TRANSPORT UNIT, ARTICLE TRANSPORT SYSTEM, AND CONTROL METHOD FOR TRANSPORT UNIT

Abstract

To provide a transferring unit, an article transferring system, and a control method of the transferring unit, which are capable of stably transferring an article.SOLUTION: The present invention provides a transferring unit traveling on a rail provided along a ceiling. The transferring unit includes: a body provided with a traveling driver; a traveling wheel rotated by receiving power from the traveling driver; a grip member configured to grip an article; a lifting member provided between the body and the grip member and configured to move the grip member in a vertical direction; and a controller. The controller lowers or raises the grip member while the transferring unit travels on the rail, and the controller can control the lifting member and the traveling driver so that the lowering or raising of the grip member is performed in a constant speed section in which the transferring unit travels at a constant speed.SELECTED DRAWING: Figure 10

Description

[Technical field]

[0001] The present invention relates to a transport unit, an article transport system, and a method for controlling a transport unit. [Background technology]

[0002] Generally, various processes such as deposition, photolithography, and etching are performed to manufacture semiconductor devices, and equipment for performing each of these processes is installed in a semiconductor manufacturing line. Substrates (e.g., wafers, glass) and other objects to be processed in the semiconductor device manufacturing process can be provided to each semiconductor processing equipment in a state of being housed in a container such as a FOUP or POD. In addition, the objects that have undergone the process can be collected from each semiconductor processing equipment into a container, and the collected container can be transported to the outside.

[0003] The containers are transported by a transport vehicle such as an Overhead Hoist Transport Apparatus (OHT). The transport vehicle runs on rails installed along the ceiling of the semiconductor manufacturing line. The transport vehicle transports the container containing the items to one of the load ports within the semiconductor processing equipment. The transport vehicle can also pick up the container containing the processed items from the load port and transport it outside or to another location within the semiconductor processing equipment.

[0004] FIG. 1 is a diagram showing a conventional method of transporting a container to a port by a transport vehicle. Referring to FIG. 1, a transport vehicle A such as an OHT generally includes a gripper G for gripping a container F, a belt B connected to the gripper G, and a lifter L for winding or loosening the belt B to raise or lower the gripper G. In addition, the transport vehicle A travels along a rail R. The transport vehicle A places the container F at a port P while traveling along the rail R. In FIG. 1, AP indicates the travel path of the transport vehicle A. In addition, in FIG. 1, GP indicates the movement path of the gripper G.

[0005] 1, the transport vehicle A moves to the top of the port P and stops there, the belt B is loosened to lower the gripper G and the container F, the gripper G is opened and closed to lower the container F to the port P, the belt B is wound up to raise the gripper G, and the transport vehicle A starts to move. However, this method requires the transport vehicle A to wait for a long time, which reduces the operating efficiency of the transport vehicle AP.

[0006] In order to solve this problem, as shown in FIG. 2, a method of winding or loosening the belt B while the transport vehicle A is traveling can be considered. In this case, the waiting time of the transport vehicle A can be shortened, and the operation efficiency of the transport vehicle A can be improved. However, in this method, the transport vehicle A travels with the length of the belt B increased, so the position of the gripper G connected to the belt B can change significantly. For example, FIG. 3 shows the change in the position x of the transport vehicle A according to time t, the speed v of the transport vehicle A according to time t, the change in the length l of the belt B according to time t, and the change in the angle θ of the belt B according to time t. The angle θ of the belt B means the angle between the axis perpendicular to the ground and the belt B. As shown in FIG. 3, when the length l of the belt B changes in the section t2 to t3 where the transport vehicle A accelerates and decelerates, the angle θ of the belt B changes significantly. In this case, the gripper G connected to the belt B also swings significantly. Furthermore, when the gripper G grips the container F, foreign matter such as particles may be generated inside the container F, causing contamination or damage to articles such as substrates. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Korean Patent Publication No. 10-2018-0048346 Summary of the Invention [Problem to be solved by the invention]

[0008] An object of the present invention is to provide a transport unit, an article transport system, and a method for controlling a transport unit that can transport articles stably.

[0009] Another object of the present invention is to provide a transport unit, an article transport system, and a method for controlling a transport unit that can minimize vibrations occurring in articles or containers in which the articles are stored.

[0010] Another object of the present invention is to provide a transport unit, an article transport system, and a control method for a transport unit that can shorten the transport time of an article or a container containing articles.

