Light receiving element, distance measuring module, and electronic device

Abstract

To make it possible to improve characteristics.SOLUTION: A light receiving element includes an on-chip lens, a wiring layer, and a semiconductor layer disposed between the on-chip lens and the wiring layer. The semiconductor layer includes a photodiode, a first transfer transistor that transfers electric charge generated in the photodiode to a first charge storage portion, a second transfer transistor that transfers electric charge generated in the photodiode to a second charge storage portion, and an inter-pixel separation portion that separates the semiconductor layers of adjacent pixels from each other, for at least part of the semiconductor layer in the depth direction. The wiring layer has at least one layer including a light blocking member. A region above the photodiode of the semiconductor layer is configured with a moth-eye structure in which minute concavities and convexities are formed. The light blocking member is disposed to overlap with the photodiode in a plan view. The present technique can be applied to, for example, a light receiving element etc. which output ranging information using an indirect ToF method.SELECTED DRAWING: Figure 13

Description

[Technical field]

[0001] The present technology relates to a light receiving element, a distance measuring module, and an electronic device, and more particularly to a light receiving element, a distance measuring module, and an electronic device that are capable of improving characteristics. [Background technology]

[0002] Conventionally, distance measurement systems using the indirect ToF (Time of Flight) method are known. In such distance measurement systems, a sensor is essential that can quickly distribute the signal charge obtained by receiving the light reflected from the target object when active light is irradiated using an LED (Light Emitting Diode) or laser at a certain phase to different regions.

[0003] In response to this, a technology has been proposed that enables high-speed modulation of a wide range of areas in the substrate by, for example, applying a voltage directly to the substrate of the sensor to generate a current in the substrate (see, for example, Patent Document 1). Such sensors are also called CAPD (Current Assisted Photonic Demodulator) sensors. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2011-86904 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, it is difficult to obtain a CAPD sensor with sufficient characteristics using the above techniques.

[0006] For example, the above-mentioned CAPD sensor is a front-illuminated sensor in which wiring and the like are arranged on the surface of the substrate that receives light from the outside.

[0007] In order to secure the photoelectric conversion area, it is desirable that there is no wiring or other obstruction of the optical path of the incident light on the light receiving surface side of the PD (Photodiode), i.e., the photoelectric conversion unit. However, in some front-illuminated CAPD sensors, depending on the structure, it is necessary to place wiring for extracting electric charge, various control lines, and signal lines on the light receiving surface side of the PD, which limits the photoelectric conversion area. In other words, it is not possible to secure a sufficient photoelectric conversion area, and characteristics such as pixel sensitivity may deteriorate.

[0008] Furthermore, when considering using a CAPD sensor in a location with external light, the external light component becomes a noise component for the indirect ToF method, which uses active light to measure distance, so in order to obtain distance information with a sufficient signal-to-noise ratio (SNR), it is necessary to ensure a sufficient saturation signal amount (Qs). However, since there are limitations on the wiring layout for front-illuminated CAPD sensors, it was necessary to devise a method other than wiring capacitance, such as providing an additional transistor to ensure capacitance.

[0009] In many cases, near-infrared light with a wavelength of around 940 nm, which corresponds to the sunlight window, is used as the light source. Near-infrared light has a low quantum efficiency due to the low absorption coefficient of silicon, which is the semiconductor layer, so the thickness of the silicon film that forms the photoelectric conversion region must be made thick. If the silicon is thick, it takes time for the photoelectrically converted charge to reach the electrode that absorbs the charge, and the charge may reach the electrode after the distribution has been switched, resulting in an erroneous signal. This can result in a deterioration in distance measurement accuracy. In other words, the sensor characteristics can be degraded.

[0010] The present technology has been made in consideration of such circumstances, and makes it possible to improve the characteristics of a ToF sensor. [Means for solving the problem]

[0011] The light receiving element according to the first aspect of the present technology includes: An on-chip lens; A wiring layer; a semiconductor layer disposed between the on-chip lens and the wiring layer; The semiconductor layer is A photodiode; a first transfer transistor that transfers charges generated by the photodiode from the photodiode to a first charge accumulation unit; a second transfer transistor that transfers the charge generated by the photodiode from the photodiode to a second charge accumulation unit; an inter-pixel isolation portion that isolates the semiconductor layer between adjacent pixels in at least a portion of the semiconductor layer in a depth direction; Equipped with the wiring layer has at least one layer including a light shielding member; a region of the semiconductor layer above the photodiode has a moth-eye structure in which minute projections and recesses are formed, The light blocking member is provided so as to overlap the photodiode in a plan view.

[0012] In a first aspect of the present technology, an on-chip lens, a wiring layer, and a semiconductor layer disposed between the on-chip lens and the wiring layer are provided, the semiconductor layer is provided with a photodiode, a first transfer transistor configured to transfer a charge generated in the photodiode from the photodiode to a first charge accumulation section, a second transfer transistor configured to transfer a charge generated in the photodiode from the photodiode to a second charge accumulation section, and an inter-pixel isolation section configured to isolate the semiconductor layer between adjacent pixels for at least a part of a depth direction of the semiconductor layer, the wiring layer is provided with at least one layer including a light-shielding member, a region of the semiconductor layer above the photodiode is configured with a moth-eye structure having fine irregularities, and the light-shielding member is provided to overlap the photodiode in a planar view.

[0013] A ranging module according to a second aspect of the present technology includes: An on-chip lens; A wiring layer; a semiconductor layer disposed between the on-chip lens and the wiring layer; The semiconductor layer is A photodiode; a first transfer transistor that transfers charges generated by the photodiode from the photodiode to a first charge accumulation unit; a second transfer transistor that transfers the charge generated by the photodiode from the photodiode to a second charge accumulation unit; an inter-pixel isolation portion that isolates the semiconductor layer between adjacent pixels at a depth of at least a portion of the semiconductor layer; Equipped with the wiring layer has at least one layer including a light shielding member; a region of the semiconductor layer above the photodiode has a moth-eye structure in which minute projections and recesses are formed, The light blocking member is provided so as to overlap the photodiode in a plan view. A light receiving element; A light source that emits irradiation light whose brightness periodically changes; a light emission control unit that controls the irradiation timing of the irradiation light; Equipped with.

[0014] In a second aspect of the present technology, an on-chip lens, a wiring layer, and a semiconductor layer disposed between the on-chip lens and the wiring layer are provided, and the semiconductor layer is provided with a photodiode, a first transfer transistor configured to transfer a charge generated in the photodiode from the photodiode to a first charge accumulation section, a second transfer transistor configured to transfer a charge generated in the photodiode from the photodiode to a second charge accumulation section, and an inter-pixel isolation section configured to isolate the semiconductor layer between adjacent pixels at a depth of at least a portion of the semiconductor layer, and the wiring layer is provided with at least one layer including a light-shielding member, and a region above the photodiode in the semiconductor layer is configured with a moth-eye structure having fine irregularities, and the light-shielding member is provided to overlap the photodiode in a planar view.

[0015] An electronic device according to a third aspect of the present technology includes: An on-chip lens; A wiring layer; a semiconductor layer disposed between the on-chip lens and the wiring layer; The semiconductor layer is A photodiode; a first transfer transistor that transfers charges generated by the photodiode from the photodiode to a first charge accumulation unit; a second transfer transistor that transfers the charge generated by the photodiode from the photodiode to a second charge accumulation unit; an inter-pixel isolation portion that isolates the semiconductor layer between adjacent pixels at a depth of at least a portion of the semiconductor layer; Equipped with the wiring layer has at least one layer including a light shielding member; a region of the semiconductor layer above the photodiode has a moth-eye structure in which minute projections and recesses are formed, The light blocking member is provided so as to overlap the photodiode in a plan view. A light receiving element; A light source that emits irradiation light whose brightness periodically changes; a light emission control unit that controls the irradiation timing of the irradiation light; A ranging module comprising: Equipped with.

[0016] In a third aspect of the present technology, an on-chip lens, a wiring layer, and a semiconductor layer disposed between the on-chip lens and the wiring layer are provided, and the semiconductor layer is provided with a photodiode, a first transfer transistor configured to transfer a charge generated in the photodiode from the photodiode to a first charge accumulation section, a second transfer transistor configured to transfer a charge generated in the photodiode from the photodiode to a second charge accumulation section, and an inter-pixel isolation section configured to isolate the semiconductor layer between adjacent pixels at a depth of at least a portion of the semiconductor layer, and the wiring layer is provided with at least one layer including a light-shielding member, and a region above the photodiode in the semiconductor layer is configured with a moth-eye structure having fine irregularities, and the light-shielding member is provided so as to overlap with the photodiode in a planar view. A ranging module is provided with: a light source configured to irradiate irradiation light whose brightness periodically changes; and a light emission control section configured to control an irradiation timing of the irradiation light. Effect of the Invention

[0017] According to the first to third aspects of the present technology, it is possible to improve characteristics.

[0018] Note that the effects described herein are not necessarily limited to those described herein, and may be any of the effects described in this disclosure. [Brief description of the drawings]

[0019] [Figure 1] 1 is a block diagram showing a schematic configuration example of a light receiving element to which the present technology is applied. [Diagram 2] FIG. 2 is a cross-sectional view showing a first configuration example of a pixel. [Diagram 3]3 is a diagram illustrating an example of a circuit configuration of the pixel in FIG. 2. [Figure 4] 4 is a plan view showing an example of the arrangement of the pixel circuits in FIG. 3. [Diagram 5] 3 is a diagram illustrating another example of the circuit configuration of the pixel in FIG. 2. [Figure 6] 6 is a plan view showing an example of the arrangement of the pixel circuits in FIG. 5. [Figure 7] 1A and 1B are diagrams illustrating the effects of a back-illuminated type. [Figure 8] 1A and 1B are diagrams illustrating the effects of a back-illuminated type. [Figure 9] 1A and 1B are diagrams illustrating the effects of a back-illuminated type. [Figure 10] 1A and 1B are diagrams illustrating the effects of a back-illuminated type. [Figure 11] 1A and 1B are diagrams illustrating the effects of a back-illuminated type. [Figure 12] FIG. 11 is a cross-sectional view showing a second configuration example of a pixel. [Figure 13] FIG. 11 is a cross-sectional view showing a third configuration example of a pixel. [Figure 14] FIG. 11 is a cross-sectional view showing a fourth configuration example of a pixel. [Figure 15] FIG. 11 is a cross-sectional view showing a fifth configuration example of a pixel. [Figure 16] FIG. 2 is a perspective view showing a configuration example of a moth-eye structure. [Figure 17] FIG. 11 is a perspective view showing another configuration example of the moth-eye structure. [Figure 18] FIG. 13 is a perspective view showing still another configuration example of the moth-eye structure. [Figure 19] FIG. 13 is a cross-sectional view showing a sixth configuration example of a pixel. [Figure 20] 13A to 13C are diagrams illustrating a manufacturing method of the sixth configuration example. [Figure 21] FIG. 13 is a diagram illustrating an example of a 4-tap pixel configuration. [Figure 22] 1 is a block diagram showing an example configuration of a distance measuring module to which the present technology is applied. FIG. [Figure 23] FIG. 1 is a block diagram showing an example configuration of a smartphone as an electronic device to which the present technology is applied. [Figure 24]1 is a block diagram showing an example of a schematic configuration of a vehicle control system; [Diagram 25] 4 is an explanatory diagram showing an example of the installation positions of an outside-vehicle information detection unit and an imaging unit; FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] Hereinafter, modes for carrying out the present technology (hereinafter, referred to as embodiments) will be described in the following order. 1. Example of photodetector configuration 2. Cross-sectional view of a first configuration example of a pixel 3. Example of pixel circuit configuration 4. Plan view of pixel 5.Other examples of pixel circuit configurations 6. Top view of pixel 7. Effects of back-illuminated type 8. Cross-sectional view of a second configuration example of a pixel 9. Cross-sectional view of a third configuration example of a pixel 10. Cross-sectional view of a fourth configuration example of a pixel 11. Cross-sectional view of a fifth configuration example of a pixel 12. Cross-sectional view of a sixth configuration example of a pixel 13.4-tap pixel configuration example 14. Example of distance measurement module configuration 15.Examples of electronic device configurations 16. Mobile application examples

[0021] <1. Example of light receiving element configuration> FIG. 1 is a block diagram showing a schematic configuration example of a light receiving element to which the present technology is applied.

