector 35 is arranged so that the light emitted from the light emission surface of the light-receiving side telecentric lens 36 is incident on the center of the light-receiving side reflector 35. The angle of the light-receiving side reflector 35 is set so that the light that has passed through the light-receiving side telecentric lens 36 is reflected and folded back, and is emitted toward the light-receiving side lens unit 38. Since the light is folded back by the light-receiving side reflector 35, the two-dimensional imaging element 31, which is a heat source, and the light-receiving side telecentric lens 36 can be separated.

[0056] (Configuration of the control device 70) As shown in FIG. 1, the imaging control section 39 provided in the light receiving unit 30 is controlled by the image acquisition section 71 of the control device 70 via the connection cable D to cause the light source 11 to emit light at a predetermined timing and to cause the two-dimensional image sensor 31 to capture an image. Power for driving the light receiving unit 30 is supplied from the control device 70 via the connection cable D. A bend-resistant cable can be used for the connection cable D, and the light receiving unit 30 and the light projecting unit 10 can be installed on a movable part such as a robot arm, and the control device 70 can be installed in a non-movable manner, for example, and can be arranged separately. The light source 11 and the two-dimensional image sensor 31 can be synchronized by a signal cable C. For example, the imaging control section 39 supplies a timing signal that defines the imaging timing and exposure timing to the two-dimensional image sensor 31 so that the imaging interval is several milliseconds to several tens of milliseconds and the exposure time in each imaging is 100 microseconds, and the imaging control section 39 supplies a timing signal that defines the light emission timing to the light source 11 via the signal cable C. Power for driving the light source 11 is supplied from the light receiving unit 30 via the signal cable C.

[0057] The parallel light that passed through the space S passes through the light receiving window 43 and enters the light receiving side telecentric lens 36, is reflected by the light receiving side reflector 35, is folded back, and passes through the aperture 34 and the light receiving lens 33. Then, an image of the workpiece W is formed on the imaging surface of the two-dimensional image sensor 31. The image acquisition unit 71 of the control device 70 controls the two-dimensional image sensor 31 to capture an image of the workpiece W using the two-dimensional image sensor 31, and acquires the generated image. The acquired image of the workpiece W is an approximately circular image. The DSP 72 performs image processing such as filtering on the measurement image acquired by the image acquisition unit 71. The CPU 73 extracts edges of the measurement image output from the DSP 72, and performs dimensional measurement using the extracted edges. The measurement image, measurement results, etc. can be temporarily stored in the memory 74. The measurement image, measurement results, etc. are output from the input / output circuit 75 to the storage device 83, the programmable controller 90, and the display device 82.

[0058] (When setting up optical measurement equipment) The optical measuring device 1 can perform various settings before operating the optical measuring device 1. An example of a processing procedure for setting the optical measuring device 1 will be described below based on the flowchart shown in Fig. 7. The flowchart shown in Fig. 7 starts when it is detected that a user has operated to start the setting process. For example, when the user operates a setting start button or the like, the process proceeds to step SA1, where a reference image that is the basis for the measurement settings is set.

[0059] First, as shown in FIG. 8, a case where the first measuring head 2A and the second measuring head 2B are used to measure the workpiece W arranged as shown in FIG. 9 will be described. The workpiece W is a long workpiece, and its length dimension A1 is to be measured by the optical measuring device 1. The workpiece W is larger than the imaging field of the two-dimensional imaging element 31 of the light receiving unit 30, and only one end of the workpiece W can be included in the imaging field of a single fixed measuring head 2, so the first measuring head 2A and the second measuring head 2B are used. The first measuring head 2A and the second measuring head 2B and the workpiece W are arranged so that at least one end (one part) W1 of the workpiece W is included in the imaging field of the first measuring head 2A, and at least the other end (other part) W2 of the workpiece W is included in the imaging field of the second measuring head 2B.

[0060] 8, the light receiving housing 40A of the light receiving unit 30A of the first measurement head 2A and the light receiving housing 40B of the light receiving unit 30B of the second measurement head 2B are separated by a distance X in the horizontal direction and a distance Y in the vertical direction. For example, when a point P1 is set on the light receiving housing 40A of the first measurement head 2A and a point P2 is set on the light receiving housing 40B of the second measurement head 2B at a portion corresponding to the point P1, the distances X and Y can be the horizontal distance and the vertical distance between the point P1 and the point P2.

[0061] For convenience, the present specification is described in terms of the positional deviation between the first measuring head 2A and the second measuring head 2B, but the distance X, distance Y, and angle θ between the imaging field of view of the first measuring head 2A and the imaging field of view of the second measuring head 2B may be calculated based on the method described below. In this case, since the imaging field of view of the first measuring head 2A and the imaging field of view of the second measuring head 2B each have an independent coordinate system, the dimensions of the workpiece W that spans the two imaging fields of view can be measured by making the two coordinate systems correspond to each other using an offset parameter described later.

[0062] Furthermore, the light receiving housing 40B of the second measurement head 2B is rotated by an angle θ with respect to the light receiving housing 40A of the first measurement head 2A. The angle θ can be, for example, the angle between the upper surface of the light receiving housing 40A of the first measurement head 2A and the upper surface of the light receiving housing 40B of the second measurement head 2B. Note that one of the distance X and the distance Y may be 0. Also, the angle θ may be 0°.

[0063] Details of step SA1 in the flowchart shown in Fig. 7 are shown in Fig. 13. Fig. 13 shows an example of a detailed processing procedure at the time of setting, which is an example of a procedure for setting the relative positional relationship between the first measuring head 2A and the second measuring head 2B, i.e., for calculating the offset parameters. Specifically, the distances X, Y and angle θ are calculated according to the following procedure. The calculated distances X, Y and angle θ can be stored in the memory 74 or the storage device 83.

[0064] 1 uses the first measuring head 2A and the second measuring head 2B to capture images of one end W1 and the other end W2 of the workpiece W, respectively, to generate a first image 401 and a second image 402 corresponding to the one end W1 and the other end W2 of the workpiece W, respectively, and acquires the generated first image 401 and second image 402. The first image 401 and the second image 402 acquired by the image acquiring unit 71 can be stored in the memory 74.

