Pellicle, exposure master, exposure apparatus, method for manufacturing a pellicle, and method for manufacturing a semiconductor device

Abstract

Provided is a pellicle with which it is possible to minimize damage to a pellicle film due to the pressure difference between the inside and outside of the pellicle.　A pellicle (10A) includes a pellicle film (11A) and a support frame (12A) having an open portion (H12A). The pellicle film has a self-supporting film area (RA) covering the open portion. The self-supporting film area includes an exposure area (RA1) and a peripheral edge area (RA2) surrounding the exposure area. The peripheral edge area has a thick film part (Ta) of greater thickness than that of the exposure area. The pellicle satisfies conditions (i) or (ii) below. (i) The support frame is a rectangular frame body and the thick film part is positioned at least in a pair of designated long-side areas in the peripheral edge area. (ii) The support frame is a square frame body and the thick film part is positioned at least in a pair of designated first center areas and a pair of designated second center areas within the peripheral edge area.

Description

[Technical field]

[0001] The present disclosure relates to a pellicle, an exposure master, an exposure apparatus, a method for manufacturing a pellicle, and a method for manufacturing a semiconductor device. [Background technology]

[0002] Photolithography is a technology in which a photosensitive substance is applied to the surface of an object such as an electronic component, printed circuit board, or display panel, and then exposed to light in a pattern to form a pattern. A transparent substrate with a pattern formed on one side, known as a photomask, is used.

[0003] In recent years, as exposure patterns have become increasingly finer, DUV (Deep UV) has become the preferred light source for exposure. Instead of ultra violet (Ultra Violet) light, the use of EUV (Extreme Ultra Violet) light with a shorter wavelength is expanding. In exposure methods using EUV light, a photomask with a reflective layer that reflects the exposure light is used. A pellicle is attached to the photomask to prevent foreign matter such as dust from adhering to the surface of the photomask.

[0004] Patent Document 1 discloses a pellicle. The pellicle disclosed in Patent Document 1 includes a specific pellicle film and a support frame that supports the pellicle film. The support frame has an opening. The pellicle film covers the opening of the support frame.

[0005] Patent Document 1: International Publication No. 2018 / 008594 Summary of the Invention [Problem to be solved by the invention]

[0006] EUV light is easily absorbed by gases such as oxygen and nitrogen, so exposure to EUV light (hereinafter also referred to as "EUV exposure") is performed in a vacuum environment.

[0007] When EUV exposure is started, the entire exposure apparatus is evacuated. The pellicle placed in the exposure apparatus is also exposed to a vacuum environment from the atmospheric pressure environment. The speed of evacuation of this exposure apparatus is fast. Specifically, even if a vent hole for suppressing the pressure difference between the inside and outside of the pellicle is formed in the support frame, the speed of the air pressure drop outside the pellicle is faster than the speed of the air pressure drop inside the pellicle. Therefore, as shown in FIG. 1, the pellicle film 510 is pushed from the inside of the pellicle 500 toward the outside of the pellicle 500. In FIG. 1, the arrow indicates the direction from the inside of the pellicle 500 to the outside of the pellicle 500, 530 indicates the photomask, and H520 indicates the opening.

[0008] On the other hand, when the EUV exposure is completed, the entire exposure apparatus is released from the vacuum environment to the atmospheric pressure environment. At this time, the pressure outside the pellicle suddenly becomes higher than the pressure inside the pellicle. Therefore, the opposite phenomenon to that during evacuation occurs in the pellicle. In detail, as shown in FIG. 2, the pellicle film 510 is pressed from the outside of the pellicle 500 toward the inside of the pellicle 500. In FIG. 2, the arrow indicates the direction from the outside of the pellicle 500 to the inside of the pellicle 500, 530 indicates the photomask, and H520 indicates the opening. When the pellicle film 510 is pressed toward the inside of the pellicle 500, as shown in FIG. 3A to FIG. 3C, there is a problem that stress is likely to concentrate on the portion of the pellicle film 510 facing the periphery P520 of the opening H520 of the support frame 520, and the pellicle film 510 is likely to be damaged.

[0009] The present disclosure has been made in consideration of the above circumstances. The problem to be solved by one embodiment of the present disclosure is to provide a pellicle, an exposure master, and an exposure apparatus that can suppress damage to the pellicle membrane caused by the pressure difference between the inside and outside of the pellicle. The problem to be solved by another embodiment of the present disclosure is to provide a method for manufacturing a pellicle and a method for manufacturing a semiconductor device that can suppress damage to the pellicle membrane caused by the pressure difference inside and outside the pellicle. [Means for solving the problem]

[0010] Means for solving the above problems include the following embodiments. <1> A support frame having an opening; a pellicle membrane covering the opening and supported by the support frame; Equipped with the pellicle membrane has a free-standing membrane region covering the opening; the free-standing film region includes an exposure region and a peripheral region surrounding the exposure region, the peripheral region has a thick film portion having a film thickness greater than a film thickness of the exposure region, A pellicle that satisfies the following (i) or (ii): (i) The support frame is a rectangular frame body formed by a pair of long sides and a pair of short sides. and the thick film portion is located at least in a pair of long side regions formed along the long side portion in the peripheral region in an extension direction of the long side portion, The pair of long side regions refer to regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of the length of the opening of the long side portion from the center of the long side portion toward one side and the other side in the extension direction. (ii) the support frame is a square frame body formed by a pair of first side portions and a pair of second side portions, The thick film portion is, in the peripheral region, a pair of first central regions formed along the first side portion in a first extension direction in which the first side portion extends; a pair of second central regions formed along the second side portion in a second extending direction in which the second side portion extends; Located at least The pair of first central regions indicate regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of a length of the opening of the first side portion from a center of the first side portion toward one side and the other side in the first extension direction, The pair of second central regions indicate regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of the length of the opening of the second side portion in the second extension direction from a center of the second side portion toward one side and the other side. <2> The above (i) is satisfied. <1> The pellicle described in <3> The above (ii) is satisfied. <1> The pellicle described in <4> The thickness of the thick film portion is 1.5 to 100 times the thickness of the exposure region. <1> ~ <3> 2. A pellicle according to any one of claims 1 to 11. <5> The pellicle membrane includes carbon nanotubes. <1> ~ <4> 2. A pellicle according to any one of claims 1 to 11. <6> The support frame is in contact with the pellicle membrane. <1> ~ <5> 2. A pellicle according to any one of claims 1 to 11. <7> The pellicle membrane has a first membrane portion having no through-holes and a second membrane portion having no membrane portion in an area corresponding to the exposure area, the first film portion has a first CNT layer including carbon nanotubes, the second film portion has a second CNT layer including carbon nanotubes, a total thickness of the first CNT layer and the second CNT layer in the thick film portion is 1.5 times or more and 100 times or less than a thickness of the first CNT layer in the exposure region; <1> ~ <6> 2. A pellicle according to any one of claims 1 to 11. <8> the second film portion is laminated on a surface of the first film portion opposite to the support frame side in a region corresponding to the thick film portion of the first film portion; <7> The pellicle described in <9> The original version and The above-mentioned attached to the master <1> ~ <8> A pellicle according to any one of the preceding claims. An exposure master comprising: <10> A light source that emits exposure light; The above <9> and an optical system that guides the exposure light emitted from the light source to the exposure master; Equipped with an exposure apparatus, the original plate being positioned such that the exposure light emitted from the light source is transmitted through the pellicle film and irradiated onto the original plate; <11> The exposure light is EUV light. <10> The exposure apparatus according to claim 1 . <12> The above <1> ~ <8> A method for producing a pellicle according to any one of the above, providing the support frame; providing the pellicle membrane; a connecting step of connecting the support frame to the pellicle membrane; A method for manufacturing a pellicle, comprising: <13> The pellicle membrane comprises carbon nanotubes, In the step of preparing the pellicle film, the thick film portion is formed by a spray coating method or an inkjet method. <12> A method for manufacturing a pellicle according to claim 1. <14> The above <1> ~ <8> A method for producing a pellicle according to any one of the above, providing the support frame; providing a first film; providing a second film; a connecting step of connecting the support frame to a portion of one main surface of the first film; a lamination step of laminating the second film on the other main surface of the first film to form the pellicle film; A method for manufacturing a pellicle, comprising: <15> Each of the first film and the second film includes carbon nanotubes. <14> A method for manufacturing a pellicle according to claim 1. <16> The pellicle film includes a laminated film in which two or more CNT films made of carbon nanotubes are laminated. <12> ~ <15> 13. A method for manufacturing a pellicle according to any one of claims 1 to 12. <17> The exposure light emitted from the light source is <9> irradiating the original plate with light transmitted through the pellicle film of the exposure original plate described in claim 1 and reflecting the light from the original plate; a step of exposing the sensitive substrate to a pattern by irradiating the sensitive substrate with the exposure light reflected by the original through the pellicle film; A method for manufacturing a semiconductor device comprising the steps of:

[0011] <18> A support frame having an opening; a pellicle membrane covering the opening and supported by the support frame; Equipped with the pellicle membrane has a free-standing membrane region covering the opening; the free-standing film region includes an exposure region and a peripheral region surrounding the exposure region, A pellicle, wherein the peripheral region has a thickness greater than the thickness of the exposure region. <19> The thickness of the peripheral region is 1.5 to 100 times the thickness of the exposure region. <18> The pellicle described in <20> The film thickness of the exposure region is 2 nm or more and 40 nm or less. <18> or <19> The pellicle described in <21> The pellicle membrane comprises carbon nanotubes. <18> ~ <20> 2. A pellicle according to any one of claims 1 to 11. <22> The support frame is in contact with the pellicle membrane. <18> ~ <21> 2. A pellicle according to any one of claims 1 to 11. <23> The above <18> ~ <22> A method for producing a pellicle according to any one of the above, providing the support frame; providing the pellicle membrane; a connecting step of connecting the support frame to the pellicle membrane; A method for manufacturing a pellicle, comprising: <24> The pellicle membrane comprises carbon nanotubes, In the step of preparing the pellicle film, the thick film portion is formed by a spray coating method or an inkjet method. <23> A method for manufacturing a pellicle according to claim 1. <25> The above <18> ~ <22> A method for producing a pellicle according to any one of the above, providing the support frame; providing a first film; providing a second film; a connecting step of connecting the support frame to a portion of one main surface of the first film; a lamination step of laminating the second film on the other main surface of the first film to form the pellicle film; A method for manufacturing a pellicle, comprising: <26> Each of the first film and the second film includes carbon nanotubes. <25> A method for manufacturing a pellicle according to claim 1. <27> The pellicle film includes a laminated film in which two or more CNT films made of carbon nanotubes are laminated. <23> ~ <26> 13. A method for manufacturing a pellicle according to any one of claims 1 to 12. Effect of the Invention

[0012] According to one embodiment of the present disclosure, it is possible to provide a pellicle, an exposure master, and an exposure apparatus that can suppress damage to the pellicle membrane caused by the pressure difference between the inside and outside of the pellicle. According to another embodiment of the present disclosure, a method for manufacturing a pellicle and a method for manufacturing a semiconductor device can be provided that can suppress damage to a pellicle membrane caused by the pressure difference inside and outside the pellicle. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic diagram for explaining the change in a conventional pellicle when the pressure inside an exposure apparatus is changed from an atmospheric pressure state to a vacuum state. [Diagram 2] FIG. 2 is a schematic diagram for explaining the change in a conventional pellicle when the inside of an exposure apparatus is changed from a vacuum state to an atmospheric pressure state. [Figure 3A] FIG. 3A is a schematic diagram showing an example of an edge portion of a support frame on the inner side of a conventional pellicle in an atmospheric pressure state before evacuation. [Figure 3B] FIG. 3B is a schematic diagram showing an example of an edge portion of a support frame on the inner side of a conventional pellicle when exposure is completed and the environment in which the pellicle is placed changes from a vacuum environment to an atmospheric pressure environment. [Figure 3C]FIG. 3C is a schematic diagram showing another example of the edge of the support frame on the inner side of a conventional pellicle when exposure is completed and the environment in which the pellicle is placed changes from a vacuum environment to an atmospheric pressure environment. [Figure 4] FIG. 4 is a top view of a pellicle showing the results of a simulation of stress distribution when a differential pressure of 3 Pa is applied to a pellicle membrane when the support frame is rectangular. [Diagram 5] FIG. 5 is a top view showing the appearance of the pellicle according to the first embodiment of the present disclosure. [Figure 6] FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. [Figure 7] FIG. 7 is a schematic top view of a microscope image of a portion of the periphery of an opening portion taken from above the pellicle membrane of the pellicle according to the first embodiment of the present disclosure. [Figure 8A] FIG. 8A is an explanatory diagram for explaining a method for transferring a free-standing film region of a pellicle film according to the first embodiment of the present disclosure onto a silicon substrate. [Figure 8B] FIG. 8B is an explanatory diagram for explaining a method for transferring the free-standing film region of the pellicle film according to the first embodiment of the present disclosure onto a silicon substrate. [Figure 9A] FIG. 9A is a top view of a silicon substrate onto which a portion corresponding to the free-standing film region of the pellicle film according to the first embodiment of the present disclosure has been transferred. [Figure 9B] FIG. 9B is a cross-sectional view taken along line IXB-IXB of FIG. 9A. [Figure 10] FIG. 10 is a cross-sectional view of a pellicle according to a modified example of the first embodiment of the present disclosure. [Figure 11] FIG. 11 is a schematic cross-sectional view of an EUV exposure apparatus, which is the exposure apparatus according to the first embodiment of the present disclosure. [Figure 12] FIG. 12 is a top view showing the appearance of a pellicle according to a second embodiment of the present disclosure. [Figure 13] FIG. 13 is a top view showing the appearance of a pellicle according to a third embodiment of the present disclosure. [Figure 14A] FIG. 14A is an explanatory diagram for explaining the manufacturing method of the pellicle of the first embodiment. [Figure 14B]FIG. 14B is an explanatory diagram for explaining the manufacturing method of the pellicle of the first embodiment. [Figure 14C] FIG. 14C is an explanatory diagram for explaining the manufacturing method of the pellicle of the first embodiment. [Figure 15] FIG. 15 is a cross-sectional view of the pellicle of the first embodiment. [Figure 16A] FIG. 16A is a schematic diagram showing a measurement device in a bulge test. [Figure 16B] FIG. 16B is a graph showing the pressure difference between the inside and outside of the pellicle versus elapsed time in a bulge test. [Figure 17A] FIG. 17A is an explanatory diagram for explaining a method for manufacturing a pellicle according to the second embodiment. [Figure 17B] FIG. 17B is an explanatory diagram for explaining the method of manufacturing the pellicle of the second embodiment. [Figure 18] FIG. 18 is a cross-sectional view of the pellicle of the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] In the present disclosure, a numerical range indicated using "~" means a range that includes the numerical values ​​before and after "~" as the minimum and maximum values, respectively. In the numerical ranges described in the present disclosure, the upper or lower limit value described in a certain numerical range may be replaced with the upper or lower limit value of another numerical range described in the present disclosure. In the numerical ranges described in the present disclosure, the upper or lower limit value described in a certain numerical range may be replaced with a value shown in the examples. In the present disclosure, combinations of two or more preferred embodiments are more preferred embodiments. In the present disclosure, when there are multiple substances corresponding to each component, the amount of each component means the total amount of the multiple substances, unless otherwise specified. In this specification, the term "process" refers not only to an independent process, but also to a process that cannot be clearly distinguished from other processes, as long as the intended purpose of the process is achieved.

[0015] The pellicle of the present disclosure comprises a support frame having an opening, and a pellicle membrane covering the opening and supported by the support frame. The pellicle membrane has a free-standing membrane region covering the opening. The free-standing membrane region includes an exposure region and a peripheral region surrounding the exposure region. The peripheral region has a thick membrane portion having a thickness greater than that of the exposure region. The following (i) or satisfies (ii). (i) The support frame is a rectangular frame body formed by a pair of long sides and a pair of short sides. and the thick film portion is located at least in a pair of long side regions formed along the long side portion in the peripheral region in an extension direction of the long side portion, The pair of long side regions refer to regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of the length of the opening of the long side portion from the center of the long side portion toward one side and the other side in the extension direction. (ii) the support frame is a square frame body formed by a pair of first side portions and a pair of second side portions, The thick film portion is, in the peripheral region, a pair of first central regions formed along the first side portion in a first extension direction in which the first side portion extends; a pair of second central regions formed along the second side portion in a second extending direction in which the second side portion extends; Located at least The pair of first central regions indicate regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of a length of the opening of the first side portion from a center of the first side portion toward one side and the other side in the first extension direction, The pair of second central regions indicate regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of the length of the opening of the second side portion in the second extension direction from a center of the second side portion toward one side and the other side.

[0016] In the present disclosure, "the thick film portion is located at least in a pair of long side regions of the peripheral region formed along the long side portion in the extension direction of the long side portion" means that the thick film portion may be located in the pair of long side regions. For example, when the support frame is a rectangular frame body, the thick film portion may be located in the entire peripheral region, or may be located in the pair of long side regions and a part of the peripheral region excluding the pair of long side regions. In the present disclosure, "the thick film portion is located at least in a pair of first central regions formed along the first side portion in a first extension direction in which the first side portion extends, and a pair of second central regions formed along the second side portion in a second extension direction in which the second side portion extends" means that the thick film portion may be located in the pair of first central regions and the pair of second central regions. For example, when the support frame is a square frame body, the thick film portion may be located in the entire peripheral region, or may be located in the pair of first central regions and the pair of second central regions, and in a part of the peripheral region excluding the pair of first central regions and the pair of second central regions. In the present disclosure, "the length of the long side portion at the opening" is the same as the length of the opening of the support frame in the extension direction. In the present disclosure, "the length of the first side portion at the opening" is the same as the length of the opening of the support frame in the first extension direction. In the present disclosure, "the length of the second side portion at the opening" is the same as the length of the opening of the support frame in the second extension direction.