[0011] The object of the present invention is not limited to the present invention, and other objects not mentioned herein will be clearly understood by those having ordinary skill in the art to which the present invention pertains from the following description. [Means for solving the problem]

[0012] The present invention provides a transport unit that runs on a rail installed along a ceiling. The transport unit that runs on a rail installed along a ceiling includes a body having a travel driver, a travel wheel that is rotated by power transmitted from the travel driver, a grip member that grips an article, and a lift member that is provided between the body and the grip member and moves the grip member in a vertical direction. and a controller, wherein the controller controls the lifting member and the traveling driver so that the grip member is lowered or raised while the transport unit travels on the rail, and the lowering or raising of the grip member is performed in a constant speed section where the transport unit travels at a constant speed.

[0013] According to one embodiment, the lifting member may include a belt connected to the gripping member, and a lifting driver for winding or loosening the belt.

[0014] According to an embodiment, the controller may control the travel driver and the lift driver such that a length of the belt is fixed in the acceleration section or the deceleration section.

[0015] According to one embodiment, the controller can control the traveling driver to perform a vibration damping operation to damp the vibration of the item gripped by the gripping member in an acceleration section that increases the traveling speed of the transport unit or in a deceleration section that decreases the traveling speed of the transport unit.

[0016] According to one embodiment, the vibration damping operation may be an operation of changing the travel acceleration of the transport unit to a half period of the vibration period of the article.

[0017] According to one embodiment, the vibration damping operation may be an operation of changing a travel acceleration of the transport unit from a first acceleration to the second acceleration which is smaller than the first acceleration.

[0018] According to one embodiment, the vibration damping operation may be an operation of changing the traveling of the transport unit from a first accelerated traveling at the first acceleration to a constant speed traveling, and then changing from the constant speed traveling to a second accelerated traveling at the second acceleration.

[0019] According to one embodiment, the time during which the transport unit travels at the constant speed can be shorter than the time during which the transport unit travels at the first accelerated speed or the second accelerated speed.

[0020] The present invention also provides an article transport system for transporting containers containing articles along a ceiling of a manufacturing line in which semiconductor processing devices are continuously arranged. The article transport system includes a rail provided along the ceiling, a port configured to seat the container, and a transport unit traveling along the rail to transport the container to the port, the transport unit including a body having a travel driver, a traveling wheel rotated by power transmitted from the travel driver, a grip member for gripping the container, a lifting member provided between the body and the grip member for moving the grip member up and down, and a controller, and the lifting member and the travel driver can be controlled to lower or lift the grip member while the transport unit travels along the rail, and the lowering or lifting of the grip member is performed in a constant speed section in which the transport unit travels at a constant speed.

[0021] According to one embodiment, the lifting member may include a belt connected to the gripping member, and a lifting driver that winds or loosens the belt to change the length of the belt.

[0022] According to one embodiment, the controller can control the travel driver and the lift driver so that the length of the belt is fixed in an acceleration section in which the travel speed of the conveying unit is increased and in a deceleration section in which the travel speed of the conveying unit is decreased.

[0023] According to one embodiment, the controller can control the traveling driver to perform a vibration damping operation to damp the vibration of the item gripped by the gripping member in an acceleration section that increases the traveling speed of the transport unit or in a deceleration section that decreases the traveling speed of the transport unit.

[0024] According to one embodiment, the vibration damping operation may be an operation of changing the travel acceleration of the transport unit to a half period of the vibration period of the article.

[0025] According to one embodiment, the vibration damping operation may be an operation of changing a travel acceleration of the transport unit from a first acceleration to a second acceleration that is smaller than the first acceleration.

[0026] According to one embodiment, the vibration damping operation may be an operation of changing the traveling of the transport unit from a first accelerated traveling at the first acceleration to a constant speed traveling, and then changing the constant speed traveling to a second accelerated traveling at the second acceleration.

[0027] According to one embodiment, the time during which the transport unit travels at the constant speed can be shorter than the time during which the transport unit travels at the first accelerated speed or the second accelerated speed.

[0028] The present invention also provides a method for controlling a transport unit that travels along a rail installed along the ceiling of a semiconductor manufacturing line to transport a container containing substrates, the transport unit having a travel wheel that travels along the rail, a travel driver that transmits power to the travel wheel, a grip member that grips the container, a belt connected to the grip member, and an elevation driver that winds or loosens the belt to change the length of the belt. The control method may control the elevation driver to change the length of the belt in a constant speed section among a constant speed section in which the transport unit travels along the rail at a constant speed, an acceleration section in which the travel speed of the transport unit is increased, and a deceleration section in which the travel speed of the transport unit is decreased.

[0029] According to an embodiment, the lift driver may be controlled so that the length of the belt is fixed in the acceleration section and the deceleration section.