[0022] The light receiving element 1 shown in FIG. 1 is an element that outputs distance measurement information by the indirect ToF method.

[0023] The light receiving element 1 receives light (reflected light) that is irradiated from a specific light source and reflected by an object, and outputs a depth image that stores distance information to the object as a depth value. The irradiated light irradiated from the light source is, for example, infrared light with a wavelength in the range of 780 nm to 1000 nm, and is a pulsed light that is repeatedly turned on and off at a specific period.

[0024] The light receiving element 1 has a pixel array section 21 formed on a semiconductor substrate (not shown), and a peripheral circuit section integrated on the same semiconductor substrate as the pixel array section 21. The peripheral circuit section is composed of, for example, a vertical drive section 22, a column processing section 23, a horizontal drive section 24, and a system control section 25.

[0025] The light receiving element 1 is further provided with a signal processing unit 26 and a data storage unit 27. The signal processing unit 26 and the data storage unit 27 may be mounted on the same board as the light receiving element 1, or may be disposed on a board in a module separate from the light receiving element 1.

[0026] The pixel array section 21 has pixels 10 arranged two-dimensionally in a matrix in row and column directions, each pixel generating a charge according to the amount of received light and outputting a signal according to the charge. That is, the pixel array section 21 has a plurality of pixels 10 that perform photoelectric conversion of incident light and output a signal according to the resulting charge. Details of the pixels 10 will be described later with reference to FIG. 2 and subsequent figures.

[0027] Here, the row direction refers to the horizontal arrangement direction of the pixels 10, and the column direction refers to the vertical arrangement direction of the pixels 10. The row direction is the horizontal direction in the drawing, and the column direction is the vertical direction in the drawing.

[0028] In the pixel array unit 21, a pixel drive line 28 is wired in the row direction for each pixel row in the matrix-like pixel arrangement, and two vertical signal lines 29 are wired in the column direction for each pixel column. For example, the pixel drive line 28 transmits a drive signal for driving the pixels 10 when reading out a signal. Note that, although FIG. 1 shows the pixel drive line 28 as a single line, the number of lines is not limited to one. One end of the pixel drive line 28 is connected to an output terminal of the vertical drive unit 22 corresponding to each row.

[0029] The vertical driving unit 22 is composed of a shift register, an address decoder, etc., and drives each pixel 10 of the pixel array unit 21 simultaneously for all pixels or in row units, etc. In other words, the vertical driving unit 22, together with a system control unit 25 that controls the vertical driving unit 22, constitutes a driving unit that controls the operation of each pixel 10 of the pixel array unit 21.

[0030] The detection signals output from each pixel 10 in a pixel row in response to drive control by the vertical drive unit 22 are input to the column processing unit 23 through vertical signal lines 29. The column processing unit 23 performs predetermined signal processing on the detection signals output from each pixel 10 through the vertical signal lines 29, and temporarily holds the detection signals after signal processing. Specifically, the column processing unit 23 performs noise removal processing, AD (Analog to Digital) conversion processing, and the like as signal processing.

[0031] The horizontal driving unit 24 is composed of a shift register, an address decoder, etc., and sequentially selects unit circuits corresponding to pixel columns in the column processing unit 23. By selective scanning by the horizontal driving unit 24, detection signals that have been signal-processed for each unit circuit in the column processing unit 23 are sequentially output.

[0032] The system control unit 25 is composed of a timing generator that generates various timing signals, and controls the driving of the vertical driving unit 22, the column processing unit 23, the horizontal driving unit 24, etc. based on the various timing signals generated by the timing generator.

[0033] The signal processing unit 26 has at least a calculation processing function, and performs various signal processing such as calculation processing based on the detection signal output from the column processing unit 23. The data storage unit 27 temporarily stores data necessary for the signal processing in the signal processing unit 26.

[0034] The light receiving element 1 configured as described above outputs a depth image in which distance information to an object is stored in pixel values ​​as depth values. The light receiving element 1 can be mounted, for example, in an in-vehicle system that is mounted in a vehicle and measures the distance to an object outside the vehicle, or in a gesture recognition device that measures the distance to an object such as a user's hand and recognizes the user's gesture based on the measurement result.

[0035] <2. Cross-sectional view of a first configuration example of a pixel> FIG. 2 is a cross-sectional view showing a first configuration example of the pixel 10 arranged in the pixel array section 21. As shown in FIG.

[0036] The light receiving element 1 includes a semiconductor substrate 41 and a multi-layer wiring layer 42 formed on the front surface side (the lower side in the figure) of the semiconductor substrate 41.

[0037] The semiconductor substrate 41 is made of, for example, silicon (Si) and is formed to have a thickness of, for example, 1 to 6 μm. In the semiconductor substrate 41, for example, a P-type (first conductivity type) semiconductor region 51 has an N-type (second conductivity type) semiconductor region 52 formed in a pixel unit, thereby forming a photodiode PD in a pixel unit. The P-type semiconductor regions 51 provided on both the front and back surfaces of the semiconductor substrate 41 also serve as hole charge accumulation regions for suppressing dark current.

[0038] 2 is the back surface of the semiconductor substrate 41, which is the light incident surface onto which light is incident. An anti-reflection film 43 is formed on the upper surface of the back surface side of the semiconductor substrate 41.

[0039] The anti-reflection film 43 has a laminated structure in which, for example, a fixed charge film and an oxide film are laminated, and for example, a high dielectric constant (High-k) insulating thin film by the ALD (Atomic Layer Deposition) method can be used. Specifically, hafnium oxide (HfO2), aluminum oxide (Al2O3), titanium oxide (TiO2), STO (Strontium Titan Oxide), etc. can be used. In the example of FIG. 2, the anti-reflection film 43 is configured by laminating a hafnium oxide film 53, an aluminum oxide film 54, and a silicon oxide film 55.

[0040] An inter-pixel light shielding film 45 that prevents incident light from being incident on an adjacent pixel is formed on the upper surface of the anti-reflection film 43 at a boundary 44 (hereinafter also referred to as a pixel boundary 44) between adjacent pixels 10 of the semiconductor substrate 41. The material of the inter-pixel light shielding film 45 may be any material that blocks light, and may be, for example, a metal material such as tungsten (W), aluminum (Al), or copper (Cu).

[0041] A planarization film 46 is formed on the upper surface of the anti-reflection film 43 and the upper surface of the inter-pixel light-shielding film 45 using an insulating film such as silicon oxide (SiO2), silicon nitride (SiN), silicon oxynitride (SiON), or an organic material such as resin.

[0042] An on-chip lens 47 is formed for each pixel on the upper surface of the planarization film 46. The on-chip lens 47 is made of a resin material such as a styrene resin, an acrylic resin, a styrene-acrylic copolymer resin, or a siloxane resin. The light collected by the on-chip lens 47 is efficiently incident on the photodiode PD.

[0043] Furthermore, in the pixel boundary portion 44 on the back surface side of the semiconductor substrate 41, an inter-pixel separation portion 61 is formed from the back surface side (the on-chip lens 47 side) of the semiconductor substrate 41 to a predetermined depth in the substrate depth direction, separating adjacent pixels from each other in the depth direction of the semiconductor substrate 41. The outer periphery including the bottom surface and sidewalls of the inter-pixel separation portion 61 is covered with a hafnium oxide film 53 which is a part of the anti-reflection film 43. The inter-pixel separation portion 61 prevents incident light from penetrating into an adjacent pixel 10, confining it within its own pixel, and prevents incident light from leaking in from an adjacent pixel 10.

[0044] 2, the silicon oxide film 55, which is the material of the uppermost layer of the antireflection film 43, is embedded in a trench (groove) dug from the back surface side to simultaneously form the silicon oxide film 55 and the inter-pixel isolation portion 61, so that the silicon oxide film 55, which is a part of the laminated film as the antireflection film 43, and the inter-pixel isolation portion 61 are made of the same material, but they do not necessarily have to be the same. The material embedded in the trench (groove) dug from the back surface side as the inter-pixel isolation portion 61 may be, for example, a metal material such as tungsten (W), aluminum (Al), titanium (Ti), titanium nitride (TiN), etc.

[0045] Meanwhile, on the front surface side of the semiconductor substrate 41 on which the multilayer wiring layer 42 is formed, two transfer transistors TRG1 and TRG2 are formed for one photodiode PD formed in each pixel 10. Also, on the front surface side of the semiconductor substrate 41, floating diffusion regions FD1 and FD2 are formed of a high-concentration N-type semiconductor region (N-type diffusion region) as charge accumulation sections that temporarily hold the charge transferred from the photodiode PD.

[0046] The multi-layer wiring layer 42 is composed of a plurality of metal films M and an interlayer insulating film 62 therebetween. In Fig. 2, an example is shown in which the multi-layer wiring layer 42 is composed of three layers, a first metal film M1 to a third metal film M3.

[0047] Of the multiple metal films M of the multilayer wiring layer 42, the first metal film M1 closest to the semiconductor substrate 41 has a region located below the formation region of the photodiode PD, in other words, a region that at least partially overlaps with the formation region of the photodiode PD in a planar view, in which metal wiring such as copper or aluminum is formed as a light-shielding member 63.

[0048] The light-shielding member 63 blocks infrared light that enters the semiconductor substrate 41 from the light incident surface via the on-chip lens 47 and passes through the semiconductor substrate 41 without being photoelectrically converted within the semiconductor substrate 41 with the first metal film M1 that is closest to the semiconductor substrate 41, and prevents the infrared light from passing through the second metal film M2 and the third metal film M3 below. This light-shielding function makes it possible to prevent infrared light that has passed through the semiconductor substrate 41 without being photoelectrically converted within the semiconductor substrate 41 from being scattered by the metal film M below the first metal film M1 and entering a nearby pixel. This makes it possible to prevent the light from being erroneously detected by a nearby pixel.

[0049] The light shielding member 63 also has a function of reflecting infrared light that enters the semiconductor substrate 41 from the light incident surface via the on-chip lens 47 and passes through the semiconductor substrate 41 without being photoelectrically converted within the semiconductor substrate 41, thereby allowing the infrared light to enter the semiconductor substrate 41 again. Therefore, the light shielding member 63 can also be said to be a reflecting member. This reflecting function increases the amount of infrared light that is photoelectrically converted within the semiconductor substrate 41, and improves the quantum efficiency (QE), that is, the sensitivity of the pixel 10 to infrared light.