[0017] The pellicle of the present disclosure, having the above-mentioned configuration, can suppress damage to the pellicle membrane caused by the pressure difference between the inside and outside of the pellicle. In other words, compared to a pellicle in which the thickness of the pellicle membrane is uniform, damage to the pellicle membrane caused by the pressure difference between the inside and outside of the pellicle can be suppressed. Conventional pellicles often had an adhesive layer between the support frame and the pellicle membrane, which prevented direct contact between the pellicle membrane and the support frame, making damage to the pellicle membrane less likely to occur. However, in many cases, pellicles using a film containing carbon nanotubes (hereinafter also referred to as "CNT film") have a structure in which the support frame and the pellicle film are in direct contact without an adhesive layer. The CNT film is softer than conventional polysilicon films, and is prone to stress concentration due to deformation. For the reasons mentioned above, the above-mentioned problem of damage to the pellicle membrane becomes even more pronounced in pellicles using CNT membranes. In particular, in a pellicle membrane that has been conventionally designed to have a substantially uniform thickness, if the thickness of the pellicle membrane is reduced in order to increase the transmittance of the pellicle membrane, the above-mentioned problems become even more pronounced.

[0018] The results of a simulation of the stress distribution when the pellicle is viewed from above when the support frame is a rectangular frame and a differential pressure of 3 Pa is applied to the pellicle membrane (a differential pressure is applied in the direction in which the pellicle membrane is pressed against the support frame side) are shown in Figure 4. The shape of the pellicle frame was rectangular (length of a pair of short sides (vertical): 110 mm, length of a pair of long sides (horizontal): 143 mm). As shown in Figure 4, it was found that the stress on the pellicle membrane caused by the pressure difference inside and outside the pellicle is greatest near the center of the pair of long sides of the support frame in the extension direction of the long sides. In the pellicle of the present disclosure, when the support frame is a rectangular frame body, the thick film portion is located in a pair of long side regions. This allows the pellicle of the present disclosure to suppress damage to the pellicle membrane caused by the pressure difference between the inside and outside of the pellicle. In particular, by providing the thick film portion so as to straddle the edge of the support frame from the peripheral region in the direction of the support frame, it is possible to easily suppress damage to the pellicle membrane due to stress concentration on the pellicle membrane at the edge of the support frame.

[0019] It was experimentally found that when the support frame is a square frame, the stress on the pellicle membrane caused by the pressure difference between the inside and outside of the pellicle is greatest near the center of each of the four sides of the support frame. In the pellicle of the present disclosure, when the support frame is a square frame body, the thick film portion is located in a pair of first central regions and a pair of second central regions. This allows the pellicle of the present disclosure to suppress damage to the pellicle film caused by the pressure difference between the inside and outside of the pellicle. In particular, by providing the thick film portion so as to straddle the edge of the support frame from the peripheral region in the direction of the support frame, it is possible to easily suppress damage to the pellicle film due to stress concentration on the pellicle film at the edge of the support frame.

[0020] The transmittance of EUV light is measured by a photodiode, and is expressed as the ratio of the current value detected with the pellicle film installed to the current value detected without the pellicle film installed.

[0021] As an example of a pellicle that satisfies (i), the pellicle according to the first embodiment and the pellicle according to the second embodiment are The pellicle will be described later with reference to Figures 5 to 10 and 12. A third embodiment as an example of a pellicle satisfying (ii) will be described later with reference to Figure 13.

[0022] In the pellicle of the present disclosure, it is preferable that the pellicle satisfies the above (i). This makes it possible to reduce the film thickness in the exposed area and increase the transmittance of the exposure light while suppressing damage to the pellicle film caused by the pressure difference between the inside and outside of the pellicle.

[0023] In the pellicle of the present disclosure, it is preferable that the pellicle satisfies the above-mentioned (ii), which makes it possible to reduce the film thickness in the exposed region and increase the transmittance of the exposure light while suppressing damage to the pellicle film caused by the pressure difference between the inside and outside of the pellicle.

[0024] In the pellicle of the present disclosure, the thickness of the thick film portion is not particularly limited, and is preferably 1.5 to 100 times the thickness of the exposure region, which can further suppress damage to the pellicle film caused by the pressure difference between the inside and outside of the pellicle, and is also excellent in manufacturing cost.

[0025] In the pellicle of the present disclosure, the pellicle film preferably contains carbon nanotubes. This allows the pellicle film to be a thin film with excellent mechanical strength, thereby increasing the transmittance of the exposure light through the pellicle film.

[0026] In the pellicle of the present disclosure, the support frame is preferably in contact with the pellicle membrane. This allows no adhesive to exist between the pellicle membrane and the support frame. Outgassing generally includes gas derived from water and gas derived from components contained in the adhesive. Therefore, the amount of outgassing can be suppressed.

[0027] In the pellicle of the present disclosure, the pellicle membrane has a first membrane portion having no through holes and a second membrane portion having no membrane portion in a region corresponding to the exposure region, the first membrane portion has a first CNT layer containing carbon nanotubes, the second membrane portion has a second CNT layer containing carbon nanotubes, and it is preferable that the total thickness of the first CNT layer and the second CNT layer in the thick membrane portion is 1.5 to 100 times the thickness of the first CNT layer in the exposure region. This makes it possible to further suppress damage to the pellicle membrane caused by the pressure difference between the inside and outside of the pellicle.

[0028] In the pellicle of the present disclosure, it is preferable that the second film portion is laminated in a region of the first film portion corresponding to the thick film portion and on the surface of the first film portion opposite the support frame side, whereby even if a part of the pellicle film separates at the end of the second film portion and carbon nanotube fragments are generated, the fragments can be prevented from falling onto the exposure master inside the pellicle.

[0029] The exposure master of the present disclosure comprises a master and a pellicle of the present disclosure attached to the master. The exposure masters according to the first to third embodiments, which are examples of the exposure master of the present disclosure, will be described later.

[0030] The exposure apparatus of the present disclosure includes a light source that emits exposure light, an exposure master of the present disclosure, and an optical system that guides the exposure light emitted from the light source to the exposure master. The exposure master is disposed such that the exposure light emitted from the light source passes through the pellicle film and is irradiated onto the master. An exposure master according to the first to third embodiments, which is an example of an exposure apparatus of the present disclosure, will be described later.

[0031] In the exposure apparatus of the present disclosure, the exposure light is preferably EUV light.

[0032] The method for producing a pellicle according to the first aspect of the present disclosure includes the steps of preparing the support frame, preparing the pellicle membrane, and connecting the support frame to the pellicle membrane, thereby obtaining the pellicle according to the present disclosure. A second manufacturing method, a fourth manufacturing method, and a sixth manufacturing method, which are examples of the method for manufacturing a pellicle according to the first embodiment of the present disclosure, will be described later.

[0033] In the method for manufacturing a pellicle of the present disclosure, the pellicle film preferably contains carbon nanotubes, and in the step of preparing the pellicle film, the thick film portion is preferably formed by a spray coating method or an inkjet method, which reduces manufacturing costs and selectively thickens only the area of ​​the thick film portion, making it easier to mass-produce pellicles.

[0034] The method for producing a pellicle according to the second aspect of the present disclosure includes the steps of preparing the support frame, preparing a first film, preparing a second film, connecting the support frame to a portion of one main surface of the first film, and laminating the second film on the other main surface of the first film to form the pellicle film, thereby obtaining the pellicle according to the present disclosure. A first manufacturing method, a third manufacturing method, and a fifth manufacturing method, which are examples of the method for manufacturing a pellicle according to the second embodiment of the present disclosure, will be described later.

[0035] In the method for manufacturing a pellicle of the present disclosure, it is preferable that each of the first film and the second film contains carbon nanotubes, which results in a pellicle film having good mechanical strength.

[0036] In the method for producing a pellicle of the present disclosure, the pellicle film preferably includes a laminated film in which two or more CNT films made of carbon nanotubes are laminated, which improves the mechanical strength of the obtained pellicle film.

[0037] The method for manufacturing a semiconductor device according to the present disclosure includes a step of irradiating an exposure light emitted from a light source onto the master through the pellicle film of the exposure master according to the present disclosure and reflecting the exposure light from the master, and a step of irradiating a sensitive substrate with the exposure light reflected by the master through the pellicle film, thereby exposing the sensitive substrate in a pattern, thereby obtaining a semiconductor device. The methods for manufacturing a semiconductor device according to the first to third embodiments, which are examples of the methods for manufacturing a semiconductor device of the present disclosure, will be described later.

[0038] (1) First embodiment (1.1) Pellicle Hereinafter, a pellicle 10A according to a first embodiment of the present disclosure will be described with reference to FIGS. 5 to 9B. The pellicle 10A satisfies the above-mentioned (i). In more detail, the pellicle 10A has the following features: The support frame 12A is a rectangular frame body, and the thick film portion TA is located over the entire peripheral region RA2. Fig. 5 is a top view showing the appearance of the pellicle 10A according to the first embodiment of the present disclosure. Fig. 6 is a cross-sectional view taken along line VI-VI in Fig. 5. In the drawings, the same or corresponding parts are given the same reference symbols and descriptions thereof will not be repeated.

[0039] As shown in Figures 5 and 6, the pellicle 10A includes a pellicle film 11A and a support frame 12A (see Figure 6). The support frame 12A has an opening H12A (see Figure 6). The pellicle film 11A is supported by the support frame 12A. The pellicle film 11A is in contact with the support frame 12A. In the first embodiment of the present disclosure, the outline of the opening H12A of the support frame 12A is rectangular in a plan view, as shown in Fig. 5. "Plan view" refers to a view in the thickness direction of the pellicle film 11A from a side of the pellicle film 11A where the support frame 12A is not disposed to a side where the support frame 12A of the pellicle film 11A is disposed. In addition, in a plan view, the outline of the opening H12A of the support frame 12A is not particularly limited and may be a square.

[0040] "The pellicle membrane and the support frame are in contact" refers to a configuration in which the pellicle membrane is attached to the support frame without a resin adhesive layer, and a layer (e.g., a coating, etc.) for bonding the pellicle membrane to the support frame may be interposed between the pellicle membrane and the support frame. The coating material is not limited, but may be, for example, equipment The material may be a material having an atomic ratio of 0.1 to 0.25, and may be a material having an atomic ratio of 0.1 to 0.25. The material may be a material having an atomic ratio of 0.1 to 0.25.

[0041] Hereinafter, in plan view, the direction in which one side of the outline of the rectangular opening H12A extends is defined as the left-right direction. In plan view, the direction perpendicular to the left-right direction is defined as the front-rear direction. The thickness direction of the support frame 12A is defined as the up-down direction. In the up-down direction, the side on which the support frame 12A of the pellicle film 11A is arranged is defined as the lower side, and the opposite side is defined as the upper side. 5 to 7, the right side corresponds to the positive X-axis direction, the left side corresponds to the negative X-axis direction, the front side corresponds to the positive Y-axis direction, the rear side corresponds to the negative Y-axis direction, the upper side corresponds to the positive Z-axis direction, and the lower side corresponds to the negative Z-axis direction.

[0042] (1.1.1) Pellicle membrane (1.1.1.1) Self-supporting membrane area and supported area 5, the pellicle membrane 11A has a free-standing membrane region RA and a supported region RB in plan view. The supported region RB surrounds the free-standing membrane region RA in plan view. The free-standing membrane region RA is adjacent to the supported region RB. The free-standing membrane region RA indicates the region covering the opening H12A of the support frame 12A. More specifically, the free-standing membrane region RA indicates the region inside the first frame line B1 in a planar view. The "first frame line B1" indicates a line that follows the contour of the opening H12A of the support frame 12A in a planar view. Details of the first frame line B1 will be described later with reference to FIG. 7. As shown in FIG. 6, the support frame 12A has a support surface S12 for supporting the pellicle membrane 11A. The free-standing membrane region RA does not face the support surface S12 of the support frame 12A. The supported region RB indicates a region of the pellicle film 11A that does not cover the opening H12A of the support frame 12A. More specifically, the supported region RB indicates a region outside the first frame line B1 in a plan view. The supported region RB includes the first frame line B1 (see FIG. 5). As shown in FIG. 6, the supported region RB faces the support surface S12 of the support frame 12A. The size of the free-standing film region RA is appropriately selected depending on the size of the pattern formed on the master, etc. The length L1 (see FIG. 5) of the free-standing film region RA in the left-right direction (X-axis direction) can be, for example, 130 mm to 160 mm, preferably 135 mm to 147 mm, and more preferably 137 mm to 145 mm. The length L2 (see FIG. 5) of the free-standing film region RA in the up-down direction (Z-axis direction) is, for example, 100 mm to 125 mm, preferably 110 mm to 116 mm, and more preferably 107 mm to 113 mm. The length L3 (see FIG. 5) of the supported region RB in the left-right direction (X-axis direction) is greater than the length L1 (see FIG. 5) of the free-standing membrane region RA in the left-right direction (X-axis direction), and may be any length that allows the pellicle membrane 11A to be supported by the support frame 12A. The length L3 (see FIG. 5) of the supported region RB in the left-right direction (X-axis direction) is, for example, 131 mm to 166 mm, preferably 136 mm to 153 mm, and more preferably 138 mm to 152 mm. The length L4 (see FIG. 5) of the supported region RB in the up-down direction (Z-axis direction) is greater than the length L2 (see FIG. 5) of the free-standing membrane region RA in the up-down direction (Z-axis direction), and may be any length that allows the pellicle membrane 11A to be supported by the support frame 12A.

[0043] 5, the free-standing film region RA includes an exposure region RA1 and a peripheral region RA2 in a plan view. The peripheral region RA2 surrounds the exposure region RA1. In the first embodiment of the present disclosure, the exposure region RA1 and the peripheral region RA2 are adjacent to each other. The exposure area RA1 indicates an area through which EUV light is transmitted during EUV exposure. The exposure area RA1 indicates an area inside the second frame line B2 (see FIG. 5). The second frame line B2 will be described later with reference to FIG. 7. The "area through which EUV light is transmitted" indicates an EUV light irradiation area required to expose a desired pattern on a sensitive substrate, which will be described later. The EUV light irradiation area indicates an area of ​​the free-standing film area RA that is designed in advance before EUV exposure. The peripheral region RA2 indicates the region outside the second frame line B2. The peripheral region RA2 may be a region that does not transmit EUV light during EUV exposure. The peripheral region RA2 includes the second frame line B2. The "region that does not transmit EUV light" indicates an area of ​​the free-standing film region RA outside the EUV light irradiation area. The region that does not transmit EUV light may transmit EUV light scattered by the master plate or the like described below.

[0044] The first frame line B1 and the second frame line B2 will be described with reference to Fig. 7. Fig. 7 is a schematic top view of a microscope image of a part of the periphery of the opening H12A captured from above the pellicle film 11A of the pellicle 10A according to the first embodiment of the present disclosure. In detail, Fig. 7 shows a schematic top view of a microscope image of the left part of the periphery of the opening H12A. The first frame line B1 and the second frame line B2 are determined by the following method. First, in a plan view, one of the four sides of the periphery of the rectangular opening H12A is imaged from above the pellicle film 11A of the pellicle 10A. As shown in FIG 7, in the obtained microscope image of the pellicle 10A, the contour line P of the periphery of the opening H12A is extracted. When the contour line P of the opening H12A is clear, the contour line P usually has an uneven shape or a straight shape. A straight line B11 (hereinafter also referred to as the "edge contour line B11") parallel to the front-rear direction (Y-axis direction) is drawn so as to be tangent to the part of the contour line P of the opening H12A that protrudes most toward the opening H12A side (i.e., the convex part). In the microscope image of the pellicle 10A, a line B12 (hereinafter also referred to as the "edge contour B12") parallel to the edge contour B11 is drawn so as to be in contact with the most recessed portion (i.e., the recess) of the contour P of the opening H12A on the side opposite to the opening H12A. The first frame B1 is rectangular in plan view, similar to the contour of the opening H12A. The edge contour B12 constitutes one side of the first frame B1. A straight line B13 (hereinafter also referred to as the "average edge contour B13") is drawn between the obtained edge contour B11 and edge contour B12 in the left-right direction (X-axis direction). The average edge contour B13 is parallel to each of the edge contour B11 and edge contour B12. A straight line B21 (hereinafter also referred to as "reference line B21") is drawn, passing through a position 100 μm away from the average edge contour line B13 in the direction of the exposure region RA1 (rightward (positive X-axis direction)). The reference line B21 and the average edge contour line B13 are parallel. The second frame line B2 is located closer to the exposure region RA1 side than the reference line B21. In other words, the second frame line B2 is more than 100 μm away from the average edge contour line B13 in the direction of the exposure region RA1. The second frame line B2 and the reference line B21 are parallel. The second frame line B2 is rectangular in plan view, similar to the contour of the opening H12A. In this manner, one side of each of the first frame line B1 and the second frame line B2 is determined. The remaining three sides of the first frame line B1 and the second frame line B2 are determined in a similar manner. In this manner, the first frame line B1 and the second frame line B2 are determined.

[0045] A laser microscope or an optical microscope is preferably used as a method for imaging a part of the periphery of the opening H12A from above the pellicle membrane 11A with a microscope. The magnification for observation is not particularly limited, but is preferably in the range of 200 times to 1000 times. Specifically, using a shape analysis laser microscope manufactured by Keyence Corporation (e.g., VK-100 of the VK series), the magnification of the objective lens is set to 20x, and the support frame 12A is placed on the stage so that the contact surface with the pellicle film 11A is perpendicular to the incident light. The observation points include the edges on the inside of the support frame 12A (ie, on the central side of the pellicle 10A shown in FIG. 5).

[0046] In addition, when the contour line P of the opening H12A is unclear in the microscope image of the pellicle 10A, the image of the height profile of the support frame 12A is displayed, and the contour line of the part about 10 μm below the pellicle film contact surface side (top) of the support frame 12A is used as the contour line to determine the above-mentioned edge contour line B11 and edge contour line B12, and the center line between the edge contour line B11 and the edge contour line B12 is defined as the average edge contour line B13. The pellicle film contact surface side (top) of the support frame 12A refers to the support surface S12.

