Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device and a sheet peeling method that can prevent a situation in which an adhesive sheet cannot be peeled off from an adherend.SOLUTION: A sheet peeling device EA peels off an adhesive sheet AS from an adherend WK having one face WK1 supported on a support surface SM1 and the other face WK2 pasted with one face AS1 of the adhesive sheet, and comprises: detection means 10 that detects a peeling start part AS3 on the basis of the positional relationship between a detection reference position CP based on at least one position of the support surface SM1 and the other face AS2 of the adhesive sheet AS, and the support surface SM1 or the other face AS2 of the adhesive sheet AS; pasting means 20 that pastes a tape PT for peeling to the peeling start part AS3; and peeling means 30 that applies a tension to the tape PT for peeling to peel off the adhesive sheet AS from the adherend WK. The detection means 10 detects irregularities of at least one of the support surface SM1 and the other face AS2 of the adhesive sheet, and reflects the difference of elevation in the irregularities on the detection reference position CP.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sheet peeling device and a sheet peeling method. [Background technology]

[0002] 2. Description of the Related Art A sheet peeling device is known that peels off an adhesive sheet from an adherend having one surface supported on a support surface and an adhesive sheet affixed to the other surface (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2010-157543 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the protective tape peeling device 30 (sheet peeling device) described in Patent Document 1, a wafer W (adherend) supported on the upper surface (support surface) of a supporting adhesive tape DT is moved, and a position sensor 62 (detection means) detects the height difference between the position of the support surface (detection reference position) and the position of the protective tape PT (adhesive sheet) attached to the adherend, thereby detecting the front end e (peeling start portion) of the adhesive sheet. Therefore, if there are projections and recesses on the support surface, the height difference of the projections and recesses will cause the projections to be erroneously detected as the peeling start portion of the adhesive sheet, and the peeling tape Ts (peeling tape) cannot be attached to the peeling start portion of the adhesive sheet, resulting in the inconvenience of being unable to peel the adhesive sheet from the adherend.

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method that can prevent a situation in which an adhesive sheet cannot be peeled from an adherend. [Means for solving the problem]

[0006] The present invention employs the configurations set forth in the claims. Effect of the Invention

[0007] According to the present invention, unevenness of at least one of the support surface and the adhesive sheet is detected, and the height difference of the unevenness is reflected in the detection reference position to detect the start of peeling of the adhesive sheet, thereby preventing the adhesive sheet from being unable to be peeled off from the adherend. [Brief description of the drawings]

[0008] [Figure 1] FIG. 2 is an explanatory diagram of a sheet peeling device according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, one embodiment of the present invention will be described with reference to FIG. In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes within a specified plane, and the Z-axis is an axis orthogonal to the specified plane. Furthermore, in this embodiment, the view from the front direction of Fig. 1(A) parallel to the Y-axis is used as a reference, and when indicating directions, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction of the Y-axis arrow, and "rear" is the opposite direction.

[0010] The sheet peeling apparatus EA is an apparatus for peeling an adhesive sheet AS from an adherend WK having one surface WK1 supported on an upper surface SM1 of a sheet member SM as a supporting surface and one surface AS1 of an adhesive sheet AS affixed to the other surface WK2, and is provided with: detection means 10 which performs a detection step of detecting a peel start portion AS3 of the adhesive sheet AS affixed to the adherend WK based on a detection reference position CP based on the position of at least one of the upper surface SM1 of the sheet member SM and the other surface AS2 of the adhesive sheet AS, and the positional relationship between the upper surface SM1 of the sheet member SM or the other surface AS2 of the adhesive sheet AS; application means 20 which performs an application step of applying a peeling tape PT to the peel start portion AS3 of the adhesive sheet AS; and peeling means 30 which performs a peeling step of applying tension to the peeling tape PT affixed to the peel start portion AS3 of the adhesive sheet AS, and peeling the adhesive sheet AS from the adherend WK, and is disposed in the vicinity of support means 40 which supports the adherend WK. In addition, the adherend WK in this embodiment is integrated with a ring frame RF, which serves as a frame member, via a sheet member SM to form an integrated object UP.