[0065] The position of the light receiving housing 40A when the first image 401 is acquired and the position of the light receiving housing 40B when the second image 402 is acquired are different as shown in FIG. 8. The difference in height between the position of the light receiving housing 40A when the first image 401 is acquired and the position of the light receiving housing 40B when the second image 402 is acquired is represented by a distance X. Furthermore, the difference in the horizontal direction between the position of the light receiving housing 40A when the first image 401 is acquired and the position of the light receiving housing 40B when the second image 402 is acquired is represented by a distance Y. Furthermore, the angle formed between the light receiving housing 40A when the first image 401 is acquired and the light receiving housing 40B when the second image 402 is acquired is represented by an angle θ.

[0066] In step SC2, the CPU 73 receives the first image 401 and the second image 402 acquired by the image acquisition unit 71, outputs them to the display device 82 via the input / output circuit 75, and displays them on the display device 82. Specifically, the control device 70 generates a setting user interface screen 300 as shown in FIG. 14 and displays it on the display device 82. In the setting user interface screen 300, a first image display area 301 for displaying the first image 401 captured by the two-dimensional image sensor 31 of the first measuring head 2A and a second image display area 302 for displaying the second image 402 captured by the two-dimensional image sensor 31 of the second measuring head 2B are provided to be aligned on the left and right of the display device 82. In this example, since the longitudinal direction of the workpiece W is oriented in a direction close to horizontal as shown in FIG. 9, the first image display area 301 and the second image display area 302 are aligned in the left-right direction so as to correspond to the longitudinal direction of the workpiece W, so that the user can intuitively grasp the workpiece W displayed in both display areas 301 and 302. When the longitudinal direction of the workpiece W faces the vertical direction, the first image display area 301 and the second image display area 302 may be arranged vertically on the display device 82.

[0067] In the present invention, the angle θ is calculated based on the acquired geometric information, and the distances X and Y are calculated based on the values ​​input by the user. That is, in the present invention, geometric information for calculating the angle θ and input values ​​for calculating the distances X and Y are required. The geometric information is sufficient as long as it can specify the angle θ, and is a straight line, a circle, etc. The following describes the case where a straight line is acquired as the geometric information.

[0068] In step SC3, the first contour 306 included in the first image 401 displayed in the first image display area 301 is specified, and the second contour 308 included in the second image 402 displayed in the second image display area 302 is specified based on the user's operation of the keyboard 80, the mouse 81, etc. At this time, when the contour of the workpiece W includes a straight line portion Wa continuing from one end W1 to the other end W2 as shown in FIG. 9, the area 305 is specified on the first image 401 to include the straight line portion Wa closer to one end W1 of the workpiece W, and the area 307 is specified on the second image 402 to include the straight line portion Wa closer to the other end W2 of the workpiece W, as shown in FIG. 14. Then, the designation unit 73b designates a part of the straight line portion Wa as the first contour 306 based on the edge information in the area 305, and designates another part of the straight line portion Wa as the second contour 308 based on the edge information in the area 307. The designation process of the first contour 306 and the second contour 308 is executed by a designation unit 73b configured by the CPU 73 shown in FIG.

[0069] Specifically, the setting user interface screen 300 is provided with a first designation method teaching area 303 for teaching a method for designating the first contour 306, and a second designation method teaching area 304 for teaching a method for designating the second contour 308. The first designation method teaching area 303 describes that an area to be designated as the first contour 306 in the first image 401 is automatically designated by dragging the pointer of the mouse 81 from one point to another point on the first image 401. Similarly, the second designation method teaching area 304 describes that an area to be designated as the second contour 308 in the second image 402 is automatically designated by dragging the pointer of the mouse 81 from one point to another point on the second image 402.

[0070] When the user operates the pointer of the mouse 81 to specify an area 305 to be specified as the first contour 306, the specification unit 73b specifies the first contour 306 included in the first image 401 based on edge information within the area 305. When the user operates the pointer of the mouse 81 to specify an area 307 to be specified as the second contour 308, the specification unit 73b specifies the second contour 308 included in the second image 402 based on edge information within the area 307. The shapes of the areas 305 and 307 are not limited to rectangular shapes, and may be circular, for example. The specified areas 305 and 307 are stored in the memory 74 or the storage device 83 together with the search areas in FIG. 18 for use in automatic update of offset parameters during operation, which will be described later.

[0071] In step SC4, the information acquisition unit 73c configured by the CPU 73 shown in Fig. 1 acquires geometric information for identifying the relative angular relationship between the first contour 306 and the second contour 308 designated by the designation unit 73b, i.e., the angle θ. In this example, since the first contour 306 and the second contour 308 are part of a common straight line portion Wa, a straight line L passing through the first contour 306 and the second contour 308 is identified, and the identified straight line L is acquired as geometric information. The type of geometric shape to be acquired as geometric information may be set in advance, or may be designated by the user.

[0072] In step SC5, as shown in a simplified form in Fig. 15A, the second image 402 is rotated while the first image 401 is fixed so that the first contour 306 and the second contour 308 specified in step SC3 are aligned in a straight line, that is, so that the angle between the first contour 306 and the second contour 308 is 0°. The angle between the first contour 306 and the second contour 308 may be set to 0° by rotating the first image 401 while keeping the second image 402 fixed. Alternatively, the angle between the first contour 306 and the second contour 308 may be set to 0° by rotating both the first image 401 and the second image 402. The rotation angle at this time is stored as angle θ in the memory 74 or the storage device 83. In this example, for convenience, an example has been described in which the angle between the first contour 306 and the second contour 308 is automatically adjusted to 0° when a straight line is acquired as the geometric information, but the angle may be automatically adjusted to an angle other than 0° depending on the work of the user. The angle to be automatically adjusted may be input in advance by the user, or may be included in the geometric information acquired by the information acquisition unit 73c.

[0073] 15B, in step SC6, the second image 402 is moved while the first image 401 is fixed so that the first contour 306 and the second contour 308 are arranged on the same straight line L. Note that the first image 401 may be moved while the second image 402 is fixed so that the first contour 306 and the second contour 308 are arranged on the same straight line L. Alternatively, the first image 401 and the second image 402 may both be moved so that the first contour 306 and the second contour 308 are arranged on the same straight line L.