[0047] The free-standing film region RA may include an intermediate region. The intermediate region may be a region that does not transmit EUV light during EUV exposure. The intermediate region is located between the exposure region RA1 and the peripheral region RA2 in a planar view. More specifically, the intermediate region surrounds the exposure region RA1. The intermediate region is surrounded by the peripheral region RA2. The intermediate region is adjacent to both the exposure region RA1 and the peripheral region RA2. The configuration of the intermediate region may be the same as the configuration of the exposure region RA1 or the configuration of the peripheral region RA2.

[0048] The length L5 (see FIG. 5) of the exposure area RA1 in the left-right direction (X-axis direction) is preferably 133 mm to 145 mm, and more preferably 135 mm to 143 mm. The length L6 (see FIG. 5) of the exposure area RA1 in the front-rear direction (Y-axis direction) is preferably 105 mm to 115 mm, and more preferably 106 mm to 113 mm.

[0049] (1.1.1.2) Pellicle membrane thickness The thickness of the peripheral region RA2 of the pellicle film 11A is thicker than the thickness of the exposure region RA1. That is, the thick film portion TA is located in the entire peripheral region RA2 of the pellicle film 11A. This makes the mechanical strength of the peripheral region RA2 higher than that of the exposure region RA1. As a result, the pellicle film 11A can suppress damage to the pellicle film 11A caused by the pressure difference between the inside and outside of the pellicle 10A, compared to a configuration in which the thickness of the peripheral region RA2 and the thickness of the exposure region RA1 are the same. By providing the thick film portion TA so as to straddle the first frame line B1 in the direction from the peripheral region RA2 to the supported region RB, damage to the pellicle film 11A due to stress concentration on the pellicle film 11A at the edge of the pellicle frame 12A can be suppressed.

[0050] The ratio of the film thickness of the peripheral region RA2 to the film thickness of the exposure region RA1 (i.e., the film thickness of the thick film portion TA) is preferably 1.5 to 100. This makes it possible to reduce the film thickness of the exposure region RA1 of the pellicle film 11A to increase the transmittance of the exposure light, while further suppressing damage to the pellicle film 11A caused by the pressure difference between the inside and outside of the pellicle 10A, and is excellent in manufacturing cost. The lower limit of the ratio of the film thickness of the peripheral region RA2 to the film thickness of the exposure region RA1 is more preferably 1.9 times or more, even more preferably 5 times or more, and particularly preferably 10 times or more, in order to further suppress damage to the pellicle membrane 11A caused by the pressure difference inside and outside the pellicle 10A. From the viewpoint of manufacturing costs, the upper limit of the ratio of the film thickness of the peripheral region RA2 to the film thickness of the exposure region RA1 is preferably 70 times or less, and more preferably 50 times or less.

[0051] The thickness of the exposure region RA1 may be appropriately selected depending on the material of the pellicle film 11A, and is preferably 2 nm to 40 nm inclusive, which can suppress deterioration due to damage to the pellicle film 11A and increase the transmittance of EUV light. The lower limit of the film thickness of the exposure region RA1 is more preferably 6 nm or more, further preferably 8 nm or more, and particularly preferably 10 nm or more, from the viewpoint of further suppressing deterioration due to damage to the pellicle film 11A. The upper limit of the film thickness of the exposure region RA1 is more preferably 30 nm or less, further preferably 20 nm or less, and particularly preferably 10 nm or less, from the viewpoint of further increasing the transmittance of EUV light, etc. The thinner the film thickness of the exposure region RA1 is, the more the problem of the first embodiment of the present disclosure becomes apparent.

[0052] The film thickness of the peripheral region RA2 (i.e., the film thickness of the thick film portion TA) may be appropriately selected according to the film thickness of the exposure region RA1, and is preferably 5 nm to 500 nm. This can reduce the manufacturing cost and suppress damage to the pellicle film 11A. From the viewpoint of further reducing the manufacturing cost, the upper limit of the film thickness of the peripheral region RA2 is more preferably 100 nm or less, and further preferably 50 nm or less. The lower limit of the film thickness of the peripheral region RA2 is more preferably 10 nm or more, and further preferably 20 nm or more, from the viewpoint of further suppressing damage to the pellicle membrane 11A.

[0053] The thickness of the supported region RB is not particularly limited and may be the same as or different from the thickness of the peripheral region RA2. In particular, it is more preferable that the thickness of the supported region RB is the same as the thickness of the peripheral region RA2 from the viewpoint of ease of manufacture, etc.

[0054] (1.1.1.2.1) Film Thickness Measurement Method A method for measuring the film thickness of the exposure region RA1 and the film thickness of the peripheral region RA2 (i.e., the film thickness of the thick film portion TA) will be described with reference to Figs. 8A to 9B. Figs. 8A and 8B are explanatory diagrams for explaining a method for transferring the free-standing film region RA of the pellicle film 11A according to the first embodiment of the present disclosure onto a silicon substrate 20. Fig. 9A is a top view of a silicon substrate onto which a portion 11X corresponding to the free-standing film region of the pellicle film 11A according to the first embodiment of the present disclosure has been transferred. Fig. 9B is a cross-sectional view taken along line IXB-IXB of Fig. 9A.

[0055] The film thickness of the exposure area RA1 and the film thickness of the peripheral area RA2 are each obtained by transferring only the portion 11X (hereinafter also referred to as the "free-standing film portion 11X") of the pellicle film 11A corresponding to the free-standing film area RA onto a silicon substrate 20, and measuring the film thickness of a specific portion of the free-standing film portion 11X using a film thickness measuring device.

[0056] 8A, a solvent is dropped onto a silicon substrate 20 to form a solvent layer 21 on the silicon substrate 20. Next, the pellicle film 11A of the pellicle 10A is placed on the silicon substrate 20 with the pellicle film 11A facing the silicon substrate 20. The solvent layer 21 is interposed between the silicon substrate 20 and the pellicle film 11A. The silicon substrate 20 only needs to be larger than the size of the free-standing film region of the pellicle film 11A, and it is preferable to use a silicon wafer having a size of 4 inches or more. The solvent includes water and organic solvents.

[0057] Next, the solvent layer 21 is dried to make the pellicle film 11A adhere closely to the silicon substrate 20 without any gaps. Next, when the silicon substrate 20 is fixed and the support frame 12A of the pellicle 10A is lifted, the portion 11X of the pellicle film 11A corresponding to the free-standing film region RA is separated from the pellicle film 11A and remains on the silicon substrate 20, as shown in FIG. 8B. That is, the free-standing film portion 11X is transferred to the silicon substrate 20. In a plan view, the outline of the free-standing film portion 11X follows the outline of the opening H12A of the support frame 12A. The portion 11Y of the pellicle film 11A corresponding to the supported region RB remains attached to the support frame 12A.

[0058] Next, a microspectrophotometric film thickness meter (for example, OPTM, model A-1, manufactured by Otsuka Electronics Co., Ltd.) is used as a film thickness measuring device to measure the film thickness at a specific measurement site of the free-standing film portion 11X transferred to the silicon substrate 20. As the lens, for example, a reflective 10x lens is used, and as the device for adjusting the diameter of the measurement point, an aperture with a diameter of 200 μm (diameter of the measurement point: 20 μm) is used. An aluminum substrate is used as a reference for measuring the reflection intensity.

[0059] (1.1.1.2.2) Measurement points In the first embodiment of the present disclosure, the measured value of the film thickness at the measurement point MP1 of the free-standing film portion 11X is set as the film thickness in the exposure region RA1. As shown in FIG. 9A, the measurement point MP1 indicates a position 5 mm away from the edge P11X of the free-standing film portion 11X toward the exposure region RA1. In the first embodiment of the present disclosure, the measured value of the film thickness at the measurement point MP2 of the free-standing film portion 11X is set as the film thickness of the peripheral region RA2. As shown in FIG. 9A, the measurement point MP2 is , own This is a position 100 μm away from the edge P11X of the standing film portion 11X toward the exposure region RA1.

[0060] (1.1.1.2.3) Conversion method to film thickness (optical thickness) For each measurement point, a reflectance spectrum is obtained in the wavelength range of 200 nm to 600 nm at wavelength intervals of 1 nm to 2 nm. Furthermore, when the pellicle film 11A is a film containing carbon nanotubes (hereinafter also referred to as "CNT film"), the film thickness at each measurement point can be calculated by analyzing the reflectance spectrum in the wavelength range of 225 to 500 nm using the least squares method using a three-layer model of air layer / CNT film layer / silicon substrate.

[0061] The optical constants of the layer of pellicle film 11A can be determined based on the material of pellicle film 11A. When pellicle film 11A is made of graphite, the optical constants of graphite can be used, and when pellicle film 11A is made of CNT film, the optical constants (refractive index: n, extinction coefficient: k) shown in Table 1 can be used.

[0062] [Table 1]

[0063] Depending on the type of CNT, the optical constants of the CNT film may differ from those shown in Table 1. When the optical constants of the CNT film differ from those shown in Table 1, the method for measuring the film thickness of the CNT film may be a measurement method using a contact film thickness meter (hereinafter simply referred to as a "contact film thickness measurement method"). As the contact film thickness meter, a stylus thickness measurement device (DEKTAK) or the like can be used.

[0064] (1.1.1.2.4) Contact measurement method When the method for measuring the thickness of the pellicle film 11A is a contact measurement method, the thickness of the pellicle film 11A can be measured as follows. The pellicle film 11A is transferred onto the silicon substrate 20 in the same manner as in the above-mentioned [Method of Measuring Film Thickness in the Exposure Region and the Peripheral Region]. A portion of the free-standing film portion 11X is removed at a position 5 mm away from the edge P11X of the free-standing film portion 11X toward the exposure region RA1 (a position within the exposure region RA1). This exposes the surface of the silicon substrate 20. The substrate surface height and the first film surface height are measured with a contact film thickness meter. "Substrate surface height" refers to the thickness of only the silicon substrate 20. "First film surface height" refers to the total thickness of the silicon substrate 20 and the exposure region RA1 of the free-standing film portion 11X. The difference between the substrate surface height and the first film surface height gives the film thickness of the free-standing film portion 11X in the exposure region RA1, i.e., the film thickness of the pellicle film 11A in the exposure region RA1. 。 Self A part of the free-standing film portion 11X is removed at a position 100 μm away from the edge P11X of the standing film portion 11X toward the exposure region RA1 (a position within the peripheral region RA2). This exposes the surface of the silicon substrate 20. The substrate surface height and the second film surface height are measured with a contact type film thickness meter. The "second film surface height" refers to the total thickness of the silicon substrate 20 and the peripheral region RA2 of the free-standing film portion 11X. The difference between the substrate surface height and the second film surface height gives the film thickness in the peripheral region RA2 of the free-standing film portion 11X, i.e., the film thickness in the peripheral region RA2 of the pellicle film 11A.

[0065] In addition, when the optical constants of the CNT film are those shown in Table 1 and the film thickness of the free-standing film region RA is 50 nm or less, the method for measuring the film thickness of the pellicle film 11A (CNT film) may be a contact-type measurement method. In particular, when the film thickness of the free-standing film region RA of the pellicle film 11A (CNT film) is 100 nm or more, there is a risk of large measurement errors if a microspectrophotometer is used as a film thickness measurement device. Therefore, when the film thickness of the free-standing film region RA of the pellicle film 11A (CNT film) is 100 nm or more, a contact-type measurement method is preferable.

[0066] When the pellicle film 11A is not a CNT film, the method for measuring the film thickness of the pellicle film 11A may be a contact measurement method.

[0067] (1.1.1.3) Structure of the pellicle membrane The structure of the pellicle film 11A is not particularly limited, and may be a single-layer structure or a laminated structure. Among them, the structure of the pellicle film 11A is preferably a laminated structure from the viewpoint of ease of manufacturing the pellicle film 11A. The laminated structure is, for example, a laminate of a first film portion (hereinafter also referred to as an "unprocessed film") and a second film portion (hereinafter also referred to as a "first processed film"). The unprocessed film is a flat film having no through-hole. The first processed film is a flat film having a through-hole. The through-hole penetrates the area corresponding to the exposure area. The periphery of the through-hole of the first processed film corresponds to the second frame line B2. In other words, the first processed film does not have a film portion in the area corresponding to the exposure area RA1. Each of the unprocessed film and the first processed film may be a single-layer film, or may be a laminated film in which multiple single-layer films are stacked. The material of each of the multiple single-layer films may be the same or different. The first processed film may be on the support frame 12A side of the pellicle film 11A, or on the opposite side of the support frame 12A side of the pellicle film 11A. In particular, from the viewpoint of preventing foreign matter from entering the opening H12A from the inner peripheral wall of the through hole of the first processed film, it is preferable that the first processed film is laminated on the surface of the support frame 12A side of the unprocessed film. In other words, it is preferable that the first processed film is on the opposite side of the support frame 12A side of the pellicle film 11A. In other words, it is preferable that the support frame 12A, the unprocessed film, and the first processed film are arranged in this order from the downward direction (Z-axis negative direction) to the upward direction (Z-axis positive direction). Foreign matter that enters from the inner peripheral wall of the through hole of the first processed film includes fiber waste of the first processed film.

[0068] (1.1.1.4) Pellicle membrane material Material of pellicle membrane 11A teeth The material is not particularly limited, and examples thereof include carbon-based materials, SiN, polysilicon, etc. Carbon-based materials include carbon nanotubes. When the pellicle film 11A is a laminated structure, the material of the unprocessed film and the material of the first processed film may be the same or different. In the first embodiment of the present disclosure, the pellicle film 11A is in direct contact with the support frame 12A, but the pellicle film 11A may be supported on the support frame 12A via a film adhesive layer. When the pellicle film 11A is supported on the support frame 12A via a film adhesive layer, the pellicle film 11A may be composed of an unprocessed film and an adhesive film. The adhesive film is composed of an adhesive that constitutes the film adhesive layer and that has seeped out from the unprocessed film. The adhesive layer is formed in an area corresponding to the peripheral area RA2 on the unprocessed film. The adhesive that constitutes the film adhesive layer may be the same as the adhesive that constitutes the master adhesive layer described later. In particular, it is preferable that the material of the pellicle film 11A contains carbon nanotubes. By making the pellicle film 11A a CNT film, good mechanical strength can be obtained.

[0069] (1.1.1.4.1)CNT film The tube diameter in the CNT can be, for example, from 0.8 nm to 400 nm. From the viewpoint of preventing damage to the pellicle membrane 11A, the tube diameter is preferably 2 nm or more, more preferably 4 nm or more, even more preferably 8 nm or more, very preferably 10 nm or more, and particularly preferably 20 nm or more. From the viewpoint of improving light transmittance, the tube diameter is preferably 100 nm or less, more preferably 80 nm or less, further preferably 60 nm or less, and particularly preferably 40 nm or less. The tube diameter of a CNT refers to the diameter of a single fiber when it exists as a single fiber in the pellicle membrane 11A, and refers to the diameter of the bundle when it exists as a bundle of CNTs.

[0070] There is no particular limitation on the CNT, and it may be a single-wall CNT or a multi-wall CNT.

[0071] When the CNTs are single-wall CNTs, the bundle thickness in the single-wall CNTs may be, for example, not less than 4 nm and not more than 400 nm. From the viewpoint of suppressing damage to the pellicle membrane 11A, the thickness of the bundle is preferably 10 nm or more, more preferably 20 nm or more, further preferably 40 nm or more, and particularly preferably 50 nm or more. From the viewpoint of improving light transmittance, the thickness of the bundle is preferably 100 nm or less, more preferably 80 nm or less, further preferably 60 nm or less, and particularly preferably 40 nm or less.

[0072] When the CNT is a multi-wall CNT, the thickness of a single fiber of the multi-wall CNT may be, for example, not less than 4 nm and not more than 400 nm. From the viewpoint of suppressing damage to the pellicle membrane 11A, the thickness of the bundle is preferably 10 nm or more, more preferably 20 nm or more, further preferably 40 nm or more, and particularly preferably 50 nm or more. From the viewpoint of improving light transmittance, the thickness of a single fiber of the multi-walled CNT is preferably 100 nm or less, more preferably 80 nm or less, further preferably 60 nm or less, and particularly preferably 40 nm or less.

[0073] In the pellicle membrane 11A, the CNTs preferably form a nonwoven fabric. Since the CNTs contained in pellicle membrane 11A are usually in the form of fibers, pellicle membrane 11A as a whole can be formed into a nonwoven fabric shape. Since the CNTs contained in pellicle membrane 11A are in the form of a nonwoven fabric, it is possible to ensure that pellicle membrane 11A has air permeability. For example, when performing exposure using EUV light with an exposure apparatus equipped with the pellicle 10A, it is necessary to irradiate the pellicle 10A with the EUV light under vacuum or reduced pressure conditions. 6, pellicle 10A has ventilation holes 121. Ventilation holes 121 are formed in support frame 12A. A vacuum or reduced pressure environment is created by removing air from inside pellicle 10A through ventilation holes 121. However, there is a problem in that it is time-consuming to form ventilation holes 121 in support frame 12A. In the pellicle membrane 11A, the CNTs form a nonwoven fabric, and thus the nonwoven fabric shape ensures breathability, making it possible to easily create a vacuum or reduced pressure environment.

[0074] (1.1.1.4.2) Antioxidant layer Other layers may be laminated on the pellicle membrane 11A. An antioxidant layer may be laminated on at least one side of the pellicle membrane 11A. By including an anti-oxidation layer in pellicle 10A, oxidation of pellicle film 11A can be suppressed during light irradiation or pellicle storage.

[0075] The material of the anti-oxidation layer is not particularly limited as long as it is a material that is stable against EUV light. For example, the material of the anti-oxidation layer is SiO x (x≦2), Si x N y (x / y is 0.7 to 1.5), SiON, Y2O3, YN, Mo, Ru, Rb, Sr, Y, Zr, Nb, or Rh.

[0076] In order not to inhibit the transmission of EUV light, the thickness of the antioxidant layer is preferably about 1 nm to 10 nm, and more preferably about 2 nm to 5 nm. By making the thickness of the antioxidant layer about 1 nm to 10 nm, it is possible to suppress the absorption of EUV light by the antioxidant layer and to suppress a decrease in the transmittance of EUV light through the pellicle film 11A.