[0011] The detection means 10 comprises a distance measurement means 11 composed of an imaging means such as a camera or a projector, and various sensors such as an optical sensor or an ultrasonic sensor, and a control means 12 such as a personal computer or a sequencer which detects the peeling start portion AS3 of the adhesive sheet AS based on the measurement results by the distance measurement means 11 and controls the overall or partial operation of the sheet peeling device EA, and is configured to detect the unevenness of at least one of the upper surface SM1 of the sheet member SM and the other surface AS2 of the adhesive sheet AS, and reflect the height difference of the unevenness in the detection reference position CP to detect the peeling start portion AS3 of the adhesive sheet AS.

[0012] The application means 20 comprises a pay-out means 21 which pays out heat-sensitive adhesive peeling tape PT, a pressing means 22 which presses the peeling tape PT against the adhesive sheet AS to apply it, a cutting means 23 which cuts the peeling tape PT to a predetermined length, and a frame 25 which is supported by an output shaft 24A of a linear motor 24 as a driving device and which directly or indirectly supports each of the aforementioned means which constitute the application means 20. The payout means 21 includes a support roller 21A that supports the peeling tape PT, a drive roller 21D that is supported by an output shaft (not shown) of a rotary motor 21B as a drive device and that pinches the peeling tape PT with a pinch roller 21C, a guide roller 21E that guides the peeling tape PT, a slide plate 21H supported by a slider 21G of a linear motor 21F as a drive device, a pressure roller 21L that is rotatably supported by an output shaft 21K of a linear motor 21J as a drive device, and a chuck cylinder 21Q as a drive device, which is a holding means that is supported by a slider 21N of a linear motor 21M as a drive device and has a pair of gripping claws 21P. The pressing means 22 includes a linear motor 22A as a driving device, heating means 22C such as a coil heater or the heating side of a heat pipe supported on an output shaft 22B of the linear motor 22A, and a pressing member 22D supported by the heating means 22C. The cutting means 23 includes a linear motor 23A as a driving device, a cutting blade 23C supported by an output shaft 23B of the linear motor 23A, and a receiving plate 23D that receives the cutting blade 23C.

[0013] The peeling means 30 also uses part of the configuration of the joining means 20, and is composed of the linear motor 21M and chuck cylinder 21Q of the joining means 20.

[0014] The support means 40 includes a linear motor 41 as a driving device, and a table 42 supported by a slider 41A of the linear motor 41 and having a support surface 42A that can be adsorbed and held by a pressure reduction means (holding means) not shown, such as a pressure reduction pump or a vacuum ejector. The table 42 includes a recess 42B provided on its upper surface, and a porous member 42C that is disposed within the recess 42B and has an upper surface that serves as a support surface 42A having projections and recesses.

[0015] The operation of the sheet peeling apparatus EA will now be described. First, the user of the sheet peeling device EA (hereinafter, simply referred to as "user") sets the peeling tape PT as shown in the initial position of the sheet peeling device EA, in which each member is arranged at the solid line in FIG. 1(A), and then inputs a signal to start automatic operation via an operation means (not shown), such as an operation panel or a personal computer. Next, the attaching means 20 drives the heating means 22C, and heats the pressing member 22D to a predetermined temperature and maintains that temperature while the sheet peeling device EA is automatically operated. After that, when the user or a conveying means (not shown), such as a belt conveyor or an articulated robot, places the integrated object UP at a predetermined position on the support surface 42A, as shown in FIG. 1(A), the support means 40 drives a decompression means (not shown) and starts to suck and hold the integrated object UP on the support surface 42A. At this time, as shown in FIG. 1(C), the sheet member SM follows the unevenness of the support surface 42A to form unevenness on the upper surface SM1.

[0016] Next, the support means 40 drives the linear motor 41, and as shown in Fig. 1(B), the table 42 is moved back and forth to the left and right. At this time, as shown in Fig. 1(C), the detection means 10 measures the distance to the sheet member SM exposed between the ring frame RF and the adherend WK with the distance measurement means 11, and when the control means 12 detects the unevenness of the upper surface SM1 of the sheet member SM based on the measurement result, in order to reflect the height difference of the unevenness in the detection reference position CP, the control means 12 sets the position obtained by adding the thickness TH1 of the adherend WK in the direction of the distance measurement means 11 to the position of the apex PP1 of the highest convex part PP of the unevenness as the detection reference position CP. Then, while the table 42 is moving to the right, the peel start part AS3 of the adhesive sheet AS passes under the distance measurement means 11, and when the distance measurement means 11 measures the distance to the peel start part AS3 as shown in Fig. 1(C), the measured distance becomes shorter than the distance to the detection reference position CP, so that the control means 12 detects the peel start part AS3 of the adhesive sheet AS. Next, when the table 42 moves leftward and returns to its initial position, the support means 40 stops driving the linear motor 41 .