[0074] 15C, the user specifies regions 320 and 321 to specify the reference length of the workpiece W. Specifically, the user operates the pointer of the mouse 81 to specify region 320 so as to include one end W1 of the workpiece W on the first image 401, and specifies region 321 so as to include the other end W2 of the workpiece W on the second image 402. The CPU 73 specifies a straight line 322 corresponding to one end W1 of the workpiece W based on edge information in the region 320, and specifies a straight line 323 corresponding to the other end W2 of the workpiece W based on edge information in the region 321.

[0075] In the present invention, after obtaining the angle θ by acquiring the geometric information, the input of a value for calculating the distances X and Y is accepted. In other words, this input value is a value for specifying how far apart the images 401 and 402 are in a certain direction, with the angular relationship between them specified by the geometric information.

[0076] In step SC8, the user operates the keyboard 80, the mouse 81, etc. to input the actual length of the workpiece W. The actual length of the workpiece W is the distance between one end W1 and the other end W2, and is therefore a value indicating the relative positional relationship in the longitudinal direction between the straight lines 322 and 323 specified in step SC7, that is, the relative positional relationship in the longitudinal direction between the first contour 306 and the second contour 308. The actual length of the workpiece W is called the reference length of the workpiece W along the straight line L passing through the first contour 306 and the second contour 308. This reference length may also be called the representative length of the workpiece W. The input reference length and the areas 320 and 321 specified in step SC7 are stored in the memory 74 or the storage device 83 together with the search area in FIG. 18 for use in automatic update of offset parameters during operation, which will be described later.

[0077] In step SC9, the parameter setting unit 73d shown in Fig. 1 calculates parameters for changing the relative positional relationship between the first image 401 and the second image 402 shown in Fig. 14 to the relative positional relationship between the first image 401 and the second image 402 shown in Fig. 15C, and sets the calculated parameters as offset parameters. During the calculation, the relative positional relationship between the light receiving housing 40A when the first image 401 was acquired and the light receiving housing 40B when the second image 402 was acquired is calculated based on the geometric information acquired in step SC5 and the value (reference length) input by the user in step SC8. 15C, the horizontal distance X between the light receiving housing 40A of the first measurement head 2A and the light receiving housing 40B of the second measurement head 2B, the vertical distance Y between the light receiving housing 40A of the first measurement head 2A and the light receiving housing 40B of the second measurement head 2B, and the angle θ of the light receiving housing 40B of the second measurement head 2B with respect to the light receiving housing 40A of the first measurement head 2A are automatically calculated as offset parameters. The offset parameters thus set are stored in the memory 74 or the storage device 83.

[0078] The offset parameter may be calculated only once based on one first image 401 and one second image 402, or may be calculated multiple times by acquiring multiple first images 401 and multiple second images 402. When the offset parameter is calculated multiple times, a statistical process may be performed to set the final offset parameter. For example, the average value of the calculated offset parameters may be set as the final offset parameter to be applied during operation, or the most frequent value of the calculated offset parameters may be set as the final offset parameter to be applied during operation. In step SC10, the second image 402 is moved while the first image 401 is fixed so that the interval between the straight line 322 of the first image 401 and the straight line 323 of the second image 402 matches the reference length input in step SC8. The first image 401 may be moved while the second image 402 is fixed to match the reference length. In addition, both the first image 401 and the second image 402 may be moved to match the reference length. The offset parameter setting process is executed by a parameter setting unit 73d configured by the CPU 73 shown in FIG.

[0079] In the above embodiment, an example was described in which a straight line was acquired as geometric information, and the contours 322 and 323 were specified by specifying the regions 320 and 321 when inputting the input value, but the method of inputting the geometric information and the input value is not limited to the above method. For example, when the first image 401 and the second image 402 contain continuous arc portions, a circular shape may be acquired as the geometric shape. In this case, the angle θ is calculated so that the first contour and the second contour are circular. Also, when the first image 401 and the second image 402 contain continuous broken lines (for example, a line in which two straight lines are connected to form an included angle of 120 degrees), a broken line may be acquired as the geometric shape. In this case, the field of view is rotated so that the first contour and the second contour are located on the broken line with an included angle of 120 degrees, and the angle θ is calculated. Note that the portion of the workpiece included in the first image 401 and the portion included in the second image 402 do not necessarily have to be a "continuous" geometric shape. For example, even if a rod-shaped workpiece is considered in which the part included in the first image 401 and the part included in the second image 402 are both straight lines, but the part between them is a wavy curve, the field of view can be rotated so that the angle between the first contour in the first image 401 and the second contour in the second image 402 is 0°, and the angle θ can be obtained. The same applies to an L-shaped workpiece. Specifically, the vertical line part included in the first image 401 and the horizontal line part included in the second image 402 have an orthogonal relationship of 90°, so the field of view can be rotated so that the angle between the first contour corresponding to the vertical line part and the second contour corresponding to the horizontal line is 90°, and the angle θ can be obtained. At this time, the corners of the L-shaped workpiece may be, for example, chamfered or rounded, and may have any shape.

[0080] In short, the acquired geometric information is geometric information used to calculate the relative positional relationship (at least the amount of θ rotation) between two contours specified by the user.

[0081] In the above embodiment, the input value is input by specifying the areas 320 and 321, detecting the contours 322 and 323, and inputting the reference length. However, it is not necessary to specify the areas 320 and 321. For example, there is a method of specifying the reference length by specifying points in the first image and the second image. However, in this case, since there are many possible directions in which the reference length is taken, it is necessary to specify the direction in which the reference length is taken. That is, in the present invention, information for identifying the direction in which the input value and the reference length are taken is also necessary. On the other hand, in the above-mentioned method of specifying the contours 322 and 323, the direction in which the reference length is taken is uniquely determined, so that the user's specification can be omitted.

