Image Dimension Measuring Device

Abstract

To enable feature shape which can be a measurement element and an imaging portion to automatically face each other, to thereby make reduction of measurement time and improvement in measurement accuracy compatible each other.SOLUTION: An image dimension measurement device comprises a control unit 3 which on the basis of a plurality of measurement object images captured by the imaging portion 15 and the rotation angle of the measurement object at the time of capturing of each of the measurement object image, calculates a rotation angle at which a feature shape faces the imaging portion 15, and performs control in such a manner that the rotation angle becomes the calculated rotation angle.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to an image dimension measuring device equipped with a rotation mechanism for rotating a measurement object. [Background technology]

[0002] Conventionally, there has been known a dimension measuring device that acquires the dimensions of each part of a measurement object based on an image of the measurement object that is rotatably held. For example, Patent Document 1 discloses a device that uses a camera to capture an image of a machining tool fixed to a spindle of a machining center from the side, performs image processing on the image captured by the camera to extract a contour line image, and calculates the dimensions of the machining tool from the contour line image. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-284531 A Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, the dimension measuring device of Patent Document 1 is capable of measuring, for example, a cylindrical component as a measurement object, and is capable of measuring a D-cut surface having a flat surface formed on part of the outer circumferential surface, holes formed in the component, the outer diameter, roundness, etc. of the component.

[0005] However, when measuring a feature shape such as a D-cut surface or hole of an object as a measurement element, it is necessary to adjust the rotation angle of the object to orient the camera directly. Conventionally, the user adjusts the rotation angle of the object visually while looking at the image captured by the camera, which may result in variation in the adjustment value. Variation in the adjustment value adversely affects the measurement accuracy, so if adjustments are made rigorously to eliminate the variation in the adjustment value, the adjustment takes time, which ultimately extends the measurement time.

[0006] The present disclosure has been made in consideration of such points, and its purpose is to enable a characteristic shape that can be a measurement element to be automatically opposed to an imaging unit, thereby achieving both a reduction in measurement time and an improvement in measurement accuracy. [Means for solving the problem]

[0007] In order to achieve the above object, the present disclosure can be premised on an image dimension measuring device for measuring the dimensions of a measurement object consisting of an axial object partially having a characteristic shape. The image dimension measuring device includes a transillumination unit, a horizontally extending stage having a transmissive part that transmits light from the transillumination unit and on which the measurement object is placed, an imaging unit that is provided so that the light from the transillumination unit passes through the transmissive part of the stage and enters the stage, and generates a measurement object image, a rotation mechanism that is attached to the stage, holds the measurement object between the transmissive part of the stage and the imaging unit, and rotates the measurement object around a predetermined axis that extends horizontally, and a control unit that calculates a rotation angle at which the characteristic shape faces the imaging unit based on a plurality of measurement object images captured by the imaging unit and the rotation angle of the measurement object when each measurement object image is captured, and controls the rotation mechanism so that the rotation angle of the rotation mechanism becomes the calculated rotation angle.

[0008] The image dimension measuring device may include an operation unit that accepts a selection of a type of characteristic shape, and a storage unit that stores a plurality of search algorithms corresponding to the type of characteristic shape. The control unit can calculate the facing rotation angle by executing the search algorithm corresponding to the type of characteristic shape accepted by the operation unit.

[0009] The image dimension measuring device may include a display unit that displays an image of a measurement object, and an operation unit that accepts designation of an area in which a characteristic shape exists on the image of the measurement object displayed on the display unit. The control unit may set the area accepted by the operation unit as a calculation target area for the facing rotation angle.

[0010] The image dimension measuring device may further include an operation unit that receives a designation of an angle range in which to search for a characteristic shape, and the control unit may set the angle range received by the operation unit as a calculation target angle range for the facing rotation angle.

[0011] The control unit can extract an evaluation value that is maximum, minimum or extreme when the characteristic shape is directly facing the imaging unit, and calculate a rotation angle at which the characteristic shape is directly facing the imaging unit based on the evaluation value.

[0012] The image dimension measuring device may include an operation unit that receives a designation of a measurement position where a dimension measurement is performed when a characteristic shape is directly opposed to the imaging unit, and a storage unit that stores the measurement position received by the operation unit, an area including the measurement position, and a type of the characteristic shape in association with each other. The control unit can execute a measurement process to measure the dimension of a measurement element of a measurement object based on the measurement position, the area including the measurement position, and the type of the characteristic shape read from the storage unit during measurement.

[0013] The imaging unit can generate, as the measurement object images, a plurality of images during rotation obtained by imaging a rotating measurement object a plurality of times and a plurality of images at rest obtained by imaging a measurement object whose rotation has been stopped a plurality of times. The control unit can perform a rough search of the facing rotation angle based on the plurality of images during rotation to specify a rotation angle range in which the facing rotation angle is relatively likely to exist, and then perform a fine search within the rotation angle range based on the plurality of images at rest to calculate the facing rotation angle. Effect of the Invention

[0014] According to the present disclosure, the rotation angle at which the characteristic shape faces the imaging unit can be calculated based on a plurality of measurement object images generated by imaging a measurement object consisting of an axial object having a characteristic shape at different rotation angles and the rotation angle of the measurement object when each measurement object image is captured, and the rotation mechanism can be controlled so that the rotation angle of the rotation mechanism becomes the calculated rotation angle. This makes it possible to automatically face the characteristic shape with the imaging unit, thereby achieving both a reduction in measurement time and an improvement in measurement accuracy. [Brief description of the drawings]

[0015] [Figure 1] 1 is a front view of an image dimension measuring device according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a perspective view of the image dimension measuring device. [Diagram 3] FIG. 2 is a block diagram of the image dimension measuring device. [Figure 4] FIG. 4 is a perspective view showing the positional relationship between a rotating body and a locking mechanism. [Diagram 5] FIG. 4 is a perspective view showing a state in which the chuck mechanism is attached to a rotating body. [Figure 6] FIG. 4 is an exploded perspective view of the chuck mechanism and the rotating body as viewed from the left side. [Figure 7] FIG. 11 is a perspective view showing another embodiment of the chuck mechanism. [Figure 8A] This is a view of a measurement object consisting of a shaft, as seen from the side where the D-cut surface is formed. [Figure 8B] This is a diagram of the state in which a measurement object consisting of an axial member is rotated until the D-cut surface is positioned at the bottom of the figure. [Figure 9A] FIG. 2 is a plan view of a measurement object consisting of a box. [Figure 9B] FIG. 2 is a side view of a measurement object consisting of a box. [Figure 10A] 13 is a flowchart showing an example of a procedure of a measurement setting mode. [Figure 10B] 10 is a flowchart showing details of a procedure of a measurement setting mode. [Figure 11] FIG. 13 is a diagram illustrating an example of a setting user interface screen. [Figure 12] FIG. 13 is a diagram showing an example in which characteristic shape selection windows are displayed in an overlapping manner. [Figure 13A] FIG. 13 is a diagram showing the distance between the axis and the D-cut surface when the surface is rotated until the D-cut surface is positioned at the bottom of the figure. [Figure 13B] 13B is a diagram showing the distance between the axis and the D-cut surface when the D-cut surface is brought closer to the imaging unit than the position shown in FIG. 13A. [Figure 13C] 13 is a graph showing the relationship between the rotation angle of a measurement object and the distance between a D-cut surface and a shaft core. [Figure 14A] FIG. 13 is a schematic diagram showing a pin having a characteristic shape. [Figure 14B] 13 is a graph showing the relationship between the rotation angle of the measurement object and the distance between the tip of the pin and the shaft center. [Figure 15] FIG. 13 is a diagram showing an example of a parameter setting user interface screen. [Figure 16] FIG. 13 is a diagram showing an example of combination of preset shapes, measurement contents, and maximum / minimum. [Figure 17] FIG. 13 is a diagram showing an example of a window displayed for executing an auto-angle function during editing. [Figure 18] FIG. 13 is a diagram showing a case where the auto angle function is executed on a box-shaped measurement object. [Figure 19] FIG. 12 is a view equivalent to FIG. 11 showing a state in which the characteristic shape faces the imaging unit. [Figure 20A] FIG. 13 is a diagram showing an example of a user interface image displaying an image of the object to be measured in a state where the angle is 0 degrees after the dialog is closed. [Figure 20B] FIG. 13 is a diagram showing an example of a user interface image displaying a measurement object image in a state in which an element used for detecting the direction of the measurement object is rotated 90 degrees. [Figure 21A] FIG. 13 is a diagram showing an example of a developed image of a measurement object. [Figure 21B] FIG. 21B is a view equivalent to FIG. 21A with dimensions shown. [Figure 22] FIG. 13 is a diagram showing an example of settings when the rotation angle is 0 degrees. [Diagram 23] FIG. 13 is a diagram showing an example of settings when the rotation angle is 90 degrees. [Figure 24A] 13 is a diagram showing an example of setting contents of measurement elements when the rotation angle is 0 degrees. FIG. [Figure 24B] FIG. 13 is a diagram showing an example of setting contents of measurement elements when the rotation angle is 90 degrees. [Diagram 25] FIG. 13 is a diagram showing an example of a user interface screen for registering a pattern image. [Figure 26A] FIG. 13 is a diagram showing an example of a user interface image displaying an image of a box-shaped object to be measured when the angle is 0 degrees after the dialog is closed. [Figure 26B] FIG. 13 is a diagram showing an example of a user interface image displaying a measurement object image in a state in which an element used to detect the orientation of a box-shaped measurement object has been rotated 180 degrees. [Figure 27] 13 is a flowchart showing an example of a procedure of a continuous measurement mode. [Figure 28A] FIG. 13 is a diagram showing an image of a measurement object on which a positioning guide is displayed. [Figure 28B] FIG. 13 is a diagram showing a state in which a measurement target is aligned with a positioning guide. [Figure 29] FIG. 13 is a diagram showing an example of a user interface image for displaying measurement results. [Diagram 30] FIG. 13 is an illustration of the measured angle in a setup that does not include a mechanical reference element. [Diagram 31] FIG. 13 is an illustration of the measurement angles in a setup including a mechanical reference element. [Diagram 32] 13 is a diagram showing an example of a user interface image displayed on the display unit when the measurement object is a box. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, the preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Note that the following description of the preferred embodiments is merely illustrative in nature and is not intended to limit the present invention, its applications, or its uses.