[0017] Thereafter, the joining means 20 drives the linear motor 21F to move the slide plate 21H to the right, and as shown by the two-dot chain line in Fig. 1(A), the peeling tape PT is fed between the pair of gripping claws 21P. Next, the joining means 20 drives the linear motor 21J to retract the presser roller 21L upward, and then drives the linear motor 21F to leave the peeling tape PT between the pair of gripping claws 21P and return the slide plate 21H to its initial position. Then, the joining means 20 drives the chuck cylinder 21Q to grip the peeling tape PT with the gripping claws 21P, and then drives the linear motor 21M to move the chuck cylinder 21Q to the right and pull out the peeling tape PT. Next, the bonding means 20 drives the linear motor 22A to lower the pressing member 22D, and as shown by the two-dot chain line in FIG. 1(A), the pressing member 22D presses the peeling tape PT against the peeling start portion AS3 of the adhesive sheet AS to bond it. After that, the bonding means 20 drives the linear motor 21J to return the pressing roller 21L to its initial position, and then drives the linear motor 23A to lower the cutting blade 23C to cut the peeling tape PT. Next, the bonding means 20 drives the linear motors 22A and 23A to return the pressing member 22D and the cutting blade 23C to their initial positions. Then, the bonding means 20 drives the linear motor 24 to retract the frame 25 upward, and then drives the linear motor 21M to move the chuck cylinder 21Q to the left, and the support means 40 drives the linear motor 41 to move the table 42 to the right. As a result, as shown in FIG. 1(D), the peeling tape PT and the adherend WK move relative to each other, and the adhesive sheet AS is peeled off from the adherend WK starting from the peel initiation portion AS3.

[0018] When the entire adhesive sheet AS is peeled off from the adherend WK, the support means 40 stops driving the linear motor 41, then stops driving the pressure reducing means (not shown), releasing the suction and holding of the adherend WK on the support surface 42A. Next, the application means 20 drives the chuck cylinder 21Q, releases the grip of the peeling tape PT by the gripping claws 21P, and delivers the adhesive sheet AS to a recovery means (not shown), such as a box or bag for recovering the peeled adhesive sheet AS, or to a user. Thereafter, the user or a transport means (not shown) transports the integrated object UP from which the adhesive sheet AS has been peeled off to the next process, and then each means drives its respective drive device to return each member to its initial position, and the same operations as above are repeated thereafter.

[0019] According to the embodiment described above, the unevenness of the adhesive sheet AS is detected, and the height difference of the unevenness is reflected in the detection reference position CP to detect the peel start portion AS3 of the adhesive sheet AS, thereby preventing the adhesive sheet AS from being unable to be peeled from the adherend WK.

[0020] As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, the present invention is mainly illustrated and described with respect to a specific embodiment, but a person skilled in the art can make various modifications to the above-described embodiment in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and purpose of the present invention. In addition, the description of the shape, material, etc. disclosed above, which is limited, is illustratively described to facilitate understanding of the present invention, and does not limit the present invention, so that the description of the names of the members from which some or all of the limitations of the shape, material, etc. are removed is included in the present invention.

