Component push-up device and component mounting device

Abstract

Provided is a component push-up device that pushes up a die from below a wafer attached to a wafer sheet to separate the die from the wafer sheet. The component push-up device includes a push-up tool including a suction surface that suctions the lower surface of the wafer sheet with negative pressure and a push-up pin that is capable of coming out from the suction surface toward the wafer sheet and protrudes from the suction surface to push up the die; and a support member that is movable along and relative to the wafer and detachably supports the push-up tool. A magnet is provided on one of the push-up tool and the support part, and at least a surface which is of the other thereof and faces the magnet is formed of a magnetic material.

Description

[Technical field]

[0001] The present invention relates to a component push-up device that pushes up and peels off a die (bare chip) from below a wafer sheet when picking up the die from a wafer attached to the wafer sheet, and a component mounting device equipped with this component push-up device. [Background technology]

[0002] There is a known component mounting device that picks up dies (bare chips) from a diced wafer and mounts them on a board. In this component mounting device, a wafer is carried into a predetermined position (component placement area) inside the device by a wafer feeder, and a wafer camera captures the image of the wafer to recognize it, and then a head equipped with a die holding function picks up the die. This operation is repeated.

[0003] The component mounting device is provided with a component push-up device that pushes up the die from below the wafer attached to the wafer sheet, thereby peeling the die from the wafer sheet prior to picking. The component push-up device has a cylindrical suction housing and a push-up pin that is provided in a retractable manner in the center thereof, and pushes up the die from below with the push-up pin while the suction housing sucks the wafer sheet from below.

[0004] Dies come in a wide variety of sizes, and it is necessary for a component push-up device to use a suction housing and push-up pins that are suitable for the size of the die. For example, Patent Document 1 discloses a component push-up device that includes a unit called a suction pot, which includes a suction housing and push-up pins, and in which the suction pot is replaceable. A clamp mechanism is built into the suction pot, and it can be attached, detached, and replaced by operating a lever on a specified mounting part.

[0005] However, in the component push-up device of Patent Document 1, the peripheral structure of the suction housing and the push-up pins becomes complicated because a clamp mechanism is built in. Also, in the case of a component push-up device that has a movable head equipped with a suction housing and push-up pins and that pushes up the die while moving relative to the wafer, the increased weight of the head due to the built-in clamp mechanism is thought to be a factor in losing takt time. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2012-169321 A Summary of the Invention

[0007] The present invention has been made in view of the above-mentioned problems, and has an object to enable a push-up tool, such as a suction housing or a push-up pin, in a component push-up device to be changed with a simpler configuration.

[0008] A component push-up device according to one aspect of the present invention is a component push-up device that peels a die from a wafer sheet by pushing the die up from below a wafer attached to the wafer sheet, and comprises: an adsorption surface that negatively adsorbs the underside of the wafer sheet, and a push-up tool including a push-up pin that is arranged to be able to appear and disappear from the adsorption surface toward the wafer sheet side and pushes up the die by protruding from the adsorption surface; and a support member that is arranged to be movable relatively along the wafer and detachably supports the push-up tool, and a magnet is provided on one side of either the push-up tool or the support member, and at least the opposing surface of the magnet on the other side is formed from a magnetic material.

[0009] Moreover, a component mounting apparatus according to one aspect of the present invention includes a component supply section in which wafers that have been diced and attached to a wafer sheet are placed, a component transfer head that picks up a die from the wafer placed in the component supply section and transfers it to a substrate, and the above-described component push-up device that pushes up the die from below the wafer sheet when the die is picked up by the component transfer head. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a plan view seen from above, showing the overall configuration of a component mounting apparatus according to an embodiment of the present invention (a component mounting apparatus equipped with a component push-up device of the present invention). [Diagram 2] FIG. 2 is a schematic perspective view showing the head unit and the push-up unit. [Diagram 3] FIG. 3 is a perspective view of the push-up unit. [Figure 4] FIG. 4 is an enlarged perspective view of a main part of the push-up unit. [Diagram 5] FIG. 5 is a perspective view of the thrust head. [Figure 6] FIG. 6 is a cross-sectional view of the thrust head. [Figure 7] 7(A) to (C) are explanatory diagrams of the push-up operation of the die by the push-up head. [Figure 8] FIG. 8 is a table showing the relationship between the magnetic poles of the fixed magnets of the attraction housing and the fixed magnets of the attraction housing. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0012] [Explanation of component mounting equipment] Fig. 1 is a plan view seen from above showing the overall configuration of a component mounting apparatus 1 according to an embodiment of the present invention. The component mounting apparatus 1 is an apparatus that mounts a die 7a (component) diced from a wafer 7 onto a substrate P. The component mounting apparatus 1 includes a base 2, a conveyor 3, a head unit 4, a component supply section 5 (component placement area), a wafer supply device 6, a camera unit 32U, and a push-up unit 40. Fig. 2 is a schematic perspective view showing the head unit 4 and the push-up unit 40, which is not shown in Fig. 1.

