Inspection gauge for coordinate measuring device and method for determining abnormality

Abstract

To improve accuracy in checking of a coordinate measurement device by using a check gauge.SOLUTION: A check gauge 20 is a triangular pyramid-shaped check gauge for a coordinate measurement device, and includes: a plurality of support members 21 where one end is placed at a position corresponding to a vertex of the triangular pyramid and the other ends are mutually joined in an area inside the triangular pyramid; and a plurality of spheres 23 provided at positions corresponding to the vertices of the triangular pyramid in the support members 21. The shapes of at least three support members 21 among the support members 21 are mutually different.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to an inspection gauge for a coordinate measuring device and a method for determining an abnormality. [Background technology]

[0002] Conventionally, an inspection gauge for a coordinate measuring device is known in which a sphere provided at a position corresponding to the apex of a triangular pyramid is connected by a rod-shaped member provided at a position corresponding to the side of the triangular pyramid (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] DE 19720883 A1 Summary of the Invention [Problem to be solved by the invention]

[0004] When inspecting a coordinate measuring device using a conventional inspection gauge, the positions of four spheres corresponding to the apexes of the triangular pyramid of the inspection gauge are measured. If it is difficult to distinguish between the four spheres on the inspection gauge, the coordinate measuring device is placed in a different orientation each time it is inspected. The positions of the four spheres on the inspection gauge are different due to the tolerances of the components that make up the inspection gauge or the variations in the assembly of the components, so placing the inspection gauge in a different orientation changes the measurement results. Thus, when using a conventional inspection gauge, it is difficult to measure multiple spheres under consistent conditions when inspecting a coordinate measuring device, which causes a problem of low inspection accuracy.

[0005] The present invention has been made in consideration of these points, and has an object to improve the accuracy of inspection of a coordinate measuring device using an inspection gauge. [Means for solving the problem]

[0006] The first aspect of the present invention relates to an inspection gauge for a coordinate measuring device, which is a pyramid-shaped inspection gauge for a coordinate measuring device and comprises a plurality of support members, one end of which is provided at a position corresponding to the apex of the pyramid and the other end of which is joined to each other in an inner region of the pyramid, and a plurality of spheres provided on the support members at positions corresponding to the apexes of the triangular pyramid, and at least three of the plurality of support members have different shapes.

[0007] Of the plurality of support members, one support member that is vertical when the coordinate measuring device inspection gauge is in use may have a shape different from the other plurality of support members.

[0008] The multiple support members are composed of one vertical support member that is vertical when the coordinate measuring device inspection gauge is in use, and three horizontal support members that are horizontal when the coordinate measuring device inspection gauge is in use, and one of the three horizontal support members may have a shape different from the other two horizontal support members.

[0009] One of the three horizontal support members may have a convex or concave portion formed on a surface thereof facing the vertical support member, the convex or concave portion having a different shape from that of the other two horizontal support members.

[0010] The shape of the tip of one of the three horizontal support members on the side that is not connected to the other two horizontal support members may be different from the shape of the tip of the other two horizontal support members on the side that is not connected to the one horizontal support member.

[0011] The support member may include a plurality of rod-shaped members, one end of which is connected to a position corresponding to the apex of the triangular pyramid, and the sphere may be provided at the other end, and the orientation of the plurality of rod-shaped members from the one end to the other end may be the same.

[0012] A second aspect of the present invention provides an inspection gauge for a coordinate measuring device having a triangular pyramid shape, and comprises a plurality of support members arranged so that one end is at a position corresponding to the apex of the triangular pyramid, a plurality of rod-shaped members having one ends connected to the plurality of support members at positions corresponding to the apex of the triangular pyramid, and a plurality of spheres provided at the other ends of the plurality of rod-shaped members, and the orientation from the one end to the other end of the plurality of rod-shaped members is the same.

[0013] An abnormality determination method according to a third aspect of the present invention includes a triangular pyramid-shaped inspection gauge for a coordinate measuring device, the inspection gauge comprising a plurality of support members each having one end provided at a position corresponding to the apex of the triangular pyramid and the other end joined to each other in an inner region of the triangular pyramid, and a plurality of spheres provided on the support members at positions corresponding to the apexes of the triangular pyramid, wherein at least three of the plurality of support members have different shapes, the method comprising the steps of: placing the inspection gauge for the coordinate measuring device on a coordinate measuring device; a distance measurement step of using the coordinate measuring device to measure a measured distance, which is the distance between the plurality of spheres of the inspection gauge for the coordinate measuring device; and an abnormality determination step of determining whether or not there is an abnormality in the coordinate measuring device based on whether the measured distance is within an appropriate range determined to be appropriate.