[0077] The ratio of the thickness of the antioxidant layer to the thickness of the pellicle membrane 11A is preferably in the range of 0.03 to 1.0. If the ratio of the thickness of the antioxidant layer to the thickness of the pellicle membrane 11A is in the above numerical range, light absorption by the antioxidant layer can be suppressed, and a decrease in transmittance can be suppressed.

[0078] When an antioxidant layer is laminated on the pellicle film 11A, light reflection may occur at the newly formed layer interfaces, i.e., the interface between the antioxidant layer and air, and the interface between the antioxidant layer and the pellicle film 11A, resulting in a risk of a decrease in transmittance. The reflectance of light at these layer interfaces can be calculated according to the thicknesses of the pellicle film 11A and the antioxidant layer, and the types of elements that constitute the pellicle film 11A and the antioxidant layer. The reflectance can be reduced by optimizing the thickness of the film, similar to the principle of an antireflection film.

[0079] The thickness of the antioxidant layer is preferably set to an optimum thickness within a range in which the antioxidant layer has antioxidant properties while suppressing the decrease in light transmittance due to absorption and the decrease in light transmittance due to reflection.

[0080] The thickness uniformity and surface roughness of the antioxidant layer are not particularly limited. As long as there is no unevenness in the thickness or unevenness in the transmittance due to surface roughness, or any other problem caused by light scattering during the patterning step of exposure, the antioxidant layer may be either a continuous layer or a sea-island type, and may have an uneven thickness or surface roughness.

[0081] The average refractive index of the film including the pellicle film 11A and the antioxidant layer is preferably in the range of 1.9 to 5.0. The refractive index can be measured by a method such as spectroscopic ellipsometry. The average density of the film including the pellicle film 11A and the antioxidant layer is 1.5 g / cm 3 ~5.0g / cm 3 The density can be measured by a method such as X-ray reflectometry.

[0082] When the size of the free-standing membrane region RA is 143 mm×111 mm, the withstandable differential pressure is, for example, 10 Pa or more, preferably 20 Pa or more, more preferably 30 Pa or more, and even more preferably 50 Pa or more. The method for measuring the withstandable differential pressure when the size of the free-standing membrane region RA is 143 mm×111 mm is the same as in the “destructive evaluation by bulge test” described in the examples.

[0083] When the pellicle film 11A includes a CNT film and other layers are laminated on the CNT film, the thickness of the CNT film is preferably thicker than the thickness of the other layers. When pellicle membrane 11A includes a CNT film and another layer is laminated on the CNT film, it is preferable that the outermost layer among the layers constituting pellicle membrane 11A is another layer. When pellicle membrane 11A includes a CNT membrane and other layers are laminated on the CNT membrane, in another embodiment, the thickness of the CNT membrane is preferably 50% or more of the total thickness of pellicle membrane 11A including the other layers, and more preferably 70% or more.

[0084] (1.1.1.5) Physical properties of pellicle membrane When EUV light is used as the light for exposure, the energy of the EUV light is converted into heat through various relaxation processes, so it is preferable that the pellicle film 11A has heat dissipation and heat resistance. By including CNTs, the pellicle film 11A can have both heat dissipation properties and heat resistance, and there is little risk of the pellicle film 11A being damaged during EUV lithography. Therefore, while conventional pellicle films 11A made of single crystal silicon have problems in that they have poor heat dissipation properties and are prone to deformation or breakage due to thermal damage during EUV light irradiation, the use of pellicle film 11A can reliably protect the original plate. Details of the reason why the pellicle film 11A containing CNTs has both heat dissipation properties and heat resistance are as described in REP 2015 / 178250.

[0085] (1.1.2) Support Frame As shown in FIG. 5, the support frame 12A supports the pellicle membrane 11A.

[0086] The support frame 12A is a cylindrical object. In a plan view, the support frame 12A is a rectangular (i.e., oblong) frame formed by a pair of long side portions 122 and a pair of short side portions 123. The support frame 12A has an opening H12A. The opening H12A is a through hole for EUV exposure. During EUV exposure, the EUV light transmitted through the exposure region RA1 of the pellicle film 11A passes through the opening H12A and reaches the original. The size of the opening H12A is approximately the same as the size of the first frame line B1 in a plan view. The length L7 (see FIG. 6) of the support frame 12A in the up-down direction (Z-axis direction) is, for example, about 2 mm.

[0087] 6, the support frame 12A has ventilation holes 121 for maintaining a constant air pressure between the space surrounded by the pellicle 10A and the original (not shown) and the inside of the EUV exposure tool. Note that the support frame 12A does not have to have the ventilation holes 121. Even if the support frame 12A does not have the ventilation holes 121, if the pellicle film 11A is in the form of a nonwoven fabric, the film itself has breathability and can create a vacuum environment and a reduced pressure environment. Exposure to EUV light is performed in a vacuum environment (reduced pressure environment). Therefore, when the pressure is reduced to a vacuum, the pellicle film 11A may expand and contract due to the pressure difference between the inside and outside of the pellicle. In this case, the pellicle film 11A may be damaged. It is preferable that a filter is provided in the ventilation hole 121 to prevent foreign matter from entering the area surrounded by the pellicle 10A and the original. Examples of the filter include an Ultra Low Penetration Air (ULPA) filter, a metal mesh, etc. The support frame 12A may be colored to facilitate inspection as long as it does not interfere with exposure to light.

[0088] The material, shape, etc. of the support frame 12A are not particularly limited as long as the frame is capable of supporting the pellicle membrane 11A. The material of the support frame 12A may contain aluminum, titanium, stainless steel, ceramic materials (for example, silicon, glass, etc.), resins such as polyethylene, and the like. In particular, from the viewpoint of not having a large water content and suppressing the amount of outgassing, the material of the support frame 12A preferably contains aluminum, titanium, stainless steel, silicon, or glass, and more preferably contains aluminum, titanium, or silicon.

[0089] The support frame 12A may include a first support frame that supports the pellicle membrane 11A, and a second support frame that is connected to the first support frame. When the support frame 12A includes a first support frame and a second support frame, the first support frame and the second support frame may be bonded via a support frame adhesive layer. The adhesive constituting the support frame adhesive layer may be the same as the adhesive constituting the master plate adhesive layer 13 described later. For example, in the present disclosure, a pellicle 10A having a support frame having a configuration in which a second support frame is connected to a first support frame may be manufactured through cooperation between multiple parties, including a manufacturer of the first support frame that supports the pellicle membrane 11A and a person who connects the second support frame to the first support frame. Pellicle 10A also includes a configuration including pellicle film 11A and a first support frame at a stage prior to being connected to a second support frame.

[0090] The procedure and method for fixing the pellicle film 11A to the support frame are not particularly limited. An etched substrate may be used as part of the support frame 12A. For example, the pellicle film 11A may be laminated on a substrate that can be removed by a specific processing method, such as a metal, silicon substrate, glass, resin, or salt, and then a mask may be applied to the substrate surface opposite to the arrangement surface of the pellicle film 11A according to the size of the frame, and the substrate may be etched or dissolved while leaving the mask shape. This makes it possible to obtain a pellicle 10A using a part of the substrate as a support frame.

[0091] The trimming method for matching the shape of the substrate to the shape of the frame is not particularly limited. When a silicon substrate is used, a method of mechanically splitting a wafer or a laser trimming method can be used.

[0092] (1.1.3) Adhesive layer As shown in Fig. 6, the pellicle 10A according to the first embodiment of the present disclosure includes an original plate adhesive layer 13. The original plate adhesive layer 13 contains an adhesive. It is to be noted that the pellicle 10A does not necessarily have to include the master adhesive layer 13.

[0093] (1.1.3.1) Adhesives The adhesive contained in the adhesive layer 13 for the master plate is not particularly limited. Examples of the adhesive include an acrylic resin adhesive, an epoxy resin adhesive, a polyimide resin adhesive, a silicone resin adhesive, an inorganic adhesive, a double-sided adhesive tape, a polyolefin adhesive, and a hydrogenated styrene adhesive. Among the above, from the viewpoints of ease of application processing and ease of curing processing, it is preferable that the adhesive is at least one selected from the group consisting of a silicone resin adhesive, an acrylic resin adhesive, a hydrogenated styrene-based adhesive, and an epoxy resin adhesive. In the present disclosure, the adhesive is a concept that includes not only adhesives but also pressure-sensitive adhesives. When the adhesive is applied along the entire circumference of the pellicle 10A, the thickness of the adhesive layer 13 for the master may be 1 μm or more and 1 mm or less, preferably 5 μm to 500 μm, and more preferably 10 μm to 200 μm.

[0094] (1.1.4) Uses of pellicles The pellicle 10A may be used not only as a protective member for preventing foreign matter from adhering to the original in an EUV exposure device, but also as a protective member for protecting the original during storage or transportation of the original. For example, if the original is left in a state in which the pellicle is attached (exposed original), it can be stored as is after being removed from the EUV exposure device. Methods for attaching the pellicle to the original include a method of attaching it with an adhesive, an electrostatic adsorption method, a mechanical fixing method, and the like.

[0095] Pellicle 10A is suitable for use in exposure using exposure light with a short wavelength (for example, EUV light, light with an even shorter wavelength than EUV light, etc.). Among the above, the pellicle film 11A is preferably used for exposure using EUV light.

[0096] In the present disclosure, "EUV (Extreme Ultra Violet) light" refers to light having a wavelength of 1 nm or more and 30 nm or less. The wavelength of EUV light is preferably 5 nm or more and 13.5 nm or less. In this disclosure, EUV light and light with a shorter wavelength than EUV light are collectively referred to as "EUV light."

[0097] (1.1.5) Variations As a modification of pellicle 10A, pellicle membrane 11A forming pellicle 10A may have anti-oxidation layers laminated on both sides of the membrane. When an antioxidant layer is laminated on the pellicle film 11A, oxidation of the pellicle film 11A is suppressed during EUV light irradiation or pellicle storage. The antioxidant layer may be laminated on only one side of the pellicle film 11A.

[0098] As shown in FIG. 10, the pellicle film 11A may have a first film portion 11A1 and a second film portion 11A2. The first film portion 11A1 does not have a through hole. The second film portion 11A2 does not have a film portion in an area corresponding to the exposure area RA1. The second film portion 11A2 is laminated in an area corresponding to the thick film portion TA of the first film portion 11A1 (i.e., the peripheral area RA2) and on the surface of the first film portion 11A1 opposite to the support frame 12A side. The first film portion 11A1 has a first CNT layer 1111 containing carbon nanotubes, and a coating layer 1112. The coating layer 1112 is formed on both main surfaces of the first CNT layer 1111. The second film portion 11A2 has a second CNT layer 1113 containing carbon nanotubes, and a coating layer 1114. The coating layer 1114 is formed on both main surfaces of the second CNT layer 1113. The total thickness of the first CNT layer 1111 and the second CNT layer 1113 in the thick film portion TA (i.e., the peripheral region RA2) is 1.5 to 100 times the thickness of the first CNT layer 1111 in the exposure region RA1. This makes it possible to reduce the film thickness of the exposure region RA1 of the pellicle film 11A to increase the transmittance of the exposure light, while further suppressing damage to the pellicle film 11A due to the pressure difference between the inside and outside of the pellicle 10A. Examples of the material of each of the coating layers 1112 and 1114 include B, B4C, ZrN, Mo, Ru, SiC, TiN, and aC.

[0099] (1.2) Exposed master The exposure master according to the first embodiment of the present disclosure includes a master and a pellicle 10A attached to the master. The exposure master according to the first embodiment of the present disclosure includes the pellicle 10A, and therefore provides the same effects as the pellicle 10A.

[0100] In the first embodiment of the present disclosure, the method of mounting the original plate to the pellicle 10A (hereinafter also referred to as the "mounting method") involves fixing the original plate and the support frame 12A via an original plate adhesive layer 13 on one end face of the support frame 12A. The mounting method is not limited to the method of fixing the original plate and the support frame 12A via the original plate adhesive layer 13. For example, the mounting method may be to directly attach the original plate to the support frame 12A, or to fix the original plate and the support frame 12A mechanically or by utilizing the attractive force of a magnet or the like.

[0101] The master has a support substrate, a reflective layer, and an absorber layer. The reflective layer is laminated on the support substrate. The absorber is formed on the reflective layer. In this case, the pellicle 10A is attached to the side of the master where the reflective layer and absorber layer are provided. The absorber layer partially absorbs the light (e.g., EUV light) to form a desired image on a sensitive substrate (e.g., a semiconductor substrate with a photoresist coating). The reflective layer can be a multilayer film of molybdenum (Mo) and silicon (Si). The absorber layer can be a material that is highly absorbing of EUV light, such as chromium (Cr) or tantalum nitride.

[0102] (1.3) Exposure equipment The exposure apparatus according to the first embodiment of the present disclosure includes a light source, an exposure master according to the first embodiment of the present disclosure, and an optical system. The light source emits exposure light. The optical system guides the exposure light emitted from the light source to the exposure master. The exposure master is disposed such that the exposure light emitted from the light source passes through a pellicle film 11A and is irradiated onto the master. Therefore, the exposure apparatus according to the first embodiment of the present disclosure achieves the same effects as the exposure master according to the first embodiment of the present disclosure.

[0103] The exposure apparatus according to the first embodiment of the present disclosure comprises a light source that emits exposure light, an exposure master according to the first embodiment of the present disclosure, and an optical system that guides the exposure light emitted from the light source to the exposure master, and the exposure master is positioned so that the exposure light emitted from the light source passes through the pellicle film and is irradiated onto the master. According to this embodiment, in addition to being able to form fine patterns (e.g., line widths of 32 nm or less) using EUV light or the like, even when using EUV light, in which resolution defects due to foreign matter can easily become a problem, it is possible to perform pattern exposure with reduced resolution defects due to foreign matter.

[0104] The exposure light in the first embodiment of the present disclosure is preferably EUV light.

[0105] (1.4) Manufacturing method of pellicle Hereinafter, a method for manufacturing a pellicle according to the first embodiment of the present disclosure will be described.

[0106] The method for manufacturing a pellicle according to the first embodiment of the present disclosure includes a first manufacturing method and a second manufacturing method. The first and second manufacturing methods will be described below in this order.

[0107] (1.4.1) First manufacturing method The first production method of the present disclosure includes: A method for manufacturing a pellicle 10A, comprising the steps of: A step of preparing a support frame 12A (hereinafter also referred to as a "first support frame preparation step"); A step of preparing a first film (hereinafter also referred to as a "first film preparation step"); A step of preparing a second film (hereinafter also referred to as a "second film preparation step"); a first connecting step of connecting a support frame 12A to a portion of one main surface of the first membrane; a lamination step of laminating a second film on at least an area of ​​the other main surface of the first film corresponding to the peripheral area RA2 (i.e., the thick film portion TA) to form a pellicle film 11A; Includes.

[0108] One of the first film and the second film has a through hole (hereinafter, also simply referred to as a "through hole") that penetrates a region corresponding to the exposure region RA1.

[0109] In the first manufacturing method, one of the first film and the second film has a through hole, so that a pellicle 10A is obtained in which the film thickness of the peripheral region RA2 (i.e., the thick film portion TA) is thicker than the film thickness of the exposure region RA1. In other words, according to the first manufacturing method, a pellicle 10A is obtained that can suppress damage to the pellicle film 11A caused by the pressure difference between the inside and outside of the pellicle 10A.

[0110] The lamination step and the first connection step are performed after the first support frame preparation step, the first film preparation step, and the second film preparation step are performed. The order of performing the first support frame preparation step, the first film preparation step, and the second film preparation step is not particularly limited. The order of performing each of the lamination step and the first connection step is not particularly limited.

[0111] The second film preferably has a through hole. This results in a pellicle 10A in which the support frame 12A, the first film without a through hole, and the second film with a through hole are arranged in this order. This makes it possible to prevent foreign matter resulting from the through hole from entering the opening H12A. The foreign matter resulting from the through hole includes fiber waste from the pellicle film 11A.

[0112] Hereinafter, a case will be described in which the second film has a through-hole and the first connecting step and the laminating step are carried out in this order.

[0113] (1.4.1.1) First membrane preparation step In the first film preparing step, a first film is prepared. The method for preparing the first film is not particularly limited, and for example, the first film may be formed on a substrate.

[0114] The first film may contain CNTs. Hereinafter, the case where the first film contains CNTs will be described.

[0115] The first film preparation step may include a step of preparing CNTs (hereinafter also referred to as a "CNT preparation step") and a step of forming the CNTs into a sheet-like film to produce the first film (hereinafter also referred to as a "CNT film production step"). The CNT preparation step and the CNT film production step are performed in this order.

[0116] In the CNT preparation step, CNTs are prepared. The CNTs may be commercially available or may be manufactured.

[0117] It is preferable to use CNTs formed on a chemical vapor deposition substrate by a CVD (Chemical Vapor Deposition) method in which a metal catalyst is present in the reaction system and an oxidizing agent is added to the reaction atmosphere. The CVD method includes a plasma CVD method, a low pressure CVD method, or a thermal CVD method. In this case, water vapor is used as the oxidizing agent. The concentration of water vapor may be 10 ppm or more and 10,000 ppm or less, and water vapor may be added in a temperature environment of 600° C. or more and 1,000° C. or less.

[0118] A metal catalyst may be disposed or patterned on a chemical vapor deposition substrate to synthesize CNTs. The obtained CNTs may be single-layered or multi-layered, and may be CNTs standing vertically to the surface of the chemical vapor deposition substrate. For example, CNTs can be produced by referring to International Publication No. 2006 / 011655. An example of such a commercially available CNT is CNT manufactured using the super growth method, which is sold by Zeon Corporation.