[0013] The base 2 is a mounting base for various devices equipped in the component mounting apparatus 1. The conveyor 3 is a transport line for the substrate P, which is installed on the base 2 to extend in the X direction. The conveyor 3 carries the substrate P from outside the machine to a predetermined mounting work position, and after the mounting work, carries the substrate P from the work position to outside the machine. The position where the substrate P is shown in FIG. 1 is the mounting work position. The component supply unit 5 supplies a plurality of dies 7a in an arrangement state in which they are diced from the wafer 7.

[0014] The head unit 4 picks up the die 7a in the component supply section 5, moves to the mounting work position, and mounts the die 7a on the substrate P. The head unit 4 has a plurality of heads 4H ("component transfer heads" of the present invention) that adsorb and hold the die 7a when picking it up. The heads 4H are capable of moving forward and backward (up and down) in the Z direction relative to the head unit 4, and of rotating about an axis. The head unit 4 is equipped with a substrate recognition camera 31 that captures an image of the substrate P. The federial marks affixed to the substrate P are recognized from the image captured by the substrate recognition camera 31, and the positional deviation is corrected when the components are mounted.

[0015] The component mounting device 1 includes a drive mechanism D1 that allows the head unit 4 to move in the horizontal direction (X and Y directions) between the component supply unit 5 and the substrate P held at the mounting work position. The drive mechanism D1 includes a pair of Y-axis fixed rails 13 on the +X side and the -X side, a first Y-axis servo motor 14, and a ball screw shaft 15, and a support frame 16 that is installed between the pair of Y-axis fixed rails 13. The ball screw shaft 15 is screwed into a nut 17 provided on the support frame 16. The drive mechanism D1 also includes a guide member (not shown) mounted on the support frame 16, a first X-axis servo motor 18, and a ball screw shaft 19. The guide member supports the head unit 4 so as to be movable in the X direction, and the ball screw shaft 19 is screwed into a nut (not shown) provided on the head unit 4.

[0016] The operation of the drive mechanism D1 described above moves the head unit 4 in the horizontal direction (X and Y directions). That is, the ball screw shaft 15 is rotationally driven by the first Y-axis servo motor 14, so that the head unit 4 moves in the Y direction together with the support frame 16. Also, the ball screw shaft 19 is rotationally driven by the first X-axis servo motor 18, so that the head unit 4 moves in the X direction relative to the support frame 16.

[0017] The component supply unit 5 includes a wafer supply device 6 that supplies a plurality of dies 7a in the form of a wafer 7 to a predetermined component removal position (wafer stage 10). The wafer supply device 6 includes a wafer holding frame 8 that holds a wafer sheet 8a. A collection of a large number of dies 7a, 7a... formed by dicing the wafer 7 into a grid pattern is attached to the wafer sheet 8a. The wafer supply device 6 supplies the dies 7a to the component removal position by replacing the wafer holding frame 8.

[0018] The wafer supply device 6 includes a wafer storage elevator 9, a wafer stage 10, and a wafer conveyor 11. The wafer storage elevator 9 stores wafer sheets 8a with wafers 7 attached thereto in multiple vertical stages, with the wafer sheets 8a held in wafer holding frames 8. The wafer stage 10 is installed on the base 2 at a position on the -Y side of the wafer storage elevator 9. The wafer stage 10 is positioned to be aligned on the +Y side with respect to the mounting work position, which is the stopping position of the substrate P. The wafer conveyor 11 pulls out the wafer holding frames 8 from the wafer storage elevator 9 onto the wafer stage 10.

[0019] The camera unit 32U is a unit movable in the X and Y directions, and includes a wafer camera 32. The wafer camera 32 captures an image of a portion of the wafer 7 positioned on the wafer stage 10, i.e., the die 7a within the camera's field of view. Based on the captured image, the position of the die 7a to be picked up is recognized. The component mounting device 1 includes a drive mechanism D2 that enables the camera unit 32U to move in the horizontal direction (X and Y directions) between the component supply unit 5 and a predetermined standby position.

[0020] The drive mechanism D2 includes a pair of Y-axis fixed rails 33 on the +X side and the -X side, a second Y-axis servo motor 34 and a ball screw shaft 35 arranged on the +X side, and a support frame 36 installed between the pair of Y-axis fixed rails 33. The ball screw shaft 35 is screwed into a nut 37 provided on the support frame 36. The drive mechanism D2 also includes a guide member (not shown) mounted on the support frame 36, a second X-axis servo motor 38, and a ball screw shaft 39. The guide member supports the camera unit 32U movably in the X direction, and the ball screw shaft 39 is screwed into a nut (not shown) provided on the camera unit 32U.