[0050] The light shielding member 63 may be formed of a reflecting or light shielding structure using polysilicon, an oxide film, or the like, in addition to a metal material.

[0051] Furthermore, the light blocking member 63 does not have to be configured with one layer of metal film M, but may be configured with a plurality of metal films M, for example, by forming a first metal film M1 and a second metal film M2 in a lattice pattern.

[0052] Among the multiple metal films M of the multilayer wiring layer 42, a predetermined metal film M, for example, the second metal film M2, is patterned into, for example, a comb-tooth shape to form a wiring capacitance 64. The light shielding member 63 and the wiring capacitance 64 may be formed in the same layer (metal film M), but when they are formed in different layers, the wiring capacitance 64 is formed in a layer farther from the semiconductor substrate 41 than the light shielding member 63. In other words, the light shielding member 63 is formed closer to the semiconductor substrate 41 than the wiring capacitance 64.

[0053] As described above, the light receiving element 1 has a back-illuminated structure in which the semiconductor substrate 41, which is a semiconductor layer, is disposed between the on-chip lens 47 and the multilayer wiring layer 42, and incident light is made incident on the photodiode PD from the back side on which the on-chip lens 47 is formed.

[0054] In addition, the pixel 10 has two transfer transistors TRG1 and TRG2 for the photodiode PD provided in each pixel, and is configured to be able to distribute the charges (electrons) generated by photoelectric conversion in the photodiode PD to the floating diffusion region FD1 or FD2.

[0055] Furthermore, the pixel 10 according to the first configuration example has an inter-pixel separation portion 61 formed in the pixel boundary portion 44, thereby preventing incident light from penetrating into an adjacent pixel 10 and confining it within the pixel itself, while preventing the incident light from leaking in from the adjacent pixel 10. Then, by providing a light shielding member 63 on the metal film M below the formation region of the photodiode PD, infrared light that has passed through the semiconductor substrate 41 without being photoelectrically converted within the semiconductor substrate 41 is reflected by the light shielding member 63 and made to reenter the semiconductor substrate 41.

[0056] With the above configuration, the amount of infrared light that is photoelectrically converted within the semiconductor substrate 41 can be increased, and the quantum efficiency (QE), that is, the sensitivity of the pixel 10 to infrared light can be improved.

[0057] <3. Example of pixel circuit configuration> FIG. 3 shows a circuit configuration of the pixels 10 arranged two-dimensionally in the pixel array section 21. As shown in FIG.

[0058] The pixel 10 includes a photodiode PD as a photoelectric conversion element. The pixel 10 also includes two of each of a transfer transistor TRG, a floating diffusion region FD, an additional capacitance FDL, a switching transistor FDG, an amplification transistor AMP, a reset transistor RST, and a selection transistor SEL. The pixel 10 also includes a charge discharging transistor OFG.

[0059] Here, when distinguishing between the transfer transistor TRG, floating diffusion region FD, additional capacitance FDL, switching transistor FDG, amplification transistor AMP, reset transistor RST, and selection transistor SEL, of which two are provided in each pixel 10, they will be referred to as transfer transistors TRG1 and TRG2, floating diffusion regions FD1 and FD2, additional capacitances FDL1 and FDL2, switching transistors FDG1 and FDG2, amplification transistors AMP1 and AMP2, reset transistors RST1 and RST2, and selection transistors SEL1 and SEL2, as shown in Figure 3.

[0060] The transfer transistor TRG, the switching transistor FDG, the amplification transistor AMP, the selection transistor SEL, the reset transistor RST, and the charge discharging transistor OFG are configured, for example, by N-type MOS transistors.

[0061] The transfer transistor TRG1 becomes conductive in response to a transfer drive signal TRG1g supplied to its gate electrode becoming active, thereby transferring the charge stored in the photodiode PD to the floating diffusion region FD1. The transfer transistor TRG2 becomes conductive in response to a transfer drive signal TRG2g supplied to its gate electrode becoming active, thereby transferring the charge stored in the photodiode PD to the floating diffusion region FD2.

[0062] The floating diffusion regions FD1 and FD2 are charge storage portions that temporarily store the charges transferred from the photodiode PD.

[0063] The switching transistor FDG1 becomes conductive in response to an active state of an FD drive signal FDG1g supplied to the gate electrode, thereby connecting the additional capacitance FDL1 to the floating diffusion region FD1. The switching transistor FDG2 becomes conductive in response to an active state of an FD drive signal FDG2g supplied to the gate electrode, thereby connecting the additional capacitance FDL2 to the floating diffusion region FD2. The additional capacitances FDL1 and FDL2 are formed by the wiring capacitance 64 in FIG. 2.

[0064] The reset transistor RST1 becomes conductive in response to the reset drive signal RSTg supplied to its gate electrode becoming active, thereby resetting the potential of the floating diffusion region FD1. The reset transistor RST2 becomes conductive in response to the reset drive signal RSTg supplied to its gate electrode becoming active, thereby resetting the potential of the floating diffusion region FD2. When the reset transistors RST1 and RST2 are activated, the switching transistors FDG1 and FDG2 are also simultaneously activated, and the additional capacitances FDL1 and FDL2 are also reset.

[0065] For example, when the illuminance is high and the amount of incident light is large, the vertical drive unit 22 activates the switching transistors FDG1 and FDG2 to connect the floating diffusion region FD1 to the additional capacitance FDL1 and also connects the floating diffusion region FD2 to the additional capacitance FDL2. This allows more charges to be stored when the illuminance is high.

[0066] On the other hand, when the amount of incident light is low and the illuminance is low, the vertical drive unit 22 makes the switching transistors FDG1 and FDG2 inactive and disconnects the additional capacitances FDL1 and FDL2 from the floating diffusion regions FD1 and FD2, respectively, thereby increasing the conversion efficiency.

[0067] When a discharge drive signal OFG1g supplied to the gate electrode becomes active, the charge discharge transistor OFG becomes conductive in response to this, thereby discharging the charge accumulated in the photodiode PD.

[0068] The amplifier transistor AMP1 has a source electrode connected to the vertical signal line 29A via the selection transistor SEL1, and is connected to a constant current source (not shown) to form a source follower circuit. The amplifier transistor AMP2 has a source electrode connected to the vertical signal line 29B via the selection transistor SEL2, and is connected to a constant current source (not shown) to form a source follower circuit.

[0069] The selection transistor SEL1 is connected between the source electrode of the amplification transistor AMP1 and the vertical signal line 29A. When a selection signal SEL1g supplied to the gate electrode of the selection transistor SEL1 becomes active, the selection transistor SEL1 becomes conductive in response to the selection signal SEL1g becoming active, and outputs the detection signal VSL1 output from the amplification transistor AMP1 to the vertical signal line 29A.

[0070] The selection transistor SEL2 is connected between the source electrode of the amplification transistor AMP2 and the vertical signal line 29B. When a selection signal SEL2g supplied to the gate electrode of the selection transistor SEL2 becomes active, the selection transistor SEL2 becomes conductive in response to this, and outputs the detection signal VSL2 output from the amplification transistor AMP2 to the vertical signal line 29B.

[0071] The transfer transistors TRG1 and TRG2, the switching transistors FDG1 and FDG2, the amplification transistors AMP1 and AMP2, the selection transistors SEL1 and SEL2, and the charge discharging transistor OFG of the pixel 10 are controlled by a vertical drive section 22.

[0072] In the pixel circuit of FIG. 2, the additional capacitances FDL1 and FDL2 and the switching transistors FDG1 and FDG2 that control the connection therebetween may be omitted. However, by providing the additional capacitance FDL and using it according to the amount of incident light, a high dynamic range can be ensured.

[0073] The operation of pixel 10 will now be briefly described.

[0074] First, before starting light reception, a reset operation is performed on all pixels to reset the charges in the pixels 10. That is, the charge drain transistor OFG, the reset transistors RST1 and RST2, and the switching transistors FDG1 and FDG2 are turned on, and the charges stored in the photodiode PD, the floating diffusion regions FD1 and FD2, and the additional capacitances FDL1 and FDL2 are drained.

[0075] After the accumulated charges are discharged, all pixels start receiving light.

[0076] During the light receiving period, the transfer transistors TRG1 and TRG2 are alternately driven. That is, during the first period, the transfer transistor TRG1 is controlled to be on and the transfer transistor TRG2 is controlled to be off. During this first period, the charge generated in the photodiode PD is transferred to the floating diffusion region FD1. During the second period following the first period, the transfer transistor TRG1 is controlled to be off and the transfer transistor TRG2 is controlled to be on. During this second period, the charge generated in the photodiode PD is transferred to the floating diffusion region FD2. As a result, the charge generated in the photodiode PD is divided and accumulated in the floating diffusion regions FD1 and FD2.

[0077] Here, the transfer transistor TRG and the floating diffusion region FD where the charge (electrons) obtained by photoelectric conversion is read out are also referred to as an active tap. Conversely, the transfer transistor TRG and the floating diffusion region FD where the charge obtained by photoelectric conversion is not read out are also referred to as an inactive tap.

[0078] Then, when the light receiving period ends, each pixel 10 of the pixel array unit 21 is selected line-sequentially. In the selected pixel 10, the selection transistors SEL1 and SEL2 are turned on. As a result, the charge accumulated in the floating diffusion region FD1 is output as a detection signal VSL1 to the column processing unit 23 via the vertical signal line 29A. The charge accumulated in the floating diffusion region FD2 is output as a detection signal VSL2 to the column processing unit 23 via the vertical signal line 29B.

[0079] This completes one light receiving operation, and the next light receiving operation is then executed, starting with a reset operation.

[0080] The reflected light received by pixel 10 is delayed from the timing of irradiation by the light source according to the distance to the object. The distribution ratio of the charges accumulated in the two floating diffusion regions FD1 and FD2 changes depending on the delay time according to the distance to the object, so the distance to the object can be calculated from the distribution ratio of the charges accumulated in the two floating diffusion regions FD1 and FD2.

[0081] <4. Plan view of pixel> FIG. 4 is a plan view showing an example of the arrangement of the pixel circuits shown in FIG.

[0082] 4 corresponds to the row direction (horizontal direction) in FIG. 1, and the vertical direction corresponds to the column direction (vertical direction) in FIG.

[0083] As shown in FIG. 4, in the central region of a rectangular pixel 10, a photodiode PD is formed of an N-type semiconductor region 52.

[0084] Outside the photodiode PD, along a specific one of the four sides of the rectangular pixel 10, the transfer transistor TRG1, the switching transistor FDG1, the reset transistor RST1, the amplification transistor AMP1, and the selection transistor SEL1 are arranged in a linear array, and along the other one of the four sides of the rectangular pixel 10, the transfer transistor TRG2, the switching transistor FDG2, the reset transistor RST2, the amplification transistor AMP2, and the selection transistor SEL2 are arranged in a linear array.

[0085] Furthermore, a charge discharging transistor OFG is disposed on a side other than the two sides of the pixel 10 on which the transfer transistor TRG, the switching transistor FDG, the reset transistor RST, the amplifying transistor AMP, and the selection transistor SEL are formed.