[0014] the plurality of support members in the coordinate measuring device inspection gauge are composed of one vertical support member which is vertical when the coordinate measuring device inspection gauge is used and three horizontal support members which are horizontal when the coordinate measuring device inspection gauge is used, a shape of a tip of one of the three horizontal support members, a reference horizontal support member, on the side not connected to the other two horizontal support members, is different from a shape of a tip of the other two horizontal support members on the side not connected to the reference horizontal support member, the coordinate measuring device is provided with a positioning member having a shape corresponding to the shape of the tip of the reference horizontal support member, and the method may further include a position measuring step which is executed before the distance measuring step, for measuring a position of at least any of the plurality of spheres, and a position determination step which is executed between the position measuring step and the distance measuring step, for determining whether or not the position of at least any of the plurality of spheres is a position in a state in which the reference horizontal support member is in contact with the positioning member, and the abnormality determination step may be executed on the condition that it is determined in the position determination step that the reference horizontal support member is a position in a state in which it is in contact with the positioning member.

[0015] An abnormality determination method according to a fourth aspect of the present invention includes a triangular pyramid-shaped inspection gauge for a coordinate measuring device, the inspection gauge comprising a plurality of support members each having one end positioned corresponding to the apex of the triangular pyramid, a plurality of rod-shaped members each having one end connected to a position corresponding to the apex of the triangular pyramid on the plurality of support members, and a plurality of spheres provided on the other ends of the plurality of rod-shaped members, the plurality of rod-shaped members having the same orientation from one end to the other end, a distance measurement step of measuring a measured distance, which is the distance between the plurality of spheres of the coordinate measuring device inspection gauge, using the probe of the coordinate measuring device with the orientation of the probe of the coordinate measuring device being the same as the orientation from one end to the other end of the plurality of rod-shaped members, and an abnormality determination step of determining whether or not there is an abnormality in the coordinate measuring device based on whether or not the measured distance is within an appropriate range determined to be appropriate. Effect of the Invention

[0016] According to the present invention, it is possible to improve the accuracy of inspection of a coordinate measuring device using an inspection gauge. [Brief description of the drawings]

[0017] [Figure 1] 1 is a diagram for explaining an overview of a three-dimensional measuring device 1 according to an embodiment of the present invention. [Diagram 2] 2 is a diagram showing an example of an inspection gauge 20. FIG. [Diagram 3] 2A to 2C are diagrams showing the configuration of an inspection gauge 20. [Figure 4] 1 shows a state in which the inspection gauge 20 and the positioning member 30 are placed. [Diagram 5] 11A and 11B are diagrams for explaining convex and concave portions formed on a horizontal support member. [Figure 6] 11 is a diagram showing a configuration of an inspection gauge 20 according to a first modified example. FIG. [Figure 7] 13 is a diagram showing the configuration of an inspection gauge 20 according to a second modified example. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] [Overview of 3D measuring device 1] FIG. 1 is a diagram for explaining an overview of a three-dimensional measuring device 1 according to the present embodiment. The three-dimensional measuring device 1 is an example of a coordinate measuring device according to the present embodiment, and the coordinate measuring device includes a device for measuring coordinates by attaching a measurement probe to a machine tool, for example. The three-dimensional measuring device 1 includes a table 10, a column 11, a supporter 12, a beam 13, a Y-axis direction drive unit 14, a slider 15, a Z-axis spindle 16, a probe 17, and a control unit 18. In FIG. 1, an inspection gauge 20, which is an inspection gauge for a three-dimensional measuring device having a triangular pyramid shape, and a positioning member 30 for placing the inspection gauge 20 at a predetermined position are placed on the table 10. A user of the three-dimensional measuring device 1 causes the three-dimensional measuring device 1 to measure the inspection gauge 20 in order to inspect the three-dimensional measuring device 1.