[0030] According to an embodiment, the travel driver may be controlled to perform a vibration damping operation for damping vibration of the article gripped by the gripping member in the acceleration section or the deceleration section.

[0031] According to one embodiment, the vibration damping operation may be an operation of changing the travel acceleration of the transport unit to a half period of the vibration period of the article.

[0032] The present invention also provides a method for controlling a transport unit, which travels along a rail installed along the ceiling of a semiconductor manufacturing line to transport a container containing substrates, and has a travel wheel that travels along the rail, a travel driver that transmits power to the travel wheel, a grip member that grips the container, and a lift driver that changes the height of the grip member, so that the transport unit performs the following operations: The operations include an operation of lowering the grip member before the transport unit reaches an upper portion of a port where the container is placed, an operation of the transport unit moving to an upper portion of the port while the height of the grip member is fixed, and an operation of the grip member loading the container into the port or unloading the container from the port.

[0033] According to one embodiment, the operation may further include an operation of the transport unit moving away from the top of the port while the height of the gripping member remains fixed, and an operation of raising the gripping member after the transport unit moves away from the top of the port.

[0034] According to one embodiment, the action of lowering the gripping member or the action of raising the gripping member can be performed while the transport unit is traveling.

[0035] According to one embodiment, the operation of lowering the gripping member or the operation of raising the gripping member may be performed while the transport unit travels at a constant speed.

[0036] According to one embodiment, the speed change of the transport unit can be performed while the height of the gripping members is fixed. Effect of the Invention

[0037] According to one embodiment of the present invention, it is possible to transport articles stably.

[0038] Furthermore, according to an embodiment of the present invention, it is possible to minimize vibrations occurring in the article or a container in which the article is stored.

[0039] Furthermore, according to one embodiment of the present invention, the transport time of an article or a container containing the article can be reduced.

[0040] The effects of the present invention are not limited to the effects described above, and effects not mentioned should be clearly understood by those having ordinary skill in the art to which the present invention pertains from this specification and the accompanying drawings. [Brief description of the drawings]

[0041] [Figure 1] 1 is a diagram showing a conventional method for transporting containers to a port using a transport vehicle. [Diagram 2] 1 is a diagram showing an improved manner in which a transport vehicle transports containers to a port. [Diagram 3] 3 is a graph showing a change in position of the transport vehicle, a change in speed of the transport vehicle, a change in belt length of the transport vehicle, and a change in belt angle of the transport vehicle in FIG. 2. [Figure 4] 1 is a diagram illustrating a schematic configuration of a semiconductor manufacturing line as viewed from above. [Diagram 5] 5 is a front view of the transport unit running on the rail in FIG. 4. [Figure 6] 5 is a side view of the transport unit running on the rail in FIG. 4. [Figure 7] 5 is a top view of the transport unit running on the rail in FIG. 4. [Figure 8] 1 is a top view of a transport unit according to the present invention, showing a shape in which the transport unit maintains its running direction in a branching area. [Figure 9] 1 is a top view of a transport unit according to the present invention, which changes its traveling direction in a branching area and travels in that direction; [Figure 10] 1 is a diagram showing a shape in which a transport unit of the present invention transports a container in which articles are stored. [Figure 11]4 is a graph showing the rotation speed of a traveling driver that rotates a traveling wheel of the present invention and the rotation speed of a lifting driver that winds or loosens a belt. [Figure 12] 5 is a graph showing a change in position of a transport unit, a change in speed of the transport unit, a change in belt length of the transport unit, and a change in belt angle of the transport unit according to the present invention. [Figure 13] 12 is a graph showing belt angle changes for illustrating the vibration damping operation of FIG. 11. [Figure 14] 12 is a graph showing belt angle changes for illustrating the vibration damping operation of FIG. 11. [Figure 15] 12 is a graph showing belt angle changes for illustrating the vibration damping operation of FIG. 11. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0042] Hereinafter, the embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present invention pertains can easily carry out the embodiments. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. In addition, in describing the preferred embodiments of the present invention in detail, if it is determined that a detailed description of related known functions or configurations may unnecessarily obscure the gist of the present invention, the detailed description will be omitted. In addition, the same reference numerals are used throughout the drawings for parts having similar functions and functions.

[0043] The term "comprising" an element does not mean excluding other elements, but may further include other elements, unless specifically stated to the contrary. In particular, the terms "comprising" or "having" are intended to specify the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and should be understood not to preclude the presence or possibility of addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0044] The singular expression includes the plural expression unless otherwise clearly expressed in the context. Also, in the drawings, the shapes and sizes of elements may be exaggerated for more clear explanation.