[0086] It should be noted that the arrangement of the pixel circuits shown in FIG. 3 is not limited to this example, and other arrangements may also be used.

[0087] <5. Other examples of pixel circuit configurations> FIG. 5 shows another example of the circuit configuration of the pixel 10. In FIG.

[0088] In FIG. 5, parts corresponding to those in FIG. 3 are given the same reference numerals, and the description of those parts will be omitted as appropriate.

[0089] The pixel 10 includes a photodiode PD as a photoelectric conversion element, and further includes two first transfer transistors TRGa, two second transfer transistors TRGb, a memory MEM, a floating diffusion region FD, a reset transistor RST, an amplification transistor AMP, and a selection transistor SEL.

[0090] Here, when distinguishing between the first transfer transistor TRGa, the second transfer transistor TRGb, the memory MEM, the floating diffusion region FD, the reset transistor RST, the amplification transistor AMP, and the selection transistor SEL, of which two are provided in each pixel 10, they will be referred to as the first transfer transistors TRGa1 and TRGa2, the second transfer transistors TRGb1 and TRGb2, the transfer transistors TRG1 and TRG2, the memories MEM1 and MEM2, the floating diffusion regions FD1 and FD2, the amplification transistors AMP1 and AMP2, and the selection transistors SEL1 and SEL2, as shown in FIG. 5.

[0091] 3 and 5, the transfer transistor TRG is changed to two types of first and second transfer transistors TRGa and TRGb, a memory MEM is added, and the additional capacitance FDL and the switching transistor FDG are omitted.

[0092] The first transfer transistor TRGa, the second transfer transistor TRGb, the reset transistor RST, the amplification transistor AMP, and the selection transistor SEL are configured, for example, with N-type MOS transistors.

[0093] In the pixel circuit shown in Figure 3, the charge generated in the photodiode PD is transferred to and stored in floating diffusion regions FD1 and FD2, but in the pixel circuit of Figure 5, the charge is transferred to and stored in memories MEM1 and MEM2 provided as charge storage units.

[0094] That is, when the first transfer drive signal TRGa1g supplied to the gate electrode becomes active, the first transfer transistor TRGa1 becomes conductive in response to this, thereby transferring the charge accumulated in the photodiode PD to the memory MEM1. When the first transfer drive signal TRGa2g supplied to the gate electrode becomes active, the first transfer transistor TRGa2 becomes conductive in response to this, thereby transferring the charge accumulated in the photodiode PD to the memory MEM2.

[0095] In addition, the second transfer transistor TRGb1 becomes conductive in response to the second transfer drive signal TRGb1g supplied to its gate electrode becoming active, thereby transferring the charges stored in the memory MEM1 to the floating diffusion region FD1. The second transfer transistor TRGb2 becomes conductive in response to the second transfer drive signal TRGb2g supplied to its gate electrode becoming active, thereby transferring the charges stored in the memory MEM2 to the floating diffusion region FD2.

[0096] The reset transistor RST1 becomes conductive in response to a reset drive signal RST1g supplied to its gate electrode becoming active, thereby resetting the potential of the floating diffusion region FD1. The reset transistor RST2 becomes conductive in response to a reset drive signal RST2g supplied to its gate electrode becoming active, thereby resetting the potential of the floating diffusion region FD2. When the reset transistors RST1 and RST2 are activated, the second transfer transistors TRGb1 and TRGb2 are also simultaneously activated, and the memories MEM1 and MEM2 are also reset.

[0097] 5, the charge generated in the photodiode PD is divided and stored in the memories MEM1 and MEM2. Then, at the timing of reading, the charges held in the memories MEM1 and MEM2 are transferred to the floating diffusion regions FD1 and FD2, respectively, and output from the pixel 10.

[0098] <6. Plan view of pixel> FIG. 6 is a plan view showing an example of the arrangement of the pixel circuits shown in FIG.

[0099] 6 corresponds to the row direction (horizontal direction) in FIG. 1, and the vertical direction corresponds to the column direction (vertical direction) in FIG.

[0100] As shown in FIG. 6, in the central region of a rectangular pixel 10, a photodiode PD is formed of an N-type semiconductor region 52.

[0101] Outside the photodiode PD, a first transfer transistor TRGa1, a second transfer transistor TRGb1, a reset transistor RST1, an amplification transistor AMP1, and a selection transistor SEL1 are linearly arranged along a predetermined one of the four sides of the rectangular pixel 10, and a first transfer transistor TRGa2, a second transfer transistor TRGb2, a reset transistor RST2, an amplification transistor AMP2, and a selection transistor SEL2 are linearly arranged along the other one of the four sides of the rectangular pixel 10. The memories MEM1 and MEM2 are formed, for example, by a buried N-type diffusion region.

[0102] It should be noted that the arrangement of the pixel circuits shown in FIG. 5 is not limited to this example, and other arrangements may also be used.

[0103] <7. Effects of back-illuminated type> The light receiving element 1 as described above can provide the following advantages.

[0104] First, since the light receiving element 1 is a back-illuminated type, the quantum efficiency (QE) x aperture ratio (FF (Fill Factor)) can be maximized, and the distance measurement characteristics of the light receiving element 1 can be improved.

[0105] For example, as shown by the arrow W11 in FIG. 7, a typical front-illuminated image sensor has a structure in which wiring 102 and wiring 103 are formed on the light incident surface side of PD 101, which is a photoelectric conversion unit, where external light is incident.

[0106] Therefore, for example, as indicated by arrows A21 and A22, part of the light that is obliquely incident on the PD 101 at a certain angle from the outside may be blocked by the wiring 102 and wiring 103 and not enter the PD 101.

[0107] In contrast, a back-illuminated image sensor has a structure in which wiring 105 and wiring 106 are formed on the surface opposite to the light incident surface, through which external light is incident on PD104, which is a photoelectric conversion unit, as shown by arrow W12, for example.

[0108] Therefore, a sufficient aperture ratio can be ensured as compared with the front-illuminated type. That is, for example, as shown by arrows A23 and A24, light that is obliquely incident on the PD 104 from the outside at a certain angle is not blocked by the wiring and enters the PD 104. This allows more light to be received, improving the sensitivity of the pixel.

[0109] The effect of improving pixel sensitivity obtained by adopting such a back-illuminated type can also be obtained in the light receiving element 1, which is a back-illuminated ToF sensor.

[0110] That is, in the front-illuminated ToF sensor, as shown by the arrow W13, the wiring 112 and the wiring 113 are formed on the light incident surface side of the photoelectric conversion unit PD111. Therefore, for example, as shown by the arrows A25 and A26, a part of the light that is obliquely incident on the PD111 at a certain angle from the outside may be blocked by the wiring 112, the wiring 113, etc., and may not be incident on the PD111.

[0111] In contrast, the back-illuminated ToF sensor has a structure in which a transfer transistor for reading out electric charges is formed on the surface opposite to the light incident surface of PD115, which is a photoelectric conversion unit, as shown by arrow W14. Also, wiring 117 and wiring 118 are formed on the surface opposite to the light incident surface of PD115. As a result, as shown by arrows A28 and A29, for example, light that is obliquely incident on PD115 at a certain angle is incident on PD115 without being blocked by the wiring.

[0112] Therefore, in a back-illuminated ToF sensor, a sufficient aperture ratio can be ensured compared to a front-illuminated ToF sensor, so that the quantum efficiency (QE) x aperture ratio (FF) can be maximized and distance measurement characteristics can be improved.

[0113] FIG. 8 shows cross-sectional views of pixels of a front-illuminated and back-illuminated ToF sensor.

[0114] In the front-illuminated ToF sensor on the left side of Figure 8, the upper side of the substrate 141 in the figure is the light incident surface, and a wiring layer 152 including multiple layers of wiring, an inter-pixel light shielding film 153, and an on-chip lens 154 are stacked on the light incident surface side of the substrate 141.

[0115] In the back-illuminated ToF sensor on the right side of FIG. 8, a wiring layer 152 including multiple layers of wiring is formed on the lower side of a substrate 142, which is the side opposite to the light incident surface in the figure, and an inter-pixel light shielding film 153 and an on-chip lens 154 are laminated on the upper side of the substrate 142, which is the light incident surface side.

[0116] In addition, the gray trapezoidal shapes in FIG. 8 indicate regions where the light intensity is high due to infrared light being condensed by the on-chip lens 154.

[0117] For example, in a front-illuminated ToF sensor, there is a region R11 where the transfer transistors TG1 and TG2 for reading out charges are present on the light incident surface side of the substrate 141. In a front-illuminated ToF sensor, the intensity of infrared light is high in the region R11 near the light incident surface of the substrate 141, so there is a high probability that photoelectric conversion of infrared light will occur in the region R11. In other words, since the amount of infrared light incident on the vicinity of the inactive tap is large, many signal carriers cannot be detected by the active tap, and the charge separation efficiency decreases.

[0118] In contrast, in a back-illuminated ToF sensor, a region R12 where an active tap and an inactive tap are formed is located at a position far from the light incident surface of the substrate 142, that is, at a position near the surface opposite to the light incident surface. The substrate 142 corresponds to the semiconductor substrate 41 shown in FIG.

[0119] Region R12 is present on the surface of substrate 142 opposite the light incident surface. Region R12 is located far from the light incident surface, so the intensity of the incident infrared light is relatively weak in the vicinity of region R12.

[0120] The signal carriers obtained by photoelectric conversion in areas where the infrared light intensity is strong, such as near the center of the substrate 142 or near the light incident surface, are guided to the active tap by the electric field gradient formed by the active tap and inactive tap, and are detected by the floating diffusion region FD of the active tap.

[0121] On the other hand, in the vicinity of the region R12 including the inactive tap, the intensity of the incident infrared light is relatively weak, so the probability of photoelectric conversion of infrared light occurring in the region R12 is low. In other words, since the amount of infrared light incident on the vicinity of the inactive tap is small, the number of signal carriers (electrons) that are generated by photoelectric conversion near the inactive tap and move to the floating diffusion region FD of the inactive tap is reduced, improving the charge separation efficiency. As a result, the distance measurement characteristics can be improved.

[0122] Furthermore, in the back-illuminated light receiving element 1, the semiconductor substrate 41 can be made thinner, which improves the efficiency of extracting electrons (charges) that are signal carriers.

[0123] For example, since a front-illuminated ToF sensor cannot ensure a sufficient aperture ratio, it is necessary to make the substrate 171 somewhat thick in order to ensure a higher quantum efficiency and suppress a decrease in the quantum efficiency x aperture ratio, as shown by the arrow W31 in FIG. 9.

[0124] As a result, the potential gradient becomes gentler in a region in the substrate 171 near the surface opposite to the light incident surface, for example, in the region R21, and the electric field in the direction perpendicular to the substrate 171 is weakened. In this case, the moving speed of the signal carriers becomes slower, and the time required from when the photoelectric conversion is performed until the signal carriers are transferred to the floating diffusion region FD of the active tap becomes longer. Note that in FIG. 9, the arrows in the substrate 171 represent the electric field in the substrate 171 in the direction perpendicular to the substrate 171.