[0017] FIG. 1 is a front view of an image dimension measuring device 1 according to an embodiment of the present invention, and FIG. 2 is a perspective view of the image dimension measuring device 1 according to an embodiment of the present invention. FIG. 3 is a block diagram showing a schematic configuration of the image dimension measuring device 1 according to an embodiment of the present invention. The image dimension measuring device 1 measures the dimensions of a measurement target W (shown in FIG. 1 and FIG. 2) such as various works, and includes a device main body 2, a control unit 3, a storage unit 4, and a rotation unit 5 as shown in FIG. 3. The control unit 3 may be separate from the device main body 2 and connected to be able to communicate with each other via a communication line or the like, or may be built into the device main body 2 and integrated. Similarly, the storage unit 4 may be separate from the device main body 2, or may be built into the device main body 2 and integrated. In this example, the control unit 3 and the storage unit 4 are separate, but they may be integrated.

[0018] In the description of this embodiment, the side located in front when the image dimension measuring device 1 is viewed from the user is referred to as the front side, the side located in the back is referred to as the back side, the side located to the left is referred to as the left side, and the side located to the right is referred to as the right side. The front side can also be referred to as the near side, and the back side can also be referred to as the far side. This definition is provided merely for the convenience of description.

[0019] (Configuration of device body 2 and control unit 3) As shown in Fig. 1 and Fig. 2, the device main body 2 includes a base portion 10 and an arm portion 11 extending upward from the rear side of the base portion 10. A stage 12 for placing a measurement target W on is provided on the upper portion of the base portion 10. The stage 12 extends substantially horizontally. A transmission portion 12a for transmitting light is provided near the center of the stage 12. The stage 12 can be driven by a stage driving portion 12c shown in Fig. 3.

[0020] As shown in FIG. 3, the device body 2 is provided with an illumination unit 13. The illumination unit 13 includes an incident illumination unit 13a built into the arm unit 11 and a transmitted illumination unit 13b built into the base unit 10. The incident illumination unit 13a is an illumination device that illuminates the measurement object W placed (placed stationary) on the stage 12 or the measurement object W that can be rotated by the rotation unit 5 from above, and can be formed in a ring shape surrounding the optical axis A (shown in FIG. 1) of the imaging unit 15 described later. The transmitted illumination unit 13b is an illumination device that illuminates the measurement object W placed on the transmitted portion 12a of the stage 12 or the measurement object W that can be rotated by the rotation unit 5 from below. In FIGS. 1 and 2, only the measurement object W that can be rotated by the rotation unit 5 is shown.

[0021] An operation unit 14 is provided on the front side of the base unit 10. The operation unit 14 includes various buttons, switches, dials, etc. that are operated by the user. The operation unit 14 is connected to the control unit 3, and the control unit 3 detects the operation state of the operation unit 14 and controls each unit according to the operation state of the operation unit 14. The operation unit 14 may be composed of a touch panel or the like that can detect a touch operation by the user, and in this case, the operation unit 14 can be incorporated into the display unit 16 described later. The operation unit 14 may also be composed of a keyboard, a mouse, etc. that can be connected to the control unit 3.

[0022] The epi-illumination unit 13a and the transmitted illumination unit 13b are connected to the control unit 3 and controlled by the control unit 3. For example, when the control unit 3 detects that an operation to start measurement of the measurement target W has been performed by the operation unit 14, the epi-illumination unit 13a or the transmitted illumination unit 13b can be turned ON to irradiate light.

[0023] The arm 11 is provided with an imaging section 15 (shown in FIG. 3). The imaging section 15 is a section for capturing an image of the measurement object W placed on the stage 12 or the measurement object W that can be rotated by the rotation unit 5, and generating an image of the measurement object. An example of the imaging section 15 is a camera having an imaging element such as a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS). As shown in FIG. 1, the optical axis A of the imaging section 15 is set vertically downward, and although not shown, an optical system including a light receiving lens and an imaging lens is provided coaxially with the optical axis A of the imaging section 15. The imaging section 15 may be an imaging unit including an optical system, or may not include an optical system. The imaging section 15 is configured to receive light irradiated from the epi-illumination section 13a and reflected by the measurement object W, light irradiated from the transmission illumination section 13b and transmitted through the transmission section 12a of the stage 12, and the like. A conventional method can be used for adjusting the focus using an optical system.

[0024] The imaging section 15 generates an image based on the amount of received light. The imaging section 15 is connected to the control unit 3, and the image generated by the imaging section 15 is transmitted to the control unit 3 as image data. The control unit 3 can also control the imaging section 15. For example, when the control unit 3 detects that the operation section 14 has performed an operation to start measurement of the measurement object W, the control unit 3 causes the imaging section 15 to execute imaging processing while turning on the epi-illumination section 13a or the transmitted illumination section 13b to irradiate light. As a result, an image of the measurement object is generated in the imaging section 15, and the generated image of the measurement object is transmitted to the control unit 3.

[0025] The control unit 3 incorporates the measurement object image transmitted from the imaging unit 15 into a user interface screen and displays it on the display unit 16. That is, the display unit 16 is provided on the upper part of the arm unit 11 so as to face forward. The display unit 16 is composed of, for example, a liquid crystal display or an organic EL display, and is connected to the control unit 3. The control unit 3 controls the display unit 16 to display various user interface screens on the display unit 16.

[0026] A storage unit 4 is connected to the control unit 3. The storage unit 4 is composed of, for example, an SSD (Solid State Drive) or a hard disk. The control unit 3 is connected to each piece of hardware as described above, and controls the operation of each piece of hardware, and is a part that executes software functions in accordance with a computer program stored in the storage unit 4. The control unit 3 is provided with a RAM (not shown) and the like, into which a load module is expanded when a computer program is executed, and which stores temporary data and the like that is generated when the computer program is executed.

[0027] The control unit 3 is provided with an edge extraction section 30 and a measurement section 31. The edge extraction section 30 is a section that extracts the edge (contour) of the measurement object W by executing image processing on the measurement object image transmitted from the imaging section 15. Since the method of extracting the edge of the measurement object is conventionally well known, a detailed description will be omitted. The edge extraction section 30 outputs an edge image showing the edge of the measurement object.

[0028] The edge image output from the edge extraction unit 30 is input to the measurement unit 31. The measurement unit 31 uses the edge image to measure the dimensions of each part of the measurement object W. The measurement part of the dimension can be specified in advance by the user. For example, the user can specify any two points on the measurement object image by operating the operation unit 14 while looking at the measurement object image displayed on the display unit 16, and can specify the measurement part of the measurement object W based on the position coordinates of the specified points. The measurement unit 31 can obtain the dimension of the specified part by calculating the edge distance, edge length, etc. corresponding to the measurement part specified by the user. The obtained dimension can be displayed on the display unit 16. At this time, the value indicating the dimension and the dimension line can be superimposed on the measurement object image.

[0029] (Configuration for rotating the measurement target W) In this embodiment, the measurement object W can be not only placed on the stage 12 and measured, but also rotated and measured. Specifically, the image dimension measuring device 1 includes a rotation unit (rotation mechanism) 5 that generates and outputs a rotational force and a chuck mechanism 6 that grips the measurement object W as a configuration for rotating the measurement object W and an associated configuration. Although details will be described later, the chuck mechanism 6 is configured to be detachable from the rotation unit 5, and when the chuck mechanism 6 is attached to the rotation unit 5, the rotational force output from the rotation unit 5 is transmitted to the measurement object W via the chuck mechanism 6 to rotate the measurement object W. The rotation unit 5 can rotate the measurement object W by a predetermined angle and stop it.

[0030] (Configuration of Rotation Unit 5) 1, the rotation unit 5 is a stage for allowing a measurement target W to be rotated around a predetermined rotation axis B in a state in which the measurement target W is placed above the transmission portion 12a of the stage 12, and for stopping the measurement target W at an arbitrary rotation position and holding that position. In this embodiment, the rotation unit 5 is separate from the stage 12 and configured to be detachable from the stage 12, but the rotation unit 5 and the stage 12 may be configured as one unit. In the case of a detachable rotation unit 5, the rotation unit 5 can be attached to the stage 12 only when it is needed, and can be removed from the stage 12 when it is not needed.

[0031] The rotation unit 5 includes a motor 50 (shown in FIG. 3), a housing 51 incorporating the motor 50, and a rotating body 52 rotated by the motor 50. The motor 50 is fixed to the housing 51. The housing 51 is attached to the left end of the stage 12. The housing 51 may be attached to the right end of the stage 12, in which case the stage 12 shown in FIG. 1 etc. may be made symmetrical.

[0032] With the housing 51 attached to the stage 12, the output shaft of the motor 50 is disposed so as to extend horizontally to the right. A rotating body 52 is fixed to this output shaft, and therefore the rotating body 52 rotates around a rotation axis B that extends horizontally in the left-right direction. Since the optical axis A of the imaging unit 15 is in the vertical direction, the rotation axis B intersects with the optical axis A of the imaging unit 15. In this embodiment, the rotation axis B is perpendicular to the optical axis A of the imaging unit 15, but it does not have to be perpendicular.

[0033] 1 and 2, a chuck mechanism 6 is attached to the rotating body 52. ​​In this embodiment, the rotating body 52 is directly connected to the output shaft of the motor 50, but this is not limiting, and for example, a reduction gear mechanism (not shown) may be provided between the motor 50 and the rotating body 52. ​​In this case, the rotating body 52 is connected to the output shaft of the reduction gear mechanism.

[0034] As shown in Fig. 4, the rotor 52 has an annular peripheral wall portion 52b that protrudes from the connecting portion 52a in the direction of the rotation axis B (to the right) and extends in the circumferential direction of the rotation axis B. The connecting portion 52a and the peripheral wall portion 52b are integrated. The axis of the peripheral wall portion 52b is located on the rotation axis B. A screw thread is formed on the outer circumferential surface of the peripheral wall portion 52b.

[0035] In the peripheral wall portion 52b, a plurality of slits 52c are formed at circumferential intervals from each other, extending from the tip (right end) of the protruding direction of the peripheral wall portion 52b toward the base end side (left side). The left end of the slit 52c is located in the middle part of the peripheral wall portion 52b in the left-right direction. By forming a plurality of slits 52c, when a fastening force is applied to the peripheral wall portion 52b from the outside to the inside in the radial direction, the width of each slit 52c becomes narrow, so that the diameter of the peripheral wall portion 52b can be reduced. The deformation of the peripheral wall portion 52b at this time is a deformation in an elastic deformation range, and the original shape is restored by removing the fastening force. The slits 52c can be formed at equal intervals in the circumferential direction of the peripheral wall portion 52b.

[0036] As shown in FIG. 1 and FIG. 2, the rotation unit 5 includes a manual adjustment knob 55, an encoder 56 (shown in FIG. 3) that detects the amount of rotation of the manual adjustment knob 55, and a processing circuit 57 (shown in FIG. 3). The manual adjustment knob 55 is supported by the housing 51 so as to be rotatable around an axis parallel to the rotation axis B. The position of the manual adjustment knob 55 is on the front side and left side of the housing 51, and protrudes from the housing 51 to the left. This allows the user to rotate the manual adjustment knob 55 with the left hand while sitting in front of the image dimension measuring device 1. The position of the manual adjustment knob 55 is not particularly limited, and may be on the back side or the left side of the housing 51.