[0119] As for CNT (or a CNT bulk structure), the improved direct injection pyrolytic synthesis method (hereinafter, also referred to as the "e-DIPS method") is used. Therefore, it is preferable to use one manufactured in this way. Direct Injection Pyrolytic Synthesis (hereinafter referred to as the "DIPS method") is a gas-phase flow method. More specifically, in the DIPS method, a hydrocarbon-based solution containing a catalyst (or catalyst precursor) and a reaction accelerator is atomized by spraying and introduced into a high-temperature heating furnace to synthesize single-walled CNTs in a flowing gas phase. The e-DIPS method is a gas-phase flow method that is an improvement on the DIPS method. In detail, the e-DIPS method focuses on the particle formation process in which the particle size of the ferrocene used as a catalyst differs between the upstream and downstream sides of the reactor, and is relatively easily decomposed in the carrier gas, unlike the DIPS method, which uses only organic solvents as a carbon source. In other words, it is a method that controls the growth point of single-walled CNTs by mixing a second carbon source that is likely to become a carbon source. For details, see Saito et al., J. Nanosci. Nanotechnol., 8 (2008) 6153-6157. An example of such a commercially available CNT product is "MEIJOeDIPS" manufactured by Meijo Nano Carbon Co., Ltd.

[0120] In the CNT film manufacturing process, the first film is manufactured by forming the CNTs into a sheet-like film.

[0121] CNTs (or CNT bulk structures) obtained by the CVD method, e-DIPS method, or the like can be used in a state of being dispersed in a solvent. A liquid (dispersion liquid) in which CNTs (or CNT bulk structures) are dispersed is applied onto a substrate, and the solvent is removed by evaporation, forming a CNT film on the substrate. In the first embodiment of the present disclosure, the solvent used in the dispersion is removed to obtain a film in which the CNTs are approximately parallel to the surface of the substrate. The coating method is not particularly limited, and for example, spin coating, dip coating, bar coating, spray coating, electrospray coating, or the like may be used. Although the metal catalyst used in CNT formation can sometimes cause a decrease in EUV transmittance, there is no effect when the CNTs are peeled off from the chemical vapor deposition substrate because there is almost no metal catalyst contained in the CNTs.

[0122] The substrate may be made of an inorganic material. For example, the substrate may be made of silicon (Si). The substrate is not limited to silicon (Si) and may be a semiconductor material such as germanium (Ge), silicon germanium (SiGe), silicon carbide (SiC), or gallium arsenide (GaAs), or may be a glass substrate such as a quartz glass substrate (silicon oxide (SiO2)), a soda glass substrate, a borosilicate glass substrate, or a sapphire substrate, silicon nitride (SiN), an aluminum nitride (AlN) substrate, a zirconia (ZrO2) substrate, or an aluminum oxide (Al2O3). From the viewpoint of reducing thermal strain with the CNT film, the substrate preferably contains at least one of silicon, sapphire, and silicon carbide, which have a linear thermal expansion coefficient close to that of the first film. Silicon (Si) may be any of single crystal silicon, polycrystalline silicon, microcrystalline silicon, and amorphous silicon, but single crystal silicon is preferred from the viewpoints of etching efficiency, high versatility, and low cost. The shape of the substrate is not particularly limited, and may be circular or rectangular. The thickness of the substrate is not particularly limited, but is preferably 100 μm or more and 1000 μm or less, and more preferably 200 μm or more and 1000 μm or less from the viewpoint of handling.

[0123] A method may also be used in which a dispersion liquid in which CNTs are dispersed is dropped onto filter paper and the solvent is removed to form a CNT film on the filter paper.

[0124] (1.4.1.2) Second film preparation process In the second film preparing step, a second film is prepared. The method for preparing the second film is not particularly limited, and for example, the second film may be formed on a substrate.

[0125] The second film may include CNTs. When the second film includes CNTs, the second film preparation step may be the same as the first film preparation step.

[0126] The second film preparing step includes a step of forming a through hole in the second film. The method for forming through holes in the second film is not particularly limited, and examples thereof include a method of mechanically rubbing the first film, a chemical etching method, an ablation method using laser light, a method of masking the substrate on which the first film is formed and forming through holes during the film formation process, and a method of forming a film by spray coating or inkjet printing so as to form through holes.

[0127] Each of the first and second films preferably contains CNT, and more preferably is made of CNT. By making each of the first and second films of CNT, the resulting pellicle film 11A can be made a thin film with excellent mechanical strength, and the transmittance of the pellicle film to the exposure light can be increased.

[0128] (1.4.1.3) First support frame preparation process In the first support frame preparation step, the support frame 12A is prepared. The prepared support frame 12A has an opening H12A. The support frame 12A may be prepared by a known method.

[0129] (1.4.1.4) First connection step In the first connecting step, the support frame 12A is connected to a part of one main surface of the first film. More specifically, in the first connecting step, the first film is connected to the support frame 12A so as to cover the opening H12A of the support frame 12A having the opening H12A. In the first connecting step, after the above-mentioned first film and the substrate are separated, the separated first film may be connected to the support frame 12A (that is, the pellicle frame).

[0130] The method for separating the first film from the substrate is not particularly limited, and examples thereof include the following production examples.

[0131] (1.4.1.4.1) Method using a sacrificial layer A sacrificial layer is laminated on a substrate, a first film is formed thereon, and then the sacrificial layer is removed to obtain a free-standing film. The sacrificial layer may be a metal, an oxide film, a resin, a salt, or the like that can be removed by a specific processing method. For example, the sacrificial layer may be a metal such as aluminum that dissolves in an acidic solution. Specifically, a metal layer is laminated on the surface of a glass substrate or a silicon substrate by deposition, sputtering, or the like, and a first film is further laminated on the metal layer, and then the substrate is immersed in a solution that can dissolve the metal layer, such as an acidic solution, to peel off the first film from the substrate.

[0132] When a silicon substrate having a native oxide film or a silicon oxide layer is used as the substrate, the native oxide film or the silicon oxide layer on the silicon substrate can be coated with the first film, and then the substrate can be immersed in an aqueous hydrofluoric acid solution to remove the native oxide film or the silicon oxide layer, thereby peeling off the first film from the substrate.

[0133] The material of the sacrificial layer to be laminated on the substrate may be a water-soluble material such as a partially saponified polyvinyl alcohol resin or a salt such as sodium chloride. The first film is laminated on the sacrificial layer to obtain a laminate, and the obtained laminate is immersed in water, whereby the first film can be peeled off from the substrate.

[0134] When selecting a method for removing the sacrificial layer deposited on the substrate, any method can be selected that is most appropriate depending on the characteristics of the first film, such as the process resistance, film strength, removal speed of the sacrificial layer, thickness uniformity, and surface roughness of the sacrificial layer.

[0135] (1.4.1.4.2) Etching or dissolving the substrate When the material of the substrate is a material that can be removed by a specific processing method, such as a metal, an oxide film, a resin, or a salt, the film can be obtained by laminating a first film on the substrate and then etching or dissolving the substrate.

[0136] For example, when a copper foil is used as the substrate, a first film can be laminated onto the copper foil surface, and then the copper foil substrate can be etched by immersing the substrate in a cupric chloride etching solution to remove the substrate and obtain the first film.

[0137] When the substrate is a glass substrate, after the first film is laminated on the glass substrate, the glass substrate is etched with hydrofluoric acid to remove the substrate, thereby obtaining the first film.

[0138] When the substrate is a silicon substrate, the first film can be obtained by laminating the first film on the silicon substrate, and then removing the silicon substrate by etching using wet etching or dry etching. For wet etching, etching liquids such as KOH, TMAH, and hydrazine can be used. For dry etching, etching gases such as fluorine-based (SF6, CF4, NF3, PF5, BF3, CHF3, XeF2, F2+NO), chlorine-based (Cl2, SiCl4), and bromine-based (IBr) can be used. Since the wet etching speed varies with temperature, it is preferable to lower the liquid temperature and the etching rate in order to etch without damaging the first film containing CNTs on the silicon substrate.

[0139] When dry etching a silicon substrate, a layer such as an etching stop layer may be provided in advance on the surface of the silicon substrate. The etching stop layer may be a layer made of SiO2 or SiN. The etching stop layer is preferably made of a film that generates tensile stress. Residual stress acting parallel to the substrate and film surfaces can be tensile or compressive. When a force acts inside the film to expand it, it becomes tensile stress, while when a force acts inside the film to shrink it, it becomes compressive stress. These stresses mainly occur during the film formation process. One of the factors that causes residual stress is the difference in the thermal expansion coefficient between the substrate and the film. When returning to room temperature, both the substrate and the film shrink, but the rate of shrinkage varies depending on the thermal expansion coefficient. If the thermal expansion coefficient of the film is greater than that of the substrate, it becomes tensile stress, and if the opposite is true, it becomes compressive stress. A film that generates tensile stress applies tension to the first film placed on the film, which is preferable because it creates a wrinkle-free first film. Since a layer made of SiN generates tensile stress, it is possible to make the first film obtained by dry etching the silicon substrate a wrinkle-free film. The etching stop layer can be removed after the silicon substrate has been dry-etched to obtain the desired free-standing film.

[0140] When the substrate is made of a salt such as sodium chloride, the first film can be laminated on the surface of the substrate, and then the substrate can be immersed in water to etch and remove the substrate, thereby obtaining the first film. When the substrate is a plastic substrate, the first film can be obtained by laminating the first film on the surface of the plastic substrate and then immersing the plastic substrate in a solvent in which the plastic substrate is soluble, thereby dissolving the plastic substrate.

[0141] (1.4.1.4.3) Surface Treatment By subjecting the substrate to a surface treatment, the interaction between the first film and the substrate surface can be controlled, and the first film can be easily peeled off from the substrate by immersion in a solvent or a mechanical peeling process. Methods for controlling the interaction between the first film and the substrate surface include, for example, a surface treatment method using a silane coupling agent, and a method for cleaning the substrate surface using water, an organic solvent, a piranha solution, sulfuric acid, UV ozone treatment, etc. When the substrate is a silicon substrate, a solution used in the RCA cleaning method, such as a mixture of hydrogen peroxide and ammonium hydroxide, or a mixture of hydrochloric acid and hydrogen peroxide, can be used.

[0142] The deposition of the sacrificial layer and the surface treatment on the substrate may be performed by combining a method of etching or dissolving the substrate. It is preferable that the substance used for the deposition or surface treatment of the sacrificial layer is unlikely to remain on the surface or inside of the first film, and even if the substance remains on the surface or inside of the first film, it can be easily removed. For example, the removal may be performed by etching with a gas, evaporation with heat, cleaning with a solvent, decomposition and removal with light, or a combination of these.

[0143] (1.4.1.5) Lamination process In the lamination step, a second film is laminated on at least a region of the other main surface of the first film that corresponds to the peripheral region, to form the pellicle film 11A. In the lamination step, after the second film and the substrate are separated, the separated second film may be laminated on the first film.

[0144] The method for separating the second film from the substrate is not particularly limited, and may be the same as the method exemplified as the method for separating the first film from the substrate.

[0145] The method for laminating the separated second film on the first film is not particularly limited, and examples thereof include a method of scooping up the second film floating on the surface of the water with the support frame 12A to which the first film is connected, and a method of forming and laminating the second film on the first film by a spray coating method or an inkjet method.

[0146] It is preferable that the pellicle film 11A includes a laminated film in which two or more CNT films made of carbon nanotubes are laminated, so that the mechanical strength of the obtained pellicle film is better. The number of carbon nanotube films constituting the laminated film may be two or more, and is preferably 2 to 30, and more preferably 3 to 10. Examples of the carbon nanotube film include the CNT sheet exemplified as the first film, and the film containing CNT exemplified as the second film.

[0147] (1.4.1.6) Adhesive layer formation process The first aspect of this disclosure Embodiment In the method for manufacturing the pellicle 10A, an adhesive layer forming step is included. By performing the adhesive layer forming step, an original such as a photomask and a support frame 12A can be bonded via an original adhesive layer 13. In the adhesive layer forming step, an adhesive is applied to the surface of the support frame 12A at the opening on the side opposite to the side to which the pellicle membrane 11A is connected. A separator may be disposed so as to contact the surface of the formed master adhesive layer 13 opposite to the support frame 12A. This allows the pellicle 10A to be stored while maintaining the adhesiveness of the master adhesive layer 13 until the master and the support frame 12A are bonded via the master adhesive layer 13. The method for manufacturing the pellicle 10A does not necessarily have to include the adhesive layer forming step.

[0148] (1.4.2) Second manufacturing method The second production method of the present disclosure includes: A method for manufacturing a pellicle 10A, comprising the steps of: A step of preparing a support frame 12A (hereinafter also referred to as a "second support frame preparation step"); A step of preparing a pellicle film 11A (hereinafter also referred to as a "pellicle film preparation step"); a second connecting step of connecting the support frame 12A to the pellicle membrane 11A; Includes.

[0149] According to the second manufacturing method of the present disclosure, a pellicle 10A can be obtained that is capable of suppressing damage to pellicle membrane 11A caused by the pressure difference between the inside and outside of pellicle 10A.

[0150] The second connection step is performed after the second support frame preparation step and the pellicle film preparation step are performed. The order in which the second support frame preparation step and the pellicle film preparation step are performed is not particularly limited.

[0151] (1.4.2.1) Pellicle membrane preparation process In the pellicle film preparation step, the pellicle film 11A is prepared. The pellicle film preparation step may be a step of simply preparing a previously manufactured pellicle film 11A, or may be a step of manufacturing the pellicle film 11A. When the pellicle membrane preparation step is a step of manufacturing the pellicle membrane 11A, the method of preparing the pellicle membrane 11A is appropriately selected depending on the type of the pellicle membrane 11A. The method for preparing the pellicle membrane 11A may include the above-mentioned first membrane preparation step and the above-mentioned second membrane preparation step.

[0152] The pellicle film 11A includes carbon nanotubes, and the thick film portion TA (that is, the peripheral area RA2) is preferably formed by a spray coating method or an inkjet method. The spray coating method or the inkjet method may be a known method.

[0153] (1.4.2.2) Second support frame preparation process The second support frame preparing step is performed in the same manner as the first support frame preparing step described above.

[0154] (1.4.2.3) Second connection step In the second connecting step, the pellicle film 11A is connected to the support frame 12A. More specifically, in the second connecting step, the pellicle film 11A is connected to the support frame 12A so as to cover the openings H12A of the support frame 12A having the openings H12A. In the second connecting step, for example, after separating the pellicle membrane 11A from the substrate, the separated pellicle membrane 11A may be connected to the support frame 12A. The method for separating the pellicle film 11A from the substrate is similar to the method exemplified above as the method for separating the first film from the substrate. The method for connecting the separated pellicle membrane 11A to the support frame 12A is not particularly limited, and may be, for example, a method in which the pellicle membrane 11A floating on the surface of the water is scooped up by the support frame 12A.

[0155] (1.5) Manufacturing method for semiconductor device The method for manufacturing a semiconductor device according to the first embodiment of the present disclosure includes a reflecting step and an exposing step. In the reflecting step, the exposure light emitted from the light source is transmitted through the pellicle film 11A of the exposure master, irradiated onto the master, and reflected by the master. In the exposing step, the exposure light reflected by the master is transmitted through the pellicle film 11A and irradiated onto the sensitive substrate, thereby exposing the sensitive substrate in a pattern. The reflecting step and the exposing step are performed in this order. According to the semiconductor device manufacturing method of the first embodiment of the present disclosure, even when EUV light is used, in which resolution defects due to foreign matter are likely to be a problem, a semiconductor device in which resolution defects due to foreign matter are reduced can be obtained.

[0156] Hereinafter, with reference to FIG. 11, an example of a method for manufacturing a semiconductor device according to the first embodiment of the present disclosure will be described. FIG. 11 is a schematic cross-sectional view of an EUV exposure apparatus 800, which is an exposure apparatus according to the first embodiment of the present disclosure. As shown in FIG. 11, the EUV exposure apparatus 800 includes a light source 831 that emits EUV light, an exposure master 850 which is an example of an exposure master of the present disclosure, and an illumination optical system 837 that guides the EUV light emitted from the light source 831 to the exposure master 850. The exposure master 850 includes a pellicle 10A including a pellicle film 11A and a support frame 12A, and a master 833. The exposure master 850 is disposed so that the EUV light emitted from the light source 831 is transmitted through the pellicle film 11A and irradiated onto the master 833. The master 833 reflects the irradiated EUV light in a pattern.

[0157] In the EUV exposure tool 800, filter windows 820 and 825 are provided between the light source 831 and the illumination optical system 837, and between the illumination optical system 837 and the original 833, respectively. The EUV exposure tool 800 includes a projection optical system 838 that guides the EUV light reflected by the original 833 to a photosensitive substrate 834 .

[0158] In the EUV exposure apparatus 800, the EUV light reflected by the original 833 is guided onto the sensitive substrate 834 through a projection optical system 838, and the sensitive substrate 834 is exposed in a pattern. Note that the EUV exposure is performed under reduced pressure conditions.

[0159] The EUV light source 831 emits EUV light toward the illumination optical system 837 . The EUV light source 831 includes a target material, a pulsed laser irradiation unit, and the like. EUV is obtained by irradiating this target material with a pulsed laser to generate plasma. If the target material is Sn, EUV with a wavelength of 13 nm to 14 nm is obtained. The wavelength of the light emitted by the EUV light source is not limited to 13 nm to 14 nm, and may be any light with a wavelength suitable for the purpose within the range of 5 nm to 30 nm.

[0160] The illumination optical system 837 collects the light emitted from the EUV light source 831, uniformizes the illuminance, and irradiates the original 833 with the light. The illumination optical system 837 includes a plurality of multilayer mirrors 832 for adjusting the optical path of EUV light, an optical integrator, etc. The multilayer mirror is a multilayer film in which molybdenum (Mo) and silicon (Si) are alternately stacked.

[0161] The method of mounting the filter windows 820, 825 is not particularly limited, and examples thereof include a method of attaching them via an adhesive or a method of mechanically fixing them inside the EUV exposure device. The filter window 820, which is disposed between the light source 831 and the illumination optical system 837, captures flying particles (debris) generated from the light source and prevents the flying particles (debris) from adhering to elements (e.g., the multilayer mirror 832) inside the illumination optical system 837. On the other hand, the filter window 825 arranged between the illumination optical system 837 and the original 833 captures particles (debris) scattered from the light source 831 side and prevents the scattered particles (debris) from adhering to the original 833.