[0045] Terms such as "first" and "second" may be used to describe various components, but the components should not be limited by the terms. The terms may be used only to distinguish one component from another. For example, a first component may be referred to as a second component, and similarly, a second component may be referred to as a first component, without departing from the scope of the present invention.

[0046] When an element is referred to as being "coupled" or "connected" to another element, it should be understood that it is directly coupled or connected to the other element, but that there may be other elements in between. Conversely, when an element is referred to as being "directly coupled" or "directly connected" to another element, it should be understood that there are no other elements in between. Other expressions describing relationships between elements, such as "between" and "immediately between" or "adjacent to" and "directly adjacent to," should be interpreted similarly.

[0047] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the art to which the present invention belongs. Terms commonly used and previously defined should be interpreted as meanings consistent with the meanings they have in the context of the relevant art, and should not be interpreted as ideal or overly formal meanings unless expressly defined in this application.

[0048] The article transport system of the present embodiment may be used to transport a container. In particular, the article transport system of the present embodiment may transport a container in which an article is stored. The article may be a substrate such as a wafer, glass, or a reticle. The container in which the article is stored may be a Front Opening Unified Pod (FOUP) or a cassette. Also, the container in which the article is stored may be a pod (POD). Also, examples of the container in which the article is stored include a magazine for storing a plurality of printed circuit boards, a tray for storing a plurality of semiconductor packages, and the like.

[0049] In the following, an example will be described in which the article transport system transports a container containing substrates such as wafers to a semiconductor processing device arranged in a semiconductor manufacturing line. The article transport system will be described as an example in which the article transport system transports substrates used in manufacturing semiconductor devices. However, the present invention is not limited to this, and the article transport system of the present embodiment can be applied in the same or similar manner to various manufacturing lines requiring the transport of articles and / or containers containing articles.

[0050] Hereinafter, an embodiment of the present invention will be described in detail with reference to FIGS.

[0051] 4 is a diagram showing a schematic shape of a semiconductor manufacturing line seen from above. Referring to FIG. 4, an article transport system 1000 according to the present invention can transport a container 20 containing articles to a semiconductor manufacturing line in which semiconductor processing equipment 10 is continuously arranged. The article transport system 1000 can include a rail 300, a transport unit 500, and a port P, which will be described later. The port P can be a load port of the semiconductor manufacturing equipment 10 on which the container 20 is placed. Alternatively, the port P can be a port of a container storage device (not shown) that stores the container 20. Alternatively, the port P can be a buffer frame installed on the ceiling of the semiconductor manufacturing line.

[0052] The rail 300 provides a path along which a transport unit 500 (described later) travels. The rail 300 may include a traveling rail 310 and a branching rail 330. The rail 300 may be fixed to the ceiling of a semiconductor manufacturing line.

[0053] The transport unit 500 can be referred to as a vehicle or a transport vehicle. The transport unit 500 can be an overhead hoist vehicle. The transport unit 500 can grip the container 20. The transport unit 500 can travel along a defined path along the rail 300.

[0054] 4, the rail 300 is illustrated as being roughly hexagonal in shape, but the shape of the rail 300 may be variously modified, such as circular, rectangular, etc. The rail 300 may be provided along the ceiling of a semiconductor manufacturing line so that the semiconductor processing equipment 10 can be seen from above. The installation range of the rail 300 may be arranged in a wide area so that the semiconductor processing equipment 10 can be seen in its entirety.

[0055] FIG. 5 is a front view of the transport unit running on the rails in FIG. 4, FIG. 6 is a side view of the transport unit running on the rails in FIG. 4, and FIG. 7 is a top view of the transport unit running on the rails in FIG. 4.

[0056] 5-7, the article transport system 1000 may include the rail 300 and the transport unit 500, as described above.

[0057] The rail 300 may include a running rail 310 and a steering rail 330 .

[0058] The traveling rail 310 may provide a traveling path along which the transport unit 500 described below travels. Traveling wheels 520 of the transport unit 500 described below may come into contact with the traveling rail 310. A plurality of traveling rails 310 may be provided spaced apart from each other. For example, the traveling rail 310 may be provided in a pair. The pair of traveling rails 310 may be parallel to each other and provided at the same height.

[0059] The steering rail 330 can change the traveling direction of the transport unit 500, which will be described later. The steering rail 330 can be in contact with a steering wheel 532 of the transport unit 500, which will be described later. The steering rail 330 can include a straight branching rail 332 and a curved branching rail 334. The straight branching rail 332 can maintain the traveling path of the transport unit 500 in an area where the traveling rail 310 branches. In addition, the curved branching rail 334 can maintain the traveling path of the transport unit 500 in an area where the traveling rail 310 branches.