[0037] Encoder 56 is built into housing 51, and can be configured with a conventionally known rotary encoder or the like. For example, when a user rotates manual adjustment knob 55, the amount of rotation can be detected by encoder 56, and the result detected by encoder 56 is output from said encoder 56 to processing circuit 57 as a signal relating to the amount of rotation.

[0038] The processing circuit 57 is a part that controls the motor 50, and may be built in the control unit 3 or the device main body 2. The processing circuit 57 receives a signal related to the amount of rotation output from the encoder 56, converts it into the amount of rotation of the motor 50, and rotates the motor 50 by the converted amount of rotation. The amount of rotation of the manual adjustment knob 55 and the amount of rotation of the output shaft 50a of the motor 50 do not have to match, but only need to correspond to each other. For example, when the user rotates the manual adjustment knob 55 by 10°, the encoder 56 detects that the manual adjustment knob 55 has rotated by 10° and outputs a detection signal according to the amount of rotation to the processing circuit 57. When the processing circuit 57 acquires information that the manual adjustment knob 55 has rotated by 10°, the processing circuit 57 converts the amount of rotation of the manual adjustment knob 55 at a predetermined ratio and outputs a control signal to the motor 50. The control signal can be a signal that rotates the output shaft 50a of the motor 50 by less than 10°.

[0039] The control of motor 50 by processing circuit 57 is executed almost in real time, so that when manual adjustment knob 55 starts to rotate, motor 50 also rotates almost synchronously, and when manual adjustment knob 55 stops, motor 50 also stops almost synchronously. This allows the user to rotate measurement target W by any angle.

[0040] In this example, since the rotating body 52 is directly driven by the motor 5, the processing circuit 57 only needs to control the motor 50 so that the output shaft 50a of the motor 50 rotates by the amount of rotation of the manual adjustment knob 55. If a reduction gear mechanism is provided between the output shaft 50a of the motor 50 and the rotating body 52, the processing circuit 57 only needs to rotate the output shaft 50a of the motor 50 more than the amount of rotation of the manual adjustment knob 55, taking into account the reduction ratio.

[0041] The rotation unit 5 is provided with a connection line 5a that is connected to the control unit 3 or the device body 2. Power is supplied to the motor 50 via the connection line 5a. In addition, communication between the rotation unit 5 and the control unit 3, or communication between the rotation unit 5 and the device body 2 is performed via the connection line 5a.

[0042] (Configuration of chuck mechanism 6) 5 and 6, the chuck mechanism 6 includes a chuck body 60 that is attached to and detached from the rotating body 52, first to third chuck jaws 61 to 63 that are arranged to grip the measurement target W from three directions, an adjustment member 64 for changing the positions of the first to third chuck jaws 61 to 63, and a fastening member 80 that fastens and fixes the chuck body 60 to the rotating body 52. ​​In a state where the chuck body 60 is fastened and fixed to the rotating body 52, the chuck body 60 is rotated together with the rotating body 52 by the motor 50 around the rotation axis B. The chuck body 60 also includes a holding member 65 that holds the first to third chuck jaws 61 to 63, and a fastened member 69 that constitutes a fastened portion.

[0043] The holding member 65 has a guide plate portion 65a for guiding the first to third chuck jaws 61 to 63 in the radial direction, and a boss portion 65b to which a fastened member 69 is fixed, which are integrated together. The boss portion 65b protrudes leftward from the left side surface of the fastened member 69. The axis of the boss portion 65b and the axis of the guide plate portion 65a are located on the rotation axis B (shown in FIG. 1). The guide plate portion 65a is provided with a first groove portion 65c, a second groove portion 65d, and a third groove portion 65e. These first to third groove portions 65c, 65d, and 65e extend radially in the radial direction and are arranged at intervals from each other in the circumferential direction. The ends of the first to third groove portions 65c, 65d, and 65e are open on the outer circumferential surface of the guide plate portion 65a.

[0044] The first to third chuck jaws 61-63 have first to third sliders 66-68, respectively. The first to third sliders 66-68 are members that are inserted into the first to third grooves 65c, 65d, 65e of the guide plate portion 65a, respectively, and slide in the longitudinal direction within the first to third grooves 65c, 65d, 65e. The first to third chuck jaws 61-63 are fixed to the right surfaces of the first to third sliders 66-68, and protrude to the right from the guide plate portion 65a.

[0045] First to third protrusions 66a, 67a, 68a are respectively provided to protrude leftward on the left surfaces of the first to third sliders 66 to 68. The first to third protrusions 66a, 67a, 68a protrude leftward beyond the left side surface of the guide plate portion 65a.

[0046] The adjustment member 64 is a member for moving the first to third chuck jaws 61 to 63 in the radial direction along the first to third grooves 65c, 65d, and 65e by manually rotating the adjustment member 64 around the rotation axis B relative to the chuck body 60 by the user. That is, the adjustment member 64 is formed in a disk shape as a whole, and its axis is disposed on the rotation axis B. A boss insertion hole 64a into which the boss portion 65b is inserted is formed in the center of the adjustment member 64. With the boss portion 65b inserted into the boss insertion hole 64a, the adjustment member 64 is supported rotatably around the rotation axis B relative to the boss portion 65b. Although not shown, a helical rib is formed on the right side surface of the adjustment member 64 so as to protrude toward the right. The helical rib extends in a spiral shape centered on the rotation axis B.

[0047] When the boss portion 65b is inserted into the boss insertion hole 64a of the adjustment member 64, the helical thread engages with the first to third convex portions 66a, 67a, and 68a of the first to third sliders 66 to 68. When the adjustment member 64 is rotated around the rotation axis B in this state, the helical thread applies a radial force to the first to third sliders 66 to 68, causing the first to third sliders 66 to 68 to slide in the longitudinal direction within the first to third groove portions 65c, 65d, and 65e. In other words, the first to third chuck jaws 61 to 63 can be moved in the radial direction. Note that a helical groove may be provided instead of the helical thread, and any mechanism capable of converting the rotational motion around the rotation axis B into linear motion in the radial direction may be used.

[0048] The movement direction of the first to third chuck jaws 61-63 can be changed by changing the rotation direction of the adjustment member 64. When the first to third chuck jaws 61-63 are to grip the measurement object W, the adjustment member 64 is rotated so that the first to third chuck jaws 61-63 move in directions approaching each other, whereby the measurement object W can be gripped by the first to third chuck jaws 61-63. On the other hand, when the measurement object W gripped by the first to third chuck jaws 61-63 is to be released, the adjustment member 64 is rotated in the opposite direction to move the first to third chuck jaws 61-63 in directions separating them from each other.

[0049] The fastened member 69 is a disk-shaped member, and can be attached to the boss portion 65b of the holding member 65 by, for example, a retaining ring 81 or the like. When the fastened member 69 is attached to the boss portion 65b, the two are integrated and relative rotation is prevented. The axis of the fastened member 69 is located on the rotation axis B. The outer diameter of the fastened member 69 is set so that it can be inserted into the peripheral wall portion 52b of the rotating body 52 of the rotation unit 5.

[0050] 6, the fastening member 80 is a so-called nut, and in this embodiment, is configured as an annular member. The axis of the fastening member 80 is located on the rotation axis B, and a central hole 80a into which the boss portion 65b can be inserted is formed in the center of the fastening member 80. A circular recess 80b is formed on the left side of the fastening member 80. A thread groove 80c that screws into the thread of the peripheral wall portion 52b of the rotor 53 is formed on the inner circumferential surface of the recess 80b.

[0051] When the fastening member 80 is rotated to screw the screw groove 80c into the thread of the peripheral wall portion 52b of the rotor 52, the peripheral wall portion 52b enters the recess 80b. When the fastening member 80 is tightened, a fastening force acts on the peripheral wall portion 52b from the outside to the inside in the radial direction due to the action of the screw, and the peripheral wall portion 52b is elastically deformed in the diameter-reducing direction by this fastening force. At this time, since the fastened member 69 is inserted into the peripheral wall portion 52b of the rotor 53, the inner peripheral surface of the peripheral wall portion 52b strongly contacts the outer peripheral surface of the fastened member 69 by tightening the fastening member 80, and the frictional force acting between them becomes extremely large. As a result, the fastened member 69 is fastened to the rotor 52 in a non-rotatable state, and the chuck mechanism 6 is attached to the rotor 52. To remove the chuck mechanism 6, the fastening member 80 is rotated in the loosening direction, and the shape of the peripheral wall portion 52b is restored.

[0052] (Another form of chuck mechanism) The structure of the chuck mechanism can be changed according to the shape and size of the measurement target W. The chuck mechanism 700 shown in FIG. 7 has first and second chuck jaws 601 and 602. That is, the guide plate portion 65a of the holding member 65 has first and second groove portions 65f and 65g extending in the radial direction. The first and second groove portions 65f and 65g are formed so as to pass through the rotation axis B and to be positioned on the same straight line perpendicular to the rotation axis B. The first slider 606 of the first chuck jaw 601 is inserted into the first groove portion 65f, and the second slider 607 of the second chuck jaw 602 is inserted into the second groove portion 65g. The first and second sliders 606 and 607 have convex portions (not shown) that engage with the helical threads (not shown) of the adjustment member 64, and can be moved in the radial direction by rotating the adjustment member 64.

[0053] The box-shaped measurement object W can be gripped by moving the first and second chuck jaws 601, 602 away from each other. The measurement object W can also be gripped by moving the first and second chuck jaws 601, 602 of the chuck mechanism 700 closer to each other.

[0054] (Common parts of chuck mechanism) The chuck mechanism 6 shown in FIG. 5 is a chuck mechanism for an axial object that grips an axial object, and the chuck mechanism 700 shown in FIG. 7 is a chuck mechanism for a box object that grips a box object. The structure of the chuck mechanism is not limited to the structure shown in the figure, and may be a chuck mechanism of another structure. In this embodiment, an arbitrary chuck mechanism is configured to be detachable from among a plurality of chuck mechanisms including the chuck mechanism for an axial object 6 and the chuck mechanism for a box object 700. The plurality of chuck mechanisms 6, 700 have a common attachment / detachment part (the fastened member 69 and the fastening member 80) to the rotation unit 5, which improves the workability when replacing the chuck mechanisms 6, 700. In other words, the work of changing the measurement target W from an axial object to a box object becomes easier in terms of hardware.