[0125] Furthermore, if the substrate 171 is thick, the travel distance of the signal carriers from a position in the substrate 171 far from the active tap to the floating diffusion region FD of the active tap becomes longer. Therefore, at a position far from the active tap, the time required for the signal carriers to be transferred from the time of photoelectric conversion to the floating diffusion region FD of the active tap becomes even longer. Therefore, after the distribution of the transfer transistor TG is switched, the signal may reach the active tap, resulting in an erroneous signal.

[0126] 10 shows the relationship between the position in the thickness direction of the substrate 171 and the moving speed of the signal carriers. Region R21 corresponds to the diffusion current region.

[0127] If the substrate 171 becomes thick in this way, for example, when the drive frequency is high, that is, when the tap is switched between active and inactive at high speed, electrons generated in a position far from the active tap, such as in region R21, cannot be completely drawn into the floating diffusion region FD of the active tap. In other words, if the tap is active for a short period of time, electrons (charges) generated in region R21 etc. cannot be detected by the floating diffusion region FD of the active tap, and the electron extraction efficiency decreases.

[0128] In contrast, in a back-illuminated ToF sensor, a sufficient aperture ratio can be ensured, and therefore, even if the substrate 172 is thinned, a sufficient quantum efficiency × aperture ratio can be ensured, for example, as shown by the arrow W32 in Fig. 9. Here, the substrate 172 corresponds to the semiconductor substrate 41 in Fig. 2, and the arrow in the substrate 172 represents the electric field in the direction perpendicular to the substrate 172.

[0129] FIG. 11 shows the relationship between the position in the thickness direction of the substrate 172 and the moving speed of the signal carrier.

[0130] By thinning the thickness of the substrate 172 in this way, the electric field in the direction substantially perpendicular to the substrate 172 becomes stronger, and only the electrons (charges) in the drift current region, where the signal carriers move faster, are used, and electrons in the diffusion current region, where the signal carriers move slower, are not used. By using only the electrons (charges) in the drift current region, the time required from photoelectric conversion until the signal carriers are detected in the floating diffusion region FD of the active tap is shortened. Furthermore, by thinning the thickness of the substrate 172, the travel distance of the signal carriers to the floating diffusion region FD of the active tap is also shortened.

[0131] For these reasons, in a back-illuminated ToF sensor, even when the driving frequency is high, signal carriers (electrons) generated in each region in the substrate 172 can be sufficiently attracted to the floating diffusion region FD of the active tap, thereby improving the electron extraction efficiency.

[0132] Furthermore, by making the substrate 172 thinner, sufficient electron extraction efficiency can be ensured even at high drive frequencies, and high-speed drive durability can be improved.

[0133] In particular, in a back-illuminated ToF sensor, a sufficient aperture ratio can be obtained, so that the pixels can be miniaturized accordingly, and the pixel miniaturization tolerance can be improved.

[0134] In addition, by using a back-illuminated type for the photodetector 1, it is possible to liberalize the design of the back end of line (BEOL), which can improve the design freedom of the saturation signal quantity (Qs).

[0135] <8. Cross-sectional view of the second configuration example of the pixel> FIG. 12 is a cross-sectional view showing a second configuration example of the pixel 10. As shown in FIG.

[0136] In FIG. 12, parts corresponding to those in the first configuration example shown in FIG. 2 are given the same reference numerals, and the description of those parts will be omitted as appropriate.

[0137] The second configuration example in FIG. 12 is different from the first configuration example in FIG. 2 in that the inter-pixel isolation portion 61, which is a DTI (Deep Trench Isolation) formed by digging into the back surface side (the on-chip lens 47 side) of the semiconductor substrate 41, is replaced with an inter-pixel isolation portion 211 that penetrates the semiconductor substrate 41, but has other points in common.

[0138] The inter-pixel isolation portion 211 is formed by forming a trench from the back side (on-chip lens 47 side) or the front side of the semiconductor substrate 41 until it penetrates to the substrate surface on the opposite side, and embedding a silicon oxide film 55, which is the material of the uppermost layer of the anti-reflection film 43, inside the trench. The material embedded in the trench as the inter-pixel isolation portion 211 may be an insulating film such as the silicon oxide film 55, or a metal material such as tungsten (W), aluminum (Al), titanium (Ti), titanium nitride (TiN), etc.

[0139] Adjacent pixels can be electrically isolated from each other completely by forming such inter-pixel isolation portion 211. This prevents incident light from penetrating into the adjacent pixel 10 and confines it within the pixel itself, while preventing the incident light from leaking in from the adjacent pixel 10.

[0140] In the second configuration example as well, by using a back-illuminated pixel structure, a sufficient aperture ratio can be ensured compared to the front-illuminated type, and the quantum efficiency (QE) × aperture ratio (FF) can be maximized.

[0141] Furthermore, by providing a light shielding member (reflection member) 63 in a region located below the formation region of the photodiode PD of the first metal film M1, which is the closest to the semiconductor substrate 41 among the multiple metal films M of the multi-layer wiring layer 42, the infrared light that has passed through the semiconductor substrate 41 without being photoelectrically converted in the semiconductor substrate 41 is reflected by the light shielding member 63 and made to enter the semiconductor substrate 41 again. This increases the amount of infrared light that is photoelectrically converted in the semiconductor substrate 41, and improves the quantum efficiency (QE), that is, the sensitivity of the pixel 10 to infrared light. In addition, it is possible to prevent the infrared light that has passed through the semiconductor substrate 41 without being photoelectrically converted in the semiconductor substrate 41 from being scattered by the metal film M and entering a nearby pixel. This makes it possible to prevent the nearby pixel from erroneously detecting light.

[0142] <9. Cross-sectional view of the third configuration example of the pixel> FIG. 13 is a cross-sectional view showing a third configuration example of the pixel 10. As shown in FIG.

[0143] In FIG. 13, parts corresponding to those in the first configuration example shown in FIG. 2 are given the same reference numerals, and the description of those parts will be omitted as appropriate.

[0144] 13, the PD upper region 223 located above the formation region of the photodiode PD of the semiconductor substrate 41 (the P-type semiconductor region 51 thereof) has a moth-eye structure with fine irregularities. Corresponding to the moth-eye structure of the PD upper region 223 of the semiconductor substrate 41, the anti-reflection film 221 formed on the upper surface thereof also has a moth-eye structure. As in the first configuration example, the anti-reflection film 221 is formed by laminating a hafnium oxide film 53, an aluminum oxide film 54, and a silicon oxide film 55.

[0145] In this way, by forming the PD upper region 223 of the semiconductor substrate 41 in the moth-eye structure, it is possible to mitigate the sudden change in refractive index at the substrate interface and reduce the influence of reflected light.

[0146] 13, the inter-pixel isolation portion 61 formed by DTI formed by digging from the back surface side (on-chip lens 47 side) of the semiconductor substrate 41 is formed to a position slightly deeper than the inter-pixel isolation portion 61 in the first configuration example of Fig. 2. In this way, the depth in the substrate thickness direction at which the inter-pixel isolation portion 61 is formed can be any depth.

[0147] The third configuration example is otherwise similar to the first configuration example.

[0148] <10. Cross-sectional view of the fourth configuration example of the pixel> FIG. 14 is a cross-sectional view showing a fourth configuration example of the pixel 10. As shown in FIG.

[0149] In FIG. 14, the parts corresponding to those in the first to third configuration examples described above are given the same reference numerals, and the description of those parts will be omitted as appropriate.

[0150] The fourth configuration example in FIG. 14 is common to the third configuration example shown in FIG. 13 in that the PD upper region 223 has a substrate interface and an anti-reflection film 221 with a moth-eye structure.

[0151] On the other hand, the fourth configuration example in FIG. 14 is common to the second configuration example shown in FIG.

[0152] 14 includes both the inter-pixel isolation portion 211 of the second configuration example and the semiconductor substrate 41 with the moth-eye structure and the anti-reflection film 221 of the third configuration example. Other points are similar to those of the second or third configuration example.

[0153] In the third and fourth configuration examples, by using a back-illuminated pixel structure, a sufficient aperture ratio can be ensured compared to the front-illuminated type, and the quantum efficiency (QE) × aperture ratio (FF) can be maximized.

[0154] Furthermore, by providing a light-shielding member (reflective member) 63 on a predetermined metal film M of the multilayer wiring layer 42, the sensitivity of the pixel 10 to infrared light can be improved and the erroneous detection of light by neighboring pixels can be prevented.

[0155] <11. Cross-sectional view of the fifth configuration example of the pixel> FIG. 15 is a cross-sectional view showing a fifth configuration example of the pixel 10. As shown in FIG.

[0156] In FIG. 15, the parts corresponding to those in the first to fourth configuration examples described above are given the same reference numerals, and the description of those parts will be omitted as appropriate.

[0157] In the above-described first to fourth configuration examples, the inter-pixel separator 61 or the inter-pixel separator 211 provided in the pixel boundary portion 44 may be omitted.

[0158] For example, if the inter-pixel isolation section 61 of the third configuration example or the inter-pixel isolation section 211 of the fourth configuration example is omitted, a structure as shown in FIG. 15 is obtained.

[0159] 15 has a configuration in which the inter-pixel isolation portion 61 of the third configuration example or the inter-pixel isolation portion 211 of the fourth configuration example is omitted, and the anti-reflection film 221 is formed flat in the pixel boundary portion 44. The other configurations are similar to those of the third or fourth configuration example.

[0160] <Perspective view of the moth-eye structure> FIG. 16A is a perspective view of a moth-eye structure formed in the PD upper region 223 of the semiconductor substrate 41. FIG.

[0161] The moth-eye structure of the semiconductor substrate 41 is configured, for example, as shown in A of Figure 16, in which a plurality of pyramidal regions of approximately the same shape and size, each having a vertex on the semiconductor substrate 41 side, are arranged regularly (in a lattice pattern).

[0162] In addition, in A of FIG. 16, the upper side of the semiconductor substrate 41 is the light incident side, that is, the on-chip lens 47 side.

[0163] The moth-eye structure is an inverted pyramid structure formed on the light incident surface side of the semiconductor substrate 41, in which a plurality of quadrangular pyramid-shaped regions having an apex on the photodiode PD side are regularly arranged. The base of each quadrangular pyramid is square, and the semiconductor substrate 41 is carved so that each quadrangular pyramid-shaped region is convex on the photodiode PD side. In A of FIG. 16, for example, the portion indicated by the arrow W51 is a concave portion at the apex portion on the photodiode PD side of each quadrangular pyramid region. The concave portion indicated by the arrow W51 has a curvature, for example, a rounded shape.

[0164] In addition to each recess of each quadrangular pyramid of the moth-eye structure, the hypotenuse of each quadrangular pyramid region, which is the hatched portion in FIG. 16B, may also have a certain degree of curvature. By providing a curvature to the oblique side portion in this manner, the effect of suppressing uneven formation and peeling of the planarizing film 46 can be further improved.

[0165] FIG. 17 is a perspective view showing another example of the moth-eye structure of the semiconductor substrate 41. In FIG.

[0166] In FIG. 16, an example has been described in which the moth-eye structure is an inverted pyramid structure made up of a quadrangular pyramid region having an apex on the photodiode PD side. However, for example, as shown in FIG. 17, a normal pyramid structure may also be used.

[0167] 17A, the moth-eye structure is formed on the light incident surface of the semiconductor substrate 41. This moth-eye structure has a regular pyramidal structure in which a plurality of quadrangular pyramidal regions having apexes on the on-chip lens 47 side, which is the side where light is incident, are regularly arranged, that is, in a lattice pattern.