[0060] The transport unit 500 can travel on the rail 300. The transport unit 500 can travel on the traveling rail 310. The transport unit 500 can hold the container 20. The transport unit 500 can travel on the rail 300 while holding the container 20. The transport unit 500 can include a body 510, a traveling wheel 520, a steering member 530, a frame 540, a neck 550, a slider 560, a lifting member 570, a grip member 580, and a controller 590.

[0061] A traveling wheel 520, a steering member 530, and a neck 550 may be coupled to the body 510. The traveling wheel 520 may be rotatably coupled to the body 510. Also, the body 510 may be provided with a traveling driver 511 for rotating the traveling wheel 520. Also, the body 510 may be provided with a controller 590 for controlling the operation of the conveying unit 500. Also, the steering member 530 may be provided on an upper surface of the body 510. Also, the neck 550 may be rotatably coupled to the body 510.

[0062] The traveling driver 511 can transmit power to the traveling wheel 520 to rotate the traveling wheel 520. Also, a plurality of bodies 510 can be provided. Each body 510 can have the above-mentioned traveling driver 511. Also, each body 510 can have the above-mentioned traveling wheel 520, steering member 530, and neck 550 coupled thereto.

[0063] The traveling wheel 520 may be rotatably coupled to the body 510. The traveling wheel 520 may be rotated by power transmitted from the traveling driver 511. The traveling wheel 520 may be rotated by contacting the rail 300. The traveling wheel 520 may be coupled to the body 510. The traveling wheel 520 may be rotatably coupled to the body 510. The traveling wheel 520 may be in contact with the traveling rail 310 in the rail 300 and rotate to travel on the traveling rail 310. A plurality of traveling wheels 520 may be provided. The traveling wheels 520 may be provided in a pair. Any one of the traveling wheels 520 may be rotatably coupled to one side of the body 510, and the other of the traveling wheels 520 may be rotatably coupled to another side opposite to the one side of the body 510.

[0064] The steering member 530 may be provided on the upper part of the body 510. The steering member 530 may include a plurality of steering wheels 532 and a steering rail 534. The steering wheels 532 may be arranged along a direction parallel to the traveling direction of the transport unit 500 when viewed from above. Also, the length direction of the steering rail 534 may be parallel to a direction perpendicular to the traveling direction of the transport unit 500 when viewed from above. Also, the position of the steering wheels 532 may be changed along the length direction of the steering rail 534.

[0065] The frame 540 may have an internal space. The slider 560, the lifting member 570, and the grip member 580, which will be described later, may be provided in the internal space of the frame 540. The frame 540 may have a hexahedral shape with both sides and a bottom open. That is, the frame 540 may have a blocking plate at its front and rear. Therefore, when the conveying unit 500 moves, the held container 20 may be prevented from shaking due to air resistance. The frame 540 may be coupled to the body 510 via a neck 550. The neck 550 may be provided to be rotatable with respect to the body 510 and the frame 540. The frame 540 may be coupled to at least one body 510 via at least one neck 550. For example, one frame 540 may be provided, and two necks 550 may be coupled to one frame 540. The two necks 550 may be coupled to different bodies 510, respectively.

[0066] The slider 560 may be coupled to the frame 540. The slider 560 may be coupled to the frame 540 so that its position can be changed. The slider 560 may be provided in an internal space of the frame 540 and coupled to a lower surface of the frame 540. The slider 560 may be coupled to the frame 540 so that its position can be changed laterally to the left or right with respect to the traveling direction of the conveying unit 500. In addition, the slider 560 may be coupled to a lifting member 570, which will be described later. Therefore, the position of the lifting member 570 can be changed by changing the position of the slider 560.

[0067] The lifting member 570 may be provided between the body 510 and the grip member 580. The lifting member 570 may move the grip member 580 in an up and down direction. The lifting member 570 may raise or lower the grip member 580. The lifting member 570 may include a lifting driver 571 and a belt 572. The lifting member 570 may be referred to as a hoist device. The lifting driver 571 may wind or loosen the belt 572 to change the length of the suspended belt 572. For example, when the lifting driver 571 loosens the belt 572, the length of the belt 572 may be lengthened, and when the lifting driver 571 winds the belt 572, the length of the belt 572 may be shortened. Also, a plurality of belts 572 may be provided. One end of each of the plurality of belts 572 may be connected to the grip member 580.

[0068] The gripping member 580 can grip the container 20. When the gripping member 580 is closed, the gripping member 580 can grip the container 20. When the gripping member 580 is open, the gripping member 580 can place the container 20. That is, the gripping member 580 can detachably grip the container 20. The gripping member 580 can unload the container 20 from a port P, such as a load port of a semiconductor processing device.