[0021] The camera unit 32U moves in the horizontal direction (X and Y directions) by the operation of the drive mechanism D2 described above. That is, the ball screw shaft 35 is rotationally driven by the second Y-axis servo motor 34, so that the camera unit 32U moves in the Y direction together with the support frame 36. Also, the ball screw shaft 39 is rotationally driven by the second X-axis servo motor 38, so that the camera unit 32U moves in the X direction relative to the support frame 36.

[0022] The push-up unit 40 is disposed below the component supply unit 5, and pushes up the die 7a to be adsorbed by the head 4H from the underside of the wafer sheet 8a. The push-up unit 40 is disposed on the base 2 so as to be movable in the XY directions over a range corresponding to the wafer stage 10. The component mounting apparatus 1 includes a drive mechanism D3 that enables the push-up unit 40 to move.

[0023] The drive mechanism D3 includes a support frame 42 movable along a pair of guide rails 41 extending in the Y direction, a ball screw shaft 43 extending in the Y direction, and a third Y-axis servo motor 44. The ball screw shaft 43 is screwed into a nut (not shown) provided on the support frame 42. The X-direction movement mechanism includes a guide member (not shown) mounted on the support frame 42, a third X-axis servo motor 46, and a ball screw shaft 45. The guide member supports the push-up unit 40 movably in the X direction, and the ball screw shaft 45 is screwed into a nut (not shown) provided on the push-up unit 40.

[0024] By the operation of the drive mechanism D3 described above, the push-up unit 40 moves in the horizontal direction (X and Y directions). That is, the ball screw shaft 43 is rotationally driven by the third Y-axis servo motor 44, so that the push-up unit 40 moves in the Y direction together with the support frame 42. Also, the ball screw shaft 45 is rotationally driven by the third X-axis servo motor 46, so that the push-up unit 40 moves in the X direction relative to the support frame 42.

[0025] As described in detail below, the push-up unit 40 has two push-up heads 50A and 50B each equipped with a push-up pin 71 for pushing up the die 7a (only the push-up pin 71 is shown in FIG. 2). When the head 4H adsorbs the die 7a, the push-up unit 40 raises the push-up pin 71 to push up the die 7a through the wafer sheet 8a. In this example, the push-up unit 40 and the drive mechanism D3 described above correspond to the "component push-up device" of the present invention.

[0026] A component recognition camera 30 is installed on the base 2. The component recognition camera 30 captures an image of the die 7a that is attracted to the head 4H of the head unit 4 from below before the die 7a is mounted on the substrate P. Based on the captured image, any abnormality or failure in attracting the die 7a by the head 4H is determined.

[0027] The basic operation of the component mounting apparatus 1 described above is as follows: First, the wafer holding frame 8 is pulled out from the wafer storage elevator 9 by the wafer conveyor 11. As a result, the wafer sheet 8a to which the assembly (wafer 7) of multiple dies 7a, 7a... is attached is placed on the wafer stage 10 together with the wafer holding frame 8.

[0028] Next, the camera unit 32U moves to above the wafer stage 10 to capture an image of the wafer 7. The image capture by the camera unit 32U is for the purpose of recognizing a group of dies 7a that will be attracted by the head 4H in a later picking operation.

[0029] When the imaging of the group of dies 7a is completed, the camera unit 32U retreats from above the wafer stage 10, while the head unit 4 moves to above the wafer stage 10 and the push-up unit 40 moves below the wafer 7. Then, the head 4H picks up the group of dies 7a recognized by the imaging by the camera unit 32U from the wafer 7. At this time, the push-up pins 71 of the push-up unit 40 rise and push up the dies 7a through the wafer sheet 8a.

[0030] After picking up the die 7a, the head unit 4 moves from above the wafer stage 10 to above the substrate P at the mounting work position via the component recognition camera 30. As a result, the die 7a attracted by the head 4H is mounted on the substrate P.

[0031] After picking up the die 7a, when the head unit 4 moves from above the wafer stage 10, in synchronization with this, the camera unit 32U moves into the space above the wafer stage 10. Thereafter, the head unit 4 and the camera unit 32U move in turn above the wafer stage 10, and the operations of picking up the die 7a and mounting it on the substrate P are repeated.

[0032] [Detailed structure of thrust unit 40] Fig. 3 is a perspective view of the push-up unit 40, and Fig. 4 is an enlarged perspective view of a main part of the push-up unit 40. Fig. 5 is a perspective view of push-up heads 50A and 50B provided in the push-up unit 40, and Fig. 6 is a cross-sectional view of the push-up heads 50A and 50B.

[0033] The thrust unit 40 has a base frame 47 connected to the drive mechanism D3. The base frame 47 includes a pair of thrust heads 50A, 50B, a switching mechanism D4 for switching between the thrust heads 50A, 50B, a first lifting mechanism D5 for moving the thrust heads 50A, 50B back and forth (up and down) in the Z direction, and a second lifting mechanism D6 for moving thrust pins 71 (described later) provided on the thrust heads 50A, 50B back and forth (up and down) in the Z direction.