[0168] 17A, the multiple pyramidal regions have substantially the same shape and size, and the base of each pyramid is square. Furthermore, the semiconductor substrate 41 is dug to form the pyramidal regions so that each pyramidal region is convex on the side opposite to the photodiode PD.

[0169] For example, the portion indicated by the arrow W71 is a recess in the base portion on the photodiode PD side of each quadrangular pyramid region. As in the example shown in Fig. 16, the recess indicated by the arrow W71 has a rounded shape with a curvature at the portion convex toward the photodiode PD side when viewed in a cross section substantially parallel to the direction from the light incident side of the semiconductor substrate 41 toward the photodiode PD.

[0170] The hatched portion of the base of each upwardly convex quadrangular pyramid in B of Figure 17 can be formed to have a curvature. In this case, as in the example shown in Figure 16, uneven formation and peeling of the planarization film 46 formed on the semiconductor substrate 41 can be suppressed.

[0171] FIG. 18 is a perspective view showing still another example of the moth-eye structure of the semiconductor substrate 41. As shown in FIG.

[0172] The moth-eye structure may be such that the bottom surface of the minute concave and convex portions is rectangular, as shown in A of FIG.

[0173] The moth-eye structure of A in FIG. 18 is formed on the light incident surface side of the semiconductor substrate 41, and has a long linear recess in the lengthwise direction (vertical direction) or widthwise direction (horizontal direction) of the pixel 10.

[0174] More specifically, the moth-eye structure of A in Figure 18 has a sawtooth shape when viewed in cross section in the same direction as the cross-sectional views of Figures 13 to 15, and is obtained by arranging a plurality of triangular prisms of approximately the same shape and size in one direction with one apex of the triangle and one rectangular face of the triangular prism facing the photodiode PD.

[0175] In A of Fig. 18, for example, the portion indicated by the arrow W91 is a concave portion, and the portion indicated by the arrow W92 is a convex portion. The hatched portion of each concave portion has a rounded shape with a predetermined curvature. Therefore, in this example as well, it is possible to suppress uneven formation and peeling of the planarization film 46 formed on the semiconductor substrate 41.

[0176] In addition, the moth-eye structure of the semiconductor substrate 41 may be configured in such a way that pyramidal shapes of approximately the same size are regularly arranged, or may be configured in such a way that pyramidal shapes of different sizes are irregularly arranged, as shown in FIG. 18B.

[0177] 18B, a pyramid structure is formed in which pyramid-shaped regions each having an apex on the side of the on-chip lens 47 are arranged irregularly. The sizes of the pyramid regions are not all the same. In other words, the sizes and arrangement of the pyramids are random.

[0178] For example, the portions indicated by the arrows W93 and W94 are recessed portions, and these recessed portions have a curvature and a rounded shape. This makes it possible to suppress uneven formation and peeling of the planarization film 46 formed on the semiconductor substrate 41.

[0179] FIG. 18B shows a moth-eye structure having a normal pyramid structure in which a plurality of quadrangular pyramid regions having an apex on the on-chip lens 47 side are randomly arranged. However, it is of course possible to use the inverted pyramid structure shown in FIG. 16 in which the sizes and arrangement of the plurality of quadrangular pyramid regions are random.

[0180] The moth-eye structure of the semiconductor substrate 41 formed in the PD upper region 223 can be configured, for example, as shown in Figures 16 to 18. This can mitigate a sudden change in refractive index at the substrate interface and reduce the effect of reflected light.

[0181] In the third to fifth configuration examples in which the moth-eye structure is adopted, if the anti-reflection effect of the moth-eye structure is sufficient, the anti-reflection film 221 thereon may be omitted.

[0182] <12. Cross-sectional view of the sixth configuration example of the pixel> FIG. 19 is a cross-sectional view showing a sixth configuration example of the pixel 10. As shown in FIG.

[0183] In FIG. 19, the parts corresponding to those in the first to fifth configuration examples described above are given the same reference numerals, and the description of those parts will be omitted as appropriate.

[0184] In the above-mentioned first to fifth configuration examples, the light receiving element 1 is configured using only one semiconductor substrate, i.e., the semiconductor substrate 41, but in the sixth configuration example of Fig. 19, the light receiving element 1 is configured using two semiconductor substrates, the semiconductor substrate 41 and the semiconductor substrate 301. In the following description, for ease of understanding, the semiconductor substrate 41 and the semiconductor substrate 301 are also referred to as the first substrate 41 and the second substrate 301, respectively.

[0185] 19, an inter-pixel light-shielding film 45, a planarization film 46, and an on-chip lens 47 are formed on the light incident surface side of the first substrate 41, similarly to the first configuration example of FIG 2. An inter-pixel isolation portion 61 is also formed in a pixel boundary portion 44 on the back surface side of the first substrate 41, similarly to the first configuration example of FIG 2.

[0186] Also, the first substrate 41 has a photodiode PD, which is a photoelectric conversion unit, formed in pixel units, and two transfer transistors TRG1 and TRG2 and floating diffusion regions FD1 and FD2, which serve as charge storage units, formed on the surface side of the first substrate 41.

[0187] On the other hand, a difference from the first configuration example in FIG. 2 is that insulating layer 313 of wiring layer 311 on the front surface side of first substrate 41 is bonded to insulating layer 312 of second substrate 301.

[0188] The wiring layer 311 of the first substrate 41 includes at least one metal film M, and the metal film M is used to form a light shielding member 63 in a region located below the formation region of the photodiode PD.

[0189] Pixel transistors Tr1 and Tr2 are formed on the interface opposite to the insulating layer 312 side, which is the bonding surface side of the second substrate 301. The pixel transistors Tr1 and Tr2 are, for example, an amplification transistor AMP and a selection transistor SEL.

[0190] That is, in the first to fifth configuration examples configured using only one semiconductor substrate 41 (first substrate 41), all pixel transistors, namely, the transfer transistor TRG, the switching transistor FDG, the amplification transistor AMP, and the selection transistor SEL, were formed on the semiconductor substrate 41, whereas in the light receiving element 1 of the sixth configuration example configured using a stacked structure of two semiconductor substrates, the pixel transistors other than the transfer transistor TRG, i.e., the switching transistor FDG, the amplification transistor AMP, and the selection transistor SEL, are formed on the second substrate 301.

[0191] A multilayer wiring layer 321 having at least two metal films M is formed on the side of the second substrate 301 opposite to the first substrate 41 side. The multilayer wiring layer 321 includes a first metal film M11, a second metal film M12, and an interlayer insulating film 333.

[0192] A transfer drive signal TRG1g that controls the transfer transistor TRG1 is supplied from a first metal film M11 of the second substrate 301 to a gate electrode of the transfer transistor TRG1 of the first substrate 41 by a TSV (Through Silicon Via) 331-1 that penetrates the second substrate 301. A transfer drive signal TRG2g that controls the transfer transistor TRG2 is supplied from a first metal film M11 of the second substrate 301 to a gate electrode of the transfer transistor TRG2 of the first substrate 41 by a TSV 331-2 that penetrates the second substrate 301.

[0193] Similarly, the charge accumulated in the floating diffusion region FD1 is transferred from the first substrate 41 side to the first metal film M11 of the second substrate 301 by a TSV 332-1 penetrating the second substrate 301. The charge accumulated in the floating diffusion region FD2 is also transferred from the first substrate 41 side to the first metal film M11 of the second substrate 301 by a TSV 332-2 penetrating the second substrate 301.

[0194] The wiring capacitance 64 is formed in a region (not shown) of the first metal film M11 or the second metal film M12. The metal film M in which the wiring capacitance 64 is formed is formed with a high wiring density in order to form capacitance, while the metal film M connected to the gate electrodes of the transfer transistor TRG, the switching transistor FDG, and the like is formed with a low wiring density in order to reduce induced current. The wiring layer (metal film M) connected to the gate electrode may be configured to be different for each pixel transistor.

[0195] As described above, the pixel 10 according to the sixth configuration example can be configured by stacking two semiconductor substrates, the first substrate 41 and the second substrate 301, and pixel transistors other than the transfer transistor TRG are formed on the second substrate 301, which is different from the first substrate 41 having the photoelectric conversion unit. In addition, the vertical drive unit 22 that controls the driving of the pixel 10, the pixel drive line 28, the vertical signal line 29 that transmits the detection signal, and the like are also formed on the second substrate 301. This allows the pixel to be miniaturized, and increases the degree of freedom in BEOL (Back End Of Line) design.

[0196] Also in the sixth configuration example, by using a back-illuminated pixel structure, a sufficient aperture ratio can be ensured compared to the front-illuminated type, and the quantum efficiency (QE) × aperture ratio (FF) can be maximized.

[0197] Furthermore, by providing a light shielding member (reflecting member) 63 in a region overlapping with the formation region of the photodiode PD of the wiring layer 311 closest to the first substrate 41, infrared light that has passed through the semiconductor substrate 41 without being photoelectrically converted in the semiconductor substrate 41 is reflected by the light shielding member 63 and made to enter the semiconductor substrate 41 again. This increases the amount of infrared light that is photoelectrically converted in the semiconductor substrate 41, and improves the quantum efficiency (QE), that is, the sensitivity of the pixel 10 to infrared light. Furthermore, it is possible to prevent infrared light that has passed through the semiconductor substrate 41 without being photoelectrically converted in the semiconductor substrate 41 from entering the second substrate 301 side.

[0198] <Manufacturing method of the sixth configuration example> Next, a manufacturing method of the sixth configuration example will be described with reference to FIG.

[0199] First, as shown in A of FIG. 20, the photodiode PD, which is a photoelectric conversion unit, and the floating diffusion region FD are formed in units of pixels in a predetermined region of the first substrate 41, and then the gate electrode 351 of the transfer transistor TRG is formed.

[0200] Next, as shown in FIG. 20B, after an insulating film 361 is formed on the gate electrode 351 of the transfer transistor TRG and the upper surface of the first substrate 41, a light shielding member 63 is patterned and formed in correspondence with the region of the photodiode PD.

[0201] 20C, an insulating film is further laminated on the light shielding member 63 and the insulating film 361 to form an insulating layer 313, and a wiring layer 311 is formed on the front surface side of the first substrate 41. Then, an insulating layer 312 on the rear surface side of the second substrate 301, on which pixel transistors Tr1 and Tr2 such as the amplification transistor AMP and the selection transistor SEL are formed in advance, is bonded to the insulating layer 313 of the first substrate 41.

[0202] 20D, an insulating layer 362 is formed on the upper surface of the second substrate 301, and then trenches 371-1 and 371-2 are formed for contacts of the gate electrodes of the pixel transistors Tr1 and Tr2. In addition, trenches 372-1, 372-2, 373-1, and 373-2 that penetrate the second substrate 301 are formed in portions that need to electrically connect the first substrate 41 and the second substrate 301, such as the gate electrodes of the transfer transistors TRG1 and TRG2 and the floating diffusion regions FD1 and FD2.

[0203] 20E, a metal material such as tungsten (W) is filled into the trenches 371-1 and 371-2 and the trenches 372-1, 372-2, 373-1, and 373-2, thereby forming the TSVs 331-1, 331-2, 332-1, and 332-2.