[0055] As shown in Fig. 6, the rotating body 52 is a member on the housing 50 side, while the chuck mechanism 6 can be divided into a chuck common part and a chuck change part. The chuck common part is a part common to the chuck mechanism 6 shown in Fig. 5 and the chuck mechanism 700 shown in Fig. 7. The chuck common part includes a part fastened to the rotating body 52, and the fact that the part fastened to the rotating body 52 is common means that the chuck mechanisms 6, 700 can be easily attached and detached without making any changes to the rotating unit 5 side, improving convenience.

[0056] On the other hand, the chuck change portion is a portion that differs between the chuck mechanism 6 shown in Fig. 5 and the chuck mechanism 700 shown in Fig. 7. The chuck mechanism 6 and the chuck mechanism 700 have different numbers of chuck jaws and also have different numbers of grooves in the guide plate portion 65a.

[0057] (Structure of the object to be measured) Here, the structure of the measurement object W, which is an axial object, will be described with reference to Figures 8A and 8B, but this does not limit the structure of the measurement object W. Note that although the measurement object W shown in Figures 1 and 2 is different from the measurement object W shown in Figures 8A and 8B, both measurement objects W are axial objects. An axial object is a member having a cylindrical or columnar portion, and specifically includes a rotating shaft, a support shaft, a bar, a cylindrical part, a machining tool, etc., and may be solid or hollow.

[0058] The left side of the measurement object W is the part to be gripped by the chuck mechanism 6. In the state gripped by the chuck mechanism 6, the rotation axis B of the rotation unit 5 and the axis of the measurement object W are approximately aligned. The measurement object W has the thickest large diameter part W1, an intermediate part W2 which is thinner than the large diameter part W1, and a small diameter part W3 which is thinner than the intermediate part W2. A flat surface W4 is provided on a part of the outer circumferential surface of the large diameter part W1 as a characteristic shape. The flat surface W4 is also called a D-cut surface because the cross section of the flat surface W4 is D-shaped due to the formation of the flat surface W4. A groove W4a which is long in the axial direction of the measurement object W is formed in the center of the flat surface W4. The first to third pins W5 to W7 which are characteristic shapes are provided on a part of the outer circumferential surface of the intermediate part W2 at intervals from each other in the circumferential direction. The small diameter part W3 is provided on a part of the small diameter part W3 as a characteristic shape. The first hole W8 and the second hole W9 are through holes, but they do not have to be through holes. The groove W10 is formed in the end face of the object W to be measured.

[0059] The portions W4 to W10 that form the characteristic shape of the measurement object W are spaced apart from one another in the axial direction or in the circumferential direction, but the positions and number of the characteristic shapes are not particularly limited, and there may be only one characteristic shape. In addition, the characteristic shape may also be called a reference shape because it may serve as a reference during measurement.

[0060] 9A and 9B, the measurement object W20 may be a box-shaped object. The measurement object W20 has a box portion W21 that is approximately rectangular. As characteristic shapes, holes W22, grooves W23, pins W24, etc. are provided.

[0061] (Measurement setting mode) The image dimension measuring device 1 is capable of executing a measurement setting mode for performing various settings before operation. After the user starts up the image dimension measuring device 1, the measurement setting mode is started by operating the measurement setting mode execution button.

[0062] (Axial measurement settings) In the following description, the case of the measurement object W consisting of an axial object will be described. The procedure in the measurement setting mode will be described based on the flowchart shown in FIG. 10A. In step SA1 after starting, the characteristic shape is specified and the pattern image is set. Before performing step SA1, the measurement object W is gripped by the chuck mechanism 6. When executing the auto angle function described later, there are two ways, auto angle by characteristic shape and auto angle by pattern image. In step SA1, the characteristic shape to be used in the auto angle by characteristic shape and the pattern image to be used in the auto angle by pattern image are specified and the pattern image to be used in the auto angle by pattern image are set. Both the auto angle by characteristic shape and the auto angle by pattern image may be performed, or only one of them may be performed. When only the auto angle by characteristic shape is performed, only the characteristic shape needs to be specified, and when only the auto angle by pattern image is performed, only the pattern image needs to be set. When only the pattern image is set, the pattern image can be searched as the characteristic image, that is, the characteristic shape.

[0063] A specific process in step SA1 will be described. In the first stage, the UI generating section 32 of the control unit (control section) 3 generates a setting user interface screen 100 as shown in FIG. 11 and displays it on the display section 16. The setting user interface screen 100 is provided with an image display area 100a for displaying a measurement object image captured by the imaging section 15, a rotation unit selection area 100b, a shape selection section 100c for selecting a shape of the measurement object W, an angle setting section 100d for setting a rotation angle of the measurement object W, and an imaging button 100e. In the rotation unit selection area 100b, it is possible to select whether to use or not use the rotation unit 5, and the user can switch between using and not using the rotation unit 5 by operating the operation section 14. In this example, a case in which the rotation unit 5 is used will be described.

[0064] The shape selection unit 100c is a part where the user selects whether the measurement object W is a box or a shape other than a box. In this example, "box" and "shape" are prepared as options in the shape selection unit 100c, but this is not limited thereto, and other shapes may be prepared as options. Also, options such as "box" and "other than box" may be used. The user can operate the operation unit 14 to select one option, and the operation unit 14 can accept the user's selection operation as to whether the measurement object W is a box or a shape other than a box.

[0065] When the user selects a "box object", the UI generation unit 32 generates a user interface screen for a box object and displays it on the display unit 16. On the other hand, when the user selects an "axis object", the UI generation unit 32 generates a user interface screen for an axis object and displays it on the display unit 16. For example, when a box object is selected, a user interface screen can be created in which the selection branches for characteristic shapes are switched, or only specific characteristic shapes can be selected.

[0066] Moreover, the angle setting section 100d is a section where the user manually inputs and sets the rotation angle of the rotation unit 5. Moreover, the imaging button 100e is a button for causing the imaging section 15 to capture an image of the measurement target W within the field of view of the imaging section 15. When the user operates the imaging button 100e via the operation section 14, the imaging section 15 starts capturing an image of the field of view.

[0067] In step SA1, when an axis object is selected in the shape selection unit 100c shown in Fig. 11, the UI generation unit 32 generates a characteristic shape selection window 101 as shown in Fig. 12 and displays it superimposed on the setting user interface screen 100. In step SA1, the characteristic shape of the measurement object W is further selected in Fig. 12.

[0068] In this example, a case will be described in which a D-cut surface W4, which is a characteristic shape, is selected as a measurement element of the measurement target W, and the dimensions of the D-cut surface W4 are measured. In order to measure the dimensions of the D-cut surface W4, it is necessary to directly face the D-cut surface W4 to the imaging unit 16. Direct facing means that a line perpendicular to the D-cut surface W4 is parallel to the optical axis of the imaging unit 15. Furthermore, when the characteristic shapes are pins W5 to W7, the pins W5 to W7 need to be directly faced to the imaging unit 16, and direct facing in this case means that the axes of the pins W5 to W7 are parallel to the optical axis of the imaging unit 15. Furthermore, when the characteristic shapes are holes W8 and W9, the openings of the holes W8 and W9 need to be directly faced to the imaging unit 16, and direct facing in this case means that the center lines of the holes W8 and W9 are parallel to the optical axis of the imaging unit 15. Furthermore, when the characteristic shape is a groove W10, it is necessary to directly face the end or opening of the groove W10 to the imaging unit 16. In the case of a groove that extends in the axial direction of a shaft, such as a keyway, the opening of the keyway is made to face the imaging unit 16 directly.

[0069] However, when the measurement target W is gripped by the chuck mechanism 6, the D-cut surface W4 does not face the imaging unit 15 directly, and in most cases is shifted from the facing position, as shown in Fig. 11. The image dimension measuring device 1 according to this example is equipped with an auto-angle function (automatic facing function) that can automatically make the characteristic shape face the imaging unit 15 directly based on a predetermined search algorithm, even if the characteristic shape does not face the imaging unit 15 directly.

[0070] The step of setting the search algorithm is step SA2 shown in Fig. 10A. When the auto angle function is executed, a search algorithm corresponding to the characteristic shape is executed from among a plurality of search algorithms corresponding to the type of characteristic shape. The plurality of search algorithms corresponding to the type of characteristic shape can be stored in advance in the algorithm storage unit 41 of the storage unit 4.

[0071] First, the auto angle function will be described. The auto angle function is executed by the auto angle execution section 33 included in the control unit 3 shown in Fig. 3. The auto angle execution section 33 is a section that calculates a rotation angle at which the characteristic shape faces the imaging section 15 based on a plurality of measurement object images captured by the imaging section 15 and the rotation angle of the measurement object W when each measurement object image is captured, and controls the rotation unit 5 so that the rotation angle of the rotation unit 5 becomes the calculated rotation angle. In other words, the auto angle function is a function that searches for a rotation angle of the measurement object W that can face the characteristic shape to the imaging section 15.

[0072] That is, when the auto angle function is executed, the type of characteristic shape is selected first. A plurality of icons 101a showing the characteristic shapes in schematic form are provided in the characteristic shape selection window 101. Each icon 101a also expresses the characteristic shape in text.

[0073] The user operates the operation unit 14 to click on the icon 101a indicating the characteristic shape to be measured from among the multiple icons 101a in the characteristic shape selection window 101. This operation is a selection operation of the type of characteristic shape, and can be accepted by the operation unit 14. This makes it possible to accept input of information related to the measurement standard on the measurement object image (first measurement object image) shown in Fig. 12. Furthermore, the selection operation of the type of characteristic shape is also an internal setting operation of the search algorithm.

[0074] When the execute button 101b in the characteristic shape selection window 101 is operated, the auto-angle function is executed, and first, the imaging section 15 captures images of the measurement object W multiple times while rotating the measurement object W by the rotation unit 5. This allows the imaging section 15 to capture images of the measurement object W with different rotation angles to generate multiple measurement object images. After generation, each measurement object image is stored in the image storage section 40 of the storage section 4 shown in Fig. 3, and at this time, the rotation angle of the measurement object W when each measurement object image was captured is associated with and stored.

[0075] The algorithm when the D-cut surface W4 is directly opposed to the imaging unit 15 will be described with reference to Figs. 13A to 13C. Fig. 13A shows an image of the measurement object captured in a state where the measurement object W is illuminated by the transillumination unit 13b. In this image, the D-cut surface W4 is at the bottom of the figure, that is, the D-cut surface W4 is parallel to the optical axis of the imaging unit 15. The distance between the axis of the measurement object W and the D-cut surface W4 on the measurement object image at this time is C1. Fig. 13B shows an image of the measurement object captured in a state where the measurement object W is rotated so that the D-cut surface W4 is closer to the imaging unit 15 than in Fig. 13A, and the distance between the axis of the measurement object W and the D-cut surface W4 on the measurement object image at this time is C2. The distance C1 is shorter than the distance C2.