[0034] The push-up heads 50A and 50B push up the die 7a through the wafer sheet 8a when the head 4H adsorbs the die 7a. The push-up heads 50A and 50B have basically the same structure except for the type of push-up tool 60 described below.

[0035] 5 and 6, the push-up head 50A (50B) includes a base member 52 and a push-up tool 60 attached to the base member 52. The push-up tool 60 includes a suction housing 62 for suctioning the wafer sheet 8a from below, and a pin holder 63. The pin holder 63 is composed of a holder body 70 having a top-closed cylindrical shape and a push-up pin 71 held at the upper end thereof. The push-up pin 71 pushes up the die 7a.

[0036] The optimal number and arrangement of the push-up pins 71 provided in the pin holder 63, and the optimal size (diameter, length) and tip shape of the push-up pins 71 vary depending on the size of the die 7a, the circuit formed thereon, etc. Therefore, from among multiple types of pin holders 63, a pin holder 63 equipped with optimal push-up pins 71 corresponding to the die 7a is selected and incorporated into the push-up head 50A (50B).

[0037] The thrust head 50A (50B) is equipped with a thrust main shaft 74 supported on the base member 52 so as to be movable up and down. The pin holder 63 is removably fixed to the upper end of the thrust main shaft 74. The thrust main shaft 74 is a splined shaft, and is supported so as to be movable up and down (movable in the Z direction) by a splined bearing 75 fixed in a through hole 55 formed in the base member 52. A cylindrical pin base 72 is fixed near the upper end of the thrust main shaft 74 with the thrust main shaft 74 protruding slightly upward (referred to as a protruding portion 74a).

[0038] The pin base 72 includes a base main body 72a and a fixed magnet 72b arranged in a stack on the upper end of the base main body 72a. The fixed magnet 72b has a ring shape flattened in the Z direction, is arranged on the base main body 72a with the protruding portion 74a penetrating its center, and is prevented from coming off the protruding portion 74a (thrust-up main shaft 74).

[0039] The pin holder 63 is disposed on the pin base 72 with the protruding portion 74a inserted inside the holder body 70 and positioned circumferentially with respect to the protruding portion 74a. The entire holder body 70, or at least the surface of the holder body 70 facing the pin base 72 (fixed magnet 72b), is made of a magnetic material such as iron. In other words, the pin holder 63 is fixed to the pin base 72 by the magnetic force of the fixed magnet 72b. The pin holder 63 (holder body 70) and the pin base 72 have the same outer diameter, and when the pin holder 63 is fixed to the pin base 72, they form an integrated cylindrical shape.

[0040] The lower end of the thrust-up main shaft 74 protrudes downward from the base member 52, and a cylindrical follower member 76 is provided at the lower end. A coil spring 78 is attached between the follower member 76 of the thrust-up main shaft 74 and the lower surface of the base member 52. The thrust-up main shaft 74 is urged downward (in the -Z direction) by the elastic force of the coil spring 78, and as a result, the pin base 72 is held at the lower end position (the position in FIG. 6) where it abuts against the spline bearing 75.

[0041] The suction housing 62 includes a top-top cylindrical portion 65 having an upper end portion with a suction surface 66 for suctioning the wafer sheet 8a, and a flange portion 67 connected to the lower end portion. The suction housing 62 is attached to the upper surface 54 of the base member 52 via the flange portion 67. An annular boss portion 53 is protruded from the upper surface 54 of the base member 52 around the through hole 55, while a recess 67b corresponding to the boss portion 53 is formed on the lower surface of the flange portion 67. The suction housing 62 is disposed on the upper surface 54 of the base member 52 with the boss portion 53 fitted (inserted) into the recess 67b. A notch portion 67a is formed on the periphery of the flange portion 67, and a positioning pin 69 erected on the upper surface 54 is inserted into the notch portion 67a. This positions the suction housing 62 in the circumferential direction with respect to the base member 52.

[0042] A plurality of fixed magnets 68 are arranged at equal intervals in the circumferential direction around the boss portion 53 on the upper surface 54 of the base member 52. These fixed magnets 68 are embedded in the base member 52 so that their upper surfaces are flush with the upper surface 54 of the base member 52. Meanwhile, the entire suction housing 62, or at least the surface of the suction housing 62 that faces the base member 52 (fixed magnets 68), is made of a magnetic material such as iron. In other words, the suction housing 62 is fixed to the base member 52 by the magnetic force of the fixed magnets 68.