[0019] 2 is a diagram showing an example of the inspection gauge 20. The inspection gauge 20 includes a plurality of support members 21 (support member 21a, support member 21b, support member 21c, support member 21d), a plurality of rod-shaped members 22 (rod-shaped member 22a, rod-shaped member 22b, rod-shaped member 22c, rod-shaped member 22d), a plurality of spheres 23 (sphere 23a, sphere 23b, sphere 23c, sphere 23d), and a handle 24.

[0020] One end of each of the support members 21 is provided at a position corresponding to the apex of the triangular pyramid, and the other ends are connected to each other in the inner region of the triangular pyramid. One end of each of the rod-shaped members 22 is connected to a position of the support members 21 corresponding to the apex of the triangular pyramid, and a sphere 23 is provided at the other end. The rod-shaped members 22 have the same orientation from one end to the other end. The spheres 23 are spheres with which the probe 17 comes into contact so that the three-dimensional measuring device 1 can measure the coordinates. The handle 24 is a grip for the user of the three-dimensional measuring device 1 to move the inspection gauge 20 to a predetermined position.

[0021] Returning to Fig. 1, the three-dimensional measuring device 1 measures the coordinates of a plurality of measured positions on the inspection gauge 20, for example, by moving the probe 17 and bringing the probe 17 into contact with the inspection gauge 20, which is the object to be measured. The plurality of measured positions are predetermined positions on a plurality of spheres 23, for example, the central positions of the spheres 23 or the positions on the spheres 23 that are the furthest from the center of the inspection gauge 20. When the central position of the sphere 23 is used as the measured position, the measured position is measured based on the coordinates of a plurality of positions where the probe 17 comes into contact with the surface of the sphere.

[0022] Specifically, the three-dimensional measuring device 1 moves the slider 15 along the beam 13 in the X-axis direction to move the probe 17 in the X-axis direction. The three-dimensional measuring device 1 moves the probe 17 in the Y-axis direction by the Y-axis direction drive unit 14 moving a gate unit including the column 11, supporter 12, and beam 13. The three-dimensional measuring device 1 moves the probe 17 in the Z-axis direction by moving the Z-axis spindle 16 in the Z-axis direction relative to the slider 15. The three-dimensional measuring device 1 measures the coordinates of multiple measured positions on each of the multiple spheres 23 while moving the probe 17 in the X-axis, Y-axis, and Z-axis directions.

[0023] The control unit 18 has a communication section and is connected to an information terminal such as a computer used by a user of the coordinate measuring device 1 via a network such as an intranet or the Internet. The control unit 18 and the information terminal used by the user may be connected via a communication line such as a USB (Universal Serial Bus). The control unit 18 outputs abnormality determination information indicating the presence or absence of an abnormality in the coordinate measuring device 1, for example.

[0024] A method of inspecting the three-dimensional measuring device 1 using the inspection gauge 20 will be described below with reference to FIGS. 1 and 2. First, a user of the three-dimensional measuring device 1 places the inspection gauge 20 and the positioning member 30 at a predetermined position on the table 10. The positioning member 30 is placed, for example, at a predetermined position on the table 10. As an example, the surface of the table 10 on which the inspection gauge 20 is placed may be provided with a plurality of recesses, and the positioning member 30 may have a plurality of protrusions that are inserted into the plurality of recesses. By inserting the plurality of protrusions of the inspection gauge 20 into the plurality of recesses of the table 10, the user can place the positioning member 30 in the same position every time inspection is performed.

[0025] The inspection gauge 20 is placed with a predetermined portion in contact with the positioning member 30. Although details will be described later, the inspection gauge 20 is configured so that the position of the sphere 23 changes when the portion of the inspection gauge 20 that contacts the positioning member 30 changes. Therefore, the three-dimensional measuring device 1 can detect that the orientation in which the inspection gauge 20 is placed is incorrect when the result of measuring the position of the sphere 23 by the three-dimensional measuring device 1 significantly deviates from the reference value.

[0026] The three-dimensional measuring device 1 measures the positions of at least any of the multiple spheres 23. The three-dimensional measuring device 1 measures the center position of the sphere 23a, for example, by contacting the probe 17 with multiple positions on the surface of the sphere 23a. Based on the measured positions of the spheres 23, the three-dimensional measuring device 1 determines whether the inspection gauge 20 is placed in the correct orientation and in contact with the positioning member 30 at an appropriate position.