[0076] The relationship between the distance between the axis of the measurement object W and the D-cut surface W4 on the measurement object image and the rotation angle of the measurement object W is as shown in FIG. 13C. The point where the distance is shortest in the graph is the state of FIG. 13A, and the distance is longest when the D-cut surface D4 faces the imaging unit 15. The rotation angle where the distance is shortest is searched for and rotated 90 degrees, so that the D-cut surface D4 faces the imaging unit 15. The rotation direction at this time can be determined from the graph. The distances C1 and C2 are evaluation values ​​that indicate whether the characteristic shape faces the imaging unit 15 or not.

[0077] In addition, an algorithm for making the pin W5 face the imaging unit 15 will be described with reference to Figs. 14A and 14B. Fig. 14A shows the measurement object W from the axial direction, and for convenience, only the pin W5 is shown. The distance L is the distance from the axis of the measurement object W to the tip of the pin W5. Fig. 14B is a graph showing the relationship between the distance L and the rotation angle of the measurement object W. As shown in this graph, when the measurement object W is rotated, two peaks of the distance L are formed, and the position of the tip of the pin W5 is between these two peaks, so that the pin W5 can be made to face the imaging unit 15 based on this. The distance L is an evaluation value indicating whether the characteristic shape faces the imaging unit 15 or not.

[0078] 10A, a reference angle is determined in the process of making the characteristic shape face the imaging unit 15. Thereafter, in step SA4, the characteristic shape is made to face the imaging unit 15.

[0079] When the auto angle function is executed, it is also possible to set various parameters. Fig. 15 shows a parameter setting user interface screen 102 displayed on the display unit 16 before the auto angle function is executed. This parameter setting user interface screen 102 is generated by the UI generating unit 32. The parameter setting user interface screen 102 is provided with an image display area 102a for displaying a measurement object image captured by the imaging unit 15, an output pattern selecting unit 102b, a search range setting unit 102c, and a search pitch setting unit 102d.

[0080] In the image display area 102a, the area in which the search is to be performed can be specified. A frame line 201 can be drawn on the image display area 102a shown in Fig. 15, like the frame line 200 shown in Fig. 12. Furthermore, it is also possible to set what kind of measurement value is to be maximized or minimized within the specified area. For example, the type of measurement, such as line-line measurement or circle-circle measurement, can be set.

[0081] 16, this type can be stored in advance in the storage unit 4 as a combination of a preset shape, measurement content, and maximum / minimum. This can save the user the trouble of making settings.

[0082] In the output pattern selection section 102b shown in FIG. 15, a choice between maximum and minimum is provided, and one of them can be selected by the operation section 14. When maximum is selected, the maximum of the measured value is searched for, while when minimum is selected, the minimum of the measured value is searched for. In the search range setting section 102c, it is possible to set the angle range in which the search is performed. For example, an angle from a reference angle can be set, and the angle range can be set, for example, to ±90 degrees with this set angle as the center. In the search pitch setting section 102d, it is possible to set the search pitch within the angle range set as above, and when it is set to 5 degrees, for example, the search is performed at a 5-degree pitch.

[0083] The evaluation value may be the above-mentioned dimension measurement value, or may be, for example, the degree of match with a preregistered template image. The template image may be an image of the measurement object W at a rotation angle where the characteristic shape faces the imaging unit 15. After the template image is registered, the measurement object W is rotated and imaged by the imaging unit 15, so that a plurality of measurement object images with different rotation angles are generated continuously. For each of these measurement object images, the template image is searched by pattern search, and the rotation angle with the largest correlation value of the degree of match is identified. The identified rotation angle is the rotation angle where the characteristic shape faces the imaging unit 15.

[0084] When searching by the above pattern search, it is also possible to simultaneously execute a position search in the X and Y directions for each measurement object image and then obtain a correlation value. This makes it possible to simultaneously complete the position search and obtain the correlation value even when the position on the measurement object image is unknown, such as immediately after the measurement object W is attached to the chuck mechanism 6.

[0085] 17, a window 103 for executing the auto-angle function while editing the measurement contents can be displayed on the display unit 16. The window 103 can be displayed, for example, by operating the operation unit 14. When "Perform AA" in the window 103 is selected by operating the operation unit 14, a selection window 103a is displayed on the display unit 16. Types of characteristic shapes are displayed in the selection window 103a, from which the user can select a desired characteristic shape. The auto-angle execution unit 33 executes an algorithm corresponding to the selected characteristic shape, and calculates the rotation angle at which the characteristic shape faces the imaging unit 15.

[0086] In this example, even in the case of a box-shaped measurement object W20 as shown in FIG. 18, the configuration is such that an algorithm for orienting the characteristic shape directly in front of the imaging unit 15 can be executed. First, the imaging unit 15 images the measurement object W20 to generate a measurement object image (shown in FIG. 18), which is then displayed on the display unit 16. On the measurement object image, the user specifies an area to be opposed to the imaging unit 15, for example, by using a frame line 203. This can be specified using the operation unit 14. The area to be opposed to the imaging unit 15 is a flat portion.

[0087] The auto-angle execution unit 33 executes height measurement of any multiple points in the area surrounded by the frame line 203. In the height measurement, a conventional displacement measurement method can be used, and a contact type displacement sensor or an optical displacement sensor can be used, and an example of an optical displacement sensor is an autofocus type. Based on the measured height and XY coordinates, the inclination of the surface of the area surrounded by the frame line 203 is obtained, and the rotation angle at which the surface faces the imaging unit 15 is calculated. In addition, the height measurement within the field of view can be executed from optical focus information, and the inclination of the surface of the area surrounded by the frame line 203 can be obtained from an area map of the measured height.

[0088] The control unit 3 calculates the rotation angle at which the characteristic shape faces the imaging unit 15, and then controls the rotation unit 5 to achieve the calculated rotation angle. As a result, as shown in Fig. 19, the D-cut surface W4 faces the imaging unit 15, and the orientation of the measurement target W and the setting of the reference angle are completed.

[0089] When the operation to close the dialogue is performed by the operation unit 14, the control unit 3 creates an element used to detect the direction of the measurement object W, and automatically sets a reference angle by referring to the detection element of the shape so that the rotation angle of the measurement object W at the time when the dialogue is closed becomes the specified angle (0 degrees). FIG. 20A is a user interface image 104 that displays a measurement object image in a state where the angle when the dialogue is closed is 0 degrees, and the element used to detect the direction of the measurement object W is the D-cut surface W4. FIG. 20B is a user interface image 104 that displays a measurement object image in a state where the element (D-cut surface W4 in this example) used to detect the direction of the measurement object W is rotated 90 degrees. The angular relationship shown in FIG. 20A and FIG. 20B is stored in the storage unit 4 as relative rotation angle information.

[0090] In step SA5, the measurement element is set. When the measurement element is set, the rotation of the rotation unit 5 is stopped, and an incident image captured by illuminating the measurement object W with the incident illumination unit 13a and a transmitted image captured by illuminating the measurement object W with the transmitted illumination unit 13b are synthesized into one image, which is incorporated into the user interface image 104 shown in FIG. 22 and displayed as a background image. For example, the width of the groove W4a formed in the D-cut surface W4 can be set as the measurement element, and the diameter of the first hole W8 and the width of the groove W10 can also be set as the measurement element. The measurement element is set by the user operating the operation unit 14.

[0091] The user interface image 104 includes a numerical value display area 104a in which the rotation angle of the rotation unit 5 from the designated angle is displayed numerically, a rotation operation area 104b as a control unit for operating the rotation unit 5, and an angle display area 104c in which the rotation angle of the rotation unit 5 is displayed in the form of a bar. In FIG. 20A, the rotation angle of the measurement target W is the designated angle, so that the numerical value display area 104a and the angle display area 104c display that it is about 0 degrees. On the other hand, in FIG. 20B, since it has rotated 90 degrees from the state shown in FIG. 20A, the numerical value display area 104a and the angle display area 104c display that it is about 90 degrees. The angle display area 104c includes an angle indication line 104d indicating the current angle. In addition, the angle display area 104c includes a reference angle indication section 104e indicating the rotation angle stored in the storage unit 4 as setting information. The angle indication line 104d can also be moved by the operation unit 104. When the angle indication line 104d is moved, the position of the angle indication line 104d after the movement is detected by the control unit 3. The control unit 3 can control the rotation unit 5 to rotate the measurement target W to a rotation angle corresponding to the position of the angle indication line 104d.

[0092] The rotation operation area 104b is provided with an operation button. When the operation button is operated by the operation unit 14, the control unit 3 detects it. The control unit 3 can rotate the rotation unit 5 according to the operated button, and can also specify the direction when rotating the rotation unit 5. The operation buttons include a button for rotating the measurement object W in a predetermined angle unit. Here, the predetermined angle unit will be explained. The measurement object W can be a rectangular parallelepiped shape with different faces every 90 degrees, a hexagonal prism with different faces every 60 degrees, or the like. When measuring such a measurement object W, the measurement object W can be quickly measured by rotating it every 90 degrees or 60 degrees according to the orientation of the face and capturing an image.

[0093] In this embodiment, the rotation unit is specified so that it can be controlled in predetermined angle units such as 60 degrees or 90 degrees in accordance with the shape of the measurement target W. Although 60 degrees and 90 degrees are exemplified as the predetermined angle units, the predetermined angle units are not limited to these. The predetermined angle units may be any size as long as they are larger than the minimum angle by which the rotation unit 5 can rotate the measurement target W, that is, the minimum angle unit.

[0094] In this embodiment, the predetermined angle unit is 90 degrees, so that the measurement object W can be rotated 90 degrees by operating the operation button once, and 180 degrees by operating it twice. By operating the operation button on the operation unit 14, an instruction to rotate the measurement object W in 90 degree units can be given. The predetermined angle unit may be an angle obtained by dividing 90 degrees into multiple parts, for example, 30 degrees or 45 degrees. Whether the predetermined angle unit is 30 degrees or 45 degrees, an image of the measurement object W can be generated every 90 degrees.

[0095] The rotation unit 5 can be operated by the above-mentioned manual adjustment knob 55 in addition to the operation of the rotation operation area 104b, and can also be operated by specifying a position on the developed image. An example of the developed image is shown in Figs. 21A and 21B. The developed image is an image showing the shape of the measurement object W developed by cutting out the center part of the original image generated by taking an image of the measurement object W while rotating it multiple times and using it as a linked image, and then linking the multiple linked images. By displaying this developed image on the display unit 16, when the user clicks a desired position on the developed image with, for example, a mouse as the operation unit 14, the stage 12 is moved and the rotation unit 5 is controlled so that the clicked position is displayed in the center of the screen. As shown in Fig. 21B, the measured value can also be displayed on the developed image.