[0043] Between the inner ceiling surface of the cylindrical portion 65 of the suction housing 62 and the holder body 70 of the pin holder 63, a gap is formed to allow the pin holder 63 to ascend and descend. When the thrust-up main shaft 74 ascends from the lower end position and the pin holder 63 ascends to a position where it abuts against the ceiling surface of the cylindrical portion 65 or a position close to the position, the thrust-up pin 71 protrudes from a pin hole 66a formed in the suction surface 66 (ceiling surface). This protrusion enables the thrust-up pin 71 to thrust up the die 7a. On the other hand, when the pin holder 63 is disposed at the lower end position together with the thrust-up main shaft 74, the thrust-up pin 71 retreats into the pin holder 63. The amount of protrusion of the thrust-up pin 71 from the suction surface 66 is changed (set) depending on the type of the die 7a, etc.

[0044] In this example, the base member 52 and the pin base 72 correspond to the "support member" of the present invention. More specifically, the base member 52 corresponds to the "base portion" and the pin base 72 corresponds to the "movable portion."

[0045] The push-up head 50A (50B) is provided with a negative pressure supply mechanism for suctioning the wafer sheet 8a. This negative pressure supply mechanism includes a negative pressure port portion 57 provided in the lower part of the base member 52, and a negative pressure passage 56 formed inside the base member 52. The negative pressure port portion 57 is connected to a negative pressure generator 58 (see FIG. 3) through a pipe not shown. The negative pressure passage 56 introduces the negative pressure supplied to the negative pressure port portion 57 into the through hole 55. As a result, the negative pressure is supplied to the inside of the suction housing 62 (cylindrical portion 65) through the through hole 55.

[0046] The suction surface 66 is formed with a plurality of concentrically formed annular grooves and openings (not shown) that connect each annular groove to the inside of the suction housing 62. Negative pressure passages formed between the suction housing 62 and the pin holder 63 communicate with each opening, and negative pressure is supplied to each annular groove through each opening (the wafer sheet 8a is sucked through each annular groove), whereby the wafer sheet 8a is sucked onto the suction surface 66.

[0047] As shown in Figs. 3 and 4, the push-up unit 40 includes a movable frame 48 that is movable in the X direction relative to the base frame 47. The push-up heads 50A and 50B are mounted on the movable frame 48 in a state of being arranged side by side in the X direction. The movable frame 48 is connected to an actuation shaft 49a of a first air cylinder 49 fixed to the base frame 47, and the movable frame 48 moves forward and backward in the X direction by the actuation of the first air cylinder 49. When the movable frame 48 is placed in the forward position, one of the push-up heads 50A is placed at a predetermined work position Wp (the state shown in Fig. 3), and when the movable frame 48 is placed in the backward position, the other of the push-up heads 50B is placed at the work position Wp. This allows the push-up heads 50A and 50B used for pushing up the die 7a to be switched. The movable frame 48 and the first air cylinder 49 constitute the switching mechanism D4.

[0048] The push-up heads 50A and 50B are supported by a pair of guide rails 51 extending in the Z direction provided on the movable frame 48 so as to be movable up and down. The first lifting mechanism D5 for lifting the push-up heads 50A and 50B includes the pair of guide rails 51, a first lifting member 81, a second air cylinder 80, and a cam mechanism (not shown). The first lifting member 81 is provided below the push-up head 50A (50B) arranged at the work position Wp so as to be movable up and down. The first lifting member 81 is lifted and lowered by the operation of the cam mechanism by the second air cylinder 80, and lifts and lowers the push-up head 50A (50B) arranged at the work position Wp between the lifted position and the lowered position. The lifted position is a height position where the suction surface 66 of the suction housing 62 abuts or approaches the lower surface of the wafer sheet 8a of the wafer holding frame 8 arranged on the wafer stage 10.

[0049] The second lifting mechanism D6 that lifts and lowers the thrust pin 71 includes a second lifting member 82, a Z-axis servo motor 84, and a transmission mechanism 83. Each element of the second lifting mechanism D6 is attached to a bracket (not shown) that is fixed to the first lifting member 81. Therefore, the second lifting mechanism D6 lifts and lowers together with the first lifting member 81.

[0050] The second push-up member 82 is disposed below the push-up head 50A (50B) disposed at the working position Wp, on the -Y side of the first push-up member 81. The second push-up member 82 is a block-shaped member having a flat upper surface. The second push-up member 82 is supported so as to be able to rise and fall on a guide member (not shown) fixed to the bracket, and is driven by a Z-axis servo motor 84 via a transmission mechanism 83 formed of a screw feed mechanism or the like, to rise and fall along the guide member.

[0051] When the second push-up member 82 is disposed at the lower end position, as shown in FIG. 6, its upper surface faces the lower surface of the follower member 76 of the push-up main shaft 74 of the push-up head 50A (50B) disposed at the working position Wp with a small gap therebetween. When the second push-up member 82 rises, the push-up main shaft 74 is accordingly pushed up against the biasing force of the coil spring 78, and the pin holder 63 (push-up pin 71) rises with the rise of the push-up main shaft 74, and the push-up pin 71 protrudes from the pin hole 66a of the suction housing 62. When the second push-up member 82 subsequently descends, the push-up main shaft 74 descends while receiving the biasing force of the coil spring 78, and is reset to its original lower end position. As a result, the push-up pin 71 retreats into the suction housing 62.