[0027] For example, when the measured center position of sphere 23a is within a predetermined range, three-dimensional measuring device 1 determines that inspection gauge 20 is placed in an appropriate position with the correct orientation. On the other hand, when the center position of sphere 23a is outside the predetermined range, three-dimensional measuring device 1 determines that inspection gauge 20 is not placed in an appropriate position with the correct orientation. Three-dimensional measuring device 1 outputs position determination information indicating the determination result from a communication section included in control unit 18.

[0028] When the three-dimensional measuring device 1 determines that the inspection gauge 20 is placed in an appropriate position with the correct orientation, it measures the measured distance, which is the distance between the multiple spheres 23 of the inspection gauge 20. The three-dimensional measuring device 1 measures the distance between the multiple spheres 23, for example, by measuring the center position of each of the multiple spheres 23. When the three-dimensional measuring device 1 determines that the inspection gauge 20 is not placed in an appropriate position with the correct orientation, it does not measure the measured distance.

[0029] The three-dimensional measuring device 1 judges whether or not there is an abnormality in the three-dimensional measuring device 1 based on whether or not the measured distance is within an appropriate range that is judged to be appropriate. For example, when the measured distance is within the appropriate range, the three-dimensional measuring device 1 judges that there is no abnormality in the three-dimensional measuring device 1, and when the measured distance is not within the appropriate range, it judges that there is an abnormality in the three-dimensional measuring device 1. The three-dimensional measuring device 1 outputs abnormality judgment information indicating the presence or absence of an abnormality from a communication section included in the control unit 18.

[0030] In this way, the user can place the inspection gauge 20 in the same orientation and at the same position during, for example, daily inspection, and can inspect the three-dimensional measuring device 1 without changing the measurement conditions. Furthermore, as shown in FIG. 2, in the inspection gauge 20, each of the multiple spheres 23 is connected to the upper part of the rod-shaped member 22. Therefore, the three-dimensional measuring device 1 does not need to change the orientation of the probe 17 depending on the sphere 23 whose position is to be measured, and no error occurs due to changing the orientation of the probe 17. As a result, the user can improve the accuracy of inspecting the three-dimensional measuring device 1 by using the inspection gauge 20.

[0031] [Configuration of Inspection Gauge 20] Fig. 3 is a diagram showing the configuration of the inspection gauge 20. Fig. 3(a) is a side view of the inspection gauge 20. Fig. 3(b) is a top view of the inspection gauge 20. As shown in Fig. 3, one end of each of the support members 21 is provided at a position corresponding to the apex of the triangular pyramid, and the other ends are connected to each other in the inner region of the triangular pyramid. The one end of each of the support members 21 that corresponds to the apex of the triangular pyramid is provided at a position different from the one end of each of the other support members 21 that corresponds to the apex of the triangular pyramid.

[0032] The rod members 22 are connected at one end to the support members 21 at positions corresponding to the apexes of the triangular pyramids, and the spheres 23 are provided at the other ends. As shown in FIG. 3, the rod members 22 are oriented in the same direction from one end to the other end. That is, the spheres 23 are provided above the support members 21. By connecting the spheres 23 to the rod members 22 in this manner, the three-dimensional measuring device 1 can measure the positions to be measured on the spheres 23 with the probe 17 oriented in the same direction as the probe 17 oriented from one end to the other end of the rod members 22. As a result, the three-dimensional measuring device 1 can measure the inspection gauge 20 without changing the direction of the probe 17, thereby preventing errors caused by changing the direction of the probe 17.

[0033] Next, the support member 21 will be described in detail. The multiple support members 21 are composed of, for example, one vertical support member that is in the vertical direction when the inspection gauge 20 is in use, and three horizontal support members that are in the horizontal direction when the inspection gauge 20 is in use. The vertical support member is, for example, the support member 21a shown in Fig. 3(a), and the horizontal support members are, for example, the support member 21b, the support member 21c, and the support member 21d shown in Fig. 3(b).