[0069] The controller 590 may be provided in the body 510 as described above. The controller 590 may be provided in an internal space of the body 510. The controller 590 may control at least one of the components of the transport unit 500, such as the travel driver 511, the lift driver 571, and the slider 560. The controller 590 may also generate a control signal for performing a control method for the transport unit 500, which will be described below.

[0070] 8 is a top view of the shape of the conveying unit of the present invention running while maintaining the running direction in the branching area. Referring to Fig. 8, when the conveying unit 500 runs while maintaining the running direction in the branching area, the steering wheel 532 of the steering member 530 is moved to a position where it contacts the straight branching rail 332. Therefore, in the branching area, the running wheel 520 contacts one of the running rails 310, and the steering wheel 532 contacts the straight branching rail 332, so that the running direction of the conveying unit 500 is maintained.

[0071] 9 is a top view of the shape of the conveying unit according to the present invention changing its running direction at the branching area and running. Referring to FIG. 9, when the conveying unit 500 changes its running direction at the branching area, the steering wheel 532 of the steering member 530 is moved to a position where it contacts the curved branching rail 334. Therefore, in the branching area, the running wheel 520 contacts one of the running rails 310, and the steering wheel 532 contacts the curved branching rail 334, and the running direction of the conveying unit 500 is changed.

[0072] Hereinafter, a method for controlling the transport unit 500 according to an embodiment of the present invention, more specifically, a method for controlling the transport unit 500 for performing the article transport method described below, will be described in detail.

[0073] FIG. 10 is a diagram showing a shape of the transport unit of the present invention transporting a container containing an article. In FIG. 10, AP indicates a travel path of the transport unit 500. GP indicates a movement path of the grip member 570. Referring to FIG. 10, the transport unit 500 can transport the container 20 containing an article to a port P. The transport unit 500 can move along a travel rail 310 to transport the container 20 to the port P. For example, before the transport unit 500 reaches the top of the port P where the container 20 is placed, the lift driver 571 can lower the grip member 580. When the lowering of the grip member 580 is completed, the height of the grip member 580 can be fixed. With the height of the grip member 580 fixed, the transport unit 500 can move to the top of the port P. Thereafter, the gripping members 580 can load the container 20 into the port P or unload the container 20 from the port P (FIG. 10 illustrates the operation of the transport unit 500 loading the container 20 into the port P). For example, when the transport unit 500 stops at the top of the port P, the gripping members 580 can be opened. When the gripping members 580 complete the operation of loading or unloading the container 20, the transport unit 500 can start moving. At this time, the height of the gripping members 580 remains fixed, and the transport unit 500 can move away from the top of the port P. After the transport unit 500 moves away from the top of the port P, the gripping members 580 can rise.

[0074] The height of the gripping member 580 can be changed by the lift driver 571. Also, the height of the gripping member 580 can be changed, that is, the lift driver 571 winds or loosens the belt 572 to lower or raise the gripping member 280, while the transport unit 500 is traveling. Since the height control of the gripping member 580 is performed while the transport unit 500 is traveling, the waiting time (e.g., stop time) of the transport unit 500 can be shortened. Therefore, the time required for the transport unit 500 to transport the article or the container 20 containing the article can be shortened.

[0075] FIG. 11 is a graph showing the rotational speed of the traveling driver that rotates the traveling wheel of the present invention, and the rotational speed of the lifting driver that winds or loosens the belt, and FIG. 12 is a graph showing the change in position of the conveying unit, the change in speed of the conveying unit, the change in belt length of the conveying unit, and the change in belt angle of the conveying unit of the present invention.

[0076] 11 represents the rotation speed of the traveling driver 511, but VP1 may represent the traveling speed of the transport unit 500. Also, VP2 represents the rotation speed of the lift driver 571, but VP2 may represent the length change speed of the belt 572.

[0077] 12 shows the change in position x of the conveying unit 500 over time t, the change in speed v of the conveying unit 500, the change in length l of the belt 572 of the conveying unit 500, and the change in angle θ of the belt 572 of the conveying unit 500. The angle θ may refer to the angle between the lateral axis of the belt 572 and an axis perpendicular to the ground.

[0078] As shown in Figures 11 and 12, the travel of the transport unit 500 may include an acceleration section (S10), a constant speed section (S20), and a deceleration section (S30). The acceleration section (S10, t0-t3) may be a section in which the travel speed of the transport unit 500 is increased. The constant speed section (S20, t3-t6) may be a section in which the transport unit 500 travels at a constant speed. The deceleration section (S30, t6-t9) may be a section in which the travel speed of the transport unit 500 is decreased. The constant speed section (S20) may be a section between the acceleration section (S10) and the deceleration section (S30).