[0052] 3 denotes a negative pressure generator fixed to the base frame 47. The negative pressure generator 58 is connected to the negative pressure port portions 57 of the push-up heads 50A and 50B via piping not shown. The negative pressure generator 58 switches between supplying negative pressure for wafer sheet adsorption to the push-up heads 50A and 50B and stopping the supply (opening to the atmosphere).

[0053] [Operation and effect of thrust-up unit 40] 7(A) to (C) are explanatory diagrams of the push-up operation of the die 7a by the push-up heads 50A and 50B. Note that the die 7a (wafer 7) is not shown in FIG. 7. As described above, the push-up unit 40 is disposed below the wafer 7 and pushes up the die 7a through the wafer sheet 8a when the head 4H picks up the die 7a from the wafer 7. The specific operation of the push-up unit 40 is as follows.

[0054] First, of the two push-up heads 50A and 50B, the one used to push up the die 7a is placed at the work position Wp by the operation of the switching mechanism D4. Also, the push-up unit 40 is moved by the operation of the drive mechanism D3, and the push-up head 50A (50B) placed at the work position Wp is placed below the die 7a to be pushed up (FIG. 7(A)).

[0055] Next, the first lifting mechanism D5 is actuated to lift the push-up head 50A (50B) located at the work position Wp (FIG. 7B). As a result, the suction surface 66 of the suction housing 62 comes into contact with or close to the underside of the wafer sheet 8a, and the wafer sheet 8a is negatively suctioned by the suction surface 66. This negative pressure suction is performed substantially simultaneously with the timing at which the push-up head 50A (50B) reaches the raised end position (at the same time that the suction surface 66 comes into contact with or close to the underside of the wafer sheet 8a).

[0056] Next, the second lifting mechanism D6 is operated to lift the pin holder 63 together with the thrust spindle 74. This causes the thrust pin 71 to protrude from the suction housing 62 (the suction surface 66) and penetrate the wafer sheet 8a to push up the die 7a (FIG. 7(C)). In this case, the thrust pin 71 (pin holder 63) is lifted and lowered simultaneously with or slightly delayed from the suction of the wafer sheet 8a by the suction housing 62. The lifting and lowering are performed in either a manner in which the thrust pin 71 is lifted and lowered continuously, or a manner in which the thrust pin 71 is lifted and temporarily stays in that position before being lowered.

[0057] When picking of the die 7a is completed, the push-up pins 71 (pin holder 63) are reset to the lower end position, and the supply of negative pressure from the negative pressure generator 58 is stopped. In this state, the push-up unit 40 moves by the operation of the drive mechanism D3, and the push-up head 50A (50B) is positioned below the die 7a to be pushed up next. In other words, the push-up unit 40 slides the suction surface 66 of the suction housing 62 along the lower surface of the wafer sheet 8a, or moves in a state of being brought close to the lower surface of the wafer sheet 8a.

[0058] Thereafter, the wafer sheet 8a is negatively adsorbed, and the second lifting mechanism D6 operates to raise and lower the push-up pins 71 (pin holder 63) to push up the next die 7a (FIG. 7(C)), after which the negative pressure adsorption of the wafer sheet 8a is stopped. Thereafter, the above-described push-up operation of the die 7a is repeated in the same manner.

[0059] In the above-mentioned push-up unit 40, the push-up tool 60 suitable for the die 7a to be pushed up is incorporated in the push-up heads 50A, 50B, but it is required to replace the push-up tool 60 of each push-up head 50A (50B) as necessary, such as when changing the wafer 7. In this case, since the push-up tool 60 includes the suction housing 62 and the pin holder 63, it is necessary to replace these.

[0060] As described above, in the push-up unit 40, the suction housing 62 is fixed to the base member 52 by the fixed magnet 68. The pin holder 63 is also fixed to the pin base 72 by the fixed magnet 72b. Therefore, the operator can easily replace the push-up tool 60 without using any special tools by simply lifting and removing the suction housing 62 and pin holder 63 from the base member 52 in this order, and setting new suction housing 62 and pin holder 63 in their original positions in the reverse order.

[0061] In this case, the attractive forces of the fixed magnets 68, 72b are both set within a range of 5 to 30 N. This range of attractive forces is determined experimentally so as to achieve both the attractive stability of the suction housing 62 and the pin holder 63 and the ease of manual attachment and detachment by the operator. Therefore, the operator can easily replace the suction housing 62 and the pin holder 63 with a single touch.