[0162] Foreign matter attached to the original absorbs or scatters the EUV light, causing poor resolution on the wafer. Therefore, the pellicle 10A is attached so as to cover the EUV light irradiation area of ​​the original 833. The EUV light passes through the pellicle film 11A and is irradiated onto the original 833.

[0163] The EUV light reflected by the original 833 passes through the pellicle film 11 A and is irradiated onto the sensitive substrate 834 via the projection optical system 838 . The projection optical system 838 collects the light reflected by the original 833 and irradiates it onto the sensitive substrate 834. The projection optical system 838 includes a adjustment The multilayer mirrors 835, 836, etc. are included for reflecting the light.

[0164] The sensitive substrate 834 is a substrate, such as a semiconductor wafer coated with resist, and the resist is hardened in a pattern by the EUV reflected by the master 833. The resist is developed and the semiconductor wafer is etched to form a desired pattern on the semiconductor wafer.

[0165] The pellicle 10A is attached to the original 833 via an original adhesive layer 13 or the like. Foreign matter attached to the original absorbs or scatters EUV light, causing poor resolution on the wafer. Therefore, the pellicle 10A is attached so as to cover the EUV light irradiated area of ​​the original 833, and the EUV light passes through the pellicle film 11A and is irradiated onto the original 833.

[0166] The method of mounting the pellicle 10A on the original plate 833 may be any method capable of mounting the pellicle on the original plate without causing foreign matter to adhere to the surface of the original plate, and examples of such methods include a method of attaching the support frame 12A and the original plate 833 with an adhesive, an electrostatic adsorption method, a mechanical fixing method, etc. Preferably, a method of attaching the pellicle with an adhesive is used.

[0167] As the manufacturing method of the present disclosure, a method of laminating a first film and a second film has been disclosed, but other films may be further laminated in addition to these films.

[0168] (2) Second embodiment (2.1) Pellicle Hereinafter, a pellicle 10B according to a second embodiment of the present disclosure will be described with reference to FIG. 12. The pellicle 10B satisfies the above (i). FIG. 12 shows a pellicle 10B according to a second embodiment of the present disclosure. FIG. 1 is a top view showing the appearance of pellicle 10B.

[0169] Pellicle 10B is similar to pellicle 10A according to the first embodiment, except that the thick film portions are located only along the central portions of each of a pair of long sides of the support frame. As shown in Fig. 12, the pellicle 10B includes a pellicle film 11B and a support frame 12A. The support frame 12A has an opening H12A. The pellicle film 11B is supported by the support frame 12A. The pellicle film 11B is in contact with the support frame 12A. In the second embodiment of the present disclosure, as shown in FIG. 12, the outline of the opening H12A of the support frame 12A is rectangular in plan view.

[0170] Hereinafter, in plan view, the direction in which one side of the outline of the rectangular opening H12A extends is defined as the left-right direction. In plan view, the direction perpendicular to the left-right direction is defined as the front-rear direction. The thickness direction of the support frame 12A is defined as the up-down direction. In the up-down direction, the side on which the support frame 12A of the pellicle film 11B is arranged is defined as the lower side, and the opposite side is defined as the upper side. In FIG. 12, the right side corresponds to the positive X-axis direction, the left side corresponds to the negative X-axis direction, the front side corresponds to the positive Y-axis direction, the rear side corresponds to the negative Y-axis direction, the upper side corresponds to the positive Z-axis direction, and the lower side corresponds to the negative Z-axis direction.

[0171] (2.1.1) Pellicle membrane The pellicle film 11B differs from the pellicle film 11A according to the first embodiment in that the thick film portion TB is not formed over the entire peripheral region RA2.

[0172] (2.1.1.1) Self-supporting membrane area and supported area As shown in FIG. 12, the pellicle membrane 11B has a free-standing membrane region RA and a supported region RB in a plan view.

[0173] 12, the free-standing film region RA includes an exposure region RA1 and a peripheral region RA2 in a plan view. In the pellicle film 11B, the peripheral region RA2 surrounds the exposure region RA1. In the second embodiment of the present disclosure, the exposure region RA1 and the peripheral region RA2 are adjacent to each other.

[0174] The peripheral region RA2 has a pair of long side regions RA21. The support frame 12A is a rectangular frame body formed by a pair of long side portions 122 and a pair of short side portions 123. The pair of long side regions RA21 are formed along the long side portions 122 in the extension direction (X-axis direction) in which the long side portions 122 extend.

[0175] A pair of long side regions RA21 refer to the region of the peripheral region RA2 between two points E1 and E2 that are separated in the extension direction (X-axis direction) by a distance L8 (see FIG. 12) that indicates at least 5% of the length L1 (see FIG. 12) at the opening H12A of the long side portion 122 from the center 1220 of the long side portion 122 toward one side (positive X-axis direction) and the other side (negative X-axis direction).

[0176] The distance L8 is 5% or more of the length L1 at the opening H12A of the long side portion 122, and from the viewpoint of suppressing damage to the pellicle membrane 11B caused by the pressure difference between the inside and outside of the pellicle 10B, it is preferably 7% or more and 49% or less, and more preferably 10% or more and 45% or less.

[0177] The distance L8 is preferably 7 mm to 70 mm, and more preferably 15 mm to 65 mm.

[0178] (2.1.1.2) Pellicle membrane thickness The film thickness of the pair of long side regions RA21 of the pellicle film 11B (i.e., the film thickness of the thick film portion TB) is thicker than the film thickness of the exposure region RA1. As a result, the mechanical strength of the pair of long side regions RA21 is higher than the mechanical strength of the exposure region RA1. As described above with reference to FIG. 4, the stress on the pellicle film caused by the pressure difference between the inside and outside of the pellicle is likely to be large in the pair of long side regions RA21 of the pellicle film 11B. As a result, the pellicle film 11B can suppress damage to the pellicle film 11B caused by the pressure difference between the inside and outside of the pellicle 10B more than a configuration in which the film thickness of the pair of long side regions RA21 and the film thickness of the exposure region RA1 are the same. In particular, by providing a thick film portion so as to straddle the edge of the support frame 12A from the peripheral region RA2 toward the outer edge of the support frame 12A, it is possible to easily suppress damage to the pellicle film 11B due to stress concentration on the pellicle film 11B at the edge of the support frame 12A.

[0179] The ratio of the thickness of each of the pair of long side regions RA21 (i.e., the thickness of the thick film portion TB) to the thickness of the exposure region RA1 is preferably 1.5 to 100. This makes it possible to further suppress damage to the pellicle film 11B caused by the pressure difference between the inside and outside of the pellicle 10B, and is also excellent in manufacturing cost. The lower limit of the ratio of the film thickness of the pair of long side regions RA21 to the film thickness of the exposure region RA1 is more preferably 1.9 times or more, even more preferably 5 times or more, and particularly preferably 10 times or more, in order to further suppress damage to the pellicle membrane 11B caused by the pressure difference inside and outside the pellicle 10B. The upper limit of the ratio of the film thickness of the pair of long side regions RA21 to the film thickness of the exposure region RA1 is preferably 70 times or less, and more preferably 50 times or less, from the viewpoint of manufacturing costs.

[0180] The thick film portion TB needs to be located at least in the pair of long side regions RA21, and may be located only in the pair of long side regions RA21, or may be located in an area other than the pair of long side regions RA21 in addition to the pair of long side regions RA21. The regions different from the pair of long side regions RA21 include a pair of short side regions. The pair of short side regions are formed along the short side portion in the extension direction (Y-axis direction) of the short side portion 123. The pair of short side regions refer to regions in the peripheral region RA2 between two points that are apart in the extension direction (Y-axis direction) of the short side portion 123 by a distance that is at least 5% of the length L2 of the opening H12A of the short side portion 123 from the center of the short side portion 123 toward one side (Y-axis positive direction) and the other side (Y-axis negative direction).

[0181] (2.1.1.3) Film Thickness Measurement Method The method for measuring the film thickness in the exposure region RA1 and the pair of long side regions RA21 is similar to the method for measuring the film thickness in the exposure region RA1 and the film thickness in the peripheral region RA2 of the pellicle film 11A, respectively.

[0182] (2.1.1.4) Structure of the pellicle membrane The structure of the pellicle film 11B is not particularly limited, and may be a single-layer structure or a laminated structure. Among them, the structure of the pellicle film 11B is preferably a laminated structure from the viewpoint of ease of manufacturing the pellicle film 11B. The laminated structure is, for example, a laminate of a first film portion (hereinafter also referred to as an "unprocessed film") and a pair of third film portions (hereinafter also referred to as a "pair of second processed films"). The pair of second processed films is a flat film including an area corresponding to a pair of long side areas RA21 (a pair of thick film portions TB). In other words, the second processed film does not have a film portion in an area corresponding to the exposure area RA1. Each of the unprocessed film and the pair of second processed films may be a single-layer film or a laminated film in which multiple single-layer films are stacked. The material of each of the multiple single-layer films may be the same or different. The pair of second processed films may be on the support frame 12A side of the pellicle film 11B, or may be on the opposite side to the support frame 12A side of the pellicle film 11B. In particular, from the viewpoint of preventing foreign matter from entering the opening H12A from the inner peripheral wall of the through hole of the second processed film, it is preferable that the pair of second processed films are stacked on the surface of the support frame 12A side of the unprocessed film. In other words, it is preferable that the pair of second processed films are on the opposite side to the support frame 12A side of the pellicle film 11B. In other words, it is preferable that the support frame 12A, the unprocessed film, and the pair of second processed films are arranged in this order from the downward direction (Z-axis negative direction) to the upward direction (Z-axis positive direction). Foreign matter entering from the pair of second processed films includes fiber waste of the pair of second processed films.

[0183] (2.1.1.5) Pellicle membrane material Material of pellicle membrane 11B teeth There are no particular limitations on the material, and examples of the material include those exemplified as the material for the pellicle membrane 11A. When the pellicle film 11B is a laminated structure, the material of the unprocessed film and the material of the pair of second processed films may be the same or different. In particular, it is preferable that the material of pellicle film 11B contains carbon nanotubes. By making pellicle film 11B a CNT film, good mechanical strength can be obtained.

[0184] (2.1.1.5.1) Antioxidant layer Other layers may be laminated on the pellicle membrane 11B. An antioxidant layer may be laminated on at least one side of the pellicle membrane 11B. Examples of the antioxidant layer include the same antioxidant layers as those exemplified as the antioxidant layer that may be laminated on the pellicle membrane 11A.

[0185] When pellicle film 11B includes a CNT film and other layers are laminated on the CNT film, the thickness of the CNT film is preferably thicker than the thickness of the other layers. When pellicle membrane 11B includes a CNT film and another layer is laminated on the CNT film, it is preferable that the outermost layer among the layers constituting pellicle membrane 11B is another layer. When pellicle membrane 11B includes a CNT membrane and other layers are laminated on the CNT membrane, in another embodiment, the thickness of the CNT membrane is preferably 50% or more of the total thickness of pellicle membrane 11B including the other layers, and more preferably 70% or more.

[0186] (2.1.1.6) Physical properties of pellicle membrane It is preferable that the physical properties of pellicle film 11B are similar to the physical properties exemplified as the physical properties of pellicle film 11A.

[0187] (2.1.2) Variations The pellicle film 11B may have a first film portion and a second film portion. The first film portion does not have a through hole. The second film portion does not have a film portion in an area corresponding to the exposure area RA1. The second film portion is laminated in an area corresponding to the thick film portion TB of the first film portion (i.e., a pair of long side areas RA21) and on the surface of the first film portion opposite the support frame 12A side. The first film portion is similar to the first film portion 11A1 (see FIG. 10) exemplified in the modified example of the first embodiment. The second film portion is similar to the second film portion 11A2 (see FIG. 10) exemplified in the modified example of the first embodiment, except that the second film portion is laminated in an area corresponding to the thick film portion TB of the first film portion (i.e., a pair of long side areas RA21).

[0188] (2.2) Exposed master The exposure master according to the second embodiment of the present disclosure includes a master and a pellicle 10B attached to the master. The exposure master according to the second embodiment of the present disclosure includes the pellicle 10B, and therefore provides the same effects as the pellicle 10B. The exposure master according to the second embodiment of the present disclosure is similar to the exposure master according to the first embodiment of the present disclosure, except that the pellicle 10B is used instead of the pellicle 10A.

[0189] (2.3) Exposure equipment The exposure apparatus according to the second embodiment of the present disclosure includes a light source, an exposure master according to the second embodiment of the present disclosure, and an optical system. The light source emits exposure light. The optical system guides the exposure light emitted from the light source to the exposure master. The exposure master is disposed such that the exposure light emitted from the light source passes through the pellicle film 11B and is irradiated onto the master. Therefore, the exposure apparatus according to the second embodiment of the present disclosure achieves the same effects as the exposure master according to the second embodiment of the present disclosure. The exposure apparatus according to the second embodiment of the present disclosure is similar to the exposure apparatus according to the first embodiment, except that an exposure master according to the second embodiment of the present disclosure is used instead of an exposure master according to the first embodiment of the present disclosure.

[0190] (2.4) Manufacturing method of pellicle Examples of the method for manufacturing a pellicle according to the second embodiment of the present disclosure include a third manufacturing method and a fourth manufacturing method. The third and fourth manufacturing methods will be described below in this order.

[0191] (2.4.1) Third manufacturing method The third production method of the present disclosure includes: A method of manufacturing a pellicle (10B), comprising the steps of: preparing a support frame 12A; Providing a first film; providing a second film; a first connecting step of connecting a support frame 12A to a portion of one main surface of the first membrane; a lamination step of laminating a second film on at least a pair of regions of the other main surface of the first film corresponding to the long side regions RA21 (i.e., the thick film portion TB) to form a pellicle film 11B; Includes.

[0192] According to the third manufacturing method, a pellicle 10B can be obtained that is capable of suppressing damage to pellicle membrane 11B caused by the pressure difference between the inside and outside of pellicle 10B.

[0193] The third manufacturing method of the present disclosure is similar to the first manufacturing method of the present disclosure, except that instead of laminating a second film in an area of ​​the other main surface of the first film that corresponds to at least the peripheral area RA2 (i.e., the thick film portion TA), a second film is laminated in an area of ​​the other main surface of the first film that corresponds to at least a pair of long side areas RA21 (i.e., the thick film portion TB).

[0194] (2.4.2) Fourth manufacturing method The fourth production method of the present disclosure includes: A method of manufacturing a pellicle (10B), comprising the steps of: preparing a support frame 12A; A step of preparing a pellicle membrane 11B; a second connecting step of connecting the support frame 12A to the pellicle membrane 11B; Includes.

[0195] According to the fourth manufacturing method of the present disclosure, a pellicle 10B can be obtained that is capable of suppressing damage to pellicle membrane 11B caused by the pressure difference between the inside and outside of pellicle 10B.

[0196] The fourth manufacturing method of the present disclosure is similar to the second manufacturing method of the present disclosure, except that pellicle membrane 11B is prepared instead of pellicle membrane 11A.

[0197] The method for preparing the pellicle film 11B is not particularly limited. For example, the pellicle film 11B may have carbon nanotubes, and the thick film portion TB (i.e., the pair of long side regions RA21) may be formed by a spray coating method or an inkjet method. The spray coating method or the inkjet method may be a known method.

[0198] (2.5) Manufacturing method for semiconductor device The method for manufacturing a semiconductor device according to the second embodiment of the present disclosure includes a reflecting step and an exposing step. In the reflecting step, the exposure light emitted from the light source is transmitted through the pellicle film 11B of the original plate and irradiated onto the original plate, and is reflected by the original plate. In the exposing step, the exposure light reflected by the original plate is transmitted through the pellicle film 11B and irradiated onto the sensitive substrate, thereby exposing the sensitive substrate in a pattern. The reflecting step and the exposing step are performed in this order. According to the manufacturing method of the semiconductor device according to the second embodiment of the present disclosure, even when EUV light is used, in which resolution defects due to foreign matter are likely to be a problem, a semiconductor device in which resolution defects due to foreign matter are reduced can be obtained.

[0199] The method for manufacturing a semiconductor device according to the second embodiment of the present disclosure is similar to the method for manufacturing a semiconductor device according to the first embodiment of the present disclosure, except that pellicle film 11B is used instead of pellicle film 11A.

[0200] (3) Third embodiment (3.1) Pellicle Hereinafter, a pellicle 10C according to a third embodiment of the present disclosure will be described with reference to Fig. 13. The pellicle 10C satisfies (ii) above. Fig. 13 is a top view showing the appearance of the pellicle 10C according to the third embodiment of the present disclosure.

[0201] Pellicle 10C is similar to pellicle 10A according to the first embodiment, except that the support frame is square and the thick film portions are located along the center of each of the four sides of the support frame. 13, the pellicle 10C includes a pellicle film 11C and a support frame 12C. The support frame 12C has an opening H12C. The pellicle film 11C is supported by the support frame 12C. The pellicle film 11C is in contact with the support frame 12C. In the third embodiment of the present disclosure, as shown in FIG. 13, the outline of the opening H12C of the support frame 12C is square in plan view.

[0202] Hereinafter, the direction in which a pair of parallel first sides of the outline of the square opening H12C extends in a plan view is defined as the left-right direction. The direction in which a pair of parallel second sides of the outline of the square opening H12C extends in a plan view is defined as the front-rear direction. The thickness direction of the support frame 12C is defined as the up-down direction. In the up-down direction, the side of the pellicle film 11C on which the support frame 12C is arranged is defined as the lower side, and the opposite side is defined as the upper side. In FIG. 13, the right side corresponds to the positive X-axis direction, the left side corresponds to the negative X-axis direction, the front side corresponds to the positive Y-axis direction, the rear side corresponds to the negative Y-axis direction, the upper side corresponds to the positive Z-axis direction, and the lower side corresponds to the negative Z-axis direction.

[0203] (3.1.1) Pellicle membrane The pellicle film 11C differs from the pellicle film 11A according to the first embodiment in that the thick film portion TC is not formed over the entire peripheral region RA2.