[0034] In the inspection gauge 20, at least three of the multiple support members 21 have different shapes. In FIG. 3, the shape of support member 21a is different from the shape of support member 21b or support member 21c, and the shape of support member 21d. The shape of support member 21b and the shape of support member 21c may be the same. By having the multiple support members 21 have different shapes in this way, the inspection gauge 20 can prevent the user of the three-dimensional measuring device 1 from placing the inspection gauge 20 in the wrong position or in the wrong orientation.

[0035] In the inspection gauge 20, for example, among the multiple support members 21, a vertical support member, which is one support member 21 that is vertical when the inspection gauge 20 is in use, has a different shape from the other multiple support members 21. Specifically, as shown in Fig. 3, support member 21a, which is a vertical support member, has a different shape from support members 21b, 21c, and 21d, which are the other multiple support members. Since the multiple support members 21 have different shapes in this way, the inspection gauge 20 can prevent the user of the three-dimensional measuring device 1 from placing the inspection gauge 20 in an incorrect orientation.

[0036] In the inspection gauge 20, for example, one of the three horizontal support members has a shape different from the other two horizontal support members. For example, in the inspection gauge 20, the width of the support member 21d shown in Fig. 3(b) in the direction perpendicular to the longitudinal direction may be different from the widths of the support members 21b and 21c in the direction perpendicular to the longitudinal direction.

[0037] In the inspection gauge 20, the shape of the tip of one of the three horizontal support members on the side that is not connected to the other two horizontal support members may be different from the shape of the tip of the other two horizontal support members on the side that is not connected to one of the horizontal support members.

[0038] Specifically, a flat surface is formed in a direction perpendicular to the longitudinal direction of support member 21d at the tip of support member 21d shown in Fig. 3(b) on the side not connected to the other support members 21. In contrast, a protruding portion is formed in the longitudinal direction of support member 21b and support member 21c at the tips of support members 21b and 21c on the sides not connected to the other support members 21. In this way, the shape of the tip of one support member 21d among the multiple horizontal support members is different from the shape of the tips of the other horizontal support members, so that the user can distinguish the multiple support members 21.

[0039] The three-dimensional measuring device 1 may also be provided with a positioning member 30 having a shape corresponding to the shape of the tip of support member 21b and support member 21c, which are reference horizontal support members that come into contact with positioning member 30. In this case, the three-dimensional measuring device 1 measures the position of at least one of the multiple spheres 23, and determines whether the measured position is a position in a state in which the reference horizontal support member is in appropriate contact with positioning member 30. On the condition that it has been determined that the measured position is a position in a state in which the reference horizontal support member is in contact with positioning member 30, the three-dimensional measuring device 1 determines whether or not there is an abnormality in the three-dimensional measuring device 1.

[0040] Fig. 4 is a diagram showing a state in which the inspection gauge 20 is in contact with the positioning member 30. Fig. 4 is a top view of the inspection gauge 20 and positioning member 30 placed on the table 10. Fig. 4(a) shows a state in which the inspection gauge 20 is in proper contact with the positioning member 30. Fig. 4(b) shows an example of a state in which the inspection gauge 20 is not in proper contact with the positioning member 30. Distances D1 and D2 are the distances between the center position of the sphere 23a and the positioning member 30 in a direction perpendicular to the longitudinal direction of the positioning member 30.

[0041] Fig. 4(a) shows a state in which supporting member 21b and supporting member 21c are in proper contact with predetermined positions of positioning member 30. As shown in Fig. 4(a), in supporting member 21b, two of the multiple faces forming a protruding portion in the longitudinal direction of supporting member 21b are in proper contact with the faces of the right-angled corners of positioning member 30. In supporting member 21c, one of the multiple faces forming a protruding portion in the longitudinal direction of supporting member 21c is in proper contact with positioning member 30.

[0042] In this way, when a user of the three-dimensional measuring device 1 places support members 21b and 21c, which are reference horizontal support members, in contact with the positioning member 30, the inspection gauge 20 comes into appropriate contact with the positioning member 30. By placing the inspection gauge 20 in appropriate contact with the positioning member 30, the user of the three-dimensional measuring device 1 can place the inspection gauge 20 in the same position every time an inspection is performed.