[0082] In short, it is necessary to input the relative positional relationship on the XY plane indicating how far apart the first contour in the first image and the second contour in the second image are along which direction. For example, when an L-shape (shape of an L-shaped workpiece) is adopted as the geometric information, the user may input how far apart the first contour (vertical line portion) in the first image and the second contour (horizontal line portion) in the second image are along the vertical line direction and how far apart they are along the horizontal line direction, respectively. Also, when the above-mentioned straight line is adopted as the geometric information, since "along which direction" has already been specified, it is sufficient to input a reference length indicating how far apart they are as the relative positional relationship on the XY plane. As shown in FIG. 15C, the user may specify the area 320 and the area 321, detect the contours 322 and 323, and have the user input the reference length.

[0083] The type of shape to be acquired as the geometric information (such as a straight line, an arc, or an L-shape; this may be called reference geometric information) is stored in advance in the memory 74 or the storage device 83. The CPU 73 refers to this reference geometric information from the first image and the second image to acquire geometric information for identifying the relative positional relationship between the first contour and the second contour.

[0084] The offset parameter setting process will be specifically described below. Regarding the distances X, Y, and angle θ, the distances X, Y, and angle θ are values ​​indicating the relative positional relationship between the first contour 306 and the second contour 308. That is, as shown in Fig. 8, the fact that the first measuring head 2A and the second measuring head 2B are separated by the distance X in the horizontal direction means that the second image 402 captured by the second measuring head 2B is separated by the distance X in the horizontal direction from the first image 401 captured by the first measuring head 2A, and therefore the distance X is a value indicating the relative positional relationship between the first contour 306 and the second contour 308 in the horizontal direction. Furthermore, the fact that the first measurement head 2A and the second measurement head 2B are separated by the distance Y in the vertical direction means that the second image 402 captured by the second measurement head 2B is separated by the distance Y in the vertical direction from the first image 401 captured by the first measurement head 2A, and therefore the distance Y is a value indicating the relative positional relationship in the vertical direction between the first contour 306 and the second contour 308. Furthermore, the fact that the second measurement head 2B is rotated by the angle θ with respect to the first measurement head 2A means that the second image 402 captured by the second measurement head 2B is rotated by the angle θ with respect to the first image 401 captured by the first measurement head 2A, and therefore the angle θ is a value indicating the relative positional relationship in the rotation direction between the first contour 306 and the second contour 308.

[0085] When the first contour 306 and the second contour 308 are specified as shown in FIG. 14, the parameter setting unit 73d sets the distances X, Y and angle θ as offset parameters indicating the relative positional relationship between the light receiving housing 40A of the first measuring head 2A and the light receiving housing 40B of the second measuring head 2B when the second image 402 was acquired, as shown typically in FIG. 12, and stores the offset parameters in the memory 74 or the storage device 83.

[0086] In step SC10, the display of the setting user interface screen 300 is updated, and the second image 402 is displayed in a state where it has been moved relative to the first image 401 in accordance with the offset parameters set in step SC9, as shown in Fig. 12. This allows the user to intuitively grasp the shape of the workpiece W.

[0087] The flowchart shown in Fig. 10 shows a modified example. In step SB1, the relative positional relationship of the heads is set. Step SB2 corresponds to step SC1, step SB3 corresponds to step SC2, step SB4 corresponds to step SC3, step SB5 corresponds to step SC4, step SB6 corresponds to step SC9, and step SB7 corresponds to step SC10.

[0088] The above is the process in step SA1 of the flowchart shown in FIG. 7. Then, the process proceeds to step SA2. In step SA2, the user selects a measurement method. The selection of the measurement method is the selection of a measurement tool, and it is possible to select from a plurality of types of measurement tools. The measurement tools include, for example, a "line-line" tool that measures the distance between lines, a "line-point" tool that measures the distance between a line and a point, a "point-point" tool that measures the distance between points, a "circle-circle" tool that measures the distance between circles, a "circle diameter" tool that measures the diameter of a circle, and the like, and other measurement tools may also be used.

[0089] After the selection of the measurement method is completed, the process proceeds to the next step SA3 in the flowchart shown in Fig. 7. In step SA3, the user sets the image measurement elements. Specifically, the user sets a measurement area according to the measurement method selected in step SA2 in the first image 401 displayed in the first image display area 301 and the second image 402 displayed in the second image display area 302 of the setting user interface screen 300. The setting of the measurement area is executed by an area setting unit 73e configured by the CPU 73.

[0090] For example, in this example, as a form of displaying a measurement area according to a "line-line" tool, which is an example of a measurement tool, when the user specifies an area 335 in the same way as when the user specified the first contour 306 on the first image 401, the area setting unit 73e sets the area 335 as the measurement area. The first contour 306 is extracted as one edge based on edge information in the measurement area 335. When the user specifies an area 337 in the same way as when the user specified the second contour 308 on the second image 402, the area setting unit 73e sets the area 337 as the measurement area. The second contour 308 is extracted as the other edge based on edge information in the measurement area 337.

[0091] Since the distance between an edge in measurement area 335 and an edge in measurement area 337 corresponds to the dimension measured by the "line-line" tool, a dimension line 310, which is an example of a measurement tool, is generated and displayed on the setting user interface screen 300. The dimension line 310 is displayed from the measurement area 335 specified on the first image 401 to the measurement area 337 specified on the second image 402.

[0092] Once the image measurement elements have been set, the process proceeds to the next step SA4 in the flowchart shown in Fig. 7. In step SA4, the user specifies the measurement conditions, such as the number of averages. Once the measurement conditions have been specified, the process proceeds to the next step SA5 in the flowchart shown in Fig. 7. In step SA5, the user specifies the tolerance.

[0093] Once the tolerance has been specified, the process proceeds to step SA6 in the flowchart shown in FIG. 7. In step SA6, it is determined whether or not there is detailed setting of the image measurement element. If there is detailed setting of the image measurement element, the process proceeds to step SA7. If there is no detailed setting of the image measurement element, step SA7 is skipped and the process proceeds to step SA8. In step SA7, detailed setting of the image measurement element can be performed. After that, when the process proceeds to step SA8, it is determined whether or not there are other measurement elements. If there are other measurement elements, the process returns to step SA2 and a measurement method is selected for the other measurement elements. If there are no other measurement elements, the process proceeds to step SA9 and feature information is registered. Registering feature information means registering position correction.