[0204] (3.1.1.1) Self-supporting membrane area and supported area As shown in FIG. 13, the pellicle membrane 11C has a free-standing membrane region RA and a supported region RB in a plan view.

[0205] 13, the free-standing film region RA includes an exposure region RA1 and a peripheral region RA2 in a plan view. In the pellicle film 11C, the peripheral region RA2 surrounds the exposure region RA1. In the third embodiment of the present disclosure, the exposure region RA1 and the peripheral region RA2 are adjacent to each other.

[0206] The peripheral region RA2 has a pair of first central regions RA22 and a pair of second central regions RA23. The support frame 12C is a square frame formed by a pair of first side portions 124 and a pair of second side portions 125. The pair of first central regions RA22 are formed along the first side portions 124 in a first extension direction (X-axis direction) in which the first side portions 124 extend. The pair of first central regions RA23 are formed along the second side portions 125 in a second extension direction (Y-axis direction) in which the second side portions 125 extend.

[0207] A pair of first central regions RA22 refer to the region of the peripheral region RA2 between two points E3, E4 that are separated in the first extension direction (X-axis direction) by a distance L9 (see FIG. 13) that indicates at least 5% of the length L1 (see FIG. 13) of the opening H12C in the first side portion 124 from the center 1240 of the first side portion 124 toward one side and the other side.

[0208] A pair of first central regions RA23 refer to the region of the peripheral region RA2 between two points E5, E6 that are separated in the second extension direction (Y-axis direction) by a distance L9 (see Figure 13) that indicates at least 5% of the length L1 (see Figure 13) of the opening H12C in the second side portion 125 from the center 1250 of the second side portion 125 toward one side and the other side.

[0209] The distance L9 is 5% or more of the length L1 of the opening H12C at the first side portion 124 or the length L1 of the opening H12C at the second side portion 125, and from the viewpoint of suppressing damage to the pellicle membrane 11C caused by the pressure difference between the inside and outside of the pellicle 10C, it is preferably 7% or more and 50% or less, and more preferably 10% or more and 45% or less.

[0210] (3.1.1.2) Pellicle membrane thickness The peripheral region RA2 of the pellicle film 11C has four thick film portions TC that are thicker than the film thickness of the exposure region RA1. In the third embodiment, each of the four thick film portions TC is located in a pair of first central regions RA22 and a pair of second central regions RA23 in the peripheral region RA2. As a result, the mechanical strength of each of the pair of first central regions RA22 and the pair of second central regions RA23 is higher than the mechanical strength of the exposure region RA1. In the third embodiment, the stress on the pellicle film caused by the pressure difference between the inside and outside of the pellicle is likely to be large in the first central region RA22 and the pair of second central regions RA23. As a result, the pellicle film 11C can suppress damage to the pellicle film 11C caused by the pressure difference between the inside and outside of the pellicle 10C more than a configuration in which the film thickness of the pair of first central regions RA22 and the pair of second central regions RA23 is the same as the film thickness of the exposure region RA1. In particular, by providing the thick film portion TC so as to straddle the edge of the support frame 12C from the peripheral region RA2 toward the outer edge of the support frame 12C, damage to the pellicle film 11C due to stress concentration on the pellicle film 11C at the edge of the support frame 12C can be easily suppressed.

[0211] The ratio of the thickness of each of the pair of first central regions RA22 and the pair of second central regions RA23 (i.e., the thickness of the thick film portion TC) to the thickness of the exposure region RA1 is preferably 1.5 to 100. This makes it possible to further suppress damage to the pellicle film 11C caused by the pressure difference between the inside and outside of the pellicle 10C, and is also excellent in manufacturing cost. The lower limit of the ratio of the film thickness of each of the pair of first central regions RA22 and the pair of second central regions RA23 to the film thickness of the exposure region RA1 is more preferably 1.9 times or more, even more preferably 5 times or more, and particularly preferably 10 times or more, in order to further suppress damage to the pellicle membrane 11C caused by the pressure difference inside and outside the pellicle 10C. The upper limit of the ratio of the film thickness of each of the pair of first central regions RA22 and the pair of second central regions RA23 to the film thickness of the exposure region RA1 is preferably 70 times or less, more preferably 50 times or less, from the viewpoint of manufacturing costs.

[0212] The thick film portion TC needs to be located at least in a pair of first central regions RA22 and a pair of second central regions RA23, and may be located only in the pair of first central regions RA22 and a pair of second central regions RA23, or may be located in a region other than the pair of first central regions RA22 and the pair of second central regions RA23 in addition to the pair of first central regions RA22 and the pair of second central regions RA23.

[0213] (3.1.1.3) Film Thickness Measurement Method The method for measuring the film thickness of the exposure region RA1 and the pair of first central regions RA22 and the pair of second central regions RA23 is similar to the method for measuring the film thickness of the exposure region RA1 and the film thickness of the peripheral region RA2 of the pellicle film 11A, respectively.

[0214] (3.1.1.4) Structure of the pellicle membrane The structure of the pellicle film 11C is not particularly limited, and may be a single-layer structure or a laminated structure. Among them, the structure of the pellicle film 11C is preferably a laminated structure from the viewpoint of ease of manufacturing the pellicle film 11C. The laminated structure is, for example, a laminate of a first film portion (hereinafter also referred to as an "unprocessed film") and four fourth film portions (hereinafter also referred to as "four third processed films"). The four third processed films are flat films including areas corresponding to a pair of first central regions RA22 and a pair of second central regions RA23. Each of the unprocessed film and the four third processed films may be a single-layer film or a laminated film in which multiple single-layer films are stacked. The material of each of the multiple single-layer films may be the same or different. The four third processed films may be on the support frame 12C side of the pellicle film 11C, or on the opposite side of the support frame 12C side of the pellicle film 11C. In particular, from the viewpoint of preventing foreign matter from entering the opening H12C from the inner peripheral wall of the through hole of the third processed film, it is preferable that the four third processed films are stacked on the surface of the support frame 12C side of the unprocessed film. In other words, it is preferable that the four third processed films are on the opposite side of the support frame 12C side of the pellicle film 11C. In other words, it is preferable that the support frame 12C, the unprocessed film, and the four third processed films are arranged in this order from the downward direction (Z-axis negative direction) to the upward direction (Z-axis positive direction). Foreign matter entering from the four third processed films includes fiber waste of the four third processed films.

[0215] (3.1.1.5) Pellicle membrane material Pellicle membrane 11C material teeth There are no particular limitations on the material, and examples of the material include those exemplified as the material for the pellicle membrane 11A. When the pellicle film 11C is a laminated structure, the material of the unprocessed film and the material of the pair of second processed films may be the same or different. In particular, the material of pellicle film 11C preferably contains carbon nanotubes. By making pellicle film 11C a CNT film, good mechanical strength can be obtained.

[0216] (3.1.1.5.1) Antioxidant layer Other layers may be laminated on the pellicle membrane 11C. An antioxidant layer may be laminated on at least one side of the pellicle membrane 11C. Examples of the antioxidant layer include the same antioxidant layers as those exemplified as the antioxidant layer that may be laminated on the pellicle membrane 11A.

[0217] When the pellicle film 11C includes a CNT film and other layers are laminated on the CNT film, the thickness of the CNT film is preferably thicker than the thickness of the other layers. When pellicle membrane 11C includes a CNT film and another layer is laminated on the CNT film, it is preferable that the outermost layer among the layers constituting pellicle membrane 11C is another layer. When pellicle membrane 11C includes a CNT membrane and other layers are laminated on the CNT membrane, in another embodiment, the thickness of the CNT membrane is preferably 50% or more of the total thickness of pellicle membrane 11C including the other layers, and more preferably 70% or more.

[0218] (3.1.1.6) Physical properties of pellicle membrane It is preferable that the physical properties of pellicle film 11C are similar to the physical properties exemplified as the physical properties of pellicle film 11A.

[0219] (3.1.2) Support Frame Support frame 12C is similar to support frame 12A except for the shape of the frame. The support frame 12C is a cylindrical object. In a plan view, the support frame 12C is a square frame formed by a pair of first side portions 124 and a pair of second side portions 125. The support frame 12C has an opening H12C. The opening H12C is a through hole for EUV exposure. During EUV exposure, the EUV light transmitted through the exposure region RA1 of the pellicle film 11C passes through the opening H12C and reaches the original.

[0220] (3.1.3) Variations The pellicle film 11C may have a first film portion and a second film portion. The first film portion does not have a through hole. The second film portion does not have a film portion in an area corresponding to the exposure area RA1. The second film portion is laminated in an area corresponding to the thick film portion TC of the first film portion (i.e., a pair of first central areas RA22 and a pair of second central areas RA23) and on the surface of the first film portion opposite the support frame 12A side. The first film portion is similar to the first film portion 11A1 (see FIG. 10) of the modified example of the first embodiment. The second film portion is similar to the second film portion 11A2 (see FIG. 10) of the modified example of the first embodiment, except that the second film portion is laminated in the region corresponding to the thick film portion TC of the first film portion (i.e., the pair of first central regions RA22 and the pair of second central regions RA23).

[0221] (3.2) Exposed master The exposure master according to the third embodiment of the present disclosure includes a master and a pellicle 10C attached to the master. The exposure master according to the third embodiment of the present disclosure includes the pellicle 10C, and therefore provides the same effects as the pellicle 10C. The exposure master according to the third embodiment of the present disclosure is similar to the exposure master according to the first embodiment of the present disclosure, except that a pellicle 10C is used instead of the pellicle 10A.

[0222] (3.3) Exposure equipment The exposure apparatus according to the third embodiment of the present disclosure includes a light source, an exposure master according to the third embodiment of the present disclosure, and an optical system. The light source emits exposure light. The optical system guides the exposure light emitted from the light source to the exposure master. The exposure master is disposed such that the exposure light emitted from the light source passes through a pellicle film 11C and is irradiated onto the master. Therefore, the exposure apparatus according to the third embodiment of the present disclosure achieves the same effects as the exposure master according to the third embodiment of the present disclosure. The exposure apparatus according to the third embodiment of the present disclosure is similar to the exposure apparatus according to the first embodiment, except that an exposure master according to the third embodiment of the present disclosure is used instead of an exposure master according to the first embodiment of the present disclosure.

[0223] (3.4) Manufacturing method of pellicle The present disclosure 3 As the method for manufacturing a pellicle according to the embodiment, a fifth manufacturing method and a sixth manufacturing method can be mentioned. The fifth and sixth production methods will be described below in this order.

[0224] (3.4.1) Fifth manufacturing method The fifth production method of the present disclosure includes: A method of manufacturing a pellicle 10C, comprising the steps of: preparing a support frame 12C; providing a first film; providing a second film; a first connecting step of connecting a support frame 12C to a portion of one main surface of the first membrane; a lamination step of laminating a second film on at least a region of the other main surface of the first film corresponding to the pair of first central regions RA22 and the pair of second central regions RA23 (i.e., the thick film portion TC) to form a pellicle film 11C; Includes.

[0225] According to the fifth manufacturing method, a pellicle 10C can be obtained that is capable of suppressing damage to pellicle membrane 11C caused by the pressure difference between the inside and outside of pellicle 10C.

[0226] The fifth manufacturing method of the present disclosure is similar to the first manufacturing method of the present disclosure, except that instead of laminating a second film in an area of ​​the other main surface of the first film that corresponds to at least the peripheral region RA2 (i.e., the thick film portion TA), a second film is laminated in an area of ​​the other main surface of the first film that corresponds to at least a pair of first central regions RA22 and a pair of second central regions RA23 (i.e., the thick film portion TC).

[0227] (3.4.2) Sixth manufacturing method The sixth production method of the present disclosure comprises: A method of manufacturing a pellicle 10C, comprising the steps of: preparing a support frame 12C; A step of preparing a pellicle membrane 11C; a second connecting step of connecting the support frame 12C to the pellicle membrane 11C; Includes.

[0228] According to the sixth manufacturing method of the present disclosure, a pellicle 10C can be obtained that is capable of suppressing damage to pellicle membrane 11C caused by the pressure difference between the inside and outside of pellicle 10C.

[0229] The sixth manufacturing method of the present disclosure is similar to the second manufacturing method of the present disclosure, except that pellicle membrane 11C is prepared instead of pellicle membrane 11A.

[0230] The method for preparing the pellicle film 11C is not particularly limited. For example, the pellicle film 11C may have carbon nanotubes, and the thick film portion TC (i.e., the pair of first central regions RA22 and the pair of second central regions RA23) may be formed by a spray coating method or an inkjet method. The spray coating method or the inkjet method may be a known method.

[0231] (3.5) Manufacturing method for semiconductor device The manufacturing method of the semiconductor device according to the third embodiment of the present disclosure includes a reflecting step and an exposing step. In the reflecting step, the exposure light emitted from the light source is transmitted through the pellicle film 11C of the exposure master, irradiated onto the master, and reflected by the master. In the exposing step, the exposure light reflected by the master is transmitted through the pellicle film 11C and irradiated onto the sensitive substrate, thereby exposing the sensitive substrate in a pattern. The reflecting step and the exposing step are performed in this order. According to the semiconductor device manufacturing method of the third embodiment of the present disclosure, even when EUV light is used, in which resolution defects due to foreign matter are likely to be a problem, a semiconductor device in which resolution defects due to foreign matter are reduced can be obtained.

[0232] The method for manufacturing a semiconductor device according to the third embodiment of the present disclosure is similar to the method for manufacturing a semiconductor device according to the first embodiment of the present disclosure, except that pellicle film 11C is used instead of pellicle film 11A. EXAMPLES

[0233] The present disclosure will be described in further detail below with reference to examples, but the invention of the present disclosure is not limited to these examples. In this example, the film thickness of the exposure region and the film thickness of the peripheral region were each determined by the above-mentioned method.

[0234] [1] Example 1 In Example 1, a pellicle in which the support frame 120 is a rectangular frame body and the thick film portion is located over the entire peripheral region RC2 was produced as follows. In the pellicle of Example 1, the CNT film is in contact with the support frame 120 and covers the entire opening H120 of the support frame 120.

[0235] [1.1] Preparation process As the CNTs, single-walled CNTs (crude CNTs, manufactured by Meijo Nano Carbon Co., Ltd., product name: EC1.5-P, tube diameter: 1 nm to 3 nm, tube length: 100 nm or more) synthesized by an improved direct injection pyrolysis synthesis method (eDIPS method) were prepared.

[0236] [1.2] CNT dispersion manufacturing process To 30 mg of single-walled CNTs synthesized by the improved direct injection pyrolysis synthesis method (eDIPS method), 70 mL of isopropyl alcohol and 30 mL of ethanol were added, and 30 mg of polyacrylic acid was further added as an additive. The mixture was stirred using a magnetic stirrer at 1000 rpm (revolutions per minute) at 40°C for 18 hours to obtain a CNT dispersion.

[0237] [1.3]CNT film manufacturing process An 8-inch silicon wafer (hereinafter also referred to as "silicon substrate") was prepared. The CNT dispersion liquid was spin-coated onto the silicon substrate at a rotation speed of 1500 rpm to obtain a thin film 110A of CNTs (hereinafter also referred to as "CNT film 110A") on the silicon substrate. The size of the CNT film 110A was larger than a square with one side measuring 10 mm. Hereinafter, the silicon substrate and the CNT film 110A formed on the silicon substrate are collectively referred to as "film-coated substrate (A)."

[0238] The CNT film 110A was washed with water to remove the polyacrylic acid in the CNT film 110A and dried, and then the film-coated substrate (A) was immersed in water. Next, only the CNT film 110A was left in the water, and only the silicon substrate was taken out of the water, whereby the CNT film 110A was peeled off from the silicon substrate and floated on the water surface to produce the CNT film 110A having a mesh structure.

[0239] [1.4] Placement As the support frame, a silicon frame body 120 (hereinafter also referred to as "support frame 120") as shown in FIG. 14A was prepared. The support frame 120 was cylindrical. The support frame 120 had an opening H120. The opening H120 penetrated the support frame 120 along the thickness direction D of the support frame 120. The outline of the opening H120 as viewed from one side in the thickness direction D of the support frame 120 was a square with one side measuring 10 mm.

[0240] The CNT film 110A floating on the surface of the water was scooped up with the support frame 120, and the CNT film 110A was placed on the support frame 120 as shown in Fig. 14B, to obtain a first test piece 201. The CNT film 110A was in contact with the support frame 120, and covered the entire area of ​​the opening H120 of the support frame 120.

[0241] The above-mentioned preparation process, CNT dispersion liquid production process, and CNT film production process were performed to obtain a new film-coated substrate (A). The CNT film 110A of the obtained film-coated substrate (A) was mechanically rubbed to form a through hole H110 in the CNT film 110A, as shown in FIG. 14C, to obtain a CNT film 110B. The through hole H110 in the CNT film 110B was formed along the thickness direction of the CNT film 110B. The outline of the through hole in the CNT film 110B as viewed from one side in the thickness direction of the silicon substrate 130 was a square with one side having a length of 8 mm.

[0242] Hereinafter, the silicon substrate 130 and the CNT film 110B formed on the silicon substrate 130 will be collectively referred to as the "film-coated substrate (B)."

[0243] Regarding the film-coated substrate (B), the CNT film 110B was washed with water to remove the polyacrylic acid in the CNT film 110B and then dried, and the film-coated substrate (B) was then immersed in water. Next, the CNT film 110B was left in the water, and only the silicon substrate 130 was taken out of the water, whereby the CNT film 110B was peeled off from the silicon substrate 130.

[0244] This CNT film 110B was scooped up with the above-mentioned first test piece 201 (see FIG. 14B), thereby placing CNT film 110B on CNT film 110A to form a pellicle film 110, and a second test piece 202 shown in FIG. 15 was obtained as a pellicle.

[0245] The second test body 202 includes a pellicle film 110 and a support frame 120. The pellicle film 110 has a free-standing film region RC that covers an opening H120 of the support frame 120. The free-standing film region RC is composed of an exposure region RC1 and a peripheral region RC2. The peripheral region RC2 surrounds the exposure region RC1.