[0079] In the acceleration section (S10) or the deceleration section (S30), the transport unit 500 may perform a vibration damping operation to damp the vibration of the container 20 gripped by the grip member 580. The vibration damping operation may be performed by changing the traveling speed of the transport unit 500. For example, the vibration damping operation may be an operation of changing the magnitude of the acceleration of the transport unit 500 to half the vibration period of the container 20 that stores articles such as substrates.

[0080] The vibration period may be the period of vibration of the container 20 that occurs when the stopped transport unit 500 starts to move at t0. Also, the vibration period may be the period of vibration of the container 20 that occurs when the transport unit 500, which is moving at a constant speed, starts to decelerate at t6.

[0081] The vibration damping operation may be an operation of changing the travel acceleration of the transport unit 500 from a first acceleration to a second acceleration smaller than the first acceleration. For example, the vibration damping operation may be an operation of changing the travel of the transport unit from a first accelerated travel t0-t1 or t6-t7 of a first acceleration to a constant speed travel t1-t2 or t7-t8, and changing from a constant speed travel t1-t2 or t7-t8 to a second accelerated travel t2-t3 or t8-t9 of a second acceleration. In addition, the time during which the transport unit 500 travels at a constant speed t1-t2 or t7-t8 may be very short compared with the time during which the transport unit 500 travels at a first accelerated travel t0-t1 or t6-t7 and / or a second accelerated travel t2-t3 or t8-t9.

[0082] The vibration damping operation of the present invention will be described in more detail with reference to Figs. 13 to 15. Fig. 13 shows the change in angle θ of belt 572 when the vibration damping operation of the present invention is not performed. As shown in Fig. 13, when the conveying unit 500 accelerates or decelerates, the angle θ of belt 572 changes to a waveform A having one period Tc due to inertia. In general, an operation such as gripping a container 20 must be performed after waiting until the change in angle θ of belt 572 becomes stable, that is, until there is no vibration. However, as shown in Fig. 14, when the same event occurs at a smaller size after half a period (1 / 2Tc) of waveform B, only waveform R as shown in Fig. 15 remains. In other words, the vibration damping operation of the present invention can minimize the vibration generated in the container 20 by generating a vibration having the same period in the container 20 again after half a period (1 / 2Tc) of the vibration period generated in the container 20 after an event that causes vibration in the container 20 in the acceleration section (S10) or deceleration section (S30) occurs (acceleration starts or deceleration starts), in the container 20 (acceleration starts again after running at a constant speed from t1 to t2, or deceleration starts again after running at a constant speed from t7 to t8).

[0083] 11 and 12 again, such a vibration damping operation can change the magnitude of the traveling acceleration of the transport unit 500 at a half period (1 / 2Tc) of the vibration period of the container 20. For example, the operation of changing the magnitude of the traveling acceleration can be an operation of changing the magnitude of the traveling acceleration of the transport unit 500 from a first acceleration to 0 (uniform speed traveling) at t1 or t7, and then changing it to a second acceleration at t2 or t8. The second acceleration can be a speed lower than the first acceleration. Also, the interval between t0 and t1 can be larger than the interval between t2 and t3. Also, the interval between t6 and t7 can be larger than the interval between t8 and t9.

[0084] Also, the length l of the belt 572 may be fixed in the acceleration section (S10) and / or the deceleration section (S30). That is, the distance from the body 510 to the grip member 580 may be fixed in the acceleration section (S10) and / or the deceleration section (S30).

[0085] The length l of the belt 572 may be changed in the constant speed section S20. In other words, the gripping member 580 may be raised or lowered in the constant speed section S20. In the constant speed section S20, the net force transmitted to the components of the transport unit 500 is zero, so that even if the length l of the belt 572 (height change of the gripping member 580) is changed, the occurrence of vibration can be minimized.

[0086] In addition, if the length l of the belt 572 changes in the acceleration section (S10) and / or deceleration section (S30), the pendulum period of the grip member 580, which is a parameter of the vibration reduction operation described above, changes, making it impossible to suppress the vibration. Therefore, in the control method of the conveying unit 500 according to an embodiment of the present invention, the length l of the belt 572 is fixed in the acceleration section (S10) and deceleration section (S30), and the length l of the belt 572 is changed in the constant speed section (S20) where the vibration reduction operation is not required, thereby minimizing the occurrence of the above-mentioned problems.