[0094] When the registration of the feature amount information is completed, the process proceeds to step SA10, where all the measurement setting information is stored in the storage device 83. The measurement setting information includes the first image 401, the second image 402, and the measurement tool information. The measurement tool information includes the coordinates and size of the area, the number of averages, the tolerance, etc.

[0095] (Second setting mode) Of the distances X, Y, and angle θ, only the distance X can be automatically calculated by the optical measurement device 1 and set as the offset parameter, and this setting mode is referred to as the second setting mode. A basic flowchart of the automatic calculation process of the offset parameters is shown in FIG. 13. In this example, the light receiving unit 30A of the first measuring head 2A and the light receiving unit 30B of the second measuring head 2B are in a relative positional relationship in which the distance Y and the angle θ of the distances X, Y, and angle θ shown in FIG. 8 can be regarded as not existing. However, in the second setting mode, the distances Y and θ are regarded as known values, and only the offset parameter of the distance X is automatically calculated.

[0096] In step SC1 after the start, a first image 401 and a second image 402 corresponding to one end W1 and the other end W2 of the workpiece W, respectively, are generated, and the generated first image 401 and second image 402 are acquired.

[0097] In step SC2, the first image 401 and the second image 402 are displayed in the first image display area 301 and the second image display area 302 of the setting user interface screen 300, respectively.

[0098] In step SC3, as shown in FIG. 12, based on the user's operation of the keyboard 80, mouse 81, etc., a first contour 306 contained in the first image 401 displayed in the first image display area 301 is specified, and a second contour 308 contained in the second image 402 displayed in the second image display area 302 is specified.

[0099] 15C, in order to calculate distance X, regions 320 and 330 are designated and the user inputs distance 340 between them. This makes it possible to calculate distance X and distance Y, and thus makes it possible to calculate three offset parameters, namely distance X, distance Y, and angle θ.

[0100] Specifically, the user operates the pointer of the mouse 81 to specify an area 320 on the first image 401 so as to include one end W1 of the workpiece W, and specifies an area 321 on the second image 402 so as to include the other end W2 of the workpiece W. The CPU 73 identifies a straight line 322 corresponding to one end W1 of the workpiece W based on edge information in the area 320, and also identifies a straight line 323 corresponding to the other end W2 of the workpiece W based on edge information in the area 321.

[0101] In step SC8, the user operates the keyboard 80, the mouse 81, etc. to input the actual length of the workpiece W. The actual length of the workpiece W is the distance between one end W1 and the other end W2, and is therefore a value indicating the relative positional relationship in the longitudinal direction between the straight lines 322 and 323 specified in step SC7, i.e., the relative positional relationship in the longitudinal direction between the first contour 306 and the second contour 308. The actual length of the workpiece W is called the reference length of the workpiece W along the straight line L passing through the first contour 306 and the second contour 308. This reference length may also be called the representative length of the workpiece W.

[0102] In step SC10, the parameter setting unit 73d shown in FIG. 1 calculates a distance X for changing the relative positional relationship between the first image 401 and the second image 402 shown in FIG. 14 to the relative positional relationship between the first image 401 and the second image 402 shown in FIG. 15C, and sets the calculated parameter as an offset parameter. During the calculation, the relative positional relationship between the light receiving housing 40A when the first image 401 is acquired and the light receiving housing 40B when the second image 402 is acquired is calculated based on the geometric information acquired in step SC5 and the value (reference length) input by the user in step SC8. The offset parameter set in this manner is stored in the memory 74 or the storage device 83.

[0103] In step SC9, the second image 402 is moved while the first image 401 is fixed so that the interval between the straight line 322 of the first image 401 and the straight line 323 of the second image 402 matches the reference length input in step SC8. Note that the first image 401 may be moved while the second image 402 is fixed to match the reference length. Alternatively, both the first image 401 and the second image 402 may be moved to match the reference length.

[0104] The offset parameters may be calculated only once based on one of the first image 401 and the second image 402, or may be calculated multiple times by acquiring multiple first images 401 and multiple second images 402. When the offset parameters are calculated multiple times, a statistical process may be performed to set the final offset parameters. For example, an average value of the calculated offset parameters may be set as the final offset parameter to be applied during operation, or a mode value of the calculated offset parameters may be set as the final offset parameter to be applied during operation.

[0105] The above is the flow of the process procedure when setting the optical measuring device 1. Steps SC1 to SC10 shown in the flowchart of FIG. 13 are the first setting mode, and in this first setting mode, the offset parameters can be set based on the geometric information acquired by the information acquisition unit 73c and the input value input by the user, so that it is possible to set the offset parameters with high accuracy. Therefore, the first setting mode can be called the high accuracy mode. On the other hand, the setting mode in which only the distance X is automatically calculated is the second setting mode, and in this second setting mode, the user only needs to input the reference length of the workpiece W, so that the offset parameters can be set easily. Therefore, the second setting mode can be called the simple mode.

[0106] (When operating optical measuring equipment) Next, a procedure for operating the optical measuring device 1 at an actual measurement site after the optical measuring device 1 has been set will be described with reference to the flowchart shown in FIG. 16. This flowchart starts when the control device 70 issues a trigger signal, such as when a user performs a predetermined measurement start operation (step SD1). The trigger signal may be an input signal from the outside, or may be issued by the control device 70 at a predetermined timing. In step SD2, the imaging control unit 39 causes the light source 11 of the light projection unit 10 to emit light. In synchronization with the timing at which the light source 11 emits light, the imaging control unit 39 causes the two-dimensional imaging elements 31 of the first measuring head 2A and the second measuring head 2B to perform imaging processing, respectively. The timing of the imaging processing may be the same or different.

[0107] Thereafter, the process proceeds to step SD3, where a first image 401 and a second image 402 captured by the two-dimensional imaging elements 31 of the first measuring head 2A and the second measuring head 2B are acquired by the image acquisition unit 71. The first image 401 and the second image 402 acquired in step SD3 are images for measurement, and the first image 401 includes one end W1 of the workpiece W, and the second image 402 includes the other end W2 of the workpiece W.