[0062] Therefore, the configuration of the push-up unit 40 allows the push-up tool 60 (the suction housing 62 and the pin holder 63) to be changed with a simpler configuration than the conventional structure (Patent Document 1) that has a clamp mechanism for changing the push-up tool. Moreover, since the configuration basically involves only incorporating the fixed magnets 68, 72b into the base member 52, there is no significant increase in the weight of the push-up head 50A (50B). Therefore, there is no drawback in that time loss is likely to occur when moving the push-up unit 40 due to an increase in the weight of the push-up head 50A (50B).

[0063] Furthermore, the fixed magnets 68, 72b for fixing the push-up tool 60 (the suction housing 62 and the pin holder 63) are disposed only on the side of the base member 52 and the pin base 72. Therefore, the fixed magnets 68, 72b can be made common to a plurality of types of push-up tools 60, which is rational.

[0064] Although not mentioned in the above description, in the push-up unit 40, the magnetic pole direction of the fixed magnet 68 that fixes the suction housing 62 and the magnetic pole direction of the fixed magnet 72b that fixes the pin holder 63 are set to be the same. In other words, no repulsive force is applied between the fixed magnet 68 and the fixed magnet 72b. Specifically, as shown in FIG. 8, when the upper surface side of the fixed magnet 72b (pin holder magnet) is an N pole, the upper surface side of the fixed magnet 68 (suction housing magnet) is also set to an N pole (combination 1). Also, when the upper surface side of the fixed magnet 72b is an S pole, the upper surface side of the fixed magnet 68 is also set to an S pole (combination 2).

[0065] This configuration prevents the following inconveniences caused by the repulsive force. As described above, when the push-up heads 50A and 50B move to the position of the next die 7a of the same wafer 7, they move by sliding the suction surface 66 of the suction housing 62 along or approaching the lower surface of the wafer sheet 8a (FIG. 7(B)). At this time, in the push-up unit 40, the fixed magnet 72b (second magnet) that fixes the pin holder 63 is located above the fixed magnet 68 (first magnet) that fixes the suction housing 62. Therefore, when the repulsive force acts, the suction housing 62 may rise against the elastic force of the coil spring 78. In this case, it is considered that the push-up pin 71 may unintentionally protrude from the suction housing 62 and damage the wafer sheet 8a. In this regard, according to the configuration of the push-up unit 40 in which the magnetic poles of both fixed magnets 68 and 72b are oriented in the same direction, there is no room for the repulsive force to be generated, and the above-mentioned inconveniences are avoided.

[0066] The component mounting device 1 described above is an example of a preferred embodiment of a component mounting device to which the component push-up device according to the present invention is applied, and the specific configuration thereof and the specific configuration of the component push-up device can be appropriately changed without departing from the gist of the present invention. For example, the following configuration can also be adopted.

[0067] For example, in the embodiment, the fixed magnets 68, 72b for fixing the push-up tool 60 (the suction housing 62 and the pin holder 63) are disposed on the side of the base member 52 and the base main body 72a. However, the fixed magnets 68, 72b may be provided on the side of the push-up tool 60 (the suction housing 62 and the pin holder 63) or on both. For example, it may be preferable to change the suction force depending on the size of the suction housing 62 (the suction surface 66). In that case, the fixed magnet 68 may be provided on the suction housing 62 side. The same applies to the relationship between the pin holder 63 and the fixed magnet 72b.

[0068] In the embodiment, the fixed magnets 68 for fixing the suction housing 62 are provided at equal intervals around the boss portion 53 on the upper surface 54 of the base member 52, and the fixed magnets 72b for fixing the pin holder 63 are provided in a ring shape. However, the specific form of the fixed magnets 68, 72b may be other forms as long as they can detachably fix the suction housing 62 and the pin holder 63. However, according to the configuration in which the fixed magnets are provided intermittently at equal intervals or continuously in a ring shape around the thrust center of the thrust tool 60 as in the embodiment, there is an advantage that a well-balanced magnetic force is applied to the thrust tool 60 (the suction housing 62 and the pin holder 63) to stably fix the thrust tool 60.

[0069] In addition, in the embodiment, an example has been described in which the component push-up device of the present invention is applied to a component mounting device, but the component push-up device of the present invention can be applied to various devices, such as a taping device that stores dies diced from a wafer in a tape, or a component mounting device that mounts the dies on a substrate.

[0070] [Inventions included in the above embodiments] A component push-up device according to one aspect of the present invention is a component push-up device that peels a die from a wafer sheet by pushing the die up from below a wafer attached to the wafer sheet, and comprises: an adsorption surface that negatively adsorbs the underside of the wafer sheet, and a push-up tool including a push-up pin that is arranged to be able to appear and disappear from the adsorption surface toward the wafer sheet side and pushes up the die by protruding from the adsorption surface; and a support member that is arranged to be movable relatively along the wafer and detachably supports the push-up tool, and a magnet is provided on one side of either the push-up tool or the support member, and at least the opposing surface of the magnet on the other side is formed from a magnetic material.

[0071] According to the configuration of this component push-up device, it is possible to change (replace) the push-up tool with a simpler configuration than in the conventional structure that is provided with a dedicated clamp mechanism.