[0204] Next, as shown in FIG. 20F, a first metal film M11, a second metal film M12, and an insulating layer are formed on the insulating layer 362, and the multilayer wiring layer 321 is formed.

[0205] After F in FIG. 20, an anti-reflection film 43, an on-chip lens 47, and the like are formed on the rear surface side, which is the light incident surface, of the first substrate 41, thereby completing the light receiving element 1 in FIG.

[0206] Note that the sixth configuration example shown in FIG. 19 is a configuration in which the first configuration example shown in FIG. 2 is modified into a stacked structure of two semiconductor substrates, but it is of course also possible to modify the other configuration examples described above, i.e., the second to fifth configuration examples, into a stacked structure of two semiconductor substrates.

[0207] <13.4 tap pixel configuration example> The pixel 10 according to the first to sixth configuration examples has a so-called two-tap pixel structure in which, for one photodiode PD, there are two transfer transistors TRG1 and TRG2 as transfer gates, and there are two floating diffusion regions FD1 and FD2 as charge storage sections, and the charge generated in the photodiode PD is distributed to the two floating diffusion regions FD1 and FD2.

[0208] In contrast, pixel 10 may have a so-called 4-tap pixel structure in which the pixel has four transfer transistors TRG1 to TRG4 and floating diffusion regions FD1 to FD4 for one photodiode PD, and the charge generated in the photodiode PD is distributed to the four floating diffusion regions FD1 to FD4.

[0209] FIG. 21 is a plan view of a pixel 10 in a four-tap pixel structure.

[0210] The pixel 10 includes four first transfer transistors TRGa, four second transfer transistors TRGb, four reset transistors RST, four amplification transistors AMP, and four selection transistors SEL.

[0211] Outside the photodiode PD, along each of the four sides of the rectangular pixel 10, a set of a first transfer transistor TRGa, a second transfer transistor TRGb, a reset transistor RST, an amplification transistor AMP, and a selection transistor SEL are arranged in a straight line.

[0212] In Figure 21, each set of a first transfer transistor TRGa, a second transfer transistor TRGb, a reset transistor RST, an amplification transistor AMP, and a selection transistor SEL arranged along each of the four sides of a rectangular pixel 10 is distinguished by assigning a number from 1 to 4.

[0213] As described above, the pixel 10 can be structured to distribute the charge generated by the photodiode PD over two taps, or it can be structured to distribute the charge over four taps, and is not limited to two taps, but can also be structured to distribute the charge over three or more taps.

[0214] For example, when the pixel 10 has a two-tap structure, the phase (light receiving timing) of the first tap and the second tap is shifted by 180 degrees, thereby distributing the generated charge to two floating diffusion regions FD. On the other hand, when the pixel 10 has a four-tap structure, the phase (light receiving timing) of the first to fourth taps is shifted by 90 degrees each, thereby distributing the generated charge to four floating diffusion regions FD. Then, the distance to the object can be obtained based on the distribution ratio of the charges accumulated in the four floating diffusion regions FD.

[0215] <14. Example of distance measurement module configuration> FIG. 22 is a block diagram showing an example of the configuration of a distance measuring module that outputs distance measurement information using the above-mentioned light receiving element 1.

[0216] The distance measurement module 500 includes a light emitting unit 511 , a light emitting control unit 512 , and a light receiving unit 513 .

[0217] The light emitting unit 511 has a light source that emits light of a predetermined wavelength, and emits irradiation light whose brightness periodically changes to irradiate an object. For example, the light emitting unit 511 has a light emitting diode that emits infrared light with a wavelength in the range of 780 nm to 1000 nm as a light source, and generates the irradiation light in synchronization with a light emission control signal CLKp of a rectangular wave supplied from the light emission control unit 512.

[0218] Note that the light emission control signal CLKp is not limited to a square wave as long as it is a periodic signal. For example, the light emission control signal CLKp may be a sine wave.

[0219] The light emission control unit 512 supplies a light emission control signal CLKp to the light emitter 511 and the light receiver 513 to control the timing of irradiation of the light. The frequency of the light emission control signal CLKp is, for example, 20 megahertz (MHz). Note that the frequency of the light emission control signal CLKp is not limited to 20 megahertz (MHz) and may be 5 megahertz (MHz) or the like.

[0220] The light receiving unit 513 receives light reflected from an object, calculates distance information for each pixel based on the light receiving result, and generates and outputs a depth image in which the depth value corresponding to the distance to the object (subject) is stored as a pixel value.

[0221] The light receiving section 513 uses a light receiving element 1 having a pixel structure according to any one of the first to sixth configuration examples described above. For example, the light receiving element 1 serving as the light receiving section 513 calculates distance information for each pixel from a signal intensity according to the charge distributed to the floating diffusion region FD1 or FD2 of each pixel 10 in the pixel array section 21 based on the light emission control signal CLKp. The number of taps of the pixel 10 may be, for example, four taps as described above.

[0222] As described above, the light receiving element 1 having any of the pixel structures of the first to sixth configuration examples described above can be incorporated as the light receiving unit 513 of the distance measuring module 500 that obtains and outputs distance information to a subject by the indirect ToF method. This can improve the distance measuring characteristics of the distance measuring module 500.

[0223] <15. Examples of electronic device configurations> In addition to being applicable to the distance measurement module as described above, the light receiving element 1 can also be applied to various electronic devices such as imaging devices such as digital still cameras and digital video cameras with distance measurement functions, and smartphones with distance measurement functions.

[0224] FIG. 23 is a block diagram showing a configuration example of a smartphone as an electronic device to which the present technology is applied.

[0225] 23, the smartphone 601 includes a distance measuring module 602, an imaging device 603, a display 604, a speaker 605, a microphone 606, a communication module 607, a sensor unit 608, a touch panel 609, and a control unit 610, which are connected via a bus 611. In addition, the control unit 610 has functions as an application processing unit 621 and an operation system processing unit 622 by the CPU executing a program.

[0226] 22 is applied to the distance measurement module 602. For example, the distance measurement module 602 is disposed on the front surface of a smartphone 601, and by performing distance measurement on the user of the smartphone 601, the distance measurement module 602 can output depth values ​​of the surface shapes of the user's face, hands, fingers, and the like as distance measurement results.

[0227] The imaging device 603 is disposed on the front side of the smartphone 601, and captures an image of the user of the smartphone 601 as a subject, thereby obtaining an image of the user. Although not shown, the imaging device 603 may also be disposed on the back side of the smartphone 601.

[0228] The display 604 displays an operation screen for performing processing by the application processing unit 621 and the operation system processing unit 622, images captured by the imaging device 603, etc. The speaker 605 and the microphone 606 output the voice of the other party and pick up the voice of the user, for example, when making a call using the smartphone 601.

[0229] The communication module 607 performs network communication via a communication network such as the Internet, a public telephone line network, a wide area communication network for wireless mobile devices such as a so-called 4G line or 5G line, a Wide Area Network (WAN) or a Local Area Network (LAN), and short-range wireless communication such as Bluetooth (registered trademark) or NFC (Near Field Communication). The sensor unit 608 senses speed, acceleration, proximity, etc., and the touch panel 609 acquires a touch operation by a user on an operation screen displayed on the display 604.

[0230] The application processing unit 621 performs processing for providing various services by the smartphone 601. For example, the application processing unit 621 can perform processing for creating a computer-graphics-based face that virtually reproduces the user's facial expression based on the depth value supplied from the distance measurement module 602, and displaying the face on the display 604. In addition, the application processing unit 621 can perform processing for creating, for example, three-dimensional shape data of any stereoscopic object based on the depth value supplied from the distance measurement module 602.

[0231] The operation system processing unit 622 performs processing for realizing basic functions and operations of the smartphone 601. For example, the operation system processing unit 622 can perform processing for authenticating the face of the user and unlocking the smartphone 601 based on the depth value supplied from the distance measurement module 602. In addition, the operation system processing unit 622 can perform processing for recognizing, for example, a gesture of the user based on the depth value supplied from the distance measurement module 602 and inputting various operations according to the gesture.

[0232] In the smartphone 601 configured in this manner, by applying the above-mentioned ranging module 500 as the ranging module 602, it is possible to perform processes such as measuring and displaying the distance to a specified object, and creating and displaying three-dimensional shape data of the specified object.

[0233] <16. Application examples for mobile devices> The technology according to the present disclosure (the present technology) can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving body such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility device, an airplane, a drone, a ship, a robot, etc.

[0234] FIG. 24 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a moving object control system to which the technology according to the present disclosure can be applied.

[0235] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 24, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also, as functional configurations of the integrated control unit 12050, a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (interface) 12053 are illustrated.

[0236] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle in accordance with various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle.

[0237] The body system control unit 12020 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 12020. The body system control unit 12020 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.

[0238] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle and receives the captured image. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for a person, a car, an obstacle, a sign, or characters on a road surface, based on the received image.

[0239] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of light received. The imaging unit 12031 can output the electrical signal as an image, or as distance measurement information. The light received by the imaging unit 12031 may be visible light or invisible light such as infrared light.

[0240] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, or may determine whether the driver is dozing.

[0241] The microcomputer 12051 can calculate control target values ​​for the driving force generating device, the steering mechanism, or the braking device based on the information inside and outside the vehicle acquired by the outside-of-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output a control command to the drive system control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc.

[0242] In addition, the microcomputer 12051 can perform cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on the driver's operation, by controlling the driving force generating device, steering mechanism, braking device, etc. based on information about the surroundings of the vehicle acquired by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.

[0243] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the outside-vehicle information detection unit 12030. For example, the microcomputer 12051 can control the headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside-vehicle information detection unit 12030, and perform cooperative control for the purpose of preventing glare, such as switching from high beams to low beams.

[0244] The audio / video output unit 12052 transmits at least one output signal of audio and video to an output device capable of visually or audibly notifying the passengers of the vehicle or the outside of the vehicle of information. In the example of Fig. 24, an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are exemplified as the output device. The display unit 12062 may include at least one of an on-board display and a head-up display, for example.

[0245] FIG. 25 is a diagram showing an example of the installation position of the imaging unit 12031.

[0246] In FIG. 25, a vehicle 12100 has imaging units 12101, 12102, 12103, 12104, and 12105 as an imaging unit 12031.

[0247] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided at positions such as the front nose, side mirrors, rear bumper, back door, and the upper part of the windshield inside the vehicle cabin of the vehicle 12100. The imaging unit 12101 provided at the front nose and the imaging unit 12105 provided at the upper part of the windshield inside the vehicle cabin mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided at the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided at the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The images of the front acquired by the imaging units 12101 and 12105 are mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.

[0248] 25 shows an example of the imaging ranges of the imaging units 12101 to 12104. Imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, an overhead image of the vehicle 12100 viewed from above is obtained by superimposing the image data captured by the imaging units 12101 to 12104.

[0249] At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera made up of a plurality of imaging elements, or may be an imaging element having pixels for detecting a phase difference.