[0108] After acquiring the image for measurement in step SD3, the process proceeds to step SD4. In step SD4, binning is performed, that is, four pixels of the acquired image for measurement are combined into one pixel to reduce the image size to 1 / 4, and the image for measurement is averaged as an image filtering process. For example, the averaging process can be a method of averaging by overlapping multiple images.

[0109] Next, the process proceeds to step SD5, where the image for measurement is transferred to the DSP 72. After that, the process proceeds to step SD6, where the image of the measurement area is extracted. Based on the information on the measurement area in the setting information (area coordinates and size), the area for edge processing is cut out from the image for measurement.

[0110] Thereafter, the process proceeds to step SD7 to perform edge processing. In step SD7, edges can be obtained within the measurement area in the image for measurement. For example, as shown in FIG. 15C, when areas 320 and 321 are specified, a straight line 322 corresponding to one end W1 of the workpiece W and a straight line 323 corresponding to the other end W2 can be obtained. At this time, edges can be obtained by performing edge processing on the directions (X direction, Y direction) of the measurement area. In the edge processing, for example, a Gaussian filter and differential processing are used, and the edge is extracted by calculating the peak of the differential waveform. Also, conversion from pixel units to mm units can be performed.

[0111] After the edge processing, the process proceeds to step SD8. In step SD8, the measurement process is performed by the measurement unit 73a configured by the CPU 73 shown in FIG. 1. First, the measurement unit 73a reads the offset parameters (distance X, Y, angle θ) set by the parameter setting unit 73d at the time of setting. The measurement unit 73a uses the offset parameters to set the relative positional relationship between the straight line 322 corresponding to one end W1 of the workpiece W and the straight line 323 corresponding to the other end W2, as shown in FIG. 15C. In this state, the distance between the straight lines 322 and 323 is calculated. That is, the measurement unit 73a can perform dimensional measurement of the workpiece W using the offset parameters.

[0112] In addition, by using the offset parameter, it is possible to set the relative positional relationship between the first image 401 and the second image 402 as shown in Fig. 15C. This allows the display device 82 to display the second image 402 in a state where it is offset from the first image 401. The distance between the first image 401 and the second image 402 changes according to the reference length of the workpiece W input in advance, and if the reference length is long, the second image 402 can be displayed spaced apart from the first image 401. This allows an intuitive display form close to the actual workpiece W.

[0113] A measurement tool 340 for measuring the distance between the straight lines 322 and 323 is displayed across a measurement area specified on the first image 401 and a measurement area specified on the second image 402. This makes it easier for the user to understand which part of the actual workpiece W is being measured.

[0114] After the measurement process, the process proceeds to step SD9. In step SD9, a judgment process is performed, that is, a judgment is made as to whether the measured numerical value indicates a good or defective product based on the tolerance setting value in the setting information (good or bad judgment).

[0115] (coordinate system of the first image and the second image) Since the first measuring head 2A and the second measuring head 2B are different, the first image 401 captured by the two-dimensional imaging element 31 of the first measuring head 2A has a first coordinate system, and the second image 402 captured by the two-dimensional imaging element 31 of the second measuring head 2B has a second coordinate system different from the first coordinate system. Therefore, the image acquisition unit 71 acquires the first image 401 and the second image 402 having the first coordinate system and the second coordinate system, respectively, which are different from each other. In the above, an example was shown in which the physical separation distances X, Y and the angle θ of the first measuring head 2A and the second measuring head 2B are calculated as offset parameters, but the dimensions of the workpiece W can be measured across the two imaging fields by calculating offset parameters that correspond the imaging field of the first measuring head 2A to the imaging field of the second measuring head 2B, that is, the first coordinate system to the second coordinate system.

[0116] As shown in FIG. 17, when a user specifies, for example, two measurement areas 350 and 351 on a first image 401, a contour 352 can be specified based on edge information in one measurement area 350, and another contour 353 can be specified based on edge information in the other measurement area 351. When the two measurement areas 350 and 351 are specified on the first image 401 in this way, the measurement unit 73a generates a dimension line 354, which is a measurement tool indicating the distance between the contour 352 in one measurement area 350 and the contour 353 in the other measurement area 351. The generated dimension line 354 is displayed on the first image 401. Then, the measurement unit 73a calculates the distance between the contours 352 and 353 using the first coordinate system.

[0117] Similarly, when the user designates, for example, two measurement areas 355 and 356 on the second image 402, the measurement unit 73a generates a dimension line 359, which is a measurement tool indicating the distance between a contour 357 in one measurement area 355 and a contour 358 in the other measurement area 356 in the second image 402. The generated dimension line 359 is displayed on the second image 402. Then, the measurement unit 73a calculates the distance between the contours 357 and 358 using the second coordinate system.

[0118] That is, the measurement unit 73a is configured to perform dimension measurement in a first coordinate system when multiple measurement areas 350, 351 are specified on the first image 401, and to perform dimension measurement in a second coordinate system when multiple measurement areas 355, 356 are specified on the second image 402. The number of measurement areas that can be set on each of the images 401, 402 is not limited to two.

[0119] (Offset parameter reset function) The optical measurement device 1 is configured to be able to reset (update) the offset parameters during operation. For example, due to thermal expansion caused by temperature changes of the members to which the first measurement head 2A and the second measurement head 2B are fixed, the relative positional relationship between the first measurement head 2A and the second measurement head 2B may change compared to when the optical measurement device 1 was started to operate. If the relative positional relationship between the first measurement head 2A and the second measurement head 2B has changed since the setting, there is a risk of measurement errors increasing if the measurement is performed using the offset parameters at the time of setting. Therefore, it is necessary to update the offset parameters to ones that reflect the current relative positional relationship, and perform measurement using the updated offset parameters.