[0021] For example, the detection means 10 may set the detection reference position CP based on the position of the other surface AS2 of the adhesive sheet AS, and may detect the unevenness of the adhesive sheet AS attached to an adherend WK having a protrusion WK3 as shown in Fig. 1(E), and may set the detection reference position CP to the position of the bottom point DP1 of the lowest recess DP of the unevenness plus the thickness TH2 of the adhesive sheet AS in the opposite direction to the distance measurement means 11. In this case, when the table 42 moves leftward, the peel start portion AS3 of the adhesive sheet AS passes under the distance measurement means 11, and when the distance measurement means 11 measures the distance to the support surface 42A, the measured distance becomes longer than the distance to the detection reference position CP, and therefore the control means 12 detects the peel start portion AS3 of the adhesive sheet AS. The detection means 10 may set the detection reference position CP based on the positions of both the upper surface SM1 of the sheet member SM and the other surface AS2 of the adhesive sheet AS. For example, the detection means 10 may detect the unevenness of both the sheet member SM and the adhesive sheet AS, and set the position between the apex PP1 of the highest convex portion PP of the unevenness of the sheet member SM and the bottom point DP1 of the lowest concave portion DP of the unevenness of the adhesive sheet AS as the detection reference position CP. In this case, when the table 42 moves to the right and the peel start portion AS3 of the adhesive sheet AS passes under the distance measurement means 11, the distance measurement means 11 measures the distance to the peel start portion AS3, and the measured distance becomes shorter than the distance to the detection reference position CP, so the control means 12 detects the peel start portion AS3 of the adhesive sheet AS. Also, when the table 42 moves to the left and the peel start portion AS3 of the adhesive sheet AS passes under the distance measurement means 11, the distance measurement means 11 measures the distance to the support surface 42A, and the measured distance becomes longer than the distance to the detection reference position CP, so the control means 12 detects the peel start portion AS3 of the adhesive sheet AS. If the edge of the adherend WK is not located outside the peel start portion AS3 of the adhesive sheet AS, the detection means 10 may set the detection reference position CP to the position of the apex PP1 of the highest convex portion PP among the unevenness of the sheet member SM or the position of the bottom point DP1 of the lowest concave portion DP among the unevenness of the adhesive sheet AS, or if the adherend WK is held on the supporting surface 42A without the sheet member SM, the detection means 10 may detect the unevenness of the supporting surface 42A as the supporting surface that supports the adherend WK, and set the detection reference position CP based on the supporting surface 42A in the same manner as described above.

[0022] The attachment means 20 may attach a strip of peeling tape PT to the adhesive sheet AS without cutting it, or may attach a sheet of peeling tape PT to the adhesive sheet AS. When attaching a sheet of peeling tape PT to the adhesive sheet AS, a cutting means 23 may or may not be provided. The adhering means 20 may adhere a pressure-sensitive peeling tape PT to an adhesive sheet AS, in which case it may or may not be equipped with a heating means 22C. The payout means 21 may support and guide the peeling tape PT using a plate-like member or a shaft member instead of rollers such as the support roller 21A and the guide roller 21E, or the peeling tape PT may be supported without being wound, for example, by folding it in a fan fold. The pressing means 22 may be equipped with a heating means such as a discharge heater, a microwave irradiation device, or a hot air blowing device, or may be equipped with a vibration means such as an ultrasonic vibration device or a vibrator that vibrates the pressing member 22D instead of or in combination with the heating means.

[0023] The peeling means 30 may not be configured to function as the adhering means 20. In this case, a driving device such as an articulated robot that applies tension to the peeling tape PT independently of the adhering means 20 may be used. The peeling means 30 may apply tension to the peeling tape PT by moving the table 42 without moving the chuck cylinder 21Q or while moving the chuck cylinder 21Q, thereby peeling the adhesive sheet AS from the adherend WK.

[0024] The support means 40 may or may not support the ring frame RF, and may or may not be provided in the sheet peeling apparatus EA of the present invention, and if it is not provided, the adherend WK and ring frame RF may be supported or moved by other equipment.

[0025] The adherend WK may be integrated with the frame member via the sheet member SM, or may not be integrated with the frame member, or may be supported on the support surface 42A without being supported by the sheet member SM. The frame member may be a ring frame RF or may be a non-annular shape (not connected at the outer periphery) or may be a circular, elliptical, polygonal, or other shape.

[0026] The material, type, shape, etc. of the adhesive sheet AS, sheet member SM, peeling tape PT, and adherend WK are not particularly limited. For example, the adhesive sheet AS, sheet member SM, peeling tape PT, and adherend WK may be circular, elliptical, polygonal such as triangular or rectangular, or other shapes, and the adhesive sheet AS, sheet member SM, and peeling tape PT may be pressure-sensitive adhesive, heat-sensitive adhesive, or other adhesive forms. In addition, the adhesive sheet AS, sheet member SM, and peeling tape PT may be, for example, a single layer of only an adhesive layer, a layer having an intermediate layer between the substrate and the adhesive layer, a layer having three or more layers such as a cover layer on the upper surface of the substrate, or even a so-called double-sided adhesive sheet that allows the substrate to be peeled off from the adhesive layer, and the double-sided adhesive sheet may be a single-layer or multi-layer intermediate layer, or a single-layer or multi-layer without an intermediate layer. The adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed of two or more of these, and may also be a member or article of any shape. The adhesive sheet AS and the sheet member SM may be read in terms of their function and use, and may be, for example, any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.