[0246] The film thickness of the exposure region RC1 and the film thickness of the peripheral region RC2 of the second test specimen 202 were measured by the above-mentioned method. The film thickness of the exposure region RC1 of the second test specimen 202 was 15 nm. The film thickness of the peripheral region RC2 of the second test specimen 202 was 30 nm.

[0247] [2] Comparative Example 1 A first specimen 201 was obtained as a pellicle in the same manner as in Example 1. In Comparative Example 1, a CNT film 110A corresponds to the pellicle film 110. The film thickness of the exposure region RC1 and the film thickness of the peripheral region RC2 of the first test specimen 201 were measured by the above-mentioned method. The film thickness of the exposure region RC1 of the first test specimen 201 was 15 nm. The film thickness of the peripheral region RC2 of the second test specimen 201 was 15 nm.

[0248] [3] Evaluation [3.1] Destructive evaluation using bulge tests For the pellicles obtained in Example 1 and Comparative Example 1, a destruction evaluation by a bulge test of the pellicle film 110 was performed as follows. 16A, a pellicle was fixed to a chamber 31 for a bulge test. At this time, the pellicle film 110 was placed on the inner side of the chamber 31. The inside of the chamber 31 was pressurized by flowing compressed air into the chamber 31, and a pressure ΔP was applied to the free-standing film region RC of the pellicle film 110. The pressure ΔP applied to the pellicle film 110 is represented by the difference between the pressure (atmospheric pressure) P1 outside the chamber 31 and the pressure P2 inside the chamber 31, and was measured by a differential pressure gauge 32. ΔP was adjusted by controlling the flow rate of the compressed air flowing inside the chamber 31 with a flow meter (not shown).

[0249] 16B, the air flow rate flowing into the chamber 31 was increased by 10 sccm at one-minute intervals, and the differential pressure ΔP generated at that time was recorded. When the pellicle membrane 110 ruptured, a hole was formed in the pellicle membrane 110, causing a significant drop in the differential pressure ΔP. The "pressure at which the pellicle membrane 110 ruptured" was measured from the value of the differential pressure ΔP immediately before the pellicle membrane 110 ruptured. The measurement results of the rupture pressure are shown in Table 2.

[0250] [Table 2]

[0251] In Table 2, "film thickness ratio" indicates the ratio of the film thickness in the peripheral region RC2 (thick film portion) to the film thickness in the exposure region RC1. In Table 2, "A" indicates that damage to the pellicle film 110 caused by the pressure difference between the inside and outside of the pellicle can be suppressed while maintaining the film thickness in the exposure region RC1. In Table 2, "B" indicates that damage to the pellicle film 110 caused by the pressure difference between the inside and outside of the pellicle could not be suppressed while maintaining the film thickness in the exposure region RC1.

[0252] As shown in Table 2, the pellicle of Example 1 comprises a support frame 120 having an opening H120, and a pellicle film 110 that covers the opening H120 and is supported by the support frame 120. The pellicle film 110 has a free-standing film region RC that covers the opening H120. The free-standing film region RC is composed of an exposure region RC1 and a peripheral region RC2 that surrounds the exposure region RC1. The peripheral region RC2 has a thick film portion that is thicker than the film thickness of the exposure region RC1. The support frame 120 is a rectangular frame body. The thick film portion is located over the entire peripheral region RC2. Therefore, the pressure at which the pellicle of Example 1 broke was 250 Pa when the film thickness of the peripheral region RC2 was thicker than the film thickness of the exposure region RC1. On the other hand, the pressure at which the pellicle of Comparative Example 1 broke, i.e., when the film thickness of peripheral region RC2 was not thicker than that of exposure region RC1, was 131 Pa. From these results, it was found that by making the film thickness of peripheral region RC2 thicker than that of exposure region RC1, it is possible to suppress damage to the pellicle film caused by the pressure difference between the inside and outside of the pellicle while maintaining the film thickness of exposure region RC1 (while maintaining the transmittance of EUV light).

[0253] [4] Example 2 In Example 2, a pellicle was produced as follows, in which the support frame 120 was a square frame body and the thick film portion TX was located along the center of each of the four sides of the support frame 120. In the pellicle of Example 2, similar to Example 1, the pellicle film 111 was in contact with the support frame 120 and covered the entire area of ​​the opening H120 of the support frame 120.

[0254] [4.1] Preparation process, CNT dispersion manufacturing process, and CNT film manufacturing process The preparation step, the CNT dispersion production step, and the CNT film production step of Example 1 were carried out to newly obtain a plurality of film-coated substrates (A). In the same manner as in Example 1, some of the multiple film-coated substrates (A) were washed with water and soaked in water to produce a CNT film 110A.

[0255] [4.2] Placement In the same manner as in Example 1, the CNT film 110A was scooped up by the support frame 120 to obtain a first test piece 201 (see FIG. 13B).

[0256] The CNT film 110A of the obtained film-coated substrate (A) was mechanically rubbed to obtain four CNT films 110C, as shown in Fig. 17A. The CNT film 110C had a rectangular shape with one pair of sides measuring 1.4 mm to 3.0 mm and a width of 2.0 mm, and the other pair of sides measuring 1.4 mm to 3.0 mm and a width of 2.0 mm.

[0257] Hereinafter, the silicon substrate 140 and the four CNT films 110C formed on the silicon substrate 140 will be collectively referred to as a "film-coated substrate (C)."

[0258] Regarding the film-coated substrate (C), the four CNT films 110C were washed with water to remove the polyacrylic acid in the CNT films 110C and dried, and then the film-coated substrate (C) was immersed in water. Next, the four CNT films 110C were left in the water, and only the silicon substrate 140 was taken out of the water, whereby the CNT films 110C were peeled off from the silicon substrate 140.

[0259] Each of the four CNT films 110C was picked up by the above-mentioned first test piece 201 (see FIG. 12B) and placed at the center of a pair of first sides and at the center of a pair of second sides of the support frame to form a pellicle film 111. In this way, a test piece 203 shown in FIG. 17B was obtained as a pellicle.

[0260] The test specimen 203 includes a pellicle membrane 111 and a support frame 120 . The pellicle film 111 of the specimen 203 has a free-standing film region RC that covers the opening H120 of the support frame 120 as shown in Fig. 18. The free-standing film region RC is composed of an exposure region RC1 and a peripheral region RC2. The peripheral region RC2 surrounds the exposure region RC1.

[0261] The peripheral region RC2 has four thick film portions TX. The support frame 120 is a square frame formed by a pair of first side portions 1201 and a pair of second side portions 1202. The length of the first side portion 1201 is the same as the length of the second side portion 1202. The two thick film portions TX are located in a pair of first central regions RC21 formed along the first side portion 1201 in the first extension direction D1 in which the first side portion 1201 extends in the peripheral region RC2. The two thick film portions TX are located in a pair of second central regions RC22 formed along the second side portion 1202 in the second extension direction D2 in which the second side portion 1202 extends in the peripheral region RC2.

[0262] The average edge coverage rate of the four thick film portions TX was 13%. The maximum edge coverage rate of the four thick film portions TX was 15%. The minimum edge coverage rate of the four thick film portions TX was 11%. Along the pair of first side portions 1201 hand The "side coverage" of the formed thick film portion TX indicates the ratio of a first length to the length of the opening H120 of the first side portion 1201 of the support frame 120 in the first extension direction D1. The "first length" indicates the shorter of the length from the center of the first side portion 1201 to one end of the thick film portion TX and the length from the center of the first side portion 1201 to the other end of the thick film portion TX in the first extension direction D1. Along the pair of second side portions 1202 hand The "side coverage" of the formed thick film portion TX indicates the ratio of a second length to the length of the opening H120 of the second side portion 1202 of the support frame 120 in the second extension direction D2. The "second length" indicates the shorter of the length from the center of the second side portion 1202 to one end of the thick film portion TX and the length from the center of the second side portion 1202 to the other end of the thick film portion TX in the second extension direction D2. For example, when the thick film portion TX is located in a region between a point 13% of the length of the opening H120 on one side from the center of the first side portion 1201 in the first extension direction D1 and a point 13% of the length of the opening H120 on the other side (in other words, when the thick film portion TX is located in a first central region RC21 having a length of 26% of the length of the opening H120 in the first extension direction D1), the coverage is 13%.

[0263] The thickness of the exposure region RC1 and the peripheral region RC2 of the specimen 203 were measured by the above-mentioned method. The thickness of the exposure region RC1 of the specimen 203 was 23 nm. In the peripheral region RC2 of the specimen 203, the thickness of the thick film portion TX was 47 nm, and the thickness of the region other than the thick film portion TX was 23 cm.

[0264] [5] Example 3 A specimen 203 was obtained in the same manner as in Example 2, except that the film thickness in the peripheral region and the film thickness in the exposure region were changed as shown in Table 3.

[0265] [6] Comparative Example 2 A first specimen 201 was obtained as a pellicle in the same manner as in Example 2. In Comparative Example 2, the CNT film 110A corresponds to the pellicle film 110. The film thickness of the exposure region RC1 and the film thickness of the peripheral region RC2 of the first test specimen 201 were measured by the above-mentioned method. The film thickness of the exposure region RC1 of the first test specimen 201 was 24 nm. The film thickness of the peripheral region RC2 of the second test specimen 201 was 24 nm.

[0266] [7] Evaluation [7.1] Destructive evaluation using bulge tests In the same manner as in the destruction evaluation by the bulge test described above, the film rupture evaluation was performed on the pellicles of Example 2, Example 3, and Comparative Example 2. The measurement results of the rupture pressure are shown in Table 3.

[0267] [Table 3]

[0268] In Table 3, "film thickness ratio" indicates the ratio of the film thickness of the thick film portion TX in the peripheral region RC2 to the film thickness in the exposure region RC1. In Table 3, "edge coverage rate" indicates the ratio of locations having thick film portions TX to the length of the opening H120 in the first edge portion 1201 in the first extension direction D1, or the ratio of locations having thick film portions TX to the length of the opening H120 in the second edge portion 1202 in the second extension direction D2. In Table 3, the "average" of "edge coverage rate" indicates the average value of the edge coverage rates of the four thick film portions TX. In Table 3, "Maximum" for "Edge Coverage" indicates the maximum value of the edge coverage of the four thick film portions TX. In Table 3, the "minimum" of the "edge coverage rate" indicates the minimum value of the edge coverage rate of the four thick film portions TX. In Table 3, "A" indicates that damage to the pellicle film 111 caused by the pressure difference between the inside and outside of the pellicle (i.e., the test piece 203) can be suppressed while maintaining the film thickness in the exposure region RC1. In Table 3, "B" indicates that damage to the pellicle film 111 caused by the pressure difference between the inside and outside of the pellicle (i.e., test piece 203) could not be suppressed while maintaining the film thickness in the exposure region RC1.

[0269] As shown in Table 3, the pellicles of Examples 2 and 3 include a support frame 120 having an opening H120, and a pellicle film 111 that covers the opening H120 and is supported by the support frame 120. The pellicle film 111 has a free-standing film region RC that covers the opening H120. The free-standing film region RC is composed of an exposure region RC1 and a peripheral region RC2 that surrounds the exposure region RC1. The peripheral region RC2 has a thick film portion TX that is thicker than the film thickness of the exposure region RC1. The support frame 120 is a rectangular frame body. The two thick film portions TX are located in a pair of first central regions RC21. The two thick film portions TX are located in a pair of second central regions RC22. Therefore, the pressure at which the pellicles of Examples 2 and 3 broke was 424 Pa or higher when the film thickness of the first central region RC21 and second central region RC22 was thicker than the film thickness of the exposure region RC1. On the other hand, the pressure at which the pellicle of Comparative Example 2 broke, i.e., when the film thickness of the first central region RC21 and the second central region RC22 was not thicker than the film thickness of the exposure region RC1, was 310 Pa. From these results, it was found that when the support frame 120 is a square frame body, by making the film thickness of the first central region RC21 and the second central region RC22 thicker than the film thickness of the exposure region RC1, it is possible to suppress damage to the pellicle film caused by the pressure difference between the inside and outside of the pellicle while maintaining the film thickness of the exposure region RC1 (while maintaining the transmittance of EUV light).

[0270] The disclosure of Japanese Patent Application No. 2021-061642, filed on March 31, 2021, is incorporated by reference in its entirety into this specification. All publications, patent applications, and standards mentioned in this specification are herein incorporated by reference to the same extent as if each individual publication, patent application, or standard was specifically and individually indicated to be incorporated by reference.

Claims

1. A support frame having an opening; a pellicle membrane covering the opening and supported by the support frame; Equipped with the pellicle membrane has a free-standing membrane region covering the opening; the free-standing film region includes an exposure region and a peripheral region surrounding the exposure region, the peripheral region has a thick film portion having a film thickness greater than a film thickness of the exposure region, Satisfying either (i) or (ii) below, The pellicle film has a first film portion having no through-holes and a second film portion having no film portion in a region corresponding to the exposure region, the first film portion has a first CNT layer including carbon nanotubes, the second film portion has a second CNT layer including carbon nanotubes, a total thickness of the first CNT layer and the second CNT layer in the thick film portion is 1.5 to 100 times the thickness of the first CNT layer in the exposure region. (i) the support frame is a rectangular frame body formed by a pair of long sides and a pair of short sides, the thick film portion is located in at least a pair of long side regions formed along the long side portion in the peripheral region in an extension direction of the long side portion, The pair of long side regions refer to regions between two points in the peripheral region that are spaced apart from each other by a distance that represents at least 5% of the length of the opening of the long side portion from the center of the long side portion toward one side and the other side in the extension direction. (ii) the support frame is a square frame body formed by a pair of first side portions and a pair of second side portions, The thick film portion is, in the peripheral region, a pair of first central regions formed along the first side portion in a first extension direction in which the first side portion extends; a pair of second central regions formed along the second side portion in a second extending direction in which the second side portion extends; Located at least The pair of first central regions indicate regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of a length of the opening of the first side portion from a center of the first side portion toward one side and the other side in the first extension direction, The pair of second central regions indicate regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of a length of the opening of the second side portion toward one side and the other side from a center of the second side portion in the second extension direction.

2. The pellicle described in claim 1 , wherein the second membrane portion is laminated in an area corresponding to the thick membrane portion of the first membrane portion and on a surface of the first membrane portion opposite the support frame side.

3. The original version and The pellicle according to claim 1 or 2 attached to the master. An exposure master comprising:

4. A light source that emits exposure light; The exposure master according to claim 3 ; an optical system that guides the exposure light emitted from the light source to the exposure master; Equipped with an exposure apparatus, the original plate being positioned such that the exposure light emitted from the light source is transmitted through the pellicle film and irradiated onto the original plate;

5. The exposure apparatus according to claim 4 , wherein the exposure light is EUV light.

6. A method for manufacturing the pellicle according to claim 1 or 2, comprising the steps of: providing the support frame; providing the pellicle membrane; a connecting step of connecting the support frame to the pellicle membrane; A method for manufacturing a pellicle, comprising:

7. The pellicle membrane comprises carbon nanotubes, The method for manufacturing a pellicle according to claim 6 , wherein in the step of preparing the pellicle membrane, the thick film portion is formed by a spray coating method or an inkjet method.

8. A support frame having an opening; a pellicle membrane covering the opening and supported by the support frame; Equipped with the pellicle membrane has a free-standing membrane region covering the opening; the free-standing film region includes an exposure region and a peripheral region surrounding the exposure region, the peripheral region has a thick film portion having a film thickness greater than a film thickness of the exposure region, Satisfying either (i) or (ii) below, A method for manufacturing a pellicle, wherein the thickness of the thick film portion is 1.5 to 100 times the thickness of the exposure region, providing the support frame; providing a first film; providing a second film; a connecting step of connecting the support frame to a portion of one main surface of the first membrane; a lamination step of laminating the second film on the other main surface of the first film to form the pellicle film; A method for manufacturing a pellicle, comprising: (i) the support frame is a rectangular frame body formed by a pair of long sides and a pair of short sides, the thick film portion is located at least in a pair of long side regions formed along the long side portion in the peripheral region in an extension direction of the long side portion, The pair of long side regions refer to regions between two points in the peripheral region that are spaced apart from each other by a distance that represents at least 5% of the length of the opening of the long side portion from the center of the long side portion toward one side and the other side in the extension direction. (ii) the support frame is a square frame body formed by a pair of first side portions and a pair of second side portions, The thick film portion is, in the peripheral region, a pair of first central regions formed along the first side portion in a first extension direction in which the first side portion extends; a pair of second central regions formed along the second side portion in a second extending direction in which the second side portion extends; Located at least The pair of first central regions indicate regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of a length of the opening of the first side portion toward one side and the other side from a center of the first side portion in the first extension direction, The pair of second central regions indicate regions between two points in the peripheral region that are spaced apart from each other by a distance that indicates at least 5% of a length of the opening of the second side portion toward one side and the other side from a center of the second side portion in the second extension direction.

9. A method for manufacturing a pellicle as described in claim 8, wherein the support frame is in contact with the pellicle membrane.

10. A method for producing a pellicle according to claim 1 or claim 2, comprising the steps of: providing the support frame; providing a first film; providing a second film; a connecting step of connecting the support frame to a portion of one main surface of the first membrane; A lamination step of laminating the second film on the other main surface of the first film to form the pellicle film. and A method for manufacturing a pellicle, comprising:

11. The method for manufacturing a pellicle according to any one of claims 8 to 10, wherein each of the first film and the second film contains carbon nanotubes.

12. The method for manufacturing a pellicle according to any one of claims 6 to 11, wherein the pellicle film includes a laminated film in which two or more CNT films made of carbon nanotubes are laminated.

13. a step of irradiating the exposure light emitted from a light source onto the original plate by transmitting the exposure light through the pellicle film of the exposure original plate according to claim 3 and reflecting the exposure light from the original plate; a step of exposing the sensitive substrate to a pattern by irradiating the sensitive substrate with the exposure light reflected by the original through the pellicle film; A method for manufacturing a semiconductor device comprising the steps of:

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