[0096] In addition, the measurement object image that accepts input of information regarding the measurement standard is the first measurement object image shown in Figure 12, while the image for setting the measurement elements is the image shown in Figure 22, i.e., the second measurement object image captured at a rotation angle different from that of the first measurement object image.

[0097] Fig. 23 is an image of the object to be measured when the rotation angle is 90 degrees, and is an image obtained by combining an incident-illumination image and a transmitted-illumination image, similar to the image of the object to be measured shown in Fig. 22. Fig. 23 shows an example in which the diameter of the second hole W9 is set as the measurement element.

[0098] The operation of rotating the measurement target W may be performed by operating the operation button in the rotation operation area 104b, or the auto-angle function may be used. When using the auto-angle function, a window 103 shown in Fig. 17 may be displayed on the display unit 16 to enable selection of the characteristic shape.

[0099] 24A and 24B are diagrams for explaining the case of measuring the dimension between two measurement elements. In this example, a third hole W11 is provided between the first hole W8 and the second hole W9 in the measurement object W, and the axes of the first hole W8 and the second hole W9 are perpendicular to the axis of the third hole W11.

[0100] FIG. 24A shows an example of the setting contents of the first measurement element (first hole W8) when the rotation angle is 0 degrees, and this first hole W8 is set on the first measurement object image. FIG. 24B shows an example of the setting contents of the second measurement element (third hole W11) when the rotation angle is 90 degrees, and this third hole W11 is set on the second measurement object image with a rotation angle different from that of the measurement object image in which the first measurement element is set. By setting the first hole W8 and the third hole W11 as measurement elements, the dimensions of the axis of the first hole W8 and the axis of the third hole W11 can be measured. Note that the difference in the rotation angles of the measurement object images used when setting the first measurement element and the second measurement element is not limited to 90 degrees, and it is sufficient that each measurement element is at a rotation angle that faces the imaging unit 15. In addition, when setting the measurement element, the measurement element may be set at an arbitrary rotation angle. Of the three settings described in step SA6 in FIG. 10A, the measurement element setting at an angle of 0 degrees and the measurement setting between measurement elements at different rotation angles are not essential.

[0101] When step SA5 in the flow chart shown in Fig. 10A is completed as described above, the process proceeds to step SA6, where a pattern image for position correction is registered. When registering the pattern image, a user interface screen 105 for registering the pattern image shown in Fig. 25 is displayed on the display unit 16. The user interface screen 105 is provided with an image display area 105a for displaying a transmitted image captured by illuminating the measurement target W with the transmitted illumination unit 13b.

[0102] In the image display area 105a, a search range frame 206 indicating the range in which a pattern search is to be performed and a registration range frame 207 indicating the range to be registered as a pattern image are displayed superimposed on the transparent image. The position and size of the search range frame 206 and the registration range frame 207 can be set arbitrarily by the user operating the operation unit 104. By operating the operation unit 104, an arbitrary part of the measurement target W can be surrounded by the registration range frame 207, and thus an arbitrary part of the measurement target W can be registered as a pattern image, and position information of the pattern image can also be registered.

[0103] A selection section 105b for selecting an imaging angle is provided on the user interface screen 105. In the selection section 105b, it is possible to select whether to perform a pattern search using an image captured at a starting angle, to perform a pattern search using an image captured while rotating the measurement target W once, or to perform a pattern search using an image captured while rotating within a specified range.

[0104] When step SA6 in the flow chart shown in Fig. 10A is completed as described above, the process proceeds to step SA7, where the measurement settings are stored in the memory unit 4. In this step SA7, the measurement elements and the relative rotation angle are stored. That is, the number of degrees by which the set rotation angle of the measurement elements is rotated relative to the reference angle is stored. Furthermore, in step SA7, the position correction pattern image set in step SA6 is also stored.

[0105] (Detailed flow of justification) The process at the time of setting is not limited to the procedure shown in Fig. 10A, and may be, for example, the procedure shown in the flowchart in Fig. 10B. In step SA11 of the flowchart shown in Fig. 10B, a characteristic shape is specified. This characteristic shape specification can be performed in the same manner as the characteristic shape specification in step SA1 in Fig. 10A. Instead of the characteristic shape, only the pattern image of the measurement target W may be set. In this case, in the next step SA12, only the angle range to be searched is searched. Either the characteristic shape is specified or a pattern image is set.

[0106] In step SA12, evaluation items, i.e., search algorithms, are set. The evaluation items may be set automatically when the type of characteristic shape is selected as described in step SA2 of Fig. 10A, or may be set independently of the selection operation of the type of characteristic shape.

[0107] In step SA12, an area where a characteristic shape, for example, a D-cut surface W4, exists can be set. For example, the user specifies an area where the D-cut surface W4 exists on the measurement object image displayed on the display unit 16. A characteristic shape other than the D-cut surface W4 may be used, and the area where the characteristic shape exists may be specified. Specifically, as shown in FIG. 12, a frame line 200 is drawn so as to surround an area where a characteristic shape, for example, a D-cut surface W4, exists. An operation for drawing the frame line 200 may be, for example, a method of dragging obliquely using a mouse or the like, but is not limited to this. The specification of the area where the characteristic shape exists is accepted by the operation unit 14. When the specification of the area where the characteristic shape exists is accepted, the position and size of the area are acquired. For example, a single measurement object W may include multiple characteristic shapes, and there may be a case where the dimensions of only the D-cut surface W4 are to be measured. In this case, since it is only necessary to face the D-cut surface W4 directly to the imaging unit 15, when the user specifies the area in which the characteristic shape exists as described above, the facing of other characteristic shapes is not taken into consideration, and only the D-cut surface W4 can be faced directly to the imaging unit 15. The area in which the characteristic shape exists may be specified multiple times.

[0108] In step SA12, the angle range in which the characteristic shape is searched can also be specified. For example, the rotation angle range is specified based on the rotation angle of the currently displayed measurement target W. This specification operation is accepted by the operation unit 14. For example, there may be cases where characteristic shapes such as pins W5 to W7 exist at intervals in the circumferential direction on one measurement target W, and among them, there is a case where the dimension of only the pin W5 is to be measured. In this case, since only the pin W5 needs to be opposed to the imaging unit 15, when the user specifies the angle range in which the pin W5 exists, only the pin W5 can be opposed to the imaging unit 15 without considering the opposition with other characteristic shapes.

[0109] When the search setting is completed, the process proceeds to step SA13, where the search setting is stored in the storage unit 4. Then, the process proceeds to steps SA14 and SA15. That is, in this example, a search method that focuses on the rotation of the measurement object W by the rotation unit 5 can also be applied. For example, in the case of a rolling shutter in which the imaging unit 15 sequentially scans an image line by line from one side of the sensor to the other side, a phenomenon occurs in which the measurement object image is distorted when the measurement object W is imaged while being rotated. If the rotation angle at which the characteristic shape faces the imaging unit 15 is searched based on such a distorted measurement object image, there is a risk of a decrease in accuracy. On the other hand, there is also an advantage that the search time for the rotation angle at which the characteristic shape faces the imaging unit 15 can be shortened by using the measurement object image captured while rotating the measurement object W.

[0110] In this image dimension measuring device 1, a search process capable of improving search accuracy while shortening search time is configured to be executable. That is, the imaging unit 15 generates, as the measurement object image, a plurality of images during rotation obtained by imaging the rotating measurement object W a plurality of times, and a plurality of images during stop obtained by imaging the measurement object W whose rotation has been stopped a plurality of times. In step SA14, the auto-angle execution unit 33 first executes a rough search for a rotation angle at which the characteristic shape faces the imaging unit 15 based on the plurality of images during rotation. This rough search can specify a rotation angle range in which there is a relatively high possibility that a rotation angle at which the characteristic shape faces the imaging unit 15 exists. Thereafter, in step SA15, a precise search is executed based on the plurality of images during stop in the rotation angle range specified in the rough search in step SA14, and the rotation angle at which the characteristic shape faces the imaging unit 15 is calculated. The rotation angle range and pitch at which the rough search is executed can be made changeable. In addition, since there is a shake when the measurement object W is in a rotated state, an algorithm for detecting and removing the amount of the shake can be applied. The rough search in step SA14 may be omitted.

[0111] Thereafter, in step SA16, a reference angle is determined in the process of facing the characteristic shape to the imaging unit 15 in the same manner as in step SA3 shown in Fig. 10A. The reference angle may be an angle when the characteristic shape faces the imaging unit 15 directly, or an angle at which a feature appears in the evaluation value of the evaluation item set in step SA12.

[0112] In step SA17, the angle at which the characteristic shape faces the imaging unit 15 is calculated. Next, in step SA18, the characteristic shape is brought into a facing position similarly to step SA4 shown in Fig. 10A. After step SA18, the processes of steps SA5 to SA7 in Fig. 10A can be executed.

[0113] (Box measurement settings) When setting up the measurement of a box object, in step SA1 of the flowchart shown in Fig. 10A, select "Box object" on the setting user interface screen 100 shown in Fig. 11. Then, select "Minimum width" in the characteristic shape selection window 101 shown in Fig. 12. Also, as in the case of an axial object, specify the area to be searched. The auto-angle execution unit 33 searches for the rotation angle at which the width as an evaluation value is minimum, and calculates the rotation angle at which the characteristic shape faces the imaging unit 15.

[0114] When a box is selected by the operation unit 14, the control unit 3 controls the rotation unit 5 to rotate the measurement object W20 in 90-degree increments. In the case of a box, for example, it often has a rectangular parallelepiped shape, and by rotating the measurement object W20 in 90-degree increments, it becomes possible to image each of the four side faces of the rectangular parallelepiped by the imaging unit 15. When the rotation angle when a certain measurement object image is captured is set to 0 degrees, the rotation angle when the next measurement object image is captured may be 90 degrees, 180 degrees, or 270 degrees. In addition, rotating only 90 degrees and stopping, rotating 180 degrees continuously and stopping, and rotating 270 degrees continuously and stopping are also included in rotating in 90-degree increments.

[0115] Fig. 26A is a user interface image 104 displaying an image of the measurement object when the angle is 0 degrees after the dialog is closed. Fig. 26B is a user interface image 104 displaying an image of the measurement object when the element used to detect the direction of the measurement object W is rotated 180 degrees. In this manner, step SA1 of the flowchart shown in Fig. 10A can be executed.