[0027] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are not limited at all to the components and steps of a mere embodiment shown in the above embodiment. For example, the attachment means may be any means capable of attaching a peeling tape to the peel start portion of the adhesive sheet, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0028] The driving equipment in the above-described embodiments may be electric equipment such as a rotary motor, a linear motor, a single-axis robot, or a multi-joint robot having joints on two or more axes, or an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or a direct or indirect combination of these may also be used. In the above-described embodiment, when a rotating member such as a roller is used, a driving device for rotating the rotating member may be provided, the surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be made of a non-deformable member, or other members such as a rotating or non-rotating shaft or blade may be used instead of the roller, and when a pressing means or pressing member such as a pressing roller or a pressing head is used to press an object to be pressed, a roller, a round bar, a blade material, a brush-like member, or a member that blows air or gas may be used instead of or in combination with the above-described examples, the pressing means may be made of a deformable member such as rubber, resin, sponge, or may be made of a non-deformable member such as metal or resin, and the peeling means may be made of a deformable member such as rubber, resin, sponge, or may be made of a non-deformable member such as metal or resin, and the peeling means may be made of a deformable member such as rubber, resin, or It may be constructed of deformable materials or may be constructed of materials that do not deform. When a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member) is used, a configuration may be adopted in which the supported member is supported (held) using a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, or the like. When a cutting means or a cutting member that cuts a member to be cut or forms an incision or cutting line in a member to be cut is used, a cutting means that cuts using a cutter blade, a laser cutter, an ion beam, fire, heat, water pressure, an electric heating wire, spraying of gas or liquid, or the like may be used instead of or in combination with the above examples, or a cutting means that moves the cutting means in combination with an appropriate driving device may be used. [Explanation of symbols]

[0029] EA…Sheet peeling device 10. Detection means 20...Attachment means 30...Removal means AS…adhesive sheet AS1...One side of the adhesive sheet AS2: The other side of the adhesive sheet AS3: Peeling start part CP: detection reference position SM1: Upper surface of sheet material (support surface) PT…Removal tape WK...Adherent WK1: One side of the substrate WK2: The other side of the substrate

Claims

1. A sheet peeling device for peeling an adhesive sheet from an adherend, the adherend having one surface supported on a support surface and one surface of an adhesive sheet affixed to the other surface, comprising: a detection means for detecting a peel start portion of the adhesive sheet attached to the adherend, based on a detection reference position based on the position of at least one of the support surface and the other surface of the adhesive sheet, and a positional relationship between the support surface or the other surface of the adhesive sheet; a peeling tape applying means for applying a peeling tape to the peeling start portion of the adhesive sheet; a peeling means for applying tension to the peeling tape attached to the peel start portion of the adhesive sheet, thereby peeling the adhesive sheet from the adherend, The sheet peeling device is characterized in that the detection means detects unevenness on at least one of the support surface and the other surface of the adhesive sheet, and detects the peeling start portion of the adhesive sheet by reflecting the height difference of the unevenness on the detection reference position.

2. 1. A sheet peeling method for peeling an adhesive sheet from an adherend having one surface supported on a support surface and one surface of an adhesive sheet attached to the other surface, comprising the steps of: a detection step of detecting a peel start portion of the adhesive sheet attached to the adherend based on a detection reference position based on the position of at least one of the support surface and the other surface of the adhesive sheet, and a positional relationship between the support surface or the other surface of the adhesive sheet; a step of applying a peeling tape to the peel start portion of the adhesive sheet; a peeling step of applying tension to the peeling tape attached to the peel start portion of the adhesive sheet to peel off the adhesive sheet from the adherend; A sheet peeling method characterized in that in the detection process, unevenness of at least one of the support surface and the other surface of the adhesive sheet is detected, and the height difference of the unevenness is reflected in the detection reference position to detect the peel start portion of the adhesive sheet.

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