[0043] 4(b) shows an example of a state in which support members 21b and 21c are not in proper contact with a predetermined position of positioning member 30. As shown in FIG. 4(b), of the two faces of support member 21b that form a protruding portion in the longitudinal direction of support member 21b, neither face is in contact with positioning member 30. Furthermore, in FIG. 4(b), support member 21b, which is a reference horizontal support member, and support member 21d, which is not a reference horizontal support member, are in contact with positioning member 30, and support member 21c, which is a reference horizontal support member, is not in contact with positioning member 30.

[0044] In contrast, the shape of the tip of the reference horizontal support member provided on the inspection gauge 20 corresponds to the shape of the positioning member 30. Therefore, a user of the three-dimensional measuring device 1 can easily determine that the inspection gauge 20 is not in proper contact because the shape of the tip of the support member 21 and the shape of the positioning member 30 are different. As a result, the user of the three-dimensional measuring device 1 can reposition the inspection gauge 20 so that the inspection gauge 20 is in proper contact with the positioning member 30.

[0045] The three-dimensional measuring device 1 may measure the inspection gauge 20 to determine whether or not the inspection gauge 20 is in appropriate contact with the positioning member 30. The three-dimensional measuring device 1 measures the position of at least one of the multiple spheres 23, for example, by moving the probe 17, and determines whether or not the inspection gauge 20 is in appropriate contact with the positioning member 30 based on the measured position.

[0046] The three-dimensional measuring device 1 measures, for example, the coordinates of the center position of the sphere 23a. When the measured coordinates of the sphere 23a are within a predetermined range, the three-dimensional measuring device 1 determines that the inspection gauge 20 is in appropriate contact with the positioning member 30. On the other hand, when the measured coordinates of the sphere 23a are not within the predetermined range, the three-dimensional measuring device 1 determines that the inspection gauge 20 is not in appropriate contact with the positioning member 30. The predetermined range is determined based on a position measured or calculated in advance as the position of the sphere 23a when the inspection gauge 20 is placed in an appropriate position in the correct orientation.

[0047] By operating the three-dimensional measuring device 1 in this manner, the three-dimensional measuring device 1 can notify the user whether or not the inspection gauge 20 is in proper contact with the positioning member 30. As a result, if the inspection gauge 20 is not in proper contact with the positioning member 30, the user of the three-dimensional measuring device 1 can reposition the inspection gauge 20 so that the inspection gauge 20 is in proper contact with the positioning member 30. The three-dimensional measuring device 1 can prevent the inspection gauge 20 from being measured in a state in which the inspection gauge 20 is not in proper contact with the positioning member 30.

[0048] The three-dimensional measuring device 1 may determine whether the inspection gauge 20 is in appropriate contact with the positioning member 30 based on the distance between the center position of the sphere 23 and the positioning member 30 in a direction perpendicular to the longitudinal direction of the positioning member 30. For example, when the measured distance is distance D1 shown in Fig. 4(a), the three-dimensional measuring device 1 determines that the inspection gauge 20 is in appropriate contact with the positioning member 30. On the other hand, when the measured distance is distance D2 shown in Fig. 4(b), it determines that the inspection gauge 20 is not in appropriate contact with the positioning member 30.

[0049] In the inspection gauge 20, one of the three horizontal support members may have a convex or concave portion formed on the surface facing the vertical support member that has a different shape from those of the other two horizontal support members. Fig. 5 is a diagram for explaining the convex or concave portion formed on the horizontal support member. The inspection gauge 20 shown in Fig. 5 differs from the inspection gauge 20 shown in Fig. 3 in that it has a plurality of concave portions 25 (concave portions 25b, concave portions 25c) and convex portions 26, but is the same in other respects.

[0050] The three-dimensional measuring device 1 measures, for example, a distance H1 which is the difference between the Z-axis coordinate at the center position of sphere 23b and the Z-axis coordinate on the bottom surface of recess 25b. Based on the measured distance H1, the three-dimensional measuring device 1 determines that support member 21b is a reference horizontal support member that contacts positioning member 30. The three-dimensional measuring device 1 measures, for example, a distance H2 which is the difference between the Z-axis coordinate at the center position of sphere 23d and the Z-axis coordinate on the top surface of protrusion 26. Based on the measured distance H2, the three-dimensional measuring device 1 determines that support member 21d is a support member that does not contact positioning member 30.