[0116] In step SA2, basically the same as in the case of an axial object, with the background image, which is the image of the object to be measured, displayed, the measurement element when the rotation angle is 0 degrees (measurement element on the front surface) and the measurement element when the rotation angle is 180 degrees (measurement element on the back surface) can be set individually. By setting the measurement element when the rotation angle is 0 degrees as the first measurement element and the measurement element when the rotation angle is 180 degrees as the second measurement element, it is possible to measure the dimension between the first measurement element and the second measurement element.

[0117] When the background image shown in FIG. 26A is the first measurement object image (front side image), the background image shown in FIG. 26B is the second measurement object image (rear side image) obtained by capturing an image of a measurement object rotated 180 degrees from the rotation angle at which the first measurement object image was acquired. A first XY coordinate system (front side coordinate system) and a second XY coordinate system (rear side coordinate system) can be set for each of the background image shown in FIG. 26A and the background image shown in FIG. 26B. The first XY coordinate system and the second XY coordinate system can be converted mutually to measure the dimension between the first measurement element and the second measurement element. Specifically, a matrix for converting the first XY coordinate system and the second XY coordinate system mutually can be obtained. For example, while the rear side image is being displayed, the measurement elements on the front side can be converted by the above matrix, so that the measurement elements on the front side can also be displayed on the rear side image without deviation, and can also be specified. While the front side image is being displayed, the measurement elements on the rear side can be converted in the same way. This allows the measurement of dimensions between measurement elements with a rotation angle of 180 degrees to be performed without deviation.

[0118] In addition, based on the contour of the measurement object W in the first measurement object image and the contour of the measurement object W in the second measurement object image, the first measurement object image and the second measurement object image can be converted into each other to measure the dimension between the measurement element on the front side and the measurement element on the back side.

[0119] The shapes of the measurement elements on the front side and the back side can be simultaneously displayed on the display unit 16. In this case, the measurement elements on the front side and the measurement elements on the back side can be displayed in different display forms. Examples of different display forms include using different colors or different line types for the measurement elements on the front side and the measurement elements on the back side.

[0120] (Continuous measurement mode) After the measurement setting mode, the image dimension measuring device 1 can execute the continuous measurement mode. The continuous measurement mode is started when the user operates the continuous measurement mode execution button. The continuous measurement mode is a mode in which multiple measurement objects W are measured sequentially, and can also be called the operation mode of the image dimension measuring device 1.

[0121] (Continuous measurement of axial objects) In the following explanation, the case where the measurement target object W is an axial object will be described. The procedure in the continuous measurement mode will be explained based on the flowchart shown in Fig. 27. After starting, in step SB1, the measurement settings are made. Specifically, when multiple settings are made in the measurement setting mode and multiple setting contents are stored in the memory unit 4, a setting file for performing continuous measurement is selected from them and executed.

[0122] Further, the measurement object W is attached to the chuck mechanism 6. At the stage where the measurement object W is attached to the chuck mechanism 6, the relationship between the machine angle (the rotation angle defined in the image dimension measuring device 1) and the rotation angle of the measurement object W is indefinite. Furthermore, there may be an error in attaching the measurement object W to the chuck mechanism 6 between the time of measurement setup and the time of continuous measurement.

[0123] After step SB1, the process proceeds to step SB2. In step SB2, the position and orientation of the measurement target W are confirmed. At this time, as shown by the dashed line in FIG. 28A, a positioning guide 208 may be displayed superimposed on the measurement target image. For example, a semi-transparent image of a pattern image or the contour line of the image may be used as the positioning guide 208. If there is an incident-illumination image captured at the same angle as the pattern image during measurement setting, a composite image of the pattern image and the incident-illumination image may be displayed superimposed semi-transparently. The frame indicated by the reference numeral 209 in the figure indicates the area of ​​the pattern image.

[0124] The user can adjust the rotation angle of the measurement object W so that the positioning guide 208 and the measurement object W are aligned. The adjustment of the rotation angle of the measurement object W can be performed by rotating the manual adjustment knob 55. FIG. 28B shows a state in which the adjustment of the rotation angle of the measurement object W has been completed. Note that, if a setting for rotating the measurement object W one revolution is selected when registering the pattern image, there is no need to adjust the direction of the measurement object W.

[0125] After step SB2, the process proceeds to step SB3, where the measurement setting is automatically performed on the current measurement target W based on the conditions set in the continuous measurement and each piece of information held in the measurement setting. First, a pattern search is performed in step SB4. Specifically, the pattern search execution unit 34 shown in FIG. 3 executes a pattern search to search for a pre-registered pattern image using a measurement target image captured by the imaging unit 15. For example, the pattern search execution unit 34 executes a pattern search using a plurality of measurement target images captured by the imaging unit 15 at different rotation angles of the measurement target, and identifies the rotation angle at which the degree of match with the registered pattern image is highest. At this time, the rotation angle at which the degree of match with the pattern image is highest within the set angle range can be detected. Since the measurement target W is rotated, this can be called a rotation pattern search.

[0126] When the rotation pattern search is completed, the process proceeds to step SB5. In step SB5, the amount of deviation between the pattern image and the measurement object image at the rotation angle specified in step SB4 is detected. After that, based on the detected amount of deviation and position information, the position of the measurement element is corrected by the same amount as the detected amount of deviation. This is the position correction process.

[0127] Once the position correction process is complete, proceed to step SB6. In step SB6, the auto angle function is executed. For example, the auto angle function uses the characteristic shape specified in the reference angle setting of the measurement settings to detect the direction of the measurement target W. Measurements can be performed within the mechanical angle range centered on the angle obtained by the following formula.

[0128] Pattern search detection angle during continuous measurement + Auto angle angle during measurement setting - Pattern image capture angle during measurement setting When the detection of the direction of the measurement target W using the auto-angle function is completed in step SB6, the process proceeds to step SB7, where the reference angle and measurement angle are calculated. For example, the reference angle during continuous measurement is calculated in mechanical degrees based on the characteristic shape and the offset amount of the reference angle when the measurement was set up. In other words, the reference rotation angle is specified, and the measurement angle for measuring the measurement element is calculated based on the relative rotation angle (offset amount) with respect to the reference rotation angle stored in memory unit 4.

[0129] After calculating the measurement angle, the process proceeds to step SB8. In step SB8, the control unit 3 controls the rotation unit 5 so that the measurement angle becomes the angle calculated in step SB7. As a result, the rotation angle of the measurement object W becomes the measurement angle.

[0130] When the rotation unit control is finished, the process proceeds to step SB9, where the measurement element is measured. In step SB9, first, when the rotation unit 5 reaches the measurement angle, the image capturing unit 15 captures an image of the measurement object W to generate a measurement object image. This allows the measurement element to be measured.

[0131] After the measurement object image is generated, an edge extraction unit 30 shown in Fig. 3 executes image processing on the measurement object image to extract edges of the characteristic shape of the measurement object W. The edge information output from the edge extraction unit 30 is input to a measurement unit 31, which executes a measurement process for measuring dimensions of a measurement element based on the measurement object image.

[0132] When the measurement process is completed, the process proceeds to step SB10 to execute the display process. In the display process, the UI generating unit 32 generates a user interface image 110 for displaying the measurement result as shown in FIG. 29, and the control unit 3 causes the display unit 16 to display the user interface image 110. The user interface image 110 is provided with a first image display area 110a, a second image display area 110b, a third image display area 110c, and a result display area 110d. The first image display area 110a can display a measurement object image when the rotation angle is 0 degrees, and the second image display area 110b can display a measurement object image when the rotation angle is 90 degrees. That is, the first image display area 110a and the second image display area 110b can display measurement object images with different rotation angles.

[0133] In the third image display area 110c, one or more measurement elements and the dimension lines, measurements, etc. of each measurement element are superimposed on the measurement object image. The third image display area 110c is set larger than the first image display area 110a and the second image display area 110b.

[0134] The result display area 110d displays the name, measurement value, and judgment of each measurement element. The judgment indicates whether the measurement value is outside a preset value range, and can be displayed as, for example, OK, NG, etc. The displayed judgment can include the judgment result for each measurement element and an overall judgment result that combines these.

[0135] (Measured in mechanical degrees) The relative rotation angle between the measurement object W and the chuck mechanism 6 varies each time the measurement object W is attached to or detached from the chuck mechanism 6. In response to this, the measurement error can be eliminated by going through the following steps.

[0136] That is, the process in this step is effective when it is desired to measure a portion that can only be measured when the chuck mechanism 6 is at a specific angle. For example, when it is desired to measure the entire length of the measurement object W, it is necessary to image the end face of the measurement object W on the side of the chuck mechanism 6, but the end face of the measurement object W on the side of the chuck mechanism 6 cannot be imaged because it is gripped by the chuck mechanism 6. However, since the chuck mechanism 6 has three chuck jaws 61 to 63 spaced apart as shown in FIG. 5, the end face of the measurement object W on the side of the chuck mechanism 6 may be visible between the chuck jaws 61 to 63 depending on the rotation angle, and by having the imaging unit 15 perform imaging at this rotation angle, the end face of the measurement object W on the side of the chuck mechanism 6 can be imaged and acquired as an image.

[0137] To achieve this, a means is provided for specifying the angle to be measured by specifying a mechanical angle when measuring the measurement target W in the measurement settings. This makes it possible to perform measurement at the same mechanical angle regardless of the relative rotation angle between the measurement target W and the chuck mechanism 6. Specifically, when specifying the rotation angle during measurement settings, a mechanical angle can be selected as a reference, and this mechanical angle can be specified. This operation can be achieved by the user operating the operation unit 14.

[0138] Fig. 30 is an explanatory diagram of the measurement angle in a setting that does not include a mechanical reference element. Even if the relative rotation angle between the measurement target W and the chuck mechanism 6 differs between the measurement setting and the continuous measurement, only the difference between the reference angle and the mechanical angle changes, and the relative angle between each element does not change.

[0139] On the other hand, Fig. 31 is an explanatory diagram of the measurement angle in a setting including a mechanical reference element. It shows the case where element 4 is specified with a mechanical angle of 0 degrees. As in the case shown in Fig. 30, even if the relative rotation angle between the measurement target W and the chuck mechanism 6 differs between the measurement setting and the continuous measurement, only the difference between the reference angle and the mechanical angle changes and the relative angle between each element does not change, but the element specified by the mechanical angle can be measured at the same mechanical angle regardless of the reference angle.

[0140] (Continuous measurement of boxes) The process flow for the continuous measurement mode for box objects is basically the same as that for the continuous measurement mode for axial objects. Below, the differences from the continuous measurement mode for axial objects will be explained in detail.