[0120] As a function corresponding to this, the parameter setting unit 73d of this embodiment is configured to be able to execute a first setting process for setting offset parameters when the optical measuring device 1 is set, and a second setting process for setting offset parameters again when the optical measuring device 1 is operated. The first setting process is a setting process according to the flowcharts shown in FIG. 10 and FIG. 13 described above. After this setting is completed, the optical measuring device 1 is put into operation. After the optical measuring device 1 is put into operation, the operation is temporarily stopped at any timing, and the setting process according to the flowcharts shown in FIG. 10 and FIG. 13 is executed again. The timing for starting the second setting process may be a timing when a predetermined time has elapsed since the optical measuring device 1 started operating, a timing when a predetermined number of measurements have been completed, or a timing set based on the time. By updating the offset parameters, accurate measurements can be performed over a long period of time. In the above description, the setting time refers to a process of calculating offset parameters using a workpiece W, and the operation time refers to a time when the dimensions of a workpiece different from the workpiece W used at the setting time are measured.

[0121] (Position correction function for offset parameter calculation area) If the positional relationship between the first measuring head 2A and the second measuring head 2B changes, the offset parameters calculated when the optical measuring device 1 is set up cannot be used to accurately measure the dimensions of the workpiece.

[0122] As a function to accommodate this, the area setting unit 73e of this embodiment is configured to automatically update the offset parameters during operation so as to accommodate changes in the positions of the first measuring head 2A and the second measuring head 2B.

[0123] Specifically, as shown in FIG. 18, a search area 345 larger than the area 320 set for calculating the offset parameters in step SC7 in FIG. 13 is set, and a shape including one end W1 of the workpiece W is registered as a search shape. In addition, the relative positional relationship between the shape including one end W1 of the workpiece W and the area 320 is also specified. After that, when the positional relationship of the first measuring head 2A and the second measuring head 2B is reset, a pattern search is performed within the search area 345. This makes it possible to specify the position and orientation of the shape including one end W1 of the workpiece W, so that the area 320 can be arranged so as to have an initial positional relationship with respect to one end W1 of the workpiece W. In addition, by setting and storing a search area larger than the area 305 set to acquire geometric information in step SC3 in FIG. 13, the area 320 can be arranged in the initial positional relationship with respect to the workpiece W.

[0124] The same is true for the second image 402, where a search area 347 larger than the area 321 is set, and a shape including the other end W2 of the work W is registered as a search shape. In addition, the relative positional relationship between the shape including the other end W2 of the work W and the measurement area 337 is also specified. In addition, by setting and storing a search area larger than these for the area 306, it can be arranged in the initial positional relationship with respect to the work W. Thereafter, when the positional relationship of the first measuring head 2A and the second measuring head 2B is changed or reset, a pattern search is performed within the search area 347. As a result, the position and orientation of the shape including the other end W2 of the work W can be specified, so that the measurement area 337 can be arranged so as to have the initial positional relationship with respect to the other end W2 of the work W. As a result, each area set for calculating the offset parameters X, Y, and θ can be arranged in the initial positional relationship, so that the offset parameters can be automatically calculated.

[0125] (Measurement using one set of measuring heads) 2, a pair of measuring heads 2 can be used to measure the workpiece W, but if the workpiece W is larger than the imaging field of view, the measuring heads 2 can be moved by a moving device (not shown) to switch between a first position and a second position. The first position is a position where one end W1 of the workpiece W falls within the imaging field of view of the two-dimensional imaging element 31, and the second position is a position where the other end W2 of the workpiece W falls within the imaging field of view of the two-dimensional imaging element 31.

[0126] The measuring head 2 at the first position can acquire a first image 401 including one end W1 of the workpiece W. Also, the measuring head 2 at the second position can acquire a second image 402 including the other end W2 of the workpiece W. In this case, the parameter setting unit 73d sets an offset parameter that indicates the relative positional relationship between the light receiving housing 40 at the first position and the light receiving housing 40 at the second position.

[0127] (Workpieces with different shapes) FIG. 19A shows an image of a workpiece WA having a different shape from the workpiece W shown in FIG. 9. When an area 305 is specified in a first image 401, a linear first contour 306 is specified based on edge information in the area 305. When an area 307 is specified in a second image 402, a linear second contour 308 is specified based on edge information in the area 307. FIG. 19B is a diagram corresponding to FIG. 15A, in which the second image 402 is rotated so that the angle between the first contour 306 and the second contour 308 becomes a predetermined angle. As described above, the predetermined angle may be included in the geometric information and acquired by the information acquisition unit.

[0128] 20A shows a case where a circular contour (first contour) of a first through hole W3 formed near one end of the workpiece WA is specified, and shows a center point W3a of the contour and a central point W5 in the circumferential direction of a circular arc contour (second contour) formed near the other end of the workpiece WA. The center point W3a is automatically calculated when the circular contour is specified.

[0129] In FIG. 20B, the distance between the center point W3a of the first through hole W3 and the center point W5 of the arc portion, that is, a value indicating the relative positional relationship between the circular contour of the first through hole W3 and the arc-shaped contour, is set as the reference length, and the second image 402 is moved so that the distance between the center W3a of the first through hole W3 and the center point W5 of the arc portion becomes the reference length by the user inputting this reference length. The direction in which the reference length is taken, that is, the direction of movement, may be specified by the user when inputting the reference length, or may be determined in advance. In this way, the geometric information acquired by the information acquisition unit 73c is not limited to a straight line, and may be, for example, the center point of a circular contour or the center point in the circumferential direction of a circular contour.

[0130] Fig. 21A also shows a center point W6a of a circular second through hole W6 formed near one end of the workpiece WA, and a straight line 360 ​​passing through the center point W3a of the first through hole W3 and the center point W6a of the second through hole W6. Fig. 21B shows a straight line 370 that passes through the circumferential center point W5 of the arc portion and is parallel to the straight line 360. In this manner, the information acquiring unit 73c can acquire the straight lines 360 and 370 as geometric information.

[0131] The user inputs the distance E as a value indicating the relative positional relationship between the straight lines 360 and 370, and the second image 402 is moved so that the distance between the straight lines 360 and 370 becomes the distance E. This makes it possible to set offset parameters for workpieces WA that have complex shapes other than columnar or rod-like shapes by specifying a circular or arc-like contour.