[0051] With the inspection gauge 20 having such a configuration, the three-dimensional measuring device 1 can determine whether or not the inspection gauge 20 is in a position where it is in contact with the positioning member 30 by measuring the coordinates in the Z-axis direction of the multiple spheres 23 and the multiple recesses 25 and protrusions 26. Note that the inspection gauge 20 may be configured such that the multiple recesses 25 are replaced with multiple protrusions, and the protrusions 26 are replaced with recesses.

[0052] [First Modification] In the above description, a case where the multiple spheres 23 in the inspection gauge 20 are coupled to the multiple rod-shaped members 22 has been exemplified, but the present invention is not limited to this. FIG. 6 is a diagram showing the configuration of the inspection gauge 20 according to the first modified example. The inspection gauge 20 shown in FIG. 6 differs from the inspection gauge 20 shown in FIG. 3 in that the multiple spheres 23 are provided at positions corresponding to the apexes of the triangular pyramids of the multiple support members 21, but is the same in other respects. With such a configuration, the inspection gauge 20 does not require multiple rod-shaped members 22. As a result, the number of members constituting the inspection gauge 20 can be reduced.

[0053] [Second modified example] In the above description, a case has been exemplified in which at least three of the multiple support members 21 in the inspection gauge 20 have different shapes, but this is not limiting. Fig. 7 is a diagram showing the configuration of an inspection gauge 20 according to a second modified example. The inspection gauge 20 shown in Fig. 7 has multiple support members 21 (support member 21a, support member 21b, support member 21c, support member 21d, support member 21e, support member 21f), multiple rod-shaped members 22 (rod-shaped member 22a, rod-shaped member 22b, rod-shaped member 22c, rod-shaped member 22d), and multiple spheres (sphere 23a, sphere 23b, sphere 23c, sphere 23d).

[0054] The multiple support members 21 are provided so that one end is at a position corresponding to the apex of the triangular pyramid. The multiple rod-shaped members 22 have one end connected to a position of the multiple support members 21 that corresponds to the apex of the triangular pyramid, and the other end is provided with a sphere 23. The multiple rod-shaped members 22 are oriented in the same direction from one end to the other end.

[0055] The three-dimensional measuring device 1 measures a measurement distance, which is the distance between the multiple spheres of the inspection gauge 20, using the probe 17 with the orientation of the probe 17 being the same as the orientation from one end to the other end of the multiple rod-like members 22. The three-dimensional measuring device 1 determines whether or not there is an abnormality in the three-dimensional measuring device 1 based on whether or not the measurement distance is within an appropriate range that is determined to be appropriate.

[0056] With the inspection gauge 20 having such a configuration, the three-dimensional measuring device 1 can measure the multiple measurement positions of the multiple spheres 23 without changing the orientation of the probe 17. Furthermore, it becomes easier for the user of the three-dimensional measuring device 1 to place the inspection gauge 20 in an appropriate position and in an appropriate orientation. As a result, the three-dimensional measuring device 1 improves the accuracy of measuring the inspection gauge 20.

[0057] [Third Modification] In the above description, the sphere 23 is connected to one end of the support member 21 or one end of the rod-shaped member 22 above, but this is not limiting. The direction in which the sphere 23 is connected to the support member 21 or the rod-shaped member 22 is arbitrary. The sphere 23 may be connected to the side surface or bottom surface of the support member 21 or the rod-shaped member 22, for example.

[0058] [Effect of Inspection Gauge 20] As described above, the inspection gauge 20 includes a plurality of support members 21, one end of which is provided at a position corresponding to the apex of a triangular pyramid and the other end of which is joined to one another in an inner region of the triangular pyramid, and a plurality of spheres 23, which are provided on the plurality of support members 21 at positions corresponding to the apexes of the triangular pyramid. At least three of the plurality of support members 21 have different shapes.

[0059] With the inspection gauge 20 having such a configuration, the user of the three-dimensional measuring device 1 can easily place the inspection gauge 20 in an appropriate position on the table 10. The three-dimensional measuring device 1 can measure the multiple measurement positions of the multiple spheres 23 without changing the orientation of the probe 17. As a result, the accuracy with which the three-dimensional measuring device 1 measures the inspection gauge 20 can be improved.