[0141] In the continuous measurement mode for a box object, the measurement setting is also performed in step SB1 of the flowchart shown in Fig. 27, and a setting file for continuous measurement is selected at this time. At the stage when the box object W20 to be measured is attached to the box chuck mechanism 700, the machine angle and the angle of the object W20 to be measured are indefinite, but at this time, since the box chuck mechanism 700 has two chuck jaws, the first and second chuck jaws 601 and 602, the attachment angle often varies in 90 degree increments. In addition, the attachment position and inclination of the object W20 to be measured may differ between the time of measurement setting and the time of continuous measurement.

[0142] After that, in step SB2, the user rotates the manual adjustment knob 55 to check whether the measurement object W20 is attached at the same position and angle in two or more directions, and adjusts the orientation of the measurement object W20 and the attachment position of the measurement object W20. At this time, a positioning guide as shown in FIG. 28A can be superimposed on the measurement object image.

[0143] Next, proceed to step SB5 via steps SB3 and SB4. In step SB5, alignment is performed by reflecting the results of the pattern search. At this time, the measurement element positioned at a rotation angle different from the rotation angle (θ) when the pattern image was captured is corrected for a deviation amount according to Δθ. The correction amount is ΔX in the X direction, Δy*cos(Δθ) in the Y direction, and Δy*sin(Δθ) in the Z direction. Steps SB6 to SB10 are the same as in the case of an axial object.

[0144] During continuous measurement, it is possible to measure not only the dimension between two measurement elements whose rotation angles differ by 180 degrees, but also the dimension between two measurement elements whose rotation angles differ by 90 degrees.

[0145] (Display format) 29, the measurement object image displayed in the first image display area 110a and the measurement object image displayed in the second image display area 110b are aligned in the left-right direction and displayed side-by-side. When aligning the left-right positions, for example, a horizontal virtual line extending vertically on the screen is assumed, and the left end of the measurement object image displayed in the first image display area 110a and the left end of the measurement object image displayed in the second image display area 110b are positioned on the horizontal virtual line.

[0146] Although not shown, the measurement object image displayed in the first image display area 110a and the measurement object image displayed in the second image display area 110b may be displayed side by side with their vertical positions aligned. When aligning the vertical positions, for example, a vertical imaginary line extending horizontally across the screen may be assumed, and the top end of the measurement object image displayed in the first image display area 110a and the top end of the measurement object image displayed in the second image display area 110b may be positioned on the vertical imaginary line.

[0147] As described above, in the case of a box, it is rotated in 90-degree increments, but the design drawings on which the processing is based also have dimensional instructions and tolerances for drawings viewed from multiple directions in 90-degree increments, so by displaying the image in the first image display area 110a and the image in the second image display area 110b with the vertical and horizontal positions aligned, both images can be displayed like design drawings. This makes it easier to grasp the three-dimensional shape, easily recognize the correspondence between each drawing, and also makes it easier to compare with the dimensional instructions and tolerances indicated in the drawings.

[0148] The user can select one of the measurement object images displayed in the first image display area 110a and the measurement object images displayed in the second image display area 110b. The image selection by the user is accepted by the operation unit 14. The control unit 3 controls the rotation unit 5 so that the rotation angle is the same as the rotation angle of the measurement object W20 when the accepted measurement object image was captured. In other words, when one of the multiple measurement object images is selected, the rotation angle of the measurement object W20 can be automatically set to the rotation angle at the time of capturing the image, and this function can be called a navigation function.

[0149] The imaging unit 15 captures an image of the measurement object W20 in a state where the rotation angle of the measurement object W20 is the same as the rotation angle of the measurement object W20 when the selected measurement object image was captured, and generates a preview image.

[0150] The preview image generated by the imaging unit 15 is displayed in the third image display area 110c of the user interface image 110. The first image display area 110a, the second image display area 110b, and the third image display area 110c simultaneously display the respective images. Since the third image display area 110c is the largest, the preview image is displayed in a larger size than the other images. This makes it easier to read the dimension lines and measurements on the preview image.

[0151] Three or more measurement object images with different rotation angles may be displayed in the user interface image 110. For example, three measurement object images with rotation angles of 90 degrees, 180 degrees, and 270 degrees may be displayed. In this case, too, the measurement object image selected by the user can be enlarged and displayed as a preview image.

[0152] 32 is a diagram showing an example of a user interface image 104 displayed on the display unit 16 in the case of a box-shaped measurement target W20. In this example, multiple images are displayed on the right side of the user interface image 104, and specifically, two or more measurement target images with different rotation angles can be displayed, for example, two or three images rotated in 90 degree increments. The user can select which image to display. This results in a display form that corresponds to the design drawing that is the basis for processing.

[0153] On the other hand, a preview image is displayed on the left side of the user interface image 104 in Fig. 32. The preview image is an enlarged image of an image selected by the user from the measurement object images on the right side. In this example, the measurement object image captured at 90 degrees is enlarged and displayed as the preview image. The measurement result can be displayed on the preview image.

[0154] (Effects of the embodiment) As described above, according to this embodiment, when setting up a measurement, the user can input a characteristic shape on the measurement object image as information related to the measurement standard, and can set measurement elements such as lines, circles, arcs, etc. on the measurement object image generated at a different rotation angle. The relative rotation angle when the measurement object image with the measurement elements set is captured with respect to the reference rotation angle when the measurement object image with the characteristic shape input is captured can be stored in the storage unit 4.

[0155] During continuous measurement, the imaging unit 15 generates a plurality of measurement object images in which the measurement object W is imaged at different rotation angles. The control unit 3 can specify a reference rotation angle based on the characteristic shape accepted by the operation unit 14 from among the plurality of measurement object images. The relative rotation angle with respect to the reference rotation angle can be read from the storage unit 4. When the control unit 3 calculates a measurement angle for measuring the measurement element based on the relative rotation angle, it controls the rotation unit 5 so that the calculated measurement angle is reached. As a result, the rotation angle of the rotation unit 5 automatically becomes the measurement angle, so that the measurement element is positioned at a position where it can be imaged by the imaging unit 15. Therefore, the user does not need to adjust the rotation angle of the measurement object W relative to the imaging unit 15.

[0156] In addition, since the box-shaped measurement object W20 can be rotated in 90-degree increments, each of the four side surfaces of the rectangular parallelepiped can be imaged by the imaging unit 15. When one side surface of the measurement object W20 is imaged in a measurement object image with a rotation angle of 0 degrees, a first measurement element can be set on the measurement object image. When the other side surface of the measurement object W20 is imaged in a measurement object image with a rotation angle of 90 degrees or 180 degrees, a second measurement element can be set on the measurement object image. The control unit 3 can measure the dimension between the first measurement element and the second measurement element that exist on two different surfaces.

[0157] Furthermore, by specifying the characteristic shape of the measurement object W, it is possible to calculate the rotation angle at which the characteristic shape faces the imaging unit 15 based on the characteristic shape and the change in shape on the measurement object image. This makes it possible to face the characteristic shape of the measurement object W directly to the imaging unit 15, eliminating personal dependency and eliminating variations in adjustment, and enabling adjustment to be completed in a short time.

[0158] The above-described embodiment is merely illustrative in all respects and should not be construed as limiting. Furthermore, all modifications and variations within the scope of the claims are within the scope of the present invention. [Industrial Applicability]

[0159] As described above, the image dimension measuring device according to the present invention can be applied to devices equipped with a rotation mechanism for rotating an object to be measured. [Explanation of symbols]

[0160] 1 Image dimension measuring device 3 Control unit (control section) 4 Storage section 5 Rotation unit (rotation mechanism) 6 Chuck mechanism (for axial objects) 14 Control section 15 Imaging unit 16 Display 33 Auto angle execution unit 34 Pattern search execution unit 69 Fastened parts (detachable parts) 80 Fastening member (detachable part) 700 Chuck mechanism (for boxes) W Measurement object (shaft) W20 Measurement object (box)

Claims

1. 1. An image dimension measuring apparatus for measuring dimensions of a measuring object which is an axial object having a characteristic shape in part, A transmitted illumination unit; a stage having a transmission section that transmits light from the transmission illumination section and extending horizontally on which a measurement object is placed; an imaging section that is provided so that light from the transmission illumination section is incident upon the transmission section of the stage and generates an image of the measurement object; a rotation mechanism that is attached to the stage, holds a measurement object between the transmission section and the imaging section of the stage, and rotates the measurement object around a predetermined axis that extends horizontally; An image dimension measuring device comprising: a control unit that calculates a rotation angle at which the characteristic shape faces the imaging unit based on a plurality of measurement object images captured by the imaging unit and the rotation angle of the measurement object when each measurement object image is captured, and controls the rotation mechanism so that the rotation angle of the rotation mechanism becomes the calculated rotation angle.

2. 2. The image dimension measuring apparatus according to claim 1, an operation unit that accepts a selection of a type of characteristic shape; a storage unit that stores a plurality of search algorithms according to types of characteristic shapes; The control unit executes a search algorithm according to the type of characteristic shape received by the operation unit to calculate the facing rotation angle.

3. 3. The image dimension measuring apparatus according to claim 1, A display unit that displays an image of the object to be measured; an operation unit that accepts designation of an area in which a characteristic shape exists on the measurement object image displayed on the display unit, The control unit is an image dimension measuring device that sets the area received by the operation unit as a calculation target area for the facing rotation angle.

4. 4. The image dimension measuring apparatus according to claim 1, an operation unit for receiving a designation of an angle range for searching for a characteristic shape; The control unit sets the angle range received by the operation unit as a calculation target angle range for the facing rotation angle of the image dimension measuring device.

5. 5. The image dimension measuring apparatus according to claim 1, The control unit extracts an evaluation value that is maximum, minimum or extreme when the characteristic shape is directly facing the imaging unit, and calculates the rotation angle at which the characteristic shape is directly facing the imaging unit based on the evaluation value.

6. 6. The image dimension measuring apparatus according to claim 1, an operation unit that accepts designation of a measurement position at which dimension measurement is performed when the characteristic shape is directly opposed to the imaging unit; a storage unit that stores the measurement position received by the operation unit, an area including the measurement position, and a type of a characteristic shape in association with each other, The control unit of the image dimension measuring device executes a measurement process to measure the dimensions of a measurement element of a measurement object based on the measurement position read from the memory unit, the area including the measurement position, and the type of characteristic shape during measurement.

7. 6. The image dimension measuring apparatus according to claim 1, The imaging unit generates, as the measurement object image, a plurality of images during rotation obtained by imaging a rotating measurement object a plurality of times, and a plurality of images during stoppage obtained by imaging a measurement object whose rotation has been stopped a plurality of times, The control unit performs a rough search of the facing rotation angle based on a plurality of the rotated images to identify a rotation angle range in which the facing rotation angle is relatively likely to exist, and then performs a precise search within the rotation angle range based on a plurality of the stationary images to calculate the facing rotation angle.

Images