[0132] (Effects of the embodiment) As described above, according to this embodiment, when the first image 401 corresponding to a part of the workpiece W, WA is acquired, the first contour can be specified based on the user's operation, and when the second image 402 corresponding to another part of the workpiece W, WA is acquired, the second contour can be specified based on the user's operation. After each contour is specified, straight lines and points are acquired as geometric information for specifying the relative positional relationship between the first contour and the second contour, and based on this geometric information and a value indicating the relative positional relationship between the first contour and the second contour, an offset parameter indicating the relative positional relationship between the light receiving housing 40 when the first image 401 is acquired and the light receiving housing 40 when the second image 402 is acquired can be automatically set. Using this set offset parameter, the dimensions of the workpiece W, WA can be measured, so that the user can easily obtain accurate measurement results.

[0133] The above-described embodiment is merely illustrative in all respects and should not be construed as limiting. Furthermore, all modifications and variations within the scope of the claims are within the scope of the present invention. [Industrial Applicability]

[0134] As described above, the optical measuring device according to the present invention can be used when measuring a workpiece by projecting measurement light into a space in which the workpiece is placed. [Explanation of symbols]

[0135] 1 Optical measurement device 10 Light projection unit 11 Light source 15 Telecentric lens on the light emission side 20 Light projection housing 23 Floodlight 30 Light receiving unit 31 Two-dimensional image sensor 36 Telecentric lens on the receiving side 40 Light receiving housing 43 Light receiving window 71 Image acquisition unit 73a Measuring part 73b Specified part 73c Information acquisition section 73d Parameter setting section 73e Area setting section W, WA Work

Claims

1. An optical measuring device having a measuring head including a light-projecting housing having a light-projecting window and attached with a light-projecting telecentric lens that generates parallel light projected into a space in which a workpiece is placed, and a light-receiving housing having a light-receiving window and attached with a light-receiving telecentric lens into which the parallel light that has passed through the space is incident and a two-dimensional image sensor that receives the light that has passed through the light-receiving telecentric lens, the optical measuring device being installed so that the light-projecting window and the light-receiving window face each other and performing dimensional measurement of the workpiece placed in the space, an image acquisition unit that uses the measurement head to capture an image of a portion of a workpiece larger than an imaging field of the two-dimensional imaging element and another portion different from the first portion, generates a first image and a second image corresponding to the first portion and the other portion, respectively, and acquires the generated first image and second image; a display unit that displays the first image and the second image acquired by the image acquisition unit; a designation unit that designates a first contour included in the first image and designates a second contour included in the second image based on a user operation; an information acquiring unit that acquires geometric information for identifying a relative positional relationship between the first contour and the second contour designated by the designation unit; an input unit for inputting a value indicating a relative positional relationship between the first contour and the second contour; a parameter setting unit that sets an offset parameter indicating a relative positional relationship between the light receiving housing that acquired the first image and the light receiving housing that acquired the second image, based on the geometric information acquired by the information acquisition unit and the value input by the input unit; a measuring unit that performs dimensional measurement of the workpiece using the offset parameters set by the parameter setting unit.

2. 2. The optical measurement device according to claim 1, the information acquisition unit is configured to acquire a straight line passing through the first contour and the second contour as the geometric information; The input unit is an optical measuring device configured to input a reference length of the workpiece along the straight line acquired by the information acquisition unit.

3. 3. The optical measuring device according to claim 1, A region setting unit that sets a measurement region on the first image and the second image acquired by the image acquisition unit, The measurement unit is an optical measuring device configured to perform dimensional measurement of the work using an edge extracted from the measurement area set by the area setting unit and an offset parameter set by the parameter setting unit.

4. 4. The optical measuring device according to claim 1, The measurement head includes a first measurement head and a second measurement head, The image acquisition unit is an optical measurement device that generates the first image using the first measuring head and generates the second image using the second measuring head.

5. 5. The optical measuring device according to claim 4, the image acquisition unit acquires the first image and the second image having a first coordinate system and a second coordinate system, which are different from each other; The measurement unit is configured to perform dimensional measurements in the first coordinate system when multiple measurement areas are specified on the first image acquired by the image acquisition unit, and to perform dimensional measurements in the second coordinate system when multiple measurement areas are specified on the second image acquired by the image acquisition unit, and to calculate the correspondence between the first coordinate system and the second coordinate system using the offset parameters, thereby performing dimensional measurements of the workpiece.

6. 6. The optical measuring device according to claim 1, The display unit is configured to display the first image and the second image so that the first contour and the second contour are aligned on the straight line when the information acquisition unit acquires a straight line passing through the first contour and the second contour as the geometric information.

7. 7. The optical measuring device according to claim 6, The display unit is configured to display the second image offset relative to the first image using offset parameters set by the parameter setting unit, and to display a measurement tool across a measurement area specified on the first image acquired by the image acquisition unit to a measurement area specified on the second image acquired by the image acquisition unit.

8. 7. The optical measuring device according to claim 6, The optical measurement device, wherein the display unit is configured to display the second image at a distance from the first image in accordance with an offset parameter set by the parameter setting unit.

9. 9. The optical measuring device according to claim 1 , The parameter setting unit is an optical measuring device configured to be able to execute a first setting mode in which the offset parameter is set based on geometric information acquired by the information acquisition unit and the value input by the input unit, and a second setting mode in which the offset parameter is set based on the reference length of the work input by the input unit.

10. 10. The optical measurement device according to claim 9, the input unit is configured to be able to calculate, as the value indicating the relative positional relationship between the first contour and the second contour, a difference in height between a position of the light receiving housing when the first image was acquired and a position of the light receiving housing when the second image was acquired, a difference in horizontal direction between a position of the light receiving housing when the first image was acquired and a position of the light receiving housing when the second image was acquired, and an angle between the light receiving housing when the first image was acquired and the light receiving housing when the second image was acquired, The parameter setting unit sets the offset parameter based on the difference in the height direction, the difference in the horizontal direction, and the angle in the first setting mode.

11. 11. The optical measuring device according to claim 1 , The parameter setting unit is configured to be able to execute a first setting process for setting the offset parameters when setting up the optical measuring device, and a second setting process for re-setting the offset parameters when operating the optical measuring device.

Images