[0060] Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of the gist of the present invention. For example, all or part of the device can be configured by distributing or integrating functionally or physically in any unit. In addition, new embodiments resulting from any combination of multiple embodiments are also included in the embodiments of the present invention. The effect of the new embodiment resulting from the combination combines the effect of the original embodiment. [Explanation of symbols]

[0061] 1 Three-dimensional measuring device 10 Tables 11 Column 12 Supporters 13. Beam 14 Y-axis direction drive unit 15 Slider 16 Z-axis spindle 17 Probe 18 Control Unit 20 Inspection gauge 21 Support member 22 Rod-shaped member 23 Sphere 24 Handle 25 Recess 26 Convex 30 Positioning member

Claims

1. A triangular pyramid-shaped inspection gauge for a coordinate measuring device, A plurality of support members each having one end provided at a position corresponding to the apex of the triangular pyramid and the other end connected to each other in an inner region of the triangular pyramid; A plurality of spheres are provided at positions corresponding to vertices of the triangular pyramids on the plurality of support members; Equipped with At least three of the plurality of support members have different shapes, the plurality of support members are composed of one vertical support member which is in a vertical direction when the coordinate measuring device inspection gauge is in use, and three horizontal support members which are in a horizontal direction when the coordinate measuring device inspection gauge is in use, The shape of a tip of one of the three horizontal support members on a side not connected to the other two horizontal support members is different from the shape of a tip of the other two horizontal support members on a side not connected to the one horizontal support member. Inspection gauge for coordinate measuring equipment.

2. A triangular pyramid-shaped inspection gauge for a coordinate measuring device, comprising: A plurality of support members each having one end provided at a position corresponding to the apex of the triangular pyramid and the other end connected to each other in an inner region of the triangular pyramid; A plurality of spheres are provided at positions corresponding to vertices of the triangular pyramids on the plurality of support members; Equipped with At least three of the plurality of support members have different shapes, the plurality of support members are composed of one vertical support member which is in a vertical direction when the coordinate measuring device inspection gauge is in use, and three horizontal support members which are in a horizontal direction when the coordinate measuring device inspection gauge is in use, A convex portion or a concave portion having a different shape from those of the other two horizontal support members is formed on a surface of one of the three horizontal support members on the side of the vertical support member. Inspection gauge for coordinate measuring equipment.

3. Among the plurality of support members, one support member that is vertical when the coordinate measuring device inspection gauge is in use has a shape different from the other plurality of support members.

3. An inspection gauge for a coordinate measuring device according to claim 1 or 2.

4. a plurality of rod-shaped members each having one end connected to a position corresponding to the apex of the triangular pyramid in the plurality of support members and the sphere provided on the other end; The orientation of the plurality of rod-shaped members from the one end to the other end is the same.

4. An inspection gauge for a coordinate measuring apparatus according to claim 1.

5. A coordinate measuring device inspection gauge having a triangular pyramid shape, comprising a plurality of support members, one end of which is provided at a position corresponding to the apex of a triangular pyramid and the other ends of which are joined to each other in an inner region of the triangular pyramid, and a plurality of spheres provided on the plurality of support members at positions corresponding to the apexes of the triangular pyramids, wherein at least three of the plurality of support members have shapes different from each other, wherein the plurality of support members are composed of one vertical support member that is vertical when the coordinate measuring device inspection gauge is used and three horizontal support members that are horizontal when the coordinate measuring device inspection gauge is used, and a mounting step of mounting the coordinate measuring device inspection gauge, wherein the shape of a tip of one of the three horizontal support members, a reference horizontal support member, on a coordinate measuring device provided with a positioning member having a shape corresponding to the shape of the tip of the reference horizontal support member is different from the shape of the tips of the other two horizontal support members on the sides not joined to the reference horizontal support member; a position measuring step of measuring the position of at least any of the plurality of spheres; a position determination step of determining whether or not the position of at least any of the plurality of spheres is a position in a state in which the reference horizontal support member is in contact with the positioning member; a distance measuring step of measuring a measured distance, which is a distance between a plurality of spheres of the inspection gauge for the coordinate measuring device, by using the coordinate measuring device; an abnormality determination step of determining whether or not there is an abnormality in the coordinate measuring device based on whether or not the measured distance is within an appropriate range that is determined to be appropriate; having executing the abnormality determination step on the condition that it is determined in the position determination step that the reference horizontal support member is in a position where it is in contact with the positioning member; Abnormality determination method.

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