[0087] In the above example, the change in length l of the belt 572 is performed in the constant speed section (S20) in the section in which the transport unit 500 runs, but the present invention is not limited to this. For example, when the slider 560 of the transport unit 500 moves the lifting member 570, the run of the lifting member 560 of the transport unit 500 may have an acceleration section, a constant speed section, and a deceleration section. In this case, the change in length of the belt 572 may be performed in the constant speed section in the run section of the lifting member 560 of the transport unit 500.

[0088] In the above example, the article transport system 1000 is described as being applied to a semiconductor manufacturing line, but the present invention is not limited thereto. For example, the article transport system 1000 may be applied in the same or similar manner to various manufacturing lines that require the transport of articles.

[0089] The above detailed description is illustrative of the present invention. Moreover, the above description is illustrative of preferred embodiments of the present invention, and the present invention can be used in various other combinations, modifications, and environments. That is, changes or modifications are possible within the scope of the inventive concept disclosed in this specification, the scope of equivalents to the above disclosure, and / or the scope of the technology or knowledge of the art. The above embodiment describes the best state for realizing the technical idea of ​​the present invention, and various modifications are possible as required by specific application fields and uses of the present invention. Therefore, the above detailed description of the invention is not intended to limit the present invention to the disclosed embodiment. The appended claims should be construed to include other embodiments. [Explanation of symbols]

[0090] 1000 Goods Transport System 10. Semiconductor processing equipment 300 Rail 310 Running Rail 330 Steering Rail 332 Straight Turnout Rail 334 Curved Branch Rail 500 Transport Units 510 Body 520 Running Wheel 530 Steering member 532 Steering Wheel 534 Steering Rail 540 frames 550 Neck 560 Slider 570 Lifting member 580 Grip material 590 Controller

Claims

1. A substrate transport system that transports a container containing substrates along a ceiling of a semiconductor manufacturing line in which semiconductor process equipment is continuously arranged, comprising: A rail provided along the ceiling; a port configured to seat the container; a transport unit that travels along the rail and transports the container to the port; The transport unit includes: A body having a travel drive; a traveling wheel that is rotated by power transmitted from the traveling driver; a gripping member for gripping the container and loading or unloading the container into the port; a lifting member provided between the body and the gripping member for vertically moving the gripping member; A controller; The controller includes: The grip member is lowered or raised in a constant speed section where the transport unit travels on the rail at a constant speed, The height of the grip member is fixed in an acceleration section in which the traveling speed of the transport unit is increased and in a deceleration section in which the traveling speed of the transport unit is decreased; and In the acceleration section and / or the deceleration section, a vibration damping operation for damping the vibration of the container gripped by the gripping member can be performed. a substrate transport system that controls the lifting member and the travel driver;

2. The lifting member is A belt connected to the grip member; 2. The substrate transport system of claim 1, further comprising an elevator driver for winding or unwinding the belt to change the length of the belt.

3. The vibration damping operation includes: The substrate transport system according to claim 1 , wherein the operation is to change the travel acceleration of the transport unit to a half period of the swing period of the container.

4. The vibration damping operation includes: The substrate transport system according to claim 3 , wherein the operation is to change the travel acceleration of the transport unit from a first acceleration to a second acceleration which is smaller than the first acceleration.

5. The vibration damping operation includes: The substrate transport system according to claim 4 , wherein the operation is to change the travel of the transport unit from a first accelerated travel at the first acceleration to a constant speed travel, and then change from the constant speed travel to a second accelerated travel at the second acceleration.

6. The time during which the transport unit travels at a constant speed is The substrate transport system according to claim 4 , wherein the period of time during which the transport unit performs the first accelerated travel or the second accelerated travel is shorter than the period of time during which the transport unit performs the first accelerated travel or the second accelerated travel.

7. A method for controlling a transport unit having a travel wheel that travels along a rail installed along the ceiling of a semiconductor manufacturing line and transports a container containing substrates, a travel driver that transmits power to the travel wheel, a grip member that grips the container, a belt connected to the grip member, and a lift driver that winds or loosens the belt to change the length of the belt, comprising: The length of the belt is changed in a constant speed section where the transport unit travels at a constant speed along the rail, and the length of the belt is fixed in an acceleration section where the travel speed of the transport unit is increased and a deceleration section where the travel speed of the transport unit is decreased; In the acceleration section and / or the deceleration section, a vibration damping operation for damping the vibration of the container gripped by the gripping member can be performed. A method for controlling the lift driver and the travel driver.

8. The vibration damping operation includes: The method according to claim 7 , further comprising changing the travel acceleration of the transport unit to a half period of the swing period of the container.

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