[0250] For example, the microcomputer 12051 can extract, as a preceding vehicle, a three-dimensional object that is the closest three-dimensional object on the travel path of the vehicle 12100 and travels at a predetermined speed (for example, 0 km / h or more) in approximately the same direction as the vehicle 12100, by calculating the distance to each three-dimensional object in the imaging ranges 12111 to 12114 and the change over time of this distance (relative speed with respect to the vehicle 12100) based on the distance information obtained from the imaging units 12101 to 12104. Furthermore, the microcomputer 12051 can set a vehicle distance to be secured in advance in front of the preceding vehicle, and perform automatic brake control (including follow-up stop control) and automatic acceleration control (including follow-up start control). In this way, cooperative control can be performed for the purpose of automatic driving that travels autonomously without relying on the driver's operation.

[0251] For example, the microcomputer 12051 classifies and extracts three-dimensional object data on three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and can use the data for automatic obstacle avoidance. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. Then, the microcomputer 12051 determines a collision risk indicating the risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and a collision is possible, the microcomputer 12051 can provide driving assistance for collision avoidance by outputting an alarm to the driver via the audio speaker 12061 or the display unit 12062, or by performing forced deceleration or avoidance steering via the drive system control unit 12010.

[0252] At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian is present in the images captured by the imaging units 12101 to 12104. The recognition of a pedestrian is performed, for example, by a procedure of extracting feature points in the images captured by the imaging units 12101 to 12104 as infrared cameras, and a procedure of performing pattern matching processing on a series of feature points that indicate the contour of an object to determine whether or not the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the images captured by the imaging units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular outline for emphasis on the recognized pedestrian. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating the pedestrian at a desired position.

[0253] An example of a vehicle control system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to the vehicle outside information detection unit 12030 and the imaging unit 12031 among the above-described configurations. Specifically, the light receiving element 1 or the distance measuring module 500 can be applied to the distance detection processing block of the vehicle outside information detection unit 12030 and the imaging unit 12031. By applying the technology according to the present disclosure to the vehicle outside information detection unit 12030 and the imaging unit 12031, it is possible to measure the distance to an object such as a person, a car, an obstacle, a sign, or a character on a road surface with high accuracy, and it is possible to reduce the driver's fatigue and increase the safety of the driver and the vehicle using the obtained distance information.

[0254] The embodiments of the present technology are not limited to the above-described embodiments, and various modifications are possible without departing from the gist of the present technology.

[0255] Furthermore, in the above-described light receiving element 1, an example has been described in which electrons are used as signal carriers, but holes generated by photoelectric conversion may also be used as signal carriers.

[0256] For example, the light receiving element 1 described above may employ a configuration in which all or part of each embodiment is combined.

[0257] Furthermore, the effects described in this specification are merely examples and are not limiting, and other effects may also be obtained.

[0258] The present technology can also be configured as follows. (1) An on-chip lens; A wiring layer; a semiconductor layer disposed between the on-chip lens and the wiring layer; The semiconductor layer is A photodiode; a first transfer transistor that transfers the charge generated by the photodiode to a first charge accumulation unit; a second transfer transistor that transfers the charge generated by the photodiode to a second charge accumulation unit; an inter-pixel isolation portion that isolates the semiconductor layer between adjacent pixels in at least a portion of the semiconductor layer in a depth direction; Equipped with the wiring layer has at least one layer including a light shielding member; The light blocking member is provided so as to overlap the photodiode in a plan view. Photodetector. (2) The inter-pixel isolation portion is configured to penetrate the semiconductor layer in the depth direction. The light receiving element according to (1) above. (3) The semiconductor layer is A first additional capacitance; and a first switching transistor that connects the first additional capacitance to the first charge storage unit; A second additional capacitance; and a second switching transistor that connects the second additional capacitance to the second charge storage unit; Further equipped The light receiving element according to (1) or (2). (4) The first additional capacitance and the second additional capacitance are constituted by the wiring capacitance of the wiring layer. The light receiving element according to (3) above. (5) the wiring layer includes a layer in which the light blocking member is formed and a layer in which the wiring capacitance is formed, The wiring capacitance is configured to be formed in a layer farther from the semiconductor layer than the light blocking member. The light receiving element according to (4) above. (6) The light blocking member is made up of two layers. The light receiving element according to any one of (1) to (5). (7) The semiconductor layer further includes an inter-pixel light-shielding film at a pixel boundary portion. The light receiving element according to any one of (1) to (6). (8) The region of the semiconductor layer above the photodiode has a moth-eye structure in which minute projections and recesses are formed. The light receiving element according to any one of (1) to (7). (9) the semiconductor layer is bonded to a second semiconductor layer, which is another semiconductor layer, via the wiring layer; The second semiconductor layer has at least an amplifying transistor and a selecting transistor. The light receiving element according to any one of (1) to (8). (10) An on-chip lens; A wiring layer; a semiconductor layer disposed between the on-chip lens and the wiring layer; The semiconductor layer is A photodiode; a first transfer transistor that transfers the charge generated by the photodiode to a first charge accumulation unit; a second transfer transistor that transfers the charge generated by the photodiode to a second charge accumulation unit; an inter-pixel isolation portion that isolates the semiconductor layer between adjacent pixels at a depth of at least a portion of the semiconductor layer; Equipped with the wiring layer has at least one layer including a light shielding member; The light blocking member is provided so as to overlap the photodiode in a plan view. A light receiving element; A light source that emits irradiation light whose brightness periodically changes; a light emission control unit that controls the irradiation timing of the irradiation light; A ranging module comprising: (11) An on-chip lens; A wiring layer; a semiconductor layer disposed between the on-chip lens and the wiring layer; The semiconductor layer is A photodiode; a first transfer transistor that transfers the charge generated by the photodiode to a first charge accumulation unit; a second transfer transistor that transfers the charge generated by the photodiode to a second charge accumulation unit; an inter-pixel isolation portion that isolates the semiconductor layer between adjacent pixels at a depth of at least a portion of the semiconductor layer; Equipped with the wiring layer has at least one layer including a light shielding member; The light blocking member is provided so as to overlap the photodiode in a plan view. A light receiving element; A light source that emits irradiation light whose brightness periodically changes; a light emission control unit that controls the irradiation timing of the irradiation light; A ranging module comprising: An electronic device comprising: [Explanation of symbols]

[0259] 1 light receiving element, 10 pixel, PD photodiode, RST reset transistor, SEL selection transistor, TRG transfer transistor, FD floating diffusion region, FDG switching transistor, FDL additional capacitance, M metal film, MEM memory, OFG charge discharge transistor, 21 pixel array section, 41 semiconductor substrate (first substrate), 42 multilayer wiring layer, 43 anti-reflection film, 44 pixel boundary section (boundary section), 45 inter-pixel light shielding film, 47 on-chip lens, 61 inter-pixel isolation section, 63 light shielding member (reflection member), 64 wiring capacitance, 211 inter-pixel isolation section, 221 anti-reflection film, 223 PD upper region, 301 semiconductor substrate (second substrate), 321 multilayer wiring layer, 500 distance measurement module, 511 light emitting section, 512 light emitting control section, 513 Light receiving unit, 601 smartphone, 602 distance measuring module

Claims

1. An on-chip lens; A first wiring layer; a first semiconductor layer disposed between the on-chip lens and the first wiring layer; The first semiconductor layer is A photodiode; a first transfer transistor that transfers charges generated by the photodiode from the photodiode to a first charge accumulation unit; a second transfer transistor that transfers the charge generated by the photodiode from the photodiode to a second charge accumulation unit; an inter-pixel isolation portion that isolates the first semiconductor layer between adjacent pixels over at least a portion of the first semiconductor layer in a depth direction; Equipped with The first semiconductor layer is bonded to a second semiconductor layer, which is another semiconductor layer, via the first wiring layer; The second semiconductor layer is a first switching transistor for connecting a first additional capacitance to the first charge storage unit; a second switching transistor for connecting a second additional capacitance to the second charge storage section; Equipped with the first wiring layer has at least one layer including a light shielding member; a region above the photodiode of the first semiconductor layer is configured with a moth-eye structure in which minute projections and recesses are formed, the light blocking member is provided so as to overlap the photodiode in a plan view, The first additional capacitance and the second additional capacitance are formed in a second wiring layer formed on the side of the second semiconductor layer opposite to the first semiconductor layer side. Photodetector.

2. The inter-pixel isolation portion is configured to penetrate the first semiconductor layer in a depth direction. The light receiving element according to claim 1 .

3. The first additional capacitance and the second additional capacitance are constituted by a wiring capacitance of the second wiring layer. The light receiving element according to claim 1 .

4. The light blocking member is made up of two layers. The light receiving element according to claim 1 .

5. The first semiconductor layer further includes an inter-pixel light shielding film at a pixel boundary portion. The light receiving element according to claim 1 .

6. The second semiconductor layer further includes an amplification transistor and a selection transistor. The light receiving element according to claim 1 .

7. An on-chip lens; A first wiring layer; a first semiconductor layer disposed between the on-chip lens and the first wiring layer; The first semiconductor layer is A photodiode; a first transfer transistor that transfers charges generated by the photodiode from the photodiode to a first charge accumulation unit; a second transfer transistor that transfers the charge generated by the photodiode from the photodiode to a second charge accumulation unit; an inter-pixel isolation portion that isolates the first semiconductor layer of adjacent pixels at a depth of at least a portion of the first semiconductor layer; Equipped with The first semiconductor layer is bonded to a second semiconductor layer, which is another semiconductor layer, via the first wiring layer; The second semiconductor layer is a first switching transistor for connecting a first additional capacitance to the first charge storage unit; a second switching transistor for connecting a second additional capacitance to the second charge storage section; Equipped with the first wiring layer has at least one layer including a light shielding member; a region above the photodiode of the first semiconductor layer is configured with a moth-eye structure in which minute projections and recesses are formed, the light blocking member is provided so as to overlap the photodiode in a plan view, The first additional capacitance and the second additional capacitance are formed in a second wiring layer formed on the side of the second semiconductor layer opposite to the first semiconductor layer side. A light receiving element; A light source that emits irradiation light whose brightness periodically changes; a light emission control unit that controls the irradiation timing of the irradiation light; A ranging module comprising:

8. An on-chip lens; A first wiring layer; a first semiconductor layer disposed between the on-chip lens and the first wiring layer; The first semiconductor layer is A photodiode; a first transfer transistor that transfers charges generated by the photodiode from the photodiode to a first charge accumulation unit; a second transfer transistor that transfers the charge generated by the photodiode from the photodiode to a second charge accumulation unit; an inter-pixel isolation portion that isolates the first semiconductor layer of adjacent pixels at a depth of at least a portion of the first semiconductor layer; Equipped with The first semiconductor layer is bonded to a second semiconductor layer, which is another semiconductor layer, via the first wiring layer; The second semiconductor layer is a first switching transistor for connecting a first additional capacitance to the first charge storage unit; a second switching transistor for connecting a second additional capacitance to the second charge storage section; Equipped with the first wiring layer has at least one layer including a light shielding member; a region above the photodiode of the first semiconductor layer is configured with a moth-eye structure in which minute projections and recesses are formed, the light blocking member is provided so as to overlap the photodiode in a plan view, The first additional capacitance and the second additional capacitance are formed in a second wiring layer formed on the side of the second semiconductor layer opposite to the first semiconductor layer side. A light receiving element; A light source that emits irradiation light whose brightness periodically changes; a light emission control unit that controls the irradiation timing of the irradiation light; A ranging module comprising: An electronic device comprising:

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