[0072] More specifically, in the component push-up device, the support member includes a base portion and a movable portion which rises and falls relative to the base portion, and the push-up tool includes a hollow suction housing having the suction surface at an upper end and which is detachably supported on the base portion, and a pin holder which holds the push-up pin, is arranged inside the housing and is detachably supported on the movable portion, and which rises and falls together with the movable portion, and the magnet is provided on one side of either the suction housing or the base portion, and at least the opposing surface of the magnet on the other side is formed from the magnetic material, and the magnet is provided on one side of either the pin holder or the movable portion, and at least the opposing surface of the magnet on the other side is formed from the magnetic material.

[0073] In this component push-up device, the multiple members provided as the push-up tool, that is, the suction housing and the pin holder, can be changed (replaced) with a simple configuration.

[0074] In the component push-up device, it is preferable that the magnet is provided on the support member side.

[0075] According to this configuration, the magnet is shared by a plurality of push-up tools (the suction housings and the pin holders), resulting in a rational configuration.

[0076] In addition, when the support member includes the base portion and the movable portion, and the push-up tool is equipped with the suction housing and the pin holder, and the component push-up device is configured so that when the pin holder is lowered together with the movable portion relative to the suction housing, a second magnet which is a magnet that fixes the pin holder to the movable portion is positioned above a first magnet which is a magnet that fixes the suction housing to the base portion, it is preferable that the first magnet and the second magnet have the same magnetic pole orientation.

[0077] This configuration prevents a repulsive force from acting between the two magnets, preventing the proper operation of the pin holder; in other words, prevents the pin holder from unintentionally rising and the push-up pin from protruding.

[0078] In the component push-up device, it is preferable that the magnets are provided discontinuously at equal intervals around the push-up center of the push-up tool, or are provided continuously in an annular shape.

[0079] According to this configuration, the magnetic force acts on the throw-up tool in a well-balanced manner, so that the throw-up tool can be stably fixed.

[0080] In the component push-up device, the force of attraction of the magnet to the push-up tool is preferably within a range of 5 to 30N.

[0081] According to this configuration, it is possible to achieve both the suction stability of the push-up tool and the ease of manual attachment and detachment of the push-up tool by the operator.

[0082] On the other hand, a component mounting apparatus according to one aspect of the present invention includes a component supply section in which a wafer that has been diced and attached to a wafer sheet is placed, a component transfer head that picks up a die from the wafer placed in the component supply section and transfers it to a substrate, and a component push-up device of any of the above-described aspects that pushes up the die from below the wafer sheet when the die is picked up by the component transfer head.

[0083] According to the configuration of this component mounting apparatus, since it is equipped with the component push-up device as described above, it is possible to change (replace) the push-up tool with a simple configuration.

Claims

1. A component push-up device that pushes up a die from below a wafer attached to a wafer sheet, thereby peeling the die from the wafer sheet, comprising: a push-up tool including a suction surface that negatively suctions the lower surface of the wafer sheet, and a push-up pin that is provided so as to be able to protrude from the suction surface toward the wafer sheet side and pushes up the die by protruding from the suction surface; a support member provided to be relatively movable along the wafer and to detachably support the push-up tool, The support member includes a base portion and a movable portion that moves up and down relative to the base portion, the push-up tool comprises: a hollow suction housing having the suction surface at an upper end and removably supported on the base portion; and a pin holder that holds the push-up pin, is disposed inside the suction housing, is removably supported on the movable portion, and moves up and down together with the movable portion; a magnet is provided on one of the suction housing and the base portion, and at least a surface of the other side facing the magnet is made of a magnetic material; a magnet provided on one of the pin holder and the movable part, and at least a surface of the other side facing the magnet is formed from the magnetic material;

2. 2. The part push-up device according to claim 1, The component push-up device, wherein the magnet is provided on the support member side.

3. 3. The component push-up device according to claim 2, the component push-up device is configured such that, when the pin holder is lowered together with the movable part relative to the suction housing, a second magnet which is a magnet for fixing the pin holder to the movable part is disposed above a first magnet which is a magnet for fixing the suction housing to the base part, The first magnet and the second magnet have magnetic poles oriented in the same direction.

4. 4. The part lifting device according to claim 1, A part push-up device, wherein the magnets are provided intermittently at equal intervals or continuously in an annular shape around the push-up center of the push-up tool.

5. 5. The part push-up device according to claim 1, The force of attraction of the magnet to the push-up tool is within a range of 5 to 30 N.

6. a component supply unit on which the diced wafers attached to the wafer sheet are placed; a component transfer head that picks up a die from a wafer arranged in the component supply unit and transfers it to a substrate; 6. A component mounting apparatus comprising: a component push-up device according to claim 1, which pushes up the die from below the wafer sheet when the die is picked up by the component transfer head.

Images